WO2020019702A1 - 掩膜板存放区定位装置 - Google Patents

掩膜板存放区定位装置 Download PDF

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Publication number
WO2020019702A1
WO2020019702A1 PCT/CN2019/074810 CN2019074810W WO2020019702A1 WO 2020019702 A1 WO2020019702 A1 WO 2020019702A1 CN 2019074810 W CN2019074810 W CN 2019074810W WO 2020019702 A1 WO2020019702 A1 WO 2020019702A1
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WIPO (PCT)
Prior art keywords
storage area
mask
sides
height
post
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PCT/CN2019/074810
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English (en)
French (fr)
Inventor
王威
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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Publication of WO2020019702A1 publication Critical patent/WO2020019702A1/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box

Definitions

  • the invention relates to the structure of an exposure machine, in particular to a positioning device for a mask storage area.
  • liquid crystal displays In recent years, small and medium-sized liquid crystal displays have developed rapidly.
  • an exposure machine In the manufacturing process of liquid crystal displays, an exposure machine is usually required, for example, an exposure machine is required in a low temperature polysilicon (LTPS) process.
  • LTPS low temperature polysilicon
  • the mask transfer system of the exposure machine involves the handling and storage of the mask.
  • the 6.5-generation line exposure machines used to produce liquid crystal displays need to manually carry the mask and place it in the mask buffer of the exposure machine.
  • a mask is retrieved from the mask storage area.
  • the mask storage area of the exposure machine can store a limited number of masks, and the mask case is frequently carried.
  • the mask unit is liable to hit the positioning push unit of the mask storage area, so that the sensor of the positioning advance unit is damaged.
  • the process of a single product may reach 12 layers and above.
  • the probability of abnormal operation is greatly increased, and the frequency of the sensor positioning the propulsion unit is damaged.
  • the number of masks that can be stored on the machine is limited, and the frequency of mask switching between machines is high. Model restrictions, bulky and poor visibility.
  • the mask unit is likely to hit the positioning advance unit of the mask storage area, thereby damaging the Sensor for positioning the propulsion unit.
  • the technical problem to be solved by the present invention is to provide a masking plate storage area positioning device, which can limit the masking plate placed in the masking plate storage area, so that the masking plate is only in a set range. Move inside.
  • the present invention provides a mask plate storage area positioning device, which includes a plurality of position detectors and a plurality of limit posts, and the position detectors are respectively disposed in one of the mask plate storage areas.
  • the two sides of the storage platform are used to detect the position of a mask plate placed on the storage platform, and the limiting columns are respectively disposed on the two sides of the storage platform in the mask plate storage area for A position of the mask plate placed in the mask plate storage area is defined, at least one limiting post is arranged on each side of the position detector, and the position detectors are located on both sides of the position detector.
  • the height of the limit post is higher than the height of the position detector.
  • Each limit post on both sides of the position detector includes a base post and a heightened post, and the heightened post is detachably installed on the base.
  • the mask plate storage area positioning device further includes at least two push-pull units, which are respectively disposed on both sides of the storage platform in the mask plate storage area, and the push-pull units can be moved along Move the mask vertically,
  • the position detector is arranged on a corresponding push-pull unit, at least one of the limit posts is arranged on each side of each push-pull unit, and the height of the limit posts on both sides of the push-pull unit is higher than The height of the push-pull unit.
  • the heightening post is a screw screwed on the base post.
  • the heights of all the limiting posts are higher than the height of the position detector.
  • the limiting pillars are respectively disposed corresponding to four sides of the mask plate.
  • the heights of all the limiting posts are higher than the height of the push-pull unit.
  • the present invention further provides a masking plate storage area positioning device, which includes a plurality of position detectors and a plurality of limit posts, and the position detectors are respectively disposed in one of the masking plate storage areas.
  • the two sides of the storage platform are used to detect the position of a mask plate placed on the storage platform, and the limiting columns are respectively disposed on the two sides of the storage platform in the mask plate storage area for A position of the mask plate placed in the mask plate storage area is defined.
  • At least one limit post is arranged on each side of the position detector, and the height of the limit post on both sides of the position detector is higher than that of the position detector. height.
  • each of the limit posts on both sides of the position detector includes a base post and a raised post, and the raised post is detachably mounted on the base post.
  • the heightening post is a screw screwed on the base post.
  • the heights of all the limiting posts are higher than the height of the position detector.
  • the limiting posts are respectively disposed on four sides of the mask plate.
  • the mask plate storage area positioning device further includes at least two push-pull units, the push-pull units are respectively disposed on both sides of the storage platform in the mask plate storage area, and the push-pull The unit can move in the direction in which the vertical mask is placed, and the position detector is disposed on the corresponding push-pull unit.
  • At least one limit post is arranged on each side of each push-pull unit, and the height of the limit post on both sides of the push-pull unit is higher than the height of the push-pull unit.
  • the heights of all the limiting posts are higher than the height of the push-pull unit.
  • An advantage of the present invention is that the limiting post is used to limit a mask plate placed in the mask plate storage area, so that the mask plate moves only within a set range.
  • Another advantage of the present invention is that the height of the limit posts provided on both sides of the position detector is higher than the height of the position detector, and the limit posts can support when the mask is accidentally misaligned.
  • the mask plate can further prevent the mask plate from being pressed against the position detector, and protect the position detector from being damaged.
  • FIG. 1 is a schematic plan view of the positioning device of the mask storage area positioning device according to the present invention.
  • FIG. 2 is a schematic diagram of a height comparison between the position detector and the limit post.
  • FIG. 1 is a schematic top plan view of a positioning device for a mask storage area of the present invention. Please refer to FIG. 1.
  • the positioning device of a mask storage area of the present invention includes a plurality of position detectors 1 and a plurality of limiting posts 2.
  • the X direction indicated by the arrow is the direction in which the mask plate 20 is put in and taken out.
  • the position detectors 1 are respectively disposed on two sides of a storage platform 10 in a mask storage area.
  • the position detector 1 is used to detect the position of the mask plate 20 placed on the storage platform 10 to position the mask plate 20.
  • the position detector 1 includes, but is not limited to, a position sensor. The number of the position detectors 1 can be limited according to actual needs.
  • the limiting posts 2 are respectively disposed on two sides of the storage platform 10 in the storage area.
  • the limiting post 2 is used to limit the position of the mask plate 20 placed in the mask plate storage area, so that the mask plate 20 moves only within a set range.
  • the limiting posts 2 are respectively provided on the four sides of the mask plate 20, that is, the limiting posts 2 are provided at the corresponding positions of the upper, lower, left, and right sides of the mask plate 20, so as to limit the mask.
  • a part of the limiting post 2 is also located on both sides of the position detector 1 at the same time.
  • at least one limiting post 2 is provided on each side of the position detector 1.
  • the two sides of the storage platform 10 in the storage area and the two sides of the position detector 1 are not in the same direction. Specifically, the two sides of the storage platform 10 in the storage area refer to the two sides in the X direction, that is, the upper and lower sides in FIG. 1; and the two sides of the position detector 1 refer to the Y direction. The two sides, that is, the left and right sides in Figure 1.
  • FIG. 2 is a schematic diagram of the height comparison between the position detector 1 and the limit post 2.
  • the relationship between the height H1 of the limit posts 2 disposed on both sides of the position detector 1 and the height H2 of the position detector 1 is H1> H2.
  • the height of other limit posts 2 may be higher than the position
  • the height of the detector 1 can be selected by those skilled in the art according to practical requirements.
  • Each limit post 2 provided on both sides of the position detector 1 includes a base post 3 and a raised post 4, and the raised post 4 is detachably installed on the base post. 3 on.
  • the raising column 4 can be removed and only the base column 3 remains, so that the height of the limiting column 2 can be reduced.
  • the heightening column 4 is a screw screwed on the base column 3, so when the height of the limit column 2 needs to be reduced, the heightening column 4 can be screwed to the base column 3 , Reducing the height of the portion of the heightening column 4 exposed outside the base column 3, thereby reducing the height of the limiting column 2.
  • the mask plate storage area positioning device further includes at least two push-pull units 5, which are respectively disposed on two sides of the storage platform 10 in the storage area. Only two push-pull units 5 are schematically shown in FIG. 1, and the two push-pull units 5 are respectively located on both sides of the storage platform 10. In other embodiments, the number of the push-pull units 5 can be performed according to practical requirements. Settings.
  • the push-pull unit 5 can move in a direction in which the mask plate 20 is placed. For example, if the mask 20 is placed in an X direction, the movement direction of the push-pull unit 5 is in a Y direction.
  • the position detector 1 is disposed on the push-pull unit 5 on the same side.
  • the push-pull unit 5 moves into the side wall of the mask storage area to drive the position detector 1 into
  • the side wall of the mask plate storage area protects the position detector 1; when the position detector 1 is required to work, the push-pull unit 5 is removed from the side wall of the mask plate storage area.
  • the position detector 1 is driven to move from the side wall of the mask storage area, so that the position detector 1 can work effectively.
  • At least one limit post 2 is provided on each side of each push-pull unit 5, and the height of the limit post 2 provided on both sides of the push-pull unit 5 is higher than the height of the push-pull unit 5.
  • the height of other limit posts 2 may also be higher than the push-pull unit 5.
  • the height of other limit posts 2 may also be higher than the push-pull unit 5.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

本发明提供一种掩膜板存放区定位装置，其优点在于，限位柱能够对放置在掩膜板存放区的掩膜板进行限位，以使所述掩膜板仅在设定范围内移动。

Description

掩膜板存放区定位装置 技术领域
本发明涉及曝光机的结构，尤其涉及一种掩膜板存放区定位装置。
 背景技术
近年来，中小尺寸液晶显示器发展迅猛，在液晶显示器的制程中，通常需要使用到曝光机，例如在低温多晶硅（LTPS）制程中需要使用到曝光机。曝光机的掩膜转印（mask transfer）系统涉及到掩膜板（mask）的搬运和储存。
 技术问题
目前用于生产液晶显示器的6.5代线的曝光机需要人工搬运掩膜板并将其放置在曝光机的掩膜板存放区（mask buffer）内，在工艺制程中，需要使用掩膜板时，则从所述掩膜板存放区调取掩膜板。曝光机的掩膜板存放区能够存放掩膜板的数量有限，掩膜板单元（mask case）被搬运的频率较高。在将掩膜板单元放置入曝光机的掩膜板存放区的过程中，掩膜板单元易撞击掩膜板存放区的定位推进单元（push unit），使得定位推进单元的传感器被损坏。对于膜层及工艺复杂的制程来说，例如低温多晶硅阵列基板（LTPS array）段的制程，单只产品工艺可能达到12层及以上，人工搬运掩膜板单元（mask case）的频率在每日20-50次/台机器，如此高的搬运频率，使得出现操作异常的概率被极大的提高，定位推进单元的传感器被损坏的频次较高。例如，对于尼康或者佳能（canon）等曝光机而言，机台能存储的掩膜板数量有限，掩膜板在机台间切换的频率较高，由于现有掩膜板台车受机台机型限制，笨重且视野不佳，在将掩膜板单元放置入曝光机的掩膜板存放区的过程中，掩膜板单元易撞击掩膜板存放区的定位推进单元，进而损坏所述定位推进单元的传感器。
 技术解决方案
本发明所要解决的技术问题是，提供一种掩膜板存放区定位装置，其能够限位放置在所述掩膜板存放区的掩膜板，以使所述掩膜板仅在设定范围内移动。
为了解决上述问题，本发明提供了一种掩膜板存放区定位装置，其包括多个位置检测器及多个限位柱，所述位置检测器分别设置在所述掩膜板存放区的一存放平台的两侧，用于检测放置在所述存放平台上的一掩膜板的位置，所述限位柱分别设置在所述掩膜板存放区的所述存放平台的两侧，用于限定放置在所述掩膜板存放区的所述掩膜板的位置，在所述位置检测器的两侧至少各排布有一个限位柱，并且位于所述位置检测器两侧的所述限位柱的高度高于所述位置检测器的高度，位于所述位置检测器两侧的每一限位柱包括一基柱及一增高柱，所述增高柱可拆卸地安装在所述基柱上，所述掩膜板存放区定位装置还包括至少两个推拉单元，所述推拉单元分别设置在所述掩膜板存放区的所述存放平台的两侧，且所述推拉单元能够沿垂直掩膜板放入的方向移动，所述位置检测器设置在相对应的推拉单元上，在每一推拉单元两侧至少各排布有一个所述限位柱，并且位于所述推拉单元两侧的所述限位柱的高度高于所述推拉单元的高度。
在一实施例中，所述增高柱为旋拧在所述基柱上的一螺丝。
在一实施例中，所有的限位柱的高度均高于所述位置检测器的高度。
在一实施例中，所述限位柱分别对应所述掩膜板的四边设置。
在一实施例中，所有的所述限位柱的高度均高于所述推拉单元的高度。
为了解决上述问题，本发明还提供了一种掩膜板存放区定位装置，包括多个位置检测器及多个限位柱，所述位置检测器分别设置在所述掩膜板存放区的一存放平台的两侧，用于检测放置在所述存放平台上的一掩膜板的位置，所述限位柱分别设置在所述掩膜板存放区的所述存放平台的两侧，用于限定放置在所述掩膜板存放区的所述掩膜板的位置。
在一实施例中，在所述位置检测器的两侧各排布有至少一个限位柱，并且位于所述位置检测器两侧的所述限位柱的高度高于所述位置检测器的高度。
在一实施例中，位于所述位置检测器两侧的每一限位柱包括一基柱及一增高柱，所述增高柱可拆卸地安装在所述基柱上。
在一实施例中，所述增高柱为旋拧在所述基柱上的螺丝。
在一实施例中，所有的所述限位柱的高度均高于所述位置检测器的高度。
在一实施例中，所述限位柱分别对应掩膜板的四边设置。
在一实施例中，所述掩膜板存放区定位装置还包括至少两个推拉单元，所述推拉单元分别设置在所述掩膜板存放区的所述存放平台的两侧，且所述推拉单元能够沿垂直掩膜板放入的方向移动，所述位置检测器设置在相对应的所述推拉单元上。
在一实施例中，在每一推拉单元两侧各排布有至少一个限位柱，并且位于所述推拉单元两侧的所述限位柱的高度高于所述推拉单元的高度。
在一实施例中，所有的所述限位柱的高度均高于所述推拉单元的高度。
 有益效果
本发明的优点在于，所述限位柱用于限位放置在所述掩膜板存放区的掩膜板，以使所述掩膜板仅在设定范围内移动。
本发明的另一优点在于，设置在所述位置检测器两侧的限位柱的高度高于所述位置检测器的高度，当掩膜板不慎放歪时，所述限位柱能够支撑所述掩膜板，进而能够避免所述掩膜板压到所述位置检测器，保护所述位置检测器，避免其被损坏。
 附图说明
图1是本发明掩膜板存放区定位装置的俯视结构示意图；
图2是所述位置检测器与所述限位柱高度比较示意图。
 本发明的实施方式
下面结合附图对本发明提供的掩膜板存放区定位装置的具体实施方式做详细说明。
本发明提供一种掩膜板存放区定位装置。图1是本发明掩膜板存放区定位装置的俯视结构示意图。请参阅图1，本发明掩膜板存放区定位装置包括多个位置检测器1及多个限位柱2。其中，箭头所示X方向为掩膜板20放入及取出的方向。
所述位置检测器1分别设置在掩膜板存放区的存放平台10的两侧。所述位置检测器1用于检测放置在存放平台10上的掩膜板20的位置，以对所述掩膜板20进行定位。所述位置检测器1包括但不限于位置传感器。所述位置检测器1的数量可根据实际需要进行限定。
所述限位柱2分别设置在所述存放区的存放平台10的两侧。所述限位柱2用于限定放置在所述掩膜板存放区的掩膜板20的位置，以使所述掩膜板20仅在设定范围内移动。在本实施例中，所述限位柱2分别对应掩膜板20的四边设置，即在所述掩膜板20的上下左右四边对应位置均设置有限位柱2，进而能够限定所述掩膜板20在上下左右方向的移动范围。此外，所述限位柱2的其中一部分还同时位于所述位置检测器1的两侧。在本实施例中，在所述位置检测器1的两侧至少各设置有一个限位柱2。
需要说明的是，所述存放区的存放平台10的两侧与所述位置检测器1的两侧并不是同一方向。具体地讲，所述存放区的存放平台10的两侧是指在X方向上的两侧，即图1中的上下两侧；而所述位置检测器1的两侧是指在Y方向上的两侧，即图1中的左右两侧。
进一步，图2是所述位置检测器1与所述限位柱2高度比较示意图。请参阅图2，设置在所述位置检测器1两侧的限位柱2的高度H1与所述位置检测器1的高度H2的关系为H1＞H2。其优点在于，当掩膜板20不慎放歪时，由于所述限位柱2的高度高于所述位置检测器1的高度，则所述限位柱2能够支撑所述掩膜板20，避免所述掩膜板20压到所述位置检测器1，从而保护所述位置检测器1，避免其受到损坏。在其它实施例中，除位于所述位置检测器1两侧的限位柱2的高度高于所述位置检测器1的高度之外，其它限位柱2的高度也可高于所述位置检测器1的高度，本领域技术人员可根据实务需求选择。
其中，请继续参阅图2，设置在所述位置检测器1两侧的每一限位柱2包括一基柱3及一增高柱4，所述增高柱4可拆卸地安装在所述基柱3上。当需要降低所述限位柱2的高度时，则可将所述增高柱4取下，仅保留基柱3，从而可降低所述限位柱2的高度。进一步，所述增高柱4为旋拧在所述基柱3上的螺丝，那么当需要降低所述限位柱2的高度时，则可将所述增高柱4向所述基柱3旋拧，降低增高柱4暴露于所述基柱3之外的部分的高度，从而可降低所述限位柱2的高度。
请继续参阅图1，所述掩膜板存放区定位装置还包括至少两个推拉单元5，所述推拉单元5分别设置在所述存放区的存放平台10的两侧。在图1中仅示意性地绘示两个推拉单元5，两个推拉单元5分别位于所述存放平台10的两侧，在其他实施例中，所述推拉单元5的数量可根据实务需求进行设置。所述推拉单元5能够沿垂直掩膜板20放入的方向移动，例如，所述掩膜板20放入的方向为X方向，则所述推拉单元5的移动方向为Y方向。所述位置检测器1设置在同侧的所述推拉单元5上。在所述掩膜板存放区中，在不需要所述位置检测器1工作时，所述推拉单元5移动进入所述掩膜板存放区的侧壁内，带动所述位置检测器1也进入所述掩膜板存放区的侧壁内，进而保护所述位置检测器1；在需要所述位置检测器1工作时，所述推拉单元5从所述掩膜板存放区的侧壁移出，带动所述位置检测器1也从所述掩膜板存放区的侧壁移出，使得所述位置检测器1能够有效工作。
进一步，在每一推拉单元5两侧至少各设置有一个限位柱2，并且设置在所述推拉单元5两侧的限位柱2的高度高于所述推拉单元5的高度。其优点在于，当掩膜板20不慎放歪时，由于所述限位柱2的高度高于所述推拉单元5的高度，则所述限位柱2能够支撑所述掩膜板20，避免所述掩膜板20压到所述推拉单元5，从而保护所述推拉单元5及位置检测器1，避免所述推拉单元5及位置检测器1受到损坏。在其它实施例中，除位于所述推拉单元5两侧的限位柱2的高度高于所述推拉单元5的高度之外，其它限位柱2的高度也可以高于所述推拉单元5的高度，本领域技术人员可根据实务需求选择。
以上所述仅是本发明的优选实施方式，应当指出，对于本技术领域的普通技术人员，在不脱离本发明原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本发明的保护范围。
 工业实用性
本申请的主题可以在工业中制造和使用，具备工业实用性。

Claims (14)

  1. 一种掩膜板存放区定位装置，其包括多个位置检测器及多个限位柱，所述位置检测器分别设置在所述掩膜板存放区的一存放平台的两侧，用于检测放置在所述存放平台上的一掩膜板的位置，所述限位柱分别设置在所述掩膜板存放区的所述存放平台的两侧，用于限定放置在所述掩膜板存放区的所述掩膜板的位置，在所述位置检测器的两侧至少各排布有一个限位柱，并且位于所述位置检测器两侧的所述限位柱的高度高于所述位置检测器的高度，位于所述位置检测器两侧的每一限位柱包括一基柱及一增高柱，所述增高柱可拆卸地安装在所述基柱上，所述掩膜板存放区定位装置还包括至少两个推拉单元，所述推拉单元分别设置在所述掩膜板存放区的所述存放平台的两侧，且所述推拉单元能够沿垂直掩膜板放入的方向移动，所述位置检测器设置在相对应的推拉单元上，在每一推拉单元两侧至少各排布有一个所述限位柱，并且位于所述推拉单元两侧的所述限位柱的高度高于所述推拉单元的高度。
  2. 根据权利要求1所述的掩膜板存放区定位装置，其中所述增高柱为旋拧在所述基柱上的一螺丝。
  3. 根据权利要求1所述的掩膜板存放区定位装置，其中所有的限位柱的高度均高于所述位置检测器的高度。
  4. 根据权利要求1所述的掩膜板存放区定位装置，其中所述限位柱分别对应所述掩膜板的四边设置。
  5. 根据权利要求1所述的掩膜板存放区定位装置，其中所有的所述限位柱的高度均高于所述推拉单元的高度。
  6. 一种掩膜板存放区定位装置，其包括多个位置检测器及多个限位柱，所述位置检测器分别设置在所述掩膜板存放区的一存放平台的两侧，用于检测放置在所述存放平台上的一掩膜板的位置，所述限位柱分别设置在所述掩膜板存放区的所述存放平台的两侧，用于限定放置在所述掩膜板存放区的所述掩膜板的位置。
  7. 根据权利要求6所述的掩膜板存放区定位装置，其中在所述位置检测器的两侧至少各排布有一个限位柱，并且位于所述位置检测器两侧的所述限位柱的高度高于所述位置检测器的高度。
  8. 根据权利要求7所述的掩膜板存放区定位装置，其中位于所述位置检测器两侧的每一限位柱包括一基柱及一增高柱，所述增高柱可拆卸地安装在所述基柱上。
  9. 根据权利要求8所述的掩膜板存放区定位装置，其中所述增高柱为旋拧在所述基柱上的一螺丝。
  10. 根据权利要求6所述的掩膜板存放区定位装置，其中所有的所述限位柱的高度均高于所述位置检测器的高度。
  11. 根据权利要求6所述的掩膜板存放区定位装置，其中所述限位柱分别对应所述掩膜板的四边设置。
  12. 根据权利要求6所述的掩膜板存放区定位装置，其中所述掩膜板存放区定位装置还包括至少两个推拉单元，所述推拉单元分别设置在所述掩膜板存放区的所述存放平台的两侧，且所述推拉单元能够沿垂直掩膜板放入的方向移动，所述位置检测器设置在相对应的所述推拉单元上。
  13. 根据权利要求12所述的掩膜板存放区定位装置，其中在每一推拉单元两侧至少各排布有一个限位柱，并且位于所述推拉单元两侧的所述限位柱的高度高于所述推拉单元的高度。
  14. 根据权利要求12所述的掩膜板存放区定位装置，其中所有的所述限位柱的高度均高于所述推拉单元的高度。
PCT/CN2019/074810 2018-07-24 2019-02-12 掩膜板存放区定位装置 Ceased WO2020019702A1 (zh)

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