WO2020019692A1 - 静电消除装置以及用于清洁静电针的清洁器 - Google Patents
静电消除装置以及用于清洁静电针的清洁器 Download PDFInfo
- Publication number
- WO2020019692A1 WO2020019692A1 PCT/CN2019/072805 CN2019072805W WO2020019692A1 WO 2020019692 A1 WO2020019692 A1 WO 2020019692A1 CN 2019072805 W CN2019072805 W CN 2019072805W WO 2020019692 A1 WO2020019692 A1 WO 2020019692A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrostatic
- electrostatic needle
- cleaner
- needle
- static elimination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
Definitions
- the invention relates to a static elimination device, in particular to a static elimination device having a cleaner.
- the thin-film transistor liquid crystal display panel and the organic light-emitting diode display panel have a conservative estimate of about 15,000 to 20,000 static elimination devices.
- the two important indicators of the static elimination device are the static elimination speed and the maintenance of ion balance.
- the static elimination device still has the following problems in practical use. For example, with the use of the static elimination device, its needle head will generate foreign matter at the static needle of the static elimination device due to physical and chemical factors, which directly affects Ion balance and static decay rate. Therefore, the static elimination device needs to invest a lot of manpower to clean the static elimination device and measure and monitor the equilibrium voltage and static decay rate. Due to the limitation of personnel monitoring and the stability of the measurement, As a result, many static elimination devices cannot be cleaned and measured in a timely and effective manner, resulting in frequent occurrence of electrostatic discharge and instability of the static elimination ability.
- the present invention provides a static elimination device to solve the problems that the accumulation of foreign matter on the electrostatic needle in the prior art directly affects the release balance of positive and negative ions, resulting in an increase in the equilibrium voltage and a decrease in the static decay rate.
- an embodiment of the present invention provides a static elimination device.
- the static elimination device includes:
- the bottom plate is provided with an electrostatic needle which generates positive or negative ions;
- a sensor configured to sense a foreign object in a needle of the electrostatic needle to generate a sensing signal
- the monitor includes a measurement terminal and a controller, the measurement terminal is used to measure the static electricity removing ability of the electrostatic needle, and the controller is used to determine whether to generate a driving signal according to the sensing signal or the signal of the measurement terminal ;
- a cleaner slidably disposed on the base plate for sliding the cleaner toward the electrostatic needle to remove a foreign object on the electrostatic needle when receiving the driving signal;
- a data collector that collects information received from the sensor and the monitor.
- the cleaner includes:
- a fitting groove which slidably fixes the cleaner to the bottom plate
- An electrostatic needle channel the opening of the electrostatic needle channel engaging the electrostatic needle
- a cleaning member located in the electrostatic needle channel to remove foreign matters on the electrostatic needle
- a protruding portion abutting a portion of the cleaning member with respect to the storage box of the housing, the protruding portion being configured to collect and limit the foreign matter to the storage of the housing Inside the box.
- the static elimination device further includes a driver located at the first end of the bottom plate.
- the driver includes a power generator and an electromagnet, and the driver receives the power from the monitor.
- the driving signal causes the electric power generator to generate a current and transmits the electric current to the electromagnet to form a magnetic field.
- the electromagnet receives the current and generates a magnetic force, and drives the cleaner to slide toward the second end of the bottom plate.
- the cleaner passes the sensor, such that When the cleaner is detected by the second segment of the sensor wave, the driver reduces the speed of the cleaner.
- the senor emits a first segment of the sensing wave and a second segment of the sensing wave, and the first segment of the sensing wave is emitted to the first side of the electrostatic needle.
- the senor further includes a third sensing wave, the third sensing wave senses a second side of the electrostatic needle, and the first sensing wave and the A third sensing wave measures the size of the foreign matter on the electrostatic needle.
- the static elimination ability is evaluated by analyzing an equilibrium voltage of the electrostatic needle and an electrostatic decay time, and when the equilibrium voltage or the electrostatic decay time exceeds a preset range, The controller sends an alarm signal.
- An embodiment of the present invention provides a cleaner for cleaning an electrostatic needle.
- the cleaner includes:
- the housing includes a fitting groove and an electrostatic needle channel, the fitting groove and the electrostatic needle channel pass through the housing, and the fitting groove slidably fixes the cleaner at the electrostatic needle, The opening of the electrostatic needle channel engages the electrostatic needle;
- a cleaning member located on both sides of the electrostatic needle channel in the housing to remove foreign matter on the electrostatic needle
- a protruding portion abutting a portion of the cleaning member with respect to the storage box of the housing, the protruding portion being configured to collect and limit the foreign matter to the storage of the housing Inside the box.
- the cleaner includes a metal piece, and the metal piece is disposed corresponding to an electromagnet.
- the electromagnet When the electromagnet is energized, the metal piece is attracted by the magnetic force to cause the cleaner to face the cleaner.
- the electrostatic needle slides to remove and collect foreign objects on the electrostatic needle.
- the static elimination device includes:
- the bottom plate is provided with an electrostatic needle which generates positive or negative ions;
- a sensor configured to sense a foreign object in a needle of the electrostatic needle to generate a sensing signal
- the monitor includes a measurement terminal and a controller, the measurement terminal is used to measure the static electricity removing ability of the electrostatic needle, and the controller is used to determine whether to generate a driving signal according to the sensing signal or the signal of the measurement terminal ;as well as
- a cleaner is slidably disposed on the base plate, and is configured to slide the cleaner toward the electrostatic needle to remove a foreign object on the electrostatic needle when receiving the driving signal.
- the cleaner includes:
- a fitting groove which slidably fixes the cleaner to the bottom plate
- An electrostatic needle channel the opening of the electrostatic needle channel engaging the electrostatic needle
- a cleaning member located in the electrostatic needle channel to remove foreign matters on the electrostatic needle
- a protruding portion abutting a portion of the cleaning member with respect to the storage box of the housing, the protruding portion being configured to collect and limit the foreign matter to the storage of the housing Inside the box.
- the static elimination device further includes a driver located at the first end of the bottom plate.
- the driver includes a power generator and an electromagnet, and the driver receives the power from the monitor.
- the driving signal causes the electric power generator to generate a current and transmits the electric current to the electromagnet to form a magnetic field.
- the electromagnet receives the current and generates a magnetic force, and drives the cleaner to slide toward the second end of the bottom plate.
- the cleaner passes the sensor, such that When the cleaner is detected by the second segment of the sensor wave, the driver reduces the speed of the cleaner.
- the senor emits a first segment of the sensing wave and a second segment of the sensing wave, and the first segment of the sensing wave is emitted to the first side of the electrostatic needle.
- the senor further includes a third sensing wave, the third sensing wave senses a second side of the electrostatic needle, and the first sensing wave and the A third sensing wave measures the size of the foreign matter on the electrostatic needle.
- the static elimination ability is evaluated by analyzing an equilibrium voltage of the electrostatic needle and an electrostatic decay time, and when the equilibrium voltage or the electrostatic decay time exceeds a preset range, The controller sends an alarm signal.
- the static elimination device of the present invention not only monitors and analyzes the condition of the static needle, the balance voltage of the bottom plate, and the static decay time, etc., but also provides timely information to the bottom plate. Cleaning, so that the equilibrium voltage and static decay time are maintained within a predetermined range, and at the same time prevent foreign matter of the electrostatic needle from falling into the production line during cleaning, improving product quality also greatly reduces labor investment costs, and at the same time through large
- the establishment and analysis of data can realize the management and improvement of core equipment and important processes, and simultaneously manage multiple static elimination devices to achieve fully automated production, saving a lot of manpower and costs, and improving product yield and stability.
- FIG. 1 is a schematic diagram of a static elimination device according to an embodiment of the present invention.
- FIG. 2 is a schematic diagram of a cleaner according to an embodiment of the present invention.
- FIG. 3 is a top view of the cleaner of FIG. 2.
- Fig. 4 is a cross-sectional view of the cleaner of Fig. 3 taken along a line A-A '.
- FIG. 5 is a schematic diagram of a sensor in a static elimination device according to an embodiment of the present invention.
- FIG. 1 is a schematic diagram of a static elimination device according to an embodiment of the present invention.
- the static elimination device 10 according to an embodiment of the present invention includes a bottom plate 100, sensors 103 and 104, a monitor 112, and a cleaner 20.
- the base plate 100 is provided with an electrostatic needle 102.
- a side of the base plate 100 is provided with a track 101.
- the electrostatic needle 102 is used to release ions with a positive charge 107 and a negative charge 108.
- the positively and negatively charged ions 107 and 108 are used to neutralize the charges generated on the surface or inside of the electronic component or product conveyed by the conveyor belt 111 of the production line to prevent electrostatic pollution and damage.
- the static eliminator shown in FIG. 1 uses a rod-type static eliminator as an example.
- the static eliminator may also have other forms of structure, such as a ring-type static eliminator, and the structure of the bottom plate of the present invention is not limited thereto.
- the sensors 103 and 104 are respectively disposed on the first end 119 and the second end 120 of the bottom plate 100. In an embodiment of the present invention, the sensors 104 are disposed on the first end 119 of the bottom plate 100.
- the sensors 103 and 104 are aligned with the electrostatic needle 102, and the sensor 103 may be disposed between the electrostatic needle 102 and the cleaner 20 in the first parking position or the second parking position.
- the sensors 103 and 104 are used to detect whether there is a foreign object in the needle of the electrostatic needle 102.
- a monitor 112 is provided in the area below the bottom plate 100 to monitor the working status of the static eliminator 10.
- the monitor 112 includes measurement terminals 109 and 110 for measuring the static elimination capability of the electrostatic needle 102.
- the measurement terminals 109 and 110 are disposed on both sides of the conveyor belt 111 of the electronic production line and are disposed facing the electrostatic needle 102.
- the measurement terminals 109 and 110 receive the positive ions 107 and the negative ions 108 released by the electrostatic needle 102 to measure the equilibrium voltage and electrostatic decay time of the electrostatic needle 102.
- the measurement terminals 109 and 110 are electric quantity sensors, and are used to evaluate the static elimination capability of the electrostatic needle 102 by measuring the equilibrium voltage of the electrostatic needle 102 and measuring the electrostatic decay time of the electrostatic needle 102.
- the balance voltage can be directly measured by the positive and negative ions released by the electrostatic needle 102 by using the measuring terminals 109 and 110.
- the measuring terminals 109 and 110 can also include a charged plate that can carry a positive voltage to neutralize the electrostatic needle 102.
- the generated positive ions 107 or negative ions 108, and at the same time, the terminals 109 and 110 measure the time required for the voltage value on the charged plate to fall to a preset voltage value to obtain the static decay time.
- the monitor 112 reflects the static eliminator 10 Are there any abnormalities and provide timely solutions.
- the monitor 112 may be connected to a data collector 114.
- the monitor 112 receives information on the sizes of foreign objects on the first and second sides of the electrostatic needle 102 from the sensors 103, 104, and receives static electricity elimination from the measurement terminals 109, 110. Information of the static elimination capability of the collector 10 and collects the information in the data collector 114.
- the monitor 112 may be provided with a controller 115.
- the controller 115 analyzes according to the information in the data collector 114 to determine whether the static eliminator 10 is abnormal, and sends a driving signal to clean the electrostatic needle 102.
- the static elimination capability of the static eliminator 10 is determined based on whether the balance voltage of the electrostatic needle 102 and the static decay time are within a predetermined range.
- the predetermined range of the balance voltage and the static decay time depends on each process. Developed standards.
- the preset range of the balance voltage may be within ⁇ 0.1 volts to ⁇ 50 volts. In one embodiment of the present invention, the preset range of the balance voltage is within ⁇ 30 volts.
- the preset range of the static decay time is within 0.1 second to 5 seconds. In one embodiment of the present invention, the preset range of the static decay time is within 3 seconds. If the static eliminator 10 is determined to be abnormal, the monitor 112 may send a driving signal to instruct the cleaner 20 to clean the electrostatic needle 102
- the monitor 112 may be configured to send an alarm signal to the output device 113, such as a display panel or a computer integrated manufacturing system, so that a person can determine and confirm in time to send a drive signal to instruct the cleaner 20 to clean the electrostatic needle 102.
- the computer integrated manufacturing system summarizes the information received by the data collector 114 to establish big data for the management and improvement of core equipment and important processes, and to improve the high-discharge area of electrostatic discharge. Therefore, the static elimination capability of the static eliminator 10 is controlled within a preset range, which effectively prevents electrostatic contamination and destruction of electronic components or products in the production line.
- the static elimination device 10 monitors the static needle 102 on the static eliminator 10, the balance voltage of the static needle 102, and the static decay time, and sends a driving signal when the static eliminator 10 is abnormal.
- the cleaner 102 is instructed to clean the static eliminator 10 in time, which effectively and effectively controls the balance voltage within a preset range, reduces the risk of electrostatic discharge, effectively improves the stability of the static eliminator 10, and prevents particulate adsorption damage. Electronic components and products, thereby improving the quality and yield of electronic components and products.
- the collection and analysis of big data can realize the management and improvement of core equipment and important processes, and realize automated production, which solves the existing technology needs a lot of manpower
- FIG. 2 is a schematic diagram of a cleaning assembly according to an embodiment of the present invention.
- FIG. 3 is a top view of the cleaning assembly of FIG. 2.
- Fig. 4 is a cross-sectional view of the cleaning assembly of Fig. 3 taken along a line A-A '.
- the cleaner 20 includes a housing 201, a cleaning member 205, and protrusions 206 and 207.
- the cleaning assembly 20 is provided with a fitting groove 200 and an electrostatic needle channel 203, and the fitting groove 200 and the electrostatic needle channel 203 pass through the housing 201.
- the electrostatic needle channel 203 may be a U-shaped slot, and the fitting groove 200 is fitted into the bottom plate 100.
- the rail 101 allows the cleaner 20 to slide along the rail 101 and is fixed to the bottom plate 100 in a slidable manner.
- the opening 202 of the electrostatic needle channel 203 engages the electrostatic needle 102 so that the size of the electrostatic needle channel 203 is suitable for the electrostatic needle 102 to pass through.
- the cleaning member 205 is located in the housing 201 and is located on both sides of the electrostatic needle channel 203 and defines the width of the electrostatic needle channel 203. Therefore, when the cleaner 20 slides along the rail 101, the cleaning member 205 and the electrostatic needle 102 abut against each other and remove the foreign matter on the electrostatic needle 102.
- the cleaning member 205 is one or a combination selected from the group consisting of cloth, brush, sponge, plastic, and metal. The cleaning member 205 can effectively remove foreign objects on the electrostatic needle 102.
- the cleaner may include a metal piece 209 (see FIG. 5) on a side of the cleaner 205 facing the drives 105, 106 (see FIG. 5).
- the metal parts 209 and the electromagnets 117 and 118 (see FIG. 5) are arranged correspondingly to each other. When the electromagnets 117 and 118 are energized, the metal parts 209 are attracted by the magnetic force to cause the cleaner 20 to slide toward the electrostatic needle 102 to the foreign matter on the electrostatic needle 102 Clean and collect.
- the protrusions 206 and 207 abut against portions of the cleaning member 20 that are opposite to the storage box 208 of the housing 201, and the protrusions 206 and 207 are configured to collect and limit foreign matter to the storage box 208 of the housing 201.
- the protruding portions 206 and 207 may be protruding structures facing each other so as to form a narrow passage in the casing 201 so that foreign objects fall into the storage box 208 of the casing 201 and cannot escape from the casing 201.
- the housing may be provided with a triggering device 204, such as a button 204.
- the trigger device 204 is disposed on the storage box 208. When the triggering device 204 receives pressure from an external force, the storage box 208 is separated from the housing 201, which makes it easy for a person to clean up the foreign matter collected in the storage box 208.
- the fitting groove 200 of the housing is separated from the track 101 (see FIG. 1) of the bottom plate 100 (see FIG. 1), so that the personnel can easily replace the cleaning parts. 203 and clean up the foreign matter collected in the storage box 208 of the case 201.
- the cleaner 20 according to an embodiment of the present invention shown in FIGS. 2 to 3 can directly remove the foreign matter on the electrostatic needle 102 by directly engaging the electrostatic needle 102.
- the cleaner 20 also prevents foreign objects from being scattered or dropped, and effectively maintains the static elimination ability and stability of the electrostatic needle 102, prevents electrostatic discharge and particulate adsorption from damaging electronic components and products, thereby improving the quality and yield of electronic components and products .
- FIG. 5 is a schematic diagram of the sensor 103 in the static elimination device according to an embodiment of the present invention.
- the sensors 103 and 104 are aligned with the electrostatic needle 102.
- the sensors 103, 104 may be optical sensors, such as infrared sensors.
- the sensors 103 and 104 are used to send the first segment of the sensing wave 301 and the third segment of the sensing wave 303 toward the needle of the electrostatic needle 102, and the first segment of the sensing wave 301 and the third segment of the sensing wave 303 are respectively transmitted to On the first side and the second side of the needle of the electrostatic needle 102, the sensors 103 and 104 send a second segment of the sensing wave 302 downward to sense whether the cleaner 20 has reached below the sensors 103 and 104.
- the static elimination device may be provided with a driver 105, 106, which is located at the first end 119 of the bottom plate.
- the driver 105, 106 includes a power generator 116 and an electromagnet 117, 118.
- the driver 105, 106 receives a driving signal from the monitor, so
- the power generator 116 generates a current and transmits it to the electromagnets 117 and 118 to form a magnetic field.
- the electromagnets 117 and 118 are disposed toward the cleaner 20.
- the invention provides a cleaner 20 that can be snapped onto the rail 101 and can slide on the bottom plate 100.
- the cleaner 20 removes and collects foreign objects on the electrostatic needle 102.
- the first parking position of the cleaner 20 is located on the bottom plate 100.
- the second end 120 and the second parking position of the cleaner 20 are located on the first end 119 of the bottom plate 100.
- the first end 119 and the second end 120 of the bottom plate 100 are respectively about 60 mm from the electrostatic needle 102.
- the sensors 103, 104 are approximately 10 mm in length.
- the length of the cleaner 20 is about 50 mm, and the width of the cleaner 20 is substantially the same as that of the bottom plate, and the height is about 60 mm.
- the cleaner 20 removes the foreign matters on the electrostatic needle 102, and avoids the problem that the foreign matters on the electrostatic needle 102 accumulate for a long time, clump, or even crystallize, which is difficult to remove.
- the sensors 103 and 104 when the sensors 103 and 104 sense a foreign object on the electrostatic needle 102, the sensors 103 and 104 generate a first sensing signal or when When the balance voltage or static decay time of the electrostatic needle 102 measured by the measuring terminals 109 and 110 of the monitor 112 exceeds a preset range, the controller 115 of the monitor 112 is based on the first sensing signal or the The signal decides to send a first driving signal to clean the electrostatic needle 102.
- the drivers 105 and 106 receive the first driving signal from the monitor 112, so that the power generator 116 generates a current and transmits it to the electromagnets 117 and 118 to form a magnetic field.
- the metal parts 209 is attracted by magnetic force to drive the cleaner 20 to slide toward the electrostatic needle 102 and pass the electrostatic needle 102 through the electrostatic needle channel 202 of the cleaner 20, and the cleaning member 20 in the electrostatic needle channel 202 removes foreign matters on the electrostatic needle 102.
- the protrusion 206 collects and restricts the foreign matter to the storage box 208 of the housing 201.
- the cleaner 20 passes the sensors 103, 104 and the second section of the sensor waves 103 of the sensors 103, 104 detects the cleaner 20, the sensors 103, 104 generate a second sensing signal, so that the monitor 112 sends a second driving signal to cause the driver 106 to reduce the speed of the cleaner 20 so that the cleaner 20 stops safely at the second parking position.
- the static elimination device of the present invention provides the static elimination device 10 with a timely Clean, keep the equilibrium voltage and static decay time within a predetermined range, and prevent foreign matter of the electrostatic needle from falling into the production line during cleaning. Improving product quality also greatly reduces labor investment costs.
- the establishment and analysis of big data can Realize the management and improvement of core equipment and important processes, manage multiple static elimination devices at the same time, realize fully automated production, save a lot of manpower and costs, and improve product yield and stability.
- the term “about” refers to an acceptable range of error for a particular value when determined by one of ordinary skill in the art, which depends in part on how the value is measured or determined, such as in a measurement system. limit. For example, “about” may refer to a range of up to 10%, more preferably up to 5%, and even more preferably up to 1% of a given value. When specific values are described in the specification and claims of the application, the term “about” means that the specific value is within an acceptable error range, unless stated otherwise.
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
一种静电消除装置（10），所述静电消除装置（10）包括：底板（100）、感测器（103、104）以及清洁器（20）。所述底板（100）设置有静电针（102），所述静电针（102）产生正离子或负离子，所述感测器（103、104）用于感测所述静电针（102）的针头有异物时，产生感测信号，所述清洁器（20），可滑动地设置在所述底板（100）上，所述清洁器（20）朝向所述静电针（102）滑动对所述静电针上的异物进行清除。
Description
本发明是有关于一种静电消除装置，特别是有关于一种具有清洁器的静电消除装置。
薄膜电晶体液晶显示面板以及有机发光二极管显示面板生产制程中，静电放电一直是产品良率的最大因素，静电产生的击伤、微粒吸附直接导致产品品质不良，严得影响到产品质量和公司效益，所以在面板制程产线从上至下各设备器中都会加入静电消除器(又称为静电消除装置)来消除静电，最大限度的减少静电放电的产生，提高产品良率和产品品质。
薄膜电晶体液晶显示面板以及有机发光二极管显示面板的制程中投入的静电消除装置保守估计约有1.5至2万支，其中静电消除装置的两项重要指标是静电消除速度和离子平衡的保持。然而，所述静电消除装置在实际使用上仍具有下述问题，例如：随着静电消除装置的使用，其针头部会因为物理因素及化学因素在静电消除装置的静电针头处产生异物，直接影响了离子平衡和静电衰变速度，因此，静电消除装置每月都需投入大量人力对静电消除装置进行清洁并对平衡电压和静电衰变速度进行测量和监控，因人员监控测量的局限性和测量的稳定性，使得很多静电消除装置都不能得有效及时的清洁和测量，导致静电放电异常频发及除静电能力的不稳定。
故，有必要提供一种静电消除装置，以解决现有技术所存在的问题。
有鉴于此，本发明提供一种静电消除装置，以解决现有技术所存在的静电针上的异物积聚直接影响了正负离子的释放平衡而造成平衡电压上升及静电衰变速度下降等问题。
为达成本发明的前述目的，本发明的一实施例提供一种静电消除装置，所述静电消除装置包括：
底板，设置有静电针，所述静电针产生正离子或负离子；
感测器，用于感测所述静电针的针头有异物时，产生感测信号；
监测器，包括测量端子及控制器，所述测量端子用来测量所述静电针的除静电能力，所述控制器用于依据所述感测信号或所述测量端子的信号，决定是否产生驱动信号；
清洁器，可滑动地设置在所述底板上，用于接收所述驱动信号时，所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除；以及
数据收集器，收集从所述感测器以及所述监测器所接收的信息。
在本发明的一实施例中，所述清洁器包括：
嵌合槽，所述嵌合槽将所述清洁器可滑动地固定在所述底板；
静电针通道，所述静电针通道的开口啮合所述静电针；
清洁件，位于所述静电针通道内，对所述静电针上的异物进行清除；以及
突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
在本发明的一实施例中，所述静电消除装置另包括驱动器，位于所述底板的第一端，所述驱动器包括电力产生器及电磁铁，所述驱动器接收来自于所述监测器发出的驱动信号，使所述电力产生器产生一电流并传送至所述电磁铁形成磁场。
在本发明的一实施例中，所述电磁铁接收所述电流并产生一磁力，驱动所述清洁器朝向所述底板的第二端滑动，当所述清洁器经过所述感测器，使得所述感测器的所述第二段感测波检测到所述清洁器时，所述驱动器降低所述清洁器的速度。
在本发明的一实施例中，所述感测器发出第一段感测波及第二段感测波，所述第一段感测波发射至所述静电针的第一侧。
在本发明的一实施例中，所述感测器还包括第三感测波，所述第三感测波感测所述静电针的第二侧，所述第一感测波与所述第三感测波测量所述静电针上的所述异物的大小。
在本发明的一实施例中，所述除静电能力是通过分析所述静电针的平衡电压以及静电衰变时间来评估，当所述平衡电压或所述静电衰变时间超出预先设定的范围时，所述控制器发送警报信号。
本发明一实施例提供一种用于清洁静电针的清洁器，所述清洁器包括：
壳体，包括嵌合槽及静电针通道，所述嵌合槽及所述静电针通道贯穿所述壳体，所述嵌合槽将所述清洁器可滑动地固定在所述静电针处，所述静电针通道的开口啮合所述静电针；
清洁件，位于所述壳体内的所述静电针通道的两侧，清除所述静电针上的异物；以及
突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
在本发明的一实施例中，所述清洁器包括金属件，所述金属件与电磁铁对应设置，当所述电磁铁通电时，所述金属件受磁力吸引使所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除和收集。
本发明的另一实施例提供一种静电消除装置，所述静电消除装置包括：
底板，设置有静电针，所述静电针产生正离子或负离子；
感测器，用于感测所述静电针的针头有异物时，产生感测信号；
监测器，包括测量端子及控制器，所述测量端子用来测量所述静电针的除静电能力，所述控制器用于依据所述感测信号或所述测量端子的信号，决定是否产生驱动信号；以及
清洁器，可滑动地设置在所述底板上，用于接收所述驱动信号时，所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除。
在本发明的一实施例中，所述清洁器包括：
嵌合槽，所述嵌合槽将所述清洁器可滑动地固定在所述底板；
静电针通道，所述静电针通道的开口啮合所述静电针；
清洁件，位于所述静电针通道内，对所述静电针上的异物进行清除；以及
突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
在本发明的一实施例中，所述静电消除装置另包括驱动器，位于所述底板的第一端，所述驱动器包括电力产生器及电磁铁，所述驱动器接收来自于所述监测器发出的驱动信号，使所述电力产生器产生一电流并传送至所述电磁铁形成磁场。
在本发明的一实施例中，所述电磁铁接收所述电流并产生一磁力，驱动所述清洁器朝向所述底板的第二端滑动，当所述清洁器经过所述感测器，使得所述感测器的所述第二段感测波检测到所述清洁器时，所述驱动器降低所述清洁器的速度。
在本发明的一实施例中，所述感测器发出第一段感测波及第二段感测波，所述第一段感测波发射至所述静电针的第一侧。
在本发明的一实施例中，所述感测器还包括第三感测波，所述第三感测波感测所述静电针的第二侧，所述第一感测波与所述第三感测波测量所述静电针上的所述异物的大小。
在本发明的一实施例中，所述除静电能力是通过分析所述静电针的平衡电压以及静电衰变时间来评估，当所述平衡电压或所述静电衰变时间超出预先设定的范围时，所述控制器发送警报信号。
与现有技术相比较，本发明的静电消除装置，本发明的静电消除装置不仅通过监测及分析所述静电针的情况、所述底板的平衡电压及静电衰变时间等，为所述底板提供及时的清洁，使所述平衡电压及静电衰变时间维持在预定范围内，而且同时防止所述静电针的异物在清洁时掉落在生产线中，提高产品品质也大大降低了人力投入成本，同时通过大数据的建立和分析可实现核心设备、重要制程的管理和改善，同时管理多个静电消除装置，实现全自动化生产，节省大量人力及成本，提高产品良率及稳定性。
为让本发明的上述内容能更明显易懂，下文特举优选实施例，并配合所附图式，作详细说明如下：
图1是本发明的一实施例的静电消除装置的示意图。
图2是本发明的一实施例的清洁器的示意图。
图3是图2的所述清洁器的俯视图。
图4是图3的所述清洁器沿A-A’切线所截取的剖视图。
图5是本发明的一实施例的静电消除装置中的感测器的示意图。
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。再者，本发明所提到的方向用语，例如上、下、顶、底、前、后、左、右、内、外、侧面、周围、中央、水平、横向、垂直、纵向、轴向、径向、最上层或最下层等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
请参照图1所示，图1是本发明的一实施例的静电消除装置的示意图。本发明的一实施例的静电消除装置10包括底板100、感测器103、104、监测器112以及清洁器20。底板100上设置有静电针102，底板100的侧边设置有轨道101，静电针102用于释放带有正电荷107以及负电荷108的离子。带有正电荷以及负电荷的离子107、108用于中和生产线的传送带111所输送的电子组件或产品的表面或内部产生的电荷，防止静电污染及破坏。图1所示的静电消除器以棒式的静电消除器作为示例，静电消除器还可以是其它形式的结构，例如：环式的静电消除器，本发明的底板的结构不限于此。
感测器103、104分别设置在底板100的第一端119和第二端120上，在本发明的一实施例中，感测器104设置在底板100的第一端119上。感测器103、104与静电针102对齐设置，感测器103可设置在静电针102与处于第一停放位置或第二停放位置上的清洁器20之间。感测器103、104用于感测静电针102的针头是否有异物。
在底板100下方的区域设置监测器112，以监测静电消除器10的工作状态，监测器112包括测量端子109、110，用来测量静电针102的除静电能力。在本发明的一实施例中，测量端子109、110设置在电子生产线的传送带111的两侧，面向静电针102设置。测量端子109、110接收静电针102所释放的正离子107及负离子108，以测量静电针102的平衡电压以及静电衰变时间。测量端子109、110为电量传感器，用于通过测量静电针102的平衡电压以及测量静电针102的静电衰变时间，以评估静电针102的除静电能力。
平衡电压可通过使用测量端子109、110直接测量静电针102所释放的正、负离子所产生电压，而测量端子109、110还可包括一带电板，带电板可携带正电压来中和静电针102产生的正离子107或负离子108，同时，测量端子109、110记录带电板上的电压值下降到某一预设电压值所需要的时间，得到静电衰变时间，监测器112反映了静电消除器10是否出现异常并且提供及时的解决方案。
监测器112可连接有数据收集器114，监测器112从感测器103、104接收静电针102的第一侧及第二侧上的异物的大小的信息以及从测量端子109、110接收静电消除器10的除静电能力的信息，并且将信息收集在数据收集器114中。
监测器112可设有控制器115，控制器115根据数据收集器114中的信息进行分析来判断静电消除器10是否异常，并且发送驱动信号清洁静电针102。其中静电消除器10的除静电能力是根据静电针102的平衡电压以及静电衰变时间是否在一预先设定的范围之内来判定，平衡电压以及静电衰变时间的预定设定的范围取决于各个工序所制定的标准。平衡电压的预先设定的范围可以是在±0.1伏特至±50伏特内，在本发明的一实施例中，平衡电压的预先设定的范围是±30伏特内。静电衰变时间的预设值的范围在0.1秒至5秒内，在本发明的一实施例中，静电衰变时间的预设值的范围在3秒内。若静电消除器10被判断为异常，监测器112可发送驱动信号指示清洁器20清洁静电针102。
监测器112可设置为发送警报信号到输出装置113，例如：显示面板或电脑整合制造系统，使得人员能及时判定及确认以发送驱动信号指示清洁器20清洁静电针102。电脑整合制造系统汇总数据收集器114所接收信息，建立大数据，用于核心设备与重要制程的管理和改善，以及改善静电放电高发区。因此，静电消除器10的除静电能力控制在预先设定的范围内，有效地避免因生产线中的电子组件或产品受到静电污染及破坏。
图1所示的本发明的一实施例的静电消除装置10通过监测静电消除器10上的静电针102、静电针102的平衡电压以及静电衰变时间，当静电消除器10出现异常时发送驱动信号并且及时指示清洁器102对静电消除器10进行清洁，确实有效地使平衡电压严格控制在预先设定的范围内，降低静电放电风险，有效地提高静电消除器10的稳定性，防止微粒吸附损坏电子组件及产品，进而提高电子组件及产品的品质及良率，同时通过大数据的收集和分析可实现核心设备、重要制程的管理和改善，并且实现自动化生产，解决了现有技术需要大量人力定时清理生产线中庞大数量的静电针的技术问题，并且解决现有静电针因积聚异物过久而难以清理且校正费时、静电针容易耗损的问题。
请一起参照图2至图4所示，图2是本发明的一实施例的清洁组件的示意图。图3是图2的清洁组件的俯视图。图4是图3的清洁组件沿A-A’切线所截取的剖视图。清洁器20包括壳体201、清洁件205以及突出部206、207。清洁组件20设置有嵌合槽200及静电针通道203，嵌合槽200及静电针通道203贯穿壳体201，静电针通道203可以为U型槽口，嵌合槽200嵌合于底板100的轨道101，使得清洁器20可以沿轨道101滑动，以可滑动的方式固定在底板100上。静电针通道203的开口202啮合静电针102，使得静电针通道203的大小适于静电针102通过。
清洁件205位于壳体201内，并位于的静电针通道203的两侧并且定义静电针通道203的宽度。因此当清洁器20沿轨道101滑动时，清洁件205与静电针102互相抵接以及清除静电针102上的异物。清洁件205是选自于由布料、刷子、海绵、塑胶以及金属所组成的群组中的一个及其组合。清洁件205能有效地清除静电针102上的异物。
清洁器可包括金属件209(请见图5)位于清洁器205朝向驱动器105、106(请见图5)的一侧。金属件209与电磁铁117、118(请见图5)互相对应设置，当电磁铁117、118通电时，金属件209受磁力吸引使清洁器20朝向静电针102滑动对静电针102上的异物进行清除和收集。
突出部206、207抵靠在清洁件20中相对于壳体201的收纳盒208的部分，突出部206、207被配置为将异物收集并且限制在壳体201的收纳盒208。突出部206、207可以为相互朝向的突出结构，以在壳体201内构成狭窄通道，使异物掉落在壳体201的收纳盒208而无法从壳体201飘散出来。
壳体可设置有触发装置204，例如：按钮204。触发装置204设置在收纳盒208上。当触发装置204接收到外力施压时，收纳盒208从壳体201分离，使人员易于清理被收集在收纳盒208内的异物。
根据本发明的另一实施例，触发装置204受外力施压时，壳体的嵌合槽200脱离底板100(请见图1)的轨道101 (请见图1)，使人员易于更换清洁件203以及清理被收集在壳体201的收纳盒208内的异物。图2至图3所示的本发明的一实施例的清洁器20通过直接啮合静电针102并且可滑动地清除静电针102上的异物。清洁器20更同时避免异物飘散或掉落，确实有效地维持静电针102的除静电能力及稳定性，防止静电放电及微粒吸附损坏电子组件及产品，进而提高电子组件及产品的品质及良率。
图5是本发明的一实施例的静电消除装置中的感测器103的示意图感测器103、104对齐静电针102设置。感测器103、104可以为光学感测器，例如红外线感测器。感测器103、104用于朝向静电针102的针头处发出第一段感测波301及第三段感测波303，第一段感测波301及第三段感测波303分别发射至静电针102的针头的第一侧及第二侧，感测器103、104朝下的发出第二段感测波302，以感测清洁器20是否已经到达感测器103、104的下方。
静电消除装置可设有驱动器105、106，位于底板的第一端119，驱动器105、106包括电力产生器116及电磁铁117、118，驱动器105、106接收来自于监测器发出的驱动信号，使电力产生器116产生电流并传送至电磁铁117、118形成磁场，电磁铁117、118朝向清洁器20设置。
本发明提供了一种清洁器20可卡合在轨道101上，并且可在底板100上滑动，清洁器20清除且收集静电针102上的异物，清洁器20的第一停放位置位于底板100的第二端120上，而清洁器20的第二停放位置位于底板100的第一端119上。在本发明的一实施例中，底板100的第一端119及第二端120分别距离静电针102约60毫米。感测器103、104长度为约10毫米。清洁器20的长度为约50毫米，清洁器20的宽度与底板大致上相同，高度为约60毫米。清洁器20对静电针102上的异物进行清除，避免了静电针102上的异物积聚过久而结块，甚至结晶、难以清除的问题。
请一起参考图1至图5，在本发明的一实施例中，当感测器103、104感测到静电针102上存在异物时，感测器103、104产生第一感测信号或当监测器112的测量端子109、110测量到的静电针102的平衡电压或静电衰变时间超出预先设定的范围时，监测器112的控制器115依据第一感测信号或测量端子109、110的信号决定发送第一驱动信号清洁静电针102，驱动器105、106接收来自于监测器112发出的第一驱动信号，使电力产生器116产生一电流并传送至电磁铁117、118形成磁场，金属件209受磁力吸引驱动清洁器20朝静电针102滑动并且使静电针102穿过清洁器20的静电针通道202，静电针通道202内的清洁件20清除静电针102上的异物，清洁器20的突出部206将异物收集并且限制在壳体201的收纳盒208。
当清洁器20经过感测器103、104并且使感测器103、104的第二段感测波302检测到清洁器20时，感测器103、104产生第二感测信号，使监测器112发送第二驱动信号使驱动器106降低清洁器20的速度，使清洁器20安全地停止在第二停放位置。
如上，相较于现有静电消除装置虽然具有静电消除功能，却因为现有静电消除装置的静电针上常常产生微粒及结晶而需要频密地保养，而导致静电针所释放的正负离子不平衡导致静电放电、静电针容易损耗以及静电衰变时间变长等问题，本发明的静电消除装置通过监测及分析静电针的情况、静电针的平衡电压及静电衰变时间等，为静电消除器10提供及时的清洁，使平衡电压及静电衰变时间维持在预定范围内，同时防止静电针的异物在清洁时掉落在生产线中，提高产品品质也大大降低了人力投入成本，同时通过大数据的建立和分析可实现核心设备、重要制程的管理和改善，同时管理多个静电消除装置，实现全自动化生产，节省大量人力及成本，提高产品良率及稳定性。
本发明已由上述相关实施例加以描述，然而上述实施例仅为实施本发明的范例。必需指出的是，已公开的实施例并未限制本发明的范围。相反地，包含于权利要求书的精神及范围的修改及均等设置均包括于本发明的范围内。
本文所使用的单数型式“一”、“一个”及“至少一”包括复数引用，除非上下文另有明确规定。例如，术语“一化合物”或“至少一种化合物”可以包括多个化合物，包括其混合物。
在本文中所用的术语「约」是指当被本领域的普通技术人员测定时，一特定值的一可接受的误差范围，其部分取决于值如何被量测或测定，例如量测系统的限制。例如「约」可以指一高达10%的范围，更优选地高达5%，还更优选地高达1%的给定值。当特定值在申请案说明书和权利要求中描述，术语「约」的意思是特定值的可接受误差范围内，除非另有说明。
Claims (16)
- 一种静电消除装置，其包括：底板，设置有静电针，所述静电针产生正离子或负离子；感测器，用于感测所述静电针上有异物时，产生感测信号；监测器，包括测量端子及控制器，所述测量端子用来测量所述静电针的除静电能力，所述控制器用于依据所述感测信号或所述测量端子的信号，决定是否产生驱动信号；清洁器，可滑动地设置在所述底板上，用于接收所述驱动信号时，所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除；以及数据收集器，收集从所述感测器以及所述监测器所接收的信息。
- 如权利要求1所述的静电消除装置，其中所述清洁器包括：嵌合槽，所述嵌合槽将所述清洁器可滑动地固定在所述底板；静电针通道，所述静电针通道的开口啮合所述静电针；清洁件，位于所述静电针通道内，对所述静电针上的异物进行清除；以及突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
- 如权利要求1所述的静电消除装置，其中所述静电消除装置另包括驱动器，位于所述底板的第一端，所述驱动器包括电力产生器及电磁铁，所述驱动器接收来自于所述监测器发出的所述驱动信号，使所述电力产生器产生一电流并传送至所述电磁铁形成磁场。
- 如权利要求3所述的静电消除装置，其中所述电磁铁接收所述电流并产生一磁力，驱动所述清洁器朝向所述底板的第二端滑动，当所述清洁器经过所述感测器，使得所述感测器的所述第二段感测波检测到所述清洁器时，所述驱动器降低所述清洁器的速度。
- 如权利要求1所述的静电消除装置，其中所述感测器发出第一段感测波及第二段感测波，所述第一段感测波发射至所述静电针的第一侧。
- 如权利要求5所述的静电消除装置，其中所述感测器还包括第三感测波，所述第三感测波感测所述静电针的第二侧，所述第一感测波与所述第三感测波测量所述静电针上的所述异物的大小。
- 如权利要求1所述的静电消除装置，其中所述除静电能力是通过分析所述静电针的平衡电压以及静电衰变时间来评估，当所述平衡电压或所述静电衰变时间超出预先设定的范围时，所述控制器发送警报信号。
- 一种用于清洁静电针的清洁器，其包括：壳体，包括嵌合槽及静电针通道，所述嵌合槽及所述静电针通道贯穿所述壳体，所述嵌合槽将所述清洁器可滑动地固定在所述静电针处，所述静电针通道的开口啮合所述静电针；清洁件，位于所述壳体内的所述静电针通道的两侧，清除所述静电针上的异物；以及突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
- 如权利要求8所述的清洁器，其中所述清洁器包括金属件，所述金属件与电磁铁对应设置，当所述电磁铁通电时，所述金属件受磁力吸引使所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除和收集。
- 一种静电消除装置，其包括：底板，设置有静电针，所述静电针产生正离子或负离子；感测器，用于感测所述静电针上有异物时，产生感测信号；监测器，包括测量端子及控制器，所述测量端子用来测量所述静电针的除静电能力，所述控制器用于依据所述感测信号或所述测量端子的信号，决定是否产生驱动信号；以及清洁器，可滑动地设置在所述底板上，用于接收所述驱动信号时，所述清洁器朝向所述静电针滑动对所述静电针上的异物进行清除。
- 如权利要求10所述的静电消除装置，其中所述清洁器包括：嵌合槽，所述嵌合槽将所述清洁器可滑动地固定在所述底板；静电针通道，所述静电针通道的开口啮合所述静电针；清洁件，位于所述静电针通道内，对所述静电针上的异物进行清除；以及突出部，所述突出部抵靠在所述清洁件中相对于所述壳体的收纳盒的部分，所述突出部被配置为将所述异物收集并且限制在所述壳体的所述收纳盒内。
- 如权利要求10所述的静电消除装置，其中所述静电消除装置另包括驱动器，位于所述底板的第一端，所述驱动器包括电力产生器及电磁铁，所述驱动器接收来自于所述监测器发出的所述驱动信号，使所述电力产生器产生一电流并传送至所述电磁铁形成磁场。
- 如权利要求12所述的静电消除装置，其中所述电磁铁接收所述电流并产生一磁力，驱动所述清洁器朝向所述底板的第二端滑动，当所述清洁器经过所述感测器，使得所述感测器的所述第二段感测波检测到所述清洁器时，所述驱动器降低所述清洁器的速度。
- 如权利要求10所述的静电消除装置，其中所述感测器发出第一段感测波及第二段感测波，所述第一段感测波发射至所述静电针的第一侧。
- 如权利要求14所述的静电消除装置，其中所述感测器还包括第三感测波，所述第三感测波感测所述静电针的第二侧，所述第一感测波与所述第三感测波测量所述静电针上的所述异物的大小。
- 如权利要求10所述的静电消除装置，其中所述除静电能力是通过分析所述静电针的平衡电压以及静电衰变时间来评估，当所述平衡电压或所述静电衰变时间超出预先设定的范围时，所述控制器发送警报信号。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810843678.4 | 2018-07-27 | ||
| CN201810843678.4A CN108834293B (zh) | 2018-07-27 | 2018-07-27 | 静电消除装置以及用于清洁静电针的清洁器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2020019692A1 true WO2020019692A1 (zh) | 2020-01-30 |
Family
ID=64152013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2019/072805 Ceased WO2020019692A1 (zh) | 2018-07-27 | 2019-01-23 | 静电消除装置以及用于清洁静电针的清洁器 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108834293B (zh) |
| WO (1) | WO2020019692A1 (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108834293B (zh) * | 2018-07-27 | 2020-03-17 | 武汉华星光电技术有限公司 | 静电消除装置以及用于清洁静电针的清洁器 |
| CN113043510A (zh) * | 2021-03-26 | 2021-06-29 | 浙江中聚材料有限公司 | 除静电装置及具有该装置的聚烯烃薄膜/片材的制作设备 |
| CN116193692A (zh) * | 2022-09-09 | 2023-05-30 | 上海至纯洁净系统科技股份有限公司 | 一种静电消除器及电极探针的清洁判断方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4734580A (en) * | 1986-06-16 | 1988-03-29 | The Simco Company, Inc. | Built-in ionizing electrode cleaning apparatus |
| CN1749875A (zh) * | 2004-09-17 | 2006-03-22 | 夏普株式会社 | 带电装置和图像形成装置 |
| CN103298230A (zh) * | 2012-02-23 | 2013-09-11 | 韶阳科技股份有限公司 | 静电消除装置及控制电路 |
| CN104883804A (zh) * | 2015-05-27 | 2015-09-02 | 苏州天华超净科技股份有限公司 | 静电消除器、室内静电消除系统及静电消除器自动清扫方法 |
| JP2016046046A (ja) * | 2014-08-21 | 2016-04-04 | シャープ株式会社 | イオン発生器及びイオン発生装置 |
| CN105944988A (zh) * | 2016-04-29 | 2016-09-21 | 苏州天华超净科技股份有限公司 | 一种离子风机放电针的自动清洁系统及其清洁方法 |
| JP2016207626A (ja) * | 2015-04-28 | 2016-12-08 | シャープ株式会社 | 放電電極清掃具および放電電極の清掃方法 |
| CN108834293A (zh) * | 2018-07-27 | 2018-11-16 | 武汉华星光电技术有限公司 | 静电消除装置以及用于清洁静电针的清洁器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4048667A (en) * | 1975-08-13 | 1977-09-13 | Hermann Brennecke | Device for discharging static electricity |
| EP1242810A1 (en) * | 1999-12-15 | 2002-09-25 | Stevens Institute of Technology | Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions |
| US7302211B2 (en) * | 2004-09-17 | 2007-11-27 | Sharp Kabushiki Kaisha | Charging apparatus and image forming apparatus with plated electrode |
| JP2008157753A (ja) * | 2006-12-25 | 2008-07-10 | Mitsubishi Electric Corp | 検査装置、アニール装置、および検査方法 |
| JP4027410B1 (ja) * | 2007-02-13 | 2007-12-26 | 一雄 岡野 | コロナ放電型イオナイザの検査方法及び検査装置 |
| JP4357589B1 (ja) * | 2008-12-11 | 2009-11-04 | 一雄 岡野 | 放電電極ユニット |
| US8405951B2 (en) * | 2010-06-21 | 2013-03-26 | Tessera, Inc. | Cleaning mechanism with tandem movement over emitter and collector surfaces |
| CN103560400B (zh) * | 2013-09-28 | 2016-08-10 | 上海育丰电器发展有限公司 | 一种负离子发射装置及其空气净化设备 |
| TWI580313B (zh) * | 2015-06-30 | 2017-04-21 | 倚晶科技有限公司 | 靜電消除裝置 |
-
2018
- 2018-07-27 CN CN201810843678.4A patent/CN108834293B/zh active Active
-
2019
- 2019-01-23 WO PCT/CN2019/072805 patent/WO2020019692A1/zh not_active Ceased
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4734580A (en) * | 1986-06-16 | 1988-03-29 | The Simco Company, Inc. | Built-in ionizing electrode cleaning apparatus |
| CN1749875A (zh) * | 2004-09-17 | 2006-03-22 | 夏普株式会社 | 带电装置和图像形成装置 |
| CN103298230A (zh) * | 2012-02-23 | 2013-09-11 | 韶阳科技股份有限公司 | 静电消除装置及控制电路 |
| JP2016046046A (ja) * | 2014-08-21 | 2016-04-04 | シャープ株式会社 | イオン発生器及びイオン発生装置 |
| JP2016207626A (ja) * | 2015-04-28 | 2016-12-08 | シャープ株式会社 | 放電電極清掃具および放電電極の清掃方法 |
| CN104883804A (zh) * | 2015-05-27 | 2015-09-02 | 苏州天华超净科技股份有限公司 | 静电消除器、室内静电消除系统及静电消除器自动清扫方法 |
| CN105944988A (zh) * | 2016-04-29 | 2016-09-21 | 苏州天华超净科技股份有限公司 | 一种离子风机放电针的自动清洁系统及其清洁方法 |
| CN108834293A (zh) * | 2018-07-27 | 2018-11-16 | 武汉华星光电技术有限公司 | 静电消除装置以及用于清洁静电针的清洁器 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108834293B (zh) | 2020-03-17 |
| CN108834293A (zh) | 2018-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2020019692A1 (zh) | 静电消除装置以及用于清洁静电针的清洁器 | |
| CN104749075B (zh) | 空气粒子检测装置 | |
| CN104440475A (zh) | 一种皮带传动装置及研磨设备 | |
| CN106953589A (zh) | 一种用于光伏清洁机判断真卡死和假卡死的控制方法 | |
| CN206192975U (zh) | 一种基于单片机的车间空气质量测控装置 | |
| WO2015003375A1 (zh) | 静电消除器的监控装置及其监控方法 | |
| CN114534383B (zh) | 一种脉冲喷吹控制方法 | |
| US20230138019A1 (en) | Material handling system and monitoring system and monitoring method for particles in traveling area of overhead hoist transfers | |
| CN106391491A (zh) | 一种良率检测智能管理系统 | |
| KR102948203B1 (ko) | 이온 발생기용 클리닝 장치 및 그것의 동작 방법, 및 이온 발생기 클리닝 시스템 | |
| CN223910328U (zh) | 一种新型计量槽料位光电检测装置 | |
| KR100238945B1 (ko) | 반도체장치 제조용 클린룸의 팬 필터 유니트 구동 감시장치 | |
| CN113959917B (zh) | 一种直流充电屏灰尘监测系统 | |
| CN208961783U (zh) | 机器人去毛刺盘刷消耗自动补偿机构 | |
| CN209049838U (zh) | 一种检测压头清洁机构 | |
| CN114999975A (zh) | 机械手臂刮伤晶圆监控方法及系统 | |
| CN209267346U (zh) | 一种自动送料机的伺服电机底座组件 | |
| CN221238830U (zh) | 一种工程颗粒扬尘的检测预警设备 | |
| KR102170889B1 (ko) | 데이터 센터용 공조기 관리 방법 및 시스템 | |
| TWI854761B (zh) | 半導體自動裝載系統 | |
| KR100415668B1 (ko) | 소결기 대차의 씰바 복원장치 | |
| CN207467597U (zh) | 一种电容器芯包计数装置 | |
| CN213770263U (zh) | 斗式提升机防停机报警装置 | |
| JP3204486U (ja) | パーティクル測定装置 | |
| CN223704286U (zh) | 一种烟末收集系统 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 19840778 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 19840778 Country of ref document: EP Kind code of ref document: A1 |