WO2020010950A1 - Sensor - Google Patents
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- Publication number
- WO2020010950A1 WO2020010950A1 PCT/CN2019/088915 CN2019088915W WO2020010950A1 WO 2020010950 A1 WO2020010950 A1 WO 2020010950A1 CN 2019088915 W CN2019088915 W CN 2019088915W WO 2020010950 A1 WO2020010950 A1 WO 2020010950A1
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- WO
- WIPO (PCT)
- Prior art keywords
- light
- sensor
- sensor according
- diaphragm
- photodetector
- Prior art date
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Abstract
Disclosed in the present invention is a sensor, comprising: a shell provided with a hollow inner cavity and an open upper end, the bottom end of the shell inner cavity being provided with a light emitting source used for emitting light rays toward the open end of the shell and a photoelectric detection device used for receiving reflected light rays; a light-transmissive elastomer filling the shell inner cavity and covering the light emitting source and the photoelectric detection device; a diaphragm supported on the open end of the shell and being attached to the light-transmissive elastomer, the diaphragm being configured to deform with the light-transmissive elastomer during changes to the external environment; and a reflective part arranged on the diaphragm, the reflective part being configured to reflect the light rays emitted by the light emitting source to the photoelectric detection device. The sensor of the present invention does not have the problem of acoustic resistance and does not need a large volume back cavity, greatly reducing the overall size of the sensor and enhancing the reliability of the sensor.
Description
Claims (10)
- 一种传感器,其特征在于,包括:A sensor, comprising:具有中空内腔且上端开口的壳体,在所述壳体内腔的底端设置有用于朝向壳体开口端发出光线的发光源,以及用于接收反射光线的光电检测器;A housing with a hollow inner cavity and an open upper end, a light source for emitting light toward the open end of the housing, and a photodetector for receiving reflected light are provided at the bottom end of the inner cavity of the housing;填充在壳体内腔并将发光源、光电检测器覆盖住的透光弹性体;A light-transmitting elastomer filled in the inner cavity of the housing and covered by the light source and the photodetector;承载在壳体开口端并与透光弹性体贴合在一起的振膜,所述振膜被配置为在外界环境的变化下与透光弹性体发生形变;在所述振膜上设置有反射部,所述反射部被配置为将发光源发出的光线反射至光电检测器上。A vibrating membrane carried on the open end of the casing and bonded to the light-transmitting elastomer, the vibrating membrane is configured to deform with the light-transmitting elastomer under the change of the external environment; a reflecting portion is provided on the vibrating membrane The reflecting portion is configured to reflect the light emitted from the light source onto the photodetector.
- 根据权利要求1所述的传感器,其特征在于:所述透光弹性体的机械灵敏度小于或者等于振膜的机械灵敏度。The sensor according to claim 1, wherein the mechanical sensitivity of the transparent elastic body is less than or equal to the mechanical sensitivity of the diaphragm.
- 根据权利要求1所述的传感器,其特征在于:所述壳体包括由侧壁部围成的腔体,以及封闭侧壁部下端开口的底部;所述发光源、光电检测器设置在底部上。The sensor according to claim 1, characterized in that: the housing includes a cavity surrounded by a side wall portion, and a bottom portion that closes an opening at the lower end of the side wall portion; the light source and the photodetector are disposed on the bottom portion .
- 根据权利要求3所述的传感器,其特征在于:所述底部为电路板,在所述电路板的外侧还设置有用于外接的焊盘或者引脚。The sensor according to claim 3, wherein the bottom is a circuit board, and a pad or pin for external connection is further provided on the outside of the circuit board.
- 根据权利要求1所述的传感器,其特征在于:所述透光弹性体与振膜的接触面为平面。The sensor according to claim 1, wherein a contact surface between the transparent elastic body and the diaphragm is a flat surface.
- 根据权利要求1所述的传感器,其特征在于:所述透光弹性体与振膜的接触面为上凸或者下凹的曲面。The sensor according to claim 1, wherein a contact surface of the transparent elastic body and the diaphragm is a curved surface that is convex upward or concave.
- 根据权利要求1所述的传感器,其特征在于:所述发光源为激光二极管;所述光电检测器为四象限光电检测器。The sensor according to claim 1, wherein: the light source is a laser diode; and the photodetector is a four-quadrant photodetector.
- 根据权利要求1所述的传感器,其特征在于:所述反射部为形成在振膜上的金属薄膜层。The sensor according to claim 1, wherein the reflection portion is a metal thin film layer formed on a diaphragm.
- 根据权利要求1所述的传感器,其特征在于:在所述壳体内腔的底部设置有多组光电检测器、发光源,所述光电检测器的数量与其相对应。The sensor according to claim 1, characterized in that a plurality of sets of photodetectors and light emitting sources are provided at the bottom of the inner cavity of the housing, and the number of the photodetectors corresponds to it.
- 根据权利要求1至9任一项所述的传感器,其特征在于:所述传感器为麦克风、压力传感器、位移传感器。The sensor according to any one of claims 1 to 9, wherein the sensor is a microphone, a pressure sensor, or a displacement sensor.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810772091.9A CN108989919B (en) | 2018-07-13 | 2018-07-13 | Sensor |
CN201810772091.9 | 2018-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020010950A1 true WO2020010950A1 (en) | 2020-01-16 |
Family
ID=64537557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2019/088915 WO2020010950A1 (en) | 2018-07-13 | 2019-05-29 | Sensor |
Country Status (2)
Country | Link |
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CN (1) | CN108989919B (en) |
WO (1) | WO2020010950A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112019985B (en) * | 2020-10-15 | 2021-01-22 | 潍坊歌尔微电子有限公司 | Microphone structure and electronic equipment |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201118979Y (en) * | 2007-07-09 | 2008-09-17 | 祝文光 | Semiconductor laser microphone |
CN101646121A (en) * | 2008-08-08 | 2010-02-10 | 鸿富锦精密工业(深圳)有限公司 | Microphone module |
US20130142519A1 (en) * | 2011-03-22 | 2013-06-06 | Panasonic Corporation | Optical microphone |
CN104113813A (en) * | 2014-06-20 | 2014-10-22 | 宁波兴隆电子有限公司 | MEMS fiber microphone |
CN105452832A (en) * | 2013-06-06 | 2016-03-30 | 丹麦技术大学 | All-optical pressure sensor |
CN106153227A (en) * | 2016-08-31 | 2016-11-23 | 贾岳杭 | The stress and strain detection device measured based on intensity of illumination |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5995260A (en) * | 1997-05-08 | 1999-11-30 | Ericsson Inc. | Sound transducer and method having light detector for detecting displacement of transducer diaphragm |
EP2982938B1 (en) * | 2011-04-08 | 2018-08-29 | Murata Manufacturing Co., Ltd. | Operation device including displacement sensor |
CN103901556A (en) * | 2012-12-27 | 2014-07-02 | 鸿富锦精密工业(深圳)有限公司 | Photoelectric conversion module |
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2018
- 2018-07-13 CN CN201810772091.9A patent/CN108989919B/en active Active
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2019
- 2019-05-29 WO PCT/CN2019/088915 patent/WO2020010950A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201118979Y (en) * | 2007-07-09 | 2008-09-17 | 祝文光 | Semiconductor laser microphone |
CN101646121A (en) * | 2008-08-08 | 2010-02-10 | 鸿富锦精密工业(深圳)有限公司 | Microphone module |
US20130142519A1 (en) * | 2011-03-22 | 2013-06-06 | Panasonic Corporation | Optical microphone |
CN105452832A (en) * | 2013-06-06 | 2016-03-30 | 丹麦技术大学 | All-optical pressure sensor |
CN104113813A (en) * | 2014-06-20 | 2014-10-22 | 宁波兴隆电子有限公司 | MEMS fiber microphone |
CN106153227A (en) * | 2016-08-31 | 2016-11-23 | 贾岳杭 | The stress and strain detection device measured based on intensity of illumination |
Also Published As
Publication number | Publication date |
---|---|
CN108989919A (en) | 2018-12-11 |
CN108989919B (en) | 2020-09-22 |
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