WO2020007217A1 - 五自由度外差光栅干涉测量系统 - Google Patents

五自由度外差光栅干涉测量系统 Download PDF

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WO2020007217A1
WO2020007217A1 PCT/CN2019/092921 CN2019092921W WO2020007217A1 WO 2020007217 A1 WO2020007217 A1 WO 2020007217A1 CN 2019092921 W CN2019092921 W CN 2019092921W WO 2020007217 A1 WO2020007217 A1 WO 2020007217A1
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measurement
grating
light
beam splitting
interferometry system
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French (fr)
Inventor
张鸣
朱煜
杨富中
王磊杰
成荣
李鑫
叶伟楠
胡金春
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Tsinghua University
Beijing U Precision Tech Co Ltd
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Tsinghua University
Beijing U Precision Tech Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/344—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using polarisation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Definitions

  • the invention relates to the technical field of interferometry, and more particularly, to a five-degree-of-freedom heterodyne grating interferometry system.
  • the interferometric measurement system As a typical displacement sensor, the interferometric measurement system has the advantages of length traceability, high measurement accuracy, large measurement range, large dynamic measurement range, easy installation and debugging, etc., and is widely used in precision and ultra-precision measurement fields. Common in precision machinery and processing equipment.
  • interferometry systems can be mainly divided into laser interferometry systems and grating interferometry systems.
  • Laser interferometry systems are based on the principle of laser interference measurement
  • grating interferometry systems are based on the principle of diffraction interference.
  • the measurement basis is the grating pitch. The sensitivity to environmental fluctuations is relatively low, and the accuracy of repeated measurements is higher.
  • Interferometers commonly used in industrial applications can only achieve displacement measurement in a single direction.
  • the measurement accuracy of existing commercial interferometers can usually reach nanometers, achieving higher measurement accuracy, but in actual measurement processes, they are often subject to The influences of geometric installation errors such as Abbe error and cosine error cause inaccurate measurement results; and during the movement, additional displacement caused by the slight rotation angle caused by vibration and so on cannot be avoided.
  • measurement indexes such as measurement accuracy, measurement distance, and measurement speed have been continuously improved. For example, in the position measurement system of the ultra-precision workpiece table of a photolithography machine, the demand for multi-degree-of-freedom measurement has gradually increased.
  • a common method is to use a plurality of single-degree-of-freedom laser measurement systems to form a distributed multi-degree-of-freedom measurement system, such as the US patent US6020964B2 (published February 1, 2000) by ASML in the Netherlands and the US patent by Nikon in Japan
  • a similar six-degree-of-freedom measurement system is used in US6980279B2 (published on December 27, 2005) and US patent US 7355719B2 (published on April 8, 2008) by Agilent in the United States, that is, multi-axis laser interference is arranged in the horizontal direction It uses a 45 ° mirror to introduce the measurement light into the Z axis, and installs mirrors on the sides and in the Z direction.
  • the measurement system has the advantages of simple and compact optical structure, convenient actual installation and operation, and good stability and economy.
  • the grating interferometry system can achieve nanometer and submicron radian resolution, and can simultaneously measure two linear displacements and three smaller stroke rotations.
  • the measurement system can effectively reduce the deficiencies of the distributed interferometry system in the application of ultra-precision workpiece table, and improve the performance of the ultra-precision workpiece table of the lithography machine.
  • the grating interferometry system can also be applied to the precision measurement of multi-degree-of-freedom displacement of workpiece tables such as precision machine tools, coordinate measuring machines, semiconductor inspection equipment, and other occasions where large-stroke linear displacement and multi-degree of freedom measurement are required.
  • a five-degree-of-freedom heterodyne grating interferometric measurement system includes: a single-frequency laser 1 for emitting a single-frequency laser, the single-frequency laser can be split into a reference beam and a measurement beam; an interferometer mirror group 3 And a measurement grating 4 for forming the reference light and the measurement light into a reference interference signal and a measurement interference signal; a plurality of optical fiber bundles 5 respectively receiving the measurement interference signal and the reference interference signal.
  • a multi-mode optical fiber receives interference signals at different positions on the same plane.
  • the reference interference signal is one channel
  • the measurement interference signal is two channels
  • the two measurement interference signals and one reference interference signal are respectively received by the optical fiber bundle 5, and four of each optical fiber bundle 5
  • Each multi-mode fiber receives interference signals at different positions on the same plane, and each multi-mode fiber outputs four optical signals for a total of twelve optical signals.
  • the measurement grating 4 can perform linear movements of two degrees of freedom horizontally and vertically with respect to the interferometer lens group 3, and three rotation angle movements.
  • the interferometer lens group 3 includes: a reflector 35, a refractive element 33, a 1/4 wave plate 34, a beam splitter prism 31, and a polarization beam splitter prism 32 in sequence from one side to the other, wherein the beam splitter prism 31 is located above the polarization beam splitting prism 32.
  • the reference light is divided into three beams after passing through the beam splitting prism 31, and is reflected by the polarization beam splitting prism 32 as reference light for three-way interference signals;
  • the measurement light is divided into three beams after passing through the beam splitting prism 31, and two beams of measurement light are reflected by the polarization beam splitting prism 32 and then pass through the 1/4 wave plate 34 and the refractive element 33 and are incident on the beam.
  • the measurement grating 4 returns after being diffracted by the grating, and transmits again through the polarization beam splitting prism 32, and then interferes with two of the three reference signals of the interference signal to form two measurement interference signals;
  • the polarization beam splitting prism 32 After another beam of measurement light is reflected by the polarization beam splitting prism 32, it first passes through the 1/4 wave plate 34, then is reflected by the mirror 35 and returns along the original optical path, and passes through the 1/4 wave plate 34 again. 2. After transmitting through the polarization beam splitting prism 32, it interferes with the other of the three reference signals of the interference signal to form a reference interference signal.
  • the components in the interferometer lens group 3 are closely adjacent and fixed and integrated into an integrated structure.
  • the cross section of the refractive element 33 is an isosceles trapezoid, and the measurement light is refracted when transmitted through both sides of the trapezoid, and reflected when transmitted through the top of the trapezoid.
  • the incident light path at a specific angle reaches the measurement grating 4, the specific angle makes the diffracted light path coincide with the incident light path, and the diffracted light path passes through
  • the refractive element 33 interferes in parallel with two of the three reference signals of the interference signal to form two measurement interference signals.
  • the interferometry system further includes an acousto-optic modulator 2, and the acousto-optic modulator 2 is configured to shift the frequency of the single-frequency laser beam after the beam splitting.
  • the interferometry system further includes a photoelectric conversion unit 6 and an electronic signal processing unit 7, wherein: the photoelectric conversion unit 6 is configured to receive an optical signal transmitted by the multimode optical fiber 5 and convert the optical signal into an electrical signal for input. To the electronic signal processing section 7;
  • the electronic signal processing unit 7 receives the electrical signal, and is used to calculate a linear displacement and / or a rotational movement of the measurement grating 4.
  • the five-degree-of-freedom heterodyne grating interferometry system provided by the present invention has the following advantages:
  • the measurement system of the present invention can realize simultaneous measurement of five degrees of freedom including two translational displacements and three rotation angles, while greatly improving measurement efficiency, low environmental sensitivity, easy processing of measurement signals, and resolution and The accuracy can reach nanometer or even higher.
  • the measurement system of the present invention has a small volume and a high degree of integration, which effectively improves the space utilization rate and the integration degree of the entire application system.
  • the measurement system of the present invention can effectively avoid the measurement accuracy due to the geometrical installation error between the interferometer and the motion unit, which is existing in single-degree-of-freedom measurement, on the basis of meeting the measurement accuracy requirements. Impact.
  • FIG. 1 is a schematic diagram of a five-degree-of-freedom heterodyne grating interferometric measurement system according to the present invention
  • FIG. 2 is a schematic structural diagram of an interferometer mirror group according to the present invention.
  • FIG. 3 is a schematic diagram of an optical fiber bundle according to the present invention.
  • FIG. 4 is a schematic view in the direction of the arrow A of FIG. 3 of the present invention.
  • 1 single-frequency laser
  • 2 acousto-optic modulator
  • 3 interferometer mirror group
  • 4 measurement grating
  • 5 fiber bundle
  • 6 photoelectric conversion unit
  • 7 electronic signal processing component
  • 31 spectral prism
  • 32-polarizing beam splitting prism 32-polarizing beam splitting prism
  • 33-refractive element 34-1 / 4 wave plate, 35-reflector.
  • connection should be understood in a broad sense unless explicitly stated and limited otherwise.
  • they may be fixed connections or removable.
  • Connection, or integral connection it can be mechanical or electrical connection; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements.
  • connection, or integral connection it can be mechanical or electrical connection; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements.
  • FIG. 1 is a schematic diagram of a five-degree-of-freedom heterodyne grating interferometry system according to the present invention.
  • the five-degree-of-freedom heterodyne grating interferometry system includes a single-frequency laser 1, an acoustooptic modulator 2, and an interferometer.
  • Mirror group 3 measuring grating 4, optical fiber bundle 5, photoelectric conversion unit 6, and electronic signal processing unit 7.
  • the measurement grating 4 is a one-dimensional reflective grating.
  • FIG. 2 is a schematic structural diagram of an interferometer lens group according to the present invention.
  • the interferometer lens group 3 is from one side to the other side (from left to right in FIG. 2, or from close to the measurement grating 4). (From one side to the other side) includes: a reflector 35, a refractive element 33, a 1/4 wave plate 34, a beam splitting prism 31, and a polarization beam splitting prism 32, and the beam splitting prism 31 is located above the polarization beam splitting prism 32, That is, the spectroscopic prism 31 is located on the upper layer of the interferometer mirror group, the polarization beam splitter prism 32 is located on the lower layer of the interferometer mirror group, and the refractive element 33 is located near the top end of one side of the interferometer mirror group (near the top end on the left in FIG. 2).
  • the components in the interferometer lens group 3 are closely adjacent and fixed, integrated into an integrated structure, and more preferably, the
  • FIG. 3 is a schematic cross-sectional view of the optical fiber bundle according to the present invention
  • FIG. 4 is an A-direction schematic view of FIG. 3 according to the present invention.
  • each optical fiber bundle 5 includes four multimode optical fibers. Located at different positions in the same plane, it is used to receive interference signals at different spatial positions, and four independent optical signals are generated after being transmitted by the optical fiber.
  • the single-frequency laser 1 emits single-frequency light, which is split by the fiber coupling and beam splitter and then incident on the acousto-optic modulator 2 to shift the frequency. After being collimated by the Green lens, two channels of polarized light s light with frequency difference are obtained. One of them is used as reference light and the other is used as measurement light.
  • the reference light passes through the upper beam splitting prism 31 and is split twice to obtain three laser beams, which are incident downward and reflected by the polarizing beam splitting prism as the three-way interference signal reference light.
  • the measurement light passes through the beam splitting prism 31, and three laser beams are also incident downward. Two of them are reflected by the polarization beam splitting prism 32, then pass through the 1/4 wave plate 34, the refractive element 33 is deflected, and then enter the measuring grating 4. After diffraction, the ⁇ 1st-order diffracted light contains the rotation angle and displacement information of the grating, returns along the original optical path, passes through the 1/4 wave plate 34 again, and the polarization beam splitter prism 32 transmits and interferes with the reference light to form two-way measurement interference signals; One measurement light is reflected by the polarization beam splitting prism 32, and then passes through the 1/4 wave plate 34 in turn. After reflection by the mirror 35, it returns along the original optical path. After passing through the 1/4 wave plate 34 again, the polarization beam splitting prism 32 transmits and interferes with the reference light to form Reference interference signal.
  • the light path of the present invention adopts a litro-type arrangement, that is, after the measurement light is deflected by the refractive element 33, the measurement light is incident on the measurement grating 4 at a specific angle, so that the diffracted optical path coincides with the incident optical path, and the diffracted optical path passes through the refractive element.
  • 33 forms the measurement light parallel to the reference light, passes through the 1/4 wave plate 34 again, and the polarization beam splitter prism 32 transmits the interference with the reference light to form two measurement signals.
  • the two measurement interference signals and one reference interference signal are respectively received by three optical fiber bundles 5.
  • Each optical fiber bundle contains four multi-mode optical fibers, and the optical signals at different spatial positions of the same interference signal are collected.
  • a total of twelve channels of optical fibers are formed, which are transmitted to the photoelectric conversion unit 6 to be converted into electrical signals, and then input to the electronic signal processing unit 7 for processing.
  • the rotation angle of the grating can be calculated based on the principle of differential wavefront.
  • Information and simultaneously measure three rotation angles; compensate the phase caused by the additional displacement according to the obtained rotation angle, and solve the two-degree-of-freedom linear motion.
  • the electronic signal processing component 7 will output two-degree-of-freedom linear displacements and corner movements.
  • ⁇ x, y, z is the grating rotation angle
  • x, z is the grating displacement
  • ⁇ 1,2,3,4,5,6,7,8 is the reading of the electronic signal processing card
  • ⁇ x, y, z is Calibration constants
  • ⁇ x ⁇ , z ⁇ are additional displacement compensation phases
  • p is the grating pitch of the grating
  • ⁇ is the laser wavelength
  • ⁇ is the Littrow angle.
  • the measurement system and structural scheme given in the above embodiments can realize the simultaneous measurement of three rotational degrees of freedom and two linear degrees of freedom, and the system has a short optical path for measurement and has little impact on the environment.
  • the use of optical fiber bundles in the measurement system can effectively reduce The number of system components improves the system's anti-interference ability and system integration.
  • the measurement signal is easy to process.
  • the measurement resolution of the corner can reach micro-radians and the measurement resolution of the linear displacement can reach nm.
  • the grating interferometer measurement system also has Simple structure, small size, light weight, easy installation and layout, convenient application, etc.
  • the five-degree-of-freedom heterodyne grating interferometry system can also be applied to the precision measurement of multi-degree-of-freedom displacements of workpiece tables such as precision machine tools, three-coordinate measuring machines, and semiconductor inspection equipment.
  • the arrangement of multiple five-degree-of-freedom interferometry systems enables redundant ultra-precise measurement with six degrees of freedom, which is suitable for the six-degree-of-freedom position and attitude measurement of lithography machine workpiece tables.

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  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
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Abstract

一种五自由度外差光栅干涉测量系统，包括单频激光器（1），用于发出单频激光，单频激光可分束为一束参考光和一束测量光；干涉仪镜组（3）和测量光栅（4），用于将参考光和测量光形成参考干涉信号和测量干涉信号；多束光纤束（5），分别接收测量干涉信号和参考干涉信号，每束光纤束（5）中有多根多模光纤，分别接收同一平面上不同位置处的干涉信号。该测量系统具有对环境不敏感、体积小、质量轻、便于布置等优点，采用多个五自由度干涉测量系统布置，利用冗余信息即可实现六自由度的超精密测量，适用于光刻机工件台等六自由度位置和姿态测量的需求。

Description

五自由度外差光栅干涉测量系统 技术领域
本发明涉及干涉测量技术领域，更具体地，涉及一种五自由度外差光栅干涉测量系统。
背景技术
干涉测量系统作为一种典型的位移传感器具有对长度的可追溯性、测量精度高、测量范围大、动态测量范围大、易于安装和调试等优点，而被广泛应用于精密和超精密测量领域，常见于精密机械和加工设备中。目前干涉测量系统主要可以分为激光干涉测量系统和光栅干涉测量系统，激光干涉测量系统是基于激光干涉的测量原理，而光栅干涉测量系统基于衍射干涉原理，其测量基准为光栅的栅距，对环境波动的敏感性相对较低，重复测量精度更高。
工业应用中普遍采用的干涉仪只能实现单个方向的位移测量，目前现有的商用干涉仪测量精度通常可以达到纳米量级，实现较高的测量精度，但在实际测量过程中，往往会受到如阿贝误差和余弦误差等几何安装误差的影响，造成测量结果的不准确；且在运动过程中，由于振动等引起的微小转角带来的附加位移无法避免。随着精密机械的不断进步，测量精度、测量距离、测量速度等运动指标的不断提高，如在光刻机超精密工件台的位置测量系统中，多自由度测量的需求逐渐提升。
针对上述问题，通常方法是采用多个单自由度激光测量系统组成分布式的多自由度测量系统，如荷兰ASML公司美国专利US 6020964B2(公开日2000年2月1日)、日本Nikon公司美国专利US 6980279B2(公开日2005年12月27日)、美国Agilent公司美国专利US 7355719B2(公开日2008年4月8日)中均采用类似的六自由度测量系统，即水平方向上布置多轴激光干涉仪，利用45°反射镜将测量光引入Z轴，侧面和Z向安装反射镜，利用位移差分计算转角，实现六自由度测量，但分布式的干涉测量系统占用空间大、安装调整 困难，难以满足测量需求。光栅干涉测量系统中，常见的为二自由度测量系统如德国Heidenhain公司美国专利US0058173A1(公开日2007年3月15日)，而无法实现更多自由度的同时测量。其他如Lee等基于二自由度光栅干涉测量系统，利用PSD和特定光路结构提出的一种简单的六自由度同时测量方法[C.B.Lee,G.H.Kim,and S.K.Lee,“Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultra-precision linear stage”,Meas.Sci.Technol,2011]，但测量系统的结构较复杂，多自由度的测量依赖于特定的光路结构，测量的一致性和稳定性较差，并且测量精度很大程度上受限于探测器性能，一般转角测量精度只能达到角秒量级，位移测量精度只能达到微米量级，难以满足超精密测量系统的性能要求。
发明内容
考虑到上述技术方案的局限，寻求一种精密五自由度外差光栅干涉测量系统，该测量系统具有光学结构简单紧凑，便于实际安装操作，稳定性及经济性均较好等优点。该光栅干涉测量系统能够实现纳米和亚微弧度的分辨率，且能够同时测量两个直线位移和三个较小行程的旋转。该测量系统能够有效的降低分布式干涉测量系统在超精密工件台应用中的不足，使光刻机超精密工件台性能提升。此外，该光栅干涉测量系统还能应用于精密机床、三坐标测量机、半导体检测设备等的工件台多自由度位移的精密测量等需要大行程直线位移和多自由度测量的场合。
本发明所采用的技术方案为：
一种五自由度外差光栅干涉测量系统，包括：单频激光器1，用于发出单频激光，所述单频激光可分束为一束参考光和一束测量光；干涉仪镜组3和测量光栅4，用于将所述参考光和测量光形成参考干涉信号和测量干涉信号；多束光纤束5，分别接收所述测量干涉信号和参考干涉信号，每束光纤束5中有多根多模光纤，分别接收同一平面上不同位置处的干涉信号。
进一步的，所述参考干涉信号为一路，所述测量干涉信号为两路；所述两路测量干涉信号和一路参考干涉信号，分别经所述光纤束5接收，每束光纤束5中有四根多模光纤，分别接收同一平面上不同位置处的干涉信号，每 束多模光纤输出四个光信号，共十二路光信号。
进一步的，所述测量光栅4可相对于所述干涉仪镜组3做水平向和垂向两个自由度的线性运动，以及三个转角运动。
进一步的，所述干涉仪镜组3从一侧到另一侧依次包括：反射镜35、折光元件33、1/4波片34、分光棱镜31和偏振分光棱镜32，其中，所述分光棱镜31位于所述偏振分光棱镜32之上。
进一步的，所述参考光经过所述分光棱镜31后分为三束，并通过所述偏振分光棱镜32反射后作为三路干涉信号的参考光；
所述测量光经过所述分光棱镜31后分为三束，其中两束测量光经过所述偏振分光棱镜32反射后，依次通过所述1/4波片34、所述折光元件33后入射至所述测量光栅4，经光栅衍射后返回，再次经过所述偏振分光棱镜32透射后，与所述三路干涉信号的参考光中的两路干涉，形成两路测量干涉信号；
另一束测量光经过所述偏振分光棱镜32反射后，先通过所述1/4波片34，然后经所述反射镜35反射后沿原光路返回，再次经过所述1/4波片34、经所述偏振分光棱镜32透射后与与所述三路干涉信号的参考光中的另一路干涉，形成一路参考干涉信号。
进一步的，所述干涉仪镜组3中各组件之间紧密邻接固定，集成为一体化结构。
进一步的，所述折光元件33截面为等腰梯形，所述测量光经梯形两侧透射时发生折射，经梯形顶部透射时发生反射。
进一步的，所述其中两束测量光经所述折光元件33后，以特定角度的入射光路至所述测量光栅4，所述特定角度使得衍射光路与所述入射光路重合，所述衍射光路经过所述折光元件33与所述三路干涉信号的参考光中的两路平行干涉，形成两路测量干涉信号。
进一步的，所述干涉测量系统还包括声光调制器2，所述声光调制器2用于对分束后的所述单频激光进行移频。
进一步的，所述干涉测量系统还包括光电转换单元6和电子信号处理部件7，其中：所述光电转换单元6用于接收所述多模光纤5传输的光信号并转换为电信号，以输入至所述电子信号处理部件7；
所述电子信号处理部件7接收所述电信号，用以解算所述测量光栅4的 线性位移和/或转角运动。
与现有技术相比，本发明所提供的五自由度外差光栅干涉测量系统，具有以下优点：
(1)本发明的测量系统能够实现包括两个平动位移和三个转角在内的五自由度同时测量，极大提高测量效率的同时，环境敏感度低，测量信号易于处理，分辨率与精度可达纳米甚至更高。
(2)本发明测量系统的体积小，集成度高，有效地提高了空间利用率和整个应用系统的集成度。
(3)本发明测量系统对比以往的多自由干涉测量系统，在满足测量精度要求的基础上，可有效的避免了单自由度测量时存在的由于干涉仪和运动单元间几何安装误差对测量精度的影响。
附图说明
通过参考以下具体实施方式及权利要求书的内容并且结合附图，本发明的其它目的及结果将更加明白且易于理解。在附图中：
图1为本发明所述五自由度外差光栅干涉测量系统的示意图；
图2为本发明所述干涉仪镜组的结构示意图；
图3为本发明所述光纤束的示意图；
图4为本发明图3的A向示意图。
图中，1—单频激光器，2—声光调制器，3—干涉仪镜组，4—测量光栅，5—光纤束，6—光电转换单元，7—电子信号处理部件；31—分光棱镜，32—偏振分光棱镜，33—折光元件，34—1/4波片，35—反射镜。
具体实施方式
下面将结合附图对本发明的技术方案进行清楚、完整地描述，显然，所描述的实施例是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
在本发明的描述中，需要说明的是，术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图 所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”、“第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。
图1为本发明所述五自由度外差光栅干涉测量系统的示意图，如图1所示，所述五自由度外差光栅干涉测量系统包括单频激光器1、声光调制器2、干涉仪镜组3、测量光栅4、光纤束5、光电转换单元6和电子信号处理部件7。优选地，所述测量光栅4为一维反射型光栅。
图2为本发明所述干涉仪镜组的结构示意图，如图2所示，干涉仪镜组3从一侧到另一侧(图2中从左侧到右侧，或从靠近测量光栅4的一侧到另一侧)依次包括：反射镜35、折光元件33、1/4波片34、分光棱镜31和偏振分光棱镜32，所述分光棱镜31位于所述偏振分光棱镜32之上，也就是说，分光棱镜31位于干涉仪镜组上层，偏振分光棱镜32位于干涉仪镜组下层，折光元件33位于干涉仪镜组一侧顶端附近(图2中左侧顶端附近)，为实现高度一体化集成，优选地将干涉仪镜组3中各组件之间紧密邻接固定，集成为一体化结构，更为优选地，各组件之间均采用粘接的方式固定。
图3为本发明所述光纤束的截面示意图，图4为本发明图3的A向示意图，如图3和4所示，每束光纤束5包括四根多模光纤。位于同一平面内的不同位置，用于接收不同空间位置处的干涉信号，经光纤传输后产生四个独立的光信号。
结合图1和图2详细说明光栅干涉测量系统的原理，具体地：
单频激光器1出射单频光，经光纤耦合、光线分束器分束后入射至声光调制器2移频，并经格林透镜准直后得到两路带有频差的偏振光s光，其中一路作为参考光，一路作为测量光。
参考光经过上层分光棱镜31两次分光后得到三束激光，向下入射经过偏振分光棱镜反射后作为三路干涉信号的参考光。
测量光经过分光棱镜31分光后同样得到三束激光向下入射，其中两路经过偏振分光棱镜32反射后，依次通过1/4波片34，折光元件33偏转后入射至测量光栅4，经光栅衍射后，±1级衍射光中包含光栅的转角和位移信息，沿原光路返回，再次经过1/4波片34，偏振分光棱镜32透射后与参考光干涉，形成两路测量干涉信号；另一路测量光经过偏振分光棱镜32反射，依次通过1/4波片34，反射镜35反射后沿原光路返回，再次经过1/4波片34，偏振分光棱镜32透射后与参考光干涉，形成参考干涉信号。
优选地，本发明光路采用利特罗式布置，即所述测量光经折光元件33后偏转后，测量光以特定角度入射至测量光栅4，使得衍射光路与入射光路重合，衍射光路经过折光元件33形成与参考光平行的测量光，再次通过1/4波片34，偏振分光棱镜32透射后与参考光干涉，形成两路测量信号。
所述两路测量干涉信号和一路参考干涉信号，分别经三束光纤束5接收，每束光纤束内部含有四根多模光纤，采集同一干涉信号不同空间位置处的光信号，一共有十二根光纤，共形成十二路信号，传输至光电转换单元6转换为电信号，并输入至电子信号处理部件7进行处理，利用得到的相位信息，基于差分波前原理即可解算出光栅的转角信息，同时实现三个转动角度的测量；根据所得转角对附加位移引起的相位进行补偿，解算二自由度线性运动。所述测量光栅4相对于干涉仪镜组3做水平向和垂向两个自由度的线性运动，和三个转角运动时，电子信号处理部件7将输出二自由度线性位移和转角运动。
五自由度运动解算的表达式为
Figure PCTCN2019092921-appb-000001
Figure PCTCN2019092921-appb-000002
Figure PCTCN2019092921-appb-000003
Figure PCTCN2019092921-appb-000004
Figure PCTCN2019092921-appb-000005
式中，θ x,y,z为光栅转角，x,z为光栅位移，φ 1,2,3,4,5,6,7,8为电子信号处理卡读数，Γ x,y,z为标定常数，φ xθ,zθ为附加位移补偿相位，p为光栅的栅距，λ为激光波长，θ为利特罗角。
上述实施方式中给出的测量系统及结构方案能够实现三个转动自由度和两个线性自由度的同时测量，且系统测量光路短，受环境影响很小，测量系统采用光纤束可有效的减少系统部件数量，提高系统的抗干扰能力和系统集成性，测量信号易于处理，转角的测量分辨率可达微弧度，线性位移的测量分辨率可达nm级；同时该光栅干涉仪测量系统还具有结构简单，体积小，质量轻，易于安装和布置，应用方便等优点。应用于光刻机超精密工件台的位移测量，对比激光干涉仪测量系统，在满足测量需求的基础上，可有效的降低工件台体积、质量，大大提高工件台的动态性能，使工件台整体性能综合提高。该五自由度外差光栅干涉测量系统还可应用于精密机床、三坐标测量机、半导体检测设备等的工件台多自由度位移的精密测量中。采用多个五自由度干涉测量系统布置，利用冗余信息即可实现六自由度的超精密测量，适用于光刻机工件台等六自由度位置和姿态测量的需求。
尽管前面公开的内容示出了本发明的示例性实施例，但是应当注意，在不背离权利要求限定的范围的前提下，可以进行多种改变和修改。此外，尽管本发明的元素可以以个体形式描述或要求，但是也可以设想具有多个元素，除非明确限制为单个元素。

Claims (11)

  1. 一种五自由度外差光栅干涉测量系统，包括：单频激光器(1)，用于发出单频激光，所述单频激光分束为一束参考光和一束测量光；干涉仪镜组(3)和测量光栅(4)，用于将所述参考光和测量光形成参考干涉信号和测量干涉信号，其特征在于，还包括：多束光纤束(5)，分别接收所述测量干涉信号和参考干涉信号，每束光纤束(5)中有多根多模光纤，分别接收同一平面上不同位置处的干涉信号。
  2. 根据权利要求1所述的光栅干涉测量系统，其特征在于，所述参考干涉信号为一路，所述测量干涉信号为两路，所述两路测量干涉信号和一路参考干涉信号分别经所述光纤束(5)接收，每束光纤束(5)中有四根多模光纤，分别接收同一平面上不同位置处的干涉信号，每束多模光纤输出四个光信号，共十二路光信号。
  3. 根据权利要求1所述的光栅干涉测量系统，其特征在于，所述测量光栅(4)相对于所述干涉仪镜组(3)做水平向和垂向两个自由度的线性运动，以及三个转角运动。
  4. 根据权利要求2所述的光栅干涉测量系统，其特征在于，所述测量光栅(4)相对于所述干涉仪镜组(3)做水平向和垂向两个自由度的线性运动，以及三个转角运动。
  5. 根据权利要求1所述的光栅干涉测量系统，其特征在于，所述干涉仪镜组(3)从一侧到另一侧依次包括：反射镜(35)、折光元件(33)、1/4波片(34)、分光棱镜(31)和偏振分光棱镜(32)，其中，所述分光棱镜(31)位于所述偏振分光棱镜(32)之上。
  6. 根据权利要求5所述的光栅干涉测量系统，其特征在于，所述参考光经过所述分光棱镜(31)后分为三束，并通过所述偏振分光棱镜(32)反射后作为三路干涉信号的参考光；
    所述测量光经过所述分光棱镜(31)后分为三束，其中两束测量光经过所述偏振分光棱镜(32)反射后，依次通过所述1/4波片(34)、所述折光元件(33)后入射至所述测量光栅(4)，经光栅衍射后返回，再次经过所述偏振分光棱镜(32)透射后，与所述三路干涉信号的参考光中的两路干涉，形成两路测量干涉信号；
    另一束测量光经过所述偏振分光棱镜(32)反射后，先通过所述1/4波片(34)，然后经所述反射镜(35)反射后沿原光路返回，再次经过所述1/4波片(34)、经所述偏振分光棱镜(32)透射后与所述三路干涉信号的参考光中的另一路干涉，形成一路参考干涉信号。
  7. 根据权利要求5所述的光栅干涉测量系统，其特征在于，所述干涉仪镜组(3)中各组件之间邻接固定，集成为一体化结构。
  8. 根据权利要求5所述的光栅干涉测量系统，其特征在于，所述折光元件 (33)截面为等腰梯形，所述测量光经梯形两侧透射时发生折射，经梯形顶部透射时发生反射。
  9. 根据权利要求6所述的光栅干涉测量系统，其特征在于，所述其中两束测量光经所述折光元件(33)后，以特定角度的入射光路至所述测量光栅(4)，所述特定角度使得衍射光路与所述入射光路重合，所述衍射光路经过所述折光元件(33)与所述三路干涉信号的参考光中的两路平行干涉，形成两路测量干涉信号。
  10. 根据权利要求1所述的光栅干涉测量系统，其特征在于，所述干涉测量系统还包括声光调制器(2)，用于对分束后的所述单频激光进行移频。
  11. 根据权利要求2所述的光栅干涉测量系统，其特征在于，所述干涉测量系统还包括光电转换单元(6)和电子信号处理部件(7)，其中：
    所述光电转换单元(6)用于接收所述光纤束(5)传输的光信号并转换为电信号，以输入至所述电子信号处理部件(7)；
    所述电子信号处理部件(7)接收所述电信号，用以解算所述测量光栅(4)的线性位移和/或转角运动。
PCT/CN2019/092921 2018-07-02 2019-06-26 五自由度外差光栅干涉测量系统 Ceased WO2020007217A1 (zh)

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