CN207487600U - 一种平面光栅干涉仪位移测量系统 - Google Patents
一种平面光栅干涉仪位移测量系统 Download PDFInfo
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- CN207487600U CN207487600U CN201721512521.0U CN201721512521U CN207487600U CN 207487600 U CN207487600 U CN 207487600U CN 201721512521 U CN201721512521 U CN 201721512521U CN 207487600 U CN207487600 U CN 207487600U
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Inventor after: Zhang Ming Inventor after: Hu Jinchun Inventor after: Zhu Yu Inventor after: Wang Leijie Inventor after: Xia Ye Inventor after: Cheng Rong Inventor after: Ye Weinan Inventor after: Ni Chang Inventor after: Ding Siqi Inventor after: Jia Zhe Inventor before: Zhang Ming Inventor before: Hu Jinchun Inventor before: Zhu Yu Inventor before: Wang Leijie Inventor before: Xia Ye Inventor before: Cheng Rong Inventor before: Ye Weinan Inventor before: Ni Chang Inventor before: Ding Siqi Inventor before: Jia Zhe |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180612 Effective date of abandoning: 20230926 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180612 Effective date of abandoning: 20230926 |
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AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |