WO2020006799A1 - 基于柔性聚合物波导的压力传感器 - Google Patents

基于柔性聚合物波导的压力传感器 Download PDF

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WO2020006799A1
WO2020006799A1 PCT/CN2018/098425 CN2018098425W WO2020006799A1 WO 2020006799 A1 WO2020006799 A1 WO 2020006799A1 CN 2018098425 W CN2018098425 W CN 2018098425W WO 2020006799 A1 WO2020006799 A1 WO 2020006799A1
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waveguide
optical waveguide
pressure
optical
output
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PCT/CN2018/098425
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English (en)
French (fr)
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何祖源
马麟
杨晓宇
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上海交通大学
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre

Definitions

  • a pressure sensor is a device or device that can sense the pressure signal and convert the pressure signal into a usable output electrical signal according to a certain rule.
  • a pressure sensor usually consists of a pressure-sensitive element and a signal processing unit. According to different test pressure types, pressure sensors can be divided into gauge pressure sensors, differential pressure sensors and absolute pressure sensors.
  • the traditional pressure sensors are mainly mechanical structure type devices, and the deformation of the elastic element is used to indicate the pressure, but this structure is large in size and heavy in weight and cannot provide electrical output. With the development of technology, electrostatic pressure sensors, piezoelectric pressure sensors and semiconductor pressure sensors have also emerged.
  • An electrostatic capacitance type pressure sensor is a capacitor that opposes a fixed pole of glass and a movable pole of silicon, and converts a change in the electrostatic capacity generated by deforming the movable pole by an external force (pressure) into an electrical signal.
  • Piezo pressure sensors are based on the piezoelectric effect and can only measure dynamic stress.
  • the semiconductor piezoelectric impedance diffusion pressure sensor forms a semiconductor deformation pressure on the surface of a sheet, and deforms the sheet by an external force (pressure) to generate a piezoelectric impedance effect, so that the change in impedance is converted into an electrical signal.
  • the above new sensors have the advantages of small size, light weight and high accuracy. However, because the essence is that it converts pressure signals into capacitance, current, or voltage electrical signals, it is easy to receive electromagnetic interference, and it is difficult to process and manufacture on flexible materials, and it forms an array-type sensing unit.
  • the present invention proposes a pressure sensor based on a flexible polymer waveguide, which has a three-dimensional flexible structure in space.
  • the waveguide material has good ductility and a large Young's modulus.
  • One or more optical waveguide directional couplers or interferometers that can change the intensity ratio or phase difference of the light emitted from different optical paths with the pressure on the pressure sensing area, to achieve single-point or array-type pressure measurement, which can be used as pressure Sensors are used in wearable devices or other stress measurement scenarios.
  • the invention relates to a pressure-sensitive optical waveguide directional coupler, comprising: two non-contact fiber cores, wherein: the input ports and output ports of the two fiber cores are horizontally symmetrically arranged, and a pressure detection area in the middle of the fiber core; Set for vertical symmetry.
  • the distance between the input port and the output port is 80-250 ⁇ m
  • the middle region arranged vertically and symmetrically is a coupling region
  • the interval between the upper and lower waveguides is 5-25 ⁇ m
  • the length of the coupling region is 2-20 mm.
  • the working wavelength of the optical waveguide directional coupler is 600-1650nm.
  • the invention relates to an application based on the above-mentioned optical waveguide directional coupler, which is used for accurate measurement of minute pressure.
  • the measurement specifically refers to: by using a preset ratio of light to be input into the coupling region from any or at the same time in the input port, the coupling distance and the equivalent optical path difference are caused by the slight change in the distance of the core of the coupling region due to pressure. Change, so as to change the power ratio of the output port. By comparing the relationship between the center wavelength frequency shift of the interference peak and the pressure change in the interference pattern, accurate measurement of small pressure changes is achieved.
  • the invention relates to a method for preparing an optical waveguide directional coupler. After a cladding is coated on a substrate with a mold, a waveguide with a three-dimensional structure is directly made in the cladding by a direct writing method.
  • the direct writing method refers to: using a dispenser to write a fiber core material into a cladding and curing it to form a three-dimensional waveguide by ultraviolet light curing, and finally removing a mold to complete the preparation of a directional coupler.
  • the refractive index difference (absolute value) of the core layer and the cladding written by the dispenser is 0.003-0.2, and the core diameter written is 7-50 ⁇ m.
  • the directional coupler includes: a pressure-sensitive optical waveguide directional coupler, an M-Z interference type optical waveguide, and a Michelson interference type optical waveguide.
  • the M-Z interference type optical waveguide includes: an input port, a Y-shaped waveguide, a test branch and a reference branch connected in parallel with each other, and an output port.
  • the Michelson interference optical waveguide includes: an input port and an output port located on the same side, a Y-waveguide, an inverted Y-waveguide, and reflectors respectively disposed at two ends of the inverted Y-waveguide.
  • FIG. 2 is a schematic diagram of preparation of an optical waveguide
  • 3 is a three-dimensional perspective view of a unit structure of an optical waveguide
  • 401, 402 are waveguide input ends, and 403, 404 are waveguide output ends;
  • FIG. 4 is a three-view schematic diagram of a unit structure of an optical waveguide
  • a is a front view
  • b is a top view
  • c is a side view
  • FIG. 5 is a three-dimensional schematic diagram of an M-Z interference type optical waveguide
  • Figure 6 is a schematic diagram of Figure 5;
  • FIG. 7 is a three-dimensional schematic diagram of a Michelson interference optical waveguide
  • FIG. 8 is a schematic diagram of FIG. 7;
  • Embodiment 9a is a schematic structural diagram of Embodiment 2.
  • FIG. 9b is a schematic diagram of the Michelson optical waveguide group 17
  • FIG. 10 is a schematic diagram of data measured by an optical power and a spectral ratio test unit of an optical waveguide
  • Figure 11 shows the measured wavelength shift of the interferometer before and after the pressure change.
  • FIG. 2 a flowchart of preparing a flexible polymer waveguide according to this embodiment is prepared, and the flexible polymer waveguide shown in FIG. 3 and FIG. 4 is prepared, which includes two non-contact fiber cores, wherein: The input and output ports of the two cores are arranged horizontally symmetrically, and the middle area of the cores are vertically symmetrically arranged.
  • the distance between the input port and the output port is 250 ⁇ m, and the distance between the central regions arranged vertically and symmetrically is 15 ⁇ m.
  • the optical waveguide pressure measurement system includes: a narrow line-width fiber laser 1, an optical modulator 2, a PLC beam splitter 3, and a flexible polymer prepared based on a direct writing method in series.
  • Waveguide group 4 a multi-channel power meter 5 and an optical fiber coupler 15 provided at the output end of the flexible polymer waveguide 4, a balance detector 9, a data acquisition card 10, and an output connected to the multi-channel power meter 5 connected in order to the optical fiber coupler 15.
  • the computer 11 is connected to the output terminal of the data acquisition card 10, wherein a polarization controller 6 is further provided between the PLC beam splitter 3 and the optical fiber coupler 15, and the light modulator 2 passes the signal shape generator 7 and the DC voltage source 8 The modulation signal is controlled and output.
  • the signal generator 7, the DC voltage source 8 and the data acquisition card 10 share a clock signal 14.
  • the narrow-line-width fiber laser 1 is connected to the optical modulator 2 through a polarization-maintaining fiber.
  • the optical modulator 2 modulates the signals output by the DC source 8 and the signal generator 7 and outputs the signals to the PLC optical splitter 3, and through a movable optical connector 16 and the flexible polymer waveguide group 4 and the polarization controller 6, the polarization of the light is adjusted by adjusting the polarizer 6; the multi-channel power meter 5 transmits the collected optical power ratio to the computer 11 for the 8 channels received
  • the power value is processed to obtain a power-pressure fitting curve; the local light output from the polarizer 6 is adjusted to the measured light output from the flexible polymer waveguide group 4 through a 50:50 fiber coupler 15, After the balance detector 9 is converted into a digital signal, it is collected by the data acquisition card 10, synthesized and processed by the computer 11, and the pressure and phase relationship is obtained. Finally, the data received by 10 is combined with the data received from 5. Get the final pressure measurement.
  • the polarization maintaining fiber is preferably a single-mode fiber.
  • the flexible polymer waveguide group 4 includes: mutually independent at least one intensity modulation optical waveguide directional coupler prepared based on the direct writing method and at least one phase modulation optical waveguide prepared based on the direct writing method, which are respectively arranged in The input / output connection is made in a three-dimensional space of a whole waveguide through a movable optical connector 16.
  • the intensity modulation type optical waveguide directional coupler includes a micro-bend type, a projection type, a reflection type, and an evanescent wave coupling type.
  • the phase modulation type optical waveguide includes an M-Z interference type as shown in FIG. 5, a Michelson interference type as shown in FIG. 7, and an F-P interference type.
  • the intensity modulation type optical waveguide directional coupler and the phase modulation type optical waveguide overlap each other in a horizontal position, and are staggered from each other in a vertical position.
  • the measurement specifically refers to inputting the coupling region from the input ports 401 and / or 402 of the two fiber cores through light at a preset ratio, respectively.
  • the optical coupling area is the pressure detection area. There is no light output at the output port 403 or 404 (the preset ratio is 1: 0) or at the output ports 403 and 404. Output at a certain ratio.
  • the coupling distance and the equivalent optical path difference are changed due to the slight change in the distance of the core by the pressure, thereby realizing the output power ratio of the output ports 403 and 404, that is, the change of the splitting ratio
  • the relationship between the center wavelength frequency shift of the interference peak and the pressure change in the interference pattern accurate measurement of small pressure changes is achieved.
  • the incident light is divided into a test branch 23 and a reference branch 24 through the Y waveguide 22, and the two channels of light are coherent through a coupler 25 to obtain the following In the interference pattern of Fig. 11, the distance of light translation can be seen by comparing the spectra of the two channels of light, and the magnitude of the pressure can be obtained from it.
  • P and P 2 are the input optical power of input port 401 and the output light of output port 404 in FIG. 3, respectively Power, ⁇ is the waveguide constant, d and L 0 are the vertical spacing and coupling length, F and A are the force and area applied to the sensor chip, respectively, and E is the Young's modulus of the waveguide material.
  • the pressure measurement system for an optical waveguide is compared with the embodiment.
  • the interference component 4 in the optical waveguide in FIG. 1 is replaced with a Michelson optical waveguide as shown in FIG. 9b. Group 17, so as to achieve a movable optical connector at one end, thereby reducing the additional loss caused by the implementation.
  • This embodiment specifically includes: a narrow line-width fiber laser 1, a light modulator 2, a PLC beam splitter 3, a Michelson optical waveguide group 17, a multi-channel power meter provided at the output end of the Michelson optical waveguide group 17, connected in series.
  • the balance detector 9, the data acquisition card 10, and the computer 11 connected to the output of the multi-channel power meter 5 and the output of the data acquisition card 10 are connected in sequence.
  • the Michelson optical waveguide group 17 includes: at least one phase modulation optical waveguide prepared based on the direct writing method, that is, including at least one M-Z interference type or Michelson interference optical waveguide.

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Abstract

一种基于柔性聚合物波导的压力传感器，包括：两根不相接触的纤芯，其中：两个纤芯的输入端口和输出端口均为水平对称设置，纤芯中部的压力检测区域为竖直对称设置。本发明具有空间三维可弯折结构，波导材料具有良好的延展性和较大的杨氏模量，通过波导设计能够使不同光路出射光强度比或相位差随压力传感区域受到的压力大小而变化的一个或多个光波导定向耦合器或干涉仪，实现单点式或阵列式的压力测量，可以作为压力传感器应用于可穿戴设备或其他压力测量场景。

Description

基于柔性聚合物波导的压力传感器 技术领域
本发明涉及一种压力传感领域的技术，具体涉及一种采用直写法制备得到的基于柔性聚合物波导的单点或阵列式的面状压力传感器。
背景技术
压力传感器是能感受压力信号，并能按照一定的规律将压力信号转换成可用的输出的电信号的器件或装置。压力传感器通常由压力敏感元件和信号处理单元组成。按不同的测试压力类型，压力传感器可分为表压传感器、差压传感器和绝压传感器。传统的压力传感器以机械结构型的器件为主，以弹性元件的形变指示压力，但这种结构尺寸大、质量重，不能提供电学输出。随着技术的发展，静电容量型压力传感器、压电式压力传感器及半导体压力传感器也应运而生。静电容量型压力传感器是将玻璃的固定极和硅的可动极相对而形成电容，将通过外力(压力)使可动极变形所产生的静电容量的变化转换成电气信号。压电式压力传感器基于压电效应，只能够测量动态的应力。半导体压电阻抗扩散压力传感器是在薄片表面形成半导体变形压力，通过外力(压力)使薄片变形而产生压电阻抗效果，从而使阻抗的变化转换成电信号。以上新型传感器具有体积小、质量轻、准确度较高等优点。但由于本质是其通过将压力信号转化为电容或、电流或电压电信号，所以容易收到电磁干扰，也难以在柔性材质上加工制作，并构成阵列式的传感单元。
发明内容
本发明针对现有技术存在的上述不足，提出一种基于柔性聚合物波导的压力传感器，具有空间三维可弯折结构，波导材料具有良好的延展性和较大的杨氏模量，通过波导设计能够使不同光路出射光强度比或相位差随压力传感区域受到的压力大小而变化的一个或多个光波导定向耦合器或干涉仪，实现单点式或阵列式的压力测量，可以作为压力传感器应用于可穿戴设备或其他压力测量场景。
本发明是通过以下技术方案实现的：
本发明涉及一种压力敏感的光学波导定向耦合器，包括：两根不相接触的纤芯，其中：两个纤芯的输入端口和输出端口均为水平对称设置，纤芯中部的压力检测区域为竖直对称设置。
所述的输入端口和输出端口的间距为80-250μm，竖直对称设置的中部区域为耦合区，其上下波导的间隔为5-25μm，耦合区长度为2-20mm。
所述的光学波导定向耦合器的工作波长为600-1650nm。
本发明涉及一种基于上述光学波导定向耦合器的应用，将其用于微小压力的精确测量。
所述的测量具体是指：通过以预设比例的光分别从输入端口中的任意或同时输入耦合区，由于压力对耦合区纤芯的距离的细微改变导致耦合距离以及等效光程差的改变，从而实现输出端口的功率比值的改变，通过比较干涉图样中干涉峰的中心波长频移与压力变化之间的关系，实现对微小压力变化的精确测量。
本发明涉及一种光学波导定向耦合器的制备方法，通过将带有模具的基板上涂覆包层后，以直写法在包层中直接制成立体结构的波导。
所述的直写法是指：使用点胶机将纤芯材料写入包层中并通过紫外光固化形成立体结构的波导，最后去除模具完成定向耦合器的制备。
所述的点胶机写入的芯层与包层折射率差(绝对值)为0.003-0.2，写入的纤芯直径为7-50μm。
所述的定向耦合器包括：压力敏感的光学波导定向耦合器、M-Z干涉型光学波导和迈克尔逊干涉型光学波导。
所述的M-Z干涉型光学波导包括：输入端口、Y形波导、相互并联的测试支路和参考支路以及输出端口。
所述的迈克尔逊干涉型光学波导包括：位于同侧的输入端口和输出端口、与之分别相连的Y形波导、倒Y形波导以及分别设置于倒Y形波导两个末端的反射镜。
附图说明
图1为光波导压力测量系统示意图；
图中：1窄线宽光纤激光器、2光调制器、3PLC分光器、4柔性聚合物波导组、5多通道功率计、6偏振控制器、7信号形发生器、8直流电压源、9平衡探测器、10数据采集卡、11计算机、12信号脉冲信号、13直流电流、14时钟信号、15光纤耦合器、16活动光连接头；
图2为光波导制备示意图；
图3为光波导的单元结构的三维立体图；
图中：401、402为波导输入端、403、404为波导输出端；
图4为光波导的单元结构的三视图示意图；
图中：a为正视图；b为俯视图；c为侧视图；
图5为M-Z干涉型光学波导三维示意图；
图6为图5原理图；
图中：21激光器、22Y波导、23测试支路、24参考支路、25耦合器；
图7为迈克尔逊干涉型光学波导三维示意图；
图8为图7原理图；
图中：31激光器、32Y波导、33反射镜、34相位检测及信号处理模块；
图9a为实施例2结构示意图；
图中：17为迈克尔逊光波导组件；
图9b为迈克尔逊光波导组17示意图；
图10为光波导的光功率与分光比测试单元所测得到的数据示意图；
图11为干涉仪在压力变化前后所测得的波长平移。
具体实施方式
实施例1
如图2所示，为本实施例涉及的制备柔性聚合物波导的流程图，制备得到如图3和图4所示的柔性聚合物波导，其包括两根不相接触的纤芯，其中：两个纤芯的输入端口和输出端口均为水平对称设置，纤芯的中部区域为竖直对称设置。
所述的输入端口和输出端口的间距为250μm，竖直对称设置的中部区域的距离为15μm。
如图1所示，为本实施例涉及的光波导压力测量系统，其中包含：依次串联的窄线宽光纤激光器1、光调制器2、PLC分光器3、基于直写法制备得到的柔性聚合物波导组4，设置于柔性聚合物波导4输出端的多通道功率计5和光纤耦合器15、与光纤耦合器15依次连接的平衡探测器9、数据采集卡10以及与多通道功率计5的输出端和数据采集卡10的输出端相连的计算机11，其中：PLC分光器3和光纤耦合器15之间进一步设有偏振控制器6，光调制器2通过信号形发生器7和直流电压源8控制并输出调制信号，信号形发生器7、直流电压源8和数据采集卡10共用一个时钟信号14。
所述的窄线宽光纤激光器1通过保偏光纤与光调制器2相连，光调制器2将直流源8以及信号发生器7输出的信号调制后输出至PLC分光器3，通过活动光连接头16与柔性聚合物波导组4以及偏振控制器6，通过调节偏振器6实现对光的偏振校准；多通道功率计5将采集到的光功率比传送到计算机11中进行对接收到的8通道的功率数值经行处理并得到功率与压力的拟合曲线；通过50：50的光纤耦合器15将调节偏振器6输出的本地光与柔性聚合物波导组4输出的所测光相互拍频，经平衡探测器9转为数字信号后由数据采集卡10采集，通过计算机11进行合成和处理分析并得到压力与相位关系，最终通过将10接收到的数据与从5接收到的数据相结合，得到最终压力的测量结果。
所述的保偏光纤优选采用单模光纤。
所述的柔性聚合物波导组4包括：相互独立的至少一个基于直写法制备得到的强度调制型光学波导定向耦合器和至少一个基于直写法制备得到的相位调制型光学波导，其分别排布在 一整块波导的立体空间内且通过活动光连接头16进行输入/出的连接。
所述的强度调制型光学波导定向耦合器包括：微弯型、投射型、反射型以及倏逝波耦合型。
所述的相位调制型光学波导包括：如图5所示的M-Z干涉型、如图7所示的迈克尔逊干涉型以及F-P干涉型。
所述的强度调制型光学波导定向耦合器和相位调制型光学波导在水平位置上相互重叠，在垂直位置上互相错开。
如图3所示，所述的测量具体是指：通过以预设比例的光分别从两个纤芯的输入端口401和/或402输入耦合区。
当未受到压力时，由于上下纤芯的距离较远，光耦合区域即压力检测区域，对应在输出端口403或404则没有光输出(预设比例为1:0)或在输出端口403和404分别以一定比例输出。
当压力检测区域收到压力后，由于压力对纤芯的距离的细微改变导致耦合距离以及等效光程差的改变，从而实现输出端口403与404在输出的功率比值，即分光比的改变，通过比较干涉图样中干涉峰的中心波长频移与压力变化之间的关系，实现对微小压力变化的精确测量。
如图5、图6和图11所示，通过在测试纤芯上施加压力，入射光通过Y波导22分成测试支路23和参考支路24，通过耦合器25将两路光相干，得到如图11的干涉图样，通过对比两路光的光谱可以看出光平移的距离，从中得到压力的大小。
如图10所示，所述的分光比与外部压力之间的关系为:
P 2/P＝cos 2(βexp(λ(d-(Fd/AE)))L 0)，其中：P和P 2分别为图3中输入端口401的输入光功率和输出端口404的输出光功率，β为波导常数，d和L 0分别为垂直间距和耦合长度，F和A分别为施加在传感芯片上的力及其面积，E为波导材料的杨氏模量。
如图10所示，实线与点线表示分光比与传感芯片变形相关性的计算与实验结果。可以观察到，分光比会随着波导材料的变形的增加而以周期性振荡。
实施例2
如图9a所示，为本实施例涉及的光波导压力测量系统，与实施例相比本实施例将图1中的光波导中的干涉组件4替换为如图9b所示的迈克尔逊光波导组17，从而实现一端使活动光连接头，进而降低实施方案所带来的额外损耗。
本实施例具体包含：依次串联的窄线宽光纤激光器1、光调制器2、PLC分光器3、迈克尔逊光波导组17、设置于迈克尔逊光波导组17输出端的多通道功率计5、设置于PLC分光器3和迈克尔逊光波导组17之间的偏振控制器6，其中：偏振控制器6以及迈克尔逊光波导组17 的一个输出端口与光纤耦合器15相连，光纤耦合器15的输出端依次连接的平衡探测器9、数据采集卡10以及与多通道功率计5的输出端和数据采集卡10的输出端相连的计算机11。
如图9b所示，所述的迈克尔逊光波导组17包括：基于直写法制备得到的至少一个相位调制型光学波导，即包括至少一个M-Z干涉型或迈克尔逊干涉型光学波导。
上述具体实施可由本领域技术人员在不背离本发明原理和宗旨的前提下以不同的方式对其进行局部调整，本发明的保护范围以权利要求书为准且不由上述具体实施所限，在其范围内的各个实现方案均受本发明之约束。

Claims (13)

  1. 一种压力敏感的光学波导定向耦合器，其特征在于，包括：两根不相接触的纤芯，其中：两个纤芯的输入端口和输出端口均为水平对称设置，纤芯中部的压力检测区域为竖直对称设置。
  2. 根据权利要求1所述的光学波导定向耦合器，其特征是，所述的输入端口和输出端口的间距为80-250μm，竖直对称设置的中部区域为耦合区，其上下波导的间隔为5-25μm，耦合区长度为2-20mm。
  3. 根据权利要求1所述的光学波导定向耦合器，其特征是，所述的光学波导定向耦合器的工作波长为600-1650nm。
  4. 一种基于权利要求1～3中任一所述光学波导定向耦合器的应用，其特征在于，将其用于微小压力的精确测量。
  5. 根据权利要求4所述的应用，其特征是，所述的测量具体是指：通过以预设比例的光分别从输入端口中的任意或同时输入耦合区，由于压力对耦合区纤芯的距离的细微改变导致耦合距离以及等效光程差的改变，从而实现输出端口的功率比值的改变，通过比较干涉图样中干涉峰的中心波长频移与压力变化之间的关系，实现对微小压力变化的精确测量。
  6. 一种光学波导定向耦合器的制备方法，其特征在于，通过将带有模具的基板上涂覆包层后，以直写法在包层中直接制成立体结构的波导；
    所述的直写法是指：使用点胶机将纤芯材料写入包层中并通过紫外光固化形成立体结构的波导，最后去除模具完成定向耦合器的制备。
  7. 根据权利要求6所述的方法，其特征是，所述的点胶机写入的芯层与包层折射率差为0.003-0.2，写入的纤芯直径为7-50μm。
  8. 根据权利要求6所述的方法，其特征是，所述的定向耦合器包括：压力敏感的光学波导定向耦合器、M-Z干涉型光学波导和迈克尔逊干涉型光学波导。
  9. 根据权利要求8所述的方法，其特征是，所述的M-Z干涉型光学波导包括：输入端口、 Y形波导、相互并联的测试支路和参考支路以及输出端口；
    所述的迈克尔逊干涉型光学波导包括：位于同侧的输入端口和输出端口、与之分别相连的Y形波导、倒Y形波导以及分别设置于倒Y形波导两个末端的反射镜。
  10. 一种光波导压力测量系统，其特征在于，包括：依次串联的窄线宽光纤激光器、光调制器、PLC分光器、根据权利要求6～9中任一所述方法制备得到的柔性聚合物波导组，设置于柔性聚合物波导输出端的多通道功率计和光纤耦合器、与光纤耦合器依次连接的平衡探测器、数据采集卡以及与多通道功率计的输出端和数据采集卡的输出端相连的计算机，其中：PLC分光器和光纤耦合器之间进一步设有偏振控制器，光调制器通过信号形发生器和直流电压源控制并输出调制信号，信号形发生器、直流电压源和数据采集卡共用一个时钟信号。
  11. 根据权利要求11所述的系统，其特征是，所述的柔性聚合物波导组包括：相互独立的至少一个基于直写法制备得到的强度调制型光学波导定向耦合器和至少一个基于直写法制备得到的相位调制型光学波导，其分别排布在一整块波导的立体空间内且通过活动光连接头进行输入/出的连接。
  12. 一种光波导压力测量系统，其特征在于，包括：依次串联的窄线宽光纤激光器、光调制器、PLC分光器、根据权利要求6～9中任一所述方法制备得到的迈克尔逊光波导组、设置于迈克尔逊光波导组输出端的多通道功率计、设置于PLC分光器和迈克尔逊光波导组之间的偏振控制器，其中：偏振控制器以及迈克尔逊光波导组的一个输出端口与光纤耦合器相连，光纤耦合器的输出端依次连接的平衡探测器、数据采集卡以及与多通道功率计的输出端和数据采集卡的输出端相连的计算机。
  13. 根据权利要求13所述的系统，其特征是，所述的迈克尔逊光波导组包括：基于直写法制备得到的至少一个相位调制型光学波导，即包括至少一个M-Z干涉型或迈克尔逊干涉型光学波导。
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