WO2019240516A3 - Gate valve system and control method therefor - Google Patents

Gate valve system and control method therefor Download PDF

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Publication number
WO2019240516A3
WO2019240516A3 PCT/KR2019/007163 KR2019007163W WO2019240516A3 WO 2019240516 A3 WO2019240516 A3 WO 2019240516A3 KR 2019007163 W KR2019007163 W KR 2019007163W WO 2019240516 A3 WO2019240516 A3 WO 2019240516A3
Authority
WO
WIPO (PCT)
Prior art keywords
sealing plate
gate valve
sealing
passage
control method
Prior art date
Application number
PCT/KR2019/007163
Other languages
French (fr)
Korean (ko)
Other versions
WO2019240516A2 (en
Inventor
최대규
Original Assignee
(주) 엔피홀딩스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020180068939A external-priority patent/KR102131285B1/en
Priority claimed from KR1020180070670A external-priority patent/KR102127189B1/en
Priority claimed from KR1020180070671A external-priority patent/KR102131284B1/en
Priority claimed from KR1020190002393A external-priority patent/KR20200086139A/en
Application filed by (주) 엔피홀딩스 filed Critical (주) 엔피홀딩스
Priority claimed from KR1020190070243A external-priority patent/KR102278560B1/en
Publication of WO2019240516A2 publication Critical patent/WO2019240516A2/en
Publication of WO2019240516A3 publication Critical patent/WO2019240516A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

Embodiments of the present invention provide a gate valve comprising: a sealing plate for opening/closing a chamber; a support part connected to the sealing plate; a driving part for vertically moving the support part; a valve housing having the sealing plate and the support part therein and having a passage and a replacement part; a first sealing member for sealing the passage by means of the movement of the sealing plate; and a second sealing member for sealing the replacement part by means of the movement of the sealing plate, wherein the driving part moves the sealing plate to the location corresponding to the passage or the replacement part. Thus, the moving distance of the sealing plate is minimized such that the gate valve operate reliably, manufacturing costs thereof are reduced, movement time of the sealing plate can be saved and the space of the gate valve can be saved.
PCT/KR2019/007163 2018-06-15 2019-06-13 Gate valve system and control method therefor WO2019240516A2 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR1020180068939A KR102131285B1 (en) 2018-06-15 2018-06-15 Gate valve
KR10-2018-0068939 2018-06-15
KR1020180070670A KR102127189B1 (en) 2018-06-20 2018-06-20 Door exchange type gate valve system
KR10-2018-0070671 2018-06-20
KR10-2018-0070670 2018-06-20
KR1020180070671A KR102131284B1 (en) 2018-06-20 2018-06-20 Door exchange type gate valve system
KR10-2019-0002393 2019-01-08
KR1020190002393A KR20200086139A (en) 2019-01-08 2019-01-08 Gate valve system for preheating and its control method
KR1020190070243A KR102278560B1 (en) 2019-06-13 2019-06-13 Gate valve system and its control method
KR10-2019-0070243 2019-06-13

Publications (2)

Publication Number Publication Date
WO2019240516A2 WO2019240516A2 (en) 2019-12-19
WO2019240516A3 true WO2019240516A3 (en) 2020-02-06

Family

ID=68843518

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2019/007163 WO2019240516A2 (en) 2018-06-15 2019-06-13 Gate valve system and control method therefor

Country Status (1)

Country Link
WO (1) WO2019240516A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021117955A1 (en) * 2021-07-12 2023-01-12 Vat Holding Ag Valve
NL2030241B1 (en) * 2021-12-22 2023-06-29 Rheavita Bv Device and method for freeze-drying liquid-containing composition

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05306779A (en) * 1992-05-06 1993-11-19 Kobe Steel Ltd Gate valve
KR100715919B1 (en) * 2000-03-30 2007-05-08 램 리써치 코포레이션 Single shaft, dual blade vacuum slot valve and method for implemting the same
KR100756110B1 (en) * 2004-12-17 2007-09-05 동경 엘렉트론 주식회사 Gate valve apparatus, processing system and method of exchanging a seal member
JP2017026128A (en) * 2015-07-28 2017-02-02 大日本印刷株式会社 Gate device, processing system, and sealing part replacement method
KR20170076159A (en) * 2015-12-24 2017-07-04 인베니아 주식회사 Gate valve and apparatus for processing substrate using the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05306779A (en) * 1992-05-06 1993-11-19 Kobe Steel Ltd Gate valve
KR100715919B1 (en) * 2000-03-30 2007-05-08 램 리써치 코포레이션 Single shaft, dual blade vacuum slot valve and method for implemting the same
KR100756110B1 (en) * 2004-12-17 2007-09-05 동경 엘렉트론 주식회사 Gate valve apparatus, processing system and method of exchanging a seal member
JP2017026128A (en) * 2015-07-28 2017-02-02 大日本印刷株式会社 Gate device, processing system, and sealing part replacement method
KR20170076159A (en) * 2015-12-24 2017-07-04 인베니아 주식회사 Gate valve and apparatus for processing substrate using the same

Also Published As

Publication number Publication date
WO2019240516A2 (en) 2019-12-19

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