WO2019234715A1

WO2019234715A1 - Cartridge for containing an evaporable material and method therefor

Info

Publication number: WO2019234715A1
Application number: PCT/IB2019/054788
Authority: WO
Inventors: Zhibin Wang; Michael HELANDER
Original assignee: Oti Lumionics Inc.
Priority date: 2018-06-08
Filing date: 2019-06-07
Publication date: 2019-12-12
Also published as: JP7425484B2; CN112384638A; KR20210018923A; JP2021527165A

Abstract

A system for depositing a thin film includes: (i) a cartridge defining a receptacle for receiving an evaporable material and defining an aperture configured to allow vapor to be discharged from the cartridge, the cartridge including: (a) a gas permeable member arranged in a vapor path between the receptacle and the aperture; and (b) a baffle arranged in a vapor path between the gas permeable member and the aperture; and (ii) a heating element configured to heat the cartridge to evaporate the evaporable material, thereby generating a first vapor stream. The system is configured to cause the first vapor stream to condense onto the gas permeable member to form an intermediate coating thereon, and the system is configured to cause the intermediate coating to re-evaporate to generate a second vapor stream, the second vapor stream being discharged through the aperture.

Description

CARTRIDGE FOR CONTAINING AN EVAPORABLE MATERIAL AND METHOD

THEREFOR

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of and priority to US Provisional Application No. 62/682,726, filed June 8, 2018, the contents of which are incorporated herein by reference in their entireties.

TECHNICAL FIELD

[0002] The subject of the disclosure relates to materials for use in a thermal evaporation process. Specifically, apparatus and method for thermally evaporating a material is described herein.

BACKGROUND

[0003] Thermal evaporators are generally used to deposit thin films in a wide variety of applications, including for the fabrication of opto-electronic devices, semiconductor devices, and optical coatings. For example, various organic and/or inorganic layers of opto-electronic devices, including those of organic light-emitting diodes (OLEDs) and organic photovoltaic devices (OPVs), may be deposited through a thermal evaporation process.

[0004] Generally, evaporation is conducted in a vacuum chamber by evaporating or sublimating a source material, and allowing the evaporated source material to travel to a target surface where the evaporated source material becomes cooled and is deposited through desublimation. Evaporation of the source material is typically achieved by heating the material to its sublimation temperature using, for example, resistive heating or electron- beam heating.

[0005] Various thermal evaporator sources include“boat” type evaporation sources, “box” type evaporation sources, and Knudsen cell (or K-cell) sources. Boat-type evaporation sources typically include a boat in the form of a resistive heating element provided with a recess for receiving the source material. During evaporation, electric current is passed through the boat, thus causing the boat to be heated in order to evaporate the source material. Box-type evaporation sources are typically configured to receive the source material inside an enclosure with one or more apertures formed for allowing the evaporated material to escape upon being heated. For evaporators utilizing an electron-beam as the heat source, the source material is heated by bombardment of a high-energy electron beam to cause evaporation of the source material.

[0006] Thermal evaporators may generally be configured as a point source, a linear source, or a surface source. For example, a point source is generally adapted to eject a vapor material from a single point. A linear source may generally be adapted to eject a vapor material from a linear nozzle or a series of nozzles arranged linearly. A surface source may generally be adapted to eject a vapor material from a series of nozzles arranged in a planar configuration.

SUMMARY

[0007] According to some embodiments, a system for depositing a thin film includes: (i) a cartridge defining a receptacle for receiving an evaporable material and defining an aperture configured to allow vapor to be discharged from the cartridge, the cartridge including: (a) a gas permeable member arranged in a vapor path between the receptacle and the aperture; and (b) a baffle arranged in a vapor path between the gas permeable member and the aperture; and (ii) a heating element configured to heat the cartridge to evaporate the evaporable material, thereby generating a first vapor stream. The system is configured to cause the first vapor stream to condense onto the gas permeable member to form an intermediate coating thereon, and the system is configured to cause the

intermediate coating to re-evaporate to generate a second vapor stream, the second vapor stream being discharged through the aperture.

[0008] According to some embodiments, a cartridge for use in depositing a thin film includes: (i) a body defining a receptacle for receiving an evaporable material and defining an aperture configured to allow vapor to be discharged from the cartridge; (ii) a gas permeable member arranged inside the body in a vapor path between the receptacle and the aperture; and (iii) a baffle arranged inside the body in a vapor path between the gas permeable member and the aperture.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Some embodiments will now be described by way of example with reference to the appended drawings wherein:

[0010] FIG. 1 is a perspective view of an evaporator in one example; [0011] FIG. 2 is a cross-sectional view of the evaporator of FIG. 1 ;

[0012] FIG. 3 is a schematic illustration of a dispersible source material;

[0013] FIG. 4A, FIG. 4B, and 4C are perspective views of a cartridge according to various embodiments;

[0014] FIG. 5 is a cross-sectional view of an evaporator in one example;

[0015] FIG. 6 is a perspective view of a linear evaporator in one example;

[0016] FIG. 7 is a cross-sectional view of the linear evaporator of FIG. 6;

[0017] FIG. 8A, FIG. 8B, and FIG. 8C are perspective views of a cartridge according to various embodiments;

[0018] FIG. 9 is a perspective view of a cartridge according to one example;

[0019] FIG. 10 is a cross-sectional view of the cartridge of FIG. 9 in one example;

[0020] FIG. 11 is a cross-sectional view of the cartridge of FIG. 9 in another example;

[0021] FIG. 12 is a cross-sectional view of the cartridge of FIG. 9 in yet another example;

[0022] FIG. 13A, FIG. 13B, and FIG. 13C are perspective views of a cartridge according to various embodiments;

[0023] FIG. 14A, FIG. 14B, and FIG. 14C are perspective views of a cartridge according to various embodiments;

[0024] FIG. 14D and FIG. 14E are cross-sectional views of a cartridge according to various embodiments;

[0025] FIG. 15A, FIG. 15B, and FIG. 15C are perspective views of a cartridge according to various embodiments;

[0026] FIG. 16A and FIG. 16B are cross-sectional views of an evaporator provided with cartridges according to various embodiments; [0027] FIG. 17 is a perspective view of a linear evaporator in one example; [0028] FIG. 18 is a cross-sectional view of the linear evaporator of FIG. 17; [0029] FIG. 19A, FIG. 19B, FIG. 19C, FIG. 19D, FIG. 19E, and FIG. 19F illustrate a surface of a carrier member according to various embodiments; [0030] FIG. 20A, FIG. 20B, FIG. 20C, FIG. 20D, and FIG. 20E illustrate a cross-sectional view of a carrier member coated with an evaporable coating according to various

embodiments; [0031] FIG. 21 is a schematic illustration of a carrier member coated with an evaporable coating; [0032] FIG. 22, FIG. 23, FIG. 24, FIG. 25, FIG. 26, FIG. 27, FIG. 28, FIG. 29, and FIG. 30 illustrate a cartridge provided with one or more carrier members arranged therein according to various embodiments; [0033] FIG. 31 A, FIG. 31 B, FIG. 31C, and FIG. 31 D illustrate a cartridge provided with an evaporable coating according to various embodiments; [0034] FIG. 32A illustrate a perspective view of a cartridge according to one

embodiment; [0035] FIG. 32B illustrate a cross-sectional view of the cartridge of FIG. 32A; [0036] FIG. 33A illustrate a perspective view of a cartridge according to one

embodiment; [0037] FIG. 33B illustrate a cross-sectional view of the cartridge of FIG. 33A; [0038] FIG. 34A illustrate a cross-sectional view of a cartridge provided with an evaporable coating in one embodiment; [0039] FIG. 34B illustrate a cross-sectional view of a cartridge provided with an evaporable coating arranged inside an evaporator in one embodiment; [0040] FIG. 35A illustrate a perspective view of an elongated carrier member provided with an evaporable coating according to one embodiment; [0041] FIG. 35B illustrate a cross-sectional view of the elongated carrier member of FIG. 35 A; [0042] FIG. 36 illustrate a carrier member provided with an evaporable coating according to one embodiment; [0043] FIG. 37 illustrate a carrier member provided with an evaporable coating according to another embodiment; [0044] FIG. 38 illustrate a plurality of carrier members arranged inside a cartridge according to one embodiment; [0045] FIG. 39 illustrate an annular cartridge according to one embodiment; [0046] FIG. 40 illustrate the annular cartridge of FIG. 39 disposed inside an evaporator according to one embodiment; [0047] FIG. 41 illustrates a cylindrical cartridge according to one embodiment; [0048] FIG. 42A illustrates a cross-sectional view of the cylindrical cartridge according to one embodiment; [0049] FIG. 42B illustrates a cross-sectional view of the cylindrical cartridge according to another embodiment; [0050] FIG. 42C illustrates a cross-sectional view of the cylindrical cartridge according to yet another embodiment; [0051] FIG. 43A illustrates a bottom view of the cylindrical cartridge according to one embodiment; [0052] FIG. 43B illustrates a bottom view of the cylindrical cartridge according to another embodiment; [0053] FIG. 44A illustrates a cross-sectional view of the cylindrical cartridge containing an evaporable material according to one embodiment; [0054] FIG. 44B illustrates a cross-sectional view of the cylindrical cartridge containing an evaporable coating disposed on carrier members according to one embodiment; [0055] FIG. 44C illustrates a cross-sectional view of the cylindrical cartridge containing an evaporable material provided in a chamber according to one embodiment; [0056] FIG. 44D illustrates a cross-sectional view of the cylindrical cartridge containing a plurality of evaporable materials provided in a chamber according to one embodiment; [0057] FIG. 45 illustrates a cylindrical cartridge according to one embodiment; [0058] FIG. 46 illustrates a cross-sectional view of the cylindrical cartridge according to the embodiment of FIG. 45; [0059] FIG. 47 illustrates a cross-sectional view of the cylindrical cartridge containing an evaporable material according to one embodiment; [0060] FIG. 48A illustrates an embodiment wherein a cartridge includes a housing including a tapered portion; [0061] FIG. 48B illustrates an embodiment wherein a housing of a cartridge is tapered to form a cone-shaped housing; [0062] FIG. 49 illustrates a perspective view of a cartridge according to one

embodiment; [0063] FIG. 50A illustrates a cross-sectional view of the cartridge of FIG. 49 according to one embodiment; [0064] FIG. 50B illustrates a cross-sectional view of the cartridge of FIG. 49 according to another embodiment; and [0065] FIG. 51 A and FIG. 51 B illustrate the operation of a cartridge in a physical vapor deposition system according to one embodiment. DETAILED DESCRIPTION [0066] It will be appreciated that for simplicity and clarity of illustration, where considered appropriate, reference numerals may be repeated among the figures to indicate

corresponding or analogous elements. In addition, numerous specific details are set forth in order to provide a thorough understanding of the example embodiments described herein. However, it will be understood by those of ordinary skill in the art that the example embodiments described herein may be practiced without some of these specific details. In other instances, certain methods, procedures and components have not been described in detail so as not to obscure the example embodiments described herein.

[0067] FIG. 1 illustrates an example of a crucible 100 for an evaporator. For example, the crucible 100 may be used in a point source evaporator. The crucible 100 is formed by a body including an upper portion 110 and a lower portion 120. An outlet 130 is defined by the upper portion 130 to allow an evaporated source material to escape therethrough.

[0068] FIG. 2 illustrates a cross-section of the crucible 100 taken along line l-l. The crucible 100 includes a chamber 150 defined by the body of the crucible 100, which is adapted to receive a source material. As illustrated, the upper portion 110 and the lower portion 120 of the crucible 100 may be joined together by a mechanical fastener (e.g.

threads), such that the upper portion 110 may be removed to facilitate the placement of the source material inside the chamber 150.

[0069] The source material is commonly provided in the form of a powder, pellets, and/or granules. To replenish the crucible 100 with such source material, the source material is typically dispensed from a storage container, and placed inside the chamber 150 of the crucible 100. However, replenishing the crucible 100 in such manner is generally

cumbersome and time-consuming, due to the dispersible form (e.g. a powder, pellets and/or granules) in which the source material is supplied. Additionally, it is generally difficult to precisely control and monitor the fill amount (e.g. the amount of source material provided inside the chamber 150 of the crucible 100) when the source material is supplied in a dispersible form. Variation in the fill amount may impact some deposition parameters, such as, for example, the up-time and stability of the deposition rates, and thus it is desirable to reduce or mitigate any such variation.

[0070] It has also now been found that, at least in some cases, a source material in a dispersible form may exhibit relatively poor thermal conductivity, especially under a reduced pressure environment (e.g. vacuum). Referring now to FIG. 3, it is postulated that gaps 310 formed between adjacent source material 305 may inhibit the transmission or exchange of thermal energy therebetween by acting as a thermal insulator. This may result in uneven heating of the source material, thus causing certain portions of the source material to be subjected to a higher temperature than other portions. For example, in some cases, it may be desirable to heat the source material to a substantially higher temperature than the evaporation temperature of the source material in order to achieve higher evaporation rates. Particularly in such cases, portions of the source material disposed proximal to a heating element may be subjected to an elevated temperature, compared to portions of the source material disposed distal to such heating element. This may cause portions of the source material to degrade, especially once the source material has been subjected to an elevated temperature for a prolonged period of time, thus leading to poor device performance and/or film quality.

[0071] In one aspect, a cartridge is provided for use in a physical vapor deposition apparatus. For example, the cartridge may be adapted for use in an evaporator. For example, the cartridge may be received in a crucible of an evaporator.

[0072] Referring again to FIG. 2, a cartridge 200 is illustrated as being received inside the chamber 150. The cartridge 200 generally contains a source material therein, such that when the crucible 100 and the cartridge 200 are heated, the source material is evaporated to generate a vapor stream of the evaporated source material. The evaporated source material may then be transmitted through the outlet 130 to be deposited onto a target substrate (not shown).

[0073] FIGs. 4A-4C illustrate the cartridge 200 according to various embodiments. It will be appreciated that the cartridge is generally referenced by numeral 200, and different suffixes“a”,“b”,“c”, and so forth are used to refer to different embodiments of the cartridge 200.

[0074] In FIG. 4A, the cartridge 200a is illustrated as being a substantially cylindrical housing defining an opening 410. The opening 410 may be arranged substantially centrally on an end face of the cylindrical housing.

[0075] In FIG. 4B, the cartridge 200b is illustrated as being a substantially cylindrical housing defining a plurality of openings 412. The plurality of openings 412 may be formed on an end face of the cylindrical housing.

[0076] In FIG. 4C, the cartridge 200c is illustrated as being a substantially cylindrical housing having a gas permeable member 420 on an end face. Examples of such gas permeable member 420 include, but are not limited to, a screen, a perforated plate, a membrane, a mesh, a sieve, a porous member (including a porous ceramic member), and combinations thereof. The gas permeable member 420 is generally adapted to inhibit passage of solid materials, while allowing transmission of the evaporated source material therethrough. In some embodiments, the gas permeable member 420 may be non- detachably secured to the housing, for example, by welding.

[0077] FIG. 5 illustrates an evaporator 500 in one example. As illustrated, the crucible 100 is illustrated as being disposed inside a casing 530 of the evaporator 500. The crucible 100 may be secured inside the casing 530 by one or more supports 510. The supports 510 may comprise materials exhibiting relatively low thermal conductivity to reduce or mitigate transfer of thermal energy between the crucible 100 and the casing 530. In this way, the temperature of the crucible 100 may be maintained relatively constant and substantially uniform throughout. For example, the one or more supports 510 may be formed using a ceramic material. A heating element 520 is illustrated as being disposed between the crucible 100 and the casing 530. For example, the heating element 520 may be arranged around the side wall and the bottom of the crucible 100 in order to heat the crucible 100 and the cartridge 200 housed within.

[0078] FIG. 6 illustrates a crucible 600 in one example, wherein the crucible 600 is adapted for use in a linear evaporator. The crucible 600 comprises a body formed by joining an upper portion 610 and a lower portion 620. A plurality of outlets 630 are formed on the upper portion 610 for allowing a vapor stream of the evaporated source material to escape therethrough. The upper portion 610 and the lower portion 620 each includes a flange 640a, 640b for fastening the portions together. For example, the upper portion 610 and the lower portion 620 may be mechanically fastened together using bolts, nuts, screws, clamps, and so forth. One or more supports 650 may be joined to the flange 640a, 640b for mounting the crucible 600 to an evaporator 700, an example of which is illustrated in FIG. 7.

[0079] In FIG. 7, the crucible 600 is mounted inside a casing 730 by the one or more supports 650, and a heating element 720 is disposed between the crucible 600 and the casing 730 for heating the crucible 600 and the cartridge 200 housed therein.

[0080] In FIG. 8A, the cartridge 200d comprises a housing formed as a hollow rectangular prism defining one or more openings 810. The one or more openings 810 are arranged linearly, parallel to the longitudinal axis of the housing and formed substantially centrally on an upper face 821 of the housing.

[0081] In FIG. 8B, the cartridge 200e comprises a housing formed as a hollow rectangular prism defining a plurality of openings 812. The plurality of openings 810 are arranged in rows and formed on an upper face 823 of the housing. [0082] In FIG. 8C, the cartridge 200f comprises a housing formed as a hollow

rectangular prism having a gas permeable member 815 as its upper face. Examples of such gas permeable member 815 include, but are not limited to, a screen, a perforated plate, a membrane, a mesh, a sieve, a porous member (including a porous ceramic member), and combinations thereof. The gas permeable member 815 is generally adapted to inhibit passage of solid materials, while allowing transmission of the evaporated source material therethrough. In some embodiments, the gas permeable member 815 may be non- detachably secured to the housing, for example, by welding.

[0083] FIG. 9 illustrates yet another example of an evaporator 900. The evaporator 900 is illustrated as including an elongated body 910. For example, the cross-section of the elongated body 910, when taken perpendicular to the longitudinal axis of the body 910, may be substantially triangular in shape. Accordingly, such configuration of the body 910 may also be referred to as a hollow triangular prism. The body 910 may be provided with an inner tube 920 extending through the body 910 for receiving a heating element 930 therein. A fill hole 940 may also be provided for introducing the source material into the evaporator 900. A crucible 950 is arranged at one end of the body 910. The crucible 950 may also be a hollow triangular prism in shape and configuration. In some examples, the body 910 and the crucible 950 may be non-detachably joined to one another. In other examples, the body 910 and the crucible 950 may be detachably joined to one another, such that the crucible 950 may be removed from the body 910 to facilitate replenishment of the source material. A plurality of outlets 960 are arranged substantially parallel to the longitudinal axis of the body 910. For example, the plurality of outlets 960 may be formed along one of the vertexes of the body 910.

[0084] FIG. 10 illustrates a cross-sectional view of the evaporator 900 taken along line ll-ll according to one example. In the example of FIG. 10, the inner tube 920 is illustrated as extending through substantially the entire length of the body 910. The cartridge 200 is adapted to be received inside the crucible 950.

[0085] FIG. 11 illustrates a cross-sectional view of the evaporator 900 taken along line ll-ll according to another example. In the example of FIG. 11 , an auxiliary heating element 932 is provided adjacent to the crucible 950. For example, the auxiliary heating element 932 may be housed within a compartment 1100 attached to the crucible 950. In this way, the crucible 950 and the cartridge 200 housed therein may be heated by the heating element 930 and/or the auxiliary heating element 932. [0086] FIG. 12 illustrates a cross-sectional view of the evaporator 900 taken along line ll-ll according to yet another example. In the example of FIG. 12, the compartment 1100 further includes a protruding portion 1210 extending into or through the crucible 950. In some examples, the protruding portion 1210 may extend partially into the crucible 950. In other examples, the protruding portion 1210 may extend substantially through the crucible 950 towards an end of the inner tube 920. A gap may be provided between the ends of the protruding portion 1210 and the inner tube 920 to accommodate changes to the geometry due to thermal expansion of various components during use.

[0087] FIGs. 13A-13C illustrate various embodiments of the cartridge 200 having a triangular prism configuration. For example, such cartridge 200 may be used in the evaporator 900 illustrated in FIG. 10 and/or FIG. 11.

[0088] In FIG. 13A, the cartridge 200g comprises a housing defining an opening 1310. The opening 1310 is formed on an upper surface 1321 of the housing. The opening 1310 may be formed, for example, proximal to one of the vertexes. In other examples, the opening 1310 may be formed on other portions of the upper surface 1321 , such as at or near a central portion of the upper surface 1321.

[0089] In FIG. 13B, the cartridge 200h comprises a housing defining a plurality of openings 1312. The plurality of openings 1312 are formed on the upper surface 1323. The plurality of openings 1312 may be formed, for example, proximal to the perimeter of the upper surface 1323 as illustrated in the figure. However, it will be appreciated that the openings 1312 may be arranged in other configurations.

[0090] In FIG. 13C, the cartridge 200i comprises a housing, wherein a gas permeable member 1315 forms the upper surface of the housing. Examples of such gas permeable member 1315 include, but are not limited to, a screen, a perforated plate, a membrane, a mesh, a sieve, a porous member (including a porous ceramic member), and combinations thereof. The gas permeable member 1315 is generally adapted to inhibit passage of solid materials, while allowing transmission of the evaporated source material therethrough. In some embodiments, the gas permeable member 1315 may be non-detachably secured to the housing, for example, by welding.

[0091] FIGs. 14A-14E illustrate various embodiments of the cartridge 200 having a triangular prism configuration. For example, such cartridge 200 may be used in the evaporator 900 illustrated in FIG. 12, wherein the compartment 1100 for housing the auxiliary heating element 932 includes the protruding portion 1210 extending towards the body 910.

[0092] In FIG. 14A, the cartridge 200j comprises a housing defining an opening 1410. The opening 1410 is formed on an upper surface 1421 of the housing. The opening 1410 may be formed, for example, proximal to one of the vertexes. In other examples, the opening 1410 may be formed on other portions of the upper surface 1421 , such as at or near a central portion of the upper surface 1421. The housing further comprises a cavity 1431 for accommodating, for example, the protruding portion 1210 of the compartment 1100. As illustrated in FIG. 14D, the cavity 1431 may substantially extend through the housing between the upper surface 1421 and a lower surface 1441 to form a through-hole in one embodiment. In another embodiment illustrated in FIG. 14E, the cavity 143T may extend partially from the lower surface 1441 towards the upper surface 1421 to form a recess.

[0093] In FIG. 14B, the cartridge 200k comprises a housing defining a plurality of openings 1412. The plurality of openings 1412 are formed on an upper surface 1423. The plurality of openings 1412 may be formed, for example, proximal to the perimeter of the upper surface 1423 as illustrated in the figure. However, it will be appreciated that the openings 1412 may be arranged in other configurations. The housing further comprises a cavity 1431 for accommodating, for example, the protruding portion 1210 of the

compartment 1100. The cavity 1431 may extend substantially through the housing to form a through hole, or the cavity 1431 may extend partially from the lower surface towards the upper surface 1423 to form a recess.

[0094] In FIG. 14C, the cartridge 200I comprises a housing, wherein a gas permeable member 1415 forms the upper surface of the housing. Examples of such gas permeable member 1415 include, but are not limited to, a screen, a perforated plate, a membrane, a mesh, a sieve, a porous member (including a porous ceramic member), and combinations thereof. The gas permeable member 1415 is generally adapted to inhibit passage of solid materials, while allowing transmission of the evaporated source material therethrough. In some embodiments, the gas permeable member 1415 may be non-detachably secured to the housing, for example, by welding. The housing further comprises a cavity 1431 for accommodating, for example, the protruding portion 1210 of the compartment 1100. The cavity 1431 may extend substantially through the housing to form a through hole, or the cavity 1431 may extend partially from the lower surface towards the upper surface to form a recess. [0095] FIGs. 15A-15C illustrate various embodiments of the cartridge 200 having an elongated housing. For example, such cartridge 200 may be used in the evaporator 900 illustrated in FIGs. 9-12 by inserting the cartridge 200 into the body 910 of the evaporator 900 via the fill hole 940.

[0096] In FIG. 15A, the cartridge 200m comprises an elongated housing defining an opening 1510. The elongated housing may be substantially cylindrical. The opening 1510 may be formed on the side wall of the elongated housing in the form of an elongated slot, as illustrated in FIG. 15A.

[0097] In FIG. 15B, the cartridge 200n comprises an elongated housing defining a plurality of openings 1512. The elongated housing may be substantially cylindrical. The plurality of openings 1512 may be formed on the side wall of the elongated housing as a series of apertures. For example, the plurality of openings 1512 may be distributed substantially uniformly around the side wall of the elongated housing.

[0098] In FIG. 15C, the cartridge 200p comprises a gas permeable member 1515. For example, the elongated housing may substantially be formed by the gas permeable member 1515. In another example, the gas permeable member 1515 may substantially cover the outer surface of the housing. For example, the gas permeable member 1515 may cover the side wall of the elongated housing, and/or the end face(s) of the elongated housing.

[0099] FIG. 16A illustrates an embodiment wherein the cartridge 200 is provided inside the evaporator 900. In FIG. 16A, the cartridge 200 is inserted inside the body 910 of the evaporator 900 via the fill hole 940. For example, the cartridge 200 may be secured to the interior surface of the body 910 by one or more supporting members 1610. In the illustrated embodiment, each supporting member of the one or more supporting members 1610 is illustrated as comprising a sleeve for receiving the cartridge 200 and an arm connecting the sleeve to the interior surface of the body 910. For example, the supporting member may be formed using materials exhibiting relatively low thermal conductivity, such as a ceramic material. Once the cartridge 200 has been provided, the fill hole 940 may be sealed by a sealing member 1620. For example, the sealing member 1620 may be a screw, plug, or other suitable seal.

[00100] FIG. 16B illustrates another embodiment wherein the cartridge 200 is provided inside the evaporator 900. As illustrated in FIG. 16B, the cartridge 200 may be connected to the sealing member 1620. For example, the cartridge 200 may be attached to a distal portion of the sealing member 1620 by a screw, thread, welding, bonding, and so forth. In other examples, the cartridge 200 may include the sealing member 1620, for example, by integrally forming the sealing member 1620 together with the cartridge 200. In some embodiments, a thermally insulating material may be provided between the cartridge 200 and the sealing member 1620 to inhibit the transfer of thermal energy between the cartridge 200 and the sealing member 1620. In this way, the temperature of the cartridge 200 may be kept relatively constant.

[00101] FIGs. 17 and 18 illustrate an evaporator 1700, wherein the evaporator 1700 is a linear evaporator provided with a plurality of crucibles 1720a- 1720c. The evaporator 1700 includes a body 1710 defining an outlet 1740. The plurality of crucibles 1720a-c are disposed inside the body 1710. A cartridge may be provided inside each of the crucibles 1720a-c. In the illustrated embodiment, a first crucible 1720a is provided with a first cartridge 200, a second crucible 1720b is provided with a second cartridge 200’, and a third crucible 1720c is provided with a third cartridge 200”. Each cartridge 200, 200’ 200” may be provided with a different source material and/or an evaporable coating. For example, in the

configuration illustrated in FIG. 18, the vapor material generated from each cartridge 200, 200’, 200” may be mixed together prior to being ejected via the outlet 1740.

[00102] In one aspect, an evaporable source material is provided. The evaporable source material includes an evaporable coating disposed on a surface. For example, the surface may be a surface of a carrier member, or a surface of a cartridge or a crucible.

[00103] In some embodiments, the evaporable coating comprises an inorganic material. Examples of such inorganic material include, but are not limited to, metals, metal alloys, and carbonaceous materials. Examples of metals include aluminum (Al), silver (Ag), copper (Cu), magnesium (Mg), molybdenum (Mo), ytterbium (Yb), zinc (Zn), cadmium (Cd), and mixtures or alloys thereof. Other examples of the evaporable coating include a fullerene. For example, a fullerene may comprise Obo, C₇o, C₇₆, Cs4, or mixtures thereof.

[00104] In some embodiments, the evaporable coating comprises substantially of metals. For example, the evaporable coating may comprise substantially of pure magnesium. In other embodiments, the evaporable coating comprises substantially of a fullerene.

[00105] In some embodiments, the evaporable coating comprises a mixture of a metal and a fullerene. For example, the evaporable coating may comprise a mixture of magnesium and a fullerene. [00106] In some embodiments, a physical vapor deposition (PVD) process, such as thermal evaporation for example, may be used to form the evaporable coating. Without wishing to be bound by any particular theory, it is postulated that the purity of material(s) forming the evaporable coating may, at least in some cases, be improved in the process of forming the evaporable coating. For example, it has been found that many commercially available materials typically contain certain amount of impurities or contaminants. It has also been found that the presence of even a relatively small amount of impurity (e.g. ppm or lower) in a source material may affect the properties of thin films formed using such material. It is postulated that, by forming the evaporable coating using a PVD process, the

concentration of at least some impurities present in the starting material may be reduced due to such impurities having a different evaporation temperature than the material for forming the evaporable coating.

[00107] In some embodiments, the surface on which the evaporable coating is provided is a substantially flat surface. In some embodiments, the surface on which the evaporable coating is provided is a non-flat surface. For example, the non-flat surface may be a porous surface. In other examples, the non-flat surface may be a relatively rough surface having a number of irregular features formed thereon.

[00108] In some embodiments, the evaporable coating may be disposed on a surface of a carrier member. For example, the carrier member may be provided in the form of a sheet, a plate, a block, a cylinder, a sphere, or other shapes. In some embodiments, the carrier member comprises a porous member. For example, the carrier member may be provided in the form of a perforated body, mesh, sieve, porous body, or combinations thereof.

[00109] The carrier member generally comprises an inorganic material or a carbonaceous material. For example, the carrier member may comprise a metal, graphite, and/or ceramic.

In some cases, it may be particularly advantageous to provide the carrier member which is non-reactive (e.g. inert) at elevated temperatures. For example, the carrier member may be composed of a material which does not react substantially (physically or chemically) at the evaporation temperature of the evaporable coating. Alternatively, or in addition thereto, the carrier member may be provided with a coating to inhibit any such reactions. For example, the material used to form the carrier member and/or the non-reactive coating may exhibit an evaporation temperature higher than the evaporation temperature of the evaporable coating. Examples of metals which may be used to form the carrier member and/or the non-reactive coating, include, but are not limited to, tantalum, molybdenum, and titanium. In some cases, it may be particularly advantageous to form the carrier member with a material exhibiting relatively high thermal conductivity. For example, materials with high thermal conductivity generally conduct heat more readily, thus reducing the likelihood of portions of the carrier member being heated at a higher temperature than other portions.

[00110] FIGs. 19A-19F illustrate various embodiments of the carrier member onto with the evaporable coating may be provided.

[00111] In FIG. 19A, a portion of a planar body 1910 having a substantially flat surface 1912 is illustrated. For example, the planar body 1910 may be a metallic or ceramic plate.

[00112] In FIG. 19B, a portion of a mesh body 1920 having a meshed surface 1922 is illustrated. For example, the mesh body 1920 may be formed by woven metallic wires, or other woven wires.

[00113] In FIG. 19C, a portion of a porous body 1930 having a porous surface 1932 is illustrated. The porous surface 1932 defines a plurality of cavities or pores 1935. For example, such porous body 1930 may be formed by a ceramic material.

[00114] In FIG. 19D, a portion of a perforated body 1940 defining a plurality of perforations 1945 is illustrated. For example, the perforated body 1940 may be provided in the form of a perforated plate or an extruded member. The perforations 1945 may be substantially square or rectangular as illustrated in FIG. 19D. However, in other

embodiments, the perforations 1945 of other shapes, sizes and configurations may be provided. For example, the perforations 1945 may be substantially circular, oval, elliptical, hexagonal, pentagonal, or other shapes.

[00115] In FIG. 19E, a portion of a corrugated member 1950 having a corrugated surface 1952 is illustrated. For example, the corrugated surface 1952 includes an alternating series of ridges and grooves formed thereon.

[00116] In FIG. 19F, a portion of another corrugated member 1960 having a corrugated surface 1962 is illustrated. For example, the corrugated surface 1962 includes a plurality of protrusions. The protrusions may be, for example, in the form of pyramids as illustrated or any other shapes and configurations.

[00117] FIGs. 20A-20E illustrate cross-sectional views of the carrier members upon providing the evaporable coating thereon according to various embodiments. [00118] In FIG. 20A, a cross-section of the planar body 1910 of FIG. 19A is illustrated. In FIG. 20A, the evaporable coating 2010 is provided to coat the substantially flat surface 1912.

[00119] In FIG. 20B, a cross-section of the meshed body 1920 of FIG. 19B is illustrated.

In FIG. 20B, the evaporable coating 2020 is provided to substantially coat the meshed surface 1922. For example, the evaporable coating 2020 may coat the outer surface of the elements (e.g. wires) forming the meshed surface 1922.

[00120] In FIG. 20C, a cross-section of the porous body 1930 of FIG. 19C is illustrated.

In FIG. 20C, the evaporable coating 2030 is provided to substantially coat the porous surface 1932. For example, the evaporable coating 2030 may coat portions of the surface between adjacent pores or cavities 1935, as well as portions of the surface defining the pores or cavities 1935. Specifically, the evaporable coating 2030 may be provided inside the pores or cavities 1935 formed on the surface 1932.

[00121] In FIG. 20D, a cross-section of the perforated body 1940 of FIG. 19D is illustrated. In FIG. 20D, the evaporable coating 2040 is provided to coat the exposed surfaces of the perforated body 1940. For example, the evaporable coating 2040 may be provided over portions of the perforated body 1940 defining the perforations 1945, as well as on the upper and lower surfaces.

[00122] In FIG. 20E, a cross-section of the corrugated body 1950 of FIG. 19E is illustrated. In FIG. 20E, the evaporable coating 2050 is provided to coat the corrugated surface 1952 of the corrugated body 1950. For example, the evaporable coating 2050 may be provided over portions of the corrugated surface 1952 defining the ridges and the grooves formed thereon.

[00123] In some cases, it may be particularly advantageous to provide an evaporable coating disposed over a non-flat surface. Carrier members having non-flat surfaces, such as those with meshed surfaces, porous surfaces, perforated surfaces and/or corrugated surfaces, generally exhibit a relatively large carrier surface-area-to-volume ratio (SA:V).

Such carrier members may be particularly desirable for depositing the evaporable coating thereon, since a greater amount of evaporable coating surface may be exposed for a given amount of evaporable material coated on surfaces with higher carrier SA:V. In other words, the surface-area-to-volume ratio of the carrier generally correlates directly with the surface- area-to-volume ratio of the evaporable coating deposited thereon. [00124] In some embodiments, it may be particularly desirable to provide an evaporable coating exhibiting a relatively high surface-area-to-volume ratio. This is further explained in reference to FIG. 21 , in which a carrier member 2110 provided with an evaporable coating 2120 is illustrated. As illustrated in FIG. 21 , a portion of the evaporable coating 2120 disposed proximal to an exposed surface 2122 of the evaporable coating is labelled 2131 (and is also referred to as the proximal portion 2131), and a portion of the evaporable coating 2120 disposed distal to the exposed surface 2122 is labelled 2133 (and is also referred to as the distal portion 2133). The exposed surface 2122 is generally a surface of the evaporable coating 2120 which is laid bare to a reduced pressure environment (e.g. vacuum environment) during a PVD process. As would be appreciated, any gaseous material generated as a result of evaporating the material forming the evaporable coating 2120 may travel relatively unhindered in such reduced pressure environment. The average diffusion distance from the proximal portion 2131 and the distal portion 2133 are labelled D1 and D2, respectively. For clarity, it will be appreciated that the average diffusion distance generally refers to the average distance over which an evaporated material (e.g. gaseous material) would travel to reach the exposed surface 2122.

[00125] A heating element 2160 is provided for heating and evaporating the evaporable coating 2120. As illustrated in FIG. 21 , based on the relative arrangement of the heating element 2160, it can be seen that the proximal portion 2131 disposed closer to the heating element 2160 would generally be heated to a greater degree (e.g. heated more quickly and/or heated to a higher temperature) than the distal portion 2133. Furthermore, any gaseous material generated from evaporating the evaporable material disposed in the proximal portion 2131 would have an average diffusion distance D1 , which is less than the average diffusion distance D2 of the distal portion 2133. Without wishing to be bound by any particular theory, it is postulated that the portion of the evaporable coating 2120 which is heated to a greater degree and is positioned to have a shorter average diffusion distance would evaporate more preferentially than the portion of the coating 2120 which is heated to a lesser degree and is positioned to have a greater average diffusion distance. It is further postulated that such preferential evaporation of the evaporable coating 2120 may result in changes to the total area of the exposed surface 2122. For example, such changes in the total area of the exposed surface 2122 may lead to non-uniform evaporation rate during a PVD process, which is generally undesirable. It is postulated that, by increasing the SA:V of an evaporable coating, the thickness of the evaporable coating may be reduced for a given amount (e.g. mass) of the material for forming the evaporable coating. In this way, the evaporable coating may be more uniformly heated and discrepancy in the average diffusion distance between different portions of the coating may also be reduced. It is further postulated that such configuration of the evaporable coating may provide relatively stable evaporation of the material forming the evaporable coating by maintaining the total area of the exposed surface relatively constant for a longer period of time during a PVD process.

[00126] While some embodiments have been illustrated wherein the evaporable coating is provided over a planar or substantially planar surfaces, it will be appreciated that the evaporable coating may be similarly provided over non-planar surfaces. For example, the surface may be curved, bent, and/or folded.

[00127] In some examples, various features provided on the non-planar surfaces may be periodically repeating structures. For example, substantially identical features may be arranged in a repeating pattern to form the non-planar surface. In other examples, features provided on the non-planar surface may be substantially random or pseudo-random. For example, features may be substantially random in shape, size, distribution, and/or other configuration.

[00128] In one aspect, a cartridge is provided, the cartridge comprising a housing and one or more carrier members arranged inside the housing. Each carrier member of the one or more carrier members includes a surface coated with an evaporable coating. The cartridge may be for use in a PVD apparatus and/or process. In some embodiments, the housing of such cartridge may be adapted to receive a heating element therein. In other embodiments, the cartridge may be adapted to be heated by a heating element arranged external to the housing.

[00129] FIG. 22 is a schematic illustration of a cartridge 2200 according to one

embodiment. In FIG. 22, the cartridge 2200 includes a housing 2210 defining an outlet 2220. One or more carrier members 2240 are disposed inside the housing 2210. In some embodiments, one or more spacers 2242 may be provided between adjacent carrier members 2240. In the embodiment illustrated in FIG. 22, the one or more carrier members 2240 are arranged substantially parallel to the outlet 2220. FIG. 23 is a schematic illustration of another embodiment of the cartridge 2200, wherein the one or more carrier members 2240 are arranged substantially perpendicular to the outlet 2220.

[00130] FIG. 24 is a schematic illustration of a cartridge 2400 according to one embodiment, wherein a substantially cylindrical housing 2410 defining an outlet 2420 is provided. One or more carrier members 2440 are illustrated as being disposed inside the housing 2410 and arranged such that they are in a vertically stacked configuration. One or more spacers or supporting members may be provided in the cartridge 2400 for spacing apart and/or for supporting the carrier members 2440. FIG. 25 shows a top cross-sectional view of the cartridge 2400 illustrated in FIG. 24.

[00131] FIG. 26 is a top view of a cartridge 2600 according to another embodiment, wherein one or more carrier members 2640 are arranged radially and disposed inside a housing 2610. For example, the one or more carrier members 2640 may be arranged such that the carrier members 2640 are radially distributed about a central support member 2660. In some embodiments, the central support member 2660 may be provided in the form of a solid rod. In other embodiments, the central support member 2660 may be provided in the form of a hollow rod. As further illustrated in FIG. 27, the central support member 2660 provided in the form of a hollow rod may define a space or recess 2662 for accommodating a temperature modulation element (not shown). Examples of such temperature modulation element include, but are not limited to, a heating element and a cooling element. It is postulated that the radial arrangement of the one or more carrier members 2640 about the central support member 2660 facilitates heating and/or cooling of the carrier members 2640 to achieve a more uniform temperature profile.

[00132] FIG. 28 illustrates an embodiment of a cartridge 2800 wherein a housing 2810 is provided in the form of a hollow triangular prism. The housing 2810 is provided with an outlet 2820. One or more carrier members 2840 are provided within the housing 2810.

[00133] FIG. 29 illustrates another embodiment of a cartridge 2900 wherein a housing 2910 is provided in the form of a hollow triangular prism with a through-hole 2912 extending therethrough. The housing 2910 is provided with an outlet 2920. One or more carrier members 2940 are provided within the housing 2910.

[00134] FIG. 30 illustrates an embodiment wherein a cartridge 3000 is provided with a non-planar carrier member 3040 contained inside a housing 3010. For example, the carrier member 3040 may be a rigid carrier member which has been formed into a non-planar configuration, or the carrier member 3040 may be a flexible carrier member which has been bent or folded into such non-planar configuration.

[00135] In one aspect, a cartridge comprising a housing is provided, wherein at least a portion of a housing surface is coated with an evaporable coating. The housing may define an inner surface and an outer surface. In some embodiments, the outer surface of the housing may be coated with the evaporable coating. In other embodiments, the inner surface of the housing may be coated with the evaporable coating. In some embodiments, both the inner surface and the outer surface of the housing may be coated with the evaporable coating.

[00136] FIGs. 31A-31 D illustrate various embodiments of a cartridge 3100, wherein a housing 3110 defines an interior surface 3112 and an exterior surface 3114. An evaporable coating 3140 is disposed over a portion of the interior surface 3112. In one embodiment according to FIG. 31 A, the evaporable coating 3140 coats the lower portion of the interior surface 3112. In another embodiment according to FIG. 31 B, the evaporable coating 3140 substantially coats the lower portion, the side portion, and the upper portion of the interior surface 3112. In yet another embodiment according to FIG. 31C, the housing 3110 includes a protruding portion 3120 extending into the chamber defined by the housing 3110, and the evaporable coating 3140 coats the protruding portion 3120. In yet another embodiment according to FIG. 31 D, the side portion of the interior surface 3112 is coated with the evaporable coating 3140.

[00137] FIGs. 32A and 32B illustrate an embodiment of a cartridge 3200, wherein a housing 3210 is provided in the form of a hollow triangular prism. The housing 3210 defines a plurality of outlets 3220 for allowing the vapor material generated from evaporating an evaporable coating 3240 to escape. For example, the plurality of outlets 3220 may be arranged along a vertex of the housing 3210. The housing 3210 may optionally define a through-hole 3212 extending substantially therethrough. For example, the through-hole 3212 may be configured to receive a temperature modulation element (e.g. a heating element) therein. As further illustrated in FIG. 32B which shows the cross-sectional view of the cartridge 3200, the interior surface of the housing 3210 may be coated with the evaporable coating 3240. While not specifically illustrated, in some embodiments, the portion of the housing 3210 defining the through-hole 3212 may also be coated with the evaporable coating 3240.

[00138] FIGs. 33A and 33B illustrate another embodiment of a cartridge 3300 wherein a housing 3310 is provided with an elongated outlet 3320. For example, the elongated outlet 3320 may extend substantially from one longitudinal end of the housing 3310 to the other. In other examples, the elongated outlet 3320 may extend over a portion of the housing 3310. The housing 3310 may optionally define a through-hole 3312 extending substantially therethrough. [00139] FIG. 34A illustrates the arrangement of the cartridge 3200 in an evaporator 3400 according to one embodiment. In FIG. 34A, a heating element 3440 of the evaporator 3400 is received in the through-hole 3212 of the cartridge 3200. In such arrangement, the housing 3210 of the cartridge 3200 and the evaporable coating 3240 may be heated by the heating element 3440 to cause the evaporable coating 3240 to evaporate, thus generating the vapor material. The vapor material may then be transmitted through one or more outlets (not shown). In some embodiments, the housing 3210 of the cartridge 3200 may also act as a housing for various components of the evaporator 3400.

[00140] In another embodiment illustrated in FIG. 34B, an evaporator 3400’ includes a casing 3410 for defining the housing of the evaporator 3400’. In such configuration, the cartridge 3200 is received in the chamber defined by the casing 3410. The heating element 3440 may be provided to extend through the through-hole 3212. The casing 3410 may optionally include a portion for housing the heating element 3440.

[00141] FIGs. 35A and 35B illustrate an embodiment wherein a carrier member 3510 is provided, and an exterior surface 3512 of the carrier member 3510 is coated by an evaporable coating 3540. The carrier member 3510 may be provided in the form of a rod.

For example, the evaporable coating 3540 may be provided substantially around the entire circumference of the rod-shaped carrier member 3510.

[00142] FIG. 36 illustrates another embodiment wherein a carrier member 3610 is provided with a plurality of ribs 3615 formed on the exterior surface 3612. The plurality of ribs 3615 may extend radially outward and the ribs 3615 may be spaced apart from one another along the longitudinal axis of the carrier member 3610. The evaporable coating 3640 is provided to substantially coat the exterior surface 3612 of the carrier member 3610, including the surface of the ribs 3615. In some embodiments, the ribs 3615 may be formed as a continuous spiral (e.g. a screw).

[00143] FIG. 37 illustrates yet another embodiment wherein a carrier member 3710 is formed as a hollow tubular member. Specifically, the carrier member 3710 defines an exterior surface 3712 and an interior surface 3715. A recess 3718 is defined by the interior surface 3715 of the carrier member 3710. The exterior surface 3712 of the carrier member 3710 is coated by an evaporable coating 3740. For example, the recess 3718 may be configured to accommodate a temperature modulation element, such as a heating element.

In some embodiments, the recess 3718 may extend substantially through the carrier member 3710. In other embodiments, the recess 3718 extends partially through the carrier member 3710.

[00144] For example, the rod-shaped carrier members 3510, 3610, and 3710 coated with the evaporable coating according to the embodiments of FIGs. 35A to 37 may be disposed in an evaporator. For example, referring now to the embodiments illustrated in FIGs. 16A and 16B, the rod-shaped carrier members 3510, 3610, and 3710 may be disposed inside the evaporator 900 via the fill hole 940. In another example, the rod-shaped carrier members 3510, 3610, and 3710 coated with the evaporable coating according to the embodiments of FIGs. 35A to 37 may be contained inside a cartridge. FIG. 38 illustrates an embodiment of a cartridge 3800, wherein a housing 3810 of the cartridge 3800 is provided with one or more rod-shaped carrier members 3840. Each of the carrier members 3840 is coated with an evaporable coating.

[00145] FIG. 39 illustrates an embodiment of a cartridge 3900 having a substantially annular cylindrical body 3901. FIG. 40 illustrates a cross-sectional view of the cartridge 3900 arranged inside an evaporator according to one embodiment. A body 3901 of the cartridge 3900 is defined by an upper portion 3910, a lower portion 3912, and an interior portion 3922 extending between an interior edge of the upper portion 3910 and the lower portion 3912, and an exterior portion 3920 extending between an exterior edge of the upper portion 3910 and the lower portion 3912. The interior portion 3922 defines an aperture 3930. In some embodiments, the upper portion 3910 may be formed by an impermeable member, such that vapor material cannot be transmitted through such portion. The lower portion 3912 may also be formed by an impermeable member. For example, the upper portion 3910 and/or the lower portion 3912 may be formed by a substantially solid member formed, for example, by a metal or a ceramic. The interior portion 3922 and the exterior portion 3920 may be formed by a gas permeable member. Examples of such gas permeable member include, but are not limited to, a screen, a perforated plate, a membrane, a mesh, a sieve, a porous member (including a porous ceramic member), and combinations thereof. The gas permeable member is generally adapted to inhibit passage of solid materials, while allowing

transmission of the evaporated source material therethrough. The body 3901 of the cartridge 3900 defines a chamber 3950 for containing the source material to be evaporated. For example, the source material may be provided in the form of an evaporable coating, or in a dispersible form. Examples of dispersible forms of the source material include powder, pellets, and granules. As illustrated in FIG. 40, one or more heating elements 4010 may be arranged to heat the cartridge 3900. For example, the one or more heating elements 4010 maw h¾ provided inside the aperture 3930, adjacent to the exterior portion 3920, or both. Based on the arrangement and configuration of the cartridge 3900, it can be seen that the vapor material generated as a result of evaporating the source material contained inside the chamber 3950 may be selectively ejected through the gas permeable interior portion 3922 and the exterior portion 3920. Specifically, the vapor material is substantially inhibited from being ejected or transmitted via the upper portion 3910. In this way, the likelihood of any particulates, which may also be referred to as“spatter” or“spitting”, being ejected from the cartridge 3900 is reduced at least for certain materials.

[00146] In some embodiments, the cartridge 3900 may be provided with additional members. In a further embodiment, the cartridge 3900 further includes additional annular cylindrical bodies. For example, such additional annular cylindrical bodies may be concentrically arranged about the body 3901. In such embodiment, the additional annular cylindrical bodies may be disposed radially distal with respect to the body 3901. A gap may be provided between such additional annular cylindrical bodies and the body 3901 to accommodate the heating element 4010 and any additional heating elements which may be provided.

[00147] In one embodiment, a cartridge is provided, the cartridge including a housing.

The housing defines a chamber for containing an evaporable material. An aperture is formed on the housing for allowing a vapor flux of the evaporable material to be released from the chamber. In some embodiments, a baffle is arranged inside the chamber. The baffle is configured to cause at least a portion of the vapor flux to be incident onto the baffle prior to releasing the vapor flux through the aperture. The cartridge may be adapted for use in or conjunction with a PVD apparatus.

[00148] FIG. 41 illustrate a cartridge 4100 according to one embodiment. The cartridge 4100 includes a housing 4110 having one or more apertures 4120 for allowing transmission of vapor therethrough. In the illustrated embodiment, the housing 4110 is a substantially cylindrical housing. Referring to FIG. 42A, a cross-sectional view taken along line Ill-Ill of the cartridge 4100 is shown. In the illustrated embodiment, the housing 4110 includes a receptacle portion 4112 and a cap portion 4113. The housing 4110 defines an inner surface 4117 and an outer surface 4118, which may be provided by the corresponding surfaces of the receptacle portion 4112 and the cap portion 4113. A chamber 4240 is defined by the housing 4110. For example, the chamber 4240 may be defined by the inner surface 4117 of the receptacle portion 4112 and the cap portion 4113. The one or more apertures 4120 are illustrated as being formed in the cap portion 4113 of the housing 4110. Specifically in the illustrated embodiment, each aperture of the one or more apertures 4120 extends between an inner opening 4127 provided on the inner surface 4117 and an outer opening 4128 provided on the outer surface 4118 such that a vapor flux generated by evaporating an evaporable material (not shown) may be transmitted through the one or more apertures 4120 to be released from the chamber 4240. The cartridge 4100 further includes a baffle 4220. In some embodiments, the baffle 4220 is arranged inside the chamber 4240 to reduce or inhibit the flow of the vapor flux through the one or more apertures 4120. For example, the baffle 4220 may be configured to block at least a portion of the vapor flux from arriving at the inner opening 4127. For example, the baffle 4220 may be arranged adjacent to, and spaced apart from, the inner opening 4127. In the illustrated embodiment, the baffle 4220 includes a blocking portion 4222 extending substantially laterally to cover the inner opening 4127. A gap 4230 may be provided between the opening 4127 and the blocking portion 4222 of the baffle 4220 to allow the vapor to reach the opening 4127 to be released from the chamber 4240 via the one or more apertures 4120. However, due to the arrangement and

configuration of the baffle 4220 with respect to the one or more apertures 4120, a direct line of sight from the evaporable material (not shown) contained in the chamber 4240 to the one or more apertures 4120 is substantially prevented. Accordingly, at least a portion of the vapor flux generated from the chamber 4240 becomes incident onto the baffle 4220 prior to reaching the inner opening 4127 and is released through the one or more apertures 4120. Without wishing to be bound by any particular theory, it is postulated that such configuration may increase the average retention time of the vapor flux inside the cartridge 4100 and thus reduce the mean free path of the vapor flux material. It is further postulated that, as a result, the likelihood of any particulates (e.g. spatter) or clusters of atoms or molecules being released through the one or more apertures 4120 is reduced, since any such particulates or clusters would generally collide with a surface of the housing 4110 prior to arriving at the inner opening 4127, thus increasing the likelihood of such particulates or clusters becoming disintegrated or atomized due to such collisions. As would be appreciated, release of such particulates or clusters are generally highly undesirable during thin film formation processes, since deposition of such particulates or clusters on the target substrate may result in formation of defects, which may cause device failure in some cases. Additionally, it is further postulated that restricting the vapor flow through the one or more apertures 4120 in this way may increase the partial pressure of the vapor flux material inside the cartridge 4100 and enhance the stability of the rate at which vapor flux is released from the cartridge 4100. For example, the baffle 4220 may be a substantially annular member.

[00149] In some embodiments, the cartridge 4100 further includes a spacer 4250. For example, the spacer 4250 may be provided on the outer surface 4118 of the housing 4110. The spacer 4250 may be provided on the bottom surface 4116 of the receptacle portion 4112 and be integrally formed therewith. The spacer 4250 is generally provided to thermally insulate the cartridge 4100 from an element (e.g. crucible or heater) of a PVD system by restricting or inhibiting the thermal conduction between the cartridge 4100 and such element. For example, the spacer 4250 may comprise a material exhibiting relatively low thermal conductivity. In some embodiments, the spacer 4250 is configured to physically support or maintain the cartridge 4100 in an operating configuration. For example, in use, the cartridge 4100 may be placed inside a crucible of a PVD system in an upright orientation such that the cartridge 4100 is supported and maintained in such orientation (e.g. the operating

configuration) by the spacer 4250. In such example, the spacer 4250 may be configured to reduce the total surface area of the cartridge 4100 which is in direct physical contact with the crucible in order to inhibit thermal conduction between the cartridge 4100 and the crucible. For example, the spacer 4250 may protrude from the bottom surface 4116 and exhibit a tapered profile to reduce the contact area with the crucible, while providing sufficient structural integrity for supporting the cartridge 4100.

[00150] FIG. 42B illustrates a cross-sectional view of a cartridge 4100’ according to one embodiment wherein the baffle 4220 includes one or more through holes 4226 for allowing passage of vapor therethrough. For example, the one or more through holes 4226 may be substantially perpendicularly oriented with respect to the one or more apertures 4120 and arranged such that vapor flux generated inside the chamber 4240 remains substantially inhibited from escaping through the one or more apertures 4120 without colliding with a surface of the cartridge 4100’. For example, the one or more through holes 4226 may be arranged between the blocking portion 4222 of the baffle 4220 and the one or more apertures 4120.

[00151] FIG. 42C illustrates a cross-sectional view of a cartridge 4100” according to another embodiment wherein a blocking portion 4222” of a baffle 4220” is flaring radially outwardly. In the illustrated embodiment, the blocking portion 4222” generally extends downwardly and radially outwardly from the cap portion 4113 at an angle to form a cone- shaped blocking portion. The gap 4230 may be provided between the cone-shaped blocking portion 4222” and the one or more apertures 4120 formed on the cap portion 4113.

[00152] FIGs. 43A and 43B illustrate the bottom view of cartridges 4100 and 4100”’ according to various embodiments. In FIG. 43A, the bottom surface 4116 of the cartridge 4100 includes a substantially annular spacer 4250. In FIG. 43B, the bottom surface 4116 of the cartridge 4100’” includes a plurality of spacers 4250, wherein the spacers 4250 are arranged to be spaced apart from one another.

[00153] In some embodiments, the cartridge 4100 further includes an evaporable material contained therein. For example, the evaporable material may be provided inside the chamber 4240.

[00154] FIG. 44A illustrates an embodiment wherein the evaporable material is provided in the form of an evaporable coating 4420. For example, the evaporable coating 4420 may coat the inner surface 4117. As explained above, in some embodiments, the baffle 4220 is arranged between the evaporable coating 4420 and the inner opening 4127 of the one or more apertures 4120.

[00155] FIG. 44B illustrates an embodiment wherein one or more carrier members 4440 are arranged inside the chamber 4240. As described above, the one or more carrier members 4440 are provided with the evaporable coating 4420.

[00156] FIG. 44C illustrates an embodiment wherein an evaporable material 4421 is provided in the chamber 4240. For example, the evaporable material 4421 may be a single monolithic or continuous structure. In the illustrated embodiment, an interior spacer 4419 is provided in the inner surface 4117 for forming a gap 4118 between the evaporable material 4421 and the inner surface 4117 of the receptacle portion 4112. For example, the gap 4118 may be provided between a substantially vertically oriented surface of the evaporable material 4421 and a substantially vertical portion (e.g. side wall) of the inner surface 4117. In such arrangement, for example, the gap 4118 provides a substantially vertical channel through which a vapor stream generated by evaporating the evaporable material 4421 may travel before being ejected via the one or more apertures 4120. Without wishing to be bound by any particular theory, it is postulated that at least some of the contaminants which may be contained in the evaporable material 4421 may be released during a thermal evaporation process. By providing the gap 4118, it is postulated that at least a portion of such contaminants generated during evaporation of the evaporable material 4421 may fall through the gap 4118 and accumulate near the bottom of the chamber 4240 of the cartridge 4100, thus reducing the likelihood of such contaminants escaping the cartridge 4100 and becoming deposited onto the target substrate. In some embodiments, the interior spacer 4419 may be provided on a bottom portion of the inner surface 4117 to provide a gap or a physical separation between the bottom surface of the evaporable material 4421 and the inner surface 4117. For example, such gap may provide a space in which the contaminants may accumulate without significantly affecting the evaporation process. In some

embodiments, the evaporable material 4421 may include one or more cavities or through holes. For example, such cavities or through holes may extend substantially vertically to provide additional surface area from which the vapor stream may be generated.

[00157] FIG. 44D illustrates an embodiment wherein a plurality of evaporable materials 4421 are provided in the chamber 4240. For example, each evaporable material 4421 may be a shaped as a rod, plate, disc, block, or other shapes. In some embodiments, the evaporable materials 4421 are oriented substantially vertically. For example, each evaporable material 4421 may be spaced apart from one another to provide additional surface area from which the vapor stream may be generated upon heating.

[00158] FIG. 45 illustrates a cartridge 4500 according to another embodiment. The cartridge 4500 includes a housing 4510 having one or more apertures 4520 formed thereon. FIG. 46 illustrates a cross-sectional view of the cartridge 4500 taken along line IV-IV in FIG. 45. As further illustrated in FIG. 46, the housing 4510 includes a receptacle portion 4512 and a cap portion 4513. The housing 4510 defines an inner surface 4517 and an outer surface 4518, which may be provided by the corresponding surfaces of the receptacle portion 4512 and the cap portion 4513. A chamber 4650 is defined by the housing 4510. For example, the chamber 4650 may be defined by the inner surface 4517 of the receptacle portion 4512 and the cap portion 4513. The one or more apertures 4520 are illustrated as being formed in the cap portion 4513 of the housing 4510. One or more carrier members 4640 is disposed inside the chamber 4650. In some embodiments, the one or more carrier members 4640 are arranged correspondingly with respect to the one or more apertures 4520 such that each carrier member 4640 is disposed substantially in alignment with each corresponding aperture 4520. For example, in such arrangement, a central axis of the carrier member 4640 may be substantially aligned with a central axis of the corresponding aperture 4520. In some embodiments, the one or more carrier members 4640 may be configured to act as a baffle by restricting the flow of vapor from the chamber 4650 to outside the cartridge 4500 via the one or more apertures 4520. For example, each carrier member 4640 may include a restricting portion 4642 disposed proximal to the corresponding aperture 4520 for substantially preventing a direct line of sight from the evaporable material (not shown) to the one or more apertures 4520. Accordingly, at least a portion of the vapor flux generated from the chamber 4650 becomes incident onto the one or more carrier members 4640 prior to being released through the one or more apertures 4520. For example, the restricting portion 4642 may include a surface of the carrier member 4640 arranged proximal to the

mrmcoonding aperture 4520. The restricting portion 4642 may be spaced apart from the aperture 4520 by a gap to allow vapor generated inside the chamber 4650 to escape via the aperture 4520 while substantially preventing a direct line of sight from the evaporable material to the aperture 4520. Without wishing to be bound by any particular theory, it is postulated that such arrangement may contribute to enhancing the stability of the rate at which vapor flux is emitted through the one or more apertures 4520.

[00159] In the embodiment illustrated in FIG. 46, each of the one or more carrier members 4640 is a substantially cylindrical member. However, it would be appreciated that various other configurations and shapes of the carrier member 4640 may also be used. In some embodiments, the one or more carrier members 4640 is thermally coupled to the housing 4510 of the cartridge 4500. For example, the inner surface 4517 of the receptacle portion 4512 may be provided with a threaded hole for securing the one or more carrier members 4640 thereon. For example, the one or more carrier members 4640 may comprise a thermally conductive material to allow relatively even heating of the various parts or elements of the cartridge 4500. For example, in this way, any evaporable material contained inside the cartridge 4500 may be evenly heated to reduce the likelihood of creating hot spots or overheating any portion of the evaporable material. In some embodiments, the one or more carrier members 4640 may be integrally formed with the receptacle portion 4512 or the cap portion 4513 of the housing 4510.

[00160] The one or more carrier members 4640 is generally adapted to support or contain an evaporable material. For example, such evaporable material may be provided on the one or more carrier members 4640 in the form of an evaporable coating. In some embodiments, the evaporable coating may additionally be provided on the inner surface 4517 of the housing 4510. FIG. 47 shows an embodiment wherein an evaporable coating 4720 is disposed on the surfaces of the one or more carrier members 4640 and the interior surface 4517 of the housing 4510.

[00161] In some embodiments, the surface onto which the evaporable coating is disposed is arranged non-horizontally, with respect to a gravitational direction. For example, the surface onto which the evaporable coating is disposed is arranged substantially vertically, with respect to a gravitational direction, so as to be substantially parallel to the gravitational direction. Accordingly, in some embodiments wherein the cartridge includes the evaporable coating, the evaporable coating may be disposed on the surface which is oriented substantially vertically in the operating configuration of the cartridge. Wthout wishing to be bound by any particular theory, it is postulated that at least some of the contaminants contained in the evaporable coating may be released during a thermal evaporation process. By disposing the evaporable coating on a substantially vertical surface, it is postulated that at least a portion of such contaminant may accumulate near the bottom of the chamber of the cartridge, thus reducing the likelihood of such contaminants escaping the cartridge and becoming deposited onto the target substrate. Furthermore, by disposing the evaporable coating on a substantially vertical surface, re-deposition of such contaminants onto the evaporable coating surface may be inhibited.

[00162] FIG. 47 illustrates the embodiment wherein the cartridge 4500 includes the evaporable coating 4720. The evaporable coating 4720 is illustrated as being disposed on the surfaces of the one or more carrier members 4640 and the inner surface 4517 of the receptacle portion 4512 of the housing 4510.

[00163] In one aspect, a method for evaporating an evaporable coating is provided. The method includes providing a carrier surface coated with the evaporable coating, and heating the evaporable coating to cause the evaporable coating to evaporate. A vapor material may be generated by evaporating the evaporable coating. In some embodiments, the carrier surface is provided by one or more carrier members. In other embodiments, the one or more carrier members is disposed inside a housing of a cartridge. In some other embodiments, the carrier surface is provided by a surface of a housing of the cartridge. For example, such surface may be an interior or inner surface of the housing.

[00164] FIG. 48A illustrates an embodiment wherein a cartridge 4800 includes a housing 4810 including a tapered portion. For example, in the illustrated embodiment, the housing 4810 is tapered such that a base portion 4811 of the housing 4810 is narrower than a top portion 4813 of the cartridge 4800. The housing 4810 of the cartridge 4800 further includes apertures 4820 formed on the top portion 4813.

[00165] FIG. 48B illustrates an embodiment wherein the housing 4810 of a cartridge 4800’ is tapered at the base portion 4811 to form a cone-shaped housing 4810. The top portion 4813 of the housing 4810 is configured to be wider than the base portion 4811 , and the top portion 4813 is provided with apertures 4820.

[00166] For example, the cartridges 4800 and 4800’ according to the embodiments of FIGs. 48A and 48B may be configured to fit inside a correspondingly shaped crucible for use in PVD systems. [00167] In one aspect, a system for depositing a thin film coating onto a surface is provided. According to some embodiments, the system includes a cartridge, an evaporable material disposed in the cartridge, and a heating element configured to heat the cartridge to evaporate the evaporable material, thereby generating a first vapor stream. The cartridge includes a receptacle for receiving an evaporable material, an aperture configured to allow vapor to be discharged from the cartridge, a gas permeable member, and a baffle arranged in a vapor path between the gas permeable member and the aperture. In some

embodiments, the system is configured to cause the first vapor stream to condense onto the gas permeable member to form an intermediate coating thereon. The intermediate coating is re-evaporated to generate a second vapor stream. The second vapor stream is then discharged through the aperture.

[00168] FIG. 49 illustrates a cartridge 4900 according to one embodiment. The cartridge 4900 includes a housing 4910 and one or more apertures 4920 for allowing vapor to be discharged from the cartridge 4900. FIG. 50A illustrates a cross-sectional view of the cartridge 4900 taken along line V-V shown in FIG. 49.

[00169] As illustrated in FIG. 50A, the cartridge 4900 includes a receptacle or chamber 4940 formed by the housing 4910 adapted for receiving the evaporable material therein. The cartridge 4900 includes a sleeve 4915 which is fitted to and inserted into the housing 4910. The sleeve 4915 includes a cavity portion 4991 , which defines a cavity 4970 for housing a gas permeable member 4951 therein. A cap portion 4913 is fitted to and inserted into the sleeve 4915, where the cap portion 4913 includes a baffle 4930 and defines the aperture 4920. The housing 4910, the sleeve 4915, and the cap portion 4913 collectively may be referred to as a body of the cartridge 4900. The cavity 4970 is connected to the receptacle 4940 via a first opening 4971 formed at a bottom portion of the cavity 4970 (and formed at a bottom of the cavity portion 4991). A second opening 4973 is also provided at a top portion of the cavity 4970 (and formed at a top of the cavity portion 4991) to allow vapor to flow towards the cap portion 4913 and to be discharged via the aperture 4920. Auxiliary gas permeable members 4961 and 4963 is provided at the first opening 4971 and the second opening 4973, respectively. In the illustrated embodiment, the auxiliary gas permeable members 4961 and 4963 and the gas permeable member 4951 are arranged such that any vapor traveling from the receptacle 4940 to the aperture 4920 is incident upon such members. Additionally, the baffle 4930 is arranged with respect to the second opening 4973 such that any vapor traveling from the cavity 4970 towards the cap portion 4913 via the second opening 4973 is incident upon the baffle 4930 prior to being discharged via the anert re 4920. For example, in the illustrated embodiment, the baffle 4930 includes a blocking portion 4932 extending substantially laterally to inhibit the direct flow of vapor into the aperture 4920. Due to the arrangement and configuration of the baffle 4930 with respect to the aperture 4920 and the second opening 4973, a direct line of sight from the second opening 4973 to the aperture 4920 is substantially prevented.

[00170] Without wishing to be bound by any particular theory, it is postulated that such configuration may increase the average retention time of the vapor flux inside the cartridge 4900 and thus reduce the mean free path of the vapor flux material. It is further postulated that, as a result, the likelihood of any particulates (e.g. spatter) or clusters of atoms or molecules being released through the one or more apertures 4920 is reduced, since any such particulates or clusters would generally collide with a surface of the cartridge 4900 prior to becoming discharged. Additionally, it is postulated that the likelihood of any contaminants (which may be present in the evaporable material) being released from the cartridge 4900 during an evaporation process is reduced due to such arrangement of the gas permeable members 4961 , 4951 , and 4963, particularly in combination with the baffle 4930. For example, any contaminants in a non-vapor phase as well as particulates generated in the receptacle 4940 may be substantially inhibited from entering the cavity 4970 due to the presence of the auxiliary gas permeable member 4961. The likelihood of such contaminants and particulates being discharged from the cartridge 4900 is further reduced due to the arrangement of the gas permeable member 4951 and the auxiliary gas permeable member 4963, as well as the baffle 4930 which creates a tortuous vapor path to inhibit spatter generated at or near the cavity 4970 from being discharged via the aperture 4920.

[00171] FIG. 50B illustrates an embodiment wherein the cartridge 4900 is provided with a plurality of gas permeable members 4951a, 4951b, 4951c. In such embodiment, vapor generated by evaporating the evaporable material (not shown) in the receptacle 4940 is sequentially passed through the first gas permeable member 4951a, the second gas permeable member 4951 b, and then the third gas permeable member 4951c. In some embodiments, the gas permeable members 4951a, 4951 b, 4951c may be configured to have different fineness from one another. For example, the third gas permeable member 4951c may be finer than the second gas permeable member 4951 b, which is finer than the first gas permeable member 4951a. For example, the vapor traveling through the cavity 4970 may be incident upon increasingly finer gas permeable member. As would be appreciated, the fineness of the gas permeable members 4951a, 4951b, 4951c may be determined, for example, by pore size (in cases of foam or other porous members), density, and/or mesh size (in cases of sieves or meshes). [00172] The operation of the cartridge 4900 in a PVD system is illustrated in FIGs. 51 A and 51 B. Referring to FIG. 51 A, the cartridge 4900 according to the embodiment of FIG.

50A is shown. The cartridge 4900 includes an evaporable material in the form of an evaporable coating 5110 provided in the receptacle 4940. For example, the evaporable coating 5110 is disposed directly on an interior surface 4917 of the housing 4910. In other embodiments, the evaporable coating 5110 may be provided on a surface of a carrier member. In some embodiments, the evaporable coating 5110 is provided on a substantially vertically oriented surface (e.g. the vertical portion of the interior surface 4917). A heating element 5101 is provided in the system for heating the cartridge 4900. The system is configured such that, upon heating the cartridge 4900, the evaporable coating 5110 is evaporated to generate a first vapor stream. For example, the first vapor stream may be generated upon the evaporable coating 5110 being heated to a first temperature. For example, the first temperature may generally correspond to the sublimation temperature of the material for forming the evaporable coating 5110. The first vapor stream is configured to travel from the receptacle 4940 into the cavity 4970 through the first opening 4971. By passing the first vapor stream through the auxiliary gas permeable member 4961 , particulates or contaminants entrained in, or otherwise carried by, the first vapor stream may be filtered out. In some embodiments, the system is configured such that the first vapor stream is condensed onto the gas permeable member 4951 to form an intermediate coating (not shown) thereon. For example, the cartridge 4900 may be configured such that the gas permeable member 4951 is heated to a lower temperature than the housing 4910, thereby causing the first vapor stream to condense thereon. In another example, the cartridge 4900 may be configured such that the partial pressure or vapor pressure of the evaporable material in the receptacle 4940 is different from that in the cavity 4970, thereby causing the first vapor stream to condense onto the gas permeable member 4951 even in some cases where the temperature of the receptacle 4940 and the gas permeable member 4951 are substantially similar. In some embodiments, the temperature of the gas permeable member 4951 may vary at different portions to create a temperature gradient. For example, the portion of the gas permeable member 4951 disposed proximal to the cap portion 4913 may be at a higher temperature than another portion disposed proximal to the first opening 4971. For example, such temperature gradient may be caused due to the greater thermal load applied to the cap portion 4913, which is then conducted or radiated towards the portion of the gas permeable member 4951 proximal to the cap portion 4913. The system is configured such that the intermediate coating is then evaporated from the gas permeable member 4951 to generate a second vapor stream. For example, the gas permeable member 4951 may be configured to be heated at a second temperature to generate the second vapor stream. In some embodiments, the second temperature is less than the first temperature. The second temperature may nevertheless be sufficient to evaporate the intermediate coating. The second vapor stream is then passed through the second opening 4973 and the auxiliary gas permeable member 4963 provided therein. In this way, the passage of any particulates or impurities through the auxiliary gas permeable member 4963 may be substantially inhibited. The second vapor stream, upon exiting the cavity 4970 via the second opening 4973, becomes incident onto the baffle 4930 prior to being discharged through the opening 4920.

In some embodiments, the baffle 4930 is configured to substantially inhibit a direct line of sight between the gas permeable member 4951 and the aperture 4920, such that substantially all of the second vapor stream is caused to become incident onto a portion of the cartridge 4900 prior to being discharged. The second vapor stream discharged from the cartridge 4900 may be deposited onto a substrate (not shown) for forming a thin film layer or a device. In some embodiments, the cartridge 4900 is placed inside a crucible (not shown) such that the crucible is arranged between the cartridge 4900 and the heating element 5101.

[00173] FIG. 51 B illustrates another embodiment wherein the evaporable material 5110 is provided as a single monolithic or continuous structure. For example, the evaporable material 5110 may be in the shape of a toroid or an open cylinder. The evaporable material 5110 includes a substantially vertically oriented surface 4981 and a non-vertical ly oriented surface 4983, and a surface area corresponding to the substantially vertically oriented surface 4981 is greater than a surface area corresponding to the non-vertically oriented surface 4983, for example, by a factor of about 1.1 times or greater, about 1.3 times or greater, about 1.5 times or greater, about 2 times or greater, about 5 times or greater, or about 10 times or greater.

[00174] In some embodiments, the cartridge 4900 is configured to inhibit thermal conduction between the housing 4910 and the gas permeable member 4951. In some embodiments, the cavity 4970 defined by the sleeve 4915 is spaced apart from the housing 4910. Examples of the gas permeable member 4951 , 4961 , or 4963 include, but are not limited to, a perforated member, mesh, sieve, porous member, or any combination thereof. For example, the gas permeable member 4951 , 4961 , or 4963 may be formed of a metal or a ceramic. In some embodiments, the purity of the material for forming the intermediate coating is greater than the purity of the material for forming the starting evaporable material.

[00175] In some embodiments, the gas permeable member 4951 is a metallic mesh. The metallic mesh may have a mesh size of about 100 or greater, about 150 or greater, about 200 or greater, about 300 or greater, about 500 or greater, about 600 or greater, or about 700 or greater. For example, the gas permeable member 4951 may include a metallic mesh having a mesh size of between about 100 and about 2000.

[00176] In some embodiments, the aperture 4920 may be configured to enhance the uniformity of the vapor flux discharged from the cartridge 4900. For example, the cartridge 4900 may further include a nozzle connected to the aperture 4920 or formed integrally therewith for such purpose.

[00177] The various embodiments of the apparatus, including the cartridge and the carrier member provided with the evaporable coating as described above, may be used to deposit a conductive coating or a portion thereof in some embodiments. Accordingly, in one aspect, a method for fabricating an opto-electronic device is provided, the method including: (i) providing a substrate, the substrate comprising a first electrode and one or more

semiconductor layers disposed over at least a portion of the first electrode; and (ii) depositing a second electrode onto the substrate by: (a) providing a carrier surface coated with an evaporable coating; (b) heating the evaporable coating to generate a vapor stream; and (c) subjecting the substrate to the vapor stream to deposit the second electrode onto the substrate. For example, such opto-electronic device may be an organic opto-electronic device, including organic light-emitting diodes (OLEDs) and organic photovoltaic devices (OPVs). In some embodiments, in (c), a surface of the one or more semiconductor layers is subjected to the vapor stream to deposit the second electrode onto the surface of the one or more semiconductor layers. For example, in the case of OLEDs, the one or more

semiconductor layers may include an emissive layer or an electroluminescent layer. In some embodiments, the one or more semiconductor layers may comprise a hole injection layer, an electron blocking layer, a hole transport layer, an electron transport layer, a hole blocking layer, and/or an electron injection layer. In some embodiments, the first electrode may be an anode and the second electrode may be a cathode. For example, the second electrode may be deposited onto the surface of an electron injection layer.

[00178] It will be appreciated that different features of the various embodiments of the cartridges, carrier members, and the evaporable coating, as described herein, may be combined with each other in different ways. In other words, a feature described with respect to one embodiment of a cartridge, a carrier member or members, or an evaporable coating, can be applied to other embodiments of a cartridge, a carrier member or members, and/or an evaporable coating, although not specifically stated. [00179] As used herein, the terms“substantially,”“substantial,”“approximately,” and “about” are used to denote and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or

circumstance occurs precisely, as well as instances in which the event or circumstance occurs to a close approximation. For example, when used in conjunction with a numerical value, the terms can refer to a range of variation of less than or equal to ±10% of that numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1 %, less than or equal to ±0.5%, less than or equal to ±0.1 %, or less than or equal to ±0.05%. For example, a first numerical value can be“substantially” the same as a second numerical value if the first numerical value is within a range of variation of less than or equal to ±10% of the second numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1 %, less than or equal to ±0.5%, less than or equal to ±0.1 %, or less than or equal to ±0.05%. For example, “substantially” parallel can refer to a range of angular variation relative to 0° that is less than or equal to ±10°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1 °, less than or equal to ±0.5°, less than or equal to ±0.1 °, or less than or equal to ±0.05°.

[00180] Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It can be understood that such range formats are used for convenience and brevity, and should be understood flexibly to include not only numerical values explicitly specified as limits of a range, but also all individual numerical values or sub ranges encompassed within that range as if each numerical value and sub-range is explicitly specified.

[00181] Although the disclosure has been described with reference to certain specific embodiments, various modifications thereof will be apparent to those skilled in the art. Any examples provided herein are included solely for the purpose of illustrating the disclosure and are not intended to limit the disclosure in any way. Any drawings provided herein are solely for the purpose of illustrating various aspects of the disclosure and are not intended to be drawn to scale or to limit the disclosure in any way. The scope of the claims appended hereto should not be limited by the specific embodiments set forth in the above description, but should be given the broadest interpretation consistent with the present disclosure as a whole. The disclosures of all documents recited herein are incorporated herein by reference in their entirety.

Claims

1. A system for depositing a thin film, the system comprising:

(i) a cartridge defining a receptacle for receiving an evaporable material and defining an aperture configured to allow vapor to be discharged from the cartridge, the cartridge comprising:

(a) a gas permeable member arranged in a vapor path between the receptacle and the aperture; and

(b) a baffle arranged in a vapor path between the gas permeable member and the aperture; and

(ii) a heating element configured to heat the cartridge to evaporate the evaporable material, thereby generating a first vapor stream,

wherein the system is configured to cause the first vapor stream to condense onto the gas permeable member to form an intermediate coating thereon,

wherein the system is configured to cause the intermediate coating to re-evaporate to generate a second vapor stream, the second vapor stream being discharged through the aperture.

2. The system of claim 1 , wherein the system is configured to heat the evaporable material at a first temperature to generate the first vapor stream, and is configured to heat the intermediate coating at a second temperature to generate the second vapor stream, the second temperature being lower than the first temperature.

3. The system of claim 1 or 2, wherein the baffle is configured to inhibit a direct line of sight between the gas permeable member and the aperture.

4. The system of any one of claims 1 to 3, wherein the cartridge further comprises a housing, and wherein the receptacle, the gas permeable member, and the baffle are arranged inside the housing.

5. The system of claim 4, wherein the cartridge further comprises a cap portion fitted to the housing, the cap portion defines the aperture, and the aperture is in fluid communication with the receptacle to allow vapor to be discharged from the cartridge.

6. The system of claim 4 or 5, wherein the cartridge is configured to inhibit thermal conduction between the housing and the gas permeable member.

7. The system of any one of claims 4 to 6, wherein the cartridge further comprises a cavity portion defining a cavity for receiving the gas permeable member therein.

8. The system of claim 7, wherein the cavity portion is arranged inside the housing, and the cavity portion is spaced apart from a wall of the housing.

9. The system of claim 8, wherein the cavity portion is centrally arranged within the housing.

10. The system of any one of claims 7 to 9, wherein the cartridge further comprises a sleeve comprising the cavity portion, and the sleeve is fitted to the housing.

11. The system of any one of claims 7 to 10, wherein the cavity is in fluid communication with the receptacle through a first opening in the cavity portion to allow the first vapor stream generated in the receptacle to be incident upon the gas permeable member in the cavity portion.

12. The system of claim 11 , wherein a second opening is provided in the cavity portion for directing the second vapor stream generated in the cavity portion to be incident upon the baffle, prior to the second vapor stream being discharged through the aperture.

13. The system of any one of claims 1 to 12, wherein the gas permeable member comprises a perforated member, a mesh, a sieve, a porous member, or any combination of two or more thereof.

14. The system of any one of claims 1 to 13, further comprising the evaporable material disposed in the receptacle.

15. The system of claim 14, wherein the evaporable material is an evaporable coating, and the evaporable coating is disposed on a carrier surface oriented non-horizontally.

16. The system of claim 15, wherein the carrier surface is oriented substantially vertically.

17. The system of claim 15 or 16, wherein the housing provides the carrier surface.

18. The system of claim 14, wherein the evaporable material is a single monolithic structure.

19. The system of claim 18, wherein the evaporable material comprises a substantially vertically oriented surface and a non-vertically oriented surface, and wherein a surface area corresponding to the substantially vertically oriented surface is greater than a surface area corresponding to the non-vertically oriented surface.

20. The system of claim 18 or 19, wherein a gap is provided between the evaporable material and the housing.

21. The system of claim 19, wherein a gap is provided between the substantially vertically oriented surface of the evaporable material and the housing.

22. The system of any one of claims 14 to 21 , wherein the evaporable material comprises an inorganic material.

23. The system of any one of claims 14 to 21 , wherein the evaporable material comprises a fullerene.

24. The system of claim 23, wherein the fullerene comprises Obo, C₇o, C₇₆, Cs4, or any mixture of two or more thereof.

25. The system of any one of claims 14 to 21 , wherein the evaporable material comprises a metal.

26. The system of claim 25, wherein the evaporable material comprises aluminum, silver, copper, magnesium, ytterbium, zinc, cadmium, or any mixture of two or more thereof.

27. The system of claim 25, wherein the evaporable material comprises magnesium.

28. A cartridge for use in depositing a thin film, the cartridge comprising:

(i) a body defining a receptacle for receiving an evaporable material and defining an aperture configured to allow vapor to be discharged from the cartridge;

(ii) a gas permeable member arranged inside the body in a vapor path between the receptacle and the aperture; and (iii) a baffle arranged inside the body in a vapor path between the gas permeable member and the aperture.

29. The cartridge of claim 28, wherein the body comprises a housing, and wherein the receptacle, the gas permeable member, and the baffle are arranged inside the housing.

30. The cartridge of claim 29, wherein the body further comprises a cap portion fitted to the housing, the cap portion defines the aperture, and the aperture is in fluid communication with the receptacle to allow vapor to be discharged from the cartridge.

31. The cartridge of claim 29 or 30, wherein the gas permeable member is arranged inside the housing, and is spaced apart from a wall of the housing.

32. The cartridge of claim 31 , wherein the gas permeable member is centrally arranged within the housing.

33. The cartridge of any one of claims 28 to 32, wherein the gas permeable member comprises a perforated member, a mesh, a sieve, a porous member, or any combination of two or more thereof.

34. The cartridge of any one of claims 28 to 33, further comprising the evaporable material disposed in the receptacle.