WO2019234503A3 - Mems mirror with resistor for determining a position of the mirror - Google Patents

Mems mirror with resistor for determining a position of the mirror Download PDF

Info

Publication number
WO2019234503A3
WO2019234503A3 PCT/IB2019/000723 IB2019000723W WO2019234503A3 WO 2019234503 A3 WO2019234503 A3 WO 2019234503A3 IB 2019000723 W IB2019000723 W IB 2019000723W WO 2019234503 A3 WO2019234503 A3 WO 2019234503A3
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
mems
resistor
actuators
mems mirror
Prior art date
Application number
PCT/IB2019/000723
Other languages
French (fr)
Other versions
WO2019234503A2 (en
Inventor
Nir Avraham GOREN
Sason Sourani
Nir KAHANA
Yair Alpern
Moshe Medina
Michael Girgel
Original Assignee
Innoviz Technologies Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innoviz Technologies Ltd. filed Critical Innoviz Technologies Ltd.
Publication of WO2019234503A2 publication Critical patent/WO2019234503A2/en
Publication of WO2019234503A3 publication Critical patent/WO2019234503A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
    • G01S7/42—Diversity systems specially adapted for radar
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G01S7/4863—Detector arrays, e.g. charge-transfer gates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Micromachines (AREA)

Abstract

The present disclosure relates to MEMS mirrors and methods for operating and measuring locations of the same. In one implementation, a microelectromechanical system (MEMS) mirror assembly may include a MEMS mirror; a frame; a plurality of actuators configured to rotate pivot the MEMS mirror with respect to a plane of the frame; one or more strain gauges configured to measure a movement of one or more of the plurality of actuators, each strain gauge including at least one movable resistor disposed on the one or more actuators; and circuitry configured to measure an electrical response of the at least one moveable resistor to one or more applied voltages, determine at least one electrical property of the at least one movable resistor, and determine a location of the MEMS mirror based on the at least one electrical property.
PCT/IB2019/000723 2018-06-05 2019-06-05 Mems mirror with resistor for determining a position of the mirror WO2019234503A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862680836P 2018-06-05 2018-06-05
US62/680,836 2018-06-05
US201862703672P 2018-07-26 2018-07-26
US62/703,672 2018-07-26

Publications (2)

Publication Number Publication Date
WO2019234503A2 WO2019234503A2 (en) 2019-12-12
WO2019234503A3 true WO2019234503A3 (en) 2020-03-05

Family

ID=67928856

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2019/000723 WO2019234503A2 (en) 2018-06-05 2019-06-05 Mems mirror with resistor for determining a position of the mirror

Country Status (1)

Country Link
WO (1) WO2019234503A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021140420A1 (en) * 2020-01-09 2021-07-15 Innoviz Technologies Ltd. Mems scanning systems with textured surfaces
EP4186750A4 (en) * 2020-07-22 2024-02-28 Koito Mfg Co Ltd Information detecting device and road-surface drawing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040251788A1 (en) * 2003-06-11 2004-12-16 Heaton Mark W. Position sensor for a pivoting platform

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040251788A1 (en) * 2003-06-11 2004-12-16 Heaton Mark W. Position sensor for a pivoting platform

Also Published As

Publication number Publication date
WO2019234503A2 (en) 2019-12-12

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