WO2019226613A1 - Procédés de fabrication de lentilles liquides - Google Patents

Procédés de fabrication de lentilles liquides Download PDF

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Publication number
WO2019226613A1
WO2019226613A1 PCT/US2019/033246 US2019033246W WO2019226613A1 WO 2019226613 A1 WO2019226613 A1 WO 2019226613A1 US 2019033246 W US2019033246 W US 2019033246W WO 2019226613 A1 WO2019226613 A1 WO 2019226613A1
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WIPO (PCT)
Prior art keywords
liquid
emulsified
demulsifying
temperature
cavity
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Application number
PCT/US2019/033246
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English (en)
Inventor
Tetyana BUCHHOLZ
Eric John Mozdy
Shawn Michael O'malley
Original Assignee
Corning Incorporated
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Publication date
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Publication of WO2019226613A1 publication Critical patent/WO2019226613A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting

Definitions

  • the disclosure relates to liquid lenses and, more particularly, to methods of manufacturing liquid lenses.
  • Liquid lenses generally include two immiscible liquids disposed within a cavity. Varying an electric field applied to the liquids can vary the wettability of one of the liquids relative to walls of the cavity, which has the effect of varying the shape of an interface (meniscus) formed between the two liquids. Further, in various applications, changes to the shape of the interface result in changes to the focal length of the lens.
  • the present disclosure solves those problems, and counters the heretofore prevailing thought, by mixing a volume of the two liquids, emulsifying the two liquids into an emulsified liquid, dispensing the emulsified liquid into one or more cavities, and then demulsifying the emulsified liquid back into the component liquids such that the interface between the two liquids forms.
  • a method of forming a liquid lens comprises the steps of: emulsifying a first liquid and a second liquid to form an emulsified liquid in which the first liquid and the second liquid are substantially immiscible with each other; depositing the emulsified liquid into a cavity defined above a window; and demulsifying the emulsified liquid into the first liquid and the second liquid, wherein the first liquid and the second liquid have different refractive indices than each other such that an interface between the first liquid and the second liquid defines a variable lens.
  • the method of the first aspect wherein emulsifying the first liquid and the second liquid to form the emulsified liquid is performed with a vortex emulsifier.
  • the method of any one of the first and second aspects further comprises: depositing the emulsified liquid, from a common bulk source of the emulsified liquid, into a plurality of cavities disposed on a substrate.
  • the method of any of the first through third aspects wherein the first liquid has a different density than the second liquid at a temperature or temperature range at which the step of demulsifying occurs; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid occurs over a time period of from about 1 hour to 48 hours due to the force of gravity.
  • the method of any one of the first through third aspects wherein the first liquid has a different density than the second liquid at a temperature or temperature range at which the step of demulsifying occurs; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes using a centrifuge to apply centrifugal force to the emulsified liquid.
  • the method of any one of the first through third aspects wherein the first liquid and the second liquid have at least approximately the same density at room temperature but different densities at a second temperature different than room temperature; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes raising the temperature of the emulsified liquid to the second temperature.
  • the method of any one of the first through third aspects wherein the first liquid and the second liquid have at least approximately the same density at room temperature; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes applying a voltage to a driving electrode disposed on a sidewall of the cavity.
  • the method of any one of the first through seventh aspects wherein demulsifying the emulsified liquid into the first liquid and the second liquid occurs at a temperature of from about -80° C to about 100° C.
  • the method of any one of the first through eighth aspects wherein a volumetric ratio of the second liquid to the first liquid in the emulsified liquid is from about 0.4 to about 0.6.
  • the method of the fourth aspect further comprises: dividing the substrate to form a plurality of liquid lenses, each of which include one of the plurality of cavities.
  • a method of forming a liquid lens comprises the steps of: mixing a first liquid and a second liquid, wherein the first liquid and the second liquid are substantially immiscible with each other; emulsifying the first and second liquids to form an emulsified liquid; depositing the emulsified liquid into a cavity defined above a window; and demulsifying the emulsified liquid into the first liquid and the second liquid, the first liquid and the second liquid having different refractive indices than each other such that an interface between the first liquid and the second liquid defines a variable lens.
  • the method of the eleventh aspect wherein the first liquid comprises a polar liquid, and the second liquid comprises a non-polar liquid.
  • the method of any of the eleventh or twelfth aspects further comprises: depositing the emulsified liquid, from a common bulk source of the emulsified liquid, into a plurality of cavities disposed on a substrate.
  • the method of any one of the eleventh through fourteenth aspects wherein the steps of mixing the first liquid and the second liquid and emulsifying the first liquid and the second liquid are performed substantially simultaneously.
  • the method of any one of the eleventh through fifteenth aspects wherein the first liquid has a different density than the second liquid at a temperature or temperature range at which the step of demulsifying occurs; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid occurs due to the force of gravity and over a time period of from about 1 hour to 48 hours.
  • the method of any one of the eleventh through fifteenth aspects wherein the first liquid has a different density than the second liquid at a temperature or temperature range at which the step of demulsifying occurs; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes using a centrifuge to apply centrifugal force to the emulsified liquid.
  • the method of any one of the eleventh through fifteenth aspects wherein the first liquid and the second liquid have at least approximately the same density at room temperature but have a different density at a second temperature different than room temperature; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes raising the temperature of the emulsified liquid to the second temperature.
  • the method of any one of the eleventh through fifteenth aspects wherein the first liquid and the second liquid have at least approximately the same density at room temperature; and wherein demulsifying the emulsified liquid into the first liquid and the second liquid includes applying a voltage to a driving electrode disposed on a sidewall of the cavity.
  • the method of any one of the eleventh through nineteenth aspects further comprises: dividing the substrate to form a plurality of liquid lenses, each of which include one of the plurality of cavities.
  • a method of forming a liquid lens comprises the steps of: mixing a first liquid and a second liquid, wherein the first liquid and the second liquid have different refractive indices and different densities than each other at room temperature, and wherein the first liquid is a polar liquid and the second liquid is a non-polar liquid; emulsifying the first and second liquids to form an emulsified liquid; depositing the emulsified liquid into a cavity defined above a window; and demulsifying the emulsified liquid into the first liquid and the second liquid such that an interface between the first liquid and the second liquid defines a variable lens, and, after demulsifying, the first liquid contacts a common electrode.
  • the method of the twenty-first aspect wherein emulsifying the first liquid and the second liquid to form the emulsified liquid is performed with a vortex emulsifier.
  • the method of any one of the twenty-first or twenty- second aspects further comprises: depositing the emulsified liquid, from a common bulk source of the emulsified liquid, into a plurality of cavities disposed on a substrate.
  • the method of any one of the twenty-first through twenty-third aspects wherein demulsifying the emulsified liquid into the first liquid and the second liquid occurs due to the force of gravity at room temperature and over a time period of from about 1 hour to 48 hours.
  • the method of any one of the twenty-first through twenty-third aspects wherein demulsifying the emulsified liquid into the first liquid and the second liquid occurs at room temperature and includes using a centrifuge to apply centrifugal force to the emulsified liquid.
  • a volumetric ratio of the second liquid to the first liquid in the emulsified liquid is from about 0.4 to about 0 6
  • the method of the twenty-third aspect, wherein depositing the emulsified liquid into a plurality of cavities includes depositing the emulsified liquid into more than one cavity simultaneously.
  • the method of any one of the twenty-third or twenty -eighth aspects further comprises: dividing the substrate to form a plurality of liquid lenses, each of which include one of the plurality of cavities.
  • the method of any one of the twenty-first through twenty -ninth aspects wherein the first liquid comprises water, and the second liquid comprises an oil.
  • FIG. 1A is a schematic cross-sectional view of a liquid lens, according to at least one example, illustrating a first liquid separated from a second liquid at an interface;
  • FIG. 1B is a schematic cross-sectional view of a liquid lens, according to at least one example, illustrating the first liquid separated from the second liquid at an interface;
  • FIG. 2 is a schematic flowchart of a method of forming the liquid lens of either of FIGS.
  • FIG. 3 is a perspective view of a substrate including a plurality of cavities and a batch of an emulsified liquid (an emulsion of the first liquid and the second liquid) being dispensed into the plurality of cavities in accordance with the method of FIG. 2;
  • FIG. 4 is a schematic cross-sectional view of one of the plurality of cavities of the substrate of FIG. 3 taken through line IV-IV but after being further formed into the liquid lens of FIGS. 1A or 1B, illustrating the cavity of the liquid lens containing the emulsified liquid before being demulsified into the first liquid and the second liquid separated at the interface as in FIG. 1A; and
  • FIG. 5 is a graph of measured density as a function of temperature for an example first liquid and an example second liquid, illustrating a widening density differential as a function of increased temperature.
  • the term“and/or,” when used in a list of two or more items, means that any one of the listed items can be employed by itself, or any combination of two or more of the listed items can be employed.
  • the composition can contain A alone; B alone; C alone; A and B in combination; A and C in combination; B and C in combination; or A, B, and C in combination.
  • relational terms such as first and second, top and bottom, and the like, are used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions.
  • the term "coupled” in all of its forms: couple, coupling, coupled, etc. generally means the joining of two components (electrical or mechanical) directly or indirectly to one another. Such joining may be stationary in nature or movable in nature. Such joining may be achieved with the two components (electrical or mechanical) and any additional intermediate members being integrally formed as a single unitary body with one another or with the two components. Such joining may be permanent in nature, or may be removable or releasable in nature, unless otherwise stated.
  • the term“about” means that amounts, sizes, formulations, parameters, and other quantities and characteristics are not and need not be exact, but may be approximate and/or larger or smaller, as desired, reflecting tolerances, conversion factors, rounding off, measurement error and the like, and other factors known to those of skill in the art.
  • the term“about” is used in describing a value or an end-point of a range, the disclosure should be understood to include the specific value or end-point referred to.
  • elements shown as integrally formed may be constructed of multiple parts, or elements shown as multiple parts may be integrally formed, the operation of the interfaces may be reversed or otherwise varied, the length or width of the structures, and/or members, or connectors, or other elements of the system, may be varied, and the nature or number of adjustment positions provided between the elements may be varied.
  • the elements and/or assemblies of the system may be constructed from any of a wide variety of materials that provide sufficient strength or durability, in any of a wide variety of colors, textures, and combinations. Accordingly, all such modifications are intended to be included within the scope of the present innovations. Other substitutions, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the desired and other exemplary embodiments without departing from the spirit of the present innovations.
  • FIGS. 1A and 1B cross-sectional views of some examples of a liquid lens
  • the liquid lens 100 includes a lens body 102 and a cavity 104 formed in the lens body 102.
  • a first liquid 106 and a second liquid 108 are disposed within the cavity 104.
  • the method of forming the liquid lens 100 involves improvements in depositing the first liquid 106 and the second liquid 108 within the cavity 104.
  • the first liquid 106 may be a polar liquid or a conducting liquid.
  • the first liquid 106 can be water loaded with ionic compounds (such as one or more salts) that substantially or completely dissociate into cations and anions in the water.
  • ionic compounds such as one or more salts
  • anions include, but are not limited to, halides, e.g., chloride, bromide, iodide, sulfate, carbonate, hydrogen carbonate, acetate, and the like, as well as mixtures thereof.
  • cations include, but are not limited to, alkali, alkaline-earth, and metallic cations.
  • the first liquid 106 can be or can include an ionic liquid (i.e., an ionic compound that is liquid at temperatures relevant to the application of the liquid lens 100).
  • the second liquid 108 may be a non-polar liquid or an insulating liquid.
  • Examples include an oil, an alkane, or a blend of alkanes, including halogenated alkanes, or any other non-polar or insulating liquid that is not miscible with the first liquid 106.
  • This non-conductive fluid comprises an organic or an inorganic (mineral) compound or mixture thereof. Examples of such organic or inorganic compounds include a Si-based monomer or oligomer, a Ge-based monomer or oligomer, a Si— Ge-based monomer or oligomer, a hydrocarbon, or a mixture thereof.
  • hydrocarbons include a linear or branched alkane, such as decane (C10EI22), dodecane (C12H24), squalane (C30H62), and the like; an alkane comprising one or more rings, such as tert-butylcyclohexane (C10H20), and the like; a fused ring system, such as a- chloronaphthalene, a-bromonaphthalene, cis,trans-decahydronaphthalene (CioHis), and the like; a mixture of hydrocarbons, such as those available as Isopar® V, Isopar® P (from Exxon Mobil), and the like; and mixtures thereof.
  • a linear or branched alkane such as decane (C10EI22), dodecane (C12H24), squalane (C30H62), and the like
  • an alkane comprising one or more rings such as tert-butylcycl
  • silicon based species include: hexamethyidisilane, diphenyldimethylsilane, chlorophenyltrimethylsilane, phenyltrimethyl- silane, phenethyltris(trimethylsiloxy)silane, phenyltris(trimethylsiloxy)silane, polydimethylsiloxane, tetra-phenyltetramethyltrisiloxane, poly(3 ,3 ,3 - trifluoropropylmethylsiloxane) , 3,5,7 -triphenylnonamethyl-pentasiloxane , 3,5- diphenyloctamethy ltetrasiloxane , 1 , 1 , 5 , 5 -tetraphenyl- 1 , 3 , 3 , 5 -tetramethyl-trisiloxane , and hexamethylcyclotrisiloxane.
  • germane based species include: hexamethyldigermane, diphenyldimethylgermane, and phenyltrimethylgermane.
  • the first liquid 106 and the second liquid 108 can include anti-oxidant compounds such as the BHT- type (butylated hydroxytoluene) anti-oxidants, such as 2,6-di-tert-butyl-4-methylphenol.
  • BHT- type butylated hydroxytoluene
  • 2,6-di-tert-butyl-4-methylphenol 2,6-di-tert-butyl-4-methylphenol.
  • the first liquid 106 and the second liquid 108 are immiscible with each other and have different refractive indices such that an interface 110 between the first liquid 106 and the second liquid 108 forms a variable lens.
  • the first liquid 106 and the second liquid 108 may have substantially the same density within the temperature range at which the liquid lens 100 is intended to be used, which can help to avoid changes in the shape of the interface 110 as a result of changing the physical orientation of the liquid lens 100 (e.g., as a result of gravitational forces).
  • the first liquid 106 and the second liquid 108 may have substantially the same density (e.g., less than 0.5% differential) at room temperature (20°C to 25°C / 68°F to 77°F). According to other embodiments, the densities of the first liquid 106 and the second liquid 108 are sufficiently different (e.g., differential of 0.5% or more) at room temperature so that separation or segmentation of the first liquid 106 and the second liquid 108 due to the force of gravity occurs.
  • the densities of the first liquid 106 and the second liquid 108 are sufficiently different (e.g., differential of 0.5% or more) at a temperature different than room temperature so that separation or segmentation of the first liquid 106 and the second liquid 108 due to the force of gravity occurs at that different temperature.
  • the cavity 104 includes a first portion, or headspace, 104A and a second portion, or base portion, 104B.
  • the second portion 104B of the cavity 104 may be defined by a bore in an intermediate layer of the liquid lens 100 as described below.
  • the first portion 104A of the cavity 104 is defined by a recess in a first outer layer 118 of the liquid lens 100 and/or disposed outside of the bore in an intermediate layer 120.
  • at least a portion of the first liquid 106 is disposed in the first portion 104A of the cavity 104 and the second liquid 108 is disposed within the second portion 104B of the cavity 104.
  • substantially all or a portion of the second liquid 108 is disposed within the second portion 104B of the cavity 104.
  • a perimeter 111 of the interface 110 e.g., the edge of the interface 110 in contact with a sidewall of the cavity 104 may be disposed within the second portion 104B of the cavity 104.
  • the interface 110 of the liquid lens 100 can be adjusted via electrowetting.
  • a voltage can be applied between the first liquid 106 and a surface of the cavity 104 (e.g., an electrode positioned near the surface of the cavity 104 and insulated from the first liquid 106 as described in greater detail below) to increase or decrease the wettability of the surface of the cavity 104 with respect to the first liquid 106 and change the shape of the interface 110.
  • Adjusting of the interface 110 may change the shape of the interface 110, which may in turn change a focal length or focus of the liquid lens 100. For example, such a change of focal length can enable the liquid lens 100 to perform an autofocus function. Additionally or alternatively, adjusting the interface 110 may tilt the interface 110 relative to an optical axis 112 of the liquid lens 100.
  • tilting of the interface 110 can enable the liquid lens 100 to perform an optical image stabilization (OIS) function.
  • Adjusting the interface 110 can be achieved without physical movement of the liquid lens 100 relative to an image sensor, a fixed lens or lens stack, a housing, or other components of a camera module in which the liquid lens 100 can be incorporated.
  • application of voltage can assist in separating an emulsified combination of the first liquid 106 and the second liquid 108.
  • the lens body 102 of the liquid lens 100 may include a first window 114 and a second window 116.
  • the cavity 104 is disposed between the first window 114 and the second window 116.
  • the lens body 102 includes a plurality of layers that cooperatively form the lens body 102.
  • the lens body 102 may include the first outer layer 118, the intermediate layer 120, and a second outer layer 122.
  • the intermediate layer 120 may define a bore formed therethrough.
  • the first outer layer 118 can be bonded to one side (e.g., an object side) of the intermediate layer 120.
  • the first outer layer 118 may be bonded to the intermediate layer 120 at a bond 134A.
  • the bond 134A can be an adhesive bond, a laser bond (e.g., a laser weld), or another suitable coupling capable of maintaining the first liquid 106 and the second liquid 108 within the cavity 104.
  • the second outer layer 122 can be bonded to an opposite side (e.g., an image side) of the intermediate layer 120.
  • the second outer layer 122 may be bonded to the intermediate layer 120 at a bond 134B and/or a bond 134C, each of which can be configured as described herein with respect to the bond 134A.
  • the intermediate layer 120 is positioned between the first outer layer 118 and the second outer layer 122, with the bore of the intermediate layer 120 being covered on opposing sides by the first outer layer 118 and the second outer layer 122, and at least a portion of the cavity 104 is defined within the bore.
  • a portion of the first outer layer 118 covering the cavity 104 serves as the first window 114
  • a portion of the second outer layer 122 covering the cavity 104 serves as the second window 116.
  • the cavity 104 includes the first portion 104A and the second portion 104B.
  • the second portion 104B of the cavity 104 is defined by the bore in the intermediate layer 120, and the first portion 104A of the cavity 104 is disposed between the second portion 104B of the cavity 104 and the first window 114, but it will be understood that this configuration may be reversed.
  • the first outer layer 118 includes a recess, and the first portion 104A of the cavity 104 is disposed within the recess in the first outer layer 118.
  • the first portion 104A of the cavity 104 is disposed outside of the bore in the intermediate layer 120.
  • the cavity 104 (e.g., the second portion 104B of the cavity 104) may be tapered such that a cross-sectional area of the cavity 104 decreases along the optical axis 112 in a direction from the object side to the image side of the liquid lens 100.
  • the second portion 104B of the cavity 104 includes a narrow end 105 A and a wide end 105B.
  • the terms“narrow” and“wide” are relative terms, meaning the narrow end 105 A is narrower than the wide end 105B .
  • Such a tapered example of the cavity 104 can help to maintain alignment of the interface 110 between the first liquid 106 and the second liquid 108 along the optical axis 112.
  • the cavity 104 is tapered such that the cross-sectional area of the cavity 104 increases along the optical axis 112 in the direction from the object side to the image side or non-tapered such that the cross-sectional area of the cavity 104 remains substantially constant along the optical axis 112.
  • image light (or any other wavelength of electromagnetic radiation desired to be refracted by the liquid lens 100) may enter the liquid lens 100 depicted in FIGS. 1A and 1B through the first window 1 14, be refracted at the interface 110 between the first liquid 106 and the second liquid 108, and exit the liquid lens 100 through the second window 116.
  • the first outer layer 118 and/or the second outer layer 122 has sufficient transparency to enable passage of the image light (or whatever other relevant wavelength of electromagnetic radiation).
  • the first outer layer 118 and/or the second outer layer 122 includes a polymeric material, a glass material, a ceramic material, a glass-ceramic material, other transparent materials and/or combinations thereof.
  • the outer surfaces of the first outer layer 118 and/or the second outer layer 122 may be substantially planar.
  • the liquid lens 100 can function as a lens (e.g., by refracting image light passing through the interface 110), the outer surfaces of the liquid lens
  • the liquid lens 100 can be flat as opposed to being curved like the outer surfaces of a fixed lens. Additionally or alternatively, the outer surfaces of the first outer layer 118 and/or the second outer layer 122 are curved (e.g., concave or convex). Thus, the liquid lens 100 may include an integrated fixed lens.
  • the intermediate layer 120 may include a metallic material, a polymeric material, a glass material, a ceramic material, a glass-ceramic material, a composite material, and/or combinations thereof. As the image light can pass through the bore in the intermediate layer 120, the intermediate layer 120 may or may not be transparent.
  • the lens body 102 of the liquid lens 100 is described as including the first outer layer 118, the intermediate layer 120, and the second outer layer 122
  • the construction of the liquid lens 100 may be different.
  • one or more of the first outer layer 118, the intermediate layer 120, and/or the second outer layer 122 may be omitted.
  • the bore in the intermediate layer 120 can be configured as a blind hole that does not extend entirely through the intermediate layer 120, and the second outer layer 122 can be omitted.
  • the first portion 104A of the cavity 104 is described herein as being disposed within the recess in the first outer layer 118, other constructions are contemplated.
  • the recess may be omitted, and the first portion 104A of the cavity 104 is disposed within the bore in the intermediate layer 120.
  • the first portion 104A of the cavity 104 is an upper portion of the bore
  • the second portion 104B of the cavity 104 is a lower portion of the bore.
  • the first portion 104A of the cavity 104 is disposed partially within the bore in the intermediate layer 120 and partially outside the bore.
  • the liquid lens 100 may include a common electrode 124 in electrical communication with the first liquid 106. Further, the liquid lens 100 may include a driving electrode 126 disposed on a sidewall of the cavity 104 and insulated from the first liquid 106 and the second liquid 108. Different voltages can be supplied to, or a voltage differential can be adjusted between, the common electrode 124 and the driving electrode 126 to change the shape of the interface 110. Further, as mentioned above and described further below, application of voltage can separate the first liquid 106 and the second liquid 108 after being dispensed into the cavity in an emulsified combination.
  • the liquid lens 100 may include a conductive layer 128. At least a portion of the conductive layer 128 may be disposed within the cavity 104.
  • the conductive layer 128 includes a conductive coating applied to the intermediate layer 120 before bonding the first outer layer 118 and/or the second outer layer 122 to the intermediate layer 120.
  • the conductive layer 128 can include a metallic material, a conductive polymer material, a conductive oxide, another suitable conductive material, and/or combinations thereof.
  • the conductive layer 128 can include a single layer or a plurality of layers, some or all of which can be conductive. According to various examples, the conductive layer 128 defines the common electrode 124 and/or the driving electrode 126. For example, the conductive layer 128 can be applied to substantially the entire outer surface of the intermediate layer 120 before bonding the first outer layer 118 and/or the second outer layer 122 to the intermediate layer 120. Following application of the conductive layer 128 to the intermediate layer 120, the conductive layer 128 can be segmented into various conductive elements (e.g., the common electrode 124, the driving electrode 126, etc.).
  • various conductive elements e.g., the common electrode 124, the driving electrode 126, etc.
  • the liquid lens 100 can include a scribe 130A in the conductive layer 128 to isolate (e.g., electrically isolate) the common electrode 124 and the driving electrode 126 from each other.
  • the scribe 130A includes a gap in the conductive layer 128.
  • the scribe 130A is a gap with a width of about 5 pm, about 10 pm, about 15 pm, about 20 pm, about 25 pm, about 30 pm, about 35 pm, about 40 pm, about 45 pm, about 50 pm, or any and all values and ranges therebetween.
  • the liquid lens 100 includes an insulating element 132 disposed within the cavity 104.
  • the insulating element 132 includes an insulating coating applied to the intermediate layer 120 before bonding the first outer layer 118 and/or the second outer layer 122 to the intermediate layer 120.
  • the insulating element 132 may include an insulating coating applied to the conductive layer 128 and the second window 116 after bonding the second outer layer 122 to the intermediate layer 120 and before bonding the first outer layer 118 to the intermediate layer 120.
  • the insulating element 132 covers at least a portion of the conductive layer 128 within the cavity 104 and the second window 116.
  • the insulating element 132 can be sufficiently transparent to enable passage of the image light (or whatever relevant wavelength of electromagnetic radiation) through the second window 116 as described above.
  • the insulating element 132 may cover at least a portion of the driving electrode 126
  • the common electrode 124 may be disposed within the cavity 104 and is uncovered by the insulating element 132. Thus, the common electrode 124 can be in electrical communication with the first liquid 106.
  • the insulating element 132 may include a hydrophobic surface layer of the second portion 104B of the cavity 104.
  • Such a hydrophobic surface layer can help to maintain the second liquid 108 within the second portion 104B of the cavity 104 (e.g., by attraction between the non-polar second liquid 108 and the hydrophobic material) and/or enable the perimeter 111 of the interface 110 to move along the hydrophobic surface layer (e.g., by electrowetting) to change the shape of the interface 110.
  • the liquid lens 100 based at least in part on the insulating element 132, can exhibit a contact angle hysteresis (i.e., at the interface 110 between the first liquid 106 and the second liquid 108) of no more than 3°.
  • the“contact angle hysteresis” refers to the differential in measured contact angles of the second liquid 108 with the insulating element 132 upon a sequential application of a driving voltage to the driving electrode 126 (e.g., the differential between the driving voltage supplied to the driving electrode 126 and the common voltage supplied to the common electrode 124) from 0V to a maximum driving voltage, followed by a return to 0V (i.e., as relative to the common electrode 124).
  • the initial contact angle, without voltage, is a maximum of 25° and increases to the contact angle, due to the electrowetting effect, of at least 15° at“the maximum driving voltage.”
  • the maximum driving voltage can be about 10V, or about 20V, or about 30V, or about 40V, or about 50V, or about 60V, or about 70V, or any and all values and ranges therebetween.
  • the liquid lens 100 is configured such that the driving electrode 126 is disposed on a sidewall of the cavity 104 and insulated from the first liquid 106 and the second liquid 108 by the insulating element 132.
  • the insulating element 132 includes an insulating outer layer 132A, as shown, that is in contact with the first liquid 106 and the second liquid 108.
  • the insulating element 132 is monolithic in the sense that the insulating outer layer 132A serves the dual function of being electrically insulating with regard to the first liquid 106, the second liquid 108, and the driving electrode 126.
  • the insulating element 132 may be hydrophobic (e.g., to resist wetting by the first liquid 106). Monolithic examples of the insulating element 132 may be advantageous from a processing and/or manufacturing standpoint.
  • a thickness of the insulating outer layer 132A of the insulating element 132 may be from about 0.5 pm to about 10 pm, or from about 1 pm to about 10 pm, or from about 1 pm to about 9 pm, or from about 1 pm to about 8 pm, or from about 1 pm to about 7 pm, or from about 1 pm to about 6 pm, or from about 1 pm to about 5 pm, or from about 1 pm to about 4 pm, or from about 1 pm to about 3 pm, or from about 1 pm to about 2 pm, and any and all values and ranges therebetween.
  • the thickness of the insulating outer layer 132A of the liquid lens 100 is from about 0.5 microns to about 2 microns.
  • the liquid lens 100 is configured such that the driving electrode 126 is disposed on a sidewall of the cavity 104 and insulated from the first liquid 106 and the second liquid 108 by the insulating element 132.
  • the insulating element 132 includes the insulating outer layer 132A that is in contact with the first liquid 106 and the second liquid 108, and a base layer 132B between the insulating outer layer 132A and the driving electrode 126.
  • the insulating element 132 may be a multi-layer stack that includes the insulating outer layer 132A and the base layer 132B.
  • the base layer 132B and insulating outer layer 132A are electrically insulating with regard to the first liquid 106 and the second liquid 108 and the driving electrode 126.
  • the insulating outer layer 132A may be hydrophobic.
  • a thickness of the insulating outer layer 132A of the insulating element 132 may be from about 0.01 pm to about 2 pm, or from about 0.01 pm to about 1.5 pm, or from about 0.01 pm to about 1 micron, or from about 0.05 pm to about 2 pm, or from about 0.05 pm to about 1 pm, or from about 0.05 pm to about 0.5 pm, or from about 0.05 pm to about 0.4 pm, or from about 0.1 pm to about 2 pm, or from about 0.1 pm to about 1.5 pm, or from about 0.1 pm to about 1 pm, or from about 0.1 pm to about 0.5 pm, or any and all values and ranges therebetween.
  • FIG. 2 depicted is a flowchart of a method 150 of forming the liquid lens 100.
  • the method 150 may begin with a step 154 of mixing the first liquid 106 and the second liquid 108.
  • the first liquid 106 and the second liquid 108 may be substantially immiscible with each other and have different refractive indices than each other.
  • the first liquid 106 may be a polar liquid and the second liquid 108 may be a non-polar liquid.
  • the first liquid 106 and/or the second liquid 108 may further include an anti -emulsion agent, a viscosity modifier, a density modifier, other additives, and/or combinations thereof.
  • the anti-emulsion agent may minimize or reduce the mixing or emulsion of the first liquid 106 and the second liquid 108 together.
  • Such use of anti-emulsion agents may be advantageous in breaking (i.e., demulsifying) emulsions of the first liquid 106 and the second liquid 108 (e.g., after filling the cavity 104 with an emulsified combination of the first liquid 106 and the second liquid 108).
  • the viscosity modifier may be configured to increase or decrease a change in viscosity of the first liquid 106 and/or the second liquid 108 when subjected to changes in temperature.
  • the viscosity modifiers may be composed of polymeric materials, organic materials, inorganic materials, and/or combinations thereof.
  • the viscosity modifier may include butylated hydroxytoluene. Such use of the viscosity modifiers may be advantageous to enable breaking emulsions of the first liquid 106 and the second liquid 108.
  • Density modifiers may be used to increase or decrease the density of the first liquid 106 and/or the second liquid 108 relative to one another.
  • the density modifiers may be composed of polymeric materials, organic materials, inorganic materials, and/or combinations thereof.
  • Such use of the density modifiers may be advantageous in breaking emulsions of the first liquid 106 and the second liquid 108.
  • Use of any of the above- noted additives or compounds may be advantageous in allowing the first liquid 106 and/or the second liquid 108 to be self-selecting in reaching the depicted states of the first liquid 106 or the second liquid 108 in FIGS. 1A and 1B.
  • a volumetric ratio of the second liquid 108 to the first liquid 106 may be from about 0.01 to about 0.99, or about 0.1 to about 0.9, or about 0.2 to about 0.8, or about 0.3 to about 0.7, or about 0.4 to about 0.6.
  • the volumetric ratio of the second liquid 108 to the first liquid 106 may be about 0.01, or about 0.05, or about 0.1, or about 0.15, or about 0.2, or about 0.25, or about 0.3, or about 0.35, or about 0.4, or about 0.45, or about 0.5, or about 0.55, or about 0.6, or about 0.65, or about 0.7, or about 0.75, or about 0.8, or about 0.85, or about 0.9, or about 0.95, or about 0.99, or any and all values and ranges therebetween.
  • the volumetric ratio of the second liquid 108 to the first liquid 106 is 0.5 or about 0.5.
  • first liquid 106 and/or the second liquid 108 may have a volumetric ratio to the total volume of the mixed first liquid 106 and the second liquid 108 of from about 0.01 to about 0.99, or about 0.1 to about 0.9, or about 0.2 to about 0.8, or about 0.3 to about 0.7, or about 0.4 to about 0.6.
  • the mixing of the first liquid 106 and the second liquid 108 can be performed in a batch vessel 155 (see FIG. 3) before the contents of the batch vessel 155 are used in subsequent steps of the method 150.
  • the total volume of the first liquid 106 and the second liquid 108 used in a process run of the method 150 may be mixed and held in the batch vessel 155 and later processed in the method 150.
  • the appropriate amounts of the first liquid 106 and the second liquid 108 may be mixed in the batch vessel 155.
  • step 154 may be advantageous in providing a premixed batch of the first liquid 106 and the second liquid 108, which can later be drawn from to employ the method 150.
  • the batch of the combined first liquid 106 and the second liquid 108 in the batch vessel 155 has a volume that is larger than a volume of the combined first liquid 106 and the second liquid 108 to be dispensed into the cavity 104 of any particular liquid lens 100.
  • the volume of the combined first liquid 106 and the second liquid 106 can be sufficient to dispense the combined first liquid 106 and the second liquid 108 into the cavities 104 of a plurality of liquid lenses 100, such as one thousand (1000) liquid lenses 100 or less, or more.
  • a step 158 of emulsifying the first liquid 106 and the second liquid 108 to form an emulsified liquid 159 is performed.
  • the terms“emulsion” and“emulsified liquid” are defined as a mixture of the first liquid 106 and the second liquid 108 (e.g., which are normally immiscible or unmixable) with one of the liquids (e.g., the second liquid 108) being in a dispersed phase while the other liquid (e.g., the first liquid 106) is in a dispersion medium phase.
  • both the first liquid 106 and the second liquid 108 may be in the dispersed phase and the dispersion medium phase.
  • the emulsified liquid 159 may be a homogenous mixture of the first liquid 106 and the second liquid 108.
  • the dispersed phase of the emulsion comprises a plurality of droplets dispersed in the dispersion medium phase.
  • the droplets can comprise microscopic droplets, or microdroplets, with a mean diameter of about 100 pm, about 90 pm, about 80 pm, about 70 pm, about 60 pm, about 50 pm, about 40 pm, about 30 pm, about 20 pm, about 10 pm, about 1 pm, about 0.5 pm, about 0.1 pm, or any and all values and ranges therebetween.
  • the first liquid 106 and the second liquid 108 may be emulsified to form the emulsified liquid 159 in a variety of manners.
  • the first liquid 106 and the second liquid 108 may be emulsified in a vortex emulsifier, using ultrasonic vibrations (e.g., from an ultrasonic probe), other methods of emulsification and/or combinations thereof.
  • the emulsified liquid 159 may be formed in the batch vessel 155.
  • the step 154 of mixing the first liquid 106 and the second liquid 108 and step 158 of emulsifying the first liquid 106 and the second liquid 108 may be performed substantially simultaneously.
  • the method 150 utilizes “droplet on demand” technologies.
  • Exemplary droplet on demand technologies may include high-performance syringe pumps (e.g., microinjectors) or high-voltage pulses which may be used to induce the formation a single drop of liquid at a microfluidic T-junction or Y-junction.
  • the first liquid 106 and the second liquid 108 may be introduced at the Y- or T-junction of a microfluidic chip.
  • the first liquid 106 and the second liquid 108 are brought together in such a manner that the first liquid 106 and the second liquid 108 are both mixed and emulsified at the same time.
  • one of the liquids e.g., the first liquid 106
  • the other liquid e.g., the second liquid 108
  • step 158 may be carried out at a different temperature (above or below room temperature) at which the density of the first liquid 106 and the second liquid 108 are as close as possible to facilitate formation of the emulsified liquid 159.
  • the method can include adjusting the temperature of the first liquid 106 and/or the second liquid 108 to reduce the density difference between the first liquid 106 and the second liquid 108 from a first, higher density difference to a second, lower density difference prior to or concurrently with the mixing and/or the emulsifying.
  • the first liquid 106 and the second liquid 108 can be at the same or different temperatures immediately prior to and/or during the mixing and/or the emulsifying.
  • a step 162 of depositing the emulsified liquid 159 into the cavity 104 defined above the window is performed.
  • the window is the second window 116.
  • a plurality of cavities 104 and a plurality of the first windows 114 or second windows 116 may be arranged in an array 163 across a wafer or substrate 165.
  • the step 162 may be performed on a single cavity 104 or on a plurality of cavities 104.
  • step 162 of depositing the emulsified liquid 159 into the cavity 104 may be performed in serial across a plurality of cavities 104 on the substrate 165, or in parallel such that a plurality of cavities 104 are filled substantially simultaneously.
  • a step 166 of demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108 such that the interface 110 between the first liquid 106 and the second liquid 108 defines a variable lens is performed.
  • the first liquid 106 and the second liquid 108 may have substantially the same orientation as that depicted in connection with FIGS. 1A and 1B.
  • the demulsifying can result in the plurality of droplets (e.g., microdroplets) of the dispersed phase to coalesce until there are substantially no droplets of the dispersed phase dispersed in the dispersion medium phase.
  • Step 166 of demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108 may be performed in a variety of manners.
  • the emulsified liquid 159 may have a sufficiently high separation driving force due to the force of gravity (of the Earth) that allowing the emulsified liquid 159 to rest for a period of time may be sufficient for demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108.
  • the first liquid 106 has a sufficiently different density (e.g., 0.5% or greater differential) than the second liquid 108 at a temperature or temperature range (such as room temperature), that the breaking of the emulsification occurs naturally due to the force of gravity over a period of time.
  • a sufficiently different density e.g. 0.5% or greater differential
  • step 166 may take place over a time period of from about 1 second to about 48 hours, or from about 1 hour to about 48 hours, or from about 1 minute to about 40 hours, or from about 1 minute to about 32 hours, or from about 1 minute to about 24 hours, or from about 1 minute to about 16 hours, or from about 1 minute to about 8 hours, or from about 1 minute to about 7 hours, or from about 1 minute to about 6 hours, or from about 1 minute to about 5 hours, or from about 1 minute to about 4 hours, or from about 1 minute to about 3 hours, or from about 1 minute to about 2 hours, or from about 1 minute to about 1 hour, or from about 1 minute to about 30 minutes, or from about 1 minute to about 15 minutes, or from about 1 minute to about 10 minutes, or from about 1 minute to about 5 minutes, or any and all values and ranges therebetween.
  • step 166 of demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108 is performed via centrifugal force.
  • the cavity 104 containing the emulsified liquid 159 e.g., and any surrounding structures such as the first outer layer 118 and the second outer layer 122
  • the centrifuge may be spun with sufficient speed (e.g., revolutions per minute) that the first liquid 106 and the second liquid 108 may reach the orientation provided in FIGS. 1A and 1B.
  • the first liquid 106 has a sufficiently different density (e.g., 0.5% or greater differential) than the second liquid 108 at a temperature or temperature range at which the step 166 of demulsifying occurs.
  • the first liquid 106 and/or the second liquid 108 may have a sufficiently high affinity for, or repulsion of, other structures (e.g., the common electrode 124, the driving electrode 126 and/or the insulating element 132) of the liquid lens 100 and/or the cavity 104 such that the emulsified liquid 159 tends to demulsify on its own.
  • the first liquid 106 may be attracted in one direction while the second liquid 108 is repelled from that direction such that the emulsified liquid 159 demulsifies.
  • the third embodiment may be used in conjunction with the first embodiment without departing from the teachings provided herein.
  • the first liquid 106 and the second liquid 108 have at least approximately the same density at room temperature but sufficiently different densities (e.g.,
  • demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108 includes raising the temperature of the emulsified liquid 159 to the second temperature.
  • demulsifying the emulsified liquid 159 can include utilizing centrifugal force from a centrifuge, or the force of gravity (of the Earth) and the passage of a sufficient time period, as explained above.
  • the second temperature may be from about -80° C to about 100° C, or from about -25° C to about 100° C.
  • the second temperature may be about -80° C, or about -70° C, or about -60° C, or about -50° C, or about - 40° C, or about -30° C, or about -20° C, or about -10° C, or about 0° C, or about 10° C, or about 20° C, or about 30° C, or about 40° C, or about 50° C, or about 60° C, or about 70° C, or about 80° C, or about 90° C, or about 100° C, or any and all values and ranges therebetween.
  • the second temperature may create a density differential between the first liquid 106 and the second liquid 108 of from about 0.5% to about 10%, or from about 0.5% to about 8%, or from about 0.5% to about 7%, or from about 0.5% to about 6%, or from about 0.5% to about 5%, or from about 0.5% to about 4%, or from about 0.5% to about 3%, or from about 0.5% to about 2%, or from about 0.5% to about 1%, or from about 0.5% to about 5%.
  • the first liquid 106 and the second liquid 108 may have a density differential at the temperature of about 0.51%, or about 1%, or about 1.3%, or about 1.4%, or about 1.5%, or about 1.6%, or about 1.7% or about 2%, or about 2.5%, or about 3%, or about 3.5%, or about 4%, or about 4.5%, or about 5%, or about 5.5%, or about 6%, or about 6.5%, or about 7%, or about 7.5%, or about 8%, or about 8.5%, or about 9%, or about 9.5% or about 10% or any and all values and ranges therebetween.
  • a voltage, electrical potential, or magnetic field may be applied to the emulsified liquid 159 to separate the first liquid 106 and the second liquid 108.
  • a voltage, electrical potential, or magnetic field may be applied to the emulsified liquid 159 to separate the first liquid 106 and the second liquid 108.
  • a force could be used to demulsify the first liquid 106 and the second liquid 108.
  • Application of a bias voltage to the driving electrode 126 may: (a) induce or facilitate migration of droplets of the first liquid 106 within the emulsified liquid 159 by virtue of its effect on the first liquid 106; and (b) cause larger droplets to flatten and/or reduce their surface tension, which encourages merging or coalescing into even larger droplets.
  • a bias voltage e.g., simple DC voltage
  • the interface 110 begins to reform.
  • Application of an oscillating actuation voltage waveform to the driving electrode 126 will cause the interface 110 to change shape in a periodic manner, via normal electro-wetting processes, physically moving the droplets in a pumping manner.
  • Collisions of these moving droplets with each other encourages coalescence. Pumping can create turbulence and motivate larger drop mixing as well as release of droplets adhered to the wall of the cavity 104, which in turn can coalesce. Collisions with the walls of the cavity 104 can also encourage coalescence and migration.
  • step 166 of demulsifying the emulsified liquid 159 into the first liquid 106 and the second liquid 108 may be used in combination or alone.
  • the first outer layer 118 can be coupled to the second outer layer 122 and coupled (e.g., through adhesive bonding, laser bonding, or another suitable bonding process), and in examples where a plurality of cavities 104 exist on the substrate 165, the substrate 165 may be diced, singulated, or in any event, divided to form a plurality of liquid lenses 100.
  • the method 150 may include placing a drop of the second liquid 108 on top of the first liquid 106 (e.g., where the density of the second liquid 108 is greater than the density of the first liquid 106) with both the first liquid 106 and the second liquid 108 being in the cavity 104, sealing the cavity 104 with the first outer layer 118, and centrifuging the first liquid 106 and the second liquid 108 such that the first liquid 106 and the second liquid 108 reach the orientation shown in FIGS. 1A and 1B.
  • Use of the presently disclosed liquid lens 100 and method 150 may offer a variety of advantages.
  • the emulsified liquid 159 is deposited into the plurality of cavities 104 within the substrate 165 in one manufacturing step, manufacturing time and cost may be greatly reduced.
  • the emulsified liquid 159 in the batch vessel 155 as a premixed amount of the first liquid 106 and the second liquid 108 sufficient to fill a plurality of cavities 104 within the substrate 165, time and manufacturing complexity may be saved as the cavities 104 may be serially supplied or supplied in parallel with the emulsified liquid 159.
  • Such features are advantageous in providing an increased production rate of the liquid lenses 100 over other methods.
  • Example 1 A first liquid 106 having a composition of 50 wt % ethylene glycol, 46.75 wt % water, 3 wt % sodium bromide, and 0.25 wt % pentanol, and a second liquid 108 having a composition of phenyltrimethylgermane, phenyltris(trimethoxysiloxy)silane, and butylated hydroxyltoluene were prepared.
  • the first liquid 106 has a density of 1.0893 g/ml at room temperature
  • the second liquid 108 has a density of 1.0851 g/ml at room temperature, for a density differential of (-0.39%) at room temperature.
  • the two liquids 106, 108 were combined at a volume ratio 0.5 (1 part first liquid 106 for every 2 parts of second liquid 108).
  • the combined liquids 106, 108 were then emulsified into an emulsified liquid 159.
  • the emulsified liquid 159 was deposited into a cavity 104.
  • the cavity 104 was covered and sealed as known in the art to complete a liquid lens 100.
  • the temperature of the liquid lens 100 was increased to 50° C, at which temperature the densities of the two liquids 106, 108 diverged to be 1.0704 g/ml for the first liquid 106, and 1.0558 g/ml for the second liquid 108, for a density differential of (-1.3%) at 50° C.
  • the emulsified liquid 159 demulsified via the force of gravity, with the separated first liquid 106 and the second liquid 108 forming an interface 110.
  • the temperature of the liquid lens 100 was then returned to room temperature.
  • the graph reproduced at FIG. 5 illustrates that the difference in density between this particular first liquid 106 and second liquid 108, while insubstantial at room temperature, widens as temperature increases.
  • Example 2 The same first liquid 106 and second liquid 108 above from Example 1 were prepared. The two liquids 106, 108 were combined at a volume ratio 0.5 (1 part first liquid 106 for every 2 parts of second liquid 108). The combined liquids 106, 108 were then emulsified into an emulsified liquid 159. The emulsified liquid 159 was deposited into a cavity 104. The cavity 104 was covered and sealed as known in the art to complete a liquid lens 100.
  • the temperature of the liquid lens 100 was increased to 50° C, at which temperature the densities of the two liquids 106, 108 diverged to be 1.0704 g/ml for the first liquid 106, and 1.0558 g/ml for the second liquid 108, for a density differential of (-1.3%) at 50° C, as mentioned above.
  • the liquid lens 100 was placed in a swinging bucket type centrifuge. Over the course of 15 minutes at 50° C and with the centrifuge rotating at 3000 RPM, the emulsified liquid 159 demulsified via centrifugal force, with the separated first liquid 106 and second liquid 108 forming an interface 110. The temperature of the liquid lens 100 was returned to room temperature.

Abstract

L'invention concerne un procédé de formation d'une lentille liquide, comprenant les étapes suivantes : mise en émulsion d'un premier liquide et d'un deuxième liquide pour former un liquide émulsifié dans lequel le premier liquide et le deuxième liquide sont sensiblement immiscibles l'un avec l'autre ; dépôt du liquide émulsifié dans une cavité définie au-dessus d'une fenêtre ; et désémulsification du liquide émulsionné dans le premier liquide et le deuxième liquide. Le premier liquide et le deuxième liquide possèdent des indices de réfraction différents l'un de l'autre, de sorte qu'une interface entre le premier liquide et le deuxième liquide définit une lentille variable.
PCT/US2019/033246 2018-05-22 2019-05-21 Procédés de fabrication de lentilles liquides WO2019226613A1 (fr)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060274425A1 (en) * 2003-05-14 2006-12-07 Koninklijke Philips Electronics N.V. Variable shape lens
US20060279848A1 (en) * 2003-07-14 2006-12-14 Koninklijke Philips Electronics N. V. Variable lens
US20090027762A1 (en) * 1995-07-20 2009-01-29 E Ink Corporation Electro-osmotic displays and materials for making the same
US20110222163A1 (en) * 2010-03-12 2011-09-15 Hirabayashi Yasutoshi Varifocal lens and liquid filling method for manufacturing same
US20160299264A1 (en) * 2015-04-11 2016-10-13 Invenios Method to prevent emulsion in a liquid lens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090027762A1 (en) * 1995-07-20 2009-01-29 E Ink Corporation Electro-osmotic displays and materials for making the same
US20060274425A1 (en) * 2003-05-14 2006-12-07 Koninklijke Philips Electronics N.V. Variable shape lens
US20060279848A1 (en) * 2003-07-14 2006-12-14 Koninklijke Philips Electronics N. V. Variable lens
US20110222163A1 (en) * 2010-03-12 2011-09-15 Hirabayashi Yasutoshi Varifocal lens and liquid filling method for manufacturing same
US20160299264A1 (en) * 2015-04-11 2016-10-13 Invenios Method to prevent emulsion in a liquid lens

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