WO2019209484A1 - Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources - Google Patents

Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources Download PDF

Info

Publication number
WO2019209484A1
WO2019209484A1 PCT/US2019/025828 US2019025828W WO2019209484A1 WO 2019209484 A1 WO2019209484 A1 WO 2019209484A1 US 2019025828 W US2019025828 W US 2019025828W WO 2019209484 A1 WO2019209484 A1 WO 2019209484A1
Authority
WO
WIPO (PCT)
Prior art keywords
carbon containing
carbon
plasma
processing chamber
molecules
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2019/025828
Other languages
French (fr)
Inventor
Lakmal Charidu KALUTARAGE
Mark Saly
David Thompson
William John DURAND
Kelvin Chan
Hanhong Chen
Philip Allan Kraus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2019209484A1 publication Critical patent/WO2019209484A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6336—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6339—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/65—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials
    • H10P14/6516—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials
    • H10P14/6536—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by exposure to radiation, e.g. visible light
    • H10P14/6538—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by treatments performed before or after the formation of the materials of treatments performed after formation of the materials by exposure to radiation, e.g. visible light by exposure to UV light
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/66—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials
    • H10P14/668—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6921—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon
    • H10P14/6922—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses containing silicon the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC

Definitions

  • Embodiments may include a method for forming a carbon-nitrogen-oxygen film.
  • the method may comprise flowing a precursor gas into a processing chamber.
  • the precursor gas comprises carbon containing molecules.
  • the method may further comprise flowing a co-reactant gas into the processing chamber.
  • one or both of the carbon containing molecules of the precursor gas and the co reactant gas comprise nitrogen and oxygen.
  • the method may further comprise striking a plasma in the processing chamber.
  • plasma activated co-reactant molecules initiate polymerization of the carbon containing molecules in the precursor gas.
  • the method may further comprise depositing a carbon-nitrogen-oxygen film onto a substrate in the processing chamber.
  • Figure 1 is a cross-sectional illustration of a carbon film that has a void in a high aspect ratio trench.
  • Figure 2A is a cross-sectional illustration of a carbon containing film that completely fills a high aspect ratio trench, in accordance with an embodiment.
  • Figure 2D is a zoomed in cross-sectional micrograph that illustrates the bottom of the high aspect ratio trenches that show complete filling of the trenches with the carbon containing film, in accordance with an embodiment.
  • Figure 3 is a process flow diagram of a process for forming a flowable carbon containing film, in accordance with an embodiment.
  • Figure 4A is chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
  • Figure 4C is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
  • Figure 4E is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
  • Figure 5A is a chemical formula of an R group that may be part of the carbon containing precursor, in accordance with an embodiment.
  • Figure 5B is a chemical formula of an R group that may be part of the carbon containing precursor, in accordance with an embodiment.
  • Figure 6B is a chemical formula of a carbon containing precursor with an R group of Figure 6A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
  • Figure 7B is a chemical formula of a carbon containing precursor with an R group of Figure 7A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
  • Figure 8B is a chemical formula of a carbon containing precursor with an R group of Figure 8A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
  • Figure 9A is a pair of chemical formulas of R groups that may be part of the carbon containing precursor, in accordance with an embodiment.
  • Figure 9B is a chemical formula of a carbon containing precursor with an R group of Figure 9A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
  • Figure 10A is a pair of chemical formulas of R groups that may be part of the carbon containing precursor, in accordance with an embodiment.
  • Figure 10B is a chemical formula of a carbon containing precursor with an R group of Figure 10A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
  • Figure 11 illustrates a block diagram of an exemplary computer system that may be used to control a process for forming a flowable carbon film, in accordance with an embodiment.
  • Devices in accordance with embodiments described herein include methods of forming a flowable carbon containing film.
  • an F-CVD process is used to form a flowable carbon containing film.
  • embodiments described herein include processes for forming carbon containing films with a flowable chemical vapor deposition (F-CVD) process.
  • F-CVD flowable chemical vapor deposition
  • the F-CVD process produces a flowable carbon containing film that has a viscosity that enables the flowable carbon containing film to completely fill high aspect ratio features on a substrate surface.
  • a flowable carbon containing film 205 is formed over a surface of a substrate 215.
  • the flowable carbon containing film 205 completely fills a high aspect ratio trench 212 formed into the substrate 215.
  • a high aspect ratio trench 212 may include an aspect ratio of 10:1 or greater.
  • a high aspect ratio trench 212 may include an aspect ratio of 50:1 or greater.
  • a high aspect ratio trench 212 may include an aspect ratio of 100:1 or greater.
  • Additional embodiments may include an F-CVD process that is capable of completely filling a trench with any profile.
  • Figure 2B a cross-sectional illustration of a high aspect ratio trench 212 with a reentrant profile in a substrate 215 is shown, in accordance with an embodiment.
  • the flowable carbon containing film 205 may allow for complete filling of a trench with a reentrant profile.
  • carbon containing films formed with F-CVD processes described herein allow for other improvements compared to films formed with spin-on processes.
  • One advantage is that carbon containing films formed with F- CVD processes include a lower hydrogen concentration.
  • a low temperature F-CVD process e.g., approximately 75 °C
  • This low hydrogen concentration is comparable to a spun-on carbon film that is formed at much higher temperatures (e.g., 300 °C or greater).
  • carbon containing films formed with F-CVD processes also show good ash resistance compared to traditional CVD carbon films.
  • ash resistance of carbon containing films formed with F-CVD processes exhibit ashing resistance that is between 10% and 30% better than the ash resistance of traditional spin- on carbon films.
  • dry etch resistivity of carbon containing films formed with F-CVD processes exhibit dry etch resistivity that is between 1.5 to 4 times the dry etch resistivity of spun-on carbon films. Accordingly, carbon containing films formed with F-CVD processes provide excellent masking layers for semiconductor manufacturing.
  • F-CVD processes disclosed herein eliminate the liquid waste produced with spin- on processes.
  • Embodiments described herein allow for flowable carbon containing films to be formed on a substrate. It is to be appreciated that embodiments may include carbon containing films that also are carbon-nitrogen (CXNY) films and carbon- nitrogen-oxygen (CXNYOZ) films.
  • the specific film that is deposited may be determined by the precursor gasses and co-reactant gasses that are used in the F-CVD process, as will be described in greater detail below.
  • F-CVD process 360 may comprise operation 361 that includes flowing a carbon containing precursor gas into a processing chamber.
  • the processing chamber may include any suitable chamber for implementing a plasma enhanced CVD (PECVD) process.
  • the processing chamber may include a capacitively coupled plasma (CCP) source, a remote plasma source (RPS), a microwave plasma source, an inductively coupled plasma (ICP) source, or any other plasma source.
  • CCP capacitively coupled plasma
  • RPS remote plasma source
  • ICP inductively coupled plasma
  • the vinyl group is the site where radical induced polymerization is implemented using vinyl functionality to form carbon containing polymers.
  • the carbon containing precursor may include one or more of the molecules shown in Figures 4A-4E.
  • the molecules illustrated in Figures 4A-4E are exemplary in nature, and embodiments include any molecule containing a vinyl functional group.
  • the molecules in Figures 4A-4E may also comprise at least one nitrogen atom and/or at least one oxygen atom.
  • the carbon containing precursor gas includes molecules that include an alkyne group (CoC).
  • the alkyne group is the site where radical induced polymerization is implemented using alkyne functionality to form carbon containing polymers.
  • the carbon containing precursor gas includes molecules that include a nitrile group (CoN).
  • the nitrile group is the site where radical induced polymerization is implemented using nitrile functionality to form carbon containing polymers.
  • carbon containing precursor gasses such as the molecules shown in Figures 4A-4E may comprises R groups that stabilize radicals.
  • R groups may include electron donating groups such as amines, amides, esters, ethers, and conjugated or non- conjugated double and triple bonds. Such R groups may be added to tune the reactivity of the radical induced polymerization described in greater detail below.
  • the alkanes that form the R groups may be linear and/or branched.
  • linear alkanes may comprise CFF, C2H5, C3H7.
  • the R groups of the carbon containing precursor gas may comprise one or more of the chemical formulae shown in Figures 5A-5C.
  • the alkanes that form the R groups may be linear and/or branched.
  • linear alkanes may comprise CH3, C2H5, C3H7.
  • An example of two such cyclic alkanes (cyclohexane and cyclobutane) are shown in Figure 6A.
  • cyclic alkanes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge.
  • Figure 6B is an exemplary illustration of such an embodiment, where cyclohexane is bound to a vinyl group of Figure 4A by a carbon bridge.
  • An example of three such cyclic alkenes (cyclopropene, cyclobutene, and cyclopentene) are shown in Figure 7A.
  • cyclic alkenes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge.
  • Figure 7B is an exemplary illustration of such an embodiment, where cyclohpentene is bound to a vinyl group of Figure 4A by a carbon bridge.
  • An example of two such cyclic dienes (cyclobutadiene and
  • cyclopentadiene are shown in Figure 8A.
  • cyclic dienes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge.
  • Figure 8B is an exemplary illustration of such an embodiment, where cyclopentadiene is bound to a vinyl group of Figure 4A by a carbon bridge.
  • the R groups in Figures 4A-4E may also comprise cyclic trienes.
  • cyclic trienes An example of two such cyclic trienes (cycloheptatriene and cyclooctatriene) are shown in Figure 9A.
  • cyclic trienes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge.
  • Figure 9B is an exemplary illustration of such an
  • R groups in Figures 4A-4E may also comprise benzene and
  • the process may comprise operation 362 that includes flowing a co-reactant gas into the processing chamber.
  • the co-reactant gas may comprise one or more gasses that may be activated by the plasma source.
  • the sequence of carbon containing precursor delivery and co-reactant gas delivery to the chamber may be sequential.
  • pulses of the carbon containing precursor may be delivered to the chamber in an alternating pattern with pulses of the co-reactant gas.
  • the carbon containing precursor may be delivered to the chamber first, and the co-reactant gas may be delivered to the chamber second.
  • the co reactant gas may be delivered to the chamber first, and the carbon containing precursor may be delivered to the chamber second.
  • the carbon containing precursor gas and the co-reactant gas may be delivered to the chamber simultaneously or partially simultaneously.
  • F-CVD process 360 may comprises operation 363 that includes striking a plasma in the processing chamber to initiate radical induced polymerization of the carbon containing precursor gas.
  • Plasma activated co-reactant molecules i.e., radicals and ions
  • the radical induced polymerization of the carbon containing precursor gas increases the molecular weight of the carbon containing molecules and results in a phase change to a flowable polymer material.
  • the plasma the is struck may be a CCP, a ICP, an RSP, or a microwave plasma.
  • a modular micro wave plasma source may be used. That is, a plurality of microwave antennas may be used to couple microwave radiation into the chamber.
  • F-CVD process 360 may comprise operation 364 that includes depositing a flowable carbon film on a substrate in the processing chamber.
  • the flowable polymer material is deposited onto the substrate and is able to flow in order to fill features (e.g., trenches and gaps) on the substrate surface.
  • the flowable polymer material may fill high aspect ratio trenches.
  • the high aspect ratio trenches may have a reentrant profile.
  • the high aspect ratio trenches may have a an aspect ratio of 10:1 or greater, 50:1 or greater, or 100:1 or greater.
  • a“flowable carbon containing film” may include a carbon containing film that is able to completely fill a trench or gap with a high aspect ratio.
  • the F-CVD process 360 may include a substrate temperature that is less than 200 °C. In an embodiment, the substrate temperature may be between -10 °C and 200 °C.
  • F-CVD process 360 may comprise operation 365 that includes curing the flowable carbon film.
  • the flowable carbon film is cured by increasing the cross-linking of the film.
  • the curing may be UV curing, annealing, or the like.
  • F-CVD process 360 also comprises flowable carbon containing films that includes other desired elements.
  • F-CVD process 360 may be utilized to form a carbon-nitrogen (CXNY) film.
  • the co-reactant gas that is flown into the processing chamber at operation 362 may comprise N 2 and/or NFF, and one or more of Ar, He, and H 2 .
  • a flowable C X N Y film may be obtained by utilizing a carbon containing precursor gas such as those described above that comprises nitrogen.
  • the precursor gas may be reacted with one or more of plasma activated Ar, He, and H 2 .
  • F-CVD process 360 also comprises flowable carbon containing films that includes other desired elements.
  • F-CVD process 360 may be utilized to form a carbon-nitrogen-oxygen (CXNYOZ) film.
  • the co-reactant gas that is flown into the processing chamber at operation 362 may comprise N 2 and 0 2 in combination with one or more of Ar, He, and H 2 .
  • the co-reactant gas may comprise NH 3 and 0 2 in combination with one or more of Ar, He, and H 2 .
  • the co-reactant gas may comprise N 2 , NH 3 , and 0 2 in combination with one or more of Ar, He, and H 2
  • a flowable C X NYOZ film may be obtained by utilizing a carbon containing precursor gas such as those described above that comprises nitrogen and oxygen.
  • the precursor gas comprising nitrogen and oxygen may be reacted with one or more of plasma activated Ar, He, and H 2 .
  • the carbon containing precursor gas may comprises nitrogen or oxygen, and the precursor gas may be reacted with one or more of plasma activated 0 2 , N 2 , and NH 3 , in combination with one or more of plasma activated Ar, He, and 3 ⁇ 4.
  • Computer system 1160 is coupled to and controls processing in the processing tool.
  • Computer system 1160 may be connected (e.g., networked) to other machines in a Local Area Network (LAN), an intranet, an extranet, or the Internet.
  • Computer system 1160 may operate in the capacity of a server or a client machine in a client-server network environment, or as a peer machine in a peer- to-peer (or distributed) network environment.
  • Computer system 1160 may be a personal computer (PC), a tablet PC, a set-top box (STB), a Personal Digital Assistant (PDA), a cellular telephone, a web appliance, a server, a network router, switch or bridge, or any machine capable of executing a set of instructions (sequential or otherwise) that specify actions to be taken by that machine.
  • PC personal computer
  • PDA Personal Digital Assistant
  • STB set-top box
  • STB set-top box
  • PDA Personal Digital Assistant
  • a cellular telephone a web appliance
  • server a server
  • network router switch or bridge
  • any machine capable of executing a set of instructions (sequential or otherwise) that specify actions to be taken by that machine.
  • machine shall also be taken to include any collection of machines (e.g., computers) that individually or jointly execute a set (or multiple sets) of instructions to perform any one or more of the methodologies described herein.
  • Computer system 1160 may include a computer program product, or software 1122, having a non-transitory machine-readable medium having stored thereon instructions, which may be used to program computer system 1160 (or other electronic devices) to perform a process according to embodiments.
  • a machine-readable medium includes any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computer).
  • a machine- readable (e.g., computer-readable) medium includes a machine (e.g., a computer) readable storage medium (e.g., read only memory (“ROM”), random access memory (“RAM”), magnetic disk storage media, optical storage media, flash memory devices, etc.), a machine (e.g., computer) readable transmission medium (electrical, optical, acoustical or other form of propagated signals (e.g., infrared signals, digital signals, etc.)), etc.
  • computer system 1160 includes a system processor 1102, a main memory 1104 (e.g., read-only memory (ROM), flash memory, dynamic random access memory (DRAM) such as synchronous DRAM (SDRAM) or Rambus DRAM (RDRAM), etc.), a static memory 1106 (e.g., flash memory, static random access memory (SRAM), etc.), and a secondary memory 1118 (e.g., a data storage device), which communicate with each other via a bus 1130.
  • main memory 1104 e.g., read-only memory (ROM), flash memory, dynamic random access memory (DRAM) such as synchronous DRAM (SDRAM) or Rambus DRAM (RDRAM), etc.
  • static memory 1106 e.g., flash memory, static random access memory (SRAM), etc.
  • secondary memory 1118 e.g., a data storage device
  • System processor 1102 represents one or more general-purpose processing devices such as a microsystem processor, central processing unit, or the like. More particularly, the system processor may be a complex instruction set computing (CISC) microsystem processor, reduced instruction set computing (RISC) microsystem processor, very long instruction word (VLIW) microsystem processor, a system processor implementing other instruction sets, or system processors implementing a combination of instruction sets. System processor 1102 may also be one or more special-purpose processing devices such as an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a digital signal system processor (DSP), network system processor, or the like. System processor 1102 is configured to execute the processing logic 1126 for performing the operations described herein.
  • ASIC application specific integrated circuit
  • FPGA field programmable gate array
  • DSP digital signal system processor
  • the computer system 1160 may further include a system network interface device 1108 for communicating with other devices or machines.
  • the computer system 1160 may also include a video display unit 1110 (e.g., a liquid crystal display (LCD), a light emitting diode display (LED), or a cathode ray tube (CRT)), an alphanumeric input device 1112 (e.g., a keyboard), a cursor control device 1114 (e.g., a mouse), and a signal generation device 1116 (e.g., a speaker).
  • a video display unit 1110 e.g., a liquid crystal display (LCD), a light emitting diode display (LED), or a cathode ray tube (CRT)
  • an alphanumeric input device 1112 e.g., a keyboard
  • a cursor control device 1114 e.g., a mouse
  • a signal generation device 1116 e.g., a speaker
  • the secondary memory 1118 may include a machine-accessible storage medium 1131 (or more specifically a computer-readable storage medium) on which is stored one or more sets of instructions (e.g., software 1122) embodying any one or more of the methodologies or functions described herein.
  • the software 1122 may also reside, completely or at least partially, within the main memory 1104 and/or within the system processor 1102 during execution thereof by the computer system 1160, the main memory 1104 and the system processor 1102 also constituting machine-readable storage media.
  • the software 1122 may further be transmitted or received over a network 1120 via the system network interface device 1108.
  • machine-accessible storage medium 1131 is shown in an exemplary embodiment to be a single medium, the term“machine-readable storage medium” should be taken to include a single medium or multiple media (e.g., a centralized or distributed database, and/or associated caches and servers) that store the one or more sets of instructions.
  • the term“machine -readable storage medium” shall also be taken to include any medium that is capable of storing or encoding a set of instructions for execution by the machine and that cause the machine to perform any one or more of the methodologies.
  • the term“machine-readable storage medium” shall accordingly be taken to include, but not be limited to, solid-state memories, and optical and magnetic media.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

Embodiments include a method for forming a carbon containing film. In an embodiment, the method comprises flowing a precursor gas into a processing chamber. For example the precursor gas comprises carbon containing molecules. In an embodiment, the method further comprises flowing a co-reactant gas into the processing chamber. In an embodiment, the method further comprises striking a plasma in the processing chamber. In an embodiment plasma activated co-reactant molecules initiate polymerization of the carbon containing molecules in the precursor gas. Embodiments may also include a method that further comprises depositing a carbon containing film onto a substrate in the processing chamber.

Description

METHODS TO DEPOSIT FLOWABLE (GAP-FILL) CARBON CONTAINING FILMS
USING VARIOUS PLASMA SOURCES
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority to U.S. Non-provisional Application No. 16/374,345, filed on April 3, 2019 which claims the benefit of U.S. Provisional Application No. 62/663,846, filed on April 27, 2018, the entire contents of which are hereby incorporated by reference herein.
DESCRIPTION OF RELATED ART
Semiconductor device geometries have drastically decreased in size since their introduction several decades ago. Modem semiconductor fabrication equipment routinely produce devices with 45 nm, 32 nm, 28 nm and smaller feature sizes. The decreasing feature sizes result in structural features on the device having decreased width. The widths of gaps and trenches on the device narrow such that filling the gap with dielectric materials becomes more challenging.
In the particular instance of carbon containing films, a spin-on process is often used. In such processes, a carbon containing liquid is dispensed onto the surface of a substrate. The substrate is then spun in order to evenly distribute the liquid over the surface. However, such processes have several disadvantages. One disadvantage is that there is a lot of waste since much of the carbon containing liquid is spun off of the spinning substrate surface during processing.
Additionally, spin-on processes often leave voids when used to fill high aspect ratio features. A void 110 in a carbon film 105 that partially fills a high aspect ratio trench 112 in a substrate 115 is shown in Figure 1. Voids may be generated in such films when the solvents of the spun-on liquid are removed during a curing process. For example, the solvent molecules in spin-on processes are typically small molecules. The small molecules vaporize during a post-apply bake (PAB). The vaporization process leads to void formation and shrinkage. Voids may also be formed because the carbon containing liquid is not able to completely fill a gap or trench prior to curing. Furthermore, spun-on carbon films have a relatively high concentration of hydrogen. Additionally, it is also noted that vacuum processes for depositing carbon films (e.g., chemical vapor deposition (CVD) or atomic layer deposition (ALD)) also do not adequately fill high aspect ratio features. For example, the growing film will be pinched off at the neck leaving a void. Accordingly, there is not currently a suitable process for providing voidless filling of high aspect ratio features with a carbon film.
SUMMARY
Embodiments include a method for forming a carbon containing film. In an embodiment, the method comprises flowing a precursor gas into a processing chamber. For example the precursor gas comprises carbon containing molecules. In an embodiment, the method further comprises flowing a co-reactant gas into the processing chamber. In an embodiment, the method further comprises striking a plasma in the processing chamber. In an embodiment plasma activated co reactant molecules initiate polymerization of the carbon containing molecules in the precursor gas. Embodiments may also include a method that further comprises depositing a carbon containing film onto a substrate in the processing chamber.
Embodiments include a method for forming a carbon and nitrogen containing film. In an embodiment, the method comprises flowing a precursor gas into a processing chamber. For example, the precursor gas comprises carbon containing molecules. In an embodiment, the method may further comprise flowing a co-reactant gas into the processing chamber. In an embodiment, one or both of the carbon containing molecules of the precursor gas and the co reactant gas comprise nitrogen. In an embodiment, the method may further comprise striking a plasma in the processing chamber. In an embodiment plasma activated co-reactant molecules initiate polymerization of carbon containing molecules in the precursor gas. In an embodiment, the method may further comprise depositing a carbon and nitrogen containing film onto a substrate in the processing chamber.
Embodiments may include a method for forming a carbon-nitrogen-oxygen film. In an embodiment, the method may comprise flowing a precursor gas into a processing chamber. For example, the precursor gas comprises carbon containing molecules. In an embodiment, the method may further comprise flowing a co-reactant gas into the processing chamber. In an embodiment, one or both of the carbon containing molecules of the precursor gas and the co reactant gas comprise nitrogen and oxygen. In an embodiment, the method may further comprise striking a plasma in the processing chamber. In an embodiment, plasma activated co-reactant molecules initiate polymerization of the carbon containing molecules in the precursor gas. In an embodiment, the method may further comprise depositing a carbon-nitrogen-oxygen film onto a substrate in the processing chamber.
The above summary does not include an exhaustive list of all embodiments. It is contemplated that all systems and methods are included that can be practiced from all suitable combinations of the various embodiments summarized above, as well as those disclosed in the Detailed
Description below and particularly pointed out in the claims filed with the application. Such combinations have particular advantages not specifically recited in the above summary.
BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 is a cross-sectional illustration of a carbon film that has a void in a high aspect ratio trench. Figure 2A is a cross-sectional illustration of a carbon containing film that completely fills a high aspect ratio trench, in accordance with an embodiment.
Figure 2B is a cross-sectional illustration of a carbon containing film that completely fills a high aspect ratio trench with a reentrant profile, in accordance with an embodiment.
Figure 2C is a cross-sectional micrograph of high aspect ratio trenches that are filled with a carbon containing film, in accordance with an embodiment.
Figure 2D is a zoomed in cross-sectional micrograph that illustrates the bottom of the high aspect ratio trenches that show complete filling of the trenches with the carbon containing film, in accordance with an embodiment.
Figure 3 is a process flow diagram of a process for forming a flowable carbon containing film, in accordance with an embodiment.
Figure 4A is chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
Figure 4B is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
Figure 4C is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
Figure 4D is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
Figure 4E is a chemical formula of a carbon containing precursor that may be used to form a flowable carbon film, in accordance with an embodiment.
Figure 5A is a chemical formula of an R group that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 5B is a chemical formula of an R group that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 5C is a chemical formula of an R group that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 6A is a pair of chemical formulas of R groups with the generic formula of CnFFn-i (n=3-8) that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 6B is a chemical formula of a carbon containing precursor with an R group of Figure 6A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
Figure 7A are examples of chemical formulas of R groups with the generic formula of CnFFn (n=3-8) that may be part of the carbon containing precursor, in accordance with an embodiment. Figure 7B is a chemical formula of a carbon containing precursor with an R group of Figure 7A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
Figure 8A is a pair of chemical formulas of R groups with the generic formula of CnFFn-s (n=4-8) that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 8B is a chemical formula of a carbon containing precursor with an R group of Figure 8A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
Figure 9A is a pair of chemical formulas of R groups that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 9B is a chemical formula of a carbon containing precursor with an R group of Figure 9A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
Figure 10A is a pair of chemical formulas of R groups that may be part of the carbon containing precursor, in accordance with an embodiment.
Figure 10B is a chemical formula of a carbon containing precursor with an R group of Figure 10A bonded to the carbon containing precursor with a carbon bridge, in accordance with an embodiment.
Figure 11 illustrates a block diagram of an exemplary computer system that may be used to control a process for forming a flowable carbon film, in accordance with an embodiment.
DETAILED DESCRIPTION
Devices in accordance with embodiments described herein include methods of forming a flowable carbon containing film. In a particular embodiment, an F-CVD process is used to form a flowable carbon containing film. In the following description, numerous specific details are set forth in order to provide a thorough understanding of embodiments. It will be apparent to one skilled in the art that embodiments may be practiced without these specific details. In other instances, well-known aspects are not described in detail in order to not unnecessarily obscure embodiments. Furthermore, it is to be understood that the various embodiments shown in the accompanying drawings are illustrative representations and are not necessarily drawn to scale.
As noted above, carbon containing films formed with spin-on processes have significant drawbacks. Particularly, the spun-on carbon films often result in poor quality films that exhibit shrinkage and that form voids in high aspect ratio trenches. Accordingly, embodiments described herein include processes for forming carbon containing films with a flowable chemical vapor deposition (F-CVD) process. Particularly, the F-CVD process produces a flowable carbon containing film that has a viscosity that enables the flowable carbon containing film to completely fill high aspect ratio features on a substrate surface.
For example, in Figure 2A, a flowable carbon containing film 205 is formed over a surface of a substrate 215. In an embodiment, the flowable carbon containing film 205 completely fills a high aspect ratio trench 212 formed into the substrate 215. As used herein, a high aspect ratio trench 212 may include an aspect ratio of 10:1 or greater. In an embodiment, a high aspect ratio trench 212 may include an aspect ratio of 50:1 or greater. In an embodiment, a high aspect ratio trench 212 may include an aspect ratio of 100:1 or greater.
Additional embodiments may include an F-CVD process that is capable of completely filling a trench with any profile. For example, in Figure 2B a cross-sectional illustration of a high aspect ratio trench 212 with a reentrant profile in a substrate 215 is shown, in accordance with an embodiment. In an embodiment, the flowable carbon containing film 205 may allow for complete filling of a trench with a reentrant profile.
Referring now to Figures 2C, a cross-sectional micrograph of high aspect ratio trenches 212 that are filled with a F-CVD carbon film is shown. In Figure 2C a plurality of high aspect ratio trenches 212 are formed into a substrate 215. For example, the high aspect ratio trenches may have an aspect ratio of 20:1 or greater, 50: 1 or greater, or 100:1 or greater. As shown, the profile of the trenches may not necessarily be perfectly vertical. Despite the non-uniform profiles across all of the trenches 212, the carbon containing film 205 still provides complete filling of the trenches 212. Referring now to Figure 2D, a zoomed in portion of the micrograph in Figure 2C is shown, in accordance with an embodiment. The bottom portions of the trenches 212 are shown in Figure 2D. As shown, even at the bottom of the trenches 212, there is complete filling by the carbon containing film 205.
In addition to being able to completely fill high aspect ratio features, carbon containing films formed with F-CVD processes described herein allow for other improvements compared to films formed with spin-on processes. One advantage is that carbon containing films formed with F- CVD processes include a lower hydrogen concentration. In some embodiments, a low temperature F-CVD process (e.g., approximately 75 °C) may result in a carbon containing film that has a hydrogen concentration between approximately 30% and 45%. This low hydrogen concentration is comparable to a spun-on carbon film that is formed at much higher temperatures (e.g., 300 °C or greater). Additionally, carbon containing films formed with F-CVD processes also show good ash resistance compared to traditional CVD carbon films. For example, it has been shown that ash resistance of carbon containing films formed with F-CVD processes exhibit ashing resistance that is between 10% and 30% better than the ash resistance of traditional spin- on carbon films. Additionally, it has been shown that dry etch resistivity of carbon containing films formed with F-CVD processes exhibit dry etch resistivity that is between 1.5 to 4 times the dry etch resistivity of spun-on carbon films. Accordingly, carbon containing films formed with F-CVD processes provide excellent masking layers for semiconductor manufacturing.
Furthermore, F-CVD processes disclosed herein eliminate the liquid waste produced with spin- on processes.
Embodiments described herein allow for flowable carbon containing films to be formed on a substrate. It is to be appreciated that embodiments may include carbon containing films that also are carbon-nitrogen (CXNY) films and carbon- nitrogen-oxygen (CXNYOZ) films. The specific film that is deposited may be determined by the precursor gasses and co-reactant gasses that are used in the F-CVD process, as will be described in greater detail below.
Referring now to Figure 3, a flow diagram of an F-CVD process 360 used to deposit a flowable carbon containing film is shown, in accordance with an embodiment. In an embodiment, F-CVD process 360 may comprise operation 361 that includes flowing a carbon containing precursor gas into a processing chamber. In an embodiment, the processing chamber may include any suitable chamber for implementing a plasma enhanced CVD (PECVD) process. For example, the processing chamber may include a capacitively coupled plasma (CCP) source, a remote plasma source (RPS), a microwave plasma source, an inductively coupled plasma (ICP) source, or any other plasma source.
In an embodiment, the carbon containing precursor includes molecules that include a vinyl group (C=C). As will be described in greater detail below, the vinyl group is the site where radical induced polymerization is implemented using vinyl functionality to form carbon containing polymers. In an embodiment, the carbon containing precursor may include one or more of the molecules shown in Figures 4A-4E.
It is to be appreciated that the molecules illustrated in Figures 4A-4E are exemplary in nature, and embodiments include any molecule containing a vinyl functional group. In an embodiment, the molecules in Figures 4A-4E may also comprise at least one nitrogen atom and/or at least one oxygen atom.
In an additional embodiment, the carbon containing precursor gas includes molecules that include an alkyne group (CºC). In an embodiment, the alkyne group is the site where radical induced polymerization is implemented using alkyne functionality to form carbon containing polymers. In an additional embodiment, the carbon containing precursor gas includes molecules that include a nitrile group (CºN). In an embodiment, the nitrile group is the site where radical induced polymerization is implemented using nitrile functionality to form carbon containing polymers.
In an embodiment, carbon containing precursor gasses such as the molecules shown in Figures 4A-4E may comprises R groups that stabilize radicals. For example, R groups may include electron donating groups such as amines, amides, esters, ethers, and conjugated or non- conjugated double and triple bonds. Such R groups may be added to tune the reactivity of the radical induced polymerization described in greater detail below.
In an embodiment, the R groups of the carbon containing precursor gas may comprise one or more alkanes with the formula CnFFn+i (n=0-8). In an embodiment, the alkanes that form the R groups may be linear and/or branched. For example, linear alkanes may comprise CFF, C2H5, C3H7. For example, branched alkanes may comprises isopropyl, n-butyl, sec -butyl, tert-butyl, when n=0, all R groups are hydrogen.
In an embodiment, the R groups of the carbon containing precursor gas may comprise one or more of the chemical formulae shown in Figures 5A-5C. In an embodiment, the R groups of the chemical formulae illustrated in Figures 5A-5C may comprise alkanes with the formula CnFhn+i (n=0-8). In an embodiment, the alkanes that form the R groups may be linear and/or branched. For example, linear alkanes may comprise CH3, C2H5, C3H7. For example, branched alkanes may comprises isopropyl, n-butyl, sec-butyl, tert-butyl, when n=0, all R groups are hydrogen.
In an embodiment, the R groups in Figures 4A-4E may also comprise cyclic alkanes with the formula CnFhn-i (n=3-8). An example of two such cyclic alkanes (cyclohexane and cyclobutane) are shown in Figure 6A. In an embodiment, cyclic alkanes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge. Figure 6B is an exemplary illustration of such an embodiment, where cyclohexane is bound to a vinyl group of Figure 4A by a carbon bridge.
In an embodiment, the R groups in Figures 4A-4E may also comprise cyclic alkenes with the formula CnFhn-3 (n=3-8). An example of three such cyclic alkenes (cyclopropene, cyclobutene, and cyclopentene) are shown in Figure 7A. In an embodiment cyclic alkenes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge. Figure 7B is an exemplary illustration of such an embodiment, where cyclohpentene is bound to a vinyl group of Figure 4A by a carbon bridge.
In an embodiment, the R groups in Figures 4A-4E may also comprise cyclic dienes with the formula CnFhn-5 (n=4-8). An example of two such cyclic dienes (cyclobutadiene and
cyclopentadiene) are shown in Figure 8A. In an embodiment cyclic dienes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge. Figure 8B is an exemplary illustration of such an embodiment, where cyclopentadiene is bound to a vinyl group of Figure 4A by a carbon bridge.
In an embodiment, the R groups in Figures 4A-4E may also comprise cyclic trienes. An example of two such cyclic trienes (cycloheptatriene and cyclooctatriene) are shown in Figure 9A. In an embodiment cyclic trienes may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge. Figure 9B is an exemplary illustration of such an
embodiment, where cycloheptatriene is bound to a vinyl group of Figure 4A by a carbon bridge. In an embodiment, the R groups in Figures 4A-4E may also comprise benzene and
cyclooctatetraene, which are shown in Figure 10A. In an embodiment such R groups may be bound to the main structure of the molecules illustrated in Figures 4A-4E by a carbon bridge. Figure 10B is an exemplary illustration of such an embodiment where benzene is bound to a vinyl group of Figure 4A by a carbon bridge.
In an additional embodiment, the carbon containing source gas may include molecules that comprise one or more of a vinyl group, an alkyne group, and a nitrile group. In an embodiment, a single molecule may include one or more of a vinyl group, an alkyne group, and a nitrile group. In an embodiment, the carbon containing source gas may comprise a mixture of gasses, where each of the different gasses include one or more of a vinyl group, an alkyne group, and a nitrile group.
Returning now to F-CVD process 360, the process may comprise operation 362 that includes flowing a co-reactant gas into the processing chamber. In an embodiment, the co-reactant gas may comprise one or more gasses that may be activated by the plasma source. In an
embodiment, the co-reactant gas may comprise one or more of Ar, He, N2, ¾, and NH3.
In an embodiment, the sequence of carbon containing precursor delivery and co-reactant gas delivery to the chamber may be sequential. For example, pulses of the carbon containing precursor may be delivered to the chamber in an alternating pattern with pulses of the co-reactant gas. In an embodiment, the carbon containing precursor may be delivered to the chamber first, and the co-reactant gas may be delivered to the chamber second. In an embodiment, the co reactant gas may be delivered to the chamber first, and the carbon containing precursor may be delivered to the chamber second. In an embodiment, the carbon containing precursor gas and the co-reactant gas may be delivered to the chamber simultaneously or partially simultaneously. F-CVD process 360 may comprises operation 363 that includes striking a plasma in the processing chamber to initiate radical induced polymerization of the carbon containing precursor gas. Plasma activated co-reactant molecules (i.e., radicals and ions) have high energies and react with the carbon containing precursor molecules that are in the gas phase. The radical induced polymerization of the carbon containing precursor gas increases the molecular weight of the carbon containing molecules and results in a phase change to a flowable polymer material. In an embodiment, the plasma the is struck may be a CCP, a ICP, an RSP, or a microwave plasma. In a particular embodiment, a modular micro wave plasma source may be used. That is, a plurality of microwave antennas may be used to couple microwave radiation into the chamber.
In an embodiment, F-CVD process 360 may comprise operation 364 that includes depositing a flowable carbon film on a substrate in the processing chamber. In an embodiment, the flowable polymer material is deposited onto the substrate and is able to flow in order to fill features (e.g., trenches and gaps) on the substrate surface. In an embodiment, the flowable polymer material may fill high aspect ratio trenches. In an embodiment the high aspect ratio trenches may have a reentrant profile. In an embodiment the high aspect ratio trenches may have a an aspect ratio of 10:1 or greater, 50:1 or greater, or 100:1 or greater. In some embodiments, a“flowable carbon containing film” may include a carbon containing film that is able to completely fill a trench or gap with a high aspect ratio. In an embodiment, the F-CVD process 360 may include a substrate temperature that is less than 200 °C. In an embodiment, the substrate temperature may be between -10 °C and 200 °C.
In an embodiment, F-CVD process 360 may comprise operation 365 that includes curing the flowable carbon film. In an embodiment, the flowable carbon film is cured by increasing the cross-linking of the film. For example, the curing may be UV curing, annealing, or the like.
It is to be appreciated that F-CVD process 360 also comprises flowable carbon containing films that includes other desired elements. For example, F-CVD process 360 may be utilized to form a carbon-nitrogen (CXNY) film. In such an embodiment, the co-reactant gas that is flown into the processing chamber at operation 362 may comprise N2 and/or NFF, and one or more of Ar, He, and H2.
In an additional embodiment, a flowable CXNY film may be obtained by utilizing a carbon containing precursor gas such as those described above that comprises nitrogen. In such embodiments, the precursor gas may be reacted with one or more of plasma activated Ar, He, and H2.
It is to be appreciated that F-CVD process 360 also comprises flowable carbon containing films that includes other desired elements. For example, F-CVD process 360 may be utilized to form a carbon-nitrogen-oxygen (CXNYOZ) film. In such an embodiment, the co-reactant gas that is flown into the processing chamber at operation 362 may comprise N2 and 02 in combination with one or more of Ar, He, and H2. In an embodiment, the co-reactant gas may comprise NH3 and 02 in combination with one or more of Ar, He, and H2. In an embodiment, the co-reactant gas may comprise N2, NH3, and 02 in combination with one or more of Ar, He, and H2
In an additional embodiment, a flowable CXNYOZ film may be obtained by utilizing a carbon containing precursor gas such as those described above that comprises nitrogen and oxygen. In such embodiments, the precursor gas comprising nitrogen and oxygen may be reacted with one or more of plasma activated Ar, He, and H2. In an embodiment, the carbon containing precursor gas may comprises nitrogen or oxygen, and the precursor gas may be reacted with one or more of plasma activated 02, N2, and NH3, in combination with one or more of plasma activated Ar, He, and ¾.
Referring now to Figure 11, a block diagram of an exemplary computer system 1160 of a processing tool is illustrated in accordance with an embodiment. In an embodiment, computer system 1160 is coupled to and controls processing in the processing tool. Computer system 1160 may be connected (e.g., networked) to other machines in a Local Area Network (LAN), an intranet, an extranet, or the Internet. Computer system 1160 may operate in the capacity of a server or a client machine in a client-server network environment, or as a peer machine in a peer- to-peer (or distributed) network environment. Computer system 1160 may be a personal computer (PC), a tablet PC, a set-top box (STB), a Personal Digital Assistant (PDA), a cellular telephone, a web appliance, a server, a network router, switch or bridge, or any machine capable of executing a set of instructions (sequential or otherwise) that specify actions to be taken by that machine. Further, while only a single machine is illustrated for computer system 1160, the term “machine” shall also be taken to include any collection of machines (e.g., computers) that individually or jointly execute a set (or multiple sets) of instructions to perform any one or more of the methodologies described herein.
Computer system 1160 may include a computer program product, or software 1122, having a non-transitory machine-readable medium having stored thereon instructions, which may be used to program computer system 1160 (or other electronic devices) to perform a process according to embodiments. A machine-readable medium includes any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computer). For example, a machine- readable (e.g., computer-readable) medium includes a machine (e.g., a computer) readable storage medium (e.g., read only memory (“ROM”), random access memory (“RAM”), magnetic disk storage media, optical storage media, flash memory devices, etc.), a machine (e.g., computer) readable transmission medium (electrical, optical, acoustical or other form of propagated signals (e.g., infrared signals, digital signals, etc.)), etc.
In an embodiment, computer system 1160 includes a system processor 1102, a main memory 1104 (e.g., read-only memory (ROM), flash memory, dynamic random access memory (DRAM) such as synchronous DRAM (SDRAM) or Rambus DRAM (RDRAM), etc.), a static memory 1106 (e.g., flash memory, static random access memory (SRAM), etc.), and a secondary memory 1118 (e.g., a data storage device), which communicate with each other via a bus 1130.
System processor 1102 represents one or more general-purpose processing devices such as a microsystem processor, central processing unit, or the like. More particularly, the system processor may be a complex instruction set computing (CISC) microsystem processor, reduced instruction set computing (RISC) microsystem processor, very long instruction word (VLIW) microsystem processor, a system processor implementing other instruction sets, or system processors implementing a combination of instruction sets. System processor 1102 may also be one or more special-purpose processing devices such as an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a digital signal system processor (DSP), network system processor, or the like. System processor 1102 is configured to execute the processing logic 1126 for performing the operations described herein.
The computer system 1160 may further include a system network interface device 1108 for communicating with other devices or machines. The computer system 1160 may also include a video display unit 1110 (e.g., a liquid crystal display (LCD), a light emitting diode display (LED), or a cathode ray tube (CRT)), an alphanumeric input device 1112 (e.g., a keyboard), a cursor control device 1114 (e.g., a mouse), and a signal generation device 1116 (e.g., a speaker). The secondary memory 1118 may include a machine-accessible storage medium 1131 (or more specifically a computer-readable storage medium) on which is stored one or more sets of instructions (e.g., software 1122) embodying any one or more of the methodologies or functions described herein. The software 1122 may also reside, completely or at least partially, within the main memory 1104 and/or within the system processor 1102 during execution thereof by the computer system 1160, the main memory 1104 and the system processor 1102 also constituting machine-readable storage media. The software 1122 may further be transmitted or received over a network 1120 via the system network interface device 1108.
While the machine-accessible storage medium 1131 is shown in an exemplary embodiment to be a single medium, the term“machine-readable storage medium” should be taken to include a single medium or multiple media (e.g., a centralized or distributed database, and/or associated caches and servers) that store the one or more sets of instructions. The term“machine -readable storage medium” shall also be taken to include any medium that is capable of storing or encoding a set of instructions for execution by the machine and that cause the machine to perform any one or more of the methodologies. The term“machine-readable storage medium” shall accordingly be taken to include, but not be limited to, solid-state memories, and optical and magnetic media.
In the foregoing specification, specific exemplary embodiments have been described. It will be evident that various modifications may be made thereto without departing from the scope of the following claims. The specification and drawings are, accordingly, to be regarded in an illustrative sense rather than a restrictive sense.

Claims

1. A method for forming a carbon containing film, comprising:
flowing a precursor gas into a processing chamber, wherein the precursor gas comprises carbon containing molecules;
flowing a co-reactant gas into the processing chamber;
striking a plasma in the processing chamber, wherein plasma activated co-reactant molecules initiate polymerization of the carbon containing molecules in the precursor gas; and
depositing a carbon containing film onto a substrate in the processing chamber.
2. The method of claim 1, further comprising:
curing the carbon containing film.
3. The method of claim 2, wherein curing comprises a UV cure.
4. The method of claim 2, wherein curing comprises annealing the carbon containing film.
5. The method of claim 1, wherein the plasma is a microwave plasma.
6. The method of claim 1, wherein the plasma is a capacitively coupled plasma (CCP).
7. The method of claim 1, wherein the plasma is a remote plasma source (RPS) plasma.
8. The method of claim 1, wherein the carbon containing molecules of the precursor
comprises a vinyl group.
9. The method of claim 1 , wherein the carbon containing molecules of the precursor
comprises an alkyne group.
10. The method of claim 1, wherein the carbon containing molecules of the precursor gas comprises a nitrile group.
11. A method for forming a carbon and nitrogen containing film, comprising:
flowing a precursor gas into a processing chamber, wherein the precursor gas comprises carbon containing molecules;
flowing a co-reactant gas into the processing chamber, wherein one or both of the carbon containing molecules of the precursor gas and the co-reactant gas comprise nitrogen;
striking a plasma in the processing chamber, wherein plasma activated co-reactant molecules initiate polymerization of carbon containing molecules in the precursor gas; and
depositing a carbon and nitrogen containing film onto a substrate in the processing chamber.
12. The method of claim 11, wherein the carbon containing molecules of the precursor gas comprises nitrogen, and wherein the co-reactant gas comprises one or more of Ar, He, and ¾.
13. The method of claim 11, wherein the carbon containing molecules of the precursor does not contain nitrogen, and wherein the co-reactant comprises one or both of N2 and NH3.
14. The method of claim 11, wherein the carbon containing molecules of the precursor
comprises one or more of a vinyl group, an alkyne group, and a nitrile group.
15. The method of claim 11 , wherein the plasma is a microwave plasma.
PCT/US2019/025828 2018-04-27 2019-04-04 Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources Ceased WO2019209484A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862663846P 2018-04-27 2018-04-27
US62/663,846 2018-04-27
US16/374,345 US10985009B2 (en) 2018-04-27 2019-04-03 Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources
US16/374,345 2019-04-03

Publications (1)

Publication Number Publication Date
WO2019209484A1 true WO2019209484A1 (en) 2019-10-31

Family

ID=68290750

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2019/025828 Ceased WO2019209484A1 (en) 2018-04-27 2019-04-04 Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources

Country Status (3)

Country Link
US (1) US10985009B2 (en)
TW (1) TWI825087B (en)
WO (1) WO2019209484A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12469693B2 (en) * 2019-09-17 2025-11-11 Asm Ip Holding B.V. Method of forming a carbon-containing layer and structure including the layer
KR102882467B1 (en) * 2020-01-16 2025-11-05 에이에스엠 아이피 홀딩 비.브이. Method of forming high aspect ratio features
TW202233886A (en) * 2021-02-05 2022-09-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods of filling recesses on substrate surface, structures formed using the methods, and systems for forming same
US11935751B2 (en) * 2021-05-25 2024-03-19 Applied Materials, Inc. Boron nitride for mask patterning
KR20240031042A (en) * 2022-08-30 2024-03-07 에이에스엠 아이피 홀딩 비.브이. Substrate processing method
US20250137119A1 (en) * 2023-10-26 2025-05-01 Applied Materials, Inc. Deposition of carbon gapfill materials
US20250253187A1 (en) * 2024-02-05 2025-08-07 Applied Materials, Inc. Flowable chemical vapor deposition (fcvd) and sacrificial etch protection processes

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194626A (en) * 1987-10-06 1989-04-13 Nok Corp Thin-film transistor
JPH04357877A (en) * 1991-06-03 1992-12-10 Ricoh Co Ltd thin film transistor
US5759635A (en) * 1996-07-03 1998-06-02 Novellus Systems, Inc. Method for depositing substituted fluorocarbon polymeric layers
JP2004064023A (en) * 2002-07-31 2004-02-26 Nec Corp Copolymer film, method for forming the same, semiconductor device using copolymer film, and polymer film growth apparatus
US20060084280A1 (en) * 2004-08-09 2006-04-20 Nobuo Matsuki Method of forming a carbon polymer film using plasma CVD
US20080003824A1 (en) * 2006-06-28 2008-01-03 Deenesh Padhi Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
US20140363983A1 (en) * 2013-06-07 2014-12-11 Asm Ip Holding B.V. Method For Filling Recesses Using Pre-Treatment With Hydrocarbon-Containing Gas
US20170158809A1 (en) * 2015-11-18 2017-06-08 Massachusetts Institute Of Technology Ultra-thin, Pinhole-free, Flexible Metal-Organic Films

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100104770A1 (en) * 2008-10-27 2010-04-29 Asm Japan K.K. Two-step formation of hydrocarbon-based polymer film
US20130217241A1 (en) * 2011-09-09 2013-08-22 Applied Materials, Inc. Treatments for decreasing etch rates after flowable deposition of silicon-carbon-and-nitrogen-containing layers
US9514932B2 (en) * 2012-08-08 2016-12-06 Applied Materials, Inc. Flowable carbon for semiconductor processing
US9320387B2 (en) * 2013-09-30 2016-04-26 Lam Research Corporation Sulfur doped carbon hard masks
US10418243B2 (en) * 2015-10-09 2019-09-17 Applied Materials, Inc. Ultra-high modulus and etch selectivity boron-carbon hardmask films

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0194626A (en) * 1987-10-06 1989-04-13 Nok Corp Thin-film transistor
JPH04357877A (en) * 1991-06-03 1992-12-10 Ricoh Co Ltd thin film transistor
US5759635A (en) * 1996-07-03 1998-06-02 Novellus Systems, Inc. Method for depositing substituted fluorocarbon polymeric layers
JP2004064023A (en) * 2002-07-31 2004-02-26 Nec Corp Copolymer film, method for forming the same, semiconductor device using copolymer film, and polymer film growth apparatus
US20060084280A1 (en) * 2004-08-09 2006-04-20 Nobuo Matsuki Method of forming a carbon polymer film using plasma CVD
US20080003824A1 (en) * 2006-06-28 2008-01-03 Deenesh Padhi Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
US20140363983A1 (en) * 2013-06-07 2014-12-11 Asm Ip Holding B.V. Method For Filling Recesses Using Pre-Treatment With Hydrocarbon-Containing Gas
US20170158809A1 (en) * 2015-11-18 2017-06-08 Massachusetts Institute Of Technology Ultra-thin, Pinhole-free, Flexible Metal-Organic Films

Also Published As

Publication number Publication date
US20190333760A1 (en) 2019-10-31
US10985009B2 (en) 2021-04-20
TW202003904A (en) 2020-01-16
TWI825087B (en) 2023-12-11

Similar Documents

Publication Publication Date Title
US10985009B2 (en) Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources
KR102861314B1 (en) Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
KR20220137859A (en) Method of forming a structure on a substrate
US20210066075A1 (en) Structures including dielectric layers and methods of forming same
US7867578B2 (en) Method for depositing an amorphous carbon film with improved density and step coverage
CN113215550A (en) Method of forming a structure, formed structure and system for forming the structure
JP7494209B2 (en) Tailored atomic layer deposition
JP7350492B2 (en) How to form silicon nitride films using microwave plasma
KR20200143254A (en) Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method
US11217443B2 (en) Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
TW202208665A (en) Method for filling a gap in a three-dimensional structure on a semiconductor substrate
CN116779528A (en) Methods and related systems and devices for depositing gap-filling fluids
CN114171450A (en) Methods of depositing gap fill fluid and related systems and devices
CN114864478A (en) Method, system and structure for filling a recess on a substrate surface
CN114606481A (en) Method of forming a structure comprising a silicon carbon material and structure formed using the method
KR20210145078A (en) Structures including multiple carbon layers and methods of forming and using same
CN118272788A (en) Method and system for depositing boron carbonitride
KR20220143579A (en) Method of filling gap with flowable carbon layer
US20250273431A1 (en) Hybrid dual frequency plasma method and apparatus for deposition in patterned features on a substrate
CN118280912A (en) Method for forming gap filling material and related device and structure
CN110699663B (en) Metal film deposition method
US20250253187A1 (en) Flowable chemical vapor deposition (fcvd) and sacrificial etch protection processes
US20240060174A1 (en) Method of forming material within a recess
US20250393134A1 (en) Methods of forming a structure on a substrate and associated methods of filling a recessed feature on a substrate
KR102917924B1 (en) atomic layer deposition equipment and atomic layer deposition method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19792661

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19792661

Country of ref document: EP

Kind code of ref document: A1