WO2019208596A1 - Non-contact gas measuring device, non-contact gas measuring system, and non-contact gas measuring method - Google Patents

Abstract

In a non-contact gas measuring device 100, a reception/oscillation unit 101 emits and detects electromagnetic waves. A visible light source 104 emits electromagnetic waves having a frequency different from that of the electromagnetic waves emitted by the reception/oscillation unit 101. An optical element 107 has a transmittance that changes on the basis of the electromagnetic waves emitted by the visible light source 104, and either transmits or reflects the electromagnetic waves emitted by the reception/oscillation unit 101. When a target object is to be measured, a control unit 110 performs control to change the transmittance in such a way that the electromagnetic waves of the visible light source 104 are stopped and the optical element 107 functions as a transmitting plate, and to cause the electromagnetic waves transmitted through the optical element 107 to be radiated at the target object. The reception/oscillation unit 101 outputs the value of a voltage or a current which varies in accordance with the intensity of the electromagnetic waves reflected from the target object 600, as a measured value.

Description

Non-contact gas measuring device, non-contact gas measuring system, and non-contact gas measuring method

The present invention relates to a non-contact gas measurement device, a non-contact gas measurement system, and a non-contact gas measurement method, and more particularly to a technique effective for non-contact gas measurement of a skin surface.

As background arts in this technical field, for example, there are JP 2002-263072 (Patent Document 1), JP 2010-172543 (Patent Document 2), and JP 2010-169658 (Patent Document 3).

Japanese Patent Laid-Open No. 2004-228561 describes as a problem “Providing a moisture transpiration measuring device that is capable of measuring with sufficient and sufficient accuracy, and is small, light, inexpensive, and easy to handle.” “A circuit board is arranged inside the frame to be in contact with the skin surface, and only one capacitive polymer thin film humidity sensor is arranged on the circuit board as a humidity detecting element. The driving circuit of the humidity detecting element is also a circuit board. The amount of moisture transpiration is calculated from the circuit output taken out through the handle shaft.Because only one humidity detection element is used, the number of parts is reduced and the assembly is reduced compared to the case of using two humidity detection elements. "Coordination and maintenance costs will be lower."

Further, Patent Document 2 has a description as “Providing a device for estimating the amount of transdermal moisture transpiration easily and accurately, and further evaluating the skin barrier function based on this”, and means for solving the problem. As "a main body, an application electrode installed on the main body that can apply a plurality of AC voltages, and a susceptance (B), admittance (Y), or conductance (G) installed on the main body are detected. Percutaneous moisture transpiration based on one of the detected susceptance (B), admittance (Y), or conductance (G) built in the main body and the detection electrode 13 to be installed, the display unit installed in the main body, And an arithmetic unit that calculates a characteristic value (P) that can be an estimated value of the skin, estimates the transdermal moisture transpiration based on the calculated characteristic value (P), and evaluates the skin barrier function based on this. " It is.

Further, Patent Document 3 has a description that “a gas supplied from a gas supply site is efficiently analyzed” as a problem, and “a capture film 3 that captures a gas (for example, porous) The gas (for example, skin gas generated from the human body) captured by the capture film and the terahertz wave or infrared light generated from the generation unit interact with each other. A capture unit (a member composed of a capture film and a collection container) capable of arranging a film is provided, and the capture unit can contact a portion for supplying the gas (for example, a human body such as an arm or a hand). The structure is provided so as to maintain the capture film and the portion 1 in a non-contact state ”.

JP 2002-263072 A JP 2010-172543 A JP 2010-169658 A

The human skin not only adjusts the environment and temperature in the living body through skin respiration and sweating, but also plays a role in protecting internal tissues from external stimuli such as foreign substances, bacteria, or microorganisms.

For this reason, the amount of water inside the skin and the amount of water transpirated from the skin from the standpoint of health maintenance such as prevention of heat stroke and prevention of dry skin due to atopic dermatitis, or from practical viewpoints such as evaluation of cosmetics and pharmaceuticals, and beauty. It is important to obtain information on the so-called transdermal moisture transpiration rate. In particular, the transdermal moisture transpiration is of great interest as an index for evaluating the skin barrier function that protects the living body from external stimuli and protects the moisture from transpiration outside the body.

Also, in health care and the like, not only moisture evaporated from the skin but also gas such as skin gas is measured. With skin gas, certain diseases can be discovered. For example, if the skin gas contains a lot of acetone, it is said to be related to diabetes, and if it contains a lot of ammonia, it is said to be related to chronic liver disease.

In the measurement of transcutaneous moisture transpiration, a technique (for example, Patent Document 1) that measures the amount of moisture lost from the skin surface using, for example, a humidity sensor is known. This technique requires a mechanism that stabilizes a humidity sensor that measures the amount of moisture lost from the skin surface. For this reason, there is a problem that the measuring instrument becomes expensive and large. In addition, since it is a contact type in which a part of the measurement device is brought into contact with an object, i.e., skin, for measurement, the surface of the patient's skin may be affected or damaged during measurement. Considering the influence on the patient's skin, the measurement location is limited.

On the other hand, there is a technique (for example, Patent Document 2) that evaluates the skin barrier function in a small size and at low cost by measuring the electrical properties of the skin. Similar to Patent Document 1, it is necessary to bring a part of the measuring device into contact with the skin, which is the measurement part, in order to measure the electrical properties of the object.

Further, as a technique for measuring skin gas, a technique for capturing skin gas and measuring the captured skin gas using electromagnetic waves (for example, Patent Document 3) is known. In this technique, a light source and a detector that generate infrared light and the like are necessary for capturing and measuring skin gas as a configuration of the measurement device. Therefore, there is a problem that the apparatus configuration is complicated and large.

Also in the technique of this Patent Document 3, since the measurement is performed by bringing a part of the measuring device into contact with the skin with the object, the measurement location is limited as in the above Patent Documents 1 and 2.

An object of the present invention is to provide a technique capable of measuring gas from an object with a simple configuration without affecting the user's skin and the like.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

Of the inventions disclosed in this application, the outline of typical ones will be briefly described as follows.

That is, a typical non-contact gas measurement system has a non-contact gas measurement device, an analysis unit, and a system control unit. The non-contact gas measuring device measures a measurement target gas emitted from an object using electromagnetic waves. An analysis part analyzes measurement object gas from the measured value which the non-contact gas measuring device measured. The system control unit controls operations of the non-contact gas measuring device and the analysis unit.

Further, the non-contact gas measuring device includes a reception oscillation unit, an electromagnetic wave irradiation unit, an optical element, and a control unit. The reception oscillation unit emits and detects electromagnetic waves. The electromagnetic wave irradiation unit emits an electromagnetic wave having a frequency different from that of the electromagnetic wave emitted from the reception oscillation unit.

The optical element changes the transmittance based on the electromagnetic wave emitted from the electromagnetic wave irradiation unit, and transmits or reflects the electromagnetic wave emitted from the reception oscillation unit. The control unit controls the reception oscillation unit and the electromagnetic wave irradiation unit.

Then, the control unit stops the electromagnetic wave of the electromagnetic wave irradiation unit when measuring the object, changes the transmittance so that the optical element functions as a transmission plate, and irradiates the object with the electromagnetic wave transmitted through the optical element. To control. The reception oscillating unit outputs a voltage or current value that changes according to the intensity of the electromagnetic wave reflected from the object as a measurement value to the analysis unit.

In particular, when acquiring a corrected electromagnetic wave for correcting a measurement value, the control unit emits the electromagnetic wave from the electromagnetic wave irradiation unit, changes the transmittance so that the optical element functions as a reflector, and reflects the electromagnetic wave from the optical element. To control.

Also, the reception oscillation unit outputs a voltage or current value that changes according to the intensity of the electromagnetic wave reflected from the optical element as a correction value to the analysis unit.

Among the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

(1) User convenience can be improved.

(2) The non-contact gas measuring device and the non-contact gas measuring system can be miniaturized.

It is explanatory drawing which shows an example of a structure in the non-contact gas measuring device by Embodiment 1. It is explanatory drawing which shows an example of the characteristic in the receiving oscillator which the non-contact gas measuring device of FIG. 1 has. It is a flowchart which shows an example in the operation | movement of the gas measurement by the non-contact gas measuring device of FIG. It is explanatory drawing which shows an example of a structure in the non-contact gas measuring system using the non-contact gas measuring device of FIG. It is a general-view perspective view which shows an example of the non-contact gas measuring system of FIG. It is explanatory drawing which shows an example at the time of using the non-contact gas measuring system of FIG. FIG. 5 is an explanatory diagram illustrating an example of a configuration of a reception oscillation unit and an information correction unit included in the non-contact gas measurement system of FIG. 4. It is explanatory drawing which shows the other structural example in the reception oscillation part and information correction | amendment part which the non-contact gas measurement system of FIG. 4 has. It is explanatory drawing following FIG. It is explanatory drawing which showed an example of the structure in the control information management table which the system control part which the non-contact gas measuring system of FIG. 4 has has. It is explanatory drawing which shows an example of the measurement result table stored in the memory which the non-contact gas measurement system of FIG. 4 has. It is a flowchart which shows an example of the measurement process of the measurement object gas by the non-contact gas measurement system of FIG. 6 is an explanatory diagram illustrating an example of a configuration in a reception oscillation unit and an information correction unit according to Embodiment 2. FIG. 10 is an explanatory diagram illustrating an example of a configuration of a mobile terminal according to Embodiment 3. FIG. It is explanatory drawing which shows an example of the external appearance of the portable terminal of FIG. It is explanatory drawing which shows an example of the display by the input / output part which the portable terminal of FIG. 15 has. It is a flowchart which shows an example in the operation | movement of the gas measurement by the portable terminal of FIG. It is explanatory drawing which shows an example of a structure in the non-contact gas measuring device by Embodiment 4. It is explanatory drawing which shows an example of the time waveform of each function part in the non-contact gas measuring device of FIG. It is a flowchart which shows an example of the measurement process of the measurement object gas by the non-contact gas measuring system comprised using the non-contact gas measuring device of FIG. It is explanatory drawing which shows the electromagnetic wave intensity | strength and the change of the transmittance | permeability at the time of modulating the visible light source by the non-contact gas measuring device of FIG. It is a flowchart which shows the other example in the measurement process of FIG. FIG. 10 is an explanatory diagram illustrating an example of film thickness measurement by a non-contact gas measurement device according to Embodiment 5. It is explanatory drawing explaining the principle of the film thickness measurement in the target object of FIG.

In all the drawings for explaining the embodiments, the same members are, in principle, given the same reference numerals, and the repeated explanation thereof is omitted.

(Embodiment 1)
Hereinafter, embodiments will be described in detail.

<Configuration example of non-contact gas measuring device>
FIG. 1 is an explanatory diagram showing an example of the configuration of the non-contact gas measuring apparatus 100 according to the first embodiment.

The non-contact gas measuring device 100 measures the measurement target gas 601 emitted from the target 600 using electromagnetic waves. The non-contact gas measuring device 100 includes a reception oscillation unit 101 and a control unit 110 as shown in FIG. The reception oscillating unit 101 has a configuration in which the oscillation and reception of electromagnetic waves are united, and emits and detects electromagnetic waves.

The reception oscillation unit 101 includes a transmitter / receiver 102 and a lens 103. The transmitter / receiver 102 oscillates and receives electromagnetic waves. The lens 103 irradiates the object 600 with the electromagnetic waves oscillated by the transmitter / receiver 102 as parallel light, and collects the reflected wave from the object 600.

The electromagnetic wave oscillated by the transmitter / receiver 102 is irradiated perpendicularly to the object 600, thereby passing through the measurement target gas 601 and returning the reflected wave to the receiver / transmitter 102. Here, the object 600 is a user's skin or the like. The control unit 110 controls the reception oscillation unit 101.

The electromagnetic wave oscillated by the reception oscillation unit 101 uses a frequency that is easily absorbed by gas. For example, when the object 600 is skin and the measurement target gas 601 is water vapor evaporating from the skin, a frequency such as about 0.56 THz or about 0.75 THz is suitable.

The transmitter / receiver 102 is, for example, an electronic device that oscillates electromagnetic waves in a negative resistance region, and is, for example, a resonant tunnel diode. In FIG. 1, a resonant tunnel diode is shown for convenience, but the transmitter / receiver is not limited to this.

For example, a device that oscillates electromagnetic waves such as a laser may be used. As an oscillator that oscillates at a frequency of about 0.56 THz or 0.75 THz, for example, a quantum cascade laser or a resonant tunneling diode is used.

<Characteristics of transmitter / receiver>
FIG. 2 is an explanatory diagram illustrating an example of characteristics of the transmitter / receiver 102 included in the non-contact gas measuring device 100 of FIG.

FIG. 2 shows the relationship between the intensity of the reflected wave from the object 600 and the current flowing between the terminals of the transmitter / receiver 102. The electromagnetic wave oscillated from the receiver / transmitter 102 is reflected as the reflected wave. This is an example of a phenomenon that affects the oscillation characteristics of the transmitter / receiver 102 when returning to 102.

For example, when a resonant tunnel diode is used as the transmitter / receiver 102, an electromagnetic wave oscillates in the negative resistance region by applying a specific voltage between the terminals of the resonant tunnel diode.

Non-patent document Masahiro Asada and Safumi Suzuki 2015 Jpn. J. et al. Appl. Phys. 54 070309 describes that the current flowing between the terminals of the oscillator changes when the reflectivity of the reflector is different.

This occurs when virtual admittance is added to the oscillation circuit. Similarly, in the case of a semiconductor laser, the reflected wave affects the oscillation characteristics. This is caused by the interference between the oscillation wave and the reflected wave in the resonator. These phenomena have been treated as noise until now.

The inventor of the present invention pays attention to the fact that this phenomenon can be applied to non-contact gas measurement by making the attenuation indicated by the absorption of electromagnetic waves in the measurement target gas what is shown as the reflectance of the reflecting object in the above-mentioned non-patent literature. did.

That is, the transmitter / receiver 102 oscillates an electromagnetic wave, and a difference occurs in the current flowing through the transmitter / receiver 102 according to the intensity of the reflected wave that is reflected from the object 600 and returns to the receiver / transmitter 102. . Since the intensity of the reflected wave changes depending on the amount of the measurement target gas 601 in the electromagnetic wave path, it is possible to perform gas measurement using a difference in current or voltage applied to the transmitter / receiver 102.

For example, in FIG. 2, it can be seen that when the current flowing between the terminals of the resonant tunneling diode is small, the intensity of the reflected wave is weak, and as a result, the absorption of electromagnetic waves by the measurement target gas 601 is strong. That is, it can be seen that the amount of the measurement target gas 601 is large.

In this way, by measuring the current or voltage change between the terminals of the transmitter / receiver 102 and calculating the amount of electromagnetic wave absorption by the measurement target gas 601, the measurement target gas 601 is measured from the correlation between the absorption and amount by the gas. It becomes possible to do.

In addition, the graph shown in FIG. 2 is an example, and the data structure is not limited to this. The configuration showing the relationship between the measured current value and the measurement target gas, for example, information such as a table configuration If it is.

<Operation example of gas measuring device>
FIG. 3 is a flowchart showing an example of the gas measurement operation by the non-contact gas measuring device 100 of FIG.

First, the control unit 110 controls the reception oscillation unit 101 to irradiate the measurement target object 600 with an electromagnetic wave having a preset frequency (step S101). In the process of step S101, the non-contact gas measuring device 100 only needs to irradiate the electromagnetic wave toward the target object 600, so that the non-contact gas measuring device 100 does not need to be in close contact with the target object 600 such as skin. As shown in FIG. 1, gas measurement is performed with a distance between the non-contact gas measurement device 100 and the object 600.

Then, the electromagnetic wave irradiated perpendicularly to the object 600 passes through the measurement target gas 601 and is irradiated to the object 600, and the reflected wave is condensed on the lens 103 and returns to the transmitter / receiver 102. Subsequently, the control unit 110 acquires a current or voltage value corresponding to the intensity of the reflected wave received by the reception oscillation unit 101 (step S102).

Thereby, since the gas measurement can be performed without bringing the non-contact gas measurement device 100 into close contact with the object 600 as described above, the influence on the skin surface of the patient at the time of measurement can be reduced. Further, since it is not necessary to consider the influence on the skin or the like, the measurement location is not limited, and an accurate measurement result can be obtained easily.

When the measurement target gas 601 is uniquely determined, the intensity of the reflected wave in FIG. 2 can be replaced with the concentration of the measurement target gas 601 by quantitatively measuring the value in advance. In this case, the concentration of the measurement target gas 601 can be calculated using the current value or the voltage value measured in the process of step S102. Further, it is possible to convert the change in the measurement target gas 601 by comparing with the result of the current or voltage measured in the past.

<Configuration example of non-contact gas measurement system>
FIG. 4 is an explanatory diagram showing an example of a configuration in a non-contact gas measurement system 500 using the non-contact gas measurement device 100 of FIG.

As shown in FIG. 4, the non-contact gas measurement system 500 includes a non-contact gas measurement device 100, an information correction unit 200, a distance measurement unit 300, a system control unit 400, an analysis unit 410, an input / output unit 420, and a memory 430. .

The non-contact gas measurement device 100, the information correction unit 200, the distance measurement unit 300, the system control unit 400, the analysis unit 410, the input / output unit 420, and the memory 430 are connected to each other by a system bus 401. The configuration and operation of the non-contact gas measuring device 100 are the same as those in FIG.

The information correction unit 200 acquires a correction wave that reduces measurement errors due to the environment. This correction wave is an electromagnetic wave. For example, when water vapor evaporated from the skin is measured as the measurement target gas, the measurement value may be affected because the amount of water vapor in the air varies depending on the environment in which the user exists. For this reason, the influence of water vapor due to the environment is removed using the correction wave acquired by the information correction unit 200.

The distance measuring unit 300 measures the distance from the distance measuring unit 300 to the object 600. The system control unit 400 acquires various data and controls the non-contact gas measurement system 500. In particular, the system control unit 400 controls the non-contact gas measurement device 100 with reference to a control information management table 800 shown in FIG. 10 described later when measuring the measurement target gas 601.

The analysis unit 410 analyzes the measured value of the detected electromagnetic wave. The input / output unit 420 is an interface with a user, and includes an input unit 421 and an output unit 422 shown in FIG. The input unit 421 is, for example, a button, and the output unit 422 is, for example, a display unit.

The memory 430 is composed of, for example, a non-volatile semiconductor memory exemplified by a flash memory, and stores received data, analysis results, and the like. In particular, a control information management table 800 shown in FIG. 10 and a measurement result table 900 shown in FIG. 11 are stored.

<Overview of non-contact gas measurement system>
FIG. 5 is a schematic perspective view showing an example of the non-contact gas measurement system 500 of FIG.

As shown in FIG. 5, the non-contact gas measurement system 500 is accommodated in a case 501 made of, for example, a rectangular parallelepiped, and an input unit 421 and an output unit 422 are provided on the main surface of the case 501. In the example of FIG. 5, the input unit 421 is a button.

The user inputs information such as a measurement start instruction and measurement target gas selection from the input unit 421. The input unit 421 is not limited to a button, and may be a touch panel or a keyboard, for example.

The output unit 422 is a liquid crystal display in the example of FIG. The output unit 422 displays the measurement result and the like. The output unit 422 is not limited to a liquid crystal display, and may be, for example, an LED (Light Emitting Diode) or a buzzer.

The user presses the button that is the input unit 421. As a result, gas measurement is started, and an electromagnetic wave is emitted from the reception oscillation unit 101. In addition, by providing a plurality of input units 421, the user can select the type of the measurement target gas 601.

Also, the measurement result of the measurement target gas 601 is displayed on the output unit 422. Thereby, the user can know the measurement result. By using an LED for the output unit 422, for example, information such as the end of measurement of green light emission and the measurement error of red light emission can be presented.

Further, an exit 504 is formed on the side surface 503 of the case 501. The emission port 504 emits an electromagnetic wave oscillated by the reception oscillation unit 101 included in the non-contact gas measurement device 100. Further, the information correction unit 200, the distance measurement unit 300, the system control unit 400, the analysis unit 410, and the memory 430 constituting the other non-contact gas measurement system 500 are housed in the case 501.

The analysis unit 410 refers to the past data stored in the memory 430 and analyzes the change in the state of the user's skin as time-series data including not only the measurement value at a certain time but also the past history.

Here, when the non-contact gas measurement system 500 is used by a plurality of users, for example, information such as a number specifying each user can be added to the memory 430 to identify measurement data of a plurality of users. You may hold it like this.

<Usage example of non-contact gas measurement system>
FIG. 6 is an explanatory diagram showing an example when the non-contact gas measurement system 500 of FIG. 5 is used.

When measuring the user's skin using the non-contact gas measurement system 500, as shown in FIG. 6, the user directs the input unit 421 with a finger or the like while pointing the exit 504 of the case 501 in FIG. Press.

<Configuration example of information correction unit>
FIG. 7 is an explanatory diagram illustrating an example of a configuration of the reception oscillation unit 101 and the information correction unit 200 included in the non-contact gas measurement system 500 of FIG.

The information correction unit 200 is for the reception oscillation unit 101 to acquire a correction wave that eliminates the influence other than the measurement target gas 601. The information correction unit 200 is configured by a mirror, for example.

In addition, the information correction | amendment part 200 is not limited to a mirror, What is necessary is just a reflector, an optical element, etc. which reflect electromagnetic waves.

The information correction unit 200 is provided in the vicinity of the emission port 504 provided in the case 501, and is provided so as to face the emission surface of the electromagnetic wave in the reception oscillation unit 101. In this case, some of the electromagnetic waves emitted from the reception oscillation unit 101 are reflected by the surface of the information correction unit 200. The reception oscillation unit 101 acquires the reflected wave from the information correction unit 200 as a correction wave.

When acquiring this correction wave, it is assumed that the object 600 is sufficiently far away from the measurable distance of the non-contact gas measurement system 500. That is, it is assumed that the measurement target gas is not measured.

Whether or not the object 600 is sufficiently separated is determined by, for example, the system control unit 400 of FIG. The distance measuring unit 300 in FIG. 4 measures the distance to the object 600 when acquiring the correction wave. The measurement result is output to the system control unit 400 in FIG.

The system control unit 400 determines that the object 600 is sufficiently separated when the distance measured by the distance measurement unit 300 is longer than a preset first measurement determination distance. Further, the first measurement determination distance is stored in the memory 430, for example.

After obtaining the correction wave, the reception oscillation unit 101 emits an electromagnetic wave. The electromagnetic wave passes through the measurement target gas 601 and hits the target object 600, and the reflected wave is measured. At this time, it is assumed that the distance between the reception oscillation unit 101 and the object 600 is within a measurable distance and the measurement target gas 601 can be measured.

Also here, the system control unit 400 determines whether or not the distance is measurable from the distance result measured by the distance measurement unit 300. The system control unit 400 determines that the object 600 is sufficiently approached when the distance measured by the distance measurement unit 300 is shorter than the preset second measurement determination distance. The second measurement determination distance is stored in the memory 430, for example.

The measurement wave of the measurement target gas 601 includes a correction wave. This is because a reflected wave reflected on the information correction unit 200 when the measurement target gas 601 is measured is included. However, even if a correction wave is included in the measurement wave of the measurement target gas 601, the measurement target gas 601 is measured with high accuracy by performing correction using the correction wave acquired before the measurement target gas 601 is measured. be able to.

The electromagnetic wave emitted from the reception oscillating unit 101 is converted into parallel light using the lens 103 as shown in FIG. 1, but it may be divergent light without being converted into parallel light. In that case, the lens 103 becomes unnecessary.

In the case of parallel light, the influence of errors due to the measurement position during measurement can be suppressed. In the case of diverging light, since the measurable distance is shortened, a correction wave that does not include information on the measurement target gas 601 can be easily obtained.

<Other configuration examples of the information correction unit>
FIG. 8 is an explanatory diagram illustrating another configuration example of the reception oscillation unit 101 and the information correction unit 200 included in the non-contact gas measurement system 500 of FIG. FIG. 9 is an explanatory diagram following FIG.

8 has a mirror 201 and a motor 202. The information correction unit 200 shown in FIG. The information correction unit 200 in FIG. 7 is only a mirror and the mirror is fixed. However, the information correction unit 200 in FIG. 8 includes a mirror 201 and a motor 202.

The mirror 201 is provided in the vicinity of the emission port 504 provided in the case 501 of FIG. In FIG. 8, the mirror 201 is attached so as to be rotatable about two corners above the mirror 201 as a rotation axis.

The motor 202 rotates the mirror 201 based on a mode signal output from, for example, the system control unit 400 of FIG. Examples of the mode signal output by the system control unit 400 include an information correction mode signal and a measurement mode signal. The information correction mode signal is a signal output when acquiring a correction wave, and the measurement mode signal is a signal output when measuring the measurement target gas 601.

When the information correction mode signal is output, the motor 202 rotates the mirror 201 as shown in FIG. 8 and moves the mirror 201 to a position where the output port 504 is shielded. As a result, the electromagnetic wave emitted from the reception oscillation unit 101 is reflected by the mirror 201, and a correction wave can be acquired by returning to the reception oscillation unit 101.

When the measurement mode signal is output, the motor 202 rotates the mirror 201 by about 90 ° as shown in FIG. 9 and moves the mirror 201 to a position where the mirror 201 does not block the emission port 504. That is, the mirror 201 is removed from between the reception oscillation unit 101 and the object 600. As a result, the electromagnetic wave emitted from the reception oscillation unit 101 passes through the measurement target gas 601 and is reflected by the target 600, so that the reception oscillation unit 101 can acquire the measurement wave of the measurement target gas 601. .

<Configuration example of control information management table>
Next, the control information management table 800 will be described.

FIG. 10 is an explanatory diagram showing an example of a configuration in the control information management table 800 referred to by the system control unit 400 included in the non-contact gas measurement system 500 of FIG.

The control information management table 800 is a table storing measurement control information. The measurement control information is information for measuring the measurement target gas 601 such as the frequency of an electromagnetic wave oscillated when the non-contact gas measurement apparatus 100 measures the measurement target gas 601 and information regarding acquisition of a correction wave.

As shown in FIG. 10, the control information management table 800 includes items of a measurement target gas name 801, a frequency 802, and an information correction control 803 from left to right. The measurement target gas name 801 is information for identifying the measurement target gas 601. A frequency 802 indicates a frequency for measuring the measurement target gas 601. The information correction control 803 is information indicating whether or not the information correction unit 200 needs to be controlled at the time of measurement.

However, the items in the control information management table 800 are not limited to those in FIG. 10, and information that controls the non-contact gas measuring device 100 and the information correction unit 200 may be stored. For example, a voltage value or a current value for controlling the non-contact gas measuring device 100 may be used.

The information stored in the control information management table 800 may be stored in advance in the memory 430 or may be acquired via a network or the like. In addition, information stored in the control information management table 800 may be edited by a user or the like.

If control of the non-contact gas measuring device 100 and the information correction unit 200 is not required, the control information management table 800 is not required. The measurement control information does not depend on the data structure and may have any data structure. In addition to the control information management table 800 of FIG. 10, the measurement control information can be stored by a data structure appropriately selected from a list or a database, for example.

As described above, the control information management table 800 may be stored in, for example, a memory (not shown) included in the system control unit 400 instead of the memory 430, for example. In addition, for example, it may be stored in an external storage device connected via a network.

<Configuration example of measurement result table>
FIG. 11 is an explanatory diagram showing an example of a measurement result table 900 stored in the memory 430 included in the non-contact gas measurement system 500 of FIG.

The measurement result table 900 stores the result of the non-contact gas measurement system 500 measuring the measurement target gas 601 and analyzing it using the measurement result.

The measurement result table 900 has items of date and time 901, measurement target gas name 902, frequency 903, object presence / absence 904, and value 905 from left to right as shown in FIG.

* Date 901 indicates the date of measurement or analysis. The measurement target gas name 902 indicates information for identifying the measurement target gas 601. A frequency 903 indicates a frequency used for measurement of the measurement target gas 601. The presence / absence of object 904 indicates whether or not the measurement target gas 601 was measured at the time of measurement. A value 905 indicates a value obtained as a result of measurement or analysis.

However, the items in the measurement result table 900 are not limited to those in FIG. 11, and other information acquired or generated by the non-contact gas measurement system 500 may be stored.

<Operation example of non-contact gas measurement system>
Subsequently, a measurement operation by the non-contact gas measurement system 500 will be described.

FIG. 12 is a flowchart showing an example of measurement processing of the measurement target gas 601 by the non-contact gas measurement system 500 of FIG.

In the flowchart of FIG. 12, unless otherwise specified, the system control unit 400 of FIG.

First, the user acquires input information by operating the input / output unit 420 (step S201). The input information is, for example, a measurement start instruction when the user presses a button on the input unit 421 as shown in FIG. The system control unit 400 receives input information input by the user.

When the system control unit 400 receives the input information, the distance measurement unit 300 in FIG. 4 performs distance measurement, and starts determining whether the measurement target gas 601 is within the measurement range (step S202).

Specifically, first, the system control unit 400 controls the distance measurement unit 300 to measure the distance between the reception oscillation unit 101 and the object 600. The system control unit 400 compares the distance measured by the distance measurement unit 300 with the first measurement determination distance stored in the memory 430, and determines whether the measurement target gas 601 is within or outside the measurement range.

For example, assume that the measurable distance of the non-contact gas measurement system 500 is about 10 cm. In this case, the first measurement determination distance is about 10 cm. In the measurement result, when the distance between the reception oscillation unit 101 and the object 600 is about 5 cm, it is shorter than the first measurement determination distance of about 10 cm, so it is determined that it is within the measurement range, and if the measured distance is 15 cm, it is 10 cm. It is determined that it is out of the measurement range because it is longer.

The determination result is stored in the object presence / absence 904 in the measurement result table 900 of FIG. As shown in FIG. 11, for example, “Yes” is indicated if the determination result is within the measurement range, and “No” is indicated if the determination result is outside the measurement range.

Subsequently, measurement control information is acquired from the control information management table 800 (step S203). Specifically, the system control unit 400 acquires control information necessary for measuring the measurement target gas 601 from the control information management table 800 of FIG. 10 stored in the memory 430.

Taking FIG. 10 as an example, when measuring the transdermal moisture transpiration amount as the measurement target gas 601, the frequency 802 of 0.558 THz, 0.600 THz and information from the row of the transdermal moisture transpiration amount of the measurement target gas name 801 Information of “present” of the correction control 803 is acquired.

Here, for convenience of explanation, information is acquired from the control information management table 800, but control may be performed based on information directly input by the user via the input unit 421.

The system control unit 400 determines whether to control the information correction unit 200 based on the information acquired in the process of step S203 (step S204). For example, in FIG. 10, if the information correction control 803 is “Yes” (YES), the process proceeds to step S205. If the information correction control 803 is “No” (NO), the process proceeds to step S206.

The presence / absence of the information correction control 803 depends on the configuration of the non-contact gas measurement system 500 and the measurement target gas 601. For example, in the case of the information correction unit 200 shown in FIG. On the other hand, in the case of the information correction unit 200 shown in FIG. 8, “Yes” is set when a correction wave is required, and “No” is set when no correction wave is required.

The system control unit 400 controls the information correction unit 200 (step S205). The processing in step S205 depends on the configuration of the information correction unit 200. For example, in the case of the information correction unit 200 shown in FIG. 8, the system control unit 400 controls the motor 202 of the information correction unit 200 to move the mirror 201. The mirror 201 is rotated and moved to a position where the exit 201 is shielded.

The system control unit 400 determines whether or not to control the frequency of the electromagnetic wave irradiated by the non-contact gas measuring device 100 based on the control information acquired in the process of step S203 (step S206).

Taking the control information management table 800 of FIG. 10 as an example, if the frequency 802 and the information set in the non-contact gas measuring device 100 are different, it is necessary to control, and the process proceeds to step S207.

If the frequency 802 and the information set in the non-contact gas measuring device 100 are the same, no control is required, and the process proceeds to step S208. Specifically, when 0.558 THz is acquired from the frequency 802, the non-contact gas measuring device 100 is left as it is if the non-contact gas measuring device 100 can oscillate 0.558 THz. Is controlled to oscillate 0.558 THz. If the frequency of the non-contact gas measuring device 100 is fixed, this process is not necessary.

Then, based on the frequency control information in the process of step S206, the non-contact gas measuring device 100 is controlled to set the electromagnetic wave to a specific frequency (step S207). For example, the frequency of the electromagnetic wave is changed by changing the voltage or current of the transmitter / receiver 102.

Thereby, measurement of the measurement target gas 601 is started, and the reception oscillation unit 101 acquires a current or voltage value (step S208). The measured value is stored in the value 905 of the measurement result table 900.

Referring to the control information acquired in step S203, it is determined whether all the frequencies to be measured have been measured (step S209). If there is a frequency to be measured, the process returns to step S206. When measurement of all frequencies is completed, the measurement ends.

Specifically, taking FIG. 10 as an example, when measuring the transdermal moisture transpiration amount as the measurement target gas 601, the measurement is completed at two frequencies of frequency 802 of 0.558 THz and 0.600 THz. It is judged whether or not the measurement is completed.

When the measurement is completed, the analysis unit 410 performs analysis using the value 905 of the measurement result table 900 (step S210).

Specifically, the system control unit 400 that has received the measurement instructs the analysis unit 410 to analyze the measured data, and the analysis unit 410 refers to the measurement result table 900 on the memory 430 to perform the analysis. Do.

For example, when calculating the transdermal moisture transpiration, the following calculation method is used.

In order to calculate the amount of transdermal moisture transpiration, analysis is performed using four patterns of electromagnetic waves. The first is an electromagnetic wave obtained by irradiating the object 600 with a frequency sensitive to water vapor, for example, a frequency of about 0.558 THz. Since the electromagnetic wave reflected from the skin returns, intensity including information on water vapor in the air, water vapor evaporated from the skin, absorption by the skin, and diffusion of internally reflected light is detected.

The second is an electromagnetic wave obtained by irradiating the information correction unit 200 with a frequency with high sensitivity due to water vapor, for example, a frequency of about 0.558 THz. Since only the electromagnetic wave reflected by the mirror returns, the intensity including information on water vapor in the air is detected.

3rd is the electromagnetic wave which irradiated the target object 600 with the frequency with low sensitivity to water vapor | steam, for example, the frequency of about 0.600 THz. Since the electromagnetic wave reflected from the skin returns, intensity including information on absorption by the skin and diffusion of the internally reflected light is detected.

4th is the electromagnetic wave which irradiated the information correction | amendment part 200 to the frequency with a low sensitivity by water vapor | steam, for example, the frequency of about 0.600 THz. Only the electromagnetic wave reflected by the mirror returns and can be used as a reference signal.

The first and second detection results include attenuation due to water vapor in the same air. For this reason, the first and second differences are attenuation by absorption by the skin and diffusion of internally reflected light, and attenuation by water vapor evaporated from the skin.

The difference between the third and fourth is attenuation due to absorption by the skin and diffusion of internally reflected light. Therefore, by subtracting the third and fourth differences from the first and second differences, it is possible to detect the attenuation due to the water vapor evaporated from the skin.

Subsequently, the system control unit 400 stores the analysis result in the process of step S210 in the memory 430 (step S211). For example, the analysis result may be stored in the measurement result table 900 stored in the memory 430 or may be stored in another area of the memory 430. The process of step S211 may be omitted and the process may proceed to step S212.

The system control unit 400 displays the analysis result on the output unit 422. For example, as shown in FIG. 5, the output unit 422 displays so that the user can recognize the analysis result (step S212).

Here, when there is a problem in the non-contact gas measurement system 500, the system control unit 400 detects these problems and outputs an alert to the output unit 422. For example, when the output unit 422 is a liquid crystal display, the contents of the alert are displayed. Further, when the output unit 422 is a speaker or the like, the alert is transmitted by sound such as voice or buzzer. When the output unit 422 is an LED, an alert is notified by light or the like.

As described above, by using a resonant tunneling diode or the like, it is possible to integrate the reception oscillating unit 101 that radiates and receives electromagnetic waves with a simple configuration, and the size of the non-contact gas measuring device 100 can be reduced.

In addition, since the object 600 is irradiated with electromagnetic waves and the measurement target gas 601 is measured from the intensity of the reflected wave, the reception oscillation unit 101 can be measured away from the object 600, that is, without contact with the skin surface. it can.

Thereby, measurement can be performed without bringing the non-contact gas measurement device 100 into close contact with the user's skin, etc., and high-precision measurement can be performed without limiting the measurement location. In addition, the burden on the affected area of the user can be reduced.

Furthermore, the measurement accuracy of the non-contact gas measurement system 500 can be improved by measuring the measurement target gas using the correction wave generated by the information correction unit 200.

(Embodiment 2)
<Configuration example of reception oscillation unit and information correction unit>
In the second embodiment, another configuration example in the reception oscillation unit and the information correction unit will be described.

FIG. 13 is an explanatory diagram illustrating an example of the configuration of the reception oscillation units 101 and 101a and the information correction unit 200 according to the second embodiment.

In FIG. 7 of the first embodiment, the measurement wave and the correction wave are respectively acquired by one reception oscillation unit 101. However, in the case of FIG. 13, the reception oscillation which is the first reception oscillation unit. In addition to the unit 101, a reception oscillation unit 101a which is a second reception oscillation unit is newly provided.

In FIG. 13, the reception oscillation unit 101 is used when measuring the measurement target gas 601 and the reception oscillation unit 101a is used when measuring the correction wave. Since the configuration of the other non-contact gas measurement system 500 is the same as that of FIG. 4 of the first embodiment, description thereof is omitted.

The information correction unit 200 includes, for example, a mirror and is provided so as to face the emission surface of the electromagnetic wave in the reception oscillation unit 101a. The information correction unit 200 acquires a correction wave for the reception oscillation unit 101a to remove the influence of a gas other than the measurement target gas 601. The reception oscillation unit 101a irradiates the information correction unit 200 with an electromagnetic wave, and acquires the reflected wave as a correction wave.

The reception oscillation unit 101 irradiates the object 600 to be measured with the electromagnetic wave, receives the reflected wave irradiated by the object 600, and acquires a current or voltage value corresponding to the intensity of the received reflected wave. The electromagnetic wave emitted from the reception oscillation unit 101 passes through the measurement target gas 601, is reflected by the target object 600, and returns to measure the measurement wave.

As described above, the correction wave can be obtained more accurately by providing the reception oscillation unit 101a. As a result, the measurement target gas 601 can be measured with higher accuracy, and the reliability of the non-contact gas measurement system 500 can be improved.

(Embodiment 3)
In the third embodiment, a configuration in which the non-contact gas measurement system 500 is provided in a mobile terminal such as a smartphone or a tablet will be described.

<Configuration example of mobile terminal>
FIG. 14 is an explanatory diagram showing an example of the configuration of the mobile terminal 560 according to the third embodiment.

The mobile terminal 560 includes a non-contact gas measurement system 500, an imaging unit 440, and a communication unit 450. The non-contact gas measurement system 500 has the same configuration as the non-contact gas measurement system 500 of FIG. 4 of the first embodiment.

The imaging unit 440 is a camera that acquires an image. The imaging unit 440 is used for a technique for matching measurement positions, which will be described later, and a measurement specifying technique. The communication unit 450 is wirelessly connected to a communication line such as an Internet line or a telephone communication line, and performs communication with the outside.

FIG. 14 shows an example in which the communication unit 450 is connected to an externally connected server 460. The communication unit 450 transmits and receives information acquired by the non-contact gas measurement device 100, the distance measurement unit 300, the imaging unit 440, and the like to the server 460, for example.

The imaging unit 440 is, for example, an R (Red) G (Green) B (Blue) camera having sensitivity to visible light wavelengths, an infrared light camera having sensitivity to infrared light, or an RGB camera having sensitivity to infrared to visible light wavelengths. and so on. Alternatively, it may be an RGB camera having sensitivity to the wavelength of ultraviolet light from visible light to ultraviolet light, or from infrared to visible light.

Note that the input / output unit 420 included in the non-contact gas measurement system 500 may use an input / output unit such as a touch panel included in the mobile terminal 560.

In FIG. 14, the non-contact gas measurement system 500 is provided in the mobile terminal 560 such as a smartphone. However, for example, the imaging unit 440 and the communication unit 450 that are functions of the mobile terminal 560 are newly added to the non-contact gas measurement system 500. A configuration may be added.

<Example of mobile terminal overview>
FIG. 15 is an explanatory diagram showing an example of an overview of the mobile terminal 560 of FIG. FIG. 15A shows the front surface of the mobile terminal 560, and FIG. 15B shows the back surface of the mobile terminal 560. Here, the surface on which the input / output unit 420 is provided is the front surface of the mobile terminal 560, and the surface facing it is the back surface.

In the example of FIG. 15, the imaging unit 440 can capture an image from either the front side of the mobile terminal 560 shown in FIG. 15A or the back side of the mobile terminal 560 shown in FIG. It has a configuration.

Similarly, in the example of FIG. 15, the reception oscillating unit 101 also emits and receives electromagnetic waves from the front side of the mobile terminal 560 shown in FIG. 15A and the back side shown in FIG. It is the structure which can be performed.

<Example of input / output display>
FIG. 16 is an explanatory diagram illustrating an example of display by the input / output unit 420 included in the mobile terminal 560 of FIG.

In this case, the input / output unit 420 is composed of, for example, a touch panel display. In the input / output unit 420, as shown in FIG. 16A, for example, a menu screen on which the user selects a measurement target, an image captured by the imaging unit 440 as shown in FIG. Display the analysis results.

In the menu screen shown in FIG. 16 (a), the measurement target gas name is displayed so that the user can select it. By associating the menu button with the control information management table 800 of FIG. 10 of the first embodiment, for example, the measurement target gas 601 selected by the user can be easily given to the input information in the process of step S201 of FIG. Can do.

Also, as a measurement result, as shown in FIG. 16 (b), for example, a graph displaying transdermal moisture transpiration amount in time series, a measurement position marker indicating the previous measurement position acquired by the imaging unit 440, etc. You may make it display on 420. FIG.

<Operation example of mobile terminal>
FIG. 17 is a flowchart showing an example of the gas measurement operation by the mobile terminal 560 of FIG.

First, input information is acquired (step S301). The processing in step S301 is the same as the processing in step S201 in FIG. 12 of the first embodiment. Subsequently, the imaging unit 440 images the measurement site of the user, and the system control unit 400 analyzes the captured image (step S302).

Thereby, it is possible to recognize whether the measurement position is made coincident with the previous place, and whether the measurement by the reception oscillation unit 101 is measured by the front surface or the back surface of the portable terminal 560.

The technology for matching the measurement position will be explained.

When performing long-term monitoring, it is desirable to measure approximately the same part with the same measurement position. Therefore, the measurement site is specified from the image results captured by the imaging unit 440 last time or so far, and the result is displayed on the output unit 422 to notify the user.

A measurement position marker may be displayed on the input / output unit 420, or information on the difference between the measurement position marker and the current position captured by the imaging unit 440 using a speaker or the like is used as sound, for example, a change in pitch, volume It is also possible to notify by a change in sound or voice.

A measurement specifying technique for specifying whether the measurement by the reception oscillating unit 101 is measured by the front side or the back side of the mobile terminal 560 will be described.

For example, the object 600 is photographed on the imaging unit 440 in FIG. 15A, that is, the front side of the portable terminal 560, or the object 600 is captured on the imaging unit 440 in FIG. It is determined whether the image is captured on the side, and the reception oscillation unit 101 performs measurement on the imaged surface side.

Thereby, it is possible to easily shoot both when the measurement target gas 601 is on the front side of the portable terminal and on the back side. Specifically, when measuring an arm, the reception oscillation unit 101 on the back side of FIG. 15B is used, and when measuring the face or the like, the reception oscillation unit 101 on the front side of FIG. 15A is used. To do. Accordingly, the user can perform measurement while looking at the display that is the input / output unit 420.

In FIG. 17, when the analysis of the image is completed, the measurement target gas 601 is measured (step S303). The processing in step S303 is the same as the processing in steps S202 to S209 in FIG.

Subsequently, the measurement result is transmitted (step S304). The system control unit 400 transfers the measurement result and the like to the server 460 externally connected by the communication unit 450. Thereafter, the server 460 analyzes the transferred measurement result (step S305).

Specifically, the measurement result acquired in the process of step S304 and the image analysis result in the process of step S302 are transmitted from the communication unit 450 to the server 460. Server 460 performs all or part of the complex analysis. The specific process is the same as the process of step S210 in FIG. Thereby, the processing load of the non-contact gas measurement system 500 can be reduced.

The communication unit 450 acquires the result analyzed by the server 460 (step S306). The system control unit 400 displays the result acquired from the server 460 on the input / output unit 420 (step S307). At this time, the system control unit 400 stores the result acquired from the server 460 in the memory 430.

Thereby, by providing the non-contact gas measurement system 500 in the portable terminal 560, the convenience of the user can be further improved. Further, since the analysis of the measurement target gas 601 is performed by the external server 460, the measurement target gas 601 can be analyzed in a shorter time.

In addition, since the non-contact gas measurement system 500 does not need a function of analyzing the measurement target gas 601, the configuration of the non-contact gas measurement system 500 can be simplified, contributing to downsizing and cost reduction. be able to.

(Embodiment 4)
<Configuration example of non-contact gas measuring device>
FIG. 18 is an explanatory diagram showing an example of the configuration of the non-contact gas measuring apparatus 100 according to the fourth embodiment.

In FIG. 8 of the first embodiment, the information correction unit 200 is configured by the mirror 201 and the motor 202. However, in the fourth embodiment, the optical element 107 constituting the information correction unit 200 shown in FIG. In this example, the visible light source 104 serves as the mirror 201 and the motor 202 so that a driving unit such as a motor is unnecessary.

The non-contact gas measuring apparatus 100 includes a reception oscillation unit 101, a control unit 110, and an information correction unit 200 as shown in FIG. Since the reception oscillation unit 101 is the same as that of the first embodiment shown in FIG.

The information correction unit 200 includes a visible light source 104, a lens 105, an ITO (Indium Tin Oxide) 106, and an optical element 107.

The visible light source 104 that is an electromagnetic wave irradiation unit emits an electromagnetic wave of visible light, that is, visible light based on the control of the control unit 110. The lens 105 irradiates the optical element 107 with the light emitted from the visible light source 104 as parallel light. The ITO 106 has an optical characteristic that reflects the electromagnetic wave emitted from the reception oscillation unit 101 and transmits the light emitted from the visible light source 104.

The optical element 107 changes the transmittance by the visible light source 104. As the optical element 107, for example, a semiconductor such as Si or GaAs or a substance exhibiting photoinduced metal-insulator transition, such as vanadium oxide, is used instead of the semiconductor.

Here, when the light emitted from the visible light source 104 is irradiated onto the optical element 107, carriers due to the photoelectric effect of the semiconductor are generated. The carriers in the semiconductor behave like a metal for the electromagnetic waves generated by the transmitter / receiver 102.

This prevents electromagnetic waves from passing through the region where the carrier exists. Therefore, the optical element 107 can be switched to function as a reflection plate or a transmission plate depending on the presence or absence of light emitted from the visible light source 104.

The electromagnetic wave oscillated by the transmitter / receiver 102 is irradiated perpendicularly to the object 600, thereby passing through the measurement target gas 601 and returning the reflected wave to the receiver / transmitter 102. Here, the object 600 is a user's skin or the like.

The control unit 110 controls the reception oscillation unit 101 and the visible light source 104. The electromagnetic wave oscillated by the reception oscillation unit 101 uses a frequency that is easily absorbed by gas. For example, when the object 600 is skin and the measurement target gas 601 is water vapor evaporating from the skin, a frequency such as about 0.56 THz or about 0.75 THz is suitable.

When the non-contact gas measurement system 500 is configured using the non-contact gas measurement device 100 shown in FIG. 18, the non-contact gas measurement system 500 has the same configuration as that of FIG. 4 of the first embodiment.

Further, the external appearance of the non-contact gas measurement system 500 using the non-contact gas measurement device 100 shown in FIG. 18 is as shown in FIG. 5 of the above embodiment. In that case, the optical element 107 is provided in the vicinity of the emission port 504 provided in the case 501 shown in FIG.

Switching of the optical characteristics of the optical element 107 by the visible light source 104 is performed based on a mode signal output from the system control unit 400 shown in FIG.

Also in this case, examples of the mode signal output by the system control unit 400 include an information correction mode signal and a measurement mode signal. The information correction mode signal is a signal output when acquiring a correction wave, and the measurement mode signal is a signal output when measuring the measurement target gas 601.

The information correction mode signal or the measurement mode signal output from the system control unit 400 is input to the control unit 110, respectively. The control unit 110 controls to turn on the visible light source 104 when the information correction mode signal is input, and controls to turn off the visible light source 104 when the measurement mode signal is input.

<Time waveform of each functional part of non-contact gas measuring device>
FIG. 19 is an explanatory diagram illustrating an example of a time waveform of each functional unit in the non-contact gas measuring apparatus 100 of FIG.

19, from the top to the bottom, the mode signal output from the system control unit 400 of FIG. 4 with respect to time, the change in light intensity with respect to the time of the visible light source 104, and the change in electromagnetic wave intensity generated by the reception oscillation unit 101 with respect to time. 2 shows a change in transmittance with respect to time of the optical element 107 and a change in response of a received signal received by the reception oscillating unit 101.

19, when an information correction mode signal is output from the system control unit 400, the visible light source 104 emits visible light. When the visible light is irradiated to the optical element 107, the optical element 107 functions as a reflecting plate.

Thereby, the electromagnetic wave emitted from the reception oscillating unit 101 is reflected by the optical element 107 and returned to the reception oscillating unit 101 to obtain a correction wave. This correction wave is an electromagnetic wave.

For example, when measuring the water vapor evaporated from the skin as the measurement target gas, the amount of water vapor in the air varies depending on the environment in which the user exists, that is, the measurement environment, which may affect the measurement value. For this reason, the influence of water vapor due to the environment is removed using the correction wave acquired by the information correction unit 200.

When the measurement mode signal is output from the system control unit 400, the visible light source 104 is turned off. When no visible light is irradiated, the optical element 107 functions as a transmission plate.

Therefore, since the electromagnetic wave emitted from the reception oscillation unit 101 passes through the measurement target gas 601 and is reflected by the target 600, the reception oscillation unit 101 can acquire the measurement wave of the measurement target gas 601.

Further, the transmitter / receiver 102 continuously emits the electromagnetic wave having the electromagnetic wave intensity Iin in both the period in which the optical element 107 does not function as the transmission plate and the period in which the optical element 107 functions as the transmission plate.

When the optical element 107 functions as a reflector, the reception oscillation unit 101 acquires a correction wave that reduces measurement errors due to the environment. Further, when the optical element 107 is operating as a transmission plate, in the reception oscillation unit 101, the transmitter / receiver 102 detects a reflected wave obtained by measuring the measurement target gas.

<Example of measurement processing>
FIG. 20 is a flowchart illustrating an example of measurement processing of the measurement target gas 601 by the non-contact gas measurement system 500 configured using the non-contact gas measurement device 100 of FIG. In the flowchart of FIG. 20, unless otherwise specified, the system control unit 400 of FIG.

Also, the processing in steps S401 to S404 in FIG. 20 is the same as the processing in steps S201 to S204 in FIG.

In the process of step S404, when it is determined that the information correction unit 200 is controlled, the system control unit 400 controls the information correction unit 200 (step S405).

In the process of step S405, the information correction unit 200 outputs an information correction mode signal to the control unit 110. When the information correction mode signal is input, the control unit 110 performs control so that the visible light source 104 is turned on. Thereby, the optical element 107 functions as a reflector.

Subsequently, the system control unit 400 controls the reception oscillation unit 101 to oscillate and receive an electromagnetic wave, thereby starting measurement of the measurement target gas 601 and the reception oscillation unit 101 obtains a current or voltage value. (Step S406). As described above, a correction wave is acquired by the optical element 107 functioning as a reflector.

Thereafter, the system control unit 400 determines whether or not to perform frequency control for information correction (step S407). The frequency control determination technique in the process of step S407 will be described by taking as an example the case where the transdermal moisture transpiration amount is measured as the measurement target gas 601.

The system control unit 400 determines whether or not to control the frequency of the electromagnetic wave emitted by the non-contact gas measurement device 100 based on the measurement control information acquired from the control information management table 800 of FIG. 10 in the process of step S403. judge.

Taking the control information management table 800 in FIG. 10 as an example, if the frequency 802 and the frequency set in the non-contact gas measuring device 100 are different, it is necessary to control the frequency of the electromagnetic wave. It determines with YES.

On the other hand, when the frequency 802 matches the frequency set in the non-contact gas measuring device 100, it is not necessary to control the frequency of the electromagnetic wave. Therefore, in the process of step S403, it determines with NO and progresses to the process of step S408.

When it is determined in step S407 that it is not necessary to control the frequency of the electromagnetic wave, or when it is determined in step S404 that the information correction unit 200 is not to be controlled, the system control unit 400 controls the control unit 110. A measurement mode signal is output, and the visible light source 104 of the information correction unit 200 is controlled to be turned off. Since no visible light is irradiated, carriers due to the photoelectric effect of the semiconductor are not generated in the optical element 107, and the optical element 107 functions as a transmission plate.

Subsequently, the system control unit 400 determines whether or not to control the frequency of the electromagnetic wave irradiated by the non-contact gas measuring device 100 based on the control information acquired in the process of step S403 (step S408).

Here, taking the control information management table 800 of FIG. 10 as an example, if the frequency 802 and the frequency set in the non-contact gas measuring device 100 are different, it is necessary to control, so the process proceeds to step S409. .

If the frequency 802 in the control information management table 800 is the same as the frequency set in the non-contact gas measuring device 100, the control is unnecessary, and the process proceeds to step S410.

Specifically, when 0.558 THz is acquired from the frequency 802, the non-contact gas measuring device 100 is left as it is if it can oscillate 0.558 THz, and if different, the non-contact gas measurement is performed in the process of step S409. The device 100 is controlled so as to be able to oscillate 0.558 THz. If the frequency of the non-contact gas measuring device 100 is fixed, this process is not necessary.

Then, based on the frequency control information in the process of step S408, the system control unit 400 controls the non-contact gas measuring device 100 to set the electromagnetic wave to a specific frequency (step S409). For example, the frequency of the electromagnetic wave is changed by changing the voltage or current of the transmitter / receiver 102.

Thereby, measurement of the measurement target gas 601 is started, and the reception oscillation unit 101 acquires a current or voltage value (step S410). The measured value is stored in the value 905 of the measurement result table 900 of FIG.

The system control unit 400 refers to the control information acquired in step S403, and determines whether or not all the frequencies to be measured have been measured (step S411). If there is a frequency to be measured, the process returns to step S408).

When the measurement of all frequencies is completed, the measurement is finished. Specifically, taking FIG. 10 as an example, if the transcutaneous moisture transpiration is to be measured as the measurement target gas 601, whether or not the measurement has been completed at two frequencies of frequency 802 of 0.558 THz and 0.600 THz. Repeat until the measurement is completed.

When the measurement is completed, the analysis unit 410 performs analysis using the value 905 in the measurement result table 900 of FIG. 11 (step 412). Hereinafter, the processing in steps S412 to S414 in FIG. 20 is the same as the processing in steps S210 to S212 in FIG.

Here, the measurement result by the non-contact gas measuring device 100 shown in FIG. 18 usually includes noise derived from temperature and vibration. Therefore, in order to obtain a more accurate measurement result, a measurement technique for removing noise from the signal component is required.

As this measurement technique, lock-in measurement is used in which a signal component spectrum and a noise spectrum are separated by modulating a signal. For example, there is a technique that uses an optical chopper for modulation of this signal.

The technology using this chopper performs modulation by rotating the optical chopper and turning on / off the electromagnetic wave emitted from the transmitter / receiver 102 at the rotational frequency. For this reason, a motor for rotating the optical chopper is required.

<Example of electromagnetic wave modulation>
Therefore, a technique for performing modulation without using a mechanical drive such as a motor using the non-contact gas measuring device 100 of FIG. 18 will be described with reference to FIG.

FIG. 21 is an explanatory diagram showing changes in electromagnetic wave intensity and transmittance when the visible light source is modulated by the non-contact gas measuring device 100 of FIG.

FIG. 21 shows the timing of turning on / off the visible light source 104, the electromagnetic wave emitted from the reception oscillating unit 101, and the change in the transmittance of the optical element 107 from above to below.

21, the visible light source 104 emits visible light having a visible light intensity Ivin by repeatedly turning it off and on. The lighting and extinguishing are repeated over time at, for example, about 1 kHz. The control unit 110 controls turning off and turning on the visible light source 104.

At this time, the reception oscillating unit 101 continuously emits the electromagnetic wave having the electromagnetic wave intensity Iin. The control of the reception oscillation unit 101 is performed by the control unit 110.

The transmittance of the optical element 107 changes as the visible light source 104 is turned on and off. As shown in the drawing, when the visible light source 104 is turned on, the optical element 107 functions as a reflection state 2201, that is, a reflection plate. When the visible light source 104 is turned off, the optical element 107 functions as a transmission state 2202, that is, a transmission plate.

Thus, when the control unit 110 changes the visible light intensity Ivin of the visible light source 104 over time, the optical element 107 can be controlled over time as shown in FIG.

Thereby, since the electromagnetic wave having the electromagnetic wave intensity Iin emitted from the reception oscillating unit 101 is modulated by the optical element 107 at a frequency of about 1 kHz, the spectrum of the signal component and the spectrum of the noise can be well separated. As a result, a more accurate measurement result can be obtained.

<Other examples of measurement processing>
FIG. 22 is a flowchart showing another example of the measurement process of FIG.

In the flowchart of FIG. 22, unless otherwise specified, the system control unit 400 of FIG.

In the flowchart of FIG. 20 described above, the optical characteristics of the optical element 107 change only in the information correction mode signal from the system control unit 400. On the other hand, in the flowchart of FIG. 22, by adding a new process between the process of step S507 and the process of step S509, the optical characteristics are changed in the two modes of the information correction mode signal and the measurement mode signal.

Note that the processing in steps S501 to S507 in FIG. 22 is the same as the processing in steps S401 to S407 in FIG. 20, and the processing in steps S509 to S515 in FIG. 22 is the same as the processing in steps S408 to S414 in FIG. is there. Therefore, FIG. 20 and FIG. 22 are all the same except for the processing in step S508.

The process of step S508 in FIG. 22 is performed by controlling the reception oscillation unit 101, the visible light source 104, and the optical element 107 in terms of time as described with reference to FIG. Signal modulation of the electromagnetic wave of the oscillation unit 101 is performed.

Here, an example is shown in which the electromagnetic wave of the reception oscillating unit 101 is modulated only in the measurement mode. However, for example, by performing modulation control by the process of step S508 between the process of step S504 and the process of step S505, It is possible to modulate the electromagnetic wave of the reception oscillating unit 101 even during measurement in the correction mode.

Thus, by measuring the measurement target gas 601 emitted from the object 600 with electromagnetic waves while performing signal modulation of the electromagnetic waves of the reception oscillating unit 101, only the electromagnetic waves near the modulated frequency can be measured.

As described above, more accurate measurement can be performed. Further, it can be used for biometric authentication such as detecting the presence or absence of a biometric.

(Embodiment 5)
<Example of film thickness measurement>
FIG. 23 is an explanatory diagram showing an example of film thickness measurement by the non-contact gas measurement device 100 according to the fifth embodiment.

Note that the non-contact gas measurement device 100 shown in FIG. 23 is the same as the non-contact gas measurement device 100 shown in FIG. 18 of the fourth embodiment, and thus the description of the non-contact gas measurement device 100 is omitted.

FIG. 23 shows a case where the film thickness of the object 600 having a layer structure is measured. The electromagnetic wave 603 emitted from the transmitter / receiver 102 by the layer structure of the object 600 is reflected by the electromagnetic wave 603 reflected on the surface of the film. 2 shows an example in which two electromagnetic waves generated by the electromagnetic wave 604 reflected on the back surface are generated.

For the principle of film thickness measurement, for example, the peak valley method using the light interference effect is used.

In this peak valley method, the electromagnetic wave 603 reflected from the surface and the electromagnetic wave 604 reflected from the back surface of the object 600 interfere with each other, and the intensity of the interference increases when the phases of the two electromagnetic waves coincide with each other. This is a film thickness measurement technique utilizing the property that the strength of the film is weakened. The film thickness measurement using the peak valley method or the like is executed by, for example, the analysis unit 410 in FIG.

<Principle of film thickness measurement>
FIG. 24 is an explanatory diagram for explaining the principle of film thickness measurement on the object 600 in FIG.

FIG. 24 is a graph in which the horizontal axis represents frequency and the vertical axis represents the intensity of interference signals. FIG. 24 (a) shows the principle of film thickness measurement by the peak valley method, and FIG. 24 (b) shows the principle of film thickness measurement by the curve fit method.

In the peak valley method, the film thickness is calculated from the two frequencies at which the interference signal intensity is maximum using the following equation (1).

Here, d is the film thickness of the object 600, n is the refractive index of the object 600, c is the speed of light, and Δf is the difference between two frequencies (f2−f1) at which the interference signal intensity is maximum.

For example, when the refractive index of human skin is about 2.0 and the film thickness d is about 100 μm to 300 μm, which is a general skin layer, the difference between the two frequencies at which the interference signal intensity becomes maximum is 0.25 THz to 0. .75 THz or so.

Here, what is desired to be measured is the film thickness d, but the refractive index n of the object 600 is not necessarily known. However, in order to monitor the object 600 and observe changes in its state or time, the refractive index of the object 600 may be regarded as a fixed value that does not change, and nd may be considered as d ′. For example, when monitoring different objects 600, the measurement values may be managed for each object 600.

Thus, by measuring the skin thickness, etc., it is possible to determine the rough skin of the user. For example, in the case of rough skin, it is considered that the epidermis layer is thin due to the influence of the rough skin. As a result, convenience for the user can be improved.

On the other hand, in the curve fit method, as shown in FIG. 24B, the film thickness is not measured by the difference between the two frequencies at which the interference signal intensity is maximum, but the frequencies f1 to f4 are measured while changing the frequency. .

Then, the film thickness is calculated by curve fitting so that the difference from the estimated value of the interference signal intensity with respect to the frequency obtained from the film structure modeling the change in the intensity of the interference signal with respect to the measured frequency is reduced. is there.

It should be noted that the film thickness measurement in the non-contact gas measuring apparatus 100 according to the fifth embodiment is effective not only for measuring the thickness of the skin but also for measuring the thickness of the coating film of a car, for example.

As described above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the above-described embodiment, and includes various modifications. For example, if a monocular camera that can simultaneously acquire a color image and a distance image is used, the functions of the imaging unit 440 and the distance measurement unit 300 in FIG. A system can be realized.

DESCRIPTION OF SYMBOLS 100 Non-contact gas measuring device 101 Reception oscillation part 101a Reception oscillation part 102 Receiver / transmitter 103 Lens 104 Visible light source 105 Lens 106 ITO
107 optical element 110 control unit 200 information correction unit 201 mirror 202 motor 300 distance measurement unit 400 system control unit 401 system bus 410 analysis unit 420 input / output unit 421 input unit 422 output unit 430 memory 440 imaging unit 450 communication unit 460 server 500 Contact gas measurement system 560 Portable terminal 600 Object 601 Measurement target gas

Claims (15)

1. A receiving oscillation unit for emitting and detecting electromagnetic waves;
   An electromagnetic wave irradiation unit that emits an electromagnetic wave having a frequency different from that of the electromagnetic wave emitted by the reception oscillation unit;
   An optical element that changes the transmittance based on the electromagnetic wave emitted from the electromagnetic wave irradiation unit and transmits or reflects the electromagnetic wave emitted from the reception oscillation unit;
   A control unit for controlling the reception oscillation unit and the electromagnetic wave irradiation unit;
   With
   The control unit stops the electromagnetic wave of the electromagnetic wave irradiation unit when measuring an object, changes the transmittance so that the optical element functions as a transmission plate, and transmits the electromagnetic wave transmitted through the optical element. Control to irradiate the object,
   The said receiving oscillation part is a non-contact gas measuring device which outputs the value of the voltage or electric current which changes according to the intensity | strength of the said electromagnetic wave reflected from the said target object as a measured value.
2. In the non-contact gas measuring device according to claim 1,
   The control unit emits the electromagnetic wave from the electromagnetic wave irradiation unit when acquiring a corrected electromagnetic wave for correcting the measurement value, changes the transmittance so that the optical element functions as a reflector, and converts the electromagnetic wave to the electromagnetic wave. Control to reflect from the optical element,
   The non-contact gas measuring device, wherein the reception oscillating unit outputs, as a correction value, a voltage or current value that changes according to the intensity of the electromagnetic wave reflected from the optical element.
3. In the non-contact gas measuring device according to claim 1 or 2,
   The reception oscillation unit is a non-contact gas measurement apparatus including an electronic device that oscillates electromagnetic waves in a negative resistance region.
4. The non-contact gas measuring device according to any one of claims 1 to 3,
   The non-contact gas measuring device, wherein the electromagnetic wave emitted from the electromagnetic wave irradiation unit is visible light.
5. A non-contact gas measuring device for measuring a measurement target gas emitted from an object using electromagnetic waves;
   An analysis unit that analyzes the measurement target gas from a measurement value measured by the non-contact gas measurement device;
   A system control unit for controlling operations of the non-contact gas measuring device and the analysis unit;
   Have
   The non-contact gas measuring device is
   A receiving oscillation unit for emitting and detecting electromagnetic waves;
   An electromagnetic wave irradiation unit that emits an electromagnetic wave having a frequency different from that of the electromagnetic wave emitted by the reception oscillation unit;
   An optical element that transmits or reflects the electromagnetic wave emitted by the reception oscillation unit, the transmittance is changed based on the electromagnetic wave emitted by the electromagnetic wave irradiation unit;
   A control unit for controlling the reception oscillation unit and the electromagnetic wave irradiation unit;
   With
   The control unit stops the electromagnetic wave of the electromagnetic wave irradiation unit when measuring an object, changes the transmittance so that the optical element functions as a transmission plate, and transmits the electromagnetic wave transmitted through the optical element. Control to irradiate the object,
   The said receiving oscillation part is a non-contact gas measurement system which outputs the value of the voltage or electric current which changes according to the intensity | strength of the said electromagnetic wave reflected from the said object to the said analysis part as a measured value.
6. The non-contact gas measurement system according to claim 5,
   The control unit emits the electromagnetic wave from the electromagnetic wave irradiation unit when acquiring a corrected electromagnetic wave for correcting the measurement value, changes the transmittance so that the optical element functions as a reflector, and converts the electromagnetic wave to the electromagnetic wave. Control to reflect from the optical element,
   The non-contact gas measurement system, wherein the reception oscillating unit outputs, as a correction value, a voltage or current value that changes according to the intensity of the electromagnetic wave reflected from the optical element, as a correction value.
7. The non-contact gas measurement system according to claim 5 or 6,
   The reception oscillation unit is a non-contact gas measurement system including an electronic device that oscillates electromagnetic waves in a negative resistance region.
8. The non-contact gas measurement system according to any one of claims 5 to 7,
   The non-contact gas measurement system, wherein the electromagnetic wave emitted from the electromagnetic wave irradiation unit is visible light.
9. The non-contact gas measurement system according to claim 5,
   The said control part is a non-contact gas measurement system which modulates the said electromagnetic wave irradiated to the said object by turning on and off the said electromagnetic wave which the said electromagnetic wave irradiation part emits, when measuring the measured value of a target object.
10. The non-contact gas measurement system according to claim 9,
    The said control part is a non-contact gas measurement system which sets the frequency of the said electromagnetic wave with which the said target object is irradiated based on control of the said system control part.
11. The non-contact gas measurement system according to claim 9 or 10,
    The said analysis part is a non-contact gas measurement system which measures the film thickness of the said target object from the measured value which the said reception oscillation part outputs.
12. A reception oscillation unit that performs emission and detection of electromagnetic waves, an electromagnetic wave irradiation unit that emits electromagnetic waves with a frequency different from the electromagnetic waves emitted by the reception oscillation unit, and the transmittance changes based on the electromagnetic waves emitted by the electromagnetic wave irradiation unit, Non-contact gas measurement device comprising an optical element that transmits or reflects the electromagnetic wave emitted by the reception oscillation unit, and a control unit that controls the reception oscillation unit and the electromagnetic wave irradiation unit, and the non-contact gas measurement device measured A non-contact gas measurement method by a non-contact gas measurement system comprising: an analysis unit that analyzes a measurement target gas from a measurement value; and a system control unit that controls the operation of the non-contact gas measurement device and the analysis unit. ,
    The reception oscillating unit irradiating electromagnetic waves;
    The control unit stops the electromagnetic wave of the electromagnetic wave irradiation unit, changes the transmittance so that the optical element functions as a transmission plate, and irradiates the object with the electromagnetic wave transmitted through the optical element. Controlling step;
    The reception oscillation unit outputs a voltage or current value that changes according to the intensity of the electromagnetic wave reflected from the object to the analysis unit as a measurement value;
    The analysis unit analyzing the measurement target gas from the measurement value measured by the non-contact gas measurement device;
    A non-contact gas measuring method.
13. The non-contact gas measuring method according to claim 12,
    The non-contact gas measuring method which has a step which the said analysis part measures the film thickness of the said target object from the measured value which the said non-contact gas measuring device measured.
14. The non-contact gas measuring method according to claim 12,
    The control unit emits the electromagnetic wave from the electromagnetic wave irradiation unit and changes the transmittance so that the optical element functions as a reflector;
    The reception oscillation unit outputs a voltage or current value that varies according to the intensity of the electromagnetic wave reflected from the optical element as a correction value to the analysis unit;
    The analysis unit correcting the measurement value error using the correction value acquired by the reception oscillation unit;
    A non-contact gas measuring method.
15. The non-contact gas measuring method according to claim 12,
    The reception oscillating unit irradiating electromagnetic waves;
    The electromagnetic wave irradiation unit emits an electromagnetic wave having a frequency different from that of the electromagnetic wave emitted from the reception oscillation unit, and turns on and off the electromagnetic wave emitted from the electromagnetic wave irradiation unit, thereby irradiating the electromagnetic wave on the object. Modulating and emitting the modulated electromagnetic wave to the object;
    The reception oscillation unit receives an electromagnetic wave reflected from the object, and outputs a voltage or current value that changes according to the intensity of the received electromagnetic wave as a measurement value to the analysis unit;
    A non-contact gas measuring method.

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