WO2019181243A1 - Ultrasonic wave inspection method, ultrasonic wave inspection device, and high-pressure fuel supply pump manufacturing method using ultrasonic wave inspection method - Google Patents

Abstract

The purpose of the present invention is to detect a defect that is present above or under an interface of two members in a laser welding portion of a lap joint. To achieve this, a transverse wave generation laser (LaTT) and a longitudinal wave generation laser (LaTL) are irradiated to different locations of one side of a welding line (We). A transverse wave reception laser (LaRT) and a longitudinal wave reception laser (LaRL) are irradiated to different locations of another side of the welding line (We). A defect (De1) at a location that is deeper than an interface (SB) between a first member (201) and a second member (202) is detected by detecting a transverse ultrasonic wave (WT) with the transverse wave reception laser (LaRT). A defect (De3) at a location that is shallower than the interface (SB) is detected by detecting a longitudinal ultrasonic wave (WL) with the longitudinal wave reception laser (LaRL).

Description

Ultrasonic inspection method, ultrasonic inspection apparatus, and method for manufacturing high-pressure fuel supply pump using ultrasonic inspection method

The present invention relates to an ultrasonic inspection method and ultrasonic inspection apparatus for detecting defects in a laser weld with ultrasonic waves by laser irradiation, and a high-pressure fuel supply pump for manufacturing a high-pressure fuel supply pump using the ultrasonic inspection method. And methods.

As a background art of the present invention, there are known a welding system disclosed in Japanese Patent Laid-Open No. 2012-006078 (Patent Document 1) and an ultrasonic flaw detection method for a welded joint disclosed in Japanese Patent Laid-Open No. 2017-161441 (Patent Document 2).

Patent Document 1 discloses a welding system that detects a welding failure by a laser ultrasonic method. This welding system irradiates the surface of a welding target after welding with a welding mechanism, a transmission laser light source, and a transmission laser light generated by the transmission laser light source while moving with the welding mechanism with respect to the welding target. A transmission optical mechanism for generating a transmission ultrasonic wave, a reception laser light source for generating a reception laser beam and irradiating the welding target to detect a reflected ultrasonic wave obtained by reflection of the transmission ultrasonic wave; A receiving optical mechanism for condensing the laser beam scattered and reflected on the surface of the welding target by irradiating the surface of the welding target with welding laser light while moving with respect to the welding target together with the welding mechanism; And an interferometer for interferometric measurement of the scattered / reflected laser beam (see summary).

In addition, the ultrasonic flaw detection method for welded joints in Patent Document 2 is an ultrasonic flaw detection method for flaws in welded joints using ultrasonic waves, including a creeping wave method, a longitudinal wave oblique angle method, a round trip method, The flaw detection is performed by a combination of at least two of the shear wave oblique angle methods (see summary). Patent Document 2 describes that the following (a) to (f) are assumed as the types of defects, and whether or not detection is possible was verified.
(A) imitating a surface defect such as a crack in the welded portion (b) imitating a poor fusion of the groove surface (c) imitating a worm hole and a blow hole generated from a gap with the backing metal (D) imitating a surface defect such as a crack near the weld surface (e) imitating a lack of penetration defect on the groove root surface (f) a wormhole and blowhole generated in the second layer welding As a result, (a), (c), (d) and (f) near the surface can be detected by the creeping wave method, and by the creeping wave method by the longitudinal wave oblique angle method and the round trip method. It is described that (a) and (c) can be detected in a region deeper than the depth, and (b) and (e) can be detected by the transverse wave oblique angle method.

JP 2012-006078 A JP 2017-161441

Patent Document 1 shows welding in a butt joint, and does not consider welding in a lap joint in which two members are overlapped and welded from one side to two members. On the other hand, Patent Document 2 considers welding of lap joints. Further, Patent Document 2 enables detection of different types of defects (above (a) to (f)) using longitudinal waves and transverse waves. However, the defects (a) to (f) in Patent Document 2 exist above the boundary surface between the two members (the side on which welding is performed). That is, in Patent Document 1 and Patent Document 2, sufficient consideration is given to detecting a defect existing below the boundary surface between two members in a lap joint (on the side opposite to the side on which welding is performed). Absent.

Longitudinal and transverse waves used in the ultrasonic method are directional, and longitudinal and transverse waves are reflected at the interface between the two members, so that defects that occur inside narrow welds due to laser welding are eliminated. It is not easy to detect.

An object of the present invention is to make it possible to detect defects existing above and below the boundary surface of two members in a laser welded portion of a lap joint.

In order to achieve the above-mentioned object, the present invention provides a laser beam for detecting defects in a laser welded portion in which laser welding is performed by irradiating a laser beam on the first member and the second member constituting the lap joint from the first member side. Detect with ultrasound by irradiation. Generate a transverse wave generation laser at a transverse laser generation laser irradiation position located on one side across the weld line, and generate a longitudinal wave located on the one side farther from the welding line than the transverse laser generation laser irradiation position. A laser for longitudinal wave is irradiated to the laser irradiation position. The transverse wave receiving laser is irradiated to the transverse wave receiving laser irradiation position located on the other side across the welding line, and the longitudinal wave receiving is located on the other side farther from the welding line than the transverse wave receiving laser irradiation position. A longitudinal wave receiving laser is irradiated to the laser irradiation position. The transverse wave ultrasonic wave generated by the thermoelastic mode generated by the irradiation of the generation laser for the transverse wave is detected by the receiving laser for the transverse wave, and the ultrasonic wave generated by the thermoelastic mode generated by the irradiation of the generation laser for the longitudinal wave is detected by the reception laser for the longitudinal wave. . A defect at a position shallower than the boundary surface between the first member and the second member is detected by longitudinal wave ultrasonic waves, and a defect at a position deeper than the boundary surface is detected by transverse wave ultrasonic waves.

According to the present invention, it is possible to detect a defect present on the upper side and the lower side of the boundary surface of the two members in the laser welded portion of the lap joint. Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments.

It is a conceptual diagram which shows the detection process of the defect De by a laser ultrasonic method. It is a figure which shows the concept of the in-process inspection apparatus using the ultrasonic inspection apparatus 1 which concerns on this invention. It is a block diagram which shows the structure of the in-process inspection apparatus 1000 which combined the ultrasonic inspection apparatus 1 and laser welding apparatus 2 which concern on this invention. It is a figure which shows the directivity of the ultrasonic wave which generate | occur | produces by laser irradiation, and is a figure which shows the directivity in a thermoelastic mode. It is a figure which shows the directivity of the ultrasonic wave which generate | occur | produces by laser irradiation, and is a figure which shows the directivity in ablation mode. It is a conceptual diagram explaining the ultrasonic inspection method which concerns on a present Example, and is a figure which shows the characteristic of the ultrasonic inspection method by a transverse wave WT. It is a figure which shows the range which can detect the defect De by transverse wave WT, and the range where detection is difficult. It is a figure which shows the time change of the ultrasonic signal by the transverse wave WT. It is a conceptual diagram explaining the ultrasonic inspection method which concerns on a present Example, and is a figure which shows the characteristic of the ultrasonic inspection method by the longitudinal wave WL. It is a figure which shows the range which can detect the defect De by the longitudinal wave WL, and the range where detection is difficult. It is a figure which shows the time change of the ultrasonic signal by the longitudinal wave WL. It is a conceptual diagram which shows the laser ultrasonic inspection method which concerns on this invention which used transverse wave WT and longitudinal wave WL together. It is a conceptual diagram which shows the irradiation state of the generation laser LaTL for longitudinal waves, the reception laser LaRL for longitudinal waves, the generation laser LaTT for transverse waves, and the reception laser LaRT for transverse waves. It is a figure which shows the manufacturing process of the high pressure fuel supply pump 100 which concerns on this invention. It is sectional drawing which shows one Example of the high pressure fuel pump 100 which concerns on this invention.

Embodiments according to the present invention will be described below with reference to the drawings.

FIG. 1 is a conceptual diagram showing a process of detecting a defect De by a laser ultrasonic method. In the laser ultrasonic method, the inspection target A is irradiated with the laser LaT to generate ultrasonic waves in the inspection target A. The ultrasonic wave UT generated in the inspection object A is reflected by the defect De, and a displacement (surface displacement) Di is generated on the surface of the inspection object A. Then, the laser LaR is irradiated to the surface where the surface displacement Di is generated, the surface displacement Di is detected by the detector Det, and the defect De is detected.

The laser LaT that generates the ultrasonic UT in the inspection target A is referred to as a generation laser or a transmission laser. The laser LaR that detects the surface displacement Di is called a reception laser or a detection laser. Hereinafter, a method for performing defect detection using a laser ultrasonic method is referred to as an ultrasonic inspection method, and an apparatus for performing defect detection using a laser ultrasonic method is referred to as an ultrasonic inspection device. In the present embodiment, the ultrasonic inspection method and the ultrasonic inspection apparatus detect the defect De of the welded portion We in laser welding. Examples of the defect (scratch) De of the welded portion We include a crack and a blow hole.

In this embodiment, the welded portion We is a portion where the molten metal is solidified by welding. A swell (weld bead) is formed on the surface side of the welded portion We. This weld bead may be removed.

FIG. 2 is a diagram showing a concept of an in-process inspection apparatus 1000 using the ultrasonic inspection apparatus 1 according to the present invention.

The ultrasonic inspection apparatus 1 of this embodiment constitutes an in-process inspection apparatus 1000 that works in conjunction with the laser welding apparatus 2. That is, the ultrasonic inspection apparatus 1 of this embodiment is applied to a manufacturing apparatus for the high-pressure fuel supply pump 100, and laser welding is performed on the high-pressure fuel supply pump 100 by the laser welding apparatus 2 while simultaneously performing laser welding by the ultrasonic inspection apparatus 1. A defect De generated in the portion We is detected.
For this purpose, the ultrasonic inspection apparatus 1 and the laser welding apparatus 2 are arranged around the high-pressure fuel supply pump 100.

The laser welding device 2 is controlled by a control device 3 in the laser welding process. In the ultrasonic inspection apparatus 1, the defect detection process (flaw detection process) is controlled by the control device 3. The laser welding apparatus 2 and the ultrasonic inspection apparatus 1 are rotationally driven in the Ar direction around the rotation axis AR by the driving device 4.

In this embodiment, the inspection target A is a welding target. The object A to be welded is rotated around the rotation axis, and in accordance with this rotation, the laser welding apparatus 2 performs laser welding, and the ultrasonic inspection apparatus 1 performs non-contact inspection (flaw detection) using a laser ultrasonic method. For this reason, the laser welding part We is comprised as a welding line which comprises a linear form.

In this embodiment, the high-pressure fuel supply pump 100 is described as an object to be welded (inspected object) A, but it may be a fuel injection valve or the like. Further, it is not always necessary to configure the in-process inspection apparatus, and welding and inspection may be performed separately, or the ultrasonic inspection apparatus 1 that performs only inspection may be configured. However, an in-process inspection apparatus is configured using the ultrasonic inspection apparatus 1 and inspection is performed while welding is performed. By re-welding when a defect is found, the occurrence of a defective product can be prevented in advance. Productivity can be improved.

FIG. 3 is a block diagram showing the configuration of an in-process inspection apparatus 1000 that combines the ultrasonic inspection apparatus 1 and the laser welding apparatus 2 according to the present invention.

The in-process inspection apparatus 1000 includes an ultrasonic inspection apparatus 1, a laser welding apparatus 2, and a control apparatus 3.

The laser welding apparatus 2 is a welding apparatus that performs laser welding on the high-pressure fuel supply pump 100 that is the workpiece (workpiece) A. In this embodiment, the laser welding apparatus 2 shows an example in which the pump body 101 and the damper cover 111 are welded. The pump main body 101 and the damper cover 111 constitute a lap joint, and the laser LaW is irradiated from the damper cover 111 side. The object A to be welded is rotated about the rotation axis AR. Therefore, the welded portion constitutes a weld line extending in the circumferential direction around the rotation axis AR.

In the present embodiment, the object A to be welded is rotated, but the laser welding apparatus 2 may be rotated around the rotation axis AR. When the laser welding apparatus 2 is rotated around the rotation axis AR, the ultrasonic inspection apparatus 1 is also rotated around the rotation axis AR. That is, the drive device 4 is configured to relatively displace (relatively move) the ultrasonic inspection device 1, the laser welding device 2, and the welding target A in the direction along the welding line We.

As the welding apparatus, an apparatus using a welding method other than laser welding can be used. However, the ultrasonic inspection apparatus 1 according to the present embodiment exhibits excellent flaw detection performance with respect to a welding method in which the welding depth is deeper than the line width of the welding line We, such as laser welding. It works more effectively as the welding depth becomes deeper than the width.

The ultrasonic inspection apparatus 1 includes a generation laser irradiation unit (first laser irradiation unit) 11 for irradiating a welding target (inspected target) A with a generation laser (first laser) LaT that generates ultrasonic waves, a surface A receiving laser irradiation unit (second laser irradiation unit) 12 for irradiating a receiving laser (second laser) LaR for detecting displacement Di, interferometer side units 13B and 13C, and a data recording / analyzing device 14 Prepare.

The generation laser irradiation unit 11 includes a generation laser light source (first laser light source) 11A, a generation laser optical system for longitudinal waves (first laser optical system for longitudinal waves) 11B, and a generation laser optical system for transverse waves (first laser optical for transverse waves). System) 11C. The reception laser irradiation unit 12 includes a reception laser light source (second laser light source) 12A, a reception laser optical system for longitudinal waves (second laser optical system for longitudinal waves) 12B, and a reception laser optical system for transverse waves (second laser optics for transverse waves). System) 12C.

The generation laser light source 11A generates a generation laser LaT. The generation laser optical system 11B for longitudinal waves and the generation laser optical system 11C for transverse waves are optical systems for irradiating the welding target A with the generation laser LaT, and are composed of optical components such as a lens, a reflecting mirror, and an optical fiber. The In this embodiment, the generation laser optical system 11B for longitudinal waves and the generation laser optical system 11C for transverse waves irradiate the welding target A with the generated laser LaT generated by the generated laser light source 11A which is a common laser light source. A configuration may be adopted in which individual generation laser light sources 11A are provided in each of the longitudinal wave generation laser optical system 11B and the transverse wave generation laser optical system 11C.

The reception laser light source 12A generates a reception laser LaR. The longitudinal wave receiving laser optical system 12B and the transverse wave receiving laser optical system 12C are optical systems for irradiating the welding target A with the receiving laser LaR, and collect reflected light and scattered light from the irradiation point of the receiving laser LaR. It is an optical system that emits light. The longitudinal wave receiving laser optical system 12B and the transverse wave receiving laser optical system 12C are configured by optical components such as a lens, a reflecting mirror, and an optical fiber. In this embodiment, the longitudinal wave receiving laser optical system 12B and the transverse wave receiving laser optical system 12C irradiate the welding target A with the receiving laser LaT generated by the receiving laser light source 12A which is a common laser light source. A configuration may be adopted in which individual reception laser light sources 12A are provided in each of the longitudinal wave reception laser optical system 12B and the transverse wave reception laser optical system 12C.

As the generation laser light source 11A and the reception laser light source 12A, various known laser light sources as described in Patent Document 1 can be used.

Interferometer side portions 13B and 13C include an interferometer, and perform interference measurement using reflected light and scattered light from the irradiation point of the reception laser LaR. The reflected light and scattered light are affected by the surface displacement Di of the workpiece A to be welded by the ultrasonic wave UT. For this reason, the ultrasonic signals 13Bs and 13Cs including the information on the defect De can be detected by detecting the surface displacement Di of the workpiece A by interference measurement. Interferometer side parts 13B and 13C output ultrasonic signals 13Bs and 13Cs obtained by the interference measurement as electric signals. The ultrasonic signals 13Bs and 13Cs output from the interferometer side portions 13B and 13C are recorded as ultrasonic signal data in the data recording / analyzing device 14, and information on the defect De is analyzed based on the ultrasonic signal data.

The interferometer side unit 13B constitutes a first interference measurement unit (longitudinal wave interference measurement unit) that performs interference measurement of the longitudinal wave WL and outputs the ultrasonic signal 13Bs. The interferometer side unit 13C constitutes a second interference measurement unit (a transverse wave interference measurement unit) that performs interference measurement of the transverse wave WT and outputs the ultrasonic signal 13Cs.

In the information analysis of the defect De, the position of the defect De is specified based on the irradiation positions of the generation laser LaT and the reception laser LaR corresponding to the ultrasonic signals 13Bs and 1Cs. The position of the defect De is specified as a circumferential position along the weld line We. In order to specify the circumferential position along the weld line We, a circumferential reference position is set for the welding target A. This reference position may be set to an arbitrary structure provided on the welding target A, or may be set regardless of the structure of the welding target A. For example, in the case of a high-pressure fuel supply pump, as an arbitrary structure for setting the reference position, the intake valve mechanism 114, the discharge joint 116, etc. (see FIG. 13) can be used.

Further, in this embodiment, details will be described later, but a defect De at a shallow position in the welding depth direction is detected by a longitudinal wave, and a defect De at a deep position is detected by a transverse wave. For this reason, it is possible to relatively distinguish the defect De at the shallow position from the defect De at the deep position. The depth information of the defect De may be recorded in the data recording / analyzing device 14.

The content described in Patent Document 1 can be applied to the detection principle of the defect De using laser ultrasonic waves. Although Patent Document 2 is different from the present embodiment in that no laser is used, the content described in Patent Document 2 can be applied to the detection principle of the defect De using ultrasonic waves.

Next, an ultrasonic inspection method using a laser according to the present invention will be specifically described with reference to FIGS. 4A, 4B, and 5 to 11. FIG.

FIG. 4A is a diagram showing the directivity of ultrasonic waves generated by laser irradiation, and is a diagram showing the directivity in the thermoelastic mode. FIG. 4B is a diagram showing the directivity of ultrasonic waves generated by laser irradiation, and is a diagram showing the directivity in the ablation mode.

The thermoelastic mode is a mode that occurs when the laser irradiation energy is low, and the ablation mode is a mode that occurs when the laser irradiation energy is high. Even when a contact type sensor that is not a laser ultrasonic type is used, the directivity of the ultrasonic wave has the same directivity as in FIG. 4B.

In this embodiment, the thermoelastic mode is used. In the thermoelastic mode, the ultrasonic transverse wave WT generated when laser irradiation is performed has a directivity DR1 in a direction inclined by 30 ° with respect to an axis line (0 ° axis) along the irradiation direction. The longitudinal wave WL has directivity DR2 in a direction inclined by 65 ° with respect to an axis line (0 ° axis) along the irradiation direction. The directivity DR1 of the transverse wave WT is different from the directivity DR2 of the longitudinal wave WL. Due to the difference between the directivities DR1 and DR2, the transmission path of the transverse wave WT and the transmission path of the longitudinal wave WL are different. In the present embodiment, the defect De existing at different depths of the welded portion We is detected by using the difference between the directivities DR1 and DR2 of the transverse wave WT and the longitudinal wave WL (difference in propagation path).

On the other hand, in the ablation mode, the directivity DR1 ′ and DR2 ′ are expanded with respect to the thermoelastic mode, and the defect De using the difference between the directivity DR1 ′ and DR2 ′ of the transverse wave WT and the longitudinal wave WL (difference in propagation path). Is difficult to detect.

FIG. 5 is a conceptual diagram for explaining the ultrasonic inspection method according to the present embodiment, and is a view showing the characteristics of the ultrasonic inspection method using the transverse wave WT.

FIG. 5 shows a state in which the first member 201 and the second member 202 are joined by a welded portion We by laser welding in a state where a lap joint is formed. The first member 201 and the second member 202 are laser welded in a state where the surface 201A of the first member 201 and the surface 202A of the second member 202 are pressure-bonded, and the first member 201 and the second member 202 are bonded. A boundary surface SB is formed between the two.

Laser welding is performed by irradiating laser from the first member 201 side. The welded portion We forms a linear weld line. FIG. 5 shows a cross section perpendicular to the weld line We. In the welded portion We of the present embodiment, the weld depth D_We is formed larger than the line width ΔWe of the weld line We. In this case, the line width ΔWe of the welding line We is a line width that appears on the surface of the first member 201. In this embodiment, the thickness dimension of the first member 201 is 1.2 mm, and the line width ΔWe of the welding line We is formed to be 1.0 mm or less, which is smaller than the thickness dimension of the first member 201. Further, the width ΔWe_SB of the melted portion We in the boundary surface SB is not more than half (½ or less) of the line width ΔWe, and is formed to be 0.5 mm or less.

The generated laser LaTT for generating the transverse wave WT is irradiated to the irradiated laser irradiation position PTT for the transverse wave positioned on one side of the welding line We with the weld line We interposed therebetween. The transverse wave generation laser LaTT irradiated to the transverse wave generation laser irradiation position PTT generates a transverse wave WT of the ultrasonic wave UT. The transverse wave WT propagates in a direction inclined by 30 ° with respect to the laser irradiation axis Ax_LaTT, is reflected by the defect De2, and propagates to the detection position (lateral laser receiving laser irradiation position) PRT located on the other side of the welding line We. To do. The detection position PRT is irradiated with the transverse wave receiving laser LaRT, and a minute displacement Di (see FIG. 1) generated at the detection position PRT is detected.

The transverse wave generation laser LaTT is irradiated to the transverse wave generation laser irradiation position PTT that is separated from the center (center line) C_We in the width direction of the welding line We by a distance ltt in a direction orthogonal to the welding line We. The transverse wave receiving laser LaRT is irradiated to the transverse wave receiving laser irradiation position separated from the center (center line) C_We in the width direction of the welding line We by a distance lrt in a direction orthogonal to the welding line We.

FIG. 6 is a diagram showing a range in which the defect De can be detected by the transverse wave WT and a range in which the detection is difficult. FIG. 7 is a diagram illustrating a time change of the ultrasonic signal due to the transverse wave WT.

In the detection by the transverse wave WT, it is possible to detect the defect De2 at the depth of the boundary surface SB and the defect De1 at a position deeper than the boundary surface SB. This is because a difference appears in the time domain II of the ultrasonic signal (from 0.9 μs, more specifically from 0.9 to 1.2 μs) depending on whether the defects De1 and De2 are present or not. .

In FIG. 7, the ultrasonic signal 13Cs1 when the defect De1 located deeper than the boundary surface SB and the defect De3 located shallower than the boundary surface SB exist, and the ultrasonic signal 13Cs2 when no defect De exists. Is expressed conceptually.

The ultrasonic signal 13Cs1 has a peak PkWS caused by the surface wave WS, a peak PkDe1 caused by the defect De1, and a peak PkDe3 caused by the defect De3. The peak PkWS generated by the surface wave WS and the peak PkDe3 generated by the defect De3 exist in the time domain I (before 0.9 μs), and the peak PkWS and the peak PkDe3 are difficult to distinguish from each other. On the other hand, the peak PkDe1 generated by the defect De1 exists in the time domain II (0.9 μs or later), and the peak PkWS and the peak PkDe1 can be distinguished. Even when there is a defect De2 at the depth of the boundary surface SB, a peak occurs in the time domain II (0.9 μs or later), and the peak due to the defect De2 can be distinguished from the peak PkWS.

Therefore, the defect De2 at the depth of the boundary surface SB and the defect De1 at a position deeper than the boundary surface SB can be detected by the transverse wave WT. On the other hand, it is difficult to detect the defect De3 located at a position shallower than the boundary surface SB by the transverse wave WT.

In order to detect the defects De1 and De2 distributed deep from the boundary surface SB, the transverse wave generation laser irradiation position PTT and the transverse wave reception laser irradiation position PRT may be changed in a direction perpendicular to the welding line We.

FIG. 8 is a conceptual diagram for explaining the ultrasonic inspection method according to the present embodiment, and shows the characteristics of the ultrasonic inspection method using the longitudinal wave WL.

8 to be welded A is welded in the same manner as in FIG.

The longitudinal wave generation laser LaTL for generating the longitudinal wave WL is irradiated to the longitudinal wave generation laser irradiation position PTL located on one side of the welding line We across the welding line We. The longitudinal wave generation laser LaTL irradiated to the longitudinal wave generation laser irradiation position PTL generates a longitudinal wave WL of the ultrasonic wave UT. The longitudinal wave WL propagates in a direction inclined by 65 ° with respect to the laser irradiation axis Ax_LaTL, is reflected by the defect De2, and is detected at the detection position (vertical wave receiving laser irradiation position) PRL located on the other side of the welding line We. Propagate. The detection position PRL is irradiated with a longitudinal wave reception laser LaRL, and a minute displacement Di (see FIG. 1) generated at the detection position PRL is detected.

Longitudinal wave generation laser LaTL is irradiated to a longitudinal wave generation laser irradiation position PTL separated from the center (center line) C_We of the welding line We in the direction orthogonal to the welding line We by an interval of ltl. The longitudinal wave reception laser LaRL is irradiated to the longitudinal wave reception laser irradiation position PRL which is separated from the center (center line) C_We in the width direction of the welding line We by a distance lrl in a direction orthogonal to the welding line We. In this case, the interval ltl is larger than the interval ltt, and the interval lrl is larger than the interval lrt. That is, the longitudinal wave generating laser LaTL is irradiated to a position away from the center (center line) C_We of the welding line We with respect to the transverse wave generating laser LaTT, and the longitudinal wave receiving laser LaRL is irradiated with respect to the transverse wave receiving laser LaRT. Irradiated to a position away from the center (center line) C_We of the welding line We. For this reason, the longitudinal wave generation laser LaTL and the longitudinal wave reception laser LaRL are irradiated from the outside of the transverse wave generation laser LaTT and the transverse wave reception laser LaRT.

FIG. 9 is a diagram showing a range in which the defect De can be detected by the longitudinal wave WL and a range in which the detection is difficult. FIG. 10 is a diagram illustrating a time change of the ultrasonic signal due to the longitudinal wave WL.

In the detection by the longitudinal wave WL, it is possible to detect the defect De2 at the depth of the boundary surface SB and the defect De3 at a position shallower than the boundary surface SB. This is because a difference appears in the time domain I of the ultrasonic signal (before 0.9 μs, more specifically 0.6 to 0.9 μs) depending on whether there is a defect De2 or De3 and no defect De. .

In FIG. 10, the ultrasonic signal 13Bs1 when the defect De1 located deeper than the boundary surface SB and the defect De3 located shallower than the boundary surface SB exist, and the ultrasonic signal 13Bs2 when no defect De exists. Is expressed conceptually.

The ultrasonic signal 13Bs1 has a peak PkWS caused by the surface wave WS and a peak PkDe3 caused by the defect De3. Since the longitudinal wave WL propagates in a direction inclined by 65 ° with respect to the laser irradiation axis Ax_LaTL, it is reflected by the boundary surface SB and it is difficult to enter a position deeper than the depth of the boundary surface SB. For this reason, the longitudinal wave WL cannot detect the defect De1 distributed at a position deeper than the depth of the boundary surface SB.

The peak PkWS generated by the surface wave WS appears in the time domain II (from 0.9 μs, more specifically from 0.9 to 1.2 μs). On the other hand, the peak PkDe3 caused by the defect De3 appears in the time domain I, and the peak PkWS and the peak PkDe1 can be distinguished. When there is a defect De2 at the depth of the boundary surface SB, a peak is generated in the time domain II (after 0.9 μs), but is shifted from the peak PkWS at a time earlier than the peak PkWS, so the peak due to the defect De2 is the peak PkWS. And can be distinguished.

Therefore, the defect De2 at the depth of the boundary surface SB and the defect De3 at a position shallower than the boundary surface SB can be detected by the longitudinal wave WL. On the other hand, it is difficult to detect the defect De1 located deeper than the boundary surface SB by the longitudinal wave WL.

In addition, in order to detect the defects De2 and De3 distributed in shallow positions from the boundary surface SB, the longitudinal wave generation laser irradiation position PTL and the longitudinal wave reception laser irradiation position PRL are changed in a direction orthogonal to the welding line We. Good.

FIG. 11 is a conceptual diagram showing a laser ultrasonic inspection method according to the present invention using both a transverse wave WT and a longitudinal wave WL.

The cross-sectional shape of the welded portion We of the present embodiment has a narrow cross-sectional shape with a small width ΔWe and a large length D_We in the depth direction. For this narrow cross-sectional shape, the ultrasonic detection method of the present embodiment detects the defect De3 at a position shallower than the boundary surface SB by the longitudinal wave WL and detects the defect De1 at a position deeper than the boundary surface SB. Detect with transverse wave ultrasonic WT. The defect De2 at the depth of the boundary surface SB may be detected by either the longitudinal wave ultrasonic wave WL or the transverse wave ultrasonic wave WT, or by both the longitudinal wave ultrasonic wave WL and the transverse wave ultrasonic wave WT.

Therefore, the longitudinal wave generation laser LaTL and the longitudinal wave reception laser LaRL are irradiated from the outside of the transverse wave generation laser LaTT and the transverse wave reception laser LaRT. That is, the transverse wave generation laser irradiation position PTT and the transverse wave reception laser irradiation position PRT are located on the inner side (closer to the welding line We) than the longitudinal wave generation laser irradiation position PTL and the longitudinal wave reception laser irradiation position PRL. The longitudinal-wave generating laser irradiation position PTL and the longitudinal-wave receiving laser irradiation position PRL are located on the outer side (side away from the welding line We) with respect to the transverse-wave generating laser irradiation position PTT and the transverse-wave receiving laser irradiation position PRT. To be provided.

In this embodiment, the longitudinal wave generating laser LaTL and the longitudinal wave receiving laser LaRL are irradiated at different positions in the direction orthogonal to the welding line We. Thereby, the defect De can be detected without receiving the influence (noise) of the surface wave.

It should be noted that both longitudinal wave WL and transverse wave (not shown) ultrasonic waves are generated at the irradiation position PTL of the longitudinal wave generation laser LaTL (see FIG. 8) by the longitudinal wave generation laser optical system 11B. In the longitudinal wave receiving laser optical system 12B and the interferometer 13B, the longitudinal wave and the transverse wave generated by the irradiation of the longitudinal wave generating laser LaTL from the longitudinal wave generating laser optical system 11B are used to detect the defect De using the longitudinal wave WL. Detection is performed. In addition, ultrasonic waves of both a longitudinal wave (not shown) and a transverse wave WT are generated at the irradiation position PTT of the transverse wave generation laser LaTT (see FIG. 5) by the transverse wave generation laser optical system 11C. In the transverse wave receiving laser optical system 12C and the interferometer 13C, the defect De is detected by using the transverse wave WT among the longitudinal wave and the transverse wave generated by the irradiation of the transverse laser generating laser LaTT from the transverse wave generating laser optical system 11C. .

In this embodiment, the longitudinal wave WL is used in addition to the transverse wave WT by utilizing the directivity characteristic of the laser ultrasonic wave. By using the transverse wave WT and the longitudinal wave WL in combination, it is possible to reliably inspect the upper and lower regions including the boundary surface SB. The transverse wave WT of the laser ultrasonic wave has directivity in a direction of about 30 degrees, and the transverse wave generation laser LaTT and the transverse wave reception laser LaRT are arranged at transmission / reception positions determined by the directivity (directivity angle 30 °) and the plate thickness of the first member 201. Irradiate. The longitudinal wave WL of the laser ultrasonic wave has directivity in a direction of about 65 degrees, and the longitudinal wave generation laser LaTL and the longitudinal wave are at the transmission / reception position determined by the directivity (directivity angle 65 °) and the plate thickness of the first member 201. The receiving laser LaRL is irradiated.

That is, the position of the defect De3 shallower than the boundary surface SB can be detected based on the directivity angle (65 °) of the longitudinal wave WL. Further, the position of the defect De1 at a position deeper than the boundary surface SB can be detected based on the directivity angle (30 °) of the transverse ultrasonic wave WT.

In this embodiment, the welded portion We that forms the weld bead constitutes a linear weld line, and the line width ΔWe of the weld line We has a narrow cross-sectional shape that is smaller than the thickness dimension of the first member 201. We are formed. In the present embodiment, by using the transverse wave WT and the longitudinal wave WL in combination, the defect De existing in the upper and lower regions including the boundary surface SB can be reliably inspected.

Also, in this embodiment, the longitudinal wave ultrasonic wave WL propagates from the longitudinal wave generation laser irradiation position PTL to the defect De3 at a position shallower than the boundary surface SB without being reflected by the boundary surface SB. The transverse wave ultrasonic wave WT propagates from the transverse wave generation laser irradiation position PTT to the defect De1 at a position deeper than the boundary surface SB without being reflected by the boundary surface SB. For this reason, it is not necessary to consider a complicated propagation path related to reflection, and the positions of the defects De1, De2, and De3 can be easily calculated.

FIG. 12 is a conceptual diagram showing an irradiation state of the longitudinal wave generating laser LaTL, the longitudinal wave receiving laser LaRL, the transverse wave generating laser LaTT, and the transverse wave receiving laser LaRT.

In the present embodiment, the longitudinal wave generation laser LaTL and the transverse wave generation laser LaTT are irradiated so as to form a linear focal point having a longitudinal direction in the direction along the welding line We, and the longitudinal wave reception laser LaRL and the transverse wave reception are obtained. The laser LaRT is irradiated so as to form a point-like focus. In this case, as shown in FIG. 12, the longitudinal wave ultrasonic wave WL and the transverse wave ultrasonic wave WT propagate in a narrowed range with respect to the length of the line-shaped focal point in the direction along the welding line We.

In this embodiment, the focal point arrangement described above allows the point-like focal point of the longitudinal wave receiving laser LaRL and the point-like focal point of the transverse wave receiving laser LaRT to be arranged close to each other, thereby making the apparatus compact. it can.

FIG. 13 is a diagram showing a manufacturing process of the high-pressure fuel supply pump 100 according to the present invention.

In FIG. 13, only the process part which concerns on laser welding and ultrasonic inspection is shown, and the manufacturing method by the in-process inspection which performs ultrasonic inspection by the ultrasonic inspection apparatus 1 while performing laser welding by the laser welding apparatus 2 is shown. Yes.

In this embodiment, the laser welding apparatus 2 performs laser welding on the high-pressure fuel supply pump 100, and at the same time, the ultrasonic inspection apparatus 1 detects a defect De generated in the laser welded portion We. For this purpose, in step S1, welding data is set based on the welding specification data. As the welding specification data, data such as a welding position and laser power of laser welding are set in the control device 3.

The control device 3 controls the laser welding device 2 on the basis of the welding data to perform laser welding on the welding target A, and executes an inspection of the welded portion We by the ultrasonic inspection device 1. That is, the ultrasonic inspection process S3 is performed while performing the laser welding process S2. With the execution of the ultrasonic inspection step S3, the presence or absence of a defect De in the welded portion We is determined in step S4. When the presence of the defect De is determined, the welding data is corrected and the laser welding process S2 is repeated. The ultrasonic inspection process S3 is also executed when the laser welding process S2 is re-executed.

The determination of the presence or absence of the defect De in step S4 may be performed when the laser welding process S2 is completed, or may be performed during the execution of the laser welding process S2.

In this embodiment, laser welding by the laser welding apparatus 2 and ultrasonic inspection by the ultrasonic inspection apparatus 1 can be performed at the same time. If there is a defect in laser welding, the defect is detected by the ultrasonic inspection apparatus 1. Immediate detection and re-welding can improve the yield of the high-pressure fuel supply pump 100 in the manufacturing process.

An example in which the present invention is applied to the high-pressure fuel supply pump 100 will be described with reference to FIG. FIG. 14 is a cross-sectional view showing an embodiment of the high-pressure fuel pump 100 according to the present invention.

The high-pressure fuel supply pump 100 is a pump that supplies high pressure fuel pumped from a fuel tank by a feed pump (not shown) to the fuel injection valve. The high-pressure fuel supply pump 100 is used for an internal combustion engine (engine) mounted on a vehicle. Hereinafter, the high-pressure fuel supply pump 100 will be referred to as a pump 100 and will be described.

A pressurizing chamber 107 is formed in the pump main body 101, and an upper end portion (tip portion) of the plunger 104 is inserted into the pressurizing chamber 107. The plunger 104 reciprocates in the pressurizing chamber 107 to pressurize the fuel.

The pump body (pump housing) 101 has a mounting flange 102 for fixing to the engine. The mounting flange 102 is welded to the pump body 101 by laser welding on the entire circumference. A welding portion 301 between the mounting flange 102 and the pump main body 101 is referred to as a first welded portion.

The pump body 101 is provided with a suction valve mechanism 114 and a discharge valve mechanism 115. The body 114c of the suction valve mechanism 114 is fixed to the pump body 101 by laser welding. This weld location 302 is referred to as a second weld. In the second welded portion 302, the outer periphery of the body 114c of the suction valve mechanism 114 is welded over the entire periphery. A discharge joint 116 is provided on the downstream side of the discharge valve mechanism 115. The discharge joint 116 is fixed to the pump body 101 by laser welding 303. This weld location 303 is referred to as a third weld. In the third welded portion 303, the outer periphery of the discharge joint 116 is welded over the entire circumference.

A damper cover 111 is attached to the top of the pump body 101. The damper cover 111 is fixed to the pump body 101 by laser welding. This weld location 304 is referred to as a fourth weld. The fourth welded portion 304 is welded over the entire circumference.

A suction joint 112 is fixed to the damper cover 111 by laser welding.
This weld location 305 is referred to as a fifth weld. As for the 5th welding part 305, the outer periphery of the suction joint 112 is welded over the perimeter.

The weld joints of the first welded portion 301, the second welded portion 302, and the third welded portion 303 have a butt weld structure. It is also possible to apply the in-process inspection process of this embodiment to these welds. In the 1st welding part 301, the laser 400 (LaW) is irradiated to the welding object surface perpendicularly. In the second welded portion 302 and the third welded portion 303, the laser 400 (LaW) is irradiated with an inclination of θ ° from the direction perpendicular to the surface of the welding object.

The weld joint of the fourth welded part 304 and the fifth welded part 305 has a lap weld structure, and the fourth welded part 304 and the fifth welded part 305 are welded by applying the in-process inspection process of this embodiment. In the fourth welded portion 304 and the fifth welded portion 305, a laser 400 (LaW) is irradiated perpendicularly to the surface of the welding object.

The fuel leakage is not allowed in the pump 100. The pump body 101, the body 114c of the suction valve mechanism 114, the discharge joint 116, the damper cover 111, and the suction joint 112 are components that constitute a fuel passage through which fuel flows. The second welded portion 302 to the fifth welded portion 305 also serve as a fuel seal. For this reason, it is desirable to ensure a sufficient effective weld length for welding of the parts in which the fuel flow path is formed. Moreover, it is assumed that the pump 100 is used in a severe environment. By using a welding process having excellent robustness, the reliability of the pump 100 can be increased.

As described above, in the ultrasonic inspection method according to the present invention, laser welding is performed by irradiating the laser LaW from the first member 201 side to the first member 201 and the second member 202 constituting the lap joint. In the ultrasonic inspection method for detecting the defect De in the welded part We with the ultrasonic wave UT by laser irradiation, it operates with the following steps.
(1) A step of irradiating the transverse wave generation laser LaTT to the transverse wave generation laser irradiation position PTT located on one side of the weld bead.
(2) A step of irradiating the longitudinal wave generation laser LaTL to the longitudinal wave generation laser irradiation position PTL located on the one side away from the welding bead than the transverse wave generation laser irradiation position PTT.
(3) A step of irradiating the transverse wave receiving laser LaRT to the transverse wave receiving laser irradiation position PRT located on the other side across the weld bead.
(4) A step of irradiating the longitudinal wave receiving laser LaRL to the longitudinal wave receiving laser irradiation position PRL located on the other side away from the welding bead than the transverse wave receiving laser irradiation position PRT.
(5) A step of detecting the transverse wave ultrasonic wave WT generated by the thermoelastic mode by the irradiation of the transverse wave generation laser LaTT with the transverse wave reception laser LaRT.
(6) A step of detecting the longitudinal wave ultrasonic wave WL generated by the thermoelastic mode by the irradiation of the longitudinal wave generation laser LaTL with the longitudinal wave reception laser LaRL.
(7) A step of detecting the defect De3 at a position shallower than the boundary surface SB between the first member 201 and the second member 202 with the longitudinal wave WL.
(8) A step of detecting the defect De1 at a position deeper than the boundary surface SB with the transverse ultrasonic wave WT.

In the ultrasonic inspection method described above, (1) and (3) are executed in conjunction with each other, and (2) and (4) are executed in conjunction with each other. (5) is executed after (1) and (3), and (6) is executed after (2) and (4). Further, (7) is executed after (5), and (8) is executed after (6).

Moreover, the ultrasonic inspection apparatus according to the present invention includes a laser welding part We in which laser welding is performed by irradiating a laser from the first member 201 side to the first member 201 and the second member 202 constituting the lap joint. The defect De is detected by ultrasonic UT by laser irradiation. For this purpose, the following configuration is provided.
(1) The transverse wave generation laser LaTT is irradiated to the transverse wave generation laser irradiation position PTT located on one side of the welding bead, and the one side away from the welding bead than the transverse wave generation laser irradiation position PTT. Generation laser irradiation unit 11 that irradiates the generation laser LaTL for the longitudinal wave to the generation laser irradiation position PTL for the longitudinal wave that is positioned at
(2) The transverse wave receiving laser LaRT is irradiated to the transverse wave receiving laser irradiation position PRT located on the other side across the welding bead, and the other side away from the welding bead from the transverse wave receiving laser irradiation position PRT. The receiving laser irradiation unit 12 that irradiates the longitudinal wave receiving laser LaRL to the longitudinal wave receiving laser irradiation position PRL positioned at
(3) A longitudinal wave interference measurement unit 13B that detects longitudinal wave ultrasonic waves WL generated by the thermoelastic mode by irradiation of the longitudinal wave generation laser LaTL with the longitudinal wave reception laser LaRL.
(4) A transverse wave interference measurement unit 13C that detects a transverse wave ultrasonic wave WT generated by a thermoelastic mode by irradiation of the transverse wave generation laser LaTT with the transverse wave reception laser LaRT.
In the ultrasonic inspection apparatus according to the present invention, the defect De3 at a position shallower than the boundary surface SB between the first member 201 and the second member 202 is detected by the longitudinal wave WL and the defect De1 at a position deeper than the boundary surface SB. Is detected by a transverse ultrasonic WT.

Further, in the manufacturing method of the high-pressure fuel supply pump according to the present invention, the laser welding process S2 in which laser welding is performed by irradiating the first member 201 and the second member 202 constituting the lap joint from the first member 201 side. And an ultrasonic inspection step S3 for detecting a defect De in the laser welded portion We with an ultrasonic wave UT by laser irradiation.

Further, the ultrasonic inspection step S3 includes the following steps.
(1) A step of irradiating the transverse wave generating laser LaTT to the transverse wave generating laser irradiation position PTT located on one side of the weld bead.
(2) A step of irradiating the longitudinal wave generation laser LaTL to the longitudinal wave generation laser irradiation position PTL located on the one side away from the welding bead than the transverse wave generation laser irradiation position PTT.
(3) A step of irradiating the transverse wave receiving laser LaRT to the transverse wave receiving laser irradiation position PRT located on the other side with the weld bead interposed therebetween.
(4) A step of irradiating the longitudinal wave receiving laser LaRL to the longitudinal wave receiving laser irradiation position PRL located on the other side away from the welding bead than the transverse wave receiving laser irradiation position PRT.
(5) A step of detecting the longitudinal wave ultrasonic wave WL generated by the thermoelastic mode by irradiation of the longitudinal wave generation laser LaTL with the longitudinal wave reception laser LaRL.
(6) A step of detecting the transverse wave ultrasonic wave WT generated by the thermoelastic mode by the irradiation of the transverse wave generation laser LaTT with the transverse wave reception laser LaRT.
(7) A step of detecting the defect De3 at a position shallower than the boundary surface SB between the first member 201 and the second member 202 with the longitudinal wave WL.
(8) A step of detecting the defect De1 at a position deeper than the boundary surface SB with the transverse ultrasonic wave WT.
And the manufacturing method of the high-pressure fuel supply pump which concerns on this invention performs the defect detection in the laser welding part We by ultrasonic inspection process S3, performing laser welding by laser welding process S2.

In the ultrasonic inspection process of the manufacturing method of the high-pressure fuel supply pump described above, (1) and (3) are executed in conjunction with each other, and (2) and (4) are executed in conjunction with each other. (5) is executed after (1) and (3), and (6) is executed after (2) and (4). Further, (7) is executed after (5), and (8) is executed after (6).

In addition, this invention is not limited to an above-described Example, Various modifications are included.
For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations. In addition, it is possible to add, delete, and replace other configurations for a part of the configuration of the embodiment.

201: First member constituting lap joint, 202: Second member constituting lap joint, De1: Defect at position deeper than boundary surface SB, De3: Defect at position shallower than boundary surface SB, LaRL: Reception for longitudinal wave Laser, LaRT ... Laser wave receiving laser, LaTL ... Longitudinal wave generating laser, LaTT ... Lateral wave generating laser, PRL ... Vertical wave receiving laser irradiation position, PRT ... Lateral wave receiving laser irradiation position, PTL ... Longitudinal wave generating laser Irradiation position, PTT ... Laser wave generation laser irradiation position, SB ... Boundary surface between the first member 201 and the second member 202, WL ... longitudinal wave ultrasonic wave, WT ... transverse wave ultrasonic wave.

Claims (14)

1. In an ultrasonic inspection method for detecting a defect in a laser welded portion by laser irradiation by irradiating a laser beam from the first member side to the first member and the second member constituting a lap joint with an ultrasonic wave by laser irradiation. ,
   Irradiate the generated laser for transverse waves on one side across the welding line in which the weld portion forms a line, and radiate the generated laser for transverse waves on the one side, and further away from the welding line than the generated laser irradiation position for transverse waves Longitudinal wave generation laser irradiation position on one side is irradiated with a longitudinal wave generation laser,
   A transverse wave receiving laser is irradiated to a transverse wave receiving laser irradiation position located on the other side across the welding line, and is located on the other side farther from the welding line than the transverse wave receiving laser irradiation position. Irradiate the longitudinal wave receiving laser to the longitudinal wave receiving laser irradiation position,
   The transverse wave ultrasonic wave generated by the thermoelastic mode by the irradiation of the transverse wave generating laser is detected by the transverse wave receiving laser,
   Longitudinal ultrasonic waves generated by a thermoelastic mode by irradiation of the longitudinal wave generating laser are detected by the longitudinal wave receiving laser;
   A defect at a position shallower than the boundary surface between the first member and the second member is detected by the longitudinal ultrasonic wave,
   An ultrasonic inspection method, wherein a defect at a position deeper than the boundary surface is detected by the transverse wave ultrasonic wave.
2. The ultrasonic inspection method according to claim 1,
   An ultrasonic inspection method, wherein the position of a defect shallower than the boundary surface is detected based on a directivity angle of the longitudinal ultrasonic wave.
3. The ultrasonic inspection method according to claim 1,
   An ultrasonic inspection method, wherein the position of a defect deeper than the boundary surface is detected based on a directivity angle of the transverse ultrasonic wave.
4. The ultrasonic inspection method according to claim 1,
   The ultrasonic inspection method, wherein a line width of the weld line is smaller than a thickness dimension of the first member.
5. The ultrasonic inspection method according to claim 1,
   The transverse wave generating laser and the longitudinal wave generating laser are irradiated so as to form a linear focal point having a longitudinal direction in a direction along the weld line,
   The ultrasonic inspection method, wherein the transverse wave receiving laser and the longitudinal wave receiving laser are irradiated so as to form a point-like focal point.
6. The ultrasonic inspection method according to claim 1,
   The longitudinal wave ultrasonic wave propagates to the defect at a position shallower than the boundary surface without being reflected at the boundary surface from the generation laser irradiation position for the longitudinal wave,
   2. The ultrasonic inspection method according to claim 1, wherein the transverse wave ultrasonic wave propagates from the transverse wave generation laser irradiation position to a defect deeper than the boundary surface without being reflected by the boundary surface.
7. In an ultrasonic inspection apparatus for detecting a defect in a laser welded portion obtained by laser irradiation by irradiating a laser beam from the first member side to a first member and a second member constituting a lap joint with an ultrasonic wave by laser irradiation. ,
   Irradiate the generated laser for transverse waves on one side across the welding line in which the weld portion forms a line, and radiate the generated laser for transverse waves on the one side, and further away from the welding line than the generated laser irradiation position for transverse waves A generation laser irradiation unit that irradiates a generation laser for longitudinal waves on one side with a generation laser for longitudinal waves at a position,
   A transverse wave receiving laser is irradiated to a transverse wave receiving laser irradiation position located on the other side across the welding line, and is located on the other side farther from the welding line than the transverse wave receiving laser irradiation position. A receiving laser irradiation unit for irradiating a longitudinal wave receiving laser to a longitudinal wave receiving laser irradiation position;
   A longitudinal wave interference measuring unit for detecting longitudinal ultrasonic waves generated by a thermoelastic mode by irradiation of the longitudinal wave generating laser with the longitudinal wave receiving laser; and
   A transverse wave interference measuring unit for detecting a transverse wave ultrasonic wave generated by a thermoelastic mode by irradiation of the transverse wave generating laser with the transverse wave receiving laser; and
   The defect at a position shallower than the boundary surface between the first member and the second member is detected by the longitudinal ultrasonic wave, and the defect at a position deeper than the boundary surface is detected by the transverse wave ultrasonic wave. Sonographic equipment.
8. The ultrasonic inspection apparatus according to claim 7,
   The ultrasonic inspection apparatus, wherein a position of a defect shallower than the boundary surface is detected based on a directivity angle of the longitudinal ultrasonic wave.
9. The ultrasonic inspection apparatus according to claim 7,
   An ultrasonic inspection apparatus, wherein a position of a defect deeper than the boundary surface is detected based on a directivity angle of the transverse ultrasonic wave.
10. The ultrasonic inspection apparatus according to claim 7,
    The ultrasonic inspection apparatus, wherein a line width of the weld line is smaller than a thickness dimension of the first member.
11. A laser welding process in which laser welding is performed by irradiating a laser beam from the first member side to the first member and the second member constituting the lap joint, and an ultrasonic wave in which a defect in the laser welded portion is detected by ultrasonic irradiation. A method of manufacturing a high-pressure fuel supply pump having an ultrasonic inspection step,
    The ultrasonic inspection process includes
    Irradiate the generated laser for transverse waves on one side across the welding line in which the weld portion forms a line, and radiate the generated laser for transverse waves on the one side, and further away from the welding line than the generated laser irradiation position for transverse waves Longitudinal wave generation laser irradiation position on one side is irradiated with a longitudinal wave generation laser,
    A transverse wave receiving laser is irradiated to a transverse wave receiving laser irradiation position located on the other side across the welding line, and is located on the other side farther from the welding line than the transverse wave receiving laser irradiation position. Irradiate the longitudinal wave receiving laser to the longitudinal wave receiving laser irradiation position,
    Longitudinal ultrasonic waves generated by a thermoelastic mode by irradiation of the longitudinal wave generating laser are detected by the longitudinal wave receiving laser;
    The transverse wave ultrasonic wave generated by the thermoelastic mode by the irradiation of the transverse wave generating laser is detected by the transverse wave receiving laser,
    A defect at a position shallower than the boundary surface between the first member and the second member is detected by the longitudinal ultrasonic wave,
    A defect at a position deeper than the boundary surface is an ultrasonic inspection step of detecting with the transverse ultrasonic wave,
    A method of manufacturing a high-pressure fuel supply pump, wherein defect detection in a laser welded part is performed by the ultrasonic inspection process while performing laser welding by the laser welding process.
12. In the manufacturing method of the high-pressure fuel supply pump according to claim 11,
    The manufacturing method of a high-pressure fuel supply pump, wherein a position of a defect shallower than the boundary surface is detected based on a directivity angle of the longitudinal wave ultrasonic wave.
13. In the manufacturing method of the high-pressure fuel supply pump according to claim 11,
    The method of manufacturing a high-pressure fuel supply pump, wherein the position of the defect deeper than the boundary surface is detected based on a directivity angle of the transverse ultrasonic wave.
14. In the manufacturing method of the high-pressure fuel supply pump according to claim 11,
    The method for manufacturing a high-pressure fuel supply pump, wherein a width of the weld line is smaller than a thickness dimension of the first member.

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