WO2019176211A1

WO2019176211A1 - Liquid jetting head and liquid jetting device

Info

Publication number: WO2019176211A1
Application number: PCT/JP2018/046603
Authority: WO
Inventors: 本規 ▲高▼部
Original assignee: セイコーエプソン株式会社
Priority date: 2018-03-13
Filing date: 2018-12-18
Publication date: 2019-09-19

Abstract

Provided are: a liquid jetting head with which it is possible to have control over an increase in size in a configuration where liquid is circulated between the head and a liquid storage section; and a liquid jetting device. The present invention is characterized by being provided with: a plurality of pressure chambers (30) that connect a plurality of nozzles (28) for jetting liquid; a first common flow channel (40) through which the liquid is supplied to the side of the plurality of pressure chambers; a second common flow channel (41) through which the liquid is led out of the side of the plurality of pressure chambers; a first compliance section (42) that gets deformed in response to a change in pressure of the liquid within the first common flow channel; and a second compliance section (43) that gets deformed in response to a change in pressure of the liquid within the second common flow channel, wherein the first and second compliance sections are so configured as to overlap with each other when viewed from the thickness direction of at least one of the compliance sections.

Description

Liquid ejecting head and liquid ejecting apparatus

The present disclosure relates to a liquid ejecting head such as an ink jet recording head, and a liquid ejecting apparatus including the same, and in particular, a liquid ejecting head including a compliance unit that suppresses pressure vibration of a liquid in a liquid flow path, and the liquid ejecting apparatus. About.

The liquid ejecting apparatus includes a liquid ejecting head and ejects (discharges) various liquids from the liquid ejecting head. As this liquid ejecting apparatus, for example, there is an image recording apparatus such as an ink jet printer or an ink jet plotter, but recently, various types of manufacturing have been made by taking advantage of the ability to accurately land a very small amount of liquid on a predetermined position. It is also applied to devices. For example, a display manufacturing apparatus for manufacturing a color filter such as a liquid crystal display, an electrode forming apparatus for forming an electrode such as an organic EL (Electro-Luminescence) display or FED (surface emitting display), a chip for manufacturing a biochip (biochemical element) Applied to manufacturing equipment. The recording head for the image recording apparatus ejects liquid ink, and the color material ejecting head for the display manufacturing apparatus ejects solutions of R (Red), G (Green), and B (Blue) color materials. The electrode material ejecting head for the electrode forming apparatus ejects a liquid electrode material, and the bioorganic matter ejecting head for the chip manufacturing apparatus ejects a bioorganic solution.

The liquid ejecting head includes a nozzle plate having a plurality of nozzles, a substrate on which a plurality of pressure chambers (also referred to as pressure generation chambers) communicating with each nozzle are formed, and a liquid from a liquid storage section. There is a substrate provided with a common liquid chamber (also referred to as a reservoir or a manifold) that is common to the pressure chambers, or a pressure generating means such as a piezoelectric element that generates pressure vibrations in the liquid in the pressure chamber (for example, Patent Documents) 1). The liquid ejecting head disclosed in Patent Document 1 is provided with a circulation flow path communicating between each pressure chamber and each nozzle, and adopts a configuration in which liquid is circulated between the liquid reservoir. Yes.

In the liquid jet head having such a configuration, a compliance portion including a flexible member that deforms in response to a change in pressure of the liquid in the flow path is provided in a part of the flow path. The compliance portion is deformed according to the pressure vibration in the liquid chamber, so that the pressure vibration generated in the liquid in the liquid chamber is absorbed.

JP 2012-143948 A

By the way, in the above-described configuration in which the liquid circulates, it is desirable to dispose the compliance section on each of the outward path from the liquid storage section side to the pressure chamber side and the return path from the pressure chamber side to the liquid storage section side. However, depending on the arrangement layout of these compliance sections, there is a problem that the size of the liquid ejecting head increases, and the liquid ejecting apparatus increases in size.

The present disclosure has been made in view of such circumstances, and a purpose thereof is a liquid ejecting head capable of suppressing an increase in size in a configuration in which the liquid circulates between the liquid storing unit and the liquid. An injection device is provided.

The liquid ejecting head of the present disclosure has been proposed to achieve the above-described object, and includes a plurality of pressure chambers communicating with a plurality of nozzles that eject liquid.
A first common flow path for supplying liquid to the plurality of pressure chambers;
A second common flow path for deriving liquids from the plurality of pressure chambers;
A first compliance portion that deforms in response to a change in pressure of the liquid in the first common flow path;
A second compliance section that deforms in response to a change in pressure of the liquid in the second common flow path;
With
The first compliance portion and the second compliance portion overlap each other when viewed in the thickness direction of at least one of the compliance portions.

According to the liquid ejecting head of the present disclosure, the first compliance portion and the second compliance portion overlap each other when viewed in the thickness direction of at least one of the compliance portions, so that the forward path toward the pressure chamber side is configured. Even in the configuration in which the compliance portion is provided in each of the first common flow path and the second common flow path from which the liquid is led out from the pressure chamber side, it is possible to suppress an increase in the size of the liquid jet head.

A liquid ejection head according to the present disclosure includes a plurality of pressure chambers communicating with a plurality of nozzles that eject liquid, a first common flow path that supplies the liquid to the plurality of pressure chambers,
A second common flow path for deriving liquids from the plurality of pressure chambers;
A first compliance portion that deforms in response to a change in pressure of the liquid in the first common flow path;
A second compliance section that deforms in response to a change in pressure of the liquid in the second common flow path;
With
The first compliance portion and the second compliance portion may overlap in a thickness direction of a nozzle plate provided with the nozzle.

According to this configuration, since the first compliance portion and the second compliance portion overlap in the thickness direction of the nozzle plate provided with the nozzle, the first common flow path constituting the forward path toward the pressure chamber side Even in the configuration in which the compliance portion is provided in each of the second common flow path from which the liquid is led out from the pressure chamber side, it is possible to suppress an increase in the size of the liquid ejecting head.

In addition, since the compliance sections are provided in the plurality of pressure chambers, in other words, the first common flow path and the second common flow path common to the plurality of nozzles, they are individually provided corresponding to the plurality of pressure chambers. Compared with the configuration in which the compliance portion is provided in each individual flow path, it is possible to more efficiently suppress the pressure vibration caused by the liquid ejecting operation in each pressure chamber. For this reason, even when the liquid is ejected from each nozzle at a higher drive frequency, the pressure vibration caused by the ejection operation can be more reliably suppressed, so that the liquid is ejected at a higher drive frequency. It becomes possible to cope with.

In the above configuration, it is desirable to adopt a configuration in which the compliance of the second compliance unit is larger than the compliance of the first compliance unit.

According to this configuration, since the compliance of the second compliance unit is larger than the compliance of the first compliance unit, for example, the circulation mechanism that circulates the liquid between the liquid storage unit that stores the liquid and the liquid ejecting head. Even when the pressure vibration at the time of driving is superimposed on the pressure vibration at the time of ejecting the liquid from the nozzle, it is possible to reduce the pressure vibration by the second compliance portion, and the nozzle is caused by such pressure vibration. The liquid ejection characteristics, i.e., the amount of liquid ejected and the flight speed are prevented from fluctuating from the target value.

In the above configuration, it is desirable to employ a configuration in which the compliance closer to the nozzle of the first compliance portion or the second compliance portion is larger than the compliance farther from the nozzle.

According to this configuration, the pressure vibration caused by the ejection of the liquid from the nozzle because the compliance closer to the nozzle of the first compliance part or the second compliance part is larger than the compliance farther from the nozzle. Can be more reliably reduced at a position closer to the nozzle. It is further suppressed that the ejection characteristics of the liquid from the nozzle, that is, the amount of the ejected liquid and the flying speed vary from the target value.

Furthermore, in the above configuration, the apparatus has a plurality of individual outlet channels that individually communicate with the second common channel from the pressure chamber,
It is desirable that the second compliance section adopt a configuration that does not overlap with the plurality of individual lead-out flow paths when viewed in the thickness direction of the second compliance section.

According to this configuration, the second compliance section does not overlap with the individual derivation flow path when viewed in the thickness direction of the second compliance section, that is, the partition wall that divides the second compliance section and the individual derivation flow path. Do not interfere with each other, when the second compliance part is deformed, stress concentrates on the part in contact with the partition wall defining the individual outlet flow path, and the second compliance part is damaged starting from the part. Or variation in the channel resistance in each individual outlet channel is prevented.

Further, in the above configuration, when the inner dimension of the individual lead-out flow paths in the direction in which the plurality of individual lead-out flow paths are arranged is W,
An edge of the flexible region displaceable in the second common channel in the second common channel in the flow channel extending direction of the individual derivation channel is closest to the individual derivation channel. It is desirable to adopt a configuration arranged within the W from the outlet on the second common channel side of the channel.

According to this configuration, the edge closest to the individual lead-out flow path in the flexible region of the second compliance section is a distance corresponding to the inner dimension of the individual lead-out flow path from the outlet on the second common flow path side of the individual lead-out flow path. By being disposed within, the pressure vibration transmitted through the inside of the individual lead-out flow path is alleviated more quickly. Thereby, it is suppressed more effectively that the injection characteristic of each nozzle varies.

Further, in the above configuration, the apparatus has a plurality of individual supply channels that individually communicate with the plurality of pressure chambers from the first common channel,
It is desirable that the first compliance section adopt a configuration that does not overlap with the plurality of individual supply channels when viewed in the thickness direction of the first compliance section.

According to this configuration, the first compliance section does not overlap with the individual supply flow path when viewed in the thickness direction of the first compliance section, that is, the partition wall that partitions the first compliance section and the individual supply flow path. Do not interfere with each other, and when the first compliance part is deformed, stress concentrates on the part in contact with the partition wall defining the individual supply flow path, and the first compliance part is damaged starting from that part. Or variation in flow resistance in each individual supply flow path is prevented.

Further, in the above configuration, one of the first partition walls separating the plurality of individual supply channels or the second partition wall separating the plurality of individual outlet channels is arranged in parallel. It is desirable to employ a configuration in which the thickness in the direction is thicker than the other thickness and the length in the one flow path extending direction is longer than the other length.

According to this configuration, when the constituent members of the liquid ejecting head are joined in a state of being stacked on each other, even if the relative positions of the respective constituent members are slightly deviated, the first is viewed in the stacking direction of the constituent members. Since the other is within the range of one of the partition walls or the second partition wall, these partition walls can receive the load at the time of joining, and each component member, in particular, the member with the individual supply flow path formed and the individual derivation It becomes possible to more reliably join the member in which the flow path is formed.

Further, in the above-described configuration, the position of the outlet on the second common flow path side in the flow path extending direction of the individual lead-out flow path positioned more on the end side in the flow path juxtaposition direction of the plurality of individual lead-out flow paths; It is desirable to adopt a configuration in which the position of the outlet on the second common flow path side of the individual lead-out flow path located closer to the center side in the flow path juxtaposition direction is different.

According to this configuration, there is a difference in the structure of the walls that divide each of the individual lead-out flow channel located on the end side in the flow channel juxtaposition direction and the individual lead-out flow channel located more centrally than this. Even in this case, the position of the outlet of the individual outlet flow channel located on the end side in the channel parallel arrangement direction is different from the position of the outlet of the individual outlet flow channel located on the center side in the channel parallel direction. Thus, the channel resistances of the individual outlet channels are aligned. As a result, the ejection characteristics such as the amount of ejected ink and the flying speed of each nozzle corresponding to each individual outlet channel are made as much as possible.

Further, in the above configuration, two nozzle groups in which the nozzles are arranged side by side are arranged side by side in a direction orthogonal to the direction in which the nozzles are arranged,
In the juxtaposed direction of the nozzle group, the two first common flow paths forming a pair are arranged between the two second common flow paths forming a pair,
It is desirable to employ a configuration in which the nozzle group is disposed between the two first common flow paths.

According to this configuration, in the juxtaposed direction of the nozzle groups, the paired first common flow paths are disposed between the paired second common flow paths, and the nozzle groups are disposed between these first common flow paths. As a result, the nozzle groups can be arranged at a higher density, and the liquid flow paths including the common flow paths and pressure chambers corresponding to the nozzle groups can be laid out more efficiently inside the liquid jet head. It becomes possible to do.

And the liquid ejecting apparatus according to the present disclosure includes the liquid ejecting head having any one of the above configurations,
A liquid storage section storing liquid supplied to the liquid ejecting head;
A circulation mechanism for circulating liquid between the liquid reservoir and the liquid jet head;
It is characterized by providing.

According to the present disclosure, since the liquid ejecting head can be downsized in the configuration in which the liquid is circulated between the liquid storage unit and the liquid ejecting head, the entire apparatus can be downsized.

It is a front view explaining the structure of one form of a liquid ejecting apparatus. FIG. 5 is a cross-sectional view illustrating a configuration of one form of a liquid jet head. FIG. 6 is an enlarged cross-sectional view of a part of the liquid ejecting head. It is a top view explaining the structure of a common liquid chamber. It is a top view explaining the structure of a common lead-out liquid chamber. It is the schematic diagram which compared the position and dimension of a supply port partition and an outlet channel partition. It is a schematic diagram explaining the flow of the ink which goes to a 1st common flow path side from an individual supply flow path. It is a schematic diagram explaining the flow of the ink which goes to a 1st common flow path side from an individual supply flow path. FIG. 6 is a cross-sectional view illustrating a configuration of a liquid jet head according to a second embodiment. FIG. 10 is a cross-sectional view illustrating a modified example of the configuration of the liquid jet head according to the second embodiment. FIG. 10 is a cross-sectional view illustrating a configuration of a liquid jet head according to a third embodiment. FIG. 10 is a cross-sectional view illustrating a configuration of a liquid jet head according to a fourth embodiment. FIG. 10 is a cross-sectional view illustrating a configuration of a liquid jet head according to a fifth embodiment.

Hereinafter, modes for carrying out the present disclosure will be described with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present disclosure. However, the scope of the present disclosure is limited to those described in the following description unless otherwise specified. However, the present invention is not limited to this embodiment. In the following description, as an example of the liquid ejecting apparatus of the present disclosure, an ink jet recording apparatus (hereinafter referred to as a printer) 1 including an ink jet recording head (hereinafter referred to as a recording head) 10 which is a kind of liquid ejecting head is taken as an example. Do it.

FIG. 1 is a plan view showing the configuration of the printer 1. The printer 1 according to the present embodiment records images, texts, and the like by ejecting liquid ink (a type of liquid in the present disclosure) from the recording head 10 onto the surface of a recording medium S such as recording paper, cloth, or resin film. It is a device that performs. The printer 1 includes a frame 2 and a platen 3 disposed in the frame 2, and the recording medium S is transported onto the platen 3 by a transport mechanism (not shown). A guide rod 4 is installed in the frame 2 in parallel with the platen 3, and ink is exchanged between the recording head 10 and the recording head 10 and the ink cartridge 13 on the guide rod 4. A carriage 5 housing the flow path member 6 is slidably supported. The carriage 5 is configured to reciprocate along the guide rod 4 in the main scanning direction perpendicular to the conveyance direction of the recording medium S. The printer 1 in this embodiment performs a recording operation by ejecting ink from the nozzles 28 (see FIG. 2 and the like) of the recording head 10 while reciprocating the carriage 5 relative to the recording medium S.

On one side of the frame 2, an ink cartridge 13 which is a kind of liquid storage unit is mounted. The ink stored in the ink cartridge 13 is supplied to the recording head 10 after being introduced into the flow path member 6 through the ink supply tube 15 by the pressure of the pump 14. Further, the ink from the recording head 10 is collected in the ink cartridge 13 through the flow path member 6 and the ink collection tube 16. That is, the pump 14 functions as a circulation mechanism that circulates ink between the ink cartridge 13 and the recording head 10. Although not shown, the flow path member 6 has a flow path for supplying the ink introduced from the ink supply tube 15 to the recording head 10 side, and a flow path for sending the ink discharged from the recording head 10 to the ink recovery tube 16 inside. Prepare. In addition, an adjustment unit that adjusts the supply pressure of ink to the recording head 10 and a filter (not shown) that captures bubbles and foreign matters contained in the ink are provided inside the flow path member 6. Note that, instead of the configuration in which the ink is circulated between the ink cartridge 13 and the recording head 10 as described above, a sub tank (not shown) (that is, a kind of liquid storage unit) is provided between the ink cartridge 13 and the recording head 10. ), And a configuration in which ink is circulated between the sub tank and the recording head 10 may be employed.

A capping mechanism 21 having a cap 22 that seals the nozzle surface of the recording head 10 is disposed at a home position provided on one side in the moving range of the recording head 10 inside the frame 2. The capping mechanism 21 prevents the ink solvent from evaporating from the nozzles 28 by sealing the nozzle surface of the recording head 10 in the standby state at the home position with the cap 22. In addition, the capping mechanism 21 can perform a cleaning operation in which the inside of the sealing empty portion is made negative pressure while the nozzle surface of the recording head 10 is sealed, and ink and bubbles are forcibly sucked from the nozzles 28.

Next, the configuration of the recording head 10 in the present embodiment will be described.
2 is a cross-sectional view of the recording head 10, and FIG. 3 is an enlarged cross-sectional view of a part of the recording head 10 in FIG. In the recording head 10 according to the present embodiment, a plurality of constituent members such as a fixed plate 23, a nozzle plate 20, a first communication plate 24, a second communication plate 25, an actuator substrate 26, and a case 27 are laminated and bonded by an adhesive or the like. Has been unitized. In the following description, the stacking direction of the constituent members of the recording head 10 will be described as the vertical direction or the third direction Z as will be described later.

The actuator substrate 26 in the present embodiment includes a pressure chamber forming substrate 29 in which a pressure chamber 30 communicating with a nozzle 28 formed in the nozzle plate 20 is formed, and a drive element that causes pressure vibration in ink in each pressure chamber 30. As a piezoelectric element 31, a vibration plate 33 provided between the pressure chamber forming substrate 29 and the piezoelectric element 31, and a protective substrate 32 for protecting the piezoelectric element 31. A wiring empty portion 32a through which a wiring member electrically connected to the piezoelectric element 31 is inserted is formed at a substantially central portion of the protective substrate 32 in plan view. The lead electrode of the piezoelectric element 31 is disposed in the wiring empty portion 32a, and the wiring terminal of the wiring member is electrically connected to the lead electrode. A drive signal or the like sent from the control unit of the printer 1 is supplied to the piezoelectric element 31 through a wiring member.

The pressure chamber forming substrate 29 of the actuator substrate 26 is made of a silicon single crystal substrate. The pressure chamber forming substrate 29 has a plurality of pressure chambers 30 arranged in parallel along the first direction X (in other words, the nozzle row direction) in which the nozzles 28 are arranged in parallel corresponding to the plurality of nozzles 28. Yes. The pressure chamber 30 is a hollow portion that is long in the second direction Y orthogonal to the first direction X. A first nozzle communication port 34 of the first communication plate 24 communicates with one end portion of the pressure chamber 30 in the second direction Y, and the other end portion is individually supplied via a supply port 44. The flow path 39 communicates. In the pressure chamber forming substrate 29 in the present embodiment, a total of two rows of pressure chambers corresponding to the two nozzle rows formed on the nozzle plate 20 in the second direction Y are arranged in parallel in the second direction Y. ing. The pressure chamber forming substrate 29 may be made of a metal such as stainless steel.

A vibration plate 33 is laminated on the upper surface of the pressure chamber forming substrate 29 (in other words, the surface opposite to the first communication plate 24 side), and the upper opening of the pressure chamber 30 is sealed by the vibration plate 33. Yes. That is, a part of the pressure chamber 30 is partitioned by the diaphragm 33. The diaphragm 33 includes, for example, an elastic film made of silicon dioxide (SiO ₂ ) formed on the upper surface of the pressure chamber forming substrate 29 and an insulator film made of zirconium oxide (ZrO ₂ ) formed on the elastic film. And consist of And the piezoelectric element 31 is laminated | stacked on the area | region corresponding to the pressure chamber 30 on this diaphragm 33, respectively. The diaphragm 33 may be made from a metal such as nickel.

The piezoelectric element 31 of this embodiment is a so-called flexure mode piezoelectric element. The piezoelectric element 31 is formed, for example, by sequentially laminating a lower electrode layer, a piezoelectric layer, and an upper electrode layer (all not shown) on the vibration plate 33. The piezoelectric element 31 configured in this manner bends and deforms in the vertical direction when an electric field corresponding to the potential difference between both electrodes is applied between the lower electrode layer and the upper electrode layer. In the present embodiment, a plurality of piezoelectric elements 31 are formed on the vibration plate 33 so as to correspond to the plurality of pressure chambers 30, respectively, and the rows of the piezoelectric elements 31 correspond to the rows of the pressure chambers 30. A total of two rows are provided.

The protective substrate 32 is laminated on the diaphragm 33 so as to cover the rows of the plurality of piezoelectric elements 31. Inside the protective substrate 32, a long accommodation space 32b capable of accommodating the row of piezoelectric elements 31 is formed. The accommodation space 32b is a recess formed halfway in the height direction of the protective substrate 32 from the lower surface side (that is, the diaphragm 33 side) of the protective substrate 32 toward the upper surface side (that is, the case 27 side). In the protection substrate 32 in the present embodiment, accommodation spaces 32b are respectively formed on both sides of the wiring vacant portion 32a.

The first communication plate 24 having a larger area than the actuator substrate 26 is joined to the lower surface of the actuator substrate 26. Further, the second communication plate 25 is joined to the lower surface of the first communication plate 24 with a first flexible portion 36 described later interposed therebetween. These

communication plates

24 and 25 are made of a silicon single crystal substrate in the same manner as the pressure chamber forming substrate 29. In the first communication plate 24 in the present embodiment, a first nozzle communication port 34 for communicating the pressure chamber 30 and the second nozzle communication port 35 of the second communication plate 25 is provided in common to each pressure chamber 30. A common liquid chamber 37 that constitutes a part of the first common flow path 40, an individual supply flow path 39 that communicates the common liquid chamber 37 and the pressure chamber 30, and a common discharge liquid chamber 48 of the second communication plate 25. A communication liquid chamber 49 that communicates with the outlet channel 46 of the case 27 is formed. The communication liquid chamber 49 is a liquid chamber having an opening having a shape and a dimension that follows the opening shape on the lower surface side of the outlet channel 46 of the case 27, and penetrates the thickness direction of the first communication plate 24. The common liquid chamber 37 is a liquid chamber provided in common to the plurality of pressure chambers 30, in other words, the plurality of nozzles 28, and extends in series along the nozzle row direction. In this embodiment, two are formed corresponding to each nozzle row of the nozzle plate 20. A first compliance section 42 is provided at a position corresponding to the bottom of the common liquid chamber 37. Details of the first compliance unit 42 will be described later. In addition, you may produce these communicating

plates

24 and 25 from metals, such as stainless steel.

FIG. 4 is a plan view for explaining the configuration of the common liquid chamber 37. In addition, the part shown by hatching has shown the range of the 1st compliance part 42 mentioned later. The common liquid chamber 37 in the present embodiment includes a first liquid chamber 37a that communicates with the introduction flow path 45 of the case 27, and a second liquid chamber 37b that communicates the first liquid chamber 37a and the supply port 44. Is done. The first liquid chamber 37 a is a liquid chamber having an opening set in a shape and size following the opening shape on the lower surface side of the introduction flow path 45 of the case 27, and penetrates the thickness direction of the first communication plate 24. Part. The second liquid chamber 37 b is a portion that is recessed from the lower surface side to the middle in the plate thickness direction, leaving the thin portion 47 on the upper surface side of the first communication plate 24. The second liquid chamber 37b is formed adjacent to the first liquid chamber 37a in the second direction Y. The second liquid chamber 37b is located closer to the nozzle 28 than the first liquid chamber 37a. The thin portion 47 constitutes the ceiling surface of the second liquid chamber 37b. One end of the second liquid chamber 37b in the second direction Y communicates with the first liquid chamber 37a, while the other end of the second direction Y is the third direction, which is the stacking direction of the components of the recording head 10. It is formed at a position overlapping with a part of the pressure chamber 30 as viewed in Z. At the other end of the second liquid chamber 37b, a plurality of supply ports 44 penetrating the thin portion 47 are formed along the first direction X corresponding to the plurality of pressure chambers 30 of the pressure chamber forming substrate 29, respectively. ing. The lower end of the supply port 44 communicates with the second liquid chamber 37 b, and the upper end of the supply port 44 communicates with the pressure chamber 30 of the pressure chamber forming substrate 29.

In the thin portion 47 of the second liquid chamber 37b in the present embodiment, a plurality of supply port partition walls 38 (corresponding to the first partition wall in the present disclosure) for partitioning adjacent supply ports 44 are formed. The supply port partition wall 38 is a wall extending along the second direction Y from the side surface at the other end in the second direction Y of the second liquid chamber 37b toward the first liquid chamber 37a side at one end. It protrudes from the lower surface of 47 toward the second communication plate 25 side. The height in the third direction Z of the supply port partition wall 38 in the present embodiment is aligned with the depth in the third direction Z of the second liquid chamber 37b. Then, the second communication plate 24 is joined to the surface of the supply port partition wall 38 on the second communication plate 24 side via the first flexible portion 36, so that the supply port 44 from the first liquid chamber 37a side. An individual supply flow path 39 extending along the second direction Y toward is defined. A plurality of the individual supply channels 39 are formed along the first direction X in correspondence with the plurality of pressure chambers 30 of the pressure chamber forming substrate 29. The supply port 44 is a portion having a channel cross-sectional area set smaller than that of the individual supply channel 39, and imparts channel resistance to the ink flowing from the common liquid chamber 37 into the pressure chamber 30. Functions as a constriction.

Here, among the individual supply channels 39, the

individual supply channels

39 a and 39 b positioned at both ends in the second direction Y (that is, the channel parallel arrangement direction) of the second liquid chamber 37 b are partitioned. One of the walls is a supply port partition wall 38, while the other wall is a side wall that partitions the common liquid chamber 37. The dimension in the flow path extending direction of the side wall of the common liquid chamber 37, that is, the dimension in the second direction Y is sufficiently longer than the length in the second direction Y of the supply port partition wall 38. When the lengths of the supply port bulkheads 38 are made uniform for the supply channel 39, the channel resistances of the

individual supply channels

39 a and 39 b at both ends are higher than the channel resistances of the other individual supply channels 39. End up. That is, due to the difference in the structure of the walls that divide the

individual supply channels

39a and 39b located on the end side in the channel juxtaposition direction and the individual supply channels 39 located on the center side of the

individual supply channels

39a and 39b. Channel resistance will change.

For this reason, in the present embodiment, the length L1 ′ of the supply

port partition walls

38a and 38b defining the individual

supply flow paths

39a and 39b at both ends is located on the center side in the first direction X. The length is set shorter than the length L1 of the supply port partition wall 38 that defines the other individual supply channel 39. That is, in the second direction Y, the outlets on the first common channel 40 side of the

individual supply channels

39a and 39b are on the supply port 44 side than the outlets on the first common channel 40 side of the other individual supply channels 39. Is located. The outlet of each individual supply channel 39 on the first common channel 40 side is an individual defined by the end on the first common channel 40 side of the supply port partition wall 38 that divides the individual supply channel 39. This is an opening of the supply flow path 39. As described above, there is a difference in the structure of the walls that define the individual supply flow path 39 located on the end side in the first direction X and the individual supply flow path 39 located on the center side of the individual supply flow path 39. In this case, the positions of the outlets of the

individual supply channels

39a and 39b located on the more end side are different from the positions of the outlets of the individual supply channels 39 located on the more central side. The flow path resistance is aligned as much as possible. As a result, the ejection characteristics such as the amount of ink ejected from each nozzle 28 in the nozzle row and the flying speed (more specifically, the initial speed at the time of ejection) are made as uniform as possible. In the present embodiment, the lengths of the supply

port partition walls

38 a and 38 b defining the individual

supply flow paths

39 a and 39 b at both ends in the first direction X are the same as the supply port partition walls 38 of the other individual supply flow paths 39. Although the structure set shorter than the length of was illustrated, it is not restricted to this. For example, the length of the supply port partition wall 38 corresponding to the plurality of individual supply channels 39 at both ends in the first direction X is gradually reduced from the center side to the end side in the first direction X. You can also Thereby, the channel resistances of the individual supply channels 39 are more effectively aligned.

In the second communication plate 25 according to the present embodiment, a second nozzle communication port 35 that allows the first nozzle communication port 34 and the nozzle 28 to communicate with each other, and a second common flow path 41 that is provided in common to each pressure chamber 30. A common lead-out liquid chamber 48 that constitutes a part, an individual lead-out flow path 50 that communicates the common lead-out liquid chamber 48 and the second nozzle communication port 35, and a first compliance space 51 that constitutes the first compliance section 42. , Is formed. The common discharge liquid chamber 48 is a liquid chamber provided in common to the plurality of pressure chambers 30, in other words, the plurality of nozzles 28, and extends in series along the first direction X. In this embodiment, two are formed corresponding to each nozzle row of the nozzle plate 20. A second compliance portion 43 is provided on the bottom of the common liquid chamber 37, that is, on the nozzle plate 20 side. Details of the second compliance unit 43 will be described later.

FIG. 5 is a plan view for explaining the configuration of the common outlet liquid chamber 48. In addition, the part shown by hatching has shown the range of the 2nd compliance part 43 mentioned later. The common lead-out liquid chamber 48 in the present embodiment communicates the first lead-out liquid chamber 48 a communicating with the communication liquid chamber 49 of the first communication plate 24, and the first lead-out liquid chamber 48 a and the second nozzle communication port 35. A second outlet liquid chamber 48b. The first lead-out liquid chamber 48 a is a liquid chamber having an opening having a shape and a size that follows the opening shape of the lower surface side of the communication liquid chamber 49 of the first communication plate 24, and penetrates the thickness direction of the second communication plate 25. It is the part which did. The second lead-out liquid chamber 48b is a portion that is recessed from the lower surface side to the middle in the plate thickness direction, leaving the thin portion 52 on the upper surface side of the second communication plate 25. The second lead-out liquid chamber 48b is formed adjacent to the first lead-out liquid chamber 48a in the second direction Y. The second lead-out liquid chamber 48b is located closer to the nozzle 28 than the first lead-out liquid chamber 48a. The thin portion 52 constitutes the ceiling surface of the second outlet liquid chamber 48b. One end portion of the second outlet liquid chamber 48b in the second direction Y communicates with the first outlet liquid chamber 48a, while the other end portion of the second direction Y communicates with the first nozzle communication port 34 of the first communication plate 24. It is formed in the corresponding position. At the other end of the second lead-out liquid chamber 48b, second nozzle communication ports 35 penetrating in the thickness direction of the second communication plate 25 correspond to the plurality of pressure chambers 30 of the pressure chamber forming substrate 29, respectively. A plurality of lines are formed along the first direction X. The lower end of the second nozzle communication port 35 communicates with the nozzle 28, and the upper end of the second nozzle communication port 35 communicates with the first nozzle communication port 34 of the first communication plate 24.

In the thin portion 52 of the second outlet liquid chamber 48b, a plurality of outlet passage partition walls 53 (corresponding to the second partition walls in the present disclosure) for partitioning adjacent second nozzle communication ports 35 are formed. The outlet channel partition wall 53 is a wall extending along the second direction Y from the side surface at the other end in the second direction Y of the second outlet liquid chamber 48b toward the first outlet liquid chamber 48a side at one end. , And protrudes from the lower surface of the thin portion 52 toward the lower surface side of the second communication plate 25, in other words, toward the nozzle plate 20 side. The height of the outlet channel partition wall 53 in the third direction Z in the present embodiment is aligned with the depth of the second outlet liquid chamber 48b in the third direction Z. The nozzle plate 20 is joined to the surface of the outlet passage partition wall 53 on the nozzle plate 20 side via the second flexible portion 54, whereby the first outlet liquid chamber 48a is connected from the second nozzle communication port 35 side. An individual outlet channel 50 extending along the second direction Y toward the side is defined. A plurality of the individual outlet channels 50 are formed along the first direction X in correspondence with the plurality of pressure chambers 30 of the pressure chamber forming substrate 29.

Among the individual outlet channels 50, the

individual outlet channels

50a and 50b positioned at both ends in the second direction Y of the second outlet liquid chamber 48b are channel resistances for the same reason as the

individual supply channels

39a and 39b. However, it becomes high compared with the channel resistance of the other individual derivation channel 50. For this reason, in the present embodiment, the length L2 ′ of the outlet

passage partition walls

53a and 53b defining the

individual outlet passages

50a and 50b at both ends is positioned closer to the center in the first direction X than this. It is set shorter than the length L2 of the outlet channel partition wall 53 that defines the other individual outlet channel 50. As a result, the channel resistances of the

individual outlet channels

50a and 50b at both ends and the channel resistances of the other individual outlet channels 50 are aligned as much as possible. As a result, the ejection characteristics such as the amount of ink ejected from each nozzle 28 and the flying speed in the nozzle array are made as uniform as possible. In the present embodiment, the lengths of the outlet

channel partition walls

53a and 53b that define the

individual outlet channels

50a and 50b at both ends in the first direction X are the outlet channels of the other individual outlet channels 50. Although the structure set shorter than the length of the partition 53 was illustrated, it is not restricted to this. For example, the length of the outlet channel partition walls 53 corresponding to the plurality of individual outlet channels 50 at both ends in the first direction X is configured to be shortened stepwise from the center side to the end side in the first direction X. It can also be adopted. Thereby, the channel resistance of each individual derivation channel 50 is arranged more effectively.

Further, a narrowed portion 56 having a channel cross-sectional area set smaller than that of the individual outlet channel 50 is provided at a boundary portion between each individual outlet channel 50 and the second nozzle communication port 35. In the present embodiment, a portion protruding from the lower surface of the thin portion 52 toward the lower surface side of the second communication plate 25, in other words, toward the nozzle plate 20 side, is formed, and the protruding end surface is the lower surface of the second communication plate 25. It is located slightly on the thin portion 52 side. The nozzle plate 20 is joined to the lower surface of the second communication plate 25 via the second flexible portion 54, so that a narrowed portion 56 is formed between the protruding portion and the nozzle plate 20. The narrowed portion 56 is a flow path that communicates with the individual outlet flow path 50 and the second nozzle communication port 35, and imparts flow path resistance to the ink that flows into the individual discharge flow path 50 from the second nozzle communication port 35. . The narrowed portion 56 is not limited to one formed by a portion protruding from the thin-walled portion 52, that is, one that narrows the flow path in the third direction Z. For example, the thickness of the wall of the outlet flow path partition wall 53 In which the channel cross-sectional area of the individual outlet flow channel 50 is narrowed in the first direction X more than other portions by partially thickening the channel width of the individual outlet channel 50 partially. Alternatively, a combination of these can be employed.

The nozzle plate 20 formed with a plurality of nozzles 28 is joined to the lower surface of the second communication plate 25. The nozzle plate 20 in this embodiment is composed of, for example, a silicon single crystal substrate. The nozzle plate 20 is bonded to the lower surface of the first communication plate 24 by an adhesive or the like in a state where the plurality of second nozzle communication ports 35 and the plurality of nozzles 28 are individually communicated with each other. In the nozzle plate 20 according to the present embodiment, a total of two nozzle groups (that is, nozzle rows) in which a plurality of nozzles 28 are arranged in a row in the second direction Y are formed. In the nozzle plate 20, a through-hole penetrating in the thickness direction of the nozzle plate 20 is provided in a region corresponding to the common lead-out liquid chamber 48 located outside the nozzle group in the second direction Y. . The surface of the through hole on the second communication plate 25 side is sealed by the second flexible portion 54, and the surface of the through hole opposite to the second communication plate 25 side is sealed by the fixing plate 23. As a result, the second compliance space 55 is defined. The flexible region of the second flexible portion 54 that defines the second compliance space 55 corresponds to the second common channel 41 side or the second compliance space 55 according to the pressure vibration in the second common channel 41. It functions as the 2nd compliance part 43 displaced to the side. Details of the second compliance unit 43 will be described later. The nozzle plate 20 may be made of a metal such as stainless steel.

FIG. 6 shows the positions and dimensions of the supply port partition wall 38 and the outlet flow channel partition wall 53 when viewed from the third direction Z in a state where the first communication plate 24 and the second communication plate 25 are joined in a positioned state. It is the schematic diagram compared. When the constituent members of the nozzle plate 20, the second communication plate 25, the first communication plate 24, and the actuator substrate 26 are stacked and bonded to each other, a load is applied in the stacking direction, that is, the third direction Z. It is done. In this regard, in the present embodiment, the thickness T2 of the outlet channel partition wall 53 in the first direction X is set larger than the thickness T1 of the supply port partition wall 38 in the first direction X. Further, the length L2 of the outlet channel partition wall 53 in the first direction X is set larger than the length L1 of the supply port partition wall 38 in the second direction Y (in other words, the channel extending direction). For this reason, the supply port partition wall 38 and the discharge channel partition wall 53 arranged at positions overlapping each other when viewed in the third direction Z, which is the stacking direction of the constituent members, are within the range of the one discharge channel partition wall 53. The supply port partition wall 38 is located. When the dimensional relationship between the supply port partition wall 38 and the outlet channel partition wall 53 is set in this way, the nozzle plate 20, the second communication plate 25, the first communication plate 24, and the actuator substrate 26 are joined to each other. In addition, even if the relative positions of the constituent members are deviated within the tolerance range, the supply port partition wall 38 is accommodated within the range of the outlet flow channel partition wall 53, so that these

partition walls

38 and 53 can receive the load at the time of joining. It becomes possible to join each component, especially the 1st communicating plate 24 and the 2nd communicating plate 25 more reliably. It should be noted that the dimensional relationship between the outlet channel partition wall 53 and the supply port partition wall 38 may be reversed. Depending on the positional relationship between the base ends of these partition walls in the second direction, that is, the supply port partition wall 38 end on the supply port 44 side, and the outlet flow path partition wall 53 on the second nozzle communication port 35 end. A configuration in which the length of the thicker partition wall is shorter than the length of the other partition wall is also conceivable. That is, in the second direction Y, the base end position of the thinner partition wall is arranged closer to the nozzle 28 side than the base end position of the thicker partition wall. is assumed. In this case, if the end on the common flow path side in the second direction Y of the thicker partition is positioned closer to the common flow path than the end on the common flow path side in the second direction Y of the thinner partition. Similarly, the load at the time of joining can be received by these partition walls, and each constituent member, particularly, the first communication plate 24 and the second communication plate 25 can be more reliably joined.

Each component of the nozzle plate 20, the second communication plate 25, the first communication plate 24, and the actuator substrate 26 is joined to the case 27. As shown in FIG. 2, an accommodation space 58 for accommodating the actuator substrate 26 is formed on the lower surface side of the case 27 in the present embodiment. Then, the first communication plate 24 is joined to the lower surface of the case 27 in a state where the actuator substrate 26 is accommodated in the accommodation space 58. An insertion space 59 that communicates with the accommodation space 58 is formed at a substantially central portion of the case 27 in plan view. The insertion space 59 communicates with the wiring space 32 a of the actuator substrate 26. The wiring member is configured to be inserted into the wiring empty portion 32 a through the insertion empty portion 59. In addition, in the case 27, on both sides of the insertion empty portion 59 and the accommodation empty portion 58 in the second direction Y, introduction flow paths 45 that communicate with the common liquid chamber 37 of the first communication plate 24 are formed. Further, outlet channels 46 communicating with the communication liquid chamber 49 of the first communication plate 24 are formed outside the introduction channels 45 in the second direction Y, respectively. In addition, on the upper surface of the case 27, an introduction port 62 that communicates with each introduction channel 45 and a lead-out port 63 that communicates with the lead-out channel 46 are opened. The introduction port 62 is a portion into which the ink sent from the ink cartridge 13 side through the ink supply tube 15 is introduced through the flow path member 6. The outlet 63 is a part through which ink from the second common channel 41 is sent to the ink cartridge 13 side via the channel member 6. In the present embodiment, the ink sent from the ink cartridge 13 side by driving the pump 14 is introduced into the first common flow path 40 from the introduction port 62. The ink introduced into the first common flow path 40 is supplied from the individual supply flow paths 39 to the pressure chambers 30 and supplied to the nozzles 28 through the first nozzle communication port 34 and the second nozzle communication port 35. Further, the ink heading from the second nozzle communication port 35 to the second common flow channel 41 through the narrowed portion 56 and the individual discharge flow channel 50 passes from the discharge port 63 to the ink cartridge 13 through the flow recovery member 16 and the ink recovery tube 16. To be recovered. That is, ink is circulated between the ink cartridge 13 and the ink flow path in the recording head 10. In this embodiment, the ink flow path (that is, the liquid flow path) in the recording head 10 is from the introduction port 62 to the first common flow path 40, the individual supply flow path 39, the pressure chamber 30, and the

nozzle communication ports

34 and 35. , The nozzle 28, the individual outlet channel 50, the second common channel 41, and the outlet port 63. The ink circulation path may be reversed. That is, a configuration is adopted in which ink from the ink cartridge 13 is introduced into the second common flow path 41, passes through the

nozzle communication ports

34 and 35 and the pressure chamber 30, and travels from the first common flow path 40 to the ink cartridge 13. You can also.

The fixing plate 23 is, for example, a metal plate material such as stainless steel. The fixing plate 23 in the present embodiment is formed with an opening 23a penetrating in the thickness direction in order to expose the nozzles 28 at positions corresponding to the regions where the nozzles 28 are formed in the nozzle plate 20. ing. In the present embodiment, the fixing plate 23 blocks a part of the second compliance space 55 by closing the opening on the lower surface side of the through hole formed in the nozzle plate 20.

Next, the first compliance unit 42 will be described. A first compliance space 51 is provided on the second communication plate 25 on the first communication plate 24 side, that is, on the upper surface side opposite to the second lead-out liquid chamber 48 b side. The first compliance space 51 includes a concave portion that is recessed from the upper surface of the second communication plate 25 to the middle of the thin portion 52 in the thickness direction (that is, the third direction Z). A portion where the opening surface of the first compliance space 51 is sealed by the first flexible portion 36 functions as the first compliance portion 42. In addition, a region that is substantially deformable when pressure is applied to the first flexible portion 36 is a flexible region. The first compliance space 51 in the present embodiment is open to the atmosphere through an open air path (not shown). The first flexible portion 36 is made of a thin material having flexibility, such as polyphenylene sulfide, silicon nitride film, or tantalum oxide film. The second flexible portion 54 described later has the same configuration as the first flexible portion 36. The first flexible portion 36 defines a part of the common liquid chamber 37, that is, a part of the first common flow path 40. In the following, the state of the flexible region of the first flexible portion 36 in a state where no pressure vibration is generated in the ink flow path of the recording head 10 due to the ejection of ink from the nozzles 28 is referred to as an initial state. Although it is assumed that the flexible region of the first flexible portion 36 is substantially parallel to the opening surface of the first compliance space 51 in the initial state, the weight and temperature of the ink in the own weight and the first common flow path 40 are assumed. For example, the initial flexible region may be slightly bent toward the first compliance space 51 or the first common flow path 40. In addition, you may produce the 1st flexible part 36 or the 2nd flexible part 54 from metals, such as stainless steel.

The flexible region in the first flexible portion 36 of the first compliance portion 42 is displaced from the initial state (in other words, bent) in response to pressure vibration of the ink in the first common flow path 40 (in other words, pressure change). ). More specifically, when the pressure of the ink in the first common flow path 40 is higher than the internal pressure of the first compliance space 51, the flexible region of the first flexible portion 36 is changed from the initial state to the first compliance space. Displace to 51 side. Further, when the pressure of the ink in the first common flow path 40 becomes lower than the internal pressure of the first compliance space 51, the flexible region of the first flexible portion 36 changes from the initial state to the first common flow path 40 side. It is displaced to. Thereby, the pressure vibration generated in the ink in the ink flow path, particularly the ink in the first common flow path 40 in accordance with the recording operation of the recording head 10, that is, the ink ejection operation, in other words, the residual vibration after the ink ejection. Alleviated. Here, the flat state where the first flexible portion 36 is not bent, in other words, parallel to the upper and lower surfaces of the substrate on which the first compliance portion 42 is provided (that is, the first communication plate 24 in the present embodiment). The thickness direction of the first flexible portion 36 in the state is the thickness direction of the first compliance portion 42. In the present embodiment, the thickness direction of the first compliance portion 42 is the third direction Z. Similarly, the thickness direction of the second compliance portion 43 described later is a third direction Z.

As shown in FIG. 4, the first compliance section 42 is formed from one end to the other end of the first common flow path 40 in the first direction X, and is opposite to the supply port 44 in the second direction Y. It is formed from the side end to a little before the supply port partition wall 38. Here, the parallel dimension of the individual supply channels 39 in the thin portion 47, that is, the inner dimension of the individual supply channels 39 in the first direction X, that is, the width is W (hereinafter, the individual supply channels 39 (W1 is the width and W2 is the width of the individual outlet channel 50), the individual supply channels 39 are individually supplied in the extending direction of the individual supply channels 39, that is, in the second direction Y. The edge closest to the flow path 39, in other words, the end on the individual supply flow path 39 side in the second direction Y is disposed within W1 from the outlet of the individual supply flow path 39 on the first common flow path 40 side. In the present embodiment, the second liquid chamber 37b is located within W1 from the outlet on the first common flow path 40 side of the individual supply flow paths 39 other than the individual

supply flow paths

39a and 39b located at both ends in the first direction X. The end of the flexible region of 1 compliance part 42 is arranged. Thus, by arranging the first compliance portion 42 as close as possible to the outlet of the individual supply flow path 39, the pressure vibration transmitted through the inside of the individual supply flow path 39 is alleviated more quickly. In the present embodiment, the first compliance section 42 is within W1 from the outlet of the individual supply channel 39 on the first common channel 40 side and overlaps with each individual supply channel 39 when viewed in the third direction Z. It is arranged at a position where it is not possible. As a result, the flexible region of the first compliance section 42 and the supply port partition wall 38 defining the individual supply flow path 39 do not interfere with each other, so that the flexible region of the first compliance section 42 is supplied when deformed. Stress concentrates on the portion in contact with the partition wall 38, and the first flexible portion 36 of the first compliance portion 42 is damaged starting from this portion, or the flow resistance in each individual supply flow path 39 varies. Is prevented.

7 and 8 show the flow of ink from the individual supply channel 39 toward the first common channel 40, that is, the ink when the pressure of the ink inside the pressure chamber 30 increases with the ink ejection operation. It is a schematic diagram explaining the flow of this. Here, when ink is ejected independently from a predetermined nozzle 28, the ink that has flowed from the outlet of the individual supply channel 39 corresponding to the nozzle 28 to the first common channel 40 side is as shown in FIG. In addition, the first common flow path 40 can diffuse over a relatively wide range. On the other hand, when ink is ejected simultaneously from a plurality of nozzles 28, as shown in FIG. 8, the ink is simultaneously directed from the outlets of the individual supply channels 39 adjacent to each other toward the first common channel 40 side. Therefore, in the region indicated by the broken line in FIG. 8, the pressure in the vicinity of the outlet of each individual outlet channel 50 increases as if the supply port partition wall 38 was extended. For this reason, the ink that has flowed from the outlet of the individual supply flow path 39 toward the first common flow path 40 cannot travel in the lateral direction, that is, the adjacent individual supply flow path 39 side. Will increase. As a result, there is a possibility that the ejection characteristics such as the amount of ink ejected and the flying speed vary depending on the number of nozzles 28 that are ejected simultaneously. In order to deal with such a problem, in the present embodiment, since the first compliance section 42 is disposed within W1 from the outlet of the individual supply flow path 39 on the first common flow path 40 side, the nozzles 28 that perform injection simultaneously. Regardless of the number, it is possible to reduce the variation in the injection characteristics.

Next, the second compliance unit 43 will be described. As described above, the second compliance portion 43 is provided in the nozzle plate 20. Similarly to the first compliance space 51, the second compliance space 55 of the second compliance unit 43 is also opened to the atmosphere through an air release path (not shown). The second flexible portion 54 of the second compliance portion 43 defines a part of the second common flow path 41. Similar to the first compliance portion 42, the flexible region of the second flexible portion 54 of the second compliance portion 43 is changed from the initial state to the second compliance space 55 according to the pressure vibration of the ink in the second common flow path 41. Alternatively, it is displaced toward the second common flow path 41 side. Thereby, the pressure vibration generated in the ink in the ink flow path, particularly the ink in the second common flow path 41 accompanying the recording operation of the recording head 10, that is, the ink ejecting operation, in other words, the residual vibration after the ink ejection. Alleviated.

As shown in FIG. 5, the second compliance portion 43 is formed from one end to the other end of the second common flow path 41 in the first direction X, and is opposite to the supply port 44 in the second direction Y. It is formed from the side end to a little before the outlet channel partition wall 53. More specifically, the width of the individual lead-out channel 50 is W2, and the edge closest to the individual lead-out channel 50 in the flexible region of the second flexible portion 54 in the second direction Y, in other words, the second direction The end of the individual lead-out flow path 50 in Y is disposed within W2 from the outlet of the individual lead-out flow path 50 on the second common flow path 41 side. In the present embodiment, the second liquid chamber 37b is located within W2 from the outlet on the second common flow path 41 side of the individual lead-

out flow paths

50a, 50b other than the individual lead-

out flow paths

50a, 50b located at both ends in the first direction X. 2 The end of the flexible region of the compliance part 43 is arranged. The outlet on the second common channel 41 side is an opening of the individual outlet channel 50 defined by the end of the outlet channel partition wall 53 defining the individual outlet channel 50 on the second common channel 41 side. . As described above, by arranging the second compliance portion 43 as close as possible to the outlet of the individual derivation flow path 50, the pressure vibration transmitted through the inside of the individual derivation flow path 50 is alleviated more quickly. In the present embodiment, the second compliance section 43 is within W2 from the outlet of the individual lead-out flow path 50 on the second common flow path 41 side, and overlaps with each individual lead-out flow path 50 when viewed in the third direction Z. It is arranged at a position where it is not possible. As a result, the flexible region of the second compliance portion 43 and the supply port partition wall 38 defining the individual lead-out flow path 50 do not interfere with each other, so that the flexible region of the first compliance portion 42 is derived when it is deformed. Stress concentrates on the part in contact with the flow path partition wall 53 and the second flexible part 54 of the first compliance section 42 is damaged starting from this part, or the flow resistance in each individual outlet flow path 50 varies. Is prevented.

In the recording head 10 configured as described above, the piezoelectric element 31 is driven in accordance with the drive signal from the control unit, whereby pressure vibration is generated in the ink in the pressure chamber 30, and ink is ejected from a predetermined nozzle 28 by this pressure vibration. The Further, the first flexible portion 36 of the first compliance portion 42 on the forward path side in the ink flow path and the return path side in the ink flow path in accordance with the pressure vibration generated in the ink flow path with the liquid ejecting operation of the recording head 10 When the second flexible portion 54 of the second compliance portion 43 is displaced, the pressure vibration is absorbed. This suppresses variation in ejection characteristics due to pressure vibration that is residual vibration after ink ejection.

In the recording head 10 according to the present disclosure, the first compliance portion 42 and the second compliance portion 43 are viewed in the thickness direction of the

compliance portions

42 and 43, that is, in the third direction Z in the present embodiment. Are arranged so as to overlap each other, in other words, overlap each other. In the present embodiment, the third direction Z and the thickness direction of the nozzle plate 20 are parallel. That is, in the present embodiment, the first compliance portion 42 and the second compliance portion 43 are disposed so as to overlap in the thickness direction of the nozzle plate 20. Note that the first compliance portion 42 and the second compliance portion 43 “overlap” in the thickness direction of the nozzle plate 20 means that the first compliance portion 42 and the second compliance portion 43 have a thickness of the nozzle plate 20. It means that it opposes in a direction. The first compliance part 42 and the second compliance part 43 are “opposing” both when there is no other object between the first compliance part 42 and the second compliance part 43. It means to include. Further, “overlapping” the first compliance portion 42 and the second compliance portion 43 in the thickness direction of the nozzle plate 20 means that the first compliance portion 42 and the first compliance portion 42 are in a projection plane perpendicular to the thickness direction of the nozzle plate 20. It also means that when the second compliance unit 43 is projected, there is a region where the first compliance unit 42 and the second compliance unit 43 overlap on the projection surface. Here, the state where the first compliance portion 42 and the second compliance portion 43 overlap each other includes a state where both overlap, but more than half of the areas of the

compliance portions

42 and 43 overlap each other. The state is more desirable. Moreover, when the area of the 1st compliance part 42 and the area of the 2nd compliance part 43 are the same, the state where both of them overlapped mutually further is further desirable. Alternatively, when one of the areas of the first compliance portion 42 and the second compliance portion 43 is smaller than the other area, the smaller flexible region is the larger flexible region. More desirably, the state is within a range, that is, one is included in the other.

In the present embodiment, the area of the second compliance portion 43 is set to be larger than the area of the first compliance portion 42, and the range of the flexible region of the second compliance portion 43 as viewed from the third direction Z. Each

compliance part

42 and 43 is arrange | positioned so that the flexible area | region of the 1st compliance part 42 may be included in the inside. Thus, among these

compliance parts

42 and 43, the area of the flexible region of the second compliance part 43 on the return path side is set larger, so that the compliance of the second compliance part 43 becomes the first compliance part. It is larger than 42 compliance. Compliance [m ³ / N] means the amount of deformation per unit pressure. Here, in the configuration in which ink circulates between the ink cartridge 13 and the recording head 10, pressure vibration during driving of the pump 14 serving as a circulation mechanism, that is, pulsation is superimposed on the pressure vibration during ink ejection. 2 In some cases, the pressure vibration of the ink in the common channel 41 becomes large. In such a case, the ink in the second common channel 41 flows back to the pressure chamber 30 side through the individual outlet channel 50, and the ejection characteristics are thereby reduced. There is a risk of fluctuation from the target value.

In the present embodiment, by setting the compliance of the second compliance section 43 on the return path side to be larger, even when the pressure vibration during driving of the pump 14 is superimposed on the pressure vibration during ink ejection, the second compliance is concerned. The vibration can be sufficiently reduced by the portion 43, and adverse effects on the ink ejection characteristics are more reliably suppressed. In addition, about the magnitude | size of the compliance in a compliance part, it is not restricted to the area of a flexible region, For example, you may adjust by changing the material and thickness of a flexible part. Further, it is possible to adopt a configuration in which the compliance closer to the nozzle 28 in the first compliance portion 42 or the second compliance portion 43 is larger than the compliance farther from the nozzle 28. In the present embodiment, also from this point of view, the compliance of the second compliance unit 43 disposed at a position closer to the nozzle 28 is larger than the compliance of the first compliance unit 42. According to this configuration, it is possible to more reliably reduce pressure vibration caused by ink ejection from the nozzle 28 at a position closer to the nozzle 28. Thereby, it is more reliably suppressed that the ejection characteristics of the ink from the nozzles 28 vary from the target value.

As described above, according to the present disclosure, in the configuration in which the ink is circulated between the ink cartridge 13 and the recording head 10, the first common flow path that configures the forward path from the ink cartridge 13 side to the pressure chamber 30 side. Even if the

compliance portions

42 and 43 are provided in each of the second common flow path 41 that forms the return path from the pressure chamber 30 side to the ink cartridge 13 side, the increase in size of the recording head 10 can be suppressed. It becomes possible. Thereby, it contributes also to size reduction of the printer 1 in which the recording head 10 is mounted. In addition, since the

compliance portions

42 and 43 are provided in the plurality of pressure chambers 30, in other words, the first common channel 40 and the second common channel 41 that are common to the plurality of nozzles 28, respectively, Compared with the configuration in which the compliance units are individually provided in each of the individual supply flow path 39 and the individual discharge flow path 50, the pressure vibration caused by the ink ejection operation in each pressure chamber 30 can be more efficiently suppressed. It becomes possible. For this reason, even when ink is ejected from each nozzle 28 at a higher drive frequency, the pressure vibration caused by the ejection operation can be more reliably suppressed, so that the ink at a higher drive frequency can be suppressed. It becomes possible to cope with injection.

In the present embodiment, as shown in FIG. 2, a first common flow path that forms a pair between a pair of second common flow paths 41 in the second direction Y that is the direction in which the nozzle groups are arranged side by side. 40 is disposed, and the nozzle group is disposed between the first common flow paths 40, so that the nozzle group can be disposed at a higher density. In addition, it is possible to more efficiently lay out the ink flow paths including the

common flow paths

40 and 41 and the pressure chambers 30 corresponding to the nozzle groups, the piezoelectric elements 31, and the like inside the recording head 10. This contributes to downsizing of the head 10. In addition, since the second common flow channel 41 is disposed outside the first common flow channel 40 in the second direction Y, the area of the second compliance portion 43 corresponding to the second common flow channel 41 is further increased. It can be secured.

FIG. 9 is a cross-sectional view showing the recording head 10 according to the second embodiment, and FIG. 10 is a cross-sectional view showing a modification of the recording head 10 according to the second embodiment. In the present embodiment, a first compliance portion 42 and a second compliance portion 43 are provided on the second communication plate 25. The first compliance portion 42 corresponding to the first common flow path 40 is the first common portion on the upper surface side of the second communication plate 25, more specifically, on the upper surface side of the thin portion 52, as in the first embodiment. It is provided in a region corresponding to the flow path 40. The first compliance portion 42 in the present embodiment includes a first flexible portion 36, a first support plate 65 that supports the first flexible portion 36, and a first compliance space 51. The first support plate 65 is formed of a hard material that can support the first flexible portion 36 such as stainless steel, for example. The first support plate 65 has a frame shape with a central portion penetrating in a plan view in the third direction Z, and the first flexible portion 36 is fixed to the frame shape portion. The first support plate 65 is fitted and joined to a step provided in the opening of the first compliance space 51. That is, the first flexible portion 36 in the present embodiment is provided only in a portion corresponding to the first compliance portion 42.

Further, the second compliance portion 43 in the present embodiment is provided in a region corresponding to the second common flow path 41 on the lower surface side of the thin portion 52 of the second communication plate 25. The second compliance space 55 of the second compliance portion 43 is formed on the lower surface side with the partition wall 67 interposed between the thin portion 52 and the first compliance space 51 of the first compliance portion 42. The second compliance portion 43 in the present embodiment includes a second flexible portion 54, a second support plate 66 that supports the second flexible portion 54, and a second compliance space 55. . Similarly to the first support plate 65, the second support plate 66 is formed in a frame shape from a hard material such as stainless steel, and the second flexible portion 54 is fixed to the frame-shaped portion. The second support plate 66 is fitted and joined to a step provided in the opening of the second compliance space 55. In the present embodiment, the configuration in which the first compliance space 51 and the second compliance space 55 are separated from each other by the partition wall 67 is exemplified. For example, as illustrated in FIG. It is also possible to adopt a configuration in which 67 is not connected and both are connected in series. That is, the first compliance unit 42 and the second compliance unit 43 may share one common compliance space 68. About another structure, it is the same as that of 1st Embodiment.

FIG. 11 is a cross-sectional view of the recording head 10 according to the third embodiment. In each of the above embodiments, the configuration in which the thickness direction of each of the

compliance portions

42 and 43 is the stacking direction of the constituent members of the recording head 10, that is, the third direction Z is exemplified. In the present embodiment, the first compliance portion 42 is provided on the wall surface along the third direction Z of the introduction flow path 45 constituting the first common flow path 40 in the case 27. More specifically, an opening is provided in the partition wall 72 that divides the introduction flow path 45 and the accommodating space 58 that accommodates the actuator substrate 26, and the first compliance portion 42 is provided so as to close the opening. ing. The first compliance portion 42 is configured to use the accommodation empty portion 58 as the first compliance space 51. For this reason, it is not necessary to provide the first compliance space 51 separately, which contributes to the downsizing of the recording head 10. Further, the second compliance portion 43 is provided on the wall surface along the third direction Z of the outlet channel 46 that constitutes the second common channel 41 in the case 27. More specifically, an opening that communicates with the outlet channel 46 is formed in the outer wall surfaces 73 on both sides in the second direction Y of the case 27, and the second compliance portion 43 is provided so as to close the opening. . Further, a protection plate 70 for protecting the second flexible portion 54 of the second compliance portion 43 is joined to a portion corresponding to the second compliance portion 43 of the outer wall surface 73 of the case 27. A space between the protection plate 70 and the second flexible portion 54 functions as a second compliance space 55. In the present embodiment, the thickness direction of the

compliance portions

42 and 43 is a second direction Y that intersects the first direction X that is the nozzle row direction. Also in the present embodiment, the first compliance portion 42 and the second compliance portion 43 overlap each other when viewed in the thickness direction of these

compliance portions

42 and 43, that is, in the second direction Y in the present embodiment. Are arranged as follows. For this reason, the recording head 10 can be downsized.

In the present embodiment, the channel cross-sectional area has an individual supply flow at the boundary portion between the first common channel 40 extending in the third direction Z and the individual supply channel 39 extending in the second direction Y. A supply port 44 is provided as a constricted portion set smaller than the flow path cross-sectional area of the path 39. As a result, even if air bubbles are mixed in the ink sent from the ink cartridge 13 side to the first common flow path 40, the air bubbles having a size that affects the ejection of ink from the nozzles 28 It cannot be passed through the supply port 44 and is trapped. Then, the bubbles that cannot pass through the supply port 44 rise to the upstream side of the first common flow path 40 due to buoyancy. For this reason, it is possible to more effectively suppress the adverse effect of such bubbles on the ink ejection. Other configurations are the same as those in the first embodiment.

FIG. 12 is a cross-sectional view of the recording head 10 according to the fourth embodiment. In the present embodiment, the first compliance portion 42 is provided on the partition wall 72 that partitions the introduction flow path 45 in the case 27 and the housing empty portion 58 that houses the actuator substrate 26 as in the third embodiment. Yes. On the other hand, the second compliance portion 43 is provided in a region corresponding to the common lead-out liquid chamber 48 in the nozzle plate 20. In the present embodiment, the thickness direction of the first compliance portion 42 is the second direction Y, whereas the thickness direction of the second compliance portion 43 is the third direction Z. In this configuration, the first compliance portion 42 and the second compliance portion 43 are arranged so as to overlap each other when viewed in the thickness direction of the second compliance portion 43, that is, in the third direction Z. As described above, even when the

compliance portions

42 and 43 overlap each other when viewed in the thickness direction of either the first compliance portion 42 or the second compliance portion 43, the recording head 10 is small. It can contribute to the conversion. Further, regarding the second compliance portion 43 in the present embodiment, a concave portion is formed leaving a thin portion that functions as the second flexible portion 54 from the lower surface side of the nozzle plate 20 toward the upper surface side, and the lower surface side opening of the concave portion is formed. Is closed by the fixing plate 23, thereby defining the second compliance space 55. Thus, by partially reducing the thickness of the constituent members of the recording head 10 and causing the portion to function as a flexible portion, there is no need to separately provide a flexible portion. Other configurations are the same as those in the first embodiment.

FIG. 13 is a cross-sectional view of the recording head 10 according to the fifth embodiment. In the present embodiment, the second compliance portion 43 is provided in a region corresponding to the common lead-out liquid chamber 48 in the nozzle plate 20 as in the first embodiment. On the other hand, the first compliance portion 42 is provided on the upper surface side in the third direction Z of the case 27. The introduction flow path 45 of the first common flow path 40 in the present embodiment includes a first introduction flow path 45a extending in a direction parallel to the upper and lower surfaces of the case 27, and a case connected to the first introduction flow path 45a. 27, the second introduction flow path 45b extending along the third direction Z from the upper surface side toward the lower surface side. The first introduction channel 45 a is opened on the upper surface of the case 27, and this opening surface is sealed by the first support plate 65 of the first compliance section 42. One surface of the through-hole provided in the first support plate 65, that is, the surface on the first common flow path 40 side is sealed by the first flexible portion 36, and the other surface, that is, the case 27. The first compliance space 51 is defined by sealing the surface on the upper surface side with the protective plate 70. Further, an introduction port 62 is formed at a position away from the first compliance space 51 through the first support plate 65 and the first flexible portion 36. Also in the present embodiment, the first compliance portion 42 and the second compliance portion 43 overlap each other when viewed in the thickness direction of the

compliance portions

42 and 43, that is, in the third direction Z in the present embodiment. Are arranged as follows. For this reason, the recording head 10 can be downsized. Other configurations are the same as those in the first embodiment.

In addition, the present disclosure is configured to have a flow path corresponding to the forward path and a flow path corresponding to the return path, and to allow liquid to circulate between the liquid storage unit, and to comply with each of the forward path and the return path. The present invention can also be applied to a liquid ejecting head having various configurations and a liquid ejecting apparatus including the liquid ejecting head. For example, color material ejection heads used in the manufacture of color filters such as liquid crystal displays, electrode material ejection heads used in electrode formation for organic EL (Electro-Luminescence) displays, FEDs (surface emitting displays), biochips (biochemical elements) The present disclosure can also be applied to a liquid ejecting head including a plurality of bio-organic matter ejecting heads and the like and a liquid ejecting apparatus including the same.

DESCRIPTION OF SYMBOLS 1 ... Printer, 2 ... Frame, 3 ... Platen, 4 ... Guide rod, 5 ... Carriage, 6 ... Flow path member, 10 ... Recording head, 13 ... Ink cartridge, 14 ... Pump, 15 ... Ink supply tube, 16 ... Ink Recovery tube, 20 ... nozzle plate, 21 ... capping mechanism, 22 ... cap, 23 ... fixing plate, 24 ... first communication plate, 25 ... second communication plate, 26 ... actuator substrate, 27 ... case, 28 ... nozzle, 29 ... pressure chamber forming substrate, 30 ... pressure chamber, 31 ... piezoelectric element, 32 ... protective substrate, 33 ... vibration plate, 34 ... first nozzle communication port, 35 ... second nozzle communication port, 36 ... first flexible portion, 37 ... Common liquid chamber, 38 ... Supply port partition, 39 ... Individual supply channel, 40 ... First common channel, 41 ... Second common channel, 42 ... First compliance section, 43 ... Second complier , 44 ... supply port, 45 ... introduction flow path, 46 ... discharge flow path, 47 ... thin wall part, 48 ... common discharge liquid chamber, 49 ... communication liquid chamber, 50 ... individual discharge flow path, 51 ... first compliance Space 52, thin wall portion 53, outlet channel partition wall 54, second flexible portion 55, second compliance space 56, constricted portion 58, accommodating space 59, insertion space 62, introduction port , 63 ... outlet port, 65 ... first support plate, 66 ... second support plate, 67 ... partition wall, 68 ... common compliance space, 70 ... protective plate, 72 ... partition wall, 73 ... outer wall surface

Claims

A plurality of pressure chambers communicating with a plurality of nozzles for ejecting liquid;
A first common flow path for supplying liquid to the plurality of pressure chambers;
A second common flow path for deriving liquids from the plurality of pressure chambers;
A first compliance portion that deforms in response to a change in pressure of the liquid in the first common flow path;
A second compliance section that deforms in response to a change in pressure of the liquid in the second common flow path;
With
The liquid ejecting head, wherein the first compliance portion and the second compliance portion overlap each other when viewed in the thickness direction of at least one of the compliance portions.
A plurality of pressure chambers communicating with a plurality of nozzles for ejecting liquid;
A first common flow path for supplying liquid to the plurality of pressure chambers;
A second common flow path for deriving liquids from the plurality of pressure chambers;
A first compliance portion that deforms in response to a change in pressure of the liquid in the first common flow path;
A second compliance section that deforms in response to a change in pressure of the liquid in the second common flow path;
With
The liquid ejecting head, wherein the first compliance section and the second compliance section overlap in a thickness direction of a nozzle plate provided with the nozzle.
3. The liquid jet head according to claim 1, wherein the compliance of the second compliance section is larger than the compliance of the first compliance section.
3. The liquid according to claim 1, wherein a compliance closer to the nozzle out of the first compliance portion or the second compliance portion is larger than a compliance farther from the nozzle. 4. Jet head.
A plurality of individual outlet channels communicating individually from the pressure chamber to the second common channel;
5. The liquid according to claim 1, wherein the second compliance portion does not overlap with the plurality of individual outlet channels when viewed in the thickness direction of the second compliance portion. Jet head.
When the inner dimension of the individual outlet channels in the direction in which the individual outlet channels are juxtaposed is W,
An edge of the flexible region displaceable in the second common channel in the second common channel in the flow channel extending direction of the individual derivation channel is closest to the individual derivation channel. The liquid ejecting head according to claim 5, wherein the liquid ejecting head is disposed within the W from an outlet of the flow path on the second common flow path side.
A plurality of individual supply channels that individually communicate with the plurality of pressure chambers from the first common channel, wherein the first compliance unit is a plurality of the individual units as viewed in the thickness direction of the first compliance unit. The liquid ejecting head according to claim 1, wherein the liquid ejecting head does not overlap with the supply flow path.
One of the first partition walls separating the plurality of individual supply channels or the second partition wall separating the plurality of individual outlet channels has a thickness in the one channel juxtaposition direction of the other. The liquid ejecting head according to claim 7, wherein the liquid ejecting head is thicker than a thickness of the first flow path and has a length in the one flow path extending direction that is longer than the other length.
A position of the outlet on the second common flow path side in the flow path extending direction of the individual lead-out flow path located on the more end side in the flow passage juxtaposition direction of the plurality of individual lead-out flow paths; 9. The liquid jet according to claim 5, wherein an outlet position on the second common flow path side of the individual lead-out flow path positioned closer to the center in the direction is different. 10. head.
Two nozzle groups in which the nozzles are juxtaposed are juxtaposed in a direction perpendicular to the nozzle juxtaposition direction,
In the juxtaposed direction of the nozzle group, the two first common flow paths forming a pair are arranged between the two second common flow paths forming a pair,
The liquid ejecting head according to claim 1, wherein the nozzle group is disposed between the two first common flow paths.
The liquid jet head according to any one of claims 1 to 10,
A liquid storage section storing liquid supplied to the liquid ejecting head;
A circulation mechanism for circulating liquid between the liquid reservoir and the liquid jet head;
A liquid ejecting apparatus comprising: