JP5754495B2 - Droplet ejecting head and droplet ejecting apparatus - Google Patents

Description

  The present invention relates to a droplet ejecting head and a droplet ejecting apparatus.

  As a liquid droplet ejecting head for ejecting liquid droplets, for example, an ink jet head mounted on an ink jet recording apparatus is known. An inkjet head generally has a flow path having a nozzle plate in which nozzle holes for ejecting ink droplets are formed, a pressure chamber communicating with the nozzle holes, and a reservoir for supplying liquid to the pressure chambers. An ink droplet is ejected from the nozzle hole by applying pressure to the pressure chamber by the drive unit. In such an ink jet head, it is required to arrange the nozzle holes at a high density for the purpose of increasing the printing speed.

  In order to increase the speed, such an apparatus is generally provided with a droplet ejecting head having a plurality of nozzle rows in which a plurality of nozzle holes are arranged (Patent Document 1). In a liquid droplet ejecting head having such a structure, a liquid droplet ejecting head that achieves miniaturization of the head size by simplifying the liquid supply means to the supply port while meeting the demand for higher density of nozzle holes is desired. It is rare.

JP 2009-160899 A

  According to some aspects of the present invention, it is possible to provide a liquid droplet ejecting head in which the liquid supply means to the supply port is simplified and the head size can be reduced.

A liquid droplet ejecting head according to one aspect of the present invention includes a nozzle substrate having a nozzle hole that discharges a liquid in a first direction, and a diaphragm that is displaced in a second direction that intersects the first direction. A piezoelectric element provided on one side of the diaphragm; a flow path forming substrate provided on the other side of the diaphragm and defining a pressure chamber and a reservoir communicating with the pressure chamber; and the diaphragm A pair of drive units each having a sealing plate provided so as to cover the piezoelectric element on the one side, and the pair of drive units are stacked in the second direction, The sealing of the other drive unit of the pair of drive units on the opposite side of the flow path forming substrate of the drive unit of the pair of drive units from the diaphragm of the drive unit. That the stop plate is joined And butterflies.

  In the present invention, the word “upper” is used as, for example, “to form another specific thing (hereinafter referred to as“ B ”) on“ above ”of a specific thing (hereinafter referred to as“ A ”)”. . In the present invention, in the case of this example, the case where B is formed directly on A and the case where B is formed on A via another are included. Is used. Similarly, the term “below” includes a case where B is directly formed under A and a case where B is formed under A via another.

  According to the present invention, the direction in which the liquid is supplied to the reservoir through the supply port is the same as the first direction, so that the droplet discharge head having the supply port opened in the displacement direction of the diaphragm In comparison, the means for supplying the liquid to the supply port is simplified, and it is possible to provide a liquid droplet ejecting head that can reduce the head size.

The above-described droplet ejecting head, which is one aspect of the present invention,
Two or more drive units are droplet ejection heads stacked in the second direction,
The two drive units stacked so as to be adjacent to each other are stacked on the sealing plate of one of the drive units so that the flow path forming plate of the other drive unit is provided,
The reservoir may be formed by the flow path forming plate, the vibration plate, and the sealing plate.

  According to this, the means for supplying the liquid to the supply port is simplified, and it is possible to provide a liquid droplet ejecting head that can reduce the head size.

The droplet ejecting head, which is one aspect of the present invention, the said surface forming a reservoir of said one of the drive unit of the sealing plate of the other drive unit, a bubble floating in the the reservoir A concave portion capable of accumulating is provided.

  According to this, it is possible to provide a liquid droplet ejecting head having a structure that suppresses occurrence of missing dots due to bubbles floating in the pressure chamber and the reservoir.

  A droplet ejecting apparatus which is one aspect of the present invention includes the above-described droplet ejecting head.

  According to the present invention, it is possible to provide a liquid droplet ejecting apparatus having a liquid droplet ejecting head which is one aspect of the present invention.

FIG. 2 is a plan view schematically showing a liquid droplet ejecting head 100 (200) according to the embodiment. FIG. 3 is a cross-sectional view schematically showing the droplet ejecting head 100 according to the embodiment. FIG. 3 is a cross-sectional view schematically showing the droplet ejecting head 100 according to the embodiment. FIG. 2 is a perspective view schematically showing a liquid droplet ejecting head 100 according to the embodiment. FIG. 3 is a cross-sectional view schematically showing a droplet ejecting head 200 according to the embodiment. FIG. 3 is a cross-sectional view schematically showing a droplet ejecting head 200 according to the embodiment. FIG. 6 is a cross-sectional view schematically showing a modification of the liquid droplet ejecting head 100 according to the embodiment. FIG. 6 is a cross-sectional view schematically showing a modification of the liquid droplet ejecting head 200 according to the embodiment. FIG. 3 is a perspective view schematically showing a droplet ejecting apparatus 700 according to the embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. Also, not all of the configurations described below are essential constituent requirements of the present invention.

1. Droplet ejecting head 1.1. First Embodiment FIG. 1 is a plan view schematically showing a liquid droplet ejecting head 100 of the present embodiment. FIG. 2 is a cross-sectional view schematically showing the droplet ejecting head 100 of the present embodiment. FIG. 3 is a cross-sectional view schematically showing the liquid jet head 100 of the present embodiment. FIG. 2 corresponds to a cross section taken along line AA shown in FIG. FIG. 3 corresponds to a cross section taken along line BB shown in FIG. FIG. 4 is a perspective view of the droplet ejecting head 100 of the present embodiment.

  The liquid droplet ejecting head 100 of this embodiment includes a diaphragm 10, a piezoelectric element 20 provided on the diaphragm 10, and a reservoir provided below the diaphragm 10 and communicating with the pressure chamber 32 and the pressure chamber 32. A drive unit having a flow path forming plate 30 for partitioning 36 and a sealing plate 40 provided so as to cover the vibrating plate 10 and the piezoelectric element 20 via a space 41 of the piezoelectric element 20. 50, a nozzle plate 60 having a nozzle hole 61 for discharging the liquid in the pressure chamber 32, and a lid member 80 having a supply port 81 for supplying liquid to the reservoir 36.

  The drive unit 50 includes at least the vibration plate 10, the piezoelectric element 20, the flow path forming plate 30, and the sealing plate 40. As shown in FIG. 1, in the drive unit 50, a plurality of piezoelectric elements 20 and a plurality of pressure chambers 32 are arranged in parallel on one side of the vibration plate 10. As shown in FIG. 1, when the surface formed by the largest surface of the vibration plate 10 of the droplet ejecting head 100 is a rectangle, one of the two adjacent sides of the diaphragm 10 (for example, the short side) The direction along the side that is shorter than the long side is the X-axis direction, and the direction along the other side (for example, the long side that is longer than the short side) is the direction The Y axis is assumed. Further, the thickness direction of the diaphragm 10 is defined as a Z-axis direction. At this time, the piezoelectric element 20 and the pressure chamber 32 may be formed so as to extend in the X-axis direction, and may be arranged in a row along the Y-axis direction. Further, the vibration plate 10, the piezoelectric element 20, and the flow path forming plate 30 may have a laminated structure in the Z-axis direction.

  As shown in FIG. 2 and FIG. 3, the diaphragm 10 is a plate-like member having elasticity for causing flexural vibration. The diaphragm 10 may have a structure in which a plurality of layers are stacked. The diaphragm 10 has a function of being deformed by the operation of the piezoelectric element 20 and changing the volume of the pressure chamber 32. The material of the diaphragm 10 is not particularly limited, but it is desirable to use a substance having an appropriate mechanical strength. If it is made of a material having no strength, it may be damaged or the droplet ejection head 100 may not be driven at a high driving frequency. If a material that is too hard is used, the amount of deflection of the vibration plate 10 when the head is driven may be reduced, and the droplets of liquid that can be ejected may be reduced. The thickness of the diaphragm 10 is optimally selected so that the characteristics of the diaphragm 10 such as Young's modulus, the deformability of the piezoelectric element 20, and the volume change amount of the pressure chamber 32 can satisfy the requirements. As a material of the diaphragm 10, for example, zirconium oxide, silicon nitride, silicon oxide, or aluminum oxide is preferable.

  As shown in FIGS. 1 to 3, a plurality of piezoelectric elements 20 are provided above the diaphragm 10 corresponding to the pressure chambers 32. The piezoelectric element 20 is configured by laminating a lower electrode 22, a piezoelectric layer 24, and an upper electrode 26.

  The configuration of the piezoelectric element 20 is not particularly limited as long as the piezoelectric element 20 has the lower electrode 22, the piezoelectric layer 24, and the upper electrode 26 and can displace the diaphragm 10. In the following, a mode in which the lower electrode 22 is a common electrode for the plurality of piezoelectric elements 20 will be described as an example of the piezoelectric element 20. However, a mode in which the upper electrode 26 is a common electrode, or the lower electrode 22 and the upper electrode 26. And may be individually connected to the lead wiring. That is, the configuration of the piezoelectric element 20 is not limited to the following.

  The lower electrode 22 is formed above the diaphragm 10. The thickness of the lower electrode 22 is arbitrary as long as the deformation of the piezoelectric layer 24 can be transmitted to the diaphragm 10. The thickness of the lower electrode 22 can be set to, for example, 20 nm to 400 nm. The lower electrode 22 is paired with the upper electrode 26 and functions as one electrode of the piezoelectric element 20 with the piezoelectric layer 24 interposed therebetween. The lower electrode 22 is formed so as to be electrically connected from the outside. The lower electrode 22 may be used as a common electrode for the plurality of piezoelectric elements 20. The material of the lower electrode 22 is not particularly limited as long as it is a conductive material. As the material of the lower electrode 22, various metals such as nickel, iridium and platinum, conductive oxides thereof (for example, iridium oxide, etc.), composite oxides of strontium and ruthenium, and the like can be used. Further, the lower electrode 22 may be a single layer of the exemplified materials or a structure in which a plurality of materials are stacked.

  The piezoelectric layer 24 is formed on the lower electrode 22. The thickness of the piezoelectric layer 24 can be set to 300 nm to 1500 nm in order to ensure mechanical reliability. The piezoelectric layer 24 has a function of expanding and contracting when an electric field is applied by the lower electrode 22 and the upper electrode 26, thereby vibrating the diaphragm 10. A piezoelectric material is used for the piezoelectric layer 24. The material of the piezoelectric layer 24 can be, for example, an oxide containing lead, zirconium, and titanium as constituent elements. The material of the piezoelectric layer 24 may further contain an additive such as niobium. As a material of the piezoelectric layer 24, lead zirconate titanate can be suitably used because of its excellent piezoelectric performance.

  The upper electrode 26 is formed on the piezoelectric layer 24. The thickness of the upper electrode 26 is not limited as long as it does not adversely affect the operation of the piezoelectric element 20. The thickness of the upper electrode 26 can be set to, for example, 10 nm to 400 nm. The upper electrode 26 is paired with the lower electrode 22 and functions as one electrode of the piezoelectric element 20 with the piezoelectric layer 24 interposed therebetween. The lower electrode 22 is formed so as to be electrically connected from the outside. The material of the upper electrode 26 is not particularly limited as long as it is a conductive material. The material of the upper electrode 26 can be the same as that of the lower electrode 22.

  Here, as shown in FIG. 2, since the piezoelectric element 20 is provided on the vibration plate 10, the vibration plate 10 can be displaced mainly in the thickness direction (Z-axis direction) of the vibration plate 10. In other words, the displacement direction of the diaphragm 10 is the thickness direction (Z-axis direction) of the diaphragm 10.

  The flow path forming plate 30 is provided below the vibration plate 10. As shown in FIG. 1, the flow path forming plate 30 is provided with a flow path for introducing a liquid such as a plurality of pressure chambers 32 and discharging the liquid from the nozzle holes 61. The number of the flow paths that serve as the pressure chambers 32 formed in the flow path forming plate 30 is not particularly limited and is arbitrary. The flow path forming plate 30 serves as a side wall of the pressure chamber 32. The upper surface and the lower surface of the flow path forming plate 30 are parallel to each other. The flow path forming plate 30 is formed to have a first opening 33 for introducing liquid into each pressure chamber 32 and a second opening 35 for supplying liquid from each pressure chamber 32 to the nozzle hole 61. Between the first opening 33 and the pressure chamber 32, a supply path 34 designed to have a channel width narrower than that of the pressure chamber 32 may be provided. As shown in FIGS. 1 and 2, the flow path forming plate 30 is formed with a flow path (space) in which the reservoir 36 is formed so as to communicate with the first opening 33. That is, the flow path forming plate 30 has a flow path so that the liquid introduced into the reservoir 36 is supplied to the pressure chamber 32 through the first opening 33 and discharged from the second opening 35. Is formed. The material of the flow path forming plate 30 is not particularly limited, but it is preferable to use silicon that can obtain high processing accuracy by anisotropic wet etching using potassium hydroxide (KOH).

  Here, the second opening 35 opens toward a direction (X-axis direction) orthogonal to the displacement direction (Z-axis direction) of the diaphragm 10. In other words, the opening direction of the second opening 35 is a direction (X-axis direction) orthogonal to the displacement direction (Z-axis direction) of the diaphragm 10. Further, the second opening 35 can be provided in alignment with one side of the liquid ejecting head 100 in a plan view as in the example of FIG. Therefore, on one side surface of the drive unit 50, a row of openings formed from the plurality of second openings 35 can be formed.

  The sealing plate 40 is provided on the piezoelectric element 20 side of the drive unit 50 so as to cover the space via the space 41 of the piezoelectric element 20. The sealing plate 40 does not contact the piezoelectric element 20. The sealing plate 40 may cover the plurality of piezoelectric elements 30 or may be provided so as to cover each piezoelectric element 20 one by one. Further, the sealing plate 40 may be provided with pillars (not shown) for preventing contact with the piezoelectric element 20. The sealing plate 40 has a function of securing a space for driving the piezoelectric element 20 and the vibration plate 10 when the driving unit 50 (droplet ejecting head 100) is stacked, for example. Further, the sealing plate 40 may have a function of keeping the inner space 41 airtight. Further, the space formed by the sealing plate 40 may be in a reduced pressure state. Thereby, since the piezoelectric element 20 can be prevented from coming into contact with the atmosphere by the sealing plate 40, for example, deterioration of the piezoelectric layer 24 can be suppressed. Further, by having the sealing plate 40, the piezoelectric element 20 is mechanically protected, and the droplet ejection head 100 can be easily handled. The thickness of the sealing plate 40 is not limited as long as it has mechanical strength. The material of the sealing plate 40 can be, for example, a resin such as polyimide, an inorganic material such as silicon nitride, silicon oxide, or aluminum oxide.

  The drive unit 50 can be configured as described above. As shown in FIG. 2, the droplet ejection head 100 according to the present embodiment can have a structure in which two drive units 50 are arranged symmetrically around a separator substrate 70 described later. Details will be described later.

  The nozzle plate 60 is a plate-like member provided orthogonal to the vibration plate 10 and the flow path forming plate 30. The nozzle plate 60 has a plurality of nozzle holes 61 so as to correspond to the second openings 35 of the flow path forming plate 30. The nozzle hole 61 is formed so that the center line coincides with the normal direction of the nozzle plate 60. Therefore, the direction in which the liquid is discharged from the nozzle hole 61 is the direction in which the second opening 35 opens (X-axis direction) as shown in FIG. 2, and the displacement direction of the diaphragm 10 (Z-axis direction). Direction (X-axis direction) perpendicular to the direction. Further, the position where the nozzle hole 61 is formed is arbitrary as long as the nozzle hole 61 can be continuous with the pressure chamber 32 via the second opening 35. Therefore, as shown in FIG. 4, the nozzle plate 60 can have a nozzle row including a plurality of nozzle holes 61 corresponding to the plurality of second openings 35. The material of the nozzle plate 60 is not limited, and for example, silicon, stainless steel, or the like can be suitably used.

  The separator substrate 70 is a plate-like member that is sandwiched between the pair of drive units 50. The separator substrate 70 is sandwiched between a pair of drive units 50 facing each other with the flow path forming plate 30 side inside. A plurality of pressure chambers 32 are formed on both sides of the separator substrate 70 by the separator substrate 70 and the pair of drive units 50 arranged in this manner. As shown in FIG. 2, the separator substrate 70 has a base surface 71 on which the pressure chamber 32 is formed, and a side surface 73 and a side surface 75 on which the reservoir 36 is formed. The base surface 71 is a surface having the largest area among the surfaces constituting the separator substrate 70, and is a surface provided in parallel with the vibration plate 10 and the flow path forming plate 30. The side surface 73 and the side surface 75 are surfaces that connect both surfaces of the base surface 71, and are surfaces that are orthogonal to the vibration plate 10 and the flow path forming plate 30. The side surface 73 is a side surface parallel to the nozzle plate 60 and the lid member 80 and is a surface opposite to the surface on the nozzle plate 60 side. The side surface 75 may be a surface that is continuous with the side surface 73 and may be a side surface that is orthogonal to the nozzle plate 60 and the lid member 80.

  As shown in FIG. 2, the separator substrate 70 has a notch 72 that connects the reservoirs 36 adjacent in the Z-axis direction. The notch 72 is constituted by a side surface 73 and a side surface 75. The shape of the notch 72 is not particularly limited as long as a space for communicating the reservoirs 36 of the pair of drive units 50 can be formed.

  As shown in FIG. 2, the pressure chamber 32, the first opening 33, the supply path 34, and the second opening 35 are formed on the base surface 71 of the separator substrate 70. Further, a common reservoir 37 described later is formed on the side surfaces 73 and 75.

  The thickness of the separator substrate 70 is arbitrary as long as the strength is such that the liquid droplet ejecting head 100 is not deformed. However, in order to reduce the space between the nozzle rows, it is desirable to reduce the thickness within a range in which restrictions on assembly, processing, and strength can be avoided. The thickness of the separator substrate 70 can be, for example, 10 μm to 1000 μm. As a material of the separator substrate 70, any material such as a metal, a resin, or a semiconductor can be used in consideration of thickness and strength. Further, when a material having a linear expansion coefficient close to that of the flow path forming plate 30 is selected as the material of the separator substrate 70, the deformation of the droplet ejecting head 100 can be suppressed. For example, in the case where the flow path forming plate 30 is made of silicon, if the material of the separator substrate 70 is silicon, the flow path forming plate 30 and the separator substrate 70 may be bonded or bonded, or during the subsequent assembly process. Even when the member is heated, because of the same thermal expansion coefficient, it is possible to avoid breakage due to thermal stress due to the difference in linear expansion coefficient between the members.

  The lid member 80 is a plate-like member that is orthogonal to the diaphragm 10 and the flow path forming plate 30 and is provided so as to sandwich the pair of drive units 50 with the nozzle plate 60 and the lid member 80. The lid member 80 can seal the flow path forming plate 30 from the reservoir 36 (common reservoir 37 described later) side. As shown in FIGS. 1 and 2, the lid member 80 has a supply port 81 communicating with the reservoir 36 (a common reservoir 37 described later).

  As shown in FIGS. 1 and 2, the supply port 81 opens toward the thickness direction (X-axis direction) of the lid member 80. Therefore, the liquid supplied from the liquid storage unit (not shown) can be supplied to the reservoir 36 (a common reservoir 37 described later) in the same direction as the direction in which the liquid is discharged (X-axis direction) through the nozzle holes. . As shown in FIG. 1, one supply port 81 may be formed for a common reservoir 37 described later, or a plurality of supply ports 81 may be formed. The material of the lid member 80 is not limited, and for example, silicon, stainless steel, or the like can be suitably used.

  Further, the supply port 81 may be provided so as to face the side surface 73 of the separator substrate 70 as shown in FIG. According to this, the liquid supplied from the supply port 81 can collide with the side surface 73 of the separator substrate 70. Since physical energy can be given to the liquid supplied via the supply port 81, even when bubbles are included, the liquid collides with the side surface 73 of the separator substrate 70, thereby decomposing the bubbles. And the occurrence of missing dots can be reduced. Therefore, the coating quality of the droplet jet head can be improved. The supply port 81 is connected to a supply path 110 communicating with a liquid storage unit (not shown). The structure and material of the supply path 110 are not particularly limited as long as the liquid can be supplied to the supply port 81. For example, a plastic tube having plasticity may be used for the supply path 110. Thereby, the liquid can be supplied to the supply port from a liquid storage unit (not shown).

  Here, the supply port 81 opens toward a direction (X-axis direction) orthogonal to the displacement direction (Z-axis direction) of the diaphragm 10. At this time, when the discharge direction of the liquid through the nozzle hole 61 is the first direction (X-axis direction) and the displacement direction of the diaphragm 10 (Z-axis direction) is the second direction, FIG. As shown, the first direction (X-axis direction) and the second direction (Z-axis direction) are orthogonal to each other. Therefore, the direction in which the liquid is supplied to the reservoir 36 via the supply port 81 is the same direction as the first direction (X-axis direction).

  Further, as described above, the pressure chamber 32 communicates with the first opening 33 and the second opening 35. The pressure chamber 32 is a space surrounded by the vibration plate 10, the flow path forming plate 30, and the separator substrate 70 (base surface 71). A liquid is supplied to the pressure chamber 32 from the first opening 33. The liquid introduced into the pressure chamber 32 is discharged through the nozzle hole 61 communicating with the second opening 35. The volume of the pressure chamber 32 changes due to the deformation of the diaphragm 10. When the volume of the pressure chamber 32 increases, the pressure inside the pressure chamber 32 decreases, and the liquid is introduced into the pressure chamber 32 from the first opening 33. If the volume of the pressure chamber 32 filled with the liquid decreases, the pressure inside the pressure chamber 32 increases and the liquid is discharged from the nozzle hole 61. As described above, the liquid can flow through the pressure chamber 32 in accordance with the operation of the diaphragm 10.

  The reservoir 36 is formed to supply liquid to the pressure chamber 32. A space serving as the reservoir 36 in the flow path forming plate 30 is formed so as to communicate with the plurality of first openings 33 as shown in FIG. Further, as shown in FIG. 2, the separator substrate 70 has a notch 72 and is provided so as not to separate the reservoir 36 of the pair of drive units 50. Therefore, as shown in FIG. 2, each reservoir 36 of the pair of drive units 50 and the notch 72 of the separator substrate 70 are partitioned as a common space that can communicate with each other, and can function as a common reservoir 37. In other words, the common reservoir 37 can store the liquid supplied to the plurality of pressure chambers 32 of the pair of drive units 50. As shown in FIG. 2, the common reservoir 37 is a space surrounded by the vibration plate 10, the flow path forming plate 30, the separator substrate 70 (notch portion 72), and a lid member 80 described later.

  As described above, the droplet ejecting head 100 according to the present embodiment can be configured. As shown in FIG. 4, in the liquid droplet ejecting head 100 according to the present embodiment, the rows of second openings 35 that discharge the same liquid are arranged close to each other with the separator substrate 70 interposed therebetween. Therefore, as shown in FIG. 4, the two nozzle rows formed by the plurality of nozzle holes 61 are arranged close to each other. Therefore, the liquid droplet ejecting head 100 can eject the same liquid from two nozzle rows adjacent to each other. According to this, the liquid can be applied to the medium at a high density, and a high-resolution or high-density application result can be obtained. As described above, the droplet ejecting head 100 that can apply the same liquid at a high density is suitably used for, for example, a line printer (droplet ejecting device).

  Although not shown, two or more liquid droplet ejecting heads 100 according to the present embodiment are stacked such that all the nozzle holes 61 face the first direction in the Z-axis direction and / or the Y-axis direction. May be. The lamination method is not particularly limited and is arbitrary.

  The liquid droplet ejecting head of the present embodiment can be applied to apply various liquids to various media. Examples of the liquid that can be applied by the liquid droplet ejecting head of the present embodiment include various inks, various metal precursors, various dielectric precursors, and the like. Examples of the medium that can be applied using the liquid droplet ejecting head of this embodiment include paper, a silicon wafer, and a semiconductor device.

  The liquid droplet ejecting head 100 according to this embodiment has the following features, for example.

  According to the liquid droplet ejecting head 100 according to the present embodiment, the direction in which the liquid is supplied to the reservoir 36 via the supply port 81 is the same as the first direction (X-axis direction). Compared with a liquid droplet ejecting head in which the supply port is opened in a direction other than the X-axis direction (for example, the displacement direction of the diaphragm (Z-axis direction)), the liquid supply means to the supply port is simplified and the head size is reduced. A liquid droplet ejecting head that can be miniaturized can be provided. Details will be described below.

  In the liquid droplet ejecting head having the drive unit 50 according to the present embodiment, the displacement direction (Z-axis direction) of the diaphragm 10 is a direction in which the drive units 50 are paired and stacked. In the droplet ejecting head in which the two drive units 50 are stacked like the droplet ejecting head 100 according to the present embodiment, the supply path from the supply port is directed in one direction where the liquid storage unit is provided. Need to be formed.

  Here, for example, when the supply port 81 for supplying the liquid to the reservoir is provided so as to open in the displacement direction (Z-axis direction) of the vibration plate 10, a supply path that penetrates the vibration plate 10 and the sealing plate 40 is provided. Separately formed means for providing a supply port that opens in the Z-axis direction, and an L-shaped flow path that forms a flow path from the Z-axis direction flow path to the X-axis direction, and supply that opens in the X-axis direction Means for providing a mouth are conceivable. However, when the above-described means are employed, the supply ports are directed in different directions in the Z-axis direction, so that the connection path from the supply port to the liquid storage unit becomes complicated, and the connection paths are combined in one direction. It is necessary to provide a separate space. Also, when adopting the means described later, it is necessary to provide a space for an L-shaped path separately. On the other hand, according to the liquid droplet ejecting head 100 according to the present embodiment, since it is not necessary to use any of the above-mentioned means, the degree of freedom in design is improved, and the supply path from the supply port 81 is simply formed. can do. Therefore, compared with a liquid droplet ejecting head in which the supply port is opened in the displacement direction (Z-axis direction) of the diaphragm, the liquid supply means to the supply port is simplified, and the liquid droplet ejecting that enables the head size to be reduced. A head can be provided.

  Further, the liquid droplet ejecting head 100 according to the present embodiment includes a common reservoir 37 for the pair of drive units 50. The common reservoir 37 is formed by a pair of opposed flow path forming plate 30 and vibration plate 10, a lid member 80, and a separator substrate 70, and a supply port 81 of the lid member 80 communicates with the common reservoir 37. Yes. As described above, the droplet ejecting head 100 according to the present embodiment forms the common reservoir 37 and can supply the liquid to the plurality of pressure chambers 32 using the common supply port 81. Therefore, it is not necessary to provide a supply port for each pressure chamber 32, and it is possible to reduce the size of the droplet ejecting head that can apply the same liquid at a high density.

1.2. Second Embodiment Hereinafter, a liquid droplet ejecting head according to a second embodiment will be described with reference to the drawings.

  The plan view of the drive unit 50 according to the present embodiment is the same as the plan view of the drive unit 50 according to the first embodiment (FIG. 1), and therefore FIG. 1 is a droplet ejection head according to the second embodiment. It is also referred to as a schematic plan view. FIG. 5 is a cross-sectional view schematically showing the droplet ejecting head 200 of the present embodiment. FIG. 6 is a cross-sectional view schematically showing the droplet ejecting head 200 of this embodiment. FIG. 5 corresponds to a cross section taken along line AA shown in FIG. FIG. 6 corresponds to a cross section taken along line BB shown in FIG.

  As shown in FIG. 5, the droplet ejecting head 200 according to the present embodiment is a droplet ejecting head in which two or more drive units 50 are stacked in the second direction (Z-axis direction). The two drive units 50 stacked so as to fit with each other are stacked on the sealing plate 40 of one drive unit 50 so that the flow path forming plate 30 of the other drive unit 50 is provided. The flow path forming plate 30, the vibration plate 10, the lid member 80, and the sealing plate 40 are formed.

  In the present embodiment, since the liquid droplet ejecting apparatus 200 does not include the separator substrate 70, the common reservoir 37 is not formed, and the stacked structure of the drive unit 50 is different from the first embodiment. Hereinafter, a configuration different from the first embodiment and the present embodiment will be described. In addition, regarding the droplet ejecting apparatus 200 according to the second embodiment to be described later, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIGS. 5 and 6, the drive unit 50 is stacked along a second direction (Z-axis direction) that is a displacement direction of the diaphragm 10. The number of drive units 50 to be stacked is not particularly limited and is arbitrary. The greater the number of drive units 50 stacked, the higher the density of the nozzle holes 61 can be achieved. In the two driving units 50 stacked adjacent to each other as described above, the flow path forming plate 30 of the other driving unit 50 is placed on the sealing plate 40 of the other driving unit 50. As long as it is laminated so as to be provided, there is no particular limitation. For example, a plurality of drive units 50 are joined to each drive unit 50 via an adhesive (not shown).

  In the liquid droplet ejecting apparatus 200 according to the present embodiment, the reservoir 36 means a flow path between the first opening 33 and the supply port 81, and the flow path forming plate 30, the vibration plate 10, and the lid member 80. And a space surrounded by the sealing plate 40. As for the space for the reservoir 36 in the flow path forming plate 30, in the same drive unit 50, the adjacent reservoirs 36 may form the same space. Although not shown, a plurality of reservoirs 36 may be formed in the same drive unit 50 by appropriately patterning the side walls of the flow path forming plate 30. However, as shown in FIGS. 5 and 6, the reservoir 36 is separated by the sealing plate 40 and the diaphragm 10 in the Z-axis direction that is the second direction.

  In the present embodiment, as shown in FIG. 5, the lid member 80 has supply ports 81 that individually communicate with the plurality of reservoirs 36. The supply port 81 can supply liquid to the reservoir 36 in the first direction (X-axis direction), as in the first embodiment. Note that a detailed description of the supply port 81 has been described above in the first embodiment, and thus will be omitted.

  As described above, the droplet ejecting head 200 according to the present embodiment can be configured. In the liquid droplet ejecting head 200 according to the present embodiment, a plurality of rows of nozzle holes 61 for discharging different liquids are arranged close to each other. Therefore, liquids having the same color and different concentrations and liquids of various colors can be applied with high density. Therefore, it is possible to obtain a coating result with improved color expression. As described above, the droplet ejecting head 200 that can apply various liquids at a high density is suitably used for, for example, a nozzle hole high-density printer (droplet ejecting apparatus).

  Although not shown, two or more droplet ejection heads 200 according to this embodiment are stacked such that all the nozzle holes 61 face the first direction in the Z-axis direction and / or the Y-axis direction. May be. The lamination method is not particularly limited and is arbitrary.

  The liquid droplet ejecting head of the present embodiment can be applied to apply various liquids to various media. Examples of the liquid that can be applied by the liquid droplet ejecting head of the present embodiment include various inks, various metal precursors, various dielectric precursors, and the like. Examples of the medium that can be applied using the liquid droplet ejecting head of this embodiment include paper, a silicon wafer, and a semiconductor device.

  The liquid droplet ejecting head 200 according to the present embodiment has, for example, the following characteristics.

  According to the liquid droplet ejecting head 200 according to the present embodiment, the direction in which the liquid is supplied to the reservoir 36 through the supply port 81 is the same as the first direction (X-axis direction). Compared with a liquid droplet ejecting head in which the supply port is opened in a direction other than the X-axis direction (for example, the displacement direction of the diaphragm (Z-axis direction)), the liquid supply means to the supply port is simplified and the head size is reduced. A liquid droplet ejecting head that can be miniaturized can be provided.

  In particular, as shown in FIGS. 5 and 6, when a plurality of drive units 50 are stacked and a plurality of supply ports 81 are provided, it is necessary to provide a plurality of supply paths 110. In the liquid droplet ejecting head having such a configuration, for example, when the supply port 81 for supplying the liquid to the reservoir is provided so as to open in the displacement direction (Z-axis direction) of the diaphragm 10, the plurality of supply paths 110. It is necessary to secure space for. When two or more drive units 50 are provided, it is necessary to consider a path for the other supply path 110 in one drive unit 50. In addition, when a space for the L-shaped path is provided separately, it becomes an obstacle in design when the density of the nozzle holes 61 is increased. On the other hand, according to the liquid droplet ejecting head 200 according to the present embodiment, it is not necessary to consider the path of the supply path 110 in the stacking of the drive units 50, so that the degree of freedom in design is improved and the supply port 81 Thus, the supply path can be formed simply. According to this, as compared with the liquid droplet ejecting head in which the supply port is opened in the displacement direction (Z-axis direction) of the diaphragm, the liquid supply means to the supply port is simplified, and the head size can be reduced. A droplet ejecting head can be provided.

1.3. Modified Examples Hereinafter, modified examples of the liquid droplet ejecting head according to the first and second embodiments will be described with reference to the drawings. FIG. 7 is a cross-sectional view schematically showing a modification of the liquid droplet ejecting head 100 of the first embodiment. FIG. 8 is a cross-sectional view schematically showing a modification of the liquid droplet ejecting head 200 of the second embodiment.

  As shown in FIG. 7, in the modified example of the liquid droplet ejecting head 100 of the first embodiment, a recess 83 may be formed on the surface of the lid member 80 that constitutes the reservoir 36 (common reservoir 37). The shape of the recess is not particularly limited, and may be a recess having a rectangular cross section or a recess having a curved cross section.

  Further, as shown in FIG. 8, in the modified example of the liquid droplet ejecting head 200 of the second embodiment, a concave portion 43 may be formed on the surface constituting the reservoir 36 of the sealing plate 40. The shape of the recess is not particularly limited, and the recess may be a recess having a tapered surface, or may be a recess having a curved cross section.

  As described above, according to the modification of the liquid droplet ejecting head according to the first and second embodiments, when bubbles are included in the liquid supplied to the reservoir 36 via the supply port 81, the bubbles are generated in the flow path. It is possible to provide a flow path structure that facilitates the accumulation of bubbles so that the nozzle holes 61 are not discharged along. Therefore, it is possible to suppress the occurrence of missing dots due to bubbles in the liquid, and thus it is possible to provide a liquid droplet ejecting head with improved coating quality.

  Here, the case where the droplet ejecting heads 100 and 200 are ink jet recording heads has been described. However, the liquid droplet ejecting head of the present invention is, for example, an electrode material ejecting head used for forming electrodes of a color material ejecting head, an organic EL display, an FED (surface emitting display), etc. It can also be used as a bio-organic matter ejecting head used for biochip manufacturing.

2. Next, the droplet ejecting apparatus according to the present embodiment will be described with reference to the drawings. The droplet ejecting apparatus has the above-described droplet ejecting head. Hereinafter, a case where the droplet ejecting apparatus is an ink jet printer having the above-described droplet ejecting head 100 (200) will be described. FIG. 9 is a perspective view schematically showing a droplet ejecting apparatus 700 according to the present embodiment.

  As shown in FIG. 9, the droplet ejecting apparatus 700 includes a head unit 730, a driving unit 710, and a control unit 760. Further, the droplet ejecting apparatus 700 is disposed on the upper surface of the apparatus main body 720, the apparatus main body 720, the paper feed unit 750, the tray 721 on which the recording paper P is set, the discharge port 722 for discharging the recording paper P. An operation panel 770.

  The head unit 730 includes an ink jet recording head (hereinafter, also simply referred to as “head”) configured from the above-described droplet ejecting head 100 (200). The head unit 730 further includes an ink cartridge 731 that supplies ink to the head, and a transport unit (carriage) 732 on which the head and the ink cartridge 731 are mounted.

  The drive unit 710 can reciprocate the head unit 730. The drive unit 710 includes a carriage motor 741 serving as a drive source for the head unit 730, and a reciprocating mechanism 742 that receives the rotation of the carriage motor 741 and reciprocates the head unit 730.

  The reciprocating mechanism 742 includes a carriage guide shaft 744 supported at both ends by a frame (not shown), and a timing belt 743 extending in parallel with the carriage guide shaft 744. The carriage guide shaft 744 supports the carriage 732 while allowing the carriage 732 to freely reciprocate. Further, the carriage 732 is fixed to a part of the timing belt 743. When the timing belt 743 is caused to travel by the operation of the carriage motor 741, it is guided to the carriage guide shaft 744 and the head unit 730 reciprocates. During this reciprocation, ink is appropriately discharged from the head, and printing on the recording paper P is performed.

  In the present embodiment, an example is shown in which printing is performed while both the droplet ejecting head 100 (200) and the recording paper P are moving. However, the droplet ejecting apparatus of the present invention includes the droplet ejecting head 100. (200) and a mechanism in which the recording paper P is printed on the recording paper P by changing its position relative to each other. Further, in the present embodiment, an example is shown in which printing is performed on the recording paper P. However, the recording medium that can be printed by the liquid droplet ejecting apparatus of the present invention is not limited to paper, but is a cloth or film. A wide range of media such as metal can be used, and the configuration can be changed as appropriate.

  The control unit 760 can control the head unit 730, the driving unit 710, and the paper feeding unit 750.

  The paper feeding unit 750 can feed the recording paper P from the tray 721 to the head unit 730 side. The paper feed unit 750 includes a paper feed motor 751 serving as a drive source thereof, and a paper feed roller 752 that rotates by the operation of the paper feed motor 751. The paper feed roller 752 includes a driven roller 752a and a drive roller 752b that are vertically opposed to each other with the feeding path of the recording paper P interposed therebetween. The drive roller 752b is connected to the paper feed motor 751. When the paper supply unit 750 is driven by the control unit 760, the recording paper P is sent so as to pass below the head unit 730.

  The head unit 730, the driving unit 710, the control unit 760, and the paper feeding unit 750 are provided inside the apparatus main body 720.

  The droplet ejecting apparatus 700 includes the above-described droplet ejecting head 100 (200). Therefore, the liquid supply means to the supply port is simplified, and a liquid droplet ejecting apparatus having a liquid droplet ejecting head that can reduce the head size can be realized.

  Note that the liquid droplet ejecting apparatus exemplified above has one liquid droplet ejecting head, and this liquid droplet ejecting head can perform printing on a recording medium, but has a plurality of liquid droplet ejecting heads. May be. When the droplet ejecting apparatus has a plurality of droplet ejecting heads, the plurality of droplet ejecting heads may be operated independently as described above, or the plurality of droplet ejecting heads are connected to each other. Thus, it may be a single head. An example of such a set of heads is a line-type head in which nozzle holes of a plurality of heads have a uniform interval as a whole.

  As described above, the ink jet recording apparatus 700 as an ink jet printer has been described as an example of the liquid droplet ejecting apparatus according to the present invention. However, the liquid droplet ejecting apparatus according to the present invention can be used industrially. As the liquid or the like (liquid material) discharged in this case, various functional materials adjusted to an appropriate viscosity with a solvent or a dispersion medium can be used. In addition to the exemplified image recording apparatus such as a printer, the liquid droplet ejecting apparatus of the present invention includes a color material ejecting apparatus, an organic EL display, an FED (surface emitting display), an electrophoresis used for manufacturing a color filter such as a liquid crystal display. It can also be suitably used as a liquid material ejecting apparatus used for forming electrodes such as displays and color filters, and a bioorganic material ejecting apparatus used for biochip manufacturing.

  In addition, embodiment mentioned above and various deformation | transformation are examples, respectively, Comprising: This invention is not necessarily limited to these. For example, a plurality of embodiments and modifications can be combined as appropriate.

  The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention includes substantially the same configuration (for example, a configuration having the same function, method and result, or a configuration having the same purpose and effect) as the configuration described in the embodiment. In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that achieves the same effect as the configuration described in the embodiment or a configuration that can achieve the same object. In addition, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

  DESCRIPTION OF SYMBOLS 10 Diaphragm, 20 Piezoelectric element, 22 Lower electrode, 24 Piezoelectric layer, 26 Upper electrode, 30 Flow path formation plate, 32 Pressure chamber, 33 1st opening part, 34 Supply path, 35 2nd opening part, 36 Reservoir, 37 Common reservoir, 40 Sealing plate, 41 Space, 50 Drive unit, 60 Nozzle plate, 61 Nozzle hole, 70 Separator substrate, 71 Base surface, 72 Notch, 73 Side surface, 75 side surface, 80 Lid member, 81 Supply port , 100, 200 Droplet ejecting head, 110 Supply path, 700 Droplet ejecting device, 710 Drive unit, 720 Device main body, 721 Tray, 722 Discharge port, 730 Head unit, 731 Ink cartridge, 732 Carriage, 741 Carriage motor, 742 Reciprocating mechanism, 743 timing belt, 744 carriage guide shaft, 7 0 sheet feeding unit, 751 paper feed motor, 752 feed roller, 752a driven roller, 752b drive rollers, 760 control unit, 770 operation panel.

Claims (3)

A nozzle substrate having nozzle holes for discharging liquid in a first direction;
A diaphragm displacing in a second direction intersecting with the first direction; a piezoelectric element provided on one side of the diaphragm; a pressure chamber provided on the other side of the diaphragm; A pair of drive units each having a flow path forming substrate that divides a reservoir communicating with the chamber, and a sealing plate provided so as to cover the piezoelectric element on the one side of the diaphragm;
The pair of drive units are stacked in the second direction,
The sealing of the other drive unit of the pair of drive units on the opposite side of the flow path forming substrate of the drive unit of the pair of drive units from the diaphragm of the drive unit. A stop plate is provided,
The flow path forming substrate of the pair of drive units is provided with a supply path designed to have a flow path width narrower than the pressure chamber between the pressure chamber and the reservoir,
Each of the sealing plates in the pair of drive units has a first portion that is thick in the second direction to be stacked, and a second portion that is thinner than the first portion,
The supply path is disposed between the first portion of the sealing plate of the one drive unit and the first portion of the sealing plate of the other drive unit. Droplet ejecting head. In claim 1 ,
The surface of the sealing plate of the other drive unit forming the reservoir of the one drive unit is provided with a recess capable of storing bubbles floating in the reservoir. Droplet ejecting head. Droplet ejecting apparatus having a liquid droplet ejecting head according to any one of claims 1 or 2.

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