WO2019167402A1 - Pump device and substrate processing device - Google Patents

Pump device and substrate processing device Download PDF

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Publication number
WO2019167402A1
WO2019167402A1 PCT/JP2018/047350 JP2018047350W WO2019167402A1 WO 2019167402 A1 WO2019167402 A1 WO 2019167402A1 JP 2018047350 W JP2018047350 W JP 2018047350W WO 2019167402 A1 WO2019167402 A1 WO 2019167402A1
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Prior art keywords
liquid
chemical solution
folded
width
ring
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PCT/JP2018/047350
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French (fr)
Japanese (ja)
Inventor
淳樹 西村
小椋　浩之
徹 門間
将司 桐田
栄寿 佐川
省吾 吉田
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株式会社Ｓｃｒｅｅｎホールディングス
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Publication of WO2019167402A1 publication Critical patent/WO2019167402A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching

Definitions

  • the present invention relates to a substrate for an FPD (Flat Panel Display) such as a semiconductor substrate, a liquid crystal display device or an organic EL (electroluminescence) display device, a glass substrate for a photomask, a substrate for an optical disk, a substrate for a magnetic disk, a ceramic substrate, and a solar cell.
  • the present invention relates to a pump device for sending a chemical solution supplied to a substrate such as a substrate for use, and a substrate processing apparatus including the pump device.
  • the pump device is a storage portion that stores a chemical solution, a movable member that reciprocates in the storage portion, and a rolling diaphragm that partitions a storage space in which the chemical solution is stored in the storage portion.
  • the rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of the movable member, and the liquid pushing portion at a preset end position in the pushing movement direction
  • the volume of the accommodating space when the stub is present is 49 cc or less, and the width of the gap between the overlapping portions of the folded cylindrical portion is It is characterized in that the liquid pressing portion is 1/20 or more than 1/6 the width of the.
  • the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral portion, and a folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion.
  • the folded cylindrical portion has an overlapping portion formed by folding.
  • the width of the gap between the overlapping tubular portions is 1/20 or more and 1/6 or less of the width of the liquid pressing portion. If it is in the range, a chemical
  • the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
  • the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral portion, and a folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion.
  • the folded cylindrical portion has an overlapping portion formed by folding.
  • the width of the gap of the overlapping portion of the folded cylindrical portion is 1/30 or more and 1/5 or less of the width of the liquid pressing portion. If it is in the range, a chemical
  • the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
  • the width of the gap of the overlapping portion of the folded tubular portion is the liquid pushing portion.
  • the width of the gap between the liquid pushing portion and the inner wall of the housing portion facing the liquid pushing portion is preferably larger.
  • the rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the case is 49 cc or less, and the width of the gap between the overlapping portions of the folded cylindrical portion is the liquid pushing portion
  • the width is 1/20 or more and 1/6 or less.
  • a substrate processing apparatus includes a holding unit that holds a substrate, a nozzle that discharges a chemical to the substrate held by the holding unit, and a pump device that sends the chemical to the nozzle
  • the pump device includes: a storage portion that stores a chemical solution; a movable member that reciprocates in the storage portion; and a rolling diaphragm that partitions a storage space that stores the chemical solution in the storage portion, the tip of the movable member
  • a liquid pushing part attached to the inner part, a ring-like peripheral part attached to the inner peripheral wall of the housing part, and the liquid pushing part and the ring-shaped peripheral part are connected to each other, and the movable member is connected to the ring-shaped peripheral part.
  • the rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of
  • the volume of the storage space when the liquid pushing portion is present at a preset end position in the case is 0.46 cc or more and 1.5 cc or less
  • the width of the gap of the overlapping portion of the folded cylindrical portion Is 1/30 or more and 1/5 or less of the width
  • the rolling diaphragm of the pump device includes the liquid pushing portion, the ring-shaped peripheral portion, and the folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion.
  • the folded cylindrical portion has an overlapping portion formed by folding.
  • the volume of the storage space is 0.46 cc or more and 1.5 cc or less
  • the width of the gap of the overlapping portion of the folded cylindrical portion is 1/30 or more and 1/5 or less of the width of the liquid pressing portion. If it is in the range, a chemical
  • the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
  • FIG. 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment.
  • 2 and 3 are longitudinal sectional views showing the pump device of the embodiment.
  • FIG. 2 is a diagram when the liquid pushing portion of the rolling diaphragm exists at a preset end position in the pushing movement direction.
  • FIG. 3 is a view when the liquid pushing portion of the rolling diaphragm exists at a position in the suction movement direction.
  • the substrate processing apparatus 1 includes a nozzle 2 and a holding rotation unit 3.
  • the nozzle 2 discharges the chemical liquid onto the substrate W held by the holding rotation unit 3.
  • the chemical solution is, for example, a resist solution, a coating solution for forming an antireflection film, a solvent such as thinner, a rinse solution such as pure water (DIW), a developer, or an etching solution.
  • the holding rotation unit 3 holds the substrate W and rotates the held substrate W.
  • the holding rotation unit 3 includes a spin chuck 4 and a rotation driving unit 5.
  • the spin chuck 4 is configured to be rotatable around the rotation axis AX.
  • the rotation drive unit 5 drives the spin chuck 4 to rotate about the rotation axis AX.
  • the rotation drive unit 5 is composed of an electric motor or the like.
  • the holding rotation unit 3 corresponds to the holding unit of the present invention.
  • the substrate processing apparatus 1 includes a chemical solution supply source 7, chemical solution pipes 8A and 8B, a pump device 9, and on / off valves (ON / OFF valves) V1 and V2.
  • the chemical solution supply source 7 is constituted by, for example, a tank or a bottle that stores the chemical solution.
  • One end of the chemical liquid pipes 8 ⁇ / b> A and 8 ⁇ / b> B is connected to the chemical liquid supply source 7, and the other end is connected to the nozzle 2.
  • a pump device 9 is provided in the chemical solution pipes 8A and 8B between the chemical solution supply source 7 and the nozzle 2.
  • the pump device 9 is a mechanism for feeding a chemical solution. Details of the pump device 9 will be described later.
  • An on-off valve V1 is provided in the chemical liquid pipe 8A between the chemical liquid supply source 7 and the pump device 9.
  • An on-off valve V2 is provided in the chemical liquid pipe 8B between the pump device 9 and the nozzle 2.
  • Each of the on-off valves V1 and V2 supplies a chemical solution and stops the supply.
  • the chemical liquid pipes 8A and 8B may be provided with, for example, at least one of a foreign matter removal filter and a suck back valve for preventing dripping.
  • the pump device 9 includes a chamber 21, a movable member (also referred to as a piston) 23, a rolling diaphragm 25, an electric motor 27, and a conversion mechanism 29.
  • the rolling diaphragm 25 defines a storage space 35 for storing the chemical solution in the chamber 21. That is, the accommodation space 35 is a space surrounded by the inner walls 31 ⁇ / b> A and 31 ⁇ / b> B (including rounded corner portions) of the chamber body 31 and the rolling diaphragm 25.
  • the rolling diaphragm 25 is deformed by the movement of the movable member 23. When the rolling diaphragm 25 is deformed, the volume of the accommodation space 35 changes.
  • the rolling diaphragm 25 includes a liquid pushing portion 41, a peripheral edge portion 43, and a folded cylindrical portion 45.
  • the rolling diaphragm 25 is made of a fluororesin such as PTFE (polytetrafluoroethylene).
  • the liquid pushing portion 41 is attached to the distal end portion of the movable member 23. Therefore, the liquid pushing part 41 is moved integrally with the movable member 23.
  • the peripheral part 43 is ring-shaped.
  • the peripheral portion 43 is attached to an inner peripheral wall (inner wall) 31B such as a cylindrical inner surface of the chamber 21. Specifically, as shown in FIG. 2, the peripheral portion 43 is attached by being sandwiched between the chamber body 31 and the guide portion 33.
  • the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 has the following relationship with the width WD2 of the liquid pushing portion 41. That is, the width WD1 (or the diameter of the roll portion 45A) of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1/20 or more and 1/6 or less of the width of the liquid pressing portion 41. In this case, the volume of the accommodating space 35 when the liquid pushing portion 41 exists at a preset end position in the pushing movement direction is greater than 0 cc and not more than 49 cc (see FIGS. 6 to 8).
  • the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 may be 1/30 or more and 1/5 or less of the width of the liquid pressing portion.
  • the volume of the storage space is 0.46 cc or more and 1.5 cc or less (see FIG. 7). Details of the relationship between the width WD1 of the gap 47A of the overlapping portion 47 and the width WD2 of the liquid pressing portion 41 will be described later.
  • the electric motor 27 is composed of a pulse motor or a servo motor having an encoder.
  • the conversion mechanism 29 converts the rotation obtained from the electric motor 27 into a linear movement in the left-right direction (X direction).
  • the conversion mechanism 29 includes, for example, a screw shaft, a female screw, and a guide part.
  • FIG. 1 A transport mechanism (not shown) transports the substrate W onto the spin chuck 4 of the holding rotation unit 3.
  • the spin chuck 4 holds the substrate W by adsorbing the back surface of the substrate W.
  • the rotation drive unit 5 rotates the substrate W held by the spin chuck 4.
  • the nozzle 2 is moved above the substrate W by a moving mechanism (not shown).
  • the two on-off valves V1 and V2 are closed (OFF state).
  • the on-off valve V1 is closed (OFF state) and the on-off valve V2 is opened (ON state).
  • the movable member 23 and the liquid pushing portion 41 are moved in the pushing movement direction (left direction in FIG. 2) by the electric motor 27 and the conversion mechanism 29.
  • the volume of the accommodation space 35 in the chamber 21 is reduced. Therefore, the chemical solution is sent from the storage space 35 to the nozzle 2 through the outlet port 39, the chemical solution pipe 8B, and the on-off valve V2.
  • the chemical solution sent to the nozzle 2 is discharged from the nozzle 2 onto the substrate W.
  • the two on-off valves V1 and V2 and the pump device 9 As described above, by operating the two on-off valves V1 and V2 and the pump device 9, a predetermined amount of the chemical solution is discharged from the nozzle 2 onto the substrate W. After the chemical solution is discharged, the two on-off valves V1 and V2 are closed (OFF state).
  • the nozzle 2 After discharging the chemical solution, the nozzle 2 is retracted from the substrate W to the outside of the substrate W.
  • the holding rotation unit 3 stops the rotation of the substrate W held, and then releases the holding of the substrate W.
  • a transport mechanism (not shown) moves the substrate W on the holding rotation unit 3 to another device, a mounting unit, a carrier, or the like.
  • FIG. 4B is a fluid analysis model having a ratio of 1:20.
  • FIG. 5A is a fluid analysis model having a ratio of 1:10.
  • FIG. 5B is a fluid analysis model having a ratio of 1: 5.
  • the same dimensions are used for the dimensions other than the widths WD1 and WD2.
  • the liquid Since the volume of the double size is large, the liquid is less likely to flow compared to the standard size. That is, the speed (mm / second) at each position tends to be slow. In the case of the ratio 1:30, the liquid flows more easily in the regions RY2 and RY3 than in the region RY1 shown in FIG. Therefore, as in the case of the standard size, the determination is “ ⁇ (bad)”.
  • the rolling diaphragm 25 includes the liquid pushing portion 41, the ring-shaped peripheral portion 43, and the folded tubular portion 45 that connects the liquid pushing portion 41 and the ring-shaped peripheral portion 43. ing.
  • the folded cylindrical portion 45 has an overlapping portion 47 formed by folding.
  • the width WD1 of the gap 47A of the overlapping portion 47 of the folded cylindrical portion 45 is 1/20 or more and 1/6 or less of the width WD2 of the liquid pressing portion 41.
  • the chemical solution can easily flow into the folded cylindrical portion 45.
  • the chemical solution can flow relatively smoothly from the inlet 37 to the outlet 39. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
  • the width WD1 of the gap 47A of the overlapping portion 47 is as follows.
  • the width WD3 of the gap between the liquid pushing portion 41 and the inner wall (opposing inner wall) 31A of the chamber body 31 facing the liquid pushing portion 41 is larger.
  • the ratio of the width WD1, the width WD2, and the width WD3 is 1:20: about 0.88. That is, at the ratio 1:20, the width WD1 is larger than the width WD3.
  • the chemical solution pipe 8 ⁇ / b> A is connected to the inlet 37 ⁇ / b> A of the upstream pump device 61.
  • One end of the chemical liquid pipe 8C is connected to the outlet 39A of the upstream pump device 61, and the other end of the chemical liquid pipe 8C is connected to the inlet 63A of the foreign matter removing filter 63.
  • One end of the chemical liquid pipe 8D is connected to the outlet 63B of the foreign substance removal filter 63, and the other end of the chemical liquid pipe 8D is connected to the inlet 37B of the downstream pump device 62.
  • medical solution from which the foreign material was removed by the foreign material removal filter 63 is sent out to the exit 63B of the foreign material removal filter 63.
  • a discharge pipe 67 that discharges bubbles, chemicals, and the like is connected to the vent 63 ⁇ / b> C of the foreign matter removal filter 63.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Reciprocating Pumps (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

A rolling diaphragm 25 is provided with: a liquid pressing part 41; a ring-shaped marginal part 43; and a folded cylindrical part 45 connecting the liquid pressing part 41 and the ring-shaped marginal part 43 to each other. The folded cylindrical part 45 has an overlapped portion 47 formed by being folded back. When an accommodation space 35 has a volume of 49 cc or less, a width WD1 of a gap 47A of the overlapped portion 47 of the folded cylindrical part 45 is 1/20 or more and 1/6 or less of a width WD2 of the liquid pressing part 41. Within this range, a chemical solution flows into the folded cylindrical part 45 easily. In addition, the chemical solution can relatively smoothly flow from an inflow port 37 to an outflow port 39 since disturbance in the flow of the chemical solution due to vortexes is reduced. That is, liquid replaceability at the folded cylindrical part is improved. Therefore, it is possible to prevent solidification of the chemical solution and entry of a resultant solidified matter into the chemical solution, and to maintain a cleanliness of the chemical solution.

Description

ポンプ装置および基板処理装置Pump apparatus and substrate processing apparatus
　本発明は、半導体基板、液晶表示装置や有機ＥＬ（electroluminescence）表示装置などのＦＰＤ（Flat Panel Display）用の基板、フォトマスク用ガラス基板、光ディスク用基板、磁気ディスク用基板、セラミック基板、太陽電池用基板等の基板に対して供給される薬液を送るためのポンプ装置およびそれを備えた基板処理装置に関する。 The present invention relates to a substrate for an FPD (Flat Panel Display) such as a semiconductor substrate, a liquid crystal display device or an organic EL (electroluminescence) display device, a glass substrate for a photomask, a substrate for an optical disk, a substrate for a magnetic disk, a ceramic substrate, and a solar cell. The present invention relates to a pump device for sending a chemical solution supplied to a substrate such as a substrate for use, and a substrate processing apparatus including the pump device.
　従来のポンプ装置は、シリンダと、シリンダ内に収容されて往復移動されるピストンと、薬液を送り出すためのチャンバ内の体積を増減させるローリングダイアフラムとを備えている。ローリングダイアフラムの中心部分（液押し部分）はピストンに取り付けられる。一方、ローリングダイアフラムの周縁部は、シリンダの内壁に取り付けられる。ピストンの往復移動に伴ってローリングダイアフラムは変形し、これによって、チャンバ内の体積は増減される（例えば、特許文献１参照）。 The conventional pump device includes a cylinder, a piston that is accommodated in the cylinder and reciprocated, and a rolling diaphragm that increases and decreases the volume in the chamber for sending out the chemical solution. The central part (liquid pushing part) of the rolling diaphragm is attached to the piston. On the other hand, the peripheral edge of the rolling diaphragm is attached to the inner wall of the cylinder. As the piston reciprocates, the rolling diaphragm is deformed, whereby the volume in the chamber is increased or decreased (see, for example, Patent Document 1).
　ピストンとシリンダの内壁との間には、ローリングダイアフラムの膜が折り返されることにより形成されたＵ字状の折り返し筒状部が配置されている。これにより、ピストンの移動距離を稼ぐことができるので、より多くの量の薬液を送ることができる。また、ローリングダイアフラムの折り返し筒状部によりピストンとシリンダの内壁との間の隙間が狭いので、ピストンの移動量に比例してチャンバ内の体積を変化できる。そのため、定量性の面においても優れている。 Between the piston and the inner wall of the cylinder, a U-shaped folded cylindrical portion formed by folding a film of a rolling diaphragm is disposed. Thereby, since the movement distance of a piston can be earned, a larger amount of chemicals can be sent. Further, since the gap between the piston and the inner wall of the cylinder is narrow due to the folded cylindrical portion of the rolling diaphragm, the volume in the chamber can be changed in proportion to the amount of movement of the piston. Therefore, it is excellent also in terms of quantitativeness.
特開２００７－２３９３５号公報JP 2007-23935 A
　しかしながら、このような従来装置は次の問題がある。Ｕ字状の折り返し筒状部は狭く深い。そのため、重なり部分（特に折り返し筒状部の底のロール部分）は、薬液の流動性が悪く、すなわち、液置換性が悪い。そのため、折り返し筒状部で固化した薬液を噛んでしまったりするとなかなか洗い出すことができない。また、折り返し筒状部で固化した薬液がチャンバ内の薬液中に含まれてしまうと、薬液の清浄度を悪化させてしまうおそれがある。 However, such a conventional apparatus has the following problems. The U-shaped folded tubular portion is narrow and deep. For this reason, the overlapping portion (particularly, the roll portion at the bottom of the folded cylindrical portion) has poor chemical fluidity, that is, poor liquid replacement. For this reason, it is difficult to wash out the drug solution solidified in the folded cylindrical portion. Moreover, if the chemical liquid solidified in the folded cylindrical portion is contained in the chemical liquid in the chamber, the cleanliness of the chemical liquid may be deteriorated.
　本発明は、このような事情に鑑みてなされたものであって、薬液の清浄度を維持することが可能なポンプ装置および基板処理装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide a pump device and a substrate processing apparatus capable of maintaining the cleanliness of a chemical solution.
　本発明は、このような目的を達成するために、次のような構成をとる。
　すなわち、本発明に係るポンプ装置は、薬液を収容する収容部と、前記収容部内を往復移動する可動部材と、前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、４９ｃｃ以下であり、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／２０以上１／６以下であることを特徴とするものである。 In order to achieve such an object, the present invention has the following configuration.
In other words, the pump device according to the present invention is a storage portion that stores a chemical solution, a movable member that reciprocates in the storage portion, and a rolling diaphragm that partitions a storage space in which the chemical solution is stored in the storage portion. A liquid pushing part attached to the tip of the member, a ring-like peripheral part attached to the inner peripheral wall of the housing part, and connecting the liquid pushing part and the ring-shaped peripheral part, and more than the ring-shaped peripheral part And the rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of the movable member, and the liquid pushing portion at a preset end position in the pushing movement direction The volume of the accommodating space when the stub is present is 49 cc or less, and the width of the gap between the overlapping portions of the folded cylindrical portion is It is characterized in that the liquid pressing portion is 1/20 or more than 1/6 the width of the.
　本発明に係るポンプ装置によれば、ローリングダイアフラムは、液押し部と、リング状周縁部と、液押し部とリング状周縁部とを接続させる折り返し筒状部とを備えている。折り返し筒状部は、折り返されて形成された重なり部分を有する。収容空間の容積が４９ｃｃ以下である場合に、折り返し筒状部の重なり部分の隙間の幅は、液押し部の幅の１／２０以上１／６以下である。その範囲内であれば、折り返し筒状部に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口から流出口まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 According to the pump device according to the present invention, the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral portion, and a folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion. The folded cylindrical portion has an overlapping portion formed by folding. When the volume of the storage space is 49 cc or less, the width of the gap between the overlapping tubular portions is 1/20 or more and 1/6 or less of the width of the liquid pressing portion. If it is in the range, a chemical | medical solution will flow easily to a return | turnback cylindrical part. In addition, since the disturbance of the chemical liquid flow due to the vortex is suppressed, the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　また、本発明に係るポンプ装置は、薬液を収容する収容部と、前記収容部内を往復移動する可動部材と、前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、０．４６ｃｃ以上１．５ｃｃ以下であり、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／３０以上１／５以下であることを特徴とするものである。 The pump device according to the present invention is a storage portion that stores a chemical solution, a movable member that reciprocates in the storage portion, and a rolling diaphragm that partitions a storage space that stores the chemical solution in the storage portion, the movable diaphragm being A liquid pushing part attached to the tip of the member, a ring-like peripheral part attached to the inner peripheral wall of the housing part, and connecting the liquid pushing part and the ring-shaped peripheral part, and more than the ring-shaped peripheral part And the rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of the movable member, and the liquid pushing portion at a preset end position in the pushing movement direction And the volume of the accommodating space when present is 0.46 cc or more and 1.5 cc or less, and the overlap of the folded cylindrical portions The width of the minute gap is characterized in that the liquid pressing portion is 1/30 or 1/5 the width of the.
　本発明に係るポンプ装置によれば、ローリングダイアフラムは、液押し部と、リング状周縁部と、液押し部とリング状周縁部とを接続させる折り返し筒状部とを備えている。折り返し筒状部は、折り返されて形成された重なり部分を有する。収容空間の容積が０．４６ｃｃ以上１．５ｃｃ以下である場合に、折り返し筒状部の重なり部分の隙間の幅は、液押し部の幅の１／３０以上１／５以下である。その範囲内であれば、折り返し筒状部に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口から流出口まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 According to the pump device according to the present invention, the rolling diaphragm includes a liquid pushing portion, a ring-shaped peripheral portion, and a folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion. The folded cylindrical portion has an overlapping portion formed by folding. When the volume of the storage space is 0.46 cc or more and 1.5 cc or less, the width of the gap of the overlapping portion of the folded cylindrical portion is 1/30 or more and 1/5 or less of the width of the liquid pressing portion. If it is in the range, a chemical | medical solution will flow easily to a return | turnback cylindrical part. In addition, since the disturbance of the chemical liquid flow due to the vortex is suppressed, the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　また、上述のポンプ装置において、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときに、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部と、前記液押し部と対向する前記収容部の内壁との隙間の幅よりも大きいことが好ましい。これにより、液押し部の移動方向における、液押し部と収容部の内壁との隙間よりも、重なり部分の隙間に薬液が流れやすくなる。そのため、折り返し筒状部の液置換性が良くなる。 Further, in the above-described pump device, when the liquid pushing portion is present at a preset end position in the pushing movement direction, the width of the gap of the overlapping portion of the folded tubular portion is the liquid pushing portion. And the width of the gap between the liquid pushing portion and the inner wall of the housing portion facing the liquid pushing portion is preferably larger. Thereby, a chemical | medical solution becomes easy to flow into the clearance gap of an overlap part rather than the clearance gap between the liquid pushing part and the inner wall of an accommodating part in the moving direction of a liquid pushing part. Therefore, the liquid replacement property of the folded tubular portion is improved.
　また、上述のポンプ装置において、前記収容部は、前記収容空間に薬液を流入させる流入口と、前記収容空間から薬液を流出させる流出口とを備え、前記流入口および前記流出口は各々、前記折り返し筒状部のロール部側に向くように前記収容部の内周壁に傾斜して設けられることが好ましい。これにより、折り返し筒状部に薬液が行き渡りやすくできる。そのため、折り返し部の液置換性が更に良くなる。 Further, in the above-described pump device, the storage unit includes an inflow port through which chemical liquid flows into the storage space, and an outflow port through which chemical liquid flows out from the storage space, and the inflow port and the outflow port are respectively It is preferable that the inner wall of the accommodating portion is inclined and provided so as to face the roll portion side of the folded tubular portion. Thereby, a chemical | medical solution can make it easy to spread over a return | turnback cylindrical part. Therefore, the liquid replacement property of the folded portion is further improved.
　また、本発明に係る基板処理装置は、基板を保持する保持部と、前記保持部で保持された前記基板に対して薬液を吐出するノズルと、前記ノズルに薬液を送るためのポンプ装置と、備え、前記ポンプ装置は、薬液を収容する収容部と、前記収容部内を往復移動する可動部材と、前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、４９ｃｃ以下であり、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／２０以上１／６以下であることを特徴とするものである。 In addition, a substrate processing apparatus according to the present invention includes a holding unit that holds a substrate, a nozzle that discharges a chemical to the substrate held by the holding unit, and a pump device that sends the chemical to the nozzle, The pump device includes: a storage portion that stores a chemical solution; a movable member that reciprocates in the storage portion; and a rolling diaphragm that partitions a storage space that stores the chemical solution in the storage portion, the tip of the movable member A liquid pushing part attached to the inner part, a ring-like peripheral part attached to the inner peripheral wall of the housing part, and the liquid pushing part and the ring-shaped peripheral part are connected to each other, and the movable member is connected to the ring-shaped peripheral part. The rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the case is 49 cc or less, and the width of the gap between the overlapping portions of the folded cylindrical portion is the liquid pushing portion The width is 1/20 or more and 1/6 or less.
　本発明に係る基板処理装置によれば、ポンプ装置のローリングダイアフラムは、液押し部と、リング状周縁部と、液押し部とリング状周縁部とを接続させる折り返し筒状部とを備えている。折り返し筒状部は、折り返されて形成された重なり部分を有する。収容空間の容積が４９ｃｃ以下である場合に、折り返し筒状部の重なり部分の隙間の幅は、液押し部の幅の１／２０以上１／６以下である。その範囲内であれば、折り返し筒状部に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口から流出口まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 According to the substrate processing apparatus of the present invention, the rolling diaphragm of the pump device includes a liquid pushing portion, a ring-shaped peripheral portion, and a folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion. . The folded cylindrical portion has an overlapping portion formed by folding. When the volume of the storage space is 49 cc or less, the width of the gap between the overlapping tubular portions is 1/20 or more and 1/6 or less of the width of the liquid pressing portion. If it is in the range, a chemical | medical solution will flow easily to a return | turnback cylindrical part. In addition, since the disturbance of the chemical liquid flow due to the vortex is suppressed, the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　また、本発明に係る基板処理装置は、基板を保持する保持部と、前記保持部で保持された前記基板に対して薬液を吐出するノズルと、前記ノズルに薬液を送るためのポンプ装置と、備え、前記ポンプ装置は、薬液を収容する収容部と、前記収容部内を往復移動する可動部材と、前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、０．４６ｃｃ以上１．５ｃｃ以下であり、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／３０以上１／５以下であることを特徴とするものである。 In addition, a substrate processing apparatus according to the present invention includes a holding unit that holds a substrate, a nozzle that discharges a chemical to the substrate held by the holding unit, and a pump device that sends the chemical to the nozzle, The pump device includes: a storage portion that stores a chemical solution; a movable member that reciprocates in the storage portion; and a rolling diaphragm that partitions a storage space that stores the chemical solution in the storage portion, the tip of the movable member A liquid pushing part attached to the inner part, a ring-like peripheral part attached to the inner peripheral wall of the housing part, and the liquid pushing part and the ring-shaped peripheral part are connected to each other, and the movable member is connected to the ring-shaped peripheral part. The rolling diaphragm having a folded cylindrical portion having an overlapping portion formed by being folded at a position in the suction movement direction of The volume of the storage space when the liquid pushing portion is present at a preset end position in the case is 0.46 cc or more and 1.5 cc or less, and the width of the gap of the overlapping portion of the folded cylindrical portion Is 1/30 or more and 1/5 or less of the width | variety of the said liquid pushing part, It is characterized by the above-mentioned.
　本発明に係るポンプ装置によれば、ポンプ装置のローリングダイアフラムは、液押し部と、リング状周縁部と、液押し部とリング状周縁部とを接続させる折り返し筒状部とを備えている。折り返し筒状部は、折り返されて形成された重なり部分を有する。収容空間の容積が０．４６ｃｃ以上１．５ｃｃ以下である場合に、折り返し筒状部の重なり部分の隙間の幅は、液押し部の幅の１／３０以上１／５以下である。その範囲内であれば、折り返し筒状部に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口から流出口まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 According to the pump device according to the present invention, the rolling diaphragm of the pump device includes the liquid pushing portion, the ring-shaped peripheral portion, and the folded cylindrical portion that connects the liquid pushing portion and the ring-shaped peripheral portion. The folded cylindrical portion has an overlapping portion formed by folding. When the volume of the storage space is 0.46 cc or more and 1.5 cc or less, the width of the gap of the overlapping portion of the folded cylindrical portion is 1/30 or more and 1/5 or less of the width of the liquid pressing portion. If it is in the range, a chemical | medical solution will flow easily to a return | turnback cylindrical part. In addition, since the disturbance of the chemical liquid flow due to the vortex is suppressed, the chemical liquid can flow relatively smoothly from the inlet to the outlet. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　本発明に係るポンプ装置および基板処理装置によれば、薬液の清浄度を維持することができる。 According to the pump device and the substrate processing apparatus according to the present invention, the cleanliness of the chemical solution can be maintained.
実施例に係る基板処理装置の概略構成図である。It is a schematic block diagram of the substrate processing apparatus which concerns on an Example. 押し出し移動方向における予め設定された端位置にローリングダイアフラムの液押し部が存在しているときの実施例のポンプ装置を示す縦断面図である。It is a longitudinal cross-sectional view which shows the pump apparatus of an Example when the liquid pushing part of a rolling diaphragm exists in the preset end position in an extrusion movement direction. 吸引移動方向における位置にローリングダイアフラムの液押し部が存在しているときの実施例のポンプ装置を示す縦断面図である。It is a longitudinal cross-sectional view which shows the pump apparatus of an Example when the liquid pushing part of a rolling diaphragm exists in the position in a suction movement direction. （ａ）は、流体解析モデルの斜視図であり、（ｂ）は、割合１：２０の流体解析モデルである。(A) is a perspective view of a fluid analysis model, and (b) is a fluid analysis model having a ratio of 1:20. （ａ）は、割合１：１０の流体解析モデルであり、（ｂ）は、割合１：５の流体解析モデルである。(A) is a fluid analysis model with a ratio of 1:10, and (b) is a fluid analysis model with a ratio of 1: 5. 標準サイズの流体解析結果を示す表である。It is a table | surface which shows the fluid analysis result of a standard size. 半分サイズの流体解析結果を示す表である。It is a table | surface which shows the fluid analysis result of half size. ２倍サイズの流体解析結果を示す表である。It is a table | surface which shows the fluid analysis result of 2 times size. 図４（ａ）の流体解析モデルの横断面である収容空間を示す図である。It is a figure which shows the accommodation space which is a cross section of the fluid analysis model of Fig.4 (a). 図４（ａ）の流体解析モデル（割合１：２）の横断面である収容空間を示す図である。It is a figure which shows the accommodation space which is a cross section of the fluid analysis model (ratio 1: 2) of Fig.4 (a). 図４（ａ）の流体解析モデルの横断面である収容空間を示す解析データの一例である。It is an example of the analysis data which shows the accommodation space which is a cross section of the fluid analysis model of Fig.4 (a). 図４（ａ）の流体解析モデルの縦断面である収容空間、流入口および流出口を示す解析データの一例である。It is an example of the analysis data which shows the accommodation space, inflow port, and outflow port which are the longitudinal cross-sections of the fluid analysis model of Fig.4 (a). 流体解析モデルの主要な流れの軌跡を示す解析データの一例である。It is an example of the analysis data which shows the locus | trajectory of the main flow of a fluid analysis model. 変形例に係る基板処理装置の概略構成図である。It is a schematic block diagram of the substrate processing apparatus which concerns on a modification.
　以下、図面を参照して本発明の実施例を説明する。図１は、実施例に係る基板処理装置の概略構成図である。図２、図３は、実施例のポンプ装置を示す縦断面図である。なお、図２は、押し出し移動方向における予め設定された端位置にローリングダイアフラムの液押し部が存在しているときの図である。また、図３は、吸引移動方向における位置にローリングダイアフラムの液押し部が存在しているときの図である。 Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment. 2 and 3 are longitudinal sectional views showing the pump device of the embodiment. FIG. 2 is a diagram when the liquid pushing portion of the rolling diaphragm exists at a preset end position in the pushing movement direction. FIG. 3 is a view when the liquid pushing portion of the rolling diaphragm exists at a position in the suction movement direction.
　＜基板処理装置１の構成＞
　図１を参照する。基板処理装置１は、ノズル２と保持回転部３とを備えている。ノズル２は、保持回転部３で保持された基板Ｗに対して薬液を吐出するものである。薬液は、例えば、レジスト液、反射防止膜形成用の塗布液、シンナー等の溶剤、純水（ＤＩＷ）等のリンス液、現像液、またはエッチング液である。 <Configuration of Substrate Processing Apparatus 1>
Please refer to FIG. The substrate processing apparatus 1 includes a nozzle 2 and a holding rotation unit 3. The nozzle 2 discharges the chemical liquid onto the substrate W held by the holding rotation unit 3. The chemical solution is, for example, a resist solution, a coating solution for forming an antireflection film, a solvent such as thinner, a rinse solution such as pure water (DIW), a developer, or an etching solution.
　保持回転部３は、基板Ｗを保持し、保持した基板Ｗを回転するものである。保持回転部３は、スピンチャック４と回転駆動部５とを備えている。スピンチャック４は、回転軸ＡＸ周りに回転可能に構成されている。スピンチャック４は、例えば、基板Ｗの裏面を真空吸着することにより基板Ｗを略水平姿勢で保持する。一方、回転駆動部５は、スピンチャック４を回転軸ＡＸ周りに回転させる駆動を行う。回転駆動部５は、電動モータ等で構成されている。保持回転部３は本発明の保持部に相当する。 The holding rotation unit 3 holds the substrate W and rotates the held substrate W. The holding rotation unit 3 includes a spin chuck 4 and a rotation driving unit 5. The spin chuck 4 is configured to be rotatable around the rotation axis AX. For example, the spin chuck 4 holds the substrate W in a substantially horizontal posture by vacuum-sucking the back surface of the substrate W. On the other hand, the rotation drive unit 5 drives the spin chuck 4 to rotate about the rotation axis AX. The rotation drive unit 5 is composed of an electric motor or the like. The holding rotation unit 3 corresponds to the holding unit of the present invention.
　また、基板処理装置１は、薬液供給源７、薬液配管８Ａ，８Ｂ、ポンプ装置９および開閉弁（ＯＮ・ＯＦＦ弁）Ｖ１，Ｖ２を備えている。薬液供給源７は、例えば、薬液を貯留するタンクまたはボトルで構成されている。薬液配管８Ａ，８Ｂの一端は、薬液供給源７に接続され、その他端は、ノズル２に接続されている。 Further, the substrate processing apparatus 1 includes a chemical solution supply source 7, chemical solution pipes 8A and 8B, a pump device 9, and on / off valves (ON / OFF valves) V1 and V2. The chemical solution supply source 7 is constituted by, for example, a tank or a bottle that stores the chemical solution. One end of the chemical liquid pipes 8 </ b> A and 8 </ b> B is connected to the chemical liquid supply source 7, and the other end is connected to the nozzle 2.
　薬液供給源７とノズル２との間の薬液配管８Ａ，８Ｂには、ポンプ装置９が設けられている。ポンプ装置９は薬液を送る機構である。ポンプ装置９の詳細については後述する。薬液供給源７とポンプ装置９の間の薬液配管８Ａには、開閉弁Ｖ１が設けられている。ポンプ装置９とノズル２との間の薬液配管８Ｂには、開閉弁Ｖ２が設けられている。開閉弁Ｖ１，Ｖ２は各々、薬液の供給およびその供給の停止を行う。なお、薬液配管８Ａ，８Ｂには、例えば、異物除去フィルタおよび、液だれ防止のためのサックバック弁の少なくともいずれかが設けられていてもよい。 In the chemical solution pipes 8A and 8B between the chemical solution supply source 7 and the nozzle 2, a pump device 9 is provided. The pump device 9 is a mechanism for feeding a chemical solution. Details of the pump device 9 will be described later. An on-off valve V1 is provided in the chemical liquid pipe 8A between the chemical liquid supply source 7 and the pump device 9. An on-off valve V2 is provided in the chemical liquid pipe 8B between the pump device 9 and the nozzle 2. Each of the on-off valves V1 and V2 supplies a chemical solution and stops the supply. The chemical liquid pipes 8A and 8B may be provided with, for example, at least one of a foreign matter removal filter and a suck back valve for preventing dripping.
　基板処理装置１は、１または２以上の制御部１３と、操作部１５とを備えている。制御部１３は、中央演算処理装置（ＣＰＵ）を有している。制御部１３は、基板処理装置１およびポンプ装置９の各構成を制御する。操作部１５は、入力部、表示部および記憶部を備えている。記憶部は、ＲＯＭ（Read-only Memory）、ＲＡＭ（Random-Access Memory）、およびハードディスク等で構成されている。記憶部には、例えば基板処理の各種条件が記憶されている。 The substrate processing apparatus 1 includes one or more control units 13 and an operation unit 15. The control unit 13 has a central processing unit (CPU). The control unit 13 controls each configuration of the substrate processing apparatus 1 and the pump apparatus 9. The operation unit 15 includes an input unit, a display unit, and a storage unit. The storage unit includes a ROM (Read-only Memory), a RAM (Random-Access Memory), a hard disk, and the like. For example, various conditions for substrate processing are stored in the storage unit.
　＜ポンプ装置９の構成＞
　ポンプ装置９は、図２、図３のように、チャンバ２１、可動部材（またはピストンとも言う）２３、ローリングダイアフラム２５、電動モータ２７および変換機構２９を備えている。 <Configuration of pump device 9>
As shown in FIGS. 2 and 3, the pump device 9 includes a chamber 21, a movable member (also referred to as a piston) 23, a rolling diaphragm 25, an electric motor 27, and a conversion mechanism 29.
　チャンバ２１は、薬液を収容するものであり、円柱状の空洞を有している。チャンバ２１は、本発明の収容部に相当する。チャンバ２１は、チャンバ本体３１とガイド部３３を備えている。チャンバ本体３１には、収容空間（またはポンプ室とも言う）３５、流入口３７、流出口３９および圧力センサ（図示しない）を備えている。可動部材２３は、チャンバ２１内をＸ方向に往復移動するものである。可動部材２３は、円柱状に形成されている。 The chamber 21 contains a chemical solution and has a cylindrical cavity. The chamber 21 corresponds to the accommodating portion of the present invention. The chamber 21 includes a chamber main body 31 and a guide portion 33. The chamber body 31 includes an accommodation space (also referred to as a pump chamber) 35, an inlet 37, an outlet 39, and a pressure sensor (not shown). The movable member 23 reciprocates in the chamber 21 in the X direction. The movable member 23 is formed in a cylindrical shape.
　ローリングダイアフラム２５は、チャンバ２１内の薬液を収容する収容空間３５を区画するものである。すなわち、収容空間３５は、チャンバ本体３１の内壁３１Ａ，３１Ｂ（丸みがあるコーナー部を含む）と、ローリングダイアフラム２５とで囲まれた空間である。可動部材２３の移動によって、ローリングダイアフラム２５が変形する。ローリングダイアフラム２５が変形すると、収容空間３５の体積が変化する。 The rolling diaphragm 25 defines a storage space 35 for storing the chemical solution in the chamber 21. That is, the accommodation space 35 is a space surrounded by the inner walls 31 </ b> A and 31 </ b> B (including rounded corner portions) of the chamber body 31 and the rolling diaphragm 25. The rolling diaphragm 25 is deformed by the movement of the movable member 23. When the rolling diaphragm 25 is deformed, the volume of the accommodation space 35 changes.
　ローリングダイアフラム２５は、液押し部４１、周縁部４３および折り返し筒状部４５を備えている。ローリングダイアフラム２５は、例えばＰＴＦＥ（ポリテトラフルオロエチレン：polytetrafluoroethylene）などのフッ素樹脂で形成される。液押し部４１は、可動部材２３の先端部に取り付けられている。そのため、液押し部４１は、可動部材２３と一体となって移動される。周縁部４３はリング状である。周縁部４３は、チャンバ２１の円筒内面のような内周壁（内壁）３１Ｂに取り付けられている。具体的には、図２のように、周縁部４３は、チャンバ本体３１とガイド部３３で挟まれることで取り付けられている。 The rolling diaphragm 25 includes a liquid pushing portion 41, a peripheral edge portion 43, and a folded cylindrical portion 45. The rolling diaphragm 25 is made of a fluororesin such as PTFE (polytetrafluoroethylene). The liquid pushing portion 41 is attached to the distal end portion of the movable member 23. Therefore, the liquid pushing part 41 is moved integrally with the movable member 23. The peripheral part 43 is ring-shaped. The peripheral portion 43 is attached to an inner peripheral wall (inner wall) 31B such as a cylindrical inner surface of the chamber 21. Specifically, as shown in FIG. 2, the peripheral portion 43 is attached by being sandwiched between the chamber body 31 and the guide portion 33.
　折り返し筒状部４５は、筒状の膜である。折り返し筒状部４５は、液押し部４１とリング状の周縁部４３とを接続させている。これにより、収容空間３５に収容された薬液がガイド部３３の背後空間ＳＰに及ばないようになっている。すなわち、ローリングダイアフラム２５は、収容空間３５と背後空間ＳＰとを遮断している。また、折り返し筒状部４５は、周縁部４３よりも可動部材２３の吸引移動方向（図２における右方向）の位置で折り返されている。折り返し筒状部４５が折り返されることで重なり部分４７が形成されている。折り返し筒状部４５はＵ字状である。Ｕ字の底が周縁部４３よりも図２における右方向に配置されている。折り返し筒状部４５は、隙間を有しつつ折り返されている。 The folded tubular portion 45 is a tubular film. The folded tubular portion 45 connects the liquid pushing portion 41 and the ring-shaped peripheral portion 43. Thereby, the chemical | medical solution accommodated in the accommodation space 35 does not reach back space SP of the guide part 33. FIG. That is, the rolling diaphragm 25 blocks the accommodation space 35 and the back space SP. Further, the folded cylindrical portion 45 is folded at a position in the suction movement direction (right direction in FIG. 2) of the movable member 23 relative to the peripheral portion 43. The overlapping portion 47 is formed by folding the folded tubular portion 45. The folded tubular portion 45 is U-shaped. The bottom of the U-shape is arranged in the right direction in FIG. The folded cylindrical portion 45 is folded with a gap.
　なお、折り返し筒状部４５は、ロール部４５Ａと、液押し部４１側の非ロール部４５Ｂと、周縁部４３側の非ロール部４５Ｃとを備えている。図２において、可動部材２３が吸引移動方向（図２における右方向）に移動すると、ロール部４５Ａは、図３のように、液押し部４１側の非ロール部４５Ｂの領域に移動する。すなわち、可動部材２３が移動すると、ロール部４５Ａが転がるように、ロール部４５Ａの位置が移動する。これにより、液押し部４１側の非ロール部４５Ｂが短くなり、周縁部４３側の非ロール部４５Ｃが長くなる。 The folded cylindrical portion 45 includes a roll portion 45A, a non-roll portion 45B on the liquid pressing portion 41 side, and a non-roll portion 45C on the peripheral edge 43 side. In FIG. 2, when the movable member 23 moves in the suction movement direction (right direction in FIG. 2), the roll unit 45 </ b> A moves to the area of the non-roll unit 45 </ b> B on the liquid pushing unit 41 side as shown in FIG. 3. That is, when the movable member 23 moves, the position of the roll part 45A moves so that the roll part 45A rolls. Thereby, the non-roll part 45B by the side of the liquid pushing part 41 becomes short, and the non-roll part 45C by the side of the peripheral part 43 becomes long.
　本発明において、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１は、液押し部４１の幅ＷＤ２に対して次のような関係を有している。すなわち、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１（またはロール部４５Ａの直径）は、液押し部４１の幅の１／２０以上１／６以下である。この場合、押し出し移動方向における予め設定された端位置に液押し部４１が存在しているときの収容空間３５の容積は、０ｃｃより大きく４９ｃｃ以下である（図６～図８参照）。 In the present invention, the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 has the following relationship with the width WD2 of the liquid pushing portion 41. That is, the width WD1 (or the diameter of the roll portion 45A) of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1/20 or more and 1/6 or less of the width of the liquid pressing portion 41. In this case, the volume of the accommodating space 35 when the liquid pushing portion 41 exists at a preset end position in the pushing movement direction is greater than 0 cc and not more than 49 cc (see FIGS. 6 to 8).
　また、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１は、前記液押し部の幅の１／３０以上１／５以下であってもよい。この場合、押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときに、前記収容空間の容積は、０．４６ｃｃ以上１．５ｃｃ以下である（図７参照）。重なり部分４７の隙間４７Ａの幅ＷＤ１と、液押し部４１の幅ＷＤ２との関係についての詳細は後述する。 Further, the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 may be 1/30 or more and 1/5 or less of the width of the liquid pressing portion. In this case, when the liquid pushing portion exists at a preset end position in the pushing movement direction, the volume of the storage space is 0.46 cc or more and 1.5 cc or less (see FIG. 7). Details of the relationship between the width WD1 of the gap 47A of the overlapping portion 47 and the width WD2 of the liquid pressing portion 41 will be described later.
　電動モータ２７は、パルスモータまたは、エンコーダを有するサーボモータで構成されている。変換機構２９は、電動モータ２７より得られた回転を左右方向（Ｘ方向）の直線移動に変換する。変換機構２９は、例えば、ねじ軸、雌ねじおよびガイド部を備えている。 The electric motor 27 is composed of a pulse motor or a servo motor having an encoder. The conversion mechanism 29 converts the rotation obtained from the electric motor 27 into a linear movement in the left-right direction (X direction). The conversion mechanism 29 includes, for example, a screw shaft, a female screw, and a guide part.
　＜基板処理装置１およびポンプ装置９の動作＞
　次に、基板処理装置１およびポンプ装置９の動作について説明する。図１を参照する。図示しない搬送機構は、保持回転部３のスピンチャック４上に基板Ｗを搬送する。スピンチャック４は、基板Ｗの裏面を吸着することで基板Ｗを保持する。回転駆動部５は、スピンチャック４で保持された基板Ｗを回転させる。ノズル２は、図示しない移動機構により、基板Ｗの上方に移動されている。なお、２つの開閉弁Ｖ１，Ｖ２は閉じている（ＯＦＦ状態）。 <Operation of Substrate Processing Apparatus 1 and Pump Apparatus 9>
Next, operations of the substrate processing apparatus 1 and the pump apparatus 9 will be described. Please refer to FIG. A transport mechanism (not shown) transports the substrate W onto the spin chuck 4 of the holding rotation unit 3. The spin chuck 4 holds the substrate W by adsorbing the back surface of the substrate W. The rotation drive unit 5 rotates the substrate W held by the spin chuck 4. The nozzle 2 is moved above the substrate W by a moving mechanism (not shown). The two on-off valves V1 and V2 are closed (OFF state).
　ポンプ装置９は、薬液供給源７から薬液を取り込んでノズル２に送る。ポンプ装置９の動作を具体的に説明する。開閉弁Ｖ１を開き（ＯＮ状態）、開閉弁Ｖ２を閉じる（ＯＦＦ状態）。その後、電動モータ２７が駆動され、変換機構２９は、電動モータ２７による回転を直線移動に変換する。これにより、可動部材２３は、吸引移動方向（図２における右方向）に移動されると共に、ローリングダイアフラム２５の液押し部４１も吸引移動方向に移動される。液押し部４１が吸引移動方向に移動されると、チャンバ２１内の収容空間３５の体積が増加する。そのため、薬液配管８Ａ、開閉弁Ｖ１および流入口３７を介して、薬液供給源７からチャンバ２１内の収容空間３５に薬液が送られる。 The pump device 9 takes in the chemical solution from the chemical solution supply source 7 and sends it to the nozzle 2. The operation of the pump device 9 will be specifically described. The on-off valve V1 is opened (ON state), and the on-off valve V2 is closed (OFF state). Thereafter, the electric motor 27 is driven, and the conversion mechanism 29 converts the rotation by the electric motor 27 into a linear movement. Thereby, the movable member 23 is moved in the suction movement direction (right direction in FIG. 2), and the liquid pushing portion 41 of the rolling diaphragm 25 is also moved in the suction movement direction. When the liquid pushing part 41 is moved in the suction movement direction, the volume of the accommodation space 35 in the chamber 21 increases. Therefore, the chemical solution is sent from the chemical solution supply source 7 to the accommodating space 35 in the chamber 21 through the chemical solution pipe 8 </ b> A, the on-off valve V <b> 1, and the inlet 37.
　収容空間３５に薬液を吸引させた後、開閉弁Ｖ１を閉じ（ＯＦＦ状態）、開閉弁Ｖ２を開く（ＯＮ状態）。その後、電動モータ２７および変換機構２９によって、可動部材２３および液押し部４１は、押し出し移動方向（図２における左方向）に移動される。これにより、チャンバ２１内の収容空間３５の体積が減少する。そのため、流出口３９、薬液配管８Ｂおよび開閉弁Ｖ２を介して、収容空間３５からノズル２に薬液が送られる。ノズル２に送られた薬液は、ノズル２から基板Ｗ上に吐出される。 After the chemical solution is sucked into the storage space 35, the on-off valve V1 is closed (OFF state) and the on-off valve V2 is opened (ON state). Thereafter, the movable member 23 and the liquid pushing portion 41 are moved in the pushing movement direction (left direction in FIG. 2) by the electric motor 27 and the conversion mechanism 29. Thereby, the volume of the accommodation space 35 in the chamber 21 is reduced. Therefore, the chemical solution is sent from the storage space 35 to the nozzle 2 through the outlet port 39, the chemical solution pipe 8B, and the on-off valve V2. The chemical solution sent to the nozzle 2 is discharged from the nozzle 2 onto the substrate W.
　なお、上述のように、２つの開閉弁Ｖ１，Ｖ２とポンプ装置９を操作することによって、予め設定された量の薬液をノズル２から基板Ｗ上に吐出する。薬液を吐出した後、２つの開閉弁Ｖ１，Ｖ２は閉じられる（ＯＦＦ状態）。 As described above, by operating the two on-off valves V1 and V2 and the pump device 9, a predetermined amount of the chemical solution is discharged from the nozzle 2 onto the substrate W. After the chemical solution is discharged, the two on-off valves V1 and V2 are closed (OFF state).
　薬液を吐出した後、ノズル２は、基板Ｗの上方から基板Ｗ外に退避される。保持回転部３は、保持される基板Ｗの回転を停止し、その後、基板Ｗの保持を解除する。図示しない搬送機構は、保持回転部３上の基板Ｗを他の装置、載置部またはキャリア等に移動させる。 After discharging the chemical solution, the nozzle 2 is retracted from the substrate W to the outside of the substrate W. The holding rotation unit 3 stops the rotation of the substrate W held, and then releases the holding of the substrate W. A transport mechanism (not shown) moves the substrate W on the holding rotation unit 3 to another device, a mounting unit, a carrier, or the like.
　＜重なり部分４７の隙間について＞
　ローリングダイアフラム２５の折り返し筒状部４５は、深いＵ字状の溝を有し、重なり部分４７の隙間４７Ａが狭い。そのため、折り返し筒状部４５の液置換性が悪い。そのため、薬液（例えばレジスト液）が固化すると、固化した薬液の洗い出しが大変であるだけでなく、固化物が薬液の清浄度を悪化させ、パーティクルの原因になる。 <About the gap of the overlapping portion 47>
The folded cylindrical portion 45 of the rolling diaphragm 25 has a deep U-shaped groove, and the gap 47A of the overlapping portion 47 is narrow. Therefore, the liquid replacement property of the folded cylindrical portion 45 is poor. Therefore, when the chemical solution (for example, resist solution) is solidified, not only is it difficult to wash out the solidified chemical solution, but the solidified product deteriorates the cleanliness of the chemical solution and causes particles.
　そこで、図２に示すような、重なり部分４７の隙間４７Ａの幅ＷＤ１と液押し部４１の幅ＷＤ２との最適な割合を求めるために、流体解析を行った。流体解析において、幅ＷＤ１と幅ＷＤ２との割合を変化させた。まず、流体解析のモデルについて説明する。図４（ａ）、図４（ｂ）、図５（ａ）および図５（ｂ）は、図２に示すチャンバ２１とローリングダイアフラム２５等を流体解析のために簡易化したものである。 Therefore, in order to obtain an optimum ratio between the width WD1 of the gap 47A of the overlapping portion 47 and the width WD2 of the liquid pushing portion 41 as shown in FIG. In the fluid analysis, the ratio between the width WD1 and the width WD2 was changed. First, a fluid analysis model will be described. 4 (a), 4 (b), 5 (a) and 5 (b) show the chamber 21 and rolling diaphragm 25 shown in FIG. 2 simplified for fluid analysis.
　図４（ａ）は、流体解析モデルの斜視図である。図４（ａ）の矢印で示すように、液体（薬液）は、流入口３７から収容空間３５に入れられ、収容空間３５内を移動した後、液体は、流出口３９から出される。図４（ｂ）、図５（ａ）および図５（ｂ）は、図４（ａ）の平面ＰＬ１で示される縦断面の解析モデルである。平面ＰＬ１は、チャンバ２１の水平方向のほぼ中央を通過する。平面ＰＬ２は、チャンバ２１の垂直方向のほぼ中央を通過する。 FIG. 4A is a perspective view of the fluid analysis model. As shown by the arrow in FIG. 4A, the liquid (chemical solution) is put into the storage space 35 from the inflow port 37, and after moving through the storage space 35, the liquid is discharged from the outflow port 39. FIG. 4B, FIG. 5A, and FIG. 5B are analysis models of a longitudinal section indicated by a plane PL1 in FIG. The plane PL1 passes through substantially the center of the chamber 21 in the horizontal direction. The plane PL2 passes through substantially the center of the chamber 21 in the vertical direction.
　図４（ｂ）、図５（ａ）および図５（ｂ）は、図２に示す液押し部４１を押し切った状態、すなわち、押し出し移動方向（図２における左方向）における予め設定された端位置に液押し部４１が存在しているときの状態である。液押し部４１を押し切った状態では、折り返し筒状部４５のＵ字状の溝が最も深くなる。実際、ポンプ装置９の動作中に、可動部材２３等は移動される。しかしながら、流体解析では、Ｕ字状の溝が最も深くなる状態で、可動部材２３等を移動させず固定させている。 4 (b), 5 (a) and 5 (b) show a state in which the liquid pushing portion 41 shown in FIG. 2 is pushed, that is, a preset end in the pushing movement direction (left direction in FIG. 2). This is a state when the liquid pushing portion 41 exists at the position. In the state where the liquid pushing portion 41 is pushed all the way, the U-shaped groove of the folded tubular portion 45 is deepest. Actually, the movable member 23 and the like are moved during the operation of the pump device 9. However, in the fluid analysis, the movable member 23 and the like are fixed without moving in a state where the U-shaped groove is deepest.
　まず、幅ＷＤ２と幅ＷＤ１の割合（形状割合または比率）を６種類、準備した。６種類の割合とは、１：３０、１：２０、１：１０、１：６、１：５、および１：２である。なお、図４（ｂ）は、割合１：２０の流体解析モデルである。図５（ａ）は、割合１：１０の流体解析モデルである。図５（ｂ）は、割合１：５の流体解析モデルである。また、例えば後述する標準サイズにおいて、幅ＷＤ１，ＷＤ２以外の寸法は同じ寸法が用いられる。 First, six types of ratios (shape ratios or ratios) of width WD2 and width WD1 were prepared. The six ratios are 1:30, 1:20, 1:10, 1: 6, 1: 5, and 1: 2. FIG. 4B is a fluid analysis model having a ratio of 1:20. FIG. 5A is a fluid analysis model having a ratio of 1:10. FIG. 5B is a fluid analysis model having a ratio of 1: 5. For example, in the standard size described later, the same dimensions are used for the dimensions other than the widths WD1 and WD2.
　次に、図６～図８は、流体解析結果である。図６は、標準サイズの流体解析結果である。標準サイズは、図２に示すポンプ装置９で採用されているサイズと略同じサイズである。容積は、液押し部４１を押し切った状態のときの容積（体積）であり、流入口３７および流出口３９の体積を含む。 Next, FIGS. 6 to 8 show fluid analysis results. FIG. 6 shows the results of a standard size fluid analysis. The standard size is substantially the same size as the size adopted in the pump device 9 shown in FIG. The volume is a volume (volume) when the liquid pushing portion 41 is fully pushed, and includes the volumes of the inlet 37 and the outlet 39.
　流入口３７に流入される液体の流量（ｃｃ／秒（ｓｅｃ））は、３．０ｃｃ／秒以下（０ｃｃ／秒より大きい）である。流体解析において、３種類の流量を準備した。３種類の流量とは０．４ｃｃ／秒、１．０ｃｃ／秒および２．０ｃｃ／秒である。 The flow rate (cc / sec (sec)) of the liquid flowing into the inlet 37 is 3.0 cc / sec or less (greater than 0 cc / sec). Three types of flow rates were prepared in the fluid analysis. The three types of flow rates are 0.4 cc / sec, 1.0 cc / sec and 2.0 cc / sec.
　図７は、半分サイズの流体解析結果を示す。図８は、２倍サイズの流体解析結果を示す。例えば、標準サイズの液押し部４１の幅ＷＤ２が例えばＰＤ（ｍｍ）である場合、半分サイズの液押し部４１の幅ＷＤ２はＰＤ／２（ｍｍ）である。また、２倍サイズの液押し部４１の幅ＷＤ２はＰＤ×２（ｍｍ）である。すなわち、半分サイズの各寸法は標準サイズの１／２倍（半分）である。２倍サイズの各寸法は標準サイズの２倍である。 Fig. 7 shows the results of a half-size fluid analysis. FIG. 8 shows a fluid analysis result of double size. For example, when the width WD2 of the standard-size liquid pressing portion 41 is, for example, PD (mm), the width WD2 of the half-size liquid pressing portion 41 is PD / 2 (mm). Further, the width WD2 of the double-size liquid pressing portion 41 is PD × 2 (mm). That is, each dimension of the half size is ½ times (half) the standard size. Each size of the double size is twice the standard size.
　＜標準サイズの流体解析結果＞
　図６に示す標準サイズの流体解析結果について説明する。標準サイズの容積（液押し部４１を押し切った状態のときの容積）は、３．６５ｃｃ～１２ｃｃである。なお、液押し部４１を引き切った状態のときの容量は約２５ｃｃである。図９は、図４（ａ）に示す流体解析モデルの平面ＰＬ２の横断面である収容空間３５を示す図である。 <Standard size fluid analysis results>
The standard size fluid analysis results shown in FIG. 6 will be described. The standard size volume (the volume when the liquid pushing portion 41 is fully pushed) is 3.65 cc to 12 cc. Note that the capacity when the liquid pushing portion 41 is pulled out is about 25 cc. FIG. 9 is a diagram showing the accommodation space 35 that is a cross section of the plane PL2 of the fluid analysis model shown in FIG.
　割合１：３０の場合は、図９の領域ＲＹ１よりも、領域ＲＹ２，ＲＹ３で液体が流れやすい。領域ＲＹ１で液体が流れにくいと、液置換性が悪化する。また、割合１：３０の場合、流量が増すほど（例えば流量１．０ｃｃ／秒，２．０ｃｃ／秒）、図９に示す領域ＲＹ１で液体が流れやすく（速度（ｍｍ／秒）が大きい）なるものの、流れが速い部分と流れが遅い部分とのような流れにムラが生じる。また、領域ＲＹ１よりも領域ＲＹ２，ＲＹ３の方で、液体が流れやすい傾向は変わらない。そのため、判定は「×（悪い）」である。 When the ratio is 1:30, the liquid flows more easily in the regions RY2 and RY3 than in the region RY1 in FIG. If the liquid is difficult to flow in the region RY1, the liquid replacement property is deteriorated. In the case of the ratio 1:30, as the flow rate increases (for example, the flow rate is 1.0 cc / second, 2.0 cc / second), the liquid easily flows in the region RY1 shown in FIG. 9 (the speed (mm / second) is large). However, unevenness occurs in the flow such as a portion where the flow is fast and a portion where the flow is slow. In addition, the tendency of the liquid to flow more easily in the regions RY2 and RY3 than in the region RY1. Therefore, the determination is “× (bad)”.
　割合１：２０になると、図９に示す領域ＲＹ１，ＲＹ３よりも角部の領域ＲＹ２で液体が流れやすい。しかしながら、領域ＲＹ３よりも領域ＲＹ１で液体が流れやすい。領域ＲＹ１で液体が流れやすくなると、折り返し筒状部４５の液置換性が良くなる。また、割合１：３０に比べて、領域ＲＹ１において、液体が均等に流れる。そのため、判定は「○（良い）」である。また、割合１：１０と割合１：６では、図９に示す領域ＲＹ３よりも、領域ＲＹ１，ＲＹ２で液体が流れやすい。また、領域ＲＹ１と領域ＲＹ２とで、液体が均等に流れる。そのため、判定は「○（良い）」である。 When the ratio is 1:20, the liquid flows more easily in the corner area RY2 than in the areas RY1 and RY3 shown in FIG. However, the liquid flows more easily in the region RY1 than in the region RY3. When the liquid easily flows in the region RY1, the liquid replacement property of the folded cylindrical portion 45 is improved. In addition, compared with the ratio 1:30, the liquid flows evenly in the region RY1. Therefore, the determination is “◯ (good)”. In the ratio 1:10 and the ratio 1: 6, the liquid flows more easily in the regions RY1 and RY2 than in the region RY3 illustrated in FIG. Further, the liquid flows evenly in the region RY1 and the region RY2. Therefore, the determination is “◯ (good)”.
　割合１：５よりも先に割合１：２を説明する。割合１：２の場合、液体が渦を巻いて流れる。更に、図１０のように、渦にムラが生じる。すなわち、領域ＲＹ１，ＲＹ２において、渦の流れが速い部分ＳＤ１と、渦の（あるいは渦になっていない）流れが遅い部分ＳＤ２が生じる。割合１：２０～割合１：６（あるいは割合１：２０～後述する割合１：５）のように、領域ＲＹ１，ＲＹ２は、液体が均等に流れることが好ましい。そのため、割合１：２の判定は「×（悪い）」である。なお、渦にムラが生じる割合１：２の場合、流入口３７から流出口３９に比較的最短距離で液体が流れず、図９のような横断面方向に液体の流れが大きく乱れる。 The ratio 1: 2 will be explained before the ratio 1: 5. When the ratio is 1: 2, the liquid flows in a vortex. Further, as shown in FIG. 10, the vortex is uneven. That is, in the regions RY1 and RY2, a portion SD1 where the flow of vortex is fast and a portion SD2 where the flow of vortex (or not vortex) is slow are generated. As in the ratio 1:20 to the ratio 1: 6 (or the ratio 1:20 to the ratio 1: 5 described later), it is preferable that the liquid flows uniformly in the regions RY1 and RY2. Therefore, the determination of the ratio 1: 2 is “x (bad)”. Note that when the ratio of the vortex unevenness is 1: 2, the liquid does not flow from the inflow port 37 to the outflow port 39 at a relatively shortest distance, and the liquid flow is greatly disturbed in the cross-sectional direction as shown in FIG.
　また、割合１：５は、割合１：２のような渦にムラが生じること抑えられる。割合１：５は、割合１：２０～割合１：６と同様に、領域ＲＹ１，ＲＹ２で液体が比較的均等に流れる。しかしながら、流入口３７付近で横断面方向の渦の影響が大きい。割合１：２の場合も含めて、渦は液体を掻き回すので液置換性と思われるかもしれない。液体が掻き回されて元の位置に戻った場合には、液置換性が良いとは言えないと考えられる。割合１：５は、割合１：６に比べて渦の影響が大きい。そのため、判定は「×（悪い）」である。すなわち、割合１：６は、割合１：５に比べて渦の影響が小さい。なお、渦の影響は、後述する図１３の主要な流れの軌跡を観察者が見ることで判定される。 Further, the ratio 1: 5 can suppress the occurrence of unevenness in the vortex like the ratio 1: 2. In the ratio 1: 5, as in the ratio 1:20 to the ratio 1: 6, the liquid flows relatively evenly in the regions RY1 and RY2. However, the influence of the vortex in the cross-sectional direction is large near the inlet 37. Including the ratio of 1: 2, the vortex stirs the liquid and may seem liquid replaceable. When the liquid is stirred and returned to the original position, it cannot be said that the liquid replacement property is good. The ratio 1: 5 is more influenced by the vortex than the ratio 1: 6. Therefore, the determination is “× (bad)”. That is, the ratio 1: 6 is less affected by the vortex than the ratio 1: 5. Note that the influence of the vortex is determined by the observer viewing the main flow trajectory of FIG. 13 described later.
　ここで、図１１～図１３に解析データの一例を示す。図１１は、図４（ａ）の流体解析モデルにおける平面ＰＬ２の横断面である収容空間３５を示す解析データの一例である。図１２は、図４（ａ）の流体解析モデルにおける平面ＰＬ２の縦断面である収容空間３５を示す解析データの一例である。図１３は、流入口３７から流出口３９へ液体を流した際の流体解析モデルの主要な流れの軌跡（流跡線）を示す解析データの一例である。 Here, FIG. 11 to FIG. 13 show examples of analysis data. FIG. 11 is an example of analysis data indicating the accommodation space 35 which is a cross section of the plane PL2 in the fluid analysis model of FIG. FIG. 12 is an example of analysis data indicating the accommodation space 35 that is a longitudinal section of the plane PL2 in the fluid analysis model of FIG. FIG. 13 is an example of analysis data showing the main flow trajectory (trajectory line) of the fluid analysis model when the liquid flows from the inlet 37 to the outlet 39.
　図１１～図１３は、標準サイズ、流量０．４ｃｃ／秒（ｓｅｃ）、および割合１：６の場合の解析データである。図１１、図１２において、色が濃いほど流速（ｍｍ／秒）が速いことを示す。図１３は、図示の都合上、図１１，図１２と異なる濃淡を示す。また、図１１において、領域ＲＹ３よりも、領域ＲＹ１，ＲＹ２で液体が流れやすい。また、領域ＲＹ１と、角部の領域ＲＹ２とで、液体が均等に流れる。図１３において、円形で囲われた領域ＭＲ１，領域ＭＲ２が示すように、図１１における領域ＲＹ３よりも領域ＲＹ１，ＲＹ２で液体が流れやすいことを示している。また、矢印ＡＲ１で示すように、流入口３７付近で比較的、渦が生じにくい。また、割合１：６では、図１３のように、流入口３７付近で渦が生じるものの、大きく乱れることなく比較的最短経路で円滑に流入口３７から流出口３９に液体が流れている。 11 to 13 are analysis data in the case of the standard size, the flow rate of 0.4 cc / second (sec), and the ratio 1: 6. 11 and 12, the darker the color, the faster the flow velocity (mm / second). For convenience of illustration, FIG. 13 shows different shades from those of FIGS. 11 and 12. In FIG. 11, the liquid flows more easily in the regions RY1 and RY2 than in the region RY3. Further, the liquid flows evenly in the region RY1 and the corner region RY2. In FIG. 13, as the regions MR1 and MR2 surrounded by circles indicate that the liquid flows more easily in the regions RY1 and RY2 than in the region RY3 in FIG. Further, as indicated by the arrow AR1, vortices are relatively difficult to generate near the inlet 37. At a ratio of 1: 6, as shown in FIG. 13, a vortex is generated in the vicinity of the inlet 37, but the liquid smoothly flows from the inlet 37 to the outlet 39 in a relatively shortest path without being greatly disturbed.
　なお、流入口３７に流入される液体の流量が大きくなるほど、液置換性が良くなる。また、流量２．０ｃｃ／秒は一般的な流量に比べて大きい設定値である。そのため、流量３．０ｃｃ／秒の場合は、流量２．０ｃｃ／秒の結果と同じ結果になると考えられる。 Note that the greater the flow rate of the liquid flowing into the inlet 37, the better the liquid replacement property. The flow rate of 2.0 cc / second is a larger set value than the general flow rate. Therefore, in the case of the flow rate of 3.0 cc / second, it is considered that the same result as that of the flow rate of 2.0 cc / second is obtained.
　＜半分サイズの流体解析結果＞
　図７に示す半分サイズの流体解析結果について説明する。半分サイズの容積（液押し部４１を押し切った状態のときの容積）は、０．４６ｃｃ～１．５ｃｃと小さい。これにより、標準サイズに比べて、液体が流れやすくなる。そのため、半分サイズ（０．４６ｃｃ～１．５ｃｃ）の割合１：３０の場合、図９の領域ＲＹ１よりも領域ＲＹ２，ＲＹ３で液体が流れやすいものの、領域ＲＹ１にも速い流れで液体が行き渡る。また、領域ＲＹ１で液体が比較的均等に流れる。そのため、半分サイズの解析結果では、割合１：３０に対する判定は「○（良い）」である。 <Half size fluid analysis result>
The half size fluid analysis result shown in FIG. 7 will be described. The half-size volume (the volume when the liquid pushing portion 41 is fully pushed) is as small as 0.46 cc to 1.5 cc. This makes it easier for the liquid to flow compared to the standard size. Therefore, when the ratio of the half size (0.46 cc to 1.5 cc) is 1:30, although the liquid flows more easily in the regions RY2 and RY3 than in the region RY1 in FIG. Further, the liquid flows relatively evenly in the region RY1. Therefore, in the half size analysis result, the determination for the ratio 1:30 is “◯ (good)”.
　割合１：２０～割合１：６の判定結果は、標準サイズの説明と同じなので省略する。半分サイズの割合１：２は、標準サイズの場合と同様に、領域ＲＹ１，領域ＲＹ２で液体が渦を巻いて流れる。また、図１０のように、渦にムラが生じる。すなわち、領域ＲＹ１，領域ＲＹ２において、渦の流れが速い部分ＳＤ１と、渦の（あるいは渦になっていない）流れが遅い部分ＳＤ２とが生じる。そのため、流入口３７から流出口３９までの流跡線が形状に沿って比較的最短距離を通らず、大きく乱れる。そのため、標準サイズの場合と同様に、判定は「×（悪い）」である。 The judgment results of ratio 1:20 to ratio 1: 6 are the same as the standard size explanation, and will be omitted. In the case of the half size ratio 1: 2, as in the case of the standard size, the liquid flows in a vortex in the region RY1 and the region RY2. In addition, as shown in FIG. That is, in the region RY1 and region RY2, a portion SD1 where the vortex flow is fast and a portion SD2 where the vortex flow (or not vortex) is slow occur. Therefore, the trajectory line from the inflow port 37 to the outflow port 39 does not pass a relatively shortest distance along the shape and is greatly disturbed. Therefore, as in the case of the standard size, the determination is “× (bad)”.
　半分サイズの割合１：５は、領域ＲＹ１，領域ＲＹ２で液体が比較的均等に流れる。また、半分サイズの割合１：５は、液体が比較的形状に沿って流れており、流跡線の乱れが少ない。そのため、判定は「○（良い）」である。なお、割合１：３０～割合１：２の結果は、流量０．４ｃｃ／秒、流量１．０ｃｃ／秒、および流量２．０ｃｃ／秒と変化させても同じ結果になった。 In the case of the half size ratio 1: 5, the liquid flows relatively evenly in the regions RY1 and RY2. Moreover, in the ratio 1: 5 of the half size, the liquid flows relatively along the shape, and the disturbance of the trajectory line is small. Therefore, the determination is “◯ (good)”. The results of the ratio 1:30 to the ratio 1: 2 were the same even when the flow rate was changed to 0.4 cc / second, the flow rate 1.0 cc / second, and the flow rate 2.0 cc / second.
　なお、標準サイズの割合１：３０の解析結果が「×（悪い）」であることから、半分サイズの解析結果において、重なり部分４７の隙間４７Ａの幅ＷＤ１が液押し部４１の幅ＷＤ２の１／３０未満の場合に「×」になると推測される。 Since the analysis result of the standard size ratio 1:30 is “× (bad)”, in the half size analysis result, the width WD1 of the gap 47A of the overlapping portion 47 is 1 of the width WD2 of the liquid pressing portion 41. If it is less than / 30, it is estimated to be “x”.
　＜２倍サイズの流体解析結果＞
　図８に示す２倍サイズの流体解析結果について説明する。２倍サイズの容積（液押し部４１を押し切った状態のときの容積）は、２９ｃｃ～９５ｃｃと大きい。本発明は、容積のサイズが０ｃｃより大きく略５０ｃｃ（４９ｃｃ）以下を対象としているので、割合１：６～割合１：２（容積６４ｃｃ～９５ｃｃ）を評価の対象外としている。 <Double size fluid analysis results>
The double size fluid analysis result shown in FIG. 8 will be described. The volume of the double size (the volume when the liquid pushing portion 41 is pushed down) is as large as 29 cc to 95 cc. In the present invention, since the volume size is larger than 0 cc and approximately 50 cc (49 cc) or less, the ratio 1: 6 to the ratio 1: 2 (volume 64 cc to 95 cc) is excluded from the evaluation.
　２倍サイズの容積は大きいので、標準サイズの場合に比べて、液体が流れにくくなる。すなわち、各位置での速度（ｍｍ／秒）が遅くなる傾向にある。割合１：３０の場合、図９に示す領域ＲＹ１よりも領域ＲＹ２，ＲＹ３で液体が流れやすい。そのため、標準サイズの場合と同様に、判定は、「×（悪い）」である。 Since the volume of the double size is large, the liquid is less likely to flow compared to the standard size. That is, the speed (mm / second) at each position tends to be slow. In the case of the ratio 1:30, the liquid flows more easily in the regions RY2 and RY3 than in the region RY1 shown in FIG. Therefore, as in the case of the standard size, the determination is “× (bad)”.
　２倍サイズの割合１：２０は、標準サイズの場合と同様に、図９に示す領域ＲＹ１，ＲＹ３よりも角部の領域ＲＹ２で液体が流れやすい。しかしながら、領域ＲＹ３よりも領域ＲＹ１で液体が流れやすい。また、割合１：３０に比べて、領域ＲＹ１において、液体が均等に流れやすくなる。そのため、判定は、標準サイズの場合と同様に、「○（良い）」である。２倍サイズの割合１：１０は、標準サイズの場合と同様に、図９に示す領域ＲＹ３よりも、領域ＲＹ１，ＲＹ２で液体が流れやすい。また、領域ＲＹ１と領域ＲＹ２とで、液体が均等に流れる。そのため、判定は、標準サイズの場合と同様に、「○（良い）」である。 When the ratio of the double size is 1:20, the liquid flows more easily in the corner area RY2 than in the areas RY1 and RY3 shown in FIG. 9, as in the case of the standard size. However, the liquid flows more easily in the region RY1 than in the region RY3. In addition, compared to the ratio 1:30, the liquid can easily flow in the region RY1. Therefore, the determination is “◯ (good)” as in the case of the standard size. When the ratio of the double size is 1:10, the liquid flows more easily in the regions RY1 and RY2 than in the region RY3 illustrated in FIG. Further, the liquid flows evenly in the region RY1 and the region RY2. Therefore, the determination is “◯ (good)” as in the case of the standard size.
　本発明に係るポンプ装置によれば、ローリングダイアフラム２５は、液押し部４１と、リング状周縁部４３と、液押し部４１とリング状周縁部４３とを接続させる折り返し筒状部４５とを備えている。折り返し筒状部４５は、折り返されて形成された重なり部分４７を有する。収容空間３５の容積が４９ｃｃ以下である場合に、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１は、液押し部４１の幅ＷＤ２の１／２０以上１／６以下である。その範囲内であれば、折り返し筒状部４５に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口３７から流出口３９まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 According to the pump device of the present invention, the rolling diaphragm 25 includes the liquid pushing portion 41, the ring-shaped peripheral portion 43, and the folded tubular portion 45 that connects the liquid pushing portion 41 and the ring-shaped peripheral portion 43. ing. The folded cylindrical portion 45 has an overlapping portion 47 formed by folding. When the volume of the storage space 35 is 49 cc or less, the width WD1 of the gap 47A of the overlapping portion 47 of the folded cylindrical portion 45 is 1/20 or more and 1/6 or less of the width WD2 of the liquid pressing portion 41. Within this range, the chemical solution can easily flow into the folded cylindrical portion 45. Further, since the disturbance of the chemical flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet 37 to the outlet 39. That is, the liquid replacement property of the folded tubular portion is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　また、ローリングダイアフラム２５は、液押し部４１と、リング状周縁部４３と、液押し部４１とリング状周縁部４３とを接続させる折り返し筒状部４５とを備えている。折り返し筒状部４５は、折り返されて形成された重なり部分４７を有する。収容空間３５の容積が０．４６ｃｃ以上１．５ｃｃ以下である場合（半分サイズ）に、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１は、液押し部４１の幅ＷＤ２の１／３０以上１／５以下である。その範囲内であれば、折り返し筒状部４５に薬液が流れやすくなる。また、渦による薬液流れの乱れが抑えられるので、流入口３７から流出口３９まで薬液を比較的円滑に流すことができる。すなわち、折り返し筒状部４５の液置換性が良くなる。そのため、薬液が固化し、その固化物が薬液中に混入することを防止でき、薬液の清浄度を維持することができる。 Further, the rolling diaphragm 25 includes a liquid pushing portion 41, a ring-shaped peripheral edge portion 43, and a folded cylindrical portion 45 that connects the liquid pushing portion 41 and the ring-shaped peripheral edge portion 43. The folded cylindrical portion 45 has an overlapping portion 47 formed by folding. When the volume of the storage space 35 is not less than 0.46 cc and not more than 1.5 cc (half size), the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is 1/2 of the width WD2 of the liquid pushing portion 41. 30 or more and 1/5 or less. Within this range, the chemical solution can easily flow into the folded cylindrical portion 45. Further, since the disturbance of the chemical flow due to the vortex is suppressed, the chemical solution can flow relatively smoothly from the inlet 37 to the outlet 39. That is, the liquid replacement property of the folded cylindrical portion 45 is improved. Therefore, the chemical solution is solidified, and the solidified product can be prevented from being mixed in the chemical solution, and the cleanliness of the chemical solution can be maintained.
　また、チャンバ２１は、収容空間３５に薬液を流入させる流入口３７と、収容空間３９から薬液を流出させる流出口３９とを備えている。流入口３７および流出口３９は各々、折り返し筒状部４５のロール部４５Ａ側に向くようにチャンバ２１の内周壁３１Ｂに傾斜して設けられる。これにより、折り返し筒状部４５に薬液が行き渡りやすくできる。そのため、折り返し部４５の液置換性が更に良くなる。 Further, the chamber 21 includes an inlet 37 through which the chemical liquid flows into the storage space 35 and an outlet 39 through which the chemical liquid flows out of the storage space 39. The inflow port 37 and the outflow port 39 are respectively provided on the inner peripheral wall 31B of the chamber 21 so as to face the roll portion 45A side of the folded cylindrical portion 45. Thereby, a chemical | medical solution can spread easily to the folding | turning cylindrical part 45. FIG. Therefore, the liquid replaceability of the folded portion 45 is further improved.
　本発明は、上記実施形態に限られることはなく、下記のように変形実施することができる。 The present invention is not limited to the above embodiment, and can be modified as follows.
　（１）上述した実施例では、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１と、液押し部４１の幅ＷＤ２との割合で、液置換性が良い条件を示した。この点、幅ＷＤ１と図２に示す幅ＷＤ３との関係で、液置換性が良い条件を示してもよい。 (1) In the above-described embodiment, the ratio of the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 and the width WD2 of the liquid pushing portion 41 indicates a condition with good liquid replaceability. In this regard, the relationship between the width WD1 and the width WD3 shown in FIG.
　図２において、押し出し移動方向における予め設定された端位置に液押し部４１が存在しているときに（液押し部４１を押し切った状態のときに）、重なり部分４７の隙間４７Ａの幅ＷＤ１は、液押し部４１と、液押し部４１に対向するチャンバ本体３１の内壁（対向内壁）３１Ａとの隙間の幅ＷＤ３よりも大きい。例えば、図４（ｂ）の割合１：２０の解析モデルにおいて、幅ＷＤ１と幅ＷＤ２と幅ＷＤ３の割合は、１：２０：約０．８８である。すなわち、割合１：２０において、幅ＷＤ１は幅ＷＤ３よりも大きい。 In FIG. 2, when the liquid pushing portion 41 exists at a preset end position in the pushing movement direction (when the liquid pushing portion 41 is pushed down), the width WD1 of the gap 47A of the overlapping portion 47 is as follows. The width WD3 of the gap between the liquid pushing portion 41 and the inner wall (opposing inner wall) 31A of the chamber body 31 facing the liquid pushing portion 41 is larger. For example, in the analysis model having a ratio of 1:20 in FIG. 4B, the ratio of the width WD1, the width WD2, and the width WD3 is 1:20: about 0.88. That is, at the ratio 1:20, the width WD1 is larger than the width WD3.
　これにより、液押し部４１と、液押し部４１と対向するチャンバ本体３１の内壁３１Ａとの隙間よりも、重なり部分４７の隙間４７Ａに薬液が流れやすくなる。そのため、折り返し筒状部４５の液置換性が良くなる。 This makes it easier for the chemical solution to flow into the gap 47A of the overlapping portion 47 than the gap between the liquid pushing portion 41 and the inner wall 31A of the chamber body 31 facing the liquid pushing portion 41. For this reason, the liquid replacement property of the folded tubular portion 45 is improved.
　なお、図２の二点鎖線で示す凹み部５９が液押し部４１と対向する内壁３１Ａに設けられている場合、幅ＷＤ１は、凹み部分の幅ＷＤ３Ａではなく、幅ＷＤ３と比較する。また、端位置は、図２の左右方向（Ｘ方向）に調整可能である。通常のポンプ動作は、押し出し方向における端位置と、吸引移動方向における端位置との間で行われる。 In addition, when the recessed part 59 shown with the dashed-two dotted line of FIG. 2 is provided in 31 A of inner walls facing the liquid pushing part 41, width WD1 is compared with width WD3 instead of width WD3A of a recessed part. The end position can be adjusted in the left-right direction (X direction) in FIG. A normal pump operation is performed between an end position in the push-out direction and an end position in the suction movement direction.
　（２）上述した実施例および変形例（１）では、図１に示す基板処理装置１は、１つのポンプ装置９を備えていた。このポンプ装置９に代えて、図１４のように、基板処理装置１は、２つのポンプ装置６１，６２を備えていてもよい。これにより、２つのポンプ装置６１，６２の各々において、液置換性を良くすることができる。 (2) In the embodiment and the modification example (1) described above, the substrate processing apparatus 1 shown in FIG. Instead of the pump device 9, the substrate processing apparatus 1 may include two pump devices 61 and 62 as shown in FIG. Thereby, in each of the two pump devices 61 and 62, the liquid replacement property can be improved.
　図１４のように、薬液配管８Ａ，８Ｂの間には、薬液配管８Ｃ、８Ｄが設けられている。２つの薬液配管８Ｄ，８Ｂの間には、ノズル２に薬液を送るための下流ポンプ装置６２が設けられている。２つの薬液配管８Ａ、８Ｃの間には、下流ポンプ装置６２に薬液を送るための上流ポンプ装置６１が設けられている。下流ポンプ装置６２と上流ポンプ装置６１との間の２つの薬液配管８Ｃ、８Ｄには、異物除去フィルタ６３が設けられている。 As shown in FIG. 14, chemical solution pipes 8C and 8D are provided between the chemical solution pipes 8A and 8B. A downstream pump device 62 for sending the chemical liquid to the nozzle 2 is provided between the two chemical liquid pipes 8D and 8B. An upstream pump device 61 for sending a chemical solution to the downstream pump device 62 is provided between the two chemical solution pipes 8A and 8C. A foreign matter removal filter 63 is provided in the two chemical liquid pipes 8C and 8D between the downstream pump device 62 and the upstream pump device 61.
　上流ポンプ装置６１および下流ポンプ装置６２は各々、３つの接続口（流入口３７Ａ，３７Ｂ、流出口３９Ａ，３９Ｂおよび接続口６５Ａ，６５Ｂ）を備えている。その他、上流ポンプ装置６１および下流ポンプ装置６２は各々、実施例のポンプ装置９と同様の構成、例えば、チャンバ２１、可動部材２３、ローリングダイアフラム２５を備えている。また、例えば、折り返し筒状部４５の重なり部分４７の隙間４７Ａの幅ＷＤ１は、液押し部４１の幅の１／２０以上１／６以下であるように構成されている。この場合、押し出し移動方向における予め設定された端位置に液押し部４１が存在しているときの収容空間３５の容積は、０ｃｃより大きく４９ｃｃ以下である（図６～図８参照）。 The upstream pump device 61 and the downstream pump device 62 each have three connection ports ( inlet ports 37A and 37B, outlet ports 39A and 39B, and connection ports 65A and 65B). In addition, each of the upstream pump device 61 and the downstream pump device 62 includes the same configuration as the pump device 9 of the embodiment, for example, the chamber 21, the movable member 23, and the rolling diaphragm 25. Further, for example, the width WD1 of the gap 47A of the overlapping portion 47 of the folded tubular portion 45 is configured to be 1/20 or more and 1/6 or less of the width of the liquid pressing portion 41. In this case, the volume of the accommodating space 35 when the liquid pushing portion 41 exists at a preset end position in the pushing movement direction is greater than 0 cc and not more than 49 cc (see FIGS. 6 to 8).
　薬液配管８Ａは、上流ポンプ装置６１の流入口３７Ａに接続される。薬液配管８Ｃの一端は、上流ポンプ装置６１の流出口３９Ａに接続され、薬液配管８Ｃの他端は、異物除去フィルタ６３の入口６３Ａに接続される。薬液配管８Ｄの一端は、異物除去フィルタ６３の出口６３Ｂに接続され、薬液配管８Ｄの他端は、下流ポンプ装置６２の流入口３７Ｂに接続される。なお、異物除去フィルタ６３の出口６３Ｂは、異物除去フィルタ６３で異物が除去された薬液が送り出される。また、異物除去フィルタ６３のベント６３Ｃには、気泡や薬液などを排出する排出配管６７が接続される。 The chemical solution pipe 8 </ b> A is connected to the inlet 37 </ b> A of the upstream pump device 61. One end of the chemical liquid pipe 8C is connected to the outlet 39A of the upstream pump device 61, and the other end of the chemical liquid pipe 8C is connected to the inlet 63A of the foreign matter removing filter 63. One end of the chemical liquid pipe 8D is connected to the outlet 63B of the foreign substance removal filter 63, and the other end of the chemical liquid pipe 8D is connected to the inlet 37B of the downstream pump device 62. In addition, the chemical | medical solution from which the foreign material was removed by the foreign material removal filter 63 is sent out to the exit 63B of the foreign material removal filter 63. FIG. In addition, a discharge pipe 67 that discharges bubbles, chemicals, and the like is connected to the vent 63 </ b> C of the foreign matter removal filter 63.
　薬液配管８Ｂは、下流ポンプ装置６２の接続口６５Ｂに接続される。下流ポンプ装置６２の流出口３９Ｂと上流ポンプ装置６１の接続口６５Ａは、戻り配管６９によって接続される。戻り配管６９は、下流ポンプ装置６２から上流ポンプ装置６１に薬液を戻すためのものである。 The chemical solution pipe 8 </ b> B is connected to the connection port 65 </ b> B of the downstream pump device 62. The outlet 39 </ b> B of the downstream pump device 62 and the connection port 65 </ b> A of the upstream pump device 61 are connected by a return pipe 69. The return pipe 69 is for returning the chemical solution from the downstream pump device 62 to the upstream pump device 61.
　薬液配管８Ａには、開閉弁Ｖ１が設けられている。薬液配管８Ｂには、開閉弁Ｖ２が設けられている。薬液配管８Ｃには、開閉弁Ｖ３が設けられている。薬液配管８Ｄには、開閉弁Ｖ４が設けられている。排出配管６７には、開閉弁Ｖ５が設けられている。戻り配管６９には、開閉弁Ｖ６が設けられている。制御部１３は、上流ポンプ装置６１、下流ポンプ装置６２、開閉弁Ｖ１～Ｖ６を操作して、図１に示す薬液供給源７から薬液ノズル２に薬液を送る。 The chemical solution pipe 8A is provided with an on-off valve V1. The chemical solution pipe 8B is provided with an on-off valve V2. The chemical solution pipe 8C is provided with an on-off valve V3. The chemical solution pipe 8D is provided with an on-off valve V4. The discharge pipe 67 is provided with an on-off valve V5. The return pipe 69 is provided with an on-off valve V6. The control unit 13 operates the upstream pump device 61, the downstream pump device 62, and the on-off valves V1 to V6 to send the chemical solution from the chemical solution supply source 7 shown in FIG.
　１　　　　…　基板処理装置
　２　　　　…　ノズル
　３　　　　…　保持回転部
　９，６１，６２　…　ポンプ装置
　１３　　　…　制御部
　２１　　　…　チャンバ
　２３　　　…　可動部材
　２５　　　…　ローリングダイアフラム
　３５　　　…　収容空間
　３７（３７Ａ，３７Ｂ）　…　流入口
　３９（３９Ａ，３９Ｂ）　…　流出口
　４１　　　…　液押し部
　４３　　　…　周縁部
　４５　　　…　折り返し筒状部
　４７　　　…　重なり部分
　４７Ａ　　…　隙間
　Ｗ　　　　…　基板
　ＷＤ１～ＷＤ３　…　幅
  DESCRIPTION OF SYMBOLS 1 ... Substrate processing apparatus 2 ... Nozzle 3 ... Holding | maintenance rotation part 9,61,62 ... Pump apparatus 13 ... Control part 21 ... Chamber 23 ... Movable member 25 ... Rolling diaphragm 35 ... Accommodating space 37 (37A, 37B) ... Inlet 39 (39A, 39B) ... Outlet 41 ... Liquid pushing part 43 ... Peripheral part 45 ... Folded cylindrical part 47 ... Overlapping part 47A ... Gap W ... Substrate WD1 to WD3 ... Width

Claims (6)

  1. 　薬液を収容する収容部と、
    　前記収容部内を往復移動する可動部材と、
    　前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、
    　押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、４９ｃｃ以下であり、
    　前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／２０以上１／６以下であることを特徴とするポンプ装置。     A container for storing a chemical solution;
    A movable member that reciprocates in the housing portion;
    A rolling diaphragm that divides a storage space for storing a chemical solution in the storage portion, a liquid pressing portion attached to a distal end portion of the movable member, a ring-shaped peripheral portion attached to an inner peripheral wall of the storage portion, and the liquid The rolling having a folded cylindrical portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral portion and being folded at a position in the suction movement direction of the movable member with respect to the ring-shaped peripheral portion. A diaphragm, and
    The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the pushing movement direction is 49 cc or less,
    The pump device according to claim 1, wherein a width of the gap between the overlapping portions of the folded cylindrical portion is 1/20 or more and 1/6 or less of a width of the liquid pressing portion.
  2. 　薬液を収容する収容部と、
    　前記収容部内を往復移動する可動部材と、
    　前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、
    　押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、０．４６ｃｃ以上１．５ｃｃ以下であり、
    　前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／３０以上１／５以下であることを特徴とするポンプ装置。     A container for storing a chemical solution;
    A movable member that reciprocates in the housing portion;
    A rolling diaphragm that divides a storage space for storing a chemical solution in the storage portion, a liquid pressing portion attached to a distal end portion of the movable member, a ring-shaped peripheral portion attached to an inner peripheral wall of the storage portion, and the liquid The rolling having a folded cylindrical portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral portion and being folded at a position in the suction movement direction of the movable member with respect to the ring-shaped peripheral portion. A diaphragm, and
    The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the pushing movement direction is 0.46 cc or more and 1.5 cc or less,
    The pump device according to claim 1, wherein a width of a gap between the overlapping portions of the folded cylindrical portion is 1/30 or more and 1/5 or less of a width of the liquid pressing portion.
  3. 　請求項１または２に記載のポンプ装置において、
    　押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときに、前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部と、前記液押し部と対向する前記収容部の内壁との隙間の幅よりも大きいことを特徴とするポンプ装置。     The pump device according to claim 1 or 2,
    When the liquid pushing portion exists at a preset end position in the pushing movement direction, the width of the gap of the overlapping portion of the folded cylindrical portion is opposite to the liquid pushing portion and the liquid pushing portion. A pump device characterized in that it is larger than the width of the gap with the inner wall of the housing portion.
  4. 　請求項１から３のいずれかに記載のポンプ装置において、
    　前記収容部は、前記収容空間に薬液を流入させる流入口と、前記収容空間から薬液を流出させる流出口とを備え、
    　前記流入口および前記流出口は各々、前記折り返し筒状部のロール部側に向くように前記収容部の内周壁に傾斜して設けられることを特徴とするポンプ装置。     In the pump apparatus in any one of Claim 1 to 3,
    The storage unit includes an inflow port through which chemical liquid flows into the storage space, and an outflow port through which chemical liquid flows out of the storage space,
    The pump device according to claim 1, wherein the inflow port and the outflow port are provided on the inner peripheral wall of the housing portion so as to face the roll portion side of the folded tubular portion.
  5. 　基板を保持する保持部と、
    　前記保持部で保持された前記基板に対して薬液を吐出するノズルと、
    　前記ノズルに薬液を送るためのポンプ装置と、備え、
    　前記ポンプ装置は、薬液を収容する収容部と、
    　前記収容部内を往復移動する可動部材と、
    　前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、
    　押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、４９ｃｃ以下であり、
    　前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／２０以上１／６以下であることを特徴とする基板処理装置。     A holding unit for holding the substrate;
    A nozzle that discharges a chemical to the substrate held by the holding unit;
    A pump device for sending the chemical to the nozzle,
    The pump device includes a storage unit that stores a chemical solution;
    A movable member that reciprocates in the housing portion;
    A rolling diaphragm that divides a storage space for storing a chemical solution in the storage portion, a liquid pressing portion attached to a distal end portion of the movable member, a ring-shaped peripheral portion attached to an inner peripheral wall of the storage portion, and the liquid The rolling having a folded cylindrical portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral portion and being folded at a position in the suction movement direction of the movable member with respect to the ring-shaped peripheral portion. A diaphragm, and
    The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the pushing movement direction is 49 cc or less,
    The substrate processing apparatus, wherein a width of a gap between the overlapping portions of the folded cylindrical portion is 1/20 or more and 1/6 or less of a width of the liquid pressing portion.
  6. 　基板を保持する保持部と、
    　前記保持部で保持された前記基板に対して薬液を吐出するノズルと、
    　前記ノズルに薬液を送るためのポンプ装置と、備え、
    　前記ポンプ装置は、薬液を収容する収容部と、
    　前記収容部内を往復移動する可動部材と、
    　前記収容部内の薬液を収容する収容空間を区画するローリングダイアフラムであって、前記可動部材の先端部に取り付けられた液押し部、前記収容部の内周壁に取り付けられるリング状周縁部、および前記液押し部と前記リング状周縁部とを接続させると共に、前記リング状周縁部よりも前記可動部材の吸引移動方向の位置で折り返されることにより形成された重なり部分を有する折り返し筒状部を有する前記ローリングダイアフラムと、を備え、
    　押し出し移動方向における予め設定された端位置に前記液押し部が存在しているときの前記収容空間の容積は、０．４６ｃｃ以上１．５ｃｃ以下であり、
    　前記折り返し筒状部の前記重なり部分の隙間の幅は、前記液押し部の幅の１／３０以上１／５以下であることを特徴とする基板処理装置。
          A holding unit for holding the substrate;
    A nozzle that discharges a chemical to the substrate held by the holding unit;
    A pump device for sending the chemical to the nozzle,
    The pump device includes a storage unit that stores a chemical solution;
    A movable member that reciprocates in the housing portion;
    A rolling diaphragm that divides a storage space for storing a chemical solution in the storage portion, a liquid pressing portion attached to a distal end portion of the movable member, a ring-shaped peripheral portion attached to an inner peripheral wall of the storage portion, and the liquid The rolling having a folded cylindrical portion having an overlapping portion formed by connecting the push portion and the ring-shaped peripheral portion and being folded at a position in the suction movement direction of the movable member with respect to the ring-shaped peripheral portion. A diaphragm, and
    The volume of the accommodating space when the liquid pushing portion is present at a preset end position in the pushing movement direction is 0.46 cc or more and 1.5 cc or less,
    The width of the gap between the overlapping portions of the folded cylindrical portion is 1/30 or more and 1/5 or less of the width of the liquid pressing portion.
PCT/JP2018/047350 2018-02-27 2018-12-21 Pump device and substrate processing device WO2019167402A1 (en)

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TWI253359B (en) * 2003-03-14 2006-04-21 Dainippon Screen Mfg Substrate processing device and liquid feeding device
JP2016061169A (en) * 2014-09-16 2016-04-25 日本ピラー工業株式会社 Diaphragm pump system
JP6719323B2 (en) * 2016-08-03 2020-07-08 日本ピラー工業株式会社 Reciprocating pump

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JP2006207533A (en) * 2005-01-31 2006-08-10 Tacmina Corp Diaphragm and reciprocating pump
JP2007285340A (en) * 2006-04-13 2007-11-01 Toray Eng Co Ltd Piston, method of manufacturing the piston, and pump having the piston
US20120073432A1 (en) * 2010-12-07 2012-03-29 General Compression, Inc. Compressor and/or expander device with rolling piston seal
CN206860384U (en) * 2017-06-02 2018-01-09 德帕姆(杭州)泵业科技有限公司 Plunger type metering pump No leakage fluid end structure

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