WO2019167309A1

WO2019167309A1 - Light source device and projector

Info

Publication number: WO2019167309A1
Application number: PCT/JP2018/031118
Authority: WO
Inventors: 和彦信田; 三浦　雄一
Original assignee: ウシオ電機株式会社
Priority date: 2018-02-27
Filing date: 2018-08-23
Publication date: 2019-09-06
Also published as: JP2019148692A; JP6611019B2; TW201937264A; CN208834085U; TWI752258B

Abstract

The present invention provides a light source device (1) capable of increasing the light output with a plurality of semiconductor laser chips (5) while preventing the use of the plurality of semiconductor laser chips (5) from increasing the device footprint. The light source device (1) comprises: a plurality of semiconductor laser units (2) that includes a plurality of light emission regions provided on the same or different semiconductor laser chips (5), and a first refractive optical system (6) whereon a plurality of first pencils of rays emitted from the plurality of adjacent light emission regions is incident and which converts each of the plurality of first pencils of rays to a plurality of second substantially-parallel pencils of rays and emits the converted second pencils of rays; and a second refractive optical system (3) which includes a plurality of flat surfaces having different tilt angles, whereon at least a portion of each of the second pencils of rays in the plurality of second pencils of rays emitted from the same semiconductor laser unit (2) enters different flat surfaces, and which converts the traveling direction of the principal ray of each of the plurality of second pencils of rays to substantially parallel to the optical axis and emits the converted second pencils of rays. The number of the second refractive optical systems (3) corresponds to the number of the semiconductor laser units (2).

Description

Light source device, projector

The present invention relates to a light source device, and more particularly to a light source device that uses light emitted from a semiconductor laser chip. The present invention also relates to a projector provided with such a light source device.

The use of semiconductor laser chips as a light source for projectors is being promoted. In recent years, a light source device that further increases the light output while using a semiconductor laser chip as a light source is expected from the market.

In order to increase the light output on the light source side, a method of condensing light emitted from a plurality of semiconductor laser chips is conceivable. However, the semiconductor laser chip has a certain width, and there is a limit to arranging these closely. That is, simply arranging a plurality of semiconductor laser chips increases the size of the light source device.

From this point of view, for example, as in Patent Document 1 below, a semiconductor laser chip group is arranged in the first region, and another semiconductor laser chip group is arranged in a second region different from the first region. There is a technique for synthesizing light emitted from a group of semiconductor laser chips using light synthesizing means including a slit mirror. By this method, it is possible to increase the light intensity while reducing the arrangement area as compared with the case where a plurality of semiconductor laser chips are simply arranged at the same location.

JP 2017-215570 A

By the way, as a method for increasing the light intensity on the light source side, a method using a semiconductor laser chip provided with a plurality of regions for emitting laser light (light emitting regions: hereinafter sometimes referred to as “emitters”) is conceivable. Such a semiconductor laser chip is sometimes referred to as a “multi-emitter type”. The present inventors have studied to increase the light intensity by using a multi-emitter semiconductor laser chip as a light source, and have found that the following problems exist.

FIG. 1A is a perspective view schematically showing the structure of a semiconductor laser chip provided with one emitter. Such a semiconductor laser chip is sometimes referred to as a “single emitter type”. Note that FIG. 1A also schematically shows a light bundle of light (laser light) emitted from the emitter. In the present specification, a light beam group formed in a bundle shape emitted from a single emitter is referred to as a “light beam bundle”.

In the case of a so-called “edge-emitting” semiconductor laser chip 100 as shown in FIG. 1A, it is known that the light bundle 101L emitted from the emitter 101 has an elliptical cone shape. In this specification, a direction (Y direction shown in FIG. 1A) in which the divergence angle of the light beam 101L is large is selected from two directions (X direction and Y direction) orthogonal to the optical axis (Z direction shown in FIG. 1A). The direction in which the light beam 101L has a small divergence angle (the X direction shown in FIG. 1A) is referred to as the “slow axis direction”.

FIG. 1B schematically shows the light beam 101L separately for the case viewed from the X direction and the case viewed from the Y direction. As shown in FIG. 1B, the divergence angle θ _y of the light beam 101L is large in the fast axis direction, and the divergence angle θ _x of the light beam 101L is small in the slow axis direction.

In the following drawings, for convenience of explanation, the divergence angle of the light flux may be exaggerated from the actual case.

When a plurality of semiconductor laser chips 100 are arranged and the light (light beam 101L) emitted from each semiconductor laser chip 100 is collected and used, each light beam 101L is converted into parallel light from the viewpoint of suppressing the size of the optical member. In general, the light is condensed by a lens. Specifically, a collimating lens (also referred to as a “collimation lens”) is disposed downstream of the semiconductor laser chip 100 to reduce the divergence angle of each light beam 101L.

FIG. 2A is a drawing schematically showing a light flux traveling in the YZ plane direction when the collimating lens 102 is arranged at the rear stage of the semiconductor laser chip 100. In FIG. 2A, only the upper and lower light rays are drawn on the geometrical optics.

In this specification, “upper ray” refers to a ray that passes through the upper edge of an aperture (incidence pupil) of an optical member (for example, a lens) in the bundle of rays, and “lower ray” refers to a portion of the ray bundle. , Refers to the light beam that passes through the lower edge of the stop (entrance pupil). In the following, light rays passing through the center of the stop (incidence pupil) in the light bundle are referred to as “principal rays”. The principal ray is a ray that passes through the center between the upper ray and the lower ray of the light bundle.

2A, after passing through the collimating lens 102, the light beam 101L becomes a substantially parallel light beam (hereinafter referred to as “substantially parallel light beam”) with respect to the fast axis direction (Y direction). In the present specification, “substantially parallel light beam” or “substantially parallel light beam” refers to a light beam whose angle formed by the upper light beam and the lower light beam is less than 2 °.

FIG. 2B is a diagram schematically showing a light beam traveling in the XZ plane direction when the collimating lens 102 is arranged at the rear stage of the semiconductor laser chip 100. According to FIG. 2B, after passing through the collimating lens 102, the light beam 101L becomes a substantially parallel light beam in the slow axis direction (X direction).

FIG. 3A is a perspective view schematically showing the structure of a semiconductor laser chip having a plurality of emitters, unlike FIG. 1A. FIG. 3A shows a case where the semiconductor laser chip 110 includes two emitters (111, 112).

FIG. 3B is a schematic diagram of the light bundles (111L, 112L) emitted from the respective emitters (111, 112) divided into a case of viewing from the X direction and a case of viewing from the Y direction, in accordance with FIG. 1B. Is shown in FIG. Since each emitter (111, 112) is formed at the same coordinate position in the Y direction, the beam bundles (111L, 112L) are completely overlapped when viewed from the X direction. On the other hand, since the emitters (111, 112) are formed at different coordinate positions in the X direction, the beam bundles (111L, 112L) are displayed with their positions shifted when viewed from the Y direction.

The mode of the light bundle in the case where the collimating lens 102 is arranged in the subsequent stage of the semiconductor laser chip 110 shown in FIG. 3A as in FIGS. 2A and 2B will be examined. As described above with reference to FIG. 3B, the light beams (111L, 112L) are completely overlapped when viewed from the X direction. For this reason, in the fast axis direction (Y direction), each light bundle (111L, 112L) becomes a substantially parallel light bundle after passing through the collimating lens 102, as in FIG. 2A.

FIG. 4 is a diagram schematically showing a light beam traveling in the XZ plane direction when the collimating lens 102 is arranged at the subsequent stage of the semiconductor laser chip 110. Since the semiconductor laser chip 110 includes a plurality of emitters (111, 112) separated in the X direction, the X coordinate at the center position of the collimator lens 102 and the X coordinate at the center position of each emitter (111, 112). Inevitably shifts.

As a result, each of the light beam 111L emitted from the emitter 111 and the light beam 112L emitted from the emitter 112 becomes a substantially parallel light beam after passing through the collimator lens 102, but the principal ray 111Lm of the light beam 111L, The principal ray 112Lm of the ray bundle 112L is not parallel. That is, the light flux 111L and the light flux 112L have different traveling directions in the X direction.

In the case of such a configuration, even if each light bundle (111L, 112L) is condensed later using the condensing optical system, the light bundle group after the condensing spreads and cannot be guided in the target direction. Will occur. As a result, the light use efficiency decreases. In particular, when a plurality of multi-emitter semiconductor laser chips 110 are arranged and the light emitted from each semiconductor laser chip 110 is used, the amount of light that cannot be used is not negligible.

After passing through the collimating lens 102, the angle of the traveling direction in the X direction of the light beam 111L and the light beam 112L is determined by the relative value of the distance between the emitters (111, 112) with respect to the focal length of the collimating lens 102. The More specifically, when the distance from the optical axis of the collimating lens 102 to the position of each emitter (111, 112) farthest from the optical axis of the collimating lens 102 is d and the focal length f of the collimating lens 102, the light beam The divergence angle θ of the bundle (111L, 112L) is defined by θ = tan ⁻¹ (d / f).

5 uses the same collimating lens 102 and proceeds in the XZ plane direction according to FIG. 4 when the distance between the emitters (111, 112) (distance in the X direction) is larger than the configuration of FIG. It is drawing which showed the beam bundle to do typically. In other words, FIG. 5 corresponds to the case where the relative value of the distance between the emitters (111, 112) with respect to the focal length of the collimating lens 102 is made larger than in the configuration of FIG.

According to FIG. 5, the angle θ _xm formed by the principal ray 111Lm and the principal ray 112Lm (this angle corresponds to twice the angle between the optical axis of the collimating lens 102 and each principal ray) is shown in FIG. It turns out that it is larger than the case. In this case, the light bundle 111L and the light bundle 112L are completely separated at a position closer to the collimating lens 102 in the Z direction than in the embodiment of FIG. In the aspect of FIG. 4, the light beam 111L and the light beam 112L are completely separated at the position z1 with respect to the optical axis direction (Z direction). On the other hand, in the aspect of FIG. 5, the light beam 111L and the light beam 112L are completely separated at the position z2 before z1 in the optical axis direction (Z direction).

In other words, when the distance between the emitters (111, 112) is sufficiently negligible with respect to the focal length of the collimating lens 102, the principal ray 111Lm of the light bundle 111L also in the X direction. And the angle formed by the principal ray 112Lm of the light bundle 112L is substantially close to 0 °, and the light bundles (111L, 112L) are not separated. However, for this purpose, the collimating lens 102 needs to be a lens having a sufficiently long focal length, which increases the size of the optical system.

In particular, when a plurality of multi-emitter semiconductor laser chips 110 are arranged, the collimating lens 102 needs to be arranged corresponding to each semiconductor laser chip 110, so that the apparatus scale becomes extremely large.

The above problem can occur even in the single-emitter semiconductor laser chip 100. That is, the above-described problem is caused when the width of the emitter 101 is increased in order to increase the output of the semiconductor laser chip 100, or a plurality of single-emitter semiconductor laser chips 100 are arranged and emitted from the plurality of semiconductor laser chips 100. This can occur in the same way when the light beam thus made incident on one collimator lens 102.

In view of the above problems, an object of the present invention is to provide a light source device that uses a plurality of semiconductor laser chips and increases the light output while suppressing the expansion of the device scale. Moreover, this invention makes it a subject to provide the projector provided with this light source device.

The light source device according to the present invention includes:
A plurality of light exit areas provided on the same or different semiconductor laser chips and a plurality of first light bundles emitted from a plurality of adjacent light exit areas are incident, and each of the plurality of first light bundles A plurality of semiconductor laser units, including a first refractive optical system that converts and emits a plurality of second light beams that are substantially parallel light beams, and
A plurality of the second light beams including a plurality of flat surfaces having different inclination angles, wherein at least a part of each of the plurality of second light bundles emitted from the same semiconductor laser unit is incident on the different flat surfaces. A second refractive optical system that converts the traveling direction of each principal ray of the bundle to be substantially parallel to the optical axis and emits the second refractive optical system,
The second refractive optical system is arranged corresponding to the number of the semiconductor laser units.

When a plurality of first light beams are incident on the first refractive optical system, each is converted into a plurality of second light beams that are substantially parallel light beams. However, the second light bundles, more specifically, the chief rays of the second light bundles, travel at an angle corresponding to the interval between the chief rays of the first light bundle. The interval between the principal rays of the first ray bundle depends on the interval between the center positions of the light emission regions that emit the first ray bundles.

The light source device includes a second refractive optical system including a plurality of flat surfaces having different inclination angles at the subsequent stage of the first refractive optical system. The plurality of second light beams emitted from the same semiconductor laser unit, more specifically from the same first refractive optical system, are at least partially different from each other in the second refractive optical system. Incident on a flat surface. Depending on the inclination angle formed on the flat surface, the plurality of second light fluxes are refracted, and their traveling directions change. Here, the inclination angle of each flat surface is set so that the traveling directions of the principal rays of the plurality of second light bundles are substantially parallel to the optical axis. As a result, the traveling directions of the second light bundles after passing through the second refractive optical system are substantially the same.

Therefore, since the principal rays of the second light bundles are substantially parallel light (substantially parallel light), the second light bundles do not intersect each other, or extremely fine light rays intersect each other. Stay.

The light source device includes a plurality of semiconductor laser units including a semiconductor laser chip and a first refractive optical system, and includes a plurality of second refractive optical systems corresponding to the number of the semiconductor laser units. As a result, the principal rays of the plurality of light bundles emitted from each second refractive optical system are substantially parallelized. As a result, light having high irradiance can be obtained by condensing these beam bundles in the subsequent stage.

And according to the said light source device, since the expansion of a light ray is suppressed by arrange | positioning a 2nd refractive optical system in the back | latter stage of each 1st refractive optical system, a large collimating lens with a long focal distance is arrange | positioned. There is no need to suppress the expansion of the device scale.

The light source device may include a plurality of multi-emitter semiconductor laser chips each having a plurality of light emission regions (so-called “emitters”) on the same semiconductor laser chip. A plurality of single-emitter semiconductor laser chips each having a single light emission region (emitter) may be provided.

In the light source device,
The first refractive optical system has a convex curved surface on the light exit surface side,
The second refractive optical system may be arranged at a position away from the first refractive optical system with respect to the focal length of the first refractive optical system.

In the plurality of second light bundles emitted from the first refractive optical system, the principal rays intersect at the focal point of the first refractive optical system. Since the widths of the upper ray and the lower ray of each second light bundle are substantially the same, the second light bundles completely overlap each other at the focal point of the first refractive optical system. If the second refracting optical system is not disposed, the second light bundles progress with mutual expansion as they move away from the focal point of the first refracting optical system.

By the way, the second light bundle emitted from the first refractive optical system has a light distribution such as a Gaussian distribution in which the light intensity is highest at the position of the principal ray, and the light intensity sharply decreases as the distance from the principal ray increases. The distribution is as follows.

According to the above configuration, at least the principal rays of the plurality of second light beams emitted from the first refractive optical system are incident on different flat surfaces of the second refractive optical system. That is, among the second light bundles, light rays with extremely high irradiance are made substantially parallel to each other after being incident on different flat surfaces. As a result, as described above, light having high irradiance can be obtained by condensing a plurality of light bundles emitted from the second refractive optical system by the subsequent condensing optical system.

In the above-described configuration, the second refractive optical system has a specific position at which the upper light beam of one of the second light beams intersects the lower light beam of the other second light beam with respect to a pair of adjacent second light beams. Alternatively, it may be arranged at a position farther from the specific position than the first refractive optical system.

At the specific position, the pair of adjacent second light beams are completely separated from each other. Assuming that the second refractive optical system is not disposed, the second light bundles progress while being dispersed while increasing the separation distance as they move away from the specific position.

That is, by arranging the second refractive optical system at the specific position or after the specific position, each of the plurality of second light bundles emitted from the first refractive optical system is completely the second refractive optical system. Incident on different flat surfaces of the system. As a result, all the light rays included in each second light bundle can be guided to the subsequent stage as substantially parallel light.

Conversely, the second refractive optical system is disposed at a position farther from the focal length of the first refractive optical system than the first refractive optical system, and at a position preceding the specific position. It does not matter as a thing. In this case, the adjacent second light beams are incident on the flat surface of the second refractive optical system in a state where they partially overlap each other.

If the second refractive optical system is not arranged, the width of the entire plurality of second light bundles (the outer shape on the plane orthogonal to the optical axis) is compared with a specific position or a position at the subsequent stage. Therefore, the position in the previous stage is smaller than the specific position. That is, according to the above configuration, the plurality of second light bundles are guided to the second refractive optical system with a small beam width. As a result, the plurality of second light bundles emitted from the second refractive optical system can be guided to the subsequent stage as a light bundle having a small beam width.

In this configuration, some of the light beams included in the second light beam incident on the flat surface of the second refractive optical system travel in a direction different from the principal light beam of the same light beam. This light beam may be stray light without being condensed at a target position by a subsequent condensing optical system. However, as described above, each second light bundle exhibits a distribution such as a Gaussian distribution, and the light in the vicinity of the principal ray included in each second light bundle is the same as the principal ray by the second refractive optical system. Since the light travels in the direction, these light beams are condensed at a target position by a condensing optical system in the subsequent stage. That is, even in this aspect, the intensity of light that cannot be used is extremely low, and does not significantly affect the light use efficiency when the entire apparatus is considered.

The second refractive optical system may be disposed at a position where the second light flux emitted from the adjacent semiconductor laser unit is not incident. This corresponds to defining a preferable upper limit value of the separation position of the second refractive optical system from the first optical system.

If the second refractive optical system is arranged at a position extremely far from the first refractive optical system, the second light beam emitted from the adjacent semiconductor laser unit is incident on the second refractive optical system. At this time, the following problems may occur.

Since the second refractive optical system is disposed at a position extremely far from the first refractive optical system, the plurality of second light bundles emitted from the same first refractive optical system are completely separated from each other, and the separation distance is further separated. Is incident on each flat surface of the second refractive optical system. As a result, in the second refractive optical system, it is necessary to increase the size of each flat surface or increase the interval between the flat surfaces, and the scale of the second refractive optical system increases.

Furthermore, the second light beam emitted from the corresponding first refractive optical system is incident on the flat surface located at the end of the second refractive optical system. On the other hand, in addition to the second light flux from the corresponding first refracting optical system, the flat surface located outside the end portion of the second refracting optical system, from the adjacent first refracting optical system. The second light flux is incident. In this case, many light rays travel non-parallel to the optical axis, and the light use efficiency may be reduced.

By using the above configuration, it is possible to improve the light use efficiency without unnecessarily enlarging the size of the second refractive optical system.

The second refractive optical system may include a plurality of the flat surfaces on the light incident surface side, and one of the plurality of flat surfaces may be a surface orthogonal to the optical axis. I do not care. In this case, the optical system can be aligned by aligning the center position of one light emitting region and the center position of the flat surface, which is composed of a plane orthogonal to the optical axis, on the optical axis. It becomes possible.

The second refractive optical system may have a surface orthogonal to the optical axis on the light exit surface side.

The light source device may include a first optical member in which a plurality of the second refractive optical systems are integrated on a surface opposite to the flat surface. In this case, each second refractive optical system corresponds to a part of the first optical member.

The light source device
At the rear stage position of the second refractive optical system, it has an integrator optical system consisting of a front fly eye lens and a rear fly eye lens,
The pre-stage fly-eye lens is arranged to be connected to the light exit surface side of the first optical member, and a period of the flat surfaces having the same inclination angle provided in a plurality of the second refractive optical systems. It is also possible to include a plurality of lenses arranged with a shorter period.

Since the light source device has the integrator optical system, the illuminance on the irradiation surface can be made substantially uniform at the subsequent stage. At this time, the pre-stage fly-eye lens included in the integrator optical system is connected to the first optical member formed by integrating a plurality of second refractive optical systems, thereby reducing the scale of the apparatus in the optical axis direction. Can be

The light source device is disposed at a position where a lower light beam of a light beam emitted from one second refractive optical system and an upper light beam of another light beam emitted from the adjacent second refractive optical system intersect. In addition, an integrator optical system including a front-stage fly-eye lens and a rear-stage fly-eye lens that are disposed with their curved surfaces facing each other may be provided.

Since the light source device has the integrator optical system, the illuminance on the irradiation surface can be made substantially uniform at the subsequent stage. And according to said structure, the light ray inject | emitted from a certain 2nd refractive optical system and the light ray inject | emitted from the adjacent 2nd refractive optical system are the same lens ( Single lens). As a result, since the variation in the irradiance of light at the time of incidence on each single lens included in the front fly-eye lens is suppressed to some extent, the effect of suppressing the illuminance variation on the irradiation surface in the subsequent stage is further enhanced. .

Incidentally, the light beam emitted from the adjacent second refractive optical system is a light beam emitted from the adjacent semiconductor laser chip. In other words, according to the above configuration, not only the light beam emitted from the same semiconductor laser chip but also the light beam emitted from a partially adjacent semiconductor laser chip is the same single lens that is a component of the front fly-eye lens. Is incident on. Thereby, when condensing the light inject | emitted from the light source device and irradiating a target object, the effect of reducing the speckle noise on an irradiation surface is anticipated.

The projector according to the present invention is characterized in that an image is projected using the light emitted from the light source device.

According to the present invention, it is possible to realize a light source device that uses a plurality of semiconductor laser chips to increase the light output while suppressing the expansion of the device scale.

It is a perspective view which shows typically the structure of a single emitter type semiconductor laser chip. 1A schematically illustrates a light bundle emitted from the semiconductor laser chip of FIG. 1A divided into a case of viewing from the X direction and a case of viewing from the Y direction. It is drawing which showed typically the light beam which advances to a YZ plane direction, when a collimating lens is arrange | positioned in the back | latter stage of a semiconductor laser chip. It is drawing which showed typically the light beam which advances to a XZ plane direction, when a collimating lens is arrange | positioned in the back | latter stage of a semiconductor laser chip. 1 is a perspective view schematically showing the structure of a multi-emitter semiconductor laser chip. FIG. 3A schematically shows a light beam emitted from the semiconductor laser chip of FIG. 3A divided into a case of viewing from the X direction and a case of viewing from the Y direction. 3B is a drawing schematically showing a light beam traveling in the XZ plane direction when a collimating lens is arranged at the rear stage of the semiconductor laser chip of FIG. 3A. FIG. 5 is a diagram schematically showing a light flux traveling in the XZ plane direction when the distance between the emitters is increased compared to the configuration of FIG. 4. It is drawing which shows typically the structure of one Embodiment of a light source device. FIG. 7 is a drawing illustrating one semiconductor laser unit and a second refractive optical system disposed in a subsequent stage extracted from FIG. 6. FIG. 7B is a partially enlarged view of FIG. 7A. FIG. 7B is a partially enlarged view of FIG. 7A. It is drawing which shows typically advancing of the light ray when the arrangement position of a 2nd refractive optical system is moved to the front | former stage from the state of FIG. 7A. It is drawing which shows typically the example of another structure of a 2nd refractive optical system. It is drawing which shows typically the example of another structure of a 2nd refractive optical system. It is drawing which shows typically the example of another structure of a 2nd refractive optical system. It is drawing which shows typically the example of another structure of a 2nd refractive optical system. It is drawing which shows typically the structure of another embodiment of a light source device. It is drawing which shows typically the structure of another embodiment of a light source device. It is drawing which extracted and extracted typically a part of FIG. It is drawing which shows typically another aspect of a 2nd refractive optical system and an integrator optical system. It is drawing which shows typically the structure of another embodiment of a light source device. It is drawing which shows typically the structural example of the projector containing a light source device. It is drawing which shows typically the structure of another embodiment of a light source device.

Hereinafter, embodiments of a light source device and a projector according to the present invention will be described with reference to the drawings as appropriate. Each of the following drawings is schematically illustrated, and the actual dimensional ratio does not necessarily match the dimensional ratio on the drawing.

FIG. 6 is a drawing schematically showing a configuration of an embodiment of a light source device. The light source device 1 includes a plurality of semiconductor laser units (2, 2,...) And second refractive optical systems (3, 3,...) Arranged according to the number of each semiconductor laser unit. FIG. 6 shows a rear stage optical system 40 through which light emitted from the second refractive optical system (3, 3,...) Is guided.

The semiconductor laser unit 2 includes a semiconductor laser chip 5 and a first refractive optical system 6. FIG. 7A is a drawing showing one semiconductor laser unit 2 and the second refractive optical system 3 arranged corresponding to the semiconductor laser unit 2 in an extracted manner. In the present embodiment, the semiconductor laser chip 5 has a multi-emitter structure having a plurality of light emission regions (10, 20), and has the same shape as the semiconductor laser chip 110 described above with reference to FIG. 3A. Show. Hereinafter, as in FIG. 3A, the direction in which the light emission regions (10, 20) are adjacent to each other will be described as the X direction, the optical axis direction as the Z direction, and the direction orthogonal to the X and Z directions as the Y direction. 7B is an enlarged view of a portion from the light emission region (10, 20) to the first refractive optical system 6 in FIG. 7A.

The width in the first axis direction (Y direction) of each light emission region (10, 20) provided in the semiconductor laser chip 5 is 2 μm or less, and is 1 μm as an example. The width | variety which concerns on the slow axis direction (X direction) of each light emission area | region (10, 20) is 5 micrometers or more and 500 micrometers or less, and is 80 micrometers as an example. The space | interval (X direction) of each light emission area | region (10,20) is 50 micrometers or more and 1000 micrometers or less, and is 150 micrometers as an example.

The semiconductor laser chip 5 emits a first light bundle (11, 21) having a substantially conical shape from each light emission region (10, 20). At this time, as described above with reference to FIG. 3B, each light emission region (10, 20) is formed at the same coordinate position in the Y direction. One beam bundle (11, 21) is completely overlapped. On the other hand, since each light emission region (10, 20) is formed at a different coordinate position in the X direction, each position of the first light bundle (11, 21) is shifted when viewed from the Y direction. Is displayed. FIG. 7A schematically shows a ray diagram when the first light bundles (11, 21) are viewed from the Y direction.

More specifically, as illustrated in FIG. 7B, the first light bundle 11 is defined by a light ray group sandwiched between an upper light ray 11a and a lower light ray 11b. A light ray traveling in the middle between the upper light ray 11a and the lower light ray 11b is defined as a principal ray 11m. Similarly, the first light beam 21 is defined by a light beam group sandwiched between the upper light beam 21a and the lower light beam 21b, and the main light beam 21m exists at an intermediate position. The principal ray (11m, 21m) is indicated by a one-dot chain line for convenience. 7A and 7B, the optical axis of the first refractive optical system 6 is shown as the optical axis 61.

The semiconductor laser chip 5 is arranged so that the center position 5 a thereof is located on the optical axis 61 of the first refractive optical system 6. As a result, each light emission area (10, 20) is arranged at a position away from the optical axis 61 in the X direction. Further, each of the light emission regions (10, 20) has a size in the X direction, and therefore, between the end near the optical axis 61 and the end far from the optical axis 61. Then, there is a difference in the distance from the optical axis.

The semiconductor laser chip 5 and the first refractive optical system 6 are arranged apart from each other by the focal length f6 of the first refractive optical system 6 in the Z direction. As a result, the first light bundles (11, 21) emitted from the light emission regions (10, 20) of the semiconductor laser chip 5 are refracted by the first refractive optical system 6, and each is a substantially parallel light bundle. It is converted into a certain second light flux (12, 22). The first refractive optical system 6 may be any optical member as long as it is an optical system that converts the first light bundles (11, 21) into the second light bundles (12, 22) that are substantially parallel light bundles. It may be configured.

As described above, each light emission region (10, 20) is disposed at a position away from the optical axis 61 in the X direction. For this reason, the principal rays (12m, 22m) of the second light bundles (12, 22), which are substantially parallel light bundles, are directed toward the focal position (on the light exit surface side) at the rear stage of the first refractive optical system 6. proceed. As a result, the second light fluxes (12, 22) travel as substantially parallel light fluxes, but their traveling directions are different. FIG. 7A shows a case where the second light bundles (12, 22) intersect.

The second light beam (12, 22) is guided to the second refractive optical system 3 arranged at the subsequent stage of the first refractive optical system 6. FIG. 7C is an enlarged view of the vicinity of the second refractive optical system 3 in FIG. 7A. In FIG. 7C, the optical axis of the second refractive optical system 3 is shown as “optical axis 62”. In the present embodiment, the position of each refractive optical system (6, 3) is adjusted so that the optical axis 61 of the first refractive optical system 6 and the optical axis 62 of the second refractive optical system 3 coincide. It will be explained as a thing.

As shown in FIG. 7C, the second refractive optical system 3 includes a plurality of flat surfaces (3a, 3b) having different inclination angles (θ _a , θ _b ) provided on the light incident surface side, and light emission. It has a flat surface 3c provided on the surface side. The flat surface 3c is a surface orthogonal to the optical axis 62 (61).

Here, the inclination angles (θ _a , θ _b ) of the flat surfaces (3a, 3b) refer to angles with respect to the optical axis 62, and these angles are given positive or negative values according to the rotation direction. To distinguish. Here, the case where the rotational direction is counterclockwise is positive, and the case where it is clockwise is negative. That is, according to the example of FIG. 7C, the flat surface 3a of the second refractive optical system 3 is inclined in the counterclockwise direction with respect to the optical axis 62, the inclination angle theta _a is a positive value. On the other hand, the flat surface 3b of the second refractive optical system 3 is inclined in the clockwise direction with respect to the optical axis 62, the inclination angle theta _b is a negative value. That is, the inclination angle theta _a flat surface 3a, and the inclination angle theta _b of the flat surface 3b, a different value.

The second refracting optical system 3 is configured so that the second light bundles (12, 22) incident on the flat surfaces (3a, 3b) are inclined with respect to each other so as to be substantially parallel to the optical axis 62 (θ _a , Θ _b ) are set. More specifically, the inclination angle θ _a is set on the flat surface 3 a so that when the principal ray 22 m of the second light bundle 22 is incident, the principal ray 22 m is substantially parallel to the optical axis 62. Yes. Similarly, the flat surface 3 _b is set to have an inclination angle θ _b so that when the principal ray 12 m of the second light bundle 12 is incident, the principal ray 12 m is substantially parallel to the optical axis 62.

According to such a configuration, each second light beam (12, 22) that has passed through the second refractive optical system 3 travels in substantially the same direction (direction parallel to the optical axis 62). As described above with reference to FIG. 6, the light source device 1 includes the second refractive optical system 3 according to the number of the semiconductor laser units 2. As a result, the second light bundles (12, 22) emitted from each second refractive optical system 3 are substantially parallel light bundles that travel in substantially the same direction. As a result, when the rear optical system 40 includes a condensing optical system, it is possible to reduce the beam width of the light bundle group collected in the rear optical system 40.

The second refractive optical system 3 is composed of any optical member as long as it has a function of converting each incident second light beam (12, 22) to be substantially parallel to the optical axis 62. It doesn't matter. As an example, the second refractive optical system 3 is configured by a prism.

7A illustrates the case where the second refractive optical system 3 has a shape that is convex toward the first refractive optical system 6 side. In such a case, the second refractive optical system 3 is disposed at a position farther away than the focal length f6 of the first refractive optical system 6 in the Z direction. In FIG. 7A, with respect to a pair of adjacent second light bundles (12, 22), a position z1 (“” where the upper light ray 12a of one second light bundle 12 and the lower light ray 22b of the other second light bundle 22 intersect. The second refracting optical system 3 is arranged at a later position with respect to the Z direction (the direction of the optical axes 61 and 62) than the “specific position”. When the second refractive optical system 3 is arranged at such a position, each of the second light bundles (12, 22) is incident on the second refractive optical system 3 in a state where they are completely separated from each other. .

FIG. 8 is a diagram schematically showing the progress of each light beam when the arrangement position of the second refractive optical system 3 is moved to the previous stage (first refractive optical system 6 side) from the state of FIG. 7A. The total width (beam width d) of the light beam that has passed through the second refractive optical system 3 is smaller than that in the case of FIG. 7A. As a result, the beam bundle group can be incident on the rear optical system 40 in a state where the beam width is reduced, which contributes to the reduction in the scale of the apparatus.

By the way, in the aspect of FIG. 8, as above-mentioned, in the state in which a part of each 2nd light beam (12, 22) has overlapped, each 2nd light beam (12, 22) is the 2nd refractive optical system 3. FIG. Is incident on. That is, a part of the light beams of the adjacent second light bundle (12, 22) is incident on each flat surface (3a, 3b) of the second refractive optical system 3. More specifically, light in the vicinity of the upper light beam 12a of the second light beam 12 is incident on the flat surface 3a in addition to the second light beam 22 including the principal light beam 22m. Similarly, in addition to the second light beam 12 including the main light beam 12m, a light beam near the lower light beam 22b of the second light beam 22 is incident on the flat surface 3b.

As described above with reference to FIGS. 7A to 7C, the flat surfaces (3a, 3b) included in the second refractive optical system 3 are the second light beams (12, 12) incident on the flat surfaces (3a, 3b). The inclination angles (θ _a , θ _b ) are set so that 22) is substantially parallel to the optical axis 62. More particularly, the flat surface 3a is such that substantially parallel with respect to the optical axis 62 of the second light bundle 22 including a main ray 22m, and the inclination angle theta _a is set, the flat surface 3b is the principal ray The inclination angle θ _b is set so that the second light bundle 12 including 12 m is substantially parallel to the optical axis 62.

That is, among the light rays incident on the flat surface 3a, light rays belonging to the second light bundle 22 are converted into light rays that are substantially parallel to the optical axis 62. However, as described above, a light beam in the vicinity of the upper light beam 12a of the second light bundle 12 is also incident on the flat surface 3a. Since this light beam is incident on the flat surface 3 a at an incident angle different from that of the second light beam 22, the light beam is non-parallel to the optical axis 62, unlike the second light beam 22.

Similarly, among the light rays incident on the flat surface 3b, the light rays belonging to the second light bundle 12 are converted into light rays substantially parallel to the optical axis 62. However, as described above, a light beam near the lower light beam 22b of the second light beam 22 is also incident on the flat surface 3b. Since this light ray is incident on the flat surface 3 b at an incident angle different from that of the second light beam 12, the light beam is non-parallel to the optical axis 62 unlike the second light beam 12.

That is, the light beam near the upper light beam 12a of the second light beam 12 that is incident on the flat surface 3a and the light beam near the lower light beam 22b of the second light beam 22 that is incident on the flat surface 3b are In the latter stage optical system 40, stray light may be generated without being condensed at a target position.

However, the second light bundle (12, 22) has a maximum light intensity of each principal ray (12m, 22m), and a light distribution such as a Gaussian distribution in which the light intensity rapidly decreases as the distance from the principal ray increases. Distribution. That is, the intensity of the light beam near the upper light beam 12a of the second light beam 12 incident on the flat surface 3a and the light beam near the lower light beam 22b of the second light beam 22 incident on the flat surface 3b. The strength is extremely low.

That is, by arranging the second refractive optical system 3 at the position illustrated in FIG. 8, even if stray light as described above is generated, the amount of light is very small. It does not have a significant effect on usage efficiency. By arranging the second refractive optical system 3 at the position illustrated in FIG. 8, rather than the apparatus configuration illustrated in FIG. 7A, the width of the beam diameter d guided to the subsequent stage can be reduced. Many light bundles can be guided in a limited area, and an effect is obtained that the high-output light source device 1 can be realized.

The second refractive optical system 3 shown in FIG. 7A has flat surfaces (3a, 3b) having an inclination angle on the light incident surface side, and a flat surface orthogonal to the optical axis 62 on the light exit surface side. 3c. On the other hand, as shown in FIG. 9A, the second refractive optical system 3 has a flat surface 3c orthogonal to the optical axis 62 on the light incident surface side and an inclination angle on the light exit surface side. A configuration having flat surfaces (3a, 3b) may be used.

According to this configuration, when each second light beam (12, 22) is incident on the flat surface 3c of the second refractive optical system 3, the second light bundle (12, 22) is refracted to change the traveling direction to change the traveling direction of the second refractive optical system 3. After traveling through the interior and then reaching the flat surfaces (3a, 3b), the direction of travel is changed again and the traveling direction is changed to be substantially parallel to the optical axis 62. In other words, according to the configuration of FIG. 9A, in order to make the traveling direction of each second light beam (12, 22) substantially parallel to the optical axis 62, each second light beam (12, 22) is changed. It can be refracted twice.

As a result, compared with the case of FIG. 7A, the incident angle of each second light beam (12, 22) on the light incident surface side of the second refractive optical system 3 can be reduced, and the surface of the second refractive optical system 3 can be reduced. The amount of reflected light at can be reduced. That is, according to the configuration of FIG. 9A, the light use efficiency can be improved compared to the case of FIG. 7A.

Further, as shown in FIG. 9B, the second refractive optical system 3 has flat surfaces (3a, 3b) having an inclination angle on the light incident surface side, and also has an inclination angle on the light exit surface side. It does not matter even if it has a flat surface (3d, 3e). Also in this case, as in the configuration of FIG. 9A, in order to make the traveling direction of each second light beam (12, 22) substantially parallel to the optical axis 62, each second light beam (12, 22). Can be refracted twice, the amount of reflected light on the surface of the second refractive optical system 3 is suppressed, and the light utilization efficiency can be improved.

Note that the optical axis 62 of the second refractive optical system 3 may not necessarily coincide with the optical axis 61 of the first refractive optical system 6. For example, as shown in FIG. 10, the second light bundles (12, 22) emitted from the second refractive optical system 3 are inclined by inclining the flat surface 3c on the light emitting surface side of the second refractive optical system 3. May be substantially parallel to the optical axis 62 of the second refractive optical system 3 and non-parallel to the optical axis 61 of the first refractive optical system 6. For example, in the latter stage optical system 40, when it is necessary to change the traveling direction of the light beam using a reflection optical system (mirror, etc.) in order to guide to the optical system, the configuration as shown in FIG. 10 is adopted. Thus, since the traveling direction can be adjusted in advance on the second refractive optical system 3 side, the effect of reducing the number of optical members can be obtained.

Further, in the second refractive optical system 3 shown in FIG. 7A, each of the flat surfaces (3a, 3b) of the second refractive optical system 3 is relative to the optical axis 61 of the first refractive optical system 6. It was inclined with respect to an orthogonal plane (XY plane). On the other hand, as illustrated in FIG. 11, for example, the flat surface 3 b may be arranged so as to be orthogonal to the optical axis 61 of the first refractive optical system 6.

The semiconductor laser unit 2 illustrated in FIG. 11 is arranged so that the center position of the light emitting region 10 coincides with the optical axis 61 of the first refractive optical system 6. In this case, the principal ray 11 m included in the first light bundle 11 emitted from the light emission region 10 travels so as to be positioned on the optical axis 61 of the first refractive optical system 6. Therefore, the first light beam 11 is incident on the first refractive optical system 6 and then converted into a substantially parallel light beam that travels in a direction parallel to the optical axis 61 of the first refractive optical system 6 (second light beam). Bundle 12).

Therefore, after passing through the second refractive optical system 3 by making the second light beam 12 incident on the flat surface 3b arranged so as to be orthogonal to the optical axis 61 of the first refractive optical system 6, However, it is possible to proceed in a direction parallel to the optical axis 61 of the first refractive optical system 6 (the optical axis 62 of the second refractive optical system 3). On the other hand, the first light bundle 21 emitted from the light emission region 20 proceeds non-parallel to the optical axis 61 of the first refractive optical system 6 as described above with reference to FIG. By being incident on the inclined flat surface 3 a provided in the birefringent optical system 3, it can be converted to be substantially parallel to the optical axis (61, 62).

According to such a configuration, optical alignment between the semiconductor laser unit 2 and the second refractive optical system 3 is facilitated.

As another configuration example, as illustrated in FIG. 12, the plurality of second refractive optical systems (3, 3,...) Included in the light source device 1 includes a first optical member 30 that is integrated with each other. Can be formed. In the example illustrated in FIG. 12, each second refractive optical system 3 has the shape described above with reference to FIG. 7C. In this case, among the surfaces of the first optical member 30, the surface on the light exit surface side is a flat surface 3 c constituting an orthogonal surface, and these are shared in each second refractive optical system 3. Further, among the surfaces of the first optical member 30, a plurality of inclined flat surfaces (3 a, 3 b) are continuously formed on the light incident surface side in a number corresponding to the number of semiconductor laser units 2. . The light source device 1 shown in FIG. 12 thus formed has the same optical function as the light source device 1 described above with reference to FIG.

In the light source device 1 illustrated in FIG. 6, each second refractive optical system 3 receives a light beam emitted from the corresponding semiconductor laser unit 2 and is emitted from the adjacent semiconductor laser unit 2. The incident light bundle is preferably not incident. When the light beam emitted from the adjacent semiconductor laser unit 2 is incident on the second refractive optical system 3, the arrangement position of the second refractive optical system 3 is the semiconductor laser unit 2 (more specifically, This corresponds to the case where the first refractive optical system 6) is very far from the optical axis 61 in the direction of the optical axis 61.

In the case of such a configuration, the separation distance between the second light bundles (12, 22) emitted from the same first refractive optical system 6 and incident on the second refractive optical system 3 is increased. In order to make such a second light beam (12, 22) enter, the flat surfaces (3a, 3b) of the second refractive optical system 3 must be shaped to have large dimensions in the X direction. As a result, the shape of the second refractive optical system 3 is increased.

As shown in FIG. 13, the light source device 1 may include an integrator optical system 50 in the subsequent stage of each second refractive optical system 3. FIG. 14 is an enlarged view schematically showing a part of FIG. The integrator optical system 50 includes a front-stage fly-eye lens 51 and a rear-stage fly-eye lens 52, which are arranged to face each other. The front-stage fly-eye lens 51 and the rear-stage fly-eye lens 52 are formed by arranging a plurality of lenses (single lenses) having the same focal length and the same shape in the vertical and horizontal directions.

According to this configuration, the second light bundles (12, 22) that have passed through the second refractive optical systems 3 are formed with multiple images by the integrator optical system 50, so that the illuminance distribution on the irradiation surface is uniform. A pseudo light source is formed. That is, the light flux that has passed through the integrator optical system 50 is incident on the post-stage optical system 40, thereby suppressing the illuminance variation on the target irradiation surface that is irradiated with the light emitted from the post-stage optical system 40.

As shown in FIG. 15, the second refractive optical system 3 and the pre-stage fly-eye lens 51 of the integrator optical system 50 may be integrated. In this case, the period of the plurality of lenses included in the pre-stage fly-eye lens 51 is greater than the period of the second refractive optical system 3, more specifically, the period of flat surfaces having the same inclination angle (for example, the flat surfaces 3a). Is composed of a short period.

Furthermore, as shown in FIG. 12, the plurality of second refractive optical systems (3, 3,...) Provided in the light source device 1 form a first optical member 30 that is integrated with each other. The first fly-eye lens 51 of the integrator optical system 50 may be integrated on the light exit surface side of the first optical member 30 (see FIG. 16).

By the way, as described with reference to FIG. 8, when the second refractive optical system 3 is disposed a little closer to the first refractive optical system 6, the light having a low light intensity emitted from the second refractive optical system 3. The light rays of the part travel non-parallel to the optical axis 62. By making this light beam enter an integrator optical system 50 arranged corresponding to the adjacent second refractive optical system 3, the speckle on the target irradiation surface to which the light emitted from the rear optical system 40 is irradiated. The effect of reducing contrast can be obtained.

FIG. 17 is a drawing schematically showing a configuration example of a projector including the light source device 1 described above. The projector 9 includes an illumination optical system 70 including the light source device 1 and a spectroscopic / projection optical system 80 that projects the light guided from the illumination optical system 70 onto the screen 90 after the light is dispersed.

In the example shown in FIG. 17, the light source device 1 is assumed to be a red light source. That is, the illumination optical system 70 includes a light source device 1 as a red light source, a blue light source 71, a fluorescent light source 72 that receives blue light emitted from the blue light source 71 and generates fluorescence, and a diffuse reflection optical system 73. A dichroic mirror (74, 75), an integrator optical system 50, and a synthesis optical system 76.

The high-density red light R emitted from the light source device 1 is reflected by the dichroic mirror 74 and then guided to the integrator optical system 50. Also, the blue light B emitted from the blue light source 71 is separated into light reflected by the dichroic mirror 75 and transmitted light according to the polarization. For example, the dichroic mirror 75 may include a polarization separation element that can control the traveling direction of light according to the polarization direction.

Blue light of a certain polarization direction reflected by the dichroic mirror 75 is guided to the fluorescent light source 72 and used as excitation light of the phosphor contained in the fluorescent light source 72, and the obtained fluorescence is used as the dichroic mirror (75, 74). Is transmitted to the integrator optical system 50. Blue light in another polarization direction that has passed through the dichroic mirror 75 is incident on the diffuse reflection optical system 73, and the diffused light is reflected from the diffuse reflection optical system 73 and guided to the dichroic mirror 75. This light is reflected by the dichroic mirror 75, then passes through the dichroic mirror 74 and is guided to the integrator optical system 50.

In the integrator optical system 50, the light of each color is synthesized into white light by the synthesis optical system 76 after the illuminance distribution is made uniform. The combining optical system 76 may include a polarization conversion element that makes the polarization direction uniform.

White light that has passed through the synthesis optical system 76 is guided to the spectroscopic / projection optical system 80. The light of each color separated by the dichroic mirrors (81a, 81b, 81c) included in the spectroscopic / projection optical system 80 is appropriately adjusted in the traveling direction through the mirrors (81d, 81e), The light enters the modulator (82R, 82G, 82B). The modulation devices (82 R, 82 G, 82 B) modulate each color light according to the image information and output it to the color synthesis optical system 83. The color synthesis optical system 83 synthesizes image light corresponding to the image information and enters the projection optical system 84. The projection optical system 84 projects image light onto the screen 90.

In the case of the configuration of the projector 9 shown in FIG. 17, the combining optical system 76 and the spectroscopic / projection optical system 80 correspond to the rear stage optical system 40 in FIG.

In addition, although the projector 9 shown in FIG. 17 assumes the case where the light source device 1 of the present embodiment is used as a light source that generates red light, it may be a light source that generates blue light. In this case, the light source device 1 that generates blue light and the fluorescent light source that generates the fluorescence when the blue light emitted from the light source device 1 is incident as the excitation light are provided. It is good also as what is synthesize | combined through and white light is produced | generated.

As described above with reference to FIGS. 15 and 16, each second refractive optical system 3 included in the light source device 1 may be integrated with the integrator optical system 50. In this case, the arrangement of the integrator optical system 50 arranged between the dichroic mirror 74 and the combining optical system 76 shown in FIG. 17 may be omitted.

Further, the projector 9 may be configured to generate light of each color of R, G, and B by the light source device 1 of the present embodiment and combine them by the combining optical system 76. That is, the light source device 1 may include a semiconductor laser chip 5 that generates blue light, a semiconductor laser chip 5 that generates red light, and a semiconductor laser chip 5 that generates green light. In this case, the light of each color emitted from each light source device 1 may be propagated through a light guide member such as an optical fiber and incident on the modulation devices (82R, 82G, 82B) of each color.

The projector 9 shown in FIG. 17 is illustrated assuming that the modulation devices (82R, 82G, and 82B) are configured by transmissive liquid crystal elements. However, the projector 9 shown in FIG. : Digital micromirror device (registered trademark) may be used. The spectroscopic / projection optical system 80 is appropriately set according to the configuration of the modulation device.

[Another embodiment]
Hereinafter, another embodiment will be described.

<1> The semiconductor laser chip 5 described above with reference to FIG. 6 and the like has a multi-emitter configuration having two light emission regions (10, 20). The number of light emission regions provided in the semiconductor laser chip 5 is not limited to two, and may be three or more. The number of flat surfaces (3a, 3b,...) With different inclination angles provided in the second refractive optical system 3 is set according to the number of light emission regions included in the same semiconductor laser unit 2.

On the contrary, each semiconductor laser chip 5 has a single emitter type configuration having a single light emission region, as described above with reference to FIG. 1A, for example. It may be configured to be incident on the monorefringent optical system 6 (see FIG. 18). Further, as shown in FIG. 18, in a mode in which light emitted from a plurality of semiconductor laser chips 5 is incident on the first refractive optical system 6, each semiconductor laser chip 5 may have a multi-emitter type structure. . The first refractive optical system 6 may be provided corresponding to each semiconductor laser chip 5, and even if the first refractive optical system 6 itself is provided individually, it is integrally formed in an array. It doesn't matter.

<2> In the above embodiment, each semiconductor laser chip 5 is assumed to have a so-called “end-emitting type” structure in which the light emission regions (10, 20) are formed on the end face of the semiconductor laser chip 5. did. However, the present invention is similarly applicable even if each semiconductor laser chip 5 has a so-called “surface emitting type” structure in which light is extracted in the stacking direction of the semiconductor layers.

<3> The light source device 1 according to the present invention is applicable to applications other than a projector as long as it is an application that collects a plurality of light beams and irradiates a predetermined irradiation object. As an example, the light source device 1 can be used as a light source for an exposure apparatus.

<4> The optical arrangement mode provided in the light source device 1 described above is merely an example, and the present invention is not limited to each illustrated configuration. For example, a reflection optical system for changing the traveling direction of light may be appropriately interposed between a certain optical system and another optical system.

1: Light source device 2: Semiconductor laser unit 3: Second refractive

optical system

3a, 3b: Flat surface of second refractive optical system 5: Semiconductor laser chip 5a: Center position of semiconductor laser chip 6: First refractive optical system 9 : Projector 10, 20: Light emission area 11, 21: First light bundle 12, 22: Second light bundle 30: First optical member 40: Rear stage optical system 50: Integrator optical system 61: Light of first refractive optical system Axis 62: Optical axis of second refractive optical system 70: Illumination optical system 71: Blue light source 72: Fluorescent light source 73: Diffuse reflection optical system 74, 75: Dichroic mirror 76: Synthetic optical system 80: Spectroscopic / projection optical system 81a, 81, 81c: Dichroic L: 81d, 81e:

Mirror

82B, 82G, 82R: Modulator 84: Projection optical system 85: Color synthesis optical system 90: Screen 100, 110:

Semiconductor laser chip

101, 111, 112:

Emitter

101L, 111L, 112L: From emitter Emitted light beam 102: collimating lens

Claims

A plurality of light exit areas provided on the same or different semiconductor laser chips and a plurality of first light bundles emitted from a plurality of adjacent light exit areas are incident, and each of the plurality of first light bundles A plurality of semiconductor laser units, including a first refractive optical system that converts and emits a plurality of second light beams that are substantially parallel light beams, and
A plurality of the second light beams including a plurality of flat surfaces having different inclination angles, wherein at least a part of each of the plurality of second light bundles emitted from the same semiconductor laser unit is incident on the different flat surfaces. A second refractive optical system that converts the traveling direction of each principal ray of the bundle to be substantially parallel to the optical axis and emits the second refractive optical system,
The second light source optical system is disposed corresponding to the number of the semiconductor laser units.
The first refractive optical system has a convex curved surface on the light exit surface side,
2. The light source according to claim 1, wherein the second refractive optical system is disposed at a position away from a focal length of the first refractive optical system with respect to the first refractive optical system. apparatus.
The second refracting optical system has a specific position where the upper light beam of one of the second light beam beams and the lower light beam of the other second light beam beam intersect with each other, or the specific light beam The light source device according to claim 2, wherein the light source device is disposed at a position farther from the first refractive optical system than a position.
4. The second refractive optical system according to claim 1, wherein the second refractive optical system is disposed at a position where the second light beam emitted from the adjacent semiconductor laser unit is not incident. Light source device.
The second refractive optical system has a plurality of flat surfaces on a light incident surface side, and one of the plurality of flat surfaces is a surface orthogonal to the optical axis. The light source device according to any one of claims 1 to 4.
The light source device according to claim 5, wherein the second refractive optical system has a surface orthogonal to the optical axis on the light exit surface side.
The light source device according to claim 5 or 6, further comprising a first optical member formed by integrating a plurality of the second refractive optical systems on a surface opposite to the flat surface.
At the rear stage position of the second refractive optical system, it has an integrator optical system consisting of a front fly eye lens and a rear fly eye lens,
The pre-stage fly-eye lens is arranged to be connected to the light exit surface side of the first optical member, and a period of the flat surfaces having the same inclination angle provided in a plurality of the second refractive optical systems. The light source device according to claim 7, further comprising a plurality of lenses arranged with a shorter period.
A projector for projecting an image using light emitted from the light source device according to any one of claims 1 to 8.