WO2019165904A1

WO2019165904A1 - Safety shutter device for photoetching machine

Info

Publication number: WO2019165904A1
Application number: PCT/CN2019/075331
Authority: WO
Inventors: 王彦飞; 章富平; 贾翔
Original assignee: 上海微电子装备（集团）股份有限公司
Priority date: 2018-02-27
Filing date: 2019-02-18
Publication date: 2019-09-06
Also published as: CN110196532B; TW201937308A; CN110196532A

Abstract

Provided is a safety shutter device for a photoetching machine. The safety shutter device comprises a casing (10) provided with a light through hole (11), a driving body (20), an execution body (30) and a transmission body (40). The driving body (20) is mounted on an outer wall of the casing (10). The execution body (30) can move between a first position completely shielding the light through hole (11) and a second position completely not shielding the light through hole (11). The transmission body (40) is respectively connected to the driving body (20) and the execution body (30), and the driving body (20) is configured to drive the execution body (30) via the transmission body (40) to shield or open the light through hole (11).

Description

Lithography machine safety shutter device

The present application claims the priority of the Chinese Patent Application No. 20110116 431 5.8 filed on Jan. 27, 2018, the entire disclosure of which is hereby incorporated by reference.

Technical field

The present application relates to the field of semiconductor fabrication, for example, to a lithography machine safety shutter device.

Background technique

Photolithography refers to the technique of transferring a pattern on a mask to a wafer (such as a semiconductor wafer or a glass substrate coated with a light-sensitive medium) by means of a photolithography machine under illumination. During the lithography process, the wafer is placed on a wafer stage and the pattern on the mask is projected onto the wafer surface by an exposure device located within the lithography machine.

Generally, the exposure device of the lithography machine controls the exposure amount through a safety shutter, and the safety shutter of the lithography machine is installed at the light exit port of the lamp room. When the lithography machine is normally exposed to work, the safety shutter is in an open state, and the safety shutter blade is completely blocked from light; When the exposure is completed or the lithography machine is in an abnormal working state (such as sudden power failure or gas break), the safety shutter closes quickly, blocking the optical path and ensuring no light leakage to ensure exposure accuracy. However, the applicant found that at least the following problems exist in the related art: the safety shutter works in a high temperature, high radiation, high intensity illumination environment, and the heat effect of the high intensity illumination environment is large, and the thermal condition easily causes thermal damage to cause the safety shutter switch to fail, affecting The lithography machine has an exposure efficiency and affects the exposure accuracy.

Summary of the invention

The following is an overview of the topics detailed in this document. This Summary is not intended to limit the scope of the claims.

The present application proposes a lithography machine safety shutter device to avoid the situation that the safety shutter of the related lithography machine is easily damaged by thermal damage, and the exposure efficiency and exposure precision of the lithography machine can be improved.

The present application adopts the following technical solution: a lithography machine safety shutter device, comprising a cover having a light-passing hole, further comprising: a driving body mounted on the outer side wall of the casing; and an actuator body for completely shielding the light-passing hole The first position and the second position that does not obstruct the light-passing hole are movable; and the transmission body is respectively connected to the driving body and the actuator, and the driving body is configured to drive the actuator to shield or open the light-passing hole through the transmission body.

Other aspects will be apparent upon reading and understanding the drawings and detailed description.

DRAWINGS

1 is a schematic structural view of a shutter safety shutter device according to an embodiment of the present application;

2 is a schematic structural view of a driving body according to an embodiment of the present application;

3 is a schematic structural view of a shutter safety shutter device according to another embodiment of the present application;

4 is a schematic structural view of an actuator according to an embodiment of the present application;

FIG. 5 is a schematic diagram showing an open state of a shutter safety shutter device according to an embodiment of the present application; FIG.

6 is a schematic diagram showing a closed state of a shutter safety shutter device according to an embodiment of the present application;

7 is a schematic diagram showing simulation of absolute position of a blade during opening and closing in an undamped state according to an embodiment of the present application;

FIG. 8 is a schematic diagram showing simulation of absolute position of a blade during a damping state in a damped state according to an embodiment of the present application; FIG.

9 is a schematic diagram of simulation of absolute position of a blade when the shutter safety shutter device is abnormally closed in a damped state according to an embodiment of the present application.

In the picture:

10-cover, 11-through aperture;

20-drive body, 21-mounting shell, 22-power component, 23-detector, 24-sensor, 25-insulation sheet, 26-shell cover;

30-executor, 31-shaft seat, 32-shaft, 33-blade, 34-damper, 35-heat-resistant sheet;

40-drive body, 41-crank, 42-rocker, 43-link;

50-fixing rod, 60-ventilation tube.

Detailed ways

The technical solutions of the present application will be described below with reference to the accompanying drawings and specific embodiments.

In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship of the "bottom", "inside", "outside" and the like is based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present application and simplified description, and does not indicate or imply the indicated device. Or the components must have a particular orientation, constructed and operated in a particular orientation, and thus are not to be construed as limiting.

Referring to FIG. 1 , a shutter safety shutter device of an embodiment includes a cover 10 , a driving body 20 , an actuator 30 , and a transmission body 40 . A light-passing hole 11 is defined in the casing 10, the driving body 20 is mounted on the outer side wall of the casing 10, the actuator 30 is mounted at the light-passing hole 11, and the actuator 30 is in the first position of completely shielding the light-passing hole 11 and The second position that does not obstruct the light-passing aperture 11 at all is movable. The transmission body 40 is respectively connected to the driving body 20 and the actuator 30, and the driving body 20 is disposed to drive the actuator 30 to shield or open the light-passing hole 11 through the transmission body 40.

In one embodiment, the actuator 30 is disposed inside the casing 10 and is installed at the light-passing hole 11 and is provided to shield or open the light-passing hole 11 according to the driving force provided by the driving body 20. The driving body 20 is disposed outside the casing 10, and is mounted on the outer side wall of the left side or the right side of the casing 10. The driving body 20 and the actuator 30 are connected by the transmission body 40, and the side wall of the casing 10 is opened. The opening through which the transmission body 40 passes. The first end of the transmission body 40 is connected to the driving body 20, the second end of the transmission body 40 is connected to the actuator 30, the driving body 20 acts to drive the transmission body 40, and the transmission body 40 drives the actuator 30 to shield or open the light. Hole 11.

In one embodiment, as shown in FIG. 1, the lithography machine safety shutter device further includes a fixing rod 50. The first end of the fixing rod 50 is connected to the driving body 20, and the second end of the fixing rod 50 is connected to the actuator 30. .

In an embodiment, in order to ensure the exposure precision of the lithography machine, when the safety shutter device is in an open state (ie, the light-passing aperture 11 is opened), the actuator 30 does not obstruct the light-passing aperture 11 at all, ensuring that the light is not blocked at all; When the safety shutter device is in the closed state (ie, the light-passing aperture 11 is shielded), the actuator 30 completely shields the light-passing aperture 11 to ensure that no light leakage is caused at all. Therefore, it is necessary to ensure that the actuator 30 is moved into position when the light-passing hole 11 is shielded or opened. Since the actuator 30 is operated under the long-distance driving of the driving body 20, in order to ensure that the actuator 30 is moved in position when the light-passing hole 11 is shielded or opened, it is necessary to ensure the connection between the rotation center of the driving body 20 and the rotation center of the actuator 30. Parallel to the upper and lower frames of the casing 10, that is, the distance from the center of rotation of the driving body 20 to the upper frame of the casing 10 is equal to the distance from the center of rotation of the actuator 30 to the upper frame of the casing 10. This makes it necessary to repeatedly align the position of the adjustment driving body 20 or the actuator 30 when the driving body 20 and the actuator 30 are mounted on the casing 10 so that the center of rotation of the both is connected to the upper frame of the casing 10 and The bottom border is parallel. The mounting operation of the driving body 20 and the actuator 30 is cumbersome and the installation efficiency is low.

In this embodiment, the driving body 20 and the actuator 30 are positioned and connected by providing the fixing rod 50. When the driving body 20 and the actuator 30 are mounted, only the fixing rod 50 and the upper and lower frames of the casing 10 are adjusted to be parallel. It can be ensured that the connection between the rotation center of the driving body 20 and the rotation center of the actuator 30 is parallel to the upper frame and the lower frame of the casing 10, and it is not necessary to repeatedly align the adjustment driving body 20 or the mounting position of the actuator 30, which is convenient for the driving body. 20 and the mounting body 30 are mounted to improve the mounting efficiency of the driving body 20 and the actuator 30.

In one embodiment, as shown in FIG. 1, the lithography machine safety shutter device further includes a venting tube 60, and the hood 10 is provided with a venting hole, and the first end of the venting tube 60 is disposed to be connected to the fan, and the venting tube 60 The second end is in communication with the venting opening.

In one embodiment, the vent tube 60 is fixed to the hood 10 in communication with the venting opening, and the venting tube 60 is connected to the fan. The venting hole is aligned with the actuator 30 and the light-passing hole 11, and the fan can be a blower or an exhaust fan. The air blower or the exhaust fan blows air into the casing 10 through the air duct 60, or draws air from the inside of the casing 10 to cool the actuator 30 to prevent the heat of the actuator 30 from being excessively transmitted to the driving body 20, thereby improving the light. Switching stability of the security shutter device.

As shown in FIG. 1, in one embodiment, the transmission body 40 includes a crank 41, a rocker 42 and a link 43. The rotation shaft of the crank 41 is connected to the driving body 20, the rotation shaft of the rocker 42 is connected to the actuator 30, the first end of the link 43 is connected to the crank 41, and the second end of the link 43 is connected to the rocker 42.

In one embodiment, the axis of rotation of the crank 41 is coupled to the drive body 20 and moves as the drive body 20 moves. The first end of the link 43 is coupled to the crank 41, and the second end of the link 43 is coupled to the rocker 42 through an opening in the side wall of the casing 10. The rotating shaft of the rocker 42 is coupled to the actuator 30 and drives the actuator 30 to operate. When it is necessary to shield or open the light-passing hole 11, the driving body 20 operates to drive the crank 41 to operate, the crank 41 pulls the connecting rod 43 to operate, the connecting rod 43 pulls the rocking rod 42 to operate, and the rocking rod 42 drives the body to move, shield or open Light hole 11. In the embodiment, the driving body 40 transmits the driving force of the driving body 20 to the actuator 30 by using a link transmission mechanism, so that the driving body 20 and the executing body 30 are separated from each other to avoid thermal failure of the driving body 20. In other embodiments, the transmission body 40 can also adopt a gear transmission mechanism, a screw drive mechanism, a chain transmission mechanism, etc., and the above transmission body 40 adopts a link transmission mechanism as an embodiment, and is not intended to limit the present application.

As shown in FIG. 2, in one embodiment, the drive body 20 includes a mounting housing 21 and a power component 22. The mounting case 21 is mounted on the outer side wall of the casing 10, the power element 22 is disposed within the mounting case 21, and the output shaft of the power element 22 is coupled to the crank 41.

In one embodiment, the power element 22 is configured to provide a driving force to the actuator 30. In this embodiment, the power element 22 adopts a swinging cylinder, and the output shaft of the swinging cylinder is connected with the rotating shaft of the crank 41. The swinging cylinder operates to drive the crank 41, and the crank 41 drives the connecting rod 43 and the rocker 42 to transmit the driving force to the driving force. Actuator 30. In this embodiment, the power component 22 uses a swinging cylinder. In other embodiments, the power component 22 can also use other types of cylinders (such as a rotating cylinder) and a motor (such as a rotating electrical machine) or an electromagnet. Make specific limits.

In one embodiment, the drive body 20 further includes a probe piece 23 and a sensor 24. The detecting piece 23 is connected to the output shaft of the power element 22 and operates as the power element 22 operates. The sensor 24 is disposed in the mounting shell 21 and is arranged to detect the position of the detecting piece 23 to determine whether the light passing hole 11 is in an open state or closed ( The body 30 is completely shielded from the state. In one embodiment, the sensor 24 is coupled to a controller of the lithography machine, and the sensor transmits the detected switching state of the light-passing aperture 11 to the controller of the lithography machine, and the controller of the lithography machine is configured according to the light-passing aperture 11 The switch state and exposure process require control of the operation of the power component 22 to achieve automatic control of the shutter safety shutter device. In one embodiment, as shown in FIG. 2, the number of sensors 24 is two, one of which is disposed on the bottom plate of the mounting case 21 and the other is disposed on the side wall of the mounting case 21. When the detecting piece 23 is in contact with the sensor 24 provided on the bottom plate of the mounting case 21, the light passing hole 11 is in an open state; when the detecting piece 23 is in contact with the sensor 24 provided on the side wall of the mounting case 21, the light passing hole 11 is off.

In one embodiment, as shown in FIG. 2, the power component 22 includes a main body and an output bushing. The driving body 20 further includes a heat insulating sheet 25 that is sleevedly connected to the output shaft of the power component 22 and insulated. The sheet 25 is disposed between the crank 41 and the body of the power element 22. In the present embodiment, the provision of the heat insulating sheet 25 between the crank 41 and the main body of the power element 22 can effectively prevent the crank 41 from generating heat conduction to the main body of the power element 22, protect the power element 22, and avoid thermal failure of the power element 22. In one embodiment, the insulating sheet 25 is made of a porous material, a heat reflective material, or a vacuum material.

As shown in FIG. 3, in another embodiment of the present application, the driving body 20 further includes a case cover 26, and the case cover 26 is coupled to the mounting case 21. In general, sensor 24 can employ a high precision, fast response, non-contact photoelectric sensor. In the present embodiment, the cover 26 is disposed on the mounting shell 21 to cover a plurality of components disposed in the mounting shell 21, which can effectively avoid glare heat radiation and irradiation. The sensor 24 is prevented from failing and other components within the mounting housing 21 can be protected from damage. The difference between this embodiment and the above embodiment is that a cover 26 is provided on the mounting shell 21 to protect a plurality of components disposed inside the mounting shell 21. The other structures of the embodiment are the same as the above embodiment. No longer.

As shown in FIG. 4, in one embodiment, the actuator 30 includes a shaft seat 31, a shaft 32, and a vane 33. The shaft seat 31 is connected to the casing 10, and the rotating shaft 32 passes through the shaft seat 31 and is sleeved with the rocker 42. The vane 33 is sleeve-connected with the rotating shaft 32.

In one embodiment, the actuator 30 is mounted on the casing 10 via a shaft mount 31, the shaft 32 is disposed through the axle housing 31, and the shaft 32 is rotatably coupled to the axle housing 31. In one embodiment, the rotating shaft 32 is coupled to the shaft base 31 by a sliding bearing or a rolling bearing to ensure smooth rotation of the rotating shaft 32. One end of the rotating shaft 32 is connected with the rotating shaft of the rocker 42 and the rotating shaft of the blade 33, and the rotating shaft 32 rotates with the action of the rocker 42 to drive the blade 33 away from the light-passing hole 11 or cover the light-passing hole 11 to open or block the opening. Light hole 11. As shown in FIG. 3, in the present embodiment, the blade 33 is coupled to the rocker 42 by fasteners such as screws to ensure stable and reliable mounting of the blade 33.

In one embodiment, the actuator 30 further includes a damper 34 that is coupled to the shaft 32. The damper 34 can effectively reduce the mechanical shock of the safety shutter open-close, close-open motion, avoiding the light leakage of the blade during the shielding or opening process, and help to improve the exposure precision. In one embodiment, the effectiveness of the damper 34 is illustrated by a sample simulation in conjunction with FIGS. 5-9 below. For example, in this example, the driving body 20 is a swinging cylinder with a stroke of 90° and an effective torque of 0.31 N·m. The blade 33 has a moment of inertia of 2.3 × 10 ^-3 Kg·m ² , and the distance from the center of the light-passing hole 11 to the rotation axis of the blade 33 is 101 mm. Fig. 5 is a schematic view showing the open state of the shutter of the shutter of the lithography machine, and Fig. 6 is a schematic view showing the closed state of the shutter device of the lithography machine. Figure 7 is a schematic diagram showing the simulation of the absolute position of the blade during the unsecured state of the lithography machine from the open to the closed state. When the blade 33 moves to the closed position after about 0.5 second, the blade 33 undergoes severe impact shaking, and the maximum amount of shake is 25°, and light leakage occurs. On the basis of the above, the damping is increased, and the coefficient of the damper 34 is 2 × 10 ^-3 Kg·m ² /(deg·S). Fig. 8 is a schematic diagram showing the absolute position simulation of the blade during the damping state from the opening to the closing state of the shutter of the lithography machine. The blade 33 is not shaken, and the closing time is about 0.5 second. In addition, the lithography machine sometimes has a sudden situation, such as power failure, gas breakage, etc., the lithography machine safety shutter device driver has no output force, and the lithography machine safety shutter device automatically closes under the action of the center of gravity of the blade 33. As shown in FIG. 9 , it is a schematic diagram of the absolute position simulation of the blade when the shutter device of the lithography machine is abnormally closed in the damped state, and the blade 33 is closed for about 2 seconds, and is closed without jitter.

In this embodiment, in order to avoid the failure of the damper 34 caused by the optical radiation, the damper 34 is disposed on the shaft seat 31 and the other side opposite to the blade 33 is connected with the rotating shaft 32 to block the optical radiation through the shaft seat 31, and the damper is ensured. 34 stable work.

In one embodiment, the actuator 30 further includes a heat-resisting sheet 35 that is sleeve-connected to the rotating shaft 32, and the heat-resistant sheet 35 is disposed between the rocker 42 and the shaft seat 31. In one embodiment, the heat shield 35 can impede heat transfer from the blade 33, avoiding thermal failure of the damper 34. In one embodiment, the heat resistant sheet 35 is made of a porous material, a heat reflective material, or a vacuum material.

In the above-mentioned lithography machine safety shutter device, the driving body 20 is mounted on the outer side wall of the casing 10, and only the actuator 30 is mounted at the light-passing hole 11, and the driving body 20 and the actuator 30 are connected by the transmission body 40, The driving body 20 drives the actuator 30 through the transmission body 40 to shield or open the light passing hole 11. In one embodiment, the working process of the above-described lithography machine safety shutter device is as follows:

As shown in FIG. 5 and FIG. 6, when the light-passing hole 11 needs to be opened, the power element 22 rotates counterclockwise to drive the crank 41 to rotate counterclockwise, the crank 41 pulls the link 43 to move to the left side, and the link 43 drives the rocker 42. Turning counterclockwise, the blade 33 rotates counterclockwise with the rocker 42 , and the blade 33 moves to the right position to the second position. The blade 33 is away from the light-passing hole 11 and does not block the light-passing hole 11 at all, and the light-passing hole 11 is in an open state; When the light-passing hole 11 needs to be closed, the power element 22 rotates clockwise, the crank 41 is rotated clockwise, the crank 41 pushes the link 43 to the right side, the link 43 drives the rocker 42 to rotate clockwise, and the blade 33 follows the rocker 42. Rotating clockwise, the blade 33 moves to the left lower position to the first position, the blade 33 covers the light-passing hole 11 and does not leak light at all, and the light-passing hole 11 is in a closed state.

The above-mentioned lithography machine safety shutter device is disposed on the outer side wall of the casing 10 to realize that the driving body 20 is disposed away from the light-passing hole 11, and the driving body 20 is away from the high-intensity illumination environment, thereby effectively avoiding the driving condition of the hot working condition. The components such as the power component 22 and the sensor 24 of the body 20 cause thermal damage to cause the driver 20 to fail, and the driver 20 works stably and reliably, ensuring that the actuator 30 efficiently and accurately shields or opens the light-passing hole 11, which can effectively improve the exposure efficiency of the lithography machine. And exposure accuracy.

A plurality of technical features of the above-described embodiments may be combined in any combination. For the sake of brevity of description, all possible combinations of the plurality of technical features in the above embodiments are not described, however, as long as the combination of these technical features does not exist. Contradictions should be considered as the scope of this manual.

Claims

A safety shutter device for a lithography machine, comprising a cover (10) having a light-passing hole (11), further comprising:

a driving body (20) mounted on an outer sidewall of the casing (10);

The actuator (30) is movable between a first position in which the light-passing hole (11) is completely shielded and a second position in which the light-passing hole (11) is not shielded at all; and

a transmission body (40) connected to the driving body (20) and the actuator (30), respectively, the driving body (20) being arranged to drive the actuator (30) through the transmission body (40) The light-passing hole (11) is shielded or opened.
A lithographic machine safety shutter device according to claim 1, wherein said transmission body (40) comprises:

a crank (41) connected to the driving body (20);

a rocker (42) coupled to the actuator (30); and

A connecting rod (43), the first end of the connecting rod (43) is connected to the crank (41), and the second end is connected to the rocker (42).
The lithographic machine safety shutter device according to claim 1 or 2, further comprising a fixing rod (50), the first end of the fixing rod (50) being connected to the driving body (20), and the second end Connected to the actuator (30).
The lithography machine safety shutter device according to claim 1 or 2, further comprising a ventilation pipe (60), the casing (10) is provided with a ventilation hole, and the first end of the ventilation pipe (60) It is arranged to be connected to the fan, and the second end is connected to the ventilation hole.
The lithography machine safety shutter device according to claim 2, wherein the driving body (20) comprises:

Mounting shell (21) mounted on an outer side wall of the casing (10); and

A power element (22) is disposed within the mounting housing (21), and an output shaft of the power element (22) is coupled to the crank (41).
A lithographic machine safety shutter device according to claim 5, wherein said power element (22) is a cylinder, a motor or an electromagnet.
The lithography machine safety shutter device according to claim 5, wherein the driving body (20) further comprises:

a detecting piece (23) connected to an output shaft of the power component (22); and

A sensor (24), disposed within the mounting housing (21), is configured to detect the position of the probe piece (23).
The lithography machine safety shutter device according to claim 5, wherein the driving body (20) further comprises a case cover (26), and the case cover (26) is coupled to the mounting case (21).
The lithography machine safety shutter device according to claim 5, wherein the power element (22) comprises a main body and an output sleeve, and the driving body (20) further comprises a heat insulating sheet (25), the heat insulating sheet ( 25) socketed to the output shaft of the power element (22), and the heat shield (25) is disposed between the crank (41) and the body of the power element (22) .
The lithography machine safety shutter device of claim 2, wherein the actuator (30) comprises:

a shaft seat (31) connected to the casing (10);

a rotating shaft (32) penetrating the shaft seat (31) and being sleeved with the rocker (42); and

The blade (33) is sleeve-connected to the rotating shaft (32).
A lithographic machine safety shutter device according to claim 10, said actuator (30) further comprising a damper (34) coupled to said shaft (32).
The lithography machine safety shutter device according to claim 11, wherein the actuator (30) further comprises a heat-resistant sheet (35), the heat-resisting sheet (35) is socket-connected to the rotating shaft (32), and The heat blocking sheet (35) is disposed between the rocker (42) and the shaft seat (31).