WO2019148895A1 - 一种机械手臂位置精度测量装置及方法 - Google Patents

一种机械手臂位置精度测量装置及方法 Download PDF

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Publication number
WO2019148895A1
WO2019148895A1 PCT/CN2018/111075 CN2018111075W WO2019148895A1 WO 2019148895 A1 WO2019148895 A1 WO 2019148895A1 CN 2018111075 W CN2018111075 W CN 2018111075W WO 2019148895 A1 WO2019148895 A1 WO 2019148895A1
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Prior art keywords
fixed
azimuth
mechanical arm
pitch angle
turntable
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PCT/CN2018/111075
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English (en)
French (fr)
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范光照
娄志峰
田雨辰
徐良
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大连理工大学
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Publication of WO2019148895A1 publication Critical patent/WO2019148895A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0095—Means or methods for testing manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/045—Polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant

Definitions

  • the invention belongs to the field of mechanical arm dynamic track accuracy calibration, and relates to a mechanical arm measuring device and method.
  • the robotic arm In machines with motion coordinate systems, the robotic arm is the only automated mechanism that can quickly perform three-dimensional motion. However, due to too many joints in the robotic arm, a large number of errors are accumulated and transmitted, resulting in a generally low precision of the robot arm. At present, the correction of the spatial position accuracy of the robot arm is based on the five-point position method on the inclined surface specified in the international standard ISO9283 "Performance Standards and Testing Methods for Operational Industrial Robots", but the real-time detection of the accuracy of the robot arm cannot be realized. make up.
  • the robotic arm accuracy measuring device that exists today is mainly a laser tracker, and the laser tracker is expensive.
  • the present invention provides a mechanical arm position accuracy measuring device and method, which are used for measuring by using two mutually orthogonal turrets and a radial telescopic mechanism passing through two rotation centers.
  • Dynamic trajectory error of the robot arm A precision standard steel ball fixed at the end of the radial expansion mechanism is attached to the magnetic ball seat fixed at the end of the mechanical arm, and the spatial position coordinates (X, Y, Z) of the arm end point can be obtained from the steel ball on the three-dimensional spherical coordinate mechanism.
  • the coordinates (R, ⁇ , ⁇ ) are obtained by coordinate transformation, and the position error of the end point of the robot arm is obtained by subtracting the coordinate position from the motion command position of the robot arm.
  • the rotating table includes two angles of azimuth ( ⁇ ) and pitch ( ⁇ ), each of which is provided by a precise rotary encoder; the radial telescopic rod is composed of a multi-section rail slider mechanism, and the radial length information can be laser erected thereon Interferometer available.
  • the azimuth, elevation and radial length are integrated to form a three-dimensional spherical coordinate system.
  • the accuracy of the spherical coordinate mechanism is higher than that of the robot arm, which can be used to measure the spatial dynamic trajectory accuracy of the robot arm.
  • a mechanical arm position accuracy measuring device comprises a mutually orthogonal azimuth turret and a pitch angle turret, each turret is provided with an angle encoder to read an actual angle; a radial expansion mechanism fixed to the pitch turret, the telescopic mechanism
  • the utility model comprises two or more slide rails and a traction plate which rotate the center point through the two turntables, the tail end of the traction plate is fixed with a standard steel ball; the laser interferometer at the fixed end of the radial telescopic mechanism is further arranged, and the free end of the telescopic mechanism is fixed. Corner cube prism for reading the actual length of the radial expansion mechanism.
  • the azimuth turret is placed on the ground to provide a coordinate system (X, Y, Z) of the three-dimensional spherical coordinate mechanism.
  • the origin is set at the intersection of the center line of the azimuth turret and the ground, and the azimuth rotation axis of the azimuth turret is made around the Z axis.
  • the azimuth is provided by the azimuth encoder in the turntable
  • the pitch angle turntable is fixed above the azimuth rotation axis
  • the pitch angle axis and the azimuth rotation axis are orthogonal
  • the pitch angle is provided by the pitch angle encoder in the pitch angle turntable
  • the lower rail fixing bracket is fixed on the pitch angle rotating shaft, and is perpendicular to the pitch angle rotating shaft, and two or more stacking rails are fixed above the sliding rail fixing frame
  • the pulling plate is fixed on the slider of the upper rail, and the free end of the pulling board is fixed.
  • a cone prism the prism faces the intersection direction of the rotating shafts of the two turrets, and the intersection of the rotating shaft intersection of the two turrets and the center point of the corner cone prism forms a radial direction of the spherical coordinate system; on the pitch angle rotating shaft and opposite to the sliding rail fixing frame
  • the prism is measured by a laser interferometer along the distance of the traction plate on the slide rail; a standard ball fixing block is arranged at the tail end of the traction plate, and the standard steel ball is fixed on the standard ball fixing block in the radial direction through the connecting rod.
  • the radial telescopic rod can be driven to move passively along the azimuth ( ⁇ ) direction, the elevation angle ( ⁇ ) direction, and the radial (R) direction. This is the three-dimensional coordinate system. Principle of movement.
  • the laser interferometer and the corner cube are replaced by two sets of grating scales attached to the respective slide rails to provide length measurement of the radial expansion mechanism.
  • the magnetic sleeve is fixed on the gripper of the robot arm, and the magnetic sleeve strongly sucks the standard steel ball.
  • the three-dimensional spherical coordinate mechanism will passively follow. Movement; the dynamic position (R, ⁇ , ⁇ ) of the standard steel ball in the spherical coordinates is known by laser interferometer or grating scale, azimuth encoder and pitch encoder, and the three-dimensional spherical coordinate system (R, ⁇ , ⁇ ) The origin is the intersection O of the two turret shafts.
  • the relative distance between the O point and the reference coordinate system (X, Y, Z) is the Z distance h
  • the spatial position coordinates of the standard steel ball (X b , Y b , Z b Relative to the reference coordinate system can be known by the conversion formula, the formula is as follows:
  • the position coordinates (X b , Y b , Z b ) in the Cartesian coordinate system are obtained by the formula (1), and the spatial position error of the robot arm is obtained by comparing the coordinate position with the motion command position of the robot arm.
  • the beneficial effects of the present invention are that the mechanical arm position accuracy measuring device and method can perform real-time measurement of the mechanical arm error.
  • the device has portability, low cost, good practicability and easy product development.
  • FIG. 1 is a schematic view of a laser interferometric three-dimensional spherical coordinate mechanism of the present invention; (a) an overall view; (b) a partial enlarged view of a standard steel ball portion;
  • Figure 2 The coordinates of the steel ball on the three-dimensional spherical coordinate system are (X b , Y b , Z b );
  • Figure 3 is a schematic view of the three-dimensional spherical coordinate mechanism driven by the mechanical arm
  • 1 laser interferometer 1 pitch angle shaft; 3 pitch angle encoder; 4 lower rail mounting bracket; 5 rails (two); 6 traction plate; 7 angle cube prism; 8 standard ball fixed block; Ball; 10 laser interferometer mount; 11 azimuth axis; 12 azimuth encoder; 13 azimuth turntable; 14 pitch angle turntable; 15 magnetic sleeve;
  • the main structure of the innovative "passive three-dimensional spherical coordinate mechanism" is as follows: (1) two orthogonal turrets, including azimuth turret and pitch turret, each turret is equipped with an angle encoder to read the actual angle; (2) a radial expansion mechanism having two slide rails rotating through a center point of the two turrets and perpendicular to the pitch angle rotation shaft and a traction plate, the actual length of the telescopic mechanism being read by a laser interferometer fixed on the other side of the center of the turret .
  • the azimuth turret 13 is placed on the ground to provide a coordinate system (X, Y, Z) of the three-dimensional spherical coordinate mechanism, and the origin is set at the intersection of the center line of the over-azimuth turret and the ground, and the azimuth turret 13 azimuth shaft 11 about the Z-axis do 3600 rotated by the azimuth angle ⁇ azimuth turntable 12 in the encoder.
  • the pitch angle turntable 14 is fixed to the azimuth rotation axis 11, and the pitch angle rotation axis 2 and the rotation axis (Z axis) of the azimuth angle turntable 13 are orthogonal, and the pitch angle ⁇ is provided by the elevation angle encoder 3 in the pitch angle turntable 14.
  • the lower rail fixing frame 4 is fixed on the pitch angle rotating shaft 2, and is perpendicular to the pitch angle rotating shaft.
  • the sliding rails 5 are fixed on the sliding rail fixing frame 4, and a pulling plate 6 is fixed on the slider of the upper rail.
  • a corner cube 7 is mounted on the front end of the traction plate 6, and the prism faces the intersection direction of the rotation axes of the two turrets, and the intersection of the rotation axes of the two turrets and the center point of the corner cube 7 form a radial direction of the spherical coordinate system.
  • a laser interferometer mount 10 is fixed on the pitch angle shaft 2 and in the opposite direction of the lower rail mount 4, and a laser interferometer 1 is mounted thereon.
  • the optical axis of the laser interferometer is shot through the center hole of the pitch angle shaft 2
  • the distance of the corner cube 7 as the traction plate 6 telescopically moves on the two slide rails 5 can be measured by a laser interferometer.
  • a laser interferometer At the end of the traction plate 6, there is a standard ball fixing block 8, and a rod-shaped standard steel ball 9 is fixed on the fixing block 8 in the radial direction, so that when the steel ball is pulled in any direction, the radial telescopic rod can be driven along
  • the azimuth angle ⁇ direction, the pitch angle ⁇ direction, and the radial R direction are passive motions, which is the three-dimensional motion principle of the spherical coordinate mechanism.
  • a magnetic sleeve is needed to adsorb the standard steel ball.
  • the sleeve (15) with a magnet (16) inside is used to strongly absorb the standard.
  • the origin of the three-dimensional spherical coordinate system (R, ⁇ , ⁇ ) is the intersection O of the two turret rotation axes, and the relative distance between the O point and the reference coordinate system (X, Y, Z) is the Z-direction distance h.
  • the spatial position coordinates (X b , Y b , Z b ) of the standard steel ball can be known by the conversion formula with respect to the reference coordinate system, and the formula is as follows:
  • the magnetic sleeve when the "passive three-dimensional spherical coordinate mechanism" is used to measure the accuracy of the mechanical arm, the magnetic sleeve can be fixed on the gripper of the robot arm, and the magnetic sleeve strongly absorbs the standard steel ball, the standard steel. The ball is fastened to the telescopic mechanism.
  • the three-dimensional spherical coordinate mechanism When the instruction of the movement path of the robot arm is issued, the three-dimensional spherical coordinate mechanism will perform passive follow-up motion.
  • the dynamic position (R, ⁇ , ⁇ ) of the standard steel ball in the spherical coordinates can be known by the laser interferometer 1, the azimuth encoder 12 and the pitch angle encoder 3, and the position coordinates in the Cartesian coordinate system are obtained by the above formula.
  • the coordinate position of the robot arm is obtained by comparing the coordinate position with the motion command position of the robot arm. Since the "passive three-dimensional spherical coordinate mechanism" joint has less precision than the mechanical arm and has a high precision, it can be used to measure the spatial trajectory accuracy of the robot arm.
  • the above radial information is provided by a high-precision laser interferometer, and the optical scale can be attached to the guide rail, and each guide rail is read by a grating scale to read the movement information of the slider, and the reading values of the two optical scales can be combined.
  • the radial value of the standard steel ball can replace the laser interferometer in the radial measurement of the three-dimensional spherical coordinate mechanism because the linear precision of the optical scale is much higher than that of the mechanical arm, and the manufacturing cost is lower.
  • the "passive three-dimensional spherical coordinate mechanism" of the present invention does not have the same structural product and has novelty. Compared with traditional measurement, this innovation can quickly set up and measure quickly, in addition to high measurement accuracy, to fully meet the needs of users. Compared with other products of the same class, such as laser tracker, this innovation has the characteristics of simple structure, small number of parts and easy assembly, and has progressive and industrial utilization.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明属于机械手臂动态轨迹精度校准领域，提供了一种机械手臂位置精度测量装置及方法。采用两个相互正交的转台与一个通过两旋转中心的径向伸缩机构的方式，测量机械手臂的动态轨迹误差。利用固定于径向伸缩机构端点的一颗精密标准钢球吸附于固定在机械手臂端点的磁性球座上，手臂端点的空间位置坐标(X，Y，Z)由三维球坐标机构上的钢球坐标(R，θ，ϕ)经过坐标转换求得，将此坐标位置与机械手臂的运动指令位置进行相减即可得出机械手臂端点的位置误差。集方位角、俯仰角与径向长度于一体形成三维球坐标系统，该球坐标机构的精度高于机械手臂。该装置具有便携性、成本低、实用性好、产品易开发、能完成对机械手臂误差的实时测量。

Description

一种机械手臂位置精度测量装置及方法 技术领域
本发明属于机械手臂动态轨迹精度校准领域，涉及机械手臂测量装置及方法。
 背景技术
在具有运动坐标系统的机械中，机械手臂是唯一能够快速进行三维运动的自动化机构。但机械手臂由于关节太多,造成多项误差的累积与传递，致使机械手臂精度普遍不高。目前对于机械手臂的空间位置精度的矫正，是以国际标准ISO9283“操作型工业机器人性能标准和检测方法”中规定的斜面上五点位置法为准则，但不能实现对机械手臂精度的实时检测和补偿。现今所存在的机械手臂精度测量装置以激光跟踪仪为主，而激光跟踪仪价格昂贵。
 技术问题
为了克服现有技术中存在的问题，本发明提出了一种机械手臂位置精度测量装置及方法，采用两个相互正交的转台与一个通过两旋转中心的径向伸缩机构的方式，用于测量机械手臂的动态轨迹误差。利用固定于径向伸缩机构端点的一颗精密标准钢球吸附于固定在机械手臂端点的磁性球座上，手臂端点的空间位置坐标(X，Y，Z)可由三维球坐标机构上的钢球坐标(R，θ，ϕ)经过坐标转换求得，将此坐标位置与机械手臂的运动指令位置进行相减即可得出机械手臂端点的位置误差。旋转台包含方位(θ)与俯仰(ϕ)两角度，各由精密的旋转编码器提供转角信息；径向伸缩杆由多节导轨滑块机构构成，径向长度信息可由架设在其上的激光干涉仪提供。集方位角、俯仰角与径向长度于一体可形成一个三维球坐标系统。该球坐标机构的精度高于机械手臂，其可用于测量机械手臂的空间动态轨迹精度。
 技术解决方案
本发明的技术方案如下：
一种机械手臂位置精度测量装置，包括相互正交的方位角转台和俯仰角转台，每个转台附有角度编码器以读取实际角度；固定于俯仰角转台的径向伸缩机构，该伸缩机构包括通过两转台转动中心点的两支以上滑轨和一支牵引板，牵引板的尾端固定一个标准钢球；还包括位于径向伸缩机构固定端的激光干涉仪，以及固定在伸缩机构自由端的角锥棱镜，用于读取径向伸缩机构实际长度。
上述方位角转台放置于地面上，提供三维球坐标机构的坐标系(X，Y，Z)，原点设在方位角转台中心线与地面的交点处，方位角转台的方位角转轴绕Z轴做360 0旋转，方位角由转台内的方位角编码器提供，俯仰角转台固定于方位角转轴上方，俯仰角转轴和方位角转轴正交，俯仰角由俯仰角转台内的俯仰角编码器提供；下滑轨固定架固定于俯仰角转轴上，且与俯仰角转轴垂直，下滑轨固定架上方固定两支以上垒叠安装的滑轨，上导轨的滑块上固定牵引板，牵引板自由端固定角锥棱镜，该棱镜面向两转台的转轴交点方向，两转台的转轴交点和角锥棱镜中心点的连线形成球坐标系的径向；在俯仰角转轴上且相对于下滑轨固定架的另一侧固定激光干涉仪调整架，其上安装激光干涉仪，激光干涉仪的光轴通过俯仰角转轴的中心孔射向牵引板自由端的角锥棱镜，角锥棱镜随着牵引板在滑轨上伸缩移动的距离由激光干涉仪测得；在牵引板的尾端设有标准球固定块，标准钢球通过连杆沿径向方向固定于标准球固定块上。使在任意方向拉动钢球时，均可带动径向伸缩杆沿着方位角(θ)方向、俯仰角(ϕ)方向、以及径向(R)方向作被动运动，此为球坐标机构的三维运动原理。
进一步地，上述激光干涉仪和角锥棱镜由贴附于各滑轨处的两组光栅尺取代，提供径向伸缩机构的长度测量。
上述的机械手臂位置精度测量方法：将磁性套筒固定于机械手臂的握爪上，磁性套筒强力吸住标准钢球，当下达机械手臂运动轨迹的指令时，三维球坐标机构将做被动跟随运动；标准钢球在球坐标中的动态位置（R , θ , ϕ）由激光干涉仪或光栅尺、方位角编码器及俯仰角编码器得知，三维球坐标系(R,θ,ϕ)的原点为两转台转轴的交点O，此O点和参考坐标系(X,Y,Z)的原点相对距离为Z向距离h，标准钢球的空间位置坐标(X b,Y b,Z b)相对于参考坐标系可通过转换公式得知,公式如下:
Figure dest_path_image001
（1）
经公式（1）得在笛卡尔坐标系中的位置坐标(X b , Y b , Z b)，将此坐标位置与机械手臂的运动指令位置进行比对即得机械手臂的空间位置误差。
有益效果
本发明的有益效果为，该机械手臂位置精度测量装置及方法，可完成对机械手臂误差的实时测量。该装置具有便携性、成本低、实用性好、产品易开发。
 附图说明
图1本发明的激光干涉式三维球坐标机构示意图；(a)整体图，(b)标准钢球部局部放大图；
图2钢球在三维球坐标系统上的坐标为（X b，Y b，Z b）；
图3机械手臂带动三维球坐标机构示意图；
图中：1激光干涉仪；2俯仰角转轴；3俯仰角编码器；4下导轨固定架；5导轨(两支)； 6牵引板；7角锥棱镜；8标准球固定块；9标准钢球；10激光干涉仪调整架；11方位角转轴；12方位角编码器；13方位角转台；14俯仰角转台；15磁性套筒；16磁铁。
 本发明的实施方式
本创新“被动式三维球坐标机构”主要结构如下：（1）相互正交的两转台，其包括方位角转台和俯仰角转台，每个转台装有角度编码器以读取实际角度；（2）径向伸缩机构，其有通过两转台转动中心点且与俯仰角转轴垂直的两支滑轨与一支牵引板组成，伸缩机构的实际长度由固定在转台中心另一侧的激光干涉仪读取。以下详述各结构的运动方式：
如图1所示，方位角转台13放置于地面上，提供三维球坐标机构的坐标系(X，Y，Z)，原点设在过方位角转台中心线与地面的交点处，方位角转台13的方位角转轴11绕着Z轴做360 0旋转，方位角θ由转台内的方位角编码器12提供。俯仰角转台14固定于方位角转轴11上，俯仰角转轴2和方位角转台13的转轴(Z轴)正交，俯仰角ϕ由俯仰角转台14内的俯仰角编码器3提供。下滑轨固定架4固定在俯仰角转轴2上，且与俯仰角转轴垂直，下滑轨固定架4上方固定两支垒叠安装的滑轨5，上导轨的滑块上固定一支牵引板6，牵引板6前端安装一个角锥棱镜7，该棱镜面向两转台的转轴交点方向，两转台的转轴交点和角锥棱镜7中心点的连线形成球坐标系的径向。在俯仰角转轴2上且于下滑轨固定架4的反方向上固定一激光干涉仪调整架10，其上安装一台激光干涉仪1，激光干涉仪的光轴通过俯仰角转轴2的中心孔射向牵引板6前端的角锥棱镜7，角锥棱镜7随着牵引板6在两支滑轨5上伸缩移动的距离可由激光干涉仪测得。在牵引板6的尾端有标准球固定块8，一颗有杆标准钢球9沿径向方向固定于固定块8上，使在任意方向拉动钢球时，均可带动径向伸缩杆沿着方位角θ方向、俯仰角ϕ方向、以及径向R方向作被动运动，此为球坐标机构的三维运动原理。在使用该“三维球坐标机构”时需要一个磁性套筒来吸附标准钢球，如图1右下方子图所示，由一个内部装有磁铁(16)的套筒(15)强力吸住标准钢球(9)，当磁性套筒被运动机构夹持并做空间运动时，标准钢球(9)将一直被吸住并在套筒内转动，但钢球球心在磁性套筒中的位置固定，所以只要知道标准钢球在“被动式三维球坐标机构”中的位置(R,θ,ϕ)，即可转换为笛卡尔坐标(X,Y,Z)。
如图2所示，三维球坐标系(R,θ,ϕ)的原点为两转台转轴的交点O，此O点和参考坐标系(X,Y,Z)的原点相对距离为Z向距离h，标准钢球的空间位置坐标(X b,Y b,Z b)相对于参考坐标系可通过转换公式得知,公式如下:
Figure 126075dest_path_image002
如图3所示，在采用该“被动式三维球坐标机构”对机械手臂进行精度测量时，可将磁性套筒固定于机械手臂的握爪上，磁性套筒强力吸住标准钢球，标准钢球又紧固于伸缩机构上，当下达机械手臂运动轨迹的指令时，三维球坐标机构将做被动跟随运动。标准钢球在球坐标中的动态位置（R,θ,ϕ）可由激光干涉仪1、方位角编码器12及俯仰角编码器3得知，经上述公式得在笛卡尔坐标系中的位置坐标(X b,Y b,Z b)，将此坐标位置与机械手臂的运动指令位置进行比对即得机械手臂的空间位置误差。由于该“被动式三维球坐标机构”关节比机械手臂少，精度一定较高，故可用来测量机械手臂的空间轨迹精度。
上述的径向信息由高精度的激光干涉仪提供，也可采用将光学尺贴附于导轨上，每支导轨由一光栅尺读取滑块的移动信息，结合两个光学尺的读值可得标准钢球的径向值，由于光学尺的线性精度远高于机械手臂，故可取代激光干涉仪在三维球坐标机构的径向测量，而且制造成本更低。
本发明“被动式三维球坐标机构”尚未有相同结构产品，具有新颖性。该创新相对于传统测量来说，除了具有较高的测量精度外，还可快速架设、快速测量，充分满足使用者的需求。与同级其他产品相比，如激光跟踪仪，本创新具有结构简单、零件数目少、易装配等特点，具有进步性及产业利用性。

Claims (4)

  1. 一种机械手臂位置精度测量装置，其特征在于，包括相互正交的方位角转台和俯仰角转台，每个转台附有角度编码器以读取实际角度；固定于俯仰角转台的径向伸缩机构，该伸缩机构包括通过两转台转动中心点的两支以上滑轨和一支牵引板，牵引板的尾端固定一个标准钢球；还包括位于径向伸缩机构固定端的激光干涉仪，以及固定在伸缩机构自由端的角锥棱镜，用于读取径向伸缩机构实际长度。
  2. 根据权利要求1所述的机械手臂位置精度测量装置，其特征在于，方位角转台放置于地面上，提供三维球坐标机构的坐标系(X，Y，Z)，原点设在方位角转台中心线与地面的交点处，方位角转台的方位角转轴绕Z轴做360 0旋转，方位角由转台内的方位角编码器提供，俯仰角转台固定于方位角转轴上方，俯仰角转轴和方位角转轴正交，俯仰角由俯仰角转台内的俯仰角编码器提供；下滑轨固定架固定于俯仰角转轴上，且与俯仰角转轴垂直，下滑轨固定架上方固定两支以上垒叠安装的滑轨，上导轨的滑块上固定牵引板，牵引板自由端固定角锥棱镜，该棱镜面向两转台的转轴交点方向，两转台的转轴交点和角锥棱镜中心点的连线形成球坐标系的径向；在俯仰角转轴上且相对于下滑轨固定架的另一侧固定激光干涉仪调整架，其上安装激光干涉仪，激光干涉仪的光轴通过俯仰角转轴的中心孔射向牵引板自由端的角锥棱镜，角锥棱镜随着牵引板在滑轨上伸缩移动的距离由激光干涉仪测得；在牵引板的尾端设有标准球固定块，标准钢球通过连杆沿径向方向固定于标准球固定块上。
  3. 根据权利要求1或2所述的机械手臂位置精度测量装置，其特征在于，激光干涉仪和角锥棱镜由贴附于各滑轨处的两组光栅尺取代，提供径向伸缩机构的长度测量。
  4. 权利要求1或2或3所述的机械手臂位置精度测量方法，其特征在于，将磁性套筒固定于机械手臂的握爪上，磁性套筒强力吸住标准钢球，当下达机械手臂运动轨迹的指令时，三维球坐标机构将做被动跟随运动；标准钢球在球坐标中的动态位置（R , θ , ϕ）由激光干涉仪或光栅尺、方位角编码器及俯仰角编码器得知，三维球坐标系(R , θ , ϕ)的原点为两转台转轴的交点O，此O点和参考坐标系(X , Y , Z)的原点相对距离为Z向距离h，标准钢球的空间位置坐标(X b, Y b, Z b)相对于参考坐标系可通过转换公式得知,公式如下:
                                                       
    Figure 176342dest_path_image002
    （1）
    经公式（1）得在笛卡尔坐标系中的位置坐标(X b , Y b , Z b)，将此坐标位置与机械手臂的运动指令位置进行比对即得机械手臂的空间位置误差。
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