WO2019138853A1

WO2019138853A1 - Inspection device

Info

Publication number: WO2019138853A1
Application number: PCT/JP2018/047412
Authority: WO
Inventors: 信治大岡; 剛宏津田; 服部　敏弘
Original assignee: 株式会社デンソー
Priority date: 2018-01-09
Filing date: 2018-12-24
Publication date: 2019-07-18
Also published as: JP2019120620A; JP6891819B2

Abstract

This inspection device comprises: a plurality of electrical contacts (51) that are electrically connected to an object to be measured by contacting the object to be measured; a plurality of gripping parts (31,32) to which the plurality of electrical contacts (51) are provided; a bridging part (70) that bridges the electrical contacts (51) provided to the plurality of gripping parts (31,32) so as to electrically connect the electrical contacts; and a noise countermeasure element (90) provided to the bridging part (70). The bridging part (70) is deformable corresponding to variations in the relative positions of the gripping parts (31,32) to which the plurality of electrical contacts (51) that are bridged are provided.

Description

Inspection device

Cross-reference to related applications

This application is based on Japanese Patent Application No. 2018-1451 filed on Jan. 9, 2018, the contents of which are incorporated herein by reference.

The present disclosure relates to an inspection apparatus.

As shown in Patent Document 1, there is known a bypass capacitor with a weight used for testing a chip. The chip is provided with a pad for pass control. The bypass capacitor unit with a weight has a capacitor and three terminals. The three terminals support the capacitor at three points. The three terminals are electrically connected to the pass-con pad by the weight of the bypass capacitor with a weight.

JP, 2011-7619, A

In the bypass capacitor unit with a weight shown in Patent Document 1, the shape and arrangement of the three terminals are fixed in order to support the capacitor while electrically connecting the capacitor and the pad for the bypass capacitor. Therefore, when the layout of the pass-con pad is changed, the shapes and the layouts of the three terminals must be changed accordingly. As described above, in the bypass capacitor unit with a weight (inspection apparatus), when the shape or arrangement of the measurement object is changed or the measurement object itself is changed, it is difficult to electrically connect to the measurement object.

An object of the present disclosure is to provide an inspection apparatus in which it is suppressed that electrical connection with a measurement object becomes difficult even if the shape and arrangement of the measurement object and the measurement object itself are changed. Do.

In order to achieve the above object, the inspection device according to one aspect of the present disclosure is provided with a plurality of electrical contacts electrically connected to the measurement object by contacting the measurement object, and a plurality of electrical contacts. And a bridge portion electrically connected while bridging the electrical contacts provided in the plurality of grip portions, and an anti-noise element provided in the bridge portion, the bridge portion comprising It is deformable corresponding to the variation of the relative position of the grips provided with the plurality of electrical contacts to be bridged.

Thus, the bridge portion can be deformed in response to the change in the relative position of the plurality of gripping portions. Therefore, even if the shape and arrangement of the measurement object and the measurement object itself are changed, the relative positions of the plurality of gripping portions can be changed accordingly. That is, the relative positions of the electrical contacts provided in the plurality of grips can be varied. As a result, it is suppressed that the electrical connection between the inspection apparatus and the measurement object becomes difficult.

Also, the plurality of electrical contacts are electrically connected by the bridge portion. And the noise countermeasure element is provided in this bridge | crosslinking part. According to this, even if the noise reduction element is not fixed to the measurement object, it is possible to verify the increase and decrease of the noise of the measurement object. Therefore, the noise verification time can be shortened.

The above object and other objects, features and advantages of the present disclosure will become more apparent from the following detailed description with reference to the attached drawings. The drawing is
It is a front view showing an inspection device concerning a 1st embodiment. It is a bottom view explaining the tip of an inspection device. It is a sectional view for explaining a grasping part. It is a fragmentary sectional view for explaining the connection state of a grasping part and a probe. It is a front view for demonstrating a bridge | crosslinking part. It is a bottom view for explaining a bridge part. It is a front view which shows the inspection apparatus concerning 2nd Embodiment. It is sectional drawing for demonstrating the connection state of a holding part and a connection part. It is a front view which shows the inspection apparatus concerning 3rd Embodiment. It is a top view for demonstrating a bridge | crosslinking part. It is an exploded front view of an inspection device. It is a front view which shows the modification of an inspection apparatus. It is a front view which shows the modification of an inspection apparatus. It is a front view which shows the modification of an inspection apparatus.

Hereinafter, embodiments of the present disclosure will be described based on the drawings.
First Embodiment
An inspection apparatus 10 according to the present embodiment will be described based on FIGS. 1 to 6. The inspection apparatus 10 is used in determining the design layout of the circuit board. The circuit board corresponds to the “measurement object”.

The circuit board has a wiring board and an electronic element provided on the wiring board. The wiring substrate has an insulating substrate and a wiring pattern formed on the insulating substrate. Through holes are formed in the insulating substrate. The leads of the electronic device are inserted into the through holes. Then, the leads and the wiring pattern are electrically and mechanically connected by solder or the like.

By mounting the electronic element on the wiring substrate as described above, the design layout of the circuit substrate is determined. When the circuit board is driven and current starts to flow, electromagnetic noise is generated. In order to suppress the generation of the electromagnetic noise, it is necessary to newly mount a circuit element such as a capacitor on the wiring board. That is, it is necessary to review the design layout of the circuit board. In order to verify the suppression of the generation of electromagnetic noise, this design layout change will be repeated as necessary.

The inspection apparatus 10 is used to suppress an increase in the number of steps involved in such a change in design layout. In the following, three directions which are orthogonal to each other will be referred to as x direction, y direction, and z direction.

An outline of the inspection apparatus will be described. As shown in FIG. 1, the inspection apparatus 10 includes a main body 30, a probe 50, and a bridge 70. Further, as shown in FIG. 5, the inspection apparatus 10 has a noise countermeasure element 90. The main body unit 30 is held by the user with a hand or the like. The main body 30 is shaped to be gripped by the user with one hand or both hands. A plurality of probes 50 are provided on the main body 30. The relative position of the plurality of probes 50 is changed by the operation of the main body 30 by the user. The tip of this probe 50 is in contact with the noise verification site on the circuit board.

As shown in FIG. 2, the cross-linking unit 70 cross-links the plurality of probes 50. The bridge portion 70 is elastically deformable in response to the change in the relative position of the plurality of probes 50. A noise countermeasure element 90 such as a capacitor is mounted on the bridge portion 70. The noise reduction element 90 is electrically connected to the plurality of probes 50 via the bridge portion 70.

When the two probes 50 are in contact with the noise verification site, a bypass path constituted by the two probes 50 and the bridge portion 70 is connected to the noise verification site. The noise countermeasure element 90 is electrically connected to the bypass path. For this purpose, a bypass circuit consisting of the bypass path and the noise reduction element 90 is connected in parallel to the noise verification site.

As described above, according to the inspection apparatus 10, bypass circuits can be connected in parallel to any noise verification site without changing the design layout of the circuit board. The user appropriately selects the connection of the inspection apparatus 10 to the circuit board, and the output of the circuit board is verified by a spectrum analyzer or the like each time. In this way, an increase in man-hours associated with a change in design layout is suppressed.

Of course, a plurality of inspection devices 10 are prepared, and the plurality of inspection devices 10 are brought into contact with the circuit board. By doing this, changes in design layout may be considered. Of course, the type of the noise reduction element 90 included in each of the plurality of inspection apparatuses 10 may be different. As the noise reduction element 90, in addition to a capacitor, passive elements such as a resistor, an inductor, and a common mode choke coil can be adopted.

Further, while the circuit board is being produced, the inspection apparatus 10 is connected to the wiring board as a substitute for the electronic element. By doing this, the design layout of the circuit board may be verified.

Next, the configuration of the inspection apparatus 10 will be described in detail. As shown in FIG. 1, the main body 30 of the inspection apparatus 10 has a first grip 31 and a second grip 32. The first grip portion 31 and the second grip portion 32 have a pillar shape extending in one direction. The user holds the first gripping portion 31 and the second gripping portion 32 with one hand or both hands, and operates so that the tips of the first gripping portion 31 and the second gripping portion 32 approach each other or that the tips separate each other Do. As a result, the separation distance between the tips of the first grip 31 and the second grip 32 fluctuates.

A probe 50 is provided at the tip of each of the first grip 31 and the second grip 32. The relative positions of the probes 50 of the first gripping unit 31 and the second gripping unit 32 are changed by the operations of the first gripping unit 31 and the second gripping unit 32 described above. As a result, the distance between the tips of the two probes 50 in contact with the circuit board changes.

The axial length of the first gripping portion 31 and the second gripping portion 32 and the radial length orthogonal to the axial direction are each determined to be a length suitable for the user to operate with one hand or both hands. Ru. The axial length of the first grip 31 and the second grip 32 is set to, for example, 120 mm to 200 mm. The radial lengths of the first grip portion 31 and the second grip portion 32 are set to, for example, 5 mm to 15 mm.

The first grip 31 and the second grip 32 have the same shape. Therefore, in the following, the description of the second grip portion 32 is omitted to avoid the description being complicated, and the first grip portion 31 will be mainly described. The axial direction in which the first grip 31 extends is simply referred to as the axial direction. The direction orthogonal to the axial direction is simply referred to as the radial direction.

As shown in FIG. 3, each of the first grip portion 31 and the second grip portion 32 has a support portion 33, a tip portion 34, and a restoring member 35. The forming material of the support portion 33 and the tip portion 34 is an insulating resin material. The support 33 and the tip 34 are separately manufactured by injection molding or the like. On the other hand, the restoration member 35 is manufactured by processing a metal material. The insulating resin material corresponds to the "insulating material".

The support 33 has a stem 36 and a lid 37. The shaft portion 36 has an axially extending columnar shape. The lid 37 has an axially facing shape. A recess 38 is formed on one end side of the shaft portion 36 from the end surface on one end side toward the other end side. The lid 37 is fixed to one end of the shaft 36 by fitting or the like in a manner of closing the opening of the recess 38. Thus, a space is formed by the recess 38 and the lid 37 on one end side of the shaft 36. Hereinafter, a space formed by the recess 38 and the lid 37 is referred to as a storage space.

The lid portion 37 is formed with insertion / removal holes 37c opened to the inner surface 37a on the concave portion 38 side and the outer surface 37b on the rear side thereof. The above-mentioned storage space communicates with the external space through the insertion and removal hole 37c. A part of the tip portion 34 is provided in the storage space and the insertion and removal hole 37c. The insertion and removal hole 37c is in the axial direction.

The tip portion 34 has an inner shaft 39, a restricting portion 40, and an outer shaft 41. Each of the inner shaft 39, the restriction 40, and the outer shaft 41 has a pillar shape extending in the axial direction. The inner shaft 39, the restricting portion 40, and the outer shaft 41 are arranged in order from the storage space toward the insertion and removal hole 37c. The inner shaft portion 39 and the outer shaft portion 41 are integrally connected via the restricting portion 40. The inner shaft portion 39 and the outer shaft portion 41 extend away from the restricting portion 40 in the axial direction.

Each of the inner shaft portion 39 and the restriction portion 40 is provided in the storage space. The connection portion side of the outer shaft portion 41 with the restriction portion 40 is provided in the insertion and removal hole 37 c. On the other hand, the side (tip end side) opposite to the connection portion of the outer shaft portion 41 with the restriction portion 40 is provided outside the storage space and the insertion and removal hole 37c.

As shown in FIG. 3, the length of the restricting portion 40 in the radial direction is longer than that of the insertion and removal hole 37 c. An outer end surface 40a of the restricting portion 40 on which the outer shaft portion 41 is formed and an inner surface 37a of the lid 37 are opposed in the axial direction. The contact between the outer end surface 40a of the restricting portion and the inner surface 37a of the lid 37 restricts the movement of the tip 34 from the inner surface 37a to the outer surface 37b in the axial direction. The falling of the tip end 34 from the insertion and removal hole 37c is restricted.

In the bottom surface 38a of the recess 38, a guide hole 42 which is locally recessed so as to be away from the insertion and removal hole 37c in the axial direction is formed. The side (tip side) opposite to the connecting portion of the inner shaft portion 39 with the restricting portion 40 is inserted into the guide hole 42. The radial length of the inner shaft portion 39 is slightly shorter than the radial length of the guide hole 42. The radial movement of the inner shaft 39 is restricted by the contact between the tip of the inner shaft 39 and the wall surface defining the guide hole 42 in the radial direction. The axial contact between the tip of the inner shaft 39 and the wall defining the guide hole 42 restricts the movement of the tip 34 from the outer surface 37 b to the inner surface 37 a in the axial direction. It is regulated that all the tip portions 34 are stored in the storage space.

The restoring member 35 is a spring wound in a helical shape in the axial direction. The inner shaft 39 is inserted into the hollow of the restoring member 35. As shown in FIG. 3, in a state where the outer end surface 40 a of the restricting portion 40 is in contact with the inner surface 37 a of the lid 37, one end of the restoring member 35 is an inner end surface 40 b formed with the inner shaft 39 in the restricting portion 40. It is in contact. The other end opposite to one end of the restoring member 35 is in contact with the bottom surface 38 a of the recess 38 where the guide hole 42 is open. The restoration member 35 is contracted between the inner end surface 40b and the bottom surface 38a. Therefore, in this contact state, the restoring member 35 generates a restoring force along the direction away from itself in the axial direction. The contact between the restricting portion 40 and the lid portion 37 is maintained by this restoring force. That is, the position of the tip 34 with respect to the support 33 is defined.

When the pressure from the outer surface 37 b toward the inner surface 37 a is applied to the outer shaft portion 41, the restoring member 35 elastically deforms so as to contract along the axial direction. Thereby, the outer shaft portion 41 moves toward the inside of the storage space. The restricting portion 40 moves away from the lid 37. When the application of the pressure from the outer surface 37 b toward the inner surface 37 a to the outer shaft portion 41 is released, the restoring member 35 elastically deforms so as to return to the original state. Thus, the outer shaft portion 41 moves toward the outside of the storage space. The regulating unit 40 approaches the lid 37. As described above, the application of the pressure along the axial direction to the outer shaft portion 41 allows the outer shaft portion 41 to move in the axial direction so as to be inserted into and removed from the storage space. The axial direction corresponds to the "extension direction".

The probe 50 is made of a conductive metal material such as brass. The probe 50 has an electrical contact 51 and a washer 52. The electrical contacts 51 have an axially extending shape. The washer 52 has an axially facing shape. One of the two ends (tip) of the electrical contact 51 is sharpened. The washer 52 is integrally connected to the other of the two ends of the electrical contact 51. The radial length of the electrical contact 51 is set to several mm.

As shown in FIGS. 3 and 4, a notch 43 for fixing the washer 52 is formed at the tip of the outer shaft portion 41. The notch 43 is open in the radial direction. The notch 43 is also open in the axial direction. The washer 52 is pressed into the notch 43 in the radial direction. Thus, the probe 50 is fixed to the outer shaft portion 41. The tip of the electrical contact 51 protrudes out of the axial opening of the notch 43.

The tip of this electrical contact 51 is in contact with the noise verification site on the circuit board. The contact with the circuit board applies a force to the electrical contact 51 toward the storage space of the support 33. Thereby, the restoring member 35 is contracted along the axial direction between the tip 34 and the support 33. A restoring force toward the circuit board is applied from the restoring member 35 to the electrical contact 51. The tip of the electrical contact 51 is pressed against the circuit board by this restoring force. Thereby, the contact between the electrical contact 51 and the circuit board is secured. The electrical connection between the electrical contact 51 and the circuit board is stabilized.

The bridging portion 70 electrically connects the probe 50 of the first grip portion 31 and the probe 50 of the second grip portion 32. As shown in FIGS. 5 and 6, the bridge portion 70 includes a flexible substrate 71, a first wiring substrate 72, and a second wiring substrate 73.

The flexible substrate 71 has flexibility. The flexible substrate 71 is a flexible substrate. The flexible substrate 71 has a first wiring pattern 75. As shown in FIG. 6, the flexible substrate 71 has a shape extending in the x direction. The center of the flexible substrate 71 is curved so as to be convex in the z direction. Therefore, the flexible substrate 71 is easily elastically deformed in the x direction. The first wiring board 72 is connected to one end of the flexible board 71. The second wiring substrate 73 is connected to the other end of the flexible substrate 71.

Each of the first wiring board 72 and the second wiring board 73 is formed of a material harder than the flexible board 71. The first wiring substrate 72 and the second wiring substrate 73 are glass epoxy substrates. Each of the first wiring board 72 and the second wiring board 73 has a second wiring pattern 76. The second wiring pattern 76 is electrically connected to the first wiring pattern 75 through solder or the like.

Each of the first wiring board 72 and the second wiring board 73 has a shape extending in the x direction. One end of each of the first wiring substrate 72 and the second wiring substrate 73 is connected to the flexible substrate 71. The other end of each of the first wiring substrate 72 and the second wiring substrate 73 is connected to the probe 50. The other ends of the first wiring board 72 and the second wiring board 73 are mechanically connected to the grip.

As shown in FIG. 6, an insertion hole 77 penetrating in the z direction is formed at the center of the other end of each of the first wiring board 72 and the second wiring board 73. The insertion hole 77 is opened in the upper surface 70 a facing the z direction of the first wiring substrate 72 and the second wiring substrate 73 and the lower surface 70 b opposite thereto. The tip of the electrical contact 51 is inserted into the insertion hole 77 from the upper surface 70a toward the lower surface 70b. As a result, the washer 52 of the probe 50 faces the upper surfaces 70 a of the first wiring board 72 and the second wiring board 73. Each of the first wiring board 72 and the second wiring board 73 is connected to the washer 52 of the probe 50 through solder or the like. Thus, the second wiring patterns 76 of the first wiring board 72 and the second wiring board 73 are electrically connected to the probe 50.

The other end of the first wiring board 72 provided with the probe 50 is press-fit into the notch 43 formed at the tip of the outer shaft portion 41 of the first grip portion 31 together with the washer 52 of the probe 50. As a result, the first wiring board 72 is mechanically connected to the first grip portion 31. Similarly, the other end of the second wiring substrate 73 provided with the probe 50 is press-fit into the notch 43 formed at the tip of the outer shaft portion 41 of the second grip portion 32 together with the washer 52 of the probe 50. Thus, the second wiring board 73 is mechanically connected to the second grip portion 32.

The first wiring board 72, the second wiring board 73, and the probes 50 are each outside by press-fitting the other ends of the first wiring board 72 and the second wiring board 73 described above and the notches 43 of the probe 50. Contact with shaft 41 However, the outer shaft portion 41 is made of an insulating resin material. Therefore, each of the first wiring board 72, the second wiring board 73, and the probe 50 is not electrically connected to the outer shaft portion 41, and is nonconductive.

The noise reduction element 90 is provided on the first wiring board 72. A part of the second wiring pattern 76 of the first wiring board 72 on which the noise countermeasure element 90 is provided is removed, and the electrical connection is broken. The noise reduction element 90 is fixed to the first wiring board 72 by solder so as to bridge and connect the second wiring pattern 76 whose electric connection is disconnected. One of two opposite electrodes constituting a capacitor as the noise reduction element 90 is electrically connected to one of the two disconnected second wiring patterns 76. The other of the two counter electrodes constituting the capacitor as the noise reduction element 90 is electrically connected to the other of the two disconnected second wiring patterns 76.

With the electrical connection configuration described above, the probe 50 fixed to the first grip 31 is electrically connected to the probe 50 fixed to the second grip 32 via the bridge 70 and the noise reduction element 90. It is done. This constitutes a bypass circuit.

As shown in FIG. 1, through holes are formed in the support portions 33 of the first grip portion 31 and the second grip portion 32 for passing a string. Specifically, the first through hole 37 d is formed in the lid 37 of the support 33. A second through hole 36a is formed at the other end of the shaft 36 opposite to the one end where the lid 37 is fitted.

The first string 44 is passed through the first through hole 37 d of the first grip portion 31 and the first through hole 37 d of the second grip portion 32. Further, the second string 45 is passed through the second through hole 36 a of the first grip portion 31 and the second through hole 36 a of the second grip portion 32. As a result, the first grip portion 31 and the second grip portion 32 are mechanically connected by the first string 44 and the second string 45.

The first string 44 is shorter than the second string 45. Therefore, when each of the first string 44 and the second string 45 is extended in an arc shape as shown in FIG. 1, the inspection apparatus 10 contacts the electrical contacts of the probes 50 of the first gripping portion 31 and the second gripping portion 32. Form an arc shape centered on the tip side of 51. Thus, the tip side of the electrical contact point 51 of the probe 50 provided in each of the first gripping portion 31 and the second gripping portion 32 is set as the center side of the arc which is a stationary point. Thereby, the maximum separation distance of the tip of the electrical contact point 51 of the probe 50 of each of the first grip portion 31 and the second grip portion 32 is defined. As a result, the elongation of the bridge portion 70 which bridges the probe 50 of the first grip portion 31 and the probe 50 of the second grip portion 32 is defined.

Next, a noise verification method using the inspection apparatus 10 will be outlined. First, the user prepares a plurality of inspection devices 10 having noise countermeasure elements 90 having different physical property values and characteristics. Then, the user selects one of the plurality of inspection devices 10 provided with the noise countermeasure element 90 used for noise verification. When attachment of the noise countermeasure element 90 to the inspection apparatus 10 is variable, the user may select the noise countermeasure element 90 used for noise verification and attach it to the inspection apparatus 10.

After selecting the inspection device 10, the user holds the main body portion 30 of the selected inspection device 10 and operates the main body portion 30 according to the noise verification portion of the circuit board. That is, the user holds the first grip 31 and the second grip 32 by hand, and the tips of the first grip 31 and the second grip 32 approach each other according to the shape and arrangement of the noise verification portion of the circuit board. Or operate away from each other. As a result, the user changes the relative distance between the tips of the electrical contacts 51 of the probes 50 provided on the first grip 31 and the second grip 32 respectively. The user presses the tip of the electrical contact 51 against the noise verification site. By doing this, the restoring member 35 of the grip portion is elastically deformed, and the restoring force of the restoring member 35 stabilizes the electrical connection between the electrical contact 51 and the noise verification part.

After stabilizing the electrical connection between the electrical contact 51 and the noise verification site, the user determines whether the electromagnetic noise included in the output of the circuit board has been reduced by a spectrum analyzer or the like. If the electromagnetic noise decreases below the user's desired value, the noise verification ends. In contrast to this, when the electromagnetic noise does not decrease below the desired value, the user changes the contact position between the inspection apparatus 10 and the circuit board. That is, the user changes the noise verification site.

After changing the noise verification site, the user again determines whether the electromagnetic noise included in the output of the circuit board has been reduced by a spectrum analyzer or the like. If the electromagnetic noise decreases below the desired value, the noise verification ends. Unlike this, when the electromagnetic noise is not reduced below the desired value, the user repeats the above process again. As described above, the reduction of the electromagnetic noise is verified by changing the selected inspection device 10 or changing the contact position of the inspection device 10 without changing the design layout of the circuit board.

Next, the operation and effect of the inspection apparatus 10 according to the present embodiment will be described. As described above, the inspection apparatus 10 has the main body 30 and the probe 50. The main body 30 has a first grip 31 and a second grip 32. A probe 50 is provided to each of the first gripping portion 31 and the second gripping portion 32. The probes 50 of the first grip 31 and the second grip 32 are electrically connected by the bridge 70. The bridge portion 70 includes a flexible substrate 71, a first wiring substrate 72, and a second wiring substrate 73. The flexible substrate 71 has flexibility.

As described above, by bending the flexible substrate 71, the relative position of each of the probes 50 of the first grip 31 and the second grip 32 can be changed. Therefore, even if the shape and arrangement of the circuit board and the circuit board itself as the object to be measured are changed, the relative positions of the probes 50 of the first gripping portion 31 and the second gripping portion 32 are changed accordingly. Can. As a result, it is suppressed that the electrical connection between the inspection apparatus 10 and the circuit board becomes difficult.

A bypass path is configured by the probe 50 fixed to the first grip portion 31, the bridging portion 70, and the probe 50 fixed to the second grip portion 32. The noise reduction element 90 is mounted on the bridge portion 70. This constitutes a bypass circuit. According to this, by connecting the probe 50 of the inspection apparatus 10 to the circuit board, a bypass circuit for noise verification can be electrically connected to the circuit board. As described above, even without changing the design layout of the circuit board, it is possible to verify the increase and decrease of the electromagnetic noise of the circuit board. Therefore, the noise verification time can be shortened.

The grip provided with the probe 50 has a support 33, a tip 34 and a restoring member 35. When a force toward the storage space of the support portion 33 is applied to the electrical contact 51 of the probe 50 by contact with the circuit board, a restoring force is generated from the restoring member 35 to the electrical contact 51 to the circuit board. .

According to this, the contact between the electrical contact 51 and the circuit board is secured by the restoring force of the restoring member 35. As a result, the electrical connection between the electrical contact 51 and the circuit board is stabilized.

The outer shaft portion 41 is made of an insulating resin material. Therefore, the outer shaft portion 41 and the probe 50 do not conduct. The first gripping portion 31 and the second gripping portion 32 are not electrically connected to the bypass circuit.

According to this, unlike the configuration in which the gripping portion and the bypass circuit are electrically connected, the impedance between the plurality of probes 50 electrically connected via the bridge portion 70 by the elastic deformation of the restoring member 35 Changes are suppressed. This suppresses the reduction in noise verification accuracy.

The first wiring board 72 and the second wiring board 73 which are harder than the flexible board 71 are connected to both ends of the flexible board 71 having flexibility. The noise reduction element 90 is mounted on the first wiring board 72.

According to this, it is suppressed that the connection between the noise countermeasure element 90 and the bridge portion 70 becomes unstable due to the deformation of the flexible substrate 71 due to the change of the relative position of the first grip portion 31 and the second grip portion 32. Ru.

The maximum separation of the electrical contacts 51 of the probes 50 of the first gripping portion 31 and the second gripping portion 32 by the connection of the first gripping portion 31 and the second gripping portion 32 via the first string 44 and the second string 45 The distance is defined. Thereby, the elongation of the bridge portion 70 is defined. Therefore, the separation of the first grip portion 31 and the second grip portion 32 prevents the bridge portion 70 from being damaged.
Second Embodiment
Next, a second embodiment of the present disclosure will be described based on FIGS. 7 and 8.

The inspection apparatus according to each embodiment described below has much in common with the inspection apparatus according to the first embodiment. Therefore, in the following, the description of the common parts will be omitted, and the different parts will be mainly described. The same reference numerals are given to the same elements as the elements shown in the first embodiment. In addition, the drawings shown in FIGS. 7 to 14 described below are slightly deformed as compared with FIGS. 1 to 6 described in the first embodiment.

In the first embodiment, an example is shown in which each of the bridge portion 70 and the probe 50 is pressed into the notch 43 formed in the outer shaft portion 41. On the other hand, the electrical contact 51 of the probe 50 of the present embodiment has a cylindrical shape having a bottom. As shown in FIG. 8, the tip of the outer shaft portion 41 is press-fit into the hollow of the electrical contact 51. Thus, the electrical contact 51 and the outer shaft portion 41 are mechanically connected. Further, the outer shaft portion 41 can be removed from the hollow of the electrical contact 51.

As described above, the electrical contact 51 can be attached to and detached from the grip portion. That is, the bridge portion 70 to which the electrical contact 51 is fixed and the noise countermeasure element 90 are detachably attachable to the grip portion.

According to this, it becomes easy to attach and detach the noise reduction element 90 having different physical property values and characteristics to the grip portion. Therefore, it is not necessary to prepare a plurality of inspection devices 10 for noise verification. That is, although a plurality of bridge portions 70 (inspection portions) to which the electrical contact 51 and the noise reduction element 90 are fixed must be prepared, the main body portion 30 (the first grip portion 31 and the second grip portion 32) It will be better if you prepare one.

The inspection apparatus 10 according to the present embodiment includes the same constituent elements as the inspection apparatus 10 described in the first embodiment. It goes without saying that the same effect can be achieved for that purpose. The same applies to each embodiment and modification described below. Therefore, the description is omitted.
Third Embodiment
Next, a third embodiment of the present disclosure will be described based on FIG. 9 to FIG.

In the second embodiment, an example in which the electrical contact 51 can be attached to and detached from the grip portion is shown. On the other hand, in the present embodiment, the wiring board of the bridging portion 70 is detachable from the holding portion.

As shown in FIG. 9, the probe 50 (electrical contact 51) of the present embodiment is connected to the lower surface 70b of each of the first wiring board 72 and the second wiring board 73 via solder or the like. The insertion holes 77 formed in the first wiring board 72 and the second wiring board 73 are closed on the lower surface 70 b side.

A second wiring pattern 76 is formed on each of the wall surface partitioning the insertion hole 77 and the upper surface 70a. The electrical contact 51 is electrically connected to the second wiring pattern 76.

As shown in FIG. 10, the flexible substrate 71 is connected to the upper surfaces 70a of the first wiring substrate 72 and the second wiring substrate 73 via solder or the like. Thus, the first wiring pattern 75 of the flexible substrate 71 and the second wiring patterns 76 of the first wiring substrate 72 and the second wiring substrate 73 are electrically connected.

The insertion hole 77 is open at the upper surface 70a. As shown by solid arrows in FIG. 11, the tip of the outer shaft portion 41 is press-fit into the insertion hole 77 from the opening of the upper surface 70 a of the insertion hole 77. Thereby, the bridge portion 70 and the outer shaft portion 41 are mechanically connected. Further, the outer shaft portion 41 can be removed from the insertion hole 77. Thus, as in the second embodiment, a plurality of inspection units must be prepared for noise verification, but it is sufficient to prepare one main unit 30.

As shown in FIG. 10, the wall surface partitioning the insertion hole 77 has a polygonal shape in a plane orthogonal to the z direction. Similarly, the tip of the outer shaft portion 41 pressed into the insertion hole 77 also has a polygonal shape. Thus, rotation of the outer shaft portion 41 in the circumferential direction around the z direction with respect to the insertion hole 77 is suppressed. As a result, the occurrence of twisting in the flexible substrate 71 is suppressed. The reduction of the life of the bridge portion 70 is suppressed. Such an effect is achieved if each of the wall surface defining the insertion hole 77 and the tip of the outer shaft portion 41 pressed into the insertion hole 77 has a non-circular shape.

The preferred embodiments of the present disclosure have been described above. However, the present disclosure is not limited to the above-described embodiments and can be variously modified and implemented without departing from the spirit of the present disclosure.

A first modification will be described. In each embodiment, the example in which the probe 50 and the tip part 34 are separate bodies is shown. However, for example, as shown in FIG. 12, a configuration may be adopted in which the probe 50 functions as the tip 34. In this case, the probe 50 is in contact with the restoring member 35, and is axially displaceable by the restoring force of the restoring member 35.

A second modification will be described. In each embodiment, the inspection apparatus 10 showed the example which has one noise countermeasure element 90. FIG. However, the number of the noise countermeasure elements 90 included in the inspection apparatus 10 is not limited to the above example, and a plurality of them can be adopted. For example, as shown in FIG. 13, the inspection apparatus 10 may have two anti-noise elements 90. According to this, even if one of the two noise countermeasure elements 90 has a short circuit failure, for example, a large current is suppressed from flowing to the bypass circuit at the time of noise verification.

A third modification will be described. In the first embodiment, an example in which the extension of the bridge portion 70 is defined by the connection of the first grip portion 31 and the second grip portion 32 through the first string 44 and the second string 45 is shown. On the other hand, for example, as shown in FIG. 14, the support portion 33 of each of the first grip portion 31 and the second grip portion 32 adopts a configuration in which the protruding portion 46 for defining the contraction of the bridging portion 70 is formed. You can also The protruding portions 46 are formed on the distal end side of the support portions 33 of the first grip portion 31 and the second grip portion 32 respectively. In the first grip portion 31, a protruding portion 46 protrudes from the support portion 33 of the first grip portion 31 toward the second grip portion 32. In the second grip portion 32, a protruding portion 46 protrudes from the support portion 33 of the second grip portion 32 toward the first grip portion 31. The shortest separation distance between the first gripping portion 31 and the second gripping portion 32 is defined by the contact between the projecting portion 46 of the first gripping portion 31 and the projecting portion 46 of the second gripping portion 32. Thereby, the contraction of the bridge portion 70 is defined. As a result, the occurrence of damage to the crosslinked portion 70 is suppressed.

Other modifications will be described. In each embodiment, the inspection apparatus 10 showed the example which has two holding parts. However, the inspection apparatus 10 may have three or more grips.

In each embodiment, an example in which a plurality of grips are mechanically connected via a string or the like has been shown. However, it is also possible to adopt a configuration in which the other end side of the shaft portion 36 of each gripping portion is integrally coupled so as to be elastically deformable or rotatably coupled by a ball joint or the like. Furthermore, it is also possible to adopt a configuration in which the plurality of gripping portions are mechanically connected only by the bridging portion 70.

Although the present disclosure has been described based on the examples, it is understood that the present disclosure is not limited to the examples and structures. The present disclosure also includes various modifications and variations within the equivalent range. In addition, various combinations and forms, and further, other combinations and forms including only one element, or more or less than these elements are also within the scope and the scope of the present disclosure.

Claims

A plurality of electrical contacts (51) electrically connected to the measurement object by contacting the measurement object;
A plurality of grips (31, 32) provided with a plurality of the electrical contacts;
A bridging portion (70) for bridging and electrically connecting the electrical contacts provided in the plurality of gripping portions;
And an anti-noise element (90) provided in the bridge portion;
The inspection apparatus according to claim 1, wherein the bridge portion is deformable in response to a change in the relative position of the holding portion provided with the plurality of electrical contacts to be bridged.
Each of the plurality of grips has a tip (34) provided with the electrical contact, a support (33) for supporting the tip, and a restoring force in a direction away from each other between the tip and the support. And a restoring member (35) for applying
The inspection apparatus according to claim 1, wherein the restoration member is elastically deformable in an extension direction of the tip end portion.
The inspection apparatus according to claim 2, wherein the grip portion is made of an insulating material, and the grip portion and the electrical contact are not conductive.
The bridge portion includes a flexible substrate (71) having flexibility, and a plurality of wiring substrates (72, 73) harder than the flexible substrate,
The inspection apparatus according to any one of claims 1 to 3, wherein the noise countermeasure element is provided on the wiring board.
An insertion hole (77) is formed in the wiring substrate,
The inspection apparatus according to claim 4, wherein the grip portion is attachable to and detachable from the insertion hole of the wiring board.
The electrical contact has a cylindrical shape with a bottom,
The inspection device according to any one of claims 1 to 4, wherein the grip portion is detachable with respect to the hollow of the electrical contact.