WO2019134064A1 - Système de mesure spectrale - Google Patents

Système de mesure spectrale Download PDF

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Publication number
WO2019134064A1
WO2019134064A1 PCT/CN2018/070006 CN2018070006W WO2019134064A1 WO 2019134064 A1 WO2019134064 A1 WO 2019134064A1 CN 2018070006 W CN2018070006 W CN 2018070006W WO 2019134064 A1 WO2019134064 A1 WO 2019134064A1
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WO
WIPO (PCT)
Prior art keywords
angle scanning
angle
raman
spectral
tested
Prior art date
Application number
PCT/CN2018/070006
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English (en)
Chinese (zh)
Inventor
牟涛涛
骆磊
黄晓庆
Original Assignee
深圳达闼科技控股有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳达闼科技控股有限公司 filed Critical 深圳达闼科技控股有限公司
Priority to CN201880000002.7A priority Critical patent/CN108323182A/zh
Priority to PCT/CN2018/070006 priority patent/WO2019134064A1/fr
Publication of WO2019134064A1 publication Critical patent/WO2019134064A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G01J2003/062—Scanning arrangements arrangements for order-selection motor-driven

Definitions

  • the present application relates to the field of spectrometry, and in particular to a spectrometry system.
  • the spectral measurement system can obtain the molecular structure information of the substance by obtaining the Raman scattering spectrum of the substance composition and content.
  • the current spectral measurement usually involves focusing a laser or other light source through a lens to a certain point, measuring the spectrum of the point, and analyzing the obtained spectrum to obtain the material composition and content of the sample to be tested.
  • the inventors have found that at least the following problems exist in the prior art: when performing spectral measurement using an existing spectrometric measurement system, if it is necessary to perform surface measurement on the sample to be tested, one method needs to use a precise two-dimensional mobile station pair to be measured.
  • the sample is spatially displaced to achieve measurement of multiple points of the sample being tested, and the information of the plurality of points is used to construct the information of the surface.
  • spatial displacement of the sample to be tested requires the tester to manually focus to different positions each time to achieve measurement of multiple points and to construct basic information.
  • One technical problem to be solved by some embodiments of the present application is to provide a spectrum measuring system to solve the above technical problems.
  • One embodiment of the present application provides a spectrometric measurement system including: a spectrum detecting device, an angle scanning device, and a carrier mechanism for carrying a sample to be tested; the angle scanning device is connected to the spectrum detecting device for continuous The incident angle of the light incident by the spectrum detecting device is changed so that the emitted light is focused at different points on the surface of the sample to be tested.
  • the embodiment of the present application provides an angle scanning device on the spectrum detecting device, and uses the angle scanning device to continuously change the incident angle of the light incident by the spectrum detecting device, so that the emitted light is in the sample to be tested.
  • the different points of the surface are focused, so that when performing the spectral measurement operation, the spectral information of a plurality of points can be acquired by only one measurement, and the substance identification error caused by the uneven distribution of the surface material of the sample to be tested and the mixture can be effectively avoided.
  • the problem of inaccurate testing of the substance content ratio can also avoid the dangers caused by heat concentration and the adverse effects of measurement.
  • FIG. 1 is a schematic structural view of a spectrum measuring system according to a first embodiment of the present application
  • FIG. 2 is a schematic structural diagram of an angle scanning device in a spectrum measuring system according to a first embodiment of the present application
  • FIG. 3 is a schematic structural diagram of a spectrum measuring system according to a first embodiment of the present application.
  • FIG. 5 is a graph of a Lissajous diagram when the angle scanning mechanism in the spectrometry system of the first embodiment of the present application is a microelectromechanical system;
  • FIG. 6 is a graph of a Lissajous curve when the angle scanning mechanism is a MEMS system in the spectrum measuring system of the first embodiment of the present application;
  • FIG. 8 is a schematic structural view of a spectrum measuring system according to a second embodiment of the present application.
  • a first embodiment of the present application relates to a spectrometric measurement system that primarily includes a spectral detection device, an angle scanning device, and a carrier mechanism for carrying a sample to be tested.
  • the angle scanning device is connected to the spectrum detecting device for continuously changing the incident angle of the light incident by the spectrum detecting device, so that the emitted light is focused at different points on the surface of the sample to be tested.
  • 100 is a spectrum detecting device, specifically adopting a handheld space scanning Raman detecting spectrometer
  • 200 is an angle scanning device
  • 300 is a bearing mechanism for carrying a sample to be tested, specifically It can be a Raman enhancement chip or a normal glass slide.
  • the angle scanning device 200 provided in this embodiment includes at least one angle scanning mechanism, and the angle scanning mechanism includes a control unit and a light reflecting unit.
  • control unit in the angle scanning mechanism is mainly used to control the light reflecting unit to rotate in a preset direction according to a preset speed, and continuously change the incident angle of the light that the spectrum detecting device enters the light reflecting unit to make the emitted light. Focus at different points on the surface of the sample being tested.
  • the present embodiment provides an internal specific structure of the angle scanning device 200, as shown in FIG.
  • Two angle scanning mechanisms are respectively disposed in the angle scanning device 200 shown in FIG. 2, which are an angle scanning mechanism 201 and an angle scanning mechanism 202 respectively, and the bent arrows indicate the rotation direction of the angle scanning mechanism.
  • 2011 is a control unit in the angle scanning mechanism 201
  • 2012 is a light reflecting unit in the angle scanning mechanism 201
  • 2021 is a control unit within the angle scanning mechanism 202
  • 2022 is a light reflecting unit within the angle scanning mechanism 202.
  • FIG. 2 is only a schematic diagram of a specific structure, and does not limit the scope of protection of the present application. In practical applications, those skilled in the art may need to set a reasonable setting, and do not do here. limit.
  • Figure 3 shows a spectral measurement system of another structure in which the spectral detection device is specifically a microscopic Raman detection spectrometer.
  • the 100 shown in FIG. 3 is specifically the microscope head of the microscopic Raman detection spectrometer, specifically the eyepiece for observing the sample to be tested, 200 is an angle scanning device (the internal structure is shown in FIG. 2), 300 is used
  • the bearing mechanism for carrying the sample to be tested may specifically be a Raman enhancement chip or a common glass slide.
  • the angle scanning mechanism in this embodiment may specifically select a motor mirror or a micro-electromechanical system (MEMS), and in order to adjust the angle scan in real time according to the test requirements during the measurement process.
  • MEMS micro-electromechanical system
  • the angle of rotation and direction of the mechanism, the angle scanning device 200 can be electrically connected to the spectrum detecting device 100 by means of metal contacts, metal domes, metal pins, etc., thereby ensuring normal communication and power supply.
  • the sample to be tested can be scanned according to various plane scanning methods such as a conventional line scan and a rose line scan, thereby The scattering spectrum of the surface substance composition and content of the sample to be tested can be obtained, and then the molecular structure information of each substance in the sample to be tested is obtained by analyzing the spectrum.
  • the full-space scanning of the sample to be tested can also be realized by using the Lissajous figure method.
  • x and y are parametric variables
  • m and n are integers greater than 0
  • a and B are amplitudes
  • ⁇ is a dependent variable, which is between 0° and 360°.
  • the horizontal and vertical coordinates in FIGS. 4 to 7 represent the amplitudes A and B, respectively, and the amplitude ranges of the amplitudes A and B are both between [-1, 1].
  • the spectral measuring system provided in this embodiment further covers a housing outside the angle scanning mechanism (refer to 203 in the angle scanning mechanism shown in FIG. 3), and a positioning slot is opened in the housing 203. 2031.
  • the positioning groove 2031 is mainly used for inserting and fixing the bearing mechanism 300, and can expose the sample to be tested when the bearing mechanism 300 is fixed.
  • the angle scanning device 200 When performing the spectral measurement, the angle scanning device 200 is fixed on the microscope head of the hand-held spatial scanning Raman detecting spectrometer 100 shown in FIG. 1 or the micro-Raman detecting spectrometer shown in FIG. 3, and the sample to be tested is The liquid or powder is applied to the carrier mechanism 300, and then the carrier mechanism 300 is inserted into the positioning groove 2031, thereby realizing the fixed carrier mechanism 300.
  • the housing 203 of the angle scanning device 200 provided in this embodiment can also be disposed.
  • An eject button 2032 is generally disposed at the periphery of the notch of the positioning slot 2031, so that after the spectral measurement is completed, the tester can eject the carrier mechanism 300 from the positioning slot 2031 by pressing the eject button 2032.
  • the specific shape, structure, and setting position of the eject button 2032 for ejecting the carrying mechanism 300 from the positioning slot 2031 are not limited, and those skilled in the art can appropriately set according to the needs.
  • the size and position of the positioning slot 2031 are not limited herein.
  • the embodiment of the present invention does not limit the connection manner between the angle scanning device 200 and the spectrum detecting device, and those skilled in the art can set the angle scanning device 200 to be detachably connected to the spectrum detecting device according to actual needs. It can also be a non-removable connection, and there are no restrictions here.
  • the spectrometer used in this embodiment is mainly a Raman detection spectrometer, so that Raman spectroscopy can be realized.
  • those skilled in the art can select a suitable spectrometer according to the actual spectrum to be tested, and here is not Make restrictions.
  • the spectral measuring system provided in the embodiment provides an angle scanning device on the spectrum detecting device, and the angle scanning device is used to continuously change the incident angle of the light incident by the spectrum detecting device, so that the incident angle is emitted.
  • the light is focused at different points on the surface of the sample to be measured, so that when performing the spectral measurement operation, the spectral information of a plurality of points can be acquired by only one measurement, and the substance caused by the uneven distribution of the surface material of the sample to be tested can be effectively avoided.
  • the identification error and the proportion of the substance content in the mixture are not allowed to be tested, and the risk of heat concentration and the adverse effects of the measurement can be avoided.
  • a second embodiment of the present application relates to a spectrometric measurement system.
  • This embodiment is substantially the same as the first embodiment.
  • the main difference is that in the first embodiment, the Raman detection spectrometer is directly used as the spectrum detecting device, and the angle scanning device is directly connected to the Raman detecting spectrometer;
  • the Raman detection spectrometer and the Raman probe are combined as a spectroscopic detection device, the Raman detection spectrometer is directly connected to the Raman probe, and the angle scanning device is located in the Raman probe.
  • 100 is a Raman detection spectrometer
  • 200 is an angle scanning device
  • 300 is a carrier mechanism for carrying a sample to be tested, and may be a Raman enhancement chip or a common glass slide
  • 400 is a Raman probe
  • 500 is Laser.
  • the angle scanning device 200 in this embodiment is substantially the same as the angle scanning device 200 in the first embodiment.
  • Both the detection spectrometer 100 and the laser 500 are currently commonly used devices, and are not described herein again.
  • the role of the Raman probe 400 in the spectrometric measurement system will be described below primarily in conjunction with FIG.
  • the Raman probe 400 is used to couple the laser 500 and the external optical path portion of the Raman detection spectrometer 100.
  • the angle scanning device 200 is mainly located in the collimating mirror inside the Raman probe 400 (the collimating mirror near the window in the Raman probe, that is, the second collimating mirror 403 in FIG. 8) and the dichroic color. Between slices 402.
  • the laser 500 may specifically be a fiber laser, and the laser signal emitted therefrom is converted into a parallel laser beam through the first collimating mirror 401.
  • the dichroic film 402 is obliquely disposed at an angle of 45 degrees, and after the parallel laser light is irradiated onto the dichroic color patch 402, it is reflected into the angle scanning device 200 at an angle of 45 degrees, and the light beam changed by the angle scanning device 200 is incident on the second surface.
  • the straight mirror 403 is placed on the sample to be tested on the carrier mechanism 300 through the window 404 to start spectral measurement.
  • the Raman signal generated by the sample to be tested is accompanied by the laser reflected light, passes through the second collimating mirror 403, filters out 99.9% of the interference, passes through the angle scanning device 200, is reflected to the dichroic color patch 402, and passes through the dichroic color.
  • the Raman signal light in the optical signal passing through the dichroic patch 402 passes through the first filter 4051 and the second filter 4052 in the filter set 405 in an unimpeded manner, thereby further filtering the laser signal. Drop it.
  • the filtered Raman signal light is focused by a focusing mirror 406 into a slit of the Raman detecting spectrometer 100 for use in the next spectroscopic measurement.
  • the filter selected in the Raman probe 400 is specifically a high-pass cut filter prepared by magnetron sputtering or plasma sputtering coating process, and in practical applications, the field The technicians can make reasonable selections as needed, and there are no restrictions here.
  • FIG. 8 is only a schematic view of the light emitted by the angle scanning device 200 after the angle is changed to focus on a certain surface of the sample to be tested.
  • the angle scanning device 200 during the first spectral measurement process.
  • the incident angle of the incident light and the exit angle of the emitted light are constantly changed, so that the emitted light is focused at different points on the surface of the sample to be measured, thereby acquiring spectral information of a plurality of points of the sample to be tested.
  • the angle scanning device 200 is disposed inside the Raman probe 400, so in order to ensure that the angle and direction of the angle scanning mechanism in the angle scanning device 200 meet the test requirements, the angle scan The device 200 can be electrically connected to the spectrum detecting device by using a cable, thereby ensuring normal communication and power supply.
  • the spectrometer used in this embodiment is mainly a Raman detection spectrometer, so that Raman spectroscopy can be realized.
  • those skilled in the art can select a suitable spectrometer according to the actual spectrum to be tested, and here is not Make restrictions.
  • the spectral measuring system provided in the embodiment can achieve the optical coupling efficiency and the portability of the Raman detecting spectrometer by using the Raman probe to fix the positioning mechanism and the Raman detecting spectrometer. .

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Abstract

L'invention concerne un système de mesure spectrale, comprenant : un dispositif de détection de spectre (100), un dispositif de balayage angulaire (200) et un mécanisme de support (300) pour porter un échantillon à tester ; le dispositif de balayage angulaire (200) est relié au dispositif de détection de spectre (100) pour modifier en continu l'angle d'incidence de la lumière incidente par le dispositif de détection de spectre (100), de telle sorte que la lumière émise est focalisée à différents points sur la surface de l'échantillon à tester. Avec le système de mesure spectrale, des informations spectrales d'une pluralité de points peuvent être obtenues en une mesure lors de la réalisation d'une mesure spectrale, et les problèmes selon lesquels l'erreur d'identification de substance est provoquée par une distribution irrégulière du matériau de surface de l'échantillon à tester et le test du rapport du contenu en substance dans le mélange est imprécis peuvent être efficacement résolus, et les dangers de concentration de chaleur et les effets néfastes de mesure peuvent être évités.
PCT/CN2018/070006 2018-01-02 2018-01-02 Système de mesure spectrale WO2019134064A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201880000002.7A CN108323182A (zh) 2018-01-02 2018-01-02 一种光谱测量系统
PCT/CN2018/070006 WO2019134064A1 (fr) 2018-01-02 2018-01-02 Système de mesure spectrale

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PCT/CN2018/070006 WO2019134064A1 (fr) 2018-01-02 2018-01-02 Système de mesure spectrale

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CN110208196A (zh) * 2019-05-17 2019-09-06 北京云端光科技术有限公司 检测方法和装置，光谱检测设备及存储介质

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103134788A (zh) * 2011-11-25 2013-06-05 佳能株式会社 受激拉曼散射测量装置
US8848181B1 (en) * 2013-04-12 2014-09-30 Zeta Instruments, Inc. Multi-surface scattered radiation differentiation
CN105866100A (zh) * 2016-05-16 2016-08-17 浙江医药高等专科学校 拉曼光谱检测光路装置及其检测方法
CN106404794A (zh) * 2016-10-17 2017-02-15 中国科学院上海光学精密机械研究所 一种大口径材料表面散射的高速测量装置和方法
CN106645083A (zh) * 2016-11-18 2017-05-10 吉林大学 一种可变激发角的集成化等离子体增强拉曼光谱检测装置
CN206270249U (zh) * 2016-11-18 2017-06-20 吉林大学 一种可变激发角的集成化等离子体增强拉曼光谱检测装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3629595A (en) * 1970-03-11 1971-12-21 Barry Wehmiller Co Transparent container inspection apparatus
CN100457020C (zh) * 2003-06-23 2009-02-04 微视公司 扫描内窥镜
US7852475B2 (en) * 2007-08-13 2010-12-14 Jds Uniphase Corporation Scanning spectrometer with multiple photodetectors
CN101464191A (zh) * 2008-12-03 2009-06-24 江苏惠通集团有限责任公司 一种基于步进电机的微型光谱仪
CN201514381U (zh) * 2009-10-22 2010-06-23 公安部第三研究所 带表面增强取样器的激光拉曼光谱仪
CN102175316B (zh) * 2011-01-19 2012-07-18 天津大学 一种x-y振镜扫描式超光谱图数据采集方法
CN102313729B (zh) * 2011-07-29 2013-05-15 北京华泰诺安科技有限公司 一种便携式拉曼光谱仪
CN102359949A (zh) * 2011-09-20 2012-02-22 重庆大学 一种基于mems扫描微镜的高分辨率微型红外光谱仪
JP6033000B2 (ja) * 2011-12-20 2016-11-30 オリンパス株式会社 走査型内視鏡
JP5632060B1 (ja) * 2013-10-07 2014-11-26 佐鳥　新 ハイパースペクトルカメラおよびハイパースペクトルカメラ用プログラム
CN106073715B (zh) * 2016-06-27 2020-03-24 南京航空航天大学 一种红光静脉增强显示装置和方法
CN107064104A (zh) * 2017-04-07 2017-08-18 江苏师范大学 一种便携式微型拉曼光谱仪非接触一体化采样装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103134788A (zh) * 2011-11-25 2013-06-05 佳能株式会社 受激拉曼散射测量装置
US8848181B1 (en) * 2013-04-12 2014-09-30 Zeta Instruments, Inc. Multi-surface scattered radiation differentiation
CN105866100A (zh) * 2016-05-16 2016-08-17 浙江医药高等专科学校 拉曼光谱检测光路装置及其检测方法
CN106404794A (zh) * 2016-10-17 2017-02-15 中国科学院上海光学精密机械研究所 一种大口径材料表面散射的高速测量装置和方法
CN106645083A (zh) * 2016-11-18 2017-05-10 吉林大学 一种可变激发角的集成化等离子体增强拉曼光谱检测装置
CN206270249U (zh) * 2016-11-18 2017-06-20 吉林大学 一种可变激发角的集成化等离子体增强拉曼光谱检测装置

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