WO2019129031A1 - 光学补偿膜、掩膜版以及曝光机 - Google Patents

光学补偿膜、掩膜版以及曝光机 Download PDF

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Publication number
WO2019129031A1
WO2019129031A1 PCT/CN2018/123805 CN2018123805W WO2019129031A1 WO 2019129031 A1 WO2019129031 A1 WO 2019129031A1 CN 2018123805 W CN2018123805 W CN 2018123805W WO 2019129031 A1 WO2019129031 A1 WO 2019129031A1
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WO
WIPO (PCT)
Prior art keywords
optical compensation
compensation film
region
light
teflon
Prior art date
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Ceased
Application number
PCT/CN2018/123805
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English (en)
French (fr)
Inventor
熊兴
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Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to US16/340,149 priority Critical patent/US10795256B2/en
Publication of WO2019129031A1 publication Critical patent/WO2019129031A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00788—Producing optical films

Definitions

  • the present invention relates to the field of display technologies, and in particular, to an optical compensation film, a mask, and an exposure machine.
  • Liquid crystal display has a dominant position in the display technology field due to its high color and low energy consumption.
  • an exposure machine is usually used to transfer the pattern on the mask onto the glass substrate.
  • Nikon exposure machine has been widely used due to its high precision and large adjustment range.
  • the Nikon exposure machine adopts a scanning exposure mode, and the light of the intensity E0' passes through a set of prisms 1 which are partially overlapped, and then strikes the surface of the substrate 2 to complete the exposure. Since the light intensity E1' emitted through the prism overlapping position 11 is smaller than the light intensity E2' emitted through the prism non-overlapping position 12, the exposure intensity of the substrate 2 is uneven, and the display performance of the LCD is lowered.
  • An object of the present invention is to provide an optical compensation film, a mask, and an exposure machine, which can uniformly expose the display panel and improve the display performance of the display panel.
  • An embodiment of the present invention provides an optical compensation film, which is applied to an exposure machine, the exposure machine includes a plurality of prisms, and two adjacent prism portions are partially overlapped to form an overlapping portion and a non-overlapping portion, and the optical compensation film
  • the method includes: a first area optical compensation film and a second area optical compensation film;
  • the first area optical compensation film is disposed opposite to the overlapping portion prism, and the first area optical compensation film is for transmitting light to the overlapping portion prism;
  • the second area optical compensation film is disposed opposite to the non-overlapping partial prism, and the second area optical compensation film is for transmitting light to the non-overlapping partial prism, wherein the light of the first area optical compensation film
  • the transmittance is greater than the light transmittance of the second region optical compensation film.
  • the constituent material of the second-region optical compensation film includes one or more of nitrocellulose, fibrin, and Teflon
  • the constituent materials of the first-region optical compensation film include nitrocellulose.
  • the second area optical compensation film has a thickness ranging from 0.5 to 3 um, and the first area optical compensation film is 0.2 to 1 um thicker than the second area optical compensation film.
  • the constituent material of the second-region optical compensation film comprises one or more of nitrocellulose, fibrous fat, and Teflon
  • the host material of the first-region optical compensation film includes nitrocellulose
  • the one or more of the cellulose, the fiber fat, and the Teflon, the doping material of the first region optical compensation film includes one or more of magnesium fluoride and a silicone hybrid film.
  • the doping material of the first region optical compensation film accounts for 0.05% to 0.5% of the host material.
  • the constituent material of the second-region optical compensation film comprises one or more of nitrocellulose, fibrous fat, and Teflon
  • the host material of the first-region optical compensation film includes nitrocellulose.
  • One or more of a pigment, a fibrous fat, and a Teflon, and the doping material of the second-region optical compensation film comprises a cellulose acetate lipid material.
  • the first area optical compensation film and the second area optical compensation film each include a light transmissive layer, and the second area further includes a light shielding layer, wherein the light shielding layer has a light transmittance smaller than the light transmission layer.
  • the constituent material of the light transmissive layer includes one or more of nitrocellulose, fibrous fat, and Teflon, and the constituent material of the light shielding layer includes a cellulose acetate lipid material.
  • the embodiment of the invention further provides a mask plate, the mask plate comprising a bearing portion, a light shielding film, a pillar and an optical compensation film;
  • the optical compensation film includes: a first area optical compensation film and a second area optical compensation film, the first area optical compensation film being disposed opposite to the overlapping portion prism, the first area optical compensation film being used for light Transmitting to the overlapping portion prism, the second region optical compensation film is disposed opposite to the non-overlapping portion prism, and the second region optical compensation film is for transmitting light to the non-overlapping portion prism, wherein The light transmittance of the first area optical compensation film is greater than the light transmittance of the second area optical compensation film;
  • the light shielding film is disposed on the carrying portion
  • the pillar is disposed on the light shielding film for supporting the optical compensation film.
  • the constituent material of the second-region optical compensation film includes one or more of nitrocellulose, fibrin, and Teflon
  • the constituent materials of the first-region optical compensation film include nitrocellulose.
  • the second area optical compensation film has a thickness ranging from 0.5 to 3 um, and the first area optical compensation film is 0.2 to 1 um thicker than the second area optical compensation film.
  • the constituent material of the second-region optical compensation film comprises one or more of nitrocellulose, fibrous fat, and Teflon
  • the host material of the first-region optical compensation film includes nitrocellulose
  • the one or more of the cellulose, the fiber fat, and the Teflon, the doping material of the first region optical compensation film includes one or more of magnesium fluoride and a silicone hybrid film.
  • the doping material of the first region optical compensation film accounts for 0.05% to 0.5% of the host material.
  • the constituent material of the second-region optical compensation film comprises one or more of nitrocellulose, fibrous fat, and Teflon
  • the host material of the first-region optical compensation film includes nitrocellulose.
  • One or more of a pigment, a fibrous fat, and a Teflon, and the doping material of the second-region optical compensation film comprises a cellulose acetate lipid material.
  • the first area optical compensation film and the second area optical compensation film each include a light transmissive layer, and the second area further includes a light shielding layer, wherein the light shielding layer has a light transmittance smaller than the light transmission layer.
  • the constituent material of the light transmissive layer includes one or more of nitrocellulose, fibrous fat, and Teflon, and the constituent material of the light shielding layer includes a cellulose acetate lipid material.
  • An embodiment of the present invention further provides an exposure machine comprising: a light source, a plurality of prisms, and an optical compensation film disposed between the light source and the plurality of prisms;
  • the optical compensation film includes a first area optical compensation film and a second area optical compensation film, the first area optical compensation film being disposed opposite to the overlapping portion prism, the first area optical compensation film for transmitting light To the overlapping portion prism, the second region optical compensation film is disposed opposite to the non-overlapping portion prism, and the second region optical compensation film is for transmitting light to the non-overlapping portion prism, wherein the a light transmittance of a region optical compensation film is greater than a light transmittance of the second region optical compensation film;
  • Two adjacent prism portions are arranged in an overlapping manner to form an overlapping portion prism and a non-overlapping portion prism;
  • the optical compensation film includes a first area optical compensation film and a second area optical compensation film;
  • the light source is configured to emit light to the optical compensation film, and the light is irradiated to the overlapping portion prism after passing through the first region optical compensation film; the light passes through the second region optical compensation film Irradiating to the non-overlapping portion of the prism.
  • the constituent material of the second-region optical compensation film includes one or more of nitrocellulose, fibrin, and Teflon
  • the constituent materials of the first-region optical compensation film include nitrocellulose.
  • the second area optical compensation film has a thickness ranging from 0.5 to 3 um, and the first area optical compensation film is 0.2 to 1 um thicker than the second area optical compensation film.
  • the constituent material of the second-region optical compensation film comprises one or more of nitrocellulose, fibrous fat, and Teflon
  • the host material of the first-region optical compensation film includes nitrocellulose
  • the one or more of the cellulose, the fiber fat, and the Teflon, the doping material of the first region optical compensation film includes one or more of magnesium fluoride and a silicone hybrid film.
  • the optical compensation film, the mask plate and the exposure machine of the embodiment of the invention have a light transmittance of the optical compensation film of the first region being greater than a light transmittance of the optical compensation film of the second region, wherein An area optical compensation film is disposed opposite to the overlapping portion prism, and the second area optical compensation film is disposed opposite to the non-overlapping portion prism, so that the intensity of light irradiated on the overlapping portion prism can be increased, thereby making the display panel uniform in intensity. Improve the display performance of the display panel.
  • FIG. 1 is a schematic view showing the working principle of a conventional exposure machine.
  • FIG. 2 is a schematic structural diagram of an exposure machine according to an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of an optical compensation film according to an embodiment of the present invention.
  • FIG. 4 is another schematic structural diagram of an optical compensation film according to an embodiment of the present invention.
  • FIG. 5 is another schematic structural diagram of an exposure machine according to an embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of a mask provided by an embodiment of the present invention.
  • references to "an embodiment” herein mean that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of the invention.
  • the appearances of the phrases in various places in the specification are not necessarily referring to the same embodiments, and are not exclusive or alternative embodiments that are mutually exclusive. Those skilled in the art will understand and implicitly understand that the embodiments described herein can be combined with other embodiments.
  • FIG. 2 is a schematic structural diagram of an exposure machine according to an embodiment of the present invention.
  • the exposure machine 3 includes a light source 31, a plurality of prisms 32, and an optical compensation film 33 disposed between the light source 31 and the plurality of prisms 32.
  • the adjacent two prisms 32 are partially overlapped to form an overlapping partial prism 321 and a non-overlapping partial prism 322.
  • the cross section of the prism in the embodiment may be a trapezoidal shape, a triangular shape, or the like, and is not specifically limited herein.
  • the optical compensation film 33 includes a first-region optical compensation film 331 and a second-region optical compensation film 332.
  • the first-region optical compensation film 331 is disposed opposite to the overlapping portion prism 321, and the second-region optical compensation film 332 is disposed opposite to the non-overlapping portion prism 322.
  • the light transmittance of the first area optical compensation film 331 is larger than the light transmittance of the second area optical compensation film 332.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon, and the constituent materials of the first-region optical compensation film 331 include nitrocellulose.
  • the fiber fat and the Teflon that is, the composition materials of the first-region optical compensation film 331 and the second-region optical compensation film 332 are the same. It should be noted that the thickness of the first-region optical compensation film 331 is smaller than the thickness of the second-region optical compensation film 332, that is, the light transmittance of the first-region optical compensation film 331 is greater than that of the second-region optical compensation film 332. rate.
  • the thickness of the second-region optical compensation film 332 is set to 0.5 to 3 ⁇ m, and the first-region optical compensation film 331 is made 0.2 to 1 ⁇ m thicker than the second-region optical compensation film 332.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • the doping material of the first-region optical compensation film 331 includes one or more of magnesium fluoride and a silicone hybrid film. Since the light transmittance of a dopant such as magnesium fluoride or a siloxane hybrid film is larger than that of a host material such as nitrocellulose, fibrin, or Teflon, magnesium fluoride is doped.
  • the light transmittance of the first region light compensation film 331 such as the siloxane hybrid film is also larger than that of the second region optical compensation film 332.
  • the doping material of the first-region optical compensation film 331 accounts for 0.05% to 0.5% of the host material.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • One or more of the fibrous fat and the Teflon, and the doping material of the second-region optical compensation film 332 includes a cellulose acetate lipid material. Since the light transmittance of the cellulose acetate-based doping material is smaller than that of the host material such as nitrocellulose, fibrin, and Teflon, the second-region optical compensation film doped with cellulose acetate is used. The light transmittance of the first region is smaller than that of the first region light compensation film 331, that is, the light transmittance of the first region light compensation film 331 is larger than that of the second region optical compensation film 332.
  • the first area optical compensation film 331 includes a light transmissive layer a
  • the second area optical compensation film 332 includes a light transmissive layer a
  • the second area 332 further includes a light shielding layer 3321, a light shielding layer.
  • the light transmittance of 3321 is smaller than that of the light transmitting layer a.
  • the constituent material of the light transmissive layer a comprises one or more of nitrocellulose, fibrin, and Teflon
  • the constituent material of the light shielding layer 3321 includes a cellulose acetate lipid material, and similarly, due to the cellulose acetate fat
  • the light transmittance of the like material is smaller than that of nitrocellulose, fibrin, and Teflon, and thus the light shielding layer 3321 can reduce the intensity of light that is irradiated to the non-overlapping prism 322.
  • the light source 31 is configured to emit light to the optical compensation film 33. After passing through the first-region optical compensation film 331, the light is irradiated to the overlapping portion prism 321; after passing through the second-region optical compensation film 332, the light is irradiated to the non-overlapping portion prism 322. . As shown in FIG. 2, the intensity of the light emitted from the light source 31 is E0, and after passing through the second-region optical compensation film 332, the intensity of the light irradiated to the non-overlapping portion prism 322 is E1. After passing through the first-region optical compensation film 331, the intensity of the light irradiated to the overlapping partial prisms 321 is E2.
  • the light transmittance of the first-region optical compensation film 331 is larger than that of the second-region optical compensation film 332, E2>E1.
  • the light passes through the overlapping portion prism 321 of the prism 32 and the non-overlapping portion prism 322, and light having an intensity of E3 is obtained.
  • Light of E3 intensity will illuminate the surface of the substrate to achieve uniform exposure intensity.
  • the exposure machine 3 further includes a carrier portion 34, a light shielding film 35, and a post 36.
  • the light-shielding film 35 is generally a chromium film which is coated on the carrier portion 34 for determining an exposed area.
  • the pillar 36 is disposed on the light shielding film 35 for supporting the optical compensation film 33.
  • An embodiment of the invention also provides an optical compensation film, as shown in Figures 3 and 4.
  • the optical compensation film 33 is applied to an exposure machine, that is, the optical compensation film 33 can be separately disposed from the exposure machine.
  • the exposure machine includes a plurality of prisms, and adjacent two prism portions are overlapped to form an overlapping portion and a non-overlapping portion.
  • the optical compensation film 3 includes a first area optical compensation film 331 and a second area optical compensation film 332.
  • the first-region optical compensation film 331 is disposed opposite to the overlapping portion prism for transmitting light to the overlapping portion prism.
  • the second area optical compensation film 332 is disposed opposite to the non-overlapping portion prism for transmitting light to the non-overlapping portion prism.
  • the light transmittance of the first area optical compensation film 331 is greater than the light transmittance of the second area optical compensation film 332.
  • the intensity of light irradiated onto the optical compensation film 33 is E0, and after passing through the second-region optical compensation film 332, the intensity of light irradiated to the non-overlapping partial prism 322 is E1.
  • the intensity of the light irradiated to the overlapping partial prisms 321 is E2. Since the light transmittance of the first-region optical compensation film 331 is larger than that of the second-region optical compensation film 332, E2>E1.
  • the light passes through the overlapping portion prism 321 of the prism 32 and the non-overlapping portion prism 322, and light having an intensity of E3 is obtained. Light of E3 intensity will illuminate the surface of the substrate to achieve uniform exposure intensity.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon, and the constituent materials of the first-region optical compensation film 331 include nitrocellulose.
  • the fiber fat and the Teflon that is, the composition materials of the first-region optical compensation film 331 and the second-region optical compensation film 332 are the same. It should be noted that the thickness of the first-region optical compensation film 331 is smaller than the thickness of the second region 332, that is, the light transmittance of the first-region optical compensation film 331 is larger than the light transmittance of the second-region optical compensation film 332.
  • the thickness of the second-region optical compensation film 332 can be set to 0.5 to 3 ⁇ m, and the first-region optical compensation film 331 is made thicker than the second region 332 by 0.2 to 1 ⁇ m.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • the doping material of the first-region optical compensation film 331 includes one or more of magnesium fluoride and a silicone hybrid film. Since the light transmittance of a dopant such as magnesium fluoride or a siloxane hybrid film is larger than that of a host material such as nitrocellulose, fibrin, or Teflon, magnesium fluoride is doped.
  • the light transmittance of the first region light compensation film 331 such as the siloxane hybrid film is also larger than that of the second region optical compensation film 332.
  • the doping material of the first-region optical compensation film 331 accounts for 0.05% to 0.5% of the host material.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • One or more of the fibrous fat and the Teflon, and the doping material of the second-region optical compensation film 332 includes a cellulose acetate lipid material. Since the light transmittance of the cellulose acetate-based doping material is smaller than that of the host material such as nitrocellulose, fibrin, and Teflon, the second-region optical compensation film doped with cellulose acetate is used. The light transmittance of the first region is smaller than that of the first region light compensation film 331, that is, the light transmittance of the first region light compensation film 331 is larger than that of the second region optical compensation film 332.
  • the first area optical compensation film 331 includes a light transmissive layer a
  • the second area optical compensation film 332 includes a light transmissive layer a
  • the second area 332 further includes a light shielding layer 3321, a light shielding layer.
  • the light transmittance of 3321 is smaller than that of the light transmitting layer a.
  • the constituent material of the light transmissive layer a includes one or more of nitrocellulose, fibrous fat, and Teflon, and the constituent material of the light shielding layer 3321 includes a cellulose acetate lipid material.
  • an embodiment of the present invention further provides a mask 4 including an optical compensation film 33 , a bearing portion 34 , a light shielding film 35 , and a pillar 36 .
  • the light-shielding film 35 is generally a chromium film which is coated on the carrier portion 34 for determining an exposed area.
  • the pillar 36 is disposed on the light shielding film 35 for supporting the optical compensation film 33. It should be noted that the mask 4 can be used independently of the exposure machine and can be mounted on the exposure machine when needed.
  • the optical compensation film 33 includes a first area optical compensation film 331 and a second area optical compensation film 332.
  • the first-region optical compensation film 331 is disposed opposite to the overlapping portion prism for transmitting light to the overlapping portion prism.
  • the second area optical compensation film 332 is disposed opposite to the non-overlapping portion prism for transmitting light to the non-overlapping portion prism.
  • the light transmittance of the first area optical compensation film 331 is greater than the light transmittance of the second area optical compensation film 332.
  • the intensity of light irradiated onto the optical compensation film 33 is E0, and after passing through the second-region optical compensation film 332, the intensity of light irradiated to the non-overlapping partial prism 322 is E1.
  • the intensity of the light irradiated to the overlapping partial prisms 321 is E2. Since the light transmittance of the first-region optical compensation film 331 is larger than that of the second-region optical compensation film 332, E2>E1.
  • the light passes through the overlapping portion prism 321 of the prism 32 and the non-overlapping portion prism 322, and light having an intensity of E3 is obtained. Light of E3 intensity will illuminate the surface of the substrate to achieve uniform exposure intensity.
  • optical compensation film 33 can be separately disposed from the exposure machine 3.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon, and the constituent materials of the first-region optical compensation film 331 include nitrocellulose.
  • the fiber fat and the Teflon that is, the composition materials of the first-region optical compensation film 331 and the second-region optical compensation film 332 are the same. It should be noted that the thickness of the first-region optical compensation film 331 is smaller than the thickness of the second region 332, that is, the light transmittance of the first-region optical compensation film 331 is larger than the light transmittance of the second-region optical compensation film 332.
  • the thickness of the second-region optical compensation film 332 can be set to 0.5 to 3 ⁇ m, and the first-region optical compensation film 331 is made thicker than the second region 332 by 0.2 to 1 ⁇ m.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • the doping material of the first-region optical compensation film 331 includes one or more of magnesium fluoride and a silicone hybrid film. Since the light transmittance of a dopant such as magnesium fluoride or a siloxane hybrid film is larger than that of a host material such as nitrocellulose, fibrin, or Teflon, magnesium fluoride is doped.
  • the light transmittance of the first region light compensation film 331 such as the siloxane hybrid film is also larger than that of the second region optical compensation film 332.
  • the doping material of the first-region optical compensation film 331 accounts for 0.05% to 0.5% of the host material.
  • the constituent material of the second-region optical compensation film 332 includes one or more of nitrocellulose, fibrin, and Teflon
  • the main material of the first-region optical compensation film 331 includes nitrocellulose.
  • One or more of the fibrous fat and the Teflon, and the doping material of the second-region optical compensation film 332 includes a cellulose acetate lipid material. Since the light transmittance of the cellulose acetate-based doping material is smaller than that of the host material such as nitrocellulose, fibrin, and Teflon, the second-region optical compensation film doped with cellulose acetate is used. The light transmittance of the first region is smaller than that of the first region light compensation film 331, that is, the light transmittance of the first region light compensation film 331 is larger than that of the second region optical compensation film 332.
  • the first area optical compensation film 331 includes a light transmissive layer a
  • the second area optical compensation film 332 includes a light transmissive layer a
  • the second area 332 further includes a light shielding layer 3321, a light shielding layer.
  • the light transmittance of 3321 is smaller than that of the light transmitting layer a.
  • the constituent material of the light transmissive layer a includes one or more of nitrocellulose, fibrous fat, and Teflon, and the constituent material of the light shielding layer 3321 includes a cellulose acetate lipid material.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Polarising Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laminated Bodies (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

一种光学补偿膜、掩膜版以及曝光机。光学补偿膜（33）包括第一区域光学补偿膜（331）和第二区域光学补偿膜（332）；第一区域光学补偿膜（331）与重叠部分棱镜（321）相对设置，将光透射到重叠部分棱镜（321）；第二区域光学补偿膜（332）与非重叠部分棱镜（322）相对设置，将光透射到非重叠部分棱镜（322），第一区域光学补偿膜（331）的光透过率大于第二区域光学补偿膜（332）的光透过率。

Description

光学补偿膜、掩膜版以及曝光机 技术领域
本发明涉及显示技术领域，特别是涉及一种光学补偿膜、掩膜版以及曝光机。
 背景技术
液晶显示面板（Liquid crystal display, LCD）由于具有色彩度高、能耗低等优势，而在显示技术领域中占据主流地位。
在LCD制作过程中，通常采用曝光机将掩膜版上的图案转印到玻璃基板上。其中Nikon曝光机以其精度高、调整幅度大的优势，得到广泛应用。
如图1所示，Nikon曝光机采用扫描时曝光模式，强度为E0’的光线经一组部分重叠设置的棱镜1后，射到基板2表面完成曝光。由于经棱镜重叠位置11射出的光线强度E1’小于经棱镜非重叠位置12射出的光线强度E2’，因此会导致基板2曝光强度不均匀，降低了LCD的显示性能。
 技术问题
本发明的目的在于提供一种光学补偿膜、掩膜版以及曝光机，可以使显示面板均匀曝光，提高显示面板的显示性能。
 技术解决方案
本发明实施例提供了一种光学补偿膜，应用于曝光机，所述曝光机包括多个棱镜，相邻两个所述棱镜部分重叠设置，形成重叠部分和非重叠部分，所述光学补偿膜包括：第一区域光学补偿膜和第二区域光学补偿膜；
所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜；
所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
在一些实施例中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
在一些实施例中，所述第一区域光学补偿膜的掺杂材料占所述主体材料的0.05%~0.5%。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第二区域光学补偿膜的掺杂材料包括醋酸纤维脂类材料。
在一些实施例中，所述第一区域光学补偿膜和第二区域光学补偿膜均包括透光层，所述第二区域还包括遮光层，所述遮光层的透光率小于所述透光层。
在一些实施例中，所述透光层的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述遮光层的组成材料包括醋酸纤维脂类材料。
本发明实施例还提供了一种掩膜版，所述掩膜版包括承载部、遮光膜、支柱以及光学补偿膜；
所述光学补偿膜包括：第一区域光学补偿膜和第二区域光学补偿膜，所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜，所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率；
所述遮光膜设置在所述承载部上；
所述支柱设置在所述遮光膜上，用于支撑所述光学补偿膜。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
在一些实施例中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
在一些实施例中，所述第一区域光学补偿膜的掺杂材料占所述主体材料的0.05%~0.5%。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第二区域光学补偿膜的掺杂材料包括醋酸纤维脂类材料。
在一些实施例中，所述第一区域光学补偿膜和第二区域光学补偿膜均包括透光层，所述第二区域还包括遮光层，所述遮光层的透光率小于所述透光层。
在一些实施例中，所述透光层的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述遮光层的组成材料包括醋酸纤维脂类材料。
本发明实施例还提供了一种曝光机，包括：光源、多个棱镜以及设置在所述光源和所述多个棱镜之间的光学补偿膜；
所述光学补偿膜包括第一区域光学补偿膜和第二区域光学补偿膜，所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜，所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率；
相邻两个所述棱镜部分重叠设置，形成重叠部分棱镜和非重叠部分棱镜；
所述光学补偿膜包括第一区域光学补偿膜和第二区域光学补偿膜；
所述光源，用于向所述光学补偿膜发射光，所述光经所述第一区域光学补偿膜后，照射到所述重叠部分棱镜；所述光经所述第二区域光学补偿膜后，照射到所述非重叠部分棱镜。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
在一些实施例中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
在一些实施例中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
 有益效果
相较于现有的，本发明实施例的光学补偿膜、掩膜版以及曝光机，通过使第一区域光学补偿膜的光透过率大于第二区域光学补偿膜光透过率，其中第一区域光学补偿膜与所述重叠部分棱镜相对设置，第二区域光学补偿膜与所述非重叠部分棱镜相对设置，可以提高照射在重叠部分棱镜的光的强度，从而使显示面板曝光强度均匀，提高了显示面板的显示性能。
 附图说明
为让本发明的上述内容能更明显易懂，下文特举优选实施例，并配合所附图式，作详细说明如下：
图1为现有的曝光机的工作原理示意图。
图2为本发明实施例提供的曝光机的结构示意图。
图3为本发明实施例提供的光学补偿膜的结构示意图。
图4为本发明实施例提供的光学补偿膜的另一结构示意图。
图5为本发明实施例提供的曝光机的另一结构示意图。
图6为本发明实施例提供的掩膜版的结构示意图。
 本发明的实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
在图中，结构相似的单元是以相同标号表示。
在本文中提及“实施例”意味着，结合实施例描述的特定特征、结构或特性可以包含在本发明的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例，也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是，本文所描述的实施例可以与其它实施例相结合。
请参照图2，图2为本发明实施例提供的曝光机的结构示意图。曝光机3包括光源31、多个棱镜32以及设置在该光源31、多个棱镜32之间的光学补偿膜33。
其中，在多个棱镜32中，相邻两个棱镜32部分重叠设置，形成重叠部分棱镜321和非重叠部分棱镜322。需要说明的是，在本实施例中棱镜的截面可以为梯形、三角形等形状，在此不做具体限定。
如图2或3所示，光学补偿膜33包括第一区域光学补偿膜331和第二区域光学补偿膜332。第一区域光学补偿膜331与重叠部分棱镜321相对设置，第二区域光学补偿膜332与非重叠部分棱镜322相对设置。其中，第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332光透过率。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，即第一区域光学补偿膜331和第二区域光学补偿膜332的组成材料相同。需要说明的是，第一区域光学补偿膜331的厚度小于第二区域光学补偿膜332的厚度，即第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332的光透过率。
优选的，可以将第二区域光学补偿膜332的厚度范围设置为0.5~3um，在此基础上，使第一区域光学补偿膜331比第二区域光学补偿膜332厚0.2~1um。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。由于氟化镁、硅氧烷杂化膜等掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率大，因此掺杂了氟化镁、硅氧烷杂化膜等的第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。优选的，第一区域光学补偿膜331的掺杂材料占主体材料的0.05%~0.5%。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第二区域光学补偿膜332的掺杂材料包括醋酸纤维脂类材料。由于醋酸纤维脂类掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率小，因此掺杂了醋酸纤维脂类的第二区域光学补偿膜332的光透过率也就小于第一区域光补偿膜331，即第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。
在一些实施例中，如图4所示，第一区域光学补偿膜331包括透光层a，第二区域光学补偿膜332包括透光层a，第二区域332还包括遮光层3321，遮光层3321的透光率小于透光层a。
优选的，透光层a的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，遮光层3321的组成材料包括醋酸纤维脂类材料，同理的，由于醋酸纤维脂类材料的光透过率比硝化纤维素、纤维脂、特氟龙小，因此遮光层3321可以减少照射到非重叠棱镜322的光的强度。
其中，光源31用于向光学补偿膜33发射光，光经第一区域光学补偿膜331后，照射到重叠部分棱镜321；光经第二区域光学补偿膜332后，照射到非重叠部分棱镜322。如图2所示，光源31发射的光的强度为E0，经第二区域光学补偿膜332后，照射到非重叠部分棱镜322的光的强度为E1。经第一区域光学补偿膜331后，照射到重叠部分棱镜321的光的强度为E2。由于第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332，因此E2>E1。光再经过棱镜32的重叠部分棱镜321和非重叠部分棱镜322后，得到强度均为E3的光。E3强度的光将照射到基板表面，从而达到均匀的曝光强度。
在一些实施例中，如图5所示，该曝光机3还包括承载部34、遮光膜35以及支柱36。其中遮光膜35一般为铬膜，其涂布在承载部34上，用于确定曝光区域。支柱36设置在遮光膜35上，用于支撑光学补偿膜33。
本发明实施例还提供了一种光学补偿膜，如图3和4所示。该光学补偿膜33应用于曝光机，即该光学补偿膜33可以脱离曝光机单独设置。曝光机包括多个棱镜，相邻两个棱镜部分重叠设置，形成重叠部分和非重叠部分。
光学补偿膜3包括：第一区域光学补偿膜331和第二区域光学补偿膜332。第一区域光学补偿膜331与重叠部分棱镜相对设置，用于将光透射到所述重叠部分棱镜。第二区域光学补偿膜332与非重叠部分棱镜相对设置，用于将光透射到所述非重叠部分棱镜。其中第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332光透过率。如图2所示，照射到光学补偿膜33上的光强为E0，经第二区域光学补偿膜332后，照射到非重叠部分棱镜322的光的强度为E1。经第一区域光学补偿膜331后，照射到重叠部分棱镜321的光的强度为E2。由于第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332，因此E2>E1。光再经过棱镜32的重叠部分棱镜321和非重叠部分棱镜322后，得到强度均为E3的光。E3强度的光将照射到基板表面，从而达到均匀的曝光强度。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，即第一区域光学补偿膜331和第二区域光学补偿膜332的组成材料相同。需要说明的是，第一区域光学补偿膜331的厚度小于第二区域332的厚度，即第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332的光透过率。
优选的，可以将第二区域光学补偿膜332的厚度范围设置为0.5~3um，在此基础上，使第一区域光学补偿膜331比第二区域332厚0.2~1um。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。由于氟化镁、硅氧烷杂化膜等掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率大，因此掺杂了氟化镁、硅氧烷杂化膜等的第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。优选的，第一区域光学补偿膜331的掺杂材料占主体材料的0.05%~0.5%。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第二区域光学补偿膜332的掺杂材料包括醋酸纤维脂类材料。由于醋酸纤维脂类掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率小，因此掺杂了醋酸纤维脂类的第二区域光学补偿膜332的光透过率也就小于第一区域光补偿膜331，即第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。
在一些实施例中，如图4所示，第一区域光学补偿膜331包括透光层a，第二区域光学补偿膜332包括透光层a，第二区域332还包括遮光层3321，遮光层3321的透光率小于透光层a。
优选的，透光层a的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，遮光层3321的组成材料包括醋酸纤维脂类材料。
如图6所示，本发明实施例还提供了一种掩膜版4，该掩膜版4包括光学补偿膜33、承载部34、遮光膜35以及支柱36。其中遮光膜35一般为铬膜，其涂布在承载部34上，用于确定曝光区域。支柱36设置在遮光膜35上，用于支撑光学补偿膜33。需要说明的是，该掩膜版4可以独立于曝光机存在，在需要时，安装于曝光机上使用。
如图3、4或6所示，光学补偿膜33包括：第一区域光学补偿膜331和第二区域光学补偿膜332。第一区域光学补偿膜331与重叠部分棱镜相对设置，用于将光透射到所述重叠部分棱镜。第二区域光学补偿膜332与非重叠部分棱镜相对设置，用于将光透射到所述非重叠部分棱镜。其中第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332光透过率。如图2所示，照射到光学补偿膜33上的光强为E0，经第二区域光学补偿膜332后，照射到非重叠部分棱镜322的光的强度为E1。经第一区域光学补偿膜331后，照射到重叠部分棱镜321的光的强度为E2。由于第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332，因此E2>E1。光再经过棱镜32的重叠部分棱镜321和非重叠部分棱镜322后，得到强度均为E3的光。E3强度的光将照射到基板表面，从而达到均匀的曝光强度。
需要说明的是，该光学补偿膜33可以脱离曝光机3单独设置。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，即第一区域光学补偿膜331和第二区域光学补偿膜332的组成材料相同。需要说明的是，第一区域光学补偿膜331的厚度小于第二区域332的厚度，即第一区域光学补偿膜331的光透过率大于第二区域光学补偿膜332的光透过率。
优选的，可以将第二区域光学补偿膜332的厚度范围设置为0.5~3um，在此基础上，使第一区域光学补偿膜331比第二区域332厚0.2~1um。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。由于氟化镁、硅氧烷杂化膜等掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率大，因此掺杂了氟化镁、硅氧烷杂化膜等的第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。优选的，第一区域光学补偿膜331的掺杂材料占主体材料的0.05%~0.5%。
在一些实施例中，第二区域光学补偿膜332的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第一区域光学补偿膜331的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，第二区域光学补偿膜332的掺杂材料包括醋酸纤维脂类材料。由于醋酸纤维脂类掺杂材料的光透过率，比硝化纤维素、纤维脂、特氟龙等主体材料的光透过率小，因此掺杂了醋酸纤维脂类的第二区域光学补偿膜332的光透过率也就小于第一区域光补偿膜331，即第一区域光补偿膜331的光透过率也就大于第二区域光学补偿膜332。
在一些实施例中，如图4所示，第一区域光学补偿膜331包括透光层a，第二区域光学补偿膜332包括透光层a，第二区域332还包括遮光层3321，遮光层3321的透光率小于透光层a。
优选的，透光层a的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，遮光层3321的组成材料包括醋酸纤维脂类材料。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。

Claims (20)

  1. 一种光学补偿膜，应用于曝光机，所述曝光机包括多个棱镜，相邻两个所述棱镜部分重叠设置，形成重叠部分和非重叠部分，其中，所述光学补偿膜包括：第一区域光学补偿膜和第二区域光学补偿膜；
    所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜；
    所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率。
  2. 根据权利要求1所述的光学补偿膜，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
  3. 根据权利要求2所述的光学补偿膜，其中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
  4. 根据权利要求1所述的光学补偿膜，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
  5. 根据权利要求4所述的光学补偿膜，其中，所述第一区域光学补偿膜的掺杂材料占所述主体材料的0.05%~0.5%。
  6. 根据权利要求1所述的光学补偿膜，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第二区域光学补偿膜的掺杂材料包括醋酸纤维脂类材料。
  7. 根据权利要求1所述的光学补偿膜，其中，所述第一区域光学补偿膜和第二区域光学补偿膜均包括透光层，所述第二区域还包括遮光层，所述遮光层的透光率小于所述透光层。
  8. 根据权利要求7所述的光学补偿膜，其中，所述透光层的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述遮光层的组成材料包括醋酸纤维脂类材料。
  9. 一种掩膜版，其中，所述掩膜版包括承载部、遮光膜、支柱以及光学补偿膜；
    所述光学补偿膜包括：第一区域光学补偿膜和第二区域光学补偿膜，所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜，所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率；
    所述遮光膜设置在所述承载部上；
    所述支柱设置在所述遮光膜上，用于支撑所述光学补偿膜。
  10. 根据权利要求9所述的掩膜版，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
  11. 根据权利要求10所述的掩膜版，其中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
  12. 根据权利要求9所述的掩膜版，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
  13. 根据权利要求12所述的掩膜版，其中，所述第一区域光学补偿膜的掺杂材料占所述主体材料的0.05%~0.5%。
  14. 根据权利要求9所述的掩膜版，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第二区域光学补偿膜的掺杂材料包括醋酸纤维脂类材料。
  15. 根据权利要求9所述的掩膜版，其中，所述第一区域光学补偿膜和第二区域光学补偿膜均包括透光层，所述第二区域还包括遮光层，所述遮光层的透光率小于所述透光层。
  16. 根据权利要求15所述的掩膜版，其中，所述透光层的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述遮光层的组成材料包括醋酸纤维脂类材料。
  17. 一种曝光机，其中，包括：光源、多个棱镜以及设置在所述光源和所述多个棱镜之间的光学补偿膜；
    相邻两个所述棱镜部分重叠设置，形成重叠部分棱镜和非重叠部分棱镜；
    所述光学补偿膜包括第一区域光学补偿膜和第二区域光学补偿膜，所述第一区域光学补偿膜与所述重叠部分棱镜相对设置，所述第一区域光学补偿膜用于将光透射到所述重叠部分棱镜，所述第二区域光学补偿膜与所述非重叠部分棱镜相对设置，所述第二区域光学补偿膜用于将光透射到所述非重叠部分棱镜，其中所述第一区域光学补偿膜的光透过率大于所述第二区域光学补偿膜的光透过率；
    所述光源，用于向所述光学补偿膜发射光，所述光经所述第一区域光学补偿膜后，照射到所述重叠部分棱镜；所述光经所述第二区域光学补偿膜后，照射到所述非重叠部分棱镜。
  18. 根据权利要求17所述的曝光机，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的厚度小于所述第二区域的厚度。
  19. 根据权利要求18所述的曝光机，其中，所述第二区域光学补偿膜的厚度范围为0.5~3um，所述第一区域光学补偿膜比所述第二区域光学补偿膜厚0.2~1um。
  20. 根据权利要求17所述的曝光机，其中，所述第二区域光学补偿膜的组成材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的主体材料包括硝化纤维素、纤维脂、特氟龙中的一种或多种，所述第一区域光学补偿膜的掺杂材料包括氟化镁、硅氧烷杂化膜中的一种或多种。
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