WO2019128150A1 - 控制流程的处理方法、装置、电子设备和存储介质 - Google Patents

控制流程的处理方法、装置、电子设备和存储介质 Download PDF

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Publication number
WO2019128150A1
WO2019128150A1 PCT/CN2018/092238 CN2018092238W WO2019128150A1 WO 2019128150 A1 WO2019128150 A1 WO 2019128150A1 CN 2018092238 W CN2018092238 W CN 2018092238W WO 2019128150 A1 WO2019128150 A1 WO 2019128150A1
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Prior art keywords
control
flow
control sub
binary tree
sub
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PCT/CN2018/092238
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English (en)
French (fr)
Chinese (zh)
Inventor
马会军
韩盼
赵昂
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北京创昱科技有限公司
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25257—Microcontroller

Definitions

  • Embodiments of the present invention relate to the field of communications technologies, and in particular, to a processing method, apparatus, electronic device, and storage medium for controlling a flow.
  • An electrical system is a system of power supply components. Systems such as generators, boosters, step-down transformers, transmission lines, and power user equipment.
  • the electrical system uses three control logics (sequential structure, selection structure, and cyclic structure) to implement the control flow of the device.
  • Control logic is used to indicate how the execution unit performs the action, including what conditions to start and how long to last.
  • a control command is usually sent directly to the execution unit, so that the execution unit executes the control command, which is similar to the flat management.
  • the control logic and the things to be done are mixed together, and the management control of the electrical system is confusing, resulting in low efficiency of the overall system.
  • the embodiments of the present invention provide a method, an apparatus, an electronic device, and a storage medium for controlling a process.
  • an embodiment of the present invention provides a method for processing a control process, where the method includes:
  • Matching the binary tree determining a binary tree corresponding to the control flow according to a one-to-one correspondence between the pre-established control flow and the binary tree;
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining; the leaf node is a control entity, and each of the control entities stores a control sub-process, the control sub-process is obtained by dividing the control process;
  • Output input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data satisfies the condition, output a control sub-flow corresponding to the control entity.
  • an embodiment of the present invention provides a processing apparatus for controlling a process, where the apparatus includes:
  • a matching module configured to match a binary tree: determining a binary tree corresponding to the control flow according to a one-to-one correspondence between a pre-established control flow and a binary tree;
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining; the leaf node is a control entity, and each of the control entities stores a control sub-process, the control sub-process is obtained by dividing the control process;
  • an output module configured to input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data meets the condition, output a control sub-flow corresponding to the control entity.
  • an embodiment of the present invention further provides an electronic device, including a memory, a processor, a bus, and a computer program stored on the memory and operable on the processor, where the processor implements the above method A step of.
  • an embodiment of the present invention further provides a storage medium having stored thereon a computer program, the program being implemented by the processor to implement the steps of the above method.
  • a processing method, an apparatus, an electronic device, and a storage medium provided by an embodiment of the present invention, the method implements a control flow process by searching a pre-built binary tree, and the pre-built binary tree of the present invention implements logic. Separation of entities and control entities enables efficient control of electrical systems.
  • FIG. 1 is a schematic flowchart of a processing method of a control flow according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram of a binary tree of a processing method of a control flow according to an embodiment of the present invention
  • FIG. 3 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 5 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 6 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 7 is a schematic diagram of a binary tree of an action of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 8 is a schematic diagram of a binary tree of Operation of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 9 is a schematic diagram of a binary tree of Flow of a processing method of a control flow according to another embodiment of the present invention.
  • FIG. 10 is a schematic structural diagram of a processing apparatus for controlling a flow according to another embodiment of the present invention.
  • FIG. 11 is a schematic structural diagram of an electronic device according to another embodiment of the present invention.
  • the control flow is a series of processes of the electrical system operation.
  • the control flow is composed of multiple actions.
  • the action includes the execution unit and the action.
  • the execution unit performs corresponding actions according to the instruction of the control logic to make the system run in an orderly manner.
  • the method is applied to a control flow of a semiconductor device, for example, a semiconductor device including a MOCVD (Metal-organic Chemical Vapor Deposition) device, a PVD (Physical Vapor Deposition) device, and an ELO (Epitaxial) Lift Off, epitaxial layer stripping equipment, polisher equipment, inkjet printing equipment or cleaning equipment.
  • a semiconductor device including a MOCVD (Metal-organic Chemical Vapor Deposition) device, a PVD (Physical Vapor Deposition) device, and an ELO (Epitaxial) Lift Off, epitaxial layer stripping equipment, polisher equipment, inkjet printing equipment or cleaning equipment.
  • MOCVD Metal-organic Chemical Vapor Deposition
  • MOCVD equipment In the production of MOCVD equipment, it involves the loading/unloading of substrates, the selection of substrate loading tools, the transfer of substrate or substrate loading tools, pressure control, temperature control, heating, cooling, gas control, valve control, etc. The control flow of the series.
  • FIG. 1 is a schematic flowchart diagram of a processing method of a control flow according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a binary tree of a processing method of a control flow according to an embodiment of the present invention.
  • the method provided by the embodiment of the present invention specifically includes the following steps:
  • Step 11 Matching a binary tree: determining a binary tree corresponding to the control flow according to a one-to-one correspondence between the pre-established control flow and the binary tree;
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining; the leaf node is a control entity, and each of the control entities stores a control sub-process, the control sub-process is obtained by dividing the control process;
  • each binary tree corresponds to one control flow.
  • the logical node is a logical entity newly set by the present invention for storing a condition of the judgment.
  • the logic entity is used to represent control logic in an electrical system
  • the complex control can be constructed by three basic control structures: sequence, selection, and loop.
  • the order structure is executed sequentially, for example, if, satisfying the stored condition, the child node is executed; the selection structure is one or the other, for example, else if, else, and case, and if the stored condition is satisfied, a child is executed.
  • the leaf node is an end point without a child node, and is used to output a query result of the binary tree.
  • the leaf node is a control entity set by the present invention, and is used to store a control sub-process, and the control entity is a control object.
  • control process is divided according to a preset rule to obtain one or more control sub-processes.
  • matching the binary tree is performed to determine a binary tree corresponding to the control flow.
  • Step 12 Output: input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data meets the condition, output a control sub-flow corresponding to the control entity;
  • the operational data includes a pressure parameter, a temperature parameter, a gas parameter, a speed, a flow rate, or a control signal (eg, a valve switch), etc., corresponding to the control flow.
  • a control signal eg, a valve switch
  • the acquired operation data corresponding to the control flow is input to the binary tree for searching.
  • the query path of the binary tree is a logical node ⁇ a leaf node, that is, after inputting the operation data, the logical entity is first read, and according to the condition of the logical entity, if it is determined that the operation data satisfies the condition, the read logic
  • the child node corresponding to the entity that is, the control sub-flow corresponding to the control entity.
  • the processing method of the control flow provided by this embodiment realizes the processing of the control flow by searching for a pre-built binary tree, and the pre-built binary tree realizes the separation of the logical entity and the control entity, thereby realizing efficient control of the electrical system.
  • FIG. 3 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • the binary tree further includes a routing node, the routing node is configured to connect the logical entity and the control entity; and the control entity is connected to the logical node or the routing node.
  • the routing node is a new node of the present invention. As shown in FIG. 3, the routing node may connect the logical entity and the controlling entity.
  • the processing method of the control flow provided by this embodiment can find the binary tree more smoothly by setting the routing node.
  • FIG. 4 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • a processing method of a control flow divides the control process into two levels of control sub-processes, and the first-level control sub-process includes one or more a secondary control sub-process, correspondingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a secondary control sub-process.
  • one or more secondary control sub-flows are output.
  • control process may be divided into two levels of control sub-process according to a preset division criterion, and the first-level control sub-process includes one or more secondary control sub-processes.
  • control process includes one or more primary control sub-processes, and each primary control sub-process includes one or more secondary control sub-processes.
  • one or more binary trees corresponding to the first-level control sub-process are pre-established, and after the operation data meets the condition of the logical entity of the control flow, the control sub-flow corresponding to the control entity is specifically: matching One or more binary trees corresponding to the first-level control sub-process, and corresponding one or more binary trees are obtained;
  • one or more of the two-level control sub-flows may be output through the judgment of the logical entity of the binary tree.
  • one or more of the two-level control sub-flows may be output for each binary tree.
  • the operation data includes a pressure parameter, a temperature parameter, a gas parameter, a speed, a flow rate, or a control signal (such as a valve switch), and corresponds to the control flow, and further includes operation data involved in each level control sub-flow.
  • a control signal such as a valve switch
  • the processing method of the control flow provided by the embodiment is configured to divide the control flow into two levels, and after the operation data satisfies the condition of the logical entity of the control flow, further search for a binary tree corresponding to the first-level control sub-process.
  • the secondary control sub-process is obtained.
  • FIG. 5 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • a processing method of a control flow divides the control process into a three-level control sub-process, and the second-level control sub-process includes one or more a three-level control sub-process, the three-level control sub-process is a minimum control process, and accordingly,
  • the step of outputting one or more of the secondary control sub-processes is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a three-level control sub-process;
  • one or more three-level control sub-flows are output.
  • control process may be divided into a three-level control sub-process, a first-level control sub-process, a second-level control sub-flow, and a three-level control sub-flow according to a preset division criterion.
  • one or more binary trees corresponding to the secondary control sub-process are pre-established, and after the operation data meets the condition of the logical entity of the primary control sub-process, one or more secondary control sub-processes are specifically output.
  • the method is: matching one or more binary trees corresponding to the second control sub-process, to obtain a corresponding one or more binary trees;
  • the three-level control sub-flow is a minimum control flow.
  • the one or more of the three-level control sub-flows may be output through the judgment of the logical entity of the binary tree.
  • one or more of the three-level control sub-flows may be output for each binary tree.
  • the operation data includes a pressure parameter, a temperature parameter, a gas parameter, a speed, a flow rate, or a control signal (such as a valve switch), and corresponds to the control flow, and further includes operation data involved in each level control sub-flow.
  • a control signal such as a valve switch
  • the processing method of the control flow provided by the embodiment is configured to divide the control flow into three levels, and after the operation data satisfies the condition of the logical entity of the first-level control sub-process, further search for the corresponding two-level control sub-process
  • the binary tree gets one or more minimum control flows, that is, the three-level control sub-flow.
  • the three-level control sub-process involves one or more of discrete data, cluster data, alarm, and message;
  • step of outputting one or more of the three-level control sub-flows is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is the discrete data, cluster data, alarm or message;
  • one or more of the discrete data, the cluster data, the alarm, and the message are output.
  • the three-level control sub-flow specifically relates to one or more of discrete data, cluster data, alarm, and message.
  • one or more binary trees corresponding to the three-level control sub-process are pre-established, and one or more three-level control sub-processes are output after the operation data satisfies the condition of the logical entity of the second-level control sub-process
  • the method is: matching one or more binary trees corresponding to the three-level control sub-process to obtain a corresponding one or more binary trees;
  • the three-level control sub-process is caused to execute a corresponding leaf node (the discrete data, cluster data, alarm or message).
  • the discrete data indicates that the transmitted control command is relatively simple.
  • the control entity is an operation of powering on the motor, and the operation of powering up the motor is to send binary 1 to the motor, and the motor can perform power-on operation by performing a power-on operation.
  • the cluster data indicates that the transmitted control commands are relatively complex.
  • the cluster data is a series of control characters. For some complicated control commands that cannot be represented by 0/1, such as motor rotation, parameters such as steering and rotation speed are required, and a control command including cluster data is sent to the motor.
  • the alarm is a special message body, indicating that the indicator of the operating data of the system exceeds the threshold or the device fails.
  • the message is a regular message.
  • one or more of the discrete data, the cluster data, the alarm, and the message may be output through the judgment of the logical entity of the binary tree.
  • one or more of the discrete data, the cluster data, the alarm, and the message may be output for each binary tree.
  • the processing method of the control flow provided in this embodiment implements a refinement operation by executing a corresponding leaf node (the discrete data, cluster data, alarm, or message) through a three-level control sub-flow.
  • the control entity is one or more of discrete data, cluster data, alarm, and message, and correspondingly,
  • the step of outputting is specifically: inputting the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data meets the condition of another logical node or nodes, outputting the corresponding control entity One or more of discrete data, cluster data, alarms, messages.
  • the binary tree includes multiple control entities, wherein the control entity may store the control sub-flow, and may also store one or more of discrete data, cluster data, alarms, and messages.
  • control sub-flow corresponding to the control entity is output.
  • the discrete data and cluster corresponding to the control entity are output.
  • the discrete data indicates that the transmitted control command is relatively simple.
  • the control entity is an operation of powering on the motor, and the operation of powering up the motor is to send binary 1 to the motor, and the motor can perform power-on operation by performing a power-on operation.
  • the cluster data indicates that the transmitted control commands are relatively complex.
  • the cluster data is a series of control characters. For some complicated control commands that cannot be represented by 0/1, such as motor rotation, parameters such as steering and rotation speed are required, and a control command including cluster data is sent to the motor.
  • the alarm is a special message body, indicating that the indicator of the operating data of the system exceeds the threshold or the device fails.
  • the message is a regular message.
  • the processing method of the control flow provided by this embodiment implements the refinement operation by dividing the control entity into discrete data, cluster data, alarms, and messages.
  • FIG. 6 is a schematic diagram of a binary tree of a processing method of a control flow according to another embodiment of the present invention.
  • the logical entity stores a condition for determining a concurrency related to a sub-control flow,
  • the control sub-process is obtained by dividing the control process according to concurrency;
  • control sub-flow is a synchronous control flow
  • synchronous control flow is output; if it is determined that the control sub-flow is an asynchronous control flow, the asynchronous control flow is output.
  • the synchronized control flow and the asynchronous control flow are obtained by dividing the sub-processes or actions of the control flow in the electrical system in advance according to concurrency.
  • the concurrency indicates whether two or more sub-processes and/or actions are synchronous or asynchronous
  • the synchronized control flow indicates that the execution unit must wait for a certain control sub-process or action to execute before starting to execute another
  • a sub-process or action is called synchronization.
  • An asynchronous control flow means that the execution unit does not have to wait for a certain control sub-process or action to complete, and can do other things called asynchronous.
  • the No. 2 valve can be opened, and the opening process of the No. 1 valve and the No. 2 valve is called synchronization; the opening time of the No. 2 valve does not need to cooperate with the No. 1 valve. It can be opened according to its own needs.
  • the opening process of No. 1 valve and No. 2 valve is called asynchronous.
  • the synchronous and asynchronous control processes are not distinguished, and the synchronous asynchronous control is confusing.
  • the synchronous and asynchronous control processes are well distinguished, thereby achieving efficient searching.
  • the processing method of the control flow provided by this embodiment can distinguish the synchronous and asynchronous control processes by judging whether the control sub-flow is a synchronous control process or an asynchronous control flow.
  • a processing method for controlling a flow is provided in another embodiment of the present invention, where the synchronization control flow includes a first control sub-flow and a second control sub-flow, the first control sub-flow and the The second control sub-process is divided according to the synchronization control process, where the first control sub-process includes an end time of the first control sub-process, and the second control sub-process includes a start time of the second control sub-process, The start time of the second control sub-flow is equal to or later than the end time of the first control sub-flow.
  • the synchronous control process includes two control processes, and the last control flow starts at a time when the previous control process is completed or later than when the previous control process is completed, and the synchronized control process can be performed.
  • the logical entity stores the determined condition as a time difference between a time at which the previous control flow ends and a subsequent time. If it is determined that the time difference in the synchronized control flow satisfies the condition, the first control sub-flow is directly output. And a second control sub-process.
  • the processing method of the control flow provided by the embodiment can further divide the synchronous control flow by considering the complexity of the synchronization control flow in the control flow, and output the first control sub-flow and the second control sub-flow, thereby ensuring control Synchronization of the process.
  • the synchronization control flow is a first-level control sub-process, and the first control sub-flow and the second control sub-flow are two. a level control sub-process, wherein the second-level control sub-process is a control sub-process obtained according to the first-level control sub-process;
  • the synchronous control flow is a secondary control sub-process
  • the first control sub-flow and the second control sub-flow are three-level control sub-process
  • the three-level control sub-process is divided according to the second-level control sub-flow The minimum control flow obtained.
  • the synchronized control flow is a first-level control sub-process, and includes two second-level control sub-flows of the first control sub-flow and the second control sub-process, and correspondingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node
  • the logical node is a logical entity
  • the logical entity stores a condition for determining, the leaf node
  • the point is the secondary control sub-process.
  • the first-level control sub-flow is output first, and another second-level control sub-flow is output.
  • the synchronous control flow is a secondary control sub-process, including two first-level control sub-processes of the first control sub-process and the second control sub-process, and the third-level control sub-process is a minimum control process, correspondingly Ground,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node
  • the logical node is a logical entity
  • the logical entity stores a condition for determining, the leaf node
  • the point is a three-level control sub-process.
  • a three-level control sub-flow is output first, and another three-level control sub-flow is output.
  • the processing method of the control flow provided by this embodiment can further divide the synchronous control flow and output the corresponding control sub-flow by taking into consideration the complexity of the synchronization control flow in the control flow, thereby realizing fine control.
  • the asynchronous control flow includes a plurality of third control sub-flows, and the third control sub-flow is according to the asynchronous Control process is divided.
  • the asynchronous control flow indicates that the multiple control processes are asynchronous, and the asynchronous control process is split and split into smaller control sub-processes: a third control sub-process.
  • the asynchronous control flow is a first-level control sub-process, and the third control sub-process is a second-level control sub-process;
  • the asynchronous control flow is a secondary control sub-process
  • the third control sub-process is a three-level control sub-process
  • the three-level control sub-process is a minimum control flow.
  • the asynchronous control flow is a first-level control sub-process, and includes a plurality of third control sub-processes, where the third control sub-process is a secondary control sub-process, and correspondingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node
  • the logical node is a logical entity
  • the logical entity stores a condition for determining, the leaf node
  • the point is the secondary control sub-process.
  • the asynchronous control flow is a secondary control sub-process, including a plurality of third control sub-processes, the third control sub-process is a three-level control sub-process, and the third-level control sub-process is a minimum control Process, correspondingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node
  • the logical node is a logical entity
  • the logical entity stores a condition for determining, the leaf node
  • the point is a three-level control sub-process.
  • the processing method of the control flow provided by this embodiment can further divide the asynchronous control flow and output the third control sub-flow by considering the complexity of the asynchronous control flow in the control flow.
  • a processing method of a control flow where the three-level control sub-process involves one or more of discrete data, cluster data, an alarm, and a message.
  • the three-level control sub-flow obtained by the synchronized control flow the three-level control sub-process first executing one discrete data, cluster data, alarm or message, and then executing another discrete data, cluster Data, alarm or message.
  • the three-level control sub-flow obtained by the asynchronous control flow may perform one or more discrete data, cluster data, alarms, and messages.
  • Discrete data indicates that the control commands sent are relatively simple.
  • the first sub-control entity is an operation of powering on the motor, and the operation of powering on the motor is to send binary 1 to the motor, and the motor can perform power-on operation by performing a power-on operation.
  • the cluster data indicates that the transmitted control commands are relatively complex.
  • the cluster data is a series of control characters. For some complicated control commands that cannot be represented by 0/1, such as motor rotation, parameters such as steering and rotation speed are required, and a control command including cluster data is sent to the motor.
  • the alarm is a special message body, indicating that the indicator of the operating data of the system exceeds the threshold or the device fails.
  • the message is a regular message.
  • the processing method of the control flow provided by this embodiment implements the refinement operation by dividing the control entity into discrete data, cluster data, alarms, and messages.
  • the logical entity stores a condition for determining a concurrency related to a control entity
  • the synchronous control entity is output; if it is determined that the plurality of the control entities are asynchronous, the asynchronous control entity is output.
  • the control entity stores control sub-processes or discrete data, cluster data, alarms, messages.
  • the control entity stores a control sub-process of the first-level control sub-process, the second-level control sub-process or the third-level control sub-process, and discrete data, cluster data, alarm, and message.
  • some two control entities on a pre-established binary tree are synchronized, and correspondingly, the output is specifically:
  • control sub-process of a logical node (a control sub-process, a secondary control sub-process or a control sub-process of a level control sub-process), and then output the logical node or another logical node a control entity synchronized with the control sub-process, the control entity may be another control sub-process (a first-level control sub-process, a second-level control sub-process or a three-level control sub-process at a certain level of control sub-process), or Is discrete data, cluster data, alarms or messages.
  • the output is specifically:
  • control entity First output a discrete logical data, cluster data, alarm or message of a logical node, and then output a control entity synchronized with discrete data, cluster data, alarm or message of the logical node or another logical node, the control entity may be Another control sub-process (a first-level control sub-process, a two-level control sub-process, or a three-level control sub-process at a certain level of control sub-process) can also be discrete data, cluster data, alarms, or messages.
  • a first-level control sub-process a two-level control sub-process, or a three-level control sub-process at a certain level of control sub-process
  • the plurality of control entities on a pre-established binary tree are asynchronous, and correspondingly, the output is specifically: simultaneously outputting one or more control sub-processes, discrete data, cluster data, alarms, or Message.
  • the processing method of the control flow provided by this embodiment provides a traversal rule for a pre-built binary tree, which considers control flow, discrete data, cluster data, alarm, synchronization between messages, and asynchronous relationship, and facilitates query and implementation. Efficient control.
  • the prior art MOCVD device control uses three control logics (sequential structure, selection structure, and cyclic structure) to implement control of the device.
  • the control logic is mixed with the things to be done (device control flow).
  • the present invention uses three basic control logics and device control processes (things to do, control entities) as the knot of the binary tree. Points are organized into a binary tree through certain rules, so that the device control process is stored as a leaf node of the binary tree, and the control logic is stored as an intermediate node; through a certain traversal rule, one or more are obtained from the binary tree each time.
  • the device control process (doing things, controlling entities) is performed. Thereby, the separation of the logic control and the device control process (things to be done, the control entity) is realized, so that efficient control of the device can be realized.
  • the device control process can be divided into two types, one is the control flow that is executed synchronously (that is, it must wait for a certain control process to be executed before starting to do other things), and one is for asynchronous execution. Control the process (that is, you can do other things without waiting for the control process to complete). How to efficiently find and execute these device control processes is a problem to be solved by the present invention.
  • control logics are constructed in an object-oriented manner to construct corresponding logical entities, including control logics such as if, elseif, else, case, loop, and while.
  • the MOCVD equipment control process extracts commonality according to certain rules, extracts control entities, and controls the entity to store Flow, Operation, Action, Discrete Data, Cluster Data, Message, Alarm. .
  • the Action is the minimum control flow, which is equivalent to the three-level control sub-flow in the above embodiment.
  • Action involves one or more of discrete data, cluster data, alarms, and messages.
  • Operation is a complex operation performed by multiple Actions, which is equivalent to the secondary control sub-flow in the above embodiment.
  • Flow consists of multiple operations, completing a more complex device control process, which is equivalent to the first-level control sub-process in the above embodiment.
  • the controlling entity must act as the leaf node of the binary tree
  • the control entity is connected to a routing node or a logical node
  • Flow, Operation, and Action all have their own binary tree. There can be no control entities for Action, Operation, and Flow on the leaves of Action's binary tree. There can be no control entities for Operation and Flow on the binary tree of Operation. The binary tree of Flow There cannot be a flow control entity on the leaf.
  • the structure of the binary tree and the search mode may be various.
  • the embodiments of the present invention are described by taking several of them as an example.
  • the binary tree corresponding to the control flow is determined to be a binary tree of Flow
  • the binary tree of the flow includes a logical node and a leaf node
  • the leaf node may include an operation and discrete data. , cluster data, alarms, and messages, each leaf node is directly connected to a logical node or connected to a logical node through a routing node.
  • the step of outputting one or more operations is specifically: matching a binary tree corresponding to one or more operations; the binary tree of the operation includes a logical node and a leaf node, and the leaf node may include an Action. , discrete data, cluster data, alarms, and messages, each leaf node is directly connected to a logical node or through a routing node to a logical node.
  • the step of outputting one or more Actions is specifically: matching a binary tree corresponding to one or more Actions; the binary tree of the Action includes a logical node and a leaf node, and the leaf node may include a discrete Data, cluster data, alarms, and messages, each leaf node is directly connected to a logical node or connected to a logical node through a routing node.
  • FIG. 7 is a schematic diagram of a binary tree of an action of a processing method of a control flow according to another embodiment of the present invention.
  • leaf nodes store control entities; routing nodes are only used to connect nodes; logical nodes (such as if) store logical entities; because it is a binary tree of Action, leaf nodes There are no Action, Operation, Flow control entities at the point, and the leaf nodes store Discrete Data, Cluster Data, Message, or Alarm.
  • FIG. 8 is a schematic diagram of a binary tree of Operation of a processing method of a control flow according to another embodiment of the present invention.
  • the operation of the binary tree is an example. There are no Operation and Flow control entities on the Operation's binary tree leaf node.
  • the leaf nodes store Operation, Discrete Data, Cluster Data, Message, or Alarm.
  • FIG. 9 is a schematic diagram of a binary tree of Flow of a processing method of a control flow according to another embodiment of the present invention.
  • the traversal rule defined in the embodiment of the present invention is: if the control entity is synchronous, it returns immediately, and one traversal only gets one synchronous control entity; if the control entity is asynchronous, then Look down the logical tree until it encounters a synchronous control entity return, one traversal returns one or more asynchronous control entities; if the return is empty, the logic tree is completely traversed.
  • the logical entity of the binary tree corresponding to the Flow stores the condition of the judgment related to the concurrency of the operation
  • the synchronization control flow Flow includes Operation1 and Operation2, where the Operation1 includes the end time of the Operation1, and the Operation2 includes At the start time of Operation 2, the start time of the Operation 2 is equal to or later than the end time of the Operation 1, and accordingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree corresponding to the operation1 and the operation2 respectively includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores the condition of the judgment.
  • the leaf node is Action.
  • the operation1 is output first, and then the Operation2 is output.
  • the logical entity of the binary tree corresponding to the Flow stores the condition of the judgment related to the concurrency of the operation
  • the asynchronous control flow includes a plurality of operations, and correspondingly,
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary trees corresponding to the multiple operations respectively include at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores the condition of the judgment,
  • the leaf node is Action.
  • the embodiment of the present invention divides the control flow into a synchronous and asynchronous control flow, and adopts a tree-like storage and organization manner of the logical entity and the control entity, and the line of sight efficiently searches for and executes these device control processes.
  • FIG. 10 is a schematic structural diagram of a processing apparatus for controlling a flow according to another embodiment of the present invention.
  • the processing device of the control flow provided by this embodiment includes an input module 101 and an output module 102, where:
  • the matching module 101 is configured to match the binary tree: determining a binary tree corresponding to the control flow according to a one-to-one correspondence between the pre-established control flow and the binary tree; the binary tree includes at least one logical node and at least one leaf node, The logical node is a logical entity, the logical entity stores a condition for determining; the leaf node is a control entity, each of the control entities stores a control sub-process, and the control sub-process is to control the process Divided
  • the output module 102 is configured to input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data meets the condition, output a control sub-flow corresponding to the control entity.
  • the processing device of the control flow provided in this embodiment may be used to perform the method in the foregoing method embodiment, and details are not described herein.
  • the processing device of the control flow provided by the embodiment implements the processing of the control flow by searching for the pre-built binary tree.
  • the pre-built binary tree of the present invention realizes the separation of the logical entity and the control entity, thereby achieving efficient control of the electrical system.
  • FIG. 11 is a schematic structural diagram of an electronic device according to another embodiment of the present invention.
  • an electronic device provided by an embodiment of the present invention includes a memory 111, a processor 112, a bus 113, and a computer program stored on the memory 111 and executable on the processor.
  • the memory 111 and the processor 112 complete communication with each other through the bus 113.
  • the processor 112 is configured to invoke program instructions in the memory 111 to implement the method of FIG. 1 when the program is executed.
  • the processor implements the following method when executing the program:
  • the binary tree further includes a routing node, the routing node is configured to connect the logical entity and the control entity; and the control entity is connected to the logical node or the routing node.
  • the method when the processor executes the program, the method is as follows: the control process is divided into two levels of control sub-processes, and the first-level control sub-process includes one or more second-level control sub-processes.
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a secondary control sub-process;
  • one or more of the two-level control sub-flows are output.
  • the processor when executing the program, implements a method of dividing the control process into a three-level control sub-process, where the second-level control sub-process includes one or more three-level control sub-processes.
  • the three-level control sub-flow is a minimum control flow; correspondingly, the step of outputting one or more of the second-level control sub-flows is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a three-level control sub-process;
  • one or more of the three-level control sub-flows are output.
  • the processor implements the following method when executing the program:
  • the three-level control sub-process involves one or more of discrete data, cluster data, alarms, and messages;
  • step of outputting one or more of the three-level control sub-flows is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is the discrete data, cluster data, alarm or message;
  • one or more of the discrete data, the cluster data, the alarm, and the message are output.
  • the processor implements the following method when executing the program:
  • the control entity further includes one or more of discrete data, cluster data, an alarm, and a message.
  • the step of outputting is specifically: inputting the acquired operation data corresponding to the control flow to the binary tree, if If it is determined that the operation data satisfies the condition of the other logical node, one or more of the discrete data, the cluster data, the alarm, and the message corresponding to the control entity are output.
  • the processor implements the following method when executing the program:
  • the logical entity stores a condition for determining a concurrency related to a control sub-process, where the control sub-process divides the control flow according to concurrency;
  • control sub-flow is a synchronous control flow
  • synchronous control flow is output; if it is determined that the control sub-flow is an asynchronous control flow, the asynchronous control flow is output.
  • the processor implements the following method when executing the program:
  • the synchronization control flow includes a first control sub-flow and a second control sub-flow, and the first control sub-flow and the second control sub-flow are divided according to the synchronized control flow, the first control sub-
  • the process includes an end time of the first control sub-process, where the second control sub-process includes a start time of the second control sub-process, and a start time of the second control sub-process is equal to or later than the first control sub-flow End time.
  • the processor implements the following method when executing the program:
  • the synchronization control flow is a first-level control sub-process, the first control sub-flow and the second control sub-process are two-level control sub-process, and the second-level control sub-process is divided according to the first-level control sub-flow The resulting control subprocess;
  • the synchronous control flow is a secondary control sub-process
  • the first control sub-flow and the second control sub-flow are three-level control sub-process
  • the three-level control sub-process is divided according to the second-level control sub-flow The minimum control flow obtained.
  • the processor implements the following method when executing the program:
  • the asynchronous control flow includes a plurality of third control sub-processes, and the third control sub-flow is divided according to the asynchronous control flow.
  • the processor implements the following method when executing the program:
  • the asynchronous control flow is a first-level control sub-process, and the third control sub-process is a second-level control sub-process;
  • the asynchronous control flow is a secondary control sub-process
  • the third control sub-process is a three-level control sub-process
  • the three-level control sub-process is a minimum control flow.
  • the processor implements the following method when executing the program:
  • the three-level control sub-process involves one or more of discrete data, cluster data, alarms, and messages.
  • the processor implements the following method when executing the program:
  • the logical entity stores a condition for determining a concurrency related to a control entity
  • the synchronous control entity is output; if it is determined that the plurality of the control entities are asynchronous, the asynchronous control entity is output.
  • the processor implements the following method when executing the program:
  • the method is applied to a control flow of a semiconductor device.
  • the electronic device provided in this embodiment can be used to execute the program corresponding to the method in the foregoing method embodiment, and details are not described herein.
  • the pre-built binary tree of the present invention realizes the separation of the logical entity and the control entity, thereby realizing efficient control of the electrical system.
  • Another embodiment of the present invention provides a storage medium on which a computer program is stored, and when the program is executed by the processor, the steps of FIG. 1 are implemented.
  • the program is implemented by the processor to implement the following method:
  • the binary tree further includes a routing node, the routing node is configured to connect the logical entity and the control entity; and the control entity is connected to the logical node or the routing node.
  • the method when the program is executed by the processor, the method is implemented to divide the control process into two levels of control sub-processes, and the first-level control sub-process includes one or more second-level control sub-processes, correspondingly
  • the step of outputting the control sub-flow corresponding to the control entity is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a secondary control sub-process;
  • one or more of the two-level control sub-flows are output.
  • the method when the program is executed by the processor, the method is implemented to: divide the control process into a three-level control sub-process, and the second-level control sub-process includes one or more three-level control sub-processes.
  • the three-level control sub-process is a minimum control flow; correspondingly, the step of outputting one or more of the second-level control sub-processes is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is a three-level control sub-process;
  • one or more of the three-level control sub-flows are output.
  • the three-level control sub-process involves one or more of discrete data, cluster data, alarm, and message;
  • step of outputting one or more of the three-level control sub-flows is specifically:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining,
  • the leaf node is the discrete data, cluster data, alarm or message;
  • one or more of the discrete data, the cluster data, the alarm, and the message are output.
  • the method when the program is executed by the processor, the method is as follows: the control entity further includes one or more of discrete data, cluster data, alarm, and message, and correspondingly, the step of outputting, Specifically, the obtained operation data corresponding to the control flow is input to the binary tree, and if it is determined that the operation data satisfies the condition of the other logical node, the discrete data and the cluster corresponding to the control entity are output. One or more of data, alarms, and messages.
  • the logic entity stores a condition for determining a concurrency related to controlling a sub-process, and the control sub-process is to control the process according to concurrency Obtained by division;
  • control sub-flow is a synchronous control flow
  • synchronous control flow is output; if it is determined that the control sub-flow is an asynchronous control flow, the asynchronous control flow is output.
  • the synchronization control flow includes a first control sub-flow and a second control sub-flow, the first control sub-flow and the second control
  • the sub-process is divided according to the synchronization control process, where the first control sub-process includes an end time of the first control sub-process, and the second control sub-process includes a start time of the second control sub-flow, The start time of the second control sub-flow is equal to or later than the end time of the first control sub-flow.
  • the synchronization control flow is a first-level control sub-process
  • the first control sub-flow and the second control sub-flow are two-level control a sub-process
  • the second-level control sub-process is a control sub-process obtained by dividing the first-level control sub-process
  • the synchronous control flow is a secondary control sub-process
  • the first control sub-flow and the second control sub-flow are three-level control sub-process
  • the three-level control sub-process is divided according to the second-level control sub-flow The minimum control flow obtained.
  • the method when the program is executed by the processor, the method is implemented as follows: the asynchronous control flow includes a plurality of third control sub-processes, and the third control sub-flow is according to the asynchronous control flow Divided by.
  • the method when the program is executed by the processor, the method is as follows: the asynchronous control flow is a first-level control sub-process, and the third control sub-process is a second-level control sub-process;
  • the asynchronous control flow is a secondary control sub-process
  • the third control sub-process is a three-level control sub-process
  • the three-level control sub-process is a minimum control flow.
  • the three-level control sub-process involves one or more of discrete data, cluster data, alarms, and messages.
  • the logic entity stores a condition of a judgment related to controlling the concurrency of the entity
  • the synchronous control entity is output; if it is determined that the plurality of the control entities are asynchronous, the asynchronous control entity is output.
  • the program when executed by the processor, the following method is implemented: the method is applied to a control flow of the semiconductor device.
  • the storage medium provided in this embodiment implements the processing of the control flow by searching for a pre-built binary tree.
  • the pre-built binary tree of the present invention realizes the separation of the logical entity and the control entity, thereby achieving efficient control of the electrical system.
  • Yet another embodiment of the present invention discloses a computer program product comprising a computer program stored on a non-transitory computer readable storage medium, the computer program comprising program instructions, when the program instructions are executed by a computer
  • the computer can perform the methods provided by the foregoing method embodiments, including, for example:
  • the binary tree includes at least one logical node and at least one leaf node, the logical node is a logical entity, and the logical entity stores a condition for determining; the leaf node is a control entity, and each of the control entities stores a control sub-process, the control sub-process is obtained by dividing the control process;
  • Output input the acquired operation data corresponding to the control flow to the binary tree, and if it is determined that the operation data satisfies the condition, output a control sub-flow corresponding to the control entity.
  • the logical entity stores a condition for determining a concurrency related to a control sub-flow, and the control sub-flow is obtained by dividing the control flow according to concurrency;
  • control sub-flow is a synchronous control flow
  • synchronous control flow is output; if it is determined that the control sub-flow is an asynchronous control flow, the asynchronous control flow is output.
  • DSP digital signal processor
  • the invention can also be implemented as a device or device program (e.g., a computer program and a computer program product) for performing some or all of the methods described herein.

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