WO2019119286A1 - 一种柔性电子压力传感装置及其制备方法 - Google Patents
一种柔性电子压力传感装置及其制备方法 Download PDFInfo
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- WO2019119286A1 WO2019119286A1 PCT/CN2017/117390 CN2017117390W WO2019119286A1 WO 2019119286 A1 WO2019119286 A1 WO 2019119286A1 CN 2017117390 W CN2017117390 W CN 2017117390W WO 2019119286 A1 WO2019119286 A1 WO 2019119286A1
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- flexible
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
Definitions
- the invention belongs to the technical field of electronic pressure sensor fabrication and packaging, and in particular relates to a flexible electronic pressure sensing device and a preparation method thereof.
- the flexible sensors of the prior art are mainly prepared in the following manner.
- the dispersed circular sensing unit is arranged on a flexible PET sheet, and the silver used to make the sensor electrode realizes the sensor array due to the flexibility of the material. Flexible.
- the strain sensor described above has a certain flexibility, it is still impossible to achieve special forms such as stretching, bending and twisting at will.
- the lack of skin-like flexibility is not able to fully conform to the three-dimensional complex static/dynamic surface while measuring the contact pressure.
- Even if integrated into a wearable device the user's experience is not good due to a mechanical mismatch with the surface of the human skin.
- the accuracy and sensitivity of measurement cannot be balanced. It is easily interfered by the body's own physiological signals.
- the process is not mature, and there are also problems such as high temperature resistance, application range and service life.
- the object of the present invention is to overcome the above deficiencies of the prior art, and to provide a flexible electronic pressure sensing device and a preparation method thereof, wherein the flexible electronic pressure sensing device has good stability, accuracy, accuracy and reliability.
- a flexible electronic pressure sensing device comprising a flexible outer casing having an internal cavity therein, the internal cavity comprising a plurality of array channels and communicating with a plurality of the array channels a communication cavity of the end face, the inner cavity is provided with a liquid metal conductor, and the flexible outer casing is connected with at least two electrodes connected to the liquid metal conductor.
- a liquid conductor eutectic gallium indium is disposed in the inner cavity.
- the flexible outer casing includes a first flexible base and a second flexible base that are joined to form the inner cavity, the inner wall of the first flexible base is provided with a convex structure for forming the array channel or And a recessed structure; the communication cavity is disposed on the second flexible base body.
- the present invention also provides a wearable device having a flexible electronic pressure sensing device as described above.
- the invention also provides a preparation method of a flexible electronic pressure sensing device, comprising the following steps:
- a flexible outer casing having an inner cavity, the inner cavity comprising a plurality of array channels and a communication cavity communicating with the plurality of the array channels; a liquid metal conductor is injected into the inner cavity, the flexible outer casing At least two electrodes are inserted to bring the electrodes into contact with the liquid metal conductor.
- preparing the flexible outer casing comprises the steps of:
- injecting the liquid metal conductor into the inner cavity comprises the following steps:
- Two syringes are inserted into both ends of the inner cavity, one of the syringes has a liquid metal conductor; the other syringe draws air from the inner cavity, and a syringe with a liquid metal conductor injects into the inner cavity The liquid metal conductor fills the internal cavity with the liquid metal conductor and pulls out the syringe.
- inserting the electrodes at both ends of the inner cavity comprises the following steps:
- Two electrodes are respectively inserted into the ends of the inner cavity, and the inner cavity is sealed with the same semi-solidified flexible material.
- mixing and removing the bubbles of the flexible material solution comprises the steps of:
- the Ecoflex series silicone rubber solution is placed in a container of a centrifugal mixer, the rotation speed of the centrifugal mixer is 300-400 rpm, and after the holding time is 10-15 s, the rotation speed of the centrifugal mixer is increased to 1400-1600 rpm, and the holding time is maintained. For 25-30 s, a mixed silicone rubber solution is obtained;
- Forming the first flexible substrate includes the following steps:
- the first mold is moved into an oven and baked at 80 degrees Celsius for 45-60 minutes, and after demolding, a first flexible substrate having a plurality of array channels is obtained;
- the mold is opened, and then the first flexible substrate is pressed against the second flexible substrate, the first flexible substrate and the first flexible substrate The second flexible substrates are joined to form a communication cavity, and a communication cavity communicating with the same end face of the plurality of the array channels.
- the invention provides a flexible electronic pressure sensing device and a preparation method thereof.
- the flexible electronic pressure sensing device has the advantages of high flexibility, good stretchability, simple geometric structure and thin size, so that the sensor is free from physical accessories.
- the restraint can be applied to the skin conformally, thereby achieving measurement at any position, even at various joints with a large amount of deformation.
- the sensor when the sensor is in operation, it mainly collects the change signal of the liquid conductor resistance caused by the deformation of the sealed microarray channel, has high sensitivity, strong anti-interference ability, and can be stretched, bent and twisted at will, and is particularly suitable for the field of wearable devices. It is a large deformation situation, etc.
- the cavity is a closed structure, which has high temperature resistance, wide application range and long service life.
- FIG. 1 is a schematic cross-sectional view of a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 2 is a cross-sectional view of a flexible outer casing in a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 3 is a schematic plan view of a flexible electronic pressure sensing device having a circular flexible outer casing according to an embodiment of the present invention
- FIG. 4 is a schematic plan view of a flexible electronic pressure sensing device having a rectangular flexible outer casing according to an embodiment of the present invention
- FIG. 5 is a schematic plan view showing a method for preparing a silicone rubber solution in a method for preparing a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 6 is a schematic plan view showing a mixture of a silicone rubber solution in a method for preparing a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 7 is a schematic plan view of a silicone rubber solution in which a bubble is removed in a method for preparing a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 8 is a schematic plan view showing a method of preparing a flexible electronic pressure sensing device according to an embodiment of the present invention, in which a first mold is filled with a silicone rubber solution;
- FIG. 9 is a schematic plan view showing a method for preparing a flexible electronic pressure sensing device according to an embodiment of the present invention, after baking a silicone rubber solution in a first mold;
- FIG. 10 is a schematic plan view showing a method of manufacturing a flexible electronic pressure sensing device according to an embodiment of the present invention, in which a silicone rubber solution is added to a second mold and closed;
- FIG. 11 is a plan view showing a first flexible substrate and a second flexible substrate in a method for fabricating a flexible electronic pressure sensing device according to an embodiment of the present invention
- FIG. 12 is a cross-sectional view of a flexible electronic pressure sensing device obtained in a method of fabricating a flexible electronic pressure sensing device according to an embodiment of the present invention.
- left, right, upper, lower, and the like orientations in the embodiments of the present invention are merely relative concepts or referenced to the normal use state of the product, and should not be considered as limiting. .
- a flexible electronic pressure sensing device includes a flexible outer casing 1 which can be made of a silicone rubber material (for example, Ecoflex series).
- the flexible outer casing 1 has an inner cavity having a length and a cross section which can be deformed by an external force.
- the inner cavity 10 can be a closed cavity.
- the inner cavity 10 is provided with a liquid metal conductor 3, and the liquid metal conductor 3 It can be filled with the internal cavity 10.
- the internal cavity 10 includes a plurality of array channels (microarray channels) 101 and a communication cavity 102 communicating with the same end faces of the plurality of array channels 101.
- the array channels 101 may be evenly spaced in a lateral or longitudinal direction, or may be vertically or horizontally Arranged in a staggered arrangement (ie, partially arranged in a "well" shape), of course, the array channel 101 may also be formed by a matrix of cylindrical cavities or hemispherical cavities.
- the two ends of the flexible outer casing 1 are provided with at least two electrodes 2 connected to the liquid metal conductor, and the ends of the electrodes 2 are in contact with the liquid metal conductor 3 in the inner cavity 10, when the sensor is operated, due to The action of the external load causes the shape (length and cross section) of the internal cavity 10 to change, thereby changing the resistance of the liquid metal conductor 3.
- the electrodes 2 at both ends can be connected with an amplification module and a constant current power supply module, and a constant current power supply is applied to the electrodes 2 at both ends.
- the resistance signal of the liquid metal conductor 3 is changed into a voltage signal for convenient measurement, and the corresponding strain value is obtained by analyzing the voltage signal.
- the sensor mainly collects the resistance change signal of the liquid metal conductor 3 in the sealed internal cavity 10 during operation. Highly flexible, stretchable and thin geometry, it can be directly integrated with any flexible actuator, and has high sensitivity and strong anti-interference ability. The flexible sensor can still work normally when the strain reaches 300%.
- one or at least two inner cavities 10 may be disposed in the same flexible outer casing 1, and each inner cavity 10 may be correspondingly provided with two or at least two electrodes 2.
- the height of the array channel 101 and the height of the communication cavity 102 may each be less than 1 mm.
- the overall height of the inner cavity 10 may be less than 1 mm.
- the thickness of the flexible electronic pressure sensing device may be less than 1 mm, that is, the thickness of the flexible outer casing 1 may be less than 1 mm, which is well suited for use in smart wearable devices.
- the flexible outer casing 1 can be flat.
- the outer shape of the flexible outer casing 1 may be a polygon (for example, a rectangle or the like), a circle, a profile, or the like.
- the flexible outer casing 1 is made of a degradable polyester material or a silicone rubber material.
- the flexible outer casing 1 is made of a silicone rubber material of the Ecoflex series as a basic material. In specific applications, it can be manufactured by BASF, Germany.
- An aliphatic aromatic random copolyester (Ecoflex) whose monomers are: adipic acid, terephthalic acid, and 1,4-butanediol.
- a liquid conductor eutectic gallium indium is disposed in the inner cavity 10 as a liquid metal conductor.
- the electrode 2 may be inserted from both ends in the longitudinal direction of the flexible casing 1 or both ends of the internal cavity 10 to the front end in contact with the liquid metal conductor 3 provided in the internal cavity 10.
- the electrode 2 and the flexible outer casing 1 may be sealed by a sealing material to further improve the reliability thereof.
- the sealing material may be a silicone rubber solution material (Ecoflex).
- the flexible outer casing 1 includes a first flexible base 11 and a second flexible base 12 that are joined to form the inner cavity, and an inner wall of the first flexible base 11 is provided with the array channel 101 for forming The raised structure or/and the recessed structure; the second flexible base 12 is provided with a communication cavity 102, and the communication cavity 102 is disposed at an upper end of the second flexible base 12 body.
- the first flexible substrate 11 and the second flexible substrate 12 are aligned (seal-bonded), and the array channel 101 can communicate with the communication cavity 102 to form a sealed internal cavity 10.
- the first flexible substrate 11 and the second flexible substrate 12 may be bonded to form a flexible outer casing 1 having an internal cavity 10
- the sensitivity is high, and the acquired signal exhibits good linearity and repeatability, and has high stability, accuracy, accuracy and reliability.
- the strain reaches 300% and still works normally. It can be well attached to complex three-dimensional dynamic and static surfaces, such as large deformed human joints (elbow joints, knee joints), with good affinity to the skin, and almost normal for people to work. did not affect. It is the ideal flexible sensor for wearable devices.
- the embodiment of the invention further provides a method for preparing a flexible electronic pressure sensing device, as shown in FIGS. 5 to 12, comprising the following steps:
- a flexible outer casing 1 having a sealed inner cavity 10 is prepared, and the inner cavity 10 includes a plurality of array channels 101 and a communication cavity 102 communicating with the same end faces of the plurality of array channels 101;
- the liquid metal conductor 3 is injected therein, and the electrode 2 is inserted at both ends of the flexible casing 1.
- the liquid metal conductor 3 can be filled in the inner cavity 10, and the end of the electrode 2 is in contact with the liquid metal conductor 3.
- preparing the flexible outer casing 1 includes the following steps:
- injecting the liquid metal conductor 3 into the inner cavity 10 includes the following steps:
- Two syringes are inserted into both ends of the inner chamber 10, one of which has a liquid metal conductor 3 therein; the other syringe draws air from the inner chamber 10, and a syringe having a liquid metal conductor 3 is directed to the interior
- the liquid metal conductor 3 is simultaneously injected into the cavity 10, so that the liquid metal conductor 3 fills the internal cavity 10, and the syringe is pulled out.
- inserting the electrode 2 at both ends of the flexible outer casing 1 includes the following steps:
- Two electrodes 2 are respectively inserted into opposite ends of the inner cavity 10, and are sealed between the electrode 2 and the flexible outer casing 1 using the same semi-solidified flexible material.
- mixing and removing bubbles of the flexible material solution includes the following steps:
- the Ecoflex series silicone rubber solution is placed in a container of a centrifugal mixer, the rotation speed of the centrifugal mixer is 300-400 rpm, and after the holding time is 10-15 s, the rotation speed of the centrifugal mixer is increased to 1400-1600 rpm, and the holding time is maintained. For 25-30 s, a mixed silicone rubber solution is obtained;
- the mixed silicone rubber solution is placed in a vacuum suction device, and the vacuum pump of the vacuum suction device is turned on to obtain a silicone rubber solution after the bubbles are removed; it is understood that the flexible material solution is not limited to the silicone rubber solution.
- Forming the first flexible substrate 11 includes the following steps:
- the first mold 41 filled with the bubble-removed silicone rubber solution in the cavity is transferred to the oven, baked at 80 degrees Celsius for 45-60 minutes (for example, 46 to 59 minutes), and the first flexible substrate 11 is obtained after demolding. ;
- Forming the second flexible substrate 12 includes the following steps:
- the mold is opened (the upper mold 421 is removed), and then the first flexible substrate 11 is fastened to the second flexible body.
- the first flexible base body 11 and the second flexible base body 12 are bonded and sealed, they are left at room temperature for 45-60 minutes, so that the first flexible base body 11 and the second flexible base body 12 are connected and connected flexibly.
- the outer casing 1 forms an inner cavity 10.
- a first mold 41 (material is SU-8 photoresist) prepared by photolithography; a liquid metal conductor eutectic gallium indium ((EGaIn); a highly flexible Ecoflex series material; an ease release 200 release agent. Includes the following steps:
- Second step As shown in Fig. 6 and Fig. 7, the silicone rubber solution in the first step is placed in a vacuum suction device, and the vacuum pump is turned on until all the bubbles in the solution are removed.
- the fourth step the first mold 41 after filling the silicone rubber solution in the third step is moved to the oven and baked at 80 degrees Celsius for 45-60 minutes, as shown in FIG. 9, to obtain the first flexible substrate 11.
- the fifth step spraying a mold release agent on the cavity surface of the second mold 42, filling the cavity of the lower mold 422 with a pipette and joining the upper mold 421 to the lower mold 422, as shown in FIG.
- Step 6 When the second flexible substrate 12 formed in the fifth step is in a semi-solidified state, the demolded first flexible substrate 11 is lightly pressed against the second flexible substrate 12, and is placed when the adhesive seal is intact. The mixture was allowed to stand at room temperature for 45-60 min to obtain a flexible outer casing 1, as shown in FIG. The flexible outer casing 1 is then taken out of the lower mold 422.
- Step 7 Two micro-injectors are respectively inserted into the opposite side walls of the flexible outer casing 1 and protruded into the two ends of the inner cavity 10, and a syringe is used for pumping the air inside the inner cavity 10 to drain the liquid conductor - EGaIn, Another syringe is used to simultaneously inject the liquid conductor (EGaIn) into the internal volume 10.
- a syringe is used for pumping the air inside the inner cavity 10 to drain the liquid conductor - EGaIn
- Another syringe is used to simultaneously inject the liquid conductor (EGaIn) into the internal volume 10.
- the electrode 2 When the liquid conductor (EGaIn) fills the entire internal cavity 10, the electrode 2 is inserted, and a small amount of a silicone rubber solution (obtained in the second step) is sealed to seal the port (the gap between the electrode 2 and the side wall of the flexible outer casing 1).
- a flexible stretchable electronic strain sensor can be obtained, as shown in FIG.
- the method is simple to prepare, can realize mass production at one time, and improves time and cost benefit. It is especially suitable for the field of wearable devices, especially large deformations.
- a flexible electronic pressure sensing device and a preparation method thereof are provided by the embodiments of the present invention, and the strain sensor uses a highly flexible Ecoflex series material as a basic material.
- the flexible electronic pressure sensing device has extremely thin geometrical features, can be less than 1mm thick, and exhibits very good flexibility. The tensile strain reaches 300% and still works normally, and can work with almost any complicated three-dimensional surface.
- the size of the microarray channel 101 (the height and width of the section may be less than 1 mm) is small, and the small pressure causes the microarray to deform and cause a change in resistance.
- the acquired resistance change signal is derived from sealing in the microarray.
- the liquid conductor inside makes the pressure sensor have high sensitivity and anti-noise ability.
- biocompatibility makes it particularly suitable for wearable electronic devices that are integrated on the surface of human skin.
- the method is simple to prepare, can realize mass production at one time, and improves time and cost benefit.
- a flexible electronic pressure sensing device provided by an embodiment of the present invention has high sensitivity in a stress test, and the collected signal exhibits good repeatability on an image, and the measurement is relatively accurate. It can easily be applied to the human body's three-dimensional skin surface without discomfort, and even the knee joint with great deformation can still measure the normal pressure. Good affinity with the skin, almost no effect on people's normal work and study. Ideal for wearable devices
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Abstract
一种柔性电子压力传感装置及其制备方法。柔性电子压力传感装置包括柔性外壳（1），柔性外壳（1）内具有内部容腔（10），内部容腔（10）包括多个阵列通道（101）和连通于多个阵列通道（101）同一端面的连通腔（102），内部容腔（10）内设置有液态金属导体（3），柔性外壳（1）连接有至少两个与液态金属导体（3）相接的电极（2）。柔性电子压力传感装置的制备方法用于制备该柔性电子压力传感装置。该柔性电子压力传感装置能够完全贴合三维复杂静/动态表面的同时完成接触压力的测量。
Description
本发明属于电子压力传感器制作和封装技术领域，尤其涉及一种柔性电子压力传感装置及其制备方法。
随着人们对自己健康状况越来越重视，逐渐热衷于能实时生理参数采集和运动状态分析的可穿戴设备。作为可穿戴设备核心元件之一的传感器系统由于自身柔性不足而限制了可穿戴设备的进一步发展，在实时健康检测、植入式医疗设备、智能家居以及皮肤电子设备等运用中，都迫切需要高性能的柔性电子器件。目前的压力传感器大多数仍由无机材料如硅等制成。一旦产生拉伸或弯曲变形，将会使传感器硬件结构破坏而失效，且在信号采集过程中，灵敏度低，容易受到如呼吸，肌肉收缩等生理噪声的干扰，无法完整而清晰采集数据。
而且随着智能终端的普及，智能生活将我们日常的活动串联在一起。可穿戴电子设备呈现出巨大的市场前景，全球主要的消费电子公司几乎都推出了各自的可穿戴产品，比如苹果公司的Apple
Watch、微软Microsoft Bend和华为的Huawei Watch等。短短几年内各种各样的可穿戴设备不断涌现，从计步、卡路里消耗、饮食习惯、睡眠监测到慢性病预警、电子纹身和视网膜植入物等。极大的丰富了我们生活。然而目前可穿戴传感技术往往基于刚性基底，传感器需要嵌入到刚性封装中，与柔性的人体复杂的三维皮肤表面存在机械上的不匹配，影响了用户的体验和测量的结果。
现有技术中的柔性传感器主要采用以下方式制备。
1. 使用垂直取向的氧化锌(ZnO)纳米线制备高密度的触觉传感器阵列，利用拉伸条件下氧化锌纳米线产生压电效应，将压电电流作为栅极电信号，只需要两个终端电极的情况下得到了具有检测灵敏度的电子皮肤传感器。
2. 以多相反应生成的弹性、低模量微结构的空心球聚吡咯聚合物组成的薄膜，随着力的大小薄膜与电极之间的接触面积变化而检测不同大小的载荷。
3. 通过结构和形状设计，能够利用传统无机材料如金属，硅基等制成三维“波”结构的柔弹性导电元件。使得传统无机导电材料能够随着弹性基底的延展而伸长变形但不会发生断裂等破坏。
4. 利用PDMS和碳纳米管(CNT)形成压阻式互锁的小型拱形结构阵列，开发了一种可以感知压力方法的电子皮肤，这种传感器灵敏度高，甚至可以感知空气流的方向及强烈程度。
5. 利用压阻橡胶制作了基于压阻原理的压力传感器阵列，分散的圆形传感单元被布置在柔性的PET薄片上，银用于制作传感器的电极由于制作材料的柔性实现了传感器阵列的柔性化。
虽然上述应变传感器具有一定的柔性，但是依然无法实现随意地拉伸、弯曲和扭转等特殊形态。缺乏类似皮肤的柔弹性，不能够完全贴合三维复杂静/动态表面的同时完成接触压力的测量。即使集成到可穿戴设备中，由于与人体皮肤表面存在机械上的不匹配，使得用户的体验效果不佳。另外，因为结构设计和封装技术的局限，使得测量的准确性和灵敏度不能兼顾。容易受到人体自身的生理信号的干扰。对于目前碳纳米管和石墨烯等用于柔性传感器的材料制备技术水平工艺还不成熟，也存在不耐高温，适用范围、使用寿命等问题。
本发明的目的在于克服上述现有技术的不足，提供了一种柔性电子压力传感装置及其制备方法，其柔性电子压力传感装置的稳定性、精度和准确度、可靠性佳。
本发明的技术方案是：一种柔性电子压力传感装置，包括柔性外壳，所述柔性外壳内具有内部容腔，所述内部容腔包括多个阵列通道和连通于多个所述阵列通道同一端面的连通腔，所述内部容腔内设置有液态金属导体，所述柔性外壳连接有至少两个与所述液态金属导体相接的电极。
可选地，所述柔性外壳采用降解聚酯材料或硅橡胶材料。
可选地，所述内部容腔内设置有液态导体共晶镓铟。
可选地，所述柔性外壳包括对合连接形成所述内部容腔的第一柔性基体和第二柔性基体，所述第一柔性基体的内壁设置有用于形成所述阵列通道的凸起结构或/和凹陷结构；所述连通腔设置于所述第二柔性基体体。
本发明还提供了一种可穿戴设备，所述可穿戴设备具有上述的一种柔性电子压力传感装置。
本发明还提供了一种柔性电子压力传感装置的制备方法，包括以下步骤：
制备具有内部容腔的柔性外壳，且所述内部容腔包括多个阵列通道和连通于多个所述阵列通道的连通腔；于所述内部容腔内注入液态金属导体，于所述柔性外壳插入至少两个电极，使所述电极与所述液态金属导体相接触。
可选地，制备所述柔性外壳包括以下步骤：
制备第一模具、第二模具和柔性材料溶液，将柔性材料溶液混合后去除气泡；
向所述第一模具中加入混合并去除气泡后的所述柔性材料溶液形成具有多个阵列通道的第一柔性基体；
在所述第二模具中加入混合并去除气泡后的柔性材料溶液，并使柔性材料溶液形成具有连通腔的第二柔性基体；
将所述第一柔性基体压于未完全固化的所述第二柔性基体上，使所述第一柔性基体和所述第二柔性基体一体连接形成柔性外壳，同时使多个阵列通道和连通腔连通形成封闭的内部容腔。
可选地，于所述内部容腔内注入液态金属导体包括以下步骤：
采用两个注射器插入所述内部容腔的两端，其中一个注射器内具有液态金属导体；另一个注射器抽所述内部容腔中的空气，具有液态金属导体的注射器向所述内部容腔内注入液态金属导体，使液态金属导体充满内部容腔，拔出所述注射器。
可选地，于所述内部容腔的两端插入电极包括以下步骤：
将两个电极分别插入所述内部容腔的两端，使用同样的半凝固柔性材料密封内部容腔。
可选地，将柔性材料溶液混合和去除气泡包括以下步骤：
采用Ecoflex系列硅橡胶溶液放入离心混合器的容器中，所述离心混合器的转速为300-400rpm，保持时间为10-15s后，所述离心混合器的转速提高到1400-1600rpm，保持时间为25-30s，得到混合后的硅橡胶溶液；
把混合后的硅橡胶溶液放入真空抽滤装置中，开启所述真空抽滤装置的真空泵，得到去除气泡后的硅橡胶溶液；
形成第一柔性基体包括以下步骤：
在所述第一模具表面喷至少一层脱模剂，接着使用移液器往所述第一模具的型腔中填充去除气泡后的硅橡胶溶液；
将所述第一模具移到烤箱中，在80摄氏度的条件下烘烤45-60min，脱模后得到具有多个阵列通道的第一柔性基体；
在所述第二模具表面喷至少一层脱模剂，接着使用移液器往所述第二模具的型腔中填充去除气泡后的硅橡胶溶液，然后合模；
待所述第二模具的型腔中的硅橡胶溶液半凝固形成第二柔性基体时，开模，然后将第一柔性基体压在第二柔性基体上，使所述第一柔性基体和所述第二柔性基体对合连接形成连通腔，和连通于多个所述阵列通道同一端面的连通腔。
本发明所提供的一种柔性电子压力传感装置及其制备方法，柔性电子压力传感装置具有高度挠性、拉伸性好且几何结构简单、尺寸薄特点，使该传感器摆脱了物理配件的束缚，能够顺应地贴敷于皮肤，从而实现了任意位置的测量，即使是变形量极大的各个关节处。并且，该传感器在工作时，主要采集由密封微阵列通道形变引起的液体导体电阻变化信号，灵敏度高，抗干扰能力强，可以随意地拉伸、弯曲和扭转，特别适用于可穿戴设备领域尤其是大变形情况等，能够完全贴合三维复杂静/动态表面的同时完成接触压力的测量，且稳定性、精度、准确度和可靠性高，不容易受到人体自身的生理信号的干扰，且内部容腔为封闭式结构，其耐高温，适用范围广、使用寿命长。
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明实施例提供的一种柔性电子压力传感装置的剖面示意图；
图2是本发明实施例提供的一种柔性电子压力传感装置中柔性外壳的剖面示意图；
图3是本发明实施例提供的一种具有圆形柔性外壳的柔性电子压力传感装置的平面示意图；
图4是本发明实施例提供的一种具有矩形形柔性外壳的柔性电子压力传感装置的平面示意图；
图5是本发明实施例提供的一种柔性电子压力传感装置的制备方法中制备硅橡胶溶液的平面示意图；
图6是本发明实施例提供的一种柔性电子压力传感装置的制备方法中硅橡胶溶液混合后的平面示意图；
图7是本发明实施例提供的一种柔性电子压力传感装置的制备方法中硅橡胶溶液去除气泡后的平面示意图；
图8是本发明实施例提供的一种柔性电子压力传感装置的制备方法中在第一模具中填充硅橡胶溶液时的平面示意图；
图9是本发明实施例提供的一种柔性电子压力传感装置的制备方法中在第一模具中填充硅橡胶溶液后经烘烤后的平面示意图；
图10是本发明实施例提供的一种柔性电子压力传感装置的制备方法中在第二模具中加入硅橡胶溶液且合模后的平面示意图；
图11是本发明实施例提供的一种柔性电子压力传感装置的制备方法中将第一柔性基体与第二柔性基体压合时的平面示意图；
图12是本发明实施例提供的一种柔性电子压力传感装置的制备方法中得到的柔性电子压力传感装置的剖面示意图。
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
需要说明的是，当元件被称为“固定于”或“设置于”另一个元件，它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接于”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。
还需要说明的是，本发明实施例中的左、右、上、下等方位用语，仅是互为相对概念或是以产品的正常使用状态为参考的，而不应该认为是具有限制性的。
如图1和图2所示，本发明实施例提供的一种柔性电子压力传感装置，包括柔性外壳1，柔性外壳1可以采用硅橡胶材料（例如Ecoflex系列）等制成。所述柔性外壳1内具有长度和横截面可在外力作用下变形的内部容腔，内部容腔10可为封闭腔体，所述内部容腔10内设置有液态金属导体3，液态金属导体3可以充满内部容腔10。所述内部容腔10包括多个阵列通道（微阵列通道）101和连通于多个所述阵列通道101同一端面的连通腔102，阵列通道101可以呈横向或纵向间隔均布，也可以采用纵横交错相通的排布形式（即局部呈“井”字形排布），当然，阵列通道101也可以由矩阵排列的柱形凹腔或半球形凹腔形成等。所述柔性外壳1的两端设置有至少两个与所述液态金属导体相接的电极2，电极2的端部与内部容腔10内的液态金属导体3接触，在该传感器工作时，由于外部载荷的作用造成内部容腔10的形状（长度和横截面）改变，从而改变液态金属导体3的电阻。两端的电极2可以连接有放大模块和恒流电源模块，在两端的电极2加上恒流电源。把液态金属导体3的电阻信号变为方便测量的电压信号，通过对电压信号的分析得到相应的应变值，该传感器在工作时主要采集密封的内部容腔10中液态金属导体3电阻变化信号，具有高度挠性、可拉伸性和薄的几何特点，使之能直接与任何柔性执行机构集成，且灵敏度高，抗干扰能力强，该柔性传感器在应变达到300%时仍能正常工作，可以随意地拉伸、弯曲和扭转，特别适用于可穿戴设备领域尤其是大变形情况等，能够完全贴合三维复杂静/动态表面的同时完成接触压力的测量，且稳定性、精度、准确度和可靠性高，不容易受到人体自身的生理信号的干扰，且内部容腔10为封闭式结构，其耐高温，适用范围广、使用寿命长。
可选地，同一柔性外壳1中可以设置有一个或至少两个内部容腔10，每个内部容腔10可以对应设置有两个或至少两个电极2。
可选地，阵列通道101的高度和连通腔102高度均可以小于1mm。
可选地，内部容腔10的整体高度可以小于1mm。
可选地，柔性电子压力传感装置的厚度可以小于1mm，即柔性外壳1的厚度可以小于1mm，可以很好地适用于智能穿戴设备中。柔性外壳1可以呈扁平状。如图3和图4所示，柔性外壳1的外形可以是多边形（例如矩形等）、圆形、异形等。
可选地，所述柔性外壳1采用降解聚酯材料或硅橡胶材料，本实施例中，柔性外壳1采用Ecoflex系列的硅橡胶材料作为基本材料，具体应用中，可以采用德国BASF公司所制造的脂肪族芳香族无规共聚酯（Ecoflex），其单体可为：己二酸、对苯二甲酸、1,4-丁二醇。
可选地，所述内部容腔10内设置有液体导体共晶镓铟作为液态金属导体，当然，也可以设置其它液态金属导体。电极2可以从柔性外壳1长度方向的两端或内部容腔10的两端插入至前端与内部容腔10内设置有液态金属导体3相接触。电极2与柔性外壳1之间可以通过密封材料密封，以进一步提高其可靠性。密封材料可以为硅橡胶溶液材料（Ecoflex）。
可选地，所述柔性外壳1包括对合连接形成所述内部容腔的第一柔性基体11和第二柔性基体12，所述第一柔性基体11的内壁设置有用于形成所述阵列通道101的凸起结构或/和凹陷结构；所述第二柔性基体12设置有连通腔102，所述连通腔102设置于所述第二柔性基体12体的上端。第一柔性基体11和第二柔性基体12对合（密封键合），阵列通道101即可与连通腔102连通形成密封的内部容腔10。第一柔性基体11和第二柔性基体12可以粘接形成具有内部容腔10的柔性外壳1
可选地，第一柔性基体11内可以一体成型有矩阵排列的多个柱状凸起，各柱状凸起之间的间隙可以形成阵列通道101。或者，第一柔性基体11内可以一体成型有矩阵排列的多个凹穴，各凹穴连通也可以形成阵列通道101。可以理解地，阵列通道101的形成方式可不限。
在该柔性电子压力传感装置的拉伸试验中，其灵敏度较高，且采集的信号表现出良好的线性度和可重复性，稳定性、精度、准确度和可靠性高。应变达到300%仍能正常工作，能较好的附着在复杂的三维动静态曲面，如大变形的人体关节处(肘关节、膝关节)，与皮肤亲和性好，对人正常工作学习几乎没影响。是可穿戴设备的理想柔性传感器。
本发明还提供了一种可穿戴设备，所述可穿戴设备具有上述的柔性电子压力传感装置。可穿戴设备可以为智能手表、智能手环、智能眼镜、智能服装、虚拟现实头盔等。通过柔性电子压力传感装置的应用，该柔性电子压力传感装置的表现厚度不足1mm，且表现出非常好的柔弹性，拉伸应变达到300%仍能正常工作，足以和人体皮肤媲美，另外采用生物相容性的Ecoflex材料作为基本材料，在集成到穿戴式设备中人几乎没有不适应感。并且，该传感器采集的是密封内部容腔10电阻信号，排除了外界噪声对信号的干扰，采集数据较为准确。通过光刻工艺刻画的内部容腔10大大提高了传感器的灵敏度。当然，本发明实施例所提供的柔性电子压力传感装置也可以应用于其它设备上，也属于本发明的保护范围。
本发明实施例还提供了一种柔性电子压力传感装置的制备方法，如图5至12所示，包括以下步骤：
制备具有密封的内部容腔10的柔性外壳1，且所述内部容腔10包括多个阵列通道101和连通于多个所述阵列通道101同一端面的连通腔102；于所述内部容腔10内注入液态金属导体3，于所述柔性外壳1的两端插入电极2。液态金属导体3可以充满内部容腔10内，电极2的端部与液态金属导体3接触。
具体地，制备所述柔性外壳1包括以下步骤：
制备第一模具41、第二模具42和柔性材料溶液，将柔性材料溶液混合后去除气泡；
向第一模具41中加入混合并去除气泡后的所述柔性材料溶液形成具有多个阵列通道101的第一柔性基体11；
在第二模具42上加入混合并去除气泡后的柔性材料溶液，并使柔性材料溶液形成具有连通腔102且半凝固的第二柔性基体12；
将所述第一柔性基体11压于未完全固化的所述柔性材料第二柔性基体（第二柔性基体12）上，使所述第一柔性基体11和第二柔性基体12一体连接形成柔性外壳1，同时使多个阵列通道101和连通腔102连通形成封闭的内部容腔10；
具体地，于所述内部容腔10内注入液态金属导体3包括以下步骤：
采用两个注射器插入所述内部容腔10的两端，其中一个注射器内具有液态金属导体3；另一个注射器抽所述内部容腔10中的空气，具有液态金属导体3的注射器向所述内部容腔10内同步注入液态金属导体3，使液态金属导体3充满内部容腔10，拔出所述注射器。
具体地，于所述柔性外壳1（内部容腔10）的两端插入电极2包括以下步骤：
将两个电极2分别插入所述内部容腔10的相对的两端，使用同样的半凝固柔性材料密封于电极2与柔性外壳1之间。
具体地，将柔性材料溶液混合和去除气泡包括以下步骤：
采用Ecoflex系列硅橡胶溶液放入离心混合器的容器中，所述离心混合器的转速为300-400rpm，保持时间为10-15s后，所述离心混合器的转速提高到1400-1600rpm，保持时间为25-30s，得到混合后的硅橡胶溶液；
把混合后的硅橡胶溶液放入真空抽滤装置中，开启所述真空抽滤装置的真空泵，得到去除气泡后的硅橡胶溶液；可以理解地，柔性材料溶液不限于硅橡胶溶液。
形成第一柔性基体11包括以下步骤：
在所述第一模具41表面喷至少一层脱模剂（ease release 200脱模剂），接着使用移液器往所述第一模具41的型腔中填充去除气泡后的硅橡胶溶液；
将型腔中充满去除气泡后的硅橡胶溶液的第一模具41移到烤箱中，在80摄氏度的条件下烘烤45-60min（例如46至59 min），脱模后得到第一柔性基体11；
形成第二柔性基体12包括以下步骤：
第二模具42包括上模421和下模422，在所述第二模具42的下模422的型腔表面喷至少一层脱模剂，接着使用移液器往所述第二模具42的下模422的型腔中填充去除气泡后的硅橡胶溶液，然后将上模421合模于下模422；
待所述第二模具42的型腔中的硅橡胶溶液半凝固形成第二柔性基体12时，开模（将上模421移开），然后将第一柔性基体11扣合压于第二柔性基体12上，待第一柔性基体11与第二柔性基体12粘接密封完好时放在室温静置45-60min，使所述第一柔性基体11和所述第二柔性基体12对合连接柔性外壳1并形成内部容腔10。
具体应用中，可以参考如下流程：
通过光刻法制作好的第一模具41(材料为SU-8光刻胶)；液体金属导体共晶镓铟((EGaIn)；具有高度柔性的Ecoflex系列材料；ease release 200脱模剂。具体包括以下步骤：
第一步：如图5和图6所示，分别取等质量的Ecoflex 1A和1B，放入离心混合器的容器中，为保证两种硅橡胶充分均匀混合。离心混合器转速为300-400rpm，保持时间为10-15s（12-14 s），接着转速提高到1400-1600rpm，保持时间为25-30s。
第二步：如图6和图7所示，把第一步中的硅橡胶溶液放入真空抽滤装置中，打开真空泵，直到去除溶液中所有气泡。
第三步：如图8所示，把第一模具41表面喷上一层脱模剂，接着使用移液器往模具的型腔中填充满第二步中得到的硅橡胶溶液。
第四步：第三步中填充硅橡胶溶液后的第一模具41移到烤箱中，在80摄氏度的条件下烘烤45-60min，如图9所示，得到第一柔性基体11。
第五步：对第二模具42的型腔表面喷上一层脱模剂，使用移液器填充下模422的型腔并将上模421合于下模422，如图10所示。
第六步：在第五步中形成的第二柔性基体12处于半凝固状态时，把脱模的第一柔性基体11轻轻压在第二柔性基体12上，待粘接密封完好时放在室温静置45-60min，得到柔性外壳1，如图11所示。再将柔性外壳1从下模422取出。
第七步：取两只微型注射器分别插入柔性外壳1的相对的两侧壁并伸入内部容腔10的两端，一个注射器用来抽内部容腔10里面的空气，引流液体导体-EGaIn，另一个注射器用来同步持续注入液体导体（EGaIn）到内部容腔10中。当然，也可以先对内部容腔10抽真空，再将液体导体注入内部容腔10。当液体导体（EGaIn）填充满整个内部容腔10时，插入电极2，取少量的硅橡胶溶液（第二步中得到）密封住端口（电极2与柔性外壳1侧壁之间的间隙），这样就可以得到柔性可拉伸电子应变传感器，如图12所示。该方法制备简单，可一次性实现批量生产，提高了时间和成本效益。特别适用于可穿戴设备领域尤其是大变形情况等。
本发明实施例所提供的一种柔性电子压力传感装置及其制备方法，该应变传感器以高度柔性的Ecoflex系列材料作为基本材料。该柔性电子压力传感装置具有极薄的几何特点，其厚度可以不足1mm，且表现出非常好的柔弹性，拉伸应变达到300%仍能正常工作，几乎能与任何复杂的三维表面集成工作，另外微阵列通道101尺寸（截面高度、宽度均可以小于1mm）较小，很小的压力即会使微阵列变形而引起电阻变化，同时，所采集的电阻变化信号是源自密封在微阵列内的液体导体，使得该压力传感器具有较高的灵敏度和抗噪声干扰能力。使用生物相容性作为基本材料使得尤其适合集成在人体皮肤表面的可穿戴电子设备。该方法制备简单，可一次性实现批量生产，提高了时间和成本效益。本发明实施例所提供的一种柔性电子压力传感装置，在压力测试中，灵敏度较高，且采集的信号在图像上表现出良好可重复性，测量较为精确。能轻松与人体三维皮肤表面贴敷而不会有不适感，即使是变形量极大的膝关节处仍能对压力进行正常感知测量。与皮肤亲和性好，对人正常工作学习几乎没影响。是可穿戴设备的理想柔性传感器
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换或改进等，均应包含在本发明的保护范围之内。
Claims (10)
- 一种柔性电子压力传感装置，其特征在于，包括柔性外壳，所述柔性外壳内具有内部容腔，所述内部容腔包括多个阵列通道和连通于多个所述阵列通道的连通腔，所述内部容腔内设置有液态金属导体，所述柔性外壳连接有至少两个与所述液态导体或半液态导体相接的电极。
- 如权利要求1所述的一种柔性电子压力传感装置，其特征在于，所述柔性外壳包括对合连接形成所述内部容腔的第一柔性基体和第二柔性基体，所述第一柔性基体的内壁设置有用于形成所述阵列通道的凸起结构或/和凹陷结构；所述连通腔设置于所述第二柔性基体体。
- 如权利要求1或2所述的一种柔性电子压力传感装置，其特征在于，所述柔性外壳采用降解聚酯材料或硅橡胶材料。
- 如权利要求1或2所述的一种柔性电子压力传感装置，其特征在于，所述内部容腔内设置有液态金属导体共晶镓铟。
- 一种可穿戴设备，其特征在于，所述可穿戴设备具有如权利要求1至4中任一项所述的一种柔性电子压力传感装置。
- 一种柔性电子压力传感装置的制备方法，其特征在于，包括以下步骤：制备具有内部容腔的柔性外壳，且所述内部容腔包括多个阵列通道和连通于多个所述阵列通道的连通腔；于所述内部容腔内注入液态金属导体，于所述柔性外壳插入至少两个电极，使所述电极与所述液态金属导体相接触。
- 如权利要求6所述的一种柔性电子压力传感装置的制备方法，其特征在于，制备所述柔性外壳包括以下步骤：制备第一模具、第二模具和柔性材料溶液，将柔性材料溶液混合后去除气泡；向所述第一模具中加入混合并去除气泡后的所述柔性材料溶液形成具有多个阵列通道的第一柔性基体；在所述第二模具中加入混合并去除气泡后的柔性材料溶液，并使柔性材料溶液形成具有连通腔的第二柔性基体；将所述第一柔性基体压于未完全固化的所述第二柔性基体上，使所述第一柔性基体和所述第二柔性基体一体连接形成柔性外壳，同时使多个阵列通道和连通腔连通形成封闭的内部容腔。
- 如权利要求7所述的一种柔性电子压力传感装置的制备方法，其特征在于，于所述内部容腔内注入液态金属导体包括以下步骤：采用两个注射器插入所述内部容腔的两端，其中一个注射器内具有液态金属导体；另一个注射器抽所述内部容腔中的空气，具有液态金属导体的注射器向所述内部容腔内注入液态金属导体，使液态金属导体充满内部容腔，拔出所述注射器。
- 如权利要求6所述的一种柔性电子压力传感装置的制备方法，其特征在于，于所述内部容腔的两端插入电极包括以下步骤：将两个电极分别插入所述内部容腔的两端，使用同样的半凝固柔性材料密封于所述电极与所述柔性外壳之间。
- 如权利要求7所述的一种柔性电子压力传感装置的制备方法，其特征在于，将柔性材料溶液混合和去除气泡包括以下步骤：采用Ecoflex系列硅橡胶溶液放入离心混合器的容器中，所述离心混合器的转速为300-400rpm，保持时间为10-15s后，所述离心混合器的转速提高到1400-1600rpm，保持时间为25-30s，得到混合后的硅橡胶溶液；把混合后的硅橡胶溶液放入真空抽滤装置中，开启所述真空抽滤装置的真空泵，得到去除气泡后的硅橡胶溶液；形成第一柔性基体包括以下步骤：在所述第一模具表面喷至少一层脱模剂，接着使用移液器往所述第一模具的型腔中填充去除气泡后的硅橡胶溶液；将所述第一模具移到烤箱中，在80摄氏度的条件下烘烤45-60min，脱模后得到具有多个阵列通道的第一柔性基体；使用移液器往所述第二模具的型腔中填充去除气泡后的硅橡胶溶液，然后合模；待所述第二模具的型腔中的硅橡胶溶液半凝固形成第二柔性基体时，开模，然后将第一柔性基体压在第二柔性基体上，使所述第一柔性基体和所述第二柔性基体对合连接形成连通腔，和连通于多个所述阵列通道同一端面的连通腔。
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