WO2019117388A1 - Photonic wiring comprising coated nanowire and manufacturing method therefor - Google Patents

Photonic wiring comprising coated nanowire and manufacturing method therefor Download PDF

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Publication number
WO2019117388A1
WO2019117388A1 PCT/KR2018/000458 KR2018000458W WO2019117388A1 WO 2019117388 A1 WO2019117388 A1 WO 2019117388A1 KR 2018000458 W KR2018000458 W KR 2018000458W WO 2019117388 A1 WO2019117388 A1 WO 2019117388A1
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nanowire
contact
micropipette
refractive index
optical
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PCT/KR2018/000458
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French (fr)
Korean (ko)
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김종국
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주식회사 레신저스
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Publication of WO2019117388A1 publication Critical patent/WO2019117388A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02033Core or cladding made from organic material, e.g. polymeric material
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02Optical fibres with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region

Definitions

  • the present invention relates to an optical wiring including a coated nanowire and a manufacturing method thereof, and more particularly, to an optical wiring including a nanowire coated with a coating solution having a lower refractive index than a nanowire and a manufacturing method thereof.
  • High density optical integrated circuits based on the assembly of nanoscale optical components are new future technologies that can go beyond the limits of electronic integrated circuits.
  • a variety of nanoscale photonic elements have been developed for the implementation of high-density optical integrated circuits.
  • Developing a technology that interconnects these components is a key challenge that is fundamental to the realization of nanoscale photonic integration.
  • the most promising approach for connecting nanoscale components is to integrate a nanowire waveguide between two spaced apart components to signal the evanescent coupling.
  • a prism lens or the like is used to change the direction of the light, and then the contacts between the optical fibers are connected to each other (Han-Soon Lee et al., Optics Express 22 (10) 11778-11787 (2014)).
  • the light from the VCSEL must be aligned with the prism lens, and the light from the VCSEL must be aligned correctly with the optical fiber core.
  • the diameter of the core of the optical fiber is as small as about 10 ⁇ m, many defects occur due to the mechanical error occurring in alignment.
  • an active alignment method is used, but this requires a lot of time and cost, and still shows a significant defect rate. Further, such a device has a limitation in reducing the size because the prism device is essentially necessary.
  • Korean Patent No. 10-1583736 discloses a method of optically wiring a nanowire by directly growing a nanowire to a desired position three-dimensionally.
  • the optical signal transmitted is unstable and the size of the optical signal according to the wavelength can be changed when transmitting the multi-wavelength optical signal.
  • foreign substances such as external dust may adhere or be damaged by mechanical impact.
  • the present invention is further developed to solve problems such as optical signal instability and stability against external environment when nanowires are manufactured in three dimensions and used in optical wiring.
  • the present invention relates to optical wiring comprising a coated nanowire for connecting a first contact and a second contact, wherein the nanowire comprises at least one polymer selected from the group consisting of polystyrene, methyl polymethacrylate and polycarbonate And the nanowire is coated with a material having a lower refractive index than the polymer.
  • the refractive index of the material having a refractive index lower than that of the polymer is 1.33 or more.
  • the material having a lower refractive index than the polymer is a high-molecular fluororesin.
  • the optical wiring further includes a nano-rod formed on at least one of the first contact and the second contact, and the nanowire is connected to the nanowire in the presence of the nano-rod.
  • the viscosity of the material having a lower refractive index than the polymer is in the range of 10 mPa ⁇ s to 500 mPa ⁇ s.
  • the present invention also relates to a method of manufacturing an optical line including a coated nanowire for connecting a first contact and a second contact, comprising the steps of: a) filling a first micropipette with a solution of a substance to form a nanowire; b) coaxially aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact; c) forming a meniscus of the material solution to form the nanowires; d) evaporating the solvent of the material solution to form the nanowire by lifting up the first micropipette; e) contacting the first micropipette with a second contact spaced apart from the first contact to produce a nanowire; f) filling the second micropipette with the coating solution; And g) moving the second micropipette along the nanowire to discontinuously coat the coating solution.
  • the coating solution has a lower refractive index than the refractive index of the nanowire.
  • the refractive index of the coating solution is 1.33 or more.
  • the viscosity of the coating solution is from 10 mPa ⁇ s to 500 mPa ⁇ s.
  • the optical wiring according to the present invention can improve optical signal characteristics due to reduction of coupling loss to the substrate.
  • the optical wiring according to the present invention exhibits stable optical signal characteristics without significant influence on the external environment and the change of the optical signal wavelength.
  • FIG. 1 (a) is a schematic view showing a part of a method for manufacturing an optical wiring according to the present invention
  • FIG. 1 (b) is a schematic view showing an optical wiring manufactured according to the present invention.
  • FIG. 2 is a graph showing optical signals according to wavelengths in the case of using coated nanowires as optical wiring according to the present invention.
  • meniscus means a curved surface formed by the liquid surface of the tube due to the interfacial tension. Depending on the nature of the liquid, the liquid surface becomes concave or convex.
  • first contact refers to a portion that emits light, for example, a light source such as an LED or an LD, or a light source such as a waveguide or an optical fiber, Means and apparatus.
  • second contact used in the present invention means a portion for receiving light passing through an optical wiring, and may be a direct optical detecting means such as a photodetector PD, or a light source such as a waveguide or an optical fiber And means for receiving light, including transmitting light. It should be apparent to those skilled in the art that the terms first contact and second contact used in the present invention are arbitrary and may be used in the opposite sense depending on the direction of light transmission and reception.
  • the present invention relates to an optical wiring including a coated nanowire for connecting a first contact and a second contact requiring optical signal connection.
  • the nanowires of the present invention may be configured to include all organic polymers capable of forming nanowires, and preferably comprise at least one polymer selected from the group consisting of polystyrene, polymethylmethacrylate, and polycarbonate. .
  • the known polystyrene has a refractive index of 1.59
  • the polymethylmethacrylate has a refractive index of 1.48
  • the polycarbonate has a refractive index of 1.57.
  • the coating solution for coating the nanowires of the present invention is a material having a lower refractive index than the organic polymer used for forming the nanowires.
  • the refractive index of the coating solution for coating the nanowire is preferably 1.33 or more.
  • the wavelength difference (based on 589 nm) of the coating solution coating the nanowire and the nanowire can be 0.05 to 0.5, preferably 0.1 to 0.4, and more preferably 0.25 to 0.14.
  • the coating solution for coating the nanowire of the present invention needs to control the viscosity to uniformly coat the nanowire formed on the nanowire, and the preferable viscosity is 1 mPa ⁇ s to 1000 mPa ⁇ s to be.
  • a material having a lower refractive index than the polymer and satisfying the viscosity range may be a polymer fluororesin or CYTOP of Asahi Glass Co., Ltd.
  • the refractive index of CYTOP is 1.34 at a wavelength of 589 nm, and the viscosity can be adjusted to 10 mPa ⁇ s to 500 mPa ⁇ s.
  • the diameter of the nanowires produced may be less than or equal to 500 ⁇ m (zero inclusive).
  • the coating of the nanowire may be 0.1 to 100 [mu] m thick. Excessive thickness can cause problems due to expansion / contraction.
  • the optical wiring may further include a nano rod formed on at least one of the first contact and the second contact.
  • the optical wiring may include a first contact or a second contact, Can be optically wired in a connected form.
  • the nanorod according to the present invention may be formed on at least one of the first contact and the second contact.
  • the nanorod may be formed at the first contact, the second contact, or both the first contact and the second contact.
  • the nanowire according to the present invention may include a nanorod formed on the second contact to reduce light loss of the nanowire because the nanowire may generate more light loss at the second contact portion due to the manufacturing method.
  • the nano-rods may have a cylindrical shape or a shape in which the outer peripheral surface of the nano-rods is narrowed toward the upper side or the lower side, that is, a truncated cone shape.
  • the outer circumferential surface of the nano-rods has an angle of more than -35 degrees to less than +35 degrees with respect to the axis of the height of the nano-rods, preferably an angle of not less than -10 degrees and not more than + .
  • the "axis in the height direction of the nanorod” means an axis perpendicular to the direction in which the nanorod grows, i.e., the surface on which the nanorod is formed.
  • the shape of the nano rod is most preferably narrowed toward the upper side.
  • the outer circumferential surface of the nano rod has an angle of less than 35 degrees (not equal to 0) with respect to the axis of the nano rod in the height direction, and preferably an angle of not more than 10 degrees (not equal to 0).
  • the height of the nano-rods may be 0.5 m or more, and preferably 0.5 to 100 m. If the height is less than 0.5 ⁇ m, the light loss reduction effect obtained by the presence of the nano-rod can not be obtained. If the height exceeds 100 ⁇ m, the shape and size of the final product may be affected. However, the height of the nano-rods can be adjusted in consideration of the size of the nano-rods, the nanowires, the substrate (chips), and the distance between the contacts.
  • the lower diameter of the nano-rods may be between 0.5 ⁇ m and 500 ⁇ m. The lower diameter of the nano-rod can be adjusted according to the size of the light-emitting contact and the amount of light emitted.
  • the present invention also relates to a method of manufacturing an optical line including a coated nanowire for connecting a first contact and a second contact.
  • the manufacturing method of the optical line may include the following steps.
  • the first micropipette is filled with a substance solution to form a nanowire (step a).
  • the material solution to form the nanowire contains all the materials capable of forming the nanowire, and includes most of the organic matter.
  • the material solution for forming the nanowire means a solution containing a solvent and at least one polymer selected from the group consisting of polystyrene, polymethyl methacrylate and polycarbonate.
  • the solvent can be any material that can be easily evaporated (volatile material) and can include any material used in the art suitable for making the present invention.
  • step (b) of aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact is preferably performed using two optical lenses to align the x-axis and the y-axis, respectively.
  • the nanowire grown using a micropipette is not aligned with the coaxial axes due to an error occurring in the other direction, so that the optical transmission loss of the connection portion increases.
  • micropipette used in the present invention may be manufactured by using a pipette puller to a desired diameter, or a manufactured micropipette may be purchased and used.
  • the size of the nanowire can be adjusted according to the diameter of the end (inlet, opening) of the micropipette.
  • micropipette as used in the present invention is a generic term for all the tools used to dispense or draw liquids and includes all the tools that can perform the same function.
  • step (c) is performed to form a meniscus of the material solution to form the nanowires.
  • the first micropipette filled with the material solution for forming the nanowire is spaced from the first contact so that the material solution for forming the nanowire forms a meniscus.
  • the step (d) of evaporating the solvent of the material solution for forming the nanowire by lifting up the first micropipette When the micropipette is lifted up while maintaining a distance to induce the meniscus of the material solution to form the nanowire, the liquid (solvent) inside rapidly evaporates and the dissolved substance solidifies to form a columnar shape.
  • the direction in which the first micropipette is lifted is determined in consideration of the distance between the first and second spaced apart contacts, the lifting speed, etc., and a specific portion of the nanowire to be manufactured must be controlled so as not to be rapidly changed in direction, The direction of lifting should be adjusted so as to minimize the loss of light to the part.
  • the first micropipette is brought into contact with the second contact spaced apart from the first contact to manufacture a nanowire (step e).
  • step (f) of filling the second micropipette with the coating solution preferably contains a material having a lower refractive index than the refractive index of the nanowire. Further, the viscosity of the coating solution may be from 1 mPa ⁇ s to 1,000 mPa ⁇ s, and preferably from 10 mPa ⁇ s to 500 mPa ⁇ s.
  • the second micropipette is moved along the nanowire to discontinuously apply the coating solution (step g).
  • the coating solution is preferably applied to have a thickness of 0.4 to 100 ⁇ m.
  • the coating may not uniformly occur.
  • the coating is applied at a thickness exceeding 100 ⁇ m, the reliability of the solution expansion / contraction may occur.
  • the second micropipette is required to apply the coating solution along the top surface of the nanowire and to control the nanowire to be coated as a whole. This can be conveniently solved by being controlled through an image recognition program. It is necessary to apply the coating solution so that a portion not coated on the nanowire does not occur. If there is an uncoated portion, the transfer mode instability may occur there.
  • FIG. 1 is a view showing a method of manufacturing an optical wiring according to the present invention and optical wiring produced therefrom.
  • FIG. Specifically, Fig. 1 (a) is a schematic view showing a step g of the method for manufacturing an optical wiring according to the present invention
  • Fig. 1 (b) is a schematic view showing a coated optical wiring fabricated according to the present invention.
  • the nano-rod when the present invention includes a nano-rod, the nano-rod may be prepared by the following method and before the nanowire is manufactured (before the step a):
  • the method of manufacturing the nanorod is the same as the method of manufacturing the nanowire except for the special mention, and includes all the contents of Patent Application No. 2017-0142404.
  • the nanorod material solution may comprise a solution comprising at least one polymer selected from the group consisting of polystyrene, polymethyl methacrylate, and polycarbonate, such as a solution of a material to form a nanowire.
  • the micropipette is coaxially aligned so that the longitudinal axis of the micropipette is aligned with the first contact or the axis perpendicular to the surface of the second contact using optical lenses of x and y axis perpendicular to each other.
  • the step of lifting the micropipette in a direction perpendicular to the surface of the contact and evaporating the solvent of the nanorod material solution to manufacture the nanorod is performed by moving the micropipette in a direction in which light is emitted, .
  • the lifting speed of the micropipette can be raised while accelerating or decelerating so that the outer circumferential surface of the nano-rod has a shape narrowing toward the upper side or the lower side.
  • the lifting speed (drawing speed) can be adjusted in consideration of the angle with respect to the axis in the height direction of the nano-rod, the height of the nano-rod, and the like.
  • the pressure applied to the micropipette can be adjusted so that the outer circumferential surface of the nano-rod has a shape narrowing toward the upper side or the lower side.
  • a polymethyl methacrylate powder was dissolved in a xylene solvent at a concentration of 0.5 wt% to prepare a solution for forming nanowires.
  • the material solution to form the nanowires was filled in a micropipette having a tip diameter of 0.5 mu m.
  • the micropipette was brought into contact with the first contact to create a meniscus of the substance solution to form the nanowire outside the opening of the micropipette.
  • the micropipette was lifted to remove the solvent and to grow the nanowires.
  • the nanowires produced are about 8 ⁇ m in diameter.
  • the micropipette was brought into contact with the upper portion of the nano-rods formed at the second contact points of the chip to complete optical wiring using nanowires.
  • the first contact and the second contact are separated by about 500 mu m.
  • the produced nanowire was referred to as Production Example 1.
  • the nanowire was coated with water having a refractive index of 1.33 so as to cover the prepared nanowire (Preparation Example 1).
  • the results are shown in Fig. 2, in the uncoated nanowire (Production Example 1), the change in the intensity of the optical signal was great in accordance with the change of the wavelength, whereas the nanowire coated with water (Production Example 2) It can be seen that the intensity of the optical signal is constant. Thus, it can be seen that coated nanowires are more suitable for use as optical wiring.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

The present invention relates to photonic wiring comprising a coated nanowire for connecting a first contact point and a second contact point. The photonic wiring comprising a coated nanowire, according to the present invention, can improve an optical signal characteristic by a reduction of optical coupling loss in a substrate and exhibit a stable optical signal characteristic without significant influence from changes in an external environment and an optical signal wavelength.

Description

코팅된 나노선을 포함하는 광배선 및 이의 제조방법Optical wiring including coated nanowires and a method for manufacturing the same
본 발명은 코팅된 나노선을 포함하는 광배선 및 이의 제조방법에 관한 것으로서, 구체적으로는 나노선보다 굴절률이 낮은 코팅 용액을 코팅된 나노선을 포함하는 광배선 및 이의 제조방법에 관한 것이다.The present invention relates to an optical wiring including a coated nanowire and a manufacturing method thereof, and more particularly, to an optical wiring including a nanowire coated with a coating solution having a lower refractive index than a nanowire and a manufacturing method thereof.
나노스케일 광학 구성요소들의 조립에 기반한 고밀도 광집적회로는 전자집적회로의 한계를 넘을 수 있는 새로운 미래기술이다. 지난 10여 년간 고밀도 광집적회로의 구현을 위해 다양한 종류의 나노스케일 광학 구성요소(nanoscale photonic elements)들이 개발되어 왔다. 이러한 구성요소들을 서로 연결하는 기술을 개발하는 것은, 나노스케일 광집적(nanoscale photonic integration)의 실현에 가장 기초가 되는 핵심과제이다. 나노스케일 구성요소 간 연결의 가장 유망한 접근방법은, 두 개의 떨어진 구성요소 사이에 나노선 광도파관(nanowire waveguide)을 집적시켜 에바네센트 결합(evanescent coupling)으로 신호를 주고받는 것이다.High density optical integrated circuits based on the assembly of nanoscale optical components are new future technologies that can go beyond the limits of electronic integrated circuits. Over the past decade, a variety of nanoscale photonic elements have been developed for the implementation of high-density optical integrated circuits. Developing a technology that interconnects these components is a key challenge that is fundamental to the realization of nanoscale photonic integration. The most promising approach for connecting nanoscale components is to integrate a nanowire waveguide between two spaced apart components to signal the evanescent coupling.
현재까지 나노선 광도파관을 집적시키는 기술은, 이미 합성된 나노선을 평면상에서 수동으로 조립하는 방법(in-plane manual assembly)에 의존하고 있다. 하지만, 평면상에서의 조립은 나노선에서 기판으로의 광손실이 일어나고, 미세탐침(microprobe) 등을 이용하는 수동 조립은 공정이 매우 복잡하고 공정 중 나노선이 손상되기 쉽다는 문제점이 있었다.To date, the technique of integrating nanowire optical waveguides has relied on an in-plane manual assembly of already fabricated nanowires on a plane. However, in the plane assembly, light loss occurs from the nanowire to the substrate, and manual assembly using a microprobe or the like has a problem that the process is very complicated and the nanowire is easily damaged during the process.
종래에는 프리즘 렌즈 등을 사용하여 광의 방향을 바꾼 이후에 광섬유를 통하여 이격된 접점 간을 연결하였다(Han-Soon Lee et al., Optics Express 22(10) 11778-11787 (2014) 참조). 이 경우에는 VCSEL에서 나온 빛을 프리즘 렌즈에 정렬시켜야 하고, 다시 여기서 나온 빛을 광섬유 코어에 정확하게 정렬시켜야 한다. 그러나, 광섬유의 코어의 직경이 10 μm 내외로 작기 때문에 정렬시 발생하는 기계적인 오차로 인하여 불량이 다수 발생하고 있다. 또한, 이러한 문제점을 보완하기 위하여 활성 정렬(active alignment) 방법을 사용하지만, 이것은 시간과 비용이 많이 필요하며 여전히 상당한 불량률을 나타내고 있다. 또한, 이와 같은 장치는 프리즘 장치가 필수적으로 필요하기 때문에 크기를 감소시키는데 제한이 있다.Conventionally, a prism lens or the like is used to change the direction of the light, and then the contacts between the optical fibers are connected to each other (Han-Soon Lee et al., Optics Express 22 (10) 11778-11787 (2014)). In this case, the light from the VCSEL must be aligned with the prism lens, and the light from the VCSEL must be aligned correctly with the optical fiber core. However, since the diameter of the core of the optical fiber is as small as about 10 μm, many defects occur due to the mechanical error occurring in alignment. In order to overcome this problem, an active alignment method is used, but this requires a lot of time and cost, and still shows a significant defect rate. Further, such a device has a limitation in reducing the size because the prism device is essentially necessary.
한국 등록특허 제10-1583736호는 나노선을 3차원으로 원하는 위치에 직접 성장시켜 나노선을 광배선하는 방법에 관하여 개시되어 있다. 그러나 이와 같이 나노선을 공기 중에 노출시키는 경우 전달되는 광신호가 불안정하고 다중 파장 광신호를 전송할때 파장별 광신호 크기가 달라질 수 있다. 또한 3차원 배선의 특성상 외부 먼지 등의 이물질이 부착되거나 기계적 충격에 의하여 파손될 수 있다.Korean Patent No. 10-1583736 discloses a method of optically wiring a nanowire by directly growing a nanowire to a desired position three-dimensionally. However, when the nanowire is exposed to the air in this way, the optical signal transmitted is unstable and the size of the optical signal according to the wavelength can be changed when transmitting the multi-wavelength optical signal. In addition, due to the characteristics of the three-dimensional wiring, foreign substances such as external dust may adhere or be damaged by mechanical impact.
본 발명은 나노선을 3차원으로 제조하여 광배선에 사용하는 경우에 광신호 불안정, 외부 환경에 대한 안정성 등의 문제를 해결하기 위하여 추가 연구하여 개발된 것이다.The present invention is further developed to solve problems such as optical signal instability and stability against external environment when nanowires are manufactured in three dimensions and used in optical wiring.
본 발명의 목적은 나노선을 나노선보다 굴절률이 낮은 물질로 코팅하여 보호함으로써 외부 환경에 화학적 및 물리적 영향이 적고 광신호 전송 효율을 향상시키기 위한 기술을 제공하는 것이다.It is an object of the present invention to provide a technique for coating nanowire with a material having a lower refractive index than nanowire to protect the nanowire from chemical and physical influences in the external environment and improving optical signal transmission efficiency.
본 발명은 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선에 관한 것으로서, 상기 나노선은 폴리스틸렌, 폴리메타크릴산메틸 및 폴리카보네이트로 이루어진 군에서 선택된 1종 이상의 폴리머를 포함하고, 상기 나노선은 상기 폴리머보다 굴절률이 낮은 물질로 코팅된 것이다.The present invention relates to optical wiring comprising a coated nanowire for connecting a first contact and a second contact, wherein the nanowire comprises at least one polymer selected from the group consisting of polystyrene, methyl polymethacrylate and polycarbonate And the nanowire is coated with a material having a lower refractive index than the polymer.
바람직하게는, 상기 폴리머보다 굴절률이 낮은 물질의 굴절률은 1.33 이상이다.Preferably, the refractive index of the material having a refractive index lower than that of the polymer is 1.33 or more.
바람직하게는, 상기 폴리머보다 굴절률이 낮은 물질은 고분자계 불소수지이다.Preferably, the material having a lower refractive index than the polymer is a high-molecular fluororesin.
바람직하게는, 상기 광배선은 제1 접점 및 제2 접점 중 적어도 하나에 형성된 나노로드를 추가로 포함하고, 상기 나노로드가 있는 경우에 상기 나노로드의 상부와 나노선이 연결된 것이다.Preferably, the optical wiring further includes a nano-rod formed on at least one of the first contact and the second contact, and the nanowire is connected to the nanowire in the presence of the nano-rod.
바람직하게는, 상기 폴리머보다 굴절률이 낮은 물질의 점도는 10 mPa·s 내지 500 mPa·s이다.Preferably, the viscosity of the material having a lower refractive index than the polymer is in the range of 10 mPa · s to 500 mPa · s.
또한, 본 발명은 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선의 제조방법에 관한 것으로서, a) 나노선을 형성할 물질 용액을 제1 마이크로피펫에 채우는 단계; b) 상기 제1 마이크로피펫의 길이 방향의 축을 제1 접점의 표면에 수직인 축에 동축정렬하는 단계; c) 상기 나노선을 형성할 물질 용액의 메니스커스를 형성하는 단계; d) 상기 제1 마이크로피펫을 들어올리며 나노선을 형성할 물질 용액의 용매를 증발시키는 단계; e) 상기 제1 마이크로피펫을 상기 제1 접점과 이격된 제2 접점에 접촉시켜 나노선을 제조하는 단계; f) 제2 마이크로피펫에 코팅 용액을 채우는 단계; 및 g) 상기 나노선을 따라 상기 제2 마이크로피펫을 움직이며 코팅 용액을 비연속적으로 도포하는 단계를 포함하는 코팅된 나노선을 포함하는 광배선의 제조방법에 관한 것이다.The present invention also relates to a method of manufacturing an optical line including a coated nanowire for connecting a first contact and a second contact, comprising the steps of: a) filling a first micropipette with a solution of a substance to form a nanowire; b) coaxially aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact; c) forming a meniscus of the material solution to form the nanowires; d) evaporating the solvent of the material solution to form the nanowire by lifting up the first micropipette; e) contacting the first micropipette with a second contact spaced apart from the first contact to produce a nanowire; f) filling the second micropipette with the coating solution; And g) moving the second micropipette along the nanowire to discontinuously coat the coating solution.
바람직하게는, 상기 코팅 용액은 상기 나노선의 굴절률보다 굴절률이 낮은 것이다.Preferably, the coating solution has a lower refractive index than the refractive index of the nanowire.
바람직하게는, 상기 코팅 용액의 굴절률은 1.33 이상이다.Preferably, the refractive index of the coating solution is 1.33 or more.
바람직하게는, 상기 코팅 용액의 점도는 10 mPa·s 내지 500 mPa·s이다.Preferably, the viscosity of the coating solution is from 10 mPa · s to 500 mPa · s.
본 발명에 따른 광배선은 기판으로의 광 커플링 손실(coupling loss)의 감소로 인하여 광신호 특성을 개선시킬 수 있다.The optical wiring according to the present invention can improve optical signal characteristics due to reduction of coupling loss to the substrate.
본 발명에 따른 광배선은 외부 환경 및 광신호 파장의 변화에 큰 영향이 없는 안정적인 광신호 특성을 나타낸다.The optical wiring according to the present invention exhibits stable optical signal characteristics without significant influence on the external environment and the change of the optical signal wavelength.
도 1의 (a)는 본 발명에 따른 광배선의 제조방법의 일부를 나타내는 모식도이고, 도 1의 (b)는 본 발명에 따라 제조된 광배선을 나타내는 모식도이다.FIG. 1 (a) is a schematic view showing a part of a method for manufacturing an optical wiring according to the present invention, and FIG. 1 (b) is a schematic view showing an optical wiring manufactured according to the present invention.
도 2는 본 발명에 따라 코팅된 나노선을 광배선으로 이용하는 경우의 파장에 따른 광신호를 나타내는 그래프이다.2 is a graph showing optical signals according to wavelengths in the case of using coated nanowires as optical wiring according to the present invention.
본 발명에서 사용되는 모든 기술용어는, 달리 정의되지 않는 이상, 하기의 정의를 가지며 본 발명의 관련 분야에서 통상의 당업자가 일반적으로 이해하는 바와 같은 의미에 부합된다. 또한, 본 명세서에는 바람직한 방법이나 시료가 기재되나, 이와 유사하거나 동등한 것들도 본 발명의 범주에 포함된다.Unless defined otherwise, all technical terms used in the present invention have the following definitions and are consistent with the meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In addition, preferred methods or samples are described in this specification, but similar or equivalent ones are also included in the scope of the present invention.
본 발명에서 "메니스커스(meniscus)"는 계면장력에 의해 관 속의 액면이 이루는 곡면을 의미한다. 액체의 성질에 따라 액면이 오목하거나 볼록해진다.In the present invention, "meniscus" means a curved surface formed by the liquid surface of the tube due to the interfacial tension. Depending on the nature of the liquid, the liquid surface becomes concave or convex.
본 발명에서 사용된 "제1 접점"은 광을 방출하는 부분을 의미하고, 예를 들어 LED나 LD와 같은 광원이거나, 도파관(waveguide), 광섬유 등의 광을 전달하는 것을 포함하여 광을 방출하는 수단 및 장치를 포함한다. 또한, 본 발명에서 사용되는 용어 "제2 접점"은 광배선을 통과한 광을 수신하는 부분을 의미하고, 광 검출기(PD)와 같이 직접적인 광 검출 수단일 수도 있고, 도파관, 광섬유 등의 광을 전달하는 것을 포함하여 광을 수신하는 수단 및 장치를 포함한다. 본 발명에서 사용된 용어 제1 접점 및 제2 접점은 임의로 나타낸 용어로서, 광의 송수신 방향에 따라서 반대의 의미로 사용될 수 있음은 당업자에게 자명하다.As used herein, the term "first contact" refers to a portion that emits light, for example, a light source such as an LED or an LD, or a light source such as a waveguide or an optical fiber, Means and apparatus. The term "second contact" used in the present invention means a portion for receiving light passing through an optical wiring, and may be a direct optical detecting means such as a photodetector PD, or a light source such as a waveguide or an optical fiber And means for receiving light, including transmitting light. It should be apparent to those skilled in the art that the terms first contact and second contact used in the present invention are arbitrary and may be used in the opposite sense depending on the direction of light transmission and reception.
본 발명은 광신호 연결이 필요한 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선에 관한 것이다.The present invention relates to an optical wiring including a coated nanowire for connecting a first contact and a second contact requiring optical signal connection.
본 발명의 나노선은 나노선을 형성할 수 있는 모든 유기 폴리머를 포함하도록 구성될 수 있으며, 바람직하게는 폴리스틸렌, 폴리메타크릴산메틸 및 폴리카보네이트로 이루어진 군에서 선택된 1종 이상의 폴리머를 포함하도록 구성될 수 있다. 589 nm 파장에서 공지된 폴리스틸렌의 굴절률은 1.59이고, 폴리메타크릴산메틸의 굴절률은 1.48이고, 폴리카보네이트의 굴절률은 1.57이다.The nanowires of the present invention may be configured to include all organic polymers capable of forming nanowires, and preferably comprise at least one polymer selected from the group consisting of polystyrene, polymethylmethacrylate, and polycarbonate. . At 589 nm wavelength, the known polystyrene has a refractive index of 1.59, the polymethylmethacrylate has a refractive index of 1.48 and the polycarbonate has a refractive index of 1.57.
본 발명의 나노선을 코팅하는 코팅 용액은 상기 나노선을 형성하는데 사용되는 유기 폴리머보다 굴절률이 낮은 물질이다. 나노선을 코팅하는 코팅 용액의 굴절률은 1.33 이상인 것이 바람직하다. 나노선과 나노선을 코팅하는 코팅 용액의 파장 차이(589 nm 기준)는 0.05 내지 0.5일 수 있고, 바람직하게는 0.1 내지 0.4일 수 있고, 보다 바람직하게는 0.25 내지 0.14일 수 있다.The coating solution for coating the nanowires of the present invention is a material having a lower refractive index than the organic polymer used for forming the nanowires. The refractive index of the coating solution for coating the nanowire is preferably 1.33 or more. The wavelength difference (based on 589 nm) of the coating solution coating the nanowire and the nanowire can be 0.05 to 0.5, preferably 0.1 to 0.4, and more preferably 0.25 to 0.14.
또한, 본 발명의 나노선을 코팅하는 코팅 용액은 나노선 위에 도포시 형성된 나노선을 균일하게 코팅하기 위하여 점도를 조절하는 것이 필요하며, 바람직한 점도는 20℃에서 1 mPa·s 내지 1000 mPa·s이다.Also, the coating solution for coating the nanowire of the present invention needs to control the viscosity to uniformly coat the nanowire formed on the nanowire, and the preferable viscosity is 1 mPa · s to 1000 mPa · s to be.
상기 조건을 만족하는 코팅 용액은 모두 사용할 수 있으며, 예를 들어 상기 폴리머보다 굴절률이 낮으며 점도 범위를 만족하는 물질은 고분자계 불소수지, 아사히글라스사의 CYTOP일 수 있다. CYTOP의 굴절률은 589 nm 파장에서 1.34이며, 점도가 10 mPa·s 내지 500 mPa·s로 조절되어 사용될 수 있다.Any of the coating solutions satisfying the above conditions may be used. For example, a material having a lower refractive index than the polymer and satisfying the viscosity range may be a polymer fluororesin or CYTOP of Asahi Glass Co., Ltd. The refractive index of CYTOP is 1.34 at a wavelength of 589 nm, and the viscosity can be adjusted to 10 mPa · s to 500 mPa · s.
제조된 나노선의 직경은 500 μm 이하(0 미포함)일 수 있다. 또한, 나노선의 코팅은 0.1 내지 100 μm의 두께일 수 있다. 과다하게 두꺼운 경우 팽창/수축으로 인해 문제가 생길 수 있다.The diameter of the nanowires produced may be less than or equal to 500 μm (zero inclusive). In addition, the coating of the nanowire may be 0.1 to 100 [mu] m thick. Excessive thickness can cause problems due to expansion / contraction.
또한, 상기 광배선은 제1 접점 및 제2 접점 중 적어도 하나에 형성된 나노로드를 추가로 포함할 수 있으며, 나노로드가 있는 경우에는 제1 접점 또는 제2 접점 대신에 나노로드의 상부와 나노선이 연결되는 형태로 광배선될 수 있다.The optical wiring may further include a nano rod formed on at least one of the first contact and the second contact. In the case where the nano rod is present, the optical wiring may include a first contact or a second contact, Can be optically wired in a connected form.
본 발명에 따른 나노로드는 제1 접점 및 제2 접점 중 적어도 하나에 형성될 수 있다. 예를 들어, 나노로드는 제1 접점, 제2 접점 또는 제1 접점과 제2 접점 모두에 형성될 수 있다. 본 발명에 따라 제조된 나노선은 제조방법의 특성상 제2 접점 부분에 광손실이 더 발생할 수 있기 때문에 이 부분의 광손실을 줄이기 위하여 바람직하게는 제2 접점에 형성된 나노로드를 포함할 수 있다.The nanorod according to the present invention may be formed on at least one of the first contact and the second contact. For example, the nanorod may be formed at the first contact, the second contact, or both the first contact and the second contact. The nanowire according to the present invention may include a nanorod formed on the second contact to reduce light loss of the nanowire because the nanowire may generate more light loss at the second contact portion due to the manufacturing method.
나노로드는 원기둥 형상이거나, 나노로드의 외주면이 상방 또는 하방을 향하여 좁아지는 형상, 즉 원뿔대(절두원추) 형상을 가질 수 있다. 나노로드가 원뿔대 형상인 경우에 나노로드의 외주면은 나노로드의 높이 방향의 축에 대하여 -35도 초과 내지 +35도 미만의 각도를 갖고, 바람직하게는 -10도 이상 내지 +10도 이하의 각도를 갖는다. 여기에서 "나노로드의 높이 방향의 축"은 나노로드가 성장하는 방향, 즉 나노로드가 형성되는 면에 대하여 수직인 축을 의미한다. 일반적으로 광이 방출되고 수신되는 접점의 크기가 광배선의 크기보다 크고, 접점과의 접착성을 고려할 때, 나노로드는 그것의 외주면이 상방을 향하여 좁아지는 형상이 가장 바람직하다. 즉, 구체적으로, 나노로드의 외주면은 나노로드의 높이 방향의 축에 대하여 35도 미만(0 미포함)의 각도를 갖고, 바람직하게는 10도 이하(0 미포함)의 각도를 갖을 수 있다.The nano-rods may have a cylindrical shape or a shape in which the outer peripheral surface of the nano-rods is narrowed toward the upper side or the lower side, that is, a truncated cone shape. When the nano-rods are frustum-shaped, the outer circumferential surface of the nano-rods has an angle of more than -35 degrees to less than +35 degrees with respect to the axis of the height of the nano-rods, preferably an angle of not less than -10 degrees and not more than + . Here, the "axis in the height direction of the nanorod" means an axis perpendicular to the direction in which the nanorod grows, i.e., the surface on which the nanorod is formed. In general, when the size of the contact to which light is emitted and received is larger than the size of the optical line and the adhesion with the contact point is taken into account, the shape of the nano rod is most preferably narrowed toward the upper side. Specifically, the outer circumferential surface of the nano rod has an angle of less than 35 degrees (not equal to 0) with respect to the axis of the nano rod in the height direction, and preferably an angle of not more than 10 degrees (not equal to 0).
또한, 나노로드의 높이는 상기 나노로드의 높이는 0.5 μm 이상, 바람직하게는 0.5 μm 내지 100 μm일 수 있다. 높이가 0.5 μm 미만의 경우에는 나노로드의 존재로 얻을 수 있는 광손실 감소 효과를 얻을 수 없으며, 100 μm 초과의 경우에는 최종 제품의 형상, 크기 등에 영향을 줄 수 있다. 다만, 나노로드의 높이는 나노로드, 나노선, 기판(칩) 등의 크기, 접점 간의 거리 등을 고려하여 조절될 수 있다. 나노로드의 하부 직경은 0.5 μm 내지 500 μm 일 수 있다. 나노로드의 하부 직경은 광이 방출되는 접점의 크기, 방출되는 광의 양에 따라 조절될 수 있다.The height of the nano-rods may be 0.5 m or more, and preferably 0.5 to 100 m. If the height is less than 0.5 μm, the light loss reduction effect obtained by the presence of the nano-rod can not be obtained. If the height exceeds 100 μm, the shape and size of the final product may be affected. However, the height of the nano-rods can be adjusted in consideration of the size of the nano-rods, the nanowires, the substrate (chips), and the distance between the contacts. The lower diameter of the nano-rods may be between 0.5 μm and 500 μm. The lower diameter of the nano-rod can be adjusted according to the size of the light-emitting contact and the amount of light emitted.
또한, 본 발명은 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선의 제조방법에 관한 것이다. 구체적으로 광배선의 제조방법은 하기의 단계를 포함할 수 있다.The present invention also relates to a method of manufacturing an optical line including a coated nanowire for connecting a first contact and a second contact. Specifically, the manufacturing method of the optical line may include the following steps.
a) 나노선을 형성할 물질 용액을 제1 마이크로피펫에 채우는 단계;a) filling a first micropipette with a substance solution to form a nanowire;
b) 상기 제1 마이크로피펫의 길이 방향의 축을 제1 접점의 표면에 수직인 축에 동축정렬하는 단계;b) coaxially aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact;
c) 상기 나노선을 형성할 물질 용액의 메니스커스를 형성하는 단계;c) forming a meniscus of the material solution to form the nanowires;
d) 상기 제1 마이크로피펫을 들어올리며 나노선을 형성할 물질 용액의 용매를 증발시키는 단계;d) evaporating the solvent of the material solution to form the nanowire by lifting up the first micropipette;
e) 상기 제1 마이크로피펫을 상기 제1 접점과 이격된 제2 접점에 접촉시켜 나노선을 제조하는 단계;e) contacting the first micropipette with a second contact spaced apart from the first contact to produce a nanowire;
f) 제2 마이크로피펫에 코팅 용액을 채우는 단계; 및f) filling the second micropipette with the coating solution; And
g) 상기 나노선을 따라 상기 제2 마이크로피펫을 움직이며 코팅 용액을 비연속적으로 도포하는 단계.g) applying the coating solution discontinuously by moving the second micropipette along the nanowire.
이하에서 각 단계에 대하여 구체적으로 검토한다.Each step will be discussed in detail below.
먼저, 나노선을 형성할 물질 용액을 제1 마이크로피펫에 채우는 단계(a 단계)이다. 나노선을 형성할 물질 용액은 나노선을 형성할 수 있는 모든 물질을 포함하며, 대부분의 유기물을 포함한다. 구체적으로 나노선을 형성할 물질 용액은 폴리스틸렌, 폴리메타크릴산메틸 및 폴리카보네이트로 이루어진 군에서 선택된 1종 이상의 폴리머와 용매를 포함하는 용액을 의미한다. 용매는 증발이 잘 되는 물질(휘발성 물질)을 사용할 수 있으며, 본 발명을 제조하는데 적절한 당해 기술 분야에서 사용되는 모든 물질을 포함할 수 있다.First, the first micropipette is filled with a substance solution to form a nanowire (step a). The material solution to form the nanowire contains all the materials capable of forming the nanowire, and includes most of the organic matter. Specifically, the material solution for forming the nanowire means a solution containing a solvent and at least one polymer selected from the group consisting of polystyrene, polymethyl methacrylate and polycarbonate. The solvent can be any material that can be easily evaporated (volatile material) and can include any material used in the art suitable for making the present invention.
다음으로, 상기 제1 마이크로피펫의 길이 방향의 축을 제1 접점의 표면에 수직인 축에 동축정렬하는 단계(b 단계)이다. 동축정렬은 두 개의 광학렌즈를 이용하여 각각 x 축과 y 축을 정렬하는 것이 바람직하다. 하나의 광학렌즈만을 이용할 때에는 다른 방향에서 발생하는 오차로 인하여 마이크로피펫을 이용하여 성장시키는 나노선이 동축에 정렬되어 성장하지 못하게 되어 연결부의 광전달 손실이 커지게 된다. 동축정렬을 위해서는 x 축과 y 축의 광학렌즈가 서로 수직되도록 위치시키는 것이 바람직하다.Next, step (b) of aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact. The coaxial alignment is preferably performed using two optical lenses to align the x-axis and the y-axis, respectively. When using only one optical lens, the nanowire grown using a micropipette is not aligned with the coaxial axes due to an error occurring in the other direction, so that the optical transmission loss of the connection portion increases. For coaxial alignment, it is desirable to position the optical lenses of the x-axis and the y-axis perpendicular to each other.
본 발명에서 사용되는 마이크로피펫을 피펫 풀러를 이용하여 원하는 직경으로 제조하거나 제조된 마이크로피펫을 구입하여 사용할 수 있다. 마이크로피펫의 말단(입구, 개구부)의 직경에 따라 나노선의 크기를 조절할 수 있다. 본 발명에서 사용된 용어 "마이크로피펫"은 액체를 일정량 가하거나 꺼내는데 사용되는 모든 도구를 대표하여 지칭된 용어이며, 동일한 기능을 수행할 수 있는 모든 도구를 포함한다.The micropipette used in the present invention may be manufactured by using a pipette puller to a desired diameter, or a manufactured micropipette may be purchased and used. The size of the nanowire can be adjusted according to the diameter of the end (inlet, opening) of the micropipette. The term "micropipette " as used in the present invention is a generic term for all the tools used to dispense or draw liquids and includes all the tools that can perform the same function.
다음으로, 상기 나노선을 형성할 물질 용액의 메니스커스를 형성하는 단계(c)이다. 나노선을 형성할 물질 용액이 메니스커스를 형성하도록 나노선을 형성할 물질 용액이 채워진 제1 마이크로피펫을 제1 접점으로부터 이격시킨다.Next, step (c) is performed to form a meniscus of the material solution to form the nanowires. The first micropipette filled with the material solution for forming the nanowire is spaced from the first contact so that the material solution for forming the nanowire forms a meniscus.
다음으로, 상기 제1 마이크로피펫을 들어올리며 나노선을 형성할 물질 용액의 용매를 증발시키는 단계(d 단계)이다. 마이크로피펫을 나노선을 형성할 물질 용액의 메니스커스를 유도할 정도의 간격을 유지하면서 들어올리는 경우 내부의 액체(용매)가 빠르게 증발하면서 용해되어 있는 물질이 응고되어 기둥 형태를 이루게 된다. 제1 마이크로피펫을 들어올리는 방향은 이격된 제1 및 제2 접점 간의 거리, 들어올리는 속도 등을 고려하여 결정되며, 제조되는 나노선의 특정 부분이 급격하게 방향이 바뀌지 않도록 조절해야 하며, 특히 연결되는 부분에 광손실을 최소화하도록 들어올리는 방향을 조절해야 한다.Next, the step (d) of evaporating the solvent of the material solution for forming the nanowire by lifting up the first micropipette. When the micropipette is lifted up while maintaining a distance to induce the meniscus of the material solution to form the nanowire, the liquid (solvent) inside rapidly evaporates and the dissolved substance solidifies to form a columnar shape. The direction in which the first micropipette is lifted is determined in consideration of the distance between the first and second spaced apart contacts, the lifting speed, etc., and a specific portion of the nanowire to be manufactured must be controlled so as not to be rapidly changed in direction, The direction of lifting should be adjusted so as to minimize the loss of light to the part.
다음으로, 상기 제1 마이크로피펫을 상기 제1 접점과 이격된 제2 접점에 접촉시켜 나노선을 제조하는 단계(e 단계)이다.Next, the first micropipette is brought into contact with the second contact spaced apart from the first contact to manufacture a nanowire (step e).
다음으로, 제2 마이크로피펫에 코팅 용액을 채우는 단계(f 단계)이다. 코팅 용액은 제조된 나노선의 굴절률보다 굴절률이 낮은 물질을 포함하는 것이 바람직하다. 또한, 코팅 용액의 점도는 1 mPa·s 내지 1,000 mPa·s일 수 있고, 바람직하게는 10 mPa·s 내지 500 mPa·s일 수 있다.Next, step (f) of filling the second micropipette with the coating solution. The coating solution preferably contains a material having a lower refractive index than the refractive index of the nanowire. Further, the viscosity of the coating solution may be from 1 mPa · s to 1,000 mPa · s, and preferably from 10 mPa · s to 500 mPa · s.
마지막으로, 상기 나노선을 따라 상기 제2 마이크로피펫을 움직이며 코팅 용액을 비연속적으로 도포하는 단계(g 단계)이다. 구체적으로, 이 단계에서 코팅 용액은 0.4 내지 100 μm의 두께를 갖도록 도포되는 것이 바람직하다. 0.4 μm 미만으로 도포되는 경우에는 코팅이 균일하게 일어나지 않을 수 있고, 100 μm 초과하여 도포되는 경우에는 용액의 팽창/수축의 신뢰성 문제가 발생할 수 있다. 제2 마이크로피펫은 나노선의 상단면을 따라 코팅 용액을 도포하며 나노선이 전체적으로 코팅되도록 제어하는 것이 필요하다. 이것은 화상인식 프로그램을 통하여 제어되도록 하면 편리하게 해결할 수 있다. 코팅액이 나노선에 코팅되지 않는 부분이 발생하지 않도록 도포하는 것이 필요하다. 코팅되지 않은 부분이 있으면 그곳에서 전송모드 불안정이 발생할 수 있기 때문이다.Finally, the second micropipette is moved along the nanowire to discontinuously apply the coating solution (step g). Specifically, in this step, the coating solution is preferably applied to have a thickness of 0.4 to 100 μm. When the coating is applied at less than 0.4 μm, the coating may not uniformly occur. When the coating is applied at a thickness exceeding 100 μm, the reliability of the solution expansion / contraction may occur. The second micropipette is required to apply the coating solution along the top surface of the nanowire and to control the nanowire to be coated as a whole. This can be conveniently solved by being controlled through an image recognition program. It is necessary to apply the coating solution so that a portion not coated on the nanowire does not occur. If there is an uncoated portion, the transfer mode instability may occur there.
도 1은 본 발명에 따른 광배선의 제조도 1의 (a)는 본 발명에 따른 광배선의 제조방법 및 이에 의해 제조되는 광배선을 나타내는 도면이다. 구체적으로, 도 1의 (a)는 본 발명에 따른 광배선의 제조방법 중 g 단계를 나타내는 모식도이고, 도 1의 (b)는 본 발명에 따라 제조된 코팅된 광배선을 나타내는 모식도이다.FIG. 1 is a view showing a method of manufacturing an optical wiring according to the present invention and optical wiring produced therefrom. FIG. Specifically, Fig. 1 (a) is a schematic view showing a step g of the method for manufacturing an optical wiring according to the present invention, and Fig. 1 (b) is a schematic view showing a coated optical wiring fabricated according to the present invention.
또한, 본 발명이 나노로드를 포함하는 경우에는 아래와 같은 방법으로 제조될 수 있으며,나노선을 제조하기 전(상기 a 단계 이전에)에 나노로드를 제조한다:In addition, when the present invention includes a nano-rod, the nano-rod may be prepared by the following method and before the nanowire is manufactured (before the step a):
a) 나노로드 물질 용액을 마이크로피펫에 채우는 단계;a) filling a micropipette with a nanorod material solution;
b) 상기 마이크로피펫을 제1 또는 제2 접점에 정렬하는 단계;b) aligning the micropipette with the first or second contact;
c) 상기 나노로드 물질 용액의 메니스커스를 형성하는 단계; 및c) forming a meniscus of the nanorod material solution; And
d) 상기 마이크로피펫을 접점의 표면에 수직인 방향으로 들어올리며 나노로드 물질 용액의 용매를 증발시켜 나노로드를 제조하는 단계.d) evaporating the solvent of the nanorod material solution by lifting the micropipette in a direction perpendicular to the surface of the contact point to manufacture the nanorod.
상기 나노로드를 제조하는 방법은 특별히 언급한 것을 제외하고는 나노선을 제조하는 방법과 동일하며, 특허출원번호 제2017-0142404호의 기재된 내용을 모두 포함한다.The method of manufacturing the nanorod is the same as the method of manufacturing the nanowire except for the special mention, and includes all the contents of Patent Application No. 2017-0142404.
간단하게 설명하면, 나노로드 물질 용액은 나노선을 형성할 물질 용액과 같이 폴리스틸렌, 폴리메타크릴산메틸 및 폴리카보네이트로 이루어진 군에서 선택된 1종 이상의 폴리머를 포함하는 용액을 포함할 수 있다. 마이크로피펫을 서로 수직으로 위치한 x 축과 y 축의 광학렌즈를 이용하여 마이크로피펫의 길이 방향 축이 제1 접점 또는 제2 접점의 표면에 수직인 축에 대해 일직선 상에 놓이도록 동축 정렬한다.Briefly, the nanorod material solution may comprise a solution comprising at least one polymer selected from the group consisting of polystyrene, polymethyl methacrylate, and polycarbonate, such as a solution of a material to form a nanowire. The micropipette is coaxially aligned so that the longitudinal axis of the micropipette is aligned with the first contact or the axis perpendicular to the surface of the second contact using optical lenses of x and y axis perpendicular to each other.
마이크로피펫을 접점의 표면에 수직인 방향으로 들어올리며 나노로드 물질 용액의 용매를 증발시켜 나노로드를 제조하는 단계는 마이크로피펫을 광이 방출되는 방향, 즉 나노로드를 접점과 접하는 부분에 대하여 수직 방향으로 들어올리는 것이 바람직하다.The step of lifting the micropipette in a direction perpendicular to the surface of the contact and evaporating the solvent of the nanorod material solution to manufacture the nanorod is performed by moving the micropipette in a direction in which light is emitted, .
일 실시형태로, 상기 나노로드의 외주면이 상방 또는 하방을 향하여 좁아지는 형상을 갖도록 마이크로피펫의 들어올리는 속도를 가속 또는 감속하면서 들어올릴 수 있다. 들어올리는 속도(인출 속도)는 나노로드의 높이 방향의 축에 대한 각도, 나노로드의 높이 등을 고려하여 조절될 수 있다. 다른 일 실시형태로, 나노로드의 외주면이 상방 또는 하방을 향하여 좁아지는 형상을 갖도록 마이크로피펫에 가해지는 압력을 조절할 수 있다. 마이크로피펫의 내부에 가해지는 압력을 증가시키는 경우 나노로드 물질 용액의 토출량이 늘어나면서 나노로드의 직경이 커지게 되고, 마이크로피펫의 내부에 가해지는 압력을 감소시키는 경우 나노로드 물질 용액의 토출량이 줄어들면서 나노로드의 직경이 작아지게 된다.In one embodiment, the lifting speed of the micropipette can be raised while accelerating or decelerating so that the outer circumferential surface of the nano-rod has a shape narrowing toward the upper side or the lower side. The lifting speed (drawing speed) can be adjusted in consideration of the angle with respect to the axis in the height direction of the nano-rod, the height of the nano-rod, and the like. In another embodiment, the pressure applied to the micropipette can be adjusted so that the outer circumferential surface of the nano-rod has a shape narrowing toward the upper side or the lower side. When the pressure applied to the interior of the micropipette is increased, the diameter of the nanorod increases as the discharge amount of the nanorod material solution increases. When the pressure applied to the interior of the micropipette is decreased, the discharge amount of the nanorod material solution decreases The diameter of the nanorod becomes smaller.
나노로드를 포함하는 경우에는 접점과 나노선 간에 발생하는 광 커플링 손실을 보다 감소시킬 수 있다.In the case of including a nano-rod, it is possible to further reduce the optical coupling loss occurring between the contact and the nanowire.
이하 실시예를 통하여 본 발명을 상세하게 설명한다. 그러나, 이들 실시예는 예시적인 목적일 뿐 본 발명이 이에 한정되는 것은 아니다.Hereinafter, the present invention will be described in detail with reference to examples. However, these embodiments are for illustrative purposes only, and the present invention is not limited thereto.
실험예 1Experimental Example 1
1. 나노선의 제조1. Manufacture of nano-wires
폴리메타크릴산메틸 분말을 0.5 중량%의 농도에서 자일렌 용매에 용해시켜 나노선을 형성할 물질 용액을 준비하였다. 이 나노선을 형성할 물질 용액을 팁 직경 0.5 ㎛의 마이크로피펫에 채웠다. 마이크로피펫을 제1 접점에 접촉시켜 나노선을 형성할 물질 용액의 메니스커스를 마이크로피펫의 개구부의 바깥쪽으로 생성하였다. 마이크로피펫을 들어올려 용매를 제거하면서 나노선을 성장시켰다. 제조된 나노선은 직경이 약 8 μm이다. 마이크로피펫을 칩의 제2 접점에 형성된 나노로드의 상부에 접촉시켜 나노선을 이용한 광배선을 완성하였다. 제1 접점과 제2 접점은 약 500 μm 정도 이격되어 있다. 제조된 나노선을 제조예 1이라 하였다.A polymethyl methacrylate powder was dissolved in a xylene solvent at a concentration of 0.5 wt% to prepare a solution for forming nanowires. The material solution to form the nanowires was filled in a micropipette having a tip diameter of 0.5 mu m. The micropipette was brought into contact with the first contact to create a meniscus of the substance solution to form the nanowire outside the opening of the micropipette. The micropipette was lifted to remove the solvent and to grow the nanowires. The nanowires produced are about 8 μm in diameter. The micropipette was brought into contact with the upper portion of the nano-rods formed at the second contact points of the chip to complete optical wiring using nanowires. The first contact and the second contact are separated by about 500 mu m. The produced nanowire was referred to as Production Example 1.
2. 물(굴절률 1.33)로 코팅된 나노선의 제조2. Preparation of nanowires coated with water (refractive index 1.33)
굴절률이 낮은 물질로 코팅하는 경우에 얻을 수 있는 효과를 확인하기 위하여 상기 제조된 나노선(제조예 1)을 덮도록 굴절률이 1.33인 물로 나노선을 코팅하였다. 이에 대한 결과는 도 2에 나타내었다. 도 2에서 알 수 있는 바와 같이, 코팅하지 않은 나노선(제조예 1)은 파장의 변화에 따라서 광신호의 세기 변화가 큰 반면에, 물로 코팅한 나노선(제조예 2)는 파장의 변화에 따른 광신호의 세기가 일정한 것을 알 수 있다. 따라서 코팅한 나노선이 광배선으로 이용하는데 보다 적합한 것을 알 수 있다.In order to confirm the effect obtained when coating with a material having a low refractive index, the nanowire was coated with water having a refractive index of 1.33 so as to cover the prepared nanowire (Preparation Example 1). The results are shown in Fig. 2, in the uncoated nanowire (Production Example 1), the change in the intensity of the optical signal was great in accordance with the change of the wavelength, whereas the nanowire coated with water (Production Example 2) It can be seen that the intensity of the optical signal is constant. Thus, it can be seen that coated nanowires are more suitable for use as optical wiring.

Claims (9)

  1. 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선으로서,An optical wiring comprising a coated nanowire for connecting a first contact and a second contact,
    상기 나노선은 폴리스틸렌, 폴리메타크릴산메틸 및 폴리카보네이트로 이루어진 군에서 선택된 1종 이상의 폴리머를 포함하고,Wherein the nanowire comprises at least one polymer selected from the group consisting of polystyrene, polymethyl methacrylate and polycarbonate,
    상기 나노선은 상기 폴리머보다 굴절률이 낮은 물질로 코팅된 것인, 광배선.Wherein the nanowire is coated with a material having a lower refractive index than the polymer.
  2. 제1항에 있어서,The method according to claim 1,
    상기 폴리머보다 굴절률이 낮은 물질의 굴절률은 1.33 이상인 것인, 광배선.Wherein the refractive index of the material having a lower refractive index than the polymer is 1.33 or more.
  3. 제1항에 있어서,The method according to claim 1,
    상기 폴리머보다 굴절률이 낮은 물질은 고분자계 불소수지인, 광배선.Wherein the material having a lower refractive index than the polymer is a polymeric fluororesin.
  4. 제1항에 있어서,The method according to claim 1,
    상기 광배선은 제1 접점 및 제2 접점 중 적어도 하나에 형성된 나노로드를 추가로 포함하고,Wherein the optical wiring further comprises a nanorod formed on at least one of the first contact and the second contact,
    상기 나노로드가 있는 경우에 상기 나노로드의 상부와 나노선이 연결된 것인, 광배선. Wherein an upper portion of the nanorod is connected to a nanowire when the nanorod is present.
  5. 제1항에 있어서,The method according to claim 1,
    상기 폴리머보다 굴절률이 낮은 물질의 점도는 10 mPa·s 내지 500 mPa·s인, 광배선.And the viscosity of a material having a lower refractive index than that of the polymer is 10 mPa · s to 500 mPa · s.
  6. 제1 접점과 제2 접점을 연결하기 위한 코팅된 나노선을 포함하는 광배선의 제조방법으로서,A method of manufacturing an optical line including a coated nanowire for connecting a first contact and a second contact,
    a) 나노선을 형성할 물질 용액을 제1 마이크로피펫에 채우는 단계;a) filling a first micropipette with a substance solution to form a nanowire;
    b) 상기 제1 마이크로피펫의 길이 방향의 축을 제1 접점의 표면에 수직인 축에 동축정렬하는 단계;b) coaxially aligning the longitudinal axis of the first micropipette with an axis perpendicular to the surface of the first contact;
    c) 상기 나노선을 형성할 물질 용액의 메니스커스를 형성하는 단계;c) forming a meniscus of the material solution to form the nanowires;
    d) 상기 제1 마이크로피펫을 들어올리며 나노선을 형성할 물질 용액의 용매를 증발시키는 단계;d) evaporating the solvent of the material solution to form the nanowire by lifting up the first micropipette;
    e) 상기 제1 마이크로피펫을 상기 제1 접점과 이격된 제2 접점에 접촉시켜 나노선을 제조하는 단계;e) contacting the first micropipette with a second contact spaced apart from the first contact to produce a nanowire;
    f) 제2 마이크로피펫에 코팅 용액을 채우는 단계; 및f) filling the second micropipette with the coating solution; And
    g) 상기 나노선을 따라 상기 제2 마이크로피펫을 움직이며 코팅 용액을 비연속적으로 도포하는 단계를 포함하는 코팅된 나노선을 포함하는 광배선의 제조방법.g) moving the second micropipette along the nanowire to discontinuously apply the coating solution. < Desc / Clms Page number 20 >
  7. 제6항에 있어서,The method according to claim 6,
    상기 코팅 용액은 상기 나노선의 굴절률보다 굴절률이 낮은 것인, 코팅된 나노선을 포함하는 광배선의 제조방법.Wherein the coating solution has a lower refractive index than the refractive index of the nanowire.
  8. 제7항에 있어서,8. The method of claim 7,
    상기 코팅 용액의 굴절률은 1.33 이상인, 코팅된 나노선을 포함하는 광배선의 제조방법.Wherein the coating solution has a refractive index of at least 1.33.
  9. 제6항에 있어서,The method according to claim 6,
    상기 코팅 용액의 점도는 10 mPa·s 내지 500 mPa·s인, 코팅된 나노선을 포함하는 광배선의 제조방법.Wherein the coating solution has a viscosity of from 10 mPa · s to 500 mPa · s.
PCT/KR2018/000458 2017-12-15 2018-01-10 Photonic wiring comprising coated nanowire and manufacturing method therefor WO2019117388A1 (en)

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JPH113544A (en) * 1997-06-12 1999-01-06 Furukawa Electric Co Ltd:The Optical rom card and its production
JP2009075365A (en) * 2007-09-20 2009-04-09 Omron Corp Optical wiring and light transmission module
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JPH113544A (en) * 1997-06-12 1999-01-06 Furukawa Electric Co Ltd:The Optical rom card and its production
JP2009075365A (en) * 2007-09-20 2009-04-09 Omron Corp Optical wiring and light transmission module
KR20140049316A (en) * 2012-10-17 2014-04-25 한국전자통신연구원 Graphene photonic devices
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