WO2019110039A1 - Système de couches, composant et procédé de revêtement - Google Patents

Système de couches, composant et procédé de revêtement Download PDF

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Publication number
WO2019110039A1
WO2019110039A1 PCT/DE2018/100926 DE2018100926W WO2019110039A1 WO 2019110039 A1 WO2019110039 A1 WO 2019110039A1 DE 2018100926 W DE2018100926 W DE 2018100926W WO 2019110039 A1 WO2019110039 A1 WO 2019110039A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
nanocomposite
wear protection
phase
layer system
Prior art date
Application number
PCT/DE2018/100926
Other languages
German (de)
English (en)
Inventor
Ladislaus Dobrenizki
Yashar Musayev
Valery Mitin
Pāvels NAZAROVS
Ricardo Henrique Brugnara
Ralf Winter
Original Assignee
Schaeffler Technologies AG & Co. KG
Friedrich-Alexander-Universität Erlangen-Nürnberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schaeffler Technologies AG & Co. KG, Friedrich-Alexander-Universität Erlangen-Nürnberg filed Critical Schaeffler Technologies AG & Co. KG
Publication of WO2019110039A1 publication Critical patent/WO2019110039A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16G—BELTS, CABLES, OR ROPES, PREDOMINANTLY USED FOR DRIVING PURPOSES; CHAINS; FITTINGS PREDOMINANTLY USED THEREFOR
    • F16G13/00—Chains
    • F16G13/02—Driving-chains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16G—BELTS, CABLES, OR ROPES, PREDOMINANTLY USED FOR DRIVING PURPOSES; CHAINS; FITTINGS PREDOMINANTLY USED THEREFOR
    • F16G13/00—Chains
    • F16G13/02—Driving-chains
    • F16G13/06—Driving-chains with links connected by parallel driving-pins with or without rollers so called open links

Definitions

  • the invention relates to a layer system comprising at least one
  • Another object of the invention relates to a component having a metallic substrate and the at least partially disposed on a surface of the substrate layer system.
  • Layer system has a wear protection layer, which is formed as a nitridic or non-nitride hard material layer and directly on the
  • Wear protection layer is provided to reduce the friction, a sliding layer, made of a soft metal, M0S2, WS2 or from a
  • Polymer layer is formed. With such a layer system, the wear of the elements of the link chain can be reduced. However, it is desirable to further improve wear protection for highly stressed components.
  • US 5,108,813 A describes a sliding element with a ceramic or metallic substrate and a diamond film on the surface of the substrate, wherein the diamond film is patterned and the recesses are filled with a soft metal.
  • Wear protection coating at least partly nanocrystalline structure.
  • nano-sized hard material particles are dispersed in a matrix.
  • a metal matrix of copper and / or tungsten and / or zinc and / or tin is described, in which nanocrystals of zirconium nitride and / or
  • EP 3 053 968 B1 discloses a nanocomposite coating of solid lubricant, wherein layer layers of a carbon matrix with
  • Copper grains with other intermediate layers of metal here in the form of titanium, zirconium, hafnium or vanadium, alternate.
  • the task arises to improve the tribological behavior, in particular the wear protection.
  • a layer system comprising at least one
  • Wear protection layer and disposed on the wear protection layer cover layer in the form of a solid lubricant layer, wherein the
  • Wear protection layer is a nitridic hard material layer, wherein the cover layer is formed as a nanocomposite layer, wherein the nanocomposite layer is a multi-phase solid state layer in which at least one phase, called
  • Nanophase is structured so that they in at least one dimension a
  • Wear protection layer and the nanocomposite layer by means of a physical vapor deposition (PVD) process are formed.
  • PVD physical vapor deposition
  • the layer system according to the invention a reduced compared to the prior art wear of friction partners can be achieved, the friction between the friction partners is not increased.
  • the cover layer of copper-carbon nanocomposite reduces the friction.
  • the anti-wear layer in the form of the nitridic hard material layer, which is arranged underneath the nanocomposite layer, provides protection against abrasive wear.
  • a nanocomposite layer is understood to mean a multiphase solid state layer in which at least one phase is structured such that it has a dimension smaller than 100 nm in at least one dimension, in particular in the range from 10 nm to 99 nm, for example in the region of 10 nm to 70 nm.
  • this nanophase is structured such that in each dimension it has a dimension smaller than 100 nm, in particular in the range of 10 nm to 99 nm, for example in the range of 10 nm to 70 nm.
  • the nanocomposite layer according to the invention has at least two phases, wherein a first phase is copper and a second phase is carbon. The phases are formed in particular by copper particles or carbon particles.
  • the nanocomposite layer preferably has a content of copper and carbon which, in total, is greater than 70 atomic%, preferably greater than 80 atomic%, particularly preferably greater than 90 atomic%.
  • the wear protection layer is formed as a nitridic hard material layer, in particular as a stoichiometric chromium nitride layer or a non-stoichiometric chromium nitride layer (CrN or Cr2N) or a combination thereof.
  • the wear protection layer may be formed as a chromium nitride-based layer.
  • the wear protection layer has a nitrogen content which is less than or equal to 60 atomic%, preferably less than 60 atomic%.
  • the wear protection layer preferably has a layer thickness in the range from 2.0 ⁇ m to 5.0 ⁇ m.
  • the wear protection layer preferably directly adjoins the as
  • Nanocomposite layer formed on top layer This means that no further layers between the wear protection layer and the
  • Nanocomposite layer are present.
  • Copper particles as the first phase and nanophase has.
  • the carbon matrix can be present, for example, as a graphite matrix in which the copper particles are incorporated.
  • the nanocomposite layer has a copper matrix as the first phase and carbon particles embedded in the copper matrix as the second phase and nanophase.
  • the Carbon particles may exist as graphite particles embedded in the copper matrix.
  • the copper particles or the carbon particles have a particle size in the range of less than 100 nm, preferably in the range of 10 nm to 99 nm,
  • the nanocomposite layer has oxygen, wherein the content of oxygen is less than 30 atomic%, preferably less than 20 atomic%.
  • the nanocomposite layer may comprise nitrogen, wherein the content of nitrogen in the nanocomposite layer is less than 10 atom%, preferably less than 5 atom%.
  • a content of metals other than copper in the nanocomposite layer is less than 0.01 atom%, preferably less than 0.001%, more preferably the nanocomposite layer is free of metals other than copper.
  • the nanocomposite layer has one or more intermediate layers which are formed from a metal other than copper.
  • the other metal is titanium (Ti), zirconium (Zr), hafnium (Hf), molybdenum (Mo), aluminum (Al), chromium (Cr), tungsten (W), niobium (Nb), tantalum (Ta) or Vanadium (V).
  • Layer thickness in the range of 1, 0 pm to 10.0 pm, preferably in the range of 0.5 pm to 2.5 pm.
  • the layer system preferably has a layer thickness in the range from 0.6 ⁇ m to 21.0 ⁇ m, preferably in the range from 2.5 ⁇ m to 8.5 ⁇ m, particularly preferably in the range from 3.0 ⁇ m to 5.0 ⁇ m.
  • the wear protection layer has a Vickers hardness in the range from 1000 to 4000 HV and the nanocomposite layer has a Vickers hardness of less have 1500 HV. As a result, high wear protection of the friction partners can be achieved.
  • the layer system further comprises a metallic adhesion promoter layer, which is arranged opposite to the cover layer adjacent to the wear protection layer.
  • adhesion promoter layer By adhesion promoter layer, the adhesion of the layer system to a substrate, in particular a
  • the adhesive layer has
  • the adhesion promoter layer particularly preferably consists of chromium and / or titanium.
  • Another object of the invention is a component comprising a metallic substrate and at least partially disposed on a surface of the substrate layer system, which is formed as described above, wherein the
  • Wear protection layer between the nanocomposite layer and the substrate is arranged.
  • the metallic substrate is preferably formed from steel.
  • the steel may be made of 16MnCr5, C45, C60, 100Cr6, 31 CrMoV9, 80Cr2 steel,
  • 34CrAIMo5-10 or 42CrMo4 be formed.
  • the component is an engine element of an internal combustion engine
  • the component is a chain element of a sleeve chain or a toothed chain or a roller chain.
  • the layer system comprises a
  • Adhesive layer disposed adjacent to the wear protection layer and disposed adjacent to the substrate.
  • Adhesive layer can improve the adhesion of the layer system to the metallic substrate.
  • the adhesion promoter layer particularly preferably has chromium and / or titanium. According to the invention it is provided that the wear protection layer and the
  • Nanocomposite layer by physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the following physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are deposited. Furthermore, the physical vapor deposition (English physical vapor deposition, PVD) are
  • Adhesive layer be applied by physical vapor deposition or alternatively by means of another application method, such as a chemical
  • the nanocomposite layer is produced by means of a mosaic target in a PVD process by sputtering.
  • a mosaic target has a combination of at least two materials in solid form, such as plate, pie, bar, etc., where the materials can be removed from the mosaic target and simultaneously deposited on a substrate.
  • a different one is possible to be used to form a mosaic target in a PVD process by sputtering.
  • Adjustable composition of the deposited layer which is not possible, for example, when using an alloy composition as a target material.
  • an alloy composition as a target material.
  • Nanolagen of carbon and copper are detectable in the nanocomposite layer, but a homogeneous mixture of copper and carbon as
  • Solid lubricant layer is present.
  • a wear protection layer in the form of nitridic
  • Hard material layer is deposited at least partially on a surface of the substrate by means of physical vapor deposition, and on the
  • Wear protection layer a cover layer by means of physical
  • Nanocomposite layer is formed, which has copper and carbon.
  • the same advantages can be achieved as they have already been described in connection with the layer system according to the invention.
  • an adhesion promoter layer may optionally be provided by means of physical adhesion
  • Gas phase deposition are deposited directly on the substrate.
  • Adhesion promoter layer may comprise, for example, chromium, titanium and / or aluminum and / or niobium and / or vanadium and / or molybdenum or a combination thereof.
  • the adhesion promoter layer particularly preferably consists of chromium and / or titanium.
  • the component can be arranged on a component holder which is rotated in a vacuum chamber about an in particular vertical axis (PVD batch system).
  • PVD batch system an in particular vertical axis
  • different targets can be arranged within the vacuum chamber. For example, a first target for forming the adhesion promoter layer, a second target for forming the
  • the target for forming the nanocomposite layer is preferably formed as a common carbon-copper target comprising both copper and carbon.
  • the common target may be a mosaic target or an alloy target.
  • a continuous flow system PVD in-line system
  • the component is transported in a transport direction through a vacuum chamber.
  • the component can be rotated in addition to the movement in the transport direction about a rotation axis, in particular a longitudinal axis of the component.
  • FIG. 1 shows a first embodiment of a component with a layer system according to the invention in a schematic sectional view
  • Fig. 2 shows a second embodiment of a component with a
  • FIG. 3 shows a third embodiment of a component with a layer system according to the invention in a schematic sectional view
  • Fig. 4 shows a fourth embodiment of a component according to the invention in a perspective sectional view.
  • the substrate 11 of the component 10 is formed of a steel, for example of 16MnCr5, C45, C60, 100Cr6, 31 CrMoV9, 80Cr2 or 42CrMo4 steel.
  • an adhesive layer 2 is formed on the substrate 11 on the substrate 11 on the substrate 11 to at least partially an adhesive layer 2 with the layer thickness di
  • the adhesion promoter layer 2 is preferably made of chromium and / or titanium.
  • the adhesion promoter layer 2 is preferably made of chromium and / or titanium.
  • a material connection to the, also adjacent to the adhesive layer 2 wear protection layer 3 is formed.
  • Adhesive layer 2 is in the range of 0.01 pm to 1, 0 pm.
  • the wear protection layer is 3 of stoichiometric or not
  • the layer thickness d2 of the wear protection layer 3 is in the range of 2.0 pm to 5.0 pm.
  • a nanocomposite layer 4 is deposited, which is formed as a copper-carbon nanocomposite.
  • the nanocomposite layer 4 is substantially biphasic. This means that the nanocomposite layer 4, apart from the main constituents copper and carbon, only small amounts of others
  • the nanocomposite layer 4 has a first phase 5 in the form of a carbon matrix and one in the carbon matrix
  • the second phase is therefore the nanophase.
  • the grain size of these copper particles is in the range of less than 100 nm, preferably between 10 nm and 70 nm.
  • the carbon matrix is formed of carbon.
  • the layer thickness d3 of the nanocomposite layer 4 is in the range from 0.1 ⁇ m to 10.0 ⁇ m, preferably in the range from 0.5 ⁇ m to 2.5 ⁇ m.
  • the nanocomposite layer 4 forms a covering layer cooperating with the respective friction partner of the component 10, which improves the tribological behavior, in particular reduces the wear.
  • FIG. 2 shows a second exemplary embodiment of a component 10 which has a layer system 1 according to the invention.
  • the layer system according to the second embodiment essentially has the features of
  • Layer system according to the first embodiment differs from the layer system of the first embodiment in the configuration of the nanocomposite layer 4.
  • the second embodiment the
  • Nanocomposite layer 4 has a second phase 7 in the form of a copper matrix and embedded in the copper matrix on a first phase 8 in the form of carbon particles.
  • the carbon particles have a particle size in the range of less than 100 nm, preferably between 10 nm and 70 nm, and form the nanophase.
  • Fig. 3 shows a third embodiment of a component 10 with a
  • Layer system 1 according to the invention In contrast to the layer system 1 according to the first embodiment, the layer system 1 according to the third embodiment, no adhesive layer on.
  • Wear protection layer 3 of this layer system 1 is deposited directly adjacent to the substrate 11.
  • the wear protection layer 3 adjoins both the substrate 11 and the nanocomposite layer 4 and is provided between them.
  • FIG. 4 is a perspective, partially sectioned view of a link chain 20 is shown with components according to the invention, as a chain link 21,
  • the link chain 20 can be used as part of a chain drive, for example an internal combustion engine.
  • the chain 20 has a plurality of chain links 21, 22 which are pivotally connected to each other via chain pins 22.
  • the chain links 21, 22 at least two recesses 24 through which a chain pin 26 is guided.
  • the chain 20 comprises inner chain links 22, in whose recesses 24 a sleeve
  • the chain pin 26 is disposed within the sleeve 23 and forms a friction pair with the sleeve 23 of the inner chain link 22.
  • the recesses 25 of the outer chain links 21 are formed with a smaller diameter than the
  • the chain pin 26 is also disposed within the recess 25 of an outer chain link 21 and connected to the outer chain link 25, in particular by means of interference fit.
  • Chain pin 26 of the link chain 20 with a layer system 1 according to the invention for example, a layer system as shown in Fig. 1, 2 or 3, coated.
  • the inner contour of the sleeves 23 of the inner chain links 22 and / or the inner contour of the recesses 25 of the outer chain links 21 may be coated with a layer system according to the invention.
  • Outer contour of the inner chain link 22 with the layer system 1 according to the invention Be provided, for example, the friction against a
  • the link chain 20 is formed as a sleeve chain or a toothed chain.
  • the components described above each have at least partially a layer system 1 comprising at least one wear protection layer 3 in the form of a nitridic hard material layer and a cover layer arranged on the wear protection layer 3, which is formed as a nanocomposite layer 4 of predominantly copper and carbon in the form of a solid lubricant layer.
  • a nanocomposite layer 4 is deposited by means of physical vapor deposition in a subsequent process step.
  • a nanocomposite layer 4 is deposited by means of physical vapor deposition in a subsequent process step.
  • an intermediate step by means of physical
  • Vapor deposition initially an adhesive layer are applied to the substrate 11, before the wear protection layer 3 is deposited.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne un système de couches (1) comprenant au moins une couche de protection contre l'usure (3) et une couche de couverture agencée sur la couche de protection contre l'usure (3), la couche de protection contre l'usure (3) étant une couche de céramique au nitrure, la couche de couverture étant réalisée sous forme d'une couche nanocomposite (4), la couche nanocomposite (4) étant une couche solide multiphasée, dans laquelle au moins une phase, appelée nanophase, est structurée de telle sorte qu'elle présente dans au moins une dimension une mesure inférieure à 100 nm, une première phase (6, 7) de cuivre et une deuxième phase (5, 8) de carbone étant obtenues, et la couche de protection contre l'usure (3) et la couche nanocomposite (4) étant réalisées au moyen d'un procédé de dépôt physique en phase vapeur (procédé de PVD). L'invention concerne en outre un composant (10, 21, 22), en particulier un maillon ou un tourillon, comprenant un substrat métallique (11) et un système de couches (1) agencé au moins partiellement sur une surface du substrat (11), la couche de protection contre l'usure (3) étant agencée entre la couche nanocomposite (4) et le substrat (11).
PCT/DE2018/100926 2017-12-04 2018-11-14 Système de couches, composant et procédé de revêtement WO2019110039A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017128724.8A DE102017128724A1 (de) 2017-12-04 2017-12-04 Schichtsystem, Bauteil und Verfahren zum Beschichten
DE102017128724.8 2017-12-04

Publications (1)

Publication Number Publication Date
WO2019110039A1 true WO2019110039A1 (fr) 2019-06-13

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EP0634499A1 (fr) 1993-07-15 1995-01-18 Japan Energy Corporation Cible de mosaique
DE102005047449A1 (de) 2005-03-11 2006-09-14 Joh. Winklhofer & Söhne GmbH und Co. KG Verschleißverbesserte Gliederkette sowie Verfahren zu deren Herstellung
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EP3053968B1 (fr) 2015-02-06 2017-05-17 Schaeffler Baltic, SIA Revêtement lubrifiant solide nanocomposite

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EP0634499A1 (fr) 1993-07-15 1995-01-18 Japan Energy Corporation Cible de mosaique
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DE102005047449A1 (de) 2005-03-11 2006-09-14 Joh. Winklhofer & Söhne GmbH und Co. KG Verschleißverbesserte Gliederkette sowie Verfahren zu deren Herstellung
DE102006024433A1 (de) 2006-05-24 2007-11-29 JOH. WINKLHOFER & SÖHNE GMBH & Co. KG Verschleißfeste Kette mit Verschleißschutzbeschichtung in nanokristalliner Struktur
DE102006052869A1 (de) * 2006-11-09 2008-05-15 JOH. WINKLHOFER & SÖHNE GMBH & Co. KG PVD-Hartstoffbeschichtung von Kettengelenkteilen
EP3053968B1 (fr) 2015-02-06 2017-05-17 Schaeffler Baltic, SIA Revêtement lubrifiant solide nanocomposite

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