WO2019104908A1 - 一种激光触发多级真空开关 - Google Patents

一种激光触发多级真空开关 Download PDF

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Publication number
WO2019104908A1
WO2019104908A1 PCT/CN2018/079877 CN2018079877W WO2019104908A1 WO 2019104908 A1 WO2019104908 A1 WO 2019104908A1 CN 2018079877 W CN2018079877 W CN 2018079877W WO 2019104908 A1 WO2019104908 A1 WO 2019104908A1
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WO
WIPO (PCT)
Prior art keywords
laser
lens
self
trigger
breaking
Prior art date
Application number
PCT/CN2018/079877
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English (en)
French (fr)
Inventor
廖敏夫
段雄英
陈占清
邹积岩
董恩源
王永兴
黄智慧
张豪
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大连理工大学
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Application filed by 大连理工大学 filed Critical 大连理工大学
Priority to US16/469,597 priority Critical patent/US10594113B2/en
Publication of WO2019104908A1 publication Critical patent/WO2019104908A1/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/54—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used by the use, as active elements of vacuum tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T2/00—Spark gaps comprising auxiliary triggering means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T4/00—Overvoltage arresters using spark gaps
    • H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
    • H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T4/00—Overvoltage arresters using spark gaps
    • H01T4/16—Overvoltage arresters using spark gaps having a plurality of gaps arranged in series
    • H01T4/20—Arrangements for improving potential distribution
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/94—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00 characterised by the way in which the control signal is generated
    • H03K2217/941—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00 characterised by the way in which the control signal is generated using an optical detector

Definitions

  • the invention belongs to the technical field of high voltage and high power pulse power switch, and particularly relates to a laser triggered multi-stage vacuum switch.
  • the pulse power switching devices widely used mainly include gas trigger switch and vacuum trigger switch; according to different switch trigger modes, they can be divided into two types: electric pulse trigger and laser trigger.
  • the electric pulse trigger switch is provided with a trigger electrode in the gap of the main electrode, and the initial plasma is generated by the high voltage pulse discharge to make the gap conduct.
  • the premise of maintaining a good triggering characteristic of the electric pulse trigger switch is to maintain a relatively high undervoltage ratio and provide a certain trigger energy, which puts high demands on its working environment and trigger system. After the electric pulse trigger switch is turned on, the arc ablate the trigger electrode and the trigger electrode coating material seriously, which affects the conduction performance and service life of the electric pulse trigger switch.
  • the laser trigger switch uses a laser as a trigger source to electrically isolate the trigger system from the main electrode gap, and uses a high-energy laser pulse to bombard the target electrode to generate an initial plasma conduction main gap.
  • the laser triggering switch Compared with the electric pulse triggering mode, the laser triggering switch has the advantages of short conduction delay, high triggering precision, convenient control, and repeatable triggering, and avoids the influence of arc ablation on the working life of the triggering pole. Therefore, in the high-power, high-repetition pulse power system, the laser triggering method is often adopted.
  • Laser-triggered gas switches use SF6 gas and other electron-negative gases with good insulating properties as the insulation and arc extinguishing medium of the switch, and the conduction delay can reach several tens of nanoseconds.
  • some researchers have proposed to combine the laser-trigger gas gap with the multi-stage over-voltage self-breaking gas gap to form a MV-level laser-triggered multi-stage multi-channel gas switch.
  • the mixed gas of SF6/N2 is a switch insulation and arc extinguishing medium, and its conduction instantaneous power can reach T watt level, and the conduction delay is about 10 nanoseconds.
  • the laser-triggered vacuum switch uses vacuum as the main insulation and arc extinguishing medium between the electrodes. It has the advantages of strong flow capacity, high reliability, good repetitive frequency characteristics and maintenance-free. Under the same conditions, it can be turned on better than the laser-triggered gas switch. characteristic.
  • the research on high-power laser-triggered switching devices at home and abroad is mainly focused on laser-triggered gas switches.
  • the research on high-voltage and high-power laser-triggered vacuum switches has not been reported. This is due to the non-linear growth relationship between the withstand voltage level of the vacuum gap and its gap distance, which limits the application voltage level of the laser-triggered vacuum switch.
  • the technical problem to be solved by the present invention is to provide a high-voltage, high-power laser-triggered multi-stage vacuum switch based on laser-triggered vacuum gap and self-breakdown vacuum gap in series; design a laser trigger system to generate parallel lasers with multiple energy equals simultaneously bombardment Triggering the target in a plurality of target electrodes, improving the conduction characteristic of the laser-triggered vacuum gap, and cooperating with the multi-stage over-voltage self-breaking vacuum gap, so that the laser triggers the multi-stage vacuum switch to obtain better conduction performance;
  • the self-breakdown electrode structure in the vacuum gap utilizes the synergistic effect of the magnetic field between the gaps to enhance the repetitive frequency breaking capability of the laser-triggered multi-stage vacuum switch.
  • a laser-triggered multi-stage vacuum switch includes a laser-triggered vacuum gap, a multi-stage self-breakdown vacuum gap, and a trigger system;
  • the multi-stage self-breaking vacuum gap is fixed to the upper end of the laser-triggered vacuum gap by the fastening connector 7, and the equalizing ring 6 is set outside the upper insulating casing 3;
  • the laser-triggered vacuum gap includes a lower insulating housing 9, a trigger upper end cap flange 8, a trigger gap shield 19, a trigger lower end cap flange 10, a cathode conductive rod 15, and a flat-plate cathode contact 20 with a plurality of target electrodes.
  • a triggering target 22 a flat-plate type anode contact 21 with a plurality of light-passing holes, an anode conductive rod 11 with a plurality of light-passing holes, a bellows 23, a light-passing lens 12 and a baffle plate 13;
  • the upper and lower ends of the lower insulating casing 9 are respectively sealed by the trigger upper end flange 8 and the trigger lower end flange 10;
  • the trigger gap shield 19 is fixed in the lower insulating shell 9 for optimizing the electric field distribution in the laser-triggered vacuum gap; the flat-plate cathode contact 20 with multiple target electrodes and the flat plate with multiple light-passing holes The anode contacts 21 are arranged opposite each other and are located in the trigger gap shield 19;
  • a flat type cathode contact 20 with a plurality of target electrodes is fixed to the trigger upper end cap flange 8 by a cathode conductive rod 15; a flat type anode contact 21 with a plurality of light passing holes and an anode with a plurality of light passing holes are electrically conductive The rod 11 is directly connected, and the anode conductive rod 11 with a plurality of light-passing holes is sealed to the trigger lower end cover flange 10 via the bellows 23; the position of the light-passing hole 14 on the flat-type anode contact 21 with a plurality of light-passing holes One-to-one correspondence with the position of the trigger target 22 on the flat cathode contact 20 with a plurality of target electrodes;
  • the light-passing lens 12 is sealed to the bottom of the anode conductive rod 11 with a plurality of light-passing holes, the light-passing lens 12 is sleeved with the baffle plate 13, and the baffle plate 13 is fixed to the anode conductive rod 11 with a plurality of light-passing holes.
  • Upper portion is located outside the triggering lower end cover flange 10, and is provided with a through hole corresponding to the light passing hole 14;
  • the multi-stage self-breakdown vacuum gap includes an upper insulating shell 3, a self-breaking upper end cap flange 2, a self-breaking gap shield 16, a self-breaking lower end cap flange 4, a low voltage conductive rod 1, and a support insulator 18 , annular self-breaking electrode 17 and high voltage conductive rod 5;
  • the upper and lower ends of the upper insulating casing 3 are respectively sealed by the self-breaking upper end cap flange 2 and the self-breaking lower end cap flange 4, and the plurality of self-breaking gap shields 16 are vertically fixed inside the upper insulating casing 3. Optimizing the electric field distribution in the multi-level self-breakdown vacuum gap;
  • the high-voltage conductive rod 5 is sealed and fixed through the self-breaking lower end cover flange 4, the upper end thereof is equipotentially connected to the annular self-breaking electrode 17, and the lower end is connected to the upper end of the cathode conductive rod 15;
  • the plurality of annular self-breaking electrodes 17 and the supporting insulator 18 connected in series are fixed inside the multi-stage self-breaking gap shield 16;
  • the supporting insulator 18 is a columnar protrusion with an upper portion having a cylindrical protrusion and a cylindrical groove at the bottom, and the bottommost supporting insulator 18 is coupled with the high-voltage conductive rod 5, and the supporting insulators 18 are matched with each other. Sandwiching a plurality of annular self-breaking electrodes 17 in the middle;
  • the diameter of the middle hollow circle of the annular self-breaking electrode 17 is equal to the diameter of the upper cylindrical protrusion of the supporting insulator 18.
  • the thickness of the inner ring of the electrode is smaller than that of the outer ring and is connected with one body, and the outer ring part is the main discharge electrode, and the series gap After the conduction, the current flows through the outer ring portion, changing the structure of the outer ring portion and the type of the slot can change the direction and strength of the magnetic field in the gap during the through-flow, and the inner ring of the first-stage annular self-breaking electrode 17 is sandwiched between the high-voltage conductive rod 5 And supporting the insulator 18, in this way, forming a multi-stage overvoltage self-breakdown vacuum gap in series;
  • the bottom surface of the low-voltage conductive rod 1 is provided with a groove for supporting the insulator 18, the upper end of which is sealed and fixed by the self-breaking upper end cover flange 2, and the lower end groove passes through the last stage annular self-breaking electrode 17 and the supporting insulator. a raised connection at the top of 18;
  • the series-connected annular self-breaking electrode 17 includes a combination of one or more of a flat type, a longitudinal magnetic type, and a transverse magnetic type.
  • the trigger system includes a trigger controller 24, a laser 25, a transmission fiber 26, a 4:1 spectroscopic lens 27, a 3:1 spectroscopic lens 28, a 2:1 spectroscopic lens 36, a 1:1 spectroscopic lens 33, and a full-reflex lens A30. , full reverse lens B32, full reverse lens C35, full reverse lens D29, focusing lens A31, focusing lens B34, focusing lens C37 and focusing lens D38;
  • the trigger controller 24 is responsible for receiving an action command of the external system, and controlling the action of the laser 25 through the transmission fiber 26 to generate a laser pulse; the laser pulse emitted by the laser 25 is sequentially split by a plurality of splitting lenses fixed at the output end of the laser 25, The anti-lens reflex and the focusing lens are focused to form five parallel lasers with equal energy in the upper, lower, left, right and middle directions;
  • the laser pulse is split by a 4:1 splitting lens 27 of 80% transmittance, and the reflected light is formed by the lower full-lens B32 and the focusing lens B34 to form a lower laser; the laser pulse is transmitted through the 4:1 splitting lens 27 by 75%.
  • the transmittance of the 3:1 splitting lens 28 splits the light, and the reflected light forms a left laser through the left full-lens lens C35 and the focusing lens C37; the laser pulse transmits the laser through the 3:1 splitting lens 28 and the transmittance is 66%.
  • the 2:1 splitting lens 36 splits the light, and the reflected light forms a right laser through the right full-lens lens D29 and the focusing lens D38; the laser pulse transmits the laser through the 2:1 splitting lens 36 through a transmittance of 1:1.
  • the spectroscopic lens 33 splits the light, and the reflected light forms an upper laser through the upper full-reflex lens A30 and the focusing lens A31; the laser that passes through the 1:1 spectroscopic lens 33 forms a middle laser through the central focusing lens; and the five parallel laser passes through the clearing hole 14 At the same time, focusing on the surface of the trigger target 22, a large amount of initial plasma is generated to cause the laser to trigger the vacuum gap to obtain a shorter conduction delay.
  • the splitting ratio, the number, the position of the spectroscopic lens, the number and position of the total reverse lens, and the number and position of the focusing lens can be adjusted according to the number and position of the target and the light passing hole to form more beam energy.
  • Parallel laser
  • the invention has the beneficial effects that the invention adopts a laser-triggered vacuum gap and a multi-stage self-breakdown vacuum gap series technology, and the two cooperate with each other to realize the application of the laser-triggered multi-stage vacuum switch in the high voltage, high repetition frequency and high power pulse power system.
  • the multi-channel laser is used to bombard the trigger target at the same time, increasing the action area of the laser on the target, generating more initial plasma, further improving the conduction performance of the laser-triggered vacuum switch, and at the same time weakening the laser to trigger the target to some extent.
  • Figure 1 is a schematic diagram of the structure of a laser-triggered multi-stage vacuum switch.
  • FIG. 2 is a schematic diagram of the internal structure of a laser-triggered multi-stage vacuum switch.
  • FIG 3 is a top plan view of an anode conductive rod with a plurality of light passing holes.
  • FIG. 4 is a schematic view of a transverse magnetic type annular self-breaking electrode.
  • Figure 5 is a side view of the laser trigger system.
  • Figure 6 is a top plan view of a laser trigger system.
  • 1 low-voltage conductive rod 1 low-voltage conductive rod; 2 self-breaking upper end cover flange; 3 upper insulating shell; 4 self-breaking lower end cover flange; 5 high-voltage conductive rod; 6 pressure equalizing ring; 7 fastening joint; 8 trigger upper end Cover flange; 9 under-insulated housing; 10 trigger lower end cover flange; 11 anode conductive rod with multiple light-passing holes; 12 light-passing lens; 13 baffle; 14 light-passing hole; 15 cathode conductive rod; Breakdown gap shield; 17 annular self-breakdown electrode; 18 support insulator; 19 trigger gap shield; 20 flat cathode contact with multiple target electrodes; 21 flat anode contact with multiple light through holes; 22 trigger target; 23 bellows; 24 trigger controller; 25 laser; 26 transmission fiber; 27 4:1 spectroscopic lens; 28 3:1 spectroscopic lens; 29 full reverse lens D; 30 full reverse lens A; 31 focusing lens A; 32 full reverse lens B; 33 1:1 spectroscopic lens; 34
  • a laser-triggered multi-stage vacuum switch includes a laser-triggered vacuum gap, a multi-stage self-breakdown vacuum gap, and a trigger system;
  • the multi-stage self-breaking vacuum gap is fixed to the upper end of the laser-triggered vacuum gap by the fastening connector 7, and the equalizing ring 6 is set outside the upper insulating casing 3;
  • the laser-triggered vacuum gap includes a lower insulating housing 9, a trigger upper end cap flange 8, a trigger gap shield 19, a trigger lower end cap flange 10, a cathode conductive rod 15, and a flat-plate cathode contact 20 with a plurality of target electrodes.
  • a triggering target 22 a flat-plate type anode contact 21 with a plurality of light-passing holes, an anode conductive rod 11 with a plurality of light-passing holes, a bellows 23, a light-passing lens 12 and a baffle plate 13;
  • the upper and lower ends of the lower insulating casing 9 are respectively sealed by the trigger upper end flange 8 and the trigger lower end flange 10;
  • the trigger gap shield 19 is fixed in the lower insulating shell 9 for optimizing the electric field distribution in the laser-triggered vacuum gap; the flat-plate cathode contact 20 with multiple target electrodes and the flat plate with multiple light-passing holes The anode contacts 21 are arranged opposite each other and are located in the trigger gap shield 19;
  • a flat type cathode contact 20 with a plurality of target electrodes is fixed to the trigger upper end cap flange 8 by a cathode conductive rod 15; a flat type anode contact 21 with a plurality of light passing holes and an anode with a plurality of light passing holes are electrically conductive The rod 11 is directly connected, and the anode conductive rod 11 with a plurality of light-passing holes is sealed to the trigger lower end cover flange 10 via the bellows 23; the position of the light-passing hole 14 on the flat-type anode contact 21 with a plurality of light-passing holes One-to-one correspondence with the position of the trigger target 22 on the flat cathode contact 20 with a plurality of target electrodes;
  • the light-passing lens 12 is sealed to the bottom of the anode conductive rod 11 with a plurality of light-passing holes, the light-passing lens 12 is sleeved with the baffle plate 13, and the baffle plate 13 is fixed to the anode conductive rod 11 with a plurality of light-passing holes.
  • Upper portion is located outside the triggering lower end cover flange 10, and is provided with a through hole corresponding to the light passing hole 14;
  • the multi-stage self-breakdown vacuum gap includes an upper insulating shell 3, a self-breaking upper end cap flange 2, a self-breaking gap shield 16, a self-breaking lower end cap flange 4, a low voltage conductive rod 1, and a support insulator 18 , annular self-breaking electrode 17 and high voltage conductive rod 5;
  • the upper and lower ends of the upper insulating casing 3 are respectively sealed by the self-breaking upper end cap flange 2 and the self-breaking lower end cap flange 4, and the plurality of self-breaking gap shields 16 are vertically fixed inside the upper insulating casing 3. Optimizing the electric field distribution in the multi-level self-breakdown vacuum gap;
  • the high-voltage conductive rod 5 is sealed and fixed through the self-breaking lower end cover flange 4, the upper end thereof is equipotentially connected to the annular self-breaking electrode 17, and the lower end is connected to the upper end of the cathode conductive rod 15;
  • the plurality of annular self-breaking electrodes 17 and the supporting insulator 18 connected in series are fixed inside the multi-stage self-breaking gap shield 16;
  • the supporting insulator 18 is a columnar protrusion with an upper portion having a cylindrical protrusion and a cylindrical groove at the bottom, and the bottommost supporting insulator 18 is coupled with the high-voltage conductive rod 5, and the supporting insulators 18 are matched with each other. Sandwiching a plurality of annular self-breaking electrodes 17 in the middle;
  • the diameter of the middle hollow circle of the annular self-breaking electrode 17 is equal to the diameter of the upper cylindrical protrusion of the supporting insulator 18.
  • the thickness of the inner ring of the electrode is smaller than that of the outer ring and is connected with one body, and the outer ring part is the main discharge electrode, and the series gap After the conduction, the current flows through the outer ring portion, changing the structure of the outer ring portion and the type of the slot can change the direction and strength of the magnetic field in the gap during the through-flow, and the inner ring of the first-stage annular self-breaking electrode 17 is sandwiched between the high-voltage conductive rod 5 And supporting the insulator 18, in this way, forming a multi-stage overvoltage self-breakdown vacuum gap in series;
  • the bottom surface of the low-voltage conductive rod 1 is provided with a groove for supporting the insulator 18, the upper end of which is sealed and fixed by the self-breaking upper end cover flange 2, and the lower end groove passes through the last stage annular self-breaking electrode 17 and the supporting insulator. a raised connection at the top of 18;
  • the series annular self-breaking electrode 17 outer ring portion structure comprises a combination of one or more of a flat type, a longitudinal magnetic type, and a transverse magnetic type.
  • the trigger system includes a trigger controller 24, a laser 25, a transmission fiber 26, a 4:1 spectroscopic lens 27, a 3:1 spectroscopic lens 28, a 2:1 spectroscopic lens 36, a 1:1 spectroscopic lens 33, and a full-reflex lens A30. , full reverse lens B32, full reverse lens C35, full reverse lens D29, focusing lens A31, focusing lens B34, focusing lens C37 and focusing lens D38;
  • the trigger controller 24 is responsible for receiving an action command of the external system, and controlling the action of the laser 25 through the transmission fiber 26 to generate a laser pulse; the laser pulse emitted by the laser 25 is sequentially split by a plurality of splitting lenses fixed at the output end of the laser 25, The anti-lens reflex and the focusing lens are focused to form five parallel lasers with equal energy in the upper, lower, left, right and middle directions;
  • the laser pulse is split by a 4:1 splitting lens 27 of 80% transmittance, and the reflected light passes through the lower full-lens B32 and the focusing lens B34 to form a lower laser; the laser transmitted through the 4:1 splitting lens 27 is 75% transmitted.
  • the rate of 3:1 splitting lens 28 splits the light, and the reflected light forms a left laser through the left full-lens lens C35 and the focusing lens C37; the laser passing through the 3:1 splitting lens 28 passes through a transmittance of 66% of 2:1.
  • the splitting lens 36 splits and reflects light through the right full-lens lens D29 and the focusing lens D38 to form a right laser; the laser that passes through the 2:1 splitting lens 36 is split by a 1:1 splitting lens 33 having a transmittance of 50%, and is reflected.
  • the light passes through the upper reverse lens A30 and the focusing lens A31 to form an upper laser; the laser transmitted through the 1:1 beam splitting lens 33 forms a middle laser through the central focusing lens; and 5 parallel laser passes through the clearing hole 14 while focusing on the triggering target On the surface of 22, a large amount of initial plasma is generated to cause the laser to trigger a vacuum gap to achieve a shorter conduction delay.
  • the splitting ratio, the number, the position of the spectroscopic lens, the number and position of the total reverse lens, and the number and position of the focusing lens can be adjusted according to the number and position of the target and the light passing hole to form more beam energy.
  • Parallel laser
  • the laser-triggered multi-stage vacuum switch When the laser-triggered multi-stage vacuum switch is not turned on, the laser-triggered multi-stage vacuum switch is placed in the insulating oil, and the outer insulating shell 3 and the lower insulating shell 9 and the insulating oil are used to maintain external insulation, and the plurality of light-passing holes 14 are provided.
  • the anode conductive rod 11 and the low-voltage conductive rod 1 are electrically connected with the external system; under the action of the equalizing ring 6, the self-breaking gap shield 16, and the trigger gap shield 19, the voltage between the multi-stage self-breaking gaps is evenly distributed, and the laser The voltage between the trigger vacuum gap and the multi-stage self-breakdown vacuum gap is reasonably distributed, and each gap maintains a high working undervoltage ratio; the longitudinal position control trigger of the anode conductive rod 11 with a plurality of light passing holes connected to the bellows 23 is adjusted. The gap between the vacuum contacts in the gap can further adjust the working undervoltage ratio of the laser-triggered vacuum gap.
  • the 5-way laser is focused by the corresponding focusing lens, and sequentially passes through the clearing lens 12 and the anode conductive rod 11 with a plurality of light-passing holes and the 5-way laser channel 14 formed by the flat-plate anode contact 21 with a plurality of light-passing holes. Simultaneously bombarding the five trigger targets 22 on the surface of the flat cathode contact 20 with a plurality of target electrodes generates a large amount of initial plasma, causing the laser to trigger the vacuum gap to obtain a nanosecond conduction delay.
  • the working voltage of the laser-triggered multi-stage vacuum switch is rapidly applied to the two ends of the multi-stage self-breakdown vacuum gap, and the plurality of self-breakdown vacuum gaps in series are along the outer ring portion of the annular self-breaking electrode 17 Stage breakdown, the laser triggers the multi-stage vacuum switch to conduct.
  • the current passes through the multi-stage self-breakdown vacuum gap.
  • the magnetic fields in different directions are formed in the vacuum gaps of each stage and synergistically acts to accelerate the diffusion of the arc in the gap.
  • the motion and cooling process, combined with the laser-triggered vacuum gap, enables rapid break-off of the laser-triggered multi-stage vacuum switch.

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Abstract

一种激光触发多级真空开关，属于高压大功率脉冲功率开关技术领域，其包括激光触发真空间隙、多级自击穿真空间隙和触发系统；多级自击穿真空间隙通过紧固连接件（7）固定在激光触发真空间隙的上端，均压环（6）套装于上绝缘外壳（3）外部；采用激光触发真空间隙和多级自击穿真空间隙串联技术，二者相互配合实现激光触发多级真空开关在高压、高重频、大功率脉冲功率系统中的应用；采用多路激光同时轰击触发靶材，增大激光对靶材的作用面积，产生更多初始等离子体，进一步提升激光触发真空开关的导通性能，采用激光触发多级真空开关，避免长期维护所需的复杂工艺和高额成本。

Description

一种激光触发多级真空开关 技术领域
本发明属于高压大功率脉冲功率开关技术领域，具体涉及一种激光触发多级真空开关。
 背景技术
随着我国大功率、高重频脉冲功率技术研究的不断进步及脉冲功率系统容量的不断增长，脉冲功率系统对其开关器件的导通时延、通流容量、高频开断、使用寿命等关键工作特性提出了更高要求。目前应用较为广泛的脉冲功率开关器件主要有气体触发开关和真空触发开关两种；根据开关触发方式不同，又可分为电脉冲触发和激光触发两种类型。其中，电脉冲触发开关是在主电极间隙设置触发电极，利用高压脉冲放电产生初始等离子体使间隙导通。电脉冲触发开关维持良好触发特性的前提是保持相对较高的欠压比并提供一定触发能量，这对其工作环境和触发系统提出了较高要求。电脉冲触发开关导通后电弧对触发极及触发极涂覆材料烧蚀较为严重，影响电脉冲触发开关的导通性能和使用寿命。激光触发开关以激光作为触发源，将触发系统与主电极间隙电气隔离，利用高能激光脉冲轰击靶电极产生初始等离子体导通主间隙。相较于电脉冲触发方式，激光触发开关具有导通延时短、触发精度高、控制便捷、可重复触发等优势，同时避免电弧烧蚀对触发极工作寿命的影响。因此在大功率、高重频脉冲功率系统中多采用激光触发的方式。
激光触发气体开关多采用SF6气体等绝缘性能良好的电负性气体作为开关的绝缘和灭弧介质，其导通延时可达数十纳秒。为满足高压、大功率脉冲功率系统对高性能开关器件的需求，有学者提出将激光触发气体间隙与多级过压自击穿气体间隙串联组成MV级激光触发多级多通道的气体开关，以SF6/N2的混合气体为开关绝缘和灭弧介质，其导通瞬时功率可达T瓦级，导通延时为10纳秒左右。但受SF6气体自身电气特性限制，激光触发气体开关的重频工作特性较差；且电弧放电会使开关内SF6气体大量分解，影响多级触发气体开关的工作稳定性，需要定期更换气体以维持开关工作性能，后期维护成本较高。
激光触发真空开关以真空为主电极间绝缘和灭弧介质，具有通流能力强、可靠性高、重频特性好、免维护等优势，相同条件下可获得优于激光触发气体开关的导通特性。目前国内外针对大功率激光触发开关器件的研究基本都集中在激光触发气体开关方面，高压、大功率激光触发真空开关的研究未见报道。这是由于真空间隙的耐压水平与其间隙距离间存在非线性增长关系，限制了激光触发真空开关的应用电压等级。基于多断口真空断路器技术和激光触发多级气体开关技术相关研究，若将激光触发真空间隙与多级过压自击穿真空间隙串联组成激光触发多级真空开关；设置合理的间隙距离、设计各部分电极结构和激光光路，以满足脉冲功率系统对开关电压等级和导通性能的需求；充分利用激光触发真空开关的导通优势与真空短间隙的灭弧和绝缘特点，大幅提升开关的重频开断能力，同时有效降低后期维护成本。
 技术问题
本发明要解决的技术问题是提供一种基于激光触发真空间隙与自击穿真空间隙串联的高压、大功率激光触发多级真空开关；设计激光触发系统，产生多路能量相等的平行激光同时轰击多个靶电极中触发靶材，提升激光触发真空间隙的导通特性，与多级过压自击穿真空间隙相配合，使激光触发多级真空开关获得更佳的导通性能；通过调控多级自击穿真空间隙内电极结构，利用间隙间磁场的协同作用提升激光触发多级真空开关的重频开断能力。
 技术解决方案
本发明的技术方案：
一种激光触发多级真空开关，包括激光触发真空间隙、多级自击穿真空间隙和触发系统；
多级自击穿真空间隙通过紧固连接件7固定在激光触发真空间隙的上端，均压环6套装于上绝缘外壳3外部；
所述的激光触发真空间隙包括下绝缘外壳9、触发上端盖法兰8、触发间隙屏蔽罩19、触发下端盖法兰10、阴极导电杆15、带多个靶电极的平板型阴极触头20、触发靶材22、带多个通光孔的平板型阳极触头21、带多个通光孔的阳极导电杆11、波纹管23、通光镜片12和隔挡板13；
所述的下绝缘外壳9的上下两端开口分别由触发上端盖法兰8和触发下端盖法兰10密封；
所述的触发间隙屏蔽罩19固定在下绝缘外壳9内，用于优化激光触发真空间隙内电场分布；所述的带多个靶电极的平板型阴极触头20和带多个通光孔的平板型阳极触头21相对布置，位于触发间隙屏蔽罩19内；
带多个靶电极的平板型阴极触头20通过阴极导电杆15固定于触发上端盖法兰8上；带多个通光孔的平板型阳极触头21与带多个通光孔的阳极导电杆11直连，带多个通光孔的阳极导电杆11经波纹管23密封接于触发下端盖法兰10；带多个通光孔的平板型阳极触头21上的通光孔14位置和带多个靶电极的平板型阴极触头20上的触发靶材22位置一一对应；
所述的通光镜片12密封接于带多个通光孔的阳极导电杆11底部，通光镜片12外套隔挡板13，隔挡板13固定在带多个通光孔的阳极导电杆11上，位于触发下端盖法兰10外，其上设有与通光孔14相对应的通孔；
所述的多级自击穿真空间隙包括上绝缘外壳3、自击穿上端盖法兰2、自击穿间隙屏蔽罩16、自击穿下端盖法兰4、低压导电杆1、支撑绝缘子18、环形自击穿电极17和高压导电杆5；
所述的上绝缘外壳3的上下两端分别由自击穿上端盖法兰2和自击穿下端盖法兰4密封，多个自击穿间隙屏蔽罩16竖向固定在上绝缘外壳3内部，优化多级自击穿真空间隙内电场分布；
所述的高压导电杆5穿过自击穿下端盖法兰4密封固定，其上端与环形自击穿电极17等电位连接，下端与阴极导电杆15的上端连接；
所述串联的多个环形自击穿电极17和支撑绝缘子18固定于多级自击穿间隙屏蔽罩16内部；
所述的支撑绝缘子18为上部有圆柱状凸起，底部有圆柱状凹槽的带伞裙的柱状物，最底部的支撑绝缘子18与高压导电杆5配合连接，各支撑绝缘子18间相互配合，将多个环形自击穿电极17内环分别夹在中间；
所述的环形自击穿电极17的中间空心圆直径与支撑绝缘子18上部圆柱凸起的直径相等，电极内环薄片厚度小于外环并与之一体连接，外环部分为主放电电极，串联间隙导通后，电流通过外环部分流通，改变外环部分结构及槽口类型可改变通流时间隙内磁场的方向和强度，第一级环形自击穿电极17内环夹在高压导电杆5和支撑绝缘子18之间，以此方式串联形成多级过压自击穿真空间隙；
所述的低压导电杆1的底面带有配合支撑绝缘子18的凹槽，其上端穿过自击穿上端盖法兰2密封固定，下端凹槽经最后一级环形自击穿电极17与支撑绝缘子18顶部的凸起连接；
所述的串联的环形自击穿电极17包括平板型、纵磁型、横磁型中的一种或多种结构的相互组合。
所述的触发系统包括触发控制器24、激光器25、传输光纤26、4:1分光镜片27、3:1分光镜片28、2:1分光镜片36、1:1分光镜片33、全反镜片A30、全反镜片B32、全反镜片C35、全反镜片D29、聚焦镜片A31、聚焦镜片B34、聚焦镜片C37和聚焦镜片D38；
所述的触发控制器24负责接收外部系统的动作指令，并通过传输光纤26控制激光器25动作，产生激光脉冲；激光器25发出的激光脉冲依次通过固定在激光器25输出端的多个分光镜片分光、全反镜片反射、聚焦镜片聚焦后形成上、下、左、右、中5路能量相等的平行激光；
激光脉冲经过80%透过率的4:1分光镜片27分光，反射光经下方的全反镜片B32和聚焦镜片B34形成下路激光；激光脉冲透过4:1分光镜片27的激光经75%透过率的3:1分光镜片28分光、反射光经左侧的全反镜片C35和聚焦镜片C37形成左路激光；激光脉冲透过3:1分光镜片28的激光再经透过率66%的2:1分光镜片36分光、反射光经右侧的全反镜片D29和聚焦镜片D38形成右路激光；激光脉冲透过2:1分光镜片36的激光经透过率50%的1:1分光镜片33分光，反射光经上方的全反镜片A30和聚焦镜片A31形成上路激光；透过1:1分光镜片33的激光经过中心聚焦镜片形成中路激光；5路平行激光穿过通光孔14同时聚焦在触发靶材22表面，产生大量初始等离子体使激光触发真空间隙获得更短的导通延时。
所述的分光镜片的分光比例、数量、位置，全反镜片的数量、位置以及聚焦镜片的数量、位置可根据靶材及通光孔的数量和位置进行调整，以形成更多束能量相等的平行激光。
 有益效果
本发明的有益效果：本发明采用激光触发真空间隙和多级自击穿真空间隙串联技术，二者相互配合实现激光触发多级真空开关在高压、高重频、大功率脉冲功率系统中的应用；采用多路激光同时轰击触发靶材，增大激光对靶材的作用面积，产生更多初始等离子体，进一步提升激光触发真空开关的导通性能，同时在一定程度上减弱激光对触发靶材的烧蚀作用，延长开关使用寿命；通过改变多级自击穿真空间隙内环形自击穿电极的组合方式，调控间隙间磁场分布，使激光触发多级真空开关获得更强的重频开断能力；采用激光触发多级真空开关，避免长期维护所需的复杂工艺和高额成本。
 附图说明
图1是激光触发多级真空开关结构示意图。
图2是激光触发多级真空开关内部结构示意图。
图3是带多个通光孔的阳极导电杆俯视图。
图4是横磁型环形自击穿电极示意图。
图5是激光触发系统的侧视图。
图6是激光触发系统的俯视图。
图中：1 低压导电杆；2 自击穿上端盖法兰；3 上绝缘外壳；4 自击穿下端盖法兰；5 高压导电杆；6 均压环；7 紧固连接件；8 触发上端盖法兰；9 下绝缘外壳；10 触发下端盖法兰；11 带多个通光孔的阳极导电杆；12 通光镜片；13 隔挡板；14 通光孔；15 阴极导电杆；16 自击穿间隙屏蔽罩；17 环形自击穿电极；18 支撑绝缘子；19 触发间隙屏蔽罩；20 带多个靶电极的平板型阴极触头；21 带多个通光孔的平板型阳极触头；22 触发靶材；23 波纹管；24 触发控制器；25 激光器；26 传输光纤；27 4:1分光镜片；28 3:1分光镜片；29 全反镜片D；30 全反镜片A；31 聚焦镜片A；32 全反镜片B；33 1:1分光镜片；34 聚焦镜片B；35 全反镜片C；36 2:1分光镜片；37 聚焦镜片C；38 聚焦镜片D。
 本发明的实施方式
以下结合技术方案和附图详细叙述本发明的具体实施方式。
结合图1～图6，一种激光触发多级真空开关，包括激光触发真空间隙、多级自击穿真空间隙和触发系统；
多级自击穿真空间隙通过紧固连接件7固定在激光触发真空间隙的上端，均压环6套装于上绝缘外壳3外部；
所述的激光触发真空间隙包括下绝缘外壳9、触发上端盖法兰8、触发间隙屏蔽罩19、触发下端盖法兰10、阴极导电杆15、带多个靶电极的平板型阴极触头20、触发靶材22、带多个通光孔的平板型阳极触头21、带多个通光孔的阳极导电杆11、波纹管23、通光镜片12和隔挡板13；
所述的下绝缘外壳9的上下两端开口分别由触发上端盖法兰8和触发下端盖法兰10密封；
所述的触发间隙屏蔽罩19固定在下绝缘外壳9内，用于优化激光触发真空间隙内电场分布；所述的带多个靶电极的平板型阴极触头20和带多个通光孔的平板型阳极触头21相对布置，位于触发间隙屏蔽罩19内；
带多个靶电极的平板型阴极触头20通过阴极导电杆15固定于触发上端盖法兰8上；带多个通光孔的平板型阳极触头21与带多个通光孔的阳极导电杆11直连，带多个通光孔的阳极导电杆11经波纹管23密封接于触发下端盖法兰10；带多个通光孔的平板型阳极触头21上的通光孔14位置和带多个靶电极的平板型阴极触头20上的触发靶材22位置一一对应；
所述的通光镜片12密封接于带多个通光孔的阳极导电杆11底部，通光镜片12外套隔挡板13，隔挡板13固定在带多个通光孔的阳极导电杆11上，位于触发下端盖法兰10外，其上设有与通光孔14相对应的通孔；
所述的多级自击穿真空间隙包括上绝缘外壳3、自击穿上端盖法兰2、自击穿间隙屏蔽罩16、自击穿下端盖法兰4、低压导电杆1、支撑绝缘子18、环形自击穿电极17和高压导电杆5；
所述的上绝缘外壳3的上下两端分别由自击穿上端盖法兰2和自击穿下端盖法兰4密封，多个自击穿间隙屏蔽罩16竖向固定在上绝缘外壳3内部，优化多级自击穿真空间隙内电场分布；
所述的高压导电杆5穿过自击穿下端盖法兰4密封固定，其上端与环形自击穿电极17等电位连接，下端与阴极导电杆15的上端连接；
所述串联的多个环形自击穿电极17和支撑绝缘子18固定于多级自击穿间隙屏蔽罩16内部；
所述的支撑绝缘子18为上部有圆柱状凸起，底部有圆柱状凹槽的带伞裙的柱状物，最底部的支撑绝缘子18与高压导电杆5配合连接，各支撑绝缘子18间相互配合，将多个环形自击穿电极17内环分别夹在中间；
所述的环形自击穿电极17的中间空心圆直径与支撑绝缘子18上部圆柱凸起的直径相等，电极内环薄片厚度小于外环并与之一体连接，外环部分为主放电电极，串联间隙导通后，电流通过外环部分流通，改变外环部分结构及槽口类型可改变通流时间隙内磁场的方向和强度，第一级环形自击穿电极17内环夹在高压导电杆5和支撑绝缘子18之间，以此方式串联形成多级过压自击穿真空间隙；
所述的低压导电杆1的底面带有配合支撑绝缘子18的凹槽，其上端穿过自击穿上端盖法兰2密封固定，下端凹槽经最后一级环形自击穿电极17与支撑绝缘子18顶部的凸起连接；
所述的串联的环形自击穿电极17外环部分结构包括平板型、纵磁型、横磁型中的一种或多种结构的相互组合。
所述的触发系统包括触发控制器24、激光器25、传输光纤26、4:1分光镜片27、3:1分光镜片28、2:1分光镜片36、1:1分光镜片33、全反镜片A30、全反镜片B32、全反镜片C35、全反镜片D29、聚焦镜片A31、聚焦镜片B34、聚焦镜片C37和聚焦镜片D38；
所述的触发控制器24负责接收外部系统的动作指令，并通过传输光纤26控制激光器25动作，产生激光脉冲；激光器25发出的激光脉冲依次通过固定在激光器25输出端的多个分光镜片分光、全反镜片反射、聚焦镜片聚焦后形成上、下、左、右、中5路能量相等的平行激光；
激光脉冲经过80%透过率的4:1分光镜片27分光，反射光经下方的全反镜片B32和聚焦镜片B34形成下路激光；透过4:1分光镜片27的激光经75%透过率的3:1分光镜片28分光、反射光经左侧的全反镜片C35和聚焦镜片C37形成左路激光；透过3:1分光镜片28的激光再经透过率66%的2:1分光镜片36分光、反射光经右侧的全反镜片D29和聚焦镜片D38形成右路激光；透过2:1分光镜片36的激光经透过率50%的1:1分光镜片33分光，反射光经上方的全反镜片A30和聚焦镜片A31形成上路激光；透过1:1分光镜片33的激光经过中心聚焦镜片形成中路激光；5路平行激光穿过通光孔14同时聚焦在触发靶材22表面，产生大量初始等离子体使激光触发真空间隙获得更短的导通延时。
所述的分光镜片的分光比例、数量、位置，全反镜片的数量、位置以及聚焦镜片的数量、位置可根据靶材及通光孔的数量和位置进行调整，以形成更多束能量相等的平行激光。
当激光触发多级真空开关未导通时，激光触发多级真空开关置于绝缘油中，利用上绝缘外壳3和下绝缘外壳9及绝缘油保持外部绝缘，通过带多个通光孔14的阳极导电杆11和低压导电杆1与外部系统保持电气连接；均压环6、自击穿间隙屏蔽罩16、触发间隙屏蔽罩19作用下，多级自击穿间隙间的电压均匀分布，激光触发真空间隙和多级自击穿真空间隙间电压合理分布，各间隙均保持高工作欠压比；通过调整与波纹管23相连的带多个通光孔的阳极导电杆11的纵向位置控制触发间隙内真空触头间距，可进一步调整激光触发真空间隙的工作欠压比。
5路激光经过对应的聚焦镜片聚焦，依次通过通光镜片12及带多个通光孔的阳极导电杆11与带多个通光孔的平板型阳极触头21形成的5路激光通道14，同时轰击带多个靶电极的平板型阴极触头20表面的5个触发靶材22，产生大量初始等离子体，使激光触发真空间隙获得纳秒级导通延时。
触发间隙导通后，激光触发多级真空开关两端工作电压迅速施加在多级自击穿真空间隙两端，串联的多个自击穿真空间隙沿环形自击穿电极17的外环部分逐级击穿，激光触发多级真空开关导通。开关导通过程中，电流通过多级自击穿真空间隙，在不同结构的环形自击穿电极17作用下，各级真空间隙中形成不同方向的磁场并产生协同作用，加速间隙内电弧的扩散运动和冷却过程，配合激光触发真空间隙实现激光触发多级真空开关的快速开断。

Claims (3)

  1. 一种激光触发多级真空开关，其特征在于，包括激光触发真空间隙、多级自击穿真空间隙和触发系统；
    多级自击穿真空间隙通过紧固连接件(7)固定在激光触发真空间隙的上端，均压环(6)套装于上绝缘外壳(3)外部；
    所述的激光触发真空间隙包括下绝缘外壳(9)、触发上端盖法兰(8)、触发间隙屏蔽罩(19)、触发下端盖法兰(10)、阴极导电杆(15)、带多个靶电极的平板型阴极触头(20)、触发靶材(22)、带多个通光孔的平板型阳极触头(21)、带多个通光孔的阳极导电杆(11)、波纹管(23)、通光镜片(12)和隔挡板(13)；
    所述的下绝缘外壳(9)的上下两端开口分别由触发上端盖法兰(8)和触发下端盖法兰(10)密封；
    所述的触发间隙屏蔽罩(19)固定在下绝缘外壳(9)内，用于优化激光触发真空间隙内电场分布；所述的带多个靶电极的平板型阴极触头(20)和带多个通光孔的平板型阳极触头(21)相对布置，位于触发间隙屏蔽罩(19)内；
    带多个靶电极的平板型阴极触头(20)通过阴极导电杆(15)固定于触发上端盖法兰(8)上；带多个通光孔的平板型阳极触头(21)与带多个通光孔的阳极导电杆(11)直连，带多个通光孔的阳极导电杆(11)经波纹管(23)密封接于触发下端盖法兰(10)；带多个通光孔的平板型阳极触头(21)上的通光孔(14)位置和带多个靶电极的平板型阴极触头(20)上的触发靶材(22)位置一一对应；
    所述的通光镜片(12)密封接于带多个通光孔的阳极导电杆(11)底部，通光镜片(12)外套隔挡板(13)，隔挡板(13)固定在带多个通光孔的阳极导电杆(11)上，位于触发下端盖法兰(10)外，其上设有与通光孔(14)相对应的通孔；
    所述的多级自击穿真空间隙包括上绝缘外壳(3)、自击穿上端盖法兰(2)、自击穿间隙屏蔽罩(16)、自击穿下端盖法兰(4)、低压导电杆(1)、支撑绝缘子(18)、环形自击穿电极(17)和高压导电杆(5)；
    所述的上绝缘外壳(3)的上下两端分别由自击穿上端盖法兰(2)和自击穿下端盖法兰(4)密封，多个自击穿间隙屏蔽罩(16)竖向固定在上绝缘外壳(3)内部，优化多级自击穿真空间隙内电场分布；
    所述的高压导电杆(5)穿过自击穿下端盖法兰(4)密封固定，其上端与环形自击穿电极(17)等电位连接，下端与阴极导电杆(15)的上端连接；
    所述串联的多个环形自击穿电极(17)和支撑绝缘子(18)固定于多级自击穿间隙屏蔽罩(16)内部；
    所述的支撑绝缘子(18)为上部有圆柱状凸起，底部有圆柱状凹槽的带伞裙的柱状物，最底部的支撑绝缘子(18)与高压导电杆(5)配合连接，各支撑绝缘子(18)间相互配合，将多个环形自击穿电极(17)内环分别夹在中间；
    所述的环形自击穿电极(17)的中间空心圆直径与支撑绝缘子(18)上部圆柱凸起的直径相等，电极内环薄片厚度小于外环并与之一体连接，外环部分为主放电电极，串联间隙导通后，电流通过外环部分流通，改变外环部分结构及槽口类型可改变通流时间隙内磁场的方向和强度，第一级环形自击穿电极(17)内环夹在高压导电杆(5)和支撑绝缘子(18)之间，以此方式串联形成多级过压自击穿真空间隙；
    所述的低压导电杆(1)的底面带有配合支撑绝缘子(18)的凹槽，其上端穿过自击穿上端盖法兰(2)密封固定，下端凹槽经最后一级环形自击穿电极(17)与支撑绝缘子(18)顶部的凸起连接；
    所述的触发系统包括触发控制器(24)、激光器(25)、传输光纤(26)、4:1分光镜片(27)、3:1分光镜片(28)、2:1分光镜片(36)、1:1分光镜片(33)、全反镜片A(30)、全反镜片B(32)、全反镜片C(35)、全反镜片D(29)、聚焦镜片A(31)、聚焦镜片B(34)、聚焦镜片C(37)和聚焦镜片D(38)；
    所述的触发控制器(24)负责接收外部系统的动作指令，并通过传输光纤(26)控制激光器(25)动作，产生激光脉冲；激光器(25)发出的激光脉冲依次通过固定在激光器(25)输出端的多个分光镜片分光、全反镜片反射、聚焦镜片聚焦后形成上、下、左、右、中5路能量相等的平行激光；
    激光脉冲经过4:1分光镜片(27)分光，反射光经下方的全反镜片B(32)和聚焦镜片B(34)形成下路激光；激光脉冲透过4:1分光镜片(27)的激光经3:1分光镜片(28)分光、反射光经左侧的全反镜片C(35)和聚焦镜片C(37)形成左路激光；激光脉冲透过3:1分光镜片(28)的激光再经2:1分光镜片(36)分光、反射光经右侧的全反镜片D(29)和聚焦镜片D(38)形成右路激光；激光脉冲透过2:1分光镜片(36)的激光经1:1分光镜片(33)分光，反射光经上方的全反镜片A(30)和聚焦镜片A(31)形成上路激光；激光脉冲透过1:1分光镜片(33)的激光经过中心聚焦镜片形成中路激光；5路平行激光穿过通光孔(14)同时聚焦在触发靶材(22)表面，产生大量初始等离子体使激光触发真空间隙获得更短的导通延时；
    所述的分光镜片的分光比例、数量、位置，全反镜片的数量、位置以及聚焦镜片的数量、位置可根据靶材及通光孔的数量和位置进行调整，以形成更多束能量相等的平行激光。
  2. 如权利要求1所述的一种激光触发多级真空开关，其特征在于，所述的环形自击穿电极(17)包括平板型、纵磁型、横磁型中的一种或多种结构的相互组合。
  3. 如权利要求1或2所述的一种激光触发多级真空开关，其特征在于，所述的4:1分光镜片(27)的透过率为80%，3:1分光镜片(28)的透过率为75%，2:1分光镜片(36)的透过率为66%，1:1分光镜片(33)的透过率为50%。
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