WO2019102632A1 - Laser oscillator support base - Google Patents

Laser oscillator support base Download PDF

Info

Publication number
WO2019102632A1
WO2019102632A1 PCT/JP2018/013952 JP2018013952W WO2019102632A1 WO 2019102632 A1 WO2019102632 A1 WO 2019102632A1 JP 2018013952 W JP2018013952 W JP 2018013952W WO 2019102632 A1 WO2019102632 A1 WO 2019102632A1
Authority
WO
WIPO (PCT)
Prior art keywords
support member
laser oscillator
advancing
retracting
protrusion
Prior art date
Application number
PCT/JP2018/013952
Other languages
French (fr)
Japanese (ja)
Inventor
逸峰 繆
Original Assignee
馬鞍山市明珠電子科技有限公司
オーレーザー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 馬鞍山市明珠電子科技有限公司, オーレーザー株式会社 filed Critical 馬鞍山市明珠電子科技有限公司
Publication of WO2019102632A1 publication Critical patent/WO2019102632A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details

Definitions

  • the present invention relates to a laser oscillator support pedestal for supporting a glass high voltage excitation laser oscillator.
  • a glass high voltage excitation laser oscillator is supported by a pedestal for laser irradiation to a predetermined position.
  • a pedestal for laser irradiation to a predetermined position.
  • the above-mentioned method of finely adjusting the supporting position of the laser oscillator can not digitize the appropriate position for supporting the laser oscillator, but relies on the experience of the operator who finely adjusts. Further, the above-described configuration for supporting the optical fiber can not be applied as it is to a pedestal for supporting the laser oscillator.
  • An object of the present invention is to provide a laser oscillator support pedestal capable of stably supporting a fragile glass high voltage excitation laser oscillator and capable of easily adjusting the support position.
  • the present invention is a laser oscillator support pedestal for supporting a laser oscillator having a circular cross section, which is one support member for supporting one half circumferential surface of the laser oscillator having a circular cross section, and a laser oscillator having the circular oscillator having a circular cross section.
  • an elastic biasing member for resiliently urging the one support member and the other support member in the direction approaching each other, and the one support member
  • a laser oscillator support base including an advancing and retracting portion which advances and retracts with respect to the other support member, and an advancing and retracting drive portion which advances and retracts the advancing and retracting portion with respect to the other support member.
  • a through hole through which a screw penetrates is formed in the other support member, the tip of the screw is screwed into the female screw formed in the one support member, and the elastic biasing member is Preferably, the head of the screw is biased in a direction away from the one support member.
  • the advancing and retracting projecting portion has a projecting portion inclined portion which is inclined with respect to a direction in which the advancing and retracting projecting portion advances and retracts, and the advancing and retracting driving portion slides in a state of being in contact with the projecting portion inclined portion
  • a protrusion drive unit having a unit inclined portion
  • a drive unit moving unit that moves the protrusion drive unit in a direction orthogonal to the direction in which the advancing and retracting protrusion moves and retracts.
  • the drive portion moving portion may be provided with a drive screw which is disposed in a direction orthogonal to a direction in which the advancing / retracting protrusion portion advances / retracts and which is screwed to a female screw portion formed in the protrusion portion driving portion. preferable.
  • the one support member is made of resin, and the advancing and retracting portion is made of metal.
  • a laser oscillator support pedestal capable of stably supporting a fragile glass high voltage excitation laser oscillator and capable of easily adjusting the support position.
  • FIG. 5 is a cross-sectional view of a laser oscillator support pedestal according to an embodiment of the present invention.
  • FIG. 6 is a cross-sectional view showing a state in which the forward and backward projection of the laser oscillator support pedestal according to the embodiment of the present invention is in a position where it is retracted by the projection driving unit.
  • FIG. 7 is a cross-sectional view showing a state in which the forward and backward projection of the laser oscillator support pedestal according to the embodiment of the present invention is in a position advanced by the projection driving unit.
  • the laser oscillator support pedestal 1 is for supporting a fragile glass high voltage excitation laser oscillator L or the like having a circular shape having a diameter of about 5 cm to 10 cm and a cross section orthogonal to the longitudinal direction, as shown in FIG. A portion of one end portion side of the glass high voltage excitation laser oscillator L is supported by the one laser oscillator support pedestal 1 and a portion of the other end portion side is The laser oscillator support pedestal 1 of FIG.
  • the pair of glass high voltage excitation laser oscillators L have the same configuration, and therefore only one of the laser oscillator support pedestals 1 will be described below.
  • the laser oscillator support base 1 is configured such that a lower support member 10 as one support member, an upper support member 30 as the other support member, a spring 31 as an elastic biasing member, and a back and forth A drive unit 40 and an advancing and retracting projecting unit 50 are provided.
  • the side of the tip of the drive screw 42 (left side in FIG. 3) is defined as the left side in the axial direction of the glass high voltage excitation laser oscillator L, and the side of the head of the drive screw 42 (FIG. The right side in 3) is defined as the right side and explained.
  • the side of the upper side supporting member 30 is defined as the upper side in the same direction view
  • the side of the lower side supporting member 10 is defined as the lower side.
  • the upper support member 30 and the lower support member 10 are each made of resin such as POM (polyacetal), and as it is, a cylindrical through hole is formed so as to penetrate a pair of side surfaces of a rectangular parallelepiped, and further Each has a shape that is divided by half. Therefore, in the upper support member 30 and the lower support member 10, oscillator support recesses 101 and 301 having cylindrical shapes respectively divided in half are formed to have a cylindrical shape in a positional relationship facing each other. Each of the oscillator support recesses 101 and 301 has an arc-shaped curved surface that follows the shape of the side surface of the glass high-voltage excitation laser oscillator L.
  • POM polyacetal
  • a glass high-voltage excitation laser oscillator L is disposed in the cylindrical oscillator support recess 101 and 301 so as to be held between the upper support member 30 and the lower support member 10. That is, the upper support member 30 supports the upper half circumferential surface of the glass high voltage excitation laser oscillator L, and the lower support member 10 supports the lower half circumferential surface of the glass high voltage excitation laser oscillator L.
  • the upper support member 30 has a pair of through holes 302 formed therein.
  • the pair of through holes 302 is formed to extend in the vertical direction in the portion of the upper support member 30 in which the oscillator support recess 301 is not formed.
  • the lower end portion of the through hole 302 has a small diameter portion 303 having a smaller inside diameter with respect to a portion above the lower end portion of the through hole 302, and the upper support member 30 forming the upper end portion of the small diameter portion 303.
  • the part constitutes a step.
  • the lower end portion of the spring 31 is in contact with the stepped portion.
  • the screw 32 passes through the through hole 302 and the spring 31.
  • the external thread is not screwed in a portion near the head portion 321 of the screw 32 penetrating in this manner, and has a cylindrical side surface shape.
  • a half portion of the screw 32 near the tip end portion protrudes from the through hole 302 toward the lower support member 10, and a male screw is screwed in this portion.
  • the upper end of the spring 31 is in contact with the head 321 of the screw 32.
  • the spring 31 constitutes a compression spring and biases the head 321 of the screw 32 in a direction away from the lower support member 10.
  • the head 321 of the screw 32 is formed with a hexagonal recess. A hexagonal nut is engaged with the recess so that the screw 32 can be rotated.
  • the lower support member 10 has a pair of through holes 102 formed therein.
  • the pair of through holes 102 is formed to extend in the vertical direction in the portion of the lower support member 10 in which the oscillator support recess 101 is not formed.
  • Each of the inner surfaces of the lower support members 10 forming the pair of through holes 102 is internally threaded or screwed.
  • An external thread of a thread 32 is screwed into the internal thread.
  • the screw 32 is configured to move back and forth with respect to the lower support member 10 by rotating the screw 32.
  • the upper and lower support members 30 are advanced and retracted with respect to the lower support member 10 by this advancement and withdrawal, but the lower support member 10 is applied to the fragile glass high voltage excitation laser oscillator L disposed in the oscillator support recesses 101 and 301.
  • the spring 31 is appropriately compressed by the elasticity of the spring 31 in response to the reaction force from the fragile high voltage excitation laser oscillator L so that the holding force by the upper support member 30 and the holding force by the upper support member 30 do not act excessively.
  • the application of strong clamping force to the high voltage excitation laser oscillator L is suppressed. That is, the spring 31 elastically biases the lower support member 10 and the upper support member 30 in the direction in which they approach each other.
  • the lower support member 10 is provided with a flat portion 11 as shown in FIG.
  • the flat portion 11 is a glass high voltage excitation laser oscillator L supported at the lower end portion of the lower support member 10 in the axial direction of the oscillator support recess 101 or 301 having a cylindrical shape, that is, by the laser oscillator support pedestal 1. It extends in the axial direction (in the direction toward the front and the back of the sheet in FIG. 3) and has a rectangular shape in plan view.
  • Through holes are respectively formed at both ends of the flat plate portion 11 in the left-right direction, and screws 112 pass through the through holes as shown in FIG. 2 to fix the flat plate portion 11 to the plate member P. ing.
  • a rectangular parallelepiped shaped lower side projecting portion 12 projecting downward is provided at the center of the lower surface of the flat plate-like portion 11.
  • the interior of the lower protrusion 12 is hollow, and the internal space of the lower protrusion 12 extends from the center of the flat portion 11 to the oscillator support recess 101 of the lower support member 10 and is directed toward the oscillator support recess 101. Open upward.
  • an advancing and retracting protrusion 50 made of an aluminum alloy and a protrusion driving portion 41 are disposed in the internal space of the lower protrusion 12.
  • the protrusion driving portion 41 has a trapezoidal shape in which the left and right sides are parallel as viewed in the axial direction of the glass high-voltage excitation laser oscillator L.
  • a through hole 411 is formed at the lower end portion of the protrusion driving portion 41, and a female screw is screwed on the inner surface of the protrusion driving portion 41 forming the through hole 411.
  • a drive screw 42 as a drive unit moving unit is engaged with the female screw so as to move the protrusion driving unit 41 in a direction perpendicular to the direction in which the advancing and retracting unit 50 moves.
  • the drive screw 42 is disposed in the left-right direction, which is a direction perpendicular to the direction in which the forward and backward projecting portion 50 advances and retracts, and the through hole 411 and a pair of through holes formed in the lower projecting portion 12 And 121 pass through.
  • the protrusion drive unit 41 and the drive screw 42 constitute an advancing and retracting drive unit 40.
  • the head of the drive screw 42 engages with a head engaging recess 412 formed on the side surface of the lower protrusion 12.
  • a hexagonal recess 423 is formed at the head of the drive screw 42.
  • a hexagonal nut is engaged with the recess 423 so that the drive screw 42 can be rotated.
  • the tip end portion of the drive screw 42 is disposed on the side surface of the lower protrusion 12 and is screwed to the nut 44 via a flat washer 413.
  • a high strength screw lock adhesive is attached between the drive screw 42 and the nut 44, and the drive screw 42 and the nut 44 are bonded.
  • a screw lock manufactured by Henkel can be used as the screw lock adhesive.
  • the adhesive hardens when oxygen is exhausted, so the nut 44 can not be removed from the drive screw 42 unless a dedicated tool is used, which is very effective. Further, when such a screw lock adhesive is used, stable mass production quality can be realized without any need to change the design for the other configuration in order to fix the nut 44 to the drive screw 42.
  • the upper end portion of the protrusion driving portion 41 has a driving portion inclined portion 415.
  • the driving portion inclined portion 415 is formed to be inclined downward from the left to the right as viewed in the axial direction of the glass high-voltage excitation laser oscillator L.
  • the drive part inclination part 415 is formed in square C-shape in the side view.
  • the upper end surface of the upper end portion of the forward / backward projecting portion 50 has an arc-shaped curved surface 501 which follows the shape of the side surface of the glass high-voltage excitation laser oscillator L.
  • the curved surface 501 is in contact with a part of the side surface (circumferential surface) of the glass high voltage excitation laser oscillator L, and supports the side surface of the glass high voltage excitation laser oscillator L in the upper support member 30.
  • the lower end portion of the forward / backward projecting portion 50 has a projecting portion inclined portion 502 which is inclined with respect to the vertical direction which is a direction in which the forward / backward projecting portion 50 advances or retracts.
  • the protrusion inclined portion 502 is formed to be inclined downward from the left to the right as viewed in the axial direction of the glass high-voltage excitation laser oscillator L.
  • the protrusion inclined portion 502 is formed in a U-shape opposite to the drive portion inclined portion 415.
  • the protrusion inclined portion 502 and the drive portion inclined portion 415 engage with each other and abut each other, and the drive portion inclined portion 415 moves along the inclination direction relative to the protrusion inclined portion 502. Is configured. Due to this movement, the protrusion driving unit 41 advances and retracts the advancing and retracting protrusion 50 with respect to the upper support member 30 as described later.
  • the operation for finely adjusting the support position of the glass high voltage excitation laser oscillator L is as follows. is there.
  • a high voltage excitation laser oscillator L made of glass is held by the upper support member 30 and the lower support member 10 in an initial state.
  • the operator inserts the hexagonal nut into the recess 423 of the drive screw 42 and rotates the drive screw 42.
  • the head of the drive screw 42 engages with the head engagement recess 412 and the nut 44 is disposed on the side surface of the lower protrusion 12 via the flat washer 413, the drive screw 42 is rotated.
  • the protrusion driving unit 41 moves leftward or rightward.
  • the glass high voltage excitation laser oscillator L slightly moves downward.
  • the upper support member 30 is slightly moved downward by the biasing force of the spring 31 constituting the compression spring, and the glass high voltage excitation laser oscillator L is placed from above the glass high voltage excitation laser oscillator L.
  • the high voltage excitation laser oscillator L made of glass is held by the upper and lower supporting members 30 and the advancing and retracting driving unit 40 of the lower supporting member 10 at an appropriate pressure.
  • the glass high voltage excitation laser oscillator L slightly moves upward.
  • the spring 31 constituting the compression spring is further compressed, and the upper support member 30 slightly moves upward. In this state, the state in which the glass high-voltage excitation laser oscillator L is held at an appropriate pressure is maintained by the upper support member 30 and the forward and backward drive unit 40 of the lower support member 10.
  • the laser oscillator support pedestal 1 having the above-described configuration can exhibit the following effects.
  • the laser oscillator support pedestal 1 for supporting the glass high voltage excitation laser oscillator L having a circular cross section is a support member for supporting one half circumferential surface of the glass high voltage excitation laser oscillator L having a circular cross section.
  • Lower support member 10, and upper support member 30 as the other support member for supporting the other half circumferential surface of the glass high voltage excitation laser oscillator L having a circular cross section, lower support member 10 and upper support member 30 as a spring 31 as an elastic biasing member elastically biasing in a direction to approach each other, a forward and backward projecting portion 50 provided on the lower support member 10 and advancing and retracting with respect to the upper support member 30, and a forward and backward projection
  • An advancing and retracting drive unit 40 for advancing and retracting the unit 50 with respect to the upper support member 30;
  • the advancing and retracting portion 50 can be advanced and retracted by the advancing and retracting drive unit 40, and the support position of the glass high voltage excitation laser oscillator L can be easily finely adjusted to less than 2 mm.
  • the glass 31 is maintained by the elasticity of the spring 31 as an elastic biasing member. It is possible to prevent the high voltage excitation laser oscillator L from being broken.
  • a through hole 302 through which the screw 32 passes is formed, and a tip portion of the screw 32 is a female screw formed in the lower support member 10 as one support member.
  • the spring 31 as an elastic biasing member is screwed to the part and biases the head 321 of the screw 32 in a direction away from the lower support member 10.
  • the advancing and retracting protrusion 50 has a protrusion inclined portion 502 which is inclined with respect to the direction in which the advancing and retracting protrusion 50 advances and retracts.
  • the forward and backward drive unit 40 projects in a direction orthogonal to the direction in which the forward and backward projecting unit 50 advances and retracts, and the projecting unit driving unit 41 having a drive unit inclined unit 415 that slides in a state of abutting on the projecting unit inclined unit 502 And a driving unit moving unit (driving screw 42) for moving the unit driving unit 41.
  • the forward / backward projecting portion 50 can be advanced / retracted by sliding in a state where the driving portion inclined portion 415 of the projecting portion driving portion 41 abuts on the projecting portion inclined portion 502. For this reason, it is possible to realize advancing and retracting the advancing and retracting portion 50 with a simple configuration that is small and thin.
  • the drive portion moving portion is provided with a drive screw 42 which is disposed in a direction orthogonal to the direction in which the advancing and retracting projecting portion 50 advances and retracts and which is screwed to a female screw formed in the projecting portion driving portion 41.
  • the drive screw 42 can be rotated by a hexagonal nut or the like from the side with respect to the longitudinal direction of the glass high voltage excitation laser oscillator L, when the support position of the glass high voltage excitation laser oscillator L is finely adjusted. Operation can be facilitated.
  • the lower support member 10 as one of the support members is made of resin (POM), and the advancing and retracting projection 50 is made of metal (aluminum alloy). This configuration makes it possible to slide the forward and backward projecting portion 50 smoothly with respect to the lower support member 10.
  • the present invention is not limited to the above-described embodiment, and can be implemented in various forms within the scope of the claims.
  • the configuration of the one support member, the other support member, the resilient biasing member, the advancing and retracting portion, the advancing and retracting driving portion, etc. corresponds to the lower supporting member 10, the upper support member 30, the spring 31, and the advancing and retracting portion in the present embodiment.
  • the configuration is not limited to the 50, the advancing and retracting drive unit 40 and the like.
  • the lower side support member 10 was comprised with resin (POM) and the advancing and retreating part 50 was comprised with aluminum alloy, it is not limited to this structure.
  • the lower support member may be made of another type of resin, and the advancing and retracting protrusion may be made of another type of metal.
  • a scale may be described on the lower projection 12 around the head of the drive screw 42, for example, like a clock hand, around the head of the drive screw 42. . By doing this, it is possible to quantify and grasp how much the drive screw 42 has been rotated, that is, how much the advancing and retracting protrusion 50 has been advanced and retracted.
  • the drive screw 42 is rotated by the operator inserting and rotating the hexagonal nut in the recess 423 of the drive screw 42, but the present invention is not limited to this configuration.
  • the drive screw may be rotated by a piezo motor. With such a configuration, the operator does not need to directly access the drive screw with a hexagonal nut, so fine adjustment of the support position of the glass high voltage excitation laser oscillator L can be further facilitated.
  • Laser oscillator support pedestal 10 Lower support member (one support member) 30 ... Upper support member (other support member) 31 ... spring 32 ... screw 40 ... forward and backward drive unit 41 ... projection unit drive unit 42 ... drive screw (forward and backward drive unit, drive unit moving unit) DESCRIPTION OF SYMBOLS 50 ... Advancing and projecting part 102 ... Through-hole 302 ... Through-hole 321 ... Head 415 ... Drive part inclination part 502 ... Projection part inclination part L ... Glass high voltage excitation Laser oscillator

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Provided is a laser oscillator support base which is capable of stably supporting an easily breakable high-voltage excited laser oscillator made of glass, and of which the support position is easily fine-adjustable. A laser oscillator support base 1 which supports a laser oscillator L having a circular cross section is provided with: one support member 10 which supports one semicircular surface of a laser oscillator L having a circular cross section; another support member 30 which supports the other semicircular surface of the laser oscillator L having the circular cross section; an elastic urging member 31 which elastically urges one support member 10 and the other support member 30 in a direction to approach one another; a forward/backward moving protrusion portion 50 which is disposed on the one support member 10 and which is moved forward and backward with respect to the other support member 30; and a forward/backward moving drive unit 40 which causes the forward/backward moving protrusion portion 50 to be moved forward and backward with respect to the other support member 30.

Description

レーザー発振器支持台座Laser oscillator support pedestal
　本発明は、ガラス製高電圧励起レーザー発振器を支持するレーザー発振器支持台座に関する。 The present invention relates to a laser oscillator support pedestal for supporting a glass high voltage excitation laser oscillator.
　従来より、所定の位置にレーザー照射するために、ガラス製高電圧励起レーザー発振器を台座によって支持することが行われている。レーザー発振器の支持する位置を微調整する際には、台座に紙を貼ったり、テープを張ったり、ワッシャを付けたりして対応していた。 2. Description of the Related Art Conventionally, a glass high voltage excitation laser oscillator is supported by a pedestal for laser irradiation to a predetermined position. When finely adjusting the position where the laser oscillator is supported, it is possible to apply a sheet of paper, a tape, or attach a washer to the base.
　一方、レーザー加工装置において光ファイバの端部を支持する構成が知られている（例えば、特許文献１参照）。スライド板に支持された光ファイバは、ボルトを回転させることにより、スライド板が移動し、これにより、光ファイバもスライド板と共に移動する。 On the other hand, a configuration for supporting an end of an optical fiber in a laser processing apparatus is known (see, for example, Patent Document 1). The optical fiber supported by the slide plate moves the slide plate by rotating a bolt, whereby the optical fiber also moves with the slide plate.
特開２０１６－１４７２９３号公報JP, 2016-147293, A
　前述のようなレーザー発振器の支持する位置を微調整する方法では、レーザー発振器を支持する適切な位置を数値化できず、微調整する作業者の経験に頼っていた。また、前述のような光ファイバを支持する構成を、そのままレーザー発振器を支持する台座に応用することはできない。 The above-mentioned method of finely adjusting the supporting position of the laser oscillator can not digitize the appropriate position for supporting the laser oscillator, but relies on the experience of the operator who finely adjusts. Further, the above-described configuration for supporting the optical fiber can not be applied as it is to a pedestal for supporting the laser oscillator.
　本発明は、割れやすいガラス製高電圧励起レーザー発振器を安定して支持可能であり、支持位置を容易に微調整可能なレーザー発振器支持台座を提供することを目的とする。 An object of the present invention is to provide a laser oscillator support pedestal capable of stably supporting a fragile glass high voltage excitation laser oscillator and capable of easily adjusting the support position.
　本発明は、断面円形状のレーザー発振器を支持するレーザー発振器支持台座であって、前記断面円形状のレーザー発振器の一方の半周面を支持する一方の支持部材と、前記断面円形状のレーザー発振器の他方の半周面を支持する他方の支持部材と、前記一方の支持部材と前記他方の支持部材とを互いに接近する方向へ弾性的に付勢する弾性付勢部材と、前記一方の支持部材に設けられ、前記他方の支持部材に対して進退する進退突出部と、前記進退突出部を前記他方の支持部材に対して進退させる進退駆動部と、を備えるレーザー発振器支持台座に関する。 The present invention is a laser oscillator support pedestal for supporting a laser oscillator having a circular cross section, which is one support member for supporting one half circumferential surface of the laser oscillator having a circular cross section, and a laser oscillator having the circular oscillator having a circular cross section. Provided on the other support member for supporting the other half circumferential surface, an elastic biasing member for resiliently urging the one support member and the other support member in the direction approaching each other, and the one support member A laser oscillator support base including an advancing and retracting portion which advances and retracts with respect to the other support member, and an advancing and retracting drive portion which advances and retracts the advancing and retracting portion with respect to the other support member.
　ここで、前記他方の支持部材には、ねじが貫通する貫通孔が形成され、前記ねじの先端部は、前記一方の支持部材に形成された雌ねじ部に螺合し、前記弾性付勢部材は、前記一方の支持部材から離間する方向へ前記ねじの頭部を付勢することが好ましい。 Here, a through hole through which a screw penetrates is formed in the other support member, the tip of the screw is screwed into the female screw formed in the one support member, and the elastic biasing member is Preferably, the head of the screw is biased in a direction away from the one support member.
　また、前記進退突出部は、前記進退突出部が進退する方向に対して傾斜する突出部傾斜部を有し、前記進退駆動部は、前記突出部傾斜部に当接した状態で摺動する駆動部傾斜部を有する突出部駆動部と、前記進退突出部が進退する方向に対して直交する方向へ前記突出部駆動部を移動させる駆動部移動部と、を備えることが好ましい。 In addition, the advancing and retracting projecting portion has a projecting portion inclined portion which is inclined with respect to a direction in which the advancing and retracting projecting portion advances and retracts, and the advancing and retracting driving portion slides in a state of being in contact with the projecting portion inclined portion It is preferable to comprise a protrusion drive unit having a unit inclined portion, and a drive unit moving unit that moves the protrusion drive unit in a direction orthogonal to the direction in which the advancing and retracting protrusion moves and retracts.
　また、前記駆動部移動部は、前記進退突出部が進退する方向に対して直交する方向に指向して配置され前記突出部駆動部に形成された雌ねじ部に螺合する駆動ねじを備えることが好ましい。 Further, the drive portion moving portion may be provided with a drive screw which is disposed in a direction orthogonal to a direction in which the advancing / retracting protrusion portion advances / retracts and which is screwed to a female screw portion formed in the protrusion portion driving portion. preferable.
　また、前記一方の支持部材は樹脂により構成され、進退突出部は金属により構成されていることが好ましい。 Preferably, the one support member is made of resin, and the advancing and retracting portion is made of metal.
　本発明によれば、割れやすいガラス製高電圧励起レーザー発振器を安定して支持可能であり、支持位置を容易に微調整可能なレーザー発振器支持台座を提供することができる。 According to the present invention, it is possible to provide a laser oscillator support pedestal capable of stably supporting a fragile glass high voltage excitation laser oscillator and capable of easily adjusting the support position.
本発明の実施形態によるレーザー発振器支持台座がガラス製高電圧励起レーザー発振器を支持している様子を示す斜視図である。It is a perspective view which shows a mode that the laser-oscillator support base by embodiment of this invention supports glass-made high voltage excitation laser oscillator. 本発明の実施形態によるレーザー発振器支持台座が板状部材に固定されている様子を示す斜視図である。It is a perspective view which shows a mode that the laser-oscillator support base by embodiment of this invention is being fixed to plate-shaped member. 本発明の実施形態によるレーザー発振器支持台座を示す断面図である。FIG. 5 is a cross-sectional view of a laser oscillator support pedestal according to an embodiment of the present invention. 本発明の実施形態によるレーザー発振器支持台座の進退突出部が突出部駆動部によって後退した位置にある状態を示す断面図である。FIG. 6 is a cross-sectional view showing a state in which the forward and backward projection of the laser oscillator support pedestal according to the embodiment of the present invention is in a position where it is retracted by the projection driving unit. 本発明の実施形態によるレーザー発振器支持台座の進退突出部が突出部駆動部によって前進した位置にある状態を示す断面図である。FIG. 7 is a cross-sectional view showing a state in which the forward and backward projection of the laser oscillator support pedestal according to the embodiment of the present invention is in a position advanced by the projection driving unit.
　以下、本発明の実施形態について図面を参照しながら説明する。
　レーザー発振器支持台座１は、長手方向に直交する断面が、直径５ｃｍ～１０ｃｍ程度の円形状を有する割れやすいガラス製高電圧励起レーザー発振器Ｌ等を支持するためのものであり、図１に示すように、平板状の板部材Ｐに一対固定されて設けられ、ガラス製高電圧励起レーザー発振器Ｌの一端部側の部分を一方のレーザー発振器支持台座１が支持し、他端部側の部分を他方のレーザー発振器支持台座１が支持する。一対のガラス製高電圧励起レーザー発振器Ｌは、同一の構成を有しているため、以下、一方のレーザー発振器支持台座１についてのみ説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The laser oscillator support pedestal 1 is for supporting a fragile glass high voltage excitation laser oscillator L or the like having a circular shape having a diameter of about 5 cm to 10 cm and a cross section orthogonal to the longitudinal direction, as shown in FIG. A portion of one end portion side of the glass high voltage excitation laser oscillator L is supported by the one laser oscillator support pedestal 1 and a portion of the other end portion side is The laser oscillator support pedestal 1 of FIG. The pair of glass high voltage excitation laser oscillators L have the same configuration, and therefore only one of the laser oscillator support pedestals 1 will be described below.
　レーザー発振器支持台座１は、図３に示すように、一方の支持部材としての下側支持部材１０と、他方の支持部材としての上側支持部材３０と、弾性付勢部材としてのばね３１と、進退駆動部４０と、進退突出部５０とを備えている。以下の説明においては、ガラス製高電圧励起レーザー発振器Ｌの軸方向視で、駆動ねじ４２の先端部の側（図３における左側）を左側と定義し、駆動ねじ４２の頭部の側（図３における右側）を右側と定義して説明する。また、同方向視で上側支持部材３０の側を上側と定義し、下側支持部材１０の側を下側と定義して説明する。 As shown in FIG. 3, the laser oscillator support base 1 is configured such that a lower support member 10 as one support member, an upper support member 30 as the other support member, a spring 31 as an elastic biasing member, and a back and forth A drive unit 40 and an advancing and retracting projecting unit 50 are provided. In the following description, the side of the tip of the drive screw 42 (left side in FIG. 3) is defined as the left side in the axial direction of the glass high voltage excitation laser oscillator L, and the side of the head of the drive screw 42 (FIG. The right side in 3) is defined as the right side and explained. Moreover, the side of the upper side supporting member 30 is defined as the upper side in the same direction view, and the side of the lower side supporting member 10 is defined as the lower side.
　上側支持部材３０と下側支持部材１０とは、それぞれＰＯＭ（ポリアセタール）等の樹脂製であり、あたかも、直方体の一対の側面を貫通するように、円筒形状の貫通孔が形成され、更に、それが半割されたような形状をそれぞれ有している。従って、上側支持部材３０、下側支持部材１０には、それぞれ半割された円筒形状を有する発振器支持凹部１０１、３０１が、互いに対向する位置関係で円筒形状をなすように形成されている。発振器支持凹部１０１、３０１は、それぞれガラス製高電圧励起レーザー発振器Ｌの側面の形状に倣った円弧形状の曲面を有している。円筒形状をなす発振器支持凹部１０１、３０１には、ガラス製高電圧励起レーザー発振器Ｌが、上側支持部材３０と下側支持部材１０とによって挟持されるようにして配置される。即ち、上側支持部材３０は、ガラス製高電圧励起レーザー発振器Ｌの上側の半周面を支持し、下側支持部材１０は、ガラス製高電圧励起レーザー発振器Ｌの下側の半周面を支持する。 The upper support member 30 and the lower support member 10 are each made of resin such as POM (polyacetal), and as it is, a cylindrical through hole is formed so as to penetrate a pair of side surfaces of a rectangular parallelepiped, and further Each has a shape that is divided by half. Therefore, in the upper support member 30 and the lower support member 10, oscillator support recesses 101 and 301 having cylindrical shapes respectively divided in half are formed to have a cylindrical shape in a positional relationship facing each other. Each of the oscillator support recesses 101 and 301 has an arc-shaped curved surface that follows the shape of the side surface of the glass high-voltage excitation laser oscillator L. A glass high-voltage excitation laser oscillator L is disposed in the cylindrical oscillator support recess 101 and 301 so as to be held between the upper support member 30 and the lower support member 10. That is, the upper support member 30 supports the upper half circumferential surface of the glass high voltage excitation laser oscillator L, and the lower support member 10 supports the lower half circumferential surface of the glass high voltage excitation laser oscillator L.
　上側支持部材３０には、一対の貫通孔３０２が形成されている。一対の貫通孔３０２は、発振器支持凹部３０１が形成されていない上側支持部材３０の部分に、それぞれ上下方向に延びて形成されている。貫通孔３０２の下端部は、貫通孔３０２の下端部よりも上側の部分に対して内径が小さい小径部３０３を有しており、小径部３０３の上端部を形成している上側支持部材３０の部分は段部を構成する。段部には、ばね３１の下端部が当接している。ばね３１の軸心位置及び貫通孔３０２の軸心位置においては、ねじ３２が貫通孔３０２及びばね３１を貫通している。このように貫通しているねじ３２の頭部３２１寄りの部分には、雄ねじは螺刻されておらず、円筒形状の側面形状を有している。 The upper support member 30 has a pair of through holes 302 formed therein. The pair of through holes 302 is formed to extend in the vertical direction in the portion of the upper support member 30 in which the oscillator support recess 301 is not formed. The lower end portion of the through hole 302 has a small diameter portion 303 having a smaller inside diameter with respect to a portion above the lower end portion of the through hole 302, and the upper support member 30 forming the upper end portion of the small diameter portion 303. The part constitutes a step. The lower end portion of the spring 31 is in contact with the stepped portion. At the axial center position of the spring 31 and the axial center position of the through hole 302, the screw 32 passes through the through hole 302 and the spring 31. The external thread is not screwed in a portion near the head portion 321 of the screw 32 penetrating in this manner, and has a cylindrical side surface shape.
　ねじ３２の先端部寄りの半分の部分は、貫通孔３０２から下側支持部材１０に向かって突出しており、この部分には、雄ねじが螺刻されている。ばね３１の上端部は、ねじ３２の頭部３２１に当接している。ばね３１は圧縮ばねを構成しており、下側支持部材１０から離間する方向へねじ３２の頭部３２１を付勢する。ねじ３２の頭部３２１には、六角形の凹部が形成されている。凹部には、六角ナットを係合させて、ねじ３２を回転可能である。 A half portion of the screw 32 near the tip end portion protrudes from the through hole 302 toward the lower support member 10, and a male screw is screwed in this portion. The upper end of the spring 31 is in contact with the head 321 of the screw 32. The spring 31 constitutes a compression spring and biases the head 321 of the screw 32 in a direction away from the lower support member 10. The head 321 of the screw 32 is formed with a hexagonal recess. A hexagonal nut is engaged with the recess so that the screw 32 can be rotated.
　下側支持部材１０には、一対の貫通孔１０２が形成されている。一対の貫通孔１０２は、発振器支持凹部１０１が形成されていない下側支持部材１０の部分に、それぞれ上下方向に延びて形成されている。一対の貫通孔１０２を形成している下側支持部材１０の内面には、それぞれ雌ねじか螺刻されている。雌ねじには、ねじ３２の雄ねじが螺合している。ねじ３２が回転させられることにより、ねじ３２が下側支持部材１０に対して進退するように構成されている。 The lower support member 10 has a pair of through holes 102 formed therein. The pair of through holes 102 is formed to extend in the vertical direction in the portion of the lower support member 10 in which the oscillator support recess 101 is not formed. Each of the inner surfaces of the lower support members 10 forming the pair of through holes 102 is internally threaded or screwed. An external thread of a thread 32 is screwed into the internal thread. The screw 32 is configured to move back and forth with respect to the lower support member 10 by rotating the screw 32.
　この進退により、下側支持部材１０に対して上側支持部材３０が進退するが、発振器支持凹部１０１、３０１に配置された割れやすいガラス製高電圧励起レーザー発振器Ｌに対して、下側支持部材１０と上側支持部材３０とによる挟持力が過度に作用しないように、割れやすいガラス製高電圧励起レーザー発振器Ｌからの反力を受けて、ばね３１の弾性によりばね３１は適度に圧縮され、ガラス製高電圧励起レーザー発振器Ｌに強い挟持力が作用することが抑えられる。即ち、ばね３１は、下側支持部材１０と上側支持部材３０とを互いに接近する方向へ弾性的に付勢する。ガラス製高電圧励起レーザー発振器Ｌが上側支持部材３０と下側支持部材１０とによって挟持されて支持される際には、ばね３１が適宜圧縮された状態が初期状態とされ、この状態から、後述のように、ガラス製高電圧励起レーザー発振器Ｌの支持位置の微調整が行われる。 The upper and lower support members 30 are advanced and retracted with respect to the lower support member 10 by this advancement and withdrawal, but the lower support member 10 is applied to the fragile glass high voltage excitation laser oscillator L disposed in the oscillator support recesses 101 and 301. The spring 31 is appropriately compressed by the elasticity of the spring 31 in response to the reaction force from the fragile high voltage excitation laser oscillator L so that the holding force by the upper support member 30 and the holding force by the upper support member 30 do not act excessively. The application of strong clamping force to the high voltage excitation laser oscillator L is suppressed. That is, the spring 31 elastically biases the lower support member 10 and the upper support member 30 in the direction in which they approach each other. When the glass high voltage excitation laser oscillator L is sandwiched and supported by the upper side support member 30 and the lower side support member 10, a state in which the spring 31 is appropriately compressed is taken as an initial state, and from this state Fine adjustment of the support position of the glass high voltage excitation laser oscillator L is performed as shown in FIG.
　下側支持部材１０には、図２等に示すように、平板状部１１が設けられている。平板状部１１は、下側支持部材１０の下端部において、円筒形状を有する発振器支持凹部１０１、３０１の軸方向、即ち、レーザー発振器支持台座１により支持されるガラス製高電圧励起レーザー発振器Ｌの軸方向（図３における紙面の手前方向及び奥側の方向）に広がるように延びており、平面視で長方形状を有している。 The lower support member 10 is provided with a flat portion 11 as shown in FIG. The flat portion 11 is a glass high voltage excitation laser oscillator L supported at the lower end portion of the lower support member 10 in the axial direction of the oscillator support recess 101 or 301 having a cylindrical shape, that is, by the laser oscillator support pedestal 1. It extends in the axial direction (in the direction toward the front and the back of the sheet in FIG. 3) and has a rectangular shape in plan view.
　左右方向における平板状部１１の両端には、それぞれ貫通孔が形成されており、貫通孔には、図２に示すようにねじ１１２が貫通して、平板状部１１を板部材Ｐに固定している。平板状部１１の下面の中央には、下方向へ突出する直方体形状の下側突出部１２が設けられている。下側突出部１２の内部は中空であり、下側突出部１２の内部空間は、平板状部１１の中央から下側支持部材１０の発振器支持凹部１０１に至るまで延び、発振器支持凹部１０１に向かって上側へ向けて開口している。 Through holes are respectively formed at both ends of the flat plate portion 11 in the left-right direction, and screws 112 pass through the through holes as shown in FIG. 2 to fix the flat plate portion 11 to the plate member P. ing. At the center of the lower surface of the flat plate-like portion 11, a rectangular parallelepiped shaped lower side projecting portion 12 projecting downward is provided. The interior of the lower protrusion 12 is hollow, and the internal space of the lower protrusion 12 extends from the center of the flat portion 11 to the oscillator support recess 101 of the lower support member 10 and is directed toward the oscillator support recess 101. Open upward.
　下側突出部１２の内部空間には、それぞれアルミ合金製の進退突出部５０と突出部駆動部４１とが配置されている。突出部駆動部４１は、図３に示すように、ガラス製高電圧励起レーザー発振器Ｌの軸方向視で、外形が左右の辺が平行な台形を有している。突出部駆動部４１の下端部には、貫通孔４１１が形成されており、貫通孔４１１を形成している突出部駆動部４１の内面には、雌ねじが螺刻されている。雌ねじには、後述ように突出部駆動部４１を進退突出部５０が進退する方向に対して直交する方向へ移動させる駆動部移動部としての駆動ねじ４２が螺合している。 In the internal space of the lower protrusion 12, an advancing and retracting protrusion 50 made of an aluminum alloy and a protrusion driving portion 41 are disposed. As shown in FIG. 3, the protrusion driving portion 41 has a trapezoidal shape in which the left and right sides are parallel as viewed in the axial direction of the glass high-voltage excitation laser oscillator L. A through hole 411 is formed at the lower end portion of the protrusion driving portion 41, and a female screw is screwed on the inner surface of the protrusion driving portion 41 forming the through hole 411. As described later, a drive screw 42 as a drive unit moving unit is engaged with the female screw so as to move the protrusion driving unit 41 in a direction perpendicular to the direction in which the advancing and retracting unit 50 moves.
　駆動ねじ４２は、進退突出部５０が進退する方向に対して直交する方向である左右方向に指向して配置されており、貫通孔４１１と、下側突出部１２に形成された一対の貫通孔１２１とを貫通している。突出部駆動部４１及び駆動ねじ４２は、進退駆動部４０を構成する。駆動ねじ４２の頭部は、下側突出部１２の側面に形成された頭部係合用凹部４１２に係合している。駆動ねじ４２の頭部には、六角形の凹部４２３が形成されている。凹部４２３には、六角ナットを係合させて、駆動ねじ４２を回転可能である。駆動ねじ４２の先端部には、下側突出部１２の側面に配置されて平ワッシャ４１３を介してナット４４に螺合している。 The drive screw 42 is disposed in the left-right direction, which is a direction perpendicular to the direction in which the forward and backward projecting portion 50 advances and retracts, and the through hole 411 and a pair of through holes formed in the lower projecting portion 12 And 121 pass through. The protrusion drive unit 41 and the drive screw 42 constitute an advancing and retracting drive unit 40. The head of the drive screw 42 engages with a head engaging recess 412 formed on the side surface of the lower protrusion 12. A hexagonal recess 423 is formed at the head of the drive screw 42. A hexagonal nut is engaged with the recess 423 so that the drive screw 42 can be rotated. The tip end portion of the drive screw 42 is disposed on the side surface of the lower protrusion 12 and is screwed to the nut 44 via a flat washer 413.
　ここで、駆動ねじ４２と平ワッシャ４１３との間に隙間があると、突出部駆動部４１が駆動ねじ４２に対して動いてしまうので、ガラス製高電圧励起レーザー発振器Ｌを固定する固定精度が低くなる。このため、駆動ねじ４２と平ワッシャ４１３とナット４４との間は、なるべく隙間のない状態とする必要がある。このため、駆動ねじ４２とナット４４との間には、高強度のネジロック接着剤が付けられ、駆動ねじ４２とナット４４とは接着される。ネジロック接着剤としては、例えば、ヘンケル社製のネジロックを使用することができる。 Here, if there is a gap between the drive screw 42 and the flat washer 413, the projection drive unit 41 moves relative to the drive screw 42, so the fixing accuracy for fixing the glass high voltage excitation laser oscillator L is It gets lower. Therefore, it is necessary to make the gap between the drive screw 42, the flat washer 413 and the nut 44 as small as possible. Therefore, a high strength screw lock adhesive is attached between the drive screw 42 and the nut 44, and the drive screw 42 and the nut 44 are bonded. For example, a screw lock manufactured by Henkel can be used as the screw lock adhesive.
　この「ネジロック」を用いる場合、酸素がなくなると接着剤（ネジロック）が固まるので、専用工具を使わない限り、ナット４４を駆動ねじ４２から外せなくなり、非常に効果的である。また、このようなネジロック接着剤を用いる場合、ナット４４を駆動ねじ４２に固定するために他の構成について設計を変更する必要が一切必要なく、安定的な量産品質を実現することができる。 When this “screw lock” is used, the adhesive (screw lock) hardens when oxygen is exhausted, so the nut 44 can not be removed from the drive screw 42 unless a dedicated tool is used, which is very effective. Further, when such a screw lock adhesive is used, stable mass production quality can be realized without any need to change the design for the other configuration in order to fix the nut 44 to the drive screw 42.
　なお、このようにネジロック接着剤に代えて、例えば、ゆるみ止めナットを使用したり、ナットを２個使用してお互いに増し締めをしたり、ナット以外のＥリング等の手段により止めたりしてもよい。 In addition, instead of the screw lock adhesive in this way, for example, a locking nut is used, two nuts are used to retighten each other, or they are stopped by means such as an E ring other than the nut. It is also good.
　突出部駆動部４１の上端部は、駆動部傾斜部４１５を有している。駆動部傾斜部４１５は、図３に示すように、ガラス製高電圧励起レーザー発振器Ｌの軸方向視で、左から右へ向かって下方へ下る傾斜状に形成されている。また、図４、図５に示すように、側方視では、駆動部傾斜部４１５は、コの字形状に形成されている。 The upper end portion of the protrusion driving portion 41 has a driving portion inclined portion 415. As shown in FIG. 3, the driving portion inclined portion 415 is formed to be inclined downward from the left to the right as viewed in the axial direction of the glass high-voltage excitation laser oscillator L. Moreover, as shown to FIG. 4, FIG. 5, the drive part inclination part 415 is formed in square C-shape in the side view.
　進退突出部５０の上端部の上端面は、ガラス製高電圧励起レーザー発振器Ｌの側面の形状に倣った円弧形状の曲面５０１を有している。曲面５０１は、ガラス製高電圧励起レーザー発振器Ｌの側面（周面）の一部に当接して、上側支持部材３０においてガラス製高電圧励起レーザー発振器Ｌの側面を支持する。 The upper end surface of the upper end portion of the forward / backward projecting portion 50 has an arc-shaped curved surface 501 which follows the shape of the side surface of the glass high-voltage excitation laser oscillator L. The curved surface 501 is in contact with a part of the side surface (circumferential surface) of the glass high voltage excitation laser oscillator L, and supports the side surface of the glass high voltage excitation laser oscillator L in the upper support member 30.
　進退突出部５０の下端部は、進退突出部５０が進退する方向である上下方向に対して傾斜する突出部傾斜部５０２を有している。突出部傾斜部５０２は、図３に示すように、ガラス製高電圧励起レーザー発振器Ｌの軸方向視で、左から右へ向かって下方へ下る傾斜状に形成されている。また、図４、図５に示すように、側方視では突出部傾斜部５０２は、駆動部傾斜部４１５と反対の向きのコの字形状に形成されている。突出部傾斜部５０２と駆動部傾斜部４１５とは互いに係合して当接し合っており、駆動部傾斜部４１５は、突出部傾斜部５０２に対して相対的に傾斜方向に沿って移動するように構成されている。この移動により、突出部駆動部４１は、後述のように進退突出部５０を上側支持部材３０に対して進退させる。 The lower end portion of the forward / backward projecting portion 50 has a projecting portion inclined portion 502 which is inclined with respect to the vertical direction which is a direction in which the forward / backward projecting portion 50 advances or retracts. As shown in FIG. 3, the protrusion inclined portion 502 is formed to be inclined downward from the left to the right as viewed in the axial direction of the glass high-voltage excitation laser oscillator L. Further, as shown in FIG. 4 and FIG. 5, in the side view, the protrusion inclined portion 502 is formed in a U-shape opposite to the drive portion inclined portion 415. The protrusion inclined portion 502 and the drive portion inclined portion 415 engage with each other and abut each other, and the drive portion inclined portion 415 moves along the inclination direction relative to the protrusion inclined portion 502. Is configured. Due to this movement, the protrusion driving unit 41 advances and retracts the advancing and retracting protrusion 50 with respect to the upper support member 30 as described later.
　上述のような一対のレーザー発振器支持台座１によってガラス製高電圧励起レーザー発振器Ｌを支持した後に、ガラス製高電圧励起レーザー発振器Ｌの支持位置を微調整する際の動作については、以下のとおりである。 After the glass high voltage excitation laser oscillator L is supported by the pair of laser oscillator support pedestals 1 as described above, the operation for finely adjusting the support position of the glass high voltage excitation laser oscillator L is as follows. is there.
　先ず、上側支持部材３０と下側支持部材１０とによってガラス製高電圧励起レーザー発振器Ｌを挟持した初期状態とする。次に、作業者が駆動ねじ４２の凹部４２３に六角ナットを挿入して回転させることにより、駆動ねじ４２を回転させる。このとき、駆動ねじ４２の頭部は頭部係合用凹部４１２に係合し、ナット４４は平ワッシャ４１３を介して下側突出部１２の側面に配置されているため、駆動ねじ４２が回転させられることにより、突出部駆動部４１は左方向又は右方向へ移動する。突出部駆動部４１が左方向へ移動することにより、互いに係合し合うコの字形状の突出部傾斜部５０２と駆動部傾斜部４１５との相対的な摺動により、進退突出部５０は下方向へ後退する。逆に、突出部駆動部４１が右方向へ移動することにより、進退突出部５０は上方向へ前進する。 First, a high voltage excitation laser oscillator L made of glass is held by the upper support member 30 and the lower support member 10 in an initial state. Next, the operator inserts the hexagonal nut into the recess 423 of the drive screw 42 and rotates the drive screw 42. At this time, since the head of the drive screw 42 engages with the head engagement recess 412 and the nut 44 is disposed on the side surface of the lower protrusion 12 via the flat washer 413, the drive screw 42 is rotated. As a result, the protrusion driving unit 41 moves leftward or rightward. The relative movement between the U-shaped protruding portion inclined portion 502 and the driving portion inclined portion 415, which are engaged with each other by moving the protruding portion driving portion 41 in the left direction, lowers the advancing / retracting protruding portion 50. Back in the direction. Conversely, when the protrusion driving portion 41 moves in the right direction, the advancing and retracting protrusion 50 moves forward.
　進退突出部５０が下方向へ後退する際には、ガラス製高電圧励起レーザー発振器Ｌは下方向へ僅かに移動する。このとき、圧縮ばねを構成するばね３１の付勢力により、上側支持部材３０は、下方向に僅かに移動して、ガラス製高電圧励起レーザー発振器Ｌの上側からガラス製高電圧励起レーザー発振器Ｌを押圧して、上側支持部材３０と下側支持部材１０の進退駆動部４０とでガラス製高電圧励起レーザー発振器Ｌを適切な圧力で挟持した状態が維持される。 When the advancing and retracting protrusion 50 retracts downward, the glass high voltage excitation laser oscillator L slightly moves downward. At this time, the upper support member 30 is slightly moved downward by the biasing force of the spring 31 constituting the compression spring, and the glass high voltage excitation laser oscillator L is placed from above the glass high voltage excitation laser oscillator L. By pressing, the high voltage excitation laser oscillator L made of glass is held by the upper and lower supporting members 30 and the advancing and retracting driving unit 40 of the lower supporting member 10 at an appropriate pressure.
　進退突出部５０が上方向へ前進する際には、ガラス製高電圧励起レーザー発振器Ｌは上方向へ僅かに移動する。このとき、圧縮ばねを構成するばね３１が更に圧縮されて、上側支持部材３０は、上方向へ僅かに移動する。この状態で、上側支持部材３０と下側支持部材１０の進退駆動部４０とでガラス製高電圧励起レーザー発振器Ｌを適切な圧力で挟持した状態が維持される。 When the advancing and retracting protrusion 50 advances upward, the glass high voltage excitation laser oscillator L slightly moves upward. At this time, the spring 31 constituting the compression spring is further compressed, and the upper support member 30 slightly moves upward. In this state, the state in which the glass high-voltage excitation laser oscillator L is held at an appropriate pressure is maintained by the upper support member 30 and the forward and backward drive unit 40 of the lower support member 10.
　上述の構成によるレーザー発振器支持台座１は、以下のような効果を発揮することができる。前述のように断面円形状のガラス製高電圧励起レーザー発振器Ｌを支持するレーザー発振器支持台座１は、断面円形状のガラス製高電圧励起レーザー発振器Ｌの一方の半周面を支持する一方の支持部材としての下側支持部材１０と、断面円形状のガラス製高電圧励起レーザー発振器Ｌの他方の半周面を支持する他方の支持部材としての上側支持部材３０と、下側支持部材１０と上側支持部材３０とを互いに接近する方向へ弾性的に付勢する弾性付勢部材としてのばね３１と、下側支持部材１０に設けられ、上側支持部材３０に対して進退する進退突出部５０と、進退突出部５０を上側支持部材３０に対して進退させる進退駆動部４０と、を備える。 The laser oscillator support pedestal 1 having the above-described configuration can exhibit the following effects. As described above, the laser oscillator support pedestal 1 for supporting the glass high voltage excitation laser oscillator L having a circular cross section is a support member for supporting one half circumferential surface of the glass high voltage excitation laser oscillator L having a circular cross section. Lower support member 10, and upper support member 30 as the other support member for supporting the other half circumferential surface of the glass high voltage excitation laser oscillator L having a circular cross section, lower support member 10 and upper support member 30 as a spring 31 as an elastic biasing member elastically biasing in a direction to approach each other, a forward and backward projecting portion 50 provided on the lower support member 10 and advancing and retracting with respect to the upper support member 30, and a forward and backward projection An advancing and retracting drive unit 40 for advancing and retracting the unit 50 with respect to the upper support member 30;
　この構成により、進退駆動部４０により進退突出部５０を進退させて、ガラス製高電圧励起レーザー発振器Ｌの支持位置を、容易に２ｍｍにも満たない微調整をすることができる。その際、弾性付勢部材としてのばね３１の弾性により、上側支持部材３０と下側支持部材１０とでガラス製高電圧励起レーザー発振器Ｌを適切な圧力で挟持した状態が維持されるため、ガラス製高電圧励起レーザー発振器Ｌが割れてしまうことを防ぐことができる。 With this configuration, the advancing and retracting portion 50 can be advanced and retracted by the advancing and retracting drive unit 40, and the support position of the glass high voltage excitation laser oscillator L can be easily finely adjusted to less than 2 mm. At that time, since the high voltage excitation laser oscillator L made of glass is held between the upper support member 30 and the lower support member 10 at an appropriate pressure, the glass 31 is maintained by the elasticity of the spring 31 as an elastic biasing member. It is possible to prevent the high voltage excitation laser oscillator L from being broken.
　また、他方の支持部材としての上側支持部材３０には、ねじ３２が貫通する貫通孔３０２が形成され、ねじ３２の先端部は、一方の支持部材としての下側支持部材１０に形成された雌ねじ部に螺合し、弾性付勢部材としてのばね３１は、下側支持部材１０から離間する方向へねじ３２の頭部３２１を付勢する。 Further, in the upper support member 30 as the other support member, a through hole 302 through which the screw 32 passes is formed, and a tip portion of the screw 32 is a female screw formed in the lower support member 10 as one support member. The spring 31 as an elastic biasing member is screwed to the part and biases the head 321 of the screw 32 in a direction away from the lower support member 10.
　この構成により、ばね３１の弾性が利用されて、上側支持部材３０と下側支持部材１０とでガラス製高電圧励起レーザー発振器Ｌを適切な圧力で挟持した状態が維持される。このため、ガラス製高電圧励起レーザー発振器Ｌが割れてしまうことを、確実に防ぐことができる。 With this configuration, the elasticity of the spring 31 is utilized, and the state in which the glass high voltage excitation laser oscillator L is held between the upper support member 30 and the lower support member 10 with an appropriate pressure is maintained. Therefore, it is possible to reliably prevent the glass high voltage excitation laser oscillator L from being broken.
　また、進退突出部５０は、進退突出部５０が進退する方向に対して傾斜する突出部傾斜部５０２を有する。進退駆動部４０は、突出部傾斜部５０２に当接した状態で摺動する駆動部傾斜部４１５を有する突出部駆動部４１と、進退突出部５０が進退する方向に対して直交する方向へ突出部駆動部４１を移動させる駆動部移動部（駆動ねじ４２）と、を備える。 In addition, the advancing and retracting protrusion 50 has a protrusion inclined portion 502 which is inclined with respect to the direction in which the advancing and retracting protrusion 50 advances and retracts. The forward and backward drive unit 40 projects in a direction orthogonal to the direction in which the forward and backward projecting unit 50 advances and retracts, and the projecting unit driving unit 41 having a drive unit inclined unit 415 that slides in a state of abutting on the projecting unit inclined unit 502 And a driving unit moving unit (driving screw 42) for moving the unit driving unit 41.
　この構成により、突出部駆動部４１の駆動部傾斜部４１５が突出部傾斜部５０２に当接した状態で摺動することで、進退突出部５０を進退させることが可能となる。このため、小型で且つ薄型の簡単な構成で進退突出部５０を進退させることを実現させることが可能となる。 With this configuration, the forward / backward projecting portion 50 can be advanced / retracted by sliding in a state where the driving portion inclined portion 415 of the projecting portion driving portion 41 abuts on the projecting portion inclined portion 502. For this reason, it is possible to realize advancing and retracting the advancing and retracting portion 50 with a simple configuration that is small and thin.
　また、駆動部移動部は、進退突出部５０が進退する方向に対して直交する方向に指向して配置され突出部駆動部４１に形成された雌ねじ部に螺合する駆動ねじ４２を備える。この構成により、駆動ねじ４２を回転させることにより、簡単な構成で容易に進退突出部５０を僅かに進退させることができる。このため、ガラス製高電圧励起レーザー発振器Ｌの支持位置を容易に微調整することができる。また、ガラス製高電圧励起レーザー発振器Ｌの長手方向に対する側方から六角ナット等により駆動ねじ４２を回転させることが可能であるため、ガラス製高電圧励起レーザー発振器Ｌの支持位置を微調整する際の操作を容易とすることができる。 Further, the drive portion moving portion is provided with a drive screw 42 which is disposed in a direction orthogonal to the direction in which the advancing and retracting projecting portion 50 advances and retracts and which is screwed to a female screw formed in the projecting portion driving portion 41. With this configuration, by rotating the drive screw 42, the advancing and retracting projection 50 can be slightly advanced and retracted with a simple configuration. Therefore, the supporting position of the glass high voltage excitation laser oscillator L can be easily finely adjusted. Further, since the drive screw 42 can be rotated by a hexagonal nut or the like from the side with respect to the longitudinal direction of the glass high voltage excitation laser oscillator L, when the support position of the glass high voltage excitation laser oscillator L is finely adjusted. Operation can be facilitated.
　また、一方の支持部材としての下側支持部材１０は樹脂（ＰＯＭ）により構成され、進退突出部５０は金属（アルミニウム合金）により構成されている。この構成により、進退突出部５０を下側支持部材１０に対して滑らかに摺動させることが可能となる。 Further, the lower support member 10 as one of the support members is made of resin (POM), and the advancing and retracting projection 50 is made of metal (aluminum alloy). This configuration makes it possible to slide the forward and backward projecting portion 50 smoothly with respect to the lower support member 10.
　本発明は、上述した実施形態に制限されることなく、請求の範囲に記載した範囲において、様々な形態で実施することができる。例えば、一方の支持部材、他方の支持部材、弾性付勢部材、進退突出部、進退駆動部等の構成は、本実施形態における下側支持部材１０、上側支持部材３０、ばね３１、進退突出部５０、進退駆動部４０等の構成に限定されない。 The present invention is not limited to the above-described embodiment, and can be implemented in various forms within the scope of the claims. For example, the configuration of the one support member, the other support member, the resilient biasing member, the advancing and retracting portion, the advancing and retracting driving portion, etc. corresponds to the lower supporting member 10, the upper support member 30, the spring 31, and the advancing and retracting portion in the present embodiment. The configuration is not limited to the 50, the advancing and retracting drive unit 40 and the like.
　例えば、下側支持部材１０は樹脂（ＰＯＭ）により構成され、進退突出部５０はアルミニウム合金により構成されていたが、この構成に限定されない。下側支持部材は他の種類の樹脂により構成されてもよく、また、進退突出部は、他の種類の金属により構成されてもよい。 For example, although the lower side support member 10 was comprised with resin (POM) and the advancing and retreating part 50 was comprised with aluminum alloy, it is not limited to this structure. The lower support member may be made of another type of resin, and the advancing and retracting protrusion may be made of another type of metal.
　また、例えば、駆動ねじ４２の頭部の周囲における下側突出部１２の部分には、駆動ねじ４２の頭部を中心として、例えば時計の針のように、目盛りを記載するようにしてもよい。このようにすることにより、どのぐらい駆動ねじ４２を回転させたか、即ち、どのぐらい進退突出部５０を進退させたかを数値化して把握することが可能となる。 Also, for example, a scale may be described on the lower projection 12 around the head of the drive screw 42, for example, like a clock hand, around the head of the drive screw 42. . By doing this, it is possible to quantify and grasp how much the drive screw 42 has been rotated, that is, how much the advancing and retracting protrusion 50 has been advanced and retracted.
　また、例えば、本実施形態では、作業者が駆動ねじ４２の凹部４２３に六角ナットを挿入して回転させることにより、駆動ねじ４２を回転させていたが、この構成に限定されない。例えば、ピエゾモータにより駆動ねじを回転させるようにしてもよい。このような構成とすることで、作業者が駆動ねじに対して六角ナットで直接アクセスしなくて済むため、ガラス製高電圧励起レーザー発振器Ｌの支持位置の微調整を更に容易とすることができる。 Further, for example, in the present embodiment, the drive screw 42 is rotated by the operator inserting and rotating the hexagonal nut in the recess 423 of the drive screw 42, but the present invention is not limited to this configuration. For example, the drive screw may be rotated by a piezo motor. With such a configuration, the operator does not need to directly access the drive screw with a hexagonal nut, so fine adjustment of the support position of the glass high voltage excitation laser oscillator L can be further facilitated.
　１・・・レーザー発振器支持台座
　１０・・・下側支持部材（一方の支持部材）
　３０・・・上側支持部材（他方の支持部材）
　３１・・・ばね
　３２・・・ねじ
　４０・・・進退駆動部
　４１・・・突出部駆動部
　４２・・・駆動ねじ（進退駆動部、駆動部移動部）
　５０・・・進退突出部
　１０２・・・貫通孔
　３０２・・・貫通孔
　３２１・・・頭部
　４１５・・・駆動部傾斜部
　５０２・・・突出部傾斜部
　Ｌ・・・ガラス製高電圧励起レーザー発振器 1 ··· Laser oscillator support pedestal 10 ··· Lower support member (one support member)
30 ... Upper support member (other support member)
31 ... spring 32 ... screw 40 ... forward and backward drive unit 41 ... projection unit drive unit 42 ... drive screw (forward and backward drive unit, drive unit moving unit)
DESCRIPTION OF SYMBOLS 50 ... Advancing and projecting part 102 ... Through-hole 302 ... Through-hole 321 ... Head 415 ... Drive part inclination part 502 ... Projection part inclination part L ... Glass high voltage excitation Laser oscillator

Claims (5)

  1. 　断面円形状のレーザー発振器を支持するレーザー発振器支持台座であって、
    　前記断面円形状のレーザー発振器の一方の半周面を支持する一方の支持部材と、
    　前記断面円形状のレーザー発振器の他方の半周面を支持する他方の支持部材と、
    　前記一方の支持部材と前記他方の支持部材とを互いに接近する方向へ弾性的に付勢する弾性付勢部材と、
    　前記一方の支持部材に設けられ、前記他方の支持部材に対して進退する進退突出部と、
    　前記進退突出部を前記他方の支持部材に対して進退させる進退駆動部と、を備えるレーザー発振器支持台座。     A laser oscillator support base for supporting a laser oscillator having a circular cross section, comprising:
    One support member for supporting one half circumferential surface of the cross-sectional circular laser oscillator;
    Another support member for supporting the other half circumferential surface of the cross-sectional circular laser oscillator;
    A resilient biasing member resiliently biasing the one support member and the other support member in a direction approaching each other;
    An advancing and retracting projection provided on the one support member and advancing and retracting with respect to the other support member;
    And a forward and backward drive unit configured to move the forward and backward protrusion with respect to the other support member.
  2. 　前記他方の支持部材には、ねじが貫通する貫通孔が形成され、
    　前記ねじの先端部は、前記一方の支持部材に形成された雌ねじ部に螺合し、
    　前記弾性付勢部材は、前記一方の支持部材から離間する方向へ前記ねじの頭部を付勢する請求項１に記載のレーザー発振器支持台座。     A through hole through which a screw passes is formed in the other support member,
    The tip end of the screw is screwed into an internal thread formed on the one support member,
    The laser oscillator support pedestal according to claim 1, wherein the resilient biasing member biases the head of the screw in a direction away from the one support member.
  3. 　前記進退突出部は、前記進退突出部が進退する方向に対して傾斜する突出部傾斜部を有し、
    　前記進退駆動部は、
    　　前記突出部傾斜部に当接した状態で摺動する駆動部傾斜部を有する突出部駆動部と、
    　　前記進退突出部が進退する方向に対して直交する方向へ前記突出部駆動部を移動させる駆動部移動部と、を備える請求項１又は請求項２に記載のレーザー発振器支持台座。     The advancing and retracting protrusion has a protrusion inclined portion which is inclined with respect to a direction in which the advancing and retracting protrusion moves.
    The forward and backward drive unit is
    A protrusion driving portion having a driving portion inclined portion sliding in a state of being in contact with the protruding portion inclined portion;
    3. The laser oscillator support pedestal according to claim 1, further comprising: a drive unit moving unit configured to move the protrusion driving unit in a direction orthogonal to a direction in which the advancing and retracting projections move in and out.
  4. 　前記駆動部移動部は、前記進退突出部が進退する方向に対して直交する方向に指向して配置され前記突出部駆動部に形成された雌ねじ部に螺合する駆動ねじを備える、請求項３に記載のレーザー発振器支持台座。 The drive unit moving unit is provided with a drive screw which is disposed in a direction orthogonal to a direction in which the advancing and retracting projecting unit advances and retracts and which is screwed to a female screw formed in the projecting unit driving unit. The laser oscillator support pedestal described in.
  5. 　前記一方の支持部材は樹脂により構成され、進退突出部は金属により構成されている請求項１～請求項４のいずれかに記載のレーザー発振器支持台座。 The laser oscillator support pedestal according to any one of claims 1 to 4, wherein the one support member is made of resin, and the advancing and retracting portion is made of metal.
PCT/JP2018/013952 2017-11-27 2018-03-30 Laser oscillator support base WO2019102632A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-226704 2017-11-27
JP2017226704A JP6486447B1 (en) 2017-11-27 2017-11-27 Laser oscillator support base

Publications (1)

Publication Number Publication Date
WO2019102632A1 true WO2019102632A1 (en) 2019-05-31

Family

ID=65802301

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/013952 WO2019102632A1 (en) 2017-11-27 2018-03-30 Laser oscillator support base

Country Status (2)

Country Link
JP (1) JP6486447B1 (en)
WO (1) WO2019102632A1 (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317178U (en) * 1976-07-22 1978-02-14
JPS5680510U (en) * 1979-11-27 1981-06-30
JPS56132773U (en) * 1980-03-10 1981-10-08
JPS60218891A (en) * 1984-04-13 1985-11-01 Matsushita Electric Ind Co Ltd Laser-oscillator-tube attaching device
JPS6146762U (en) * 1984-08-30 1986-03-28 富士ゼロックス株式会社 Laser mounting device
JPS622270U (en) * 1985-06-20 1987-01-08
JPS63200356U (en) * 1987-06-13 1988-12-23
JPH02148782A (en) * 1988-11-29 1990-06-07 Fanuc Ltd Laser system
JPH04343307A (en) * 1991-05-20 1992-11-30 Ricoh Co Ltd Laser adjusting device
JPH0653573A (en) * 1992-07-28 1994-02-25 Hitachi Seiko Ltd Supporting device for laser oscillator
JPH10163549A (en) * 1996-12-03 1998-06-19 Nikon Corp Laser light source device and support structure thereof
US20100189156A1 (en) * 2007-06-26 2010-07-29 Gabriele Clementi Radio frequency excited gas laser source

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317178U (en) * 1976-07-22 1978-02-14
JPS5680510U (en) * 1979-11-27 1981-06-30
JPS56132773U (en) * 1980-03-10 1981-10-08
JPS60218891A (en) * 1984-04-13 1985-11-01 Matsushita Electric Ind Co Ltd Laser-oscillator-tube attaching device
JPS6146762U (en) * 1984-08-30 1986-03-28 富士ゼロックス株式会社 Laser mounting device
JPS622270U (en) * 1985-06-20 1987-01-08
JPS63200356U (en) * 1987-06-13 1988-12-23
JPH02148782A (en) * 1988-11-29 1990-06-07 Fanuc Ltd Laser system
JPH04343307A (en) * 1991-05-20 1992-11-30 Ricoh Co Ltd Laser adjusting device
JPH0653573A (en) * 1992-07-28 1994-02-25 Hitachi Seiko Ltd Supporting device for laser oscillator
JPH10163549A (en) * 1996-12-03 1998-06-19 Nikon Corp Laser light source device and support structure thereof
US20100189156A1 (en) * 2007-06-26 2010-07-29 Gabriele Clementi Radio frequency excited gas laser source

Also Published As

Publication number Publication date
JP2019096813A (en) 2019-06-20
JP6486447B1 (en) 2019-03-20

Similar Documents

Publication Publication Date Title
JP2009142014A (en) Ultrasonic motor
JP4838402B1 (en) Stage mechanism
US9653675B2 (en) Driving apparatus, lens apparatus including the same, and imaging apparatus
KR20170109594A (en) Integrated pico motor mount
JP3144575U (en) 2 axis plane moving stage
GB2527011A (en) Linear ultrasonic motor and optical device equipped with same
WO2019102632A1 (en) Laser oscillator support base
JP2012006080A (en) Rivet setting tool capable of variably adjusting setting stroke
JP2013215860A (en) Mounting structure and mounting member used for the same
JP6471004B2 (en) Ultrasonic cutting device
US20160352256A1 (en) Vibration wave motor
US11383273B2 (en) Piezo motor
JP2013226785A (en) Die positioning mechanism
CN107699890B (en) Coating machine fixture and coating machine
JP2012103318A (en) Light source device
US8832956B2 (en) Position adjusting device with distance detecting mechanism
JP6535874B1 (en) Glass cutting tool
JPWO2010032826A1 (en) Support device for vibration actuator
JP3203580U (en) Optical element holding mechanism
JP2001281514A (en) Optical element holding mechanism and optical equipment including the same
CN219869554U (en) Displacement platform and optical measurement device
WO2019007048A1 (en) Optical module
US6916055B2 (en) Lens press tool
WO2023120265A1 (en) Feed mechanism and method for manufacturing same
JP2018196284A (en) Vibration type actuator and electronic apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18882010

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18882010

Country of ref document: EP

Kind code of ref document: A1