WO2019097936A1

WO2019097936A1 - Solid state imaging element and electronic device

Info

Publication number: WO2019097936A1
Application number: PCT/JP2018/038588
Authority: WO
Inventors: 智之蕨野
Original assignee: ソニーセミコンダクタソリューションズ株式会社
Priority date: 2017-11-16
Filing date: 2018-10-17
Publication date: 2019-05-23
Also published as: JP2019091853A

Abstract

Provided is a solid state imaging element in which the image quality can be improved. The present invention provides the solid state imaging element in which: at least an on-chip lens, an in-layer lens, an anti-reflection layer, and a semiconductor substrate are arranged, in order from the light incidence side, on each of multiple one-dimensionally or two-dimensionally arranged pixels; the refractive index of the on-chip lens is different from the refractive index of the in-layer lens; and, when the curvature radius of the upper portion of the on-chip lens on the light incidence side thereof is defined as rl, the curvature radius of the lower portion of the on-chip lens is defined as rc, the refractive index of the on-chip lens is defined as nl, the refractive index of the in-layer lens is defined as nc, and the distance from the anti-reflection layer to the upper end of the in-layer lens on the light incidence side thereof, is defined as hc, the curvature radius rl of the upper portion of the on-chip lens and the curvature radius rc of the lower portion of the on-chip lens satisfy expression (1) with al and ac within a range of 0.96-1.04.

Description

Solid-state imaging device and electronic device

The present technology relates to a solid-state imaging device and an electronic device.

In general, solid-state imaging devices such as complementary metal oxide semiconductor (CMOS) image sensors and charge coupled devices (CCDs) are widely used in digital still cameras and digital video cameras.

In recent years, various developments have been made to improve the image quality of solid-state imaging devices.

For example, an image sensor having a double lens structure has been proposed (see Patent Document 1).

In addition, for example, a solid-state imaging device provided with a lens layer having an achromatic lens structure has been proposed (see Patent Document 2).

Furthermore, for example, a solid-state imaging device has been proposed in which microlenses having different shapes corresponding to the color of light to be received are in contact and the ends of adjacent microlenses are in contact with each other (see Patent Document 3). reference).

JP, 2016-036004, A JP 2007-158179 A JP, 2014-154662, A

However, the techniques proposed in Patent Documents 1 to 3 may not be able to further improve the image quality.

Therefore, the present technology has been made in view of such a situation, and has as its main object to provide a solid-state imaging device capable of improving the image quality and an electronic device equipped with the solid-state imaging device.

As a result of intensive studies to solve the above-described object, the present inventors succeeded in dramatically improving the image quality, and completed the present technology.

That is, in the present technology, first, for each of a plurality of pixels arranged in one dimension or two dimensions, at least the on-chip lens, the in-layer lens, the antireflective layer, and the semiconductor substrate are sequentially arranged from the light incident side. Distributed,
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Provided is a solid-state imaging device.

The solid-state imaging device according to the present technology may further include an inter-pixel light shielding film.
The solid-state imaging device according to the present technology may further include a hard mask material between adjacent pixels.

In the solid-state imaging device according to the present technology, the upper part on the light incident side of at least one in-layer lens of the in-layer lenses may have an upward convex shape, and is in contact with the at least one in-layer lens The lower portion of the on-chip lens to be disposed may be convex upward.
In the solid-state imaging device according to the present technology, an upper portion on a light incident side of at least one in-layer lens of the in-layer lenses may have a downward convex shape, and is in contact with the at least one in-layer lens The lower portion of the on-chip lens to be disposed may be a downward convex shape.
In the solid-state imaging device according to the present technology, the upper part on the light incident side of at least one in-layer lens of the in-layer lenses may have an upward convex shape, and is in contact with the at least one in-layer lens The lower portion of the on-chip lens to be disposed may be convex upward, and
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses may have a downward convex shape, and the on-chip lens disposed in contact with the at least one in-layer lens The lower portion may have a downward convex shape.
In addition, that the lower part of the on-chip lens is convex upward is synonymous with that the lower part of the on-chip lens is concave and it is the light incident side of the in-layer lens (including the color filter described later). The downward convex shape on the upper portion is synonymous with the concave shape on the light incident side of the in-layer lens (including a color filter described later).

In the solid-state imaging device according to the present technology, at least one in-layer lens of the in-layer lenses may have a color filter characteristic that transmits a specific wavelength band.
The solid-state imaging device according to the present technology may further include an on-chip lens anti-reflection film on the on-chip lens.

Also, with this technology,
Forming an inter-pixel light shielding film between adjacent pixels in the upper direction of the antireflective layer on the semiconductor substrate;
A step of spin-coating the in-layer lens material and adjusting the number of rotations after the spin-coating to dry;
Forming an in-layer lens by exposing and developing the in-layer lens material on or between the in-pixel light shielding film or the in-pixel light blocking film;
Coating the base lens after spin-coating the on-chip lens material, adjusting the dimensions and patterning;
Melting and etching back the dimensioned base lens, and transferring the curvature to the on-chip lens material to form an on-chip lens.
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper part of the on-chip lens and the radius of curvature rc of the lower part of the on-chip lens in the range of 0.96 to 1.04 in which al and ac satisfy the following formula (1) The present invention provides a method of manufacturing a solid-state imaging device, which is processed into

However, in the equation (1), when the light incident surface side of the on-chip lens is the upper side, the upper part of the on-chip lens is upwardly convex when rl> 0, and when rl <0. The upper part of the on-chip lens is a downward convex shape, and when rc> 0, the lower part of the on-chip lens is an upward convex shape, and when rc <0, the lower part of the on-chip lens is a downward convex shape It is.

The method of manufacturing a solid-state imaging device according to the present technology may further include the step of forming a hard mask material between adjacent pixels.
The method of manufacturing a solid-state imaging device according to the present technology may further include the step of forming an anti-reflection film for on-chip lens on the on-chip lens.

Furthermore, in the present technology,
A solid-state image sensor is mounted,
The solid-state imaging device is
At least an on-chip lens, an in-layer lens, an antireflective layer, and a semiconductor substrate are arranged in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions,
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Provide an electronic device.

According to the present technology, the image quality can be improved. In addition, the effect described here is not necessarily limited and may be any effect described in the present technology.

It is a sectional view showing an example of composition of a solid-state image sensing device of a 1st embodiment to which this art is applied. It is a sectional view showing an example of composition of a solid-state image sensing device of a 2nd embodiment to which this art is applied. It is a sectional view showing an example of composition of a solid-state image sensing device of a 3rd embodiment to which this art is applied. It is a sectional view showing an example of composition of a solid-state image sensing device of a 4th embodiment to which this art is applied. It is sectional drawing which shows the structural example of the solid-state image sensor of 5th Embodiment to which this technique is applied. It is a sectional view showing an example of composition of a solid-state image sensing device of a 6th embodiment to which this art is applied. It is sectional drawing which shows the structural example of the solid-state image sensor of 7th Embodiment to which this technique is applied. It is sectional drawing which shows the structural example of the solid-state image sensor of 7th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 8th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 8th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 9th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 9th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 10th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 10th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 11th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 11th Embodiment to which this technique is applied. It is sectional drawing which shows the example of the manufacturing method of the solid-state image sensor of 12th Embodiment to which this technique is applied. It is a figure which shows the usage example of the solid-state image sensor of 1st-7th embodiment to which this technique is applied. It is a functional block diagram of an example of the electronic device concerning a 13th embodiment to which this art is applied.

Hereinafter, preferred embodiments for implementing the present technology will be described. The embodiments described below show an example of a representative embodiment of the present technology, and the scope of the present technology is not narrowly interpreted.

The description will be made in the following order.
1. Overview of the present technology 2. Embodiment relating to solid-state imaging device 2-1. First Embodiment (Example 1 of Solid-State Imaging Device)
2-2. Second Embodiment (Example 2 of Solid-State Imaging Device)
2-3. Third embodiment (example 3 of solid-state imaging device)
2-4. Fourth Embodiment (Example 4 of Solid-State Imaging Device)
2-5. Fifth Embodiment (Example 5 of Solid-State Imaging Device)
2-6. Sixth Embodiment (Example 6 of Solid-State Imaging Device)
2-7. Seventh embodiment (example 7 of solid-state imaging device)
3. Embodiment Regarding Method of Manufacturing Solid-State Imaging Device 3-1. Eighth Embodiment (Example 1 of Manufacturing Method of Solid-State Imaging Device)
3-2. Ninth Embodiment (Example 2 of Method of Manufacturing Solid-State Imaging Device)
3-3. Tenth Embodiment (Example 3 of Method of Manufacturing Solid-State Imaging Device)
3-4. Eleventh Embodiment (Example 4 of Method of Manufacturing Solid-State Imaging Device)
3-5. Twelfth Embodiment (Example 5 of Method of Manufacturing Solid-State Imaging Device)
4. Embodiment related to electronic device 4-1. Thirteenth embodiment (example of electronic device)
5. Usage example of solid-state imaging device to which the present technology is applied

<1. Outline of this technology>
The present technology relates to a solid-state imaging device proposed regarding the chromatic aberration of the on-chip lens and an electronic apparatus equipped with the solid-state imaging device. According to the present technology, the image quality of the solid-state imaging device can be improved.

There is a technology related to an achromatic shaped on-chip lens. In this technique, the magnitude relationship of the refractive index is disclosed for the concave lens and the convex lens, and the chromatic aberration may not be able to be solved depending on the wavelength band. In the visible light band, there is a technique using Abbe's number to solve the chromatic aberration. The distance to the photoelectric conversion layer is large, and in some cases the chromatic aberration can not be solved only by the focal length of the concave lens and the convex lens. Moreover, since it is formulated by the Abbe number, it may be effective only in the visible light band. Furthermore, there is a technology for improving the light collecting performance for each pixel. In this technology, the radius of the on-chip lens and the distance to the photoelectric conversion layer are not disclosed, and additional processing steps may be required.

The present technology has been made in view of the above circumstances. In the present technology, the curvature of the on-chip lens can be changed according to the refractive index for each wavelength and / or for each pixel without requiring an additional step.

<2. Embodiment regarding solid-state imaging device>
[2-1. First Embodiment (Example 1 of Solid-State Imaging Device)]
The solid-state imaging device according to the first embodiment (example 1 of the solid-state imaging device) according to the present technology includes an on-chip lens and a layer sequentially from the light incident side for each of a plurality of pixels arranged in one or two dimensions. At least an inner lens, a reflection preventing layer, and a semiconductor substrate are disposed, and the refractive index of the on-chip lens and the refractive index of the in-layer lens are different, and the curvature of the upper portion on the light incident side of the on-chip lens The radius is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the intralayer lens is nc, and the light incident side of the intralayer lens is from the antireflective layer When the distance to the upper end is hc, the radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac. Is a solid that satisfies the following formula (1) An image element.

However, in the equation (1), when the light incident surface side of the on-chip lens is the upper side, the upper part of the on-chip lens is upwardly convex when rl> 0, and when rl <0. The upper part of the on-chip lens is a downward convex shape, and when rc> 0, the lower part of the on-chip lens is an upward convex shape, and when rc <0, the lower part of the on-chip lens is a downward convex shape It is. The light has a spread according to the wavelength without being condensed at one point even if condensed by the on-chip lens in nature. al and ac mean the on-chip lens error range recognized from this spread. Here, al is an error range of the upper portion (upper surface) of the on-chip lens, and ac is an error range of the lower portion (lower surface) of the on-chip lens.

According to the solid-state imaging device of the first embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 1 shows a solid-state imaging device 1-1 which is an example of a solid-state imaging device according to a first embodiment of the present technology. FIG. 1 is a cross-sectional view of four pixels (pixels 100-1-1 to 100-1-4) of a solid-state imaging device 1-1. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 1, and "lower" means the lower direction in FIG.

In the pixel 100-1-1, an on-chip lens 2-1-G, a color filter 3-1-G that transmits green light (G light), and an insulating layer 5-1, in order from the light incident side, An antireflective layer 6-1 and a semiconductor substrate 10-1 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-1, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-1.

The upper part of the on-chip lens 2-1-G (on the light incident surface side, and the upper side in FIG. 1) is convex upward, and the lower part of the on-chip lens 2-1-G (in FIG. 1 is the lower side) ) Is a downward convex shape. The radius of curvature (rl) of the upper part of the on-chip lens 2-1-G is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-1-G is rc <0. The upper portion of the color filter 3-1-G (on the light incident surface side and the upper side in FIG. 1) has a downward convex shape (concave shape).

The on-chip lens 2-1-G may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-1-G. The refractive index of the on-chip lens 2-1-G may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-1-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-1-1, the distance from the antireflection layer 6-1 to the upper end portion as the light incident side of the color filter 3-1-G is hg-1. The radius of curvature (rl) of the upper portion of the on-chip lens 2-1-G and the radius of curvature (rc) of the lower portion of the on-chip lens 2-1-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-1-1 (wavelength band of G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-1-G and the curvature radius (rc) of the lower part of the on-chip lens 2-1-G are ± 4. A range of about% is acceptable.

In the pixel 100-1-2, an on-chip lens 2-1-R, a color filter 3-1-R through which red light (R light) passes, and an insulating layer 5-1 in order from the light incident side An antireflective layer 6-1 and a semiconductor substrate 10-1 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-1, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-1.

The upper part of the on-chip lens 2-1-R (on the light incident surface side, upper side in FIG. 1) is convex upward, and the lower part of the on-chip lens 2-1-R (lower side in FIG. 1) ) Is substantially flat. The curvature radius (rl) of the upper part of the on-chip lens 2-1-G is rl> 0, and rc of the curvature radius (rc) of the lower part of the on-chip lens 2-1-R is infinite. The upper portion of the color filter 3-1-R (on the light incident surface side and the upper side in FIG. 1) is substantially flat.

The on-chip lens 2-1-R may be made of a material having a higher refractive index than the substantially flat color filter 3-1-R. The refractive index of the on-chip lens 2-1-R may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-1-R may be, for example, nc = 1.55 to 1.65. In the pixel 100-1-2, the distance from the antireflection layer 6-1 to the upper end portion as the light incident side of the color filter 3-1-R is hr-1. The radius of curvature (rl) at the top of the on-chip lens 2-1-R is optimized so as to satisfy the above equation (1). As described above, the radius of curvature (rc) at the bottom of the on-chip lens 2-1-R is infinite. Thereby, in the pixel 100-1-2 (wavelength band of R light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper part of the on-chip lens 2-1-R is allowed to be in the range of about 4%.

In the pixel 100-1-3, an on-chip lens 2-1-B, a color filter 3-1-B that transmits blue light (B light), and an insulating layer 5-1, in order from the light incident side. An antireflective layer 6-1 and a semiconductor substrate 10-1 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-1 and embedded in a silicon (Si) layer of the semiconductor substrate 10-1.

The upper part of the on-chip lens 2-1-B (on the light incident surface side, and the upper side in FIG. 1) is convex upward, and the lower part of the on-chip lens 2-1-B (in FIG. 1 is the lower side) ) Is a downward convex shape. The radius of curvature (rl) of the upper portion of the on-chip lens 2-1-B is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-1-B is rc <0. The upper portion of the color filter 3-1-B (the light incident surface side and the upper side in FIG. 1) has a downward convex shape (concave shape).

The on-chip lens 2-1-B may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-1-B. The refractive index of the on-chip lens 2-1-B may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-1-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-1-3, the distance from the antireflection layer 6-1 to the upper end portion as the light incident side of the color filter 3-1-B is hb-1. The radius of curvature (rl) of the upper portion of the on-chip lens 2-1-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-1-B are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-1-3 (wavelength band of B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-1-B and the curvature radius (rc) of the lower part of the on-chip lens 2-1-B are ± 4. A range of about% is acceptable.

In the pixel 100-1-4, an on-chip lens 2-1 -W and an in-layer lens 3-1 through which green light, red light and blue light (BGR (W) light) are transmitted in order from the light incident side. W, an insulating layer 5-1, an antireflective layer 6-1, and a semiconductor substrate 10-1 are disposed. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-1 and embedded in a silicon (Si) layer of the semiconductor substrate 10-1.

The upper portion of the on-chip lens 2-1-W (the light incident surface side, and the upper side in FIG. 1) has an upwardly convex shape, and the lower portion of the on-chip lens 2-1-W (the lower side in FIG. 1) ) Is a downward convex shape. The radius of curvature (rl) of the upper portion of the on-chip lens 2-1-W is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-1-W is rc <0. The upper portion of the in-layer lens 3-1-W (the light incident surface side and the upper side in FIG. 1) has a downward convex shape (concave shape).

The on-chip lens 2-1-W may be made of a material having a higher refractive index than the in-layer lens 3-1-W having a downward convex shape (concave shape). The refractive index of the on-chip lens 2-1-W may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the in-layer lens 3-1-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-1-4, the distance from the anti-reflection layer 6-1 to the upper end portion as the light incident side of the in-layer lens 3-1-W is hw-1. The radius of curvature (rl) of the upper part of the on-chip lens 2-1-W and the radius of curvature (rc) of the lower part of the on-chip lens 2-1-W are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-1-4 (wavelength band of BGR (W) light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-1-W and the curvature radius (rc) of the lower part of the on-chip lens 2-1-W are ± 4. A range of about% is acceptable.

On the side of the back surface (the upper surface in FIG. 1) of the semiconductor substrate 10-1, the pixel separating unit 9-1-G, the pixel separating unit 9-1-GR, the pixel separating unit 9-RB, the pixel separating unit 9- The 1-BW and the pixel separation unit 9-W are formed to be embedded in the semiconductor substrate 10-1. The pixel separator 9-1-G, the pixel separator 9-1-GR, the pixel separator 9-1-RB, the pixel separator 9-1-BW, and the pixel separator 9-1- The pixels 100-1-1 to 100-1-4) are partitioned and electrically separated. As shown in FIG. 1, the pixel separating unit 9-1 -G may be composed of a silicon oxide film 7-1 -G and a silicon nitride film 8-1 -G, and the pixel separating unit 9-1 -GR May be composed of a silicon oxide film 7- 1 GR and a silicon nitride film 8 1-GR, and the pixel separating portion 9 1-RB is a silicon oxide film 7 1-RB and a silicon nitride film 8- The pixel separating unit 9- 1 -BW may be composed of a silicon oxide film 7-1 -BW and a silicon nitride film 8-1 -BW. -W may be composed of a silicon oxide film 7- 1 -W and a silicon nitride film 8-1 -W.

The solid-state imaging device 1-1 includes an inter-pixel light shielding film 4-1-G, an inter-pixel light shielding film 4-1-GR, an inter-pixel light shielding film 4-1-RB, an inter-pixel light shielding film 4-1-BW, and an inter-pixel A light shielding film 4-1-W is provided. The inter-pixel light shielding film 4-1-G, the inter-pixel light shielding film 4-1-GR, the inter-pixel light shielding film 4-1-RB, the inter-pixel light shielding film 4-1-BW, and the inter-pixel light shielding film 4-1-W And the pixel boundary of each of the pixels 100-1-1 to 100-1-4 immediately above the insulating layer 5-1. The color filter 3-1-G is embedded between the inter-pixel light shielding film 4-1-G and the inter-pixel light shielding film 4-1-GR, and the color filter 3-1-R is an inter-pixel light shielding film 4- The color filter 3-1-B is embedded between the 1-GR and the inter-pixel light shielding film 4-1-RB, and the color filter 3-1-B includes the inter-pixel light shielding film 4-1-RB and the inter-pixel light shielding film 4-1-BW. The inter-layer lens 3-1-W is embedded between the inter-pixel light shielding film 4-1-B and the inter-pixel light shielding film 4-1-W. The inter-pixel light shielding film 4-1-G, the inter-pixel light shielding film 4-1-GR, the inter-pixel light shielding film 4-1-RB, the inter-pixel light shielding film 4-1-BW, and the inter-pixel light shielding film 4-1-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

[2-2. Second Embodiment (Example 2 of Solid-State Imaging Device)]
The solid-state imaging device according to the second embodiment (example 2 of the solid-state imaging device) according to the present technology will be described below.

According to the solid-state imaging device of the second embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 2 shows a solid-state imaging device 1-2 which is an example of a solid-state imaging device according to a second embodiment of the present technology. FIG. 2 is a cross-sectional view of four pixels (pixels 100-2-1 to 100-2-4) of the solid-state imaging device 1-2. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 2, and "lower" means the lower direction in FIG.

In the pixel 100-2-1, an on-chip lens 2-2 -G, a color filter 3-2 -G for transmitting green light (G light), and an insulating layer 5-2 in order from the light incident side, An antireflective layer 6-2 and a semiconductor substrate 10-2 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-2, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-2.

The upper portion (on the light incident surface side, upper side in FIG. 2) of the on-chip lens 2-2-G has an upper convex shape, and the lower portion (lower side in FIG. 1) of the on-chip lens 2-2-G. ) Is an upward convex shape (concave shape). The curvature radius (rl) of the upper part of the on-chip lens 2-2-G is rl> 0, and the curvature radius (rc) of the lower part of the on-chip lens 2-2-G is rc> 0. The upper portion of the color filter 3-2-G (on the light incident surface side and the upper side in FIG. 2) has an upwardly convex shape.

The on-chip lens 2-2-G may use a material having a lower refractive index than the upwardly convex color filter 3-2-G. The refractive index of the on-chip lens 2-2-G may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-2-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-2-1, the distance from the antireflection layer 6-2 to the upper end portion of the color filter 3-2 -G on the light incident side is hg-2. The radius of curvature (rl) of the upper part of the on-chip lens 2-2-G and the radius of curvature (rc) of the lower part of the on-chip lens 2-2-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-2-1 (wavelength band of G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-2-G and the curvature radius (rc) of the lower part of the on-chip lens 2-2-G are ± 4. A range of about% is acceptable.

In the pixel 100-2-2, an on-chip lens 2-2 -R, a color filter 3-2 -R transmitting red light (R light), and an insulating layer 5-2 in order from the light incident side, An antireflective layer 6-2 and a semiconductor substrate 10-2 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-2, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-2.

The upper portion (on the light incident surface side, upper side in FIG. 2) of the on-chip lens 2-2R is convex upward, and the lower portion (lower side in FIG. 2) of the on-chip lens 2-2R ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper part of the on-chip lens 2-2R is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-2R is rc> 0. The upper portion of the color filter 3-2-R (on the light incident surface side and the upper side in FIG. 2) has an upwardly convex shape.

The on-chip lens 2-2-R may use a material having a lower refractive index than the upwardly convex color filter 3-2-R. The refractive index of the on-chip lens 2-2R may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-2-R may be, for example, nc = 1.55 to 1.65. In the pixel 100-2-2, the distance from the antireflection layer 6-2 to the upper end portion as the light incident side of the color filter 3-2 -R is hr−2. The radius of curvature (rl) of the upper portion of the on-chip lens 2-2R and the radius of curvature (rc) of the lower portion of the on-chip lens 2-2R are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-2-2 (wavelength band of R light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-2-R and the curvature radius (rc) of the lower part of the on-chip lens 2-2-R are ± 4. A range of about% is acceptable.

The pixel 100-2-3 includes, in order from the light incident side, an on-chip lens 2-2-B, a color filter 3-2-B that transmits blue light (B light), and an insulating layer 5-2. An antireflective layer 6-2 and a semiconductor substrate 10-2 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-2, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-2.

The upper portion (on the light incident surface side, upper side in FIG. 2) of the on-chip lens 2-2-B is convex upward, and the lower portion (lower side in FIG. 2) of the on-chip lens 2-2-B. ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper part of the on-chip lens 2-2-B is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-2-B is rc> 0. The upper portion of the color filter 3-2-B (on the light incident surface side and the upper side in FIG. 2) has an upwardly convex shape.

The on-chip lens 2-2-B may use a material having a lower refractive index than the upwardly convex color filter 3-2-B. The refractive index of the on-chip lens 2-2-B may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-2-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-2-3, the distance from the antireflective layer 6-2 to the upper end portion as the light incident side of the color filter 3-2-B is hb-2. The radius of curvature (rl) of the upper portion of the on-chip lens 2-2-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-2-B are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-2-3 (wavelength band of B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-2-B and the curvature radius (rc) of the lower part of the on-chip lens 2-2-B are ± 4. A range of about% is acceptable.

In the pixel 100-2-4, an on-chip lens 2-2-W and an in-layer lens through which green light, red light and blue light (BGR (W) light) transmit in order from the light incident side W, the insulating layer 5-2, the antireflective layer 6-2, and the semiconductor substrate 10-2 are disposed. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-2, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-2.

The upper portion (on the light incident surface side, upper side in FIG. 2) of the on-chip lens 2-2-W is convex upward, and the lower portion (lower side in FIG. 2) of the on-chip lens 2-2-W ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper part of the on-chip lens 2-2-W is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-2-W is rc> 0. The upper portion of the in-layer lens 3-2 W (the light incident surface side and the upper side in FIG. 2) has an upwardly convex shape.

The on-chip lens 2-2-W may be made of a material having a lower refractive index than the upper convex in-layer lens 3-2-W. The refractive index of the on-chip lens 2-2-W may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the in-layer lens 3-2-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-2-4, the distance from the antireflection layer 6-2 to the upper end portion as the light incident side of the in-layer lens 3-2W is hw-2. The radius of curvature (rl) of the upper part of the on-chip lens 2-2-W and the radius of curvature (rc) of the lower part of the on-chip lens 2-2-W are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-2-4 (wavelength band of BGR (W) light), the light collecting property is ensured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-2-W and the curvature radius (rc) of the lower part of the on-chip lens 2-2-W are ± 4. A range of about% is acceptable.

On the side of the back surface (the upper surface in FIG. 2) of the semiconductor substrate 10-2, the pixel separation unit 9-2-G, the pixel separation unit 9-2-GR, the pixel separation unit 9-2-RB, and the pixel separation unit 9- The 2-BW and the pixel separating unit 9-W are formed to be embedded in the semiconductor substrate 10-2. The pixel separator 9-2-G, the pixel separator 9-2 -GR, the pixel separator 9-2 -RB, the pixel separator 9-2 -BW, and the pixel separator 9-2- The pixels 100-2-1 to 100-2-4) are partitioned and electrically separated. As shown in FIG. 2, the pixel separating unit 9-2 -G may be composed of a silicon oxide film 7-2 -G and a silicon nitride film 8-2 -G. May be composed of a silicon oxide film 7- 2-GR and a silicon nitride film 8- 2- GR, and the pixel separating portion 9- 2-RB is a silicon oxide film 7- 2-RB and a silicon nitride film 8- The pixel separating unit 9-2 -BW may be composed of a silicon oxide film 7-2 -BW and a silicon nitride film 8-2 -BW. -W may be composed of a silicon oxide film 7- 2-W and a silicon nitride film 8-2 -W.

The solid-state imaging device 1-2 includes an inter-pixel light shielding film 4-2-G, an inter-pixel light shielding film 4-2-GR, an inter-pixel light shielding film 4-2-RB, an inter-pixel light shielding film 4-2-BW, and an inter-pixel A light shielding film 4-2-W is provided. The inter-pixel light shielding film 4-2-G, the inter-pixel light shielding film 4-2-GR, the inter-pixel light shielding film 4-2-RB, the inter-pixel light shielding film 4-2-BW, and the inter-pixel light shielding film 4-2-W It is formed directly on the insulating layer 5-2 and at the pixel boundary of each of the pixels 100-2-1 to 100-2-4. The color filter 3-2-G is embedded between the inter-pixel light shielding film 4-2-G and the inter-pixel light shielding film 4-2-GR, and the color filter 3-2-R is an inter-pixel light shielding film 4- The color filter 3-2-B is embedded between the 2-GR and the inter-pixel light shielding film 4-2-RB, and the color filter 3-2-B is formed of the inter-pixel light shielding film 4-2-RB and the inter-pixel light shielding film 4-2-BW. The inter-layer lens 3-2-W is embedded between the inter-pixel light shielding film 4-2-BW and the inter-pixel light shielding film 4-2-W. The inter-pixel light shielding film 4-2-G, the inter-pixel light shielding film 4-2-GR, the inter-pixel light shielding film 4-2-RB, the inter-pixel light shielding film 4-2-BW, and the inter-pixel light shielding film 4-2-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

[2-3. Third Embodiment (Example 3 of Solid-State Imaging Device)]
The solid-state imaging device according to the third embodiment (example 3 of the solid-state imaging device) according to the present technology will be described below.

According to the solid-state imaging device of the third embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 3 shows a solid-state imaging device 1-3 which is an example of a solid-state imaging device according to a third embodiment of the present technology. FIG. 3 is a cross-sectional view of four pixels (pixels 100-3-1 to 100-3-4) of the solid-state imaging device 1-3. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 3, and "lower" means the lower direction in FIG.

The pixel 100-3-1 includes, in order from the light incident side, an on-chip lens 2-3-G, a color filter 3-3-G that transmits green light (G light), and an insulating layer 5-3. An antireflective layer 6-3 and a semiconductor substrate 10-3 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-3 and embedded in the silicon (Si) layer of the semiconductor substrate 10-3.

The upper portion of the on-chip lens 2-3-G (on the light incident surface side, upper side in FIG. 3) is convex upward, and the lower portion of the on-chip lens 2-3-G (lower side in FIG. 3) ) Is a downward convex shape. The radius of curvature (rl) of the upper portion of the on-chip lens 2-3-G is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-3-G is rc <0. The upper portion of the color filter 3-3-G (on the light incident surface side and the upper side in FIG. 3) has a downward convex shape (concave shape).

The on-chip lens 2-3-G may be made of a material having a refractive index higher than that of the downward convex (concave) color filter 3-3-G. The refractive index of the on-chip lens 2-3-G may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-3-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-3-1, the distance from the antireflection layer 6-3 to the upper end portion as the light incident side of the color filter 3-3-G is hg-3. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-G and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-3-1 (wavelength band of G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-3-G and the curvature radius (rc) of the lower part of the on-chip lens 2-3-G are ± 4. A range of about% is acceptable.

In the pixel 100-3-2, an on-chip lens 2-3-R, a color filter 3-3 -R through which red light (R light) passes, and an insulating layer 5-3 in order from the light incident side. An antireflective layer 6-3 and a semiconductor substrate 10-3 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-3 and is embedded in a silicon (Si) layer of the semiconductor substrate 10-3.

The upper part of the on-chip lens 2-3-R (on the light incident surface side, and the upper side in FIG. 3) is convex upward, and the lower part of the on-chip lens 2-3-R (in FIG. 2 is the lower side) ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper portion of the on-chip lens 2-3-R is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-3-R is rc> 0. The upper portion of the color filter 3-3-R (on the light incident surface side and the upper side in FIG. 3) has an upwardly convex shape.

The upper convex color filter 3-3-R may be made of a material having a refractive index similar to or higher than that of the on-chip lens 2-3-R. The refractive index of the on-chip lens 2-3-R may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-3-R may be, for example, nc = 1.75 to 1.85. In the pixel 100-3-2, the distance from the antireflection layer 6-2 to the upper end portion as the light incident side of the color filter 3-3 -R is hr 3. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-R and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-R are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-3-2 (R light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper portion of the on-chip lens 2-3-R and the radius of curvature (rc) of the lower portion of the on-chip lens 2-3-R are ± 4. A range of about% is acceptable.

The pixel 100-3-3 includes, in order from the light incident side, an on-chip lens 2-3-B, a color filter 3-3-B that transmits blue light (B light), and an insulating layer 5-3. An antireflective layer 6-3 and a semiconductor substrate 10-3 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-3 and is embedded in a silicon (Si) layer of the semiconductor substrate 10-3.

The upper part of the on-chip lens 2-3-B (on the light incident surface side, and the upper side in FIG. 3) is convex upward, and the lower part of the on-chip lens 2-3-B (in FIG. 3 is the lower side) ) Is a downward convex shape. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-B is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-B is rc <0. The upper portion of the color filter 3-3-B (on the light incident surface side and the upper side in FIG. 3) has a downward convex shape (concave shape).

The on-chip lens 2-3-B may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-3-B. The refractive index of the on-chip lens 2-3-B may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-3-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-3-3, the distance from the antireflection layer 6-3 to the upper end portion as the light incident side of the color filter 3-3-B is hb-3. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-B and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-R are optimized so as to satisfy the above equation (1). As a result, in the pixel 100-3-3 (wavelength band of B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper part of the on-chip lens 2-3-B and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-B are ± 4. A range of about% is acceptable.

In the pixel 100-3-4, an on-chip lens 2-3-W and an in-layer lens through which green light, red light and blue light (BGR (W) light) transmit in order from the light incident side W, an insulating layer 5-3, an antireflective layer 6-3, and a semiconductor substrate 10-3 are disposed. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-3 and embedded in the silicon (Si) layer of the semiconductor substrate 10-3.

The upper portion of the on-chip lens 2-3-W (the light incident surface side, and the upper side in FIG. 3) has an upwardly convex shape, and the lower portion of the on-chip lens 2-3-W (the lower side in FIG. 3) ) Is a downward convex shape. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-W is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-W is rc <0. The upper portion of the in-layer lens 3-3-W (the light incident surface side and the upper side in FIG. 3) has a downward convex shape (concave shape).

The on-chip lens 2-3-W may be made of a material having a higher refractive index than the in-layer lens 3-3-W having a downward convex shape (concave shape). The refractive index of the on-chip lens 2-3-W may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the in-layer lens 3-3-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-3-4, the distance from the antireflection layer 6-3 to the upper end portion as the light incident side of the in-layer lens 3-3-W is hw-3. The radius of curvature (rl) of the upper part of the on-chip lens 2-3-W and the radius of curvature (rc) of the lower part of the on-chip lens 2-3-W are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-3-4 (wavelength band of BGR (W) light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-3-W and the curvature radius (rc) of the lower part of the on-chip lens 2-3-W are ± 4. A range of about% is acceptable.

On the side of the back surface (the upper surface in FIG. 3) of the semiconductor substrate 10-3, the pixel separating unit 9-3-G, the pixel separating unit 9-3-GR, the pixel separating unit 9-3-RB, and the pixel separating unit 9- The 3-BW and the pixel separation unit 9-W are formed to be embedded in the semiconductor substrate 10-3. The pixel separator 9-3-G, the pixel separator 9-3-GR, the pixel separator 9-3 -RB, the pixel separator 9-3 -BW and the pixel separator 9-3- The pixels 100-3-1 to 100-3-4) are partitioned and electrically separated. As shown in FIG. 3, the pixel separating unit 9-3 -G may be composed of a silicon oxide film 7-3 -G and a silicon nitride film 8 -3 -G, and the pixel separating unit 9 -3 -GR May be composed of a silicon oxide film 7-3-GR and a silicon nitride film 8-3-GR, and the pixel separating portion 9-RB is a silicon oxide film 7-3-RB and a silicon nitride film 8- The pixel separating portion 9-3-BW may be composed of a silicon oxide film 7-3 -BW and a silicon nitride film 8-3 -BW. -W may be composed of a silicon oxide film 7-3-W and a silicon nitride film 8-3-W.

The solid-state imaging device 1-3 includes an inter-pixel light shielding film 4-3-G, an inter-pixel light shielding film 4-3-GR, an inter-pixel light shielding film 4-3-RB, an inter-pixel light shielding film 4-3-BW, and an inter-pixel A light shielding film 4-3-W is provided. The inter-pixel light shielding film 4-3-G, the inter-pixel light shielding film 4-3-G, the inter-pixel light shielding film 4-3-RB, the inter-pixel light shielding film 4-3-BW and the inter-pixel light shielding film 4-3-W It is formed directly on the insulating layer 5-3 and at the pixel boundary of each of the pixels 100-3-1 to 100-3-4. The color filter 3-3-G is embedded between the inter-pixel light shielding film 4-3-G and the inter-pixel light shielding film 4-3-GR, and the color filter 3-3-R is an inter-pixel light shielding film 4- The color filter 3-3-B is embedded between the 3-GR and the inter-pixel light shielding film 4-3-RB, and the color filter 3-3-B is formed of the inter-pixel light shielding film 4-3-RB and the inter-pixel light shielding film 4-3-BW. The inter-layer lens 3-3-W is embedded between the inter-pixel light shielding film 4-3-B and the inter-pixel light shielding film 4-3-W. The inter-pixel light shielding film 4-3-G, the inter-pixel light shielding film 4-3-G, the inter-pixel light shielding film 4-3-RB, the inter-pixel light shielding film 4-3-BW and the inter-pixel light shielding film 4-3-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

[2-4. Fourth Embodiment (Example 4 of Solid-State Imaging Device)]
The solid-state imaging device according to the fourth embodiment (example 4 of the solid-state imaging device) according to the present technology will be described below.

According to the solid-state imaging device of the fourth embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 4 shows a solid-state imaging device 1-4 which is an example of a solid-state imaging device according to a fourth embodiment of the present technology. FIG. 4 is a cross-sectional view of four pixels (pixels 100-4-1 to 100-4-4) of the solid-state imaging device 1-4. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 4, and "lower" means the lower direction in FIG.

In the pixel 100-4-1, an on-chip lens 2-4 -G, a color filter 3-4 -G that transmits green light (G light), and an insulating layer 5-4 in order from the light incident side, An antireflective layer 6-4 and a semiconductor substrate 10-4 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-4 and embedded in a silicon (Si) layer of the semiconductor substrate 10-4.

The upper portion (on the light incident surface side, upper side in FIG. 4) of the on-chip lens 2-4-G has an upper convex shape, and the lower portion (lower side in FIG. 4) of the on-chip lens 2-4-G. ) Is a downward convex shape. The curvature radius (rl) of the upper part of the on-chip lens 2-4-G is rl> 0, and the curvature radius (rc) of the lower part of the on-chip lens 2-4-G is rc <0. The upper portion (on the light incident surface side and the upper side in FIG. 4) of the color filter 3-4-G has a downward convex shape (concave shape).

The on-chip lens 2-4-G may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-4-G. The refractive index of the on-chip lens 2-4-G may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-4-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-4-1, the distance from the antireflective layer 6-4 to the upper end portion of the color filter 3-4 -G on the light incident side is hg−4. The curvature radius (rl) of the upper portion of the on-chip lens 2-4-G and the curvature radius (rc) of the lower portion of the on-chip lens 2-4-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-4-1 (wavelength band of G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper portion of the on-chip lens 2-4-G and the radius of curvature (rc) of the lower portion of the on-chip lens 2-4-G are ± 4. A range of about% is acceptable.

In the pixel 100-4-2, an on-chip lens 2-4 -R, a color filter 3-4 -R transmitting red light (R light), and an insulating layer 5-4 in order from the light incident side, An antireflective layer 6-4 and a semiconductor substrate 10-4 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-4 and is embedded in a silicon (Si) layer of the semiconductor substrate 10-4.

The upper portion (on the light incident surface side, upper side in FIG. 4) of the on-chip lens 2-4-R has an upper convex shape, and the lower portion (lower side in FIG. 4) of the on-chip lens 2-4-R. ) Is substantially flat. The curvature radius (rl) of the upper part of the on-chip lens 2-4-G is rl> 0, and rc of the curvature radius (rc) of the lower part of the on-chip lens 2-4-G is infinite. The upper portion (on the light incident surface side and the upper side in FIG. 4) of the color filter 3-4-R is substantially flat.

The on-chip lens 2-4-R may be made of a material having a higher refractive index than the substantially flat color filter 3-4-R. The refractive index of the on-chip lens 2-4-R may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-4-R may be, for example, nc = 1.55 to 1.65. In the pixel 100-4-2, the distance from the antireflection layer 6-4 to the upper end portion as the light incident side of the color filter 3-4 -R is hr 4. The curvature radius (rl) of the upper part of the on-chip lens 2-4-R is optimized so as to satisfy the above equation (1). As described above, the radius of curvature (rc) of the lower part of the on-chip lens 2-4-R is infinite. Thereby, in the pixel 100-4-2 (wavelength band of R light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper part of the on-chip lens 2-4-R is allowed to be in the range of about 4%.

The pixel 100-4-3 includes, in order from the light incident side, an on-chip lens 2-4-B, a color filter 3-4-B that transmits blue light (B light), and an insulating layer 5-4. An antireflective layer 6-4 and a semiconductor substrate 10-4 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-4 and is embedded in the silicon (Si) layer of the semiconductor substrate 10-4.

The upper portion (on the light incident surface side, upper side in FIG. 4) of the on-chip lens 2-4-B has an upper convex shape, and the lower portion (lower side in FIG. 4) of the on-chip lens 2-4-B. ) Is a downward convex shape. The radius of curvature (rl) of the upper part of the on-chip lens 2-4-B is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-4-B is rc <0. The upper portion of the color filter 3-4-B (on the light incident surface side and the upper side in FIG. 4) has a downward convex shape (concave shape).

The on-chip lens 2-4-B may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-4-B. The refractive index of the on-chip lens 2-4-B may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-4-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-4-3, the distance from the antireflection layer 6-4 to the upper end portion as the light incident side of the color filter 3-4-B is hb-4. The radius of curvature (rl) of the upper portion of the on-chip lens 2-4-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-4-B are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-4-3 (wavelength band of B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-4-B and the curvature radius (rc) of the lower part of the on-chip lens 2-4-B are ± 4. A range of about% is acceptable.

In the pixel 100-4-4, an on-chip lens 2-4 -W and an in-layer lens through which green light, red light and blue light (BGR (W) light) pass sequentially from the light incident side. W, an insulating layer 5-4, an antireflective layer 6-4, and a semiconductor substrate 10-4 are disposed. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-4 and is embedded in a silicon (Si) layer of the semiconductor substrate 10-4.

The upper portion (on the light incident surface side, upper side in FIG. 4) of the on-chip lens 2-4-W is convex upward, and the lower portion (lower side in FIG. 4) of the on-chip lens 2-4-W ) Is a downward convex shape. The upper radius of curvature (rl) of the on-chip lens 2-4-W is rl> 0, and the lower radius of curvature (rc) of the on-chip lens 2-4-W is rc <0. The upper portion of the in-layer lens 3-4-W (the light incident surface side and the upper side in FIG. 4) has a downward convex shape (concave shape).

The on-chip lens 2-4-W may be made of a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-4-W. The refractive index of the on-chip lens 2-4-W may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the in-layer lens 3-4-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-1-4, the distance from the anti-reflection layer 6-1 to the upper end portion as the light incident side of the in-layer lens 3-4-W is hw-4. The curvature radius (rl) of the upper part of the on-chip lens 2-4-W and the curvature radius (rc) of the lower part of the on-chip lens 2-4-W are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-4-4 (wavelength band of BGR (W) light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-4-W and the curvature radius (rc) of the lower part of the on-chip lens 2-4-W are ± 4. A range of about% is acceptable.

On the side of the back surface (upper surface in FIG. 4) of the semiconductor substrate 10-4, the pixel separation unit 9-4-G, the pixel separation unit 9-4-GR, the pixel separation unit 9-4-RB, the pixel separation unit 9- The 4-BW and the pixel separating portion 9-4-W are formed to be embedded in the semiconductor substrate 10-4. The pixel separating unit 9-4-G, the pixel separating unit 9-4-GR, the pixel separating unit 9-4-RB, the pixel separating unit 9-4-BW, and the pixel separating unit 9-4-W The pixels 100-4-1 to 100-4-4) are partitioned and electrically separated. As shown in FIG. 4, the pixel separating portion 9-4-G may be composed of a silicon oxide film 7-4-G and a silicon nitride film 8-4-G, and the pixel separating portion 9-4-GR. May be composed of a silicon oxide film 7-4-GR and a silicon nitride film 8-4-GR, and the pixel separating portion 9-4-RB is a silicon oxide film 7-4-RB and a silicon nitride film 8- The pixel separating portion 9-4-BW may be composed of a silicon oxide film 7-4-BW and a silicon nitride film 8-4-BW. -W may be composed of a silicon oxide film 7-4-W and a silicon nitride film 8-4-W.

The solid-state imaging device 1-4 includes an inter-pixel light shielding film 4-4-G, an inter-pixel light shielding film 4-4-GR, an inter-pixel light shielding film 4-4-RB, an inter-pixel light shielding film 4-4-BW and an inter-pixel A light shielding film 4-4-W is provided. The solid-state imaging device 1-4 further includes a hard mask material 40-4-G, a hard mask material 40-4-GR, a hard mask material 40-4-RB, a hard mask material 40-4-BW, and a hard mask material 40. -4-W is equipped. The inter-pixel light shielding film 4-4-G, the inter-pixel light shielding film 4-4-GR, the inter-pixel light shielding film 4-4-RB, the inter-pixel light shielding film 4-4-BW and the inter-pixel light shielding film 4-4-W And the pixel boundary of each of the pixels 100-4-1 to 100-4-4 immediately above the insulating layer 5-4. Each of the hard mask material 40-4-G, the hard mask material 40-4-GR, the hard mask material 40-4-RB, the hard mask material 40-4-BW and the hard mask material 40-4-W Each of the light shielding film 4-4-G, the inter-pixel light shielding film 4-4-GR, the inter-pixel light shielding film 4-4-RB, the inter-pixel light shielding film 4-4-BW, and the inter-pixel light shielding film 4-4-W It is formed immediately above the pixel boundary of each of the pixels 100-4-1 to 100-4-4. The hard mask material 40-4-G may be composed of a silicon oxide film 41-4-G and a silicon nitride film 42-4-G, and the hard mask material 40-4-GR is a silicon oxide film 41-4. The hard mask material 40-4-RB may be composed of a silicon oxide film 41-4-RB and a silicon nitride film 42-4-RB. The hard mask material 40-4-BW may be composed of a silicon oxide film 41-4-BW and a silicon nitride film 42-4-BW, and the hard mask material 40-4-W is a silicon oxide film 41. It may be composed of -4-W and silicon nitride film 42-4-W. Then, as shown in FIG. 4, the silicon nitride film 42-4-G, the silicon nitride film 42-4-GR, the silicon nitride film 42-4-RB, the silicon nitride film 42-4-BW, and the silicon nitride film 42. Each of -4-W is an inter-pixel light shielding film 4-4-G, an inter-pixel light shielding film 4-4-GR, an inter-pixel light shielding film 4-4-RB, an inter-pixel light shielding film 4-4-BW and an inter-pixel It is disposed immediately above each of the light shielding films 4-4-W.

As shown in FIG. 4, the color filter 3-4-G includes the inter-pixel light shielding film 4-4-G and the hard mask material 40-4-G, and the inter-pixel light shielding film 4-4-GR and the hard mask material. It is embedded between 40-4-GR. The color filter 3-4-R is formed between the inter-pixel light shielding film 4-4-GR and the hard mask material 40-4-GR, and the inter-pixel light shielding film 4-4-RB and the hard mask material 40-4-RB. Embedded in The color filter 3-4-B is provided between the inter-pixel light shielding film 4-4-RB and the hard mask material 40-4-RB and the inter-pixel light shielding film 4-4-BW and the hard mask material 40-4-BW. Embedded in The color filter 3-4-W is provided between the inter-pixel light shielding film 4-4-BW and the hard mask material 40-4-BW and the inter-pixel light shielding film 4-4-W and the hard mask material 40-4-W. Embedded in

The inter-pixel light shielding film 4-4-G, the inter-pixel light shielding film 4-4-GR, the inter-pixel light shielding film 4-4-RB, the inter-pixel light shielding film 4-4-BW and the inter-pixel light shielding film 4-4-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

In the solid-state imaging device 1-4, the inter-pixel light shielding film 4-4-G, the inter-pixel light shielding film 4-4-GR, the inter-pixel light shielding film 4-4-RB, the inter-pixel light shielding film 4-4-BW, and the inter-pixel Hard mask material 40-4-G, hard mask material 40-4-GR, hard mask material when the light shielding film 4-4-W is formed or when the selectivity with the resist mask can not be obtained Hard mask processing can be performed using 40-4-RB, hard mask material 40-4-BW and hard mask material 40-4-W. As shown in FIG. 4, hard mask material 40-4-G, hard mask material 40-4-GR, hard mask material 40-4-RB, hard mask material 40-4-BW and hard mask material 40-4. In each of -W, an inter-pixel light shielding film 4-4-G, an inter-pixel light shielding film 4-4-GR, an inter-pixel light shielding film 4-4-RB, an inter-pixel light shielding film 4-4-BW and an inter-pixel light shielding film It may remain right above each of 4-4-W.

[2-5. Fifth Embodiment (Example 5 of Solid-State Imaging Device)]
Hereinafter, the solid-state imaging device according to the fifth embodiment (example 5 of the solid-state imaging device) according to the present technology will be described.

According to the solid-state imaging device of the fifth embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 5 shows a solid-state imaging device 1-5 which is an example of a solid-state imaging device according to a fifth embodiment of the present technology. FIG. 5 is a cross-sectional view of four pixels (pixels 100-5-1 to 100-5-4) of the solid-state imaging device 1-5. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 5, and "lower" means the lower direction in FIG.

In the pixel 100-5-1, an on-chip lens 2-5-G, a color filter 3-5-G that transmits green light (G light), and an insulating layer 5-5, in order from the light incident side, An antireflective layer 6-5 and a semiconductor substrate 10-5 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-5 and embedded in the silicon (Si) layer of the semiconductor substrate 10-5.

The upper portion (on the light incident surface side, upper side in FIG. 5) of the on-chip lens 2-5-G is convex upward, and the lower portion (lower side in FIG. 5) of the on-chip lens 2-5-G ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper portion of the on-chip lens 2-5-G is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-G is rc> 0. The upper portion of the color filter 3-5-G (on the light incident surface side and the upper side in FIG. 5) has an upwardly convex shape.

The on-chip lens 2-5-G may be made of a material having a lower refractive index than the upwardly convex color filter 3-5-G. The refractive index of the on-chip lens 2-5-G may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-5-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-5-1, the distance from the antireflection layer 6-5 to the upper end portion as the light incident side of the color filter 3-5-G is hg-5. The radius of curvature (rl) of the upper portion of the on-chip lens 2-5-G and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-5-1 (G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper part of the on-chip lens 2-5-G and the radius of curvature (rc) of the lower part of the on-chip lens 2-5-G are ± 4. A range of about% is acceptable.

The pixel 100-5-2 includes, in order from the light incident side, an on-chip lens 2-5-R, a color filter 3-5-R that transmits red light (R light), and an insulating layer 5-5. An antireflective layer 6-5 and a semiconductor substrate 10-5 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-5, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-5.

The upper portion (on the light incident surface side, upper side in FIG. 5) of the on-chip lens 2-5-R is convex upward, and the lower portion (lower side in FIG. 5) of the on-chip lens 2-5-R ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper part of the on-chip lens 2-5-R is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-5-R is rc> 0. The upper portion of the color filter 3-5-R (on the light incident surface side and the upper side in FIG. 5) has an upwardly convex shape.

The on-chip lens 2-5-R may be made of a material having a lower refractive index than the upwardly convex color filter 3-5-R. The refractive index of the on-chip lens 2-5-R may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-5-R may be, for example, nc = 1.55 to 1.65. In the pixel 100-5-2, the distance from the antireflection layer 6-5 to the upper end portion as the light incident side of the color filter 3-5-R is hg-5. The radius of curvature (rl) of the upper part of the on-chip lens 2-5-R and the radius of curvature (rc) of the lower part of the on-chip lens 2-5-R are optimized so as to satisfy the above equation (1). As a result, in the pixel 100-5-2 (R light), the light collecting property is ensured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper portion of the on-chip lens 2-5-R and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-R are ± 4. A range of about% is acceptable.

The pixel 100-5-3 includes, in order from the light incident side, an on-chip lens 2-5-B, a color filter 3-5-B that transmits blue light (B light), and an insulating layer 5-5. An antireflective layer 6-5 and a semiconductor substrate 10-5 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-5, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-5.

The upper portion (on the light incident surface side, upper side in FIG. 5) of the on-chip lens 2-5-B is convex upward, and the lower portion (lower side in FIG. 2) of the on-chip lens 2-5-B. ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper portion of the on-chip lens 2-5-B is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-B is rc> 0. The upper portion of the color filter 3-5-B (on the light incident surface side and the upper side in FIG. 2) has an upwardly convex shape.

The on-chip lens 2-5-B may use a material having a lower refractive index than the upwardly convex color filter 3-5-B. The refractive index of the on-chip lens 2-5-B may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the color filter 3-5-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-5-3, the distance from the antireflection layer 6-5 to the upper end portion as the light incident side of the color filter 3-5-B is hb-5. The radius of curvature (rl) of the upper portion of the on-chip lens 2-5-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-B are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-5-3 (B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper part of the on-chip lens 2-5-B and the radius of curvature (rc) of the lower part of the on-chip lens 2-5-B are ± 4. A range of about% is acceptable.

In the pixel 100-5-4, an on-chip lens 2-5-W and an in-layer lens through which green light, red light and blue light (BGR (W) light) transmit in order from the light incident side. W, an insulating layer 5-5, an antireflective layer 6-5, and a semiconductor substrate 10-5 are disposed. In the semiconductor substrate 10-5, a photodiode (not shown) for white light (BGR (W) light) is formed and embedded in a silicon (Si) layer of the semiconductor substrate 10-5.

The upper portion (on the light incident surface side, upper side in FIG. 5) of the on-chip lens 2-5-W is upwardly convex, and the lower portion (lower side in FIG. 5) of the on-chip lens 2-5-W. ) Is an upward convex shape (concave shape). The upper radius of curvature (rl) of the on-chip lens 2-5-W is rl> 0, and the lower radius of curvature (rc) of the lower-end lens 2-5-W is rc> 0. The upper portion of the in-layer lens 3-5-W (the light incident surface side, and the upper side in FIG. 5) has an upwardly convex shape.

The on-chip lens 2-5-W may be made of a material having a lower refractive index than the upper convex in-layer lens 3-5-W. The refractive index of the on-chip lens 2-5-W may be, for example, nl = 1.35 to 1.45. On the other hand, the refractive index of the in-layer lens 3-5-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-5-4, the distance from the antireflection layer 6-5 to the upper end portion as the light incident side of the in-layer lens 3-5-W is hw-5. The radius of curvature (rl) of the upper portion of the on-chip lens 2-5-W and the radius of curvature (rc) of the lower portion of the on-chip lens 2-5-W are optimized so as to satisfy the above equation (1). As a result, in the pixel 100-5-4 (BGR (W) light), the light collecting property is ensured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-5-W and the curvature radius (rc) of the lower part of the on-chip lens 2-5-W are ± 4. A range of about% is acceptable.

On the side of the back surface (the upper surface in FIG. 5) of the semiconductor substrate 10-5, the pixel separating portion 9-5-G, the pixel separating portion 9-5-GR, the pixel separating portion 9-5-RB, the pixel separating portion 9- A 5-BW and a pixel separation portion 9-5-W are formed embedded in the semiconductor substrate 10-5. The pixel separating unit 9-5-G, the pixel separating unit 9-5-GR, the pixel separating unit 9-5-RB, the pixel separating unit 9-5-BW, and the pixel separating unit 9-5-W The pixels 100-5-1 to 100-5-4) are partitioned and electrically separated. As shown in FIG. 5, the pixel separating portion 9-5-G may be composed of a silicon oxide film 7-5-G and a silicon nitride film 8-5-G, and the pixel separating portion 9-5-GR. May be composed of a silicon oxide film 7-5-GR and a silicon nitride film 8-5-GR, and the pixel separating portion 9-5-RB is a silicon oxide film 7-5-RB and a silicon nitride film 8- The pixel separating portion 9-5-BW may be composed of a silicon oxide film 7-5-BW and a silicon nitride film 8-5-BW. -W may be composed of a silicon oxide film 7-5-W and a silicon nitride film 8-5-W.

The solid-state imaging device 1-5 includes an inter-pixel light shielding film 4-5-G, an inter-pixel light shielding film 4-5-GR, an inter-pixel light shielding film 4-5-RB, an inter-pixel light shielding film 4-5-BW, and an inter-pixel A light shielding film 4-5-W is provided. The solid-state imaging device 1-5 further includes a hard mask material 40-5-G, a hard mask material 40-5-GR, a hard mask material 40-5-RB, a hard mask material 40-5-BW, and a hard mask material 40. -5-W is equipped. The inter-pixel light shielding film 4-5-G, the inter-pixel light shielding film 4-5-GR, the inter-pixel light shielding film 4-5-RB, the inter-pixel light shielding film 4-5-BW, and the inter-pixel light shielding film 4-5-W It is formed directly on the insulating layer 5-5 and at the pixel boundary of each of the pixels 100-5-1 to 100-5-4. Each of the hard mask material 40-5-G, hard mask material 40-5-GR, hard mask material 40-5-RB, hard mask material 40-5-BW and hard mask material 40-5-W is between pixels The light shielding film 4-5-G, the inter-pixel light shielding film 4-5-GR, the inter-pixel light shielding film 4-5-RB, the inter-pixel light shielding film 4-5-BW, and the inter-pixel light shielding film 4-5-W It is formed immediately above the pixel boundary of each of the pixels 100-5-1 to 100-5-4. The hard mask material 40-5-G may be composed of a silicon oxide film 41-5-G and a silicon nitride film 42-5-G, and the hard mask material 40-5-GR is a silicon oxide film 41-5. The hard mask material 40-5-RB may be composed of a silicon oxide film 41-5-RB and a silicon nitride film 42-5-RB. Well, hard mask material 40-5-BW may be composed of silicon oxide film 41-5-BW and silicon nitride film 42-5-BW, and hard mask material 40-5-W is silicon oxide film 41. It may be composed of -5-W and silicon nitride film 42-5-W. Then, as shown in FIG. 5, the silicon nitride film 42-5-G, the silicon nitride film 42-5-GR, the silicon nitride film 42-5-RB, the silicon nitride film 42-5-BW, and the silicon nitride film 42. Each of -5-W is an inter-pixel light shielding film 4-5-G, an inter-pixel light shielding film 4-5-GR, an inter-pixel light shielding film 4-5-RB, an inter-pixel light shielding film 4-5-BW and an inter-pixel It is disposed immediately above each of the light shielding films 4-5-W.

As shown in FIG. 5, the color filter 3-5-G includes an inter-pixel light shielding film 4-5-G and a hard mask material 40-5-G, and an inter-pixel light shielding film 4-5-GR and a hard mask material. It is embedded between 40-5-GR. The color filter 3-5-R is provided between the inter-pixel light shielding film 4-5-GR and the hard mask material 40-5-GR and the inter-pixel light shielding film 4-5-RB and the hard mask material 40-5-RB. Embedded in The color filter 3-5-B is provided between the inter-pixel light shielding film 4-5-RB and the hard mask material 40-5-RB and the inter-pixel light shielding film 4-5-BW and the hard mask material 40-5-BW. Embedded in The in-layer lens 3-5-W comprises an inter-pixel light shielding film 4-5-BW and a hard mask material 40-5-BW, and an inter-pixel light shielding film 4-5-W and a hard mask material 40-5-W. It is embedded in the middle.

The inter-pixel light shielding film 4-5-G, the inter-pixel light shielding film 4-5-GR, the inter-pixel light shielding film 4-5-RB, the inter-pixel light shielding film 4-5-BW, and the inter-pixel light shielding film 4-5-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

In the solid-state imaging device 1-5, the inter-pixel light shielding film 4-5-G, the inter-pixel light shielding film 4-5-GR, the inter-pixel light shielding film 4-5-RB, the inter-pixel light shielding film 4-5-BW, and the inter-pixel Hard mask material 40-5-G, hard mask material 40-5-GR, hard mask material when light shielding film 4-5-W is formed, and when selectivity ratio with resist mask can not be obtained Hard mask processing can be performed using 40-5-RB, hard mask material 40-5-BW and hard mask material 40-5-W. As shown in FIG. 5, hard mask material 40-5-G, hard mask material 40-5-GR, hard mask material 40-5-RB, hard mask material 40-5-BW and hard mask material 40-5. Each of -W is an inter-pixel light shielding film 4-5-G, an inter-pixel light shielding film 4-5-GR, an inter-pixel light shielding film 4-5-RB, an inter-pixel light shielding film 4-5-BW, and an inter-pixel light shielding film It may remain right above each of 4-5-W.

[2-6. Sixth Embodiment (Example 6 of Solid-State Imaging Device)]
The solid-state imaging device according to the sixth embodiment (example 6 of the solid-state imaging device) according to the present technology will be described below.

According to the solid-state imaging device of the sixth embodiment of the present technology, the image quality is improved, and in particular, the chromatic aberration of the on-chip lens can be reduced and avoided.

FIG. 6 shows a solid-state imaging device 1-6, which is an example of a solid-state imaging device according to a sixth embodiment of the present technology. FIG. 6 is a cross-sectional view of four pixels (pixels 100-6-1 to 100-6-4) of the solid-state imaging device 1-6. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 6, and "lower" means the lower direction in FIG.

In the pixel 100-6-1, an on-chip lens 2-6 -G, a color filter 3-6 -G for transmitting green light (G light), and an insulating layer 5-6 in order from the light incident side, An antireflective layer 6-6 and a semiconductor substrate 10-6 are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-6, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-6.

The upper portion (on the light incident surface side, upper side in FIG. 6) of the on-chip lens 2-6-G is convex upward, and the lower portion (lower side in FIG. 6) of the on-chip lens 2-6-G ) Is a downward convex shape. The radius of curvature (rl) of the upper part of the on-chip lens 2-6-G is rl> 0, and the radius of curvature (rc) of the lower part of the on-chip lens 2-6-G is rc <0. The upper portion of the color filter 3-6-G (on the light incident surface side and the upper side in FIG. 6) has a downward convex shape (concave shape).

For the on-chip lens 2-6-G, a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-6-G may be used. The refractive index of the on-chip lens 2-6-G may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-6-G may be, for example, nc = 1.55 to 1.65. In the pixel 100-6-1, the distance from the antireflection layer 6-6 to the upper end portion as the light incident side of the color filter 3-6-G is hg-6. The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-G and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-G are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-6-1 (wavelength band of G light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-6-G and the curvature radius (rc) of the lower part of the on-chip lens 2-6-G are ± 4. A range of about% is acceptable.

The pixel 100-6-2 includes, in order from the light incident side, an on-chip lens 2-6-R, a color filter 3-6-R through which red light (R light) passes, and an insulating layer 5-6. An antireflective layer 6-6 and a semiconductor substrate 10-6 are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-6, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-6.

The upper portion (on the light incident surface side, upper side in FIG. 6) of the on-chip lens 2-6-R is convex upward, and the lower portion (lower side in FIG. 6) of the on-chip lens 2-6-R ) Is an upward convex shape (concave shape). The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-R is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-R is rc> 0. The upper portion of the color filter 3-6-R (on the light incident surface side and the upper side in FIG. 6) has an upwardly convex shape.

The upper convex color filter 3-6-R may be made of a material having a refractive index similar to or higher than that of the on-chip lens 2-6-R. The refractive index of the on-chip lens 2-6-R may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-6-R may be, for example, nc = 1.75 to 1.85. In the pixel 100-6-2, the distance from the antireflection layer 6-6 to the upper end portion as the light incident side of the color filter 3-6-R is hr-6. The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-R and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-R are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-6-2 (wavelength band of R light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper portion of the on-chip lens 2-6-R and the curvature radius (rc) of the lower portion of the on-chip lens 2-6-R are ± 4. A range of about% is acceptable.

Pixel 100-6-3 includes, in order from the light incident side, on-chip lens 2-6-B, color filter 3-6-B that transmits blue light (B light), and insulating layer 5-6. An antireflective layer 6-6 and a semiconductor substrate 10-6 are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-6 and is embedded in the silicon (Si) layer of the semiconductor substrate 10-6.

The upper portion (on the light incident surface side, upper side in FIG. 6) of the on-chip lens 2-6-B is convex upward, and the lower portion (lower side in FIG. 6) of the on-chip lens 2-6-B ) Is a downward convex shape. The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-B is rl> 0, and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-B is rc <0. The upper portion of the color filter 3-6-B (on the light incident surface side and the upper side in FIG. 6) has a downward convex shape (concave shape).

For the on-chip lens 2-6-B, a material having a refractive index higher than that of the downwardly convex (concave) color filter 3-6-B may be used. The refractive index of the on-chip lens 2-6-B may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the color filter 3-6-B may be, for example, nc = 1.55 to 1.65. In the pixel 100-6-3, the distance from the antireflection layer 6-6 to the upper end portion as the light incident side of the color filter 3-6-B is hb-6. The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-B are optimized so as to satisfy the above equation (1). Thereby, in the pixel 100-6-3 (wavelength band of B light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the radius of curvature (rl) of the upper portion of the on-chip lens 2-6-B and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-B are ± 4. A range of about% is acceptable.

In the pixel 100-6-4, an on-chip lens 2-6 -W and an in-layer lens through which green light, red light and blue light (BGR (W) light) pass sequentially from the light incident side. W, an insulating layer 5-6, an antireflective layer 6-6, and a semiconductor substrate 10-6 are disposed. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-6, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-6.

The upper portion (on the light incident surface side, upper side in FIG. 6) of the on-chip lens 2-6-W is convex upward, and the lower portion (lower side in FIG. 6) of the on-chip lens 2-6-W ) Is a downward convex shape. The curvature radius (rl) of the upper part of the on-chip lens 2-6-W is rl> 0, and the curvature radius (rc) of the lower part of the on-chip lens 2-6-W is rc <0. The upper portion of the color filter 3-6-W (on the light incident surface side and the upper side in FIG. 6) has a downward convex shape (concave shape).

The on-chip lens 2-6-W may be made of a material having a refractive index higher than that of the in-layer lens 3-6W having a downward convex shape (concave shape). The refractive index of the on-chip lens 2-6-W may be, for example, nl = 1.75 to 1.85. On the other hand, the refractive index of the in-layer lens 3-6-W may be, for example, nc = 1.55 to 1.65. In the pixel 100-3-4, the distance from the anti-reflection layer 6-6 to the upper end portion as the light incident side of the in-layer lens 3-6W is hw-6. The radius of curvature (rl) of the upper portion of the on-chip lens 2-6-W and the radius of curvature (rc) of the lower portion of the on-chip lens 2-6-W are optimized so as to satisfy the above equation (1). As a result, in the pixel 100-6-4 (the wavelength band of BGR (W) light), the light collecting property is secured, the chromatic aberration is reduced, and can be avoided. For example, in the case of the combination of the above refractive index ranges, the curvature radius (rl) of the upper part of the on-chip lens 2-6-W and the curvature radius (rc) of the lower part of the on-chip lens 2-6-W are ± 4. A range of about% is acceptable.

On the side of the back surface (upper surface in FIG. 6) of the semiconductor substrate 10-6, the pixel separator 9-6-G, the pixel separator 9-6-GR, the pixel separator 9-6-RB, the pixel separator 9- The 6-BW and the pixel separating portion 9-6-W are formed embedded in the semiconductor substrate 10-6. The pixel separator 9-6-G, the pixel separator 9-6-GR, the pixel separator 9-6-RB, the pixel separator 9-6-BW, and the pixel separator 9-6-W The pixels 100-6-1 to 100-6-4) are partitioned and electrically separated. As shown in FIG. 6, the pixel separating portion 9-6-G may be composed of a silicon oxide film 7-6-G and a silicon nitride film 8-6-G, and the pixel separating portion 9-6-GR. May be composed of a silicon oxide film 7-6-GR and a silicon nitride film 8-6-GR, and the pixel separating portion 9-6-RB is a silicon oxide film 7-6-RB and a silicon nitride film 8- The pixel separating portion 9-6-BW may be composed of a silicon oxide film 7-6-BW and a silicon nitride film 8-6-BW. -W may be composed of a silicon oxide film 7-6-W and a silicon nitride film 8-6-W.

The solid-state imaging device 1-6 includes an inter-pixel light shielding film 4-6-G, an inter-pixel light shielding film 4-6-GR, an inter-pixel light shielding film 4-6-RB, an inter-pixel light shielding film 4-6-BW, and an inter-pixel A light shielding film 4-6-W is provided. The solid-state imaging device 1-6 further includes a hard mask material 40-6-G, a hard mask material 40-6-GR, a hard mask material 40-6-RB, a hard mask material 40-6-BW, and a hard mask material 40. -6-W is equipped. The inter-pixel light shielding film 4-6-G, the inter-pixel light shielding film 4-6-GR, the inter-pixel light shielding film 4-6-RB, the inter-pixel light shielding film 4-6-BW, and the inter-pixel light shielding film 4-6-W And the pixel boundary of each of the pixels 100-6-1 to 100-6-4. Each of the hard mask material 40-6-G, hard mask material 40-6-GR, hard mask material 40-6-RB, hard mask material 40-6-BW and hard mask material 40-6-W is between pixels The light shielding film 4-6-G, the inter-pixel light shielding film 4-6-GR, the inter-pixel light shielding film 4-6-RB, the inter-pixel light shielding film 4-6-BW, and the inter-pixel light shielding film 4-6-W It is formed immediately above the pixel boundary of each of the pixels 100-6-1 to 100-6-4. The hard mask material 40-6-G may be composed of a silicon oxide film 41-6-G and a silicon nitride film 42-6-G, and the hard mask material 40-6-GR is a silicon oxide film 41-6. The hard mask material 40-6-RB may be composed of a silicon oxide film 41-6-RB and a silicon nitride film 42-6-RB. The hard mask material 40-6-BW may be composed of a silicon oxide film 41-6-BW and a silicon nitride film 42-6-BW, and the hard mask material 40-6-W is a silicon oxide film 41. It may be composed of -6-W and silicon nitride film 42-6-W. Then, as shown in FIG. 6, the silicon nitride film 42-6-G, the silicon nitride film 42-6-GR, the silicon nitride film 42-6-RB, the silicon nitride film 42-6-BW, and the silicon nitride film 42. Each of -6-W is an inter-pixel light shielding film 4-6-G, an inter-pixel light shielding film 4-6-GR, an inter-pixel light shielding film 4-6-RB, an inter-pixel light shielding film 4-6-BW and an inter-pixel It is disposed immediately above each of the light shielding films 4-6-W.

As shown in FIG. 6, the color filter 3-6 -G includes the inter-pixel light shielding film 4-6 -G and the hard mask material 40-6 -G, the inter-pixel light shielding film 4-6 -GR and the hard mask material It is embedded between 40-6-GR. The color filter 3-6-R is provided between the inter-pixel light shielding film 4-6-GR and the hard mask material 40-6-GR and the inter-pixel light shielding film 4-6-RB and the hard mask material 40-6-RB. Embedded in The color filter 3-6-B is provided between the inter-pixel light shielding film 4-6-RB and the hard mask material 40-6-RB and the inter-pixel light shielding film 4-6-BW and the hard mask material 40-6-BW. Embedded in The color filter 3-6-W is provided between the inter-pixel light shielding film 4-6-BW and the hard mask material 40-6-BW and the inter-pixel light shielding film 4-6-W and the hard mask material 40-6-W. Embedded in

The inter-pixel light shielding film 4-6-G, the inter-pixel light shielding film 4-6-GR, the inter-pixel light shielding film 4-6-RB, the inter-pixel light shielding film 4-6-BW, and the inter-pixel light shielding film 4-6-W Any material that shields light, which has strong light shielding properties and can be precisely processed by fine processing such as etching, may be a metal such as aluminum (Al), tungsten (W), copper (Cu), etc. It may be formed of a film.

In the solid-state imaging device 1-6, the inter-pixel light shielding film 4-6-G, the inter-pixel light shielding film 4-6-GR, the inter-pixel light shielding film 4-6-RB, the inter-pixel light shielding film 4-6-BW, and the inter-pixel Hard mask material 40-6-G, hard mask material 40-6-GR, hard mask material when the light shielding film 4-6-W is formed, or when the selectivity with the resist mask can not be obtained Hard mask processing can be performed using 40-6-RB, hard mask material 40-6-BW and hard mask material 40-6-W. As shown in FIG. 6, hard mask material 40-6-G, hard mask material 40-6-GR, hard mask material 40-6-RB, hard mask material 40-6-BW and hard mask material 40-6. In each of -W, an inter-pixel light shielding film 4-6-G, an inter-pixel light shielding film 4-6-GR, an inter-pixel light shielding film 4-6-RB, an inter-pixel light shielding film 4-6-BW, and an inter-pixel light shielding film It may remain right above each of 4-6-W.

[2-7. Seventh Embodiment (Example 7 of Solid-State Imaging Device)]
The solid-state imaging device according to the seventh embodiment (example 7 of the solid-state imaging device) according to the present technology will be described below.

FIGS. 7 and 8 show solid-state imaging devices 1-7 (a) to 1-7 (f) which are an example of a solid-state imaging device according to a seventh embodiment of the present technology. FIG. 7 is a cross-sectional view of four pixels of the solid-state imaging device of each of the solid-state imaging devices 1-7a to 1-7c, and FIG. Is a cross-sectional view of four pixels. In addition, unless there is particular notice, "upper" means the upper direction in FIG.7 and FIG.8, and "lower" means the lower direction in FIG.7 and FIG.8.

First, FIG. 7A will be referred to. The solid-state imaging device 1-7a is a solid-state imaging device according to the first embodiment of the present technology, which includes the on-chip lens antireflection film 20-7a-G formed on the on-chip lens 2-7a-G. Anti-reflection film 20-7a-R for on-chip lens formed on chip lens 2-7a-R, and anti-reflection film 20-7a-B for on-chip lens formed on on-chip lens 2-7a-B And an on-chip lens anti-reflection film 20-7a-W formed on the on-chip lens 2-7a-W. Antireflection film 20-7a-G for on-chip lens, Antireflection film 20-7a-R for on-chip lens, Antireflection film 20-7a-B for on-chip lens, Antireflection film 20-7a- for on-chip lens The respective refractive indices of W are determined from the respective refractive indices of the on-chip lens 2-7a-G, the on-chip lens 2-7a-R, the on-chip lens 2-7a-B, and the on-chip lens 2-7a-W. It may be as low as 0.1 to 0.2.

In the pixels on which the anti-reflection film 20-7a-G for on-chip lens is formed, the anti-reflection film 20-7a-G for on-chip lens and the on-chip lens 2-7a-G are sequentially arranged from the light incident side. A color filter 3-7a-G that transmits green light (G light), an insulating layer 5-7a, an antireflective layer 6-7a, and a semiconductor substrate 10-7a are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-7a, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-7a.

In the pixels on which the anti-reflection film 20-7a-R for on-chip lens is formed, the anti-reflection film 20-7a-R for on-chip lens and the on-chip lens 2-7a-R are sequentially arranged from the light incident side. A color filter 3-7a-R transmitting red light (R light), an insulating layer 5-7a, an antireflective layer 6-7a, and a semiconductor substrate 10-7a are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-7a, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-7a.

In the pixels on which the anti-reflection film 20-7a-B for on-chip lens is formed, the anti-reflection film 20-7a-B for on-chip lens and the on-chip lens 2-7a-B are sequentially arranged from the light incident side. A color filter 3-7a-B transmitting blue light (B light), an insulating layer 5-7a, an antireflective layer 6-7a, and a semiconductor substrate 10-7a are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-7a, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-7a.

In the pixels on which the anti-reflection film 20-7a-W for on-chip lens is formed, the anti-reflection film 20-7a-W for on-chip lens and the on-chip lens 2-7a-W are sequentially arranged from the light incident side. , An in-layer lens 3-7a-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-7a, an antireflective layer 6-7a, and a semiconductor substrate 10-7a It is arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-7a, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-7a.

As shown in FIG. 7A, in the solid-state imaging device 1-7a, the inter-pixel light shielding film 4-7a is directly on the insulating layer 5-7a, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 7A, in the solid-state imaging device 1-7a, the pixel separating portion 9-7a is located on the side of the back surface (upper surface in FIG. 7A) of the semiconductor substrate 10-7a. Embedded in the semiconductor substrate 10-7a. The pixel separating unit 9-7a divides the four pixels to electrically separate them.

Refer to FIG. 7 (b). The solid-state imaging device 1-7b is a solid-state imaging device according to the second embodiment of the present technology, including an on-chip lens anti-reflection film 20-7b-G formed on the on-chip lens 2-7b-G. Anti-reflection film 20-7b-R for on-chip lens formed on chip lens 2-7b-R, and anti-reflection film 20-7b-B for on-chip lens formed on on-chip lens 2-7b-B And an on-chip lens anti-reflection film 20-7b-W formed on the on-chip lens 2-7b-W. Antireflection film 20-7b-G for on-chip lens, Antireflection film 20-7b-R for on-chip lens, Antireflection film 20-7b-B for on-chip lens, Antireflection film 20-7b- for on-chip lens The respective refractive indices of W are calculated from the respective refractive indices of the on-chip lens 2-7b-G, the on-chip lens 2-7b-R, the on-chip lens 2-7b-B, and the on-chip lens 2-7b-W. It may be as low as 0.1 to 0.2.

In the pixels on which the anti-reflection film 20-7b-G for on-chip lens is formed, the on-chip lens anti-reflection film 20-7b-G and the on-chip lens 2-7b-G are sequentially arranged from the light incident side. A color filter 3-7b-G that transmits green light (G light), an insulating layer 5-7b, an antireflective layer 6-7b, and a semiconductor substrate 10-7b are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-7b and embedded in the silicon (Si) layer of the semiconductor substrate 10-7b.

In the pixels on which the anti-reflection film 20-7b-R for on-chip lens is formed, the anti-reflection film 20-7b-R for on-chip lens and the on-chip lens 2-7b-R are sequentially arranged from the light incident side. A color filter 3-7b-R transmitting red light (R light), an insulating layer 5-7b, an antireflective layer 6-7b, and a semiconductor substrate 10-7b are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-7b, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-7b.

In the pixels on which the anti-reflection film 20-7b-B for on-chip lens is formed, the anti-reflection film 20-7b-B for on-chip lens and the on-chip lens 2-7b-B are sequentially arranged from the light incident side. A color filter 3-7b-B transmitting blue light (B light), an insulating layer 5-7b, an antireflection layer 6-7b, and a semiconductor substrate 10-7b are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-7b and embedded in the silicon (Si) layer of the semiconductor substrate 10-7b.

In the pixels on which the anti-reflection film 20-7b-W for on-chip lens is formed, the anti-reflection film 20-7b-W for on-chip lens and the on-chip lens 2-7b-W are arranged in order from the light incident side. , An in-layer lens 3-7b-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-7b, an antireflective layer 6-7b, and a semiconductor substrate 10-7b It is arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-7 b and embedded in the silicon (Si) layer of the semiconductor substrate 10-7 b.

As shown in FIG. 7B, in the solid-state imaging device 1-7b, the inter-pixel light shielding film 4-7b is directly on the insulating layer 5-7b, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 7B, in the solid-state imaging device 1-7b, the pixel separating portion 9-7b is located on the side of the back surface (upper surface in FIG. 7B) of the semiconductor substrate 10-7b. Embedded in the semiconductor substrate 10-7b. The pixel separation unit 9-7b divides the four pixels and electrically separates them.

Refer to FIG. 7 (c). The solid-state imaging device 1-7c is a solid-state imaging device according to the third embodiment of the present technology, which includes the on-chip lens anti-reflection film 20-7c-G formed on the on-chip lens 2-7c-G. Anti-reflection film 20-7c-R for on-chip lens formed on tip lens 2-7c-R, and anti-reflection film 20-7c-B for on-chip lens formed on on-chip lens 2-7c-B And an on-chip lens anti-reflection film 20-7c-W formed on the on-chip lens 2-7c-W. Antireflection film 20-7c-G for on-chip lens, Antireflection film 20-7c-R for on-chip lens, Antireflection film 20-7c-B for on-chip lens, Antireflection film 20-7c- for on-chip lens The refractive index of each of W is determined from the refractive index of each of on-chip lens 2-7c-G, on-chip lens 2-7c-R, on-chip lens 2-7c-B and on-chip lens 2-7c-W, It may be as low as 0.1 to 0.2.

That is, in the pixels on which the anti-reflection film 20-7c-G for on-chip lens is formed, the anti-reflection film 20-7c-G for on-chip lens and the on-chip lens 2-7c- are sequentially arranged from the light incident side. G, a color filter 3-7c-G that transmits green light (G light), an insulating layer 5-7c, an antireflective layer 6-7c, and a semiconductor substrate 10-7c are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-7c, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-7c.

In the pixels on which the anti-reflection film 20-7c-R for on-chip lens is formed, the anti-reflection film 20-7c-R for on-chip lens and the on-chip lens 2-7c-R are sequentially arranged from the light incident side. A color filter 3-7c-R transmitting red light (R light), an insulating layer 5-7c, an antireflective layer 6-7c, and a semiconductor substrate 10-7c are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-7c, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-7c.

In the pixels on which the anti-reflection film 20-7c-B for on-chip lens is formed, the anti-reflection film 20-7c-B for on-chip lens and the on-chip lens 2-7c-B are sequentially arranged from the light incident side. A color filter 3-7c-B transmitting blue light (B light), an insulating layer 5-7c, an antireflective layer 6-7c, and a semiconductor substrate 10-7c are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-7c, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-7c.

In the pixels on which the anti-reflection film 20-7c-W for on-chip lens is formed, the anti-reflection film 20-7c-W for on-chip lens and the on-chip lens 2-7c-W are sequentially arranged from the light incident side. , An in-layer lens 3-7c-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-7c, an antireflective layer 6-7c, and a semiconductor substrate 10-7c Are arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-7c, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-7c.

As shown in FIG. 7C, in the solid-state imaging device 1-7c, the inter-pixel light shielding film 4-7c is directly on the insulating layer 5-7c, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 7C, in the solid-state imaging device 1-7c, the pixel separating portion 9-7c is located on the side of the back surface (upper surface in FIG. 7C) of the semiconductor substrate 10-7c. Embedded in the semiconductor substrate 10-7c. The pixel separating unit 9-7c divides the four pixels to electrically separate them.

Please refer to FIG. 8 (d). A solid-state imaging device 1-8d is a solid-state imaging device according to the fourth embodiment of the present technology, including an on-chip lens anti-reflection film 20-8d-G formed on the on-chip lens 2-8d-G; Anti-reflection film 20-8d-R for on-chip lens formed on tip lens 2-8d-R, Anti-reflection film 20-8d-B for on-chip lens formed on on-chip lens 2-8d-B And an on-chip lens antireflective film 20-8d-W formed on the on-chip lens 2-8d-W. Antireflection film 20-8d-G for on-chip lens, Antireflection film 20-8d-R for on-chip lens, Antireflection film 20-8d-B for on-chip lens, Antireflection film 20-8d- for on-chip lens The respective refractive indices of W are calculated from the respective refractive indices of the on-chip lens 2-8 d-G, the on-chip lens 2-8 d-R, the on-chip lens 2-8 d-B, and the on-chip lens 2-8 d-W. It may be as low as 0.1 to 0.2.

In the pixels on which the anti-reflection film 20-8d-G for on-chip lens is formed, the anti-reflection film 20-8d-G for on-chip lens and the on-chip lens 2-8d-G are arranged in order from the light incident side. A color filter 3-8d-G which transmits green light (G light), an insulating layer 5-8d, an antireflective layer 6-8d, and a semiconductor substrate 10-8d are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-8d and embedded in the silicon (Si) layer of the semiconductor substrate 10-8d.

In the pixels on which the anti-reflection film 20-8d-R for on-chip lens is formed, the anti-reflection film 20-8d-R for on-chip lens and the on-chip lens 2-8d-R are sequentially arranged from the light incident side. A color filter 3-8d-R transmitting red light (R light), an insulating layer 5-8d, an antireflective layer 6-8d, and a semiconductor substrate 10-8d are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-8d, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-8d.

In the pixels on which the anti-reflection film 20-8d-B for on-chip lens is formed, the anti-reflection film 20-8d-B for on-chip lens and the on-chip lens 2-8d-B are sequentially arranged from the light incident side. A color filter 3-8d-B transmitting blue light (B light), an insulating layer 5-8d, an antireflective layer 6-8d, and a semiconductor substrate 10-8d are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-8d and embedded in the silicon (Si) layer of the semiconductor substrate 10-8d.

In the pixels on which the anti-reflection film 20-8d-W for on-chip lens is formed, the anti-reflection film 20-8d-W for on-chip lens and the on-chip lens 2-8d-W are arranged in order from the light incident side. , An in-layer lens 3-8d-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-8d, an antireflective layer 6-8d, and a semiconductor substrate 10-8d Are arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-8 d and embedded in the silicon (Si) layer of the semiconductor substrate 10-8 d.

As shown in FIG. 8D, in the solid-state imaging device 1-8d, the inter-pixel light shielding film 4-8d is directly on the insulating layer 5-8d, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 8D, in the solid-state imaging device 1-8d, the hard mask material 40-8d is directly on the inter-pixel light shielding film 4-8d, and each pixel of the four pixels is Is formed at the pixel boundary of Furthermore, as shown in FIG. 8D, in the solid-state imaging device 1-8d, the pixel separating portion 9-8d is located on the side of the back surface (upper surface in FIG. 8D) of the semiconductor substrate 10-8d. Embedded in the semiconductor substrate 10-8d. The pixel separating unit 9-8d divides electrically between four pixels.

Refer to FIG. 8 (e). The solid-state imaging device 1-8e is a solid-state imaging device according to the fifth embodiment of the present technology, including an on-chip lens anti-reflection film 20-8e-G formed on the on-chip lens 2-8e-G; Anti-reflection film 20-8e-R for on-chip lens formed on tip lens 2-8e-R, and anti-reflection film 20-8e-B for on-chip lens formed on on-chip lens 2-8e-B And an on-chip lens antireflective film 20-8e-W formed on the on-chip lens 2-8e-W. Antireflection film 20-8e-G for on-chip lens, Antireflection film 20-8e-R for on-chip lens, Antireflection film 20-8e-B for on-chip lens, Antireflection film 20-8e- for on-chip lens The refractive index of each of W is determined by the refractive index of each of on-chip lens 2-8e-G, on-chip lens 2-8e-R, on-chip lens 2-8e-B, and on-chip lens 2-8e-W. It may be as low as 0.1 to 0.2.

In the pixels on which the anti-reflection film 20-8e-G for on-chip lens is formed, the anti-reflection film 20-8e-G for on-chip lens and the on-chip lens 2-8e-G are arranged in order from the light incident side. A color filter 3-8e-G that transmits green light (G light), an insulating layer 5-8e, an antireflective layer 6-8e, and a semiconductor substrate 10-8e are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-8e and embedded in a silicon (Si) layer of the semiconductor substrate 10-8e.

In the pixels on which the anti-reflection film 20-8e-R for on-chip lens is formed, the anti-reflection film 20-8e-R for on-chip lens and the on-chip lens 2-8e-R are sequentially arranged from the light incident side. A color filter 3-8e-R that transmits red light (R light), an insulating layer 5-8e, an antireflective layer 6-8e, and a semiconductor substrate 10-8e are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-8e, and is embedded in a silicon (Si) layer of the semiconductor substrate 10-8e.

In the pixels on which the anti-reflection film 20-8e-B for on-chip lens is formed, the anti-reflection film 20-8e-B for on-chip lens and the on-chip lens 2-8e-B are sequentially arranged from the light incident side. A color filter 3-8e-B transmitting blue light (B light), an insulating layer 5-8e, an antireflective layer 6-8e, and a semiconductor substrate 10-8e are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-8e, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-8e.

In the pixels on which the anti-reflection film 20-8e-W for on-chip lens is formed, the anti-reflection film 20-8e-W for on-chip lens and the on-chip lens 2-8e-W are arranged in order from the light incident side. , An in-layer lens 3-8e-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-8e, an antireflective layer 6-8e, and a semiconductor substrate 10-8e Are arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-8e and embedded in the silicon (Si) layer of the semiconductor substrate 10-8e.

As shown in FIG. 8E, in the solid-state imaging device 1-8e, the inter-pixel light shielding film 4-8e is directly on the insulating layer 5-8e, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 8E, in the solid-state imaging device 1-8e, the hard mask material 40-8e is directly on the inter-pixel light shielding film 4-8e, and each pixel of the four pixels is Is formed at the pixel boundary of Furthermore, as shown in FIG. 8E, in the solid-state imaging device 1-8e, the pixel separating portion 9-8e is on the side of the back surface (upper surface in FIG. 8E) of the semiconductor substrate 10-8e. Embedded in the semiconductor substrate 10-8e. The pixel separating unit 9-8e divides the four pixels to electrically separate them.

Please refer to FIG. 8 (f). A solid-state imaging device 1-8f is a solid-state imaging device according to the sixth embodiment of the present technology, including an on-chip lens anti-reflection film 20-8f-G formed on the on-chip lens 2-8f-G; Anti-reflection film 20-8f-R for on-chip lens formed on tip lens 2-8f-R, and anti-reflection film 20-8f-B for on-chip lens formed on on-chip lens 2-8f-B And an on-chip lens anti-reflection film 20-8f-W formed on the on-chip lens 2-8f-W. Antireflection film 20-8f-G for on-chip lens, Antireflection film 20-8f-R for on-chip lens, Antireflection film 20-8f-B for on-chip lens, Antireflection film 20-8f- for on-chip lens The respective refractive indices of W are calculated from the respective refractive indices of the on-chip lens 2-8 f-G, the on-chip lens 2-8 f-R, the on-chip lens 2-8 f-B, and the on-chip lens 2-8 f-W. It may be as low as 0.1 to 0.2.

In the pixels on which the anti-reflection film 20-8f-G for on-chip lens is formed, the anti-reflection film 20-8f-G for on-chip lens and the on-chip lens 2-8f-G are arranged in order from the light incident side. A color filter 3-8f-G that transmits green light (G light), an insulating layer 5-8f, an antireflective layer 6-8f, and a semiconductor substrate 10-8f are disposed. A photodiode (not shown) for green light (G light) is formed on the semiconductor substrate 10-8f and embedded in the silicon (Si) layer of the semiconductor substrate 10-8f.

In the pixels on which the anti-reflection film 20-8f-R for on-chip lens is formed, the anti-reflection film 20-8f-R for on-chip lens and the on-chip lens 2-8f-R are sequentially arranged from the light incident side. A color filter 3-8f-R transmitting red light (R light), an insulating layer 5-8f, an antireflective layer 6-8f, and a semiconductor substrate 10-8f are disposed. A photodiode (not shown) for red light (R light) is formed on the semiconductor substrate 10-8f and is embedded in a silicon (Si) layer of the semiconductor substrate 10-8f.

In the pixels on which the anti-reflection film 20-8f-B for on-chip lens is formed, the anti-reflection film 20-8f-B for on-chip lens and the on-chip lens 2-8f-B are sequentially arranged from the light incident side. A color filter 3-8f-B transmitting blue light (B light), an insulating layer 5-8f, an antireflective layer 6-8f, and a semiconductor substrate 10-8f are disposed. A photodiode (not shown) for blue light (B light) is formed on the semiconductor substrate 10-8f and embedded in the silicon (Si) layer of the semiconductor substrate 10-8f.

The on-chip lens anti-reflection film 20-8f-W and the on-chip lens anti-reflection film 20-8f-W and the on-chip lens 2-8f-W are arranged in order from the light incident side to the pixel on which the anti-reflection film 20-8f-W is formed. , An in-layer lens 3-8 f-W that transmits green light, red light and blue light (BGR (W) light), an insulating layer 5-8 f, an antireflective layer 6-8 f, and a semiconductor substrate 10-8 f Are arranged. A photodiode (not shown) for white light (BGR (W) light) is formed on the semiconductor substrate 10-8f, and is embedded in the silicon (Si) layer of the semiconductor substrate 10-8f.

As shown in FIG. 8F, in the solid-state imaging device 1-8f, the inter-pixel light shielding film 4-8f is immediately above the insulating layer 5-8f, and the pixel boundary of each pixel of the four pixels Is formed. Further, as shown in FIG. 8F, in the solid-state imaging device 1-8f, the hard mask material 40-8f is directly on the inter-pixel light shielding film 4-8f, and each pixel of the four pixels is Is formed at the pixel boundary of Further, as shown in FIG. 8F, in the solid-state imaging device 1-8f, the pixel separating portion 9-8f is on the side of the back surface (upper surface in FIG. 8F) of the semiconductor substrate 10-8f. Embedded in the semiconductor substrate 10-8f. The pixel separation unit 9-8f divides the four pixels and electrically separates them.

<3. Embodiment Regarding Method of Manufacturing Solid-State Imaging Device>
3-1. Eighth Embodiment (Example 1 of Manufacturing Method of Solid-State Imaging Device)]
In a method of manufacturing a solid-state imaging device according to an eighth embodiment (example 1 of a method of manufacturing a solid-state imaging device) according to the present technology, inter-pixel light shielding is performed between pixels adjacent to each other in the upper direction of the antireflection layer on the semiconductor substrate. A step of forming a film, a step of spin-coating an intra-layer lens material (simply referred to as an intra-layer lens), adjusting the number of rotations after the spin coating, and drying the intra-layer lens material The step of forming an in-layer lens by exposing and developing on the inter-pixel light shielding film or on the inner side of the inter-pixel light shielding film, and an on-chip lens material (simply referred to as an on-chip lens). And spin-coating a matrix lens, adjusting the dimensions and patterning, melting the dimension-adjusted matrix lens, etching back, and transferring the curvature to the on-chip lens material, Forming an on-chip lens; The radius of curvature of the upper portion on the light incident side of the on-chip lens is rl, the radius of curvature of the lower portion of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, Let hc be the distance from the antireflective layer to the upper end portion of the in-layer lens on the light incident side, where al and ac are in the range of 0.96 to 1.04, the upper portion of the on-chip lens The method is a method for manufacturing a solid-state imaging device, in which the radius of curvature rl and the radius of curvature rc of the lower portion of the on-chip lens are processed to a length satisfying the following formula (1).

FIGS. 9 and 10 show an example of a method of manufacturing the solid-state imaging device according to the eighth embodiment of the present technology. In FIG. 9 and FIG. 10, the manufacturing method of the solid-state imaging device of 8th Embodiment is shown by making into an example the process after formation of Deep Trench Isolation (pixel separation part) for pixel separation. In addition, unless there is particular notice, "upper" means the upper direction in FIG.9 and FIG.10, and "lower" means the lower direction in FIG.9 and FIG.10.

FIG. 9A shows a cross-sectional view of a semiconductor substrate 10-9a having a pixel separation portion 9-9a. The pixel separating portion 9-9a is formed to be embedded in the semiconductor substrate 10-9a on the side of the back surface (upper surface in FIG. 9A) of the semiconductor substrate 10-9a. Further, on the back surface of the semiconductor substrate 10-9a, an antireflective layer 6-9a and an insulating layer 5-9a are formed in this order. In FIG. 9A, the pixel separating unit 9-9a electrically separates four pixels.

In FIG. 9B, the inter-pixel light shielding film 4-9b is formed by the resist mask 50-9b. Specifically, an antireflection layer 6-9b and an insulating layer formed on the back surface of the semiconductor substrate 10-9a above the pixel separating portion 9-9b formed inside the semiconductor substrate 10-9b An inter-pixel light shielding film 4-9b is formed on the top of 5-9b so as to partition four pixels.

In FIG. 9C, the green color filter 3-9c-G is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-9c with respect to four pixels electrically partitioned by the pixel separating portion 9-9c formed inside the semiconductor substrate 10-9c. A green color filter 3-9c-G is formed on the upper surface of 6-9c and the insulating layer 5-9c so as to be embedded in the inter-pixel light shielding film 4-9c. At this time, the curvature of the green color filter 3-9c-G changes with the drying rotation speed after coating, so the rotation speed is adjusted so as to satisfy the above equation (1).

In FIG. 9D, a red color filter 3-9d-R is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-9d with respect to four pixels electrically partitioned by the pixel separating portion 9-9d formed inside the semiconductor substrate 10-9d. The red color filter 3-9d-R is formed on the top of the insulating layer 5-9d and the insulating layer 5-9d so as to be embedded in the inter-pixel light shielding film 4-9d. At this time, since the curvature of the red color filter 3-9d-R changes with the drying rotation speed after coating, the rotation speed is adjusted so as to satisfy the above equation (1). The red color filter 3-9d-R on the green color filter 3-9d-G formed on the first pixel from the left in FIG. 9D is removed.

In FIG. 9 (e), a blue color filter 3-9e-B is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-9e with respect to four pixels electrically partitioned by the pixel separating portion 9-9e formed inside the semiconductor substrate 10-9e. A blue color filter 3-9e-B is formed on the top of the insulating layer 5-9e and the insulating layer 5-9e so as to be embedded in the inter-pixel light shielding film 4-9e. At this time, the curvature of the blue color filter 3-9e-B changes with the drying rotation speed after coating, so the rotation speed is adjusted so as to satisfy the above equation (1). Note that the blue color filter 3-9e-B on the green color filter 3-9e-G formed in the first pixel from the left in FIG. 9E and the second from the left in FIG. 9E. The blue color filter 3-9e-B on the red color filter 3-9e-R formed in the pixel is removed.

In FIG. 10 (f), the in-layer lens 3-10 fW is spin coated. Specifically, with respect to the fourth pixel from the left in FIG. 10F, which is electrically partitioned by the pixel separating portion 9-10f formed inside the semiconductor substrate 10-10f, the semiconductor substrate 10 is separated. In-layer lenses 3-10f-W are formed on top of the antireflective layer 6-10f and the insulating layer 5-10f formed on the back surface of the -10f so as to be embedded in the inter-pixel light shielding film 4-10f. . At that time, since the curvature of the in-layer lens 3-10 fW changes with the drying rotation speed after coating, the rotation speed is adjusted so as to satisfy the above equation (1).

In FIG. 10G, four pixels electrically divided by the pixel separating portion 9-10g formed inside the semiconductor substrate 10-10g are formed on the back surface of the semiconductor substrate 10-10g. A green color filter 3-3 is formed on the top of the antireflective layer 6-10 g and the insulating layer 5-10 g so as to be embedded in the inter-pixel light shielding film 4-10 g from the left pixel in FIG. 10g-G, red color filter 3-10g-R, blue color filter 3-10g-B and in-layer lens 3-10g-W are shown.

In addition, when there are a plurality of types of color filters such as green, red and blue and / or an in-layer lens, it may be preferable to apply in descending order of curvature radius of concave shape, that is, in ascending order of curvature radius. Moreover, when the curvature which satisfy | fills the said Numerical formula (1) can not be controlled by the rotation speed at the time of drying, although the number of processes increases, you may adjust concave shape by an etching.

In FIG. 10 (h) to FIG. 10 (j), on-chip lenses are formed. First, in FIG. 10 (h), a green color filter 3-10 h-G, a red color filter 3-10 h-R, and a blue color filter are formed in order of 4 pixels from the left pixel in FIG. 10 (h). On-chip lens 2-10h is spin-coated on top of 3-10h-B and in-layer lens 3-10h-W, and base lens 30-10h is spin-coated on top of on-chip lens 2-10h Formed, sized and patterned. The patterning width may be changed for each pixel, and the curvature at the time of melting may be changed for each pixel so as to satisfy the above equation (1). In FIG. 10H, four pixels electrically divided by the pixel separating portion 9-10h formed in the semiconductor substrate 10-10h are formed on the back surface of the semiconductor substrate 10-10h. A green color filter 3-10h-G is sequentially arranged from the left pixel in FIG. 10H so as to be embedded in the inter-pixel light shielding film 4-10h on the top of the antireflective layer 6-10h and the insulating layer 5-10h. , A red color filter 3-10 h-R, a blue color filter 3-10 h-B, and an in-layer lens 3-10 h-W.

In FIG. 10I, the base lens 30-10i formed on the on-chip lens 2-10i is melted (melted). The on-chip lens 2-10i is formed of four pixels in order from the pixel at the left in FIG. 10 (i). The green color filter 3-10i-G, the red color filter 3-10i-R, and the blue color filter 3 It is formed on top of the lens 10i-B and the in-layer lens 3-10i-W. In FIG. 10 (i), four pixels electrically divided by the pixel separation portion 9-10i formed inside the semiconductor substrate 10-10i are formed on the back surface of the semiconductor substrate 10-10i. The green color filter 3-10i-G is sequentially arranged from the left pixel in FIG. 10I so as to be embedded in the inter-pixel light shielding film 4-10i on the top of the antireflective layer 6-10i and the insulating layer 5-10i. , A red color filter 3-10i-R, a blue color filter 3-10i-B, and an in-layer lens 3-10i-W.

In FIG. 10 (j), a green color filter 3-10j-G, a red color filter, formed by four pixels in order from the left pixel in FIG. 10 (j), is etched back to transfer the curvature. On-chip lens 2-10 j-G, on-chip lens 2-10 j-R, on-chip lens 2 on top of each of 3-10 j-R, blue color filter 3-10 j-B and in-layer lens 3-10 j-W A solid-state image pickup device 1-10j is obtained by forming -10j-B and an on-chip lens 2-10j-W. The solid-state imaging device 1-10j is formed on the back surface of the semiconductor substrate 10-10j with respect to four pixels electrically divided by the pixel separating portion 9-10j formed inside the semiconductor substrate 10-10j. The green color filter 3-10j-G is sequentially arranged from the left pixel in FIG. 10J so as to be embedded in the inter-pixel light shielding film 4-10j on the top of the antireflective layer 6-10j and the insulating layer 5-10j. , A red color filter 3-10j-R, a blue color filter 3-10j-B, and an in-layer lens 3-10j-W.

[3-2. Ninth Embodiment (Example 2 of Method of Manufacturing Solid-State Imaging Device)]
Below, the manufacturing method of the solid-state image sensor of 9th Embodiment (Example 2 of the manufacturing method of a solid-state image sensor) which concerns on this technique is demonstrated.

FIGS. 11 and 12 show an example of a method of manufacturing a solid-state imaging device according to a ninth embodiment of the present technology. FIGS. 11 and 12 illustrate a method of manufacturing the solid-state imaging device according to the ninth embodiment, taking as an example steps after the formation of the inter-pixel light shielding film using a resist mask. The steps before that are the same as in FIGS. 9 (a) to 9 (b). Note that “upper” means the upper direction in FIGS. 11 and 12 and “lower” means the lower direction in FIGS. 11 and 12 unless otherwise noted.

In FIG. 11A, the inter-pixel light shielding film 4-11a is formed by the resist mask 50-11a. Specifically, an antireflection layer 6-11a and an insulating layer formed on the back surface of the semiconductor substrate 10-11a above the pixel separating portion 9-11a formed inside the semiconductor substrate 10-11a. An inter-pixel light shielding film 4-11a is formed on the top of 5-11a so as to partition four pixels.

In FIG. 11B, the green color filters 3-11b-G are patterned. At this time, if exposure is performed slightly inward of the inter-pixel light shielding film 4-11b and development is performed, the corner is likely to be reduced in film thickness, so that it has a convex shape. When the shape after development does not satisfy the above equation (1), the number of steps increases, but the convex shape may be adjusted by etching. In FIG. 11B, the green color filter 3-11b-G corresponds to the semiconductor substrate 10 with respect to four pixels electrically divided by the pixel separating portion 9-11b formed inside the semiconductor substrate 10-11b. A green color filter 3-11b-G is formed on the top of the reflection preventing layer 6-11b and the insulating layer 5-11b formed on the back surface of the second layer 11b so as to be embedded in the inter-pixel light shielding film 4-11b. There is.

In FIG. 11C, the red color filter 3-11c-R is patterned. At this time, if exposure is performed slightly inward of the inter-pixel light shielding film 4-11 c and development is performed, the corner is likely to be reduced in film thickness, so that it has a convex shape. When the shape after development does not satisfy the above equation (1), the number of steps increases, but the convex shape may be adjusted by etching. In FIG. 11C, the red color filter 3-11c-R corresponds to the semiconductor substrate 10 for four pixels electrically divided by the pixel separating portion 9-11c formed inside the semiconductor substrate 10-11c. The pixel on the right side of the green color filter 3-11c-G so as to be embedded in the inter-pixel light shielding film 4-11c on the top of the reflection preventing layer 6-11c and the insulating layer 5-11c formed on the back surface of -11c Is formed.

In FIG. 12D, the blue color filter 3-12d-B is patterned. At this time, if exposure is performed slightly inward of the inter-pixel light shielding film 4-12 d and development is performed, the corner is easily reduced in film thickness, and therefore, it is convex. When the shape after development does not satisfy the above equation (1), the number of steps increases, but the convex shape may be adjusted by etching. In FIG. 12D, the blue color filter 3-12d-B corresponds to the semiconductor substrate 10 for four pixels electrically divided by the pixel separating portion 9-12d formed inside the semiconductor substrate 10-12d. A green color filter 3-12d-G and a red color filter so as to be embedded in the inter-pixel light shielding film 4-12d on top of the reflection preventing layer 6-12d and the insulating layer 5-12d formed on the back surface of -12d It is formed in the pixel on the right side of 3-12d-R.

In FIG. 12 (e), the in-layer lenses 3-12e-W are patterned. At this time, if exposure is performed slightly inward of the inter-pixel light shielding film 4-12 e and development is performed, the corner is easily reduced in film thickness, and therefore, it has a convex shape. When the shape after development does not satisfy the above equation (1), the number of steps increases, but the convex shape may be adjusted by etching. In FIG. 12E, the in-layer lens 3-12e-W corresponds to the semiconductor substrate 10 with respect to four pixels electrically divided by the pixel separating portion 9-12e formed inside the semiconductor substrate 10-12e. Green color filter 3-12e-G, red color filter so as to be embedded in the inter-pixel light shielding film 4-12e on the top of the reflection preventing layer 6-12e and the insulating layer 5-12e formed on the back surface of -12e 3-12e-R and blue color filters 3-12e-B are formed on the right side of the pixel.

The on-chip lens 2-12f-G, the on-chip lens 2-10f-R, the on-chip lens 2-10f-B and the on-chip lens 2-10f-W in FIG. The solid-state imaging device 1-12f is obtained by the same method as the on-chip lens forming method shown in FIG. 10 (j). The solid-state imaging device 1-10f is formed on the back surface of the semiconductor substrate 10-10f with respect to four pixels electrically partitioned by the pixel separating portion 9-10f formed inside the semiconductor substrate 10-10f. In order to be embedded in the inter-pixel light shielding film 4-10f above the antireflective layer 6-10f and the insulating layer 5-10f, the green color filter 3-10f- is sequentially arranged from the left pixel in FIG. G, red color filter 3-10 f-R, blue color filter 3-10 f-B, and in-layer lens 3-10 f-W are formed.

[3-3. Tenth Embodiment (Example 3 of Method of Manufacturing Solid-State Imaging Device)]
Below, the manufacturing method of the solid-state image sensor of 10th Embodiment (Example 3 of the manufacturing method of a solid-state image sensor) which concerns on this technique is demonstrated.

FIGS. 13 and 14 show an example of a method of manufacturing the solid-state imaging device according to the tenth embodiment of the present technology. FIGS. 13 and 14 illustrate a method of manufacturing the solid-state imaging device according to the tenth embodiment, taking as an example the steps after the formation of the inter-pixel light shielding film using a resist mask. The steps before that are the same as in FIGS. 9 (a) to 9 (b). In addition, unless there is particular notice, "upper" means the upper direction in FIG.13 and FIG.14, and "lower" means the lower direction in FIG.13 and FIG.14.

In FIG. 13A, the inter-pixel light shielding film 4-13a is formed by the resist mask 50-13a. Specifically, an antireflection layer 6-13a and an insulating layer formed on the back surface of the semiconductor substrate 10-13a above the pixel separating portion 9-13a formed inside the semiconductor substrate 10-13a. An inter-pixel light shielding film 4-13a is formed on the top of 5-13a so as to partition four pixels.

In FIG. 13 (b), a green color filter 3-13b-G is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-13b with respect to four pixels electrically partitioned by the pixel separating portion 9-13b formed inside the semiconductor substrate 10-13b. A green color filter 3-13b-G is formed on the upper portion of the pixel 6-13b and the insulating layer 5-13b so as to be embedded in the inter-pixel light shielding film 4-13b. At this time, the curvature of the green color filter 3-13b-G changes with the drying rotation speed after coating, so the rotation speed is adjusted so as to satisfy the above equation (1).

In FIG. 13 (c), the red color filter 3-13c-R is spin coated. Specifically, with respect to the pixel on the right of the pixel on which the green color filter 3-13c-G is formed, which is electrically partitioned by the pixel separating portion 9-13c formed inside the semiconductor substrate 10-13c. The red color filter 3-13 c-is embedded in the inter-pixel light shielding film 4-13 c above the antireflective layer 6-13 c and the insulating layer 5-13 c formed on the back surface of the semiconductor substrate 10-13 c. R is formed. At this time, the curvature of the red color filter 3-13-R changes with the drying rotation speed after coating, so the rotation speed is adjusted so as to satisfy the above equation (1).

In FIG. 14 (d), a blue color filter 3-14d-B is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-14d with respect to four pixels electrically divided by the pixel separating portion 9-14d formed inside the semiconductor substrate 10-14d. The blue color filter 3-14d-B is formed on the top of the insulating layer 6-14d and the insulating layer 5-14d so as to be embedded in the inter-pixel light shielding film 4-14d. At this time, the curvature of the blue color filter 3-14d-B changes with the drying rotation speed after coating, so the rotation speed is adjusted so as to satisfy the above equation (1). Note that the blue color filter 3-14d-B on the green color filter 3-14d-G formed on the first pixel from the left in FIG. 14 (d) and the second from the left in FIG. 14 (d). The blue color filters 3-14d-B on the red color filters 3-14d-R formed in the pixels are removed.

In FIG. 14 (e), in-layer lenses 3-14e-W are spin coated. Specifically, for the fourth pixel from the left in FIG. 14E, which is electrically partitioned by the pixel separating portion 9-10e formed inside the semiconductor substrate 10-10e, the semiconductor substrate 10 is separated. An in-layer lens 3-14e-W is formed on the top of the reflection preventing layer 6-14e and the insulating layer 5-14e formed on the back surface of -14e so as to be embedded in the inter-pixel light shielding film 4-14e. . At this time, since the curvature of the in-layer lens 3-14e-W changes with the number of rotations for drying after coating, the number of rotations is adjusted so as to satisfy the above equation (1).

When there are a plurality of types of color filters or in-layer lenses such as green, red and blue, it may be preferable to apply in the descending order of the radius of curvature of the concave shape, that is, in the ascending order of the radius of curvature. If another color filter or an intralayer lens is convex (in FIG. 13 and FIG. 14 the red color filter is convex), it may be formed without being influenced by the above-mentioned order.

The on-chip lens 2-14f-G, the on-chip lens 2-14f-R, the on-chip lens 2-14f-B and the on-chip lens 2-14f-W in FIG. The solid-state imaging device 1-14f is obtained by the same method as the method of forming the on-chip lens shown in FIG. 10 (j). The solid-state imaging device 1-14f is formed on the back surface of the semiconductor substrate 10-14f with respect to four pixels electrically divided by the pixel separating portion 9-14f formed inside the semiconductor substrate 10-14f. In order to be embedded in the inter-pixel light shielding film 4-14f above the antireflective layer 6-14f and the insulating layer 5-14f, the green color filter 3-14f- is sequentially arranged from the left pixel in FIG. G, red color filter 3-14f-R, blue color filter 3-14f-B, and in-layer lens 3-14f-W are formed.

[3-4. Eleventh Embodiment (Example 4 of Method of Manufacturing Solid-State Imaging Device)]
Below, the manufacturing method of the solid-state image sensor of 11th Embodiment (Example 4 of the manufacturing method of a solid-state image sensor) which concerns on this technique is demonstrated.

FIGS. 15 and 16 show an example of a method of manufacturing a solid-state imaging device according to an eleventh embodiment of the present technology. FIGS. 15 and 16 show a method of manufacturing the solid-state imaging device according to the eleventh embodiment, taking as an example the steps after formation of the deep trench isolation (pixel separating portion) for pixel separation. In addition, unless there is particular notice, "upper" means the upper direction in FIG.15 and FIG.16, and "lower" means the lower direction in FIG.15 and FIG.16.

FIG. 15A shows a cross-sectional view of the semiconductor substrate 10-15a having the pixel separating portion 9-15a. The pixel separating portion 9-15a is formed embedded in the semiconductor substrate 10-15a on the side of the back surface (upper surface in FIG. 15A) of the semiconductor substrate 10-15a. Further, on the back surface of the semiconductor substrate 10-15a, an antireflective layer 6-15a and an insulating layer 5-15a are formed in this order. In FIG. 15A, the pixel separating unit 9-15a electrically separates four pixels.

In FIG. 15B, the inter-pixel light shielding film 4-15b is formed by coating. Specifically, an antireflection layer 6-15b and an insulating layer formed on the back surface of the semiconductor substrate 10-15b above the pixel separating portion 9-15b formed inside the semiconductor substrate 10-15b. An inter-pixel light shielding film 4-15b is formed on top of 5-15b.

In FIG. 15C, the hard mask material 40-15c is formed by coating. Specifically, an antireflection layer 6-15c formed on the back surface of the semiconductor substrate 10-15c above the pixel separating portion 9-15c formed inside the semiconductor substrate 10-15c, and an insulating layer A silicon nitride film 42-15 c and a silicon oxide film 41-15 c are applied in this order on top of 5-15 c and the inter-pixel light shielding film 4-15 c.

In FIG. 15D, the hard mask processing resist 50-15d is patterned. Specifically, an antireflection layer 6-15d formed on the back surface of the semiconductor substrate 10-15d above the pixel separating portion 9-15d formed inside the semiconductor substrate 10-15d, and an insulating layer 5-15d, a resist 50- for hard mask processing on the upper portion of the inter-pixel light shielding film 4-15d and the hard mask material 40-15d (composed of the silicon nitride film 42-15d and the silicon oxide film 41-15d). 15 d is patterned.

In FIG. 15E, the hard mask material 40-15e (made of the silicon nitride film 42-15e and the silicon oxide film 41-15e) is processed by etching. Specifically, an antireflection layer 6-15e formed on the back surface of the semiconductor substrate 10-15e above the pixel separating portion 9-15e formed inside the semiconductor substrate 10-15e, and an insulating layer A hard mask material 40-15e having a hard mask processing resist 50-15e formed on top of the light shielding film 5-15e and the inter-pixel light shielding film 4-15e is processed by etching.

In FIG. 16F, the hard mask processing resist is removed. Specifically, an antireflection layer 6-16f formed on the back surface of the semiconductor substrate 10-16f above the pixel separating portion 9-16f formed inside the semiconductor substrate 10-16f, and an insulating layer 5-16f, the resist for hard mask processing disposed on the inter-pixel light shielding film 4-16f and the hard mask material 40-16f is removed.

In FIG. 16G, the protective film of the inter-pixel light shielding film 4-16g is isotropically deposited with the hard mask material 40-16g remaining. In FIG. 16 (g), an antireflection layer 6-16g formed on the back surface of the semiconductor substrate 10-16g above the pixel separating portion 9-16g formed inside the semiconductor substrate 10-16g; A hard mask material 40-16g and an inter-pixel light shielding film 4-16g are formed in this order on the insulating layer 5-16g.

16H shows an antireflection layer 6-16h formed on the back surface of the semiconductor substrate 10-16h above the pixel separating portion 9-16h formed inside the semiconductor substrate 10-16h. It is shown that the hard mask material 40-16h and the inter-pixel light shielding film 4-16h are disposed in this order on the insulating layer 5-16h.

In FIG. 16I, the green color filter 3-16i-G is spin coated. Specifically, an antireflective layer formed on the back surface of the semiconductor substrate 10-16i with respect to four pixels electrically divided by the pixel separating portion 9-16i formed inside the semiconductor substrate 10-16i. The green color filters 3-16i-G are formed on the upper portions of the layers 6-16i and the insulating layer 5-16i so as to be embedded in the inter-pixel light shielding film 4-16i. At that time, since the curvature of the green color filters 3-16i-G changes with the number of rotations at the time of drying after coating, the number of rotations is adjusted so as to satisfy the above equation (1). The subsequent steps are the same as the steps shown in FIGS. 9 (d) to 9 (e) to 10 (f) to 10 (j), and the solid-state imaging device 1-16j shown in FIG. can get. In addition, a solid-state imaging device may be obtained through the steps shown in FIG. 11 to FIG. 12 or FIG. 13 to FIG.

In the solid-state imaging device 1-16j, four pixels electrically divided by the pixel separation portion 9-16j formed inside the semiconductor substrate 10-16j are formed on the back surface of the semiconductor substrate 10-16j. The green color filter 3-16 j-is sequentially arranged from the left pixel in FIG. 16 (j) so as to be embedded in the inter-pixel light shielding film 4-16 j above the antireflective layer 6-16 j and the insulating layer 5-16 j. G, red color filter 3-16j-R, blue color filter 3-16j-B, and in-layer lens 3-16j-W are formed. And, on top of each of the green color filter 3-16j-G, the red color filter 3-16j-R, the blue color filter 3-16j-B and the in-layer lens 3-16j-W, an on-chip lens 2-16j An on-chip lens 2-16j-R, an on-chip lens 2-16j-B, and an on-chip lens 2-16j-W are formed.

[3-5. Twelfth Embodiment (Example 5 of Method of Manufacturing Solid-State Imaging Device)]
Below, the manufacturing method of the solid-state image sensor of 12th Embodiment (Example 5 of the manufacturing method of a solid-state image sensor) which concerns on this technique is demonstrated.

FIG. 17 shows an example of a method of manufacturing a solid-state imaging device according to a twelfth embodiment of the present technology. In FIG. 17, the manufacturing method of the solid-state imaging device of the twelfth embodiment is shown by taking the steps after formation of the on-chip lens as an example. In addition, unless there is particular notice, "upper" means the upper direction in FIG. 17, and "lower" means the lower direction in FIG.

FIG. 17A shows a solid-state imaging device 1-17a manufactured by the process of FIGS. The solid-state imaging device may be manufactured in the process of FIGS. 11 to 12, 13 to 14, or 15 to 16.
In the solid-state imaging device 1-17a, four pixels electrically divided by the pixel separating portion 9-17a formed inside the semiconductor substrate 10-17a are formed on the back surface of the semiconductor substrate 10-17a. The green color filter 3-17a- is sequentially arranged from the left pixel in FIG. 16J so as to be embedded in the inter-pixel light shielding film 4-17a on the antireflective layer 6-17a and the insulating layer 5-17a. G, red color filters 3-17a-R, blue color filters 3-17a-B, and in-layer lenses 3-17a-W are formed. And, on top of each of the green color filter 3-17a-G, the red color filter 3-17a-R, the blue color filter 3-17a-B and the in-layer lens 3-17a-W, the on-chip lens 2-17a On-chip lenses 2-17a-R, on-chip lenses 2-17a-B, and on-chip lenses 2-17a-W are formed.

In FIG. 17B, the antireflective film 20-17b-G, the antireflective film 20-17b-R, the antireflective film 20-17b-B, and the antireflective film 20-17b-W are isotropically turned on. The solid-state imaging device 1-17b is obtained by forming a film on the tip lens 2-17b-G, the on-chip lens 2-17b-R, the on-chip lens 2-17b-B, and the on-chip lens 2-17b-W. . In the solid-state imaging device 1-17b, four pixels electrically divided by the pixel separating portion 9-17b formed inside the semiconductor substrate 10-17b are formed on the back surface of the semiconductor substrate 10-17b. The green color filter 3-17b- is sequentially arranged from the left pixel in FIG. 16J so as to be embedded in the inter-pixel light shielding film 4-17b on the antireflective layer 6-17b and the insulating layer 5-17b. G, red color filter 3-17b-R, blue color filter 3-17b-B, and in-layer lens 3-17b-W are formed. And, on top of each of the green color filter 3-17b-G, the red color filter 3-17b-R, the blue color filter 3-17b-B and the in-layer lens 3-17b-W, an on-chip lens 2-17b On-chip lenses 2-17b-R, on-chip lenses 2-17b-B, and on-chip lenses 2-17b-W are formed.

<4. Embodiments of Electronic Device>
[4-1. Thirteenth Embodiment (Example of Electronic Device)]
In an electronic device according to a thirteenth embodiment of the present technology, a solid-state imaging device is mounted, and the solid-state imaging device includes:
At least an on-chip lens, an in-layer lens, an antireflective layer, and a semiconductor substrate are disposed in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions, and refraction of the on-chip lens Unlike the index and the refractive index of the in-layer lens, the upper radius of curvature on the light incident side of the on-chip lens is rl, the lower radius of curvature of the on-chip lens is rc, and the refractive index of the on-chip lens When nl, the refractive index of the intralayer lens is nc, and the distance from the antireflective layer to the upper end portion of the intralayer lens on the light incident side is hc, al and ac are 0.96 to 1.04. In the electronic device, the upper radius of curvature rl of the on-chip lens and the lower radius of curvature rc of the on-chip lens satisfy the following equation (1).

The electronic device of the thirteenth embodiment according to the present technology may be an electronic device on which the solid-state imaging device according to the first to seventh embodiments of the present technology is mounted.

<5. Usage example of solid-state imaging device to which the present technology is applied>
FIG. 18 is a diagram showing an example of use of the solid-state imaging device according to the first to seventh embodiments of the present technology as an image sensor.

The solid-state imaging devices according to the first to seventh embodiments described above can be used, for example, in various cases of sensing light such as visible light, infrared light, ultraviolet light, X-rays, etc. as follows. it can. That is, as shown in FIG. 13, for example, the field of appreciation for capturing images to be used for appreciation, the field of transportation, the field of home appliances, the field of medical and healthcare, the field of security, the field of beauty, sports Using the solid-state imaging device according to any one of the first to seventh embodiments in a device (for example, the electronic device according to the thirteenth embodiment described above) used in the field of agriculture, the field of agriculture, etc. Can.

Specifically, in the field of appreciation, for example, devices for photographing an image to be provided for appreciation, such as a digital camera, a smartphone, a mobile phone with a camera function, etc. The solid-state imaging device according to any one of the embodiments can be used.

In the field of transportation, for example, in-vehicle sensors for capturing images in front of, behind, around, inside of vehicles, etc., for monitoring safe driving such as automatic stop, etc., driving vehicles and roads. The solid-state imaging device according to any one of the first to seventh embodiments is used in an apparatus used for traffic, such as a surveillance camera, a ranging sensor for ranging between vehicles, etc. be able to.

In the field of home appliances, for example, a device provided to home appliances such as a television receiver, a refrigerator, an air conditioner, etc. in order to photograph a user's gesture and perform device operation according to the gesture. The solid-state imaging device of any one of the seventh embodiments can be used.

In the field of medical and healthcare, for example, first to seventh implementations for devices provided for medical use and healthcare, such as endoscopes and devices that perform blood vessel imaging by receiving infrared light. The solid-state imaging device according to any one of the embodiments can be used.

In the field of security, for example, in a device provided for security, such as a surveillance camera for security use or a camera for person authentication, a solid of any one of the first to seventh embodiments. An imaging device can be used.

In the field of beauty, for example, any one of the first to seventh embodiments of an apparatus provided for beauty use, such as a skin measuring instrument for photographing the skin and a microscope for photographing the scalp A solid-state imaging device in the form can be used.

In the field of sports, for example, a solid-state imaging device according to any one of the first to seventh embodiments is provided as an apparatus used for sports, such as an action camera or wearable camera for sports use etc. It can be used.

In the field of agriculture, for example, a solid-state imaging apparatus according to any one of the first to seventh embodiments in an apparatus used for agriculture, such as a camera for monitoring the condition of fields and crops. Elements can be used.

Next, usage examples of the solid-state imaging device according to the first to seventh embodiments of the present technology will be specifically described. For example, in the solid-state imaging device according to any one of the first to seventh embodiments described above, a camera system such as a digital still camera or a video camera, or an imaging function is used as the solid-state imaging device 101. The present invention can be applied to all types of electronic devices equipped with an imaging function, such as mobile phones having the same. FIG. 19 shows a schematic configuration of the electronic device 102 (camera) as an example. The electronic device 102 is, for example, a video camera capable of shooting still images or moving images, and drives the solid-state imaging device 101, an optical system (optical lens) 310, a shutter device 311, the solid-state imaging device 101, and the shutter device 311. And a signal processing unit 312.

The optical system 310 guides image light (incident light) from a subject to the pixel unit 101 a of the solid-state imaging device 101. The optical system 310 may be composed of a plurality of optical lenses. The shutter device 311 controls a light irradiation period and a light shielding period to the solid-state imaging device 101. The drive unit 313 controls the transfer operation of the solid-state imaging device 101 and the shutter operation of the shutter device 311. The signal processing unit 312 performs various types of signal processing on the signal output from the solid-state imaging device 101. The video signal Dout after signal processing is
It is stored in a storage medium such as a memory or output to a monitor or the like.

Note that the embodiments according to the present technology are not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present technology.

In addition, the effects described in the present specification are merely illustrative and not limitative, and may have other effects.

In addition, the present technology can also have the following configurations.
[1]
At least an on-chip lens, an in-layer lens, a reflection preventing layer, and a semiconductor substrate are arranged in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions;
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Solid-state image sensor.

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)
[2]
The solid-state imaging device according to [1], further comprising an inter-pixel light shielding film.
[3]
The solid-state imaging device according to [1] or [2], further comprising a hard mask material between adjacent pixels.
[4]
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is upwardly convex, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to any one of [1] to [3], wherein is an upwardly convex shape.
[5]
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is a downward convex shape, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to any one of [1] to [3], wherein
[6]
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is upwardly convex, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens Is convex upward, and further,
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is a downward convex shape, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to any one of [1] to [3], wherein
[7]
The solid-state imaging device according to any one of [1] to [6], wherein at least one of the in-layer lenses has a color filter characteristic of transmitting a specific wavelength band.
[8]
The solid-state imaging device according to any one of [1] to [7], further including an anti-reflection film for on-chip lens on the on-chip lens.
[9]
Forming an inter-pixel light shielding film between adjacent pixels in the upper direction of the antireflective layer on the semiconductor substrate;
A step of spin-coating the in-layer lens material and adjusting the number of rotations after the spin-coating to dry;
Forming an in-layer lens by exposing and developing the in-layer lens material on or between the in-pixel light shielding film or the in-pixel light blocking film;
Coating the base lens after spin-coating the on-chip lens material, adjusting the dimensions and patterning;
Melting and etching back the dimensioned base lens, and transferring the curvature to the on-chip lens material to form an on-chip lens.
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper part of the on-chip lens and the radius of curvature rc of the lower part of the on-chip lens in the range of 0.96 to 1.04 in which al and ac satisfy the following formula (1) The manufacturing method of the solid-state image sensor processed into

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)
[10]
The manufacturing method of the solid-state image sensor as described in [9] which further includes the process of forming a hard mask material between the mutually adjacent pixels.
[11]
The manufacturing method of the solid-state image sensor as described in [9] or [10] which further includes the process of forming the anti-reflective film for on-chip lenses on the said on-chip lens.
[12]
A solid-state image sensor is mounted,
The solid-state imaging device is
At least an on-chip lens, an in-layer lens, an antireflective layer, and a semiconductor substrate are arranged in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions,
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Electronic device.

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)
[13]
The electronic device by which the solid-state image sensor as described in any one of [2] to [8] is mounted.

DESCRIPTION OF SYMBOLS 1 ... Solid-state image sensor, 2 ... On-chip lens, 3 ... lens in a layer (color filter), 6 ... Antireflection layer, 10 ... Semiconductor substrate, 100 ... Pixel

Claims

At least an on-chip lens, an in-layer lens, a reflection preventing layer, and a semiconductor substrate are arranged in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions;
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Solid-state image sensor.

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)
The solid-state imaging device according to claim 1, further comprising an inter-pixel light shielding film.
The solid-state imaging device according to claim 1, further comprising a hard mask material between adjacent pixels.
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is upwardly convex, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to claim 1, wherein is an upward convex shape.
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is a downward convex shape, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to claim 1, wherein is a downward convex shape.
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is upwardly convex, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens Is convex upward, and further,
The upper part on the light incident side of at least one in-layer lens of the in-layer lenses is a downward convex shape, and the lower part of the on-chip lens disposed in contact with the at least one in-layer lens The solid-state imaging device according to claim 1, wherein is a downward convex shape.
The solid-state imaging device according to claim 1, wherein at least one of the in-layer lenses has a color filter characteristic that transmits a specific wavelength band.
The solid-state imaging device according to claim 1, further comprising an on-chip lens antireflection film on the on-chip lens.
Forming an inter-pixel light shielding film between adjacent pixels in the upper direction of the antireflective layer on the semiconductor substrate;
A step of spin-coating the in-layer lens material and adjusting the number of rotations after the spin-coating to dry;
Forming an in-layer lens by exposing and developing the in-layer lens material on or between the in-pixel light shielding film or the in-pixel light blocking film;
Coating the base lens after spin-coating the on-chip lens material, adjusting the dimensions and patterning;
Melting and etching back the dimensioned base lens, and transferring the curvature to the on-chip lens material to form an on-chip lens.
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper part of the on-chip lens and the radius of curvature rc of the lower part of the on-chip lens in the range of 0.96 to 1.04 in which al and ac satisfy the following formula (1) The manufacturing method of the solid-state image sensor processed into

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)
The method for manufacturing a solid-state imaging device according to claim 9, further comprising the step of forming a hard mask material between adjacent pixels.
The method for manufacturing a solid-state imaging device according to claim 9, further comprising the step of forming an anti-reflection film for on-chip lens on the on-chip lens.
A solid-state image sensor is mounted,
The solid-state imaging device is
At least an on-chip lens, an in-layer lens, an antireflective layer, and a semiconductor substrate are arranged in order from the light incident side for each of a plurality of pixels arranged in one or two dimensions,
Unlike the refractive index of the on-chip lens and the refractive index of the in-layer lens,
The curvature radius of the upper part on the light incident side of the on-chip lens is rl, the curvature radius of the lower part of the on-chip lens is rc, the refractive index of the on-chip lens is nl, the refractive index of the in-layer lens is nc, the reflection When the distance from the preventing layer to the upper end portion on the light incident side of the in-layer lens is hc,
The radius of curvature rl of the upper portion of the on-chip lens and the radius of curvature rc of the lower portion of the on-chip lens in the range of 0.96 to 1.04 for al and ac satisfy the following formula (1): Electronic device.

(However, when the light incident surface side of the on-chip lens is the upper side in the equation (1), the upper part of the on-chip lens is convex upward when rl> 0, and rl <0 The upper part of the on-chip lens has a lower convex shape, the lower part of the on-chip lens has an upper convex shape when rc> 0, and the lower part of the on-chip lens has a lower convex when rc <0. It is a shape.)