WO2019056266A1 - Superabrasive coated electrode discharge grinding composite machining device and method - Google Patents

Superabrasive coated electrode discharge grinding composite machining device and method Download PDF

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Publication number
WO2019056266A1
WO2019056266A1 PCT/CN2017/102739 CN2017102739W WO2019056266A1 WO 2019056266 A1 WO2019056266 A1 WO 2019056266A1 CN 2017102739 W CN2017102739 W CN 2017102739W WO 2019056266 A1 WO2019056266 A1 WO 2019056266A1
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WO
WIPO (PCT)
Prior art keywords
electrode
workpiece
pole piece
superabrasive
grinding
Prior art date
Application number
PCT/CN2017/102739
Other languages
French (fr)
Chinese (zh)
Inventor
伍晓宇
鲁艳军
周超兰
徐斌
赵航
雷建国
Original Assignee
深圳大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳大学 filed Critical 深圳大学
Priority to PCT/CN2017/102739 priority Critical patent/WO2019056266A1/en
Priority to CN201780036275.2A priority patent/CN109311111B/en
Publication of WO2019056266A1 publication Critical patent/WO2019056266A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00Combined machining
    • B23H5/06Electrochemical machining combined with mechanical working, e.g. grinding or honing
    • B23H5/08Electrolytic grinding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00Combined machining
    • B23H5/04Electrical discharge machining combined with mechanical working
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00Combined machining
    • B23H5/10Electrodes specially adapted therefor or their manufacture

Definitions

  • the invention belongs to the field of micro-discharge processing technology equipment, and in particular relates to a super-abrasive coating electrode electrode discharge grinding composite processing device and method.
  • Three-dimensional microarray structure is fabricated on the surface of hard and brittle materials such as ceramics, glass, sapphire, etc., which can add new engineering application value, but the micro-scale structure of three-dimensional microarray structure is very difficult to process, and there is no high-precision and high-precision Forming processing method.
  • the conventional micro-discharge machining method can process a microarray structure on a workpiece surface
  • the conventional micro-discharge machining method cannot guarantee the shape and dimensional accuracy of the three-dimensional microarray structure.
  • the high-precision microarray structure can be processed by the conventional grinding wheel and EDM grinding method, the processing efficiency is very low, and it cannot be widely applied and developed in the manufacturing process.
  • the grinding wheel needs to be sharpened and trimmed frequently, the processing efficiency is very low, and the grinding wheel dressing precision is difficult to control.
  • the present invention is achieved by a superabrasive coating electrode discharge grinding composite processing apparatus for processing a workpiece, the superabrasive coating electrode discharge grinding composite processing apparatus comprising a tool electrode, Providing a pulse power source electrically connected to the workpiece and electrically connected to the tool electrode, a rotary driver for driving rotation of the tool electrode, and a mobile driver for driving the rotary drive to move in space
  • the tool electrode includes a plurality of electrode sheets for generating an electric spark to machine the workpiece, and a clamping assembly for clamping a plurality of the electrode sheets and connecting with the rotary driver, the clamping assembly being electrically Connecting the pulse power source, the rotary drive is driven by the clamping component
  • the electrode sheet is rotated, and the electrode sheet comprises a plurality of pole piece bodies made of a conductive material and electrically connected to the clamping assembly, and a plurality of pole pieces made of superhard material and protruding from the pole piece body. Abrasive particles on the side surface.
  • the pole piece body is annular, and the annular pole piece body includes an inner ring portion provided from the inside to the outside for clamping by the clamping assembly, and is connected to the inner ring portion and An outer ring portion that generates an electric spark between the workpiece, and a plurality of the abrasive grains are protruded from the annular surface on both sides of the outer ring portion.
  • a plurality of the abrasive grains are uniformly distributed annularly on the toroidal surfaces on both sides of the outer ring portion, and the distance from the grinding point of the abrasive grains to the toroidal surface of the outer ring portion is equal.
  • the tool electrode further includes a spacer made of a conductive material and disposed between adjacent pole piece bodies.
  • the spacer is circular and located between the adjacent inner ring portions of the two adjacent pole piece bodies and electrically connects the two adjacent pole piece bodies.
  • the diameter of the spacer is smaller than the diameter of the pole piece body.
  • the number of the pole piece bodies is three, and the inner ring portions of the three pole piece bodies and the spacers disposed between the adjacent inner ring portions form a pole piece together
  • the clamping assembly includes a grinding wheel clamp electrically clamped on both sides of the pole piece conductive portion and a flange clamp clamped on both sides of the grinding wheel clamp.
  • the grinding wheel clamp includes a first grinding wheel electrically clamped to the inner ring portion on one side of the pole piece conductive portion, and is disposed opposite to the first grinding wheel and electrically clamped thereto a second grinding wheel of the inner ring portion on the other side of the pole piece conductive portion.
  • the diameter of the first grinding wheel is smaller than the diameter of the pole piece body
  • the diameter of the second grinding wheel is smaller than the diameter of the pole piece body
  • the flange clamp includes a fastening flange clamped to one side of the first grinding wheel and a positioning disposed opposite to the fastening flange and clamped to a side of the second grinding wheel Flange.
  • the positioning flange is rotatably connected to the rotary drive; the fastening flange, the first grinding wheel, the pole piece conductive portion, the second grinding wheel and the positioning flange Set them side by side.
  • the superabrasive coating electrode electrode electric discharge machining device further includes a brush, one end of the brush is electrically connected to the pulse power source, and the other end of the brush is in sliding contact and electrically connected to The first grinding wheel faces the surface of the fastening flange.
  • the workpiece, the pulse power source, the brush and the tool electrode are electrically connected in sequence, and the workpiece and the tool electrode are disposed at a predetermined distance to generate an EDM workpiece.
  • the pulse power supply has a pulse voltage range of 20 to 150V, and a pulse frequency range of 100 to 50.
  • pulse width range is 0.2 ⁇ 100 s.
  • a superabrasive coating electrode discharge grinding composite processing method for processing a workpiece includes the following processing steps:
  • preparation step preparing the superabrasive coating electrode discharge grinding composite processing device
  • a workpiece presetting step placing the workpiece in a suitable position to cooperate with the superabrasive coating electrode discharge grinding composite processing device;
  • processing step the rotary drive drives the tool electrode to rotate at a high speed, the mobile drive drives the rotary drive to move in space, and a discharge circuit is formed between the workpiece, the tool electrode and the pulse power source, A fine electric spark discharge is generated between the electrode sheet and the workpiece to erode the workpiece, and the abrasive grain cuts the workpiece.
  • the superabrasive coating electrode electrode electric discharge grinding and processing device uses a high-efficiency micro spark discharge machining method to make a plurality of laminar electrode sheets and workpieces by using a plurality of high-speed rotating sheet electrode sheets. A fine electric spark is generated to electrically discharge the workpiece. Driven by the mobile drive and the rotary drive, the electrode pads of the tool electrode can be discharged through a fine electric spark in the depth feed direction of the workpiece.
  • FIG. 1 is a schematic structural view of a superabrasive coating electrode electrode electric discharge machining device according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural view of a tool electrode of the superabrasive coating electrode electrode electric discharge grinding combined processing apparatus of FIG. 3 is a partial enlarged view of A of FIG. 1.
  • FIG. 4 is a schematic structural view of an electrode sheet of the superabrasive plating electrode discharge grinding composite processing apparatus of FIG. 1.
  • FIG. 5 is a schematic view showing the structure of a discharge grinding portion and a pole piece conductive portion of the superabrasive plating electrode discharge grinding combined processing apparatus of FIG. 1.
  • connection should be understood broadly, and may be, for example, a fixed connection, a detachable connection, or an integral, unless otherwise specifically defined and defined; It can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, which can be the internal communication of two elements or the interaction of two elements.
  • the superabrasive coating electrode electrode electric discharge machining device 10 for machining the workpiece 90 includes: a tool electrode 20 for supplying pulse electric energy and a pulse power source 80 electrically connected to the workpiece 90 and electrically connected to the tool electrode 20, a rotary driver 10 for driving the rotation of the tool electrode 20, and a mobile driver for driving the rotary drive 10 to move in space ( Not shown in the picture).
  • the mobile drive is a numerically controlled grinding machine (not shown) having a three-axis linkage system
  • the rotary drive 10 is one end of the rotary shaft 10 of the numerically controlled grinding machine, and the other end of the rotary shaft 10 Connected to the tool electrode 20.
  • the tool electrode 20 includes a plurality of electrode sheets 21 for generating an electric spark to machine the workpiece 90 and for clamping a plurality of the electrode sheets 21 and with the rotating shaft 1
  • the clamping assembly 30 is electrically connected to the pulse power source 80.
  • the rotating shaft 10 drives the electrode sheet 21 to rotate by the clamping assembly 30.
  • the electrode sheet 21 includes several A pole piece body 211 made of a conductive material and electrically connected to the clamping assembly 30 , and a plurality of abrasive particles 212 made of a super-hard material and protruding from both sides of the pole piece body 211.
  • the material of the workpiece 90 may be a conductive material (for example: steel, cemented carbide, etc.), or a non-conductive material (for example, glass, sapphire, etc.), when the workpiece 90 is a non-conductive material,
  • the workpiece 90 is subjected to induced discharge.
  • the material of the workpiece 90 in this embodiment is a conductive material.
  • the pulse power supply 80 has a pulse voltage range of 20 to 150 V, a pulse frequency range of 100 to 5000 Hz, and a pulse width ranging from 0.2 to 100 ⁇ 8 .
  • the pulse power supply 80 has a pulse voltage of 50 V, a pulse frequency of 2000 Hz, and a pulse width of 50 s.
  • an embodiment of the present invention further provides a discharge grinding method for processing a workpiece 90, including the following processing steps:
  • a workpiece presetting step placing the workpiece 90 in a suitable position to cooperate with the superabrasive coating electrode discharge grinding composite processing device 100 for electrical discharge machining;
  • processing step the rotating shaft 10 drives the tool electrode 20 to rotate at a high speed, the moving drive drives the rotating shaft 10 to move in space, the workpiece 90, the tool electrode 20 and the pulse power source 80
  • a discharge circuit is formed between the electrode sheets 21 and the workpiece 90 to generate a fine electric spark discharge to erode the workpiece 90, and the abrasive particles 212 cut the workpiece 90.
  • the workpiece 90 is etched by the fine electric discharge machining in the depth feed direction a by the electrode sheet 21, and the abrasive particles 212 micro-cut the workpiece 90 on both sides of the electrode sheet 21 rotating at a high speed, so that the surface of the workpiece 90 can be high.
  • Efficiency a plurality of smooth micro-groove array structures are processed side by side, thereby achieving electrical discharge spark-grinding composite processing of conductive hard and brittle materials, which can greatly improve discharge grinding efficiency and discharge grinding quality.
  • the superabrasive coating electrode discharge grinding combined processing apparatus 100 provided by the embodiment of the present invention, by mounting the rotating shaft 10 on a numerically controlled grinding machine, and using a high-efficiency micro-discharge electric discharge machining method to make a plurality of thin sheets
  • the electrode sheet 21 is rotated at a high speed, and preferably, the rotational speed N of the rotary shaft 10 is 1000 to 5000 rpm.
  • the plurality of sheet electrode sheets 21 are caused to generate a fine electric spark between the circumferential side surface of the workpiece 90 and the workpiece 90, thereby performing electric discharge machining on the workpiece 90.
  • the pole piece 21 can remove the material of the workpiece 90 by the fine electric discharge machining in the depth feed direction a of the workpiece 90, the feed speed is in the range of 10 to 200 mm/min, and the feed depth is in the range of 10 to 100 ⁇ m.
  • the rotational speed ⁇ of the electrode sheet 21 is 1000 rpm
  • the feed depth is 50 ⁇ m
  • the feed speed a is 20 mm/min.
  • the microarray structure may be a micro-trench array structure 91.
  • the groove cross-sectional shape of the micro-trench array structure 91 may be rectangular, trapezoidal or V-shaped, wherein the width of the groove ranges from 10 to 800 ⁇ m, adjacent trenches. The spacing between the grooves ranges from 20 to 500 ⁇ m, and the groove depth of the grooves ranges from 10 to 100 ⁇ m.
  • the surface roughness R ⁇ of the processed micro-groove array structure 91 ranges from 0.01 to 0.5 ⁇ m.
  • the micro-trench array structure 91 processed in this embodiment is a trapezoidal trench, the trapezoidal trench width is 535 ⁇ m, and the spacing between the adjacent trapezoidal trenches is 125 ⁇ m, the trapezoidal trench The depth is 45 ⁇ .
  • the pole piece body 211 is annular, and the pole piece body 211 includes an inner ring portion 2111 disposed from the inside to the outside for clamping by the clamping assembly 30, and is connected to the inner ring portion.
  • An outer ring portion 2112 that generates an electric spark between the workpiece and the workpiece 90, and a plurality of the abrasive grains 212 are disposed on the annular surfaces on both sides of the outer ring portion 2112.
  • the inner ring portion 2111 is sleeved on the rotating shaft 10 and rotates at a high speed with the rotating shaft 10.
  • the pole piece body 211 is a conventional thin pole piece made of copper foil, and has a thickness ranging from 5 to 800 ⁇ m.
  • the abrasive particles 212 are in contact with the workpiece 90 and the grinding points of the workpiece 90 are ground to the annulus of the outer ring portion 2112 at equal distances, and the plurality of abrasive grains 212 are ring-shaped. And equal heights are evenly distributed on the annular faces on both sides of the outer ring portion 2112.
  • the abrasive particles 212 are plated on the annular surface of the outer ring portion 2112 by an electroplating process, and the material of the abrasive particles 212 may be a super hard abrasive such as diamond or cubic boron nitride, and the abrasive particles 212
  • the particle size ranges from 1000 to 5 000 mesh, and the abrasive particles 212 are disposed at a position ranging from the position of the outer ring portion 2112 to the circumference of the pole piece body 211 by a range of 0 to 10 mm.
  • the abrasive particles 212 are diamond abrasives having a particle size of 3000 mesh, and the minimum distance of the abrasive particles 212 to the circumference of the pole piece body 211 is 6 mm.
  • the abrasive particles 212 are outwardly convexly disposed to grind the workpiece 90, thereby further enhancing the surface of the microgrooved array structure 91. Precision.
  • the tool electrode 20 further includes a spacer 22 made of a conductive material and disposed between the adjacent pole piece bodies 211.
  • the spacer 22 is annular and is located between the inner ring portions 2111 of the two adjacent pole piece bodies 211.
  • the spacer 22 has a diameter smaller than the diameter of the pole piece body 211.
  • the spacer 22 is sleeved on the rotating shaft 10 and electrically connected to the adjacent pole body 211.
  • the thickness of the spacer 22 ranges from 20 to 500 ⁇ m.
  • the diameter of the pole piece body 211 is 0.5 to 5 mm larger than the diameter of the spacer 22.
  • the diameter of the pole piece body 211 in this embodiment is larger than the diameter of the spacer 22 by 1 mm.
  • the number of the pole piece bodies 211 is three. In other embodiments, the number of the pole piece bodies 211 can be set according to actual needs. In the present embodiment, the thickness of each of the three pole piece main bodies 211 is preferably 500 ⁇ m.
  • the inner ring portion 2111 of the three pole piece bodies 211 and the spacer 22 disposed between the adjacent inner ring portions 2111 together form a pole piece conductive portion 70; three of the pole piece bodies 2 11
  • the outer ring portion 2112 and the abrasive grains 212 uniformly disposed on the annular surfaces of the outer ring portions 2112 together form the electric discharge grinding portion 60.
  • an electric spark can be generated between the discharge grinding portion 60 and the workpiece 90, and three micro groove array structures 91 can be processed in parallel at a time, which greatly improves processing efficiency. .
  • any adjacent electrode sheets 21 and the spacers 22 located between the adjacent electrode sheets 21 are collectively formed to form an annular grinding groove 50, and the grinding groove 50 is
  • the groove width is equal to the thickness of the spacer 22.
  • the groove width of the grinding groove 50 ranges from 20 to 500 ⁇ m, and the number is two. The debris of the tool electrode 20 during the grinding process can be discharged through the two grinding grooves 50.
  • the clamping assembly 30 includes a grinding wheel clamp electrically clamped on both sides of the pole piece conductive portion 70.
  • the grinding wheel holder 32 clamps a plurality of the electrode sheets 21 and the spacers 22 from the both sides of the pole piece conductive portion 70 therebetween, so that a good electrical connection is maintained between the spacers 22 and the electrode sheets 21.
  • the grinding wheel clamp 32 includes a first grinding wheel 321 electrically clamped to the inner ring portion 2111 on the side of the pole piece conductive portion 70, and is disposed opposite to the first grinding wheel 321 and electrically The second grinding wheel 322 of the inner ring portion 2111 is clamped to the other side of the pole piece conductive portion 70. Both the first grinding wheel 321 and the second grinding wheel 322 have good electrical conductivity, and can electrically connect the pole piece conductive portion 70 well. First sand The wheel 321 and the second grinding wheel 322 are respectively sleeved on the rotating shaft 10 and pressed against the pole piece conductive portion 70 to fix the pole piece conductive portion 70 to the rotating shaft 10.
  • the diameter of the first grinding wheel 321 is smaller than the diameter of the pole piece body 211
  • the diameter of the second grinding wheel 322 is smaller than the diameter of the pole piece body 211, so that the tool electrode 20 can be removed from the discharge mill
  • the workpiece 90 is ground on both sides of the cut portion 60.
  • the diameter of the pole piece body 211 is larger than the diameter of the first grinding wheel 321 and the second grinding wheel 322 by 0.5 to 5 mm.
  • the diameters of the first grinding wheel 321, the second grinding wheel 322, and the spacer 22 are equal.
  • the diameter of the pole piece main body 211 is larger than the diameter of the first grinding wheel 321 by 1 mm, and is also larger than the diameter of the second grinding wheel 322 by 1 mm.
  • the flange clamp 31 includes a fastening flange 311 clamped to the side of the first grinding wheel 321 and is disposed opposite to the fastening flange 311 and clamped to the second grinding wheel 322.
  • the fastening flange 311 and the positioning flange 312 are sleeved and fixed on the rotating shaft 10.
  • the fastening flange 311, the first grinding wheel 321, the pole piece conductive portion 70, the second grinding wheel 322 and the positioning flange 312 are arranged in parallel and are driven by the rotating shaft 10 Rotating about a central axis of the rotating shaft 10.
  • the superabrasive coating electrode discharge grinding composite processing apparatus 100 further includes a brush 40.
  • the brush 40 is a graphite brush.
  • the brush 40 is electrically connected to the pulse power source 80.
  • the other end of the brush 40 is in sliding contact and electrically connected to the first grinding wheel 321 toward the surface of the fastening flange 311.
  • the first grinding wheel 321 rotates about the central axis of the rotating shaft 10, and the brush 40 slides on the surface of the first grinding wheel 321 and is electrically connected with the first grinding wheel 321 so that the electric discharge grinding portion 60 can continue to An electric spark is generated between the workpieces 90.
  • the workpiece 90, the pulse power source 80, the graphite brush 40, and the tool electrode 20 are electrically connected in sequence, and the workpiece 90 and the tool electrode 20 are disposed at an appropriate distance so as to be The resulting spark meets the processing requirements of the workpiece 90.
  • the fastening flange 321 is disposed opposite to the positioning flange 312 and sleeved and fixed to one end of the rotating shaft 10, and the other end of the rotating shaft 10 is transferred to the numerical control grinding machine, and the three-axis linkage system of the numerical control grinding machine makes the rotating shaft 10 in rotation
  • the rotating peers can also run in a predetermined trajectory in space.
  • the fastening flange 321 axially presses the first grinding wheel 321 and the second grinding wheel 322 toward the positioning flange 322, thereby achieving the purpose of fixing the three electrode sheets 21.
  • the graphite brush 40 is electrically connected to one pole of the pulse power source 80, and the other end is slid and electrically connected to the first grinding wheel.
  • the conductive workpiece 90 is electrically connected to the other pole of the pulse power source 80.
  • the three electrode sheets 21 rotate with the rotating shaft 10 at a high speed, and driven by the three-axis numerical control linkage system of the numerical control grinding machine, the three electrode sheets 21 move along the set numerical control machining walking track, and the high-speed rotating electrode sheets A fine electric spark discharge is generated between the workpiece 21 and the workpiece 90, and the surface material of the workpiece 90 is removed by micro-discharge machining along the depth feed direction a.
  • the outer ring portion 2112 of the electrode sheet 21 is further micro-cutted by the superabrasive particle 212 to remove the workpiece.
  • the material of 90 thereby forming a plurality of smooth micro-groove array structures 91 at a time on the surface of the workpiece 90 and side by side.
  • the superabrasive coating electrode discharge grinding composite processing device 100 provided by the embodiments of the present invention has a wide adaptability, and a plurality of three-dimensional microarray structures 91 can be processed on the surface of any workpiece 90.
  • the electrode sheet 21 has less loss, and the electrode sheet 21 does not need to be frequently replaced, and the electrode sheet 21 that rotates at a high speed can self-repair its shape and roundness, and the pole piece body 211 plated with the abrasive grains 212 is also easily replaced.
  • the processing efficiency and the processing precision are high, and a plurality of micro-groove array structures 91 can be formed side by side to greatly improve the processing efficiency, and the grinding action of the abrasive grains 212 on the electrode sheet 21 can ensure the processed micro-groove array structure. 91 has high machining accuracy.

Abstract

A superabrasive coated electrode discharge grinding composite machining device (100) is used for machining a workpiece (90). The superabrasive coated electrode discharge grinding composite machining device (100) comprises: a tool electrode (20); a pulse power supply (80), used for providing pulse discharge, connected to the workpiece (90) by using an electric wire and connected to the tool electrode (20) by using an electric wire; a rotary driver (10), used for driving the tool electrode (20) to rotate; and a mobile driver used for driving the rotary driver (10) to move in a space. The tool electrode (20) comprises circular multi-layer sheet electrode plates (21) prepared by using a multi-layer copper foil material. Each electrode plate (21) comprises an electrode plate body (211) and abrasive particles (212) prepared by using a superabrasive and coated, by using an electroplating method, on two sides of the electrode plate body (211). By means of machining carried by the device, multiple side-by-side smooth micro-groove array structures (91) can be efficiently obtained on the surface of the workpiece (90) one time, so as to implement electric spark discharge grinding machining of a hard and brittle material, thereby improving the discharge grinding efficiency and the discharge grinding quality.

Description

发明名称:一种超硬磨料镀层电极放电磨削复合加工装置及方法 技术领域  Title: A superhard abrasive coating electrode discharge grinding composite processing device and method
[0001] 本发明属于微放电加工技术设备领域, 尤其涉及一种超硬磨料镀层电极放电磨 削复合加工装置及方法。  [0001] The invention belongs to the field of micro-discharge processing technology equipment, and in particular relates to a super-abrasive coating electrode electrode discharge grinding composite processing device and method.
背景技术  Background technique
[0002] 在陶瓷、 玻璃、 蓝宝石等硬脆性材料表面加工出三维微阵列结构, 可以附加出 新的工程应用价值, 但是微米尺度结构的三维微阵列结构加工十分困难, 目前 尚未有高效高精度的成形加工方法。  [0002] Three-dimensional microarray structure is fabricated on the surface of hard and brittle materials such as ceramics, glass, sapphire, etc., which can add new engineering application value, but the micro-scale structure of three-dimensional microarray structure is very difficult to process, and there is no high-precision and high-precision Forming processing method.
[0003] 虽然传统的微放电加工方法可以在工件表面加工出微阵列结构, 但是传统的微 放电加工方法无法保证三维微阵列结构的形状及尺寸精度。 尽管利用传统的砂 轮磨削和电火花放电磨削方法可以加工出高精度的微阵列结构, 但是其加工效 率十分低下, 在生产制造过程中, 无法得到广泛的应用与发展。 而且, 砂轮磨 削过程中, 需要频繁对砂轮进行修锐和修整, 加工效率非常低下, 且砂轮修整 精度很难控制。  [0003] Although the conventional micro-discharge machining method can process a microarray structure on a workpiece surface, the conventional micro-discharge machining method cannot guarantee the shape and dimensional accuracy of the three-dimensional microarray structure. Although the high-precision microarray structure can be processed by the conventional grinding wheel and EDM grinding method, the processing efficiency is very low, and it cannot be widely applied and developed in the manufacturing process. Moreover, in the grinding process of the grinding wheel, the grinding wheel needs to be sharpened and trimmed frequently, the processing efficiency is very low, and the grinding wheel dressing precision is difficult to control.
技术问题  technical problem
[0004] 现有技术中无法在被加工工件表面一次高效成形加工出多个微阵列结构以及保 证所加工的微阵列结构的加工精度。  [0004] In the prior art, it is not possible to efficiently form a plurality of microarray structures at a time on the surface of a workpiece to be processed and to ensure the processing accuracy of the processed microarray structure.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0005] 本发明是这样实现的, 一种超硬磨料镀层电极放电磨削复合加工装置, 用于对 工件进行加工, 所述超硬磨料镀层电极放电磨削复合加工装置包括工具电极、 用于提供脉冲电并与所述工件电性连接且与所述工具电极电性连接的脉冲电源 、 用于驱动所述工具电极旋转的旋转驱动器以及用于驱动所述旋转驱动器在空 间内移动的移动驱动器, 所述工具电极包括用于产生电火花以加工所述工件的 多个电极片以及用于夹持多个所述电极片并与所述旋转驱动器连接的夹持组件 , 所述夹持组件电性连接所述脉冲电源, 所述旋转驱动器通过所述夹持组件驱 动所述电极片转动, 所述电极片包括若干由导电材料制成并与所述夹持组件电 性连接的极片本体以及若干由超硬材料制成且凸设在所述极片本体两侧表面的 磨粒。 [0005] The present invention is achieved by a superabrasive coating electrode discharge grinding composite processing apparatus for processing a workpiece, the superabrasive coating electrode discharge grinding composite processing apparatus comprising a tool electrode, Providing a pulse power source electrically connected to the workpiece and electrically connected to the tool electrode, a rotary driver for driving rotation of the tool electrode, and a mobile driver for driving the rotary drive to move in space The tool electrode includes a plurality of electrode sheets for generating an electric spark to machine the workpiece, and a clamping assembly for clamping a plurality of the electrode sheets and connecting with the rotary driver, the clamping assembly being electrically Connecting the pulse power source, the rotary drive is driven by the clamping component The electrode sheet is rotated, and the electrode sheet comprises a plurality of pole piece bodies made of a conductive material and electrically connected to the clamping assembly, and a plurality of pole pieces made of superhard material and protruding from the pole piece body. Abrasive particles on the side surface.
[0006] 进一步地, 所述极片本体为环状, 所述环状极片本体包括由内往外设置的供所 述夹持组件夹持的内环部以及连接在所述内环部上且与所述工件之间产生电火 花的外环部, 若干所述磨粒凸设于所述外环部两侧的环面。  [0006] Further, the pole piece body is annular, and the annular pole piece body includes an inner ring portion provided from the inside to the outside for clamping by the clamping assembly, and is connected to the inner ring portion and An outer ring portion that generates an electric spark between the workpiece, and a plurality of the abrasive grains are protruded from the annular surface on both sides of the outer ring portion.
[0007] 进一步地, 若干所述磨粒呈环状均匀分布于所述外环部两侧的环面且所述磨粒 的磨削点至所述外环部的环面的距离相等。  Further, a plurality of the abrasive grains are uniformly distributed annularly on the toroidal surfaces on both sides of the outer ring portion, and the distance from the grinding point of the abrasive grains to the toroidal surface of the outer ring portion is equal.
[0008] 进一步地, 所述工具电极还包括由导电材料制成且设置在相邻的所述极片本体 之间的垫片。  Further, the tool electrode further includes a spacer made of a conductive material and disposed between adjacent pole piece bodies.
[0009] 进一步地, 所述垫片为圆形且位于两相邻的所述极片本体的所述内环部之间并 电性连通两相邻的所述极片本体。  [0009] Further, the spacer is circular and located between the adjacent inner ring portions of the two adjacent pole piece bodies and electrically connects the two adjacent pole piece bodies.
[0010] 进一步地, 所述垫片的直径小于所述极片本体的直径。 [0010] Further, the diameter of the spacer is smaller than the diameter of the pole piece body.
[0011] 进一步地, 所述极片本体的数量为三个, 三个所述极片本体的所述内环部以及 设置在相邻的所述内环部之间的垫片共同形成极片导电部; 三个所述极片本体 的所述外环部以及均匀设置在所述外环部两侧环面的所述磨粒共同形成放电磨 削部。  [0011] Further, the number of the pole piece bodies is three, and the inner ring portions of the three pole piece bodies and the spacers disposed between the adjacent inner ring portions form a pole piece together The conductive portion; the outer ring portion of the three pole piece bodies and the abrasive grains uniformly disposed on the ring faces on both sides of the outer ring portion together form a discharge grinding portion.
[0012] 进一步地, 所述夹持组件包括电性夹持于所述极片导电部两侧的砂轮夹具以及 夹持于所述砂轮夹具两侧的法兰夹具。  [0012] Further, the clamping assembly includes a grinding wheel clamp electrically clamped on both sides of the pole piece conductive portion and a flange clamp clamped on both sides of the grinding wheel clamp.
[0013] 进一步地, 所述砂轮夹具包括电性夹持于所述极片导电部一侧的所述内环部的 第一砂轮以及与所述第一砂轮相对设置并电性夹持于所述极片导电部另一侧的 所述内环部的第二砂轮。  [0013] Further, the grinding wheel clamp includes a first grinding wheel electrically clamped to the inner ring portion on one side of the pole piece conductive portion, and is disposed opposite to the first grinding wheel and electrically clamped thereto a second grinding wheel of the inner ring portion on the other side of the pole piece conductive portion.
[0014] 进一步地, 所述第一砂轮的直径小于所述极片本体的直径, 所述第二砂轮的直 径小于所述极片本体的直径。 [0014] Further, the diameter of the first grinding wheel is smaller than the diameter of the pole piece body, and the diameter of the second grinding wheel is smaller than the diameter of the pole piece body.
[0015] 进一步地, 所述法兰夹具包括夹持于所述第一砂轮一侧的紧固法兰以及与所述 紧固法兰相对设置并夹持于所述第二砂轮一侧的定位法兰。 [0015] Further, the flange clamp includes a fastening flange clamped to one side of the first grinding wheel and a positioning disposed opposite to the fastening flange and clamped to a side of the second grinding wheel Flange.
[0016] 进一步地, 所述定位法兰旋转连接于所述旋转驱动器; 所述紧固法兰、 所述第 一砂轮、 所述极片导电部、 所述第二砂轮以及所述定位法兰依次并列设置。 [0017] 进一步地, 所述超硬磨料镀层电极放电磨削复合加工装置还包括电刷, 所述电 刷一端电性连接所述脉冲电源, 所述电刷另一端滑动接触且电性连接于所述第 一砂轮朝向所述紧固法兰的表面上。 [0016] Further, the positioning flange is rotatably connected to the rotary drive; the fastening flange, the first grinding wheel, the pole piece conductive portion, the second grinding wheel and the positioning flange Set them side by side. [0017] Further, the superabrasive coating electrode electrode electric discharge machining device further includes a brush, one end of the brush is electrically connected to the pulse power source, and the other end of the brush is in sliding contact and electrically connected to The first grinding wheel faces the surface of the fastening flange.
[0018] 进一步地, 所述工件、 所述脉冲电源、 所述电刷以及所述工具电极依次电性连 接且所述工件与所述工具电极以预定的距离设置以产生电火花加工所述工件。  [0018] Further, the workpiece, the pulse power source, the brush and the tool electrode are electrically connected in sequence, and the workpiece and the tool electrode are disposed at a predetermined distance to generate an EDM workpiece. .
[0019] 进一步地, 所述脉冲电源的脉冲电压范围为 20~150V, 脉冲频率范围为 100~50[0019] Further, the pulse power supply has a pulse voltage range of 20 to 150V, and a pulse frequency range of 100 to 50.
00 Hz, 脉冲宽度范围为 0.2~100 s。 00 Hz, pulse width range is 0.2~100 s.
[0020] 进一步地, 一种超硬磨料镀层电极放电磨削复合加工方法, 用于对工件进行加 工, 包括以下加工步骤: [0020] Further, a superabrasive coating electrode discharge grinding composite processing method for processing a workpiece includes the following processing steps:
[0021] 准备步骤: 准备所述超硬磨料镀层电极放电磨削复合加工装置; [0021] preparation step: preparing the superabrasive coating electrode discharge grinding composite processing device;
[0022] 工件预置步骤: 将所述工件放置在合适的位置以配合所述超硬磨料镀层电极放 电磨削复合加工装置; [0022] a workpiece presetting step: placing the workpiece in a suitable position to cooperate with the superabrasive coating electrode discharge grinding composite processing device;
[0023] 加工步骤: 所述旋转驱动器驱动所述工具电极高速旋转, 所述移动驱动器驱动 所述旋转驱动器在空间移动, 所述工件、 所述工具电极和所述脉冲电源之间形 成放电回路, 所述电极片与所述工件之间产生微细电火花放电以侵蚀所述工件 , 所述磨粒切削所述工件。  [0023] processing step: the rotary drive drives the tool electrode to rotate at a high speed, the mobile drive drives the rotary drive to move in space, and a discharge circuit is formed between the workpiece, the tool electrode and the pulse power source, A fine electric spark discharge is generated between the electrode sheet and the workpiece to erode the workpiece, and the abrasive grain cuts the workpiece.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0024] 本发明提供的超硬磨料镀层电极放电磨削复合加工装置, 利用高效率的微细电 火花放电加工方法, 通过使用多个高速旋转的薄片电极片, 使多个薄片电极片 与工件之间产生微细电火花, 从而对工件进行放电加工。 在移动驱动器和旋转 驱动器的驱动下, 工具电极的电极片可在工件的深度进给方向上, 通过微细电 火花放电。  [0024] The superabrasive coating electrode electrode electric discharge grinding and processing device provided by the present invention uses a high-efficiency micro spark discharge machining method to make a plurality of laminar electrode sheets and workpieces by using a plurality of high-speed rotating sheet electrode sheets. A fine electric spark is generated to electrically discharge the workpiece. Driven by the mobile drive and the rotary drive, the electrode pads of the tool electrode can be discharged through a fine electric spark in the depth feed direction of the workpiece.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0025] 图 1是本发明实施例提供的一种超硬磨料镀层电极放电磨削复合加工装置的结 构示意图。  1 is a schematic structural view of a superabrasive coating electrode electrode electric discharge machining device according to an embodiment of the present invention.
[0026] 图 2是图 1的超硬磨料镀层电极放电磨削复合加工装置的工具电极的结构示意图 [0027] 图 3是图 1的 A处的局部放大图。 2 is a schematic structural view of a tool electrode of the superabrasive coating electrode electrode electric discharge grinding combined processing apparatus of FIG. 3 is a partial enlarged view of A of FIG. 1.
[0028] 图 4是图 1的超硬磨料镀层电极放电磨削复合加工装置的电极片的结构示意图。  4 is a schematic structural view of an electrode sheet of the superabrasive plating electrode discharge grinding composite processing apparatus of FIG. 1.
[0029] 图 5是图 1的超硬磨料镀层电极放电磨削复合加工装置的放电磨削部与极片导电 部的结构示意图。 5 is a schematic view showing the structure of a discharge grinding portion and a pole piece conductive portion of the superabrasive plating electrode discharge grinding combined processing apparatus of FIG. 1.
本发明的实施方式 Embodiments of the invention
[0030] 下面详细描述本发明的实施例, 所述实施例的示例在附图中示出, 其中自始至 终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。 下 面通过参考附图描述的实施例是示例性的, 旨在用于解释本发明, 而不能理解 为对本发明的限制。  The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals are used to refer to the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the invention and are not to be construed as limiting.
[0031] 在本发明的描述中, 需要理解的是, 术语"厚度"、 "上"、 "下"、 "垂直"、 "平行 "、 "底"、 "角"等指示的方位或位置关系为基于附图所示的方位或位置关系, 仅 是为了便于描述本发明和简化描述, 而不是指示或暗示所指的装置或元件必须 具有特定的方位、 以特定的方位构造和操作, 因此不能理解为对本发明的限制  [0031] In the description of the present invention, it is to be understood that the orientation or positional relationship of the terms "thickness", "upper", "lower", "vertical", "parallel", "bottom", "corner", etc. The orientation or the positional relationship based on the drawings is merely for the convenience of the description of the present invention and the description thereof, and is not intended to indicate or imply that the device or component referred to has a specific orientation, is constructed and operated in a specific orientation, and therefore cannot Understood as a limitation of the present invention
[0032] 在本发明中, 除非另有明确的规定和限定, 术语"安装"、 "连接"等术语应做广 义理解, 例如, 可以是固定连接, 也可以是可拆卸连接, 或成一体; 可以是机 械连接, 也可以是电连接; 可以是直接相连, 也可以通过中间媒介间接相连, 可以是两个元件内部的连通或两个元件的相互作用关系。 [0032] In the present invention, the terms "installation", "connection" and the like should be understood broadly, and may be, for example, a fixed connection, a detachable connection, or an integral, unless otherwise specifically defined and defined; It can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, which can be the internal communication of two elements or the interaction of two elements.
[0033] 请参阅图 1至图 2, 本发明所提供的超硬磨料镀层电极放电磨削复合加工装置 10 0用来加工工件 90, 包括: 工具电极 20、 用于提供脉冲电并与所述工件 90电性连 接且与所述工具电极 20电性连接的脉冲电源 80、 用于驱动所述工具电极 20旋转 的旋转驱动器 10以及用于驱动所述旋转驱动器 10在空间内移动的移动驱动器 ( 图中未画) 。 本实施例中所述移动驱动器为具有三轴联动系统的数控磨床 (图 中未画) , 所述旋转驱动器 10为一端转接于所述数控磨床的旋转轴 10, 旋转轴 1 0的另一端连接在所述工具电极 20上。 所述工具电极 20包括用于产生电火花以加 工所述工件 90的多个电极片 21以及用于夹持多个所述电极片 21并与所述旋转轴 1 0连接的夹持组件 30, 所述夹持组件 30电性连接所述脉冲电源 80, 所述旋转轴 10 通过所述夹持组件 30驱动所述电极片 21转动, 所述电极片 21包括若干由导电材 料制成并与所述夹持组件 30电性连接的极片本体 211以及若干由超硬材料制成且 凸设在所述极片本体 211两侧表面的磨粒 212。 [0033] Referring to FIG. 1 to FIG. 2, the superabrasive coating electrode electrode electric discharge machining device 10 for machining the workpiece 90 includes: a tool electrode 20 for supplying pulse electric energy and a pulse power source 80 electrically connected to the workpiece 90 and electrically connected to the tool electrode 20, a rotary driver 10 for driving the rotation of the tool electrode 20, and a mobile driver for driving the rotary drive 10 to move in space ( Not shown in the picture). In this embodiment, the mobile drive is a numerically controlled grinding machine (not shown) having a three-axis linkage system, and the rotary drive 10 is one end of the rotary shaft 10 of the numerically controlled grinding machine, and the other end of the rotary shaft 10 Connected to the tool electrode 20. The tool electrode 20 includes a plurality of electrode sheets 21 for generating an electric spark to machine the workpiece 90 and for clamping a plurality of the electrode sheets 21 and with the rotating shaft 1 The clamping assembly 30 is electrically connected to the pulse power source 80. The rotating shaft 10 drives the electrode sheet 21 to rotate by the clamping assembly 30. The electrode sheet 21 includes several A pole piece body 211 made of a conductive material and electrically connected to the clamping assembly 30 , and a plurality of abrasive particles 212 made of a super-hard material and protruding from both sides of the pole piece body 211.
[0034] 具体地, 工件 90的材料可以是导电材料 (例如: 钢、 硬质合金等, ) , 也可以 是不导电材料 (例如: 玻璃、 蓝宝石等) , 当工件 90为不导电材料吋, 需对工 件 90进行诱导放电。 优选地, 本实施例中工件 90的材料为导电材料。 所述脉冲 电源 80的脉冲电压范围为 20~150V, 脉冲频率范围为 100〜5000 Hz, 脉冲宽度范 围为 0.2〜100 μ8。 优选地, 本实施例中脉冲电源 80的脉冲电压为 50V, 脉冲频率 为 2000 Hz, 脉冲宽度为 50 s。 [0034] Specifically, the material of the workpiece 90 may be a conductive material (for example: steel, cemented carbide, etc.), or a non-conductive material (for example, glass, sapphire, etc.), when the workpiece 90 is a non-conductive material, The workpiece 90 is subjected to induced discharge. Preferably, the material of the workpiece 90 in this embodiment is a conductive material. The pulse power supply 80 has a pulse voltage range of 20 to 150 V, a pulse frequency range of 100 to 5000 Hz, and a pulse width ranging from 0.2 to 100 μ 8 . Preferably, in the present embodiment, the pulse power supply 80 has a pulse voltage of 50 V, a pulse frequency of 2000 Hz, and a pulse width of 50 s.
[0035] 根据所述超硬磨料镀层电极放电磨削复合加工装置 100, 本发明实施例还提供 了一种放电磨削方法, 用于对工件 90进行加工, 包括以下加工步骤:  [0035] According to the superabrasive coating electrode discharge grinding composite processing apparatus 100, an embodiment of the present invention further provides a discharge grinding method for processing a workpiece 90, including the following processing steps:
[0036] 准备步骤: 准备所述超硬磨料镀层电极放电磨削复合加工装置 100;  [0036] Preparation steps: preparing the superabrasive coating electrode discharge grinding composite processing device 100;
[0037] 工件预置步骤: 将所述工件 90放置在合适的位置以配合所述超硬磨料镀层电极 放电磨削复合加工装置 100放电加工;  [0037] a workpiece presetting step: placing the workpiece 90 in a suitable position to cooperate with the superabrasive coating electrode discharge grinding composite processing device 100 for electrical discharge machining;
[0038] 加工步骤: 所述旋转轴 10驱动所述工具电极 20高速旋转, 所述移动驱动器驱动 所述旋转轴 10在空间移动, 所述工件 90、 所述工具电极 20和所述脉冲电源 80之 间形成放电回路, 所述电极片 21与所述工件 90之间产生微细电火花放电以侵蚀 所述工件 90, 所述磨粒 212切削所述工件 90。 通过电极片 21沿深度进给方向 a通过 微细电火花放电加工侵蚀所述工件 90, 磨粒 212沿高速旋转的电极片 21两侧微切 削加工所述工件 90, 从而可以在工件 90的表面高效率、 一次并排加工出多个光 滑的微沟槽阵列结构, 从而实现导电硬脆材料的电火花放电磨削复合加工, 可 以极大提高放电磨削效率和放电磨削质量。  [0038] processing step: the rotating shaft 10 drives the tool electrode 20 to rotate at a high speed, the moving drive drives the rotating shaft 10 to move in space, the workpiece 90, the tool electrode 20 and the pulse power source 80 A discharge circuit is formed between the electrode sheets 21 and the workpiece 90 to generate a fine electric spark discharge to erode the workpiece 90, and the abrasive particles 212 cut the workpiece 90. The workpiece 90 is etched by the fine electric discharge machining in the depth feed direction a by the electrode sheet 21, and the abrasive particles 212 micro-cut the workpiece 90 on both sides of the electrode sheet 21 rotating at a high speed, so that the surface of the workpiece 90 can be high. Efficiency, a plurality of smooth micro-groove array structures are processed side by side, thereby achieving electrical discharge spark-grinding composite processing of conductive hard and brittle materials, which can greatly improve discharge grinding efficiency and discharge grinding quality.
[0039] 本发明实施例所提供的超硬磨料镀层电极放电磨削复合加工装置 100, 通过把 旋转轴 10安装在数控磨床上, 再利用高效率的微细电火花放电加工方法, 使多 个薄片电极片 21高速旋转, 优选地, 旋转轴 10的旋转速度 N为 1000〜5000转 /分 。 多个薄片电极片 21朝向工件 90的圆周侧表面与所述工件 90之间产生微细电火 花, 从而对工件 90进行电火花加工。 在数控磨床的三轴联动系统的带动下, 电 极片 21可在工件 90的深度进给方向 a上, 通过微细电火花放电加工去除工件 90的 材料, 进给速度的范围为 10~200mm/min, 进给深度的范围为 10〜100μηι。 优选 地, 本实施例中电极片 21的旋转速度 Ν为 1000转 /分, 进给深度为 50μηι, 进给速 度 a为 20mm/min° [0039] The superabrasive coating electrode discharge grinding combined processing apparatus 100 provided by the embodiment of the present invention, by mounting the rotating shaft 10 on a numerically controlled grinding machine, and using a high-efficiency micro-discharge electric discharge machining method to make a plurality of thin sheets The electrode sheet 21 is rotated at a high speed, and preferably, the rotational speed N of the rotary shaft 10 is 1000 to 5000 rpm. The plurality of sheet electrode sheets 21 are caused to generate a fine electric spark between the circumferential side surface of the workpiece 90 and the workpiece 90, thereby performing electric discharge machining on the workpiece 90. Driven by the three-axis linkage system of the CNC grinding machine, electricity The pole piece 21 can remove the material of the workpiece 90 by the fine electric discharge machining in the depth feed direction a of the workpiece 90, the feed speed is in the range of 10 to 200 mm/min, and the feed depth is in the range of 10 to 100 μm. Preferably, in this embodiment, the rotational speed Ν of the electrode sheet 21 is 1000 rpm, the feed depth is 50 μm, and the feed speed a is 20 mm/min.
[0040] 同吋在电极片 21的两侧表面上凸设的若干磨粒 212对工件 90进行微切削, 进一 步加工工件 90。 这样, 通过放电和磨削这种复合加工可以在工件 90的表面高效 和高精度的加工出多个微阵列结构 (图未画) 。 所述微阵列结构可以为微沟槽 阵列结构 91, 微沟槽阵列结构 91的沟槽横截面形状可以为矩形、 梯形或 V形, 其 中沟槽的宽度范围为 10~800μηι, 相邻沟槽之间的间距范围为 20~500μηι, 沟槽的 槽深范围为 10~100μηι, 所加工的微沟槽阵列结构 91的表面粗糙度 R α 的范围为 0.01~0.5μηι。 优选地, 本实施例中所加工出的微沟槽阵列结构 91为梯形 沟槽, 所述梯形沟槽宽度为 535μηι, 所述相邻梯形沟槽之间的间距为 125μηι, 所 述梯形沟槽深度为 45μηι。 [0040] A plurality of abrasive grains 212 projecting on both side surfaces of the electrode sheet 21 micro-cut the workpiece 90 to further process the workpiece 90. Thus, by the composite processing of discharge and grinding, a plurality of microarray structures (not shown) can be efficiently and accurately processed on the surface of the workpiece 90. The microarray structure may be a micro-trench array structure 91. The groove cross-sectional shape of the micro-trench array structure 91 may be rectangular, trapezoidal or V-shaped, wherein the width of the groove ranges from 10 to 800 μm, adjacent trenches. The spacing between the grooves ranges from 20 to 500 μm, and the groove depth of the grooves ranges from 10 to 100 μm. The surface roughness R α of the processed micro-groove array structure 91 ranges from 0.01 to 0.5 μm. Preferably, the micro-trench array structure 91 processed in this embodiment is a trapezoidal trench, the trapezoidal trench width is 535 μm, and the spacing between the adjacent trapezoidal trenches is 125 μm, the trapezoidal trench The depth is 45μηι.
[0041] 进一步地, 所述极片本体 211为环状, 所述极片本体 211包括由内往外设置的供 所述夹持组件 30夹持的内环部 2111以及连接在所述内环部 2111上且与所述工件 9 0之间产生电火花的外环部 2112, 若干所述磨粒 212设置于所述外环部 2112两侧 的环面。 所述内环部 2111套设在所述旋转轴 10上且随所述旋转轴 10—起高速转 动。 本实施例中极片本体 211为由铜箔制成的普通薄极片, 其厚度范围为 5~800μ m。  [0041] Further, the pole piece body 211 is annular, and the pole piece body 211 includes an inner ring portion 2111 disposed from the inside to the outside for clamping by the clamping assembly 30, and is connected to the inner ring portion. An outer ring portion 2112 that generates an electric spark between the workpiece and the workpiece 90, and a plurality of the abrasive grains 212 are disposed on the annular surfaces on both sides of the outer ring portion 2112. The inner ring portion 2111 is sleeved on the rotating shaft 10 and rotates at a high speed with the rotating shaft 10. In the present embodiment, the pole piece body 211 is a conventional thin pole piece made of copper foil, and has a thickness ranging from 5 to 800 μm.
[0042] 进一步地, 所述磨粒 212与工件 90相接触且其磨削所述工件 90的磨削点至所述 外环部 2112的环面的距离相等, 若干所述磨粒 212呈环状且等高度均匀分布于所 述外环部 2112两侧的环面上。  [0042] Further, the abrasive particles 212 are in contact with the workpiece 90 and the grinding points of the workpiece 90 are ground to the annulus of the outer ring portion 2112 at equal distances, and the plurality of abrasive grains 212 are ring-shaped. And equal heights are evenly distributed on the annular faces on both sides of the outer ring portion 2112.
[0043] 具体地, 磨粒 212是采用电镀工艺电镀在所述外环部 2112的环面上, 磨粒 212的 材料可以为金刚石或立方氮化硼等超硬磨料, 所述磨粒 212的粒度范围为 1000 5 000目, 所述磨粒 212设置在外环部 2112的位置至所述极片本体 211的圆周边的距 离范围为 0~10mm。 优选地, 本实施例中磨粒 212为金刚石磨料, 其粒度为 3000 目, 磨粒 212至所述极片本体 211的圆周边的距离的最小值为 6mm。 磨粒 212朝外 凸起设置能对工件 90进行磨削加工, 从而进一步提高微沟槽阵列结构 91的表面 精度。 [0043] Specifically, the abrasive particles 212 are plated on the annular surface of the outer ring portion 2112 by an electroplating process, and the material of the abrasive particles 212 may be a super hard abrasive such as diamond or cubic boron nitride, and the abrasive particles 212 The particle size ranges from 1000 to 5 000 mesh, and the abrasive particles 212 are disposed at a position ranging from the position of the outer ring portion 2112 to the circumference of the pole piece body 211 by a range of 0 to 10 mm. Preferably, in the present embodiment, the abrasive particles 212 are diamond abrasives having a particle size of 3000 mesh, and the minimum distance of the abrasive particles 212 to the circumference of the pole piece body 211 is 6 mm. The abrasive particles 212 are outwardly convexly disposed to grind the workpiece 90, thereby further enhancing the surface of the microgrooved array structure 91. Precision.
[0044] 请同吋参阅图 3至图 4, 进一步地, 所述工具电极 20还包括由导电材料制成且设 置在相邻的所述极片本体 211之间的垫片 22。 所述垫片 22为圆环形且位于两相邻 的所述极片本体 211的所述内环部 2111之间。 所述垫片 22的直径小于所述极片本 体 211的直径。 具体地, 垫片 22套设于所述旋转轴 10上并电性连通相邻的所述极 片本体 211, 垫片 22的厚度范围为 20~500μηι。 极片本体 211的直径比垫片 22的直 径大 0.5~5mm。 优选地, 本实施例中极片本体 211的直径比垫片 22的直径大 lmm  Referring to FIG. 3 to FIG. 4, further, the tool electrode 20 further includes a spacer 22 made of a conductive material and disposed between the adjacent pole piece bodies 211. The spacer 22 is annular and is located between the inner ring portions 2111 of the two adjacent pole piece bodies 211. The spacer 22 has a diameter smaller than the diameter of the pole piece body 211. Specifically, the spacer 22 is sleeved on the rotating shaft 10 and electrically connected to the adjacent pole body 211. The thickness of the spacer 22 ranges from 20 to 500 μm. The diameter of the pole piece body 211 is 0.5 to 5 mm larger than the diameter of the spacer 22. Preferably, the diameter of the pole piece body 211 in this embodiment is larger than the diameter of the spacer 22 by 1 mm.
[0045] 请同吋参阅图 5, 进一步地, 所述极片本体 211的数量为三个, 在其它实施例中 可以根据实际需要来设定极片本体 211的数量。 在本实施例中三个极片主体 211 的厚度均优选为 500μηι。 三个所述极片本体 211的所述内环部 2111以及设置在相 邻的所述内环部 2111之间的垫片 22共同形成极片导电部 70; 三个所述极片本体 2 11的所述外环部 2112以及均匀设置在所述外环部 2112两侧环面的所述磨粒 212共 同形成放电磨削部 60。 通过电性连通所述极片导电部 70, 从而使放电磨削部 60 与工件 90之间可以产生电火花, 可以一次并列加工出三个微沟槽阵列结构 91, 极大的提高了加工效率。 Referring to FIG. 5, further, the number of the pole piece bodies 211 is three. In other embodiments, the number of the pole piece bodies 211 can be set according to actual needs. In the present embodiment, the thickness of each of the three pole piece main bodies 211 is preferably 500 μm. The inner ring portion 2111 of the three pole piece bodies 211 and the spacer 22 disposed between the adjacent inner ring portions 2111 together form a pole piece conductive portion 70; three of the pole piece bodies 2 11 The outer ring portion 2112 and the abrasive grains 212 uniformly disposed on the annular surfaces of the outer ring portions 2112 together form the electric discharge grinding portion 60. By electrically connecting the pole piece conductive portion 70, an electric spark can be generated between the discharge grinding portion 60 and the workpiece 90, and three micro groove array structures 91 can be processed in parallel at a time, which greatly improves processing efficiency. .
[0046] 进一步地, 任意相邻的所述电极片 21以及位于该相邻的所述电极片 21之间的所 述垫片 22共同合围形成环形磨削槽 50, 所述磨削槽 50的槽宽与所述垫片 22的厚 度相等。 在本实施例中磨削槽 50的槽宽范围为 20~500μηι, 数量为两个。 工具电 极 20在磨削过程中的碎屑可以通过两个所述磨削槽 50排出。  [0046] Further, any adjacent electrode sheets 21 and the spacers 22 located between the adjacent electrode sheets 21 are collectively formed to form an annular grinding groove 50, and the grinding groove 50 is The groove width is equal to the thickness of the spacer 22. In the present embodiment, the groove width of the grinding groove 50 ranges from 20 to 500 μm, and the number is two. The debris of the tool electrode 20 during the grinding process can be discharged through the two grinding grooves 50.
[0047] 进一步地, 所述夹持组件 30包括电性夹持于所述极片导电部 70两侧的砂轮夹具  [0047] Further, the clamping assembly 30 includes a grinding wheel clamp electrically clamped on both sides of the pole piece conductive portion 70.
32以及夹持于所述砂轮夹具 32两侧的法兰夹具 31。 所述砂轮夹具 32从极片导电 部 70的两侧向其中间夹紧多个所述电极片 21以及垫片 22, 使得垫片 22与电极片 2 1之间保持良好的电性连接。  32 and a flange clamp 31 clamped to both sides of the grinding wheel clamp 32. The grinding wheel holder 32 clamps a plurality of the electrode sheets 21 and the spacers 22 from the both sides of the pole piece conductive portion 70 therebetween, so that a good electrical connection is maintained between the spacers 22 and the electrode sheets 21.
[0048] 进一步地, 所述砂轮夹具 32包括电性夹持于所述极片导电部 70—侧的所述内环 部 2111的第一砂轮 321以及与所述第一砂轮 321相对设置并电性夹持于所述极片 导电部 70另一侧的所述内环部 2111的第二砂轮 322。 所述第一砂轮 321与所述第 二砂轮 322均具有良好的导电性, 能很好的电性连通所述极片导电部 70。 第一砂 轮 321和第二砂轮 322分别套设于所述旋转轴 10上且相向压紧所述极片导电部 70 , 使极片导电部 70固定于所述旋转轴 10上。 [0048] Further, the grinding wheel clamp 32 includes a first grinding wheel 321 electrically clamped to the inner ring portion 2111 on the side of the pole piece conductive portion 70, and is disposed opposite to the first grinding wheel 321 and electrically The second grinding wheel 322 of the inner ring portion 2111 is clamped to the other side of the pole piece conductive portion 70. Both the first grinding wheel 321 and the second grinding wheel 322 have good electrical conductivity, and can electrically connect the pole piece conductive portion 70 well. First sand The wheel 321 and the second grinding wheel 322 are respectively sleeved on the rotating shaft 10 and pressed against the pole piece conductive portion 70 to fix the pole piece conductive portion 70 to the rotating shaft 10.
[0049] 进一步地, 所述第一砂轮 321的直径小于所述极片本体 211的直径, 所述第二砂 轮 322的直径小于所述极片本体 211的直径, 以便工具电极 20能从放电磨削部 60 的两侧对工件 90进行磨削加工。 所述极片本体 211的直径比第一砂轮 321和第二 砂轮 322的直径大 0.5~5mm。 在本实施例中, 第一砂轮 321、 第二砂轮 322以及垫 片 22三者的直径相等。 极片主体 211的直径比第一砂轮 321的直径大 lmm, 同样 , 比第二砂轮 322的直径也大 lmm。  [0049] Further, the diameter of the first grinding wheel 321 is smaller than the diameter of the pole piece body 211, and the diameter of the second grinding wheel 322 is smaller than the diameter of the pole piece body 211, so that the tool electrode 20 can be removed from the discharge mill The workpiece 90 is ground on both sides of the cut portion 60. The diameter of the pole piece body 211 is larger than the diameter of the first grinding wheel 321 and the second grinding wheel 322 by 0.5 to 5 mm. In the present embodiment, the diameters of the first grinding wheel 321, the second grinding wheel 322, and the spacer 22 are equal. The diameter of the pole piece main body 211 is larger than the diameter of the first grinding wheel 321 by 1 mm, and is also larger than the diameter of the second grinding wheel 322 by 1 mm.
[0050] 所述法兰夹具 31包括夹持于所述第一砂轮 321—侧的紧固法兰 311以及与所述紧 固法兰 311相对设置并夹持于所述第二砂轮 322—侧的定位法兰 312。 所述紧固法 兰 311与所述定位法兰 312分别相向夹紧所述第一砂轮 321与所述第二砂轮 322。  [0050] The flange clamp 31 includes a fastening flange 311 clamped to the side of the first grinding wheel 321 and is disposed opposite to the fastening flange 311 and clamped to the second grinding wheel 322. Positioning flange 312. The fastening flange 311 and the positioning flange 312 respectively clamp the first grinding wheel 321 and the second grinding wheel 322.
[0051] 进一步地, 所述紧固法兰 311与所述定位法兰 312均套设并固定于所述旋转轴 10 上。 所述紧固法兰 311、 所述第一砂轮 321、 所述极片导电部 70、 所述第二砂轮 3 22以及所述定位法兰 312依次并列设置且在所述旋转轴 10的带动下绕所述旋转轴 10的中心轴线旋转。  [0051] Further, the fastening flange 311 and the positioning flange 312 are sleeved and fixed on the rotating shaft 10. The fastening flange 311, the first grinding wheel 321, the pole piece conductive portion 70, the second grinding wheel 322 and the positioning flange 312 are arranged in parallel and are driven by the rotating shaft 10 Rotating about a central axis of the rotating shaft 10.
[0052] 进一步地, 所述超硬磨料镀层电极放电磨削复合加工装置 100还包括电刷 40。  [0052] Further, the superabrasive coating electrode discharge grinding composite processing apparatus 100 further includes a brush 40.
本实施例中电刷 40为石墨电刷。 所述电刷 40—端电性连接所述脉冲电源 80, 所 述电刷 40另一端滑动接触且电性连接于所述第一砂轮 321朝向所述紧固法兰 311 的表面上。 所述第一砂轮 321绕旋转轴 10的中心轴线旋转吋, 电刷 40在第一砂轮 321的表面上滑动且与第一砂轮 321保持电性连接, 以便放电磨削部 60能持续与 所述工件 90之间产生电火花。  In the embodiment, the brush 40 is a graphite brush. The brush 40 is electrically connected to the pulse power source 80. The other end of the brush 40 is in sliding contact and electrically connected to the first grinding wheel 321 toward the surface of the fastening flange 311. The first grinding wheel 321 rotates about the central axis of the rotating shaft 10, and the brush 40 slides on the surface of the first grinding wheel 321 and is electrically connected with the first grinding wheel 321 so that the electric discharge grinding portion 60 can continue to An electric spark is generated between the workpieces 90.
[0053] 进一步地, 所述工件 90、 所述脉冲电源 80、 所述石墨电刷 40以及所述工具电极 20依次电性连接且所述工件 90与所述工具电极 20以合适的距离设置以便产生的 电火花满足对工件 90的加工需求。  [0053] Further, the workpiece 90, the pulse power source 80, the graphite brush 40, and the tool electrode 20 are electrically connected in sequence, and the workpiece 90 and the tool electrode 20 are disposed at an appropriate distance so as to be The resulting spark meets the processing requirements of the workpiece 90.
[0054] 以下结合本实施例的具体结构和附图, 对本发明实施例所提供的超硬磨料镀层 电极放电磨削复合加工装置的工作过程进行描述:  [0054] The working process of the superabrasive coating electrode discharge grinding composite processing device provided by the embodiment of the present invention will be described below with reference to the specific structure and the accompanying drawings of the embodiment:
[0055] 紧固法兰 321与定位法兰 312相对设置并套设和固定于旋转轴 10的一端, 旋转轴 10的另一端转接于数控磨床, 数控磨床具有的三轴联动系统使得旋转轴 10在旋 转的同吋还能在空间上按预定轨迹运行。 [0055] The fastening flange 321 is disposed opposite to the positioning flange 312 and sleeved and fixed to one end of the rotating shaft 10, and the other end of the rotating shaft 10 is transferred to the numerical control grinding machine, and the three-axis linkage system of the numerical control grinding machine makes the rotating shaft 10 in rotation The rotating peers can also run in a predetermined trajectory in space.
[0056] 把三个薄片电极片 21安装在砂轮夹具 32的第一砂轮 321和第二砂轮 322之间, 三 个电极片 21间隔设置, 相邻的电极片 21之间设置垫片 22。 然后把砂轮夹具 32连 同电极片 21和垫片 22—起套设于旋转轴 10的一端且固定于紧固法兰 321与定位法 兰 312之间。  [0056] Three sheet electrode sheets 21 are mounted between the first grinding wheel 321 and the second grinding wheel 322 of the grinding wheel holder 32, three electrode sheets 21 are spaced apart, and a gasket 22 is disposed between the adjacent electrode sheets 21. Then, the grinding wheel holder 32 is sleeved with the electrode sheet 21 and the spacer 22 at one end of the rotating shaft 10 and fixed between the fastening flange 321 and the positioning flange 312.
[0057] 紧固法兰 321朝定位法兰 322的方向轴向压紧第一砂轮 321和第二砂轮 322, 从而 达到固定三个电极片 21的目的。  [0057] The fastening flange 321 axially presses the first grinding wheel 321 and the second grinding wheel 322 toward the positioning flange 322, thereby achieving the purpose of fixing the three electrode sheets 21.
[0058] 石墨电刷 40—端电性连接脉冲电源 80的一极, 另一端滑动且电性连接第一砂轮 321, 导电工件 90电性连接脉冲电源 80的另一极。  [0058] The graphite brush 40 is electrically connected to one pole of the pulse power source 80, and the other end is slid and electrically connected to the first grinding wheel. The conductive workpiece 90 is electrically connected to the other pole of the pulse power source 80.
[0059] 三个电极片 21随旋转轴 10高速旋转的同吋, 在数控磨床三轴数控联动系统的驱 动下, 三个电极片 21沿设定的数控加工行走轨迹运动, 高速旋转的电极片 21与 工件 90之间产生微细电火花放电, 沿深度进给方向 a通过微细电火花放电加工去 除工件 90的表面材料, 电极片 21的外环部 2112通过超硬磨粒 212进一步微切削去 除工件 90的材料, 从而在工件 90的表面一次成形、 并排高效加工出多条光滑的 微沟槽阵列结构 91。  [0059] The three electrode sheets 21 rotate with the rotating shaft 10 at a high speed, and driven by the three-axis numerical control linkage system of the numerical control grinding machine, the three electrode sheets 21 move along the set numerical control machining walking track, and the high-speed rotating electrode sheets A fine electric spark discharge is generated between the workpiece 21 and the workpiece 90, and the surface material of the workpiece 90 is removed by micro-discharge machining along the depth feed direction a. The outer ring portion 2112 of the electrode sheet 21 is further micro-cutted by the superabrasive particle 212 to remove the workpiece. The material of 90, thereby forming a plurality of smooth micro-groove array structures 91 at a time on the surface of the workpiece 90 and side by side.
[0060] 本发明实施例所提供的超硬磨料镀层电极放电磨削复合加工装置 100适应性比 较广泛, 可以在任意工件 90的表面加工出多种三维微阵列结构 91。 电极片 21的 损耗较少, 不需要频繁更换电极片 21, 而且高速旋转的电极片 21能对自身的形 状和圆度进行自我修复, 电镀有磨粒 212的极片本体 211的更换也便捷, 加工效 率和加工精度高, 可以一次成形并排加工出多条微沟槽阵列结构 91, 极大提高 加工效率, 电极片 21上的磨粒 212的磨削作用能保证所加工的微沟槽阵列结构 91 具有很高的加工精度。  The superabrasive coating electrode discharge grinding composite processing device 100 provided by the embodiments of the present invention has a wide adaptability, and a plurality of three-dimensional microarray structures 91 can be processed on the surface of any workpiece 90. The electrode sheet 21 has less loss, and the electrode sheet 21 does not need to be frequently replaced, and the electrode sheet 21 that rotates at a high speed can self-repair its shape and roundness, and the pole piece body 211 plated with the abrasive grains 212 is also easily replaced. The processing efficiency and the processing precision are high, and a plurality of micro-groove array structures 91 can be formed side by side to greatly improve the processing efficiency, and the grinding action of the abrasive grains 212 on the electrode sheet 21 can ensure the processed micro-groove array structure. 91 has high machining accuracy.
[0061] 以上所述仅为本发明的较佳实施例而已, 并不用以限制本发明, 凡在本发明的 精神和原则之内所作的任何修改、 等同替换和改进等, 均应包含在本发明的保 护范围之内。  The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalents, and improvements made within the spirit and scope of the present invention should be included in the present invention. Within the scope of protection of the invention.

Claims

权利要求书  Claim
[权利要求 1] 一种超硬磨料镀层电极放电磨削复合加工装置, 用于对工件进行加工 [Claim 1] A superabrasive coating electrode electrode electric discharge machining device for processing a workpiece
, 其特征在于, 所述超硬磨料镀层电极放电磨削复合加工装置包括工 具电极、 用于提供脉冲放电并与所述工件电线连接且与所述工具电极 电线连接的脉冲电源、 用于驱动所述工具电极旋转的旋转驱动器以及 用于驱动所述旋转驱动器在空间内移动的移动驱动器, 所述工具电极 包括用于产生电火花以加工所述工件的多个电极片以及用于夹持多个 所述电极片并与所述旋转驱动器连接的夹持组件, 所述夹持组件电线 连接所述脉冲电源, 所述旋转驱动器通过所述夹持组件驱动所述电极 片转动, 所述电极片包括若干由导电材料制成并与所述夹持组件电线 连接的极片本体以及若干由超硬材料制成且凸设在所述极片本体两侧 表面的磨粒。 The superabrasive plating electrode discharge grinding combined processing apparatus includes a tool electrode, a pulse power source for providing a pulse discharge and connected to the workpiece wire and connected to the tool electrode wire, and is used for a driving station. a rotary drive for rotating a tool electrode and a mobile drive for driving the rotary drive to move in a space, the tool electrode comprising a plurality of electrode sheets for generating an electric spark to machine the workpiece and for clamping a plurality of a clamping piece connected to the rotary driver, the clamping assembly wire is connected to the pulse power source, and the rotary driver drives the electrode piece to rotate by the clamping assembly, the electrode piece comprises A plurality of pole piece bodies made of a conductive material and electrically connected to the clamping assembly and a plurality of abrasive grains made of superhard material and protruding from both side surfaces of the pole piece body.
[权利要求 2] 根据权利要求 1所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述极片本体为环状, 所述极片本体包括由内往外设置的 供所述夹持组件夹持的内环部以及连接在所述内环部上且与所述工件 之间产生电火花的外环部, 若干所述磨粒设置于所述外环部两侧的环 面。  [Claim 2] The superabrasive plating electrode electrode electric discharge machining device according to claim 1, wherein: the pole piece body is annular, and the pole piece body includes a supply chamber disposed from the inside to the outside. An inner ring portion clamped by the clamping assembly, and an outer ring portion connected to the inner ring portion and generating an electric spark between the workpiece, and a plurality of the abrasive grains are disposed on the ring on both sides of the outer ring portion surface.
[权利要求 3] 根据权利要求 2所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 若干所述磨粒呈环状均匀分布于所述外环部两侧的环面且 所述磨粒的磨削点至所述外环部的环面的距离相等。  [Claim 3] The superabrasive coating electrode electrode electric discharge machining apparatus according to claim 2, wherein: the plurality of abrasive grains are annularly distributed uniformly on the toroids on both sides of the outer ring portion and The distance from the grinding point of the abrasive particles to the annulus of the outer ring portion is equal.
[权利要求 4] 根据权利要求 2所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述工具电极还包括由导电材料制成且设置在相邻的所述 极片本体之间的垫片。  [Claim 4] The superabrasive plating electrode discharge grinding combined processing apparatus according to claim 2, wherein: the tool electrode further comprises: the pole piece body made of a conductive material and disposed adjacent to The gasket between.
[权利要求 5] 根据权利要求 3所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述垫片为圆形且位于两相邻的所述极片本体的所述内环 部之间并电线连通两相邻的所述极片本体。  [Claim 5] The superabrasive coating electrode electrode electric discharge machining apparatus according to claim 3, wherein: the spacer is circular and located in the two adjacent pole piece bodies Two adjacent pole piece bodies are connected between the ring portions and the wires.
[权利要求 6] 根据权利要求 5所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述垫片的直径小于所述极片本体的直径。 根据权利要求 5所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述极片本体的数量为三个, 三个所述极片本体的所述内 环部以及设置在相邻的所述内环部之间的垫片共同形成极片导电部; 三个所述极片本体的所述外环部以及均匀设置在所述外环部两侧环面 的所述磨粒共同形成放电磨削部。 [Claim 6] The superabrasive plating electrode discharge grinding combined machining apparatus according to claim 5, wherein the spacer has a diameter smaller than a diameter of the pole piece body. The superabrasive plating electrode discharge grinding combined processing apparatus according to claim 5, wherein: the number of the pole piece bodies is three, and the inner ring portions of the three pole piece bodies are disposed at The spacers between the adjacent inner ring portions collectively form a pole piece conductive portion; the outer ring portions of the three pole piece bodies and the grinding evenly disposed on both sides of the outer ring portion The pellets together form a discharge grinding section.
根据权利要求 7所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述夹持组件包括电性夹持于所述极片导电部两侧的砂轮 夹具以及夹持于所述砂轮夹具两侧的法兰夹具。 The superabrasive coating electrode electrode electric discharge machining device according to claim 7, wherein: the clamping assembly comprises a grinding wheel clamp electrically clamped on both sides of the pole piece conductive portion and clamped in the same The flange clamps on both sides of the grinding wheel fixture.
根据权利要求 8所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述砂轮夹具包括电性夹持于所述极片导电部一侧的所述 内环部的第一砂轮以及与所述第一砂轮相对设置并电性夹持于所述极 片导电部另一侧的所述内环部的第二砂轮。 The superabrasive coating electrode electrode electric discharge machining apparatus according to claim 8, wherein: the grinding wheel jig includes a first portion of the inner ring portion electrically clamped to one side of the pole piece conductive portion. a grinding wheel and a second grinding wheel disposed opposite to the first grinding wheel and electrically clamped to the inner ring portion on the other side of the pole piece conductive portion.
根据权利要求 9所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述第一砂轮的直径小于所述极片本体的直径, 所述第二 砂轮的直径小于所述极片本体的直径。 The superabrasive coating electrode electrode electric discharge machining device according to claim 9, wherein: the diameter of the first grinding wheel is smaller than the diameter of the pole piece body, and the diameter of the second grinding wheel is smaller than the pole The diameter of the sheet body.
根据权利要求 9所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述法兰夹具包括夹持于所述第一砂轮一侧的紧固法兰以 及与所述紧固法兰相对设置并夹持于所述第二砂轮一侧的定位法兰。 根据权利要求 11所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述定位法兰旋转连接于所述旋转驱动器; 所述紧固法兰 、 所述第一砂轮、 所述极片导电部、 所述第二砂轮以及所述定位法兰 依次并列设置。 The superabrasive plating electrode discharge grinding combined machining apparatus according to claim 9, wherein: said flange clamp comprises a fastening flange clamped to one side of said first grinding wheel and said fastening The flange is oppositely disposed and clamped to the positioning flange on one side of the second grinding wheel. The apparatus of claim 11 , wherein: the positioning flange is rotatably coupled to the rotary drive; the fastening flange, the first grinding wheel, the The pole piece conductive portion, the second grinding wheel and the positioning flange are arranged in parallel.
根据权利要求 11所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述超硬磨料镀层电极放电磨削复合加工装置还包括电刷 , 所述电刷一端电线连接所述脉冲电源, 所述电刷另一端滑动接触且 电线连接于所述第一砂轮朝向所述紧固法兰的表面上。 The superabrasive coating electrode electrode electric discharge machining device according to claim 11, wherein: the superabrasive coating electrode electrode electric discharge machining device further comprises a brush, and one end of the electric wire is connected to the electric wire. a pulse power source, the other end of the brush is in sliding contact and the wire is connected to the surface of the first grinding wheel facing the fastening flange.
根据权利要求 13所述的超硬磨料镀层电极放电磨削复合加工装置, 其 特征在于: 所述工件、 所述脉冲电源、 所述电刷以及所述工具电极依 次电线连接且所述工件与所述工具电极以预定的距离设置以产生电火 花加工所述工件。 The superabrasive plating electrode discharge grinding combined processing apparatus according to claim 13, wherein: the workpiece, the pulse power source, the brush, and the tool electrode are Secondary wires are connected and the workpiece is placed at a predetermined distance from the tool electrode to produce EDM machining of the workpiece.
[权利要求 15] 根据权利要求 1至 14中任一项所述的超硬磨料镀层电极放电磨削复合 加工装置, 其特征在于: 所述脉冲电源的脉冲电压范围为 20~150V, 脉冲频率范围为 100~5000 Hz, 脉冲宽度范围为 0.2~100 s。  [Claim 15] The superabrasive plating electrode discharge grinding combined processing apparatus according to any one of claims 1 to 14, wherein: the pulse power source has a pulse voltage range of 20 to 150 V, and a pulse frequency range For 100~5000 Hz, the pulse width ranges from 0.2 to 100 s.
[权利要求 16] —种超硬磨料镀层电极放电磨削复合加工方法, 用于对工件进行加工 , 其特征在于, 包括以下加工步骤:  [Claim 16] A superabrasive coating electrode electrode electric discharge machining method for processing a workpiece, characterized by comprising the following processing steps:
准备步骤: 准备如权利要求 1至 15中任一项所述的超硬磨料镀层电极 放电磨削复合加工装置;  Preparation step: preparing a superabrasive coating electrode discharge grinding composite processing apparatus according to any one of claims 1 to 15;
工件预置步骤: 将所述工件放置在合适的位置以配合所述超硬磨料镀 层电极放电磨削复合加工装置;  Workpiece presetting step: placing the workpiece in a suitable position to cooperate with the superabrasive plating electrode discharge grinding composite processing device;
加工步骤: 所述旋转驱动器驱动所述工具电极高速旋转, 所述移动驱 动器驱动所述旋转驱动器在空间移动, 所述工件、 所述工具电极和所 述脉冲电源之间形成放电回路, 所述电极片与所述工件之间产生微细 电火花放电以侵蚀所述工件, 所述磨粒切削所述工件。  Processing step: the rotary drive drives the tool electrode to rotate at a high speed, the mobile drive drives the rotary drive to move in space, and a discharge circuit is formed between the workpiece, the tool electrode and the pulse power source, the electrode A fine electric spark discharge is generated between the sheet and the workpiece to erode the workpiece, and the abrasive particles cut the workpiece.
PCT/CN2017/102739 2017-09-21 2017-09-21 Superabrasive coated electrode discharge grinding composite machining device and method WO2019056266A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111168170B (en) * 2020-02-27 2021-04-02 常州工学院 Electrolytic grinding and milling device and method for group of narrow grooves
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373268A (en) * 1989-08-11 1991-03-28 Olympus Optical Co Ltd Grinding method and grinding grindstone
JPH07256559A (en) * 1994-03-23 1995-10-09 Toyo A Tec Kk Annular blade for slicing work and shaping of grinding wheel cutting edge part
JP2000126934A (en) * 1998-10-27 2000-05-09 Sharp Corp Grinding tool and manufacture of solar battery thereby
JP2004358585A (en) * 2003-06-03 2004-12-24 Japan Science & Technology Agency Electrode for electrochemical machining, and apparatus and method for electrochemical machining
CN1565786A (en) * 2003-07-07 2005-01-19 涂肇嘉 Combined material electrode for electrodischarge machining and is manufacturing method
CN101497142A (en) * 2009-01-07 2009-08-05 中国石油大学(华东) Electric spark milling and mechanical grinding composite machining tool electrode
CN105108248A (en) * 2015-09-02 2015-12-02 北京市电加工研究所 Stacking-type combined electrode for electrosparking of micro inner grooves of slow wave structure and manufacturing method of stacking-type combined electrode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1986000037A1 (en) * 1984-06-14 1986-01-03 Yugenkaisha Ohyojiki Kenkyujo Cutting and grinding method using conductive grinding wheel
JPS6371342A (en) * 1986-09-13 1988-03-31 Toyota Motor Corp Preparation of steering wheel core material made of frp
JP2893341B2 (en) * 1988-07-29 1999-05-17 戸田工業株式会社 Grindstone for electrodischarge grinding
JP5107733B2 (en) * 2008-01-23 2012-12-26 富士フイルム株式会社 Grinding apparatus and grinding method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0373268A (en) * 1989-08-11 1991-03-28 Olympus Optical Co Ltd Grinding method and grinding grindstone
JPH07256559A (en) * 1994-03-23 1995-10-09 Toyo A Tec Kk Annular blade for slicing work and shaping of grinding wheel cutting edge part
JP2000126934A (en) * 1998-10-27 2000-05-09 Sharp Corp Grinding tool and manufacture of solar battery thereby
JP2004358585A (en) * 2003-06-03 2004-12-24 Japan Science & Technology Agency Electrode for electrochemical machining, and apparatus and method for electrochemical machining
CN1565786A (en) * 2003-07-07 2005-01-19 涂肇嘉 Combined material electrode for electrodischarge machining and is manufacturing method
CN101497142A (en) * 2009-01-07 2009-08-05 中国石油大学(华东) Electric spark milling and mechanical grinding composite machining tool electrode
CN105108248A (en) * 2015-09-02 2015-12-02 北京市电加工研究所 Stacking-type combined electrode for electrosparking of micro inner grooves of slow wave structure and manufacturing method of stacking-type combined electrode

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