WO2019038012A1 - Unité de détection de particules munie d'un détecteur de particules présentant plusieurs capteurs de mesure et procédé de fonctionnement de l'unité de détection de particules - Google Patents

Unité de détection de particules munie d'un détecteur de particules présentant plusieurs capteurs de mesure et procédé de fonctionnement de l'unité de détection de particules Download PDF

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Publication number
WO2019038012A1
WO2019038012A1 PCT/EP2018/070172 EP2018070172W WO2019038012A1 WO 2019038012 A1 WO2019038012 A1 WO 2019038012A1 EP 2018070172 W EP2018070172 W EP 2018070172W WO 2019038012 A1 WO2019038012 A1 WO 2019038012A1
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WO
WIPO (PCT)
Prior art keywords
electrode
sensor
charge
sample gas
particle
Prior art date
Application number
PCT/EP2018/070172
Other languages
German (de)
English (en)
Inventor
Uwe Glanz
Radoslav Rusanov
Simon Genter
Andy Tiefenbach
Henrik Schittenhelm
Enno Baars
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2019038012A1 publication Critical patent/WO2019038012A1/fr

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/0656Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2247Sampling from a flowing stream of gas
    • G01N1/2252Sampling from a flowing stream of gas in a vehicle exhaust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0046Investigating dispersion of solids in gas, e.g. smoke
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
    • G01N27/70Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage

Definitions

  • Particle sensor unit with a multiple sensor having
  • the present invention relates to a particle sensor unit according to the
  • Such a particle sensor unit and such a method are known from EP 2 824 453 A1 (WO 2013/125181 A1).
  • the known particle sensor unit has a particle sensor and a
  • the particle sensor has a sample gas inlet, a
  • Sample gas outlet located between the sample gas inlet and the
  • Measuring gas outlet extending Meßgasströmungspfad, a corona discharge electrode, a ground electrode and a first sensor, which has at least one arranged in the Meßgasströmungspfad electrode.
  • the control unit is set up to detect current intensities of currents flowing via an electrode of the measuring sensor and to determine a concentration of particles prevailing in the measuring gas flow path as a function of the detected current intensities.
  • a particle sensor operating on a resistive principle has a very strong position on the market.
  • the operation of this sensor is based on the formation of conductive soot paths between two interdigital electrodes and an evaluation of a rise time of the current at applied voltage as a measure of the soot concentration.
  • the mass concentration (mg / m 3 ) is measured. The calculation of the number concentration is at this
  • the sensor is periodically regenerated by being brought to at least 700 ° C by an integral heating element which causes the soot deposits to burn away.
  • Health hazards are more critical. It should be noted in particular that especially small particles, which due to their very small mass (m ⁇ r 3 ) only a small proportion of the total mass, can be particularly critical, because they can penetrate deeply into the human body due to their small size , It is foreseeable that the legislation will require the use of particle sensors suitable for measuring the number concentration as soon as acceptable particle sensors are available on the market from their detection performance and price.
  • the particle sensor known from EP 2 824 453 A1 (WO 2013/125181 A1) mentioned at the beginning uses a charge measurement principle for detecting the particle concentration.
  • the (soot) particles are charged via a corona discharge.
  • a corona discharge is an electrical discharge in an initially nonconducting medium, in which free charge carriers are generated by ionization of constituents of the medium.
  • the charging of the particles takes place by adhesion of ions. Subsequently, the electric charge of this
  • control device is adapted to charge an electrode of the first sensor to a first potential and an electrode of the second sensor to a second, higher potential, and that the controller is adapted to current levels of an electrode of the first Sensor's flowing currents and currents of over one
  • the operating method according to the invention is characterized in that an electrode of the first sensor is charged to a first potential and an electrode of a second sensor, which is arranged in the sample gas flow path downstream of the first sensor, is charged to a second, higher potential, current levels of and a concentration of particles transported with the sample gas of a size class determined by the potentials as a function of the current intensity of a current flowing via the one electrode of the second sensor Current is determined.
  • an electrode of the first sensor is charged to a first potential and an electrode of a second sensor, which is arranged in the sample gas flow path downstream of the first sensor, is charged to a second, higher potential, current levels of and a concentration of particles transported with the sample gas of a size class determined by the potentials as a function of the current intensity of a current flowing via the one electrode of the second sensor Current is determined.
  • this electrode By charging an electrode of the first probe to the first potential, this electrode sucks light charged particles from the charged particle stream, while heavier charged particles are not aspirated due to their inertia.
  • this electrode By charging an electrode of the second probe located in the sample gas flow path downstream of the first probe to a second, higher potential, this electrode also aspirates heavier particles from the charged particle stream.
  • the current intensity of the extracted particles and / or the current intensity of the charged particles passing past the respective electrode thus permits statements about the concentration of differently sized particles in the measurement gas, or about a distribution of the differently sized particles transported with the measurement gas to different ones
  • Particle size classes whose limit depends on the set potentials.
  • a preferred embodiment of the particle sensor unit is characterized in that the first probe has a first pair of electrodes comprising a first charge collector electrode and a first charge detection electrode different from the first charge collector electrode, and the second sensor comprises a second pair of electrodes from a second charge collector. Electrode and a second charge detection electrode different from the second charge trapping electrode.
  • the function of sucking the charged particles and measuring the current of non-sucked particles are distributed to two different electrodes. This can have advantages for the accuracy of the measurement because electrical properties of the charge trapping electrode may change due to its attractive effect on the charged particles and the resulting deposition of particles. This effect does not occur with the charge-receiving electrodes.
  • Sample gas flow path is disposed downstream of the first charge trapping electrode in the Meßgasströmungspfad, and that the second
  • Charge detection electrode is arranged in the sample gas flow path downstream of the second charge trapping electrode, wherein the second
  • Charge catcher electrode between the first charge detection electrode and the second charge detection electrode is arranged.
  • the desired effect occurs that the first charge-detecting electrode measures the charged particles passing the first charge-trapping electrode larger than one through the charged charge particle
  • Potential of the first charge catcher electrode are defined first minimum size. This applies analogously to the second charge-detecting electrode and the second charge-trapping electrode, which preferably allows particles to fly past, which are larger than a second minimum size, wherein the second minimum size is greater than the first minimum size, so that the first charge detection electrode and measure the second charge detection electrode size-selectively.
  • control unit is set up to form a difference between the currents flowing through the charge-detecting electrodes and to assign the difference to a concentration of particles of a specific particle size, the particle size being different from the potentials of the first
  • Charge trap electrode and the second charge collector electrode is dependent.
  • This embodiment allows a measurement of the concentration of particles whose size is in a size class dependent on the potentials.
  • a further preferred embodiment is characterized in that the first measuring sensor consists of a first single electrode, and that the second measuring sensor consists of a second single electrode. This embodiment has the advantage of a simpler structure, the
  • control unit is set up to a current intensity of the currents flowing through the one electrode of the second sensor
  • the particle size of the potentials of the first single electrode and the second single electrode is dependent. Similar to the probes with separate charge trapping electrode and
  • Charge detection electrode also allows this embodiment, a measurement of the concentration of particles whose size is in a dependent of the potentials size class. For the process characteristics, the same advantages that result in the respective analog device aspects result.
  • Figure 1 shows the technical environment of the invention in the form of a
  • a particle sensor unit having a particle sensor and a controller
  • Figure 2 shows a first embodiment of an inventive
  • FIG. 3 shows a sequence of step-like rising potentials of electrodes of a particle sensor of a particle sensor unit according to the invention
  • FIG. 4 shows measuring signals from electrodes of measuring sensors of electrodes of a particle sensor of a particle sensor unit according to the invention
  • FIG. 5 shows a histogram for the representation of the size distribution of
  • Figure 6 shows a second embodiment of an inventive
  • FIG. 7 shows an optional heater element
  • FIG. 8 shows an embodiment of a method according to the invention in the form of a flow chart.
  • Figure 1 shows a particle sensor unit 10, a
  • Particle sensor 12 and a controller 14 which is connected to a wire harness 16 to the particle sensor 12.
  • the particle sensor 12 includes a protective tube assembly having an inner metallic tube 18 and an outer metallic tube 20 and a first end 24 and a second end 26.
  • the protective tube arrangement protrudes with its first end 24 transversely into a flow of sample gas 22 through a tube.
  • the second end 26 of the protective tube arrangement is opposite the first end 24 in the direction of the longitudinal axis of the metallic tubes 18, 20.
  • the outer metallic tube 20 is optionally closed.
  • the outer metallic tube 20 may have an opening for injecting fresh air 28 at the second end 26 of the protective tube assembly.
  • the outer metallic tube 20 is preferably connected to ground, where the ground potential may be a local potential (e.g., an exhaust pipe) or a controller ground potential.
  • the inner metallic tube 18 is at the two ends 24, 26 of the
  • Protective tube arrangement open, and it is arranged concentrically in the outer metallic tube 20. It sticks out with its to the first end 24 of the
  • the outer diameter of the inner metallic tube 18 is so much smaller than the inner diameter of the outer metallic tube 20, which results between the two metallic tubes, an annular flow channel, can pass through the initially transverse to the protective tube assembly flowing sample gas into the protective tube assembly.
  • Width of the inner metallic tube 18 has. The across the
  • Sample gas outlet flowing sample gas creates a suction at the
  • Sample gas inlet enters the protective tube assembly and over the
  • Pipe 18 flows to the sample gas outlet. Due to this geometry, a laminar flow of sample gas sets in the interior of the inner metallic tube 18.
  • a sensor element 30 of the particle sensor 12 held by a carrier element
  • Sensor element 30 is connected via the cable harness 16 to the control unit 14.
  • FIG. 2 shows the sensor element 30 together with a wall section 18. 1 of the inner metallic tube 18 and elements of the control device 14
  • Wiring harness here is the sum of all connections between the control unit 14 and the sensor element 30.
  • the sample gas flow path leads from left to right and fills the space lying between the sensor element 30 and the wall section 18.1.
  • the sensor element 30 has a corona discharge electrode 32.
  • the inner metallic tube of which the wall section 18.1 can be seen in FIG. 2, serves as a ground electrode in the illustrated exemplary embodiment.
  • the sensor element 30 has a plurality of sensors, which in
  • Electrode 32 are arranged.
  • the first measuring sensor 34 has a first pair of electrodes comprising a first charge catcher electrode 34.1 and a charge detection electrode 34.2.
  • Each additional sensor has in the illustrated embodiment, a pair of electrodes from a charge trapping
  • the second measuring sensor 36 has, for example, a second pair of electrodes comprising a second charge-trapping electrode 36.1 and a second charge-detecting electrode 36.2, and the nth measuring sensor has an nth pair of electrodes comprising an nth charge-trapping electrode and an n-th probe. th charge detection electrode.
  • the first charge detection electrode 34.2 is in the measurement gas flow path downstream of the first charge trapping electrode 34.1 in FIG.
  • Charge catcher electrode 36.1 arranged.
  • the second charge trapping electrode 36.1 is arranged between the first charge detection electrode 34.2 and the second charge detection electrode 36.2.
  • the n - 2 further sensors are optionally present and each constructed as the first sensor 34 and the second sensor 36. In addition, they are also arranged in the flow direction of the sample gas behind the other and behind the second sensor 36. Apart from the mass realized by the inner metallic tube
  • Electrode said electrodes are arranged on a dielectric support member 38 of the sensor element 30 electrically isolated from each other.
  • the carrier element consists, for example, of a ceramic material and optionally has an embedded heater element or resting on a surface of the carrier element 39.
  • the controller 14 has a high voltage source 40 connected to the corona discharge electrode 32.
  • the voltage generated by the high voltage source 40 is so high that a corona discharge is triggered, with the free ions 42 are generated.
  • Corona discharge filled space area flowing particles 44 are charged by free ions 42 by these adhere to the particles.
  • One voltage source is connected to each charge collector electrode
  • each charge detection electrode is connected.
  • These voltage sources each charge the charge collector electrode connected to them to a predetermined potential, these potentials differing from charge collector electrode to charge collector electrode and rising in the flow direction of the measurement gas 22.
  • the voltage sources are controlled by a microprocessor 46 of the controller 14, but at least turned on and off.
  • Each current measuring device is connected to each charge detection electrode and passes its measurement signal to the microprocessor 46 of the controller 14. This is shown in Figure 2 for the current measuring devices 34.4, 36.4 and their charge detection electrodes 34.2, 36.2
  • each charge detection electrode is so on connected to a current measuring device that this current measuring device only via the charge detection
  • Electrode measures flowing current. It is therefore preferred for each individual electrode its own current measuring device available, so that over the
  • Microprocessor 46 processes the various measurement signals of the various sensors according to a stored in the memory 48 of the controller 14
  • Program Program and optionally using data stored in the memory 48 to an output signal of the particle sensor unit 10 and provides this output signal to an output 50 of the controller.
  • the voltages generated by the voltage sources at the charge collector electrodes are in each case so large that charged particles passing by these electrodes, e.g. experience attractive forces that suck charged particles from the sample gas stream. Due to the different levels of tension results in different levels of force. This causes the mass of individual charged particles just at a given moment
  • first charge trapping electrode 34.1 Aspirated upstream of this particular charge trapping electrode or the most upstream first charge trapping electrode. This is shown in Figure 2 by the growing from left to right Size of charged particles that adhere as suctioned particles in each case a charge-trapping electrode (Compare the electrode 36.1 and the next-but-one electrode and the next-but-one and the next-but-one electrode)
  • the generated by the first voltage source 34.3 potential of the first charge trapping electrode 34.1 is ideally and preferably so large that it sucks all free ions 42, but not yet charged by adhering ions particles.
  • the charged particles passing by the first charge-trapping electrode 34.1 thus represent the entire stream of charged particles without free ions 42. As they fly past the first charge-detection electrode 34.2, they charge them by influence.
  • the first current flow required for this purpose is measured by the first current measuring device 34.4 and is a measure of the total concentration of particles in the sample gas flow.
  • the next charge collector electrode is charged by the second voltage source 36. 3 to a potential in which it extracts light particles from the flow of the measurement gas 22.
  • the charge detection electrode 36.2 of the second sensor 36 assigned to it then measures one passing by
  • the control unit determines the proportion of the charged particles sucked from the second charge trapping electrode 36.1 on the entire stream of charged particles. In this way, the controller 14 determines the concentration of light particles in the measurement gas 22, the mass of which is defined by being within limits defined by the potential of the first charge trapping electrode 34.1 and the potential of the second
  • Charge catcher electrode 36.1 are fixed. Each successive probe provides a current reading that is a measure of the amount of charged particles passing past its charge trapping electrode. As the mass of particles passing just past this charge-trapping electrode increases from probe to probe, the result is a series of measurements, each of which is a measure of a concentration of particles of a particular size in the sample gas. These measurements are called
  • Measured value vector which has values of a total concentration and concentration values for n - 1 different particle size classes, in total therefore n values.
  • FIG. 3 qualitatively shows a sequence of steps in the flow path of FIG.
  • FIG. 4 shows qualitatively measurement signals of charge trapping electrodes of FIG
  • Measuring sensors for the above-described embodiment on the particle size The order and numbering of the measuring signals corresponds to the sequence and numbering of the measuring sensors in the flow path. Each potential from FIG. 3 results in a measurement signal. The measuring signals become smaller with increasing potential, and thus from sensor to sensor, because each sensor sucks charged particles out of the stream, so that the remaining current of charged particles decreases from sensor to sensor.
  • FIG. 5 qualitatively shows a histogram for the representation of the size distribution of
  • FIG. 6 shows a second embodiment, which differs from the one of FIG.
  • Embodiment according to the figure 2 differs in that the sensors 34 and 36 (and the remaining probes) instead of a pair of electrodes only one
  • the first measuring sensor 34 thus consists of a first individual electrode 34.5
  • the second measuring sensor 36 consists of a second individual electrode 36.5.
  • Each individual electrode (for example the individual electrode 34.5) is connected to a current measuring device (in this case the current measuring device 34.4) in such a way that the current measuring device 34.4)
  • Current measuring device measures only the current flowing through the single electrode current. It is therefore preferred for each individual electrode own Current measuring device available, so that the currents flowing through the individual electrodes are measured simultaneously.
  • Each current measuring device is then preferably in series with one
  • Embodiment carried out a measurement of the current flowing through the charge collector electrodes currents.
  • the current flowing through an ith charge-trapping electrode is a measure of the concentration of particles of a size class which is due to the potential of this charge-trapping electrode and to the potential of the (i-1) th upstream of the sample gas flow
  • Charge catcher electrode is defined. Charged particles smaller than the lower limit of this size class are trapped by the (i - 1) th charge trapping electrode. Charged particles larger than the upper limit of this size class fly past the ith charge trapping electrode.
  • FIG. 7 shows a schematic representation of an optional heater element 39 which may be embedded in the dielectric ceramic of the carrier element or applied to a surface of one or more sides of the carrier element.
  • the heater element 39 is preferably screen printed or otherwise printed
  • the heater element 39 can be used on the one hand to increase the temperature of the sensor element 30, e.g. To reduce or prevent soot deposits, which can lead to a short circuit between the electrodes. Alternatively, the temperature of the sensor element with the heater element 39 to more than 650 ° C
  • the heater element 39 has a meander-shaped resistance heater 39. 1, the over Contact surfaces 39.2 and the wiring harness with the control unit 14 is connectable. This function may be necessary in particular for burnout of the electrodes acting as charge trapping electrodes. Because of their attractive effect on charged particles, a high degree of carbon fouling is expected from them.
  • Figure 8 shows an embodiment of a method according to the invention in the form of a processed by the control unit program.
  • a first step 52 an electrode of the first probe is charged to a first potential and an electrode of a second probe located in the sample gas flow path downstream of the first probe is charged to a second, higher potential.
  • a second step 54 currents are detected by currents flowing via an electrode of the first sensor and by currents flowing via an electrode of the second sensor.
  • a concentration of particles transported with the sample gas of a size class determined by the potentials is determined as a function of two current intensities detected for mutually different potentials.
  • the detected current intensities are subtracted from each other, and the result of a subtraction is assigned to a concentration of particles in the measurement gas.
  • Single electrodes are assigned a concentration of particles of a certain particle size, wherein the particle size of the potentials of the first single electrode and the second single electrode is dependent.
  • a fourth step 58 the particle size-dependent determined particle counts or particle concentrations as components of a Measured value vector summarized and provided in this form as an output signal of the particle sensor unit 10 at an output of the control unit. This output signal is constantly updated constantly repeating the process.

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

La présente invention concerne une unité de détection de particules (10) munie d'un détecteur de particules qui présente une électrode d'effet couronne (32), une électrode de masse et un premier capteur de mesure (34) qui présente au moins une électrode (34.5), et avec un appareil de commande (14) qui détecte des intensités de courant s'écoulant par une électrode (34.5) du capteur de mesure (34) et qui détermine une concentration de particules (44) en fonction des intensités de courant détectées. L'unité de détection de particules est caractérisée en ce que le détecteur de particules présente un second capteur de mesure (36) qui présente au moins une électrode (36.5), et en ce que l'appareil de commande (14) charge une électrode (34.5) du premier capteur de mesure (34) à un premier potentiel ainsi qu'une électrode (36.5) du second capteur de mesure (36) à un second potentiel supérieur et détecte des intensités de courant s'écoulant par une électrode (34.5) du premier capteur de mesure (34) et des courants s'écoulant par une électrode (36.5) du second capteur de mesure (36), et détecte une concentration de particules (44) transportées par le gaz de mesure (22) d'une classe de grosseur déterminée par les potentiels en fonction de l'intensité de courant s'écoulant par ladite électrode (36.5) du second capteur de mesure (36).
PCT/EP2018/070172 2017-08-23 2018-07-25 Unité de détection de particules munie d'un détecteur de particules présentant plusieurs capteurs de mesure et procédé de fonctionnement de l'unité de détection de particules WO2019038012A1 (fr)

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DE102017214785.7 2017-08-23
DE102017214785.7A DE102017214785A1 (de) 2017-08-23 2017-08-23 Partikelsensoreinheit mit einem mehrere Messfühler aufweisenden Partikelsensor und Betriebsverfahren der Partikelsensoreinheit

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110246089A1 (en) * 2010-03-31 2011-10-06 Terence Barrett Micro-fabricated double condenser method and apparatus for the measurement of number-size distribution of airborne nano-particles
WO2013125181A1 (fr) 2012-02-21 2013-08-29 日本特殊陶業株式会社 Détecteur de microparticules
WO2014033040A1 (fr) * 2012-08-30 2014-03-06 Naneos Particle Solutions Gmbh Procédé et dispositif de mesure d'aérosol
EP3124951A1 (fr) * 2014-03-26 2017-02-01 NGK Insulators, Ltd. Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110246089A1 (en) * 2010-03-31 2011-10-06 Terence Barrett Micro-fabricated double condenser method and apparatus for the measurement of number-size distribution of airborne nano-particles
WO2013125181A1 (fr) 2012-02-21 2013-08-29 日本特殊陶業株式会社 Détecteur de microparticules
EP2824453A1 (fr) 2012-02-21 2015-01-14 Ngk Spark Plug Co., Ltd. Détecteur de microparticules
WO2014033040A1 (fr) * 2012-08-30 2014-03-06 Naneos Particle Solutions Gmbh Procédé et dispositif de mesure d'aérosol
EP3124951A1 (fr) * 2014-03-26 2017-02-01 NGK Insulators, Ltd. Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines

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