WO2019019718A1 - 集传感单元和约束元件于一体的二维快速偏转台及方法 - Google Patents

集传感单元和约束元件于一体的二维快速偏转台及方法 Download PDF

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WO2019019718A1
WO2019019718A1 PCT/CN2018/083990 CN2018083990W WO2019019718A1 WO 2019019718 A1 WO2019019718 A1 WO 2019019718A1 CN 2018083990 W CN2018083990 W CN 2018083990W WO 2019019718 A1 WO2019019718 A1 WO 2019019718A1
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voice coil
coil motor
flexible metal
axis
deflection
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French (fr)
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徐明龙
肖瑞江
王源
邵妍
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Xian Jiaotong University
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Xian Jiaotong University
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    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

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  • the invention relates to the technical field of two-dimensional rapid deflection actuation of micro angular displacement, in particular to a two-dimensional fast deflection stage, an operation method and a micro angle sensing measurement method integrating a sensing unit and a constraining component.
  • micro-angle two-dimensional fast deflection tables have been widely used in astronomical telescopes, image stabilization control, spacecraft communication precision pointing, and satellite imaging. And play an increasingly important role.
  • the current piezoelectric driving type micro-angle actuation platform has small volume and high resonance frequency, but has a high driving voltage and a small operating stroke, and the operating mechanism needs to install an additional eddy current displacement sensor to measure. Biaxial deflection angle. Due to the particularity of its application environment, it is often required that the actuation platform have a large angular travel at a lower driving voltage.
  • the voice coil motor has excellent features such as simple structure, small size, high precision, precise force control, rapid response, long life and large drive stroke. Therefore, voice coil motors are widely used in the field of precision actuation.
  • an object of the present invention is to provide a two-dimensional fast deflection stage, an operation method and a micro-angle sensing measurement method, which integrate a sensing unit and a constraining element, and the deflection stage is based on a voice coil.
  • the motor drive has the characteristics of small volume, fast response, high displacement resolution, etc., and can realize large angular stroke at low voltage; and the elastic constraint element not only increases the constraint stiffness of the whole mechanism, but also realizes double Sensing measurement of the shaft deflection angle.
  • a two-dimensional fast deflection stage integrating a sensing unit and a constraining element, comprising a base 2, a rigid support 5 at the center of the base 2, and a micro-angle pendulum connected to the rigid support 5 by a biaxial flexible hinge 10
  • the platform 1 further includes an X-axis angular displacement sensing measuring device 3 and a Y-axis angular displacement sensing measuring device 4 connected to the lower surface of the micro-angle pendulum platform 1 through a biaxial flexible hinge, and distributed in the X-axis angular displacement sensing device.
  • the first voice coil motor 6 includes a first magnetic cylinder 6-2 and a first coil 6-1 disposed in the first magnetic cylinder 6-2; the second voice coil motor 8 and the third voice coil motor 7 And the fourth voice coil motor 9 are both identical in composition and specifications to the first voice coil motor 6; the first voice coil motor 6 and the second voice coil motor 8 are arranged opposite each other to constitute a first actuator group; The triphonic motor 7 and the fourth voice coil motor 9 are vertically staggered with the first actuator group to form a second actuator group.
  • the X-axis angular displacement sensing device 3 is composed of a rigid support 5 located at the center of the base 2, a first flexible metal beam 3-1 and a second flexible metal beam 3-2 protruding from opposite sides, and respectively with the first flexible The metal beam 3-1 and the first "convex" shaped mass 3-3 and the second "convex” shaped mass 3-4 fixedly connected at the end of the second flexible metal beam 3-2; the first flexible metal beam 3- 1 and the upper and lower surfaces of the root of the second flexible metal beam 3-2 are respectively attached with four strain gauges, and the corresponding external signal processing circuit can be connected to form two full bridge circuits, and the first flexible metal beam 3-1 and The distance between the resistance strain gauges on the same surface of the second flexible metal beam 3-2 is constant; the Y-axis angular displacement sensing device 4 is the same as the X-axis angular displacement sensing device 3.
  • the coil displacement output end of the first voice coil motor 6, the second voice coil motor 8, the third voice coil motor 7 and the fourth voice coil motor 9 and the bottom of the magnetic cylinder are respectively angularly displaced from the X axis by screws
  • the sensation measuring device 3, the Y-axis angular displacement sensing device 4, and the susceptor 2 are fixedly connected.
  • the above-mentioned method for operating a two-dimensional fast deflection stage integrating the sensing unit and the constraining element when working, when working with the first voice coil motor 6 and the second voice coil motor of the first actuator group 8 when a voltage control signal of opposite direction is applied, the first coil 6-1 of the first voice coil motor 6 moves in the positive direction of the Z axis to generate a positive displacement; the second coil 8-1 of the second voice coil motor 8 The Z-axis moves in the negative direction, producing a negative displacement equal to it, thereby pushing the micro-angle pendulum platform 1 to generate a deflection angle around the X-axis centering on the biaxial flexible hinge 10; based on the same control method, the second actuator group can be The micro-angle pendulum platform 1 is driven to generate a deflection angle around the Y-axis centering on the biaxial flexible hinge 10.
  • the first "convex" shaped mass 3-3 and the second "convex” shaped mass 3-4 of the X-axis angular displacement sensing device 3 are driven to generate opposite displacements, thereby driving A flexible metal beam 3-1 and a second flexible metal beam 3-2 produce a certain deflection at the end while generating a large strain at the root; at this time, the first flexible metal beam 3-1 and the second flexible metal are attached.
  • the strain gauges near the root of the beam 3-2 are strained, and the strain generated at the root is linear with the deflection generated at the corresponding end; therefore, by measuring the first flexible metal beam 3-1 and the second flexible metal beam 3-
  • the root strain information of 2 can calculate the corresponding deflection, thereby obtaining the angle of deflection around the X axis.
  • the principle of measuring the angle of deflection around the Y-axis is the same as the principle of measuring the angle of deflection around the X-axis; thereby achieving the function of measuring the biaxial deflection angle by strain feedback while increasing the constraint stiffness of the mechanism.
  • the present invention has the following advantages:
  • the voice coil motor drive has the unique advantages of small drive voltage and large drive stroke, so the present invention can realize a large biaxial deflection angle.
  • the invention adopts a flexible hinge support structure, and the flexible hinge utilizes the micro-deformation of the elastic material and its self-recovering characteristics, thereby eliminating the idle motion and mechanical friction during the transmission process, and the mechanism has the characteristics of high displacement resolution.
  • Figure 1 is a schematic perspective view of the present invention.
  • Figure 2 is a schematic diagram showing the composition of the X-axis deflection mechanism.
  • Figure 3 is a schematic diagram of an angular displacement sensing measuring device.
  • Figure 4 is a schematic diagram of the measurement of the angular displacement sensing measuring device.
  • the present invention is a two-dimensional fast deflection stage integrating a sensing unit and a constraining element, comprising a base 2, a rigid support 5 at the center of the base 2, and a flexible structure with biaxial A micro-angle pendulum platform 1 in which the hinge 10 is coupled to the rigid support 5; and an X-axis angular displacement sensing device 3 and a Y-axis angular displacement sensing device connected to the lower surface of the micro-angle pendulum platform 1 by a biaxial flexible hinge
  • the third voice coil motor 7 and the fourth voice coil motor 9 are interposed.
  • the first voice coil motor 6 includes a first magnetic cylinder 6-2 and a first coil 6-1 placed in the first magnetic cylinder 6-2.
  • the second voice coil motor 8, the third voice coil motor 7, and the fourth voice coil motor 9 are all the same in composition and specifications as the first voice coil motor 6.
  • the first voice coil motor 6 and the second voice coil motor 8 are arranged opposite each other to constitute a first actuator group.
  • the third voice coil motor 7 and the fourth voice coil motor 9 are vertically staggered with the first actuator group to form a second actuator group.
  • the X-axis angular displacement sensing device 3 is composed of a rigid support 5 located at the center of the base 2, a first flexible metal beam 3-1 and a second flexible metal beam 3-2 projecting from opposite sides. And a first "convex" shaped mass 3-3 and a second "convex” shaped mass 3-4 that are fixedly coupled to the ends of the first flexible metal beam 3-1 and the second flexible metal beam 3-2, respectively.
  • Four upper and lower resistance surfaces are attached to the upper and lower surfaces of the first flexible metal beam 3-1 and the second flexible metal beam 3-2, and the corresponding external signal processing circuit can be connected to form two full-bridge circuits, and the flexible metal The distance between the resistance strain gauges on the same surface of the beam is constant.
  • the Y-axis angular displacement sensing device 4 is identical in composition to the X-axis angular displacement sensing device 3.
  • the coil displacement output end of the first voice coil motor 6, the second voice coil motor 8, the third voice coil motor 7, and the fourth voice coil motor 9 and the bottom of the magnetic cylinder pass through
  • the screws are fixedly coupled to the X-axis angular displacement sensing device 3, the Y-axis angular displacement sensing device 4, and the base 2, respectively.
  • the operating principle of the two-dimensional fast deflection stage of the present invention is that when a voltage control signal of opposite direction is applied to the first voice coil motor 6 and the second voice coil motor 8 of the first actuator group, the first voice coil motor 6
  • the first coil 6-1 moves in the positive direction of the Z axis to generate a positive displacement
  • the second coil 8-1 in the second voice coil motor 8 moves in the negative direction of the Z axis, generating a negative displacement equal thereto, thereby pushing
  • the micro-angle pendulum platform 1 produces a deflection angle around the X-axis centering on the biaxial flexible hinge 10.
  • the micro-angle pendulum platform 1 can be pushed by the second actuator group to generate a Y-axis deflection angle centering on the biaxial flexible hinge 10.
  • the micro-angle sensing measurement principle of the deflection stage of the present invention is: when the first voice coil motor 6 and the second voice coil motor 8 of the first actuator group operate in a differential manner, push X
  • the first "convex" shaped mass 3-3 and the second “convex” shaped mass 3-4 of the axial angular displacement sensing device 3 produce oppositely displaced displacements, thereby driving the first flexible metal beam 3-1 and
  • the second flexible metal beam 3-2 produces a certain deflection at the end while generating a large strain at the root.
  • the strain gauges attached to the vicinity of the roots of the first flexible metal beam 3-1 and the second flexible metal beam 3-2 generate strain, and the strain generated at the root is linearly related to the deflection generated at the corresponding end. Therefore, by measuring the root strain information of the first flexible metal beam 3-1 and the second flexible metal beam 3-2, the respective deflections ⁇ h 1 and - ⁇ h 2 can be calculated, using the formula The deflection angle of the corresponding axis can be obtained.
  • the principle of measuring the angle of deflection around the Y axis is the same as the principle of measuring the angle of deflection around the X axis.
  • the design of the flexible metal beam not only increases the constraint stiffness of the actuating platform, but also improves the stability of the mechanism. At the same time, it acts as a sensing unit to perform real-time measurement of the biaxial deflection angle by means of strain feedback. Thereby, the integrated actuation structure design of the sensing unit and the constraining element is realized.

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  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

一种集传感单元和约束元件于一体的二维快速偏转台及方法，该偏转台包括置于下表面带有双轴柔性铰链10的微角摆平台1和底座2间的X轴和Y轴角位移传感测量装置（3,4）、四个直线音圈电机（6,7,8,9）；X轴和Y轴角位移传感测量装置（3,4）均包括刚性支撑5相对两边伸出的一对柔性金属梁（3-1,3-2）及其末端固定连接的质量块（3-3,3-4）；每根柔性金属梁（3-1,3-2）的根部附近上下表面均贴有电阻应变片；第一和第三音圈电机（6,7）采用相同的规格相对布置，组成第一作动器组；第二和第四音圈电机（8,9）采用相同的规格相对布置，并与第一作动器组垂直交错分布；本发明通过柔性金属梁增加了偏转台的约束刚度，又作为传感单元以应变反馈方式进行双轴偏转角度的实时测量。

Description

集传感单元和约束元件于一体的二维快速偏转台及方法 技术领域
本发明涉及微角位移二维快速偏转作动技术领域，具体涉及一种集传感单元和约束元件于一体的二维快速偏转台、作动方法及微角度传感测量方法。
背景技术
近年来，随着微电子工程、航天工程、生物工程等领域的迅速发展，微角度二维快速偏转台在天文望远镜、图像稳定控制、航天器通讯精确指向以及卫星成像等方面得到了广泛应用，并发挥着日益重要的作用。而目前的压电驱动型微角度作动平台虽然体积小、谐振频率高，但存在驱动电压高、作动行程小等不足，并且作动机构多需要安装额外的电涡流位移传感器等装置来测量双轴偏转角度。而由于其应用环境的特殊性，往往还要求作动平台在较低的驱动电压下具有较大的角行程。
音圈电机具有结构简单、体积小、高精度、力控制精确、急速响应、寿命长以及驱动行程大等卓越特性。因此音圈电机被广泛应用于精密作动领域中。
发明内容
为了克服上述现有技术的不足，本发明的目的在于提供一种集传感单元和约束元件于一体的二维快速偏转台、作动方法及微角度传感测量方法，该偏转台基于音圈电机驱动，在具有体积小、响应快、高 的位移分辨率等特点的同时，还能在低电压下实现较大的角行程；并且通过弹性约束元件既增加整个机构的约束刚度，又实现双轴偏转角的传感测量。
为了实现上述目的，本发明采用的技术方案如下：
一种集传感单元和约束元件于一体的二维快速偏转台，包括底座2、位于底座2中心处的刚性支撑5、以及通过带有双轴柔性铰链10与刚性支撑5连接的微角摆平台1；还包括与微角摆平台1的下表面四周通过双轴柔性铰链连接的X轴角位移传感测量装置3和Y轴角位移传感测量装置4、分布于X轴角位移传感测量装置3与底座2之间的第一音圈电机6和第二音圈电机8、以及分布于Y轴角位移传感测量装置4与底座2之间的第三音圈电机7和第四音圈电机9。所述第一音圈电机6包括第一磁缸6-2和置于第一磁缸6-2内的第一线圈6-1；所述第二音圈电机8、第三音圈电机7和第四音圈电机9均与第一音圈电机6的组成和规格相同；所述第一音圈电机6和第二音圈电机8相对布置，组成第一作动器组；所述第三音圈电机7和第四音圈电机9与第一作动器组垂直交错分布，组成第二作动器组。
所述X轴角位移传感测量装置3由位于底座2中心处的刚性支撑5、相对两边伸出的第一柔性金属梁3-1和第二柔性金属梁3-2以及分别与第一柔性金属梁3-1和第二柔性金属梁3-2末端固定连接的第一“凸”字形质量块3-3和第二“凸”字形质量块3-4组成；第一柔性金属梁3-1和第二柔性金属梁3-2的根部附近上下表面均贴有四片电阻应变片，接入相应的外部信号处理电路可组成两个全桥电路， 且第一柔性金属梁3-1和第二柔性金属梁3-2同一表面上的电阻应变片距离一定；所述Y轴角位移传感测量装置4与X轴角位移传感测量装置3组成相同。
所述的第一音圈电机6、第二音圈电机8、第三音圈电机7和第四音圈电机9顶部的线圈位移输出端和磁缸底部均通过螺钉分别与X轴角位移传感测量装置3、Y轴角位移传感测量装置4以及基座2固定连接。
上述所述的一种集传感单元和约束元件于一体的二维快速偏转台的作动方法，工作时，当对第一作动器组的第一音圈电机6和第二音圈电机8施加方向相反的电压控制信号时，第一音圈电机6中的第一线圈6-1沿Z轴正方向运动，产生正位移；第二音圈电机8中的第二线圈8-1沿Z轴负方向运动，产生与之相等的负位移，从而推动微角摆平台1以双轴柔性铰链10为中心产生绕X轴偏转角；基于相同的控制方法，通过第二作动器组可以推动微角摆平台1以双轴柔性铰链10为中心产生绕Y轴偏转角。
上述所述的一种集传感单元和约束元件于一体的二维快速偏转台的微角度传感测量方法，当第一作动器组的第一音圈电机6和第二音圈电机8以差动方式工作时，推动X轴角位移传感测量装置3的第一“凸”字形质量块3-3和第二“凸”字形质量块3-4产生方向相反的位移，从而带动第一柔性金属梁3-1和第二柔性金属梁3-2在末端产生一定的挠度，同时在根部产生较大的应变；此时，贴在第一柔性金属梁3-1和第二柔性金属梁3-2根部附近的电阻应变片会产生应 变，且根部产生的应变与相应端部产生的挠度成线性关系；因此，通过测量第一柔性金属梁3-1和第二柔性金属梁3-2的根部应变信息就能够计算相应的挠度，从而得到绕X轴偏转角度。所述绕Y轴偏转角度测量原理与绕X轴偏转角度测量原理相同；从而实现在增加机构约束刚度的同时，以应变反馈方式传感测量出双轴偏转角的功能。
本发明与现有技术相比较，具有如下优点：
1)本发明通过柔性金属梁的合理设计，既增加了作动平台的约束刚度，提高了机构的稳定性；同时又作为传感单元以应变反馈方式实现了双轴偏转角度的实时测量，避免了其它昂贵传感装置的复杂安装；从而实现了传感单元和约束元件的一体化作动结构设计。
2)相比于压电陶瓷驱动控制，音圈电机驱动具有驱动电压小、驱动行程大等独特优势，故本发明能实现较大的双轴偏转角度。
3)本发明采用了柔性铰链支撑结构，柔性铰链利用弹性材料微小变形及其自回复的特性，消除了传动过程中的空程和机械摩擦，使机构具有位移分辨率高等特点。
附图说明
图1为本发明立体结构示意图。
图2为X轴偏转机构组成示意图。
图3为角位移传感测量装置示意图。
图4为角位移传感测量装置测量原理图。
具体实施方式
以下结合附图和具体实施方式对本发明作进一步详细说明。
如图1和图2所示，本发明一种集传感单元和约束元件于一体的二维快速偏转台，包括底座2、位于底座2中心处的刚性支撑5、以及通过带有双轴柔性铰链10与刚性支撑5连接的微角摆平台1；还包括与微角摆平台1的下表面四周通过双轴柔性铰链连接的X轴角位移传感测量装置3和Y轴角位移传感测量装置4、分布于X轴角位移传感测量装置3与底座2之间的第一音圈电机6和第二音圈电机8、以及分布于Y轴角位移传感测量装置4与底座2之间的第三音圈电机7和第四音圈电机9。所述第一音圈电机6包括第一磁缸6-2和置于第一磁缸6-2内的第一线圈6-1。所述第二音圈电机8、第三音圈电机7和第四音圈电机9均与第一音圈电机6的组成和规格相同。所述第一音圈电机6和第二音圈电机8相对布置，组成第一作动器组。所述第三音圈电机7和第四音圈电机9与第一作动器组垂直交错分布，组成第二作动器组。
如图3所示，所述X轴角位移传感测量装置3由位于底座2中心处的刚性支撑5、相对两边伸出的第一柔性金属梁3-1和第二柔性金属梁3-2以及分别与第一柔性金属梁3-1和第二柔性金属梁3-2末端固定连接的第一“凸”字形质量块3-3和第二“凸”字形质量块3-4组成。第一柔性金属梁3-1和第二柔性金属梁3-2的根部附近上下表面均贴有四片电阻应变片，接入相应的外部信号处理电路可组成两个全桥电路，且柔性金属梁同一表面上的电阻应变片距离一定。所述Y轴角位移传感测量装置4与X轴角位移传感测量装置3组成相同。
作为本发明的优选实施方式，所述的第一音圈电机6、第二音圈 电机8、第三音圈电机7和第四音圈电机9顶部的线圈位移输出端和磁缸底部均通过螺钉分别与X轴角位移传感测量装置3、Y轴角位移传感测量装置4以及基座2固定连接。
本发明二维快速偏转台的作动原理为：当对第一作动器组的第一音圈电机6和第二音圈电机8施加方向相反的电压控制信号时，第一音圈电机6中的第一线圈6-1沿Z轴正方向运动，产生正位移；第二音圈电机8中的第二线圈8-1沿Z轴负方向运动，产生与之相等的负位移，从而推动微角摆平台1以双轴柔性铰链10为中心产生绕X轴偏转角。基于相同的控制方法，通过第二作动器组可以推动微角摆平台1以双轴柔性铰链10为中心产生绕Y轴偏转角。
如图4所示，本发明的偏转台的微角度传感测量原理为：当第一作动器组的第一音圈电机6和第二音圈电机8以差动方式工作时，推动X轴角位移传感测量装置3的第一“凸”字形质量块3-3和第二“凸”字形质量块3-4产生方向相反的位移，从而带动第一柔性金属梁3-1和第二柔性金属梁3-2在末端产生一定的挠度，同时在根部产生较大的应变。此时，贴在第一柔性金属梁3-1和第二柔性金属梁3-2根部附近的电阻应变片会产生应变，且根部产生的应变与相应端部产生的挠度成线性关系。因此，通过测量第一柔性金属梁3-1和第二柔性金属梁3-2的根部应变信息就能够计算相应的挠度Δh 1和-Δh 2，运用公式
Figure PCTCN2018083990-appb-000001
便可以得到相应轴的偏转角。所述绕Y轴偏转角度测量原理与绕X轴偏转角度测量原理相同。
因此柔性金属梁的设计，既增加了作动平台的约束刚度，提高了机构 的稳定性；同时又作为传感单元以应变反馈方式进行双轴偏转角度的实时测量。从而实现了传感单元和约束元件的一体化作动结构设计。

Claims (5)

  1. 一种集传感单元和约束元件于一体的二维快速偏转台，包括底座(2)、位于底座(2)中心处的刚性支撑(5)、以及通过带有双轴柔性铰链(10)与刚性支撑(5)连接的微角摆平台(1)；其特征在于：还包括与微角摆平台(1)的下表面四周通过双轴柔性铰链连接的X轴角位移传感测量装置(3)和Y轴角位移传感测量装置(4)、分布于X轴角位移传感测量装置(3)与底座(2)之间的第一音圈电机(6)和第二音圈电机(8)、以及分布于Y轴角位移传感测量装置(4)与底座(2)之间的第三音圈电机(7)和第四音圈电机(9)；所述第一音圈电机(6)包括第一磁缸(6-2)和置于第一磁缸(6-2)内的第一线圈(6-1)；所述第二音圈电机(8)、第三音圈电机(7)和第四音圈电机(9)均与第一音圈电机(6)的组成和规格相同；所述第一音圈电机(6)和第二音圈电机(8)相对布置，组成第一作动器组；所述第三音圈电机(7)和第四音圈电机(9)与第一作动器组垂直交错分布，组成第二作动器组。
  2. 根据权利要求1所述的一种集传感单元和约束元件于一体的二维快速偏转台，其特征在于：所述X轴角位移传感测量装置(3)由位于底座(2)中心处的刚性支撑(5)、相对两边伸出的第一柔性金属梁(3-1)和第二柔性金属梁(3-2)以及分别与第一柔性金属梁(3-1)和第二柔性金属梁(3-2)末端固定连接的第一“凸”字形质量块(3-3)和第二“凸”字形质量块(3-4)组成；第一柔性金属梁(3-1)和第二柔性金属梁(3-2)的根部附近上下表面均贴有四片电阻应变片，接入相应的外部信号处理电路组成两个全桥电路，且第一柔性金属梁(3-1)和第二柔性金属梁(3-2)同一表面上的电阻应变片距离一定；所述Y轴角位移传感测量装置(4)与X轴角位移传感测量装置(3)组成相同。
  3. 根据权利要求1所述的一种集传感单元和约束元件于一体的二维快速偏 转台，其特征在于：所述的第一音圈电机(6)和第二音圈电机(8)顶部的线圈位移输出端和磁缸底部均通过螺钉分别与X轴角位移传感测量装置(3)和基座(2)固定连接；所述的第三音圈电机(7)和第四音圈电机(9)顶部的线圈位移输出端和磁缸底部均通过螺钉分别与Y轴角位移传感测量装置(4)和基座(2)固定连接。
  4. 根据权利要求1至3任一项所述的一种集传感单元和约束元件于一体的二维快速偏转台的作动方法，其特征在于：当对第一作动器组的第一音圈电机(6)和第二音圈电机(8)施加方向相反的电压控制信号时，第一音圈电机(6)中的第一线圈(6-1)沿Z轴正方向运动，产生正位移；第二音圈电机(8)中的第二线圈(8-1)沿Z轴负方向运动，产生与之相等的负位移，从而推动微角摆平台(1)以双轴柔性铰链(10)为中心产生绕X轴偏转角；基于相同的控制方法，通过第二作动器组能够推动微角摆平台(1)以双轴柔性铰链(10)为中心产生绕Y轴偏转角。
  5. 根据权利要求1至3任一项所述的一种集传感单元和约束元件于一体的二维快速偏转台的微角度传感测量方法，其特征在于：当第一作动器组的第一音圈电机(6)和第二音圈电机(8)以差动方式工作时，推动X轴角位移传感测量装置(3)的第一“凸”字形质量块(3-3)和第二“凸”字形质量块(3-4)产生方向相反的位移，从而带动第一柔性金属梁(3-1)和第二柔性金属梁(3-2)在末端产生一定的挠度，同时在根部产生较大的应变；此时，贴在第一柔性金属梁(3-1)和第二柔性金属梁(3-2)根部附近的电阻应变片会产生应变，且根部产生的应变与相应端部产生的挠度成线性关系；因此，通过测量第一柔性金属梁(3-1)和第二柔性金属梁(3-2)的根部应变信息就能够计算相应的挠度，从而得到绕X轴偏转角度；所述绕Y轴偏转角度测量原理与绕X轴偏转角度测 量原理相同；柔性金属梁的设计既增加了作动平台的约束刚度，提高了机构的稳定性；同时又作为传感单元以应变反馈方式进行双轴偏转角度的实时测量；从而实现了传感单元和约束元件的一体化作动结构设计。
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