WO2019014343A1

WO2019014343A1 - Spatially resolved optical emission spectroscopy (oes) in plasma processing

Info

Publication number: WO2019014343A1
Application number: PCT/US2018/041637
Authority: WO
Inventors: Ching-Ling Meng; Holger Tuitje; Yan Chen; Mihail Mihaylov
Original assignee: Tokyo Electron Limited
Priority date: 2017-07-12
Filing date: 2018-07-11
Publication date: 2019-01-17
Also published as: JP7266575B2; JP2020527705A; KR102600883B1; KR20200019258A; CN110998260B; TWI794252B; CN110998260A; TW201920917A

Abstract

Disclosed is a method, system, and apparatus for optical emission measurement. The apparatus includes a collection system for collecting a plasma optical emission spectra through an optical window disposed at a wall of a plasma processing chamber. The optical system includes a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber; and a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

Description

SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA

PROCESSING

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] The present application claims priority to U.S. Patent Application No.

15/648,035 entitled "SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSI NG" (Ref. No. TTi-247), filed on July 12, 2017, the entire contents of which are herein incorporated by reference, in addition, the present application hereby incorporates by reference U.S. Patent Application No. 14/530, 164 entitled "SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSING" (Ref. No. TTi-242), filed on October 31 , 2014, the entire contents of which are herein incorporated by reference which is based and claims the benefit of and priority to U.S. Provisional Patent Application No. 61/898,975, entitled "SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA ETCHING" (Ref. No. TTI-242PROV), filed on November 1 , 2013,

BACKGROUND OF THE I NVENTION FIELD OF THE INVENTION

[0002] The present invention relates to a method, computer method, system, and apparatus for measuring concentrations of chemical species in semiconductor plasma processing using plasma optical emission spectroscopy (OES). Specifically, it relates to determining two-dimensional distributions of plasma optical emissions from which two- dimensional distributions of chemical species concentrations can be determined. DESCRIPTION OF RELATED ART

[0003] Production of semiconductor devices, displays, photovolfaics, etc., proceeds in a sequence of steps, each step having parameters optimized for maximum device yield. In plasma processing, among the controlled parameters strongly affecting yield is the chemistry of the plasma, and particularly the local chemistry of the plasma, i.e. the local concentrations of various chemical species in the plasma environment proximate the substrate being processed. Certain species, particularly transient chemical species, such as radicals have a great influence on the plasma processing outcome, and it is known that elevated local concentrations of these species can produce areas of faster processing, which may lead to nonuniformities in the processing steps and ultimately the devices being produced.

[0004] The chemistry of a plasma process is controlled in a direct or indirect manner through the control of a large number of process variables, such as one or more RF or microwave powers supplied to excite the plasma, the gas flows and kinds of gases supplied to the plasma processing chamber, the pressure in the plasma processing chamber, the type of substrate being processed, the pumping speed delivered to the plasma processing chamber, and many more. Optical emission spectroscopy (OES) has proven itself as a useful tool for process development and monitoring in plasma processing. In optical emission spectroscopy, the presence and concentrations of certain chemical species of particular interest, such as radicals, is deduced from acquired optical (i.e. light) emission spectra of the plasma, wherein the intensities of certain spectral lines and ratios thereof correlate to the concentrations of chemical species. A detailed description of the technique can be found in e.g. G. Selwyn, Optical Diagnostic Techniques for Plasma Processing", AVS Press, 1993, and will not be repeated here, for brevity.

[000S] While the use of optical emission spectroscopy has become relatively commonplace, particularly in plasma process development, if is usually done by acquiring optical emission spectra from a single elongated volume within the plasma, inside the plasma processing chamber. The precise shape and size of this volume is determined by the optica! system used to collect the optical emission from the plasma. Such collection of the optical emission signal inherently results in averaging of the plasma optical emission spectra along the length of this elongated volume, also known as a ray, and thus all the information about local variations of the plasma optica! emission spectra, and thus also local variations of chemical species concentrations, are generally lost.

[0006] in development of plasma processes, and indeed even in development of new and improved plasma processing systems, it is useful to know the two-dimensional distribution of chemical species of interest above the substrate being processed, so changes in the system design and/or process parameters can be made to minimize variations of the processing outcome across the substrate, for example. A further application of the plasma optical emission spectroscopy technique is in determining the endpoint of a plasma processing step by monitoring the evolution of and abrupt change of chemical species present in the plasma that is associated with e.g. an etching step reaching a substrate layer of different chemical composition that the one that was etched during the etching process. The ability to determine the plasma processing step endpoint across the entire surface of the substrate contributes to increased device yield because of not terminating the plasma processing step prematurely. [0007] One technique extensively used in other areas of technology, e.g. X-ray tomography, to determine a spatial distribution of a variable from known integrated measurements along multiple rays traversing the area of interest is tomographic inversion, using the Abel transform, or Radon transform. However, to be effective, this technique requires a large amount of acquired data, i.e. a large number of rays, which is impractical in a semiconductor processing tool that has limited optical access to the plasma through one or a small number of windows or optical ports built into the plasma processing chamber wall. Tomographic techniques are generally also very

computationally intensive. It has also been found that local variations of chemical species concentrations are of a generally smooth nature, without any abrupt gradients in both the radial, and even more so in the circumferential (i.e. azimuthal) direction. Thus, it would be advantageous to have a simple, fast, and relatively low cost plasma optical emission spectroscopy technique and system that is capable of acquiring the two-dimensional distributions of plasma optical emission spectra without the overhead involved in tomographic approaches to OES measurements.

[0008] Most notably, while the variations in the circumferential direction may be sma! they are not nonexistent, as some prior techniques presume, and the ideal technique and system would still have to be able to reliably capture these variations.

SUMMARY OF THE INVENTION

[0009] An aspect of the invention includes an apparatus for optical emission measurement that comprises a collection system for collecting a plasma optical emission spectra through an optical window disposed at a wall of a plasma processing chamber. The optical system includes a mirror configured to scan a plurality of non- coincident rays across the plasma processing chamber; and a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

[0010] An alternative embodiment includes a plasma optical emission measurement system that comprises a plasma processing chamber; an optical window disposed on a wall of the plasma processing chamber; a collection system for collecting plasma optical emission spectra through the optical window; a spectrometer coupled to the collection system for measuring the plasma optical emission spectra. The collection system includes a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber, and a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to the spectrometer.

[0011] Yet another embodiment of the invention includes a method for optical emission measurement that comprises depositing an optical window at a wail of a plasma processing chamber; providing a collection system for collecting plasma optical emission spectra through the optical window, the collection system including a mirror and a telecentric coupler; scanning a plurality of non-coincident rays across the plasma processing chamber using the mirror; collecting an optical signal from a plasma via the telecentric coupler; and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012] A more complete appreciation of the invention and many of the attendant advantages thereof will become readily apparent with reference to the following detailed description, particularly when considered in conjunction with the accompanying drawings, in which:

[0013] FIG. 1 is a side view schematic of a plasma processing system equipped with an optical emission spectroscopy (OES) measurement system in accordance with an embodiment.

[0014] FIG. 2 is a top view schematic of the plasma processing system equipped with the OES measurement system in accordance with an embodiment.

[001 S] FIG. 3 is an exemplary plasma optical emission spectrum acquired using the

OES measurement system in accordance with an embodiment.

[0016] FIG. 4 is a schematic of an optical system for use in the OES measurement system, in accordance with an embodiment.

[0017] FIG. 5 is a schematic of an optical system for use in the OES measurement system, in accordance with another embodiment.

[0018] FIG. 6 is an expanded schematic view of an embodiment of an optical system in accordance with an embodiment,

[0019] FIG. 7 is an exemplary two-dimensional distribution of plasma optical emission measured using the OES measurement system and associated method in accordance with an embodiment.

[0020] FIG. 8 is a schematic of an optical system for use in the OES measurement system, in accordance with another embodiment.

[0021] FIG. 9 is an expanded schematic view of an embodiment of an optical system in accordance with another embodiment.

[0022] FIG. 10 is a top view schematic of the plasma processing system equipped with the optical system of FIG. 8. [0023] FIG. 1 1 is an expanded schematic view of an embodiment of an optical system in accordance with another embodiment.

[0024] FIG. 12 is a schematic of an optical system for use in the OES measurement system, in accordance with another embodiment.

[002S] FIG. 13 is a schematic that shows exemplary results of reconstructed patterns of optical emission intensity.

[0026] FIG. 14 is a flowchart that shows a method for optical emission measurement according to one example.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[0027] In the following description, in order to facilitate a thorough understanding of the invention and for purposes of explanation and not limitation, specific details are set forth, such as particular geometries of a plasma optical emission spectroscopy (OES) system, and descriptions of various components and processes. However, it should be understood that the invention may be practiced in other embodiments that depart from these specific details,

[0028] in the description to follow, the term substrate, which represents the workpiece being processed, may be used interchangeably with terms such as semiconductor wafer, liquid crystal display (LCD) panel, light-emitting diode (LED), photovoltaic (PV) device panel, etc., the processing of all of which falls within the scope of the claimed invention.

[0029] Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention, but do not denote that they are present in every embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily referring to the same

embodiment of the invention. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more

embodiments.

[0030] Various operations will be described as multiple discrete operations in turn, in a manner that is most helpful in understanding the invention. However, the order of description should not be construed as to imply that these operations are necessarily order dependent. In particular, these operations need not be performed in the order of presentation. Operations described may be performed in a different order than the described embodiment. Various additional operations may be performed and/or described operations may be omitted in additional embodiments.

[0031] Fig. 1 shows an embodiment of a plasma processing system 10 equipped with a plasma optical emission spectroscopy (OES) system 15. Plasma processing system 10 comprises plasma processing chamber 20, inside which a substrate holder 30 is disposed, such as an electrostatic chuck, for receiving a substrate 40 to be processed. Radio frequency (RF) and/or microwave power is supplied to the plasma processing chamber 20 (not shown) to ignite and sustain a plasma 50 proximate the substrate 40, wherein the energetic chemical species from the plasma 50 are used to perform a plasma processing step on substrate 40. Processing gases are flown into the plasma processing chamber 20 (not shown) and a pumping system is provided (not shown) to maintain a vacuum in the plasma processing chamber 20, at a desired process pressure. Examples of plasma processing steps include plasma etching, plasma-enhanced chemical vapor deposition (PECVD), plasma-enhanced atomic layer deposition (PEALD), etc. The system and method described herein are applicable to any kind of plasma processing.

[0032] The plasma optical emission spectroscopy (OES) system 15 is used to acquire plasma optical emission spectra via at least one optical detector 60, which communicates the acquired plasma optical emission spectra to and is controlled by controller 80. Controller 80 may be a general purpose computer, and may be located proximate to plasma processing system 10, or may be located remotely, and connected via an intranet or internet connection to optical detector 60.

[0033] Optical detector 60 has optics configured in such a way that it collects plasma optical emissions from an elongated, generally pencil-shaped volume of space 65 within the plasma 50. Optical access to the plasma processing chamber is provided by optical window 70. Optical window 70 can comprise a material such as glass, quartz, fused silica, or sapphire, depending on the application and how aggressive the chemistry of the plasma 50 is. The volume 65, hereinafter referred to as a "ray" 65, defines the portion of space from which the plasma optical emission spectra are collected, and the collected spectra represent an integral of contributions to the collected plasma optical emission spectrum from ail points located along and within the ray 65. it should be noted that depending on the geometry and configuration of optical detector 60, the contributions of each point within the ray 65 will not be equal, but are weighted and governed by the optical efficiency (to be discussed in more detail later), in a typical configuration, the ray 65 is oriented substantially parallel with the surface of substrate 40 and is maintained at a small distance from the surface of substrate 40, so as to reduce optical interference from the substrate surface, yet is kept dose enough to the substrate 40 to sample the plasma chemistry proximate the substrate surface.

[0034] Controller 80, as mentioned before, is used to control the plasma optical emission spectroscopy system 15, and to also compute the (1 ) plasma optical intensity distribution as a function of spatial location and wavelength, and to compute (2) the spatial distribution of chemical species of interest from the computed plasma optical intensity distribution. This information can then be used for process development, plasma processing tool development, in-situ plasma process monitoring, plasma process fault detection, plasma process endpoint detection, etc.

[003S] Fig. 1 shows one ray 85 traversing the plasma 50 located within the plasma processing chamber 20, proximate substrate 40 being processed. In an embodiment of the invention, multiple rays 100 can be used to sample the plasma optical emission spectra, as shown in Fig. 2, which shows the top schematic view of the plasma processing system 10 of e.g. Fig. 1 . In the exemplary embodiment of Fig. 2, two optical detectors 60 are used to collect plasma optical emission spectra, each from 7 rays 100. The rays 100 need to be non-coincident such that the largest amount of spatial information is acquired from the plasma 50 above substrate 40. The number of rays 100 per optical detector 80 can vary from 2 to 9, and higher. Also, in another embodiment, where optical access is provided to plasma processing chamber 20 by only a single optical window 70, a single optical detector 80 can be used with its associated fan of rays 100. Aiternativeiy, a third or more optical detectors, each with an associated ray fan, may be used. The angle of each ray 100 is defined with respect to the centerline of its optical detector 60, as $ . Every point within the plasma processing chamber can be defined by its polar coordinates, i.e. , as shown in Fig. 2. [0036] As will be described in greater detail later, depending on the configuration of optical detector 60, all plasma optical emission spectra from the associated fan of rays 100 can be collected simultaneously. This is suitable for embodiments of optical detector 60 with multiple optical systems and channels, allowing simultaneous collection from all rays 100. Alternatively, the plasma optical emission spectra can be acquired sequentially along rays 100 associated with an optical detector 80. The latter is suitable in scanning embodiments, where plasma optical emission spectra are collected as the ray 100 is scanned from one angle ^ to another. Understandably, this scanning and acquisition needs to occur fast enough such that rapid changes in the plasma chemistry can be detected across the entire substrate.

[0037] Fig. 3 shows an example plasma optical emission spectrum acquired from one ray 100, at angle ^ , using one optical detector 60. In the spectrum, intensities of wavelengths are collected, typically ranging from about 200nm to about 80Qnm. CCDs of typical spectrometers employed for optical emission spectroscopy have 4096 pixels spanning the wavelength range, but the number of pixels can vary as low as 256 and as high as 65536, depending on the application and required resolution of the collected spectra.

[0038] Plasma optical emission spectra collected by optical detectors 60 from their associated fans of rays 100 are communicated to controller 80, which is used to further process the communicated data to compute the spatial distribution of plasma optical emission, and from there the spatial distribution of chemical species concentrations. An aspect of the present invention is an algorithm for fast calculation of the spatial distribution of plasma optical emissions for each wavelength, which allows in-situ monitoring of plasma processes, for endpoint detection, fault detection, etc. [0039] Fig. 4 shows an embodiment of optical detector 80 wherein a single multichannel spectrometer 310 is used to collect plasma optical emission spectra from rays 305A-E simultaneously. The exemplary embodiment shown here has 5 rays 305A-E, for clarify, but the number can vary from 2 to 9, and even higher than 9. The optical detector 60 comprises optical systems 300A-E for each ray 305A-E, ail located proximate optical window 70 mounted on the wall of plasma processing chamber 20. Rays 305A-E are arranged in a diverging manner, so as to cover the relevant portion of substrate 40 (not shown). Collected plasma optical emission spectra are fed into the multi-channel spectrometer 310 from optical systems 300A-E, via respective optical fibers 320A-E. Optical systems 300A-E will be described in greater detail later. The embodiment of Fig, 4 is suitable for fast diagnostics, because of its ability to collect plasma optical emission spectra simultaneously.

[0040] Fig. 5 shows an alternative embodiment in which a single channel

spectrometer 310 is used, and rays 305A-E are formed by a scanning mirror 400 which is controilably scanned to sweep out rays 305A-E while plasma optical emission spectra are acquired by the spectrometer 310 via a single optical system 300, which will be described in greater detail later. This embodiment is suitable for sequential collection of plasma optical emission spectra, and therefore is more suited for diagnostics of slower-evolving plasma processes. The scanning mirror 400 can be mounted and actuated by a galvanometer stage 410. Alternatively, the scanning mirror 400 may be mounted on and scanned by a stepper motor 410. The number of rays 305A-E here is shown as 5, but in practice it is determined by the settings in the controller software for controlling the galvanometer stage or stepper motor 410. [0041] To ensure that a precise volume of space is sampled, the optical systems 300A-E of Fig. 4 and optical system 300 of Fig. 5 need to be configured such that rays 305A-E are collimated, with as small a divergence angle as can feasibly be achieved for a given target cost of the optical system.

[0042] An exemplary embodiment of optical systems 300A-E and 300 is shown in Fig. 6. The optical system 300A-E, also known as a telecentric coupler, has the task of collecting plasma optical emission spectra from a volume of space within the plasma 50 defined by rays 305A-E, and directing the collected plasma optical emission spectra to the end 390 of an optical fiber 320A-E, or 320, so it can be transmitted to the

spectrometers 310 of embodiments of Figs. 4 or 5. The diameter of the rays 305A-E is defined by an optional aperture 350, formed in a plate. In an alternative embodiment, other optical components, such as lenses can be used to define the diameter of the rays 305A-E. An example ray diameter is 4.5mm but it can vary from about 1 mm to 20mm, depending on the application. The collected rays 305A-E are passed through a combination of collection lenses 360A and 380B which in combination with the optional aperture define the rays 305A-E. The numerical aperture of the collection system and rays 305A-E is generally very low, for example, approximately 0.005, and the resultant rays 305A-E are essentially collimated, with minimal divergence angle. On the other end of optical system 300A-E or 300 is another pair of lenses, i.e. coupling lenses 370A and 370B, which serve to focus the collected optical emission spectra onto the end 390 of the optical fiber 320A-E, or 320. AH lenses used in the system are preferably achromatic, or even apochromatic for more demanding applications, which ensures that the focal length of each lens does not vary with wavelength, such that the optical system 300A-E, or 300, operates satisfactorily over a large range of wavelengths, ttyyppiiccaallllyy ffrroomm 220000nnmm ttoo SSOOOOnnmm,, bbuutt iinn ssoommee ccaasseess ggooiinngg aass llooww aass 115500nnmm.. FFoorr bbeetttteerr ppeerrffoorrmmaannccee iinn tthhee uullttrraavviioolleett ((UUVV)) ppaarrtt ooff tthhee ssppeeccttrruumm,, ii..ee.. 335500nnmm aanndd lleessss,, UUVV--ggrraaddee mmaatteerriiaallss aarree ttoo bbee uusseedd ffoorr aallll ooppttiiccaall ccoommppoonneennttss..

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where I(r, Θ) is the plasma optical emission intensify at a location (r, θ) within and along the ray 100, and w(r, Θ) is the optical efficiency for collection of light from location (r, Θ) by optical detector /. The resultant optical detector output !), represents an integral of the product of these quantities along a straight path from point A to point B on the circumference of the substrate (see Fig. 2), the contributions from plasma outside the circumference of substrate 40 being neglected in this model (this is a valid assumption because the plasma density and thus plasma light emission is generally low in these areas).

[0046] in a plasma optical emission spectroscopy system 15 with N optical detectors and rays, or alternatively N scanned positions of rays 100, there are N collected intensities for each of M measured wavelengths λ. Therefore, to reconstruct a spatial distribution of plasma optical emission at one wavelength λ, a functional form with N parameters has to be assumed. Given the restricted number N of parameters, a judicious choice of basis functions for the distribution of plasma optical emission needs to be made. The selected basis functions need to vary both with radial coordinate r, and also the circumferential coordinate Θ for them to be able to reproduce satisfactorily the circumferential variations of plasma emission across the substrate 40.

[0047] One class of basis functions particularly well suited to this task are Zernike

Z (r θ\

polynomials ^p ' . Zernike polynomials are defined as a product of a term

dependent on radial coordinate r and a term dependent on the circumferential coordinate Θ, i.e.

[0048] Table 1 lists the first 18 order Zernike polynomials, herein denoted using

7"

commonly used mathematical notation ^¾ .

TABLE 1 . The first 18 order Zernike polynomials ^»

1 7 5 1 >/l2(10r⁵ -12 ³ +3r)cos ^

[0049] In general, other basis functions can be chosen in this application, as long as they are orthogonal and as long as their derivatives are continuous over the unit circle, just as is the case with Zernike polynomials. However, Zernike polynomials are preferred in this application because of their property that a relatively small number of terms can be used to describe quite complex variations of a function in polar coordinates, both radial and circumferential.

7 (r θ\

[00S0] Substituting Zernike polynomials ^"p ' into the collected detector output results in

D_t = (r)G(ff)dI

where a_p are fitting parameters associated with every basis function, i.e. Zernike polynomial order.

[0061] Now that the collected detector output !⁾,- is defined in terms of the selected basis functions, fitting parameters, and optical efficiency, the problem of determining the fitting parameters a_P of is reduced to minimizing the following, i.e. solving the least squares problem

( N Λ

ran Υ(Α -Α™^α')Η or

where < represent the measured plasma optical spectra intensities at ray /. This minimization algorithm needs to be repeated for each of M measured wavelengths λ. Many methods are known in the art for solving this least squares problem. Because the dimension of the least squares problem is relatively small it can be efficiently solved for ail wavelengths, for each instant in time that plasma optical emission spectra are measured; and furthermore such calculations can be repeated in rapid succession enabling the determination of rapidly evolving two-dimensional distributions of plasma optical emissions for large numbers M of wavelengths. From these one can then determine the time-evolving two-dimensional distributions of chemical species concentrations across the substrate 40, which can be used for endpoint detection, fault detection, process development, processing tool development, etc.

[00S2] Fig. 7 shows an example of one such plasma optical emission intensity distribution determined with the method in accordance with an embodiment of the invention. The depicted distribution clearly shows good capture of both radial and circumferential variations in the plasma optical emission intensity, despite a relatively low number of terms, i.e. N=18.

[0053] Fig. 8 shows an alternative embodiment in which a single channel

spectrometer 310 is used. Rays 305A-E are formed by the scanning mirror 400 and a mirror system 800 which moves a center of rotation of the rays 305A-E from a location of the stepper motor 410 associated with the scanning mirror 400 to the optica! window 70 or substantially near the optical window 70 as indicated by point C in Fig. 8 (i.e., point C shows the center of rotation). The optical window 70 is typically small (i.e., one inch in diameter) thus in order to sweep out rays 305A-E across the plasma 50 (e.g. , an angle 9_max =25° of a center axis of the plasma processing chamber 20), rays 305A-E have a minimal excursion at the optical window 70. Therefore, the center of rotation of rays 305A-E is configured to be substantially near or at the optical window 70. Using the configuration described herein, using a window having a dimension of

68.5mmx8mm or larger is possible. The window dimension (i.e., upper limit) is limited by factors such as contamination, chamber UV and RF leakage, and available space at the wail of the plasma processing chamber 20. in one implementation, the window may have a rectangular shape with the large dimension in a plane corresponding to the plane of scanning of the beam. That has the advantage of minimizing the size of the window while satisfying leakage and space requirements.

[0054] The scanning mirror 400 is controllably scanned to sweep out rays 305A-E using the stepper motor 410 while the plasma optical emission spectra are acquired by the spectrometer 310 via a single optical system 300.

[006S] The mirror system 800 may include a transfer mirror 802 and a fold mirror 804. Each collected ray 305A-E or 65 (i.e., optical signal from a plasma with collected ray 305) is transmitted by the transfer mirror 802 which reflects the collected ray 305 and transfers the collected ray 305 to the fold mirror 804. The fold mirror 804 reflects the collected ray 305 from horizontal (azimutba!) to vertical concentric and transmit the collected ray 305 to the scanning mirror 400 which reflects the collected ray 305 to the optical system 300. The mirror system 800 and the optical system 300 are stationary. The mirror system 800, the scanning mirror 400, the optical system 300, and the spectrometer 310 may be mounted proximate to the plasma processing chamber 20. [0056] As the scanning mirror 400 is swept, a high spatial resolution of the spatial distribution of chemical species concentrations is obtained. For example, the scanning mirror 400 may be swept siowiy while the plasma optical emission spectra is acquired. The acquired plasma optical emission spectra is associated with any position between -0max°,⁺0max°- Thus, using the scanning setup described herein, a very precise spatial resolution may be obtained.

[00S7] FIG. 9 is an expanded schematic view of an embodiment of the optical system 300 of Fig. 8 in accordance with an embodiment. The optical system 300 has the task of collecting plasma optical emission spectra from a volume of space within the plasma 50 defined by collected rays 305, and directing the collected plasma optical emission spectra to the end 390 of the optical fiber 320, so it can be transmitted to the spectrometer 310 as described previously herein. Optical system 300 includes a teiecentric coupler with a small NA. The collected scanning rays sizes can vary from about 3 to 5 mm in diameter along the collection path.

[00S8] The collected ray 305 (i.e., reflected from the scanning mirror 400) is passed through a first collection lens 902. Then, the rays may be passed through a teiecentric aperture 908, for example having a diameter of 600μιη. Then, two coupling lenses 904 and 906, serve to focus the collected optical emission spectra onto the end 390 of the optical fiber 320. In one example, the optical fiber 320 has a diameter of ΘΟΟμηι. The collection system 300 may also include an optional filter positioned between the two coupling lenses 904 and 906.

[0059] The numerical aperture of the collection system 300 is very low, for example 0,005. Lenses 902, 904, 906 are achromatic lenses having effective focal lengths of 30mm, 12.5mm, and 12.5mm, and diameters of 12.5mm, 6.25mm, and 6.25mm, respectively.

[0060] Referring back to Fig. 8, the scanning mirror 400 may have a dimension of at least 10mm xl Qmm. The transfer mirror 802 may be a spherical mirror. The scanning mirror 400 and the transfer mirror 802 may have an Aluminum coating, a Silicon Monoxide (SiO) overcoat, or a multilayer film of dielectrics on top of aluminum to increase the reflectance in certain wavelength regions (e.g., UV). The transfer mirror's 802 radius may be between 100mm to 120mm, in one implementation, the transfer mirror's 802 radius is 109.41 1 mm. The transfer mirror 802 may be positioned at a distance of 68.4mm from an outer edge of the optical window 70. The fold mirror 804 may be positioned at a distance of 71 .5mm from the plane of the scanning mirror 400.

[0061] Spectrometer 310 may be an ultra broadband (UBB) high resolution spectrometer with a spectral resolution of 0.4 nm and having a wavelength range between 200nm-1000nm.

[0062] Fig. 10 is a top view schematic of the plasma processing system equipped with the optical system of FIG. 8. The plasma processing chamber 20 may be equipped with two optical systems of FIG. 8. The optical system is referred to as a scanning module. Each scanning module may be configured to collect data from X to Y ray positions. In one implementation, each scanning module may be configured to collect data from 5 to 50 ray positions which provide better accuracy to detect events with high spatial resolution. In Fig. 10, one position of ray 305 is shown. As described previously herein, scan angle of rays 305 may vary from - 0_max°,+9_r!iax° (e.g.,

or 30°). Data from spectrometers 310 are processed as described previously herein to obtain the two dimensional (2D) OES intensity distribution. Each module may include a single channel spectrometer 310, or alternatively a single spectrometer having two channels may be used for the two scanning modules. Additional scanning modules may also be used to provide higher spatial resolution. Optical windows 70 (i.e., optical window 70 of each scanning module) may be located on the side wail of the plasma processing chamber 20 perpendicular or substantially perpendicular to each other. Depending on the configuration of plasma processing chamber 20, the optical windows 70 may be quartz, fused silica, or sapphire depending on the application and how aggressive the chemistry of the plasma. [0063] Fig. 1 1 is an expanded schematic view of an embodiment of the optical system 300 of Fig. 5 or Fig. 8. The optical system 300 has the task of directing the reflected collected plasma optical emission spectra from the scanning mirror 400 to the end 390 of the optical fiber 320, so if can be transmitted to the spectrometer 310 as described previously herein. The collected ray 305 is passed through a collection lens which may be a triplet lens 1 102, for example having an effective focal length of 40mm. The coliected ray 305 may be passed through an optional mask aperture 1 108, for example having a diameter of 7mm. The mask aperture 1 108 may be positioned between the scanning mirror 400 and the triplet lens 1 102. Then, the coliected ray 305 may be passed through an optional teiecentric aperture 1 1 10, for example having a diameter of 1 .20mm. in an alternative embodiment, other optica! components, such as lenses can be used to define the diameter of the rays 305.

[0064] Two coupling triplet lenses 1 104 and 1 108, serve to focus the coliected optical emission spectra onto the end 390 of the optical fiber 320. In one implementation, the coupling triplet lenses 1 104 and 1 108 may be triplet lenses having effective focal lengths of 15mm. The effective focal lengths of the coupling triplet lenses 1 104 and 1 106 is a function of a type and a diameter of the optical fiber 320.

[0065] All lenses used in the system are preferably achromatic, or even

apochromatic for more demanding applications, which ensures that the focal length of each lens does not vary with wavelength, such that the optica! system 300A-E, or 300, operates satisfactorily over a large range of wavelengths, typically from 200nm to 1000nm, but in some cases going as low as 150nm. For better performance in the UV part of the spectrum, i.e. 350nm and less, UV-grade materials such as quartz, fused silica, Calcium fluoride (CaF2) are used for ail optical components. [0066] FIG. 12 is a schematic of an alternative embodiment in which a single channel spectrometer 310 is used. The plasma optical emission spectra can be acquired sequentially using one or two modules. Each module may include a linear arc stage 1204. The spectrometer 310, the optical system 300, and a fold mirror 1202 are mounted on the linear arc stage 1204. The fold mirror 1202 is positioned to receive the collected ray 305 from the plasma processing chamber 20 and to reflect the collected ray 305 to the optical system 300. The linear arc stage 1204 is controllabiy scanned to sweep out collected rays 305 while the plasma optical emission spectra are acquired by the spectrometer 310 via a single optical system 300. The linear arc stage 1204 may be controlled via the controller 80. Point C in Fig. 12 indicates the center of rotation of the linear arc stage 1204. The single optical system 300 may be that shown and described in Fig. 9 or Fig. 1 1 . In one implementation, the linear arc stage 1204 may have a scanning angle of 85° and a length of 183,2mm. The linear scanning speed may vary from 0.35m/s to 2.2m/s. Thus, the scanning speed may be adjusted to optimize a tradeoff between spatial resolution and speed depending on the application of the plasma optical emission spectroscopy system 15.

[0067] In further embodiments of optical system 300 of Figs. 8, 9, and 1 1 , other optical components may be used, such as mirrors, prisms, lenses, spatial light modulators, digital micromirror devices, and the like, to steer the collected rays 305. The configuration and component layout of the optical system 300 of Figs. 4-8, and Figs. 8-12 do not necessary need to be as shown exactly in Figs. 4-8, and Figs. 8-12, but the collected rays 305 can be folded and steered by way of additional optical components to facilitate packaging the plasma optical emission spectroscopy system 15 into a compact packaging suitable for mounting on the wail of the plasma processing chamber 20.

[0068] The inventors performed several experiments to reconstruct patterns of optical emission distribution and to compare the reconstructed patterns to etch patterns.

[0069] FIG. 13 is a schematic that shows exemplary results of reconstructed patterns of optical emission intensity. The intensity of an emission line (i.e., 522.45 nm for silicon chloride) indicates the concentration of silicon chloride (SiCl) which in turn is associated with the intensity of local etching on the substrate 40. Fig. 13 shows a comparison between an actual etch rate and an actual distribution of the optical emission acquired by the plasma OES system 15 described herein at 522.5nm. Plots 1302, 1304, and 1306 show actual etching rate for various samples at various plasma processing conditions. Plots 1308, 1310, and 1312 show the reconstructed optical emission distribution for the samples associated with plots 1302, 1304, and 1306, respectively.

[0070] Using the apparatus and methodologies describes herein the etching uniformity may be monitored. For example, the apparatus may be used during process development to monitor the etching uniformity for various plasma processing conditions without transferring the substrate to another apparatus which makes the development of various processes faster.

[0071] The results show strong correlation between the etching thickness and the reconstructed OES distribution given by plasma etching involved species, including both reactants and products. The uniformity of OES distribution and Oxide etching profile follows the same trend, for example plot 1302 compared to plot 1308. Substrate with better etching uniformity shows lower correlation with OES distribution (e.g., plot 1306 compared to plot 1302).

[0072] FIG. 14 is a flowchart that shows a method 1400 for optical emission measurement according to one example. At 1402, an optical window is deposited at a wall of a plasma processing chamber (e.g. , the plasma processing chamber 20). At 1404, a collection system is provided for collecting plasma optical emission spectra through the optical window. The collection system may include a mirror and a teiecentric coupler. The teiecentric coupler may include at least one collection lens (e.g., collection lens 360A and 360B) and at least one coupling lens (e.g., coupling lenses 904 and 906 of FIG. 9). At 1406, a plurality of non-coincident rays is scanned across the plasma processing chamber using the mirror. The scanning may be controlled by the controller 80. At 1408, an optical signal is collected from a plasma via the

teiecentric coupler. At step 1410, the optical signal is directed to a spectrometer for measuring the plasma optical emission spectra.

[0073] Persons skilled in the relevant art can appreciate that many modifications and variations are possible in light of the above teaching. Persons skilled in the art will recognize various equivalent combinations and substitutions for various components shown in the figures, it is therefore intended that the scope of the invention be limited not by this detailed description, but rather by the claims appended hereto.

[0074] The above disclosure also encompasses the embodiments listed below.

[0075] (1 ) A method for optical emission measurement, comprising depositing an optical window at a wail of a plasma processing chamber; providing a collection system for collecting plasma optical emission spectra through the optical window, the collection system including a mirror and a teiecentric coupler; scanning a plurality of non- coincident rays across the plasma processing chamber using the mirror; collecting an optical signal from a plasma via the telecentric coupler; and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

[0076] (2) The method of feature (1 ), wherein the telecentric coupler includes at least one collection lens; and at least one coupling lens.

[0077] (3) The method of feature (2), in which the at least one collection lens or the at least one coupling lens are achromatic lenses.

[0078] (4) The method of feature (2), in which the telecentric coupler further includes: an aperture disposed between the at least one collection lens and the at least coupling lens for defining a diameter of the plurality of non-coincident rays.

[0079] (5) The method of any of features (1 ) to (4), in which the mirror is a scanning mirror.

[0080] (8) The method of feature (5), in which the scanning mirror is mounted on and scanned by a galvanometer scanning stage.

[0081] (7) The method of feature (5), in which the scanning mirror is mounted on and scanned by a stepper motor.

[0082] (8) The method of feature (5), in which the collection system further includes a mirror system for shifting a center of rotation of the plurality of non-coincident rays to the optical window or near the optical window.

[0083] (9) The method of feature (8), in which the mirror system includes a transfer mirror; a fold mirror; and in which the transfer mirror is configured to transfer the collected signal to the fold mirror and the fold mirror is configured to transfer the collected signal to the mirror. [0084] (10) The method of feature (1 ), in which the teiecentric coupler includes a collection triplet lens configured to collect the optical signal from the mirror; and two coupling triplet lenses configured to focus the collected signal info an end of an optical fiber coupled to the spectrometer.

[008S] (1 1 ) The method of feature (1 ), further comprising collecting the plasma optical emission spectra via a second optical window disposed at the wail of the plasma processing chamber using a second collection system. The center axis of the second optical window is perpendicular to the center axis of the optical window.

[0086] (12) The method of feature (1 ), in which the collection system further includes a linear arc stage holding the mirror, the teiecentric coupler, and the spectrometer, the linear arc stage being configured to move radially with respect to a center axis of the optical window causing the plurality of non-coincident rays to scan across the plasma processing chamber.

[0087] (13) The method of feature (12), in which the mirror is a fold mirror.

[0088] (14) The method of any of features (1 ) to (13), in which the plurality of non- coincident rays are scanned 25° of a center axis of the optical window across the plasma processing chamber.

[0089] (15) The method of any of features (1 ) to (14), in which the spectrometer is an ultra broadband high resolution spectrometer.

[0090] (16) The method of any of features (1 ) to (15), in which the collection system has a low numerical aperture.

[0091] (17) The method of any of features (1 ) to (14), in which the optical signal is collected from 21 non-coincident rays.

Claims

What is claimed is:

1 . An apparatus for optical emission measurement, the apparatus comprising:

a collection system for collecting a plasma optical emission spectra through an optical window disposed at a wall of a plasma processing chamber, the optical system including:

a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber; and

a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

2. The apparatus of claim 1 , wherein the telecentric coupler includes:

at least one collection lens; and

at least one coupling lens.

3. The apparatus of claim 2, wherein the at least one collection lens or the at least one coupling lens are achromatic lenses.

4. The apparatus of claim 2, wherein the telecentric coupler further includes:

an aperture disposed between the at least one collection lens and the at least coupling lens for defining a diameter of the plurality of non-coincident rays.

The apparatus of claim 1 , wherein the mirror is a scanning mirror.

6. The apparatus of claim 5, wherein the scanning mirror is mounted on and scanned by a galvanometer scanning stage.

7. The apparatus of claim 5, wherein the scanning mirror is mounted on and scanned by a stepper motor.

8. The apparatus of claim 5, wherein the collection system further includes:

a mirror system for shifting a center of rotation of the plurality of non- coincident rays to the optical window or near the optical window.

9. The apparatus of claim 8, wherein the mirror system includes:

a transfer mirror;

a fold mirror; and

wherein the transfer mirror is configured to transfer the collected signal to the fold mirror and the fold mirror is configured to transfer the collected signal to the mirror.

10. The apparatus of claim 1 , wherein the telecentric coupler includes:

a collection triplet lens configured to collect the optical signal from the mirror; and

two coupling triplet lenses configured to focus the collected signal into an end of an optical fiber coupled to the spectrometer.

The apparatus of claim 1 , further comprising: a second collection system for collecting the plasma optical emission spectra through a second optical window disposed at the wall of the plasma processing chamber, the second optical window having a center axis perpendicular to the center axis of the optical window.

12. The apparatus of claim 1 , wherein the collection system further includes:

a linear arc stage holding the mirror, the teiecentric coupler, and the spectrometer, the linear arc stage being configured to move radially with respect to a center axis of the optical window causing the plurality of non-coincident rays to scan across the plasma processing chamber.

13. The apparatus of claim 12, wherein the mirror is a fold mirror.

14. The apparatus of claim 1 , wherein the plurality of non-coincident rays are scanned 25° of a center axis of the optical window across the plasma processing chamber.

15. The apparatus of claim 1 , wherein the spectrometer is an ultra broadband high resolution spectrometer.

16. The apparatus of claim 1 , wherein the collection system has a low numerical aperture.

17. The apparatus of claim 1 , wherein the optical signal is collected from 21 non- coincident rays.

18. A system for plasma processing, comprising:

a plasma processing chamber;

an optical window disposed on a wall of the plasma processing chamber; a collection system for collecting plasma optical emission spectra through the optical window;

a spectrometer coupled to the collection system for measuring the plasma optical emission spectra; and

wherein the coliection system includes

a mirror configured to scan a plurality of non-coincident rays across the plasma processing chamber, and

a telecentric coupler for collecting an optical signal from a plasma and directing the optical signal to the spectrometer.

19. A method for optical emission measurement, comprising:

depositing an optical window at a wall of a plasma processing chamber; providing a collection system for collecting plasma optical emission spectra through the optical window, the collection system including a mirror and a telecentric coupler;

scanning a plurality of non-coincident rays across the plasma processing chamber using the mirror;

collecting an optical signal from a plasma via the telecentric coupler; and directing the optical signal to a spectrometer for measuring the plasma optical emission spectra.

20. The method of claim 19, further comprising:

shifting a center of rotation of the plurality of non-coincident rays to the optical window or near the optical window using a mirror system, the mirror system including at least a transfer mirror and a fold mirror.