WO2019006601A1 - Polishing agent, copper part and polishing process therefor - Google Patents

Polishing agent, copper part and polishing process therefor Download PDF

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Publication number
WO2019006601A1
WO2019006601A1 PCT/CN2017/091535 CN2017091535W WO2019006601A1 WO 2019006601 A1 WO2019006601 A1 WO 2019006601A1 CN 2017091535 W CN2017091535 W CN 2017091535W WO 2019006601 A1 WO2019006601 A1 WO 2019006601A1
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Prior art keywords
parts
polishing
polishing agent
weight
copper
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PCT/CN2017/091535
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French (fr)
Chinese (zh)
Inventor
刘国平
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深圳市宏昌发科技有限公司
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Priority to CN201780092840.7A priority Critical patent/CN110832043A/en
Priority to PCT/CN2017/091535 priority patent/WO2019006601A1/en
Publication of WO2019006601A1 publication Critical patent/WO2019006601A1/en

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/06Other polishing compositions
    • C09G1/14Other polishing compositions based on non-waxy substances

Definitions

  • Polishing agent copper piece and polishing treatment method thereof
  • the present invention relates to the field of iron surface treatment technology, and in particular, to a polishing agent, a copper member, and a polishing treatment method thereof.
  • the surface treatment technology of the workpiece is usually applied.
  • the surface treatment processes of copper, aluminum, iron and their alloys are well-established in a wide range of industries.
  • most workpieces require pre-treatment before surface treatment, for example, cleaning, decontamination and degreasing, and metal workpieces for certain applications need to be polished.
  • polishing agent which is safe, environmentally friendly, and easy to operate at a normal temperature, and a copper member polishing method and a copper member obtained by polishing are provided.
  • a polishing agent comprising the following components by weight: 30-100 parts of sulfuric acid, 50-200 parts of glacial acetic acid, 5-20 parts of potassium nitrate, 1-4 parts of thiourea, 40-150 parts of acetanilide, 20 - 60 parts of sodium tripolyphosphate, 20-80 parts of polyethylene glycol and 1000 parts of water.
  • a copper member polishing treatment method comprising the steps of: formulating a polishing agent as described above; immersing the copper member in a polishing agent, and washing the copper member after a predetermined inter-turn treatment.
  • Embodiments of the present invention provide a polishing agent for surface pretreatment of copper parts, comprising the following components by weight: 30-100 parts of sulfuric acid, 50-200 parts of glacial acetic acid, 5-20 parts of potassium nitrate, 1- 4 parts of thiourea, 40-150 parts of acetanilide, 20-60 parts of sodium tripolyphosphate, 20-80 parts of polyethylene glycol and 1000 parts of water.
  • the sulfuric acid is in a range of 40 to 80 parts by weight.
  • the weight fraction of the glacial acetic acid is preferably 100-20
  • the potassium nitrate is preferably 10-20 parts by weight
  • the thiourea is preferably 2-4 parts by weight.
  • the acetanilide preferably has a weight fraction of 50 to 130 parts, and the weight fraction of the sodium tripolyphosphate is preferably
  • the amount by weight of the polyethylene glycol is preferably 30 to 70 parts by weight of 30 to 50 parts.
  • polyethylene glycol and acetanilide make the workpiece evenly polished.
  • Embodiments of the present invention also provide a copper member polishing treatment method, comprising the steps of: preparing a polishing agent as described above; immersing the copper member in a polishing agent solution, and after washing the copper material, after a predetermined daytime treatment, Dry
  • the predetermined time interval is 1-10 minutes. Further, after polishing, it is passivated, then washed with water and dried. After polishing, the temperature is controlled at 20 ° C - 25 ° C, that is, polishing at room temperature. Further, pretreatment such as degreasing and degreasing is performed before polishing.
  • Embodiments of the present invention also provide a copper member which is subjected to a polishing treatment by a copper member polishing treatment method as described above to form a copper member to form a clean and bright surface.
  • the ingredients are mixed according to the following parts by weight: 30 parts of sulfuric acid, 50 parts of glacial acetic acid, 5 parts of potassium nitrate, 1 part of thiourea
  • Treatment method preparing a polishing agent; the copper piece should first remove the oil and descaling, then wash the water, and then immerse the treated copper piece in the polishing agent solution, after shaking for 10 minutes by the vibration machine, wash the copper piece, Repassivation, washing, drying.
  • the ingredients are mixed according to the following parts by weight: 50 parts of sulfuric acid, 100 parts of glacial acetic acid, 10 parts of potassium nitrate, 2 parts of thiourea, 80 parts of acetanilide, 30 parts of sodium tripolyphosphate, 40 parts of polyethylene glycol and 1000 parts Water.
  • Treatment method preparing a polishing agent; the copper piece should be degreased and descaled, then washed, and then the treated copper piece is immersed in the polishing agent solution, and after being shaken for 10 minutes by the vibration machine, the copper piece is washed. Repassivation, washing, drying.
  • the ingredients are mixed in the following parts by weight: 80 parts of sulfuric acid, 150 parts of glacial acetic acid, 15 parts of potassium nitrate, 3 parts of thiourea, 120 parts of acetanilide, 45 parts of sodium tripolyphosphate, 50 parts of polyethylene glycol and 1000 parts Water.
  • Treatment method preparing the polishing agent; the copper parts should first remove the oil and descaling, then wash the water, and then immerse the treated copper parts in the polishing agent solution, after shaking for 5 minutes by the vibration machine, wash the copper parts, Repassivation, washing, drying.
  • the ingredients are mixed in the following parts by weight: 100 parts sulfuric acid, 200 parts glacial acetic acid, 20 parts potassium nitrate, 4 parts thiourea, 150 parts acetanilide, 60 parts sodium tripolyphosphate, 80 parts polyethylene glycol and 1000 parts Water.
  • Treatment method preparing a polishing agent; the copper piece should be degreased and descaled, then washed, and then the treated copper piece is immersed in the polishing agent solution, and after being shaken for 3 minutes by the vibration machine, the copper piece is washed. Repassivation, washing, drying.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

A polishing agent, a copper part and a polishing process therefor. The polishing agent is used for surface pretreatment of a copper part and comprises the following components in parts by weight: 30-100 parts of sulfuric acid, 50-200 glacial acetic acid, 5-20 parts of potassium nitrate, 1-4 parts of thiourea, 40-150 parts of acetanilide, 20-60 parts of sodium tripolyphosphate, 20-80 parts of polyethylene glycol, and 1000 parts of water. Processed with the above polishing agent, the surface of a copper part is clean and bright, and the polishing process is simple, safe and environmentally friendly, odorless, convenient to operate and low-cost.

Description

一种抛光剂、 铜件及其抛光处理方法 技术领域  Polishing agent, copper piece and polishing treatment method thereof
[0001] 本发明涉及铁表面处理技术领域, 具体涉及一种抛光剂、 铜件及其抛光处理方 法。  [0001] The present invention relates to the field of iron surface treatment technology, and in particular, to a polishing agent, a copper member, and a polishing treatment method thereof.
背景技术  Background technique
[0002] 为提高产品表面性能或者外观, 通常对工件表面处理技术。 例如, 铜、 铝、 铁 及其合金的表面处理工艺深入各行各业中。 而且, 大多数工件在进行表面处理 前还需要经过预处理, 例如, 进行清洗, 除污除油, 某些用途的金属工件还需 要进行抛光化处理。  [0002] In order to improve the surface properties or appearance of a product, the surface treatment technology of the workpiece is usually applied. For example, the surface treatment processes of copper, aluminum, iron and their alloys are well-established in a wide range of industries. Moreover, most workpieces require pre-treatment before surface treatment, for example, cleaning, decontamination and degreasing, and metal workpieces for certain applications need to be polished.
[0003] 一般在机械加工及电子电气行业, 常见的有铜及铜合金清洁光亮处理, 即抛光 处理。 传统的抛光剂一般采用机械抛光或三酸抛光, 其中机械抛光对于工件几 何形状复杂的抛光效果很差, 三酸抛光中的三酸即浓硫酸, 浓硝酸, 浓磷酸在 高温条件下剧烈反应, 气体挥发很大, 不安全也不环保。  [0003] Generally in the mechanical processing and electrical and electronic industries, copper and copper alloys are commonly cleaned and polished, that is, polished. Conventional polishing agents generally use mechanical polishing or tri-acid polishing. Among them, mechanical polishing has a poor polishing effect on the complex geometry of the workpiece. The tri-acid in the tri-acid polishing is concentrated sulfuric acid, concentrated nitric acid, and concentrated phosphoric acid reacts violently under high temperature conditions. The gas volatilizes very much, is not safe and is not environmentally friendly.
技术问题  technical problem
[0004] 有鉴于此, 提供一种常温下使用, 安全环保、 操作简单的抛光剂, 以及铜件抛 光处理方法和经过抛光处理后制得的铜件。  [0004] In view of the above, a polishing agent which is safe, environmentally friendly, and easy to operate at a normal temperature, and a copper member polishing method and a copper member obtained by polishing are provided.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0005] 一种抛光剂, 包括如下重量份数的成分 30-100份硫酸, 50-200份冰醋酸, 5-20 份硝酸钾, 1-4份硫脲, 40-150份乙酰苯胺, 20-60份三聚磷酸钠, 20-80份聚乙二 醇和 1000份水。  [0005] A polishing agent comprising the following components by weight: 30-100 parts of sulfuric acid, 50-200 parts of glacial acetic acid, 5-20 parts of potassium nitrate, 1-4 parts of thiourea, 40-150 parts of acetanilide, 20 - 60 parts of sodium tripolyphosphate, 20-80 parts of polyethylene glycol and 1000 parts of water.
[0006] 一种铜件抛光处理方法, 其包括下列步骤: 配制如上所述的抛光剂; 将铜件浸 入抛光剂中, 经过预定吋间处理后, 水洗铜件。  A copper member polishing treatment method comprising the steps of: formulating a polishing agent as described above; immersing the copper member in a polishing agent, and washing the copper member after a predetermined inter-turn treatment.
[0007] 以及, 一种铜件, 其表面通过如上所述的铜件抛光处理方法进行抛光。 [0007] Also, a copper member whose surface is polished by a copper member polishing treatment method as described above.
发明的有益效果  Advantageous effects of the invention
有益效果 [0008] 经过上述抛光剂处理后, 铜件表面清洁光亮, 而且整个抛光处理方法工艺简单 、 安全环保, 无气味, 操作方便, 使用成本低。 Beneficial effect [0008] After the above polishing agent treatment, the surface of the copper piece is clean and bright, and the whole polishing treatment method is simple, safe and environmentally friendly, odorless, convenient to operate, and low in use cost.
本发明的实施方式 Embodiments of the invention
[0009] 以下将结合具体实施例对本发明进行详细说明。 The present invention will be described in detail below with reference to specific embodiments.
[0010] 本发明实施例提供一种抛光剂, 用于铜件表面预处理, 包括如下重量份数的成 分 30-100份硫酸, 50-200份冰醋酸, 5-20份硝酸钾, 1-4份硫脲, 40-150份乙酰苯 胺, 20-60份三聚磷酸钠, 20-80份聚乙二醇和 1000份水。  [0010] Embodiments of the present invention provide a polishing agent for surface pretreatment of copper parts, comprising the following components by weight: 30-100 parts of sulfuric acid, 50-200 parts of glacial acetic acid, 5-20 parts of potassium nitrate, 1- 4 parts of thiourea, 40-150 parts of acetanilide, 20-60 parts of sodium tripolyphosphate, 20-80 parts of polyethylene glycol and 1000 parts of water.
[0011] 具体地, 所述硫酸的重量份数为 40-80份。 所述冰醋酸的重量份数优选为 100-20[0011] Specifically, the sulfuric acid is in a range of 40 to 80 parts by weight. The weight fraction of the glacial acetic acid is preferably 100-20
0份, 所述硝酸钾的重量份数优选为 10-20份, 所述硫脲的重量份数优选为 2-4份0 parts by weight, the potassium nitrate is preferably 10-20 parts by weight, and the thiourea is preferably 2-4 parts by weight.
。 所述乙酰苯胺的重量份数优选为 50-130份, 所述三聚磷酸钠的重量份数优选为. The acetanilide preferably has a weight fraction of 50 to 130 parts, and the weight fraction of the sodium tripolyphosphate is preferably
30-50份, 所述聚乙二醇的重量份数优选为 30-70份。 The amount by weight of the polyethylene glycol is preferably 30 to 70 parts by weight of 30 to 50 parts.
[0012] 在上述抛光剂中, 通过控制各成分配比平衡, 以达到较佳抛光效果。 硫酸、 冰 醋酸为抛光主要反应成分, 硝酸钾和三聚磷酸钠辅助抛光, 硫脲防止反应过快[0012] In the above polishing agent, a better polishing effect is achieved by controlling the balance of the respective distribution ratios. Sulfuric acid, ice acetic acid is the main reaction component of polishing, potassium nitrate and sodium tripolyphosphate are auxiliary polishing, and thiourea prevents the reaction too fast.
, 聚乙二醇和乙酰苯胺使工件能够均匀的被抛光。 , polyethylene glycol and acetanilide make the workpiece evenly polished.
[0013] 本发明实施例还提供一种铜件抛光处理方法, 其包括下列步骤: 配制如上所述 的抛光剂; 将铜件浸入抛光剂溶液中, 经过预定吋间处理后, 水洗铜件, 干燥 [0013] Embodiments of the present invention also provide a copper member polishing treatment method, comprising the steps of: preparing a polishing agent as described above; immersing the copper member in a polishing agent solution, and after washing the copper material, after a predetermined daytime treatment, Dry
[0014] 具体地, 所述预定吋间为 1-10分钟。 进一步地, 在经过抛光后, 再钝化, 然后 水洗, 干燥。 抛光处理吋, 温度控制在 20°C-25°C, 即常温下进行抛光处理。 更 进一步地, 在抛光前, 先进行除油脱脂等预处理。 [0014] Specifically, the predetermined time interval is 1-10 minutes. Further, after polishing, it is passivated, then washed with water and dried. After polishing, the temperature is controlled at 20 ° C - 25 ° C, that is, polishing at room temperature. Further, pretreatment such as degreasing and degreasing is performed before polishing.
[0015] 经过上述抛光剂处理后, 铜件表面清洁光亮, 而且整个抛光处理方法工艺简单[0015] After the above polishing agent treatment, the surface of the copper piece is clean and bright, and the entire polishing process is simple
、 安全环保, 无气味, 操作方便, 使用成本低。 , safe and environmentally friendly, odorless, easy to operate, low cost of use.
[0016] 本发明实施例还提供一种铜件, 其通过如上所述的铜件抛光处理方法进行抛光 处理, 使铜件形成清洁光亮的表面。 [0016] Embodiments of the present invention also provide a copper member which is subjected to a polishing treatment by a copper member polishing treatment method as described above to form a copper member to form a clean and bright surface.
[0017] 实施例 1 [0017] Embodiment 1
[0018] 按照下列重量份数混合各成分: 30份硫酸, 50份冰醋酸, 5份硝酸钾, 1份硫脲  [0018] The ingredients are mixed according to the following parts by weight: 30 parts of sulfuric acid, 50 parts of glacial acetic acid, 5 parts of potassium nitrate, 1 part of thiourea
, 40份乙酰苯胺, 20份三聚磷酸钠, 20份聚乙二醇和 1000份水。 [0019] 处理方法: 配制好抛光剂; 铜件应先除油和除氧化皮, 然后水洗, 再将处理好 的铜件浸入抛光剂溶液中, 经震机震动 10分钟后, 水洗铜件, 再钝化, 水洗, 干燥。 40 parts of acetanilide, 20 parts of sodium tripolyphosphate, 20 parts of polyethylene glycol and 1000 parts of water. [0019] Treatment method: preparing a polishing agent; the copper piece should first remove the oil and descaling, then wash the water, and then immerse the treated copper piece in the polishing agent solution, after shaking for 10 minutes by the vibration machine, wash the copper piece, Repassivation, washing, drying.
[0020] 经过上述抛光剂溶液处理后, 观察工件表面, 整个表面清洁光亮, 颜色一致, 亮度比抛光之前提高 30%以上。  [0020] After the above polishing agent solution is treated, the surface of the workpiece is observed, the entire surface is clean and bright, the color is uniform, and the brightness is increased by more than 30% than before polishing.
[0021] 实施例 2 Embodiment 2
[0022] 按照下列重量份数混合各成分: 50份硫酸, 100份冰醋酸, 10份硝酸钾, 2份硫 脲, 80份乙酰苯胺, 30份三聚磷酸钠, 40份聚乙二醇和 1000份水。  [0022] The ingredients are mixed according to the following parts by weight: 50 parts of sulfuric acid, 100 parts of glacial acetic acid, 10 parts of potassium nitrate, 2 parts of thiourea, 80 parts of acetanilide, 30 parts of sodium tripolyphosphate, 40 parts of polyethylene glycol and 1000 parts Water.
[0023] 处理方法: 配制好抛光剂; 铜件应先除油和除氧化皮, 然后水洗, 再将处理好 的铜件浸入抛光剂溶液中, 经震机震动 10分钟后, 水洗铜件, 再钝化, 水洗, 干燥。  [0023] Treatment method: preparing a polishing agent; the copper piece should be degreased and descaled, then washed, and then the treated copper piece is immersed in the polishing agent solution, and after being shaken for 10 minutes by the vibration machine, the copper piece is washed. Repassivation, washing, drying.
[0024] 经过上述抛光剂溶液处理后, 观察工件表面, 整个表面清洁光亮, 颜色一致, 亮度比抛光之前提高 50%以上。  [0024] After the above polishing agent solution treatment, the surface of the workpiece is observed, the entire surface is clean and bright, the color is uniform, and the brightness is increased by more than 50% than before polishing.
[0025] 实施例 3 Embodiment 3
[0026] 按照下列重量份数混合各成分: 80份硫酸, 150份冰醋酸, 15份硝酸钾, 3份硫 脲, 120份乙酰苯胺, 45份三聚磷酸钠, 50份聚乙二醇和 1000份水。  [0026] The ingredients are mixed in the following parts by weight: 80 parts of sulfuric acid, 150 parts of glacial acetic acid, 15 parts of potassium nitrate, 3 parts of thiourea, 120 parts of acetanilide, 45 parts of sodium tripolyphosphate, 50 parts of polyethylene glycol and 1000 parts Water.
[0027] 处理方法: 配制好抛光剂; 铜件应先除油和除氧化皮, 然后水洗, 再将处理好 的铜件浸入抛光剂溶液中, 经震机震动 5分钟后, 水洗铜件, 再钝化, 水洗, 干 燥。  [0027] Treatment method: preparing the polishing agent; the copper parts should first remove the oil and descaling, then wash the water, and then immerse the treated copper parts in the polishing agent solution, after shaking for 5 minutes by the vibration machine, wash the copper parts, Repassivation, washing, drying.
[0028] 经过上述抛光剂溶液处理后, 观察工件表面, 整个表面清洁光亮, 颜色一致, 亮度比抛光之前提高 70%以上。  [0028] After the above polishing agent solution treatment, the surface of the workpiece is observed, the entire surface is clean and bright, the color is uniform, and the brightness is increased by more than 70% before polishing.
[0029] 实施例 4 Embodiment 4
[0030] 按照下列重量份数混合各成分: 100份硫酸, 200份冰醋酸, 20份硝酸钾, 4份 硫脲, 150份乙酰苯胺, 60份三聚磷酸钠, 80份聚乙二醇和 1000份水。  [0030] The ingredients are mixed in the following parts by weight: 100 parts sulfuric acid, 200 parts glacial acetic acid, 20 parts potassium nitrate, 4 parts thiourea, 150 parts acetanilide, 60 parts sodium tripolyphosphate, 80 parts polyethylene glycol and 1000 parts Water.
[0031] 处理方法: 配制好抛光剂; 铜件应先除油和除氧化皮, 然后水洗, 再将处理好 的铜件浸入抛光剂溶液中, 经震机震动 3分钟后, 水洗铜件, 再钝化, 水洗, 干 燥。  [0031] Treatment method: preparing a polishing agent; the copper piece should be degreased and descaled, then washed, and then the treated copper piece is immersed in the polishing agent solution, and after being shaken for 3 minutes by the vibration machine, the copper piece is washed. Repassivation, washing, drying.
[0032] 经过上述抛光剂溶液处理后, 观察工件表面, 整个表面清洁光亮, 颜色一致, 亮度比抛光之前提高 70%以上。 [0032] After the above polishing agent solution is processed, the surface of the workpiece is observed, and the entire surface is clean and bright, and the color is uniform. Brightness is increased by more than 70% compared to before polishing.
需要说明的是, 本发明并不局限于上述实施方式, 根据本发明的创造精神, 本 领域技术人员还可以做出其他变化, 这些依据本发明的创造精神所做的变化, 都应包含在本发明所要求保护的范围之内。  It should be noted that the present invention is not limited to the above embodiments, and other changes can be made by those skilled in the art according to the inventive spirit of the present invention. These changes according to the inventive spirit of the present invention should be included in the present invention. Within the scope of the claimed invention.

Claims

权利要求书 Claim
[权利要求 1] 一种抛光剂, 其特征在于, 包括如下重量份数的成分 30-100份硫酸,  [Claim 1] A polishing agent comprising the following components by weight: 30-100 parts of sulfuric acid,
50-200份冰醋酸, 5-20份硝酸钾, 1-4份硫脲, 40-150份乙酰苯胺, 20 -60份三聚磷酸钠, 20-80份聚乙二醇和 1000份水。  50-200 parts glacial acetic acid, 5-20 parts potassium nitrate, 1-4 parts thiourea, 40-150 parts acetanilide, 20-60 parts sodium tripolyphosphate, 20-80 parts polyethylene glycol and 1000 parts water.
[权利要求 2] 如权利要求 1所述的抛光剂, 其特征在于, 所述硫酸的重量份数为 40- [Claim 2] The polishing agent according to claim 1, wherein the sulfuric acid is 40 parts by weight
80份。 。 80 copies. .
[权利要求 3] 如权利要求 1所述的抛光剂, 其特征在于, 所述冰醋酸的重量份数为 1  [Claim 3] The polishing agent according to claim 1, wherein the glacial acetic acid is 1 part by weight
00-200份。  00-200 servings.
[权利要求 4] 如权利要求 1所述的抛光剂, 其特征在于, 所述硝酸钾的重量份数为 1  [Claim 4] The polishing agent according to claim 1, wherein the potassium nitrate has a weight fraction of 1
0-20份。  0-20 parts.
[权利要求 5] 如权利要求 1所述的抛光剂, 其特征在于, 所述硫脲的重量份数为 2-4 份。  [Claim 5] The polishing agent according to claim 1, wherein the thiourea is in an amount of 2 to 4 parts by weight.
[权利要求 6] 如权利要求 1所述的抛光剂, 其特征在于, 所述乙酰苯胺的重量份数 为 50- 130份。  [Claim 6] The polishing agent according to claim 1, wherein the acetanilide has a weight fraction of 50 to 130 parts.
[权利要求 7] 如权利要求 1所述的抛光剂, 其特征在于, 所述三聚磷酸钠的重量份 数为 30-50份, 所述聚乙二醇的重量份数为 30-70份。  [Claim 7] The polishing agent according to claim 1, wherein the sodium tripolyphosphate is 30-50 parts by weight, and the polyethylene glycol is 30-70 parts by weight. .
[权利要求 8] —种铜件抛光处理方法, 其特征在于, 包括下列步骤: 配制如权利要 求 1-7任一项所述的抛光剂; 将铜件浸入抛光剂中, 经过预定吋间处 理后, 水洗铜件。  [Claim 8] A copper member polishing treatment method, comprising the steps of: formulating the polishing agent according to any one of claims 1 to 7; immersing the copper member in a polishing agent, and performing predetermined daytime processing After that, wash the copper pieces.
[权利要求 9] 如权利要求 8所述的铜件抛光处理方法, 其特征在于, 将工件浸入在 抛光剂中, 所述预定吋间为 1-10分钟。  [Claim 9] The copper member polishing method according to claim 8, wherein the workpiece is immersed in a polishing agent, and the predetermined turn is 1-10 minutes.
PCT/CN2017/091535 2017-07-03 2017-07-03 Polishing agent, copper part and polishing process therefor WO2019006601A1 (en)

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CN115433930B (en) * 2022-07-06 2023-11-28 南通群安电子材料有限公司 Non-phosphorus blackening liquid for copper metal grid conductive film and preparation and use methods thereof

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US20040229461A1 (en) * 2003-05-12 2004-11-18 Michael Darsillo Chemical mechanical polishing compositions for copper and associated materials and method of using same
CN101851470A (en) * 2009-04-03 2010-10-06 比亚迪股份有限公司 Chemical polishing liquid and polishing method
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