WO2018196316A1 - 一种微流控芯片弹性模具局部强化成型装置及方法 - Google Patents

一种微流控芯片弹性模具局部强化成型装置及方法 Download PDF

Info

Publication number
WO2018196316A1
WO2018196316A1 PCT/CN2017/109068 CN2017109068W WO2018196316A1 WO 2018196316 A1 WO2018196316 A1 WO 2018196316A1 CN 2017109068 W CN2017109068 W CN 2017109068W WO 2018196316 A1 WO2018196316 A1 WO 2018196316A1
Authority
WO
WIPO (PCT)
Prior art keywords
mold
colloid
machine tool
electrophoresis
mold master
Prior art date
Application number
PCT/CN2017/109068
Other languages
English (en)
French (fr)
Inventor
何俊峰
郭钟宁
邓宇
刘莉
Original Assignee
广东工业大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 广东工业大学 filed Critical 广东工业大学
Priority to US16/153,774 priority Critical patent/US20190039268A1/en
Publication of WO2018196316A1 publication Critical patent/WO2018196316A1/zh

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • B29C33/3857Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
    • B29C33/3878Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts used as masters for making successive impressions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40Plastics, e.g. foam or rubber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/42Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424Moulding surfaces provided with means for marking or patterning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/44Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
    • B29C33/48Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles with means for collapsing or disassembling
    • B29C33/50Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles with means for collapsing or disassembling elastic or flexible
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3807Resin-bonded materials, e.g. inorganic particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/06Condition, form or state of moulded material or of the material to be shaped containing reinforcements, fillers or inserts
    • B29K2105/16Fillers
    • B29K2105/162Nanoparticles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/756Microarticles, nanoarticles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Definitions

  • the invention relates to the technical field of microfluidic chip elastic molds, in particular to a microfluidic chip elastic mold local strengthening forming device and method.
  • Non-metal is widely used as a material with excellent performance in various fields of product processing. According to the good toughness, elasticity, plasticity and other properties of non-metallic materials, the industry commonly uses to make molds, but also because of these properties, it leads to some defects in its own mechanical properties, and also limits its application range in products. In order to improve the strength, hardness, rigidity, wear resistance and corrosion resistance of elastic molds in non-metallic materials, it is necessary to post-treat them to meet the requirements of use and performance.
  • Microfluidics integrates basic operation units such as sample preparation, reaction, separation, and detection in biological, chemical, and medical analysis processes onto a micrometer-scale chip to automatically complete the entire analysis process. Due to its great potential in the fields of biology, chemistry, medicine, etc., it has developed into a new research field of biology, chemistry, medicine, fluids, electronics, materials, machinery and other disciplines. With the significant growth of microfluidic chip applications, there is an urgent need for a method that is fast, simple, inexpensive, and suitable for mass production to produce rigid polymer microfluidic devices.
  • the elastic material polydimethylsiloxane is commonly used to make elastic molds.
  • PDMS elastic mold stamping is mostly used in nano-scale imprinting. It is applied in micron imprinting, although the elasticity of the mold is easy to demould, but its high aspect ratio structure makes it deform during hot pressing, and the high aspect ratio structure is easy to demold when making elastic molds. Tearing, so it is necessary to increase the hardness of the mold while maintaining the elasticity of the mold, to help It is suitable for hot pressing and demoulding of micron-scale high aspect ratio structures.
  • the invention provides a microfluidic chip elastic mold local strengthening forming device and method based on electrophoresis assisting method, which can enhance the mechanical strength of the elastic mold and control the position of the local area of the nanometer in the mold to enhance the mechanical strength of the specific region.
  • the purpose is to achieve high aspect ratio, high depth difference, large-area structure hot pressing and non-destructive demoulding.
  • an embodiment of the present invention provides a microfluidic chip elastic mold local strengthening forming device, comprising a machine tool, a granular colloidal circulation system connected to the machine tool, an electrophoresis auxiliary system, a mold master, and the fixing method.
  • a mold master fixture of a mold master, a processing tank, a vacuum temperature control system the processing tank is disposed on the machine tool, and a mold master of the mold master fixture is installed in the processing tank, the electrophoresis auxiliary system a cathode connected to a spindle of the machine tool, an output of the electrophoresis assistance system being coupled to the cathode and the mold master fixture for forming an auxiliary electric field between the mold master and the cathode, such that
  • the granular colloidal circulation system directional deposition of a mixed colloid produced by mixing a colloidal colloid and a filler colloid on an elastic mold to be strengthened region on the mold master, the vacuum temperature control system for mixing the formed shape
  • the colloid is heat treated and solidified.
  • the online video detection system is a CCD video microscope.
  • the method further includes a colloid-assisted shaping cavity disposed in the processing tank for limiting a flow direction of the mixed colloid on the surface of the mold master.
  • the processing slot is installed in the A three-dimensional motion platform for precisely controlling the direction of motion of the machining slot is described.
  • suction tube clamp connected to the machine tool spindle, the suction tube clamp for attracting the mixed colloid produced by the granular colloidal circulation system to the surface of the mold master.
  • the particle colloidal circulation system comprises a dilution module, a mixed colloidal attraction module, a solution circulation module, an ultrasonic vibration module, a magnetic stirring module and a colloidal circulation module, for between the required nanoparticles or filler and the mixed colloid Dilution, thorough mixing, and filtration and recycling of the mixed colloids are carried out.
  • the method further includes an integrated control cabinet connected to the machine tool, the granular colloidal hybrid circulation system, the electrophoresis auxiliary system, and a vacuum temperature control system for controlling the machine tool and the granular colloidal mixture.
  • the operating state of the circulation system, the electrophoresis assistance system, and the vacuum temperature control system is controlled.
  • the embodiment of the invention further provides a method for locally strengthening the microfluidic chip elastic mold, comprising:
  • Step 1 uniformly mixing the reinforcing particles or the filler with the colloid to form a mixed colloid
  • Step 2 performing elastic mold directional deposition forming between the mixed colloid and an auxiliary electric field formed between the mold master and the electrophoresis cathode of the electrophoresis auxiliary system;
  • step 3 the formed elastic mold is subjected to vacuum heat treatment and solidified.
  • step 2 includes:
  • the mixed colloid performs directional deposition molding of the elastic mold in the auxiliary sizing cavity.
  • the microfluidic chip elastic mold local strengthening forming device comprises a machine tool, a granular colloidal circulation system connected with the machine tool, an electrophoresis auxiliary system, a mold master, and a mold master fixture for fixing the mold master a processing tank, a vacuum temperature control system, the processing tank is disposed on the machine tool, a mold master of the mold master fixture is installed in the machining tank, a cathode of the electrophoresis auxiliary system and a spindle of the machine tool Connecting, the output of the electrophoresis assistance system is coupled to the cathode and the mold master fixture for forming an auxiliary electric field between the mold master and the cathode, so that the granular colloidal circulation system will be strengthened
  • the mixed colloid produced by the mixing of the colloidal colloid and the filler colloid is oriented on the elastic mold of the mold master to be reinforced.
  • the vacuum temperature control system is configured to heat-form the formed mixed colloid by heat treatment.
  • Step 1 uniformly mixing the reinforcing particles or the filler with the colloid to form a mixed colloid
  • Step 2 performing elastic mold directional deposition forming between the mixed colloid and an auxiliary electric field formed between the mold master and the electrophoresis cathode of the electrophoresis auxiliary system;
  • step 3 the formed elastic mold is subjected to vacuum heat treatment and solidified.
  • step 2 includes:
  • the mixed colloid performs directional deposition molding of the elastic mold in the auxiliary sizing cavity.
  • the electrophoresis-assisted microfluidic chip elastic mold local strengthening forming device and method the auxiliary electric field is formed between the mold master and the electrophoresis cathode by the electrophoresis auxiliary system, and the directional deposition of the mixed colloid nanoparticles in the elastic mold is realized. While enhancing the mechanical strength of the elastic mold, it is also possible to control the strengthening position of the nanoparticles in the mold, that is, to transfer the reinforcing particles to a specific strengthening region through an electrophoresis system, thereby achieving the purpose of strengthening the mechanical strength of a specific region.
  • FIG. 1 is a schematic structural view of a specific embodiment of a microfluidic chip elastic mold local strengthening forming device according to an embodiment of the present invention
  • FIG. 2 is a schematic flow chart showing the steps of a specific embodiment of a method for locally strengthening a microfluidic chip elastic mold according to an embodiment of the present invention.
  • FIG. 1 is a schematic structural diagram of a specific embodiment of a microfluidic chip elastic mold local strengthening forming device according to an embodiment of the present invention
  • FIG. 2 is a microfluidic chip according to an embodiment of the present invention
  • the microfluidic chip elastic mold local strengthening forming device comprises a machine tool 10, a granular colloid circulation system 20 connected to the machine tool 10, an electrophoresis auxiliary system 30, a mold master 40, and a fixing station. a mold master 40 of the mold master 40, a processing tank 50, and a vacuum temperature control system 60.
  • the processing tank 50 is disposed in the machine tool 10, and the mold master 40 of the mold master 40 is mounted on the mold In the processing tank 50, the cathode of the electrophoresis assistance system 30 is connected to the main shaft 11 of the machine tool 10.
  • the output end of the electrophoresis assistance system 30 is connected to the cathode and the mold master 40 for use in An auxiliary electric field is formed between the mold master 40 and the cathode, so that the granular colloid circulation system 20 strengthens the elastic mold of the mixed colloid produced by mixing the colloidal colloid and the filler colloid on the mold master 40 to be strengthened.
  • the vacuum temperature control system 60 is used to heat-form the formed mixed colloid by heat treatment.
  • the vacuum temperature control system 60 of the present invention functions to heat-treat the mixed colloid which is directionally deposited in the region to be strengthened of the elastic mold, and adjusts the degree of vacuum and temperature of the space in which it is placed to control the entire processing process.
  • the environment The environment.
  • the electrophoresis assistance system 30 can form a controllable effective electric field between the mold master 40 in the processing tank 50 and the electrophoresis cathode, and can switch the electric field of the forward and reverse AC and DC in the process.
  • An auxiliary electric field is formed between the mold master 40 and the electrophoresis cathode by the electrophoresis assisting system 30, and the directional deposition of the mixed colloid nanoparticles in the elastic mold is realized, and the mechanical strength of the elastic mold can be enhanced while the nanoparticles can be controlled in the mold.
  • the strengthening position in the middle reaches the purpose of strengthening the mechanical strength of a specific area.
  • the present invention is not particularly limited to the locally reinforced elastic mold, and may be a PDMS elastic mold or other elastic molds.
  • the granular colloid circulation system 20 mixes the reinforced granular colloid and the filler colloid to produce a mixed colloid, and then outputs the mixed colloid to the mold master 40 in the processing tank 50, and the mold master 40 passes through the mold master.
  • the output end of the electrophoresis auxiliary system 30 is connected with the cathode and the mold master 40 clamp for forming an auxiliary electric field between the mold master 40 and the cathode, so that the mixed colloid is in the elastic mold
  • Directional deposition on the surface can be used for directional deposition of the area to be strengthened.
  • the output of the electrophoresis assisting system 30 can be controlled to control the auxiliary electric field generated by it, and the nanoparticles of the mixed colloid can be controlled in elasticity.
  • the strengthening position in the mold achieves the purpose of strengthening the mechanical strength of a specific area.
  • the microfluidic chip elastic mold local strengthening forming device further includes the machine tool 10
  • the online video detection system 70 is a CCD video microscope.
  • the CCD screen microscope is used to monitor the deposition and particle distribution of nanoparticles or other fillers in the elastic mold, the resolution is high and the detection is accurate.
  • the present invention does not specifically limit the online video detection system 70.
  • the microfluidic chip elastic mold local strengthening forming device further includes a colloid-assisted shaping cavity 80 disposed in the processing groove 50 for limiting the flow direction of the mixed colloid on the surface of the mold master 40. .
  • a colloid-assisted shaping cavity 80 disposed in the processing groove 50 for limiting the flow direction of the mixed colloid on the surface of the mold master 40.
  • the main shaft 11 of the machine tool 10 can be moved up and down, and the cathode of the electrophoresis auxiliary system 30 of different shapes can be clamped, which can realize on-line switching, and can make the cathode apply a certain pressure to the colloid, so that the colloid is evenly distributed in the auxiliary shaping.
  • the cathode of the electrophoresis auxiliary system 30 of different shapes can be clamped, which can realize on-line switching, and can make the cathode apply a certain pressure to the colloid, so that the colloid is evenly distributed in the auxiliary shaping.
  • the mold master jig of the fixed mold master 40 is fixed in the processing tank 50, and the processing of the elastic molds of different shapes is realized by mounting mold masters of different shapes and sizes.
  • the microfluidic chip elastic mold local strengthening forming device further includes a three-dimensional motion platform 12 disposed on the machine tool 10, and the machining groove 50 is mounted on the three-dimensional motion platform 12,
  • the three-dimensional motion platform 12 is used for precisely controlling the moving direction of the machining groove 50, and the relative position of the machining groove 50 and the main shaft 11 can be ensured, and the mixed colloid can accurately reach a specific reinforcing region before processing, thereby reducing system errors and improving the precision of reinforcement. .
  • the function of the granular colloidal circulation system 20 is to mix the reinforcing particles and the filler to form a mixed colloid in order to uniformly distribute the reinforcing particles of the mixed colloid.
  • the particle colloidal circulation system 20 includes a dilution module, a hybrid colloidal attraction module, a solution circulation module, an ultrasonic vibration module, a magnetic stirring module, and a colloidal circulation module for the required nanoparticles or fillers.
  • the mixed colloids are diluted, thoroughly mixed, and the mixed colloid is filtered and recycled.
  • the function of the dilution module is to dilute the total concentration of the reinforced particles and fillers. After strengthening the elastic mold, it is impossible to strengthen the reinforced particles directly to the elastic mold.
  • the function of the dilution module is to use the required nanoparticles or
  • the filler is mixed with the solution in the granular colloidal circulation system 20 to form a mixed colloid.
  • the ultrasonic vibration module and the magnetic stirring module are used to stir in the process of forming the mixed colloid, accelerate the formation of the mixed colloidal efficiency, and improve the uniformity of the mixed colloid. Sexuality, shortening the formation period of the mixed colloid, so that different kinds of particles or the same kind of particles are fully fused in the colloid.
  • the function of the solution circulation module is to reuse the excess solution in the process of forming the mixed colloid, thereby improving the solution. Using the efficiency, the role of the colloidal circulation module is to filter and recycle the colloid to improve the utilization efficiency of the colloid.
  • the function of the mixed colloidal attraction module is to output the mixed colloid from the granular colloidal circulation system 20.
  • the spindle 11 of the machine tool 10 is combined with a particulate colloidal mixing cycle system such that the hybrid colloid draws the mixed colloid from the particulate colloidal mixing cycle system to the mold master 40 via a suction tube clamp 31 coupled to the spindle 11.
  • the mixed colloid can be applied to the surface of the mold master 40 at one time or multiple times, combined with the cathode jig of the electrophoresis assisting system, and different cathodes can be switched on-line to form an electrophoresis auxiliary electric field with different workpieces to realize electrophoresis-assisted deposition.
  • the present invention further includes a suction pipe clamp 31 connected to the main shaft 11 of the machine tool 10, the electrophoresis-assisted microfluidic chip elastic mold local strengthening forming device further comprising a suction pipe clamp 31 for using the suction pipe clamp 31
  • the mixed colloid produced by the particle colloidal circulation system 20 is attracted to the mold base Version 40 surface.
  • the microfluidic chip elastic mold local strengthening forming device further includes an integrated control cabinet 90, the integrated control cabinet 90 and the machine tool 10, A particle colloidal mixing cycle system, the electrophoresis assistance system 30, and a vacuum temperature control system 60 are coupled for controlling the operation of the machine tool 10, the particle colloidal mixing cycle system, the electrophoresis assistance system 30, and the vacuum temperature control system 60.
  • the integrated control cabinet 90 is set in the working table of the machine tool 10.
  • the integrated control cabinet 90 integrates the control programs of all the systems to ensure the smooth progress of all the processes, and the operator can centrally control all the devices in the process through the integrated control cabinet 90.
  • the operating parameters monitor the working status of all systems in real time.
  • the embodiment of the invention further provides a method for locally strengthening the microfluidic chip elastic mold, comprising:
  • Step 1 uniformly mixing the reinforcing particles or the filler with the colloid to form a mixed colloid; by forming the mixed colloid with the reinforcing particles, the filler and the colloid, the reinforcing particles in the mixed colloid reach a predetermined concentration, and the reinforcing particles are not strengthened.
  • the concentration of the reinforcing particles in the region is too high or too low to ensure the strengthening of the mechanical strength.
  • Step 2 performing elastic mold orientation deposition between the auxiliary colloid formed between the mold master and the electrophoresis cathode of the electrophoresis auxiliary system; and performing directional deposition on the elastic mold by mixing the colloid to control the mixing colloid in need
  • the enhanced regional deposition allows the reinforcing particles to reach the predetermined area to be strengthened, facilitating the strengthening of specific areas.
  • Step 3 the formed elastic mold is subjected to vacuum heat treatment, and is solidified. Since the mixed colloid is deposited in the region to be strengthened of the elastic mold, it is only formed, has not been completely cured, cannot be directly used, and needs to be heated by it. The treatment is cured at a high temperature, and the temperature parameter, the degree of vacuum and the time of the heat treatment of the present invention are not specifically limited.
  • the step 2 includes:
  • the mixed colloid performs directional deposition molding of the elastic mold in the auxiliary sizing cavity, and the elastic stencil of different shapes can be quickly processed by the auxiliary sizing cavity to limit the flow direction of the colloid during the processing.
  • the microfluidic chip elastic mold local strengthening forming device and method provided by the embodiments of the present invention form an auxiliary electric field between the mold master and the electrophoresis cathode through the electrophoresis auxiliary system, and the reinforcing particles in the mixed colloid are required to reach the required
  • the reinforced region realizes the directional deposition of the mixed colloid nanoparticles in the elastic mold to realize the localized strengthening molding of the elastic mold, and can enhance the mechanical strength of the elastic mold while controlling the strengthening position of the nanoparticles in the mold. It is possible to locally strengthen the mechanical strength of a specific area.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)

Abstract

一种微流控芯片弹性模具局部强化成型装置以及方法,其中,装置包括设置在机床(10)的加工槽(50),具有模具母版(40)夹具的模具母版(40)安装在加工槽(50)内,电泳辅助系统(30)的阴极与机床(10)的主轴(11)连接,电泳辅助系统(30)的输出端与阴极、模具母版(40)夹具连接,用于在模具母版(40)与阴极之间形成辅助电场,使得颗粒胶体循环系统(20)将强化颗粒胶体、填充物胶体混合产生的混合胶体在弹性模具待强化区沉积,真空温度控制系统(60)用于将成形后的混合胶体进行加热处理固化成型。通过电泳辅助系统(30)在模具母版(40)与电泳阴极之间形成辅助电场,实现混合在胶体中的纳米粒子的定向沉积,在增强弹性模具机械强度的同时还可以控制纳米粒子在模具中的强化位置,达到加强特定区域机械强度的目的。

Description

一种微流控芯片弹性模具局部强化成型装置及方法
本申请要求于2017年04月27日提交中国专利局、申请号为201710287154.7、发明名称为“一种微流控芯片弹性模具局部强化成型装置及方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。
技术领域
本发明涉及微流控芯片弹性模具技术领域,特别是涉及一种微流控芯片弹性模具局部强化成型装置及方法。
背景技术
当今社会,材料的应用涉及生活、生产的各个方面,不同材料各有其特点和应用范围,而且对于各种材料的数量和质量的要求越来越高。而非金属作为性能优异的材料,被广泛应用于产品加工的各个领域。根据非金属材料良好的韧性、弹性、塑性等性质,工业界常用来制造模具,但也因为这些性质导致其自身力学性能某些方面的缺陷,也限制了其在产品上的应用范围。为了提高非金属材料中弹性模具的强度、硬度、刚性、耐磨性、耐腐蚀等性能,需要对其进行后处理,以满足使用及性能要求。
微流控芯片技术(Microfluidics)是把生物、化学、医学分析过程的样品制备、反应、分离、检测等基本操作单元集成到一块微米尺度的芯片上,自动完成分析全过程。由于它在生物、化学、医学等领域的巨大潜力,已经发展成为一个生物、化学、医学、流体、电子、材料、机械等学科交叉的崭新研究领域。随着微流控芯片应用的显著增长,急需一种快速、简单、便宜并适合批量生产的方法去制备硬质聚合物微流体器件的方法。
鉴于硬质模具的种种缺点,常用弹性材料-聚二甲基硅氧烷(PDMS)来制作弹性模具,目前PDMS弹性模具压印多应用在纳米级压印中。将其应用在微米级压印中,其模具的弹性虽然会易于脱模,但其高深宽比结构会使得在热压时变形,而且在制作弹性模具时,高深宽比的结构容易在脱模时撕裂,所以需要在保持模具弹性的前提下,适当增加其硬度,以助于 适应微米量级高深宽比结构的热压及脱模。
目前,现有技术中也有许多方法可以用来加强PDMS机械强度,比如在纯PDMS里边混合填充物,如无机纳米粒子,纳米粘土,碳纳米管等,然后固化成型。还有学者在PDMS里混合TEOS等硅醇盐,然后同时发生PDMS的固化和TEOS溶胶凝胶的水解和凝聚,以及形成PDMS的聚氨酯共聚物等共聚合反应等。虽然这些方法都可以在一定程度上将PDMS的强度提高,但是提高的幅度非常有限,远远不能满足目前的需求。
发明内容
本发明基于电泳辅助法提出一种微流控芯片弹性模具局部强化成型装置及方法,实现增强弹性模具机械强度的同时还可以控制纳米粒子在模具中局部区域的位置,达到加强特定区域机械强度的目的,从而实现高深宽比,高深度差,大面积结构的热压及无损脱模。
为解决上述技术问题,本发明实施例提供了一种微流控芯片弹性模具局部强化成型装置,包括机床、与所述机床连接的颗粒胶体循环系统、电泳辅助系统、模具母版、固定所述模具母版的模具母版夹具、加工槽、真空温度控制系统,所述加工槽设置在所述机床,所述模具母版夹具的模具母版安装在所述加工槽内,所述电泳辅助系统的阴极与所述机床的主轴连接,所述电泳辅助系统的输出端与所述阴极、所述模具母版夹具连接,用于在所述模具母版与所述阴极之间形成辅助电场,使得所述颗粒胶体循环系统将强化颗粒胶体、填充物胶体混合产生的混合胶体在所述模具母版上的弹性模具待加强区域定向沉积,所述真空温度控制系统用于将成形后的所述混合胶体进行加热处理固化成型。
其中,还包括安装在所述机床用于对所述模具母版表面的混合胶体进行实时监测的在线视频检测系统、
其中,所述在线视频检测系统为CCD视屏显微镜。
其中,还包括设置在所述加工槽的胶体辅助定型腔,用于限制所述模具母版表面的混合胶体的流动方向。
其中,还包括设置在所述机床的三维运动平台,所述加工槽安装在所 述三维运动平台,所述三维运动平台用于精确控制所述加工槽的运动方向。
其中,还包括与所述机床主轴连接的吸引管夹具,所述吸引管夹具用于将所述颗粒胶体循环系统产生的混合胶体吸引至所述模具母版表面。
其中,所述颗粒胶体循环系统包括稀释模块、混合胶体吸引模块、溶液循环模块、超声振动模块、磁力搅拌模块和胶体循环模块,用于对需要的纳米颗粒或填充物与所述混合胶体之间进行稀释、充分混合以及对所述混合胶体进行过滤和循环利用。
其中,还包括集成控制柜,所述集成控制柜与所述机床、所述颗粒胶体混合循环系统、所述电泳辅助系统、真空温度控制系统连接,用于控制所述机床、所述颗粒胶体混合循环系统、所述电泳辅助系统、真空温度控制系统的工作状态。
除此之外,本发明实施例还提供了一种微流控芯片弹性模具局部强化成型方法,包括:
步骤1,将强化颗粒或填充物与胶体进行均匀混合形成混合胶体;
步骤2,将所述混合胶体在模具母版与电泳辅助系统的电泳阴极之间形成的辅助电场之间进行弹性模具定向沉积成形;
步骤3,对成形的所述弹性模具进行真空加热处理,固化成型。
其中,所述步骤2,包括:
所述混合胶体在辅助定型腔中进行弹性模具定向沉积成型。
本发明实施例所提供的微流控芯片弹性模具局部强化成型方法与装置,与现有技术相比,具有以下优点:
本发明实施例提供的微流控芯片弹性模具局部强化成型装置,包括机床、与所述机床连接的颗粒胶体循环系统、电泳辅助系统、模具母版、固定所述模具母版的模具母版夹具、加工槽、真空温度控制系统,所述加工槽设置在所述机床,所述模具母版夹具的模具母版安装在所述加工槽内,所述电泳辅助系统的阴极与所述机床的主轴连接,所述电泳辅助系统的输出端与所述阴极、所述模具母版夹具连接,用于在所述模具母版与所述阴极之间形成辅助电场,使得所述颗粒胶体循环系统将强化颗粒胶体、填充物胶体混合产生的混合胶体在所述模具母版上的弹性模具待加强区域定向 沉积,所述真空温度控制系统用于将成形后的所述混合胶体进行加热处理固化成型。
本发明实施例提供的微流控芯片弹性模具局部强化成型方法,包括:
步骤1,将强化颗粒或填充物与胶体进行均匀混合形成混合胶体;
步骤2,将所述混合胶体在模具母版与电泳辅助系统的电泳阴极之间形成的辅助电场之间进行弹性模具定向沉积成形;
步骤3,对成形的所述弹性模具进行真空加热处理,固化成型。
其中,所述步骤2,包括:
所述混合胶体在辅助定型腔中进行弹性模具定向沉积成型。
所述电泳辅助微流控芯片弹性模具局部强化成型装置和方法,通过电泳辅助系统在模具母版与电泳阴极之间形成辅助电场,实现混合在弹性模具中的混合胶体的纳米粒子的定向沉积,在增强弹性模具机械强度的同时还可以控制纳米粒子在模具中的强化位置,即通过电泳系统将强化颗粒迁移到特定的强化区域,实现对特定区域机械强度进行加强的目的。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1为本发明实施例提供的微流控芯片弹性模具局部强化成型装置的一种具体实施方式的结构示意图;
图2为本发明实施例提供的微流控芯片弹性模具局部强化成型方法的一种具体实施方式的步骤流程示意图。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没 有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
请参考图1~图2,图1为本发明实施例提供的微流控芯片弹性模具局部强化成型装置的一种具体实施方式的结构示意图;图2为本发明实施例提供的微流控芯片弹性模具局部强化成型方法的一种具体实施方式的步骤流程示意图。
在一种具体实施方式中,所述微流控芯片弹性模具局部强化成型装置,包括机床10、与所述机床10连接的颗粒胶体循环系统20、电泳辅助系统30、模具母版40、固定所述模具母版40的模具母版40夹具、加工槽50、真空温度控制系统60,所述加工槽50设置在所述机床10,所述模具母版40夹具的模具母版40安装在所述加工槽50内,所述电泳辅助系统30的阴极与所述机床10的主轴11连接,所述电泳辅助系统30的输出端与所述阴极、所述模具母版40夹具连接,用于在所述模具母版40与所述阴极之间形成辅助电场,使得所述颗粒胶体循环系统20将强化颗粒胶体、填充物胶体混合产生的混合胶体在所述模具母版40上的弹性模具待加强区域定向沉积,所述真空温度控制系统60用于将成形后的所述混合胶体进行加热处理固化成型。
本发明中的真空温度控制系统60的作用是在弹性模具待加强区域定向沉积的混合胶体成形之后,进行加热处理,对其所处的空间的真空度和温度进行调节,控制整个加工过程中所处的环境。
在本发明中,电泳辅助系统30可以使得加工槽50中的模具母版40与电泳阴极之间形成可控有效电场,并可以对加工中的正反交直流的电场进行切换。
通过电泳辅助系统30在模具母版40与电泳阴极之间形成辅助电场,实现混合在弹性模具中的混合胶体的纳米粒子的定向沉积,在增强弹性模具机械强度的同时还可以控制纳米粒子在模具中的强化位置,达到加强特定区域机械强度的目的。
需要指出的是,本发明对于局部强化的弹性模具不做具体限定,可以是PDMS弹性模具,也可以是其它的弹性模具。
在操作过程中,首先颗粒胶体循环系统20将强化颗粒胶体、填充物胶体进行混合,产生混合胶体,然后将混合胶体输出至加工槽50中的模具母版40,模具母版40通过模具母版40夹具固定,电泳辅助系统30的输出端与所述阴极、所述模具母版40夹具连接,用于在所述模具母版40与所述阴极之间形成辅助电场,使得混合胶体在弹性模具上进行定向沉积,可以对需要加强的区域进行定向沉积,在增强弹性模具机械强度的同时,还可以通过控制电泳辅助系统30的输出,控制其产生的辅助电场,控制混合胶体的纳米粒子在弹性模具中的强化位置,达到加强特定区域机械强度的目的。
为了进一步提高定向沉积的质量,实时获得混合胶体中的纳米粒子或填充物在弹性模具中的沉积情况以及颗粒分布,所述微流控芯片弹性模具局部强化成型装置还包括安装在所述机床10用于对所述模具母版40表面的混合胶体进行实时监测的在线视频检测系统70。
在一实施例中,所述在线视频检测系统70为CCD视屏显微镜。采用CCD视屏显微镜对弹性模具中的纳米粒子或其它填充物的沉积情况和颗粒分布进行监测时,分辨率高,检测精准。本发明对于所述在线视频检测系统70不做具体限定。
为了进一步提高沉积效率,所述微流控芯片弹性模具局部强化成型装置还包括设置在所述加工槽50的胶体辅助定型腔80,用于限制所述模具母版40表面的混合胶体的流动方向。通过胶体辅助定型腔80的作用,使得在加工过程中能够限制混合胶体的流动方向,使其能够以最快的速率流向指定的位置,提高沉积效率和沉积质量,降低工艺时间,使得可以加工出不同模具形状。在本发明中,机床10的主轴11可以上下运动,并装夹不同形状的电泳辅助系统30阴极,可实现在线切换,并可以使得该阴极对于胶体施加一定的压力,使得胶体均匀分布在辅助定型腔内。
在本发明中,固定模具母版40的模具母版夹具固定在加工槽50内,通过安装不同形状、尺寸的模具母版,实现对不同形状的弹性模具的加工。
由于在加工过程中,为了对沉积在弹性模具的混合胶体进行加工操作,加工槽50需要进行移动,为了使得加工槽50的移动更加精确,使得对混 合胶体的定向沉积更加精准,所述微流控芯片弹性模具局部强化成型装置还包括设置在所述机床10的三维运动平台12,所述加工槽50安装在所述三维运动平台12,所述三维运动平台12用于精确控制所述加工槽50的运动方向,可以保证加工槽50与主轴11的相对位置,并使得加工前混合胶体准确到达特定的加强区域,减少系统误差,提高强化精确度。
在本发明中,所述颗粒胶体循环系统20的作用是将强化颗粒、填充物进行混合,形成混合胶体,为了使得混合胶体的强化颗粒分布均匀。在一实施例中,所述颗粒胶体循环系统20包括稀释模块、混合胶体吸引模块、溶液循环模块、超声振动模块、磁力搅拌模块和胶体循环模块,用于对需要的纳米颗粒或填充物与所述混合胶体之间进行稀释、充分混合以及对所述混合胶体进行过滤和循环利用。稀释模块的作用是将投入的强化颗粒、填充物的整体浓度进行稀释,毕竟在对弹性模具进行强化时,不可能将强化粒子直接对弹性模具强化,稀释模块的作用就是将需要的纳米颗粒或填充物与在颗粒胶体循环系统20中的溶液进行混合,形成混合胶体,超声振动模块、磁力搅拌模块的作用是在形成混合胶体的过程中进行搅拌,加快形成混合胶体效率、提高混合胶体的均匀性,缩短混合胶体的形成周期,使得不同种类的微粒或相同种类的微粒在胶体中充分融合,溶液循环模块的作用是在形成混合胶体的过程中,将多余的溶液再次利用起来,提高溶液的利用效率,胶体循环模块的作用是对胶体进行过滤和循环利用,提高胶体的利用效率,混合胶体吸引模块的作用是将混合好的胶体从颗粒胶体循环系统20中输出。
在本发明一实施例中,机床10主轴11与颗粒胶体混合循环系统组合,使得混合胶体通过与主轴11连接的吸引管夹具31将混合好的胶体从颗粒胶体混合循环系统吸引至模具母版40表面,可以一次也可以多次将混合好的胶体至于模具母版40的表面,与电泳辅助系统的阴极夹具相组合,并可在线切换不同阴极,与不同工件组成电泳辅助电场,实现电泳辅助沉积,因此所述还包括与所述机床10主轴11连接的吸引管夹具31,所述电泳辅助微流控芯片弹性模具局部强化成型装置还包括吸引管夹具31,吸引管夹具31用于将所述颗粒胶体循环系统20产生的混合胶体吸引至所述模具母 版40表面。
为了实现统一管理,提高操作的方便性以及降低对空间的占用,所述微流控芯片弹性模具局部强化成型装置还包括集成控制柜90,所述集成控制柜90与所述机床10、所述颗粒胶体混合循环系统、所述电泳辅助系统30、真空温度控制系统60连接,用于控制所述机床10、所述颗粒胶体混合循环系统、所述电泳辅助系统30、真空温度控制系统60的工作状态,将集成控制柜90设置在机床10工作台,集成控制柜90中集成了所有系统的控制程序,保证所有工艺的顺利进行,操作人员可以通过集成控制柜90集中控制所有工艺过程中各个设备的运行参数,实时对所有的系统的工作状态进行监控。
除此之外,本发明实施例还提供了一种微流控芯片弹性模具局部强化成型方法,包括:
步骤1,将强化颗粒或填充物与胶体进行均匀混合形成混合胶体;通过将强化颗粒、填充物与胶体形成混合胶体,使得混合胶体中的强化颗粒达到预定的浓度,不会使得在加强后的区域的加强颗粒的浓度过高或过低,保证其机械强度的加强效果。
步骤2,将所述混合胶体在模具母版与电泳辅助系统的电泳阴极之间形成的辅助电场之间进行弹性模具定向沉积成形;通过混合胶体在弹性模具上进行定向沉积,控制混合胶体在需要强化的区域沉积,就使得强化颗粒到达预定的待强化的区域,便于对特定区域进行强化。
步骤3,对成形的所述弹性模具进行真空加热处理,固化成型,由于混合胶体在弹性模具的待加强区域进行沉积之后,只是成形,还没有完全固化,不能直接使用,需要通过对其进行加热处理,在高温下固化成型,本发明对于其加热处理的温度参数、真空度和时间不作具体限定。
为了进一步提高混合胶体的沉积效率,所述步骤2,包括:
所述混合胶体在辅助定型腔中进行弹性模具定向沉积成型,通过辅助定型腔在加工过程中限制胶体流动方向,可以快速加工出不同形状的弹性模具。
综上所述,本发明实施例提供的微流控芯片弹性模具局部强化成型装置和方法,通过电泳辅助系统在模具母版与电泳阴极之间形成辅助电场,牵引混合胶体中的强化颗粒到达需要强化的区域,实现混合在弹性模具中的混合胶体的纳米粒子的定向沉积,以实现弹性模具局部区域强化成型,在增强弹性模具机械强度的同时还可以控制纳米粒子在模具中的强化位置,达到可以对特定区域进行局部强化机械强度的目的。
以上对本发明所提供的微流控芯片弹性模具局部强化成型装置和方法进行了详细介绍。本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。

Claims (10)

  1. 一种微流控芯片弹性模具局部强化成型装置,其特征在于,包括机床、与所述机床连接的颗粒胶体循环系统、电泳辅助系统、模具母版、固定所述模具母版的模具母版夹具、加工槽、真空温度控制系统,所述加工槽设置在所述机床,所述模具母版夹具的模具母版安装在所述加工槽内,所述电泳辅助系统的阴极与所述机床的主轴连接,所述电泳辅助系统的输出端与所述阴极、所述模具母版夹具连接,用于在所述模具母版与所述阴极之间形成辅助电场,使得所述颗粒胶体循环系统将强化颗粒胶体、填充物胶体混合产生的混合胶体在所述模具母版上的弹性模具待加强区域定向沉积,所述真空温度控制系统用于将成形后的所述混合胶体进行加热处理固化成型。
  2. 如权利要求1所述微流控芯片弹性模具局部强化成型装置,其特征在于,还包括安装在所述机床用于对所述模具母版表面的混合胶体进行实时监测的在线视频检测系统。
  3. 如权利要求2所述微流控芯片弹性模具局部强化成型装置,其特征在于,所述在线视频检测系统为CCD视屏显微镜。
  4. 如权利要求3所述微流控芯片弹性模具局部强化成型装置,其特征在于,还包括设置在所述加工槽的胶体辅助定型腔,用于限制所述模具母版表面的混合胶体的流动方向。
  5. 如权利要求4所述微流控芯片弹性模具局部强化成型装置,其特征在于,还包括设置在所述机床的三维运动平台,所述加工槽安装在所述三维运动平台,所述三维运动平台用于精确控制所述加工槽的运动方向。
  6. 如权利要求5所述微流控芯片弹性模具局部强化成型装置,其特征在于,还包括与所述机床主轴连接的吸引管夹具,所述吸引管夹具用于将所述颗粒胶体循环系统产生的混合胶体吸引至所述模具母版表面。
  7. 如权利要求6所述微流控芯片弹性模具局部强化成型装置,其特征在于,所述颗粒胶体循环系统包括稀释模块、混合胶体吸引模块、溶液循环模块、超声振动模块、磁力搅拌模块和胶体循环模块,用于对需要的纳米颗粒或填充物与所述混合胶体之间进行稀释、充分混合以及对所述混合 胶体进行过滤和循环利用。
  8. 如权利要求7所述微流控芯片弹性模具局部强化成型装置,其特征在于,还包括集成控制柜,所述集成控制柜与所述机床、所述颗粒胶体混合循环系统、所述电泳辅助系统、所述真空温度控制系统连接,用于控制所述机床、所述颗粒胶体混合循环系统、所述电泳辅助系统、真空温度控制系统的工作状态。
  9. 一种微流控芯片弹性模具局部强化成型方法,其特征在于,包括:
    步骤1,将强化颗粒或填充物与胶体进行均匀混合形成混合胶体;
    步骤2,将所述混合胶体在模具母版与电泳辅助系统的电泳阴极之间形成的辅助电场之间进行弹性模具定向沉积成形;
    步骤3,对成形的所述弹性模具进行真空加热处理,固化成型。
  10. 如权利要求9所述微流控芯片弹性模具局部强化成型方法,其特征在于,所述步骤2,包括:
    所述混合胶体在辅助定型腔中进行弹性模具定向沉积成型。
PCT/CN2017/109068 2017-04-27 2017-11-02 一种微流控芯片弹性模具局部强化成型装置及方法 WO2018196316A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/153,774 US20190039268A1 (en) 2017-04-27 2018-10-07 Device and method for locally reinforcing and forming elastic mold for micro-fluidic chips

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201710287154.7 2017-04-27
CN201710287154.7A CN106891459B (zh) 2017-04-27 2017-04-27 一种微流控芯片弹性模具局部强化成型装置及方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US16/153,774 Continuation US20190039268A1 (en) 2017-04-27 2018-10-07 Device and method for locally reinforcing and forming elastic mold for micro-fluidic chips

Publications (1)

Publication Number Publication Date
WO2018196316A1 true WO2018196316A1 (zh) 2018-11-01

Family

ID=59196978

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/109068 WO2018196316A1 (zh) 2017-04-27 2017-11-02 一种微流控芯片弹性模具局部强化成型装置及方法

Country Status (3)

Country Link
US (1) US20190039268A1 (zh)
CN (1) CN106891459B (zh)
WO (1) WO2018196316A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106868572B (zh) * 2017-04-25 2019-07-09 广东工业大学 一种电泳辅助微纳颗粒熔融自组装表面改性设备
CN106906469B (zh) * 2017-04-25 2020-08-07 广东工业大学 一种微纳嵌套颗粒熔融自结合表面改性设备
CN106891459B (zh) * 2017-04-27 2020-08-25 广东工业大学 一种微流控芯片弹性模具局部强化成型装置及方法
CN108068301B (zh) * 2017-12-13 2020-05-19 广东工业大学 一种非接触式电驱动模塑成形装置及设备
CN112590083B (zh) * 2020-12-10 2022-06-10 南京航空航天大学 基于微纳增材制备仿生黏附材料的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1358882A (zh) * 2001-11-27 2002-07-17 南京大学 外加电场控制胶体粒子自组装及三维光子晶体的制备
CN101554758A (zh) * 2009-04-09 2009-10-14 上海交通大学 利用纳米材料改性pdms制作热模压模具的方法
KR101132748B1 (ko) * 2010-01-13 2012-04-06 포항공과대학교 산학협력단 마이크로 몰드 시스템과 이의 제조 방법 및 이를 이용한 초소형 정밀 부품의 제조 방법
CN106891459A (zh) * 2017-04-27 2017-06-27 广东工业大学 一种微流控芯片弹性模具局部强化成型装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101411335B1 (ko) * 2012-11-08 2014-06-25 국립대학법인 울산과학기술대학교 산학협력단 복수의 채널주형이 멀티 스케일로 형성된 마이크로플루이딕 칩 주형 제조방법
CN203292952U (zh) * 2013-05-22 2013-11-20 广东工业大学 一种电泳辅助微细超声加工机床
CN203738097U (zh) * 2014-04-04 2014-07-30 广东工业大学 电泳与超声振动辅助微细铣削加工装置
CN207044501U (zh) * 2017-04-27 2018-02-27 广东工业大学 一种微流控芯片弹性模具局部强化成型装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1358882A (zh) * 2001-11-27 2002-07-17 南京大学 外加电场控制胶体粒子自组装及三维光子晶体的制备
CN101554758A (zh) * 2009-04-09 2009-10-14 上海交通大学 利用纳米材料改性pdms制作热模压模具的方法
KR101132748B1 (ko) * 2010-01-13 2012-04-06 포항공과대학교 산학협력단 마이크로 몰드 시스템과 이의 제조 방법 및 이를 이용한 초소형 정밀 부품의 제조 방법
CN106891459A (zh) * 2017-04-27 2017-06-27 广东工业大学 一种微流控芯片弹性模具局部强化成型装置及方法

Also Published As

Publication number Publication date
US20190039268A1 (en) 2019-02-07
CN106891459B (zh) 2020-08-25
CN106891459A (zh) 2017-06-27

Similar Documents

Publication Publication Date Title
WO2018196316A1 (zh) 一种微流控芯片弹性模具局部强化成型装置及方法
CN206392864U (zh) 一种用于激光选区熔化设备的双刀双向铺粉装置
WO2018196346A1 (zh) 一种金属表面改性装置
WO2017071388A1 (zh) 一种单喷头多材料多尺度3d打印装置及其工作方法
CN207044501U (zh) 一种微流控芯片弹性模具局部强化成型装置
CN111284004B (zh) 功能梯度材料与结构一体化制造的3d打印装置及打印方法
CN106189088B (zh) 一种碳纳米管-氧化石墨烯混杂增强复合材料的制备方法
CN203945693U (zh) 一种提高聚合物材料3d打印强度的装置
WO2018196241A1 (zh) 一种电泳辅助微纳颗粒熔融自组装表面改性设备
CN109732899B (zh) 聚合物基复合材料高分辨3d打印装置及其工作方法
CN105385876B (zh) 纳米SiC颗粒增强7075铝基复合材料半固态浆料的成型装置和成型方法
WO2022151539A1 (zh) 功能梯度材料和三维结构一体化制造的3d打印设备及方法
Ok et al. Continuous fabrication of scalable 2-dimensional (2D) micro-and nanostructures by sequential 1D mechanical patterning processes
CN109795103A (zh) 一种PVC-gel人工肌肉一体化打印方法
WO2018196347A1 (zh) 一种工件局部表面改性的制备装置
CN106313526B (zh) 一种塑料金属一体化热压成型装置及方法
CN107199696A (zh) 一种基于fdm的3d打印设备
WO2018196242A1 (zh) 一种微纳嵌套颗粒熔融自结合表面改性设备
CN108671972A (zh) 金属表面纳米结构的制备方法及制备设备
CN108068301B (zh) 一种非接触式电驱动模塑成形装置及设备
CN206858687U (zh) 一种电泳辅助微纳颗粒熔融自组装表面改性设备
CN206858660U (zh) 一种微纳嵌套颗粒熔融自结合表面改性设备
CN107839220A (zh) 加工三维导电微结构的方法和装置
Shan et al. Rapid and Low-Cost Fabrication of Microfluidic Devices Using Liquid Crystal Display-Based 3D Printing
KR101097154B1 (ko) 철-폴리머 복합체 제조방법, 이 제조방법에 의해 제조된 철-폴리머 복합체를 이용한 고경도 전도성 재료의 표면 연마방법 및 장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17906984

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17906984

Country of ref document: EP

Kind code of ref document: A1