WO2018194209A1

WO2018194209A1 - Method for manufacturing unit cell for accelerator, and unit cell manufactured thereby

Info

Publication number: WO2018194209A1
Application number: PCT/KR2017/004787
Authority: WO
Inventors: 강동원; 이동석
Original assignee: (주)뉴젠텍; 강동원
Priority date: 2017-04-17
Filing date: 2017-05-10
Publication date: 2018-10-25

Abstract

The present invention relates to a method for manufacturing a unit cell for an accelerator, and a unit cell manufactured thereby and, particularly, to: a method for manufacturing a unit cell for an accelerator, the method forming a cavity in the unit cell for an accelerator such that a resonant cavity has a structure for a predetermined frequency resonance condition; and a unit cell manufactured thereby. The method for manufacturing a unit cell for an accelerator and the unit cell manufactured by the method comprises the steps of: forming a material to have a thickness plane and processing both surfaces of the thickness plane; fixing the surface-processed material on a rotatable mounting instrument; setting a transfer path of a tool in a depth and length direction in order to form a cavity from both surfaces; and forming the cavity while moving the mounting instrument or the tool along the set transfer path.

Description

Method for manufacturing unit cell for accelerator and unit cell manufactured thereby

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an accelerator unit cell and a unit cell manufactured thereby. Specifically, a cavity is provided in a accelerator unit cell so that a resonance cavity has a structure for a predetermined frequency resonance condition. It relates to a method for producing an accelerator unit cell for forming a and a unit cell manufactured thereby.

The high frequency electron accelerator which is applied to the security scanner of the container, the radiation medical equipment or the non-destructive inspection equipment is the electron gun for the generation of the electron beam, the high frequency acceleration tube for the acceleration of the electron beam, the high frequency generator supplying the high frequency to the high frequency acceleration tube, It can be made as a target for generating the X-rays by the collision of the pulsed power supply and the electron beam. Each device constituting the electron accelerator needs precise control, and a high frequency acceleration tube formed by combining a plurality of unit cells with each other needs to have a precise geometry for acceleration of the electron beam.

Patent Publication No. 10-2013-0129815 discloses an electron beam generator that generates an electron beam by using a CNT seal as an electron beam emission source, an accelerator tube and a high frequency wave at which the electron beam is incident and accelerated, and generates a high frequency wave at the electron beam generator and the accelerator tube. Disclosed is an electron beam generator including a high frequency generator for applying a high frequency having a different power to the electron beam generator and the accelerator tube. Patent Publication No. 10-2014-0086859 also discloses a direct current high pressure electron gun arranged to generate an electron beam; A pulsed power source arranged to provide a main pulsed power signal; A power divider dividing the main pulse power signal output by the pulse power source into a first pulse power signal and a second pulse power signal; A first accelerator tube for accelerating the electron beam using the first pulsed power signal; A second accelerator tube for accelerating the electron beam using the second pulsed power signal; Disclosed is a standing wave electromagnetic linear accelerator device including a phase shifter for continuously adjusting a phase difference between a first pulsed power signal and a second pulsed power signal such that an output of the second accelerator tube generates an accelerated electron beam whose energy is continuously adjusted. do.

In an electron accelerator, an accelerator tube needs to have a suitable structure because it affects the formation of standing waves, the breakdown voltage, the RF characteristics or the formation of an electric or magnetic field and thereby determines the characteristics of the electron beam accelerated. To this end, the resonant cavity formed on the surface of the accelerator unit cell or the accelerator cell needs to have a shape such that the particles to be accelerated can absorb energy at a predetermined frequency. However, the prior art relates to a method of forming such a unit cell. Do not start.

The present invention is to solve the problems of the prior art has the following object.

It is an object of the present invention to provide a method for manufacturing an accelerator unit cell, which forms a surface of the cell and a resonant cavity such that the accelerator unit cell has a predetermined acceleration condition, and a unit cell manufactured thereby.

According to a preferred embodiment of the present invention, there is provided a method of manufacturing an accelerator unit cell, comprising: forming a material to have a thickness surface, and processing both surfaces of the thickness surface; Securing the surface finished material to a rotatable mounting tool; Establishing a feed path of the tool in depth and length directions to form a cavity formed from both surfaces; And forming the cavity while the mounting tool or tool is moved along the set transport path.

According to another suitable embodiment of the invention, the conveying path is of a single curved shape from the circumferential portion of the cavity to the central portion.

According to another suitable embodiment of the invention, the feed distance of the tool to the workpiece is from 0.0005 to 0.01 mm / rev.

According to another suitable embodiment of the invention, the workpiece is fixed to a circular surface of a cylindrical mounting tool.

According to another suitable embodiment of the present invention, a fastening hole is formed in the cell material, and the transfer path is set based on the fastening hole.

According to another suitable embodiment of the present invention, an accelerator unit cell, comprising: a front surface and a rear surface formed on both sides of a thickness surface; A cell cavity formed in a depth direction from the front or rear surface; And a cell cavity forming face formed in a cell cavity, the cell cavity forming face comprising at least one plane and a curved face, wherein the top and back views have a plan view of 0.0001 to 0.1 mm, and the different geometries of the cell cavity forming face. The boundary part which has a shape becomes Ra 0.01-0.1 micrometer.

The method of manufacturing a unit cell according to the present invention is applied to an accelerator tube of an accelerator that generates X-rays of X-bands or S-bands so that resonance occurs in a predetermined frequency band to accelerate particles. The method for manufacturing a unit cell according to the present invention allows the geometric conditions of the unit cell according to X-rays to be formed in the generated frequency band by machining. In the method of manufacturing a unit cell according to the present invention, a curved surface having different radii of curvature by 5-axis machining is formed in one machining process. In addition, the manufacturing method of the unit cell according to the present invention is to maintain the physical properties of the material during the process by forming a surface by fixing the side of the material. In addition, the unit cell according to the present invention may be applied to an accelerator having various structures or an accelerator for generating X-rays of various bands.

Figure 1 shows an embodiment of the manufacturing process of the unit cell for the accelerator according to the present invention.

2 illustrates an embodiment of an accelerator unit cell manufactured by a manufacturing method according to the present invention.

3 illustrates an embodiment of a fixing jig for forming a surface of a unit cell in a manufacturing process according to the present invention.

4 illustrates an embodiment of a process in which a cavity of a unit cell is processed in a manufacturing process according to the present invention.

5 illustrates an embodiment of a movement path of a tool for forming a cavity of a unit cell in a manufacturing process according to the present invention.

Figure 6 shows an embodiment of the geometric shape of the unit cell for the accelerator manufactured by the manufacturing method according to the present invention.

7 illustrates an embodiment of an acceleration tube to which an accelerator unit cell according to the present invention is applied.

Hereinafter, the present invention will be described in detail with reference to the embodiments set forth in the accompanying drawings, but the embodiments are provided for clarity of understanding and the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, and thus are not repeatedly described unless necessary for understanding of the invention, and well-known components are briefly described or omitted. It should not be understood to be excluded from the embodiment of.

Referring to FIG. 1, the method of manufacturing a unit cell for an accelerator may include forming a material to have a thickness surface and processing both surfaces of the thickness surface (P12); Fixing the surface-treated material to the rotatable mounting tool (P13); Establishing a transport path of the tool in depth and length directions to form a cavity formed from both surfaces (P14); And forming the cavity while the mounting tool or the tool is moved along the set transfer path (P15).

The unit cell may be a structural unit that forms an accelerator tube of an accelerator capable of generating X-rays of X-bands or S-bands, but is not limited thereto, and may be applied to an accelerator tube for generation of X-rays of various bands. have. The unit cells may form a half AC-SC (half accelerating cavity-side coupling cavity) of the accelerating tube, and the two unit cells may be joined together by a method such as soldering or brazing to form a resonant cavity. Can be formed. The unit cell may be applied to the acceleration tubes of various kinds of accelerators, and the method according to the present invention may be applied to the various kinds of acceleration tubes, and an embodiment should be understood as an example below.

The cell material must be prepared for the production of the unit cell, and the cell material may be made of, for example, but not limited to, oxygen free copper having a purity of 99.9% or 99.99% or more. The cell material may be made from powder form and may be rectangular plate shape with a thickness surface. The powder material may have a maximum diameter of, for example, 85 μm or less, and may be put into a mold having a predetermined shape and made into a cell material. The cell material thus formed may contain 10 ppm or less of oxygen or similar gases. When the cell material is prepared in this manner (P11), the surface of the cell material may be processed (P12). Surface processing of the cell material may be accomplished by various cutting tools and may be machined by a single crystal diamond in a cutting machine or lathe. The material surface can be processed, for example, such that the shape error is ± 1 to ± 6 μm, preferably ± 1 to ± 2.5 μm, and the surface roughness is Ra 0.01 to 0.05 μm.

It is necessary to prevent thermal deformation or residual stress of the material from occurring during the surface processing or the cavity of the material. In addition, it is necessary to prevent the occurrence of burrs or waviness due to variations in the machining position of the machining tool or the cell material. For this purpose, it is advantageous that the contact surface between the fixing jig and the material for fixing the material becomes small in the surface processing. For example, the cell material may be fixed to the jig while the lower part of the cell surface is in contact with the fixing jig. By such a fixing structure, the cell material may be machined on both sides at a fixed fixing position. As a result, the thickness variation may be reduced at different positions of the unit cell processed.

The thickness deviation of the cell material can be ± 1 to ± 6 μm, preferably ± 1 to ± 2.5 μm, similar to the shape error, and the flatness is 0.0001 to 0.1 mm, preferably 0.006 to 0.05 mm, most preferred To 0.006 to 0.01 mm. Flatness refers to the level of inclination measured in comparison to a straight line in all directions based on one point on the baseline. Or it means the height difference between the highest point in the plane and the minimum point in height.

If the surface of the cell material is processed according to predetermined conditions, the cavity may be fixed for processing (P13). The cell material can be fixed to a stationary tool, for example a spindle, and the stationary tool can be rotated by a device such as a motor with adjustable speed. A mounting groove for fixing the cell material may be formed in the fixing tool, and one side of the cell material may be fixed to the mounting groove so as to face each other. When the cell material is fixed in this manner, a machining tool for processing an accelerating resonant cavity or coupling cavity may be prepared in the cell material.

The processing tool may be made of a mono crystalline diamond material or a polycrystal diamond material, but is not limited thereto, and may be made of, for example, a cemented carbide titanium alloy or a material having a similar strength. The machining tool may be arranged to face the stationary tool and may be arranged to allow rotational or linear movement. The machining tool can also preferably be arranged in a cutting machining machine capable of 5-axis machining.

When the material is fixed (P13) and the arrangement of the cell material and the machining tool is determined, the tool transport path may be set (P14). The tool feed path means a relative movement with respect to the cell material and includes a movement or rotational movement of the cell material. Tool feed path means a linear travel path from the circumferential face or circumference of the acceleration cavity to the center of the acceleration cavity. The tool or material can be moved as it is rotated, and the tool can be in contact with the material at various angles for curved processing. The tool feed path means the travel path relative to the material of the cutting bite of the tool. In addition, when the tool transport path is set, an acceleration resonance hole or a side coupling cavity may be formed while the relative distance between the material and the tool is adjusted while the material or the processing tool is rotated (P15).

According to one embodiment of the invention, the cell material and the machining tool form a linear path from a point on the circumferential surface of the cavity to the center, the cell material at a predetermined speed in the course of being moved in the linear path. It can be rotated. In the process of processing the surface of the cavity including the surface of the material, it is necessary to control the pressure applied to the surface of the material so that residual stress does not occur. At the same time, it is necessary to prevent the occurrence of protrusions or waviness in the direction or circumferential direction perpendicular to the moving direction of the raw material. For this purpose, when the material is copper and the hardness is (20 to 60) HV30, the rotational speed of the material is 100 to 1500 rpm, preferably 300 to 1,000 rpm, most preferably 600 to 800 rpm. The relative linear movement speed of the tool relative to can be 0.0001 to 0.02 mm / rev, preferably 0.0005 to 0.01 mm / rev, most preferably 0.0005 to 0.005 mm / rev. Under such conditions, the accelerated resonance cavity or the side coupling process may be formed by one process. Accelerated resonant cavities may be formed on one surface of the workpiece and side coupling cavities may be formed on the other surface of the workpiece. If the accelerated resonant cavity is formed according to the conditions described above, and the side coupling cavity is formed on the other side as necessary, a tuning hole may be formed on the thickness side (P16). The tuning hole may be formed at an appropriate depth in a direction perpendicular to the thickness plane, and the tuning hole may adjust the frequency at which particles such as electrons are accelerated in the resonant cavity.

A plurality of unit cells for the accelerator can be made through the processing described above, and the plurality of unit cells can be joined together to form an acceleration tube, for example by soldering or brazing. Before forming the acceleration tube, two unit cells may be combined to measure a resonance frequency in advance (P17). For example, it may be determined whether the resonance frequency in the acceleration cavity is the 8.5 to 9,5 GHz frequency band under the condition that the energy of 6 to 12 MeV is supplied. When the resonance frequency is measured (P17), the unit cell may be tuned using the tuning hole according to the condition of the acceleration tube (P18). As described above, a plurality of unit cells in which tuning is completed may be combined with each other to form an acceleration tube. If necessary, the unit cell may be tuned after the acceleration tube is formed (P18).

The unit cell according to the present invention can be formed by various machining tools and is not limited to the embodiments shown.

Referring to FIG. 2, the accelerator unit cell 20 according to the manufacturing method described above includes a base body 21 having a thickness surface; And an acceleration resonance cavity 22 formed around the waveguide hole 225 formed to penetrate the thickness surface of the base body 21, and the acceleration resonance cavity 22 is formed around each other with respect to the waveguide hole 225. At least two curved portions having different radii of curvature, the adjacent curved portions being connected to each other in a curved shape.

A plurality of unit cells 20 may be connected to each other to form an acceleration tube, and the acceleration tube may be applied to a compact linear collating device (CLIC) or similar accelerator. The unit cell 20 can be a half AC-SC (Accelerating Cavity and Side Coupling Cavity) block, and the two unit cells 20 are combined with each other to form one accelerated resonant cavity or side coupling cavity. can do.

The base body 21 may be a rectangular parallelepiped structure having a thick surface, and has a planar front surface 211; A rear surface 212 formed to be parallel to the front surface 211; And four thickness faces 213, 214, and 215 forming a thickness face while connecting the front face 211 and the back face 212. The front face 211 and the rear face 212 may have a planar structure, and as described above, the flatness of the front face 211 or the rear face 212 is 0.0001 to 0.1 mm, preferably 0.006 to 0.05 mm, most preferably To 0.006 to 0.01 mm. Flatness refers to the level of inclination measured in comparison to a straight line in all directions based on one point on the baseline. Or it means the height difference between the highest point in the plane and the minimum point in height. Alternatively, the allowable range of the thickness deviation at two different positions of the base body 21 may be the range given above.

An accelerated resonant cavity 22 may be formed in one portion of the base body 21 or in another suitable location. The accelerated resonance cavity 22 may be a region in which the electron beam is resonated by the RF high frequency energy introduced from the outside to absorb the energy and accelerate. Accordingly, the geometry of the accelerated resonant cavity 22 becomes a major factor in the design of the unit cell 20. The accelerated resonant cavity 22 may be formed in a concave shape with respect to one side of the base body 21, and the waveguide hole 225 in which an electron beam is accelerated to a shape penetrating the base body 21 in the center portion thereof is guided. ) May be formed. The waveguide hole 225 may have a circular cross section, and three, two and one

guide portions

224, 223, and 222 may be formed in turn around the waveguide hole 225. The cavity forming portion 221 may be formed around the one leading portion 222.

The cavity forming portion 221 may have a function of coupling two unit cells 20 to each other so that the acceleration resonance cavity 22 is sealed to the outside. The cavity forming portion 221 may have a circular band shape that is stepped toward the inside from the surface of the front surface 211. One leading portion 222 may be formed along the inner circumferential surface of the cavity forming portion 221. The first guide portion 222 is a 21 guide portion extending perpendicular to the front face 211 from the inner circumferential surface of the cavity forming portion 221 and 12 guides extending curved in the direction of the waveguide hole 225 from the 11 guide portion It can be made of parts. And 2 leading portion 223 may be formed from the end of the 12 leading portion.

The two guide portions 223 are composed of 21 guide portions extending in a planar shape or similar shape to the end of the

first guide portion

222 and 22 guide portions extending in a shape projecting toward the front direction from the 21 guide portions. Can be. The two inductive part 223 functions to form the waveguide hole 225 together with the three inductive part 224. In order to form the waveguide, the three guide portions 224 may be formed in a curved structure that is directed upward or toward the front surface 211, and may be made in a conical shape as a whole. Specifically, the three induction parts 224 have a smaller radius of curvature than the two induction parts 223 and extend in a shape inclined from the 31 induction parts and 31 induction parts back to the rear surface 212 from the 31 induction parts. It can consist of 32 induction parts. By the structure of the 31 guide portion and the 32 guide portion, a circular bone may be formed at the boundary portion between the 31 guide portion and the 32 guide portion. In addition, a cylindrical waveguide hole 225 may be formed from an end portion of the 32 guide portion. The wave guide hole 225 may be made to have a hollow cylindrical shape as a whole and penetrate the rear surface 212 from the front surface 211. The structure of the acceleration resonance cavity 22 as described above allows the electron beam propagated in various modes by the electric or magnetic field distribution to be accelerated by absorbing high frequency RF energy supplied from the outside. For this purpose, the accelerated resonant cavity 22 needs to have suitable internal surface conditions.

According to a preferred embodiment of the present invention, the inner surface of the accelerated resonant cavity 22 has a curved shape that runs smoothly with different radii of curvature along the circumferential surface as a center. One curved shape means forming a boundary portion or boundary line in a direction perpendicular to the extending direction. One curved shape may include concave or convex portions, such as, for example, mountains or valleys, but this does not form height differences or grains that are divided into different portions. This single curved shape of the accelerated resonant cavity 22 may be centered from the outside by a cutting tool or similar machining tool or in the direction of the waveguide hole 225 from the cavity forming portion 221 or vice versa. It can be formed by processing by one process. For example, the material for the tool or unit cell 20 may be moved by a distance from the cavity forming portion 221 to the waveguide hole 225 by a 5-axis machining method or the like. In this process, the tool is not replaced or the fixed position of the workpiece is changed for the machining of faces with different radii of curvature. The surface roughness of the curved surface may be, for example, 0.005 to 5 μm, preferably 0.01 to 2 μm, most preferably 0.01 to 0.2 μm, and the boundary portions having different radii of curvature may be gently The surface roughness of the boundary portion may be 0.01 to 0.2 μm. Due to such structural characteristics, a desired resonance condition can be obtained in the accelerated resonance cavity 22.

The accelerated resonant cavity 22 may comprise connecting holes 24 formed on the sides while being semi-spherical as a whole. The connecting hole 24 may be formed in one guide portion 222 and may be made of an ellipse or similar shape. The connecting hole 24 may have a function of vacuuming the interior of the accelerated resonant cavity 22, and when the side coupling cavity 23 is formed on the side of the accelerated resonant cavity 22, the two holes 22 may be formed. , 23) may have a function of connecting.

At least one flow hole 25 may be formed in the base body 21, the flow hole 25 may be made to penetrate the base body 21, and may be formed around the accelerated resonance cavity 22. It may be arranged to have a square shape. In addition, the guiding hole 25 may be formed around the side coupling cavity 23. For example, six guide holes 25 may be formed along the circumference of the base body 21. The flow hole 25 may function to cool the acceleration tube during the operation, and may be a flow path of a cooling fluid such as water.

At least one

fastening holes

26a and 26b may be formed in the front surface 211 and the rear surface 212 of the base body 21, and each of the

fastening holes

26a and 26b may have a front surface 211 and a rear surface ( It may be formed in a shape perpendicular to the thickness direction from the surface of 212). For example, the

fastening holes

26a and 26b may be made into a groove shape having a depth of 1/3 to 2/3 of the thickness of the base body 21. Fastening pins may be coupled to the

fastening holes

26a and 26b to couple two different unit cells 20 to each other by a method such as soldering or brazing. In addition, the

fastening holes

26a and 26b may be a reference for forming an acceleration resonance cavity or a side coupling cavity in the manufacturing process of the unit cell. Specifically, the acceleration resonance cavity formed on the front surface 211 is located at the center and the circumferential surface based on the four

fastening holes

26a and 26b, and the side coupling process formed on the rear surface 212 has two fastenings. The location of the center and circumferential faces can be determined relative to the hole.

The flow holes 25 or

fastening holes

26a and 26b can be made in various structures and are not limited to the embodiments shown.

According to one embodiment of the present invention, the unit cell 20 may include a side coupling cavity 23 in which a depth is formed in a direction opposite to a depth direction in which the acceleration resonance cavity 22 is formed. The side coupling cavity 23 can be activated according to the mode of the electric or magnetic field of the electron beam guided along the accelerated resonant cavity 22 and can be made of a structure similar to the accelerated resonant cavity 22 as a whole. The side coupling cavity 23 may be located on the side of the accelerated resonant cavity 22 and may be formed in a semi-spherical shape in a direction opposite to each other with respect to the plane of the base body 21. For example, the accelerated resonant cavity 22 may be formed semi-spherically from the front face 211 toward the rear face 212, and the side coupling cavity 23 may be half toward the front face 211 from the rear face 212. It may be formed in a spherical shape.

The lateral coupling cavity 23 may comprise a coupling hole 235 made of a hollow cylinder structure in the central portion, and in turn from the coupling hole 235, the 3, 2 and 1

coupling inducing portion

234, 233 and 232 may be formed. A cylindrical coupling cavity guide portion 231 may be formed along the circumferential surface of the one coupling guide portion 232.

The coupling cavity directing portion 231 may extend in a cylindrical shape in a direction perpendicular to the rear surface 212. The one coupling induction portion 232 may be made of a curved annular ring structure inwardly from the coupling cavity induction portion 231. The two coupling induction portion 233 is curved in a direction upward from the 21 coupling induction portion and the 21 coupling induction portion extending from the end of the one coupling induction portion 232 into a planar shape parallel to the rear face 212. It may consist of 22 coupling induction parts extending to. Three coupling induction portions 234 can be formed from two coupling induction portions 233.

The three coupling induction part 234 may be made to have a structure in which a cylindrical coupling hole 235 penetrates to a center part while being made in a dome shape as a whole. Specifically, the three coupling induction part 234 is a two coupling induction part 233 in a plane parallel to the rear surface 212 from the 31 coupling induction part and the 31 coupling induction part extending in a curved shape in an overall upward direction. It can consist of 32 coupling inducing parts extending. And it can be made of a hollow cylinder shape penetrating the base body 21 in the central portion of the 32 coupling guide portion.

The side coupling cavity 23 can be made of various structures capable of impedance matching with the accelerated resonant cavity 22 and is not limited to the embodiments shown.

The acceleration resonant cavity 22 or the side coupling cavity 23 needs to be matched with each other while the unit cells 20 are coupled to each other to form an acceleration tube. For this purpose, each unit cell needs to be tuned.

According to one embodiment of the present invention, the unit cell 20 may include at least one

tuning hole

27a, 27b, 27e formed in the thickness surface of the base body 21. The tuning holes 27a, 27b, 27e can be formed on both sides of the accelerated resonant cavity 22, for example one thickness face 213 and one thickness face forming the long circumferential wall of the base body 21. Each of the two thickness faces 214 facing 213 may be formed. The tuning holes 27e may also be formed in the three thickness faces 215 and the four thickness faces forming the short circumferential wall. Each of the

tuning holes

27a, 27b, 27e may have a hole shape extending in a direction perpendicular to the plane forming the thickness faces 213, 214, and 215. Each

tuning hole

27a, 27b, 27e may be formed to face each other about the accelerated resonant cavity 22 or the side coupling cavity 23. Each

tuning hole

27a, 27b, 27e is formed with one, two, three thickness faces 213, 214, 215 so as to correspond to the central portion of the depth and width of the accelerated resonant cavity 22 or the side coupling cavity 23. Can be formed on. And a depth of 1/4 to 4/5, preferably 1/2, of the distance from each

thickness face

213, 214, 215 to the accelerated resonant cavity 22 or the side coupling cavity 23. Can be made into a cylindrical shape.

Each of the

tuning holes

27a, 27b, and 27e may be used for tuning the frequency band absorbed by the electron beam in the unit cell 20. For example, injection pressure may be applied to the

tuning holes

27a, 27b, and 27e for tuning in a short frequency band, and suction pressure may be applied from the

tuning holes

27a, 27b, and 27e for tuning in a long frequency band. . Tuning for each of the

tuning holes

27a, 27b, 27e can be accomplished in a variety of ways.

A plurality of unit cells 20 may be coupled to each other to form an acceleration tube, and for example, may have a structure in which energy having a frequency of 1 to 50 GHz is absorbed or resonated with an electromagnetic wave of a corresponding frequency band. In addition, electromagnetic waves of the X-band or the S-band may be generated. And it is necessary to have a suitable standard for this.

Referring to FIG. 3, the cell material M may be fixed to the surface fixing jig 30 for processing the front surface FS and the rear surface of the cell material M. Referring to FIG. The surface fixing jig 30 includes a base 31; A parallel block 32 disposed above the base 31; A direction adjusting unit 33 coupled to the upper side of the parallel block 32; A positioning unit 34 coupled to the direction adjusting unit 33; And a pair of

clamp units

35a and 35b coupled to the positioning unit 34 so that the intervals facing each other are adjusted. Base 31 may have a variety of shapes that can be fixed to a variety of machine tools, and may have a bottom surface in the form of a plane. Parallel block 32 may be made of a block structure capable of tilt adjustment with respect to the base 31, the direction control unit 33 is a cylinder or drum capable of setting the angle with respect to the base 31 or parallel block 32 Can be made into a structure. The positioning unit 34 can be made to have a structure that can be moved up and down with respect to the direction adjusting unit 33 and at the same time a pair of

clamp units

35a and 35b face each other. The pair of

clamp units

35a and 35b may have planes facing each other, and may be fixed to the cell material M at a predetermined position by the pair of

clamp units

35a and 35b. When the cell material M is made in the shape of a square plate, the lower part of one side or the long side of the cell material M may be fixed by the pair of

clamp units

35a and 35b. In the state where the cell material M is fixed in this manner, the front surface FS and the rear surface of the cell material M may be processed by the cutting tool to have a flatness, roughness, shape error, or roughness as described above. The pressure applied to the front surface FS or the rear surface by the pair of

clamp units

35a and 35b may be measured and adjusted. If necessary, the surface where the pair of

clamp units

35a and 35b are in contact with the front surface FS and the rear surface may be made of a cemented carbide coating or may be made of an elastic elastic surface. The contact surfaces of the pair of

clamp units

35a and 35b may be made of various structures that can be fixed in a predetermined position while reducing the pressure applied to the cell material M.

When the front, back or side of the cell material M is machined, pressure may be applied in a direction perpendicular to the surface, and the surface deformation or part when the opposite side of the machining surface contacts the fixed plane and is subjected to the processing pressure. Residual stresses may be generated. According to one embodiment of the present invention, at least a part of the surface opposite to the surface to be processed in the surface processing of the cell material (M) can be kept free, preferably a portion located opposite the processing site is Can remain free. And this prevents deformation of the material properties of the opposite side of the processing surface. The cell material M may be fixed to the surface fixing jig 30 having various structures, and the surface fixing jig 30 maintains a surface facing the processing site freely during the processing of the material cell M. As a result, the cell material M may be fixed so that a pressure corresponding to the pressure applied by the machining tool is not applied to the surface facing the machining portion.

The cell material M may be fixed to the jig unit of various structures and is not limited to the embodiments shown.

4, after the surface or side processing of the cell material M is completed, the cell material M may be fixed to the mounting tool 40 for processing the accelerated resonant cavity RC or the side coupling cavity. The mounting tool 40 may, for example, be fixed to a tool for fixing a material such as a spindle. The mounting tool 40 may be fixed to the circular surface 411 of the cylindrical fixed cylinder 41 which is fixed at a predetermined position by the plurality of fixing

chucks

44a and 44b. Fixing grooves for fixing the cell material M may be formed on the circular surface 411 as necessary, but the fixing grooves may be selectively formed.

To form the accelerated resonant cavity RC, the cell material M is circular surface 411 such that the front surface of the cell material M faces the machining tool, and the back surface of the cell material M faces the circular surface 411. It can be fixed to. The cell material M may be fixed to the circular face 411 by, for example, the flow hole described above. For example, it may be fixed to the fixed cylinder 41 by fixing

pins

43a, 43b, 43c, 43d fixed to the circular surface 411 through the flow hole. According to the structure of the mounting tool 40, the raw surface of the cell material M may be kept separate from the circular surface 411 in which the cavity RC is formed on one surface.

When the cell material M is fixed to the mounting tool 40, the accelerated resonant cavity RC or the side coupling cavity can be machined by the cavity machining tool, and the machining tool is moved along the preset tool feed path while accelerating resonance The cavity RC or side coupling cavity can be machined.

Referring to FIG. 5, the machining tool is moved from the front surface FS to the depth direction, the inward direction to the front surface FS, the inward direction, and the depth direction while accelerating the resonant cavity AC through one machining process. Or lateral coupling cavity SC. In the processing of the cavities AC and SC, the cell material M may be rotated, for example, the rotational speed of the cell material is 100 to 1,500 rpm, preferably 300 to 1,000 rpm, most preferably 600 to 800 rpm. Can be.

As the cell material M is rotated, the machining tool can be moved in the vertical direction and in the horizontal direction with respect to the reference lines BL1 and BL2. The reference lines BL1 and BL2 as reference for forming the accelerated resonant cavity AC or the side coupling cavity SC may be determined based on the fastening hole 26 as described above. Specifically, four fastening holes 26 may be formed in the front surface FS or the rear surface RS, respectively, and the reference lines BL1 and BL2 are set based on the fastening holes 26, and the reference lines BL2, Accelerated resonant cavity (AC) and side resonant cavity (AC) and lateral resonant cavity (SC) start position, curvature radius, vertical depth, horizontal movement distance or center position are measured while the travel distance is measured from BL2). (SC) can be processed. In the processing of each unit cell, the position of the fastening hole 26 is determined to be the same, and then, based on the fastening hole 26, the acceleration resonance cavity AC and the side resonance cavity SC may be processed. As the unit cells are processed as described above, when the unit cells are coupled to each other to form an acceleration tube, the accelerated resonant cavity AC or the side resonant cavity formed at exactly the same positions may be coupled to each other. The relative linear moving speed of the machining tool with respect to the cell material M may be 0.0001 to 0.02 mm / rev, preferably 0.0005 to 0.01 mm / rev, most preferably 0.0005 to 0.005 mm / rev. In such a machining process, the machining tool may be moved linearly along one radial direction from the circumferential surface of the accelerated resonant cavity RC or the side coupling cavity SC to be centered. The linear movement includes movement in a direction perpendicular to the reference lines BL1 and BL2 that are parallel to the front surface FS or the rear surface RS of the cell material M. Depending on the shape of the accelerated resonant cavity RC or side coupling cavity SC to be formed, the machining tool can machine the cell material M in five axes or similar manner. In this way, the machining tool moves linearly from the circumferential surface to the center, thereby forming an accelerated resonant cavity RC or a side coupling cavity SC, in which various conditions are required. Make a shape suitable for (SC). This allows the electron beam to be accelerated to the required level in the acceleration tube made by the unit cell according to the present invention.

The method of manufacturing a unit cell according to the present invention is applied to an accelerator tube of an accelerator that generates X-rays of X-bands or S-bands so that resonance occurs in a predetermined frequency band to accelerate particles. The method for manufacturing a unit cell according to the present invention allows the geometric conditions of the unit cell according to X-rays to be formed in the generated frequency band by machining. In the method of manufacturing a unit cell according to the present invention, curved surfaces having different radii of curvature are formed in one machining process by 5-axis machining. In addition, the manufacturing method of the unit cell according to the present invention is to maintain the physical properties of the material during the process by forming a surface by fixing the side of the material. In addition, the unit cell according to the present invention may be applied to an accelerator having various structures or an accelerator for generating X-rays of various bands.

FIG. 6 is a cross-sectional view of an accelerator unit cell having an overall similar structure to the embodiment shown in FIG. 2.

Referring to FIG. 6, the accelerated resonant cavity 22 and the side coupling cavity 23 may be formed at positions where one side portion overlaps each other.

The cavity forming portion 121 and the coupling cavity inducing portion 231 of the accelerated resonant cavity 22 may be formed in a direction perpendicular to the front surface. In addition, the 1, 2, and 3

guide parts

222, 223, and 224, the 1, 2, and 3

coupling guide parts

232, 233, and 234, the waveguide hole 125, and the coupling hole 235 have a structure as follows. Can be formed.

The specifications presented below are exemplary and represent relative sizes. For example, if one specification is 0.1 to 10 times, the other specification may be adjusted in proportion to the proportion thereof. Therefore, units expressed in mm should be understood to have relative meaning for ease of understanding.

Ratio of accelerated resonant cavity 22 diameter to side coupling cavity 23 diameter: 1.10 to 1.50

Ratio of maximum depth of acceleration waveguide cavity 22 to thickness of base body 21: 0.75 to 0.85

Ratio of maximum depth of side coupling cavity 23 to thickness of base body 21: 0.55 to 0.68

The maximum depth is the depth measured from the front 211 and back 212, respectively.

Depth of cavity forming portion 221: 0.4-0.8

1 radius of curvature of the induction portion 222: 4.8 to 5.6

2 length of planarly extending portion of guide portion 223: 1.6 to 2.2

Radius of curvature of the boundary portions of the 2 leading portions 223 and 3 leading portions 224: 1.70 to 2.10

3 radius of curvature of the end of the guide portion 224: 0.52 to 0.62

3 radius of curvature of the boundary of the guide portion 224 and the waveguide hole 225: 0.55 to 0.62

Depth of coupling cavity inducing portion 231: 1.80 to 2.60

1 radius of curvature of the boundary portion of the coupling inducing portion 232: 1.0 to 1.4

Length of the planar portion of the two coupling inducing portion 233: 2.2 to 3.0

2 radius of curvature of the interface between the planar and vertical portions of the coupling inducing portion 233: 1.0 to 1.4

Length of the vertical portion of the two coupling induction portion 233: 0.6 to 1.4

Radius of curvature of the interface between the two coupling induction part 233 and the three coupling induction part 234: 1.0 to 1.4

3 Length of the planar portion of the coupling induction portion 234: 1.0 to 1.4

It is advantageous for the different coupling induction portions 232 to 234 forming the lateral coupling cavity 23 to have the same or similar radius of curvature at different boundary portions.

The accelerated resonant cavity 22 and the side coupling cavity 23 can overlap each other in the side portions, but are connected to each other by a connecting hole but form an independent space. Since the first induction part 222 is formed in a curved surface while being formed from the front surface 211 and the rear surface 212, respectively, the portions that are substantially intersected are not formed.

The unit cell of the embodiment shown in FIG. 3 may have a surface roughness or a plan view shown above. Alternatively, the surface roughness of each part can be made to be appropriately selected according to each part, for example, in the range of Ra 0.01 μm to Ra 0.1 μm, preferably 0.01 μm to 0.05. The shape error can also be chosen to be 0.01 to 10 μm, preferably 0.01 to 6 μm. The shape error refers to, for example, a level deviating from a predetermined radius of curvature or a level deviating from a predetermined boundary surface in the curved portion of the acceleration plate cavity 12.

Multiple unit cells can be joined, for example by soldering or brazing, to form an accelerated tube.

Referring to FIG. 7, an electron gun 71 for generating an electron beam may be disposed at one portion of an acceleration tube, and an induction unit 75 for inducing an accelerated electron beam as a target may be coupled to the other side of the acceleration tube. Can be. The accelerator tube is a pre-buncher; Aggregation unit 72; An acceleration cavity 73 connected to each other; And coupling cavity 74. An RF high frequency device may be coupled to the accelerator tube to supply the energy required for the acceleration of the electron beam. The electron beam may propagate through the waveguide hole 225 and may be accelerated in each acceleration cavity 73. Acceleration tubes can be applied to X-ray or S-band X-ray generators.

Acceleration tube can be made by the combination of 10 to 40 unit cells 20_1 to 20_N, the acceleration tube formed by the unit cell according to the present invention is 8.5 to 9.5 GHz frequency band while supplying 6 to 12 MeV of energy May be applied to an accelerator that absorbs or resonates in the band, but is not limited thereto.

The unit cell according to the present invention is coupled to a plurality of each other to form an acceleration tube while generating a predetermined band of radiation. The unit cell according to the present invention allows 10 to 40 identical or similar structures to be combined with each other to generate X-band radiation depending on the application. The unit cell according to the present invention is applied to an electron beam having an energy of 3 to 10 MeV to be applied to the retrieval of the container. The unit cell according to the present invention can be applied to the formation of a cluster electrode (buncher) or acceleration tube of the acceleration tube.

Although the present invention has been described in detail above with reference to the presented embodiments, those skilled in the art may make various modifications and modifications without departing from the technical spirit of the present invention with reference to the presented embodiments. . The invention is not limited by the invention as such variations and modifications but only by the claims appended hereto.

The method of manufacturing a unit cell according to the present invention is applied to an accelerator tube of an accelerator that generates X-rays of X-bands or S-bands so that resonance occurs in a predetermined frequency band to accelerate particles.

Claims

In the manufacturing method of the unit cell for an accelerator,

Forming a material to have a thickness side, and processing both surfaces of the thickness side;

Securing the surface finished material to a rotatable mounting tool;

Establishing a feed path of the tool in depth and length directions to form a cavity formed from both surfaces; And

And forming the cavity while the mounting tool or the tool is moved along the set transport path.
The method of claim 1, wherein the transfer path is a unit cell manufacturing method for the accelerator, characterized in that the single curved shape from the circumferential portion of the cavity to the center portion.
The method of claim 1, wherein the feed distance of the tool to the workpiece is 0.0005 to 0.01 mm / rev.
The method of claim 1, wherein the material is fixed to a circular surface of a cylindrical mounting tool.
The method of claim 1, wherein a fastening hole is formed in the cell material, and the transfer path is set based on the fastening hole.
In the unit cell for the accelerator,

A front surface 211 and a rear surface 212 formed on both sides of the thickness surface;

Cell cavities 22 and 23 formed in a depth direction from the front face 211 or the rear face 212; And

A cell cavity forming surface formed in a cell cavity and comprising at least one plane and a curved surface,

The planar view of the front surface 211 and the rear surface 212 is 0.0001 to 0.1 mm, the boundary portion having different geometrical shape of the cell cavity forming surface is Ra 0.01 to 0.1 ㎛ characterized in that the unit cell for the accelerator .