WO2018135249A1 - Curable composition, cured film, color filter, light-blocking film, solid-state imaging element, image display device, and method for manufacturing cured film - Google Patents

Curable composition, cured film, color filter, light-blocking film, solid-state imaging element, image display device, and method for manufacturing cured film Download PDF

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Publication number
WO2018135249A1
WO2018135249A1 PCT/JP2017/046511 JP2017046511W WO2018135249A1 WO 2018135249 A1 WO2018135249 A1 WO 2018135249A1 JP 2017046511 W JP2017046511 W JP 2017046511W WO 2018135249 A1 WO2018135249 A1 WO 2018135249A1
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group
curable composition
compound
cured film
formula
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PCT/JP2017/046511
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French (fr)
Japanese (ja)
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明夫 水野
貴規 田口
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富士フイルム株式会社
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Priority to JP2018563242A priority Critical patent/JP6680907B2/en
Publication of WO2018135249A1 publication Critical patent/WO2018135249A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures

Definitions

  • the present invention relates to a curable composition, a cured film, a color filter, a light shielding film, a solid-state imaging device, an image display device, and a method for producing the cured film.
  • a cured film obtained by curing a curable composition is used as each colored pixel.
  • the cured film which hardened the curable composition is also used as a black matrix for shielding the light between each colored pixel and improving contrast.
  • a cured film is also used for the same purpose in the color filter used in the solid-state imaging device.
  • the solid-state imaging device uses a cured film for the purpose of preventing noise and improving image quality.
  • portable terminals of electronic devices such as mobile phones and PDAs (Personal Digital Assistants) are equipped with small and thin imaging units.
  • Such an imaging unit generally includes a solid-state imaging device such as a CCD (Charge Coupled Device) image sensor and a CMOS (Complementary Metal-Oxide Semiconductor) image sensor, a lens for forming a subject image on the solid-state imaging device, It has.
  • a solid-state imaging device such as a CCD (Charge Coupled Device) image sensor and a CMOS (Complementary Metal-Oxide Semiconductor) image sensor, a lens for forming a subject image on the solid-state imaging device, It has.
  • Patent Document 1 discloses (A) a colorant, (B) a binder resin, (C) a photopolymerization initiator having a predetermined structure, and (D) two or more polymerizable unsaturations.
  • a coloring composition containing a compound having a bond and (E) a polyfunctional thiol is described.
  • a pattern shape intends the pattern shape of the cured film measured by the method described in the Example.
  • this invention makes it a subject to provide the curable composition which can obtain the cured film which has the outstanding pattern shape (it is also called “it has the effect of this invention” hereafter).
  • Another object of the present invention is to provide a cured film, a color filter, a light shielding film, a solid-state imaging device, an image display device, and a method for producing the cured film.
  • a curable composition [2] The curable composition according to [1], wherein R 1 in Formula (1) has 13 or more carbon atoms. [3] The curable composition according to [1] or [2], wherein the content ratio of the oxime compound content to the polyfunctional thiol compound content in the curable composition is 1 to 10. [4] The curable composition according to any one of [1] to [3], wherein the content ratio of the oxime compound content to the polyfunctional thiol compound content in the curable composition is 4 to 10. object.
  • An image display device comprising the cured film according to [9].
  • a curable composition layer forming step of forming a curable composition layer on a support using the curable composition according to any one of [1] to [8], and a curable composition layer A method for producing a cured film, comprising exposing an exposure step.
  • the curable composition which can obtain the cured film which has the outstanding pattern shape can be provided.
  • the manufacturing method of a cured film, a color filter, a light shielding film, a solid-state image sensor, an image display apparatus, and a cured film can also be provided.
  • a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
  • substitution and non-substitution includes what does not contain a substituent and what contains a substituent.
  • the “alkyl group” includes not only an alkyl group not containing a substituent (unsubstituted alkyl group) but also an alkyl group containing a substituent (substituted alkyl group).
  • Actinic rays or “radiation” in the present specification means, for example, deep ultraviolet rays, extreme ultraviolet lithography (EUV), X-rays, and electron beams.
  • light means actinic rays and radiation.
  • exposure in this specification includes not only exposure with far ultraviolet rays, X-rays, EUV light, etc., but also drawing with particle beams such as electron beams and ion beams.
  • (meth) acrylate” represents acrylate and methacrylate.
  • (meth) acryl represents acryl and methacryl.
  • (meth) acryloyl represents acryloyl and methacryloyl.
  • (meth) acrylamide represents acrylamide and methacrylamide.
  • “monomer” and “monomer” are synonymous.
  • a monomer is distinguished from an oligomer and a polymer, and refers to a compound having a weight average molecular weight of 2,000 or less.
  • the polymerizable compound means a compound containing a polymerizable group, and may be a monomer or a polymer.
  • the polymerizable group refers to a group that participates in a polymerization reaction.
  • the curable composition which concerns on embodiment of this invention contains a photoinitiator, a polyfunctional thiol compound, a polymeric compound, and a coloring agent, and photoinitiator is represented by Formula (1) mentioned later.
  • a photoinitiator a polyfunctional thiol compound
  • a polymeric compound a polymeric compound
  • a coloring agent a coloring agent
  • photoinitiator is represented by Formula (1) mentioned later.
  • One feature is that it is an oxime compound (hereinafter also referred to as “specific oxime compound”).
  • a typical method for producing a cured film is a method in which a curable composition is applied on a support to obtain a curable composition layer, which is exposed in a pattern and developed.
  • the optical density (also referred to as OD: optical density) of the curable composition layer gradually increases from the long wavelength side to the short wavelength side, and particularly increases on the short wavelength side. Therefore, for example, when the curable composition layer is exposed in a pattern with light in the ultraviolet region such as g-line, h-line, and i-line (in other words, light on the short wavelength side), the light is curable composition layer.
  • FIGS. 1 to 3 are cross-sectional views schematically showing a production process of a cured film using a curable composition not containing a polyfunctional thiol compound for each process.
  • a curable composition layer 102 is formed on a support 101 using a curable composition.
  • the curable composition layer 102 is exposed through the opening of the photomask 103 (in FIG.
  • the curable composition layer 102 after the exposure is developed to form a patterned cured film 201.
  • the exposure in the above procedure since the optical density of the curable composition layer 102 is high, it is difficult for light to reach the inside of the curable composition layer 102 at the time of exposure, and under the curable composition layer 102, the exposure is insufficient. It becomes. Then, a curable composition will elute in the part in which the exposure in the curable composition layer 102 is inadequate by image development (FIG. 2).
  • FIGS. 4 to 6 are sectional views schematically showing, for each step, a process for producing a cured film using a curable composition containing a polyfunctional thiol compound and not containing a specific oxime compound described later.
  • a curable composition layer 401 is formed on a support 101 using a curable composition containing a polyfunctional thiol compound.
  • the curable composition layer 401 is exposed through the opening of the photomask 103.
  • the polymerization reaction is started by radicals generated from the photopolymerization initiator.
  • the polyfunctional thiol compound functions as a chain transfer agent.
  • the thiol group in the polyfunctional thiol compound donates hydrogen to the peroxy radical, thereby deactivating the polymerization by oxygen. It is thought that a thiyl radical that is not easily received is generated and the polymerization reaction proceeds. Therefore, it is estimated that the curable composition containing a polyfunctional thiol compound is easily cured to the inside of the curable composition layer 401.
  • the radical polymerization reaction is chained to the unexposed area.
  • an unexposed portion of the curable composition layer on the light irradiation surface side may be unintentionally cured.
  • the curable composition layer after exposure is developed, the cured film 501 may unintentionally spread to an unexposed portion (FIG. 5).
  • the end portion of the post-baked cured film 601 unintentionally spreads and the pattern shape may deteriorate (FIG. 6).
  • the curable composition of the present invention is an oxime compound (specific oxime compound) containing, as a photopolymerization initiator, a hydrocarbon group having 8 or more carbon atoms in which R 1 of formula (1) described later may contain a hetero atom. Containing.
  • the specific oxime compound is bulky due to the influence of the group represented by R 1 . Since the specific oxime compound has a bulky structure as described above, it is presumed that the specific oxime compound is difficult to diffuse in the curable composition layer.
  • the curable composition according to the embodiment of the present invention contains a polyfunctional thiol compound, a polymerizable compound, a colorant, and a photopolymerization initiator, and the photopolymerization initiator is a specific oxime compound described later.
  • the curable composition which concerns on embodiment of this invention contains the specific oxime compound mentioned later.
  • the specific oxime compound has a function as a photopolymerization initiator.
  • the content of the specific oxime compound in the curable composition is not particularly limited, but is generally preferably 1 to 8% by mass with respect to the total solid content of the curable composition.
  • a specific oxime compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of specific oxime compounds together, it is preferable that total content is in the said range.
  • the N—O bond may be an (E) isomer or a (Z) isomer.
  • the (E) isomer and the (Z) isomer may be used in combination.
  • R 1 represents a hydrocarbon group having 8 or more carbon atoms which may contain a hetero atom.
  • the hydrocarbon group may be linear, branched, cyclic, or a combination thereof.
  • a linear, branched, or cyclic hydrocarbon having 13 or more carbon atoms, which may contain a heteroatom is obtained in that a curable composition having the better effect of the present invention can be obtained.
  • Groups are preferred.
  • R 1 is not particularly limited, as a hetero atom containing a nitrogen atom, a sulfur atom, and an oxygen atom.
  • R 1 includes, for example, a linear alkyl group having 8 or more carbon atoms, a branched alkyl group having 8 or more carbon atoms, a cycloalkyl group having 8 or more carbon atoms, or a carbon atom having 8 or more carbon atoms containing a cycloalkylene group. Examples thereof include a hydrogen group and a group represented by * -L 11 -R 11 . L 11 represents a divalent linking group, R 11 represents an alkyl group, and * represents a bonding position with a carbon atom.
  • the divalent linking group of L 11 is not particularly limited, and for example, an alkylene group, a carbonyl group, —O—, —S—, —NR 12 —, and combinations thereof are preferable. , -O -, - S-, and, -NR 12 - a combination of two or more selected from the group consisting of is more preferable.
  • R 12 represents a hydrogen atom or an alkyl group.
  • R 1 is a linear alkyl group having 13 or more carbon atoms or a group represented by * -L 11 -R 11 in that a curable composition having the better effect of the present invention can be obtained.
  • a group represented by * -L 11 -R 11 is more preferred, and a group represented by the following formula (1-1) is still more preferred.
  • R 13 represents an alkylene group having 1 to 3 carbon atoms
  • Z 1 represents at least one selected from the group consisting of —O—, —S—, and —NR 12 —.
  • R 14 represents an alkyl group
  • n 11 represents an integer of 1 or more.
  • R 12 represents a hydrogen atom or an alkyl group.
  • the formula (1-1) and R 13, during, if Z 1 is more, each of R 13 and Z 1 may be the same as or different from each other, * represents a bonding position.
  • X 2 represents a single bond or a divalent linking group
  • examples of the divalent linking group include an alkylene group (preferably having 1 to 12 carbon atoms), a cycloalkylene group, an alkenylene group, and an alkynylene.
  • X 2 is preferably a single bond, an alkylene group, or a group in which an alkylene group and —S— are combined.
  • R 15 represents a hydrogen atom or an alkyl group.
  • R 2 represents an alkyl group or an aryl group.
  • R 2 a linear alkyl group having 1 to 25 carbon atoms, each of which may contain a substituent, in that a curable composition having the better effect of the present invention can be obtained.
  • a branched alkyl group having 1 to 25 carbon atoms, an alicyclic alkyl group having 4 to 25 carbon atoms, or an aryl group containing a substituent is preferable.
  • substituents include, for example, a halogen atom (preferably a fluorine atom), an aryloxy group, an alkoxycarbonyl group, an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, an aryl group, and *- Examples include, but are not limited to, a group represented by X 6 -R 6 . Note that * represents a bonding position, and the forms of X 6 and R 6 will be described later.
  • X 3 represents a single bond or a carbonyl group.
  • R 3 represents an aryl group and may contain a substituent. Among them, R 3 is represented by the following formula ( 3 ) in that a curable composition having a better effect of the present invention can be obtained.
  • the group represented by 1-2) is preferred.
  • *-[Ar] -X 6 -R 6 formula (1-2) In formula (1-2), * represents a bonding position with X 3, and [Ar] represents an arylene group, which may be a single ring or a condensed ring.
  • X 6 represents a single bond or a divalent linking group.
  • Examples of the divalent linking group for X 6 include an alkylene group, an arylene group, a cycloalkylene group, an alkenylene group, an alkynylene group, a carbonyl group, —S—, —O—, —NR 61 —, and a combination thereof.
  • R 61 represents a hydrogen atom or an alkyl group.
  • X 6 is preferably a single bond, —S— or a carbonyl group in that a curable composition having the better effect of the present invention can be obtained.
  • R 6 represents a hydrogen atom or a substituent.
  • the substituent is not particularly limited, and examples thereof include an alkyl group, —NO 2 , an aryl group, and a heterocyclic group.
  • an aryl group of R 2 may be a substituent which may contain.
  • Examples of the specific oxime compound include compounds represented by the following formulas (1-A) to (1-D).
  • R 1 , R 2 , X 2 , and X 3 are each represented by formula (1 ) And R 1 , R 2 , X 2 , and X 3 , and the preferred embodiments are also the same.
  • R 10 represents a hydrogen atom or a monovalent substituent. The monovalent substituent is not particularly limited.
  • —NO 2 (hereinafter also referred to as a nitro group), a group represented by * —X 6 —R 6 , an aryl group which may contain a substituent And an aryl heterocyclic group which may contain a substituent.
  • R 7 represents —O—, —S—, or —NR 71 —.
  • R 71 represents a substituent, and the substituent is not particularly limited, and for example, an alkyl group having 1 to 20 carbon atoms (which may be linear, branched or cyclic). And an alicyclic hydrocarbon group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, and an arylalkyl group having 7 to 30 carbon atoms.
  • the above substituent may contain a heteroatom, and among them, a nitrogen atom, an oxygen atom, a halogen atom, etc. may be used as the heteroatom in that a curable composition having the effects of the present invention can be obtained.
  • a nitrogen atom, an oxygen atom, or a fluorine atom is more preferable.
  • R 8 represents a divalent linking group.
  • the form of the divalent linking group for R 8 is the same as that already described as the divalent linking group for X 6 .
  • the specific oxime compound preferably has a maximum absorption wavelength in the wavelength region of 350 to 500 nm, more preferably has a maximum absorption wavelength in the wavelength region of 360 to 480 nm, and more preferably has a high absorbance at 365 nm and 405 nm.
  • the molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and further preferably 5,000 to 200,000 from the viewpoint of sensitivity.
  • the molar extinction coefficient of the compound can be measured by a known method.
  • the molar extinction coefficient is measured at a concentration of 0.01 g / L using an ultraviolet-visible spectrophotometer (Cary-5 spectrphotometer manufactured by Varian) using an ethyl acetate solvent. It is preferable.
  • the specific oxime compound can be synthesized by a known method. Typically, it can be synthesized by reaction of the corresponding oxime with an acid chloride in an inert solvent in the presence of a base or in a basic solvent.
  • a base include triethylamine and pyridine.
  • the inert solvent include tert-butyl methyl ether, tetrahydrofuran (THF), dimethylformamide, and the like.
  • the base solvent include pyridine.
  • the curable composition which concerns on embodiment of this invention contains a polyfunctional thiol compound.
  • a polyfunctional thiol compound is intended to contain two or more thiol groups (that is, a group represented by —SH) in the same molecule.
  • the content of the polyfunctional thiol compound is not particularly limited, but is often 0.1 to 10% by mass with respect to the content of the colorant. Among these, 0.5 to 8.0% by mass is preferable with respect to the content of the colorant in that the curable composition has the more excellent effects of the present invention.
  • the content of the polyfunctional thiol compound is preferably 0.1 to 8.0% by mass, and more preferably 0.3 to 6.0% by mass with respect to the total solid content of the curable composition.
  • a polyfunctional thiol compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types together, it is preferable that the sum total is in the said range.
  • the relationship between the polyfunctional thiol compound and the content of the specific oxime compound is not particularly limited, but a cured film having a more excellent pattern shape can be obtained by the curable composition (having a more excellent effect of the present invention. )
  • content ratio of the content of the specific oxime compound to the content of the polyfunctional thiol compound in the curable composition 1 to 15 is preferable, 0.5 to 12 is more preferable, 1 to 10 is still more preferable, and 4 to 10 is particularly preferable.
  • the polyfunctional thiol compound is preferably represented by the following formula (2) in that the curable composition has more excellent effects of the present invention.
  • R 24 and R 25 are a hydrogen atom, an alkyl group, an aryl group, —C ( ⁇ O) —R 23 , —C ( ⁇ O) —O—R 23 , or —C Represents ( ⁇ O) —NH—R 23, and is preferably an alkyl group or —C ( ⁇ O) —O—R 23 .
  • R 23 represents an alkyl group or an aryl group, and a plurality of R 24 , R 25 , and M 21 (described later) may be the same or different, and when there are a plurality of R 23 , they may be the same. May be different.
  • L 21 represents an n-valent organic linking group.
  • n represents an integer of 2 to 10, preferably 3 to 10, and more preferably 3 to 6.
  • L 21 is a divalent organic linking group, for example, a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms), a divalent aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms).
  • L 21 is a trivalent or higher valent organic linking group, for example, isocyanur containing three trimethylolpropane residues, — (CH 2 ) k — (k represents an integer of 2 to 6, for example).
  • examples thereof include a trivalent linking group such as a ring, a tetravalent linking group such as a pentaerythritol residue, a pentavalent linking group, a hexavalent linking group such as a dipentaerythritol residue, and combinations thereof.
  • Examples of the n-valent organic linking group for L 21 include groups represented by any of the following formulas (A) to (D), or groups obtained by combining these groups.
  • L 4 represents a trivalent group.
  • T 3 represents a single bond or a divalent linking group, and three T 3 s may be the same as or different from each other.
  • L 5 represents a tetravalent group.
  • T 4 represents a single bond or a divalent linking group, and the four T 4 s may be the same as or different from each other.
  • L 6 represents a pentavalent group.
  • T 5 represents a single bond or a divalent linking group, and the five T 5 s may be the same as or different from each other.
  • L 7 represents a hexavalent group.
  • T 6 represents a single bond or a divalent linking group, and the six T 6 s may be the same as or different from each other.
  • the definition of the divalent linking group represented by T 3, T 4, T 5 and T 6 are the same as those defined divalent linking group represented by L 21 as described above.
  • n-valent linking group for L 21 for example, groups represented by the following formulas (E) to (J), or a group obtained by combining these are preferable.
  • R represents a hydrogen atom or a monovalent organic group.
  • the monovalent organic group an alkyl group is preferable. * Indicates a binding position.
  • t represents an integer of 2 or more.
  • L 21 may be a group represented by the following formulas (K) to (O), or a group obtained by combining these.
  • * represents a bonding position.
  • M 21 represents a single bond, or —O—, —S—, —N (R 23 ) —, —C ( ⁇ O) —O—, —O—C ( ⁇ O) —O. —, —C ( ⁇ O) —NH—, —C ( ⁇ O) —, an alkylene group, or a group in which two or more of these are combined, —C ( ⁇ O) —O— is preferred.
  • R 23 represents an alkyl group or an aryl group, and a plurality of M 21 may be the same or different.
  • the polyfunctional thiol compound at least one selected from the group consisting of R 24 and R 25 in the formula (2) in that the curable composition has more excellent development residue suppressing performance.
  • R 24 and R 25 are More preferably, they are each independently an alkyl group or —C ( ⁇ O) —O—R 23 .
  • R 24 and are not particularly limited as the number of carbon atoms in the case R 25 each is other than a hydrogen atom, in that the curable composition has a better developing residual ⁇ system performance, one or more independently preferably , R 24 and R 25 are more preferably 2 or more. Although it does not restrict
  • M 21 is preferably —C ( ⁇ O) —O—, and n is preferably an integer of 3 to 10.
  • the development residue suppression performance intends the physical properties of the curable composition evaluated by the method described in Examples.
  • polyfunctional thiol compound examples include the polyfunctional thiol compound contained in the curable composition according to the embodiment of the present invention is not limited thereto.
  • L 21 , M 21 , R 24 , R 25 , and n each correspond to each symbol in formula (2).
  • “*” and “ ⁇ ” represent bonding positions
  • “*” represents the bonding position between L 21 and M 21
  • “ ⁇ ” represents M 21 and ⁇ C ( R 24 ) (R 25 ) represents a bonding position with —SH.
  • the numbers (SH-1 to SH-31) of the respective polyfunctional thiol compounds correspond to the numbers of the respective polyfunctional thiol compounds in the examples.
  • the curable composition which concerns on embodiment of this invention contains a coloring agent.
  • the content of the colorant in the curable composition is not particularly limited, but is generally preferably 30 to 70% by mass with respect to the total solid content of the curable composition.
  • a coloring agent may be used individually by 1 type, or may use 2 or more types together. When two or more colorants are used in combination, the total content is preferably within the above range.
  • a cured film as a light shielding film, although it does not restrict
  • the upper limit of content of a coloring agent is not restrict
  • limited in particular Generally 70 mass% or less is preferable with respect to the total solid of a curable composition.
  • the content of the colorant is not more than the upper limit value, the curable composition has more excellent coatability.
  • the colorant include pigments and dyes. Hereinafter, the colorant will be described in detail.
  • the pigment is not particularly limited, and a known inorganic pigment and / or organic pigment can be used.
  • the curable composition according to this embodiment preferably contains an inorganic pigment as a colorant.
  • the curable composition which concerns on this embodiment contains an organic pigment as a coloring agent.
  • inorganic pigment It does not restrict
  • inorganic pigments include zinc white, lead white, lithopone, titanium oxide, chromium oxide, iron oxide, precipitated barium sulfate and barite powder, red lead, iron oxide red, yellow lead, zinc yellow (one zinc yellow, 2 types of zinc yellow), ultramarine blue, prussian blue (potassium ferrocyanide) zircon gray, praseodymium yellow, chrome titanium yellow, chrome green, peacock, Victoria green, bitumen (unrelated to Prussian blue), vanadium zirconium blue, Examples include chrome tin pink, ceramic red, and salmon pink.
  • the black inorganic pigment includes a metal oxide or metal containing at least one metal element selected from the group consisting of Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. Nitrogen, metal oxynitride, etc. are mentioned.
  • inorganic pigments carbon black, titanium black, metal pigments and the like (hereinafter referred to as “black”) are obtained in that a curable composition capable of forming a cured film having a high optical density can be obtained even if the content is small.
  • pigment include a metal oxide containing at least one metal element selected from the group consisting of Nb, V, Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. And metal nitrogenous substances.
  • the inorganic pigment is preferably at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride, vanadium nitride, silver or tin-containing metal pigments, and silver and tin-containing metal pigments. More preferred is at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride, and vanadium nitride. The niobium nitride and vanadium nitride may be niobium oxynitride and vanadium oxynitride.
  • Carbon black can also be used as the inorganic pigment. Specific examples of carbon black are commercially available C.I. I. Examples thereof include, but are not limited to, inorganic pigments such as CI Pigment Black 7.
  • the curable composition may contain a pigment having infrared absorptivity other than the pigment described as a black pigment.
  • a pigment having infrared absorptivity a tungsten compound or a metal boride is preferable, and among them, a tungsten compound is more preferable because it is excellent in light-shielding properties at wavelengths in the infrared region.
  • Two or more of these pigments may be used in combination, or may be used in combination with a dye described later.
  • chromatic colors such as red, green, yellow, orange, purple, and blue are added to black pigments or infrared light-shielding pigments.
  • the aspect which mixes the pigment or the dye mentioned later is mentioned. It is preferable to mix a red pigment or a red dye, or a violet pigment or a violet dye with a black pigment or an infrared light shielding pigment, and it is more preferable to mix a red pigment with a black pigment or an infrared light shielding pigment. .
  • titanium black or niobium oxynitride is preferable.
  • Titanium black is black particles containing titanium atoms. Preferred are low-order titanium oxide, titanium oxynitride, titanium nitride, and the like.
  • the surface of titanium black can be modified as necessary for the purpose of improving dispersibility and suppressing aggregation.
  • titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide. Titanium black can also be treated with a water repellent material as disclosed in JP-A-2007-302836. Titanium black is typically titanium black particles, and preferably has a small primary particle size and average primary particle size of each particle. The same applies to niobium oxynitride. Specifically, an average primary particle diameter in the range of 10 nm to 45 nm is preferable.
  • the average primary particle diameter of a pigment can be measured using a transmission electron microscope (Transmission Electron Microscope, TEM).
  • TEM Transmission Electron Microscope
  • the transmission electron microscope for example, a transmission microscope HT7700 manufactured by Hitachi High-Technologies Corporation can be used.
  • the average primary particle diameter of the pigment is the maximum length of a particle image obtained using a transmission electron microscope (Dmax: the maximum length at two points on the contour of the particle image), and the maximum vertical length ( DV-max: When an image is sandwiched between two straight lines parallel to the maximum length, the shortest length connecting the two straight lines vertically is measured, and the geometric mean value (Dmax ⁇ DV-max) 1 / 2 was the particle size.
  • the average primary particle diameter of the pigment is determined by measuring the particle diameter of 100 particles by this method and intending the arithmetic average value thereof.
  • the specific surface area of titanium black and niobium oxynitride is not particularly limited. However, since the water repellency after surface treatment of titanium black and niobium oxynitride with a water repellent becomes a predetermined performance, BET (Brunauer, Emmett, Teller) ) Is preferably 5 to 150 m 2 / g, more preferably 20 to 120 m 2 / g.
  • titanium black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, 13M-T (trade name, manufactured by Mitsubishi Materials Corporation), Tilack D (trade name, manufactured by Ako Kasei Co., Ltd.) and titanium nitride 50 nm (trade name, manufactured by Wako Pure Chemical Industries, Ltd.).
  • Titanium oxynitride, titanium nitride, or niobium oxynitride is preferably used as the colorant, and titanium nitride or niobium oxynitride is more preferable, and niobium oxynitride is more preferable because the resulting cured film has better moisture resistance. preferable. This is presumably because these colorants are hydrophobic.
  • titanium black as a dispersion containing titanium black and Si atoms.
  • titanium black is contained as a dispersion in the curable composition, and the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.00 on a mass basis.
  • the to-be-dispersed bodies include both those in which titanium black is in the state of primary particles and those in the state of aggregates (secondary particles).
  • the following means can be used.
  • a dispersion is obtained by dispersing titanium oxide and silica particles using a disperser, and the dispersion is subjected to reduction treatment at a high temperature (for example, 850 to 1000 ° C.), whereby titanium black particles are mainly formed.
  • a dispersed material containing Si and Ti as components can be obtained.
  • the reduction treatment can also be performed in an atmosphere of a reducing gas such as ammonia.
  • titanium oxide include TTO-51N (trade name, manufactured by Ishihara Sangyo).
  • Examples of commercially available silica particles include AEROSIL (registered trademark) 90, 130, 150, 200, 255, 300, 380 (trade name, manufactured by Evonik).
  • a dispersing agent may be used for the dispersion of titanium oxide and silica particles.
  • the dispersant include those described in the section of the dispersant described later.
  • the dispersion may be performed in a solvent.
  • the solvent include water and organic solvents.
  • the organic solvent include those described in the column of organic solvent described later. Titanium black having an adjusted content ratio (Si / Ti) can be produced, for example, by the method described in paragraphs [0005] and [0016] to [0021] of JP-A-2008-266045.
  • Curing including this dispersion by adjusting the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion including titanium black and Si atoms to a suitable range (for example, 0.05 or more).
  • a suitable range for example, 0.05 or more.
  • Titanium black is excellent in light-shielding property for light in a wide wavelength range from ultraviolet light to infrared light, and therefore the above-described dispersion to be dispersed containing titanium black and Si atoms (preferably the content ratio (Si / Ti) is A cured film formed using a material having a mass conversion of 0.05 or more exhibits excellent light shielding properties.
  • the content ratio (Si / Ti) of Si atoms to Ti atoms in the dispersion is, for example, the method (1-1) or the method (1-2) described in paragraph 0033 of JP2013-249417A ).
  • Whether the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.05 or more with respect to the dispersion to be contained in the cured film obtained by curing the curable composition Can be determined by the method (2) described in paragraph 0035 of JP2013-249417A.
  • the above-described titanium black can be used.
  • composite oxides such as Cu, Fe, Mn, V, and Ni, cobalt oxide, iron oxide, carbon black, and A black pigment composed of aniline black or the like may be used alone or in combination of two or more. In this case, it is preferable that 50% by mass or more of the total dispersion is occupied by the dispersion made of titanium black.
  • a Si-containing material such as silica may be used.
  • silica examples include precipitated silica, fumed silica, colloidal silica, and synthetic silica. These may be appropriately selected and used.
  • fine particle type silica examples include silica described in paragraph 0039 of JP2013-249417A, and the contents thereof are incorporated in the present specification.
  • a tungsten compound and a metal boride can also be used.
  • Tungsten compounds and metal borides have high absorption for infrared rays (light having a wavelength of about 800 to 1200 nm) (that is, high light-blocking properties (shielding properties) for infrared rays) and low absorption for visible light. Infrared shielding material.
  • a curable composition can form a pattern with high light-shielding property in an infrared region, and high translucency in a visible light region by containing a tungsten compound and / or a metal boride.
  • Tungsten compounds and metal borides have low absorption even for light having a wavelength shorter than the visible range, which is used for exposure of high pressure mercury lamps, KrF, ArF, and the like used for image formation. For this reason, while combining with the polymeric compound mentioned later and alkali-soluble resin, while being able to obtain the outstanding pattern, a development residue can be suppressed more in pattern formation.
  • tungsten compound examples include a tungsten oxide compound, a tungsten boride compound, a tungsten sulfide compound, and the like, and a tungsten oxide compound represented by the following formula (composition formula) (I) is preferable.
  • composition formula) (I) M x W y O z (I) M represents a metal, W represents tungsten, and O represents oxygen. 0.001 ⁇ x / y ⁇ 1.1 2.2 ⁇ z / y ⁇ 3.0
  • alkali metal for example, alkali metal, alkaline earth metal, Mg, Zr, Cr, Mn, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Cd, Al, Ga, In, Tl, Sn, Pb, Ti, Nb, V, Mo, Ta, Re, Be, Hf, Os, Bi, and the like can be given, and an alkali metal is preferable. 1 type or 2 types or more may be sufficient as the metal of M.
  • M is preferably an alkali metal, more preferably Rb or Cs, and even more preferably Cs.
  • infrared rays can be sufficiently shielded, and when it is 1.1 or less, generation of an impurity phase in the tungsten compound can be more reliably avoided. it can.
  • z / y is 2.2 or more, chemical stability as a material can be further improved, and when it is 3.0 or less, infrared rays can be sufficiently shielded.
  • tungsten oxide compound represented by the above formula (I) examples include Cs 0.33 WO 3 , Rb 0.33 WO 3 , K 0.33 WO 3 , Ba 0.33 WO 3 and the like. Cs 0.33 WO 3 or Rb 0.33 WO 3 is preferable, and Cs 0.33 WO 3 is more preferable.
  • the tungsten compound is preferably fine particles.
  • the average primary particle diameter of the tungsten fine particles is preferably 800 nm or less, more preferably 400 nm or less, and even more preferably 200 nm or less.
  • the average primary particle size is preferably as small as possible.
  • the average primary particle size of the tungsten fine particles is usually 1 nm or more.
  • Two or more tungsten compounds can be used.
  • Tungsten compounds are commercially available.
  • tungsten oxide compounds can be obtained by a method of heat-treating a tungsten compound in an inert gas atmosphere or a reducing gas atmosphere (see Japanese Patent No. 4096205). ).
  • the tungsten oxide compound is also available as a dispersion of tungsten fine particles such as YMF-02 manufactured by Sumitomo Metal Mining Co., Ltd.
  • the metal boride is preferably fine particles.
  • the average primary particle diameter of the metal boride fine particles is preferably 800 nm or less, more preferably 300 nm or less, and further preferably 100 nm or less. When the average primary particle diameter is in such a range, the metal boride fine particles are less likely to block visible light by light scattering, and thus the translucency in the visible light region can be further ensured. From the viewpoint of avoiding light scattering, the average primary particle size is preferably as small as possible. However, for reasons such as ease of handling during production, the average primary particle size of the metal boride fine particles is usually 1 nm or more.
  • Two or more metal borides can be used.
  • the metal boride is available as a commercial product, for example, as a dispersion of metal boride fine particles such as KHF-7 manufactured by Sumitomo Metal Mining Co., Ltd.
  • titanium nitride-containing particles containing Fe atoms can also be used.
  • a gas phase reaction method is usually used, and specific examples include an electric furnace method and a thermal plasma method.
  • the thermal plasma method is preferable because it is less contaminated with impurities, easily has a uniform particle diameter, and has high productivity.
  • the method for generating thermal plasma include direct current arc discharge, multiphase arc discharge, radio frequency (RF) plasma, hybrid plasma, and the like, and high frequency plasma with less impurities from the electrodes is preferable.
  • RF radio frequency
  • titanium powder is evaporated by high-frequency thermal plasma, nitrogen is introduced into the apparatus as a carrier gas, and titanium powder is nitrided in the cooling process. And a method of synthesizing titanium nitride-containing particles.
  • the thermal plasma method is not limited to the above.
  • the method for producing titanium nitride-containing particles is not particularly limited, but the production methods described in paragraphs ⁇ 0037> to ⁇ 0089> of International Publication No. 2010/147098 can be referred to.
  • the Ag powder of International Publication No. 2010/147098 instead of the Ag powder of International Publication No. 2010/147098, using a component containing Fe and / or a component containing Si, which will be described later, and a mixture of this and a titanium powder material (titanium particles) as a raw material
  • titanium nitride-containing particles contained in the curable composition can be produced.
  • the titanium powder material (titanium particles) used for the production of titanium nitride-containing particles is preferably of high purity.
  • the titanium powder material is not particularly limited, but the titanium element preferably has a purity of 99.99% or more, more preferably 99.999% or more.
  • the titanium powder material (titanium particles) used for the production of titanium nitride-containing particles may contain atoms other than titanium atoms.
  • examples of other atoms that can be contained in the titanium powder material include Fe atoms and Si atoms.
  • the content of Fe atoms is preferably more than 0.001% by mass with respect to the total mass of the titanium powder material.
  • the titanium powder material contains Si atoms the content of Si atoms is preferably more than 0.002% by mass and less than 0.3% by mass with respect to the total mass of the titanium powder material.
  • the content is more preferably from 0.15% by mass, and even more preferably from 0.02 to 0.1% by mass.
  • the patterning property of the cured film is further improved.
  • the content of Si atoms is less than 0.3% by mass, the polarity of the outermost layer of the obtained titanium nitride-containing particles is further stabilized.
  • the water content in the titanium powder material (titanium particles) used for the production of titanium nitride-containing particles is preferably less than 1% by mass and less than 0.1% by mass with respect to the total mass of the titanium powder material. It is more preferable that it is not substantially contained.
  • the titanium nitride-containing particles are obtained by using a thermal plasma method, whereby a diffraction angle 2 ⁇ of a peak derived from the (200) plane when CuK ⁇ rays are used as an X-ray source (details will be described later) is 42.6. It becomes easy to adjust to a range of more than 4 ° to 43.5 °.
  • the method for causing the titanium nitride-containing particles to contain Fe atoms is not particularly limited.
  • Fe atoms are introduced in the stage of obtaining titanium particles (titanium powder) used as a raw material for the above-described titanium nitride-containing particles.
  • the method etc. are mentioned. More specifically, when titanium is produced by the crawl method or the like, a reaction vessel made of a material containing Fe atoms such as stainless steel is used, or a press machine and a crusher for crushing titanium are used.
  • a material containing Fe atoms as a material, Fe atoms can be attached to the surface of the titanium particles.
  • titanium nitride-containing particles When the thermal plasma method is used in the production of titanium nitride-containing particles, components such as Fe particles and Fe oxide are added to the raw material titanium particles, and these are nitrided by the thermal plasma method.
  • the titanium nitride-containing particles can contain Fe atoms.
  • Fe atoms contained in titanium nitride-containing particles are ions, metal compounds (including complex compounds), intermetallic compounds, alloys, oxides, composite oxides, nitrides, oxynitrides, sulfides, and oxysulfides. And may be included in any form.
  • the Fe atom contained in the titanium nitride-containing particle may exist as an impurity at a position between crystal lattices, or may exist as an impurity in an amorphous state at a crystal grain boundary.
  • the content of Fe atoms in the titanium nitride-containing particles is preferably more than 0.001% by mass and less than 0.4% by mass with respect to the total mass of the titanium nitride-containing particles. Of these, 0.01 to 0.2% by mass is more preferable, and 0.02 to 0.1% by mass is even more preferable.
  • the content of Fe atoms in the titanium nitride-containing particles can be measured by ICP (Inductively Coupled Plasma) emission spectroscopy.
  • the titanium nitride-containing particles preferably further contain Si atoms (silicon atoms). Thereby, the patterning property of a cured film improves more.
  • the reason why the patterning property is improved by containing Si atoms is considered to be the same as the above-described Fe atoms.
  • the content of Si atoms in the titanium nitride-containing particles is preferably more than 0.002% by mass and less than 0.3% by mass with respect to the total mass of the titanium nitride-containing particles, and 0.01 to 0.15 The mass is more preferably 0.02 to 0.1% by mass.
  • the content of Si atoms in the titanium nitride-containing particles can be measured by the same method as that for Fe atoms.
  • the method for incorporating Si atoms into the titanium nitride-containing particles is not particularly limited.
  • Si atoms are introduced at the stage of obtaining titanium particles (titanium powder) used as a raw material for the above-described titanium nitride-containing particles.
  • the method etc. are mentioned. More specifically, when titanium is produced by a crawl method or the like, a reaction vessel made of a material containing Si atoms is used, or Si atom is used as a material for a press machine and a crusher when crushing titanium. Si atoms can be attached to the surface of the titanium particles.
  • titanium nitride-containing particles When the thermal plasma method is used in the production of titanium nitride-containing particles, components such as Si particles and Si oxide are added in addition to the titanium particles as raw materials, and these are nitrided by the thermal plasma method.
  • the titanium nitride-containing particles can contain Si atoms.
  • Si atoms contained in titanium nitride-containing particles are ions, metal compounds (including complex compounds), intermetallic compounds, alloys, oxides, complex oxides, nitrides, oxynitrides, sulfides, and oxysulfides. And may be included in any form.
  • Si atoms contained in the titanium nitride-containing particles may be present as impurities at the position between the crystal lattices, or may be present as impurities in the amorphous state at the crystal grain boundaries.
  • the content of titanium atoms (Ti atoms) in the titanium nitride-containing particles is preferably 10 to 85% by mass and preferably 15 to 75% by mass with respect to the total mass of the titanium nitride-containing particles. More preferred is 20 to 70% by mass.
  • the content of Ti atoms in the titanium nitride-containing particles can be measured by ICP emission spectroscopy.
  • the content of nitrogen atoms (N atoms) in the titanium nitride-containing particles is preferably 3 to 60% by mass and preferably 5 to 50% by mass with respect to the total mass of the titanium nitride-containing particles. More preferably, it is 10 to 40% by mass.
  • the nitrogen atom content can be analyzed by an inert gas melting-thermal conductivity method.
  • Titanium nitride-containing particles contain titanium nitride (TiN) as a main component, and usually become noticeable when oxygen is mixed during the synthesis and when the particle diameter is small. A part of oxygen atoms may be contained.
  • the content of oxygen atoms in the titanium nitride-containing particles is preferably 1 to 40% by mass, more preferably 1 to 35% by mass with respect to the total mass of the titanium nitride-containing particles. More preferably, it is ⁇ 30% by mass.
  • the oxygen atom content can be analyzed by an inert gas melting-infrared absorption method.
  • the specific surface area of the titanium nitride-containing particles is preferably 5 ⁇ 100m 2 / g, more preferably 10 ⁇ 60m 2 / g.
  • the specific surface area can be determined by the BET (Brunauer, Emmett, Teller) method.
  • the titanium nitride-containing particles may be composite fine particles composed of titanium nitride particles and metal fine particles.
  • Composite fine particles refer to particles in which titanium nitride particles and metal fine particles are complexed or in a highly dispersed state.
  • “composite” means that the particles are constituted by both components of titanium nitride and metal
  • “highly dispersed state” means titanium nitride particles and metal particles.
  • the metal fine particles are not particularly limited.
  • the content of the metal fine particles in the titanium nitride-containing particles is preferably 5 to 50% by mass, and more preferably 10 to 30% by mass with respect to the total mass of the titanium nitride-containing particles.
  • the titanium nitride-containing particles preferably have a diffraction angle 2 ⁇ of a peak derived from the (200) plane when CuK ⁇ rays are used as an X-ray source and more than 42.6 ° and 43.5 ° or less.
  • a cured film obtained by using a curable composition containing titanium nitride-containing particles having such characteristics can achieve a high OD (optical density) value.
  • TiN has a peak derived from the (200) plane as the strongest peak
  • TiO has (200 )
  • the diffraction angle 2 ⁇ of the peak derived from the (200) plane of the titanium nitride-containing particle is preferably more than 42.6 ° and less than 43.5 ° from the viewpoint of the stability of the particle over time. From the viewpoint of excellent process margin, 42.7 ° or more and less than 43.5 ° is more preferable, and from the viewpoint of excellent reproducibility of particle performance, it is more preferably 42.7 ° or more and less than 43.4 °.
  • the crystallite size constituting the titanium nitride-containing particles can be determined from the half width of the X-ray diffraction peak, and is calculated using Scherrer's formula.
  • the crystallite size is preferably 20 nm or more, and more preferably 20 to 50 nm.
  • the transmitted light of the cured film exhibits a blue to blue purple color having a peak wavelength of 475 nm or less, and has high light-shielding properties.
  • a black matrix having both ultraviolet sensitivity can be obtained.
  • the crystallite size is 20 nm or more, the proportion of the active particle surface with respect to the volume of the particle is reduced, providing a good balance, and the titanium nitride-containing particles have better heat resistance and / or durability. It becomes.
  • metal nitride-containing particles that are metal nitride-containing particles and contain a predetermined atom A can also be used.
  • the metal in the metal nitride-containing particles include Nb, V, Cr, Y, Zr, Nb, Hf, Ta, W, and Re, and the effect of the present invention in which the curable composition is more excellent.
  • Nb or V is more preferable in that Examples of the atom A include B, Al, Si, Mn, Fe, Ni, and Ag.
  • the metal nitride-containing particles contain the atom A, the content is not particularly limited, but the content of the atoms A in the metal nitride-containing particles is preferably 0.00005 to 10% by mass.
  • the method for producing the metal nitride-containing particles containing the atom A is not particularly limited, and a known method can be used.
  • a gas phase reaction method is usually used, and specific examples include an electric furnace method and a thermal plasma method.
  • the thermal plasma method is preferable because it is less contaminated with impurities, has a uniform particle diameter, and has high productivity.
  • a specific method for producing metal nitride-containing particles by the thermal plasma method for example, a method using a metal fine particle production apparatus (an apparatus similar to a “black composite fine particle production apparatus” described later) can be mentioned.
  • the metal fine particle manufacturing apparatus includes, for example, a plasma torch that generates thermal plasma, a material supply device that supplies metal raw material powder into the plasma torch, a chamber that includes a cooling function, a cyclone that classifies the generated metal fine particles, and metal fine particles It is comprised by the collection
  • the metal fine particles mean particles having a primary particle diameter of 20 nm to 40 ⁇ m containing a metal element.
  • Organic pigment examples include, for example, Color Index (CI) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37: 1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120, 123, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 161, 162, 164, 166, 16 7,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,19
  • a pigment may be used individually by 1 type, or may use 2 or more types together.
  • dye examples include, for example, JP-A No. 64-90403, JP-A No. 64-91102, JP-A No. 1-94301, JP-A No. 6-11614, No. 2592207, and US Pat. No. 4,808,501. No. 5,667,920, U.S. Pat. No. 505950, JP-A-5-333207, JP-A-6-35183, JP-A-6-51115, JP-A-6-194828, etc. Can be used.
  • a dye multimer may be used as the dye.
  • examples of the dye multimer include compounds described in JP2011-213925A and JP2013-041097A.
  • a polymerizable dye having polymerizability in the molecule may be used, and examples of commercially available products include RDW series manufactured by Wako Pure Chemical Industries, Ltd.
  • the colorant may further contain an infrared absorber.
  • the infrared absorber means a compound having absorption in the wavelength region in the infrared region (preferably, a wavelength of 650 to 1300 nm).
  • the infrared absorber is preferably a compound having a maximum absorption wavelength in a wavelength region of 675 to 900 nm.
  • Examples of colorants having such spectral characteristics include pyrrolopyrrole compounds, copper compounds, cyanine compounds, phthalocyanine compounds, iminium compounds, thiol complex compounds, transition metal oxide compounds, squarylium compounds, naphthalocyanine compounds, quaterylenes. Examples include compounds, dithiol metal complex compounds, and croconium compounds.
  • phthalocyanine compound naphthalocyanine compound, iminium compound, cyanine compound, squarylium compound, and croconium compound
  • the compounds disclosed in paragraphs 0010 to 0081 of JP 2010-1111750 A may be used.
  • the cyanine compound for example, “functional pigment, Shin Okawara / Ken Matsuoka / Keijiro Kitao / Kensuke Hirashima, written by Kodansha Scientific”, the contents of which are incorporated herein.
  • the compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm is preferably at least one selected from the group consisting of a cyanine compound, a pyrrolopyrrole compound, a squarylium compound, a phthalocyanine compound, and a naphthalocyanine compound.
  • the infrared absorber is preferably a compound that dissolves 1% by mass or more in 25 ° C. water, and more preferably a compound that dissolves 10% by mass or more in 25 ° C. water. By using such a compound, the solvent resistance is improved.
  • the pyrrolopyrrole compound can be referred to paragraphs 0049 to 0062 of JP 2010-222557 A, the contents of which are incorporated herein.
  • the cyanine compounds and squarylium compounds are disclosed in paragraphs 0022 to 0063 of International Publication No. 2014/088063, paragraphs 0053 to 0118 of International Publication No. 2014/030628, paragraphs 0028 to 0074 of JP 2014-59550 A, and International Publication No. 2012/0074. 169447, paragraphs 0013 to 0091, JP2015-176046, paragraphs 0019 to 0033, JP2014-63144, paragraphs 0053 to 00099, JP201452431, paragraphs 0085 to 0150, JP Paragraphs 0076 to 0124 of Japanese Patent Application Laid-Open No.
  • the infrared absorber is preferably at least one selected from the group consisting of compounds represented by the following formulas 1 to 3.
  • a 1 and A 2 each independently represent an aryl group, a heteroaryl group, or a group represented by Formula 1-A below.
  • R 1a and R 1b each independently represent an alkyl group, an aryl group, or a heteroaryl group
  • R 2 to R 5 each independently represents a hydrogen atom or a substituent
  • R 2 and R 3 , R 4 and R 5 may be bonded to each other to form a ring
  • R 6 and R 7 each independently represents a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, —BR A R B , or a metal atom
  • R A and R B each independently represent a hydrogen atom Represents an atom or substituent
  • R 6 may be covalently or coordinated with R 1a or R 3
  • R 7 may be covalently or coordinated with R 1b or R 5 .
  • Z 1 and Z 2 are each independently a nonmetallic atomic group that forms a 5-membered or 6-membered nitrogen-containing heterocyclic ring that may be condensed
  • R 101 and R 102 each independently represents an alkyl group, an alkenyl group, an alkynyl group, an aralkyl group, or an aryl group
  • L 1 represents a methine chain composed of an odd number of methines
  • a and b are each independently 0 or 1
  • X 1 represents an anion
  • c represents the number necessary for balancing the charge
  • the site represented by Cy in the formula is an anion moiety.
  • X 1 represents a cation
  • c represents a number necessary to balance the charge
  • the curable composition may contain a pigment derivative.
  • the pigment derivative is preferably a compound having a structure in which a part of an organic pigment is substituted with an acidic group, a basic group or a phthalimidomethyl group.
  • a pigment derivative having an acidic group or a basic group is preferable.
  • Particularly preferred are pigment derivatives having a basic group.
  • the combination of the resin (dispersant) and the pigment derivative described above is preferably a combination in which the dispersant is an acidic dispersant and the pigment derivative has a basic group.
  • organic pigment for constituting the pigment derivative examples include diketopyrrolopyrrole pigments, azo pigments, phthalocyanine pigments, anthraquinone pigments, quinacridone pigments, dioxazine pigments, perinone pigments, perylene pigments, thioindigo pigments , Isoindoline pigments, isoindolinone pigments, quinophthalone pigments, selenium pigments, metal complex pigments, and the like.
  • the acidic group possessed by the pigment derivative is preferably a sulfonic acid group or a salt thereof, or a carboxylic acid group or a salt thereof, more preferably a carboxylic acid group or a sulfonic acid group, and still more preferably a sulfonic acid group.
  • a basic group which a pigment derivative has an amino group is preferable and a tertiary amino group is more preferable.
  • the content of the pigment derivative is preferably 1 to 30% by mass and more preferably 3 to 20% by mass with respect to the mass of the pigment. Only one pigment derivative may be used, or two or more pigment derivatives may be used in combination.
  • the curable composition contains a polymerizable compound.
  • the polymerizable compound means a compound containing a polymerizable group and a component different from the resin (dispersant and binder resin).
  • the content of the polymerizable compound in the curable composition is not particularly limited, but is generally preferably 5 to 30% by mass with respect to the total solid content of the curable composition.
  • a polymeric compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of polymeric compounds together, it is preferable that total content is in the said range.
  • the polymerizable compound is preferably a compound containing at least one group containing an ethylenically unsaturated bond, more preferably a compound containing 2 or more, further preferably containing 3 or more, and containing 5 or more. Is particularly preferred.
  • the upper limit is 15 or less, for example.
  • Examples of the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
  • polymerizable compound for example, compounds described in paragraph 0050 of JP2008-260927A and paragraph 0040 of JP2015-68893A can be used. Incorporated into.
  • any of chemical forms such as a monomer, a prepolymer, an oligomer, these mixtures, these multimers, etc., may be sufficient, for example.
  • the polymerizable compound is preferably a 3 to 15 functional (meth) acrylate compound, more preferably a 3 to 6 functional (meth) acrylate compound.
  • a compound having at least one group containing an ethylenically unsaturated bond and having a boiling point of 100 ° C. or higher under normal pressure is preferable.
  • compounds described in paragraph 0227 of JP2013-29760A and paragraphs 0254 to 0257 of JP2008-292970A can be used, the contents of which are incorporated herein.
  • Examples of the polymerizable compound include dipentaerythritol triacrylate (commercially available product KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (commercially available product KAYARAD D-320; manufactured by Nippon Kayaku Co., Ltd.).
  • NK ester A-TMMT penentaerythritol tetraacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.
  • KAYARAD RP-1040 manufactured by Nippon Kayaku Co., Ltd.
  • the like can also be used.
  • the polymerizable compound may contain an acid group such as a carboxylic acid group, a sulfonic acid group, or a phosphoric acid group.
  • an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid is preferable, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
  • a polymerizable compound containing a group is more preferable, and in this ester, a compound in which the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol is further preferable.
  • Examples of commercially available polymerizable compounds include Aronix TO-2349, M-305, M-510, and M-520 manufactured by Toa Gosei Co., Ltd.
  • the acid value of the polymerizable compound containing an acid group is preferably from 0.1 to 40 mgKOH / g, more preferably from 5 to 30 mgKOH / g.
  • the curable composition has more excellent developability (characteristic that is easily dissolved in an alkali developer), and is 40 mgKOH / g or less. It is advantageous in the production and / or handling of the polymerizable compound and has a better photopolymerizability. As a result, the curable composition has better curability.
  • a compound containing a caprolactone structure is preferable.
  • the compound containing a caprolactone structure is not particularly limited as long as it is a compound containing a caprolactone structure in the molecule, and a known compound can be used.
  • Examples of the compound containing a caprolactone structure include trimethylolethane, ditrimethylolethane, trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, and trimethylolmelamine.
  • Examples thereof include ⁇ -caprolactone-modified polyfunctional (meth) acrylate obtained by esterifying a polyhydric alcohol, (meth) acrylic acid and ⁇ -caprolactone.
  • ⁇ -caprolactone-modified polyfunctional (meth) acrylate obtained by esterifying a polyhydric alcohol, (meth) acrylic acid and ⁇ -caprolactone.
  • compounds containing a caprolactone structure represented by the following formula (Z-1) are preferred.
  • R 1 represents a hydrogen atom or a methyl group
  • m is 1 or 2
  • “*” represents a bonding position
  • R 1 represents a hydrogen atom or a methyl group
  • “*” represents a bonding position
  • Polymerizable compounds containing a caprolactone structure are commercially available, for example, from Nippon Kayaku as the KAYARAD DPCA series.
  • -2) is a compound in which the number of groups represented by 2 and R 1 are all hydrogen atoms
  • DPCA-30 wherein m is 1, and the number of groups represented by formula (Z-2) is 3, compound in which R 1 is all hydrogen atoms
  • DPCA-60 in the formula, m is 1, the number of groups represented by formula (Z-2) is 6, and R 1 is all hydrogen atoms
  • DPCA-120 a compound in which m is 2, the number of groups represented by formula (Z-2) is 6, and all R 1 are hydrogen atoms).
  • a compound represented by the following formula (Z-4) or (Z-5) can also be used.
  • each E independently represents — ((CH 2 ) y CH 2 O) — or ((CH 2 ) y CH (CH 3 ) O) —.
  • y independently represents an integer of 0 to 10.
  • X represents a (meth) acryloyl group, a hydrogen atom, or a carboxylic acid group each independently.
  • the total number of (meth) acryloyl groups is 3 or 4
  • each m independently represents an integer of 0 to 10
  • the total of each m is an integer of 0 to 40.
  • the total number of (meth) acryloyl groups is 5 or 6
  • each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60.
  • m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
  • the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and still more preferably an integer of 4 to 8.
  • n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
  • the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and still more preferably an integer of 6 to 12.
  • formula (Z-4) or formula (Z-5) — ((CH 2 ) y CH 2 O) — or ((CH 2 ) y CH (CH 3 ) O) — A form in which the terminal is bonded to X is preferred.
  • the compounds represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more.
  • all six Xs are acryloyl groups
  • all six Xs are acryloyl groups
  • the curable composition containing the above compound has more excellent developability.
  • the total content of the compound represented by formula (Z-4) or formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
  • a pentaerythritol derivative and / or a dipentaerythritol derivative are more preferable.
  • the polymerizable compound may contain a cardo skeleton.
  • a polymerizable compound containing a 9,9-bisarylfluorene skeleton is preferable.
  • skeleton For example, oncoat EX series (made by Nagase Sangyo Co., Ltd.), Og sole (made by Osaka Gas Chemical Co., Ltd.), etc. are mentioned.
  • the curable composition may contain other components as long as the effects of the present invention are achieved.
  • examples of other components include a resin, a polymerization inhibitor, a solvent, a surfactant, an ultraviolet absorber, and a silane coupling agent.
  • the curable composition may contain a polymerization initiator other than the specific oxime compound.
  • the polymerization initiator other than the specific oxime compound include a thermal polymerization initiator and a photopolymerization initiator.
  • the content of the other polymerization initiator in the curable composition is not particularly limited, but is generally preferably 0.1 to 5% by mass with respect to the total solid content of the curable composition.
  • Other polymerization initiators may be used alone or in combination of two or more. When two or more kinds of other polymerization initiators are used in combination, the total content is preferably within the above range.
  • thermal polymerization initiator examples include 2,2′-azobisisobutyronitrile (AIBN), 3-carboxypropionitrile, azobismaleonitrile, and dimethyl- (2,2 ′)-azobis (2 -Methylpropionate) [V-601] and the like, and organic peroxides such as benzoyl peroxide, lauroyl peroxide, and potassium persulfate.
  • thermal polymerization initiator include compounds described on pages 65 to 148 of “Ultraviolet Curing System” written by Kiyoto Kato (published by General Technology Center Co., Ltd .: 1989).
  • the photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, those containing a triazine skeleton and those containing an oxadiazole skeleton), acylphosphine compounds such as acylphosphine oxide, and hexaarylbiimidazoles. Oxime compounds such as oxime derivatives (excluding specific oxime compounds), organic peroxides, thio compounds, ketone compounds, aromatic onium salts, aminoacetophenone compounds, and hydroxyacetophenones.
  • paragraphs 0265 to 0268 of JP2013-29760A can be referred to, and the contents thereof are incorporated herein.
  • the photopolymerization initiator for example, an aminoacetophenone initiator described in JP-A-10-291969 or an acylphosphine initiator described in Japanese Patent No. 4225898 can be used.
  • the above content is incorporated herein.
  • the hydroxyacetophenone compound for example, IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, or IRGACURE-127 (trade name: all manufactured by BASF) can be used, but not limited thereto. .
  • aminoacetophenone compound for example, commercially available products IRGACURE-907, IRGACURE-369, or IRGACURE-379EG (trade names: all manufactured by BASF) can be used, but are not limited thereto.
  • aminoacetophenone compound a compound described in JP-A-2009-191179 whose absorption wavelength is matched with a long wave light source of 365 nm or 405 nm can also be used, and the above contents are incorporated in the present specification.
  • acylphosphine compound IRGACURE-819, IRGACURE-TPO (trade name: all manufactured by BASF) or the like can be used.
  • the curable composition preferably contains a resin.
  • the resin include a dispersant and a binder resin.
  • the content of the resin in the curable composition is not particularly limited, but is generally preferably 5 to 40% by mass with respect to the total solid content of the curable composition.
  • Resin may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of resin together, it is preferable that total content is in the said range.
  • the curable composition preferably contains a dispersant (corresponding to a resin).
  • a dispersing agent intends the compound different from the alkali-soluble resin mentioned later.
  • the content of the dispersant in the curable composition is not particularly limited, but is generally preferably 5 to 40% by mass with respect to the total solid content of the curable composition.
  • a dispersing agent may be used individually by 1 type, or may use 2 or more types together. When two or more dispersants are used in combination, the total content is preferably within the above range.
  • the dispersant is not particularly limited, and a known dispersant can be used.
  • the dispersant include a polymer dispersant.
  • the polymer dispersant include polyamidoamine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, and (meth) acrylic copolymer. And naphthalenesulfonic acid formalin condensate.
  • a dispersing agent polyoxyethylene alkyl phosphate ester, polyoxyethylene alkylamine, a pigment derivative, etc. can be used.
  • a polymer compound is preferable.
  • the polymer compounds can be further classified into linear polymers, terminal-modified polymers, graft polymers, and block polymers based on their structures.
  • a high molecular compound adsorb
  • the polymer compound may contain a curable group.
  • the curable group include an ethylenically unsaturated group (for example, (meth) acryloyl group, vinyl group, and styryl group), and a cyclic ether group (for example, epoxy group, oxetanyl group, etc.)
  • an ethylenically unsaturated group is preferable as the curable group in that polymerization can be controlled by radical reaction.
  • a (meth) acryloyl group is more preferable.
  • the resin containing a curable group preferably contains at least one selected from the group consisting of a polyester structure and a polyether structure.
  • the main chain may contain a polyester structure and / or a polyether structure, and, as will be described later, when the resin contains a structural unit containing a graft chain, the graft chain May contain a polyester structure and / or a polyether structure.
  • the said graft chain contains a polyester structure.
  • the polymer compound preferably contains a structural unit containing a graft chain.
  • structural unit is synonymous with “repeating unit”.
  • a polymer compound containing a structural unit containing such a graft chain has a better affinity with a solvent.
  • a polymer compound containing a structural unit containing a graft chain has better affinity with a solvent, so that it is easier to disperse pigments and the like even if time passes after the pigments are dispersed The initial dispersion state is less likely to change (has better aging stability).
  • the high molecular compound containing the structural unit containing a graft chain contains a graft chain, it has a better affinity with a polymerizable compound and / or other components described later.
  • a polymer compound containing a structural unit containing a graft chain is less likely to produce a residue due to an unreacted polymerizable compound or the like during alkali development described later.
  • the graft chain is long (the formula amount is large), the steric repulsion effect is enhanced, and the dispersibility of the pigment and the like is improved.
  • the number of atoms in the graft chain (excluding hydrogen atoms) is preferably 40 to 10,000, more preferably 50 to 2000, and still more preferably 60 to 500.
  • the graft chain is intended from the root of the main chain of the polymer compound (the atom bonded to the main chain in a group branched from the main chain) to the end of the group branched from the main chain.
  • the graft chain is preferably a polymer chain containing a polymer structure.
  • the polymer structure contained in the polymer chain is not particularly limited, and examples thereof include a poly (meth) acrylate structure (for example, poly (meth) acrylic structure), a polyester structure, a polyurethane structure, a polyurea structure, a polyamide structure, and a poly structure.
  • Examples include ether structures.
  • the polymer chain has a polyester film structure, a polyether structure, and a poly (meth) acrylate structure in that the polymer chain and the solvent have an even better affinity, and the polymer compound can more easily disperse pigments and the like. It is preferable to contain at least one selected from the group consisting of, and more preferable to contain at least one selected from the group consisting of a polyester structure and a polyether structure.
  • the macromonomer containing such a polymer chain (a monomer that contains a polymer structure and binds to the main chain of a polymer compound (for example, a copolymer) to form a graft chain) is not particularly limited, Macromonomers containing reactive double bond groups are preferred.
  • AA-6, AA-10, AB-6, AS -6, AN-6, AW-6, AA-714, AY-707, AY-714, AK-5, AK-30, and AK-32 all the above are trade names, manufactured by Toa Gosei Co., Ltd.
  • Blemmer PP-100, Blemmer PP-500, Blemmer PP-800, Blemmer PP-1000, Blemmer 55-PET-800, Blemmer PME-4000, Blemmer PSE-400, Blemmer PSE-1300, and Blemmer 43PAPE- 600B all the above are trade names, manufactured by NOF Corporation); and the like.
  • the dispersant preferably contains at least one structure selected from the group consisting of polymethyl acrylate, polymethyl methacrylate, and cyclic or chain polyesters. Polymethyl acrylate, polymethyl methacrylate It is more preferable to contain at least one structure selected from the group consisting of chain polyesters, and from a polymethyl acrylate structure, a polymethyl methacrylate structure, a polycaprolactone structure, and a polyvalerolactone structure. More preferably, it contains at least one structure selected from the group consisting of:
  • the dispersant may contain one type of the above structure in the molecule, or may contain a plurality of types of this structure in the molecule.
  • the polycaprolactone structure means a structure containing a ring-opened structure of ⁇ -caprolactone as a repeating unit.
  • the polyvalerolactone structure means a structure containing a ring-opened structure of ⁇ -valerolactone as a repeating unit.
  • examples of the dispersant containing a polycaprolactone structure include those in which j or k is 5 in the following formula (1) or the following formula (2).
  • examples of the dispersant containing a polyvalerolactone structure include those in which j or k is 4 in the following formula (1) or the following formula (2).
  • Examples of the dispersant containing a polymethyl acrylate structure include those in which, in the following formula (4), X 5 is a hydrogen atom and R 4 is a methyl group.
  • Examples of the dispersant containing a polymethyl methacrylate structure include those in which X 5 is a methyl group and R 4 is a methyl group in the following formula (4).
  • the polymer compound contains at least one polymer chain selected from the group consisting of the following formulas (1) to (4) as a structural unit containing a graft chain. It is preferable to contain a structural unit, and at least one selected from the group consisting of the following formula (1A), the following formula (2A), the following formula (3A), the following formula (3B), and the following (4), More preferably, it contains a structural unit containing a polymer chain.
  • W 1 , W 2 , W 3 , and W 4 each independently represent an oxygen atom or NH.
  • W 1 , W 2 , W 3 , and W 4 are preferably oxygen atoms.
  • X 1 , X 2 , X 3 , X 4 , and X 5 each independently represent a hydrogen atom or a monovalent organic group.
  • X 1 , X 2 , X 3 , X 4 , and X 5 are each independently preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms (the number of carbon atoms) from the viewpoint of synthesis constraints. Independently, a hydrogen atom or a methyl group is more preferable, and a methyl group is still more preferable.
  • Y 1 , Y 2 , Y 3 , and Y 4 each independently represent a divalent linking group.
  • the structure of the linking group is not particularly limited.
  • Examples of the divalent linking group represented by Y 1 , Y 2 , Y 3 , and Y 4 include linking groups represented by the following formulas (Y-1) to (Y-21). .
  • a and B each represent a binding site. Of the structures shown below, (Y-2) or (Y-13) is more preferred because of the ease of synthesis.
  • Z 1 , Z 2 , Z 3 , and Z 4 each independently represent a monovalent organic group.
  • the structure of the organic group is not particularly limited.
  • the organic group include an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group, an arylthioether group, a heteroarylthioether group, and an amino group.
  • the organic groups represented by Z 1 , Z 2 , Z 3 , and Z 4 preferably have a steric repulsion effect in that pigments and the like are more easily dispersed.
  • alkyl group or an alkoxy group having 5 to 24 carbon atoms is more preferable, and a branched alkyl group having 5 to 24 carbon atoms, a cyclic alkyl group having 5 to 24 carbon atoms, or an alkoxy group having 5 to 24 carbon atoms is more preferable.
  • the alkyl group contained in the alkoxy group may be linear, branched, or cyclic.
  • n, m, p, and q each independently represents an integer of 1 to 500.
  • j and k each independently represents an integer of 2 to 8.
  • j and k are integers of 4 to 6 in that the curable composition has better stability over time and better developability. 5 is more preferable.
  • n and m are preferably integers of 10 or more, and more preferably 20 or more.
  • the dispersant contains a polycaprolactone structure and a polyvalerolactone structure
  • the sum of the number of repetitions of the polycaprolactone structure and the number of repetitions of polyvalerolactone is preferably an integer of 10 or more, An integer is more preferable.
  • R 3 represents a branched or straight chain alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, a plurality of R 3 may be the same as or different from each other.
  • R 4 represents a hydrogen atom or a monovalent organic group. The structure of the monovalent organic group is not particularly limited. As R 4 , for example, a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group is preferable, and a hydrogen atom or an alkyl group is more preferable.
  • the alkyl group may be a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms.
  • a linear alkyl group having 1 to 20 carbon atoms is more preferable, and a linear alkyl group having 1 to 6 carbon atoms is still more preferable.
  • q is 2 to 500
  • a plurality of X 5 and R 4 present in the structural unit containing a graft chain may be the same or different from each other.
  • the polymer compound may contain structural units containing two or more types of graft chains having different structures. That is, in the molecule of the polymer compound, structural units represented by the formulas (1) to (4) having different structures may be contained, and in the formulas (1) to (4), n, m , P, and q each represent an integer of 2 or more, in formula (1) and formula (2), j and k may contain structures different from each other in the side chain, and formula (3) and formula In (4), a plurality of R 3 , R 4 and X 5 present in the molecule may be the same or different from each other.
  • the structural unit represented by the formula (1) is a structural unit represented by the following formula (1A) in that the curable composition has better stability over time and better developability. More preferred.
  • a structural unit represented by the following formula (2A) is more preferable in that the curable composition has more excellent temporal stability and developability.
  • X 1, Y 1, Z 1 and n are as previously described as X 1, Y 1, Z 1 and n in formula (1).
  • X 2, Y 2, Z 2 and m are as previously described as X 2, Y 2, Z 2 and m in the formula (2).
  • the structural unit represented by the formula (3) is represented by the following formula (3A) or the formula (3B) in that the curable composition has better temporal stability and better developability.
  • the structural unit is more preferable.
  • the polymer compound contains a structural unit represented by the formula (1A) as a structural unit containing a graft chain, particularly a polymer chain.
  • the content of the structural unit containing a graft chain (for example, the structural unit represented by the above formula (1) to formula (4)) in the polymer compound is based on the total mass of the polymer compound in terms of mass.
  • the range is preferably 2 to 90% by mass, and more preferably 5 to 30%.
  • the dispersant can easily disperse the pigment or the like, and the curable composition has more excellent developability.
  • a high molecular compound contains the hydrophobic structural unit different from the structural unit containing a graft chain (namely, it does not correspond to the structural unit containing a graft chain).
  • the hydrophobic structural unit is a structural unit that does not contain an acid group (for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, and the like).
  • the hydrophobic structural unit is preferably a structural unit derived from (corresponding to) a compound (monomer) having a ClogP value of 1.2 or more, which will be described later, and a structural unit derived from a compound having a ClogP value of 1.2 to 8.0. More preferred.
  • ClogP values are available from Daylight Chemical Information System, Inc. It is a value calculated by the program “CLOGP” available from This program provides the value of “computation logP” calculated by Hansch, Leo's fragment approach (see below). The fragment approach is based on the chemical structure of a compound, which divides the chemical structure into substructures (fragments) and estimates the logP value of the compound by summing the logP contributions assigned to that fragment. Details thereof are described in the following documents. In this specification, the ClogP value is intended to be a value calculated by the program CLOGP v4.82. A. J. et al. Leo, Comprehensive Medicinal Chemistry, Vol. 4, C.I. Hansch, P.A. G. Sammunens, J. et al.
  • log P means the common logarithm of the partition coefficient P (Partition Coefficient), and quantitatively determines how an organic compound is distributed in the equilibrium of a two-phase system of oil (generally 1-octanol) and water. It is a physical property value expressed as a numerical value, and is represented by the following formula.
  • logP log (Coil / Cwater)
  • Coil represents the molar concentration of the compound in the oil phase
  • Cwater represents the molar concentration of the compound in the aqueous phase.
  • the polymer compound may contain at least one structural unit selected from the group consisting of structural units derived from monomers represented by the following formulas (i) to (iii) as hydrophobic structural units. preferable.
  • R 1 , R 2 , and R 3 are each independently a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number Represents an alkyl group of 1 to 6 (for example, a methyl group, an ethyl group, a propyl group, etc.).
  • R 1 , R 2 and R 3 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom or a methyl group.
  • R 2 and R 3 are more preferably a hydrogen atom.
  • X represents an oxygen atom (—O—) or an imino group (—NH—), preferably an oxygen atom.
  • L is a single bond or a divalent linking group.
  • the divalent linking group include a divalent aliphatic group (for example, an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, and a substituted alkynylene group), a divalent aromatic group (for example, , Arylene groups, substituted arylene groups, etc.), divalent heterocyclic groups, oxygen atoms (—O—), sulfur atoms (—S—), imino groups (—NH—), substituted imino groups (—NR 31) -, Wherein R 31 represents an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl group (-CO-), and combinations thereof.
  • the divalent aliphatic group may contain a cyclic structure or a branched chain structure.
  • the aliphatic group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
  • the aliphatic group may be an unsaturated aliphatic group or a saturated aliphatic group, and is preferably a saturated aliphatic group.
  • the aliphatic group may contain a substituent. Although it does not restrict
  • the carbon number of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and still more preferably 6 to 10.
  • the aromatic group may contain a substituent. Although it does not restrict
  • the divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as the heterocyclic ring. Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring.
  • the heterocyclic group may contain a substituent. The substituent is not particularly limited.
  • a halogen atom, a hydroxyl group, an oxo group ( ⁇ O), a thioxo group ( ⁇ S), an imino group ( ⁇ NH), a substituted imino group ( ⁇ N—R 32 , R 32 may be an aliphatic group, an aromatic group or a heterocyclic group), an aliphatic group, an aromatic group, a heterocyclic group, or the like.
  • L is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure.
  • the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
  • L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures.
  • the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
  • the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n —, where n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
  • Z includes an aliphatic group (for example, an alkyl group, a substituted alkyl group, an unsaturated alkyl group, and a substituted unsaturated alkyl group), an aromatic group (for example, an aryl group, a substituted aryl group, an arylene group, and Substituted arylene groups, etc.), heterocyclic groups, or combinations thereof.
  • These groups include an oxygen atom (—O—), a sulfur atom (—S—), an imino group (—NH—), a substituted imino group (—NR 31 —, where R 31 is an aliphatic group or an aromatic group. Or a heterocyclic group) or a carbonyl group (—CO—).
  • the aliphatic group may contain a cyclic structure or a branched chain structure.
  • the aliphatic group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
  • the aliphatic group further contains a ring assembly hydrocarbon group or a bridged cyclic hydrocarbon group. Examples of the ring assembly hydrocarbon group include a bicyclohexyl group, a perhydronaphthalenyl group, a biphenyl group, and Examples include 4-cyclohexylphenyl group.
  • bridged cyclic hydrocarbon ring examples include pinane, bornane, norpinane, norbornane, and bicyclooctane ring (bicyclo [2.2.2] octane ring, bicyclo [3.2.1] octane ring, etc.)
  • a tricyclic hydrocarbon ring such as adamantane, tricyclo [5.2.1.0 2,6 ] decane, and tricyclo [4.3.1.1 2,5 ] undecane ring Tetracyclo [4.4.0.1 2,5 . 1 7,10 ] dodecane, and tetracyclic hydrocarbon rings such as perhydro-1,4-methano-5,8-methanonaphthalene ring; and the like.
  • Bridged cyclic hydrocarbon rings include fused cyclic hydrocarbon rings such as perhydronaphthalene (decalin), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydrofluorene, perhydroindene, and perhydroindene.
  • a condensed ring formed by condensing a plurality of 5- to 8-membered cycloalkane rings such as a phenalene ring is also included.
  • the aliphatic group a saturated aliphatic group is preferable to an unsaturated aliphatic group.
  • the aliphatic group may contain a substituent. Examples of the substituent include a halogen atom, an aromatic group, and a heterocyclic group. However, the aliphatic group does not contain an acid group as a substituent.
  • the carbon number of the aromatic group is preferably 6-20, more preferably 6-15, and still more preferably 6-10.
  • the aromatic group may contain a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, and a heterocyclic group. However, the aromatic group does not contain an acid group as a substituent.
  • a heterocyclic group contains a 5-membered ring or a 6-membered ring as a heterocyclic ring.
  • Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring.
  • the heterocyclic group may contain a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group ( ⁇ O), a thioxo group ( ⁇ S), an imino group ( ⁇ NH), a substituted imino group ( ⁇ N—R 32 , where R 32 is aliphatic. Group, aromatic group or heterocyclic group), aliphatic group, aromatic group, heterocyclic group and the like.
  • the heterocyclic group does not contain an acid group as a substituent.
  • R 4 , R 5 , and R 6 are each independently a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number of 1-6.
  • An alkyl group for example, a methyl group, an ethyl group, a propyl group, etc.
  • Z or LZ.
  • L and Z are as defined above.
  • R 4, R 5 and, as the R 6, a hydrogen atom, or, preferably an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
  • R 1 , R 2 , and R 3 are a hydrogen atom or a methyl group, and L is a single bond, an alkylene group, or an oxyalkylene structure
  • a compound in which X is an oxygen atom or an imino group, and Z is an aliphatic group, a heterocyclic group or an aromatic group is preferable.
  • a compound in which R 1 is a hydrogen atom or a methyl group, L is an alkylene group, and Z is an aliphatic group, a heterocyclic group or an aromatic group Is preferred.
  • Examples of the monomer represented by the above formula (iii) include compounds in which R 4 , R 5 , and R 6 are a hydrogen atom or a methyl group, and Z is an aliphatic group, a heterocyclic group, or an aromatic group. preferable.
  • Examples of typical compounds represented by the formulas (i) to (iii) include radical polymerizable compounds such as acrylic acid esters, methacrylic acid esters, and styrenes.
  • radical polymerizable compounds such as acrylic acid esters, methacrylic acid esters, and styrenes.
  • compounds described in paragraphs 0089 to 0093 of JP2013-249417A can be referred to, and the contents thereof are described in the present specification. Incorporated into.
  • the content of the hydrophobic structural unit is preferably 10 to 90% by mass and more preferably 20 to 80% by mass with respect to the total mass of the polymer compound.
  • the curable composition has a more excellent effect of the present invention.
  • Structural unit containing a functional group capable of forming an interaction with a pigment or the like A functional group capable of forming an interaction with a pigment or the like can be introduced into the polymer compound.
  • the polymer compound preferably further contains a structural unit containing a functional group capable of forming an interaction with a pigment or the like.
  • the functional group capable of forming an interaction with the pigment and the like include an acid group, a basic group, a coordination group, and a reactive functional group.
  • the polymer compound contains an acid group, a basic group, a coordination group, or a reactive functional group, the structural unit containing an acid group, the structural unit containing a basic group, and a coordination group, respectively.
  • the polymer compound further contains an alkali-soluble group such as a carboxylic acid group as the acid group, developability for pattern formation by alkali development can be imparted to the polymer compound. That is, by introducing an alkali-soluble group into the polymer compound, in the curable composition, the polymer compound as a dispersant that contributes to the dispersion of pigments and the like has alkali solubility at the same time.
  • the curable composition containing such a polymer compound has better alkali developability (the unexposed portion is more easily dissolved by alkali development), and the resulting cured film has better light shielding. Have sex.
  • the polymer compound containing an acid group has a higher affinity with the solvent described later. Therefore, the curable composition containing the high molecular compound containing an acid group has more excellent coating property. This is because the acid group in the structural unit containing an acid group is likely to interact with the pigment and the like, the polymer compound stably disperses the pigment and the like, and the viscosity of the polymer compound that disperses the pigment and the like further decreases. This is presumably because the polymer compound itself is easily dispersed stably.
  • the structural unit containing an alkali-soluble group as an acid group may be the same structural unit as the structural unit containing the graft chain or a different structural unit.
  • the structural unit containing an alkali-soluble group as an acid group intends a structural unit different from the hydrophobic structural unit (that is, does not correspond to the hydrophobic structural unit described above).
  • the acid group include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a phenolic hydroxyl group.
  • at least one selected from the group consisting of phosphoric acid groups is preferred, and carboxylic acid groups are more preferred in that they have better adsorptive power to pigments and the like and have better dispersibility.
  • the polymer compound preferably further contains a structural unit containing at least one selected from the group consisting of a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.
  • the polymer compound may have one or more structural units containing an acid group.
  • the polymer compound may or may not contain a structural unit containing an acid group.
  • the content of the structural unit containing an acid group in the polymer compound is preferably 5 to 80% by mass with respect to the total mass of the polymer compound, in that damage of image strength due to alkali development is further suppressed. 10 to 60% by mass is more preferable.
  • the basic group includes, for example, a primary amino group, a secondary amino group, a tertiary amino group, a heterocyclic group containing an N atom, and And an amide group.
  • a tertiary amino group is preferable in that it has a better adsorptive power to pigments and the like and has a better dispersibility.
  • the polymer compound may contain one basic group alone or two or more basic groups.
  • the polymer compound may or may not contain a structural unit containing a basic group.
  • the content of the structural unit containing a basic group in the polymer compound is preferably 0.01 to 50% by mass with respect to the total mass of the polymer compound, and the curable composition has better developability. In view of the above, 0.01 to 30% by mass is more preferable.
  • a coordinating group and a reactive functional group for example, an acetylacetoxy group, a trialkoxysilyl group, an isocyanate group, an acid anhydride group, and And acid chloride groups.
  • an acetylacetoxy group is preferable in that it has a better adsorbing power to pigments and the like and is more easily dispersed.
  • the polymer compound may contain a coordinating group and a reactive functional group alone, or may contain two or more kinds.
  • the polymer compound may or may not contain any of a structural unit containing a coordinating group and a structural unit containing a reactive functional group.
  • the content of the structural unit containing a coordinating group and the reactive functional group in the polymer compound is preferably 10 to 80% by mass relative to the total mass of the polymer compound, and is curable. 20-60 mass% is more preferable at the point which the composition shows the outstanding developability.
  • the polymer compound may contain a functional group capable of forming an interaction with the pigment or the like.
  • the polymer compound contains one or more structural units selected from structural units derived from monomers represented by the following formulas (iv) to (vi). It is preferable to contain.
  • R 11 , R 12 , and R 13 each independently represent a hydrogen atom, a halogen atom (eg, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number Represents an alkyl group of 1 to 6 (for example, a methyl group, an ethyl group, a propyl group, etc.).
  • R 11 , R 12 and R 13 are each independently preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and each independently a hydrogen atom Or a methyl group is more preferable.
  • R 12 and R 13 are each more preferably a hydrogen atom.
  • X 1 in the formula (iv) represents an oxygen atom (—O—) or an imino group (—NH—), and preferably an oxygen atom.
  • Y in the formula (v) represents a methine group or a nitrogen atom.
  • L 1 in the formulas (iv) to (v) represents a single bond or a divalent linking group.
  • the definition of the divalent linking group is the same as the definition of the divalent linking group represented by L in the above-described formula (i).
  • L 1 is preferably a single bond or a divalent linking group containing an alkylene group or an oxyalkylene structure.
  • the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
  • L 1 may contain a polyoxyalkylene structure containing two or more oxyalkylene structures repeatedly.
  • the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
  • the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n—, where n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
  • Z 1 represents a functional group capable of forming an interaction with a pigment or the like other than the graft chain, and is preferably a carboxylic acid group or a tertiary amino group. Is more preferable.
  • R 14 , R 15 , and R 16 are each independently a hydrogen atom, a halogen atom (eg, a fluorine atom, a chlorine atom, a bromine atom, etc.), or an alkyl having 1 to 6 carbon atoms. group (e.g., methyl group, ethyl group, and propyl group), - Z 1, or an L 1 -Z 1.
  • L 1 and Z 1 are the same meaning as L 1 and Z 1 in the above, it is the preferable examples.
  • R 14 , R 15 and R 16 are each independently preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
  • R 11 , R 12 , and R 13 are each independently a hydrogen atom or a methyl group, and L 1 contains an alkylene group or an oxyalkylene structure. And a compound in which X 1 is an oxygen atom or an imino group and Z 1 is a carboxylic acid group.
  • R 11 is a hydrogen atom or a methyl group
  • L 1 is an alkylene group
  • Z 1 is a carboxylic acid group
  • Y is a methine group. Certain compounds are preferred.
  • R 14 , R 15 , and R 16 are each independently a hydrogen atom or a methyl group, L 1 is a single bond or an alkylene group, and Z 1 A compound in which is a carboxylic acid group is preferred.
  • monomers represented by the formulas (iv) to (vi).
  • examples of the monomer include methacrylic acid, crotonic acid, isocrotonic acid, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule (for example, 2-hydroxyethyl methacrylate) and succinic anhydride.
  • reaction product a reaction product of a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule with phthalic anhydride, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and tetrahydroxyphthalic anhydride Reaction product, a reaction product of a compound containing an addition polymerizable double bond and hydroxyl group in the molecule and trimellitic anhydride, a compound containing an addition polymerizable double bond and hydroxyl group in the molecule and pyromellitic anhydride Reactants with, acrylic acid, acrylic acid dimer, acrylic acid oligomer, maleic acid, itaconic acid, fumaric acid, 4-vinylbenzoic acid, vinylphenol, and 4-hydroxyphenyl methacrylamide.
  • the content of the structural unit containing a functional group capable of forming an interaction with a pigment or the like is high from the viewpoint of the interaction with the pigment or the like, stability over time, and permeability to a developer.
  • the amount is preferably 0.05 to 90% by mass, more preferably 1.0 to 80% by mass, and still more preferably 10 to 70% by mass with respect to the total mass of the molecular compound.
  • the polymer compound is a structural unit containing a graft chain, a hydrophobic structural unit, and a pigment as long as the effects of the present invention are not impaired.
  • Other structural units for example, structural units containing functional groups having an affinity for the solvent used in the dispersion composition, etc.
  • the other structural unit include a structural unit derived from a radical polymerizable compound selected from the group consisting of acrylonitriles and methacrylonitriles.
  • the polymer compound may contain one other structural unit alone and may contain two or more kinds.
  • the content of other structural units in the polymer compound is preferably 0% to 80% by mass and more preferably 10 to 60% by mass with respect to the total mass of the polymer compound.
  • the content of other structural units is 0 to 80% by mass, the curable composition has more excellent pattern forming properties.
  • the acid value of the polymer compound is not particularly limited, but is preferably 0 to 250 mgKOH / g, more preferably 10 to 200 mgKOH / g, and still more preferably 20 to 120 mgKOH / g.
  • the acid value of the polymer compound is 250 mgKOH / g or less, peeling of the cured film from the support is further suppressed in the development step described later.
  • the acid value of the polymer compound is 10 mgKOH / g or more, the curable composition has more excellent alkali developability.
  • the acid value of the polymer compound is 20 mgKOH / g or more, the precipitation of pigments and the like in the curable composition is further suppressed, and the number of coarse particles is smaller. Have sex.
  • the acid value of the polymer compound can be calculated, for example, from the average content of acid groups in the polymer compound.
  • the high molecular compound which has a desired acid value can be obtained by changing content of the structural unit containing the acid group in a high molecular compound.
  • the weight average molecular weight of the polymer compound is that GPC (Gel Permeation Chromatography) is a gel permeation chromatography in that the curable composition has better developability and the resulting cured film is more difficult to peel in the development process.
  • the polystyrene-converted value by the (graph) method is preferably 4,000 to 300,000, more preferably 5,000 to 200,000, still more preferably 6,000 to 100,000, and particularly preferably 10,000 to 50,000. preferable.
  • the GPC method is based on a method using HLC-8020GPC (manufactured by Tosoh), TSKgel SuperHZM-H, TSKgel SuperHZ4000, TSKgel SuperHZ2000 (manufactured by Tosoh, 4.6 mm ID ⁇ 15 cm) as a column and THF (tetrahydrofuran) as an eluent.
  • the polymer compound can be synthesized based on a known method.
  • polymer compound examples include “DA-7301” manufactured by Enomoto Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate)” manufactured by BYK Chemie, 107 (carboxylic acid ester), and 110 (copolymer containing acid group).
  • Acrybase FFS-6752, Acrybase FFS-187, Acrycure-RD-F8, and Cyclomer P can be used.
  • DISPERBYK-130, DISPERBYK-140, DISPERBYK-142, DISPERBYK-145, DISPERBYK-180, DISPERBYK-187, DISPERBYK-2001, DISPERBYK-2001, DISPERBYK-2010, DISPERBY20-ER, and DISPERBY20-ERB made by BYK Chemie.
  • BYK-9076, Ajisper PB821, Azisper PB822, Azisper PB881 manufactured by Ajinomoto Fine Techno Co., etc. can also be used.
  • These polymer compounds may be used alone or in combination of two or more.
  • a graft copolymer described in JP-A 2010-106268, paragraphs 0037 to 0115 (corresponding paragraphs 0075 to 0133 of US2011 / 0124824) can also be used, and the contents thereof are incorporated herein. It is.
  • a constituent component having a side chain structure in which acidic groups in paragraphs 0028 to 0084 of JP 2011-153283 A (corresponding paragraphs 0075 to 0133 of US2011 / 0279759) are bonded via a linking group Can also be used, the contents of which are incorporated herein.
  • resins described in paragraphs 0033 to 0049 of JP-A No. 2016-109763 can also be used, the contents of which are incorporated herein.
  • the curable composition preferably contains a binder resin.
  • the content of the binder resin is preferably 0.1 to 30% by mass with respect to the total solid content of the curable composition.
  • Binder resin may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of binder resin together, it is preferable that the total amount is in the said range.
  • a linear organic polymer As such a linear organic polymer, a well-known thing can be used arbitrarily.
  • a linear organic polymer that is soluble or swellable in water or weak alkaline water is selected to enable water development or weak alkaline water development.
  • alkali-soluble resin resin containing group which accelerates
  • the alkali-soluble resin means a resin containing a group that promotes alkali-solubility (alkali-soluble group), and a resin different from the dispersant already described.
  • alkali-soluble resin include resins containing at least one alkali-soluble group in the molecule, such as polyhydroxystyrene resin, polysiloxane resin, (meth) acrylic resin, (meth) acrylamide resin, and (meth) acrylic. / (Meth) acrylamide copolymer, epoxy resin, and polyimide resin.
  • the alkali-soluble resin include a copolymer of an unsaturated carboxylic acid and an ethylenically unsaturated compound.
  • unsaturated carboxylic acid Monocarboxylic acids, such as (meth) acrylic acid, crotonic acid, and vinyl acetic acid; Dicarboxylic acids, such as itaconic acid, maleic acid, and fumaric acid, or its acid anhydride
  • polycarboxylic acid monoesters such as monophthalic acid (2- (meth) acryloyloxyethyl).
  • Examples of the copolymerizable ethylenically unsaturated compound include methyl (meth) acrylate.
  • the compounds described in paragraphs 0027 of JP2010-97210A and paragraphs 0036 to 0037 of JP2015-68893A can also be used, and the above contents are incorporated herein.
  • a copolymerizable ethylenically unsaturated compound that contains an ethylenically unsaturated group in the side chain may be used in combination.
  • a (meth) acrylic acid group is preferable.
  • Acrylic resin containing an ethylenically unsaturated group in the side chain for example, an addition reaction of an ethylenically unsaturated compound containing a glycidyl group or an alicyclic epoxy group to a carboxylic acid group of an acrylic resin containing a carboxylic acid group Can be obtained.
  • alkali-soluble resin examples include JP-A-59-44615, JP-B-54-34327, JP-B-58-12777, JP-B-54-25957, JP-A-54-92723, JP-A-59-.
  • alkali-soluble resin for example, compounds described in paragraphs 0225 to 0245 of JP-A-2016-75845 can be used, and the above contents are incorporated in the present specification.
  • a polyimide precursor can also be used as the alkali-soluble resin.
  • the polyimide precursor intends a resin obtained by subjecting a compound containing an acid anhydride group and a diamine compound to an addition polymerization reaction at 40 to 100 ° C.
  • resin containing the repeating unit represented by Formula (1) is mentioned, for example.
  • the structure of the polyimide precursor include an amic acid structure represented by the following formula (2), the following formula (3) in which the amic acid structure is partially imide ring-closed, and / or the following formula in which all imide rings are closed: The thing containing the imide structure shown by (4) is mentioned.
  • a polyimide precursor having an amic acid structure may be referred to as a polyamic acid.
  • R 1 represents a tetravalent organic group having 2 to 22 carbon atoms
  • R 2 represents a divalent organic group having 1 to 22 carbon atoms
  • n is 1 or 2 Represents.
  • Examples of the polyimide precursor include compounds described in paragraphs 0011 to 0031 of JP-A-2008-106250, compounds described in paragraphs 0022 to 0039 of JP-A-2016-122101, and JP-A-2016-68401.
  • the compounds described in paragraphs 0061 to 0092 of the publication are listed, and the above contents are incorporated in the present specification.
  • the alkali-soluble resin preferably contains at least one selected from the group consisting of a polyimide resin and a polyimide precursor in that the pattern shape of the cured film obtained from the curable composition is more excellent.
  • the polyimide resin containing an alkali-soluble group is not particularly limited, and a known polyimide resin containing an alkali-soluble group can be used. Examples of the polyimide resin include a resin described in paragraph 0050 of JP-A-2014-137523, a resin described in paragraph 0058 of JP-A-2015-187676, and JP-A-2014-106326. Examples include the resins described in paragraphs 0012 to 0013, and the above contents are incorporated in the present specification.
  • the curable composition preferably contains a polymerization inhibitor. It does not restrict
  • the polymerization inhibitor include phenol-based polymerization inhibitors (for example, p-methoxyphenol, 2,5-di-tert-butyl-4-methylphenol, 2,6-di-tert-butyl-4-methylphenol).
  • a phenol polymerization inhibitor or a free radical polymerization inhibitor is preferable in that the curable composition has the more excellent effects of the present invention.
  • the polymerization initiator may be mixed with other components at the time of preparing the curable composition, or the one used in the synthesis of the resin may be mixed with the other components together with the resin. May be.
  • the content of the polymerization inhibitor in the curable composition is not particularly limited, but the total solid of the curable composition in that the curable composition has better temporal stability and better curability.
  • the content is preferably 0.0001 to 1% by mass relative to the minute.
  • a polymerization inhibitor may be used individually by 1 type, or may use 2 or more types together. When two or more polymerization inhibitors are used in combination, the total content is preferably within the above range. The effect of the polymerization inhibitor is remarkable when used together with a resin containing a curable group.
  • the resin containing a curable group is likely to be polymerized due to long-term storage or the like, it can be used without any problem.
  • the curable composition may contain a solvent.
  • the solvent is not particularly limited, and a known solvent can be used.
  • the content of the solvent in the curable composition is not particularly limited, but in general, it is preferably adjusted so that the solid content of the curable composition is 20 to 90% by mass, and adjusted to be 30 to 90% by mass. More preferably.
  • a solvent may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of solvent together, it is preferable to adjust so that the total solid content of a curable composition may become in the said range.
  • a solvent water or an organic solvent is mentioned, for example.
  • the organic solvent include acetone, methyl ethyl ketone, cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, acetylacetone.
  • Cyclohexanone, cyclopentanone, diacetone alcohol ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether acetate, 3-methoxypropanol, methoxymethoxyethanol, diethylene glycol mono Chill ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxypropyl acetate, N, N-dimethylformamide, dimethyl sulfoxide, ⁇ -butyrolactone, ethyl acetate, Examples thereof include, but are not limited to, butyl acetate, methyl lactate, N-methyl-2-pyrrolidone, and ethyl lactate.
  • the curable composition preferably contains a surfactant.
  • the curable composition containing a surfactant has better coating properties.
  • the content of the surfactant in the curable composition is not particularly limited, but is preferably 0.001 to 2.0% by mass with respect to the total solid content of the curable composition.
  • Surfactant may be used individually by 1 type, or may use 2 or more types together. When two or more surfactants are used in combination, the total amount is preferably within the above range.
  • surfactant examples include a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant.
  • the liquid properties (particularly fluidity) of the curable composition are further improved. That is, when a curable composition layer is formed on a support using a curable composition containing a fluorosurfactant, the curability is reduced by reducing the interfacial tension between the support and the curable composition. The wettability of the composition to the support is improved, and the applicability of the curable composition is improved. For this reason, even when a curable composition layer of about several ⁇ m is formed with a small amount of liquid, it is possible to form a curable composition layer having a more uniform thickness with less thickness unevenness.
  • the fluorine content in the fluorosurfactant is not particularly limited, but is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and further preferably 7 to 25% by mass.
  • a curable composition layer having a more uniform thickness can be formed, and as a result
  • the composition has superior liquid-saving properties. Moreover, it is easy to melt
  • fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780 (above DIC Corporation), Florad FC430, FC431, FC171 (Sumitomo 3M Limited), Surflon S-382, SC-101, SC- 103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, K-H-40 (above, manufactured by Asahi Glass Co., Ltd.), PF636, PF656, PF6320, PF6520, PF7002 (made by OMNOVA) etc. are mentioned.
  • a block polymer can be used as the fluorosurfactant, for example, a compound described in JP-A-2011-89090 can be used, and the above contents are incorporated herein.
  • the curable composition may contain an ultraviolet absorber.
  • the cured film obtained by the curable composition containing an ultraviolet absorber has a more excellent pattern shape (fine pattern shape).
  • UV absorbers such as salicylate, benzophenone, benzotriazole, substituted acrylonitrile, and triazine can be used.
  • the ultraviolet absorber for example, compounds described in paragraphs 0137 to 0142 (corresponding paragraphs 0251 to 0254 of US2012 / 0068292) of JP2012-068418A can be used, and the above contents are incorporated in the present specification. It is.
  • the ultraviolet absorber a diethylamino-phenylsulfonyl ultraviolet absorber (manufactured by Daito Chemical Co., Ltd., trade name: UV-503) or the like can also be used.
  • the ultraviolet absorber the compounds described in paragraphs 0134 to 0148 of JP 2012-32556 A can also be used, and the above contents are incorporated herein.
  • the content of the ultraviolet absorber in the curable composition is not particularly limited, but is preferably 0.001 to 15% by mass, and 0.01 to 10% by mass with respect to the total solid content of the curable composition. More preferred is 0.1 to 5% by mass.
  • the curable composition may contain a silane coupling agent.
  • a silane coupling agent intends the compound which contains the following hydrolysable groups and other functional groups in a molecule
  • the hydrolyzable group is intended to be a substituent that is directly bonded to a silicon atom and can generate a siloxane bond by a hydrolysis reaction and / or a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group, and an alkenyloxy group directly connected to a silicon atom.
  • the hydrolyzable group contains a carbon atom
  • the number of carbon atoms is preferably 6 or less, and more preferably 4 or less.
  • an alkoxy group having 4 or less carbon atoms or an alkenyloxy group having 4 or less carbon atoms is preferable.
  • the silane coupling agent does not contain any silicon atom other than the silicon atom to which the hydrolyzable group is bonded, and no fluorine atom.
  • the cured film has better adhesion to the support.
  • the content of the silane coupling agent in the curable composition is preferably 0.1 to 10% by mass, more preferably 0.5 to 8% by mass with respect to the total solid content in the curable composition. More preferably, the content is 0.0 to 6% by mass.
  • a silane coupling agent may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of silane coupling agents together, it is preferable that total content is in the said range.
  • the curable composition can be prepared by mixing the above components by a known mixing method (for example, a mixing method using a stirrer, a homogenizer, a high-pressure emulsifier, a wet pulverizer, a wet disperser, or the like). It can.
  • a mixing method using a stirrer, a homogenizer, a high-pressure emulsifier, a wet pulverizer, a wet disperser, or the like.
  • each component may be blended at once, or each component may be blended sequentially after being dissolved or dispersed in a solvent.
  • the order of input and the working conditions when blending are not particularly limited.
  • the curable composition is preferably filtered with a filter for the purpose of removing foreign substances and reducing defects.
  • the filter is not particularly limited, and a known filter can be used.
  • the material of the filter is not particularly limited.
  • fluororesins such as PTFE (polytetrafluoroethylene), polyamide resins such as nylon, and polyolefin resins such as polyethylene and polypropylene (PP) (high density, super And a filter formed by high molecular weight).
  • a filter formed of polypropylene (including high-density polypropylene) or nylon is preferable.
  • the pore size of the filter is not particularly limited, but is generally preferably 0.1 to 7.0 ⁇ m, more preferably 0.2 to 2.5 ⁇ m, still more preferably 0.2 to 1.5 ⁇ m, and 0.3 to 0. .7 ⁇ m is particularly preferred. By setting this range, it is possible to reliably remove fine foreign matters such as impurities and aggregates contained in the pigment while suppressing filtration clogging of the pigment.
  • different filters may be combined. At that time, the filtering by the first filter may be performed only once or may be performed twice or more.
  • the pore diameter of the filter used for the second filtering is preferably the same or larger than the pore diameter of the filter used for the first filtering.
  • filters having the same material and different pore diameters may be combined.
  • the pore diameter here can refer to the nominal value of the filter manufacturer.
  • Examples of commercially available filters include filters manufactured by Nippon Pole, Advantech Toyo, Nippon Integris (formerly Nippon Microlith), and Kitz Microfilter.
  • the second filter a filter formed of the same material as the first filter can be used.
  • the pore size of the second filter is not particularly limited, but is generally preferably 0.2 to 10.0 ⁇ m, more preferably 0.2 to 7.0 ⁇ m, still more preferably 0.3 to 6.0 ⁇ m. It is preferable that the curable composition does not substantially contain impurities such as metals (particles and ions), metal salts containing halogens, acids, and alkalis. In the present specification, the phrase “substantially not contained” means that it cannot be detected by the following measurement method.
  • the said component, the said filter, etc. respectively 1 mass ppm or less is preferable with respect to the total mass, 1 mass ppb or less is more preferable, 100 The mass ppt or less is more preferable, the mass ppt or less is particularly preferable, and it is most preferable that the mass is not substantially contained.
  • the content of the impurity can be measured by an inductively coupled plasma mass spectrometer (manufactured by Yokogawa Analytical Systems, Agilent 7500cs type). Note that ppm represents parts per million, ppb represents parts per billion, and ppt represents parts per trigger.
  • the curable composition may be temporarily stored in the container until use.
  • the container for storing the curable composition is not particularly limited, and a known container can be used.
  • a container for storing the curable composition a container having a high degree of cleanliness in the container and little elution of impurities is preferable. For example, you may use the thing of the use marketed for semiconductor uses.
  • Specific examples of containers that can be used include, but are not limited to, “Clean Bottle” series manufactured by Aicello Chemical Co., Ltd., “Pure Bottle” manufactured by Kodama Resin Co., Ltd., and the like.
  • a multilayer bottle in which the inner wall of the container is configured in a six-layer structure with six types of resin
  • a multilayer bottle in which the inner wall of the container is configured in a seven-layer structure with six types of resin.
  • these containers include containers described in JP-A-2015-123351.
  • the cured film which concerns on embodiment of this invention is a cured film obtained by hardening
  • the thickness of the cured film is not particularly limited, but is generally preferably 0.2 to 7 ⁇ m, and more preferably 0.4 to 5 ⁇ m.
  • the above thickness is an average thickness, and is a value obtained by measuring the thicknesses of five or more arbitrary points of the cured film and arithmetically averaging them.
  • coating a curable composition on a support body, forming a coating film, performing a hardening process with respect to a coating film, and manufacturing a cured film is mentioned.
  • the method of the curing treatment is not particularly limited, and examples thereof include a photocuring treatment or a thermosetting treatment, and a photocuring treatment (particularly a curing treatment by irradiation with actinic rays or radiation) is preferable from the viewpoint of easy pattern formation. .
  • the cured film which concerns on embodiment of this invention is a cured film obtained by hardening
  • a curable composition layer formation process is a process of forming a curable composition layer using a curable composition.
  • coating a curable composition on a support body and forming a curable composition layer is mentioned, for example.
  • the type of the support is not particularly limited, but when a cured film is applied to a solid-state imaging device, for example, a silicon substrate is used, and when the cured film is used as a color filter (including a color filter for a solid-state imaging device). And a glass substrate (glass wafer).
  • Examples of the coating method of the curable composition on the support include various coating methods such as spin coating, slit coating, inkjet method, spray coating, spin coating, cast coating, roll coating, and screen printing. It is done.
  • the curable composition coated on the support is usually dried at 70 to 150 ° C. for about 1 to 4 minutes to form a curable composition layer.
  • the curable composition layer formed in the curable composition layer forming step was exposed to light by irradiating actinic rays or radiation through a photomask having a pattern-shaped opening, and was irradiated with light. Only the curable composition layer is cured.
  • the exposure is preferably performed by irradiation with radiation, and ultraviolet rays such as g-line, h-line, and i-line are preferably used.
  • the light source is preferably a high pressure mercury lamp.
  • the irradiation intensity is not particularly limited, but generally 5 to 1500 mJ / cm 2 is preferable.
  • development processing (development step) is performed to elute unexposed portions in the exposure step into the developer. Thereby, only the photocured part remains on the support.
  • a developing solution For example, an alkali developing solution is mentioned, Especially, an organic alkali developing solution is preferable.
  • the development conditions are not particularly limited, but the development temperature is generally preferably 20 to 40 ° C., and the development time is generally preferably 20 to 180 seconds.
  • the alkaline aqueous solution is not particularly limited, but examples of the alkaline compound contained in the inorganic alkaline developer include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium oxalate, and And sodium metasuccinate.
  • the content of the compound in the alkaline aqueous solution is not particularly limited, but is generally preferably 0.001 to 10% by mass and more preferably 0.005 to 0.5% by mass with respect to the total mass of the alkaline aqueous solution.
  • the alkaline compounds contained in the organic alkaline developer include ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxy. , Choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene, and the like.
  • the content of the compound in the alkaline aqueous solution is not particularly limited, but is generally preferably 0.001 to 10% by mass and more preferably 0.005 to 0.5% by mass with respect to the total mass of the alkaline aqueous solution.
  • the alkaline aqueous solution may contain, for example, a water-soluble organic solvent such as methanol and ethanol. Further, the alkaline aqueous solution may contain a surfactant. When such an alkaline aqueous solution is used as a developer, it is preferable to wash the developed curable composition layer with pure water or the like. In this specification, this process is called a washing
  • the manufacturing method of a cured film may contain another process.
  • examples of other processes include a substrate surface treatment process, a pre-heating process (pre-baking process), and a post-heating process (post-baking process).
  • the heating temperature in the preheating step and the postheating step is not particularly limited, but is generally preferably 80 to 300 ° C.
  • the heating time in the preheating step and the postheating step is not particularly limited, but is preferably 30 to 500 seconds.
  • the cured film preferably has a surface uneven structure. By doing so, the light reflectivity of a cured film can be reduced. Even if it has a concavo-convex structure on the surface of the cured film itself, a concavo-convex structure may be imparted by arranging a coat film on the cured film.
  • the shape of the uneven surface structure is not particularly limited, but the surface roughness is preferably in the range of 0.55 to 1.5 ⁇ m or less.
  • the light reflectance of the cured film is preferably 5% or less, more preferably 3% or less, and still more preferably 2% or less.
  • the method for producing the surface concavo-convex structure is not particularly limited, but includes a method in which a cured film or a coating film contains an organic filler and / or an inorganic filler; a lithography method, an etching method, a sputtering method, a nanoimprint method, and the like A method of roughening the surface of the cured film and / or the coat film, etc.
  • a method for reducing the light reflectance of the cured film for example, a method of disposing a low refractive index film on the cured film; a film having a different refractive index (for example, a high refractive index film) on the low refractive index film
  • a method of forming a low optical density layer and a high optical density layer described in JP-A-2015-1654.
  • the above-mentioned cured films are portable devices such as personal computers, tablets, mobile phones, smartphones, and digital cameras; OA (Office Automation) devices such as printer multifunction devices and scanners; surveillance cameras, barcode readers, automatic cash deposits Industrial equipment such as a payment machine (ATM: automated teller machine), high-speed camera, and equipment having a personal authentication function using face image authentication; in-vehicle camera equipment; endoscope, capsule endoscope, and Medical camera equipment such as catheters; biosensors, biosensors, military reconnaissance cameras, 3D map cameras, weather and ocean observation cameras, land resource exploration cameras, exploration cameras for space astronomy and deep space targets, etc. Used for space equipment; etc. Manabu filters and the light blocking member and the light-shielding film of the module, even can be used for anti-reflection member and the antireflection film or the like.
  • the cured film can also be used for applications such as micro LED (Light Emitting Diode) and micro OLED (Organic Light Emitting Diode).
  • the cured film is suitable for members that provide a light shielding function or an antireflection function, as well as optical filters and optical films used in micro LEDs and micro OLEDs. Examples of the micro LED and the micro OLED include those described in JP-T-2015-500562 and JP-T-2014-533890.
  • the said cured film is suitable as an optical filter and optical film used for a quantum dot display. Moreover, it is suitable as a member which provides a light shielding function and an antireflection function.
  • quantum dot displays include US Patent Application Publication No. 2013/0335677, US Patent Application Publication No. 2014/0036536, US Patent Application Publication No. 2014/0036203, and US Patent Application Publication No. 2014/0035960. What has been described.
  • Solid-state imaging device and solid-state imaging device contain the cured film.
  • the form in which the solid-state imaging device contains a cured film is not particularly limited. For example, a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) on a support. And having the cured film on the light receiving element forming surface side of the support (for example, a portion other than the light receiving portion and / or a color adjusting pixel) or the opposite side of the forming surface. Is mentioned.
  • the solid-state imaging device contains the solid-state imaging element.
  • the solid-state imaging device 700 includes a rectangular solid-state imaging element 701 and a transparent cover glass 703 that is held above the solid-state imaging element 701 and seals the solid-state imaging element 701. Yes. Furthermore, a lens layer 711 is provided on the cover glass 703 with a spacer 704 interposed therebetween.
  • the lens layer 711 includes a support 713 and a lens material 712.
  • the lens layer 711 may have a configuration in which the support 713 and the lens material 712 are integrally formed.
  • the effect of condensing light on the lens material 712 is weakened due to light diffusion, and light reaching the imaging unit 702 is reduced.
  • noise is generated due to stray light. Therefore, the peripheral region of the lens layer 711 is shielded from light by providing a light shielding film 714.
  • the cured film according to the embodiment of the present invention (particularly when a black pigment is contained as a colorant) can also be used as the light shielding film 714.
  • the solid-state imaging device 701 photoelectrically converts an optical image formed in the imaging unit 702 serving as a light receiving surface thereof and outputs it as an image signal.
  • This solid-state imaging device 701 includes a laminated substrate 705 in which two substrates (corresponding to a support) are laminated.
  • the laminated substrate 705 includes a rectangular chip substrate 706 and a circuit substrate 707 having the same size, and the circuit substrate 707 is laminated on the back surface of the chip substrate 706.
  • the material of the substrate used as the chip substrate 706 is not particularly limited, and a known material can be used.
  • An imaging unit 702 is provided at the center of the surface of the chip substrate 706. Further, when stray light is incident on the peripheral area of the imaging unit 702, dark current (noise) is generated from the circuit in the peripheral area. Therefore, the peripheral area is shielded from light by being provided with a light shielding film 715.
  • the cured film according to the embodiment of the present invention (especially when a black pigment is contained as a colorant) can also be used as the light shielding film 715.
  • a plurality of electrode pads 708 are provided on the surface edge of the chip substrate 706.
  • the electrode pad 708 is electrically connected to the imaging unit 702 via a signal line (not shown) provided on the surface of the chip substrate 706 (which may be a bonding wire).
  • External connection terminals 709 are provided on the back surface of the circuit board 707 at positions substantially below the electrode pads 708, respectively. Each external connection terminal 709 is connected to an electrode pad 708 via a through electrode 710 that vertically penetrates the multilayer substrate 705. Further, each external connection terminal 709 is connected to a control circuit that controls driving of the solid-state image sensor 701 and an image processing circuit that performs image processing on an image signal output from the solid-state image sensor 701 via a wiring (not shown). Has been.
  • the imaging unit 702 is configured by each unit provided on a substrate 804 such as a light receiving element 801, a color filter 802, and a micro lens 803.
  • the color filter 802 includes a blue pixel 805b, a red pixel 805r, a green pixel 805g, and a black matrix 805bm.
  • the cured film according to the embodiment of the present invention (especially when containing a black pigment as a colorant) can also be used as the black matrix 805bm.
  • a p-well layer 806 is formed on the surface layer of the substrate 804.
  • light receiving elements 801 that are n-type layers and generate and store signal charges by photoelectric conversion are arranged in a square lattice pattern.
  • a vertical transfer path 808 made of an n-type layer is formed via a reading gate portion 807 on the surface layer of the p-well layer 806. Further, a vertical transfer path 808 belonging to an adjacent pixel is formed on the other side of the light receiving element 801 through an element isolation region 809 made of a p-type layer.
  • the read gate portion 807 is a channel region for reading the signal charge accumulated in the light receiving element 801 to the vertical transfer path 808.
  • a gate insulating film 810 made of an ONO (Oxide-Nitride-Oxide) film is formed on the surface of the substrate 804.
  • a vertical transfer electrode 811 made of polysilicon or amorphous silicon is formed so as to cover the vertical transfer path 808, the read gate portion 807, and the element isolation region 809.
  • the vertical transfer electrode 811 functions as a drive electrode for driving the vertical transfer path 808 to perform charge transfer and a read electrode for driving the read gate unit 807 to read signal charges.
  • the signal charges are sequentially transferred from the vertical transfer path 808 to a horizontal transfer path (not shown) and an output unit (floating diffusion amplifier), and then output as a voltage signal.
  • a light shielding film 812 is formed on the vertical transfer electrode 811 so as to cover the surface thereof.
  • the light shielding film 812 has an opening at a position immediately above the light receiving element 801 and shields the other areas.
  • the cured film according to the embodiment of the present invention (especially when containing a black pigment as a colorant) can also be used as the light shielding film 812.
  • an insulating film 813 made of BPSG (borophosphosilicate glass), an insulating film (passivation film) 814 made of P-SiN, and a transparent intermediate layer made of a planarizing film 815 made of transparent resin or the like are provided on the light shielding film 812.
  • BPSG borophosphosilicate glass
  • passivation film 814 made of P-SiN
  • a transparent intermediate layer made of a planarizing film 815 made of transparent resin or the like
  • a black matrix contains the cured film which concerns on embodiment of this invention.
  • the black matrix may be contained in a color filter, a solid-state image sensor, and a liquid crystal display device.
  • As the black matrix those already described above; a black edge provided at the periphery of a display device such as a liquid crystal display device; a grid pattern between red, blue, and green pixels, and / or a stripe pattern A black portion of the TFT; a dot-like and / or linear black pattern for shielding light from a TFT (thin film transistor); and the like.
  • Taihei Kanno “Liquid Crystal Display Manufacturing Dictionary”, 2nd edition, Nikkan Kogyo Shimbun, 1996, p. 64.
  • the black matrix preferably has a high light-shielding property in order to improve display contrast, and in the case of an active matrix liquid crystal display device using a thin film transistor (TFT), in order to prevent deterioration in image quality due to light current leakage. .
  • TFT thin film transistor
  • the production method of the black matrix is not particularly limited, but can be produced by the same method as the production method of the cured film. Specifically, a curable composition is applied on a support to form a curable composition layer, and exposed and developed to produce a patterned cured film (black matrix).
  • the thickness of the cured film used as the black matrix is preferably 0.1 to 4.0 ⁇ m.
  • the material for the support is not particularly limited, but preferably has a transmittance of 80% or more for visible light.
  • Specific examples of such materials include glass such as soda lime glass, alkali-free glass, quartz glass, and borosilicate glass; plastics such as polyester-based resins and polyolefin-based resins; In view of chemical resistance and heat resistance, alkali-free glass or quartz glass is preferable.
  • the color filter according to the embodiment of the present invention contains a cured film.
  • the form in which the color filter contains a cured film is not particularly limited, and examples thereof include a color filter including a support and the black matrix. That is, a color filter including red, green, and blue colored pixels formed in the opening of the black matrix formed on the support can be exemplified.
  • a color filter containing a black matrix (cured film) can be produced, for example, by the following method.
  • a coating film (resin composition layer) of a resin composition containing a pigment corresponding to each colored pixel of a color filter is formed in an opening of a patterned black matrix formed on a support.
  • a resin composition for each color Although a well-known resin composition can be used, it is preferable to use the curable composition which concerns on embodiment of this invention.
  • it exposes with respect to the resin composition layer through the photomask which has a pattern corresponding to the opening part of a black matrix.
  • the colored pixels can be formed in the openings of the black matrix by baking.
  • a color filter having a red pixel, a green pixel, and a blue pixel is manufactured by performing a series of operations using, for example, a resin composition for each color containing a red pigment, a green pigment, and a blue pigment. Can do.
  • the image display apparatus includes a cured film.
  • the form in which the image display device contains a cured film is not particularly limited, but examples include a form containing a color filter containing the black matrix (cured film) already described.
  • a typical example of the image display device according to the present embodiment is a liquid crystal display device.
  • the support is as described above as the support for the black matrix.
  • liquid crystal display device for example, from the user side, a polarizing plate / support / color filter / transparent electrode layer / alignment film / liquid crystal layer / alignment film / transparent electrode layer / TFT (Thin Film Transistor)
  • TFT Thin Film Transistor
  • the liquid crystal display device is not limited to the above.
  • Display device written by Junaki Ibuki, Industrial Book Co., Ltd.
  • the infrared sensor which concerns on embodiment of this invention contains the said cured film.
  • the infrared sensor which concerns on the said embodiment is demonstrated using FIG.
  • reference numeral 910 denotes a solid-state image sensor.
  • the imaging region provided on the solid-state imaging device 910 is configured by combining the infrared absorption filter 911 and the color filter 912 according to the embodiment of the present invention.
  • the infrared absorption filter 911 transmits light in the visible light region (for example, light having a wavelength of 400 to 700 nm), and transmits light in the infrared region (for example, light having a wavelength of 800 to 1300 nm, preferably light having a wavelength of 900 to 1200 nm).
  • it is a film that shields light having a wavelength of 900 to 1000 nm, and a cured film containing an infrared absorber (as already described in the form of the infrared absorber) as a colorant can be used.
  • the color filter 912 is a color filter in which pixels that transmit and absorb light of a specific wavelength in the visible light region are formed.
  • red (R), green (G), and blue (B) pixels The formed color filter or the like is used, and the form thereof is as already described.
  • a resin film 914 (for example, a transparent resin film or the like) that can transmit light having a wavelength transmitted through the infrared transmission filter 913 is disposed.
  • the infrared transmission filter 913 has a visible light shielding property and transmits infrared light having a specific wavelength, and is a colorant that absorbs light in the visible light region (for example, a perylene compound and / or a bisbenzoic acid).
  • a cured film according to an embodiment of the present invention containing a furanone compound or the like and an infrared absorber (for example, a pyrrolopyrrole compound, a phthalocyanine compound, a naphthalocyanine compound, or a polymethine compound) can be used.
  • the infrared transmission filter 913 preferably blocks light having a wavelength of 400 to 830 nm and transmits light having a wavelength of 900 to 1300 nm.
  • a micro lens 915 is disposed on the incident light h ⁇ side of the color filter 912 and the infrared transmission filter 913.
  • a planarization film 916 is formed so as to cover the microlens 915. In the embodiment shown in FIG.
  • the resin film 914 is disposed, but an infrared transmission filter 913 may be formed instead of the resin film 914. That is, the infrared transmission filter 913 may be formed on the solid-state image sensor 910.
  • the film thickness of the color filter 912 and the film thickness of the infrared transmission filter 913 are the same, but the film thicknesses of both may be different.
  • the color filter 912 is provided on the incident light h ⁇ side with respect to the infrared absorption filter 911, but the order of the infrared absorption filter 911 and the color filter 912 is changed to change the infrared absorption filter 911. May be provided closer to the incident light h ⁇ than the color filter 912.
  • the infrared absorption filter 911 and the color filter 912 are stacked adjacent to each other.
  • the two filters are not necessarily adjacent to each other, and other layers may be provided therebetween.
  • the cured film according to the embodiment of the present invention can be used as a light-shielding film such as an end or side surface of the surface of the infrared absorption filter 911, or can be used for an inner wall of an infrared sensor device to cause internal reflection or light reception. It is possible to prevent the incident of unintended light and improve the sensitivity.
  • this infrared sensor since image information can be captured simultaneously, motion sensing or the like that recognizes a target whose motion is to be detected is possible. Furthermore, since distance information can be acquired, an image including 3D information can be taken.
  • the solid-state imaging device includes a lens optical system, a solid-state imaging device, an infrared light emitting diode, and the like.
  • paragraphs 0032 to 0036 of JP 2011-233983 A can be referred to, and the contents thereof are incorporated in this specification.
  • Precursor A in the above formula was synthesized using the method described in paragraph 0026 of Japanese Patent No. 4223071.
  • DMAc N, N dimethylacetamide, 160 g
  • myristic acid chloride (15.6 g, 63.2 mmol) was dissolved.
  • the mixture was stirred for 1 hour under the same temperature condition, and further stirred at 20 ° C. for 3 hours to obtain a reaction solution.
  • 400 mL of ethyl acetate and 200 mL of 4 mass% sodium bicarbonate aqueous solution were added to the reaction solution and stirred for 1 hour to generate solids in the reaction solution.
  • the generated solid was removed by Celite filtration, and the filtrate was further washed twice with 200 mL of an aqueous sodium bicarbonate solution, followed by liquid separation, and the organic phase was dried over magnesium sulfate.
  • the solvent was distilled off from the dried organic phase to obtain an oily liquid.
  • the structure of the obtained product was identified by NMR (nuclear magnetic resonance).
  • 1 H-NMR 300 MHz deuterated chloroform 1.15 to 1.38 (m, 23H), 1.41 (d, 3H), 1.49 (t, 3H), 1.63 (quin., 2H) 2.15 (s, 3H), 2.34 (t, 2H), 3.47 (s, 3H), 3.55 (dd, 1H), 3.67 (dd, 1H), 4.43 ( q, 2H), 4.57-4.73 (m, 1H), 6.89 (dd, 1H), 6.93 (d, 1H), 6.89 (dd, 1H), 7.05 (d 1H), 7.45 (t, 2H), 8.05 (d, 1H), 8.18 (d, 1H), 8.40 (dd, 1H), 8.94 (d, 1H)
  • Precursor B in the above formula was synthesized using the method described in paragraph 0379 of JP-A-2009-191061, and then cooled in an ice bath, precursor B (6.00 g, 11.3 mmol) Myristic acid chloride (3.34 g, 13.5 mmol) was added dropwise to a THF (tetrahydrofuran, 60 g) solution in which triethylamine (1.62 g, 16.0 mmol) was dissolved, and the mixture was stirred for 1 hour under the same temperature conditions after the addition. After that, the mixture was further stirred at 20 ° C. for 3 hours to obtain a reaction solution.
  • THF tetrahydrofuran, 60 g
  • Precursor C in the above formula was synthesized using the method described in paragraph 0355 of JP-T-2016-531926. Next, similar to the synthesis of INT-31 already described, except that “precursor C (5.01 g, 11.3 mmol)” was used instead of “precursor B (6.00 g, 11.3 mmol)”. To obtain the oxime compound INT-17 (4.94 g, 7.56 mmol). The structure of the obtained product was identified by NMR. ( 1 H-NMR 300 MHz deuterated chloroform): 0.90 (d, 6H), 1.20-1.70 (m, 26H), 2.39 (t, 2H), 2.66-2.89 (m 2H), 7.30-8.08 (m, 13H)
  • Precursor D in the above formula was synthesized using the method described in paragraph 0368 of JP-A-2009-191061. Next, in place of “precursor B (6.00 g, 11.3 mmol)”, except that “precursor D (6.27 g, 11.3 mmol)” was used, the synthesis of INT-31 already described was performed. Similarly, the oxime compound INT-26 (4.72 g, 6.17 mmol) was obtained. The structure of the obtained product was identified by NMR.
  • reaction solution was added little by little to 1 mol / L hydrochloric acid (350 g) to stop the reaction to obtain a solution.
  • ethyl acetate 500 g was added to the solution and the layers were separated to obtain an organic phase.
  • the organic phase was washed with saturated sodium bicarbonate water (250 g), water (250 g), and saturated brine (150 g), respectively.
  • sodium sulfate was added to the washed organic phase, and then filtered to obtain a filtrate.
  • the filtrate was concentrated under reduced pressure to obtain Intermediate 1 (70.1 g, 95.7 mmol) in the above formula.
  • each curable composition adjusted with the organic solvent so that the final solid content of each curable composition might be 28 mass%.
  • Comparative Compound 1 The compounds used in place of the specific oxime compounds in the curable compositions of Comparative Examples (referred to as Comparative Compound 1 and Comparative Compound 2 in Table 5-2, “CINT-1” and “CINT-2”, respectively) The structure is shown below.
  • each coloring agent used for preparation of a curable composition was produced with the following method.
  • Ti nanoparticles (TC-200, manufactured by Toho Tech Co., Ltd.) were formed into Ti nanoparticles by plasma treatment in Ar gas.
  • the Ti nanoparticles after the plasma treatment were allowed to stand for 24 hours under an Ar gas atmosphere at an O 2 concentration of 50 ppm or less and 30 ° C., and then O 2 gas was introduced into the Ar atmosphere so that the O 2 concentration was 100 ppm. In the state, it was left to stand at 30 ° C. for 24 hours (pretreatment of Ti particles).
  • the obtained Ti nanoparticles were classified using a TTSP separator manufactured by Hosokawa Micron under the condition of a yield of 10% to obtain a powder of Ti particles.
  • the primary particle diameter of the obtained powder was 120 nm when the average particle diameter of 100 particles was determined by arithmetic average by TEM observation.
  • the titanium nitride-containing particles TiN-1 were produced using an apparatus according to the black composite fine particle production apparatus described in FIG. 1 of International Publication No. 2010/147098. Specifically, in the black composite fine particle manufacturing apparatus, a high frequency voltage of about 4 MHz and about 80 kVA is applied to the high frequency oscillation coil of the plasma torch, and argon gas 50 L / min and nitrogen as plasma gas are supplied from the plasma gas supply source.
  • a mixed gas of 50 L / min was supplied to generate an argon-nitrogen thermal plasma flame in the plasma torch.
  • 10 L / min carrier gas was supplied from the spray gas supply source of the material supply apparatus.
  • Fe powder JIP270M, manufactured by JFE Steel
  • Si powder Si powder SI006031
  • /0.05/0.05 is mixed and supplied to the thermal plasma flame in the plasma torch together with the argon gas as the carrier gas, evaporated in the thermal plasma flame, and highly dispersed in the gas phase state. It was. Further, nitrogen was used as a gas supplied into the chamber by the gas supply device.
  • the flow rate in the chamber at this time was 5 m / sec, and the supply amount was 1000 L / min.
  • the pressure in the cyclone was 50 kPa, and the supply rate of each raw material from the chamber to the cyclone was 10 m / s (average value). In this way, titanium nitride-containing particles TiN-1 were obtained.
  • the obtained titanium nitride-containing particles TiN-1 were measured for the content of titanium (Ti) atoms, iron (Fe) atoms, and silicon (Si) atoms by ICP (Inductively Coupled Plasma) emission spectroscopy.
  • ICP emission spectroscopic analysis an ICP emission spectroscopic analyzer “SPS3000” (trade name) manufactured by Seiko Instruments Inc. was used.
  • the nitrogen atom content was measured using an oxygen / nitrogen analyzer “EMGA-620W / C” (trade name) manufactured by Horiba, Ltd., and calculated by an inert gas melting-thermal conductivity method.
  • X-ray diffraction of titanium nitride-containing particles TiN-1 was measured by a wide-angle X-ray diffraction method (trade name “RU-200R” manufactured by Rigaku Corporation) with a powder sample placed in an aluminum standard sample holder.
  • the X-ray source is CuK ⁇ ray
  • the output is 50 kV / 200 mA
  • the slit system is 1 ° -1 ° -0.15 mm-0.45 mm
  • the measurement step (2 ⁇ ) is 0.02 °
  • the scan speed is It was 2 ° / min.
  • the diffraction angle of the peak derived from the TiN (200) plane observed in the vicinity of the diffraction angle 2 ⁇ (42.6 °) was measured.
  • the crystallite size constituting the particle was determined using Scherrer's equation. As a result, the peak diffraction angle was 42.62 ° and the crystallite size was 10 nm. Note that no X-ray diffraction peak due to TiO 2 was observed.
  • TiN-2 titanium nitride-containing particles TiN-2
  • Ti-particles titanium nitride-containing particles TiN-2
  • the peak diffraction angle measured by X-ray diffraction was 42.81 °, and the crystallite size was 12 nm.
  • the peak diffraction angle measured by X-ray diffraction was 43.1 °, and the crystallite size was 12 nm.
  • Niobium nitride-containing particles containing Fe atoms were produced by the following method. First, niobium (powder) ⁇ 100-325 mesh> manufactured by Mitsuwa Chemicals was prepared as a raw material (hereinafter also referred to as “metal raw material powder”). Next, the metal raw material powder was formed into Nb nanoparticles by plasma treatment in Ar gas (the treatment conditions were the following plasma treatment (1)).
  • Plasma treatment (1) was performed by the following method. Plasma treatment (1) was performed under the following conditions using an apparatus according to the above black composite fine particle production apparatus. ⁇ High frequency voltage applied to the coil for high frequency oscillation: frequency, about 4 MHz, voltage, about 80 kVA ⁇ Plasma gas: Argon gas (Supply rate: 100 L / min) Carrier gas: Argon gas (Supply amount: 10 L / min) -Chamber atmosphere: Argon gas (Supply rate 1000L / min, Chamber flow rate 5m / sec) ⁇ Cyclone atmosphere: Argon gas, Internal pressure: 50 kPa ⁇ Material supply speed from chamber to cyclone: 10 m / s (average value)
  • Fe powder JIP270M, manufactured by JFE Steel Co., Ltd.
  • plasma treatment was performed under the conditions of the plasma treatment (1) to form Fe nanoparticles.
  • the raw material metal powder was subjected to plasma treatment in nitrogen gas (treatment conditions were as described in the following plasma treatment (2)) to obtain niobium nitride-containing particles.
  • Plasma treatment (2) was performed by the following method.
  • the apparatus used is the same as in the plasma treatment (1).
  • Plasma gas Argon gas and nitrogen gas (Supply amount 50L / min each)
  • Carrier gas Nitrogen gas (Supply amount: 10L / min)
  • Atmosphere in the chamber Nitrogen gas (amount supplied: 1000 L / min, flow velocity in the chamber: 5 m / sec)
  • Cyclone atmosphere Nitrogen gas, internal pressure 50kPa ⁇ Material supply speed from chamber to cyclone: 10 m / s (average value)
  • VN vanadium nitride-containing particles containing Fe atoms
  • Niobium Metal Vanadium Powder VHO was used instead of Mitsuwa Chemical Niobium (Powder) ⁇ 100-325 mesh>.
  • the colorants other than those described above are the colorants described in Table 4 below, or a mixture of colorants.
  • Dispersant A having the following structure was used as the dispersant.
  • the numerical value described in each structural unit intends mass% of each structural unit with respect to the total structural unit.
  • Binder resin As the binder resin, a resin A having the following structure was used. In the formula of resin A, each abbreviation represents the following. The numerical value described in each structural unit intends mass% of each structural unit with respect to the total structural unit. Resin A corresponds to an alkali-soluble resin. -BzMA: benzyl methacrylate-MMA: methyl methacrylate
  • Polymerizable compound As the polymerizable compound, a polymerizable compound M1 and a polymerizable compound M2 were used.
  • the structure of the polymerizable compound M1 (dipentaerythritol hexaacrylate) is as follows (product name “KAYARAD”, manufactured by Nippon Kayaku Co., Ltd.).
  • the coating film is passed through a photomask in which a line pattern of length 200 ⁇ m ⁇ width 20 ⁇ m is formed. Was exposed (negative).
  • the coated film after exposure is subjected to paddle development for 30 seconds using tetramethylammonium hydroxide as a developer using a coater developer ACT8 manufactured by Tokyo Electron, and then shower rinse for 20 seconds using pure water.
  • a patterned cured film was obtained.
  • the patterned cured film was post-baked (temperature: 220 ° C., time: 300 seconds).
  • the pattern shape of the cured film after post-baking was measured by a length measuring SEM (Scanning Electron Microscope). Specifically, the film thickness at the end of the line pattern and the film thickness at the center were measured, and the ratio (film thickness at the pattern end / film thickness at the center) was calculated and evaluated according to the following criteria. In addition, evaluation "2" or more is a practical range. The results are shown in Table 5. -7: The ratio is more than 0.98 and less than 1.00, and no difference is observed in the film thickness between the central part and the end part of the pattern by observation with SEM. 6: The ratio is more than 0.96 and not more than 0.98, and there is a slight difference in the film thickness between the central portion and the end portion of the pattern.
  • the ratio is more than 0.94 and not more than 0.96, and there is a difference in the film thickness between the center and end of the pattern.
  • -4 The ratio is more than 0.92 and less than 0.94, the film thickness at the end is thin, and it is slightly distorted, but there is no practical problem.
  • -3 The ratio is more than 0.90 and not more than 0.92, and the film thickness at the end is thin and distorted, but there is no practical problem.
  • -2 The ratio is more than 0.80 and 0.90 or less, and the film thickness at the end is thin, but the practical level is possible.
  • -1 The ratio is 0.80 or less, the film thickness at the end is thin, and is not acceptable.
  • C 4 or more and 7 or less residues were observed in an unexposed area of 1.0 ⁇ m square.
  • D 8 or more and 10 or less residues were observed in an unexposed area of 1.0 ⁇ m square.
  • E 11 or more residues were observed in an unexposed area of 1.0 ⁇ m square. “D” or more is preferable for practical use, and “A” and “B” are evaluated to have particularly excellent performance.
  • “content” of the specific oxime compound (A) and the polyfunctional thiol compound (B) is the specific oxime compound (A) when the total solid content of the curable composition is 100% by mass and It is content (mass%) of each of polyfunctional thiol compound (B).
  • “A / B” represents content mass ratio of content of a specific oxime compound (A) with respect to content of the polyfunctional thiol compound (B) in a curable composition.
  • the types of colorants CP-1 to CP-8 represent chromatic pigments 1 to 8 in Table 4, respectively.
  • the curable composition which concerns on each Example had the effect of this invention.
  • the curable composition which concerns on a comparative example did not have the effect of this invention.
  • the curable composition of Example 1 which contains the specific oxime compound whose carbon number of R ⁇ 1 > of Formula (1) is 13 or more is a pattern of the cured film obtained. The shape was better.
  • the curable composition of Example 3 containing a polyfunctional thiol compound (secondary thiol compound) in which R 24 in Formula (2) is other than a hydrogen atom is the curable composition of Example 4 (R 24 and Compared with a primary thiol compound in which both R 25 are hydrogen atoms, the development residue suppression performance was superior.
  • the curable composition of Example 35 containing a polyfunctional thiol compound (tertiary thiol compound) in which both R 24 and R 25 are other than a hydrogen atom has a further excellent development residue suppressing performance. It was.
  • the film pattern shape was more excellent.
  • the curable composition of Example 12 in which the content ratio of the oxime compound content to the polyfunctional thiol compound content was 4 to 10 was compared with the curable compositions of Example 10 and Example 13. Thus, the pattern shape of the obtained cured film was more excellent.
  • Example 71 In place of TiN-1, TiN-1 and carbon black (trade name “Color Black S170”, manufactured by Degussa, average primary particle diameter 17 nm, BET specific surface area 200 m 2 / g, carbon black manufactured by gas black method) When the evaluation was performed in the same manner as in Example 43 except that the solid content mass ratio was 7: 3, the same effect as in Example 43 was obtained.
  • Example 72 A curable composition was prepared and evaluated in the same manner as in Example 43 except that the surfactant was not used. As a result, the same result as in Example 43 was obtained.
  • Example 73 A curable composition was prepared and evaluated in the same manner as in Example 43 except that the polymerization inhibitor was not used. As a result, the same result as in Example 43 was obtained.
  • Solid-state imaging device 701 Solid-state imaging device 702 ... Imaging unit 703 ... Cover glass 704 ... Spacer 705 ... Multilayer substrate 706 ... Chip substrate 707 ... Circuit board 708 ... Electrode pad 709 ..External connection terminal 710... Through electrode 711... Lens layer 712. Lens material 713... Support 714, 715... Cured film 801. ... Microlens 804 ... Substrate 805b ... Blue pixel 805r ... Red pixel 805g ...
  • vertical transfer path 809 ... element isolation region 810... gate insulating film 811.
  • Insulating film 815 ... Planarizing film 900 ... Infrared sensor 910 ... Solid-state imaging device 911 ... Infrared absorption filter 912 ... Color filter 913 ... Infrared transmission filter 914 ... Resin film 915 ..Microlens 916 ... Planarizing film

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Abstract

The purpose of the present invention is to provide a curable composition with which it is possible to obtain a cured film having an excellent pattern shape. The purpose of the present invention is also to provide a cured film, a color filter, a light-blocking film, a solid-state imaging element, an image display device, and a method for manufacturing the cured film. The curable composition contains a photoinitiator, a multifunctional thiol compound, a polymerizable compound, and a coloring agent, the photoinitiator being a specified oxime compound.

Description

硬化性組成物、硬化膜、カラーフィルタ、遮光膜、固体撮像素子、画像表示装置、及び、硬化膜の製造方法Curable composition, cured film, color filter, light-shielding film, solid-state imaging device, image display apparatus, and method for producing cured film
 本発明は、硬化性組成物、硬化膜、カラーフィルタ、遮光膜、固体撮像素子、画像表示装置、及び、硬化膜の製造方法に関する。 The present invention relates to a curable composition, a cured film, a color filter, a light shielding film, a solid-state imaging device, an image display device, and a method for producing the cured film.
 画像表示装置に用いられるカラーフィルタには各着色画素として、硬化性組成物を硬化させた硬化膜が用いられている。また、各着色画素間の光を遮蔽し、コントラストを向上させるためのブラックマトリクスとしても、硬化性組成物を硬化させた硬化膜が用いられている。
 固体撮像素子に用いられるカラーフィルタにも同様の目的で硬化膜が用いられている。また、固体撮像素子には、ノイズ発生防止、及び、画質の向上等を目的として硬化膜が用いられている。
 現在、携帯電話及びPDA(Personal Digital Assistant)等の電子機器の携帯端末には、小型で薄型な撮像ユニットが搭載されている。このような撮像ユニットは、一般に、CCD(Charge Coupled Device)イメージセンサ及びCMOS(Complementary Metal-Oxide Semiconductor)イメージセンサ等の固体撮像素子と、固体撮像素子上に被写体像を形成するためのレンズと、を備えている。
In a color filter used in an image display device, a cured film obtained by curing a curable composition is used as each colored pixel. Moreover, the cured film which hardened the curable composition is also used as a black matrix for shielding the light between each colored pixel and improving contrast.
A cured film is also used for the same purpose in the color filter used in the solid-state imaging device. The solid-state imaging device uses a cured film for the purpose of preventing noise and improving image quality.
Currently, portable terminals of electronic devices such as mobile phones and PDAs (Personal Digital Assistants) are equipped with small and thin imaging units. Such an imaging unit generally includes a solid-state imaging device such as a CCD (Charge Coupled Device) image sensor and a CMOS (Complementary Metal-Oxide Semiconductor) image sensor, a lens for forming a subject image on the solid-state imaging device, It has.
 硬化性組成物として、例えば、特許文献1には、(A)着色剤、(B)バインダー樹脂、(C)所定の構造を有する光重合開始剤、(D)2個以上の重合性不飽和結合を有する化合物及び(E)多官能チオールを含有することを特徴とする着色組成物が記載されている。 As a curable composition, for example, Patent Document 1 discloses (A) a colorant, (B) a binder resin, (C) a photopolymerization initiator having a predetermined structure, and (D) two or more polymerizable unsaturations. A coloring composition containing a compound having a bond and (E) a polyfunctional thiol is described.
特開第2013-83932号公報JP 2013-83932 A
 本発明者らは、特許文献1に記載された着色組成物について検討したところ、得られる硬化膜のパターン形状が昨今要求される水準に達していない問題があることを明らかとした。なお、本明細書においてパターン形状とは、実施例に記載した方法により測定される硬化膜のパターン形状を意図する。 The inventors of the present invention have studied the coloring composition described in Patent Document 1, and have found that there is a problem that the pattern shape of the obtained cured film does not reach the level required recently. In addition, in this specification, a pattern shape intends the pattern shape of the cured film measured by the method described in the Example.
 そこで、本発明は、優れたパターン形状を有する硬化膜を得ることができる(以下「本発明の効果を有する。」ともいう。)硬化性組成物を提供することを課題とする。
 また、本発明は、硬化膜、カラーフィルタ、遮光膜、固体撮像素子、画像表示装置、及び、硬化膜の製造方法を提供することも課題とする。
Then, this invention makes it a subject to provide the curable composition which can obtain the cured film which has the outstanding pattern shape (it is also called "it has the effect of this invention" hereafter).
Another object of the present invention is to provide a cured film, a color filter, a light shielding film, a solid-state imaging device, an image display device, and a method for producing the cured film.
 本発明者らは、上記課題を達成すべく鋭意検討した結果、以下の構成により上記課題を達成することができることを見出した。 As a result of intensive studies to achieve the above-mentioned problems, the present inventors have found that the above-described problems can be achieved by the following configuration.
 [1] 光重合開始剤と、多官能チオール化合物と、重合性化合物と、着色剤とを含有する硬化性組成物であって、光重合開始剤が、式(1)で表されるオキシム化合物である、硬化性組成物。
 [2] 式(1)中におけるRの炭素数が13以上である、[1]に記載の硬化性組成物。
 [3] 硬化性組成物中における多官能チオール化合物の含有量に対する、オキシム化合物の含有量の含有質量比が1~10である、[1]又は[2]に記載の硬化性組成物。
 [4] 硬化性組成物中における多官能チオール化合物の含有量に対する、オキシム化合物の含有量の含有質量比が4~10である、[1]~[3]のいずれかに記載の硬化性組成物。
 [5] 多官能チオール化合物が式(2)で表される化合物である、[1]~[4]のいずれかに記載の硬化性組成物。
 [6] 式(2)中、R24、及び、R25がそれぞれ独立にアルキル基、又は、-C(=O)-O-R23であり、M21が-C(=O)-O-であり、nが3~10の整数である、[5]に記載の硬化性組成物。
 [7] 着色剤が有機顔料からなる[1]~[6]のいずれかに記載の硬化性組成物。
 [8] 着色剤が無機顔料からなる[1]~[6]のいずれかに記載の硬化性組成物。
 [9] [1]~[8]のいずれかに記載の硬化性組成物を硬化して得られる、硬化膜。
 [10] [9]に記載の硬化膜を含有する、カラーフィルタ。
 [11] [9]に記載の硬化膜を含有する、遮光膜。
 [12] [9]に記載の硬化膜を含有する、固体撮像素子。
 [13] [9]に記載の硬化膜を含有する、画像表示装置。
 [14] [1]~[8]のいずれかに記載の硬化性組成物を用いて支持体上に硬化性組成物層を形成する、硬化性組成物層形成工程と、硬化性組成物層を露光する、露光工程と、を含有する硬化膜の製造方法。
 [15] 硬化性組成物層形成工程が、支持体上に硬化性組成物を塗布して、支持体上に硬化性組成物層を形成する工程である、[14]に記載の硬化膜の製造方法。
 [16] 更に、露光された硬化性組成物層を現像する、現像工程を含有する、[14]又は[15]に記載の硬化膜の製造方法。
[1] A curable composition containing a photopolymerization initiator, a polyfunctional thiol compound, a polymerizable compound, and a colorant, wherein the photopolymerization initiator is represented by formula (1) A curable composition.
[2] The curable composition according to [1], wherein R 1 in Formula (1) has 13 or more carbon atoms.
[3] The curable composition according to [1] or [2], wherein the content ratio of the oxime compound content to the polyfunctional thiol compound content in the curable composition is 1 to 10.
[4] The curable composition according to any one of [1] to [3], wherein the content ratio of the oxime compound content to the polyfunctional thiol compound content in the curable composition is 4 to 10. object.
[5] The curable composition according to any one of [1] to [4], wherein the polyfunctional thiol compound is a compound represented by the formula (2).
[6] In the formula (2), R 24 and R 25 are each independently an alkyl group or —C (═O) —O—R 23 , and M 21 is —C (═O) —O. The curable composition according to [5], wherein n is an integer of 3 to 10.
[7] The curable composition according to any one of [1] to [6], wherein the colorant comprises an organic pigment.
[8] The curable composition according to any one of [1] to [6], wherein the colorant comprises an inorganic pigment.
[9] A cured film obtained by curing the curable composition according to any one of [1] to [8].
[10] A color filter containing the cured film according to [9].
[11] A light-shielding film containing the cured film according to [9].
[12] A solid-state imaging device containing the cured film according to [9].
[13] An image display device comprising the cured film according to [9].
[14] A curable composition layer forming step of forming a curable composition layer on a support using the curable composition according to any one of [1] to [8], and a curable composition layer A method for producing a cured film, comprising exposing an exposure step.
[15] The cured film according to [14], wherein the curable composition layer forming step is a step of coating the curable composition on the support to form a curable composition layer on the support. Production method.
[16] The method for producing a cured film according to [14] or [15], further including a development step of developing the exposed curable composition layer.
 本発明によれば、優れたパターン形状を有する硬化膜を得ることができる硬化性組成物を提供することができる。
 また、本発明によれば、硬化膜、カラーフィルタ、遮光膜、固体撮像素子、画像表示装置、及び、硬化膜の製造方法も提供することができる。
ADVANTAGE OF THE INVENTION According to this invention, the curable composition which can obtain the cured film which has the outstanding pattern shape can be provided.
Moreover, according to this invention, the manufacturing method of a cured film, a color filter, a light shielding film, a solid-state image sensor, an image display apparatus, and a cured film can also be provided.
多官能チオール化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which does not contain a polyfunctional thiol compound for every process. 多官能チオール化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which does not contain a polyfunctional thiol compound for every process. 多官能チオール化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which does not contain a polyfunctional thiol compound for every process. 多官能チオール化合物を含有し、特定オキシム化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which contains a polyfunctional thiol compound and does not contain a specific oxime compound for every process. 多官能チオール化合物を含有し、特定オキシム化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which contains a polyfunctional thiol compound and does not contain a specific oxime compound for every process. 多官能チオール化合物を含有し、特定オキシム化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。It is sectional drawing which showed typically the manufacturing process of the cured film using the curable composition which contains a polyfunctional thiol compound and does not contain a specific oxime compound for every process. 本発明の実施形態に係る固体撮像装置を示す概略断面図である。It is a schematic sectional drawing which shows the solid-state imaging device which concerns on embodiment of this invention. 図7の撮像部を拡大して示す概略断面図である。It is a schematic sectional drawing which expands and shows the imaging part of FIG. 本発明の実施形態に係る赤外線センサの構成例を示す概略断面図である。It is a schematic sectional drawing which shows the structural example of the infrared sensor which concerns on embodiment of this invention.
 以下、本発明について詳細に説明する。
 以下に記載する構成要件の説明は、本発明の代表的な実施態様に基づいてなされることがあるが、本発明はそのような実施態様に限定されるものではない。
 本明細書において、「~」を用いて表される数値範囲は、「~」の前後に記載される数値を下限値及び上限値として含む範囲を意味する。
 本明細書における基(原子団)の表記において、置換及び無置換を記していない表記は、置換基を含有しないものと共に置換基を含有するものをも包含するものである。例えば、「アルキル基」とは、置換基を含有しないアルキル基(無置換アルキル基)のみならず、置換基を含有するアルキル基(置換アルキル基)をも包含する。
 本明細書における「活性光線」又は「放射線」とは、例えば、遠紫外線、極紫外線(EUV:Extreme ultraviolet lithography光)、X線、並びに電子線等を意味する。また本明細書において「光」とは、活性光線及び放射線を意味する。本明細書中における「露光」とは、特に断らない限り、遠紫外線、X線、並びにEUV光等による露光のみならず、電子線及びイオンビーム等の粒子線による描画も包含する。
 本明細書において、「(メタ)アクリレート」はアクリレート及びメタアクリレートを表す。本明細書において、「(メタ)アクリル」はアクリル及びメタアクリルを表す。本明細書において、「(メタ)アクリロイル」は、アクリロイル及びメタクリロイルを表す。本明細書において、「(メタ)アクリルアミド」は、アクリルアミド及びメタアクリルアミドを表す。
本明細書において、「単量体」と「モノマー」とは同義である。単量体は、オリゴマー及びポリマーと区別され、重量平均分子量が2,000以下の化合物をいう。本明細書において、重合性化合物とは、重合性基を含有する化合物のことをいい、単量体であっても、ポリマーであってもよい。重合性基とは、重合反応に関与する基をいう。
Hereinafter, the present invention will be described in detail.
The description of the constituent elements described below may be made based on typical embodiments of the present invention, but the present invention is not limited to such embodiments.
In the present specification, a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
In the description of the group (atomic group) in this specification, the description which does not describe substitution and non-substitution includes what does not contain a substituent and what contains a substituent. For example, the “alkyl group” includes not only an alkyl group not containing a substituent (unsubstituted alkyl group) but also an alkyl group containing a substituent (substituted alkyl group).
“Actinic rays” or “radiation” in the present specification means, for example, deep ultraviolet rays, extreme ultraviolet lithography (EUV), X-rays, and electron beams. In this specification, “light” means actinic rays and radiation. Unless otherwise specified, “exposure” in this specification includes not only exposure with far ultraviolet rays, X-rays, EUV light, etc., but also drawing with particle beams such as electron beams and ion beams.
In the present specification, “(meth) acrylate” represents acrylate and methacrylate. In the present specification, “(meth) acryl” represents acryl and methacryl. In this specification, “(meth) acryloyl” represents acryloyl and methacryloyl. In this specification, “(meth) acrylamide” represents acrylamide and methacrylamide.
In the present specification, “monomer” and “monomer” are synonymous. A monomer is distinguished from an oligomer and a polymer, and refers to a compound having a weight average molecular weight of 2,000 or less. In the present specification, the polymerizable compound means a compound containing a polymerizable group, and may be a monomer or a polymer. The polymerizable group refers to a group that participates in a polymerization reaction.
[硬化性組成物]
 本発明の実施形態に係る硬化性組成物は、光重合開始剤と、多官能チオール化合物と、重合性化合物と、着色剤とを含有し、光重合開始剤が後述する式(1)で表されるオキシム化合物(以下、「特定オキシム化合物」ともいう。)である点に特徴点の1つがある。
[Curable composition]
The curable composition which concerns on embodiment of this invention contains a photoinitiator, a polyfunctional thiol compound, a polymeric compound, and a coloring agent, and photoinitiator is represented by Formula (1) mentioned later. One feature is that it is an oxime compound (hereinafter also referred to as “specific oxime compound”).
 このような構成を有する本発明の硬化性組成物によれば、優れたパターン形状を有する硬化膜が得られる。その理由は、詳細には明らかではないが、本発明者らは以下のように推測している。なお、以下の推測によって本発明の範囲が限定されるものではない。言い換えれば、以下の推測機序以外の機序により効果が得られる場合であっても本発明の範囲に含まれる。 According to the curable composition of the present invention having such a configuration, a cured film having an excellent pattern shape can be obtained. The reason is not clear in detail, but the present inventors speculate as follows. The scope of the present invention is not limited by the following estimation. In other words, even when the effect is obtained by a mechanism other than the following speculation mechanism, it is included in the scope of the present invention.
 硬化膜の典型的な作製方法は、硬化性組成物を支持体上に塗布して硬化性組成物層を得て、それをパターン状に露光し、現像する方法である。しかし、硬化性組成物層の光学濃度(OD:optical densityともいう)は長波長側から短波長側に次第に高くなり、短波長側で特に高くなる。そのために、例えばg線、h線、及びi線等の紫外線領域の光(言い換えれば、短波長側の光)で硬化性組成物層をパターン状に露光する際、光が硬化性組成物層内部まで届かず、露光が不十分になり、結果として硬化性組成物が意図したとおりに硬化せず、硬化膜のパターン形状が悪化することがあった。
 上記によりパターン形状が悪化する機序を、硬化膜の製造工程を工程ごとに模式的に表した図1~6を用いて説明する。まず、図1~3は、多官能チオール化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。
 まず、図1に示すとおり、支持体101上に、硬化性組成物を用いて硬化性組成物層102が形成される。次に、フォトマスク103の開口部をとおして硬化性組成物層102が露光される(図1中、矢印は光の照射方向を示しており、A-B線はフォトマスクの開口部の端の延長線である。以下同じ。)。次に、上記露光後の硬化性組成物層102が現像され、パターン状の硬化膜201が形成される。
 上記手順中の露光の際に、硬化性組成物層102の光学濃度が高いため、露光時に光が硬化性組成物層102内部まで届きにくく、硬化性組成物層102の下部では露光が不十分となる。すると、現像により、硬化性組成物層102中の露光が不十分な部分において、硬化性組成物が溶出してしまう(図2)。そのような状態で、硬化膜201を加熱するポストベーク処理を行うと、得られるポストベーク後の硬化膜301の端部において、中央部と比較して膜厚が減少してしまい、パターン形状が悪化しやすくなるものと推測される(図3)。
A typical method for producing a cured film is a method in which a curable composition is applied on a support to obtain a curable composition layer, which is exposed in a pattern and developed. However, the optical density (also referred to as OD: optical density) of the curable composition layer gradually increases from the long wavelength side to the short wavelength side, and particularly increases on the short wavelength side. Therefore, for example, when the curable composition layer is exposed in a pattern with light in the ultraviolet region such as g-line, h-line, and i-line (in other words, light on the short wavelength side), the light is curable composition layer. It did not reach the inside, exposure was insufficient, and as a result, the curable composition did not cure as intended, and the pattern shape of the cured film sometimes deteriorated.
The mechanism by which the pattern shape deteriorates due to the above will be described with reference to FIGS. 1 to 6 schematically showing the manufacturing process of the cured film for each process. First, FIGS. 1 to 3 are cross-sectional views schematically showing a production process of a cured film using a curable composition not containing a polyfunctional thiol compound for each process.
First, as shown in FIG. 1, a curable composition layer 102 is formed on a support 101 using a curable composition. Next, the curable composition layer 102 is exposed through the opening of the photomask 103 (in FIG. 1, arrows indicate the direction of light irradiation, and the line AB represents the end of the opening of the photomask. The same shall apply hereinafter.) Next, the curable composition layer 102 after the exposure is developed to form a patterned cured film 201.
During the exposure in the above procedure, since the optical density of the curable composition layer 102 is high, it is difficult for light to reach the inside of the curable composition layer 102 at the time of exposure, and under the curable composition layer 102, the exposure is insufficient. It becomes. Then, a curable composition will elute in the part in which the exposure in the curable composition layer 102 is inadequate by image development (FIG. 2). In such a state, when the post-baking process for heating the cured film 201 is performed, the film thickness is reduced at the end of the obtained post-baked cured film 301 as compared with the central portion, and the pattern shape is It is presumed that it is likely to deteriorate (FIG. 3).
 これに対し、図4~6は多官能チオール化合物を含有し、後述する特定オキシム化合物を含有しない硬化性組成物を用いた硬化膜の製造工程を工程ごとに模式的に示した断面図である。
 まず、図4に示すとおり、支持体101に、多官能チオール化合物を含有する硬化性組成物を用いて硬化性組成物層401が形成される。次に、フォトマスク103の開口部をとおして硬化性組成物層401が露光される。
 このとき、露光された硬化性組成物層401の内部では、光重合開始剤から発生したラジカルにより重合反応が開始される。多官能チオール化合物は連鎖移動剤として機能する。従って、例えば、重合反応の妨げになるペルオキシラジカルが、ラジカルと酸素との反応により発生したとしても、多官能チオール化合物中のチオール基がペルオキシラジカルに水素を供与することにより、酸素による重合失活を受けにくいチイルラジカルを生成し、重合反応が進行すると考えられる。従って、多官能チオール化合物を含有する硬化性組成物は、硬化性組成物層401内部まで硬化されやすいものと推測される。
 一方で、多官能チオール化合物は反応性が高く、連鎖移動を引き起こしやすい為、硬化性組成物の組成、露光量、及び、パターン形状等の条件によっては、ラジカル重合反応が未露光部にまで連鎖してしまい、特に光の照射面側の硬化性組成物層の未露光部が意図せず硬化してしまうことがあった。この場合、露光後の硬化性組成物層を現像すると、硬化膜501が、意図せず未露光部まで広がってしまうという不具合を生じさせることがあった(図5)。このような不具合が生じた場合、ポストベーク後の硬化膜601は、端部が意図せず広がってしまい、パターン形状が悪化することがあった(図6)。
On the other hand, FIGS. 4 to 6 are sectional views schematically showing, for each step, a process for producing a cured film using a curable composition containing a polyfunctional thiol compound and not containing a specific oxime compound described later. .
First, as shown in FIG. 4, a curable composition layer 401 is formed on a support 101 using a curable composition containing a polyfunctional thiol compound. Next, the curable composition layer 401 is exposed through the opening of the photomask 103.
At this time, in the exposed curable composition layer 401, the polymerization reaction is started by radicals generated from the photopolymerization initiator. The polyfunctional thiol compound functions as a chain transfer agent. Therefore, for example, even if a peroxy radical that hinders the polymerization reaction is generated by the reaction between the radical and oxygen, the thiol group in the polyfunctional thiol compound donates hydrogen to the peroxy radical, thereby deactivating the polymerization by oxygen. It is thought that a thiyl radical that is not easily received is generated and the polymerization reaction proceeds. Therefore, it is estimated that the curable composition containing a polyfunctional thiol compound is easily cured to the inside of the curable composition layer 401.
On the other hand, since the polyfunctional thiol compound is highly reactive and easily causes chain transfer, depending on conditions such as the composition of the curable composition, the exposure amount, and the pattern shape, the radical polymerization reaction is chained to the unexposed area. In particular, an unexposed portion of the curable composition layer on the light irradiation surface side may be unintentionally cured. In this case, when the curable composition layer after exposure is developed, the cured film 501 may unintentionally spread to an unexposed portion (FIG. 5). When such a defect occurs, the end portion of the post-baked cured film 601 unintentionally spreads and the pattern shape may deteriorate (FIG. 6).
 上記の現象を初めて発見した本発明者らは、鋭意検討を重ね、本発明を完成させるに至った。本発明の硬化性組成物は光重合開始剤として、後述する式(1)のRがヘテロ原子を含有してもよい炭素数8以上の炭化水素基を含有するオキシム化合物(特定オキシム化合物)を含有する。特定オキシム化合物は上記Rで表される基の影響により、嵩高くなっている。
 特定オキシム化合物は、上記のとおり嵩高い構造を有するため、硬化性組成物層中において拡散しにくいものと推測される。従って、連鎖移動剤として反応性の高い多官能チオール化合物を用いる場合であっても、未露光部にラジカル種が拡散しにくく、結果として未露光部で硬化反応が起こりにくく、優れたパターン形状を有する硬化膜が得られたものと推測される。
 以下では本発明の実施形態に係る硬化性組成物が含有する各成分について詳述する。
The present inventors who discovered the above phenomenon for the first time have made extensive studies and have completed the present invention. The curable composition of the present invention is an oxime compound (specific oxime compound) containing, as a photopolymerization initiator, a hydrocarbon group having 8 or more carbon atoms in which R 1 of formula (1) described later may contain a hetero atom. Containing. The specific oxime compound is bulky due to the influence of the group represented by R 1 .
Since the specific oxime compound has a bulky structure as described above, it is presumed that the specific oxime compound is difficult to diffuse in the curable composition layer. Therefore, even when a highly functional polyfunctional thiol compound is used as the chain transfer agent, radical species are less likely to diffuse in the unexposed areas, and as a result, the curing reaction hardly occurs in the unexposed areas, resulting in an excellent pattern shape. It is presumed that a cured film was obtained.
Below, each component which the curable composition which concerns on embodiment of this invention contains is explained in full detail.
 本発明の実施形態に係る硬化性組成物は、多官能チオール化合物と、重合性化合物と、着色剤と、光重合開始剤とを含有し、光重合開始剤が後述する特定オキシム化合物である。 The curable composition according to the embodiment of the present invention contains a polyfunctional thiol compound, a polymerizable compound, a colorant, and a photopolymerization initiator, and the photopolymerization initiator is a specific oxime compound described later.
〔特定オキシム化合物〕
 本発明の実施形態に係る硬化性組成物は、後述する特定オキシム化合物を含有する。特定オキシム化合物は光重合開始剤としての機能を有する。
 硬化性組成物中における特定オキシム化合物の含有量としては特に制限されないが、一般に、硬化性組成物の全固形分に対して、1~8質量%が好ましい。特定オキシム化合物は、1種を単独で用いても、2種以上を併用してもよい。2種以上の特定オキシム化合物を併用する場合には、合計含有量が上記範囲内であることが好ましい。
 なお、特定オキシム化合物としては、N-O結合が(E)体であっても、(Z)体であってもよい。特定オキシム化合物としては、(E)体と(Z)体とを併用してもよい。
[Specific oxime compounds]
The curable composition which concerns on embodiment of this invention contains the specific oxime compound mentioned later. The specific oxime compound has a function as a photopolymerization initiator.
The content of the specific oxime compound in the curable composition is not particularly limited, but is generally preferably 1 to 8% by mass with respect to the total solid content of the curable composition. A specific oxime compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of specific oxime compounds together, it is preferable that total content is in the said range.
As the specific oxime compound, the N—O bond may be an (E) isomer or a (Z) isomer. As the specific oxime compound, the (E) isomer and the (Z) isomer may be used in combination.
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
 式(1)中、Rは、ヘテロ原子を含有してもよい炭素数8以上の炭化水素基を表す。炭化水素基は、直鎖状、分岐鎖状、環状、又は、これらを組み合わせた形状であってもよい。なかでも、より優れた本発明の効果を有する硬化性組成物が得られる点で、ヘテロ原子を含有してもよい、直鎖状、分岐鎖状、又は、環状の炭素数13以上の炭化水素基が好ましい。
 Rが含有するヘテロ原子としては特に制限されないが、窒素原子、硫黄原子、及び、酸素原子等が挙げられる。
 Rとしては、例えば、炭素数8以上の直鎖状アルキル基、炭素数8以上の分岐鎖状アルキル基、炭素数8以上のシクロアルキル基、シクロアルキレン基を含有する炭素数8以上の炭化水素基、及び、*-L11-R11で表される基が挙げられる。なお、L11は2価の連結基を表し、R11はアルキル基を表し、*は炭素原子との結合位置を表す。
 ここで、L11の2価の連結基としては特に制限されないが、例えば、アルキレン基、カルボニル基、-O-、-S-、-NR12-、及び、これらの組み合わせ等が好ましく、アルキレン基、-O-、-S-、及び、-NR12-からなる群から選択される2種以上の組み合わせがより好ましい。ここで、R12は、水素原子、又は、アルキル基を表す。
In formula (1), R 1 represents a hydrocarbon group having 8 or more carbon atoms which may contain a hetero atom. The hydrocarbon group may be linear, branched, cyclic, or a combination thereof. Among these, a linear, branched, or cyclic hydrocarbon having 13 or more carbon atoms, which may contain a heteroatom, is obtained in that a curable composition having the better effect of the present invention can be obtained. Groups are preferred.
Although R 1 is not particularly limited, as a hetero atom containing a nitrogen atom, a sulfur atom, and an oxygen atom.
R 1 includes, for example, a linear alkyl group having 8 or more carbon atoms, a branched alkyl group having 8 or more carbon atoms, a cycloalkyl group having 8 or more carbon atoms, or a carbon atom having 8 or more carbon atoms containing a cycloalkylene group. Examples thereof include a hydrogen group and a group represented by * -L 11 -R 11 . L 11 represents a divalent linking group, R 11 represents an alkyl group, and * represents a bonding position with a carbon atom.
Here, the divalent linking group of L 11 is not particularly limited, and for example, an alkylene group, a carbonyl group, —O—, —S—, —NR 12 —, and combinations thereof are preferable. , -O -, - S-, and, -NR 12 - a combination of two or more selected from the group consisting of is more preferable. Here, R 12 represents a hydrogen atom or an alkyl group.
 Rとしては、より優れた本発明の効果を有する硬化性組成物が得られる点で、炭素数13以上の直鎖状アルキル基、又は、*-L11-R11で表される基が好ましく、*-L11-R11で表される基がより好ましく、以下の式(1-1)で表される基が更に好ましい。
Figure JPOXMLDOC01-appb-C000004
R 1 is a linear alkyl group having 13 or more carbon atoms or a group represented by * -L 11 -R 11 in that a curable composition having the better effect of the present invention can be obtained. A group represented by * -L 11 -R 11 is more preferred, and a group represented by the following formula (1-1) is still more preferred.
Figure JPOXMLDOC01-appb-C000004
 式(1-1)中、R13は炭素数1~3のアルキレン基を示し、Zは-O-、-S-、及び-NR12-からなる群から選択される少なくとも1種を表し、R14はアルキル基を表し、n11は1以上の整数を表す。R12は、水素原子又はアルキル基を表す。なお、式(1-1)中においてR13、及び、Zが複数ある場合、それぞれのR13及びZはそれぞれ同一でも異なってもよく、*は結合位置を表す。 In Formula (1-1), R 13 represents an alkylene group having 1 to 3 carbon atoms, and Z 1 represents at least one selected from the group consisting of —O—, —S—, and —NR 12 —. , R 14 represents an alkyl group, and n 11 represents an integer of 1 or more. R 12 represents a hydrogen atom or an alkyl group. Incidentally, the formula (1-1) and R 13, during, if Z 1 is more, each of R 13 and Z 1 may be the same as or different from each other, * represents a bonding position.
 式(1)中、Xは単結合、又は、2価の連結基を表し、2価の連結基としては、アルキレン基(炭素数1~12が好ましい)、シクロアルキレン基、アルケニレン基、アルキニレン基、カルボニル基、-S-、-O-、-NR15-、及び、これらを組み合わせた基等が挙げられ、より優れた本発明の効果を有する硬化性組成物が得られる点で、Xは、単結合、又は、アルキレン基、若しくは、アルキレン基と-S-とを組み合わせた基が好ましい。なお、R15は、水素原子又はアルキル基を表す。 In Formula (1), X 2 represents a single bond or a divalent linking group, and examples of the divalent linking group include an alkylene group (preferably having 1 to 12 carbon atoms), a cycloalkylene group, an alkenylene group, and an alkynylene. Group, carbonyl group, —S—, —O—, —NR 15 —, and a combination of these, and the like. From the viewpoint of obtaining a curable composition having more excellent effects of the present invention, X 2 is preferably a single bond, an alkylene group, or a group in which an alkylene group and —S— are combined. R 15 represents a hydrogen atom or an alkyl group.
 式(1)中、Rは、アルキル基、又は、アリール基を表す。なかでも、より優れた本発明の効果を有する硬化性組成物が得られる点で、Rとしては、それぞれ置換基を含有してもよい、炭素数1~25の直鎖状のアルキル基、炭素数1~25の分岐鎖状のアルキル基、若しくは、炭素数4~25の脂環式アルキル基、又は、置換基を含有するアリール基が好ましい。なお、置換基としては、例えば、ハロゲン原子(なかでもフッ素原子が好ましい。)、アリールオキシ基、アルコキシカルボニル基、アリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基、及び、*-X-Rで表される基等が挙げられるが、これらに制限されない。なお、*は結合位置を表し、X、及び、Rの形態としては後述する。 In formula (1), R 2 represents an alkyl group or an aryl group. Among them, as R 2 , a linear alkyl group having 1 to 25 carbon atoms, each of which may contain a substituent, in that a curable composition having the better effect of the present invention can be obtained. A branched alkyl group having 1 to 25 carbon atoms, an alicyclic alkyl group having 4 to 25 carbon atoms, or an aryl group containing a substituent is preferable. Examples of the substituent include, for example, a halogen atom (preferably a fluorine atom), an aryloxy group, an alkoxycarbonyl group, an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, an aryl group, and *- Examples include, but are not limited to, a group represented by X 6 -R 6 . Note that * represents a bonding position, and the forms of X 6 and R 6 will be described later.
 式(1)中、Xは単結合、又は、カルボニル基を表す。また、Rはアリール基を表し、置換基を含有してもよく、なかでも、より優れた本発明の効果を有する硬化性組成物が得られる点で、Rとしては、以下の式(1-2)で表される基が好ましい。
 *-[Ar]-X-R 式(1-2)
 なお、式(1-2)中、*はXとの結合位置を表し、[Ar]はアリーレン基を表し、単環であっても縮合環であってもよい。Xは単結合、又は、2価の連結基を表す。Xの2価の連結基としては、アルキレン基、アリーレン基、シクロアルキレン基、アルケニレン基、アルキニレン基、カルボニル基、-S-、-O-、-NR61-、及び、これらを組み合わせた基が挙げられる。ここで、R61は、水素原子、又は、アルキル基を表す。なかでも、より優れた本発明の効果を有する硬化性組成物が得られる点で、Xは、単結合、-S-又は、カルボニル基が好ましい。
 また、上記式中、Rは水素原子、又は、置換基を表す。置換基としては特に制限されないが、例えば、アルキル基、-NO、アリール基、及び、複素環基等が挙げられる。なお、置換基としては、Rのアリール基が含有してもよい置換基であってもよい。
In formula (1), X 3 represents a single bond or a carbonyl group. R 3 represents an aryl group and may contain a substituent. Among them, R 3 is represented by the following formula ( 3 ) in that a curable composition having a better effect of the present invention can be obtained. The group represented by 1-2) is preferred.
*-[Ar] -X 6 -R 6 formula (1-2)
In formula (1-2), * represents a bonding position with X 3, and [Ar] represents an arylene group, which may be a single ring or a condensed ring. X 6 represents a single bond or a divalent linking group. Examples of the divalent linking group for X 6 include an alkylene group, an arylene group, a cycloalkylene group, an alkenylene group, an alkynylene group, a carbonyl group, —S—, —O—, —NR 61 —, and a combination thereof. Is mentioned. Here, R 61 represents a hydrogen atom or an alkyl group. Among these, X 6 is preferably a single bond, —S— or a carbonyl group in that a curable composition having the better effect of the present invention can be obtained.
In the above formula, R 6 represents a hydrogen atom or a substituent. The substituent is not particularly limited, and examples thereof include an alkyl group, —NO 2 , an aryl group, and a heterocyclic group. As the substituent, an aryl group of R 2 may be a substituent which may contain.
 特定オキシム化合物としては、例えば、以下の式(1-A)~式(1-D)で表される化合物が挙げられる。
Figure JPOXMLDOC01-appb-C000005
Examples of the specific oxime compound include compounds represented by the following formulas (1-A) to (1-D).
Figure JPOXMLDOC01-appb-C000005
 更に具体的には、以下の式(1-a)~(1-d)で表される化合物が挙げられる。
Figure JPOXMLDOC01-appb-C000006
More specifically, compounds represented by the following formulas (1-a) to (1-d) can be mentioned.
Figure JPOXMLDOC01-appb-C000006
 式(1-A)~式(1-D)、及び、式(1-a)~式(1-d)中、R、R、X、及び、Xはそれぞれ、式(1)中のR、R、X、及び、Xと同義であり、好適形態も同様である。
 式(1-A)~式(1-D)、及び、式(1-a)~式(1-d)中、R10は水素原子、又は、一価の置換基を表す。一価の置換基としては特に制限されないが、例えば、-NO(以下、ニトロ基ともいう。)、*-X-Rで表される基、置換基を含有してもよいアリール基、及び、置換基を含有してもよいアリール複素環基等が挙げられる。
In formulas (1-A) to (1-D) and formulas (1-a) to (1-d), R 1 , R 2 , X 2 , and X 3 are each represented by formula (1 ) And R 1 , R 2 , X 2 , and X 3 , and the preferred embodiments are also the same.
In the formulas (1-A) to (1-D) and the formulas (1-a) to (1-d), R 10 represents a hydrogen atom or a monovalent substituent. The monovalent substituent is not particularly limited. For example, —NO 2 (hereinafter also referred to as a nitro group), a group represented by * —X 6 —R 6 , an aryl group which may contain a substituent And an aryl heterocyclic group which may contain a substituent.
 式(1-A)~式(1-D)、及び、式(1-a)~式(1-d)中(但し、式(1-B)及び式(1-b)を除く)、Rは-O-、-S-、又は、-NR71-を表す。R71は、置換基を表し、置換基としては、特に制限されないが、例えば、炭素数1~20のアルキル基(直鎖状、分岐鎖状、及び、環状のいずれであってもよい。)、炭素数4~20の脂環式炭化水素基、炭素数6~30のアリール基、及び、炭素数7~30のアリールアルキル基等が挙げられる。上記置換基はヘテロ原子を含有してもよく、なかでもより優れた本発明の効果を有する硬化性組成物が得られる点で、ヘテロ原子としては、窒素原子、酸素原子、及び、ハロゲン原子等が好ましく、窒素原子、酸素原子、又は、フッ素原子がより好ましい。 In formulas (1-A) to (1-D) and formulas (1-a) to (1-d) (except for formulas (1-B) and (1-b)), R 7 represents —O—, —S—, or —NR 71 —. R 71 represents a substituent, and the substituent is not particularly limited, and for example, an alkyl group having 1 to 20 carbon atoms (which may be linear, branched or cyclic). And an alicyclic hydrocarbon group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, and an arylalkyl group having 7 to 30 carbon atoms. The above substituent may contain a heteroatom, and among them, a nitrogen atom, an oxygen atom, a halogen atom, etc. may be used as the heteroatom in that a curable composition having the effects of the present invention can be obtained. Are preferable, and a nitrogen atom, an oxygen atom, or a fluorine atom is more preferable.
 式(1-B)及び式(1-b)中、Rは2価の連結基を表す。Rの2価の連結基の形態としては、Xの2価の連結基として既に説明したものと同様である。 In formula (1-B) and formula (1-b), R 8 represents a divalent linking group. The form of the divalent linking group for R 8 is the same as that already described as the divalent linking group for X 6 .
 特定オキシム化合物の具体例を以下の表1-1~1-4に示すが、特定オキシム化合物としてはこれに制限されない。なお、表1中、波線は結合位置を表し、「↑」は直上の欄と同一であることを表す。また、「-X-R」の欄に記載されている構造は、連結基XとRで表される基が結合した形態を表している。また、「式」欄の内容は、上記式(1-a)~(1-d)にそれぞれ対応し、各記号(R、-X-R、X、R、R、及び、R10)は、各式におけるそれぞれの記号に対応する。また、R、及び、R欄における「なし」は、対応する式で表される化合物が、それぞれR、及び、Rで表される基を含有しないことを表す。なお、各特定オキシム化合物の番号(「INT-1」~「INT-50」)は、実施例における各特定オキシム化合物の番号に対応している。 Specific examples of the specific oxime compound are shown in Tables 1-1 to 1-4 below, but the specific oxime compound is not limited thereto. In Table 1, the wavy line represents the coupling position, and “↑” represents the same as the column immediately above. The structure described in the column “—X 2 —R 2 ” represents a form in which the group represented by the linking group X 2 and R 2 are bonded. The contents of the “formula” column correspond to the above formulas (1-a) to (1-d), respectively, and each symbol (R 1 , —X 2 —R 2 , X 3 , R 7 , R 8 , And R 10 ) corresponds to each symbol in each formula. “None” in the R 7 and R 8 columns indicates that the compound represented by the corresponding formula does not contain groups represented by R 7 and R 8 , respectively. The numbers of the specific oxime compounds (“INT-1” to “INT-50”) correspond to the numbers of the specific oxime compounds in the examples.
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000009
Figure JPOXMLDOC01-appb-T000009
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000010
 特定オキシム化合物は、350~500nmの波長領域に極大吸収波長を有するものが好ましく、360~480nmの波長領域に極大吸収波長を有するものがより好ましく、365nm及び405nmの吸光度が高いものが更に好ましい。
 オキシム化合物の365nm又は405nmにおけるモル吸光係数は、感度の観点から、1,000~300,000が好ましく、2,000~300,000がより好ましく、5,000~200,000が更に好ましい。
 化合物のモル吸光係数は、公知の方法で測定できるが、例えば、紫外可視分光光度計(Varian社製Cary-5 spctrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
The specific oxime compound preferably has a maximum absorption wavelength in the wavelength region of 350 to 500 nm, more preferably has a maximum absorption wavelength in the wavelength region of 360 to 480 nm, and more preferably has a high absorbance at 365 nm and 405 nm.
The molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, and further preferably 5,000 to 200,000 from the viewpoint of sensitivity.
The molar extinction coefficient of the compound can be measured by a known method. For example, the molar extinction coefficient is measured at a concentration of 0.01 g / L using an ultraviolet-visible spectrophotometer (Cary-5 spectrphotometer manufactured by Varian) using an ethyl acetate solvent. It is preferable.
 特定オキシム化合物は、公知の方法により合成することができる。典型的には、塩基存在下での不活性溶媒中、又は、塩基性溶媒中での対応するオキシムと酸塩化物との反応により合成できる。塩基としては例えばトリエチルアミン、及び、ピリジン等が挙げられる。不活性溶媒としては例えば、tert-ブチルメチルエーテル、テトラヒドロフラン(THF)、及び、ジメチルホルムアミド等が挙げられる。塩基溶媒としては例えば、ピリジン等が挙げられる。 The specific oxime compound can be synthesized by a known method. Typically, it can be synthesized by reaction of the corresponding oxime with an acid chloride in an inert solvent in the presence of a base or in a basic solvent. Examples of the base include triethylamine and pyridine. Examples of the inert solvent include tert-butyl methyl ether, tetrahydrofuran (THF), dimethylformamide, and the like. Examples of the base solvent include pyridine.
〔多官能チオール化合物〕
 本発明の実施形態に係る硬化性組成物は多官能チオール化合物を含有する。本明細書において多官能チオール化合物とは、同一分子内に2個以上のチオール基(すなわち-SHで表される基)を含有するものを意図する。
 多官能チオール化合物の含有量としては特に制限されないが、着色剤の含有量に対して、0.1~10質量%の場合が多い。なかでも、硬化性組成物がより優れた本発明の効果を有する点で、着色剤の含有量に対して、0.5~8.0質量%が好ましい。
 また、多官能チオール化合物の含有量は、硬化性組成物の全固形分に対して、0.1~8.0質量%が好ましく、0.3~6.0質量%がより好ましい。
 なお、多官能チオール化合物は1種を単独で用いても、2種以上を併用してもよい。2種以上を併用する場合には、その合計が上記範囲内であることが好ましい。
[Polyfunctional thiol compound]
The curable composition which concerns on embodiment of this invention contains a polyfunctional thiol compound. In the present specification, a polyfunctional thiol compound is intended to contain two or more thiol groups (that is, a group represented by —SH) in the same molecule.
The content of the polyfunctional thiol compound is not particularly limited, but is often 0.1 to 10% by mass with respect to the content of the colorant. Among these, 0.5 to 8.0% by mass is preferable with respect to the content of the colorant in that the curable composition has the more excellent effects of the present invention.
Further, the content of the polyfunctional thiol compound is preferably 0.1 to 8.0% by mass, and more preferably 0.3 to 6.0% by mass with respect to the total solid content of the curable composition.
In addition, a polyfunctional thiol compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types together, it is preferable that the sum total is in the said range.
 多官能チオール化合物と、上記特定オキシム化合物の含有量との関係としては特に制限されないが、硬化性組成物によってより優れたパターン形状を有する硬化膜が得られる(より優れた本発明の効果を有する)点で、硬化性組成物中における多官能チオール化合物の含有量に対する、特定オキシム化合物の含有量の含有質量比(特定オキシム化合物の含有量/多官能チオール化合物の含有量)としては、0.1~15が好ましく、0.5~12がより好ましく、1~10が更に好ましく、4~10が特に好ましい。 The relationship between the polyfunctional thiol compound and the content of the specific oxime compound is not particularly limited, but a cured film having a more excellent pattern shape can be obtained by the curable composition (having a more excellent effect of the present invention. ) In terms of the content ratio of the content of the specific oxime compound to the content of the polyfunctional thiol compound in the curable composition (content of specific oxime compound / content of polyfunctional thiol compound) 1 to 15 is preferable, 0.5 to 12 is more preferable, 1 to 10 is still more preferable, and 4 to 10 is particularly preferable.
 多官能チオール化合物としては、硬化性組成物がより優れた本発明の効果を有する点で、以下の式(2)で表されることが好ましい。
Figure JPOXMLDOC01-appb-C000011
The polyfunctional thiol compound is preferably represented by the following formula (2) in that the curable composition has more excellent effects of the present invention.
Figure JPOXMLDOC01-appb-C000011
 式(2)中、R24、及び、R25は、水素原子、アルキル基、アリール基、-C(=O)-R23、-C(=O)-O-R23、又は、-C(=O)-NH-R23を表し、アルキル基、又は、-C(=O)-O-R23が好ましい。なお、R23はアルキル基、又は、アリール基を表し、複数あるR24、R25、及び、M21(後述する)はそれぞれ同一でも異なってもよく、R23が複数ある場合、それぞれ同一でも異なってもよい。 In formula (2), R 24 and R 25 are a hydrogen atom, an alkyl group, an aryl group, —C (═O) —R 23 , —C (═O) —O—R 23 , or —C Represents (═O) —NH—R 23, and is preferably an alkyl group or —C (═O) —O—R 23 . R 23 represents an alkyl group or an aryl group, and a plurality of R 24 , R 25 , and M 21 (described later) may be the same or different, and when there are a plurality of R 23 , they may be the same. May be different.
 L21はn価の有機連結基を表す。nは2~10の整数を表し、3~10が好ましく、3~6がより好ましい。L21が2価の有機連結基である場合、例えば、2価の脂肪族炭化水素基(好ましくは炭素数1~8)、2価の芳香族炭化水素基(好ましくは炭素数6~12)、-O-、-S-、-N(Rx)-(Rx:1価の有機基)、-C(=O)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-O-C(=O)-NH-、-S(=O)-、-S(=O)-O-、-S(=O)-、-S(=O)-O-、-CH=N-、又は、これらを組み合わせた基(例えば、アルキレンオキシ基、アルキレンオキシカルボニル基、及びアルキレンカルボニルオキシ基等)等が挙げられる。
 L21が3価以上の有機連結基である場合、例えば、トリメチロールプロパン残基、-(CH2-(kは例えば、2~6の整数を表す。)を3個含有するイソシアヌール環等の3価の連結基、ペンタエリスリトール残基等の4価の連結基又は5価の連結基、ジペンタエリスリトール残基等の6価の連結基、及び、これらの組み合わせ等が挙げられる。
 L21のn価の有機連結基としては、例えば、以下の式(A)~(D)のいずれかで表される基、又は、これらを組み合わせた基が挙げられる。
L 21 represents an n-valent organic linking group. n represents an integer of 2 to 10, preferably 3 to 10, and more preferably 3 to 6. When L 21 is a divalent organic linking group, for example, a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms), a divalent aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms). , -O-, -S-, -N (Rx)-(Rx: a monovalent organic group), -C (= O)-, -C (= O) -O-, -O-C (= O ) —O—, —C (═O) —NH—, —O—C (═O) —NH—, —S (═O) —, —S (═O) —O—, —S (═O ) 2 —, —S (═O) 2 —O—, —CH═N—, or a combination thereof (for example, an alkyleneoxy group, an alkyleneoxycarbonyl group, and an alkylenecarbonyloxy group). It is done.
When L 21 is a trivalent or higher valent organic linking group, for example, isocyanur containing three trimethylolpropane residues, — (CH 2 ) k — (k represents an integer of 2 to 6, for example). Examples thereof include a trivalent linking group such as a ring, a tetravalent linking group such as a pentaerythritol residue, a pentavalent linking group, a hexavalent linking group such as a dipentaerythritol residue, and combinations thereof.
Examples of the n-valent organic linking group for L 21 include groups represented by any of the following formulas (A) to (D), or groups obtained by combining these groups.
 上記式(A)~(D)中、
 Lは3価の基を表す。Tは単結合又は2価の連結基を表し、3個のTは互いに同一であっても異なっていてもよい。
 Lは4価の基を表す。Tは単結合又は2価の連結基を表し、4個のTは互いに同一であっても異なっていてもよい。
 Lは5価の基を表す。Tは単結合又は2価の連結基を表し、5個のTは互いに同一であっても異なっていてもよい。
 Lは6価の基を表す。Tは単結合又は2価の連結基を表し、6個のTは互いに同一であっても異なっていてもよい。
 なお、T、T、T及びTで表される2価の連結基の定義は、上述したL21で表される2価の連結基の定義と同義である。
In the above formulas (A) to (D),
L 4 represents a trivalent group. T 3 represents a single bond or a divalent linking group, and three T 3 s may be the same as or different from each other.
L 5 represents a tetravalent group. T 4 represents a single bond or a divalent linking group, and the four T 4 s may be the same as or different from each other.
L 6 represents a pentavalent group. T 5 represents a single bond or a divalent linking group, and the five T 5 s may be the same as or different from each other.
L 7 represents a hexavalent group. T 6 represents a single bond or a divalent linking group, and the six T 6 s may be the same as or different from each other.
The definition of the divalent linking group represented by T 3, T 4, T 5 and T 6 are the same as those defined divalent linking group represented by L 21 as described above.
 L21のn価の連結基としては、例えば、以下の式(E)~(J)で表される基、又は、これらを組み合わせた基が好ましい。
Figure JPOXMLDOC01-appb-C000013
As the n-valent linking group for L 21 , for example, groups represented by the following formulas (E) to (J), or a group obtained by combining these are preferable.
Figure JPOXMLDOC01-appb-C000013
 上記式(E)~(J)中、
 Rは水素原子、又は、1価の有機基を表す。1価の有機基としては、アルキル基が好ましい。*は結合位置を示す。tは2以上の整数を表す。
In the above formulas (E) to (J),
R represents a hydrogen atom or a monovalent organic group. As the monovalent organic group, an alkyl group is preferable. * Indicates a binding position. t represents an integer of 2 or more.
 L21は以下の式(K)~(O)で表される基、又は、これらを組み合わせた基であってもよい。式中、*は結合位置を表す。
Figure JPOXMLDOC01-appb-C000014
L 21 may be a group represented by the following formulas (K) to (O), or a group obtained by combining these. In the formula, * represents a bonding position.
Figure JPOXMLDOC01-appb-C000014
 式(2)中、M21は単結合、又は、-O-、-S-、-N(R23)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-C(=O)-、アルキレン基、若しくは、これらを2種以上組み合わせた基を表し、-C(=O)-O-が好ましい。R23はアルキル基、又は、アリール基を表し、複数あるM21はそれぞれ同一でも異なってもよい。 In the formula (2), M 21 represents a single bond, or —O—, —S—, —N (R 23 ) —, —C (═O) —O—, —O—C (═O) —O. —, —C (═O) —NH—, —C (═O) —, an alkylene group, or a group in which two or more of these are combined, —C (═O) —O— is preferred. R 23 represents an alkyl group or an aryl group, and a plurality of M 21 may be the same or different.
 なかでも、硬化性組成物がより優れた現像残渣抑制性能を有する点で、多官能チオール化合物としては、式(2)中、R24、及び、R25からなる群から選択される少なくとも1方が水素原子以外であることが好ましく(2級チオール化合物)、R24、及び、R25の両方が水素原子以外であることがより好ましく(3級チオール化合物)、R24、及び、R25がそれぞれ独立にアルキル基、又は、-C(=O)-O-R23であることが更に好ましい。
 なお、R24、及び、R25それぞれ水素原子以外である場合の炭素数としては特に制限されないが、硬化性組成物がより優れた現像残渣抑制性能を有する点で、それぞれ独立に1以上が好ましく、R24及びR25の少なくとも一方が、2以上であることがより好ましい。炭素数の上限値としては特に制限されないが、一般に5以下が好ましい。
 また、M21は-C(=O)-O-であることが好ましく、nは3~10の整数であることが好ましい。
 なお、本明細書において、現像残渣抑制性能とは、実施例に記載した方法により評価した硬化性組成物の物性を意図する。
Among them, as the polyfunctional thiol compound, at least one selected from the group consisting of R 24 and R 25 in the formula (2) in that the curable composition has more excellent development residue suppressing performance. Is preferably other than a hydrogen atom (secondary thiol compound), more preferably both R 24 and R 25 are other than a hydrogen atom (tertiary thiol compound), and R 24 and R 25 are More preferably, they are each independently an alkyl group or —C (═O) —O—R 23 .
Incidentally, R 24 and are not particularly limited as the number of carbon atoms in the case R 25 each is other than a hydrogen atom, in that the curable composition has a better developing residual渣抑system performance, one or more independently preferably , R 24 and R 25 are more preferably 2 or more. Although it does not restrict | limit especially as an upper limit of carbon number, Generally 5 or less is preferable.
M 21 is preferably —C (═O) —O—, and n is preferably an integer of 3 to 10.
In addition, in this specification, the development residue suppression performance intends the physical properties of the curable composition evaluated by the method described in Examples.
 多官能チオール化合物の具体例を以下に示すが、本発明の実施形態に係る硬化性組成物が含有する多官能チオール化合物としてはこれに制限されない。なお、表中におけるL21、M21、R24、R25、及び、nはそれぞれ、式(2)中の各記号に対応する。また、表2-1~2-3中における「*」「●」はそれぞれ結合位置を表し、「*」は、L21とM21の結合位置を、「●」はM21と-C(R24)(R25)-SHとの結合位置をそれぞれ表す。なお、各多官能チオール化合物の番号(SH-1~SH-31)が実施例における各多官能チオール化合物の番号に対応している。 Specific examples of the polyfunctional thiol compound are shown below, but the polyfunctional thiol compound contained in the curable composition according to the embodiment of the present invention is not limited thereto. In the table, L 21 , M 21 , R 24 , R 25 , and n each correspond to each symbol in formula (2). In Tables 2-1 to 2-3, “*” and “●” represent bonding positions, “*” represents the bonding position between L 21 and M 21 , and “●” represents M 21 and −C ( R 24 ) (R 25 ) represents a bonding position with —SH. The numbers (SH-1 to SH-31) of the respective polyfunctional thiol compounds correspond to the numbers of the respective polyfunctional thiol compounds in the examples.
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000016
Figure JPOXMLDOC01-appb-T000016
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000017
〔着色剤〕
 本発明の実施形態に係る硬化性組成物は着色剤を含有する。硬化性組成物中における着色剤の含有量としては特に制限されないが、一般に、硬化性組成物の全固形分に対して、30~70質量%が好ましい。着色剤は、1種を単独で用いても、2種以上を併用してもよい。2種以上の着色剤を併用する場合には、合計含有量が上記範囲内であることが好ましい。
 なお、硬化膜を遮光膜として用いる場合、硬化性組成物中における着色剤の含有量としては特に制限されないが、より優れた遮光性を有する硬化膜(遮光膜)が得られる点で、40質量%以上が好ましい。
 なお、着色剤の含有量の上限値は特に制限されないが、一般に、硬化性組成物の全固形分に対して、70質量%以下が好ましい。着色剤の含有量が上限値以下だと、硬化性組成物はより優れた塗布性を有する。
 着色剤としては、顔料及び染料が挙げられる。以下、着色剤について詳述する。
[Colorant]
The curable composition which concerns on embodiment of this invention contains a coloring agent. The content of the colorant in the curable composition is not particularly limited, but is generally preferably 30 to 70% by mass with respect to the total solid content of the curable composition. A coloring agent may be used individually by 1 type, or may use 2 or more types together. When two or more colorants are used in combination, the total content is preferably within the above range.
In addition, when using a cured film as a light shielding film, although it does not restrict | limit especially as content of the coloring agent in a curable composition, 40 masses by the point from which the cured film (light shielding film) which has the more outstanding light-shielding property is obtained. % Or more is preferable.
In addition, although the upper limit of content of a coloring agent is not restrict | limited in particular, Generally 70 mass% or less is preferable with respect to the total solid of a curable composition. When the content of the colorant is not more than the upper limit value, the curable composition has more excellent coatability.
Examples of the colorant include pigments and dyes. Hereinafter, the colorant will be described in detail.
(顔料)
 顔料としては、特に制限されず、公知の無機顔料及び/又は有機顔料を用いることができる。本実施形態に係る硬化性組成物は着色剤として無機顔料を含有することが好ましい。また、本実施形態に係る硬化性組成物は着色剤として有機顔料を含有することも好ましい。
(Pigment)
The pigment is not particularly limited, and a known inorganic pigment and / or organic pigment can be used. The curable composition according to this embodiment preferably contains an inorganic pigment as a colorant. Moreover, it is also preferable that the curable composition which concerns on this embodiment contains an organic pigment as a coloring agent.
・無機顔料
 上記無機顔料としては、特に制限されず、公知の無機顔料を用いることができる。
 無機顔料としては、例えば、亜鉛華、鉛白、リトポン、酸化チタン、酸化クロム、酸化鉄、沈降性硫酸バリウム及びバライト粉、鉛丹、酸化鉄赤、黄鉛、亜鉛黄(亜鉛黄1種、亜鉛黄2種)、ウルトラマリン青、プロシア青(フェロシアン化鉄カリ)ジルコングレー、プラセオジムイエロー、クロムチタンイエロー、クロムグリーン、ピーコック、ビクトリアグリーン、紺青(プルシアンブルーとは無関係)、バナジウムジルコニウム青、クロム錫ピンク、陶試紅、並びにサーモンピンク等が挙げられる。また、黒色の無機顔料としては、Co、Cr、Cu、Mn,Ru、Fe、Ni、Sn、Ti、及びAgからなる群から選択される少なくとも1種の金属元素を含有する金属酸化物、金属窒素物、及び金属酸窒化物等が挙げられる。
-Inorganic pigment It does not restrict | limit especially as said inorganic pigment, A well-known inorganic pigment can be used.
Examples of inorganic pigments include zinc white, lead white, lithopone, titanium oxide, chromium oxide, iron oxide, precipitated barium sulfate and barite powder, red lead, iron oxide red, yellow lead, zinc yellow (one zinc yellow, 2 types of zinc yellow), ultramarine blue, prussian blue (potassium ferrocyanide) zircon gray, praseodymium yellow, chrome titanium yellow, chrome green, peacock, Victoria green, bitumen (unrelated to Prussian blue), vanadium zirconium blue, Examples include chrome tin pink, ceramic red, and salmon pink. The black inorganic pigment includes a metal oxide or metal containing at least one metal element selected from the group consisting of Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. Nitrogen, metal oxynitride, etc. are mentioned.
 無機顔料としては、含有量が少なくても、高い光学濃度を有する硬化膜を形成することができる硬化性組成物が得られる点で、カーボンブラック、チタンブラック、及び金属顔料等(以下、「黒色顔料」ともいう。)が好ましい。金属顔料としては、例えば、Nb、V、Co、Cr、Cu、Mn、Ru、Fe、Ni、Sn、Ti、及びAgからなる群から選択される少なくとも1種の金属元素を含有する金属酸化物及び金属窒素物が挙げられる。
 無機顔料としては、窒化チタン、酸窒化チタン、窒化ニオブ、窒化バナジウム、銀、又は錫を含有する金属顔料、並びに、銀及び錫を含有する金属顔料からなる群から選択される少なくとも1種が好ましく、窒化チタン、酸窒化チタン、窒化ニオブ、及び窒化バナジウムからなる群から選択される少なくとも1種がより好ましい。なお、上記窒化ニオブ、及び窒化バナジウムは、酸窒化ニオブ、及び酸窒化バナジウムでもよい。
 なお、無機顔料としては、カーボンブラックを用いることもできる。カーボンブラックの具体例としては、市販品である、C.I.ピグメントブラック 7等の無機顔料が挙げられるがこれらに限定されるものではない。
As inorganic pigments, carbon black, titanium black, metal pigments and the like (hereinafter referred to as “black”) are obtained in that a curable composition capable of forming a cured film having a high optical density can be obtained even if the content is small. Also referred to as “pigment”). Examples of the metal pigment include a metal oxide containing at least one metal element selected from the group consisting of Nb, V, Co, Cr, Cu, Mn, Ru, Fe, Ni, Sn, Ti, and Ag. And metal nitrogenous substances.
The inorganic pigment is preferably at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride, vanadium nitride, silver or tin-containing metal pigments, and silver and tin-containing metal pigments. More preferred is at least one selected from the group consisting of titanium nitride, titanium oxynitride, niobium nitride, and vanadium nitride. The niobium nitride and vanadium nitride may be niobium oxynitride and vanadium oxynitride.
Carbon black can also be used as the inorganic pigment. Specific examples of carbon black are commercially available C.I. I. Examples thereof include, but are not limited to, inorganic pigments such as CI Pigment Black 7.
 硬化性組成物は、黒色顔料として記載した顔料以外で赤外線吸収性を有する顔料を含有していてもよい。
 赤外線吸収性を有する顔料としては、タングステン化合物又は金属ホウ化物が好ましく、なかでも、赤外領域の波長における遮光性に優れる点から、タングステン化合物がより好ましい。
The curable composition may contain a pigment having infrared absorptivity other than the pigment described as a black pigment.
As the pigment having infrared absorptivity, a tungsten compound or a metal boride is preferable, and among them, a tungsten compound is more preferable because it is excellent in light-shielding properties at wavelengths in the infrared region.
 これらの顔料は、2種以上併用してもよく、また、後述する染料と併用してもよい。色味を調整するため、及び、所望の波長領域の遮光性を高めるため、例えば、黒色顔料又は赤外線遮光性を有する顔料に、赤色、緑色、黄色、オレンジ色、紫色、及び青色などの有彩色顔料又は後述する染料を混ぜる態様が挙げられる。黒色顔料又は赤外線遮光性を有する顔料に、赤色顔料若しくは赤色染料、又は、紫色顔料若しくは紫色染料を混合することが好ましく、黒色顔料又は赤外線遮光性を有する顔料に赤色顔料を混合することがより好ましい。
 更に、上記硬化性組成物には、後述する近赤外線吸収剤又は赤外線吸収剤を加えてもよい。
Two or more of these pigments may be used in combination, or may be used in combination with a dye described later. In order to adjust the color tone and to improve the light-shielding property in a desired wavelength region, for example, chromatic colors such as red, green, yellow, orange, purple, and blue are added to black pigments or infrared light-shielding pigments. The aspect which mixes the pigment or the dye mentioned later is mentioned. It is preferable to mix a red pigment or a red dye, or a violet pigment or a violet dye with a black pigment or an infrared light shielding pigment, and it is more preferable to mix a red pigment with a black pigment or an infrared light shielding pigment. .
Furthermore, you may add the near-infrared absorber or infrared absorber mentioned later to the said curable composition.
 黒色顔料としては、チタンブラック又は酸窒化ニオブが好ましい。チタンブラックとは、チタン原子を含有する黒色粒子である。好ましくは低次酸化チタン、酸窒化チタン又は窒化チタン等である。チタンブラックは、分散性向上、凝集性抑制などの目的で必要に応じ、表面を修飾することが可能である。具体的には、チタンブラックは、酸化珪素、酸化チタン、酸化ゲルマニウム、酸化アルミニウム、酸化マグネシウム、又は、酸化ジルコニウムで被覆することが可能である。また、チタンブラックは、特開2007-302836号公報に表されるような撥水性物質での処理も可能である。
 チタンブラックは、典型的には、チタンブラック粒子であり、個々の粒子の一次粒子径及び平均一次粒子径のいずれもが小さいものが好ましい。酸窒化ニオブも同様である。
 具体的には、平均一次粒子径で10nm~45nmの範囲のものが好ましい。
As the black pigment, titanium black or niobium oxynitride is preferable. Titanium black is black particles containing titanium atoms. Preferred are low-order titanium oxide, titanium oxynitride, titanium nitride, and the like. The surface of titanium black can be modified as necessary for the purpose of improving dispersibility and suppressing aggregation. Specifically, titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide. Titanium black can also be treated with a water repellent material as disclosed in JP-A-2007-302836.
Titanium black is typically titanium black particles, and preferably has a small primary particle size and average primary particle size of each particle. The same applies to niobium oxynitride.
Specifically, an average primary particle diameter in the range of 10 nm to 45 nm is preferable.
 なお、顔料の平均一次粒子径は、透過型電子顕微鏡(Transmission Electron Microscope、TEM)を用いて測定できる。透過型電子顕微鏡としては、例えば、日立ハイテクノロジーズ社製の透過型顕微鏡HT7700を用いることができる。
 本明細書において、顔料の平均一次粒子径は、透過型電子顕微鏡を用いて得た粒子像の最大長(Dmax:粒子画像の輪郭上の2点における最大長さ)、及び最大長垂直長(DV-max:最大長に平行な2本の直線で画像を挟んだ時、2直線間を垂直に結ぶ最短の長さ)を測長し、その相乗平均値(Dmax×DV-max)1/2を粒子径とした。顔料の平均一次粒子径は、この方法で100個の粒子の粒子径を測定し、その算術平均値を意図する。
In addition, the average primary particle diameter of a pigment can be measured using a transmission electron microscope (Transmission Electron Microscope, TEM). As the transmission electron microscope, for example, a transmission microscope HT7700 manufactured by Hitachi High-Technologies Corporation can be used.
In the present specification, the average primary particle diameter of the pigment is the maximum length of a particle image obtained using a transmission electron microscope (Dmax: the maximum length at two points on the contour of the particle image), and the maximum vertical length ( DV-max: When an image is sandwiched between two straight lines parallel to the maximum length, the shortest length connecting the two straight lines vertically is measured, and the geometric mean value (Dmax × DV-max) 1 / 2 was the particle size. The average primary particle diameter of the pigment is determined by measuring the particle diameter of 100 particles by this method and intending the arithmetic average value thereof.
 チタンブラック及び酸窒化ニオブの比表面積は特に制限されないが、チタンブラック及び酸窒化ニオブを撥水化剤で表面処理した後の撥水性が所定の性能となるために、BET(Brunauer, Emmett, Teller)法にて測定した値が5~150m2/gであることが好ましく、20~120m2/gであることがより好ましい。
 チタンブラックの市販品の例としては、チタンブラック10S、12S、13R、13M、13M-C、13R、13R-N、13M-T(商品名、三菱マテリアル(株)製)、ティラック(Tilack)D(商品名、赤穂化成(株)製)、及び、窒化チタン50nm(商品名、和光純薬(株)製)などが挙げられる。
The specific surface area of titanium black and niobium oxynitride is not particularly limited. However, since the water repellency after surface treatment of titanium black and niobium oxynitride with a water repellent becomes a predetermined performance, BET (Brunauer, Emmett, Teller) ) Is preferably 5 to 150 m 2 / g, more preferably 20 to 120 m 2 / g.
Examples of commercially available titanium black include titanium black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, 13M-T (trade name, manufactured by Mitsubishi Materials Corporation), Tilack D (trade name, manufactured by Ako Kasei Co., Ltd.) and titanium nitride 50 nm (trade name, manufactured by Wako Pure Chemical Industries, Ltd.).
 着色剤として、酸窒化チタン、窒化チタン又は酸窒化ニオブを使用することが好ましく、得られる硬化膜の耐湿性がより優れるという理由から、窒化チタン又は酸窒化ニオブがより好ましく、酸窒化ニオブが更に好ましい。これは、これらの着色剤が疎水性であるためと考えられる。 Titanium oxynitride, titanium nitride, or niobium oxynitride is preferably used as the colorant, and titanium nitride or niobium oxynitride is more preferable, and niobium oxynitride is more preferable because the resulting cured film has better moisture resistance. preferable. This is presumably because these colorants are hydrophobic.
 更に、チタンブラックを、チタンブラック及びSi原子を含む被分散体として含有することも好ましい。 Furthermore, it is also preferable to contain titanium black as a dispersion containing titanium black and Si atoms.
 この形態において、チタンブラックは、硬化性組成物中において被分散体として含有されるものであり、被分散体中のSi原子とTi原子との含有比(Si/Ti)が質量換算で0.05以上が好ましく、0.05~0.5がより好ましく、0.07~0.4が更に好ましい。
 ここで、上記被分散体は、チタンブラックが一次粒子の状態であるもの、凝集体(二次粒子)の状態であるものの双方を包含する。
 被分散体の含有比(Si/Ti)を変更する(例えば、0.05以上とする)ためには、以下のような手段を用いることができる。
 先ず、酸化チタンとシリカ粒子とを分散機を用いて分散することにより分散物を得て、この分散物を高温(例えば、850~1000℃)にて還元処理することにより、チタンブラック粒子を主成分とし、SiとTiとを含有する被分散体を得ることができる。上記還元処理は、アンモニアなどの還元性ガスの雰囲気下で行うこともできる。
 酸化チタンとしては、TTO-51N(商品名、石原産業製)などが挙げられる。
 シリカ粒子の市販品としては、AEROSIL(登録商標)90、130、150、200、255、300、380(商品名、エボニック製)などが挙げられる。
 酸化チタンとシリカ粒子との分散は、分散剤を用いてもよい。分散剤としては、後述する分散剤の欄で説明するものが挙げられる。
 上記の分散は溶剤中で行ってもよい。溶剤としては、水、有機溶剤が挙げられる。有機溶剤の例示としては、後述する有機溶剤の欄で説明するものが挙げられる。
 含有比(Si/Ti)が調整されたチタンブラックは、例えば、特開2008-266045公報の段落〔0005〕及び段落〔0016〕~〔0021〕に記載の方法により作製することができる。
In this embodiment, titanium black is contained as a dispersion in the curable composition, and the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.00 on a mass basis. 05 or more is preferable, 0.05 to 0.5 is more preferable, and 0.07 to 0.4 is still more preferable.
Here, the to-be-dispersed bodies include both those in which titanium black is in the state of primary particles and those in the state of aggregates (secondary particles).
In order to change the content ratio (Si / Ti) of the object to be dispersed (for example, 0.05 or more), the following means can be used.
First, a dispersion is obtained by dispersing titanium oxide and silica particles using a disperser, and the dispersion is subjected to reduction treatment at a high temperature (for example, 850 to 1000 ° C.), whereby titanium black particles are mainly formed. A dispersed material containing Si and Ti as components can be obtained. The reduction treatment can also be performed in an atmosphere of a reducing gas such as ammonia.
Examples of titanium oxide include TTO-51N (trade name, manufactured by Ishihara Sangyo).
Examples of commercially available silica particles include AEROSIL (registered trademark) 90, 130, 150, 200, 255, 300, 380 (trade name, manufactured by Evonik).
A dispersing agent may be used for the dispersion of titanium oxide and silica particles. Examples of the dispersant include those described in the section of the dispersant described later.
The dispersion may be performed in a solvent. Examples of the solvent include water and organic solvents. Examples of the organic solvent include those described in the column of organic solvent described later.
Titanium black having an adjusted content ratio (Si / Ti) can be produced, for example, by the method described in paragraphs [0005] and [0016] to [0021] of JP-A-2008-266045.
 チタンブラック及びSi原子を含む被分散体中のSi原子とTi原子との含有比(Si/Ti)を好適な範囲(例えば0.05以上)に調整することで、この被分散体を含む硬化性組成物を用いて硬化膜を形成した際に、硬化膜の形成領域外における硬化性組成物由来の残渣物が低減される。なお、残渣物は、チタンブラック粒子、樹脂成分等の硬化性組成物に由来する成分を含むものである。
 残渣物が低減される理由は未だ明確ではないが、上記のような被分散体は小粒子径となる傾向があり(例えば、粒子径が30nm以下)、更に、この被分散体のSi原子が含まれる成分が増すことにより、膜全体の下地との吸着性が低減される。これが、硬化膜の形成における未硬化の硬化性組成物(特に、チタンブラック)の現像除去性の向上に寄与すると推測される。
 チタンブラックは、紫外光から赤外光までの広範囲に亘る波長領域の光に対する遮光性に優れることから、上記したチタンブラック及びSi原子を含む被分散体(好ましくは含有比(Si/Ti)が質量換算で0.05以上であるもの)を用いて形成された硬化膜は優れた遮光性を発揮する。
 なお、被分散体中のSi原子とTi原子との含有比(Si/Ti)は、例えば、特開2013-249417号公報の段落0033に記載の方法(1-1)又は方法(1-2)を用いて測定できる。
 硬化性組成物を硬化して得られた硬化膜に含有される被分散体について、その被分散体中のSi原子とTi原子との含有比(Si/Ti)が0.05以上か否かを判断するには、特開2013-249417号公報の段落0035に記載の方法(2)を用いることができる。
Curing including this dispersion by adjusting the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion including titanium black and Si atoms to a suitable range (for example, 0.05 or more). When a cured film is formed using the curable composition, residues derived from the curable composition outside the region where the cured film is formed are reduced. The residue includes components derived from a curable composition such as titanium black particles and a resin component.
The reason why the residue is reduced is not yet clear, but the above-mentioned dispersed object tends to have a small particle diameter (for example, the particle diameter is 30 nm or less). By increasing the components contained, the adsorptivity of the entire film with the base is reduced. This is presumed to contribute to the improvement of the development removability of an uncured curable composition (particularly titanium black) in the formation of a cured film.
Titanium black is excellent in light-shielding property for light in a wide wavelength range from ultraviolet light to infrared light, and therefore the above-described dispersion to be dispersed containing titanium black and Si atoms (preferably the content ratio (Si / Ti) is A cured film formed using a material having a mass conversion of 0.05 or more exhibits excellent light shielding properties.
The content ratio (Si / Ti) of Si atoms to Ti atoms in the dispersion is, for example, the method (1-1) or the method (1-2) described in paragraph 0033 of JP2013-249417A ).
Whether the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.05 or more with respect to the dispersion to be contained in the cured film obtained by curing the curable composition Can be determined by the method (2) described in paragraph 0035 of JP2013-249417A.
 チタンブラック及びSi原子を含む被分散体において、チタンブラックは、上記したものを使用できる。
 この被分散体においては、チタンブラックと共に、分散性、着色性等を調整する目的で、Cu、Fe、Mn、V、及び、Ni等の複合酸化物、酸化コバルト、酸化鉄、カーボンブラック、並びに、アニリンブラック等からなる黒色顔料を、1種又は2種以上組み合わせて用いてもよい。この場合、全被分散体中の50質量%以上をチタンブラックからなる被分散体が占めることが好ましい。
 この被分散体においては、遮光性の調整等を目的として、本発明の効果を損なわない限りにおいて、チタンブラックと共に、他の着色剤(有機顔料及び/又は染料など)を所望により併用してもよい。
 以下、被分散体にSi原子を導入する際に用いられる材料について述べる。被分散体にSi原子を導入する際には、シリカなどのSi含有物質を用いればよい。
 用いうるシリカとしては、沈降シリカ、フュームドシリカ、コロイダルシリカ、及び、合成シリカなどを挙げることができ、これらを適宜選択して使用すればよい。
 更に、シリカ粒子の粒子径が硬化膜を形成した際に膜厚よりも小さい粒子径であると遮光性がより優れるため、シリカ粒子として微粒子タイプのシリカを用いることが好ましい。なお、微粒子タイプのシリカの例としては、例えば、特開2013-249417号公報の段落0039に記載のシリカが挙げられ、これらの内容は本明細書に組み込まれる。
In the dispersion containing titanium black and Si atoms, the above-described titanium black can be used.
In this dispersion, for the purpose of adjusting dispersibility, colorability, etc. together with titanium black, composite oxides such as Cu, Fe, Mn, V, and Ni, cobalt oxide, iron oxide, carbon black, and A black pigment composed of aniline black or the like may be used alone or in combination of two or more. In this case, it is preferable that 50% by mass or more of the total dispersion is occupied by the dispersion made of titanium black.
In this dispersion, other colorants (such as organic pigments and / or dyes) may be used in combination with titanium black, if desired, for the purpose of adjusting the light shielding property and the like, as long as the effects of the present invention are not impaired. Good.
Hereinafter, materials used for introducing Si atoms into the dispersion will be described. When Si atoms are introduced into the dispersion, a Si-containing material such as silica may be used.
Examples of silica that can be used include precipitated silica, fumed silica, colloidal silica, and synthetic silica. These may be appropriately selected and used.
Further, when the particle diameter of the silica particles is smaller than the film thickness when the cured film is formed, the light shielding property is more excellent. Therefore, it is preferable to use fine particle type silica as the silica particles. Examples of the fine particle type silica include silica described in paragraph 0039 of JP2013-249417A, and the contents thereof are incorporated in the present specification.
 また、顔料としては、タングステン化合物及び金属ホウ化物も使用できる。
 以下に、タングステン化合物及び金属ホウ化物について詳述する。
 タングステン化合物及び金属ホウ化物は、赤外線(波長が約800~1200nmの光)に対しては吸収が高く(すなわち、赤外線に対する遮光性(遮蔽性)が高く)、可視光に対しては吸収が低い赤外線遮蔽材である。このため、硬化性組成物は、タングステン化合物、及び/又は金属ホウ化物を含有することで、赤外領域における遮光性が高く、可視光領域における透光性が高いパターンを形成できる。
 タングステン化合物及び金属ホウ化物は、画像形成に用いられる、高圧水銀灯、KrF、ArFなどの露光に用いられる、可視域より短波の光に対しても吸収が小さい。このため、後述する重合性化合物、及び、アルカリ可溶性樹脂と組み合わされることにより、優れたパターンが得られるとともに、パターン形成において、現像残渣をより抑制できる。
Further, as the pigment, a tungsten compound and a metal boride can also be used.
Below, a tungsten compound and a metal boride are explained in full detail.
Tungsten compounds and metal borides have high absorption for infrared rays (light having a wavelength of about 800 to 1200 nm) (that is, high light-blocking properties (shielding properties) for infrared rays) and low absorption for visible light. Infrared shielding material. For this reason, a curable composition can form a pattern with high light-shielding property in an infrared region, and high translucency in a visible light region by containing a tungsten compound and / or a metal boride.
Tungsten compounds and metal borides have low absorption even for light having a wavelength shorter than the visible range, which is used for exposure of high pressure mercury lamps, KrF, ArF, and the like used for image formation. For this reason, while combining with the polymeric compound mentioned later and alkali-soluble resin, while being able to obtain the outstanding pattern, a development residue can be suppressed more in pattern formation.
 タングステン化合物としては、酸化タングステン系化合物、ホウ化タングステン系化合物、及び、硫化タングステン系化合物などが挙げられ、下記式(組成式)(I)で表される酸化タングステン系化合物が好ましい。
・・・(I)
 Mは金属、Wはタングステン、Oは酸素を表す。
 0.001≦x/y≦1.1
 2.2≦z/y≦3.0
Examples of the tungsten compound include a tungsten oxide compound, a tungsten boride compound, a tungsten sulfide compound, and the like, and a tungsten oxide compound represented by the following formula (composition formula) (I) is preferable.
M x W y O z (I)
M represents a metal, W represents tungsten, and O represents oxygen.
0.001 ≦ x / y ≦ 1.1
2.2 ≦ z / y ≦ 3.0
 Mの金属としては、例えば、アルカリ金属、アルカリ土類金属、Mg、Zr、Cr、Mn、Fe、Ru、Co、Rh、Ir、Ni、Pd、Pt、Cu、Ag、Au、Zn、Cd、Al、Ga、In、Tl、Sn、Pb、Ti、Nb、V、Mo、Ta、Re、Be、Hf、Os、及び、Biなどが挙げられるが、アルカリ金属であることが好ましい。Mの金属は1種でも2種以上でもよい。 As the metal of M, for example, alkali metal, alkaline earth metal, Mg, Zr, Cr, Mn, Fe, Ru, Co, Rh, Ir, Ni, Pd, Pt, Cu, Ag, Au, Zn, Cd, Al, Ga, In, Tl, Sn, Pb, Ti, Nb, V, Mo, Ta, Re, Be, Hf, Os, Bi, and the like can be given, and an alkali metal is preferable. 1 type or 2 types or more may be sufficient as the metal of M.
 Mはアルカリ金属であることが好ましく、Rb又はCsであることがより好ましく、Csであることが更に好ましい。 M is preferably an alkali metal, more preferably Rb or Cs, and even more preferably Cs.
 x/yが0.001以上であることにより、赤外線を十分に遮蔽することができ、1.1以下であることにより、タングステン化合物中に不純物相が生成されることをより確実に回避することできる。
 z/yが2.2以上であることにより、材料としての化学的安定性をより向上させることができ、3.0以下であることにより赤外線を十分に遮蔽することができる。
When x / y is 0.001 or more, infrared rays can be sufficiently shielded, and when it is 1.1 or less, generation of an impurity phase in the tungsten compound can be more reliably avoided. it can.
When z / y is 2.2 or more, chemical stability as a material can be further improved, and when it is 3.0 or less, infrared rays can be sufficiently shielded.
 上記式(I)で表される酸化タングステン系化合物の具体例としては、Cs0.33WO、Rb0.33WO、K0.33WO、及び、Ba0.33WOなどが挙げられ、Cs0.33WO又はRb0.33WOが好ましく、Cs0.33WOがより好ましい。 Specific examples of the tungsten oxide compound represented by the above formula (I) include Cs 0.33 WO 3 , Rb 0.33 WO 3 , K 0.33 WO 3 , Ba 0.33 WO 3 and the like. Cs 0.33 WO 3 or Rb 0.33 WO 3 is preferable, and Cs 0.33 WO 3 is more preferable.
 タングステン化合物は微粒子であることが好ましい。タングステン微粒子の平均一次粒子径は、800nm以下であることが好ましく、400nm以下であることがより好ましく、200nm以下であることが更に好ましい。平均一次粒子径がこのような範囲であることによって、タングステン微粒子が光散乱によって可視光を遮断しにくくなることから、可視光領域における透光性をより確実にすることができる。光散乱を回避する観点からは、平均一次粒子径は小さいほど好ましいが、製造時における取り扱い容易性などの理由から、タングステン微粒子の平均一次粒子径は、通常、1nm以上である。 The tungsten compound is preferably fine particles. The average primary particle diameter of the tungsten fine particles is preferably 800 nm or less, more preferably 400 nm or less, and even more preferably 200 nm or less. When the average primary particle diameter is in such a range, it becomes difficult for the tungsten fine particles to block visible light by light scattering, and thus the translucency in the visible light region can be further ensured. From the viewpoint of avoiding light scattering, the average primary particle size is preferably as small as possible. However, for reasons such as ease of handling during production, the average primary particle size of the tungsten fine particles is usually 1 nm or more.
 タングステン化合物は2種以上を使用することが可能である。 Two or more tungsten compounds can be used.
 タングステン化合物は市販品として入手可能であるが、例えば、酸化タングステン系化合物は、タングステン化合物を不活性ガス雰囲気又は還元性ガス雰囲気中で熱処理する方法により得ることができる(特許第4096205号公報を参照)。
 酸化タングステン系化合物は、例えば、住友金属鉱山株式会社製のYMF-02などのタングステン微粒子の分散物としても入手可能である。
Tungsten compounds are commercially available. For example, tungsten oxide compounds can be obtained by a method of heat-treating a tungsten compound in an inert gas atmosphere or a reducing gas atmosphere (see Japanese Patent No. 4096205). ).
The tungsten oxide compound is also available as a dispersion of tungsten fine particles such as YMF-02 manufactured by Sumitomo Metal Mining Co., Ltd.
 金属ホウ化物としては、ホウ化ランタン(LaB)、ホウ化プラセオジウム(PrB)、ホウ化ネオジウム(NdB)、ホウ化セリウム(CeB)、ホウ化イットリウム(YB)、ホウ化チタン(TiB)、ホウ化ジルコニウム(ZrB)、ホウ化ハフニウム(HfB)、ホウ化バナジウム(VB)、ホウ化タンタル(TaB)、ホウ化クロム(CrB、CrB)、ホウ化モリブデン(MoB、Mo、MoB)、及び、ホウ化タングステン(W)などの1種又は2種以上が挙げられ、ホウ化ランタン(LaB)が好ましい。 As the metal boride, lanthanum boride (LaB 6 ), praseodymium boride (PrB 6 ), neodymium boride (NdB 6 ), cerium boride (CeB 6 ), yttrium boride (YB 6 ), titanium boride ( TiB 2 ), zirconium boride (ZrB 2 ), hafnium boride (HfB 2 ), vanadium boride (VB 2 ), tantalum boride (TaB 2 ), chromium boride (CrB, CrB 2 ), molybdenum boride ( MoB 2, Mo 2 B 5, MoB), and, one or more, such as tungsten boride (W 2 B 5), and the like, lanthanum boride (LaB 6) is preferred.
 金属ホウ化物は微粒子であることが好ましい。金属ホウ化物微粒子の平均一次粒子径は、800nm以下であることが好ましく、300nm以下であることがより好ましく、100nm以下であることが更に好ましい。平均一次粒子径がこのような範囲であることによって、金属ホウ化物微粒子が光散乱によって可視光を遮断しにくくなることから、可視光領域における透光性をより確実にすることができる。光散乱を回避する観点からは、平均一次粒子径は小さいほど好ましいが、製造時における取り扱い容易性などの理由から、金属ホウ化物微粒子の平均一次粒子径は、通常、1nm以上である。 The metal boride is preferably fine particles. The average primary particle diameter of the metal boride fine particles is preferably 800 nm or less, more preferably 300 nm or less, and further preferably 100 nm or less. When the average primary particle diameter is in such a range, the metal boride fine particles are less likely to block visible light by light scattering, and thus the translucency in the visible light region can be further ensured. From the viewpoint of avoiding light scattering, the average primary particle size is preferably as small as possible. However, for reasons such as ease of handling during production, the average primary particle size of the metal boride fine particles is usually 1 nm or more.
 金属ホウ化物は2種以上を使用することが可能である。 Two or more metal borides can be used.
 金属ホウ化物は市販品として入手可能であり、例えば、住友金属鉱山株式会社製のKHF-7等の金属ホウ化物微粒子の分散物としても、入手可能である。 The metal boride is available as a commercial product, for example, as a dispersion of metal boride fine particles such as KHF-7 manufactured by Sumitomo Metal Mining Co., Ltd.
・・チタン窒化物含有粒子
 無機顔料としては、Fe原子を含むチタン窒化物含有粒子を用いることもできる。チタン窒化物含有粒子の製造には、通常、気相反応法が用いられ、具体的には電気炉法及び熱プラズマ法等が挙げられる。これらの製法の中でも、不純物の混入が少ない点、粒子径が揃いやすい点、及び、生産性が高い点などの理由から、熱プラズマ法が好ましい。
 熱プラズマの発生方法としては、直流アーク放電、多相アーク放電、高周波(RF)プラズマ、及び、ハイブリッドプラズマ等が挙げられ、電極からの不純物の混入が少ない高周波プラズマが好ましい。熱プラズマ法によるチタン窒化物含有粒子の具体的な製造方法としては、例えば、チタン粉末を高周波熱プラズマにより蒸発させ、窒素をキャリアガスとして装置内に導入し、冷却過程にてチタン粉末を窒化させ、チタン窒化物含有粒子を合成する方法等が挙げられる。なお、熱プラズマ法は、上記に限定されるものではない。
.. Titanium nitride-containing particles As the inorganic pigment, titanium nitride-containing particles containing Fe atoms can also be used. For production of titanium nitride-containing particles, a gas phase reaction method is usually used, and specific examples include an electric furnace method and a thermal plasma method. Among these production methods, the thermal plasma method is preferable because it is less contaminated with impurities, easily has a uniform particle diameter, and has high productivity.
Examples of the method for generating thermal plasma include direct current arc discharge, multiphase arc discharge, radio frequency (RF) plasma, hybrid plasma, and the like, and high frequency plasma with less impurities from the electrodes is preferable. As a specific method for producing titanium nitride-containing particles by the thermal plasma method, for example, titanium powder is evaporated by high-frequency thermal plasma, nitrogen is introduced into the apparatus as a carrier gas, and titanium powder is nitrided in the cooling process. And a method of synthesizing titanium nitride-containing particles. The thermal plasma method is not limited to the above.
 チタン窒化物含有粒子の製造方法としては、特に限定されないが、国際公開第2010/147098号の段落<0037>~<0089>に記載の製造方法を参照することができる。例えば、国際公開第2010/147098号のAg粉末に代えて、後述するFeを含む成分及び/又はSiを含む成分を用いて、これとチタン粉末材料(チタン粒子)とを混合したものを原料として、硬化性組成物に含まれるチタン窒化物含有粒子を製造することができる。 The method for producing titanium nitride-containing particles is not particularly limited, but the production methods described in paragraphs <0037> to <0089> of International Publication No. 2010/147098 can be referred to. For example, instead of the Ag powder of International Publication No. 2010/147098, using a component containing Fe and / or a component containing Si, which will be described later, and a mixture of this and a titanium powder material (titanium particles) as a raw material The titanium nitride-containing particles contained in the curable composition can be produced.
 チタン窒化物含有粒子の製造に使用するチタン粉末材料(チタン粒子)は、高純度のものであることが好ましい。チタン粉末材料は、特に限定されないが、チタン元素の純度が99.99%以上であるものが好ましく、99.999%以上のものがより好ましい。 The titanium powder material (titanium particles) used for the production of titanium nitride-containing particles is preferably of high purity. The titanium powder material is not particularly limited, but the titanium element preferably has a purity of 99.99% or more, more preferably 99.999% or more.
 チタン窒化物含有粒子の製造に使用するチタン粉末材料(チタン粒子)は、チタン原子以外の原子を含有する場合がある。チタン粉末材料に含まれ得る他の原子としては、例えばFe原子及びSi原子などが挙げられる。
 チタン粉末材料がFe原子を含有する場合には、Fe原子の含有量は、チタン粉末材料の全質量に対して、0.001質量%超であることが好ましい。
 チタン粉末材料がSi原子を含有する場合には、Si原子の含有量が、チタン粉末材料全質量に対して、0.002質量%超0.3質量%未満であることが好ましく、0.01~0.15質量%であることがより好ましく、0.02~0.1質量%であることが更に好ましい。Si原子の含有量が0.002質量%超であることで、硬化膜のパターニング性がより向上する。Si原子の含有量が0.3質量%未満であることで、得られるチタン窒化物含有粒子の最表層の極性がより安定化する。これにより、チタン窒化物含有粒子を分散させる際にチタン窒化物含有粒子への分散剤の吸着性が良化して、チタン窒化物含有粒子の未分散物が低減する。
 チタン窒化物含有粒子の製造に使用するチタン粉末材料(チタン粒子)中の水分は、チタン粉末材料の全質量に対して、1質量%未満であることが好ましく、0.1質量%未満であることがより好ましく、実質的に含まないことが更に好ましい。
The titanium powder material (titanium particles) used for the production of titanium nitride-containing particles may contain atoms other than titanium atoms. Examples of other atoms that can be contained in the titanium powder material include Fe atoms and Si atoms.
When the titanium powder material contains Fe atoms, the content of Fe atoms is preferably more than 0.001% by mass with respect to the total mass of the titanium powder material.
When the titanium powder material contains Si atoms, the content of Si atoms is preferably more than 0.002% by mass and less than 0.3% by mass with respect to the total mass of the titanium powder material. The content is more preferably from 0.15% by mass, and even more preferably from 0.02 to 0.1% by mass. When the content of Si atoms is more than 0.002% by mass, the patterning property of the cured film is further improved. When the content of Si atoms is less than 0.3% by mass, the polarity of the outermost layer of the obtained titanium nitride-containing particles is further stabilized. Thereby, when disperse | distributing a titanium nitride containing particle, the adsorptivity of a dispersing agent to a titanium nitride containing particle improves, and the non-dispersed material of a titanium nitride containing particle reduces.
The water content in the titanium powder material (titanium particles) used for the production of titanium nitride-containing particles is preferably less than 1% by mass and less than 0.1% by mass with respect to the total mass of the titanium powder material. It is more preferable that it is not substantially contained.
 チタン窒化物含有粒子は、熱プラズマ法を用いて得ることにより、CuKα線をX線源とした場合の(200)面に由来するピークの回折角2θ(詳細は後述する)を、42.6°超43.5°以下の範囲に調整することが容易になる。 The titanium nitride-containing particles are obtained by using a thermal plasma method, whereby a diffraction angle 2θ of a peak derived from the (200) plane when CuKα rays are used as an X-ray source (details will be described later) is 42.6. It becomes easy to adjust to a range of more than 4 ° to 43.5 °.
 チタン窒化物含有粒子にFe原子を含有させる方法としては、特に限定されず、例えば、上述したチタン窒化物含有粒子の原料として用いられるチタン粒子(チタン粉末)を得る段階において、Fe原子を導入する方法などが挙げられる。より詳細には、クロール法などによりチタンを製造する際に、反応容器としてステンレス鋼などのFe原子を含有する材料から構成されるものを用いたり、チタンを破砕する際のプレス機及び粉砕機の材料としてFe原子を含有するものを用いたりすることによって、チタン粒子の表面にFe原子を付着させることができる。
 チタン窒化物含有粒子の製造において熱プラズマ法を用いる場合には、原料であるチタン粒子の他に、Fe粒子及びFe酸化物などの成分を添加して、これらを熱プラズマ法によって窒化することによって、チタン窒化物含有粒子にFe原子を含有させることができる。
 チタン窒化物含有粒子中に含まれるFe原子は、イオン、金属化合物(錯化合物も含む)、金属間化合物、合金、酸化物、複合酸化物、窒化物、酸窒化物、硫化物及び酸硫化物など、いずれの形態で含まれていてもよい。チタン窒化物含有粒子中に含まれるFe原子は、結晶格子間位置の不純物として存在してもよいし、結晶粒界にアモルファス状態で不純物として存在してもよい。
The method for causing the titanium nitride-containing particles to contain Fe atoms is not particularly limited. For example, in the stage of obtaining titanium particles (titanium powder) used as a raw material for the above-described titanium nitride-containing particles, Fe atoms are introduced. The method etc. are mentioned. More specifically, when titanium is produced by the crawl method or the like, a reaction vessel made of a material containing Fe atoms such as stainless steel is used, or a press machine and a crusher for crushing titanium are used. By using a material containing Fe atoms as a material, Fe atoms can be attached to the surface of the titanium particles.
When the thermal plasma method is used in the production of titanium nitride-containing particles, components such as Fe particles and Fe oxide are added to the raw material titanium particles, and these are nitrided by the thermal plasma method. The titanium nitride-containing particles can contain Fe atoms.
Fe atoms contained in titanium nitride-containing particles are ions, metal compounds (including complex compounds), intermetallic compounds, alloys, oxides, composite oxides, nitrides, oxynitrides, sulfides, and oxysulfides. And may be included in any form. The Fe atom contained in the titanium nitride-containing particle may exist as an impurity at a position between crystal lattices, or may exist as an impurity in an amorphous state at a crystal grain boundary.
 チタン窒化物含有粒子中におけるFe原子の含有量は、チタン窒化物含有粒子全質量に対して、0.001質量%超0.4質量%未満であることが好ましい。なかでも、0.01~0.2質量%であることがより好ましく、0.02~0.1質量%であることが更に好ましい。チタン窒化物含有粒子中におけるFe原子の含有量は、ICP(Inductively Coupled Plasma;高周波誘導結合プラズマ)発光分光分析法により測定することができる。 The content of Fe atoms in the titanium nitride-containing particles is preferably more than 0.001% by mass and less than 0.4% by mass with respect to the total mass of the titanium nitride-containing particles. Of these, 0.01 to 0.2% by mass is more preferable, and 0.02 to 0.1% by mass is even more preferable. The content of Fe atoms in the titanium nitride-containing particles can be measured by ICP (Inductively Coupled Plasma) emission spectroscopy.
 チタン窒化物含有粒子は、更にSi原子(ケイ素原子)を含有することが好ましい。これにより、硬化膜のパターニング性がより向上する。Si原子を含有することによりパターニング性が向上する理由としては、上述したFe原子と同様と考えられる。
 チタン窒化物含有粒子中におけるSi原子の含有量は、チタン窒化物含有粒子全質量に対して、0.002質量%超0.3質量%未満であることが好ましく、0.01~0.15質量%であることがより好ましく、0.02~0.1質量%であることが更に好ましい。チタン窒化物含有粒子中におけるSi原子の含有量は、上述したFe原子と同様の方法によって測定することができる。
The titanium nitride-containing particles preferably further contain Si atoms (silicon atoms). Thereby, the patterning property of a cured film improves more. The reason why the patterning property is improved by containing Si atoms is considered to be the same as the above-described Fe atoms.
The content of Si atoms in the titanium nitride-containing particles is preferably more than 0.002% by mass and less than 0.3% by mass with respect to the total mass of the titanium nitride-containing particles, and 0.01 to 0.15 The mass is more preferably 0.02 to 0.1% by mass. The content of Si atoms in the titanium nitride-containing particles can be measured by the same method as that for Fe atoms.
 チタン窒化物含有粒子にSi原子を含有させる方法としては、特に限定されず、例えば、上述したチタン窒化物含有粒子の原料として用いられるチタン粒子(チタン粉末)を得る段階において、Si原子を導入する方法などが挙げられる。より詳細には、クロール法などによりチタンを製造する際に、反応容器としてSi原子を含有する材料から構成されるものを用いたり、チタンを破砕する際のプレス機及び粉砕機の材料としてSi原子を含有するものを用いたりすることによって、チタン粒子の表面にSi原子を付着させることができる。
 チタン窒化物含有粒子の製造において熱プラズマ法を用いる場合には、原料であるチタン粒子の他に、Si粒子、Si酸化物などの成分を添加して、これらを熱プラズマ法によって窒化することによって、チタン窒化物含有粒子にSi原子を含有させることができる。
 チタン窒化物含有粒子中に含まれるSi原子は、イオン、金属化合物(錯化合物も含む)、金属間化合物、合金、酸化物、複合酸化物、窒化物、酸窒化物、硫化物及び酸硫化物など、いずれの形態で含まれていてもよい。チタン窒化物含有粒子中に含まれるSi原子は、結晶格子間位置の不純物として存在していてもよいし、結晶粒界にアモルファス状態で不純物として存在していてもよい。
The method for incorporating Si atoms into the titanium nitride-containing particles is not particularly limited. For example, Si atoms are introduced at the stage of obtaining titanium particles (titanium powder) used as a raw material for the above-described titanium nitride-containing particles. The method etc. are mentioned. More specifically, when titanium is produced by a crawl method or the like, a reaction vessel made of a material containing Si atoms is used, or Si atom is used as a material for a press machine and a crusher when crushing titanium. Si atoms can be attached to the surface of the titanium particles.
When the thermal plasma method is used in the production of titanium nitride-containing particles, components such as Si particles and Si oxide are added in addition to the titanium particles as raw materials, and these are nitrided by the thermal plasma method. The titanium nitride-containing particles can contain Si atoms.
Si atoms contained in titanium nitride-containing particles are ions, metal compounds (including complex compounds), intermetallic compounds, alloys, oxides, complex oxides, nitrides, oxynitrides, sulfides, and oxysulfides. And may be included in any form. Si atoms contained in the titanium nitride-containing particles may be present as impurities at the position between the crystal lattices, or may be present as impurities in the amorphous state at the crystal grain boundaries.
 チタン窒化物含有粒子中のチタン原子(Ti原子)の含有量は、チタン窒化物含有粒子の全質量に対して、10~85質量%であることが好ましく、15~75質量%であることがより好ましく、20~70質量%であることが更に好ましい。チタン窒化物含有粒子中のTi原子の含有量は、ICP発光分光分析法により測定できる。
 チタン窒化物含有粒子中の窒素原子(N原子)の含有量は、チタン窒化物含有粒子の全質量に対して、3~60質量%であることが好ましく、5~50質量%であることがより好ましく、10~40質量%であることが更に好ましい。窒素原子の含有量は不活性ガス融解-熱伝導度法により分析することができる。
 チタン窒化物含有粒子は主成分としてチタン窒化物(TiN)を含み、通常、その合成時に酸素が混入する場合、及び、粒子径が小さい場合などに顕著になるが、粒子表面の酸化などにより、一部酸素原子を含有してもよい。
 チタン窒化物含有粒子中の酸素原子の含有量は、チタン窒化物含有粒子の全質量に対して、1~40質量%であることが好ましく、1~35質量%であることがより好ましく、5~30質量%であることが更に好ましい。酸素原子の含有量は、不活性ガス融解-赤外線吸収法により分析することができる。
The content of titanium atoms (Ti atoms) in the titanium nitride-containing particles is preferably 10 to 85% by mass and preferably 15 to 75% by mass with respect to the total mass of the titanium nitride-containing particles. More preferred is 20 to 70% by mass. The content of Ti atoms in the titanium nitride-containing particles can be measured by ICP emission spectroscopy.
The content of nitrogen atoms (N atoms) in the titanium nitride-containing particles is preferably 3 to 60% by mass and preferably 5 to 50% by mass with respect to the total mass of the titanium nitride-containing particles. More preferably, it is 10 to 40% by mass. The nitrogen atom content can be analyzed by an inert gas melting-thermal conductivity method.
Titanium nitride-containing particles contain titanium nitride (TiN) as a main component, and usually become noticeable when oxygen is mixed during the synthesis and when the particle diameter is small. A part of oxygen atoms may be contained.
The content of oxygen atoms in the titanium nitride-containing particles is preferably 1 to 40% by mass, more preferably 1 to 35% by mass with respect to the total mass of the titanium nitride-containing particles. More preferably, it is ˜30% by mass. The oxygen atom content can be analyzed by an inert gas melting-infrared absorption method.
 分散安定性及び遮光性の観点から、チタン窒化物含有粒子の比表面積は5~100m/gが好ましく、10~60m/gがより好ましい。比表面積はBET(Brunauer,Emmett,Teller)法により求めることができる。 From the viewpoint of dispersion stability and light-shielding property, the specific surface area of the titanium nitride-containing particles is preferably 5 ~ 100m 2 / g, more preferably 10 ~ 60m 2 / g. The specific surface area can be determined by the BET (Brunauer, Emmett, Teller) method.
 チタン窒化物含有粒子は、チタン窒化物粒子と金属微粒子とからなる複合微粒子であってもよい。
 複合微粒子とは、チタン窒化物粒子と金属微粒子とが複合化しているか、高度に分散した状態にある粒子のことをいう。ここで、「複合化している」とは、チタン窒化物と金属との両成分によって粒子が構成されていることを意味し、「高度に分散した状態」とは、チタン窒化物粒子と金属粒子とがそれぞれ個別で存在し、かつ少量成分の粒子が凝集せず均一、一様に分散していることを意味する。
 金属微粒子としては特に限定されず、例えば、銅、銀、金、白金、パラジウム、ニッケル、錫、コバルト、ロジウム、イリジウム、ルテニウム、オスミウム、マンガン、モリブデン、タングステン、ニオブ、タンタル、カルシウム、チタン、ビスマス、アンチモン及び鉛、並びにこれらの合金、から選ばれる少なくとも一種が挙げられる。中でも、銅、銀、金、白金、パラジウム、ニッケル、錫、コバルト、ロジウム及びイリジウム、並びにこれらの合金から選ばれる少なくとも1種であることが好ましく、銅、銀、金、白金及び錫、並びにこれらの合金から選ばれる少なくとも一種であることがより好ましい。耐湿性により優れる観点から、銀であることが好ましい。
 チタン窒化物含有粒子における金属微粒子の含有量としては、チタン窒化物含有粒子の全質量に対して5~50質量%であることが好ましく、10~30質量%であることがより好ましい。
The titanium nitride-containing particles may be composite fine particles composed of titanium nitride particles and metal fine particles.
Composite fine particles refer to particles in which titanium nitride particles and metal fine particles are complexed or in a highly dispersed state. Here, “composite” means that the particles are constituted by both components of titanium nitride and metal, and “highly dispersed state” means titanium nitride particles and metal particles. Means that the small amount of particles are uniformly and uniformly dispersed without aggregation.
The metal fine particles are not particularly limited. For example, copper, silver, gold, platinum, palladium, nickel, tin, cobalt, rhodium, iridium, ruthenium, osmium, manganese, molybdenum, tungsten, niobium, tantalum, calcium, titanium, bismuth. , Antimony and lead, and alloys thereof. Among these, at least one selected from copper, silver, gold, platinum, palladium, nickel, tin, cobalt, rhodium and iridium, and alloys thereof is preferable, and copper, silver, gold, platinum and tin, and these It is more preferable that it is at least one selected from these alloys. From the viewpoint of better moisture resistance, silver is preferred.
The content of the metal fine particles in the titanium nitride-containing particles is preferably 5 to 50% by mass, and more preferably 10 to 30% by mass with respect to the total mass of the titanium nitride-containing particles.
 チタン窒化物含有粒子は、CuKα線をX線源とした場合の(200)面に由来するピークの回折角2θが42.6°超43.5°以下であることが好ましい。このような特徴をもつチタン窒化物含有粒子を含有する硬化性組成物を用いて得られる硬化膜(例えば、ブラックマトリクスなど)は、高いOD(optical density)値を達成することが可能となる。 The titanium nitride-containing particles preferably have a diffraction angle 2θ of a peak derived from the (200) plane when CuKα rays are used as an X-ray source and more than 42.6 ° and 43.5 ° or less. A cured film (for example, a black matrix) obtained by using a curable composition containing titanium nitride-containing particles having such characteristics can achieve a high OD (optical density) value.
 CuKα線をX線源としてチタン化合物のX線回折スペクトルを測定した場合において、最も強度の強いピークとしてTiNは(200)面に由来するピークが2θ=42.5°近傍に、TiOは(200)面に由来するピークが2θ=43.4°近傍にみられる。一方、最も強度の強いピークではないがアナターゼ型TiOは(200)面に由来するピークは2θ=48.1°近傍に、ルチル型TiOは(200)面に由来するピークは2θ=39.2°近傍に観測される。よって、酸素原子を多く含有する結晶状態であるほどピーク位置は42.5°に対して高角度側にシフトする。 When an X-ray diffraction spectrum of a titanium compound is measured using CuKα rays as an X-ray source, TiN has a peak derived from the (200) plane as the strongest peak, and TiO has (200 ) A peak derived from the surface is seen in the vicinity of 2θ = 43.4 °. On the other hand, although not the strongest peak, the peak derived from the (200) plane of anatase TiO 2 is in the vicinity of 2θ = 48.1 °, and the peak derived from the (200) plane of rutile TiO 2 is 2θ = 39. Observed around 2 °. Therefore, the peak position shifts to the higher angle side with respect to 42.5 ° as the crystal state contains more oxygen atoms.
 チタン窒化物含有粒子の(200)面に由来するピークの回折角2θは、粒子の経時安定性の観点から、42.6°超43.5°未満であることが好ましく、更に、製造時のプロセスマージンが優れる観点から、42.7°以上43.5°未満がより好ましく、更に、粒子性能の再現性が優れる観点から、42.7°以上43.4°未満が更に好ましい。副成分として酸化チタンTiOを含有する場合、最も強度の強いピークとしてアナターゼ型TiO(101)に由来するピークが2θ=25.3°近傍に、ルチル型TiO(110)に由来するピークが2θ=27.4°近傍に見られる。しかし、TiOは白色でありブラックマトリクスの遮光性を低下させる要因となるため、ピークとして観察されない程度に低減されていることが好ましい。 The diffraction angle 2θ of the peak derived from the (200) plane of the titanium nitride-containing particle is preferably more than 42.6 ° and less than 43.5 ° from the viewpoint of the stability of the particle over time. From the viewpoint of excellent process margin, 42.7 ° or more and less than 43.5 ° is more preferable, and from the viewpoint of excellent reproducibility of particle performance, it is more preferably 42.7 ° or more and less than 43.4 °. When titanium oxide TiO 2 is contained as an accessory component, the peak derived from anatase TiO 2 (101) as the strongest peak is in the vicinity of 2θ = 25.3 °, and the peak derived from rutile TiO 2 (110). Is seen around 2θ = 27.4 °. However, since TiO 2 is white and causes a reduction in the light shielding properties of the black matrix, it is preferably reduced to such an extent that it is not observed as a peak.
 X線回折ピークの半値幅よりチタン窒化物含有粒子を構成する結晶子サイズを求めることができ、シェラーの式を用いて算出される。 The crystallite size constituting the titanium nitride-containing particles can be determined from the half width of the X-ray diffraction peak, and is calculated using Scherrer's formula.
 結晶子サイズは、20nm以上であることが好ましく、20~50nmであることがより好ましい。結晶子サイズが20nm以上のチタン窒化物含有粒子を用いてブラックマトリクスを形成することにより、硬化膜の透過光はそのピーク波長が475nm以下であるような青色から青紫色を呈し、高い遮光性と紫外線感度を併せ持つブラックマトリクスを得ることができる。結晶子サイズが20nm以上であることで、活性の有する粒子表面が粒子体積に対して占める割合が小さくなり良好なバランスとなり、チタン窒化物含有粒子の耐熱性及び/又は耐久性がより優れたものとなる。 The crystallite size is preferably 20 nm or more, and more preferably 20 to 50 nm. By forming a black matrix using titanium nitride-containing particles having a crystallite size of 20 nm or more, the transmitted light of the cured film exhibits a blue to blue purple color having a peak wavelength of 475 nm or less, and has high light-shielding properties. A black matrix having both ultraviolet sensitivity can be obtained. When the crystallite size is 20 nm or more, the proportion of the active particle surface with respect to the volume of the particle is reduced, providing a good balance, and the titanium nitride-containing particles have better heat resistance and / or durability. It becomes.
・・原子Aを含有する金属窒化物含有粒子
 また、無機顔料としては、金属窒化物含有粒子であって、所定の原子Aを含有する金属窒化物含有粒子を用いることもできる。
 上記金属窒化物含有粒子中の金属としては、例えばNb、V、Cr、Y、Zr、Nb、Hf、Ta、W、及びRe等が挙げられ、硬化性組成物がより優れた本発明の効果を有する点で、Nb、又はVがより好ましい。
 上記原子Aとしては、例えば、B、Al、Si、Mn、Fe、Ni、及びAg等が挙げられる。
 金属窒化物含有粒子が、上記原子Aを含有する場合、その含有量としては特に制限されないが、金属窒化物含有粒子中における原子Aの含有量が、0.00005~10質量%が好ましい。
..Metal nitride-containing particles containing atom A Further, as the inorganic pigment, metal nitride-containing particles that are metal nitride-containing particles and contain a predetermined atom A can also be used.
Examples of the metal in the metal nitride-containing particles include Nb, V, Cr, Y, Zr, Nb, Hf, Ta, W, and Re, and the effect of the present invention in which the curable composition is more excellent. Nb or V is more preferable in that
Examples of the atom A include B, Al, Si, Mn, Fe, Ni, and Ag.
When the metal nitride-containing particles contain the atom A, the content is not particularly limited, but the content of the atoms A in the metal nitride-containing particles is preferably 0.00005 to 10% by mass.
 上記原子Aを含有する金属窒化物含有粒子の製造方法としては、特に制限されず、公知の方法を用いることができる。
 金属窒化物含有粒子の製造には、通常、気相反応法が用いられ、具体的には電気炉法及び熱プラズマ法等が挙げられる。これらの製法の中でも、不純物の混入が少ない点、粒子径が揃いやすい点、及び、生産性が高い点等の理由から、熱プラズマ法が好ましい。
 熱プラズマ法による金属窒化物含有粒子の具体的な製造方法としては、例えば、金属微粒子製造装置(後述する「黒色複合微粒子製造装置」と同様の装置)を用いるものが挙げられる。金属微粒子製造装置は、例えば、熱プラズマを発生させるプラズマトーチ、金属原料粉末をプラズマトーチ内へ供給する材料供給装置、冷却機能を含有するチャンバ、生成された金属微粒子を分級するサイクロン、及び金属微粒子を回収する回収部によって構成される。
 なお、本明細書において、金属微粒子とは、金属元素を含有する一次粒子径が20nm~40μmの粒子を意図する。
The method for producing the metal nitride-containing particles containing the atom A is not particularly limited, and a known method can be used.
For the production of metal nitride-containing particles, a gas phase reaction method is usually used, and specific examples include an electric furnace method and a thermal plasma method. Among these production methods, the thermal plasma method is preferable because it is less contaminated with impurities, has a uniform particle diameter, and has high productivity.
As a specific method for producing metal nitride-containing particles by the thermal plasma method, for example, a method using a metal fine particle production apparatus (an apparatus similar to a “black composite fine particle production apparatus” described later) can be mentioned. The metal fine particle manufacturing apparatus includes, for example, a plasma torch that generates thermal plasma, a material supply device that supplies metal raw material powder into the plasma torch, a chamber that includes a cooling function, a cyclone that classifies the generated metal fine particles, and metal fine particles It is comprised by the collection | recovery part which collect | recovers.
In the present specification, the metal fine particles mean particles having a primary particle diameter of 20 nm to 40 μm containing a metal element.
・有機顔料
 有機顔料としては、例えば、カラーインデックス(C.I.)ピグメントイエロー1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214等、
 C.I.ピグメントオレンジ 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等、
 C.I.ピグメントレッド 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279等、
 C.I.ピグメントグリーン 7,10,36,37,58,59等、
 C.I.ピグメントバイオレット 1,19,23,27,32,37,42等、及び
 C.I.ピグメントブルー 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80等、
が挙げられる。なお、顔料は1種を単独で用いても、2種以上を併用してもよい。
Organic pigment Examples of the organic pigment include, for example, Color Index (CI) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37: 1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120, 123, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 161, 162, 164, 166, 16 7,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214, etc.
C. I. Pigment Orange 2, 5, 13, 16, 17: 1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73, etc. ,
C. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48: 1, 48: 2, 48: 3, 48: 4 49, 49: 1, 49: 2, 52: 1, 52: 2, 53: 1, 57: 1, 60: 1, 63: 1, 66, 67, 81: 1, 81: 2, 81: 3 83, 88, 90, 105, 112, 119, 122, 123, 144, 146, 149, 150, 155, 166, 168, 169, 170, 171, 172, 175, 176, 177, 178, 179, 184 185, 187, 188, 190, 200, 202, 206, 207, 208, 209, 210, 216, 220, 224, 226, 242, 246, 254, 255, 264, 270, 272, 279, etc.
C. I. Pigment Green 7, 10, 36, 37, 58, 59, etc.
C. I. Pigment violet 1, 19, 23, 27, 32, 37, 42, and the like; I. Pigment Blue 1, 2, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64, 66, 79, 80, etc.
Is mentioned. In addition, a pigment may be used individually by 1 type, or may use 2 or more types together.
(染料)
 染料としては、例えば特開昭64-90403号公報、特開昭64-91102号公報、特開平1-94301号公報、特開平6-11614号公報、特登2592207号、米国特許4808501号明細書、米国特許5667920号明細書、米国特許505950号明細書、特開平5-333207号公報、特開平6-35183号公報、特開平6-51115号公報、特開平6-194828号公報等に開示されている色素を使用できる。化学構造として区分すると、ピラゾールアゾ化合物、ピロメテン化合物、アニリノアゾ化合物、トリフェニルメタン化合物、アントラキノン化合物、ベンジリデン化合物、オキソノール化合物、ピラゾロトリアゾールアゾ化合物、ピリドンアゾ化合物、シアニン化合物、フェノチアジン化合物、及び、ピロロピラゾールアゾメチン化合物等が挙げられる。染料としては色素多量体を用いてもよい。色素多量体としては、特開2011-213925号公報、特開2013-041097号公報に記載されている化合物が挙げられる。分子内に重合性を有する重合性染料を用いてもよく、市販品としては、例えば、和光純薬株式会社製RDWシリーズが挙げられる。
(dye)
Examples of the dye include, for example, JP-A No. 64-90403, JP-A No. 64-91102, JP-A No. 1-94301, JP-A No. 6-11614, No. 2592207, and US Pat. No. 4,808,501. No. 5,667,920, U.S. Pat. No. 505950, JP-A-5-333207, JP-A-6-35183, JP-A-6-51115, JP-A-6-194828, etc. Can be used. When classified as chemical structures, pyrazole azo compounds, pyromethene compounds, anilinoazo compounds, triphenylmethane compounds, anthraquinone compounds, benzylidene compounds, oxonol compounds, pyrazolotriazole azo compounds, pyridone azo compounds, cyanine compounds, phenothiazine compounds, and pyrrolopyrazole azomethines Compounds and the like. A dye multimer may be used as the dye. Examples of the dye multimer include compounds described in JP2011-213925A and JP2013-041097A. A polymerizable dye having polymerizability in the molecule may be used, and examples of commercially available products include RDW series manufactured by Wako Pure Chemical Industries, Ltd.
(赤外線吸収剤)
 着色剤は、更に赤外線吸収剤を含有してもよい。
 赤外線吸収剤は、赤外領域(好ましくは、波長650~1300nm)の波長領域に吸収を有する化合物を意味する。赤外線吸収剤は、波長675~900nmの波長領域に極大吸収波長を有する化合物が好ましい。
 このような分光特性を有する着色剤としては、例えば、ピロロピロール化合物、銅化合物、シアニン化合物、フタロシアニン化合物、イミニウム化合物、チオール錯体系化合物、遷移金属酸化物系化合物、スクアリリウム化合物、ナフタロシアニン化合物、クオテリレン化合物、ジチオール金属錯体系化合物、及び、クロコニウム化合物等が挙げられる。
 フタロシアニン化合物、ナフタロシアニン化合物、イミニウム化合物、シアニン化合物、スクアリリウム化合物及びクロコニウム化合物は、特開2010-111750号公報の段落0010~0081に開示の化合物を使用してもよく、この内容は本明細書に組み込まれる。シアニン化合物は、例えば、「機能性色素、大河原信/松岡賢/北尾悌次郎/平嶋恒亮・著、講談社サイエンティフィック」を参酌することができ、この内容は本明細書に組み込まれる。
(Infrared absorber)
The colorant may further contain an infrared absorber.
The infrared absorber means a compound having absorption in the wavelength region in the infrared region (preferably, a wavelength of 650 to 1300 nm). The infrared absorber is preferably a compound having a maximum absorption wavelength in a wavelength region of 675 to 900 nm.
Examples of colorants having such spectral characteristics include pyrrolopyrrole compounds, copper compounds, cyanine compounds, phthalocyanine compounds, iminium compounds, thiol complex compounds, transition metal oxide compounds, squarylium compounds, naphthalocyanine compounds, quaterylenes. Examples include compounds, dithiol metal complex compounds, and croconium compounds.
As the phthalocyanine compound, naphthalocyanine compound, iminium compound, cyanine compound, squarylium compound, and croconium compound, the compounds disclosed in paragraphs 0010 to 0081 of JP 2010-1111750 A may be used. Incorporated. As the cyanine compound, for example, “functional pigment, Shin Okawara / Ken Matsuoka / Keijiro Kitao / Kensuke Hirashima, written by Kodansha Scientific”, the contents of which are incorporated herein.
 上記分光特性を有する着色剤として、特開平07-164729号公報の段落0004~0016に開示の化合物及び/又は特開2002-146254号公報の段落0027~0062に開示の化合物、特開2011-164583号公報の段落0034~0067に開示のCu及び/又はPを含む酸化物の結晶子からなり数平均凝集粒子径が5~200nmである近赤外線吸収粒子を使用することもできる。 As the colorant having the above-mentioned spectral characteristics, compounds disclosed in paragraphs 0004 to 0016 of JP-A-07-164729 and / or compounds disclosed in paragraphs 0027 to 0062 of JP-A-2002-146254, JP-A-2011-16483 It is also possible to use near-infrared absorbing particles comprising a crystallite of an oxide containing Cu and / or P disclosed in paragraphs 0034 to 0067 of the publication and having a number average aggregate particle diameter of 5 to 200 nm.
 波長675~900nmの波長領域に極大吸収波長を有する化合物としては、シアニン化合物、ピロロピロール化合物、スクアリリウム化合物、フタロシアニン化合物、及びナフタロシアニン化合物からなる群から選択される少なくとも1種が好ましい。
 赤外線吸収剤は、25℃の水に1質量%以上溶解する化合物であることが好ましく、25℃の水に10質量%以上溶解する化合物がより好ましい。このような化合物を用いることで、耐溶剤性が良化する。
 ピロロピロール化合物は、特開2010-222557号公報の段落0049~0062を参酌でき、この内容は本明細書に組み込まれることとする。シアニン化合物及びスクアリリウム化合物は、国際公開2014/088063号公報の段落0022~0063、国際公開2014/030628号公報の段落0053~0118、特開2014-59550号公報の段落0028~0074、国際公開2012/169447号公報の段落0013~0091、特開2015-176046号公報の段落0019~0033、特開2014-63144号公報の段落0053~0099、特開2014-52431号公報の段落0085~0150、特開2014-44301号公報の段落0076~0124、特開2012-8532号公報の段落0045~0078、特開2015-172102号公報の段落0027~0067、特開2015-172004号公報の段落0029~0067、特開2015-40895号公報の段落0029~0085、特開2014-126642号公報の段落0022~0036、特開2014-148567号公報の段落0011~0017、特開2015-157893号公報の段落0010~0025、特開2014-095007号公報の段落0013~0026、特開2014-80487号公報の段落0013~0047、及び特開2013-227403号公報の段落0007~0028等を参酌でき、この内容は本明細書に組み込まれる。
The compound having a maximum absorption wavelength in the wavelength region of 675 to 900 nm is preferably at least one selected from the group consisting of a cyanine compound, a pyrrolopyrrole compound, a squarylium compound, a phthalocyanine compound, and a naphthalocyanine compound.
The infrared absorber is preferably a compound that dissolves 1% by mass or more in 25 ° C. water, and more preferably a compound that dissolves 10% by mass or more in 25 ° C. water. By using such a compound, the solvent resistance is improved.
The pyrrolopyrrole compound can be referred to paragraphs 0049 to 0062 of JP 2010-222557 A, the contents of which are incorporated herein. The cyanine compounds and squarylium compounds are disclosed in paragraphs 0022 to 0063 of International Publication No. 2014/088063, paragraphs 0053 to 0118 of International Publication No. 2014/030628, paragraphs 0028 to 0074 of JP 2014-59550 A, and International Publication No. 2012/0074. 169447, paragraphs 0013 to 0091, JP2015-176046, paragraphs 0019 to 0033, JP2014-63144, paragraphs 0053 to 00099, JP201452431, paragraphs 0085 to 0150, JP Paragraphs 0076 to 0124 of Japanese Patent Application Laid-Open No. 2014-44301, Paragraphs 0045 to 0078 of Japanese Patent Application Laid-Open No. 2012-8532, Paragraphs 0027 to 0067 of Japanese Patent Application Laid-Open No. 2015-172102, and Paragraph 002 of Japanese Patent Application Laid-Open No. 2015-172004. To 0067, paragraphs 0029 to 0085 of JP-A-2015-40895, paragraphs 0022 to 0036 of JP-A-2014-126642, paragraphs 0011 to 0017 of JP-A-2014-148567, and JP-A-2015-157893. Paragraphs 0010 to 0025, paragraphs 0013 to 0026 of JP 2014-095007 A, paragraphs 0013 to 0047 of JP 2014-80487 A, paragraphs 0007 to 0028 of JP 2013-227403 A, and the like can be referred to. The contents are incorporated herein.
 赤外線吸収剤は、下記式1~3で表される化合物からなる群から選択される少なくとも1種が好ましい。
式1
Figure JPOXMLDOC01-appb-C000018

 式1中、A1及びA2は、それぞれ独立に、アリール基、ヘテロアリール基又は下記式1-Aで表される基を表す。
式1-A
Figure JPOXMLDOC01-appb-C000019

 式1-A中、Z1Aは、含窒素複素環を形成する非金属原子団を表し、R2Aは、アルキル基、アルケニル基、又はアラルキル基を表し、dは、0、又は1を表し、波線は連結手を表す。
式2
Figure JPOXMLDOC01-appb-C000020

 式2中、R1a及びR1bは、それぞれ独立に、アルキル基、アリール基、又はヘテロアリール基を表し、
 R2~R5は、それぞれ独立に、水素原子、又は置換基を表し、R2とR3、R4とR5は、それぞれ結合して環を形成していてもよく、
 R6、及びR7は、それぞれ独立に、水素原子、アルキル基、アリール基、ヘテロアリール基、-BRAB、又は金属原子を表し、RA、及びRBは、各々独立に、水素原子、又は置換基を表し、
 R6は、R1a、又はR3と、共有結合、又は配位結合していてもよく、R7は、R1b、又はR5と、共有結合、又は配位結合していてもよい。
式3
Figure JPOXMLDOC01-appb-C000021

 式3中、Z1、及びZ2は、それぞれ独立に、縮環してもよい5員、又は6員の含窒素複素環を形成する非金属原子団であり、
 R101、及びR102は、それぞれ独立に、アルキル基、アルケニル基、アルキニル基、アラルキル基、又はアリール基を表し、
 L1は、奇数個のメチンからなるメチン鎖を表し、
 a、及びbは、それぞれ独立に、0、又は1であり、
 aが0の場合は、炭素原子と窒素原子とが二重結合で結合し、bが0の場合は、炭素原子と窒素原子とが単結合で結合し、
 式中のCyで表される部位がカチオン部である場合、X1はアニオンを表し、cは電荷のバランスを取るために必要な数を表し、式中のCyで表される部位がアニオン部である場合、X1はカチオンを表し、cは電荷のバランスを取るために必要な数を表し、式中のCyで表される部位の電荷が分子内で中和されている場合、cは0である。
The infrared absorber is preferably at least one selected from the group consisting of compounds represented by the following formulas 1 to 3.
Formula 1
Figure JPOXMLDOC01-appb-C000018

In Formula 1, A 1 and A 2 each independently represent an aryl group, a heteroaryl group, or a group represented by Formula 1-A below.
Formula 1-A
Figure JPOXMLDOC01-appb-C000019

In Formula 1-A, Z 1A represents a nonmetallic atomic group that forms a nitrogen-containing heterocyclic ring, R 2A represents an alkyl group, an alkenyl group, or an aralkyl group, d represents 0 or 1, A wavy line represents a connecting hand.
Formula 2
Figure JPOXMLDOC01-appb-C000020

In Formula 2, R 1a and R 1b each independently represent an alkyl group, an aryl group, or a heteroaryl group,
R 2 to R 5 each independently represents a hydrogen atom or a substituent, and R 2 and R 3 , R 4 and R 5 may be bonded to each other to form a ring,
R 6 and R 7 each independently represents a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, —BR A R B , or a metal atom, and R A and R B each independently represent a hydrogen atom Represents an atom or substituent,
R 6 may be covalently or coordinated with R 1a or R 3, and R 7 may be covalently or coordinated with R 1b or R 5 .
Formula 3
Figure JPOXMLDOC01-appb-C000021

In Formula 3, Z 1 and Z 2 are each independently a nonmetallic atomic group that forms a 5-membered or 6-membered nitrogen-containing heterocyclic ring that may be condensed,
R 101 and R 102 each independently represents an alkyl group, an alkenyl group, an alkynyl group, an aralkyl group, or an aryl group,
L 1 represents a methine chain composed of an odd number of methines;
a and b are each independently 0 or 1,
When a is 0, a carbon atom and a nitrogen atom are bonded by a double bond, and when b is 0, a carbon atom and a nitrogen atom are bonded by a single bond,
When the site represented by Cy in the formula is a cation moiety, X 1 represents an anion, c represents the number necessary for balancing the charge, and the site represented by Cy in the formula is an anion moiety. X 1 represents a cation, c represents a number necessary to balance the charge, and when the charge at the site represented by Cy in the formula is neutralized in the molecule, c is 0.
(顔料誘導体)
 硬化性組成物は、顔料誘導体を含有してもよい。顔料誘導体は、有機顔料の一部分を、酸性基、塩基性基又はフタルイミドメチル基で置換した構造を有する化合物が好ましい。顔料誘導体としては、着色剤Aの分散性及び分散安定性の観点から、酸性基又は塩基性基を有する顔料誘導体が好ましい。特に好ましくは、塩基性基を有する顔料誘導体である。上述した樹脂(分散剤)と、顔料誘導体との組み合わせは、分散剤が酸性分散剤で、顔料誘導体が塩基性基を有する組み合わせが好ましい。
(Pigment derivative)
The curable composition may contain a pigment derivative. The pigment derivative is preferably a compound having a structure in which a part of an organic pigment is substituted with an acidic group, a basic group or a phthalimidomethyl group. As the pigment derivative, from the viewpoint of dispersibility and dispersion stability of the colorant A, a pigment derivative having an acidic group or a basic group is preferable. Particularly preferred are pigment derivatives having a basic group. The combination of the resin (dispersant) and the pigment derivative described above is preferably a combination in which the dispersant is an acidic dispersant and the pigment derivative has a basic group.
 顔料誘導体を構成するための有機顔料としては、ジケトピロロピロール系顔料、アゾ系顔料、フタロシアニン系顔料、アントラキノン系顔料、キナクリドン系顔料、ジオキサジン系顔料、ペリノン系顔料、ペリレン系顔料、チオインジゴ系顔料、イソインドリン系顔料、イソインドリノン系顔料、キノフタロン系顔料、スレン系顔料、及び、金属錯体系顔料等が挙げられる。
 顔料誘導体が有する酸性基としては、スルホン酸基若しくはその塩、又は、カルボン酸基若しくはその塩が好ましく、カルボン酸基又はスルホン酸基がより好ましく、スルホン酸基が更に好ましい。顔料誘導体が有する塩基性基としては、アミノ基が好ましく、三級アミノ基がより好ましい。
Examples of the organic pigment for constituting the pigment derivative include diketopyrrolopyrrole pigments, azo pigments, phthalocyanine pigments, anthraquinone pigments, quinacridone pigments, dioxazine pigments, perinone pigments, perylene pigments, thioindigo pigments , Isoindoline pigments, isoindolinone pigments, quinophthalone pigments, selenium pigments, metal complex pigments, and the like.
The acidic group possessed by the pigment derivative is preferably a sulfonic acid group or a salt thereof, or a carboxylic acid group or a salt thereof, more preferably a carboxylic acid group or a sulfonic acid group, and still more preferably a sulfonic acid group. As a basic group which a pigment derivative has, an amino group is preferable and a tertiary amino group is more preferable.
 硬化性組成物が顔料誘導体を含有する場合、顔料誘導体の含有量は、顔料の質量に対し、1~30質量%が好ましく、3~20質量%がより好ましい。顔料誘導体は、1種のみを用いてもよいし、2種以上を併用してもよい。 When the curable composition contains a pigment derivative, the content of the pigment derivative is preferably 1 to 30% by mass and more preferably 3 to 20% by mass with respect to the mass of the pigment. Only one pigment derivative may be used, or two or more pigment derivatives may be used in combination.
〔重合性化合物〕
 硬化性組成物は重合性化合物を含有する。本明細書において重合性化合物とは、重合性基を含有する化合物を意図し、樹脂(分散剤、及び、バインダー樹脂)とは異なる成分を意図する。
(Polymerizable compound)
The curable composition contains a polymerizable compound. In the present specification, the polymerizable compound means a compound containing a polymerizable group and a component different from the resin (dispersant and binder resin).
 硬化性組成物中における重合性化合物の含有量としては特に制限されないが、一般に、硬化性組成物の全固形分に対して、5~30質量%が好ましい。重合性化合物は、1種を単独で用いても、2種以上を併用してもよい。2種以上の重合性化合物を併用する場合には、合計含有量が上記範囲内であることが好ましい。 The content of the polymerizable compound in the curable composition is not particularly limited, but is generally preferably 5 to 30% by mass with respect to the total solid content of the curable composition. A polymeric compound may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of polymeric compounds together, it is preferable that total content is in the said range.
 重合性化合物は、エチレン性不飽和結合を含有する基を1個以上含有する化合物が好ましく、2個以上含有する化合物がより好ましく、3個以上含有することが更に好ましく、5個以上含有することが特に好ましい。上限は、例えば、15個以下である。エチレン性不飽和結合を含有する基としては、例えば、ビニル基、(メタ)アリル基、及び、(メタ)アクリロイル基等が挙げられる。 The polymerizable compound is preferably a compound containing at least one group containing an ethylenically unsaturated bond, more preferably a compound containing 2 or more, further preferably containing 3 or more, and containing 5 or more. Is particularly preferred. The upper limit is 15 or less, for example. Examples of the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
 重合性化合物としては、例えば、特開2008-260927号公報の段落0050、及び、特開2015-68893号公報の段落0040に記載されている化合物を用いることができ、上記の内容は本明細書に組み込まれる。 As the polymerizable compound, for example, compounds described in paragraph 0050 of JP2008-260927A and paragraph 0040 of JP2015-68893A can be used. Incorporated into.
 重合性化合物としては、例えば、モノマー、プレポリマー、オリゴマー、及び、これらの混合物、並びに、これらの多量体等の化学的形態のいずれであってもよい。
 重合性化合物は、3~15官能の(メタ)アクリレート化合物が好ましく、3~6官能の(メタ)アクリレート化合物がより好ましい。
As a polymeric compound, any of chemical forms, such as a monomer, a prepolymer, an oligomer, these mixtures, these multimers, etc., may be sufficient, for example.
The polymerizable compound is preferably a 3 to 15 functional (meth) acrylate compound, more preferably a 3 to 6 functional (meth) acrylate compound.
 重合性化合物としては、エチレン性不飽和結合を含有する基を1個以上含有する、常圧下で沸点が100℃以上の化合物が好ましい。例えば、特開2013-29760号公報の段落0227、特開2008-292970号公報の段落0254~0257に記載の化合物を用いることができ、この内容は本明細書に組み込まれる。 As the polymerizable compound, a compound having at least one group containing an ethylenically unsaturated bond and having a boiling point of 100 ° C. or higher under normal pressure is preferable. For example, compounds described in paragraph 0227 of JP2013-29760A and paragraphs 0254 to 0257 of JP2008-292970A can be used, the contents of which are incorporated herein.
 重合性化合物としては、例えば、ジペンタエリスリトールトリアクリレート(市販品としてはKAYARAD D-330;日本化薬社製)、ジペンタエリスリトールテトラアクリレート(市販品としてはKAYARAD D-320;日本化薬社製)、ジペンタエリスリトールペンタ(メタ)アクリレート(市販品としてはKAYARAD D-310;日本化薬社製)、ジペンタエリスリトールヘキサ(メタ)アクリレート(市販品としてはKAYARAD DPHA;日本化薬社製、A-DPH-12E;新中村化学社製)、及びこれらの(メタ)アクリロイル基がエチレングリコール残基又はプロピレングリコール残基を介している構造(例えば、サートマー社から市販されている、SR454、SR499)が好ましい。これらのオリゴマータイプを用いることもできる。また、NKエステルA-TMMT(ペンタエリスリトールテトラアクリレート、新中村化学社製)、及び、KAYARAD RP-1040(日本化薬社製)等を用いることもできる。 Examples of the polymerizable compound include dipentaerythritol triacrylate (commercially available product KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (commercially available product KAYARAD D-320; manufactured by Nippon Kayaku Co., Ltd.). ), Dipentaerythritol penta (meth) acrylate (commercially available KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (commercially available KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd., A -DPH-12E (manufactured by Shin-Nakamura Chemical Co., Ltd.), and structures in which these (meth) acryloyl groups are mediated by ethylene glycol or propylene glycol residues (for example, commercially available from Sartomer, SR454, SR499) Is preferred. These oligomer types can also be used. Moreover, NK ester A-TMMT (pentaerythritol tetraacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.), KAYARAD RP-1040 (manufactured by Nippon Kayaku Co., Ltd.), and the like can also be used.
 重合性化合物は、カルボン酸基、スルホン酸基、又は、リン酸基等の酸基を含有していてもよい。酸基を含有する重合性化合物としては、脂肪族ポリヒドロキシ化合物と不飽和カルボン酸とのエステルが好ましく、脂肪族ポリヒドロキシ化合物の未反応の水酸基に非芳香族カルボン酸無水物を反応させて酸基を含有させた重合性化合物がより好ましく、このエステルにおいて、脂肪族ポリヒドロキシ化合物がペンタエリスリトール及び/又はジペンタエリスリトールである化合物が更に好ましい。
 上記重合性化合物の市販品としては、例えば、東亜合成社製のアロニックスTO-2349、M-305、M-510、及び、M-520等が挙げられる。
The polymerizable compound may contain an acid group such as a carboxylic acid group, a sulfonic acid group, or a phosphoric acid group. As the polymerizable compound containing an acid group, an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid is preferable, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound. A polymerizable compound containing a group is more preferable, and in this ester, a compound in which the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol is further preferable.
Examples of commercially available polymerizable compounds include Aronix TO-2349, M-305, M-510, and M-520 manufactured by Toa Gosei Co., Ltd.
 酸基を含有する重合性化合物の酸価としては、0.1~40mgKOH/gが好ましく、5~30mgKOH/gがより好ましい。重合性化合物の酸価が0.1mgKOH/g以上であると、硬化性組成物は、より優れた現像性(アルカリ現像液により溶解しやすい特性)を有し、40mgKOH/g以下であると、重合性化合物の製造及び/又は取扱い上、有利であり、かつ、より優れた光重合性を有する。結果として、硬化性組成物がより優れた硬化性を有する。 The acid value of the polymerizable compound containing an acid group is preferably from 0.1 to 40 mgKOH / g, more preferably from 5 to 30 mgKOH / g. When the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the curable composition has more excellent developability (characteristic that is easily dissolved in an alkali developer), and is 40 mgKOH / g or less. It is advantageous in the production and / or handling of the polymerizable compound and has a better photopolymerizability. As a result, the curable composition has better curability.
 重合性化合物としては、カプロラクトン構造を含有する化合物が好ましい。
 カプロラクトン構造を含有する化合物としては、分子内にカプロラクトン構造を含有する化合物であれば、特に制限されず、公知の化合物を用いることができる。
 カプロラクトン構造を含有する化合物としては、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、及び、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸及びε-カプロラクトンとをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートが挙げられる。なかでも下記式(Z-1)で表されるカプロラクトン構造を含有する化合物が好ましい。
As the polymerizable compound, a compound containing a caprolactone structure is preferable.
The compound containing a caprolactone structure is not particularly limited as long as it is a compound containing a caprolactone structure in the molecule, and a known compound can be used.
Examples of the compound containing a caprolactone structure include trimethylolethane, ditrimethylolethane, trimethylolpropane, ditrimethylolpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, and trimethylolmelamine. Examples thereof include ε-caprolactone-modified polyfunctional (meth) acrylate obtained by esterifying a polyhydric alcohol, (meth) acrylic acid and ε-caprolactone. Of these, compounds containing a caprolactone structure represented by the following formula (Z-1) are preferred.
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 式(Z-1)中、6個のRは全てが下記式(Z-2)で表される基であるか、又は6個のRのうち1~5個が下記式(Z-2)で表される基であり、残余が下記式(Z-3)で表される基である。 In the formula (Z-1), all six R are groups represented by the following formula (Z-2), or 1 to 5 of the six R are represented by the following formula (Z-2) And the remainder is a group represented by the following formula (Z-3).
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
 式(Z-2)中、Rは水素原子又はメチル基を表し、mは1又は2であり、「*」は結合位置を表す。 In formula (Z-2), R 1 represents a hydrogen atom or a methyl group, m is 1 or 2, and “*” represents a bonding position.
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
 式(Z-3)中、Rは水素原子又はメチル基を表し、「*」は結合位置を表す。 In formula (Z-3), R 1 represents a hydrogen atom or a methyl group, and “*” represents a bonding position.
 カプロラクトン構造を含有する重合性化合物は、例えば、日本化薬からKAYARAD DPCAシリーズとして市販されており、DPCA-20(上記式(Z-1)~(Z-3)においてmが1、式(Z-2)で表される基の数が2、Rが全て水素原子である化合物)、DPCA-30(同式において、mが1、式(Z-2)で表される基の数が3、Rが全て水素原子である化合物)、DPCA-60(同式において、mが1、式(Z-2)で表される基の数が6、Rが全て水素原子である化合物)、及び、DPCA-120(同式においてmが2、式(Z-2)で表される基の数が6、Rが全て水素原子である化合物)等が挙げられる。 Polymerizable compounds containing a caprolactone structure are commercially available, for example, from Nippon Kayaku as the KAYARAD DPCA series. -2) is a compound in which the number of groups represented by 2 and R 1 are all hydrogen atoms), DPCA-30 (wherein m is 1, and the number of groups represented by formula (Z-2) is 3, compound in which R 1 is all hydrogen atoms), DPCA-60 (in the formula, m is 1, the number of groups represented by formula (Z-2) is 6, and R 1 is all hydrogen atoms) And DPCA-120 (a compound in which m is 2, the number of groups represented by formula (Z-2) is 6, and all R 1 are hydrogen atoms).
 重合性化合物としては、下記式(Z-4)又は(Z-5)で表される化合物を用いることもできる。 As the polymerizable compound, a compound represented by the following formula (Z-4) or (Z-5) can also be used.
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
 式(Z-4)及び(Z-5)中、Eは、それぞれ独立に、-((CHCHO)-、又は、((CHCH(CH)O)-を表す。yは、それぞれ独立に0~10の整数を表す。Xは、それぞれ独立に、(メタ)アクリロイル基、水素原子、又はカルボン酸基を表す。
 式(Z-4)中、(メタ)アクリロイル基の合計は3個又は4個であり、mはそれぞれ独立に0~10の整数を表し、各mの合計は0~40の整数である。
 式(Z-5)中、(メタ)アクリロイル基の合計は5個又は6個であり、nはそれぞれ独立に0~10の整数を表し、各nの合計は0~60の整数である。
In formulas (Z-4) and (Z-5), each E independently represents — ((CH 2 ) y CH 2 O) — or ((CH 2 ) y CH (CH 3 ) O) —. Represents. y independently represents an integer of 0 to 10. X represents a (meth) acryloyl group, a hydrogen atom, or a carboxylic acid group each independently.
In formula (Z-4), the total number of (meth) acryloyl groups is 3 or 4, each m independently represents an integer of 0 to 10, and the total of each m is an integer of 0 to 40.
In formula (Z-5), the total number of (meth) acryloyl groups is 5 or 6, each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60.
 式(Z-4)中、mは、0~6の整数が好ましく、0~4の整数がより好ましい。
 各mの合計は、2~40の整数が好ましく、2~16の整数がより好ましく、4~8の整数が更に好ましい。
 式(Z-5)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。
 各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が更に好ましい。
 式(Z-4)又は式(Z-5)中の-((CHCHO)-、又は、((CHCH(CH)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
In the formula (Z-4), m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
The total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and still more preferably an integer of 4 to 8.
In the formula (Z-5), n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
The total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and still more preferably an integer of 6 to 12.
In formula (Z-4) or formula (Z-5), — ((CH 2 ) y CH 2 O) — or ((CH 2 ) y CH (CH 3 ) O) — A form in which the terminal is bonded to X is preferred.
 式(Z-4)又は式(Z-5)で表される化合物は1種単独で用いてもよいし、2種以上併用してもよい。特に、式(Z-5)において、6個のX全てがアクリロイル基である形態、式(Z-5)において、6個のX全てがアクリロイル基である化合物と、6個のXのうち、少なくとも1個が水素原子ある化合物とを併用することが好ましい。上記化合物を含有する硬化性組成物は、より優れた現像性を有する。 The compounds represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more. In particular, in formula (Z-5), all six Xs are acryloyl groups, in formula (Z-5), all six Xs are acryloyl groups, and among six Xs, It is preferable to use in combination with a compound having at least one hydrogen atom. The curable composition containing the above compound has more excellent developability.
 式(Z-4)又は式(Z-5)で表される化合物の重合性化合物中における全含有量は、20質量%以上が好ましく、50質量%以上がより好ましい。
 式(Z-4)又は式(Z-5)で表される化合物のなかでも、ペンタエリスリトール誘導体及び/又はジペンタエリスリトール誘導体がより好ましい。
The total content of the compound represented by formula (Z-4) or formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
Of the compounds represented by the formula (Z-4) or the formula (Z-5), a pentaerythritol derivative and / or a dipentaerythritol derivative are more preferable.
 重合性化合物は、カルド骨格を含有してもよい。
 カルド骨格を含有する重合性化合物としては、9,9-ビスアリールフルオレン骨格を含有する重合性化合物が好ましい。
 カルド骨格を含有する重合性化合物としては、特に制限されないが、例えば、オンコートEXシリーズ(長瀬産業社製)及びオグソール(大阪ガスケミカル社製)等が挙げられる。
The polymerizable compound may contain a cardo skeleton.
As the polymerizable compound containing a cardo skeleton, a polymerizable compound containing a 9,9-bisarylfluorene skeleton is preferable.
Although it does not restrict | limit especially as a polymeric compound containing a cardo frame | skeleton, For example, oncoat EX series (made by Nagase Sangyo Co., Ltd.), Og sole (made by Osaka Gas Chemical Co., Ltd.), etc. are mentioned.
〔任意成分〕
 硬化性組成物は、本発明の効果を奏する範囲内において、他の成分を含有してもよい。他の成分としては、例えば、樹脂、重合禁止剤、溶剤、界面活性剤、紫外線吸収剤、及び、シランカップリング剤等が挙げられる。以下では、硬化性組成物中に含有される任意成分について詳述する。
[Optional ingredients]
The curable composition may contain other components as long as the effects of the present invention are achieved. Examples of other components include a resin, a polymerization inhibitor, a solvent, a surfactant, an ultraviolet absorber, and a silane coupling agent. Below, the arbitrary component contained in a curable composition is explained in full detail.
<その他の重合開始剤>
 硬化性組成物は、特定オキシム化合物以外の重合開始剤を含有してもよい。特定オキシム化合物以外の重合開始剤としては例えば、熱重合開始剤、及び、光重合開始剤等が挙げられる。硬化性組成物中におけるその他の重合開始剤の含有量としては特に制限されないが、一般に、硬化性組成物の全固形分に対して、0.1~5質量%が好ましい。その他の重合開始剤は、1種を単独で用いても、2種以上を併用してもよい。2種以上のその他の重合開始剤を併用する場合には、合計含有量が上記範囲内であることが好ましい。
<Other polymerization initiators>
The curable composition may contain a polymerization initiator other than the specific oxime compound. Examples of the polymerization initiator other than the specific oxime compound include a thermal polymerization initiator and a photopolymerization initiator. The content of the other polymerization initiator in the curable composition is not particularly limited, but is generally preferably 0.1 to 5% by mass with respect to the total solid content of the curable composition. Other polymerization initiators may be used alone or in combination of two or more. When two or more kinds of other polymerization initiators are used in combination, the total content is preferably within the above range.
 熱重合開始剤としては、例えば、2,2’-アゾビスイソブチロニトリル(AIBN)、3-カルボキシプロピオニトリル、アゾビスマレノニトリル、及び、ジメチル-(2,2’)-アゾビス(2-メチルプロピオネート)[V-601]等のアゾ化合物、並びに、過酸化ベンゾイル、過酸化ラウロイル、及び、過硫酸カリウム等の有機過酸化物が挙げられる。
 熱重合開始剤としては、例えば、加藤清視著「紫外線硬化システム」(株式会社総合技術センター発行:平成元年)の第65~148頁に記載されている化合物等が挙げられる。
Examples of the thermal polymerization initiator include 2,2′-azobisisobutyronitrile (AIBN), 3-carboxypropionitrile, azobismaleonitrile, and dimethyl- (2,2 ′)-azobis (2 -Methylpropionate) [V-601] and the like, and organic peroxides such as benzoyl peroxide, lauroyl peroxide, and potassium persulfate.
Examples of the thermal polymerization initiator include compounds described on pages 65 to 148 of “Ultraviolet Curing System” written by Kiyoto Kato (published by General Technology Center Co., Ltd .: 1989).
 光重合開始剤としては、例えば、ハロゲン化炭化水素誘導体(例えば、トリアジン骨格を含有するもの、及び、オキサジアゾール骨格を含有するもの等)、アシルホスフィンオキサイド等のアシルホスフィン化合物、ヘキサアリールビイミダゾール、オキシム誘導体等のオキシム化合物(特定オキシム化合物を除く)、有機過酸化物、チオ化合物、ケトン化合物、芳香族オニウム塩、アミノアセトフェノン化合物、及び、ヒドロキシアセトフェノン等が挙げられる。
 光重合開始剤としては、例えば、特開2013-29760号公報の段落0265~0268を参酌することができ、この内容は本明細書に組み込まれる。
Examples of the photopolymerization initiator include halogenated hydrocarbon derivatives (for example, those containing a triazine skeleton and those containing an oxadiazole skeleton), acylphosphine compounds such as acylphosphine oxide, and hexaarylbiimidazoles. Oxime compounds such as oxime derivatives (excluding specific oxime compounds), organic peroxides, thio compounds, ketone compounds, aromatic onium salts, aminoacetophenone compounds, and hydroxyacetophenones.
As the photopolymerization initiator, for example, paragraphs 0265 to 0268 of JP2013-29760A can be referred to, and the contents thereof are incorporated herein.
 光重合開始剤としては、より具体的には、例えば、特開平10-291969号公報に記載のアミノアセトフェノン系開始剤、又は、特許第4225898号公報に記載のアシルホスフィン系開始剤を用いることができ、上記内容は本明細書に組み込まれる。
 ヒドロキシアセトフェノン化合物としては、例えば、IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959、又はIRGACURE-127(商品名:いずれもBASF社製)等を用いることができるが、これに制限されない。
 アミノアセトフェノン化合物としては、例えば、市販品であるIRGACURE-907、IRGACURE-369、又は、IRGACURE-379EG(商品名:いずれもBASF社製)を用いることができるがこれに制限されない。アミノアセトフェノン化合物としては、365nm又は405nm等の長波光源に吸収波長がマッチングされた特開2009-191179公報に記載の化合物も用いることもでき、上記内容は本明細書に組み込まれる。
 アシルホスフィン化合物としては、IRGACURE-819、又は、IRGACURE-TPO(商品名:いずれもBASF社製)等を用いることができる。
More specifically, as the photopolymerization initiator, for example, an aminoacetophenone initiator described in JP-A-10-291969 or an acylphosphine initiator described in Japanese Patent No. 4225898 can be used. The above content is incorporated herein.
As the hydroxyacetophenone compound, for example, IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, or IRGACURE-127 (trade name: all manufactured by BASF) can be used, but not limited thereto. .
As the aminoacetophenone compound, for example, commercially available products IRGACURE-907, IRGACURE-369, or IRGACURE-379EG (trade names: all manufactured by BASF) can be used, but are not limited thereto. As the aminoacetophenone compound, a compound described in JP-A-2009-191179 whose absorption wavelength is matched with a long wave light source of 365 nm or 405 nm can also be used, and the above contents are incorporated in the present specification.
As the acylphosphine compound, IRGACURE-819, IRGACURE-TPO (trade name: all manufactured by BASF) or the like can be used.
<樹脂>
 硬化性組成物は樹脂を含有することが好ましい。樹脂としては例えば、分散剤、及び、バインダー樹脂等が挙げられる。
 硬化性組成物中における樹脂の含有量としては特に制限されないが、一般に、硬化性組成物の全固形分に対して、5~40質量%が好ましい。樹脂は、1種を単独で用いても、2種以上を併用してもよい。2種以上の樹脂を併用する場合には、合計含有量が上記範囲内であることが好ましい。
<Resin>
The curable composition preferably contains a resin. Examples of the resin include a dispersant and a binder resin.
The content of the resin in the curable composition is not particularly limited, but is generally preferably 5 to 40% by mass with respect to the total solid content of the curable composition. Resin may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of resin together, it is preferable that total content is in the said range.
(分散剤)
 硬化性組成物は分散剤(樹脂に該当する)を含有することが好ましい。なお、本明細書において、分散剤とは、後述するアルカリ可溶性樹脂とは異なる化合物を意図する。
 硬化性組成物中における分散剤の含有量としては特に制限されないが、一般に硬化性組成物の全固形分に対して5~40質量%が好ましい。
 分散剤は、1種を単独で用いても、2種以上を併用してもよい。2種以上の分散剤を併用する場合には、合計含有量が上記範囲内であることが好ましい。
(Dispersant)
The curable composition preferably contains a dispersant (corresponding to a resin). In addition, in this specification, a dispersing agent intends the compound different from the alkali-soluble resin mentioned later.
The content of the dispersant in the curable composition is not particularly limited, but is generally preferably 5 to 40% by mass with respect to the total solid content of the curable composition.
A dispersing agent may be used individually by 1 type, or may use 2 or more types together. When two or more dispersants are used in combination, the total content is preferably within the above range.
 分散剤としては、特に制限されず、公知の分散剤を用いることができる。
 分散剤としては、例えば、高分子分散剤が挙げられる。高分子分散剤としては、例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、及び、ナフタレンスルホン酸ホルマリン縮合物等が挙げられる。
 また、分散剤としては、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、及び、顔料誘導体等を用いることができる。
 なかでも、分散剤としては、高分子化合物が好ましい。高分子化合物は、その構造から更に直鎖状高分子、末端変性型高分子、グラフト型高分子、及びブロック型高分子に分類することができる。
The dispersant is not particularly limited, and a known dispersant can be used.
Examples of the dispersant include a polymer dispersant. Examples of the polymer dispersant include polyamidoamine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, and (meth) acrylic copolymer. And naphthalenesulfonic acid formalin condensate.
Moreover, as a dispersing agent, polyoxyethylene alkyl phosphate ester, polyoxyethylene alkylamine, a pigment derivative, etc. can be used.
Among these, as the dispersant, a polymer compound is preferable. The polymer compounds can be further classified into linear polymers, terminal-modified polymers, graft polymers, and block polymers based on their structures.
・高分子化合物
 高分子化合物は、着色剤(以下、「顔料」ということがある。)の表面に吸着し、被分散体の再凝集を防止するように作用する。そのため、顔料表面へのアンカー部位を含有する、末端変性型高分子、グラフト型(高分子鎖を含有する)高分子、及び、ブロック型高分子が好ましい。
-High molecular compound A high molecular compound adsorb | sucks to the surface of a coloring agent (henceforth "pigment"), and acts so that the re-aggregation of a to-be-dispersed body may be prevented. Therefore, a terminal-modified polymer, a graft-type (containing a polymer chain) polymer, and a block-type polymer that contain an anchor site to the pigment surface are preferable.
 上記高分子化合物は硬化性基を含有してもよい。
 硬化性基としては、例えば、エチレン性不飽和基(例えば、(メタ)アクリロイル基、ビニル基、及び、スチリル基等)、及び、環状エーテル基(例えば、エポキシ基、及び、オキセタニル基等)等が挙げられるが、これらに制限されない。
 なかでも、ラジカル反応で重合制御が可能な点で、硬化性基としては、エチレン性不飽和基が好ましい。エチレン性不飽和基としては(メタ)アクリロイル基がより好ましい。
The polymer compound may contain a curable group.
Examples of the curable group include an ethylenically unsaturated group (for example, (meth) acryloyl group, vinyl group, and styryl group), and a cyclic ether group (for example, epoxy group, oxetanyl group, etc.) However, it is not limited to these.
Among these, an ethylenically unsaturated group is preferable as the curable group in that polymerization can be controlled by radical reaction. As the ethylenically unsaturated group, a (meth) acryloyl group is more preferable.
 硬化性基を含有する樹脂は、ポリエステル構造、及び、ポリエーテル構造からなる群から選択される少なくとも1種を含有することが好ましい。この場合、主鎖にポリエステル構造、及び/又は、ポリエーテル構造を含有していてもよいし、後述するように、上記樹脂がグラフト鎖を含有する構造単位を含有する場合には、上記グラフト鎖がポリエステル構造、及び/又は、ポリエーテル構造を含有していてもよい。
 上記樹脂としては、上記グラフト鎖がポリエステル構造を含有することがより好ましい。
The resin containing a curable group preferably contains at least one selected from the group consisting of a polyester structure and a polyether structure. In this case, the main chain may contain a polyester structure and / or a polyether structure, and, as will be described later, when the resin contains a structural unit containing a graft chain, the graft chain May contain a polyester structure and / or a polyether structure.
As said resin, it is more preferable that the said graft chain contains a polyester structure.
 高分子化合物は、グラフト鎖を含有する構造単位を含有することが好ましい。なお、本明細書において、「構造単位」とは「繰り返し単位」と同義である。
 このようなグラフト鎖を含有する構造単位を含有する高分子化合物は、溶剤とのより優れた親和性を有する。グラフト鎖を含有する構造単位を含有する高分子化合物は、溶剤とのより優れた親和性を有するため、顔料等をより分散させやすく、かつ、顔料等を分散させた後に時間が経過しても当初の分散状態がより変化しにくい(より優れた経時安定性を有する)。また、グラフト鎖を含有する構造単位を含有する高分子化合物は、グラフト鎖を含有するため、後述する重合性化合物、及び/又は、その他の成分等とのより優れた親和性を有する。その結果、グラフト鎖を含有する構造単位を含有する高分子化合物は後述するアルカリ現像時に、未反応の重合性化合物等に起因する残渣を生じにくくなる。
 グラフト鎖が長くなる(式量が大きくなる)と立体反発効果が高くなり顔料等の分散性は向上する。一方、グラフト鎖が長すぎると顔料等への吸着力が低下して、顔料等の分散性は低下する傾向となる。このため、グラフト鎖の原子数(水素原子を除く)としては、は、40~10000が好ましく、50~2000がより好ましく、60~500が更に好ましい。
 ここで、グラフト鎖とは、高分子化合物の主鎖の根元(主鎖から枝分かれしている基において主鎖に結合する原子)から、主鎖から枝分かれしている基の末端までを意図する。
The polymer compound preferably contains a structural unit containing a graft chain. In the present specification, “structural unit” is synonymous with “repeating unit”.
A polymer compound containing a structural unit containing such a graft chain has a better affinity with a solvent. A polymer compound containing a structural unit containing a graft chain has better affinity with a solvent, so that it is easier to disperse pigments and the like even if time passes after the pigments are dispersed The initial dispersion state is less likely to change (has better aging stability). Moreover, since the high molecular compound containing the structural unit containing a graft chain contains a graft chain, it has a better affinity with a polymerizable compound and / or other components described later. As a result, a polymer compound containing a structural unit containing a graft chain is less likely to produce a residue due to an unreacted polymerizable compound or the like during alkali development described later.
When the graft chain is long (the formula amount is large), the steric repulsion effect is enhanced, and the dispersibility of the pigment and the like is improved. On the other hand, if the graft chain is too long, the adsorptive power to the pigment or the like is lowered, and the dispersibility of the pigment or the like tends to be lowered. Therefore, the number of atoms in the graft chain (excluding hydrogen atoms) is preferably 40 to 10,000, more preferably 50 to 2000, and still more preferably 60 to 500.
Here, the graft chain is intended from the root of the main chain of the polymer compound (the atom bonded to the main chain in a group branched from the main chain) to the end of the group branched from the main chain.
 グラフト鎖は、ポリマー構造を含有する高分子鎖が好ましい。高分子鎖が含有するポリマー構造としては、特に制限されないが、例えば、ポリ(メタ)アクリレート構造(例えば、ポリ(メタ)アクリル構造)、ポリエステル構造、ポリウレタン構造、ポリウレア構造、ポリアミド構造、及び、ポリエーテル構造等が挙げられる。
 高分子鎖と溶剤とが更に優れた親和性を有し、高分子化合物が、顔料等をより分散させやすい点で、高分子鎖は、ポリエステル構造、ポリエーテル構造及びポリ(メタ)アクリレート構造からなる群から選択される少なくとも1種を含有することが好ましく、ポリエステル構造、及び、ポリエーテル構造からなる群から選択される少なくとも1種を含有することがより好ましい。
The graft chain is preferably a polymer chain containing a polymer structure. The polymer structure contained in the polymer chain is not particularly limited, and examples thereof include a poly (meth) acrylate structure (for example, poly (meth) acrylic structure), a polyester structure, a polyurethane structure, a polyurea structure, a polyamide structure, and a poly structure. Examples include ether structures.
The polymer chain has a polyester film structure, a polyether structure, and a poly (meth) acrylate structure in that the polymer chain and the solvent have an even better affinity, and the polymer compound can more easily disperse pigments and the like. It is preferable to contain at least one selected from the group consisting of, and more preferable to contain at least one selected from the group consisting of a polyester structure and a polyether structure.
 このような高分子鎖を含有するマクロモノマー(ポリマー構造を含有し、高分子化合物(例えば、共重合体)の主鎖に結合してグラフト鎖を構成するモノマー)としては、特に限定されないが、反応性二重結合性基を含有するマクロモノマーが好ましい。 The macromonomer containing such a polymer chain (a monomer that contains a polymer structure and binds to the main chain of a polymer compound (for example, a copolymer) to form a graft chain) is not particularly limited, Macromonomers containing reactive double bond groups are preferred.
 高分子化合物が含有する高分子鎖を含有する構造単位に対応し、高分子化合物の合成に用いることができる市販のマクロモノマーとしては、例えば、AA-6、AA-10、AB-6、AS-6、AN-6、AW-6、AA-714、AY-707、AY-714、AK-5、AK-30、及び、AK-32(以上はすべて商品名であり、東亜合成社製である);ブレンマーPP-100、ブレンマーPP-500、ブレンマーPP-800、ブレンマーPP-1000、ブレンマー55-PET-800、ブレンマーPME-4000、ブレンマーPSE-400、ブレンマーPSE-1300、及び、ブレンマー43PAPE-600B(以上はすべて商品名であり、日油社製である);等が挙げられる。 Commercially available macromonomers that correspond to structural units containing a polymer chain contained in the polymer compound and can be used for the synthesis of the polymer compound include, for example, AA-6, AA-10, AB-6, AS -6, AN-6, AW-6, AA-714, AY-707, AY-714, AK-5, AK-30, and AK-32 (all the above are trade names, manufactured by Toa Gosei Co., Ltd.) Blemmer PP-100, Blemmer PP-500, Blemmer PP-800, Blemmer PP-1000, Blemmer 55-PET-800, Blemmer PME-4000, Blemmer PSE-400, Blemmer PSE-1300, and Blemmer 43PAPE- 600B (all the above are trade names, manufactured by NOF Corporation); and the like.
 分散剤は、ポリアクリル酸メチル、ポリメタクリル酸メチル、及び、環状又は鎖状のポリエステルからなる群より選択される少なくとも1種の構造を含有することが好ましく、ポリアクリル酸メチル、ポリメタクリル酸メチル、及び、鎖状のポリエステルからなる群より選択される少なくとも1種の構造を含有することがより好ましく、ポリアクリル酸メチル構造、ポリメタクリル酸メチル構造、ポリカプロラクトン構造、及び、ポリバレロラクトン構造からなる群より選択される少なくとも1種の構造を含有することが更に好ましい。
 分散剤は、分子中に上記構造を一種単独で含有してもよいし、分子中にこの構造を複数種類含有してもよい。
 ここで、ポリカプロラクトン構造とは、ε-カプロラクトンを開環した構造を繰り返し単位として含有するものをいう。ポリバレロラクトン構造とは、δ-バレロラクトンを開環した構造を繰り返し単位として含有するものをいう。
 ポリカプロラクトン構造を含有する分散剤としては、例えば、下記式(1)又は下記式(2)中、j、又は、kがそれぞれ5であるものが挙げられる。また、ポリバレロラクトン構造を含有する分散剤としては、例えば、下記式(1)又は下記式(2)中、j、又は、kがそれぞれ4であるものが挙げられる。
 ポリアクリル酸メチル構造を含有する分散剤としては、例えば、下記式(4)中、Xが水素原子であり、Rがメチル基であるものが挙げられる。
 ポリメタクリル酸メチル構造を含有する分散剤としては、例えば、下記式(4)中、Xがメチル基であり、Rがメチル基であるものが挙げられる。
The dispersant preferably contains at least one structure selected from the group consisting of polymethyl acrylate, polymethyl methacrylate, and cyclic or chain polyesters. Polymethyl acrylate, polymethyl methacrylate It is more preferable to contain at least one structure selected from the group consisting of chain polyesters, and from a polymethyl acrylate structure, a polymethyl methacrylate structure, a polycaprolactone structure, and a polyvalerolactone structure. More preferably, it contains at least one structure selected from the group consisting of:
The dispersant may contain one type of the above structure in the molecule, or may contain a plurality of types of this structure in the molecule.
Here, the polycaprolactone structure means a structure containing a ring-opened structure of ε-caprolactone as a repeating unit. The polyvalerolactone structure means a structure containing a ring-opened structure of δ-valerolactone as a repeating unit.
Examples of the dispersant containing a polycaprolactone structure include those in which j or k is 5 in the following formula (1) or the following formula (2). In addition, examples of the dispersant containing a polyvalerolactone structure include those in which j or k is 4 in the following formula (1) or the following formula (2).
Examples of the dispersant containing a polymethyl acrylate structure include those in which, in the following formula (4), X 5 is a hydrogen atom and R 4 is a methyl group.
Examples of the dispersant containing a polymethyl methacrylate structure include those in which X 5 is a methyl group and R 4 is a methyl group in the following formula (4).
・グラフト鎖を含有する構造単位
 高分子化合物は、グラフト鎖を含有する構造単位として、下記式(1)~式(4)からなる群から選択される少なくとも1種の、高分子鎖を含有する構造単位を含有することが好ましく、下記式(1A)、下記式(2A)、下記式(3A)、下記式(3B)、及び下記(4)からなる群から選択される少なくとも1種の、高分子鎖を含有する構造単位を含有することがより好ましい。
Structural unit containing a graft chain The polymer compound contains at least one polymer chain selected from the group consisting of the following formulas (1) to (4) as a structural unit containing a graft chain. It is preferable to contain a structural unit, and at least one selected from the group consisting of the following formula (1A), the following formula (2A), the following formula (3A), the following formula (3B), and the following (4), More preferably, it contains a structural unit containing a polymer chain.
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 式(1)~式(4)において、W、W、W、及び、Wは、それぞれ独立に、酸素原子、又は、NHを表す。W、W、W、及び、Wは酸素原子が好ましい。
 式(1)~式(4)において、X、X、X、X、及びXは、それぞれ独立に、水素原子、又は、1価の有機基を表す。X、X、X、X、及びXは、合成上の制約の観点からは、それぞれ独立に、水素原子、又は、炭素数(炭素原子数)1~12のアルキル基が好ましく、それぞれ独立に、水素原子、又は、メチル基がより好ましく、メチル基が更に好ましい。
In the formulas (1) to (4), W 1 , W 2 , W 3 , and W 4 each independently represent an oxygen atom or NH. W 1 , W 2 , W 3 , and W 4 are preferably oxygen atoms.
In the formulas (1) to (4), X 1 , X 2 , X 3 , X 4 , and X 5 each independently represent a hydrogen atom or a monovalent organic group. X 1 , X 2 , X 3 , X 4 , and X 5 are each independently preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms (the number of carbon atoms) from the viewpoint of synthesis constraints. Independently, a hydrogen atom or a methyl group is more preferable, and a methyl group is still more preferable.
 式(1)~式(4)中、Y、Y、Y、及び、Yは、それぞれ独立に、2価の連結基を表す。連結基の構造としては、特に制限されない。Y、Y、Y、及び、Yで表される2価の連結基としては、例えば、下記式(Y-1)~(Y-21)で表される連結基等が挙げられる。下記式(Y-1)~(Y-21)中、A、Bはそれぞれ結合部位を意味する。下記に示した構造のうち、合成の簡便性から、(Y-2)又は(Y-13)がより好ましい。 In formulas (1) to (4), Y 1 , Y 2 , Y 3 , and Y 4 each independently represent a divalent linking group. The structure of the linking group is not particularly limited. Examples of the divalent linking group represented by Y 1 , Y 2 , Y 3 , and Y 4 include linking groups represented by the following formulas (Y-1) to (Y-21). . In the following formulas (Y-1) to (Y-21), A and B each represent a binding site. Of the structures shown below, (Y-2) or (Y-13) is more preferred because of the ease of synthesis.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
 式(1)~式(4)中、Z、Z、Z、及びZは、それぞれ独立に1価の有機基を表す。有機基の構造としては、特に制限されない。有機基としては、例えば、アルキル基、水酸基、アルコキシ基、アリールオキシ基、ヘテロアリールオキシ基、アルキルチオエーテル基、アリールチオエーテル基、ヘテロアリールチオエーテル基、及び、アミノ基等が挙げられる。
 なかでも、Z、Z、Z、及び、Zで表される有機基としては、顔料等をより分散させやすい点で、立体反発効果を有することが好ましく、それぞれ独立に、炭素数5~24のアルキル基又はアルコキシ基がより好ましく、それぞ独立に炭素数5~24の分岐アルキル基、炭素数5~24の環状アルキル基、又は、炭素数5~24のアルコキシ基が更に好ましい。なお、アルコキシ基中に含有されるアルキル基は、直鎖状、分岐鎖状、及び、環状のいずれでもよい。
In the formulas (1) to (4), Z 1 , Z 2 , Z 3 , and Z 4 each independently represent a monovalent organic group. The structure of the organic group is not particularly limited. Examples of the organic group include an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group, an arylthioether group, a heteroarylthioether group, and an amino group.
Among them, the organic groups represented by Z 1 , Z 2 , Z 3 , and Z 4 preferably have a steric repulsion effect in that pigments and the like are more easily dispersed. An alkyl group or an alkoxy group having 5 to 24 carbon atoms is more preferable, and a branched alkyl group having 5 to 24 carbon atoms, a cyclic alkyl group having 5 to 24 carbon atoms, or an alkoxy group having 5 to 24 carbon atoms is more preferable. . The alkyl group contained in the alkoxy group may be linear, branched, or cyclic.
 式(1)~式(4)中、n、m、p、及びqは、それぞれ独立に、1~500の整数を表す。
 式(1)、及び、式(2)中、j、及び、kは、それぞれ独立に、2~8の整数を表す。
 式(1)、及び、式(2)中、j、及び、kは、硬化性組成物がより優れた経時安定性、及び、より優れた現像性を有する点で、4~6の整数が好ましく、5がより好ましい。
 式(1)、及び、式(2)中、n、及び、mは、10以上の整数が好ましく、20以上の整数がより好ましい。また、分散剤が、ポリカプロラクトン構造、及び、ポリバレロラクトン構造を含有する場合、ポリカプロラクトン構造の繰り返し数と、ポリバレロラクトンの繰返し数の和としては、10以上の整数が好ましく、20以上の整数がより好ましい。
In the formulas (1) to (4), n, m, p, and q each independently represents an integer of 1 to 500.
In formula (1) and formula (2), j and k each independently represents an integer of 2 to 8.
In the formula (1) and the formula (2), j and k are integers of 4 to 6 in that the curable composition has better stability over time and better developability. 5 is more preferable.
In Formula (1) and Formula (2), n and m are preferably integers of 10 or more, and more preferably 20 or more. Further, when the dispersant contains a polycaprolactone structure and a polyvalerolactone structure, the sum of the number of repetitions of the polycaprolactone structure and the number of repetitions of polyvalerolactone is preferably an integer of 10 or more, An integer is more preferable.
 式(3)中、Rは分岐鎖状、又は、直鎖状のアルキレン基を表し、炭素数1~10のアルキレン基が好ましく、炭素数2、又は、3のアルキレン基がより好ましい。pが2~500のとき、複数存在するRは互いに同一でも異なってもよい。
 式(4)中、Rは水素原子、又は、1価の有機基を表す。1価の有機基の構造としては、特に制限されない。Rとしては、例えば、水素原子、アルキル基、アリール基、又は、ヘテロアリール基が好ましく、水素原子、又は、アルキル基がより好ましい。
 Rがアルキル基である場合、アルキル基としては、炭素数1~20の直鎖状アルキル基、炭素数3~20の分岐鎖状アルキル基、又は、炭素数5~20の環状アルキル基が好ましく、炭素数1~20の直鎖状アルキル基がより好ましく、炭素数1~6の直鎖状アルキル基が更に好ましい。式(4)中、qが2~500のとき、グラフト鎖を含有する構造単位中に複数存在するX及びRは互いに同一でも異なってもよい。
In the formula (3), R 3 represents a branched or straight chain alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, a plurality of R 3 may be the same as or different from each other.
In formula (4), R 4 represents a hydrogen atom or a monovalent organic group. The structure of the monovalent organic group is not particularly limited. As R 4 , for example, a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group is preferable, and a hydrogen atom or an alkyl group is more preferable.
When R 4 is an alkyl group, the alkyl group may be a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms. Preferably, a linear alkyl group having 1 to 20 carbon atoms is more preferable, and a linear alkyl group having 1 to 6 carbon atoms is still more preferable. In the formula (4), when q is 2 to 500, a plurality of X 5 and R 4 present in the structural unit containing a graft chain may be the same or different from each other.
 高分子化合物は、構造が異なる、2種以上のグラフト鎖を含有する構造単位を含有してもよい。即ち、高分子化合物の分子中に、互いに構造の異なる式(1)~式(4)で表される構造単位を含有してもよく、式(1)~式(4)中、n、m、p、及びqがそれぞれ2以上の整数を表す場合、式(1)及び式(2)中、側鎖中にj及びkが互いに異なる構造を含有してもよく、式(3)及び式(4)中、分子内に複数存在するR、R及びXは互いに同一でも異なってもよい。 The polymer compound may contain structural units containing two or more types of graft chains having different structures. That is, in the molecule of the polymer compound, structural units represented by the formulas (1) to (4) having different structures may be contained, and in the formulas (1) to (4), n, m , P, and q each represent an integer of 2 or more, in formula (1) and formula (2), j and k may contain structures different from each other in the side chain, and formula (3) and formula In (4), a plurality of R 3 , R 4 and X 5 present in the molecule may be the same or different from each other.
 式(1)で表される構造単位としては、硬化性組成物が、より優れた経時安定性、及び、より優れた現像性を有する点で、下記式(1A)で表される構造単位がより好ましい。
 式(2)で表される構造単位としては、硬化性組成物が、より優れた経時安定性、及び、現像性を有する点で、下記式(2A)で表される構造単位がより好ましい。
The structural unit represented by the formula (1) is a structural unit represented by the following formula (1A) in that the curable composition has better stability over time and better developability. More preferred.
As the structural unit represented by the formula (2), a structural unit represented by the following formula (2A) is more preferable in that the curable composition has more excellent temporal stability and developability.
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000028
 式(1A)中、X、Y、Z及びnは、式(1)中のX、Y、Z及びnとして既に説明したとおりである。式(2A)中、X、Y、Z及びmは、式(2)中のX、Y、Z及びmとして既に説明したとおりである。 In the formula (1A), X 1, Y 1, Z 1 and n are as previously described as X 1, Y 1, Z 1 and n in formula (1). In the formula (2A), X 2, Y 2, Z 2 and m are as previously described as X 2, Y 2, Z 2 and m in the formula (2).
 式(3)で表される構造単位としては、硬化性組成物がより優れた経時安定性、及び、より優れた現像性を有する点で、下記式(3A)又は式(3B)で表される構造単位がより好ましい。 The structural unit represented by the formula (3) is represented by the following formula (3A) or the formula (3B) in that the curable composition has better temporal stability and better developability. The structural unit is more preferable.
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000029
 式(3A)又は(3B)中、X、Y、Z及びpは、式(3)中、X、Y、Z及びpとして既に説明したとおりである。 Wherein (3A) or (3B), X 3, Y 3, Z 3 and p in formula (3) it is as previously described as X 3, Y 3, Z 3 and p.
 高分子化合物は、グラフト鎖、なかでも高分子鎖を含有する構造単位として、式(1A)で表される構造単位を含有することがより好ましい。 More preferably, the polymer compound contains a structural unit represented by the formula (1A) as a structural unit containing a graft chain, particularly a polymer chain.
 高分子化合物中における、グラフト鎖を含有する構造単位(例えば、上記式(1)~式(4)で表される構造単位)の含有量は、質量換算で、高分子化合物の総質量に対し2~90質量%が好ましく、5~30%の範囲がより好ましい。高分子化合物中におけるグラフト鎖を含有する構造単位の含有量が、上記範囲内であると、分散剤は顔料等をより分散させやすく、かつ、硬化性組成物はより優れた現像性を有する。 The content of the structural unit containing a graft chain (for example, the structural unit represented by the above formula (1) to formula (4)) in the polymer compound is based on the total mass of the polymer compound in terms of mass. The range is preferably 2 to 90% by mass, and more preferably 5 to 30%. When the content of the structural unit containing a graft chain in the polymer compound is within the above range, the dispersant can easily disperse the pigment or the like, and the curable composition has more excellent developability.
・疎水性構造単位
 高分子化合物は、グラフト鎖を含有する構造単位とは異なる(すなわち、グラフト鎖を含有する構造単位には相当しない)疎水性構造単位を含有することが好ましい。ただし、本明細書において、疎水性構造単位は、酸基(例えば、カルボン酸基、スルホン酸基、リン酸基、及び、フェノール性水酸基等)を含有しない構造単位である。
-Hydrophobic structural unit It is preferable that a high molecular compound contains the hydrophobic structural unit different from the structural unit containing a graft chain (namely, it does not correspond to the structural unit containing a graft chain). However, in this specification, the hydrophobic structural unit is a structural unit that does not contain an acid group (for example, a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a phenolic hydroxyl group, and the like).
 疎水性構造単位は、後述するClogP値が1.2以上の化合物(モノマー)に由来する(対応する)構造単位が好ましく、ClogP値が1.2~8.0の化合物に由来する構造単位がより好ましい。 The hydrophobic structural unit is preferably a structural unit derived from (corresponding to) a compound (monomer) having a ClogP value of 1.2 or more, which will be described later, and a structural unit derived from a compound having a ClogP value of 1.2 to 8.0. More preferred.
 ClogP値は、Daylight Chemical Information System, Inc.から入手できるプログラム“CLOGP”で計算された値である。このプログラムは、Hansch, Leoのフラグメントアプローチ(下記文献参照)により算出される“計算logP”の値を提供する。フラグメントアプローチは化合物の化学構造に基づいており、化学構造を部分構造(フラグメント)に分割し、そのフラグメントに対して割り当てられたlogP寄与分を合計することにより化合物のlogP値を推算している。その詳細は以下の文献に記載されている。本明細書では、ClogP値は、プログラムCLOGP v4.82により計算した値を意図する。
 A. J. Leo, Comprehensive Medicinal Chemistry, Vol.4, C. Hansch, P. G. Sammnens, J. B. Taylor and C. A. Ramsden, Eds., p.295, Pergamon Press, 1990 C. Hansch & A. J. Leo. SUbstituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A.J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993.
ClogP values are available from Daylight Chemical Information System, Inc. It is a value calculated by the program “CLOGP” available from This program provides the value of “computation logP” calculated by Hansch, Leo's fragment approach (see below). The fragment approach is based on the chemical structure of a compound, which divides the chemical structure into substructures (fragments) and estimates the logP value of the compound by summing the logP contributions assigned to that fragment. Details thereof are described in the following documents. In this specification, the ClogP value is intended to be a value calculated by the program CLOGP v4.82.
A. J. et al. Leo, Comprehensive Medicinal Chemistry, Vol. 4, C.I. Hansch, P.A. G. Sammunens, J. et al. B. Taylor and C.M. A. Ramsden, Eds. , P. 295, Pergamon Press, 1990 C.I. Hansch & A. J. et al. Leo. Substituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A. J. et al. Leo. Calculating logPoch from structure. Chem. Rev. , 93, 1281-1306, 1993.
 logPは、分配係数P(Partition Coefficient)の常用対数を意味し、ある有機化合物が油(一般的には1-オクタノール)と水の2相系の平衡でどのように分配されるかを定量的な数値として表す物性値であり、以下の式で示される。
  logP=log(Coil/Cwater)
 式中、Coilは油相中の化合物のモル濃度を、Cwaterは水相中の化合物のモル濃度を表す。
 logPの値が0をはさんでプラスに大きくなると油溶性が増し、マイナスで絶対値が大きくなると水溶性が増すことを意味し、有機化合物の水溶性と負の相関があり、有機化合物の親疎水性を見積るパラメータとして広く利用されている。
log P means the common logarithm of the partition coefficient P (Partition Coefficient), and quantitatively determines how an organic compound is distributed in the equilibrium of a two-phase system of oil (generally 1-octanol) and water. It is a physical property value expressed as a numerical value, and is represented by the following formula.
logP = log (Coil / Cwater)
In the formula, Coil represents the molar concentration of the compound in the oil phase, and Cwater represents the molar concentration of the compound in the aqueous phase.
When the logP value increases to a positive value across 0, the oil solubility increases. When the logP value increases to a negative value, the water solubility increases. There is a negative correlation with the water solubility of the organic compound. It is widely used as a parameter for estimating aqueous properties.
 高分子化合物は、疎水性構造単位として、下記式(i)~(iii)で表される単量体に由来の構造単位からなる群から選択される少なくとも1種の構造単位を含有することが好ましい。 The polymer compound may contain at least one structural unit selected from the group consisting of structural units derived from monomers represented by the following formulas (i) to (iii) as hydrophobic structural units. preferable.
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
 上記式(i)~(iii)中、R、R、及びRは、それぞれ独立に、水素原子、ハロゲン原子(例えば、フッ素原子、塩素原子、及び、臭素原子等)、又は炭素数が1~6のアルキル基(例えば、メチル基、エチル基、及び、プロピル基等)を表す。
 R、R、及びRは、水素原子、又は、炭素数が1~3のアルキル基が好ましく、水素原子、又は、メチル基がより好ましい。R及びRは、水素原子が更に好ましい。
 Xは、酸素原子(-O-)又はイミノ基(-NH-)を表し、酸素原子が好ましい。
In the above formulas (i) to (iii), R 1 , R 2 , and R 3 are each independently a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number Represents an alkyl group of 1 to 6 (for example, a methyl group, an ethyl group, a propyl group, etc.).
R 1 , R 2 and R 3 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom or a methyl group. R 2 and R 3 are more preferably a hydrogen atom.
X represents an oxygen atom (—O—) or an imino group (—NH—), preferably an oxygen atom.
 Lは、単結合又は2価の連結基である。2価の連結基としては、2価の脂肪族基(例えば、アルキレン基、置換アルキレン基、アルケニレン基、置換アルケニレン基、アルキニレン基、及び、置換アルキニレン基等)、2価の芳香族基(例えば、アリーレン基、及び、置換アリーレン基等)、2価の複素環基、酸素原子(-O-)、硫黄原子(-S-)、イミノ基(-NH-)、置換イミノ基(-NR31-、ここでR31は脂肪族基、芳香族基又は複素環基を表す)、カルボニル基(-CO-)、及び、これらの組合せ等が挙げられる。 L is a single bond or a divalent linking group. Examples of the divalent linking group include a divalent aliphatic group (for example, an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, and a substituted alkynylene group), a divalent aromatic group (for example, , Arylene groups, substituted arylene groups, etc.), divalent heterocyclic groups, oxygen atoms (—O—), sulfur atoms (—S—), imino groups (—NH—), substituted imino groups (—NR 31) -, Wherein R 31 represents an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl group (-CO-), and combinations thereof.
 2価の脂肪族基は、環状構造又は分岐鎖構造を含有してもよい。脂肪族基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましい。脂肪族基は不飽和脂肪族基でも、飽和脂肪族基でもよく、飽和脂肪族基が好ましい。脂肪族基は、置換基を含有してもよい。置換基としては特に制限されないが、例えば、ハロゲン原子、芳香族基、及び、複素環基等が挙げられる。 The divalent aliphatic group may contain a cyclic structure or a branched chain structure. The aliphatic group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms. The aliphatic group may be an unsaturated aliphatic group or a saturated aliphatic group, and is preferably a saturated aliphatic group. The aliphatic group may contain a substituent. Although it does not restrict | limit especially as a substituent, For example, a halogen atom, an aromatic group, a heterocyclic group, etc. are mentioned.
 2価の芳香族基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。芳香族基は置換基を含有してもよい。置換基としては特に制限されないが、ハロゲン原子、脂肪族基、芳香族基、及び、複素環基等が挙げられる。 The carbon number of the divalent aromatic group is preferably 6 to 20, more preferably 6 to 15, and still more preferably 6 to 10. The aromatic group may contain a substituent. Although it does not restrict | limit especially as a substituent, A halogen atom, an aliphatic group, an aromatic group, a heterocyclic group, etc. are mentioned.
 2価の複素環基は、複素環として5員環又は6員環を含有することが好ましい。複素環に他の複素環、脂肪族環又は芳香族環が縮合してもよい。複素環基は置換基を含有してもよい。置換基としては、特に制限されないが、例えば、ハロゲン原子、水酸基、オキソ基(=O)、チオキソ基(=S)、イミノ基(=NH)、置換イミノ基(=N-R32、ここでR32は脂肪族基、芳香族基又は複素環基)、脂肪族基、芳香族基、及び、複素環基等が挙げられる。 The divalent heterocyclic group preferably contains a 5-membered ring or a 6-membered ring as the heterocyclic ring. Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring. The heterocyclic group may contain a substituent. The substituent is not particularly limited. For example, a halogen atom, a hydroxyl group, an oxo group (═O), a thioxo group (═S), an imino group (═NH), a substituted imino group (═N—R 32 , R 32 may be an aliphatic group, an aromatic group or a heterocyclic group), an aliphatic group, an aromatic group, a heterocyclic group, or the like.
 Lとしては、単結合、アルキレン基又はオキシアルキレン構造を含有する2価の連結基が好ましい。オキシアルキレン構造は、オキシエチレン構造又はオキシプロピレン構造がより好ましい。Lは、オキシアルキレン構造を2個以上繰り返して含有するポリオキシアルキレン構造を含有してもよい。ポリオキシアルキレン構造としては、ポリオキシエチレン構造又はポリオキシプロピレン構造が好ましい。ポリオキシエチレン構造は、-(OCHCH-で表され、nは、2以上の整数が好ましく、2~10の整数がより好ましい。 L is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure. The oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure. L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures. The polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure. The polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n —, where n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
 Zとしては、脂肪族基(例えば、アルキル基、置換アルキル基、不飽和アルキル基、及び、置換不飽和アルキル基等)、芳香族基(例えば、アリール基、置換アリール基、アリーレン基、及び、置換アリーレン基等)、複素環基、又は、これらの組み合わせが挙げられる。これらの基は、酸素原子(-O-)、硫黄原子(-S-)、イミノ基(-NH-)、置換イミノ基(-NR31-、ここでR31は脂肪族基、芳香族基又は複素環基)、又は、カルボニル基(-CO-)を含有してもよい。 Z includes an aliphatic group (for example, an alkyl group, a substituted alkyl group, an unsaturated alkyl group, and a substituted unsaturated alkyl group), an aromatic group (for example, an aryl group, a substituted aryl group, an arylene group, and Substituted arylene groups, etc.), heterocyclic groups, or combinations thereof. These groups include an oxygen atom (—O—), a sulfur atom (—S—), an imino group (—NH—), a substituted imino group (—NR 31 —, where R 31 is an aliphatic group or an aromatic group. Or a heterocyclic group) or a carbonyl group (—CO—).
 脂肪族基は、環状構造又は分岐鎖構造を含有してもよい。脂肪族基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましい。脂肪族基は、更に環集合炭化水素基、又は、架橋環式炭化水素基を含有し、環集合炭化水素基の例としては、ビシクロヘキシル基、パーヒドロナフタレニル基、ビフェニル基、及び、4-シクロヘキシルフェニル基等が挙げられる。架橋環式炭化水素環として、例えば、ピナン、ボルナン、ノルピナン、ノルボルナン、及び、ビシクロオクタン環(ビシクロ[2.2.2]オクタン環、及び、ビシクロ[3.2.1]オクタン環等)等の2環式炭化水素環;アダマンタン、トリシクロ[5.2.1.02,6]デカン、及び、トリシクロ[4.3.1.12,5]ウンデカン環等の3環式炭化水素環;テトラシクロ[4.4.0.12,5.17,10]ドデカン、及び、パーヒドロ-1,4-メタノ-5,8-メタノナフタレン環等の4環式炭化水素環;等が挙げられる。架橋環式炭化水素環には、縮合環式炭化水素環、例えば、パーヒドロナフタレン(デカリン)、パーヒドロアントラセン、パーヒドロフェナントレン、パーヒドロアセナフテン、パーヒドロフルオレン、パーヒドロインデン、及び、パーヒドロフェナレン環等の5~8員シクロアルカン環が複数個縮合した縮合環も含まれる。
 脂肪族基としては、不飽和脂肪族基よりも飽和脂肪族基の方が好ましい。脂肪族基は、置換基を含有してもよい。置換基としては、例えば、ハロゲン原子、芳香族基、及び、複素環基等が挙げられる。ただし、脂肪族基は、置換基として酸基を含有しない。
The aliphatic group may contain a cyclic structure or a branched chain structure. The aliphatic group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms. The aliphatic group further contains a ring assembly hydrocarbon group or a bridged cyclic hydrocarbon group. Examples of the ring assembly hydrocarbon group include a bicyclohexyl group, a perhydronaphthalenyl group, a biphenyl group, and Examples include 4-cyclohexylphenyl group. Examples of the bridged cyclic hydrocarbon ring include pinane, bornane, norpinane, norbornane, and bicyclooctane ring (bicyclo [2.2.2] octane ring, bicyclo [3.2.1] octane ring, etc.) A tricyclic hydrocarbon ring such as adamantane, tricyclo [5.2.1.0 2,6 ] decane, and tricyclo [4.3.1.1 2,5 ] undecane ring Tetracyclo [4.4.0.1 2,5 . 1 7,10 ] dodecane, and tetracyclic hydrocarbon rings such as perhydro-1,4-methano-5,8-methanonaphthalene ring; and the like. Bridged cyclic hydrocarbon rings include fused cyclic hydrocarbon rings such as perhydronaphthalene (decalin), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydrofluorene, perhydroindene, and perhydroindene. A condensed ring formed by condensing a plurality of 5- to 8-membered cycloalkane rings such as a phenalene ring is also included.
As the aliphatic group, a saturated aliphatic group is preferable to an unsaturated aliphatic group. The aliphatic group may contain a substituent. Examples of the substituent include a halogen atom, an aromatic group, and a heterocyclic group. However, the aliphatic group does not contain an acid group as a substituent.
 芳香族基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。芳香族基は置換基を含有してもよい。置換基としては、例えば、ハロゲン原子、脂肪族基、芳香族基、及び、複素環基等が挙げられる。ただし、芳香族基は、置換基として酸基を含有しない。 The carbon number of the aromatic group is preferably 6-20, more preferably 6-15, and still more preferably 6-10. The aromatic group may contain a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, and a heterocyclic group. However, the aromatic group does not contain an acid group as a substituent.
 複素環基は、複素環として5員環又は6員環を含有することが好ましい。複素環に他の複素環、脂肪族環又は芳香族環が縮合してもよい。複素環基は置換基を含有してもよい。置換基としては、例えば、ハロゲン原子、水酸基、オキソ基(=O)、チオキソ基(=S)、イミノ基(=NH)、置換イミノ基(=N-R32、ここでR32は脂肪族基、芳香族基又は複素環基)、脂肪族基、芳香族基、及び、複素環基等が挙げられる。ただし、複素環基は、置換基として酸基を含有しない。 It is preferable that a heterocyclic group contains a 5-membered ring or a 6-membered ring as a heterocyclic ring. Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring. The heterocyclic group may contain a substituent. Examples of the substituent include a halogen atom, a hydroxyl group, an oxo group (═O), a thioxo group (═S), an imino group (═NH), a substituted imino group (═N—R 32 , where R 32 is aliphatic. Group, aromatic group or heterocyclic group), aliphatic group, aromatic group, heterocyclic group and the like. However, the heterocyclic group does not contain an acid group as a substituent.
 上記式(iii)中、R、R、及び、Rは、それぞれ独立に、水素原子、ハロゲン原子(例えば、フッ素原子、塩素原子、及び、臭素原子等)、炭素数が1~6のアルキル基(例えば、メチル基、エチル基、及び、プロピル基等)、Z、又は、L-Zを表す。ここでL及びZは、上記におけるものと同義である。R、R、及び、Rとしては、水素原子、又は、炭素数が1~3のアルキル基が好ましく、水素原子がより好ましい。 In the above formula (iii), R 4 , R 5 , and R 6 are each independently a hydrogen atom, a halogen atom (for example, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number of 1-6. An alkyl group (for example, a methyl group, an ethyl group, a propyl group, etc.), Z, or LZ. Here, L and Z are as defined above. R 4, R 5 and, as the R 6, a hydrogen atom, or, preferably an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
 上記式(i)で表される単量体として、R、R、及びRが水素原子又はメチル基であって、Lが単結合、又は、アルキレン基、若しくは、オキシアルキレン構造を含有する2価の連結基であって、Xが酸素原子、又は、イミノ基であって、Zが脂肪族基、複素環基又は芳香族基である化合物が好ましい。
 上記式(ii)で表される単量体として、Rが水素原子又はメチル基であって、Lがアルキレン基であって、Zが脂肪族基、複素環基又は芳香族基である化合物が好ましい。上記式(iii)で表される単量体として、R、R、及びRが水素原子又はメチル基であって、Zが脂肪族基、複素環基又は芳香族基である化合物が好ましい。
As the monomer represented by the above formula (i), R 1 , R 2 , and R 3 are a hydrogen atom or a methyl group, and L is a single bond, an alkylene group, or an oxyalkylene structure A compound in which X is an oxygen atom or an imino group, and Z is an aliphatic group, a heterocyclic group or an aromatic group is preferable.
As the monomer represented by the above formula (ii), a compound in which R 1 is a hydrogen atom or a methyl group, L is an alkylene group, and Z is an aliphatic group, a heterocyclic group or an aromatic group Is preferred. Examples of the monomer represented by the above formula (iii) include compounds in which R 4 , R 5 , and R 6 are a hydrogen atom or a methyl group, and Z is an aliphatic group, a heterocyclic group, or an aromatic group. preferable.
 式(i)~(iii)で表される代表的な化合物の例としては、アクリル酸エステル類、メタクリル酸エステル類、及び、スチレン類等のラジカル重合性化合物が挙げられる。
 なお、式(i)~(iii)で表される代表的な化合物の例としては、特開2013-249417号公報の段落0089~0093に記載の化合物を参照でき、これらの内容は本明細書に組み込まれる。
Examples of typical compounds represented by the formulas (i) to (iii) include radical polymerizable compounds such as acrylic acid esters, methacrylic acid esters, and styrenes.
As examples of typical compounds represented by formulas (i) to (iii), compounds described in paragraphs 0089 to 0093 of JP2013-249417A can be referred to, and the contents thereof are described in the present specification. Incorporated into.
 疎水性構造単位の含有量としては、高分子化合物の全質量に対して、10~90質量%が好ましく、20~80質量%がより好ましい。疎水性構造単位の含有量が上記範囲内だと、硬化性組成物は、より優れた本発明の効果を有する。 The content of the hydrophobic structural unit is preferably 10 to 90% by mass and more preferably 20 to 80% by mass with respect to the total mass of the polymer compound. When the content of the hydrophobic structural unit is within the above range, the curable composition has a more excellent effect of the present invention.
・顔料等と相互作用を形成しうる官能基を含有する構造単位
 高分子化合物には、顔料等と相互作用を形成しうる官能基を導入することができる。ここで、高分子化合物は、顔料等と相互作用を形成しうる官能基を含有する構造単位を更に含有することが好ましい。
 この顔料等と相互作用を形成しうる官能基としては、例えば、酸基、塩基性基、配位性基、及び、反応性を有する官能基等が挙げられる。
 高分子化合物が、酸基、塩基性基、配位性基、又は、反応性を有する官能基を含有する場合、それぞれ、酸基を含有する構造単位、塩基性基を含有する構造単位、配位性基を含有する構造単位、又は、反応性を有する構造単位を含有することが好ましい。
 特に、高分子化合物が、更に、酸基として、カルボン酸基等のアルカリ可溶性基を含有することで、高分子化合物に、アルカリ現像によるパターン形成のための現像性を付与することができる。
 すなわち、高分子化合物にアルカリ可溶性基を導入することで、硬化性組成物は、顔料等の分散に寄与する分散剤としての高分子化合物が、同時にアルカリ可溶性を有する。このような高分子化合物を含有する硬化性組成物は、より優れたアルカリ現像性(未露光部がアルカリ現像でより溶解しやすい)を有し、また、得られる硬化膜は、より優れた遮光性を有する。
Structural unit containing a functional group capable of forming an interaction with a pigment or the like A functional group capable of forming an interaction with a pigment or the like can be introduced into the polymer compound. Here, the polymer compound preferably further contains a structural unit containing a functional group capable of forming an interaction with a pigment or the like.
Examples of the functional group capable of forming an interaction with the pigment and the like include an acid group, a basic group, a coordination group, and a reactive functional group.
When the polymer compound contains an acid group, a basic group, a coordination group, or a reactive functional group, the structural unit containing an acid group, the structural unit containing a basic group, and a coordination group, respectively. It is preferable to contain a structural unit containing a coordinate group or a structural unit having reactivity.
In particular, when the polymer compound further contains an alkali-soluble group such as a carboxylic acid group as the acid group, developability for pattern formation by alkali development can be imparted to the polymer compound.
That is, by introducing an alkali-soluble group into the polymer compound, in the curable composition, the polymer compound as a dispersant that contributes to the dispersion of pigments and the like has alkali solubility at the same time. The curable composition containing such a polymer compound has better alkali developability (the unexposed portion is more easily dissolved by alkali development), and the resulting cured film has better light shielding. Have sex.
 酸基を含有する高分子化合物は、後述する溶剤とのより高い親和性を有する。従い、酸基を含有する高分子化合物を含有する硬化性組成物はより優れた塗布性を有する。
 これは、酸基を含有する構造単位における酸基が顔料等と相互作用しやすく、高分子化合物が顔料等を安定的に分散すると共に、顔料等を分散する高分子化合物の粘度がより低下し、高分子化合物自体も安定的に分散されやすいためであると推測される。
The polymer compound containing an acid group has a higher affinity with the solvent described later. Therefore, the curable composition containing the high molecular compound containing an acid group has more excellent coating property.
This is because the acid group in the structural unit containing an acid group is likely to interact with the pigment and the like, the polymer compound stably disperses the pigment and the like, and the viscosity of the polymer compound that disperses the pigment and the like further decreases. This is presumably because the polymer compound itself is easily dispersed stably.
 酸基としてアルカリ可溶性基を含有する構造単位は、上記のグラフト鎖を含有する構造単位と同一の構造単位であっても、異なる構造単位であってもよい。
 なお、本明細書において、酸基としてアルカリ可溶性基を含有する構造単位は、上記の疎水性構造単位とは異なる構造単位を意図する(すなわち、上記の疎水性構造単位には該当しない)。
The structural unit containing an alkali-soluble group as an acid group may be the same structural unit as the structural unit containing the graft chain or a different structural unit.
In the present specification, the structural unit containing an alkali-soluble group as an acid group intends a structural unit different from the hydrophobic structural unit (that is, does not correspond to the hydrophobic structural unit described above).
 顔料等と相互作用を形成しうる官能基のうち、酸基としては、例えば、カルボン酸基、スルホン酸基、リン酸基、及び、フェノール性水酸基等が挙げられ、カルボン酸基、スルホン酸基、及び、リン酸基からなる群から選択される少なくとも1種が好ましく、顔料等へのより優れた吸着力を有し、かつ、より優れた分散性を有する点で、カルボン酸基がより好ましい。
 すなわち、高分子化合物は、カルボン酸基、スルホン酸基、及び、リン酸基からなる群から選択される少なくとも1種を含有する構造単位を更に含有することが好ましい。
Among functional groups that can form an interaction with pigments, examples of the acid group include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a phenolic hydroxyl group. And at least one selected from the group consisting of phosphoric acid groups is preferred, and carboxylic acid groups are more preferred in that they have better adsorptive power to pigments and the like and have better dispersibility. .
That is, the polymer compound preferably further contains a structural unit containing at least one selected from the group consisting of a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.
 高分子化合物は、酸基を含有する構造単位を1種又は2種以上有してもよい。
 高分子化合物は、酸基を含有する構造単位を含有してもしなくてもよい。
 酸基を含有する構造単位の高分子化合物中における含有量は、高分子化合物の全質量に対して、5~80質量%が好ましく、アルカリ現像による画像強度のダメージがより抑制される点で、10~60質量%がより好ましい。
The polymer compound may have one or more structural units containing an acid group.
The polymer compound may or may not contain a structural unit containing an acid group.
The content of the structural unit containing an acid group in the polymer compound is preferably 5 to 80% by mass with respect to the total mass of the polymer compound, in that damage of image strength due to alkali development is further suppressed. 10 to 60% by mass is more preferable.
 顔料等と相互作用を形成しうる官能基のうち、塩基性基としては、例えば、第1級アミノ基、第2級アミノ基、第3級アミノ基、N原子を含有するヘテロ環基、及び、アミド基等が挙げられる。なかでも、顔料等へのより優れた吸着力を有し、かつ、より優れた分散性を有する点で、第3級アミノ基が好ましい。高分子化合物は、塩基性基1種を単独で含有しても、2種以上を含有してもよい。
 高分子化合物は、塩基性基を含有する構造単位を含有してもしなくてもよい。
 高分子化合物中における、塩基性基を含有する構造単位の含有量は、高分子化合物の全質量に対して、0.01~50質量%が好ましく、硬化性組成物がより優れた現像性を示す点で、0.01~30質量%がより好ましい。
Among the functional groups capable of forming an interaction with a pigment or the like, the basic group includes, for example, a primary amino group, a secondary amino group, a tertiary amino group, a heterocyclic group containing an N atom, and And an amide group. Among these, a tertiary amino group is preferable in that it has a better adsorptive power to pigments and the like and has a better dispersibility. The polymer compound may contain one basic group alone or two or more basic groups.
The polymer compound may or may not contain a structural unit containing a basic group.
The content of the structural unit containing a basic group in the polymer compound is preferably 0.01 to 50% by mass with respect to the total mass of the polymer compound, and the curable composition has better developability. In view of the above, 0.01 to 30% by mass is more preferable.
 顔料等と相互作用を形成しうる官能基のうち、配位性基、及び、反応性を有する官能基としては、例えば、アセチルアセトキシ基、トリアルコキシシリル基、イソシアネート基、酸無水物基、及び、酸塩化物基等が挙げられる。なかでも、顔料等へのより優れた吸着力を有し、顔料等をより分散させやすい点で、アセチルアセトキシ基が好ましい。高分子化合物は、配位性基、及び、反応性を有する官能基1種を単独で含有しても、2種以上を含有してもよい。高分子化合物は、配位性基を含有する構造単位、及び、反応性を有する官能基を含有する構造単位のいずれをも含有してもしなくてもよい。
 高分子化合物中における、配位性基を含有する構造単位、及び、反応性を有する官能基の含有量としては、高分子化合物の全質量に対して、10~80質量%が好ましく、硬化性組成物がより優れた現像性を示す点で、20~60質量%がより好ましい。
Among the functional groups capable of forming an interaction with a pigment or the like, as a coordinating group and a reactive functional group, for example, an acetylacetoxy group, a trialkoxysilyl group, an isocyanate group, an acid anhydride group, and And acid chloride groups. Of these, an acetylacetoxy group is preferable in that it has a better adsorbing power to pigments and the like and is more easily dispersed. The polymer compound may contain a coordinating group and a reactive functional group alone, or may contain two or more kinds. The polymer compound may or may not contain any of a structural unit containing a coordinating group and a structural unit containing a reactive functional group.
The content of the structural unit containing a coordinating group and the reactive functional group in the polymer compound is preferably 10 to 80% by mass relative to the total mass of the polymer compound, and is curable. 20-60 mass% is more preferable at the point which the composition shows the outstanding developability.
 高分子化合物が、グラフト鎖以外に、顔料等と相互作用を形成しうる官能基を含有する場合、顔料等と相互作用を形成しうる官能基を含有していればよく、これらの官能基がどのように導入されているかは特に限定されないが、高分子化合物は、下記式(iv)~(vi)で表される単量体に由来の構造単位から選択された1種以上の構造単位を含有することが好ましい。 When the polymer compound contains a functional group capable of forming an interaction with a pigment or the like in addition to the graft chain, the polymer compound may contain a functional group capable of forming an interaction with the pigment or the like. Although it is not particularly limited how the polymer is introduced, the polymer compound contains one or more structural units selected from structural units derived from monomers represented by the following formulas (iv) to (vi). It is preferable to contain.
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
 式(iv)~式(vi)中、R11、R12、及びR13は、それぞれ独立に、水素原子、ハロゲン原子(例えば、フッ素原子、塩素原子、及び、臭素原子等)、又は炭素数が1~6のアルキル基(例えば、メチル基、エチル基、及び、プロピル基等)を表す。
 式(iv)~式(vi)中、R11、R12、及びR13としては、それぞれ独立に、水素原子、又は、炭素数が1~3のアルキル基が好ましく、それぞれ独立に、水素原子又はメチル基がより好ましい。式(iv)中、R12及びR13は、それぞれ水素原子が更に好ましい。
In formulas (iv) to (vi), R 11 , R 12 , and R 13 each independently represent a hydrogen atom, a halogen atom (eg, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon number Represents an alkyl group of 1 to 6 (for example, a methyl group, an ethyl group, a propyl group, etc.).
In formulas (iv) to (vi), R 11 , R 12 and R 13 are each independently preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and each independently a hydrogen atom Or a methyl group is more preferable. In formula (iv), R 12 and R 13 are each more preferably a hydrogen atom.
 式(iv)中のXは、酸素原子(-O-)又はイミノ基(-NH-)を表し、酸素原子が好ましい。
 式(v)中のYは、メチン基又は窒素原子を表す。
X 1 in the formula (iv) represents an oxygen atom (—O—) or an imino group (—NH—), and preferably an oxygen atom.
Y in the formula (v) represents a methine group or a nitrogen atom.
 式(iv)~式(v)中のLは、単結合又は2価の連結基を表す。2価の連結基の定義は、上述した式(i)中のLで表される2価の連結基の定義と同じである。 L 1 in the formulas (iv) to (v) represents a single bond or a divalent linking group. The definition of the divalent linking group is the same as the definition of the divalent linking group represented by L in the above-described formula (i).
 Lとしては、単結合、又は、アルキレン基若しくはオキシアルキレン構造を含有する2価の連結基が好ましい。オキシアルキレン構造は、オキシエチレン構造又はオキシプロピレン構造がより好ましい。Lは、オキシアルキレン構造を2個以上繰り返して含有するポリオキシアルキレン構造を含有してもよい。ポリオキシアルキレン構造としては、ポリオキシエチレン構造又はポリオキシプロピレン構造が好ましい。ポリオキシエチレン構造は、-(OCHCH)n-で表され、nは、2以上の整数が好ましく、2~10の整数がより好ましい。 L 1 is preferably a single bond or a divalent linking group containing an alkylene group or an oxyalkylene structure. The oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure. L 1 may contain a polyoxyalkylene structure containing two or more oxyalkylene structures repeatedly. The polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure. The polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n—, where n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
 式(iv)~式(vi)中、Zは、グラフト鎖以外に顔料等と相互作用を形成しうる官能基を表し、カルボン酸基、又は、第三級アミノ基が好ましく、カルボン酸基がより好ましい。 In formulas (iv) to (vi), Z 1 represents a functional group capable of forming an interaction with a pigment or the like other than the graft chain, and is preferably a carboxylic acid group or a tertiary amino group. Is more preferable.
 式(vi)中、R14、R15、及びR16は、それぞれ独立に、水素原子、ハロゲン原子(例えば、フッ素原子、塩素原子、及び、臭素原子等)、炭素数が1~6のアルキル基(例えば、メチル基、エチル基、及び、プロピル基等)、-Z、又はL-Zを表す。ここでL及びZは、上記におけるL及びZと同義であり、好ましい例も同様である。R14、R15、及びR16としては、それぞれ独立に水素原子、又は炭素数が1~3のアルキル基が好ましく、水素原子がより好ましい。 In the formula (vi), R 14 , R 15 , and R 16 are each independently a hydrogen atom, a halogen atom (eg, a fluorine atom, a chlorine atom, a bromine atom, etc.), or an alkyl having 1 to 6 carbon atoms. group (e.g., methyl group, ethyl group, and propyl group), - Z 1, or an L 1 -Z 1. Wherein L 1 and Z 1 are the same meaning as L 1 and Z 1 in the above, it is the preferable examples. R 14 , R 15 and R 16 are each independently preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
 式(iv)で表される単量体としては、R11、R12、及びR13がそれぞれ独立に水素原子又はメチル基であって、Lがアルキレン基又はオキシアルキレン構造を含有する2価の連結基であって、Xが酸素原子又はイミノ基であって、Zがカルボン酸基である化合物が好ましい。
 式(v)で表される単量体としては、R11が水素原子又はメチル基であって、Lがアルキレン基であって、Zがカルボン酸基であって、Yがメチン基である化合物が好ましい。
 式(vi)で表される単量体としては、R14、R15、及びR16がそれぞれ独立に水素原子又はメチル基であって、Lが単結合又はアルキレン基であって、Zがカルボン酸基である化合物が好ましい。
As the monomer represented by the formula (iv), R 11 , R 12 , and R 13 are each independently a hydrogen atom or a methyl group, and L 1 contains an alkylene group or an oxyalkylene structure. And a compound in which X 1 is an oxygen atom or an imino group and Z 1 is a carboxylic acid group.
As the monomer represented by the formula (v), R 11 is a hydrogen atom or a methyl group, L 1 is an alkylene group, Z 1 is a carboxylic acid group, and Y is a methine group. Certain compounds are preferred.
As the monomer represented by the formula (vi), R 14 , R 15 , and R 16 are each independently a hydrogen atom or a methyl group, L 1 is a single bond or an alkylene group, and Z 1 A compound in which is a carboxylic acid group is preferred.
 以下に、式(iv)~式(vi)で表される単量体(化合物)の代表的な例を示す。
 単量体としては、例えば、メタクリル酸、クロトン酸、イソクロトン酸、分子内に付加重合性二重結合及び水酸基を含有する化合物(例えば、メタクリル酸2-ヒドロキシエチル)とコハク酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を含有する化合物とフタル酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を含有する化合物とテトラヒドロキシフタル酸無水物との反応物、分子内に付加重合性二重結合及び水酸基を含有する化合物と無水トリメリット酸との反応物、分子内に付加重合性二重結合及び水酸基を含有する化合物とピロメリット酸無水物との反応物、アクリル酸、アクリル酸ダイマー、アクリル酸オリゴマー、マレイン酸、イタコン酸、フマル酸、4-ビニル安息香酸、ビニルフェノール、及び、4-ヒドロキシフェニルメタクリルアミド等が挙げられる。
The following are typical examples of monomers (compounds) represented by the formulas (iv) to (vi).
Examples of the monomer include methacrylic acid, crotonic acid, isocrotonic acid, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule (for example, 2-hydroxyethyl methacrylate) and succinic anhydride. Product, a reaction product of a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule with phthalic anhydride, a compound containing an addition polymerizable double bond and a hydroxyl group in the molecule and tetrahydroxyphthalic anhydride Reaction product, a reaction product of a compound containing an addition polymerizable double bond and hydroxyl group in the molecule and trimellitic anhydride, a compound containing an addition polymerizable double bond and hydroxyl group in the molecule and pyromellitic anhydride Reactants with, acrylic acid, acrylic acid dimer, acrylic acid oligomer, maleic acid, itaconic acid, fumaric acid, 4-vinylbenzoic acid, vinylphenol, and 4-hydroxyphenyl methacrylamide.
 高分子化合物中における、顔料等と相互作用を形成しうる官能基を含有する構造単位の含有量は、顔料等との相互作用、経時安定性、及び現像液への浸透性の観点から、高分子化合物の全質量に対して、0.05~90質量%が好ましく、1.0~80質量%がより好ましく、10~70質量%が更に好ましい。 In the polymer compound, the content of the structural unit containing a functional group capable of forming an interaction with a pigment or the like is high from the viewpoint of the interaction with the pigment or the like, stability over time, and permeability to a developer. The amount is preferably 0.05 to 90% by mass, more preferably 1.0 to 80% by mass, and still more preferably 10 to 70% by mass with respect to the total mass of the molecular compound.
・その他の構造単位
 更に、高分子化合物は、画像強度等の諸性能を向上する目的で、本発明の効果を損なわない限りにおいて、グラフト鎖を含有する構造単位、疎水性構造単位、及び、顔料等と相互作用を形成しうる官能基を含有する構造単位とは異なる、他の構造単位(例えば、分散組成物に用いられる溶剤との親和性を有する官能基等を含有する構造単位等)を更に含有しもよい。
 他の構造単位としては、例えば、アクリロニトリル類、及び、メタクリロニトリル類からなる群から選択されるラジカル重合性化合物に由来の構造単位等が挙げられる。
 高分子化合物は、他の構造単位1種を単独で含有して、2種以上を含有してもよい。
 高分子化合物中における他の構造単位の含有量は、高分子化合物の全質量に対して、0%~80質量%が好ましく、10~60質量%がより好ましい。他の構造単位の含有量が0~80質量%であると、硬化性組成物は、より優れたパターン形成性を有する。
-Other structural units Furthermore, for the purpose of improving various performances such as image strength, the polymer compound is a structural unit containing a graft chain, a hydrophobic structural unit, and a pigment as long as the effects of the present invention are not impaired. Other structural units (for example, structural units containing functional groups having an affinity for the solvent used in the dispersion composition, etc.) are different from structural units containing functional groups capable of forming an interaction with Further, it may be contained.
Examples of the other structural unit include a structural unit derived from a radical polymerizable compound selected from the group consisting of acrylonitriles and methacrylonitriles.
The polymer compound may contain one other structural unit alone and may contain two or more kinds.
The content of other structural units in the polymer compound is preferably 0% to 80% by mass and more preferably 10 to 60% by mass with respect to the total mass of the polymer compound. When the content of other structural units is 0 to 80% by mass, the curable composition has more excellent pattern forming properties.
・高分子化合物の物性
 高分子化合物の酸価としては、特に制限されないが、0~250mgKOH/gが好ましく、10~200mgKOH/gがより好ましく、20~120mgKOH/gが更に好ましい。
 高分子化合物の酸価が250mgKOH/g以下だと、後述する現像工程において、支持体からの硬化膜の剥離がより抑制される。高分子化合物の酸価が10mgKOH/g以上だと、硬化性組成物はより優れたアルカリ現像性を有する。
 高分子化合物の酸価が20mgKOH/g以上だと、硬化性組成物中における顔料等の沈降がより抑制され、粗大粒子数がより少ないため、結果として、硬化性組成物はより優れた経時安定性を有する。
-Physical properties of the polymer compound The acid value of the polymer compound is not particularly limited, but is preferably 0 to 250 mgKOH / g, more preferably 10 to 200 mgKOH / g, and still more preferably 20 to 120 mgKOH / g.
When the acid value of the polymer compound is 250 mgKOH / g or less, peeling of the cured film from the support is further suppressed in the development step described later. When the acid value of the polymer compound is 10 mgKOH / g or more, the curable composition has more excellent alkali developability.
When the acid value of the polymer compound is 20 mgKOH / g or more, the precipitation of pigments and the like in the curable composition is further suppressed, and the number of coarse particles is smaller. Have sex.
 高分子化合物の酸価は、例えば、高分子化合物中における酸基の平均含有量から算出することができる。また、高分子化合物中の酸基を含有する構造単位の含有量を変化させることで所望の酸価を有する高分子化合物を得ることができる。 The acid value of the polymer compound can be calculated, for example, from the average content of acid groups in the polymer compound. Moreover, the high molecular compound which has a desired acid value can be obtained by changing content of the structural unit containing the acid group in a high molecular compound.
 高分子化合物の重量平均分子量は、硬化性組成物がより優れた現像性を有し、かつ、得られる硬化膜が、現像工程においてより剥離しにくい点で、GPC(Gel Permeation Chromatography:ゲル浸透クロマトグラフィー)法によるポリスチレン換算値として、4,000~300,000が好ましく、5,000~200,000がより好ましく、6,000~100,000が更に好ましく、10,000~50,000が特に好ましい。
 GPC法は、HLC-8020GPC(東ソー製)を用い、カラムとしてTSKgel SuperHZM-H、TSKgel SuperHZ4000、TSKgel SuperHZ2000(東ソー製、4.6mmID×15cm)を、溶離液としてTHF(テトラヒドロフラン)を用いる方法に基づく。なお、高分子化合物は、公知の方法に基づいて合成できる。
The weight average molecular weight of the polymer compound is that GPC (Gel Permeation Chromatography) is a gel permeation chromatography in that the curable composition has better developability and the resulting cured film is more difficult to peel in the development process. The polystyrene-converted value by the (graph) method is preferably 4,000 to 300,000, more preferably 5,000 to 200,000, still more preferably 6,000 to 100,000, and particularly preferably 10,000 to 50,000. preferable.
The GPC method is based on a method using HLC-8020GPC (manufactured by Tosoh), TSKgel SuperHZM-H, TSKgel SuperHZ4000, TSKgel SuperHZ2000 (manufactured by Tosoh, 4.6 mm ID × 15 cm) as a column and THF (tetrahydrofuran) as an eluent. . The polymer compound can be synthesized based on a known method.
 高分子化合物の具体例としては、楠本化成社製「DA-7301」、BYKChemie社製「Disperbyk-101(ポリアミドアミン燐酸塩)、107(カルボン酸エステル)、110(酸基を含有する共重合体)、111(リン酸系分散剤)、130(ポリアミド)、161、162、163、164、165、166、170、190(高分子共重合体)」、「BYK-P104、P105(高分子量不飽和ポリカルボン酸)」、EFKA社製「EFKA4047、4050~4010~4165(ポリウレタン系)、EFKA4330~4340(ブロック共重合体)、4400~4402(変性ポリアクリレート)、5010(ポリエステルアミド)、5765(高分子量ポリカルボン酸塩)、6220(脂肪酸ポリエステル)、6745(フタロシアニン誘導体)、6750(アゾ顔料誘導体)」、味の素ファインテクノ社製「アジスパーPB821、PB822、PB880、PB881」、共栄社化学社製「フローレンTG-710(ウレタンオリゴマー)」、「ポリフローNo.50E、No.300(アクリル系共重合体)」、楠本化成社製「ディスパロンKS-860、873SN、874、#2150(脂肪族多価カルボン酸)、#7004(ポリエーテルエステル)、DA-703-50、DA-705、DA-725」、花王社製「デモールRN、N(ナフタレンスルホン酸ホルマリン重縮合物)、MS、C、SN-B(芳香族スルホン酸ホルマリン重縮合物)」、「ホモゲノールL-18(高分子ポリカルボン酸)」、「エマルゲン920、930、935、985(ポリオキシエチレンノニルフェニルエーテル)」、「アセタミン86(ステアリルアミンアセテート)」、日本ルーブリゾール製「ソルスパース5000(フタロシアニン誘導体)、22000(アゾ顔料誘導体)、13240(ポリエステルアミン)、3000、12000、17000、20000、27000(末端部に機能部を含有する高分子)、24000、28000、32000、38500(グラフト共重合体)」、日光ケミカルズ社製「ニッコールT106(ポリオキシエチレンソルビタンモノオレアート)、MYS-IEX(ポリオキシエチレンモノステアレート)」、川研ファインケミカル製 ヒノアクトT-8000E等、信越化学工業製 オルガノシロキサンポリマーKP341、裕商製「W001:カチオン系界面活性剤」、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテル、ポリオキシエチレンオクチルフェニルエーテル、ポリオキシエチレンノニルフェニルエーテル、ポリエチレングリコールジラウレート、ポリエチレングリコールジステアレート、ソルビタン脂肪酸エステル等のノニオン系界面活性剤、「W004、W005、W017」等のアニオン系界面活性剤、森下産業製「EFKA-46、EFKA-47、EFKA-47EA、EFKAポリマー100、EFKAポリマー400、EFKAポリマー401、EFKAポリマー450」、サンノプコ製「ディスパースエイド6、ディスパースエイド8、ディスパースエイド15、ディスパースエイド9100」等の高分子分散剤、ADEKA製「アデカプルロニックL31、F38、L42、L44、L61、L64、F68、L72、P95、F77、P84、F87、P94、L101、P103、F108、L121、P-123」、及び三洋化成製「イオネット(商品名)S-20」等が挙げられる。また、アクリベースFFS-6752、アクリベースFFS-187、アクリキュア-RD-F8、及び、サイクロマーPを用いることもできる。
 また、ビックケミー社製のDISPERBYK-130、DISPERBYK-140、DISPERBYK-142、DISPERBYK-145、DISPERBYK-180、DISPERBYK-187、DISPERBYK-191、DISPERBYK-2001、DISPERBYK-2010、DISPERBYK-2012、DISPERBYK-2025、BYK-9076、味の素ファインテクノ社製のアジスパーPB821、アジスパーPB822、及び、アジスパーPB881等を用いることもできる。
 これらの高分子化合物は、1種を単独で用いても、2種以上を併用してもよい。
Specific examples of the polymer compound include “DA-7301” manufactured by Enomoto Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate)” manufactured by BYK Chemie, 107 (carboxylic acid ester), and 110 (copolymer containing acid group). ), 111 (phosphate dispersant), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170, 190 (polymer copolymer) ”,“ BYK-P104, P105 (non-high molecular weight) Saturated polycarboxylic acid) ”,“ EFKA 4047, 4050 to 4010 to 4165 (polyurethane) ”, EFKA 4330 to 4340 (block copolymer), 4400 to 4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (polyester), manufactured by EFKA High molecular weight polycarboxylate), 6220 (fatty acid polyester) ), 6745 (phthalocyanine derivative), 6750 (azo pigment derivative), “Ajisper PB821, PB822, PB880, PB881” manufactured by Ajinomoto Fine Techno Co., Ltd., “Floren TG-710 (urethane oligomer)” manufactured by Kyoeisha Chemical Co., Ltd., “Polyflow” No. 50E, No. 300 (acrylic copolymer) ”,“ Disparon KS-860, 873SN, 874, # 2150 (aliphatic polycarboxylic acid), # 7004 (polyether ester), DA, manufactured by Enomoto Kasei Co., Ltd. -703-50, DA-705, DA-725 "," Demol RN, N (Naphthalenesulfonic acid formalin polycondensate), MS, C, SN-B (aromatic sulfonic acid formalin polycondensate) "manufactured by Kao Corporation "Homogenol L-18 (polymeric polycarboxylic acid)", "Emulgen 920" 930, 935, 985 (polyoxyethylene nonylphenyl ether) ”,“ acetamine 86 (stearylamine acetate) ”,“ Solsperse 5000 (phthalocyanine derivative), 22000 (azo pigment derivative), 13240 (polyesteramine), manufactured by Nippon Lubrizol, 3000, 12000, 17000, 20000, 27000 (polymers containing a functional part at the end), 24000, 28000, 32000, 38500 (graft copolymer) ”,“ Nikkor T106 (polyoxyethylene sorbitan mono) manufactured by Nikko Chemicals Oleart), MYS-IEX (polyoxyethylene monostearate), Kawano Fine Chemical's Hinoact T-8000E, Shin-Etsu Chemical Organosiloxane Polymer KP341, Yusho W001: Cationic surfactant ", polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate Nonionic surfactants such as sorbitan fatty acid esters, anionic surfactants such as “W004, W005, W017”, “EFKA-46, EFKA-47, EFKA-47EA, EFKA polymer 100, EFKA polymer 400 manufactured by Morishita Sangyo , EFKA Polymer 401, EFKA Polymer 450 ", Sannopco" Disperse Aid 6, Disperse Aid 8, Disperse Aid 15, Dispa Polymer dispersants such as Suede 9100, manufactured by ADEKA "Adeka Pluronic L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, F87, P94, L101, P103, F108, L121, P -123 ", Sanyo Kasei" Ionet (trade name) S-20 ", and the like. Also, Acrybase FFS-6752, Acrybase FFS-187, Acrycure-RD-F8, and Cyclomer P can be used.
Also, DISPERBYK-130, DISPERBYK-140, DISPERBYK-142, DISPERBYK-145, DISPERBYK-180, DISPERBYK-187, DISPERBYK-2001, DISPERBYK-2001, DISPERBYK-2010, DISPERBY20-ER, and DISPERBY20-ERB made by BYK Chemie. BYK-9076, Ajisper PB821, Azisper PB822, Azisper PB881 manufactured by Ajinomoto Fine Techno Co., etc. can also be used.
These polymer compounds may be used alone or in combination of two or more.
 なお、高分子化合物としては、特開2013-249417号公報の段落0127~0129に記載の化合物を用いることもでき、これらの内容は本明細書に組み込まれる。 As the polymer compound, compounds described in paragraphs 0127 to 0129 of JP2013-249417A can be used, and the contents thereof are incorporated in the present specification.
 分散剤としては、特開2010-106268号公報の段落0037~0115(対応するUS2011/0124824の段落0075~0133)のグラフト共重合体を使用することもでき、これらの内容は本明細書に組み込まれる。
 分散剤としては、特開2011-153283号公報の段落0028~0084(対応するUS2011/0279759の段落0075~0133)の酸性基が連結基を介して結合してなる側鎖構造を含有する構成成分を含有する高分子化合物を用いることもでき、これらの内容は本明細書に組み込まれる。
 分散剤としては、特開2016-109763号公報の段落0033~0049に記載された樹脂を用いることもでき、この内容は本明細書に組み込まれる。
As the dispersant, a graft copolymer described in JP-A 2010-106268, paragraphs 0037 to 0115 (corresponding paragraphs 0075 to 0133 of US2011 / 0124824) can also be used, and the contents thereof are incorporated herein. It is.
As a dispersant, a constituent component having a side chain structure in which acidic groups in paragraphs 0028 to 0084 of JP 2011-153283 A (corresponding paragraphs 0075 to 0133 of US2011 / 0279759) are bonded via a linking group Can also be used, the contents of which are incorporated herein.
As the dispersant, resins described in paragraphs 0033 to 0049 of JP-A No. 2016-109763 can also be used, the contents of which are incorporated herein.
(バインダー樹脂)
 硬化性組成物は、バインダー樹脂を含有することが好ましい。
 バインダー樹脂の含有量は、硬化性組成物の全固形分に対して、0.1~30質量%が好ましい。
 バインダー樹脂は、1種を単独で用いても、2種以上を併用してもよい。バインダー樹脂を2種以上併用する場合は、その合計量が上記範囲内であることが好ましい。
(Binder resin)
The curable composition preferably contains a binder resin.
The content of the binder resin is preferably 0.1 to 30% by mass with respect to the total solid content of the curable composition.
Binder resin may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of binder resin together, it is preferable that the total amount is in the said range.
 バインダー樹脂としては、線状有機ポリマーを用いることが好ましい。このような線状有機ポリマーとしては、公知のものを任意に使用することができる。好ましくは、水現像又は弱アルカリ水現像を可能とするために、水又は弱アルカリ水に可溶性又は膨潤性である線状有機ポリマーが選択される。なかでも、バインダー樹脂としては、アルカリ可溶性樹脂(アルカリ可溶性を促進する基を含有する樹脂)が特に好ましい。 It is preferable to use a linear organic polymer as the binder resin. As such a linear organic polymer, a well-known thing can be used arbitrarily. Preferably, a linear organic polymer that is soluble or swellable in water or weak alkaline water is selected to enable water development or weak alkaline water development. Especially, as binder resin, alkali-soluble resin (resin containing group which accelerates | stimulates alkali solubility) is especially preferable.
 アルカリ可溶性樹脂とは、アルカリ可溶性を促進する基(アルカリ可溶性基)を含有する樹脂を意図し、既に説明した分散剤とは異なる樹脂を意図する。
 アルカリ可溶性樹脂としては、分子中に少なくとも1つのアルカリ可溶性基を含有する樹脂が挙げられ、例えば、ポリヒドロキシスチレン樹脂、ポリシロキサン樹脂、(メタ)アクリル樹脂、(メタ)アクリルアミド樹脂、(メタ)アクリル/(メタ)アクリルアミド共重合体、エポキシ系樹脂、及び、ポリイミド樹脂等が挙げられる。
The alkali-soluble resin means a resin containing a group that promotes alkali-solubility (alkali-soluble group), and a resin different from the dispersant already described.
Examples of the alkali-soluble resin include resins containing at least one alkali-soluble group in the molecule, such as polyhydroxystyrene resin, polysiloxane resin, (meth) acrylic resin, (meth) acrylamide resin, and (meth) acrylic. / (Meth) acrylamide copolymer, epoxy resin, and polyimide resin.
 アルカリ可溶性樹脂の具体例としては、不飽和カルボン酸とエチレン性不飽和化合物との共重合体が挙げられる。
 不飽和カルボン酸としては特に制限されないが、(メタ)アクリル酸、クロトン酸、及び、ビニル酢酸等のモノカルボン酸類;イタコン酸、マレイン酸、及び、フマル酸等のジカルボン酸、又は、その酸無水物;フタル酸モノ(2-(メタ)アクリロイロキシエチル)等の多価カルボン酸モノエステル類;等が挙げられる。
Specific examples of the alkali-soluble resin include a copolymer of an unsaturated carboxylic acid and an ethylenically unsaturated compound.
Although it does not restrict | limit especially as unsaturated carboxylic acid, Monocarboxylic acids, such as (meth) acrylic acid, crotonic acid, and vinyl acetic acid; Dicarboxylic acids, such as itaconic acid, maleic acid, and fumaric acid, or its acid anhydride And polycarboxylic acid monoesters such as monophthalic acid (2- (meth) acryloyloxyethyl).
 共重合可能なエチレン性不飽和化合物としては、(メタ)アクリル酸メチル等が挙げられる。特開2010-97210号公報の段落0027、及び、特開2015-68893号公報の段落0036~0037に記載の化合物を用いることもでき、上記の内容は本明細書に組み込まれる。 Examples of the copolymerizable ethylenically unsaturated compound include methyl (meth) acrylate. The compounds described in paragraphs 0027 of JP2010-97210A and paragraphs 0036 to 0037 of JP2015-68893A can also be used, and the above contents are incorporated herein.
 また、共重合可能なエチレン性不飽和化合物であって、側鎖にエチレン性不飽和基を含有する化合物を組み合わせて用いてもよい。エチレン性不飽和基としては、(メタ)アクリル酸基が好ましい。側鎖にエチレン性不飽和基を含有するアクリル樹脂は、例えば、カルボン酸基を含有するアクリル樹脂のカルボン酸基に、グリシジル基又は脂環式エポキシ基を含有するエチレン性不飽和化合物を付加反応させて得ることができる。 Also, a copolymerizable ethylenically unsaturated compound that contains an ethylenically unsaturated group in the side chain may be used in combination. As the ethylenically unsaturated group, a (meth) acrylic acid group is preferable. Acrylic resin containing an ethylenically unsaturated group in the side chain, for example, an addition reaction of an ethylenically unsaturated compound containing a glycidyl group or an alicyclic epoxy group to a carboxylic acid group of an acrylic resin containing a carboxylic acid group Can be obtained.
 アルカリ可溶性樹脂としては、例えば、特開昭59-44615号、特公昭54-34327号、特公昭58-12577号、特公昭54-25957号、特開昭54-92723号、特開昭59-53836号、及び、特開昭59-71048号に記載されている側鎖にカルボン酸基を含有するラジカル重合体;欧州特許第993966号、欧州特許第1204000号、及び、特開2001-318463号等の各公報に記載されているアルカリ可溶性基を含有するアセタール変性ポリビニルアルコール系バインダー樹脂;ポリビニルピロリドン;ポリエチレンオキサイド;アルコール可溶性ナイロン、及び、2,2-ビス-(4-ヒドロキシフェニル)-プロパンとエピクロロヒドリンとの反応物であるポリエーテル等;国際公開第2008/123097号に記載のポリイミド樹脂;等を用いることができる。 Examples of the alkali-soluble resin include JP-A-59-44615, JP-B-54-34327, JP-B-58-12777, JP-B-54-25957, JP-A-54-92723, JP-A-59-. Radical polymers containing a carboxylic acid group in the side chain described in JP-A No. 53836 and JP-A-59-71048; European Patent No. 993966, European Patent No. 1204000, and JP-A No. 2001-318463 An acetal-modified polyvinyl alcohol binder resin containing an alkali-soluble group described in each of the above publications; polyvinyl pyrrolidone; polyethylene oxide; alcohol-soluble nylon; and 2,2-bis- (4-hydroxyphenyl) -propane Polyether, etc., which is a reaction product with epichlorohydrin; International Publication No. And the like can be used; polyimide resin described in JP 008/123097.
 アルカリ可溶性樹脂としては、例えば、特開2016-75845号公報の段落0225~0245に記載の化合物を用いることもでき、上記内容は本明細書に組み込まれる。 As the alkali-soluble resin, for example, compounds described in paragraphs 0225 to 0245 of JP-A-2016-75845 can be used, and the above contents are incorporated in the present specification.
 アルカリ可溶性樹脂としては、ポリイミド前駆体を用いることもできる。ポリイミド前駆体は、酸無水物基を含有する化合物とジアミン化合物とを40~100℃下において付加重合反応することにより得られる樹脂を意図する。
 ポリイミド前駆体としては、例えば、式(1)で表される繰り返し単位を含有する樹脂が挙げられる。ポリイミド前駆体の構造としては、例えば、下記式(2)で示されるアミック酸構造と、アミック酸構造が一部イミド閉環してなる下記式(3)、及び/又は、全てイミド閉環した下記式(4)で示されるイミド構造を含有するものが挙げられる。
 なお、本明細書において、アミック酸構造を有するポリイミド前駆体をポリアミック酸ということがある。
A polyimide precursor can also be used as the alkali-soluble resin. The polyimide precursor intends a resin obtained by subjecting a compound containing an acid anhydride group and a diamine compound to an addition polymerization reaction at 40 to 100 ° C.
As a polyimide precursor, resin containing the repeating unit represented by Formula (1) is mentioned, for example. Examples of the structure of the polyimide precursor include an amic acid structure represented by the following formula (2), the following formula (3) in which the amic acid structure is partially imide ring-closed, and / or the following formula in which all imide rings are closed: The thing containing the imide structure shown by (4) is mentioned.
In this specification, a polyimide precursor having an amic acid structure may be referred to as a polyamic acid.
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000035
 上記式(1)~(4)において、Rは炭素数2~22の4価の有機基を表し、Rは炭素数1~22の2価の有機基を表し、nは1又は2を表す。 In the above formulas (1) to (4), R 1 represents a tetravalent organic group having 2 to 22 carbon atoms, R 2 represents a divalent organic group having 1 to 22 carbon atoms, and n is 1 or 2 Represents.
 上記ポリイミド前駆体としては、例えば、特開2008-106250号公報の段落0011~0031に記載の化合物、特開2016-122101号公報の段落0022~0039に記載の化合物、及び、特開2016-68401号公報の段落0061~0092に記載の化合物等が挙げられ、上記の内容は本明細書に組み込まれる。 Examples of the polyimide precursor include compounds described in paragraphs 0011 to 0031 of JP-A-2008-106250, compounds described in paragraphs 0022 to 0039 of JP-A-2016-122101, and JP-A-2016-68401. The compounds described in paragraphs 0061 to 0092 of the publication are listed, and the above contents are incorporated in the present specification.
 アルカリ可溶性樹脂は、硬化性組成物により得られる硬化膜のパターン形状がより優れる点で、ポリイミド樹脂、及び、ポリイミド前駆体からなる群から選択される少なくとも1種を含有することが好ましい。
 アルカリ可溶性基を含有するポリイミド樹脂としては、特に制限されず、公知のアルカリ可溶性基を含有するポリイミド樹脂を用いることができる。上記ポリイミド樹脂としては、例えば、特開2014-137523号公報の段落0050に記載された樹脂、特開2015-187676号公報の段落0058に記載された樹脂、及び、特開2014-106326号公報の段落0012~0013に記載された樹脂等が挙げられ、上記の内容は本明細書に組み込まれる。
The alkali-soluble resin preferably contains at least one selected from the group consisting of a polyimide resin and a polyimide precursor in that the pattern shape of the cured film obtained from the curable composition is more excellent.
The polyimide resin containing an alkali-soluble group is not particularly limited, and a known polyimide resin containing an alkali-soluble group can be used. Examples of the polyimide resin include a resin described in paragraph 0050 of JP-A-2014-137523, a resin described in paragraph 0058 of JP-A-2015-187676, and JP-A-2014-106326. Examples include the resins described in paragraphs 0012 to 0013, and the above contents are incorporated in the present specification.
<重合禁止剤>
 硬化性組成物は重合禁止剤を含有することが好ましい。重合禁止剤としては特に制限されず、公知の重合禁止剤を用いることができる。重合禁止剤としては、例えば、フェノール系重合禁止剤(例えば、p-メトキシフェノール、2,5-ジ-tert-ブチル-4-メチルフェノール、2,6-ジ-tert-ブチル-4-メチルフェノール、4,4’-チオビス(3-メチル-6-t-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、及び、4-メトキシナフトール等);ハイドロキノン系重合禁止剤(例えば、ハイドロキノン、及び、2,6-ジ-tert-ブチルハイロドロキノン等);キノン系重合禁止剤(例えば、ベンゾキノン等);フリーラジカル系重合禁止剤(例えば、2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル、及び、4-ヒドロキシ-2,2,6,6-テトラメチルピペリジン1-オキシルフリーラジカル等);ニトロベンゼン系重合禁止剤(例えば、ニトロベンゼン、及び、4-ニトロトルエン等);フェノチアジン系重合禁止剤(例えば、フェノチアジン、及び、2-メトキシフェノチアジン等);等が挙げられる。
 なかでも、硬化性組成物がより優れた本発明の効果を有する点で、フェノール系重合禁止剤、又は、フリーラジカル系重合禁止剤が好ましい。
 なお、上記重合開始剤は、硬化性組成物の調製時に他の成分とともに混合されてもよいし、上記樹脂の合成の際等に用いられたものが、上記樹脂とともに、その他の成分と混合されてもよい。
<Polymerization inhibitor>
The curable composition preferably contains a polymerization inhibitor. It does not restrict | limit especially as a polymerization inhibitor, A well-known polymerization inhibitor can be used. Examples of the polymerization inhibitor include phenol-based polymerization inhibitors (for example, p-methoxyphenol, 2,5-di-tert-butyl-4-methylphenol, 2,6-di-tert-butyl-4-methylphenol). 4,4'-thiobis (3-methyl-6-tert-butylphenol), 2,2'-methylenebis (4-methyl-6-tert-butylphenol), 4-methoxynaphthol, etc .; Hydroquinone polymerization prohibited Agents (for example, hydroquinone and 2,6-di-tert-butylhydroquinone); quinone polymerization inhibitors (for example, benzoquinone); free radical polymerization inhibitors (for example, 2,2,6, etc.) 6-tetramethylpiperidine 1-oxyl free radical and 4-hydroxy-2,2,6,6-tetramethylpiperidine 1-o Sill free radicals, etc.); nitrobenzene-based polymerization inhibitor (e.g., nitrobenzene, and 4-nitrotoluene and the like); phenothiazine-based polymerization inhibitor (e.g., phenothiazine and 2-methoxy phenothiazine, etc.), and the like.
Among these, a phenol polymerization inhibitor or a free radical polymerization inhibitor is preferable in that the curable composition has the more excellent effects of the present invention.
The polymerization initiator may be mixed with other components at the time of preparing the curable composition, or the one used in the synthesis of the resin may be mixed with the other components together with the resin. May be.
 硬化性組成物中における重合禁止剤の含有量としては特に制限されないが、硬化性組成物がより優れた経時安定性、及び、より優れた硬化性を有する点で、硬化性組成物の全固形分に対して、0.0001~1質量%が好ましい。
 重合禁止剤は1種を単独で用いても、2種以上を併用してもよい。2種以上の重合禁止剤を併用する場合には、合計含有量が上記範囲内であることが好ましい。
 重合禁止剤は、硬化性基を含有する樹脂と共に用いる場合にその効果が顕著である。例えば、分散組成物の作製中;分散組成物の作製後;硬化性組成物の作製中;硬化性組成物作製後;等、分散組成物、及び/又は、硬化性組成物が高温となったり、長期保管されたり等して、硬化性基を含有する樹脂の重合が進む懸念がある場合であっても、問題なく用いることができる。
The content of the polymerization inhibitor in the curable composition is not particularly limited, but the total solid of the curable composition in that the curable composition has better temporal stability and better curability. The content is preferably 0.0001 to 1% by mass relative to the minute.
A polymerization inhibitor may be used individually by 1 type, or may use 2 or more types together. When two or more polymerization inhibitors are used in combination, the total content is preferably within the above range.
The effect of the polymerization inhibitor is remarkable when used together with a resin containing a curable group. For example, during the preparation of the dispersion composition; after the preparation of the dispersion composition; during the preparation of the curable composition; after the preparation of the curable composition; Even when the resin containing a curable group is likely to be polymerized due to long-term storage or the like, it can be used without any problem.
<溶剤>
 硬化性組成物は、溶剤を含有してもよい。
 溶剤としては特に制限されず公知の溶剤を用いることができる。
 硬化性組成物中における溶剤の含有量としては特に制限されないが、一般に、硬化性組成物の固形分20~90質量%となるよう調整されることが好ましく、30~90質量%となるよう調整されることがより好ましい。
 溶剤は1種を単独で用いても、2種以上を併用してもよい。2種以上の溶剤を併用する場合には、硬化性組成物の全固形分が上記範囲内となるよう調整されることが好ましい。
<Solvent>
The curable composition may contain a solvent.
The solvent is not particularly limited, and a known solvent can be used.
The content of the solvent in the curable composition is not particularly limited, but in general, it is preferably adjusted so that the solid content of the curable composition is 20 to 90% by mass, and adjusted to be 30 to 90% by mass. More preferably.
A solvent may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of solvent together, it is preferable to adjust so that the total solid content of a curable composition may become in the said range.
 溶剤としては、例えば、水、又は、有機溶剤が挙げられる。
 有機溶剤としては、例えば、アセトン、メチルエチルケトン、シクロヘキサン、酢酸エチル、エチレンジクロライド、テトラヒドロフラン、トルエン、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールジメチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、アセチルアセトン、シクロヘキサノン、シクロペンタノン、ジアセトンアルコール、エチレングリコールモノメチルエーテルアセテート、エチレングリコールエチルエーテルアセテート、エチレングリコールモノイソプロピルエーテル、エチレングリコールモノブチルエーテルアセテート、3-メトキシプロパノール、メトキシメトキシエタノール、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、3-メトキシプロピルアセテート、N,N-ジメチルホルムアミド、ジメチルスルホキシド、γ-ブチロラクトン、酢酸エチル、酢酸ブチル、乳酸メチル、N-メチル-2-ピロリドン、及び、乳酸エチル等が挙げられるが、これらに制限されない。
As a solvent, water or an organic solvent is mentioned, for example.
Examples of the organic solvent include acetone, methyl ethyl ketone, cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, acetylacetone. , Cyclohexanone, cyclopentanone, diacetone alcohol, ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether acetate, 3-methoxypropanol, methoxymethoxyethanol, diethylene glycol mono Chill ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, 3-methoxypropyl acetate, N, N-dimethylformamide, dimethyl sulfoxide, γ-butyrolactone, ethyl acetate, Examples thereof include, but are not limited to, butyl acetate, methyl lactate, N-methyl-2-pyrrolidone, and ethyl lactate.
<界面活性剤>
 硬化性組成物は、界面活性剤を含有することが好ましい。界面活性剤を含有する硬化性組成物はより優れた塗布性を有する。
 硬化性組成物中における、界面活性剤の含有量としては特に制限されないが、硬化性組成物の全固形分に対して、0.001~2.0質量%が好ましい。
 界面活性剤は、1種を単独で用いても、2種以上を併用してもよい。界面活性剤を2種以上併用する場合は、合計量が上記範囲内であることが好ましい。
<Surfactant>
The curable composition preferably contains a surfactant. The curable composition containing a surfactant has better coating properties.
The content of the surfactant in the curable composition is not particularly limited, but is preferably 0.001 to 2.0% by mass with respect to the total solid content of the curable composition.
Surfactant may be used individually by 1 type, or may use 2 or more types together. When two or more surfactants are used in combination, the total amount is preferably within the above range.
 界面活性剤としては、例えば、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、及び、シリコーン系界面活性剤等が挙げられる。 Examples of the surfactant include a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant.
 例えば、硬化性組成物がフッ素系界面活性剤を含有すると、硬化性組成物の液特性(特に、流動性)がより向上する。即ち、フッ素系界面活性剤を含有する硬化性組成物を用いて支持体上に硬化性組成物層を形成する場合、支持体と硬化性組成物との界面張力を低下させることにより、硬化性組成物の支持体への濡れ性が改善され、硬化性組成物の塗布性が向上する。このため、少量の液量で数μm程度の硬化性組成物層を形成した場合であっても、厚みムラの小さいより均一な厚みを有する硬化性組成物層を形成することができる。 For example, when the curable composition contains a fluorosurfactant, the liquid properties (particularly fluidity) of the curable composition are further improved. That is, when a curable composition layer is formed on a support using a curable composition containing a fluorosurfactant, the curability is reduced by reducing the interfacial tension between the support and the curable composition. The wettability of the composition to the support is improved, and the applicability of the curable composition is improved. For this reason, even when a curable composition layer of about several μm is formed with a small amount of liquid, it is possible to form a curable composition layer having a more uniform thickness with less thickness unevenness.
 フッ素系界面活性剤中のフッ素含有量としては、特に制限されないが、3~40質量%が好ましく、5~30質量%がより好ましく、7~25質量%が更に好ましい。フッ素含有量が、3~40質量%であるフッ素系界面活性剤を含有する硬化性組成物によれば、より均一な厚みを有する硬化性組成物層を形成することができ、結果として、硬化性組成物はより優れた省液性を有する。また、上記範囲内であると、フッ素系界面活性剤が、硬化性組成物中でより溶解しやすい。 The fluorine content in the fluorosurfactant is not particularly limited, but is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and further preferably 7 to 25% by mass. According to the curable composition containing a fluorine-based surfactant having a fluorine content of 3 to 40% by mass, a curable composition layer having a more uniform thickness can be formed, and as a result The composition has superior liquid-saving properties. Moreover, it is easy to melt | dissolve a fluorine-type surfactant in a curable composition as it is in the said range.
 フッ素系界面活性剤としては、例えば、メガファックF171、同F172、同F173、同F176、同F177、同F141、同F142、同F143、同F144、同R30、同F437、同F475、同F479、同F482、同F554、同F780(以上、DIC(株)製)、フロラードFC430、同FC431、同FC171(以上、住友スリーエム(株)製)、サーフロンS-382、同SC-101、同SC-103、同SC-104、同SC-105、同SC-1068、同SC-381、同SC-383、同S-393、同KH-40(以上、旭硝子(株)製)、PF636、PF656、PF6320、PF6520、及び、PF7002(OMNOVA社製)等が挙げられる。
 フッ素系界面活性剤としてブロックポリマーを用いることもでき、例えば、特開第2011-89090号公報に記載の化合物を用いることもでき、上記内容は本明細書に組み込まれる。
Examples of the fluorosurfactant include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780 (above DIC Corporation), Florad FC430, FC431, FC171 (Sumitomo 3M Limited), Surflon S-382, SC-101, SC- 103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, K-H-40 (above, manufactured by Asahi Glass Co., Ltd.), PF636, PF656, PF6320, PF6520, PF7002 (made by OMNOVA) etc. are mentioned.
A block polymer can be used as the fluorosurfactant, for example, a compound described in JP-A-2011-89090 can be used, and the above contents are incorporated herein.
<紫外線吸収剤>
 硬化性組成物は、紫外線吸収剤を含有してもよい。紫外線吸収剤を含有する硬化性組成物により得られる硬化膜はより優れたパターン形状(より精細なパターン形状)を有する。
 紫外線吸収剤としては、サリシレート系、ベンゾフェノン系、ベンゾトリアゾール系、置換アクリロニトリル系、及び、トリアジン系等の紫外線吸収剤を用いることができる。
 紫外線吸収剤としては、例えば、特開2012-068418号公報の段落0137~0142(対応するUS2012/0068292の段落0251~0254)に記載の化合物を用いることができ、上記内容は本明細書に組み込まれる。
 紫外線吸収剤としては、ジエチルアミノ-フェニルスルホニル系紫外線吸収剤(大東化学社製、商品名:UV-503)等を用いることもできる。
 紫外線吸収剤としては、特開2012-32556号公報の段落0134~0148に記載の化合物を用いることもでき、上記内容は本明細書に組み込まれる。
 硬化性組成物中における紫外線吸収剤の含有量としては、特に制限されないが、硬化性組成物の全固形分に対して、0.001~15質量%が好ましく、0.01~10質量%がより好ましく、0.1~5質量%が更に好ましい。
<Ultraviolet absorber>
The curable composition may contain an ultraviolet absorber. The cured film obtained by the curable composition containing an ultraviolet absorber has a more excellent pattern shape (fine pattern shape).
As the UV absorber, UV absorbers such as salicylate, benzophenone, benzotriazole, substituted acrylonitrile, and triazine can be used.
As the ultraviolet absorber, for example, compounds described in paragraphs 0137 to 0142 (corresponding paragraphs 0251 to 0254 of US2012 / 0068292) of JP2012-068418A can be used, and the above contents are incorporated in the present specification. It is.
As the ultraviolet absorber, a diethylamino-phenylsulfonyl ultraviolet absorber (manufactured by Daito Chemical Co., Ltd., trade name: UV-503) or the like can also be used.
As the ultraviolet absorber, the compounds described in paragraphs 0134 to 0148 of JP 2012-32556 A can also be used, and the above contents are incorporated herein.
The content of the ultraviolet absorber in the curable composition is not particularly limited, but is preferably 0.001 to 15% by mass, and 0.01 to 10% by mass with respect to the total solid content of the curable composition. More preferred is 0.1 to 5% by mass.
<シランカップリング剤>
 硬化性組成物はシランカップリング剤を含有してもよい。
 本明細書において、シランカップリング剤とは、分子中に以下の加水分解性基とそれ以外の官能基とを含有する化合物を意図する。上記加水分解性基とは、珪素原子に直結し、加水分解反応及び/又は縮合反応によってシロキサン結合を生じ得る置換基を意図する。加水分解性基としては、例えば、ケイ素原子に直結した、ハロゲン原子、アルコキシ基、アシルオキシ基、及びアルケニルオキシ基等が挙げられる。加水分解性基が炭素原子を含有する場合、その炭素数は6以下であることが好ましく、4以下であることがより好ましい。特に、炭素数4以下のアルコキシ基又は炭素数4以下のアルケニルオキシ基が好ましい。
<Silane coupling agent>
The curable composition may contain a silane coupling agent.
In this specification, a silane coupling agent intends the compound which contains the following hydrolysable groups and other functional groups in a molecule | numerator. The hydrolyzable group is intended to be a substituent that is directly bonded to a silicon atom and can generate a siloxane bond by a hydrolysis reaction and / or a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group, and an alkenyloxy group directly connected to a silicon atom. When the hydrolyzable group contains a carbon atom, the number of carbon atoms is preferably 6 or less, and more preferably 4 or less. In particular, an alkoxy group having 4 or less carbon atoms or an alkenyloxy group having 4 or less carbon atoms is preferable.
 シランカップリング剤は、加水分解性基が結合した珪素原子以外の珪素原子、及び、フッ素原子のいずれをも含有しないことが好ましい。上記シランカップリング剤を含有する硬化性組成物を用いて支持体上に硬化膜を形成すると、硬化膜は、支持体へのより優れた密着性を有する。 It is preferable that the silane coupling agent does not contain any silicon atom other than the silicon atom to which the hydrolyzable group is bonded, and no fluorine atom. When a cured film is formed on a support using the curable composition containing the silane coupling agent, the cured film has better adhesion to the support.
 硬化性組成物中におけるシランカップリング剤の含有量は、硬化性組成物中の全固形分に対して、0.1~10質量%が好ましく、0.5~8質量%がより好ましく、1.0~6質量%が更に好ましい。
 シランカップリング剤は1種を単独で用いても、2種以上を併用してもよい。2種以上のシランカップリング剤を併用する場合には、合計含有量が上記範囲内であることが好ましい。
The content of the silane coupling agent in the curable composition is preferably 0.1 to 10% by mass, more preferably 0.5 to 8% by mass with respect to the total solid content in the curable composition. More preferably, the content is 0.0 to 6% by mass.
A silane coupling agent may be used individually by 1 type, or may use 2 or more types together. When using 2 or more types of silane coupling agents together, it is preferable that total content is in the said range.
〔硬化性組成物の製造方法〕
 硬化性組成物は、上記の各成分を公知の混合方法(例えば、攪拌機、ホモジナイザー、高圧乳化装置、湿式粉砕機、及び、湿式分散機等を用いた混合方法)により混合して調製することができる。
 硬化性組成物の調製に際しては、各成分を一括配合してもよいし、各成分をそれぞれ、溶剤に溶解又は分散した後に逐次配合してもよい。また、配合する際の投入順序及び作業条件は特に制限されない。
[Method for producing curable composition]
The curable composition can be prepared by mixing the above components by a known mixing method (for example, a mixing method using a stirrer, a homogenizer, a high-pressure emulsifier, a wet pulverizer, a wet disperser, or the like). it can.
In preparing the curable composition, each component may be blended at once, or each component may be blended sequentially after being dissolved or dispersed in a solvent. Moreover, the order of input and the working conditions when blending are not particularly limited.
 硬化性組成物は、異物の除去、欠陥の低減などの目的で、フィルタでろ過することが好ましい。フィルタとしては、特に制限されず、公知のフィルタを用いることができる。
 フィルタの材料としては、特に制限されないが、例えば、PTFE(ポリテトラフルオロエチレン)等のフッ素樹脂、ナイロン等のポリアミド系樹脂、及び、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン系樹脂(高密度、超高分子量を含む)等により形成されるフィルタが挙げられる。なかでもポリプロピレン(高密度ポリプロピレンを含む)、又は、ナイロンにより形成されるフィルタが好ましい。
 フィルタの孔径としては、特に制限されないが、一般に、0.1~7.0μmが好ましく、0.2~2.5μmがより好ましく、0.2~1.5μmが更に好ましく、0.3~0.7μmが特に好ましい。この範囲とすることにより、顔料のろ過詰まりを抑えつつ、顔料に含まれる不純物及び凝集物など、微細な異物を確実に除去することが可能となる。
 フィルタを使用する際、異なるフィルタを組み合わせてもよい。その際、第1のフィルタでのフィルタリングは、1回のみでもよいし、2回以上行ってもよい。異なるフィルタを組み合わせて2回以上フィルタリングを行う場合、2回目のフィルタリングに用いるフィルタの孔径は、1回目のフィルタリングに用いるフィルタの孔径と比較して、同じ、又は、大きい方が好ましい。また、材料が同じで、異なる孔径のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。
 市販のフィルタとしては、例えば、日本ポール社製、アドバンテック東洋社製、日本インテグリス社製(旧日本マイクロリス社)、及び、キッツマイクロフィルタ社製等のフィルタが挙げられる。
The curable composition is preferably filtered with a filter for the purpose of removing foreign substances and reducing defects. The filter is not particularly limited, and a known filter can be used.
The material of the filter is not particularly limited. For example, fluororesins such as PTFE (polytetrafluoroethylene), polyamide resins such as nylon, and polyolefin resins such as polyethylene and polypropylene (PP) (high density, super And a filter formed by high molecular weight). Of these, a filter formed of polypropylene (including high-density polypropylene) or nylon is preferable.
The pore size of the filter is not particularly limited, but is generally preferably 0.1 to 7.0 μm, more preferably 0.2 to 2.5 μm, still more preferably 0.2 to 1.5 μm, and 0.3 to 0. .7 μm is particularly preferred. By setting this range, it is possible to reliably remove fine foreign matters such as impurities and aggregates contained in the pigment while suppressing filtration clogging of the pigment.
When using filters, different filters may be combined. At that time, the filtering by the first filter may be performed only once or may be performed twice or more. When filtering two or more times by combining different filters, the pore diameter of the filter used for the second filtering is preferably the same or larger than the pore diameter of the filter used for the first filtering. In addition, filters having the same material and different pore diameters may be combined. The pore diameter here can refer to the nominal value of the filter manufacturer.
Examples of commercially available filters include filters manufactured by Nippon Pole, Advantech Toyo, Nippon Integris (formerly Nippon Microlith), and Kitz Microfilter.
 第2のフィルタは、上記第1のフィルタと同様の材料等で形成されたものを使用することができる。第2のフィルタの孔径は、特に制限されないが、一般に、0.2~10.0μmが好ましく、0.2~7.0μmがより好ましく、0.3~6.0μmが更に好ましい。
 硬化性組成物は、金属(粒子、及び、イオン)、ハロゲンを含む金属塩、酸、及び、アルカリ等の不純物を実質的に含有しないことが好ましい。なお、本明細書において、実質的に含有しない、とは、下記測定方法により検出できないことを意図する。
 硬化性組成物、上記成分、及び、上記フィルタ等に含有される不純物の含有量としては特に制限されないが、それぞれ全質量に対して1質量ppm以下が好ましく、1質量ppb以下がより好ましく、100質量ppt以下が更に好ましく、10質量ppt以下が特に好ましく、実質的に含有しないことが最も好ましい。
 なお、上記不純物の含有量は、誘導結合プラズマ質量分析装置(横河アナリティカルシステムズ製、Agilent 7500cs型)により測定することができる。
 なお、ppmはparts per million、ppbは、parts per billion、pptはparts per trillionを表す。
As the second filter, a filter formed of the same material as the first filter can be used. The pore size of the second filter is not particularly limited, but is generally preferably 0.2 to 10.0 μm, more preferably 0.2 to 7.0 μm, still more preferably 0.3 to 6.0 μm.
It is preferable that the curable composition does not substantially contain impurities such as metals (particles and ions), metal salts containing halogens, acids, and alkalis. In the present specification, the phrase “substantially not contained” means that it cannot be detected by the following measurement method.
Although it does not restrict | limit especially as content of the impurity contained in a curable composition, the said component, the said filter, etc., respectively 1 mass ppm or less is preferable with respect to the total mass, 1 mass ppb or less is more preferable, 100 The mass ppt or less is more preferable, the mass ppt or less is particularly preferable, and it is most preferable that the mass is not substantially contained.
The content of the impurity can be measured by an inductively coupled plasma mass spectrometer (manufactured by Yokogawa Analytical Systems, Agilent 7500cs type).
Note that ppm represents parts per million, ppb represents parts per billion, and ppt represents parts per trigger.
〔容器〕
 硬化性組成物は、使用時まで一時的に容器内に保管してもよい。硬化性組成物を保管するための容器としては特に制限されず、公知の容器を用いることができる。
 硬化性組成物を保管する容器としては、容器内のクリーン度が高く、不純物の溶出が少ないものが好ましい。例えば、半導体用途向けに市販されている用途のものを使用してもよい。
 使用可能な容器としては、具体的には、アイセロ化学社(株)製の「クリーンボトル」シリーズ、及び、コダマ樹脂工業製の「ピュアボトル」等が挙げられるが、これらに限定されない。
 例えば、容器内壁が6種の樹脂で6層構造に構成された多層ボトル、又は、容器内壁が6種の樹脂で7層構造に構成された多層ボトルを使用することも好ましい。これらの容器としては、例えば、特開2015-123351号公報に記載の容器が挙げられる。
〔container〕
The curable composition may be temporarily stored in the container until use. The container for storing the curable composition is not particularly limited, and a known container can be used.
As a container for storing the curable composition, a container having a high degree of cleanliness in the container and little elution of impurities is preferable. For example, you may use the thing of the use marketed for semiconductor uses.
Specific examples of containers that can be used include, but are not limited to, “Clean Bottle” series manufactured by Aicello Chemical Co., Ltd., “Pure Bottle” manufactured by Kodama Resin Co., Ltd., and the like.
For example, it is also preferable to use a multilayer bottle in which the inner wall of the container is configured in a six-layer structure with six types of resin, or a multilayer bottle in which the inner wall of the container is configured in a seven-layer structure with six types of resin. Examples of these containers include containers described in JP-A-2015-123351.
[硬化膜、及び、硬化膜の製造方法]
 本発明の実施形態に係る硬化膜は、上記硬化性組成物を硬化して得られた硬化膜である。硬化膜の厚みとしては特に制限されないが、一般に0.2~7μmが好ましく、0.4~5μmがより好ましい。
 上記厚みは平均厚みであり、硬化膜の任意の5点以上の厚みを測定し、それらを算術平均した値である。
[Curing film and method for producing the cured film]
The cured film which concerns on embodiment of this invention is a cured film obtained by hardening | curing the said curable composition. The thickness of the cured film is not particularly limited, but is generally preferably 0.2 to 7 μm, and more preferably 0.4 to 5 μm.
The above thickness is an average thickness, and is a value obtained by measuring the thicknesses of five or more arbitrary points of the cured film and arithmetically averaging them.
 硬化膜の製造方法は特に制限されないが、硬化性組成物を支持体上に塗布して塗膜を形成して、塗膜に対して硬化処理を施し、硬化膜を製造する方法が挙げられる。
 硬化処理の方法は特に制限されず、光硬化処理又は熱硬化処理が挙げられ、パターン形成が容易である点から、光硬化処理(特に、活性光線又は放射線を照射することによる硬化処理)が好ましい。
Although the manufacturing method in particular of a cured film is not restrict | limited, The method of apply | coating a curable composition on a support body, forming a coating film, performing a hardening process with respect to a coating film, and manufacturing a cured film is mentioned.
The method of the curing treatment is not particularly limited, and examples thereof include a photocuring treatment or a thermosetting treatment, and a photocuring treatment (particularly a curing treatment by irradiation with actinic rays or radiation) is preferable from the viewpoint of easy pattern formation. .
 本発明の実施形態に係る硬化膜は、硬化性組成物を用いて形成された硬化性組成物層を硬化して得られた硬化膜である。
 硬化膜の製造方法としては特に制限されないが、以下の工程を含有することが好ましい。
・硬化性組成物層形成工程
・露光工程
・現像工程
 以下、各工程について説明する。
The cured film which concerns on embodiment of this invention is a cured film obtained by hardening | curing the curable composition layer formed using the curable composition.
Although it does not restrict | limit especially as a manufacturing method of a cured film, It is preferable to contain the following processes.
-Curable composition layer formation process-Exposure process-Development process Hereinafter, each process is demonstrated.
<硬化性組成物層形成工程>
 硬化性組成物層形成工程は、硬化性組成物を用いて、硬化性組成物層を形成する工程である。硬化性組成物を用いて、硬化性組成物層を形成する工程としては、例えば、支持体上に、硬化性組成物を塗布して、硬化性組成物層を形成する工程(塗布工程)が挙げられる。
 支持体の種類は特に制限されないが、硬化膜を固体撮像素子に適用する場合は、例えば、ケイ素基板が挙げられ、硬化膜をカラーフィルタ(固体撮像素子用カラーフィルタを含む)として用いる場合には、ガラス基板(ガラスウェハ)等が挙げられる。
 支持体上への硬化性組成物の塗布方法としては、スピンコート、スリット塗布、インクジェット法、スプレー塗布、回転塗布、流延塗布、ロール塗布、及び、スクリーン印刷法等の各種の塗布方法が挙げられる。
 支持体上に塗布された硬化性組成物は、通常、70~150℃で1~4分程度の条件下で乾燥され、硬化性組成物層が形成される。
<Curable composition layer forming step>
A curable composition layer formation process is a process of forming a curable composition layer using a curable composition. As a process of forming a curable composition layer using a curable composition, the process (application | coating process) of apply | coating a curable composition on a support body and forming a curable composition layer is mentioned, for example. Can be mentioned.
The type of the support is not particularly limited, but when a cured film is applied to a solid-state imaging device, for example, a silicon substrate is used, and when the cured film is used as a color filter (including a color filter for a solid-state imaging device). And a glass substrate (glass wafer).
Examples of the coating method of the curable composition on the support include various coating methods such as spin coating, slit coating, inkjet method, spray coating, spin coating, cast coating, roll coating, and screen printing. It is done.
The curable composition coated on the support is usually dried at 70 to 150 ° C. for about 1 to 4 minutes to form a curable composition layer.
<露光工程>
 露光工程では、硬化性組成物層形成工程において形成された硬化性組成物層に、パターン状の開口部を備えるフォトマスクを介して、活性光線又は放射線を照射して露光し、光照射された硬化性組成物層だけを硬化させる。
 露光は、放射線の照射により行うことが好ましく、g線、h線、及び、i線等の紫外線を用いることが好ましい。また、光源としては高圧水銀灯が好ましい。照射強度は特に制限されないが、一般に5~1500mJ/cmが好ましい。
<Exposure process>
In the exposure step, the curable composition layer formed in the curable composition layer forming step was exposed to light by irradiating actinic rays or radiation through a photomask having a pattern-shaped opening, and was irradiated with light. Only the curable composition layer is cured.
The exposure is preferably performed by irradiation with radiation, and ultraviolet rays such as g-line, h-line, and i-line are preferably used. The light source is preferably a high pressure mercury lamp. The irradiation intensity is not particularly limited, but generally 5 to 1500 mJ / cm 2 is preferable.
<現像工程>
 露光工程に次いで、現像処理(現像工程)を行い、露光工程における未露光部分を現像液に溶出させる。これにより、光硬化した部分だけが支持体上に残る。
 現像液としては、特に制限されないが、例えば、アルカリ現像液が挙げられ、なかでも、有機アルカリ現像液が好ましい。
 現像条件としては特に制限されないが、現像温度が、一般に、20~40℃が好ましく、現像時間が、一般に20~180秒が好ましい。
 アルカリ水溶液(アルカリ現像液)としては、特に制限されないが、例えば、無機アルカリ現像液に含有されるアルカリ性化合物としては、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、硅酸ナトリウム、及び、メタ硅酸ナトリウム等が挙げられる。
 アルカリ水溶液中における上記化合物の含有量としては特に制限されないが、一般に、アルカリ水溶液の全質量に対して、0.001~10質量%が好ましく、0.005~0.5質量%がより好ましい。
 有機アルカリ現像液に含有されるアルカリ性化合物としては、アンモニア、エチルアミン、ジエチルアミン、ジメチルエタノールアミン、テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド、テトラプロピルアンモニウムヒドロキシド、テトラブチルアンモニウムヒドロキシド、ベンジルトリメチルアンモニウムヒドロキシド、コリン、ピロール、ピペリジン、及び、1,8-ジアザビシクロ-[5,4,0]-7-ウンデセン等が挙げられる。
 アルカリ水溶液中における上記化合物の含有量としては特に制限されないが、一般に、アルカリ水溶液の全質量に対して、0.001~10質量%が好ましく、0.005~0.5質量%がより好ましい。
<Development process>
Subsequent to the exposure step, development processing (development step) is performed to elute unexposed portions in the exposure step into the developer. Thereby, only the photocured part remains on the support.
Although it does not restrict | limit especially as a developing solution, For example, an alkali developing solution is mentioned, Especially, an organic alkali developing solution is preferable.
The development conditions are not particularly limited, but the development temperature is generally preferably 20 to 40 ° C., and the development time is generally preferably 20 to 180 seconds.
The alkaline aqueous solution (alkaline developer) is not particularly limited, but examples of the alkaline compound contained in the inorganic alkaline developer include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium oxalate, and And sodium metasuccinate.
The content of the compound in the alkaline aqueous solution is not particularly limited, but is generally preferably 0.001 to 10% by mass and more preferably 0.005 to 0.5% by mass with respect to the total mass of the alkaline aqueous solution.
The alkaline compounds contained in the organic alkaline developer include ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxy. , Choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene, and the like.
The content of the compound in the alkaline aqueous solution is not particularly limited, but is generally preferably 0.001 to 10% by mass and more preferably 0.005 to 0.5% by mass with respect to the total mass of the alkaline aqueous solution.
 アルカリ水溶液には、例えば、メタノール、及び、エタノール等の水溶性有機溶剤が含有されていてもよい。また、アルカリ水溶液には、界面活性剤が含有されていてもよい。
 なお、このようなアルカリ水溶液を現像液として使用した場合には、現像した硬化性組成物層を純水等で洗浄することが好ましい。本明細書においては、この工程を洗浄工程といい、硬化膜の製造方法は洗浄工程を含有することが好ましい。
The alkaline aqueous solution may contain, for example, a water-soluble organic solvent such as methanol and ethanol. Further, the alkaline aqueous solution may contain a surfactant.
When such an alkaline aqueous solution is used as a developer, it is preferable to wash the developed curable composition layer with pure water or the like. In this specification, this process is called a washing | cleaning process, and it is preferable that the manufacturing method of a cured film contains a washing | cleaning process.
 なお、硬化膜の製造方法は、その他の工程を含有してもよい。
 その他の工程としては、特に制限はなく、目的に応じて適宜選択することができる。
 その他の工程としては、例えば、基材の表面処理工程、前加熱工程(プリベーク工程)、及び、後加熱工程(ポストベーク工程)等が挙げられる。
 上記前加熱工程、及び後加熱工程における加熱温度としては、特に制限されないが、一般に、80~300℃が好ましい。
 前加熱工程及び後加熱工程における加熱時間としては、特に制限されないが、30~500秒が好ましい。
In addition, the manufacturing method of a cured film may contain another process.
There is no restriction | limiting in particular as another process, According to the objective, it can select suitably.
Examples of other processes include a substrate surface treatment process, a pre-heating process (pre-baking process), and a post-heating process (post-baking process).
The heating temperature in the preheating step and the postheating step is not particularly limited, but is generally preferably 80 to 300 ° C.
The heating time in the preheating step and the postheating step is not particularly limited, but is preferably 30 to 500 seconds.
 硬化膜は、表面凹凸構造を有することが好ましい。そうすることで、硬化膜の光線反射率を低減することができる。硬化膜そのものの表面に凹凸構造を有するものであっても、硬化膜上にコート膜を配置して凹凸構造を付与してもよい。表面凹凸構造の形状は特に限定されないが、表面粗さが0.55~1.5μm以下の範囲であることが好ましい。
 硬化膜の光線反射率は、5%以下が好ましく、3%以下がより好ましく、2%以下が更に好ましい。
 表面凹凸構造を作製する方法は特に限定されないが、硬化膜、又は、コート膜に、有機フィラー、及び/又は、無機フィラーを含有させる方法;リソグラフィー法、エッチング法、スパッタ法、及び、ナノインプリント法等;等により、硬化膜、及び/又は、コート膜の表面を粗面化する方法等が挙げられる。
 また、硬化膜の光線反射率を低下させる方法としては、例えば、硬化膜上に低屈折率膜を配置する方法;低屈折率膜上に、屈折率の異なる膜(例えば、高屈折率膜)を配置する方法;例えば、特開2015-1654号公報に記載されている、低光学濃度層と、高光学濃度層とを形成する方法が挙げられる。
The cured film preferably has a surface uneven structure. By doing so, the light reflectivity of a cured film can be reduced. Even if it has a concavo-convex structure on the surface of the cured film itself, a concavo-convex structure may be imparted by arranging a coat film on the cured film. The shape of the uneven surface structure is not particularly limited, but the surface roughness is preferably in the range of 0.55 to 1.5 μm or less.
The light reflectance of the cured film is preferably 5% or less, more preferably 3% or less, and still more preferably 2% or less.
The method for producing the surface concavo-convex structure is not particularly limited, but includes a method in which a cured film or a coating film contains an organic filler and / or an inorganic filler; a lithography method, an etching method, a sputtering method, a nanoimprint method, and the like A method of roughening the surface of the cured film and / or the coat film, etc.
Moreover, as a method for reducing the light reflectance of the cured film, for example, a method of disposing a low refractive index film on the cured film; a film having a different refractive index (for example, a high refractive index film) on the low refractive index film For example, a method of forming a low optical density layer and a high optical density layer described in JP-A-2015-1654.
 上記硬化膜は、パーソナルコンピュータ、タブレット、携帯電話、スマートフォン、及び、デジタルカメラ等のポータブル機器;プリンタ複合機、及び、スキャナ等のOA(Office Automation)機器;監視カメラ、バーコードリーダ、現金自動預け払い機(ATM:automated teller machine)、ハイスピードカメラ、及び、顔画像認証を使用した本人認証機能を有する機器等の産業用機器;車載用カメラ機器;内視鏡、カプセル内視鏡、及び、カテーテル等の医療用カメラ機器;生体センサ、バイオセンサー、軍事偵察用カメラ、立体地図用カメラ、気象及び海洋観測カメラ、陸地資源探査カメラ、並びに、宇宙の天文及び深宇宙ターゲット用の探査カメラ等の宇宙用機器;等に使用される光学フィルタ及びモジュールの遮光部材及び遮光膜、更には反射防止部材及び反射防止膜等に用いることができる。 The above-mentioned cured films are portable devices such as personal computers, tablets, mobile phones, smartphones, and digital cameras; OA (Office Automation) devices such as printer multifunction devices and scanners; surveillance cameras, barcode readers, automatic cash deposits Industrial equipment such as a payment machine (ATM: automated teller machine), high-speed camera, and equipment having a personal authentication function using face image authentication; in-vehicle camera equipment; endoscope, capsule endoscope, and Medical camera equipment such as catheters; biosensors, biosensors, military reconnaissance cameras, 3D map cameras, weather and ocean observation cameras, land resource exploration cameras, exploration cameras for space astronomy and deep space targets, etc. Used for space equipment; etc. Manabu filters and the light blocking member and the light-shielding film of the module, even can be used for anti-reflection member and the antireflection film or the like.
 上記硬化膜は、マイクロLED(Light Emitting Diode)及びマイクロOLED(Organic Light Emitting Diode)などの用途にも用いることができる。上記硬化膜は、マイクロLED及びマイクロOLEDに使用される光学フィルタ及び光学フィルム等のほか、遮光機能又は反射防止機能を付与する部材に対して好適である。
 マイクロLED及びマイクロOLEDの例としては、特表2015-500562号及び特表2014-533890に記載されたものが挙げられる。
The cured film can also be used for applications such as micro LED (Light Emitting Diode) and micro OLED (Organic Light Emitting Diode). The cured film is suitable for members that provide a light shielding function or an antireflection function, as well as optical filters and optical films used in micro LEDs and micro OLEDs.
Examples of the micro LED and the micro OLED include those described in JP-T-2015-500562 and JP-T-2014-533890.
 上記硬化膜は、量子ドットディスプレイに使用される光学フィルタ及び光学フィルムとして好適である。また、遮光機能及び反射防止機能を付与する部材として好適である。
 量子ドットディスプレイの例としては、米国特許出願公開第2013/0335677号、米国特許出願公開第2014/0036536号、米国特許出願公開第2014/0036203号、及び、米国特許出願公開第2014/0035960号に記載されたものが挙げられる。
The said cured film is suitable as an optical filter and optical film used for a quantum dot display. Moreover, it is suitable as a member which provides a light shielding function and an antireflection function.
Examples of quantum dot displays include US Patent Application Publication No. 2013/0335677, US Patent Application Publication No. 2014/0036536, US Patent Application Publication No. 2014/0036203, and US Patent Application Publication No. 2014/0035960. What has been described.
[固体撮像装置、及び、固体撮像素子]
 本発明の実施形態に係る固体撮像装置、及び、固体撮像素子は、上記硬化膜を含有する。固体撮像素子が硬化膜を含有する形態としては特に制限されず、例えば、支持体上に、固体撮像素子(CCDイメージセンサ、CMOSイメージセンサ等)の受光エリアを構成する複数のフォトダイオード及びポリシリコン等からなる受光素子を有し、支持体の受光素子形成面側(例えば、受光部以外の部分及び/又は色調整用画素等)又は形成面の反対側に上記硬化膜を備えて構成したものが挙げられる。
 固体撮像装置は、上記固体撮像素子を含有する。
[Solid-state imaging device and solid-state imaging device]
A solid-state imaging device and a solid-state imaging device according to an embodiment of the present invention contain the cured film. The form in which the solid-state imaging device contains a cured film is not particularly limited. For example, a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) on a support. And having the cured film on the light receiving element forming surface side of the support (for example, a portion other than the light receiving portion and / or a color adjusting pixel) or the opposite side of the forming surface. Is mentioned.
The solid-state imaging device contains the solid-state imaging element.
 固体撮像装置、及び、固体撮像素子の構成例を図7~図8を参照して説明する。な1お、図7~図8では、各部を明確にするため、各構成の厚み及び/又は幅の比率は実際と関係なく一部誇張して表示している。
 図7に示すように、固体撮像装置700は、矩形状の固体撮像素子701と、固体撮像素子701の上方に保持され、この固体撮像素子701を封止する透明なカバーガラス703とを備えている。更に、このカバーガラス703上には、スペーサー704を介してレンズ層711が重ねて設けられている。レンズ層711は、支持体713とレンズ材712とで構成されている。レンズ層711は、支持体713とレンズ材712とが一体成形された構成でもよい。レンズ層711の周縁領域に迷光が入射すると光の拡散によりレンズ材712での集光の効果が弱くなり、撮像部702に届く光が低減する。また、迷光によるノイズの発生も生じる。そのため、このレンズ層711の周縁領域は、遮光膜714が設けられて遮光されている。本発明の実施形態に係る硬化膜(特に、着色剤として黒色顔料を含有する場合)は上記遮光膜714としても用いることができる。
Configuration examples of the solid-state imaging device and the solid-state imaging device will be described with reference to FIGS. In FIGS. 7 to 8, in order to clarify each part, the ratio of the thickness and / or width of each component is partially exaggerated regardless of actuality.
As shown in FIG. 7, the solid-state imaging device 700 includes a rectangular solid-state imaging element 701 and a transparent cover glass 703 that is held above the solid-state imaging element 701 and seals the solid-state imaging element 701. Yes. Furthermore, a lens layer 711 is provided on the cover glass 703 with a spacer 704 interposed therebetween. The lens layer 711 includes a support 713 and a lens material 712. The lens layer 711 may have a configuration in which the support 713 and the lens material 712 are integrally formed. When stray light is incident on the peripheral region of the lens layer 711, the effect of condensing light on the lens material 712 is weakened due to light diffusion, and light reaching the imaging unit 702 is reduced. In addition, noise is generated due to stray light. Therefore, the peripheral region of the lens layer 711 is shielded from light by providing a light shielding film 714. The cured film according to the embodiment of the present invention (particularly when a black pigment is contained as a colorant) can also be used as the light shielding film 714.
 固体撮像素子701は、その受光面となる撮像部702において結像した光学像を光電変換して、画像信号として出力する。この固体撮像素子701は、2枚の基板(支持体に該当する。)を積層した積層基板705を備えている。積層基板705は、同サイズの矩形状のチップ基板706及び回路基板707からなり、チップ基板706の裏面に回路基板707が積層されている。 The solid-state imaging device 701 photoelectrically converts an optical image formed in the imaging unit 702 serving as a light receiving surface thereof and outputs it as an image signal. This solid-state imaging device 701 includes a laminated substrate 705 in which two substrates (corresponding to a support) are laminated. The laminated substrate 705 includes a rectangular chip substrate 706 and a circuit substrate 707 having the same size, and the circuit substrate 707 is laminated on the back surface of the chip substrate 706.
 チップ基板706として用いられる基板の材料としては特に制限されず、公知の材料を用いることができる。 The material of the substrate used as the chip substrate 706 is not particularly limited, and a known material can be used.
 チップ基板706の表面中央部には、撮像部702が設けられている。また、撮像部702の周縁領域に迷光が入射すると、この周縁領域内の回路から暗電流(ノイズ)が発生するため、この周縁領域は、遮光膜715が設けられて遮光されている。本発明の実施形態に係る硬化膜(特に着色剤として黒色顔料を含有する場合)は遮光膜715として用いることもできる。 An imaging unit 702 is provided at the center of the surface of the chip substrate 706. Further, when stray light is incident on the peripheral area of the imaging unit 702, dark current (noise) is generated from the circuit in the peripheral area. Therefore, the peripheral area is shielded from light by being provided with a light shielding film 715. The cured film according to the embodiment of the present invention (especially when a black pigment is contained as a colorant) can also be used as the light shielding film 715.
 チップ基板706の表面縁部には、複数の電極パッド708が設けられている。電極パッド708は、チップ基板706の表面に設けられた図示しない信号線(ボンディングワイヤでも可)を介して、撮像部702に電気的に接続されている。 A plurality of electrode pads 708 are provided on the surface edge of the chip substrate 706. The electrode pad 708 is electrically connected to the imaging unit 702 via a signal line (not shown) provided on the surface of the chip substrate 706 (which may be a bonding wire).
 回路基板707の裏面には、各電極パッド708の略下方位置にそれぞれ外部接続端子709が設けられている。各外部接続端子709は、積層基板705を垂直に貫通する貫通電極710を介して、それぞれ電極パッド708に接続されている。また、各外部接続端子709は、図示しない配線を介して、固体撮像素子701の駆動を制御する制御回路、及び固体撮像素子701から出力される撮像信号に画像処理を施す画像処理回路等に接続されている。 External connection terminals 709 are provided on the back surface of the circuit board 707 at positions substantially below the electrode pads 708, respectively. Each external connection terminal 709 is connected to an electrode pad 708 via a through electrode 710 that vertically penetrates the multilayer substrate 705. Further, each external connection terminal 709 is connected to a control circuit that controls driving of the solid-state image sensor 701 and an image processing circuit that performs image processing on an image signal output from the solid-state image sensor 701 via a wiring (not shown). Has been.
 図8に示すように、撮像部702は、受光素子801、カラーフィルタ802、マイクロレンズ803等の基板804上に設けられた各部から構成される。カラーフィルタ802は、青色画素805b、赤色画素805r、緑色画素805g、及びブラックマトリクス805bmを有している。本発明の実施形態に係る硬化膜(特に着色剤として黒色顔料を含有する場合)は、ブラックマトリクス805bmとして用いることもできる。 As shown in FIG. 8, the imaging unit 702 is configured by each unit provided on a substrate 804 such as a light receiving element 801, a color filter 802, and a micro lens 803. The color filter 802 includes a blue pixel 805b, a red pixel 805r, a green pixel 805g, and a black matrix 805bm. The cured film according to the embodiment of the present invention (especially when containing a black pigment as a colorant) can also be used as the black matrix 805bm.
 基板804の材料としては、前述のチップ基板706と同様の材料を用いることができる。基板804の表層にはpウェル層806が形成されている。このpウェル層806内には、n型層からなり光電変換により信号電荷を生成して蓄積する受光素子801が正方格子状に配列形成されている。 As the material of the substrate 804, the same material as the above-described chip substrate 706 can be used. A p-well layer 806 is formed on the surface layer of the substrate 804. In the p-well layer 806, light receiving elements 801 that are n-type layers and generate and store signal charges by photoelectric conversion are arranged in a square lattice pattern.
 受光素子801の一方の側方には、pウェル層806の表層の読み出しゲート部807を介して、n型層からなる垂直転送路808が形成されている。また、受光素子801の他方の側方には、p型層からなる素子分離領域809を介して、隣接画素に属する垂直転送路808が形成されている。読み出しゲート部807は、受光素子801に蓄積された信号電荷を垂直転送路808に読み出すためのチャネル領域である。 On one side of the light receiving element 801, a vertical transfer path 808 made of an n-type layer is formed via a reading gate portion 807 on the surface layer of the p-well layer 806. Further, a vertical transfer path 808 belonging to an adjacent pixel is formed on the other side of the light receiving element 801 through an element isolation region 809 made of a p-type layer. The read gate portion 807 is a channel region for reading the signal charge accumulated in the light receiving element 801 to the vertical transfer path 808.
 基板804の表面上には、ONO(Oxide-Nitride-Oxide)膜からなるゲート絶縁膜810が形成されている。このゲート絶縁膜810上には、垂直転送路808、読み出しゲート部807、及び素子分離領域809の略直上を覆うように、ポリシリコン又はアモルファスシリコンからなる垂直転送電極811が形成されている。垂直転送電極811は、垂直転送路808を駆動して電荷転送を行わせる駆動電極と、読み出しゲート部807を駆動して信号電荷読み出しを行わせる読み出し電極として機能する。信号電荷は、垂直転送路808から図示しない水平転送路及び出力部(フローティングディフュージョンアンプ)に順に転送された後、電圧信号として出力される。 A gate insulating film 810 made of an ONO (Oxide-Nitride-Oxide) film is formed on the surface of the substrate 804. On the gate insulating film 810, a vertical transfer electrode 811 made of polysilicon or amorphous silicon is formed so as to cover the vertical transfer path 808, the read gate portion 807, and the element isolation region 809. The vertical transfer electrode 811 functions as a drive electrode for driving the vertical transfer path 808 to perform charge transfer and a read electrode for driving the read gate unit 807 to read signal charges. The signal charges are sequentially transferred from the vertical transfer path 808 to a horizontal transfer path (not shown) and an output unit (floating diffusion amplifier), and then output as a voltage signal.
 垂直転送電極811上には、その表面を覆うように遮光膜812が形成されている。遮光膜812は、受光素子801の直上位置に開口部を有し、それ以外の領域を遮光している。本発明の実施形態に係る硬化膜(特に着色剤として黒色顔料を含有する場合)は、遮光膜812として用いることもできる。
 遮光膜812上には、BPSG(borophospho silicate glass)からなる絶縁膜813、P-SiNからなる絶縁膜(パシベーション膜)814、透明樹脂等からなる平坦化膜815からなる透明な中間層が設けられている。カラーフィルタ802は、中間層上に形成されている。
A light shielding film 812 is formed on the vertical transfer electrode 811 so as to cover the surface thereof. The light shielding film 812 has an opening at a position immediately above the light receiving element 801 and shields the other areas. The cured film according to the embodiment of the present invention (especially when containing a black pigment as a colorant) can also be used as the light shielding film 812.
On the light shielding film 812, an insulating film 813 made of BPSG (borophosphosilicate glass), an insulating film (passivation film) 814 made of P-SiN, and a transparent intermediate layer made of a planarizing film 815 made of transparent resin or the like are provided. ing. The color filter 802 is formed on the intermediate layer.
[ブラックマトリクス]
 ブラックマトリクスは、本発明の実施形態に係る硬化膜を含有する。ブラックマトリクスは、カラーフィルタ、固体撮像素子、及び、液晶表示装置に含有されることがある。
 ブラックマトリクスとしては、上記で既に説明したもの;液晶表示装置等の表示装置の周縁部に設けられた黒色の縁;赤、青、及び、緑の画素間の格子状、及び/又は、ストライプ状の黒色の部分;TFT(thin film transistor)の遮光のためのドット状、及び/又は、線状の黒色パターン;等が挙げられる。このブラックマトリクスの定義については、例えば、菅野泰平著、「液晶ディスプレイ製造装置用語辞典」、第2版、日刊工業新聞社、1996年、p.64に記載がある。
 ブラックマトリクスは表示コントラストを向上させるため、また薄膜トランジスタ(TFT)を用いたアクティブマトリックス駆動方式の液晶表示装置の場合には光の電流リークによる画質低下を防止するため、高い遮光性を有することが好ましい。
[Black matrix]
A black matrix contains the cured film which concerns on embodiment of this invention. The black matrix may be contained in a color filter, a solid-state image sensor, and a liquid crystal display device.
As the black matrix, those already described above; a black edge provided at the periphery of a display device such as a liquid crystal display device; a grid pattern between red, blue, and green pixels, and / or a stripe pattern A black portion of the TFT; a dot-like and / or linear black pattern for shielding light from a TFT (thin film transistor); and the like. For the definition of this black matrix, see Taihei Kanno, “Liquid Crystal Display Manufacturing Dictionary”, 2nd edition, Nikkan Kogyo Shimbun, 1996, p. 64.
The black matrix preferably has a high light-shielding property in order to improve display contrast, and in the case of an active matrix liquid crystal display device using a thin film transistor (TFT), in order to prevent deterioration in image quality due to light current leakage. .
 ブラックマトリクスの製造方法としては特に制限されないが、上記の硬化膜の製造方法と同様の方法により製造することができる。具体的には、支持体上に硬化性組成物を塗布して、硬化性組成物層を形成し、露光、及び、現像してパターン状の硬化膜(ブラックマトリクス)を製造することができる。なお、ブラックマトリクスとして用いられる硬化膜の膜厚としては、0.1~4.0μmが好ましい。 The production method of the black matrix is not particularly limited, but can be produced by the same method as the production method of the cured film. Specifically, a curable composition is applied on a support to form a curable composition layer, and exposed and developed to produce a patterned cured film (black matrix). The thickness of the cured film used as the black matrix is preferably 0.1 to 4.0 μm.
 上記支持体の材料としては、特に制限されないが、可視光に対して80%以上の透過率を有することが好ましい。このような材料としては、具体的には、例えば、ソーダライムガラス、無アルカリガラス、石英ガラス、及び、ホウケイ酸ガラス等のガラス;ポリエステル系樹脂、及び、ポリオレフィン系樹脂などのプラスチック;等が挙げられ、耐薬品性、及び、耐熱性の観点から、無アルカリガラス、又は、石英ガラス等が好ましい。 The material for the support is not particularly limited, but preferably has a transmittance of 80% or more for visible light. Specific examples of such materials include glass such as soda lime glass, alkali-free glass, quartz glass, and borosilicate glass; plastics such as polyester-based resins and polyolefin-based resins; In view of chemical resistance and heat resistance, alkali-free glass or quartz glass is preferable.
[カラーフィルタ]
 本発明の実施形態に係るカラーフィルタは、硬化膜を含有する。
 カラーフィルタが硬化膜を含有する形態としては、特に制限されないが、支持体と、上記ブラックマトリクスと、を備えるカラーフィルタが挙げられる。すなわち、支持体上に形成された上記ブラックマトリクスの開口部に形成された赤色、緑色、及び、青色の着色画素と、を備えるカラーフィルタが例示できる。
[Color filter]
The color filter according to the embodiment of the present invention contains a cured film.
The form in which the color filter contains a cured film is not particularly limited, and examples thereof include a color filter including a support and the black matrix. That is, a color filter including red, green, and blue colored pixels formed in the opening of the black matrix formed on the support can be exemplified.
 ブラックマトリクス(硬化膜)を含有するカラーフィルタは、例えば、以下の方法により製造することができる。
 まず、支持体上に形成されたパターン状のブラックマトリクスの開口部に、カラーフィルタの各着色画素に対応する顔料を含有した樹脂組成物の塗膜(樹脂組成物層)を形成する。なお、各色用樹脂組成物としては特に制限されず、公知の樹脂組成物を用いることができるが、本発明の実施形態に係る硬化性組成物を用いることが好ましい。
 次に、樹脂組成物層に対して、ブラックマトリクスの開口部に対応したパターンを有するフォトマスクを介して露光する。次いで、現像処理により未露光部を除去した後、ベークすることでブラックマトリクスの開口部に着色画素を形成することができる。一連の操作を、例えば、赤色顔料、緑色顔料、及び、青色顔料を含有した各色用樹脂組成物を用いて行うことにより、赤色画素、緑色画素、及び、青色画素を有するカラーフィルタを製造することができる。
A color filter containing a black matrix (cured film) can be produced, for example, by the following method.
First, a coating film (resin composition layer) of a resin composition containing a pigment corresponding to each colored pixel of a color filter is formed in an opening of a patterned black matrix formed on a support. In addition, it does not restrict | limit especially as a resin composition for each color, Although a well-known resin composition can be used, it is preferable to use the curable composition which concerns on embodiment of this invention.
Next, it exposes with respect to the resin composition layer through the photomask which has a pattern corresponding to the opening part of a black matrix. Next, after removing the unexposed portions by development processing, the colored pixels can be formed in the openings of the black matrix by baking. A color filter having a red pixel, a green pixel, and a blue pixel is manufactured by performing a series of operations using, for example, a resin composition for each color containing a red pigment, a green pigment, and a blue pigment. Can do.
[画像表示装置]
 本発明の実施形態に係る画像表示装置は、硬化膜を含有する。画像表示装置が硬化膜を含有する形態としては特に制限されないが、すでに説明したブラックマトリクス(硬化膜)を含有するカラーフィルタを含有する形態が挙げられる。
[Image display device]
The image display apparatus according to the embodiment of the present invention includes a cured film. The form in which the image display device contains a cured film is not particularly limited, but examples include a form containing a color filter containing the black matrix (cured film) already described.
 本実施形態に係る画像表示装置の典型的な例としては、液晶表示装置が挙げられ、例えば、対向して配置された一対の支持体と、それらの支持体の間に封入されている液晶化合物とを備える形態が挙げられる。上記支持体としては、ブラックマトリクス用の支持体として既に説明したとおりである。 A typical example of the image display device according to the present embodiment is a liquid crystal display device. For example, a pair of supports arranged opposite to each other, and a liquid crystal compound sealed between the supports. The form provided with. The support is as described above as the support for the black matrix.
 液晶表示装置の具体的な形態としては、例えば、使用者側から、偏光板/支持体/カラーフィルタ/透明電極層/配向膜/液晶層/配向膜/透明電極層/TFT(Thin Film Transistor)素子/支持体/偏光板/バックライトユニットをこの順に含有する積層体が挙げられる。 As a specific form of the liquid crystal display device, for example, from the user side, a polarizing plate / support / color filter / transparent electrode layer / alignment film / liquid crystal layer / alignment film / transparent electrode layer / TFT (Thin Film Transistor) The laminated body which contains an element / support body / polarizing plate / backlight unit in this order is mentioned.
 液晶表示装置としては、上記に制限されず、例えば「電子ディスプレイデバイス(佐々木 昭夫著、(株)工業調査会 1990年発行)」、「ディスプレイデバイス(伊吹 順章著、産業図書(株)平成元年発行)」などに記載されている液晶表示装置が挙げられる。また、例えば「次世代液晶ディスプレイ技術(内田 龍男編集、(株)工業調査会 1994年発行)」に記載されている液晶表示装置が挙げられる。 The liquid crystal display device is not limited to the above. For example, “Electronic display device (Akio Sasaki, published by Industrial Research Co., Ltd., 1990)”, “Display device (written by Junaki Ibuki, Industrial Book Co., Ltd.) Liquid crystal display devices described in the " Further, for example, there is a liquid crystal display device described in “Next-generation liquid crystal display technology (Uchida, edited by Tatsuo, Kogyo Kenkyukai, published in 1994)”.
[赤外線センサ]
 本発明の実施形態に係る赤外線センサは、上記硬化膜を含有する。
 上記実施態様に係る赤外線センサについて、図9を用いて説明する。図9に示す赤外線センサ900において、符号910は、固体撮像素子を示す。
 固体撮像素子910上に設けられている撮像領域は、赤外線吸収フィルタ911と本発明の実施形態に係るカラーフィルタ912とを組み合せて構成されている。
 赤外線吸収フィルタ911は、可視光領域の光(例えば、波長400~700nmの光)を透過し、赤外領域の光(例えば、波長800~1300nmの光、好ましくは波長900~1200nmの光、より好ましくは波長900~1000nmの光)を遮蔽する膜であり、着色剤として赤外線吸収剤(赤外線吸収剤の形態としては既に説明したとおりである。)を含有する硬化膜を用いることができる。
 カラーフィルタ912は、可視光領域における特定波長の光を透過及び吸収する画素が形成されたカラーフィルタであって、例えば、赤色(R)、緑色(G)、及び、青色(B)の画素が形成されたカラーフィルタ等が用いられ、その形態は既に説明したとおりである。
 赤外線透過フィルタ913と固体撮像素子910との間には、赤外線透過フィルタ913を透過した波長の光を透過させることができる樹脂膜914(例えば、透明樹脂膜など)が配置されている。
 赤外線透過フィルタ913は、可視光遮蔽性を有し、かつ、特定波長の赤外線を透過させるフィルタであって、可視光領域の光を吸収する着色剤(例えば、ペリレン化合物、及び/又は、ビスベンゾフラノン化合物等)と、赤外線吸収剤(例えば、ピロロピロール化合物、フタロシアニン化合物、ナフタロシアニン化合物、及び、ポリメチン化合物等)と、を含有する、本発明の実施形態に係る硬化膜を用いることができる。赤外線透過フィルタ913は、例えば、波長400~830nmの光を遮光し、波長900~1300nmの光を透過させることが好ましい。
 カラーフィルタ912及び赤外線透過フィルタ913の入射光hν側には、マイクロレンズ915が配置されている。マイクロレンズ915を覆うように平坦化膜916が形成されている。
 図9に示す実施形態では、樹脂膜914が配置されているが、樹脂膜914に代えて赤外線透過フィルタ913を形成してもよい。すなわち、固体撮像素子910上に、赤外線透過フィルタ913を形成してもよい。
 図9に示す実施形態では、カラーフィルタ912の膜厚と、赤外線透過フィルタ913の膜厚が同一であるが、両者の膜厚は異なっていてもよい。
 図9に示す実施形態では、カラーフィルタ912が、赤外線吸収フィルタ911よりも入射光hν側に設けられているが、赤外線吸収フィルタ911と、カラーフィルタ912との順序を入れ替えて、赤外線吸収フィルタ911を、カラーフィルタ912よりも入射光hν側に設けてもよい。
 図9に示す実施形態では、赤外線吸収フィルタ911とカラーフィルタ912は隣接して積層しているが、両フィルタは必ずしも隣接している必要はなく、間に他の層が設けられていてもよい。本発明の実施形態に係る硬化膜は、赤外線吸収フィルタ911の表面の端部や側面などの遮光膜として用いることができるほか、赤外線センサの装置内壁に用いることで、内部反射や、受光部への意図しない光の入射を防ぎ、感度を向上させることができる。
 この赤外線センサによれば、画像情報を同時に取り込むことができるため、動きを検知する対象を認識したモーションセンシングなどが可能である。更には、距離情報を取得できるため、3D情報を含んだ画像の撮影等も可能である。
[Infrared sensor]
The infrared sensor which concerns on embodiment of this invention contains the said cured film.
The infrared sensor which concerns on the said embodiment is demonstrated using FIG. In the infrared sensor 900 shown in FIG. 9, reference numeral 910 denotes a solid-state image sensor.
The imaging region provided on the solid-state imaging device 910 is configured by combining the infrared absorption filter 911 and the color filter 912 according to the embodiment of the present invention.
The infrared absorption filter 911 transmits light in the visible light region (for example, light having a wavelength of 400 to 700 nm), and transmits light in the infrared region (for example, light having a wavelength of 800 to 1300 nm, preferably light having a wavelength of 900 to 1200 nm). Preferably, it is a film that shields light having a wavelength of 900 to 1000 nm, and a cured film containing an infrared absorber (as already described in the form of the infrared absorber) as a colorant can be used.
The color filter 912 is a color filter in which pixels that transmit and absorb light of a specific wavelength in the visible light region are formed. For example, red (R), green (G), and blue (B) pixels The formed color filter or the like is used, and the form thereof is as already described.
Between the infrared transmission filter 913 and the solid-state imaging device 910, a resin film 914 (for example, a transparent resin film or the like) that can transmit light having a wavelength transmitted through the infrared transmission filter 913 is disposed.
The infrared transmission filter 913 has a visible light shielding property and transmits infrared light having a specific wavelength, and is a colorant that absorbs light in the visible light region (for example, a perylene compound and / or a bisbenzoic acid). A cured film according to an embodiment of the present invention containing a furanone compound or the like and an infrared absorber (for example, a pyrrolopyrrole compound, a phthalocyanine compound, a naphthalocyanine compound, or a polymethine compound) can be used. For example, the infrared transmission filter 913 preferably blocks light having a wavelength of 400 to 830 nm and transmits light having a wavelength of 900 to 1300 nm.
A micro lens 915 is disposed on the incident light hν side of the color filter 912 and the infrared transmission filter 913. A planarization film 916 is formed so as to cover the microlens 915.
In the embodiment shown in FIG. 9, the resin film 914 is disposed, but an infrared transmission filter 913 may be formed instead of the resin film 914. That is, the infrared transmission filter 913 may be formed on the solid-state image sensor 910.
In the embodiment shown in FIG. 9, the film thickness of the color filter 912 and the film thickness of the infrared transmission filter 913 are the same, but the film thicknesses of both may be different.
In the embodiment shown in FIG. 9, the color filter 912 is provided on the incident light hν side with respect to the infrared absorption filter 911, but the order of the infrared absorption filter 911 and the color filter 912 is changed to change the infrared absorption filter 911. May be provided closer to the incident light hν than the color filter 912.
In the embodiment shown in FIG. 9, the infrared absorption filter 911 and the color filter 912 are stacked adjacent to each other. However, the two filters are not necessarily adjacent to each other, and other layers may be provided therebetween. . The cured film according to the embodiment of the present invention can be used as a light-shielding film such as an end or side surface of the surface of the infrared absorption filter 911, or can be used for an inner wall of an infrared sensor device to cause internal reflection or light reception. It is possible to prevent the incident of unintended light and improve the sensitivity.
According to this infrared sensor, since image information can be captured simultaneously, motion sensing or the like that recognizes a target whose motion is to be detected is possible. Furthermore, since distance information can be acquired, an image including 3D information can be taken.
 次に、上記赤外線センサを適用した固体撮像装置について説明する。
 上記固体撮像装置は、レンズ光学系と、固体撮像素子と、赤外発光ダイオード等を含有する。なお、固体撮像装置の各構成については、特開2011-233983号公報の段落0032~0036を参酌することができ、この内容は本明細書に組み込まれる。
Next, a solid-state imaging device to which the infrared sensor is applied will be described.
The solid-state imaging device includes a lens optical system, a solid-state imaging device, an infrared light emitting diode, and the like. As for each configuration of the solid-state imaging device, paragraphs 0032 to 0036 of JP 2011-233983 A can be referred to, and the contents thereof are incorporated in this specification.
 以下に実施例に基づいて本発明を更に詳細に説明する。以下の実施例に示す材料、使用量、割合、処理内容、及び、処理手順等は、本発明の趣旨を逸脱しない限り適宜変更することができる。従って、本発明の範囲は以下に示す実施例により限定的に解釈されるべきものではない。 Hereinafter, the present invention will be described in more detail based on examples. The materials, amounts used, ratios, processing details, processing procedures, and the like shown in the following examples can be changed as appropriate without departing from the spirit of the present invention. Therefore, the scope of the present invention should not be construed as being limited by the examples shown below.
[特定オキシム化合物の合成]
〔INT-12の合成〕
[Synthesis of specific oxime compounds]
[Synthesis of INT-12]
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000036
 特許第4223071号の段落0026に記載の方法を用いて、上記式中の前駆体Aを合成した。次に、氷浴で冷却した、前駆体A(6.00g、12.6mmol)が溶解したDMAc(N,Nジメチルアセトアミド、160g)溶液に対して、ミリスチン酸クロライド(15.6g、63.2mmol)を滴下し、滴下後同温度条件で1時間攪拌したのち、更に20℃で3時間攪拌して反応溶液を得た。次に、反応溶液に対して、酢酸エチル400mLと4質量%の重曹水溶液200mLを添加し1時間攪拌して、反応溶液中に固形物を発生させた。次に、発生させた固形物をセライトろ過で取り除き、ろ液を更に重曹水溶液200mLで2度洗浄したのち、分液し、有機相を硫酸マグネシウムで乾燥した。次に、乾燥後の有機相から溶媒を留去し、オイル状液体を得た。次に、オイル状液体に対して、シリカゲルカラムクロマトグラフィーを用いて、展開溶媒をヘキサンと酢酸エチルの混合物とし、その混合比(体積比)をヘキサン/酢酸エチル=4/1から、ヘキサン/酢酸エチル=1/1に変化させて精製し、特定オキシム化合物INT-12(9.18mmol)を得た。得られた生成物の構造はNMR(nuclear magnetic resonance)にて同定した。
H-NMR 300MHz 重クロロホルム):1.15-1.38(m、23H)、1.41(d、3H)、1.49(t、3H)、1.63(quin.、2H)、2.15(s、3H)、2.34(t、2H)、3.47(s、3H)、3.55(dd、1H)、3.67(dd、1H)、4.43(q、2H)、4.57-4.73(m、1H)、6.89(dd、1H)、6.93(d、1H)、6.89(dd、1H)、7.05(d、1H)、7.45(t、2H)、8.05(d、1H)、8.18(d、1H)、8.40(dd、1H)、8.94(d、1H)
Precursor A in the above formula was synthesized using the method described in paragraph 0026 of Japanese Patent No. 4223071. Next, with respect to the DMAc (N, N dimethylacetamide, 160 g) solution in which the precursor A (6.00 g, 12.6 mmol) was dissolved in an ice bath, myristic acid chloride (15.6 g, 63.2 mmol) was dissolved. After dropping, the mixture was stirred for 1 hour under the same temperature condition, and further stirred at 20 ° C. for 3 hours to obtain a reaction solution. Next, 400 mL of ethyl acetate and 200 mL of 4 mass% sodium bicarbonate aqueous solution were added to the reaction solution and stirred for 1 hour to generate solids in the reaction solution. Next, the generated solid was removed by Celite filtration, and the filtrate was further washed twice with 200 mL of an aqueous sodium bicarbonate solution, followed by liquid separation, and the organic phase was dried over magnesium sulfate. Next, the solvent was distilled off from the dried organic phase to obtain an oily liquid. Next, using silica gel column chromatography on the oily liquid, the developing solvent is a mixture of hexane and ethyl acetate, and the mixing ratio (volume ratio) is changed from hexane / ethyl acetate = 4/1 to hexane / acetic acid. The specific oxime compound INT-12 (9.18 mmol) was obtained after purification by changing to ethyl = 1/1. The structure of the obtained product was identified by NMR (nuclear magnetic resonance).
( 1 H-NMR 300 MHz deuterated chloroform): 1.15 to 1.38 (m, 23H), 1.41 (d, 3H), 1.49 (t, 3H), 1.63 (quin., 2H) 2.15 (s, 3H), 2.34 (t, 2H), 3.47 (s, 3H), 3.55 (dd, 1H), 3.67 (dd, 1H), 4.43 ( q, 2H), 4.57-4.73 (m, 1H), 6.89 (dd, 1H), 6.93 (d, 1H), 6.89 (dd, 1H), 7.05 (d 1H), 7.45 (t, 2H), 8.05 (d, 1H), 8.18 (d, 1H), 8.40 (dd, 1H), 8.94 (d, 1H)
〔INT-31の合成〕
Figure JPOXMLDOC01-appb-C000037
[Synthesis of INT-31]
Figure JPOXMLDOC01-appb-C000037
 特開2009-191061号公報の段落0379に記載の方法を用いて、上記式中の前駆体Bを合成した、次に、氷浴で冷却した、前駆体B(6.00g、11.3mmol)、トリエチルアミン(1.62g、16.0mmol)が溶解したTHF(テトラヒドロフラン、60g)溶液に対して、ミリスチン酸クロライド(3.34g、13.5mmol)を滴下し、滴下後同温度条件で1時間攪拌したのち、更に20℃で3時間攪拌して反応溶液を得た。次に、反応溶液に対して、酢酸エチル400mLと4質量%の重曹水溶液200mLを添加し、分液して有機相を得た。次に、得られた有機相を重曹水溶液200mLで2度洗浄したのち硫酸マグネシウムで乾燥した。次に、乾燥後の有機相から溶媒を留去し、オイル状液体を得た。次に、オイル状液体に対して、シリカゲルカラムクロマトグラフィーを用いて、展開溶媒をヘキサンと酢酸エチルの混合物とし、その混合比(体積比)をヘキサン/酢酸エチル=4/1から、ヘキサン/酢酸エチル=1/1に変化させて精製し、オキシム化合物INT-31(8.51g、6.36mmol)を得た。得られた生成物の構造はNMRにて同定した。
H-NMR 300MHz 重クロロホルム):1.20-1.45(m、23H)、1.67(quin.、2H)、2.39(t、2H)、3.02~3.23(m、4H)、7.23~7.30(m、4H)、7.39(d、2H)、7.49~7.55(m、4H)、7.60(t、1H)、7.75~7.85(m、4H)、8.02(d、2H)
Precursor B in the above formula was synthesized using the method described in paragraph 0379 of JP-A-2009-191061, and then cooled in an ice bath, precursor B (6.00 g, 11.3 mmol) Myristic acid chloride (3.34 g, 13.5 mmol) was added dropwise to a THF (tetrahydrofuran, 60 g) solution in which triethylamine (1.62 g, 16.0 mmol) was dissolved, and the mixture was stirred for 1 hour under the same temperature conditions after the addition. After that, the mixture was further stirred at 20 ° C. for 3 hours to obtain a reaction solution. Next, 400 mL of ethyl acetate and 200 mL of a 4% by mass aqueous sodium bicarbonate solution were added to the reaction solution and separated to obtain an organic phase. Next, the obtained organic phase was washed twice with 200 mL of an aqueous sodium bicarbonate solution and then dried over magnesium sulfate. Next, the solvent was distilled off from the dried organic phase to obtain an oily liquid. Next, using silica gel column chromatography on the oily liquid, the developing solvent is a mixture of hexane and ethyl acetate, and the mixing ratio (volume ratio) is changed from hexane / ethyl acetate = 4/1 to hexane / acetic acid. Purification was performed while changing the ethyl ratio to 1/1 to obtain an oxime compound INT-31 (8.51 g, 6.36 mmol). The structure of the obtained product was identified by NMR.
( 1 H-NMR 300 MHz deuterated chloroform): 1.20-1.45 (m, 23H), 1.67 (quin., 2H), 2.39 (t, 2H), 3.02 to 3.23 ( m, 4H), 7.23 to 7.30 (m, 4H), 7.39 (d, 2H), 7.49 to 7.55 (m, 4H), 7.60 (t, 1H), 7 .75-7.85 (m, 4H), 8.02 (d, 2H)
〔INT-17の合成〕
Figure JPOXMLDOC01-appb-C000038
[Synthesis of INT-17]
Figure JPOXMLDOC01-appb-C000038
 特表2016-531926号公報の段落0355に記載の方法を用いて、上記式中の前駆体Cを合成した。次に、「前駆体B(6.00g、11.3mmol)」に代えて「前駆体C(5.01g、11.3mmol)」を用いた以外は、既に説明したINT-31の合成と同様にして、オキシム化合物INT-17(4.94g、7.56mmol)を得た。得られた生成物の構造はNMRにて同定した。
H-NMR 300MHz 重クロロホルム):0.90(d、6H)、1.20-1.70(m、26H)、2.39(t、2H)、2.66-2.89(m、2H)、7.30~8.08(m、13H)
Precursor C in the above formula was synthesized using the method described in paragraph 0355 of JP-T-2016-531926. Next, similar to the synthesis of INT-31 already described, except that “precursor C (5.01 g, 11.3 mmol)” was used instead of “precursor B (6.00 g, 11.3 mmol)”. To obtain the oxime compound INT-17 (4.94 g, 7.56 mmol). The structure of the obtained product was identified by NMR.
( 1 H-NMR 300 MHz deuterated chloroform): 0.90 (d, 6H), 1.20-1.70 (m, 26H), 2.39 (t, 2H), 2.66-2.89 (m 2H), 7.30-8.08 (m, 13H)
〔INT-26の合成〕
Figure JPOXMLDOC01-appb-C000039
[Synthesis of INT-26]
Figure JPOXMLDOC01-appb-C000039
 特開2009-191061号公報の段落0368に記載の方法を用いて、上記式中の前駆体Dを合成した。次に、「前駆体B(6.00g、11.3mmol)」に代えて、「前駆体D(6.27g、11.3mmol)」を用いた以外は、既に説明したINT-31の合成と同様にして、オキシム化合物INT-26(4.72g、6.17mmol)を得た。得られた生成物の構造はNMRにて同定した。
H-NMR 300MHz 重クロロホルム):1.19-1.44(m、23H)、1.49(t、3H)、1.70(quin.、2H)、2.36(s、3H)、2.42(t、2H)、3.10~3.25(m、4H)、4.43(q、2H)、7.22-7.51(m、8H)、8.08(dd、2H)、8.33(dd、2H)、8.56(d、1H)、8.87(d、1H)
Precursor D in the above formula was synthesized using the method described in paragraph 0368 of JP-A-2009-191061. Next, in place of “precursor B (6.00 g, 11.3 mmol)”, except that “precursor D (6.27 g, 11.3 mmol)” was used, the synthesis of INT-31 already described was performed. Similarly, the oxime compound INT-26 (4.72 g, 6.17 mmol) was obtained. The structure of the obtained product was identified by NMR.
( 1 H-NMR 300 MHz deuterated chloroform): 1.19-1.44 (m, 23H), 1.49 (t, 3H), 1.70 (quin., 2H), 2.36 (s, 3H) 2.42 (t, 2H), 3.10-3.25 (m, 4H), 4.43 (q, 2H), 7.22-7.51 (m, 8H), 8.08 (dd 2H), 8.33 (dd, 2H), 8.56 (d, 1H), 8.87 (d, 1H)
 なお、表5(表5-1及び表5-2)中に記載した、その他の特定オキシム化合物は、上記特定オキシム化合物と同様の方法により合成した。 The other specific oxime compounds described in Table 5 (Table 5-1 and Table 5-2) were synthesized by the same method as the above specific oxime compounds.
[多官能チオール化合物の合成]
〔SH-16の合成〕
Figure JPOXMLDOC01-appb-C000040
Figure JPOXMLDOC01-appb-I000041
[Synthesis of polyfunctional thiol compounds]
[Synthesis of SH-16]
Figure JPOXMLDOC01-appb-C000040
Figure JPOXMLDOC01-appb-I000041
<中間体1合成工程>
 ペンタエリスリトール(PE)(13.5g、99.2mmol)、N,N-ジメチルアセトアミド(DMAc)(200g)を三口フラスコに加え、窒素雰囲気下、20℃の水浴中で攪拌して混合液を得た。次に、混合液の温度が30℃を超えないように、2-ブロモイソブチリルブロミド(100.3g、595mmol)を混合液に滴下した後、室温で2時間攪拌して反応液を得た。次に、反応液を1mol/L塩酸(350g)に少しずつ加えて反応を停止して、溶液を得た。次に、溶液に、酢酸エチル(500g)を加え、分液して、有機相を得た。次に、有機相を飽和重曹水(250g)、水(250g)、飽和食塩水(150g)でそれぞれ洗浄した。次に、洗浄後の有機相に硫酸ナトリウムを加えた後、ろ別し、ろ液を得た。次に、ろ液を減圧濃縮して、上記式中の中間体1(70.1g、95.7mmol)を得た。
<Intermediate 1 synthesis step>
Pentaerythritol (PE) (13.5 g, 99.2 mmol) and N, N-dimethylacetamide (DMAc) (200 g) are added to a three-necked flask and stirred in a water bath at 20 ° C. under a nitrogen atmosphere to obtain a mixed solution. It was. Next, 2-bromoisobutyryl bromide (100.3 g, 595 mmol) was added dropwise to the mixture so that the temperature of the mixture did not exceed 30 ° C., and then stirred at room temperature for 2 hours to obtain a reaction solution. . Next, the reaction solution was added little by little to 1 mol / L hydrochloric acid (350 g) to stop the reaction to obtain a solution. Next, ethyl acetate (500 g) was added to the solution and the layers were separated to obtain an organic phase. Next, the organic phase was washed with saturated sodium bicarbonate water (250 g), water (250 g), and saturated brine (150 g), respectively. Next, sodium sulfate was added to the washed organic phase, and then filtered to obtain a filtrate. Next, the filtrate was concentrated under reduced pressure to obtain Intermediate 1 (70.1 g, 95.7 mmol) in the above formula.
<中間体2合成工程>
 中間体1(70.0g、95.6mmol)、DMAc(210g)、テトラブチルアンモニウムブロミド(TEAB)(12.8g、61.2mmol)を三口フラスコに加え、空気雰囲気下、水浴中で攪拌して混合液を得た。次に、混合液にチオ酢酸カリウム(51.0g、446mmol)を4回に分割して添加し、50℃で4時間反応させ、反応液を得た。次に、反応液に酢酸エチル(310g)及び飽和炭酸水素ナトリウム水溶液(380g)を加え、分液して有機相を得た。次に、有機相を1mol/L塩酸(350g)で1回、飽和食塩水(350g)で2回分液して有機相を洗浄した。次に、洗浄後の有機相に硫酸ナトリウムを加え、ろ別して、ろ液を得た。次に、ろ液を減圧濃縮して、上記式中の中間体2(65.8g、92.3mmol)を得た。
<Intermediate 2 synthesis step>
Intermediate 1 (70.0 g, 95.6 mmol), DMAc (210 g), tetrabutylammonium bromide (TEAB) (12.8 g, 61.2 mmol) were added to a three-necked flask and stirred in a water bath under an air atmosphere. A mixture was obtained. Next, potassium thioacetate (51.0 g, 446 mmol) was added to the mixture in 4 portions and reacted at 50 ° C. for 4 hours to obtain a reaction solution. Next, ethyl acetate (310 g) and saturated aqueous sodium hydrogen carbonate solution (380 g) were added to the reaction solution, and the mixture was separated to obtain an organic phase. Next, the organic phase was washed once with 1 mol / L hydrochloric acid (350 g) and twice with saturated brine (350 g) to wash the organic phase. Next, sodium sulfate was added to the washed organic phase and filtered to obtain a filtrate. Next, the filtrate was concentrated under reduced pressure to obtain Intermediate 2 (65.8 g, 92.3 mmol) in the above formula.
<SH-16合成工程>
 中間体2(65.0g、91.2mmol)、DMAc(160g)を三口フラスコに加え、窒素雰囲気下、15℃で攪拌して混合液を得た。次に、混合液にヒドラジン塩酸塩(35.2g、514mmol)、酢酸ナトリウム(84.4g、1.03mol)を添加し、反応温度15℃で4時間反応させて、反応液を得た。次に、反応液に酢酸エチル(450g)を加え、1mol/L塩酸(280g)で2回、次に、飽和食塩水(280g)で2回分液して有機相を得て、有機相を洗浄した。次に、洗浄後の有機相に硫酸マグネシウムを加えた後、ろ別して、ろ液を得た。次に、ろ液を減圧濃縮して、多官能チオール化合物SH-16(48.6g、89.2mmol)を得た。得られた生成物の構造はNMRにて同定した。
H-NMR 300MHz 重クロロホルム):1.61(s、24H)、4.26(s、8H)
<SH-16 synthesis process>
Intermediate 2 (65.0 g, 91.2 mmol) and DMAc (160 g) were added to a three-necked flask and stirred at 15 ° C. under a nitrogen atmosphere to obtain a mixed solution. Next, hydrazine hydrochloride (35.2 g, 514 mmol) and sodium acetate (84.4 g, 1.03 mol) were added to the mixed solution and reacted at a reaction temperature of 15 ° C. for 4 hours to obtain a reaction solution. Next, ethyl acetate (450 g) was added to the reaction solution, and the mixture was separated twice with 1 mol / L hydrochloric acid (280 g) and then twice with saturated brine (280 g) to obtain an organic phase, and the organic phase was washed. did. Next, magnesium sulfate was added to the washed organic phase, and then filtered to obtain a filtrate. Next, the filtrate was concentrated under reduced pressure to obtain a polyfunctional thiol compound SH-16 (48.6 g, 89.2 mmol). The structure of the obtained product was identified by NMR.
( 1 H-NMR 300 MHz deuterated chloroform): 1.61 (s, 24H), 4.26 (s, 8H)
 なお、表5中に記載した、その他の多官能チオール化合物は、上記SH-16と同様の方法により合成した。 In addition, the other polyfunctional thiol compounds described in Table 5 were synthesized by the same method as SH-16.
[硬化性組成物の調製]
 表5の各欄に記載した特定オキシム化合物、多官能チオール化合物、着色剤、及び、その他の成分を混合して、各実施例、及び、各比較例の硬化性組成物を調製した。各成分の含有量を表3に示した。
Figure JPOXMLDOC01-appb-T000042
[Preparation of curable composition]
The specific oxime compound, the polyfunctional thiol compound, the colorant, and other components described in each column of Table 5 were mixed to prepare the curable compositions of Examples and Comparative Examples. Table 3 shows the content of each component.
Figure JPOXMLDOC01-appb-T000042
 なお、各硬化性組成物の最終的な固形分は、28質量%になるよう、有機溶剤で調整した。また、有機溶剤は、各硬化性組成物における質量比がPGMEA(プロピレングリコールモノメチルエーテルアセテート)/酢酸ブチル/シクロヘキサノン=27/18/27になるよう、調整し、併用した。 In addition, it adjusted with the organic solvent so that the final solid content of each curable composition might be 28 mass%. Moreover, the organic solvent was adjusted and used together so that the mass ratio in each curable composition might become PGMEA (propylene glycol monomethyl ether acetate) / butyl acetate / cyclohexanone = 27/18/27.
 なお、比較例の硬化性組成物において、特定オキシム化合物に代えて用いた化合物(比較化合物1、及び、比較化合物2といい、表5-2中ではそれぞれ「CINT-1」、「CINT-2」と示した。)の構造を以下に示す。 The compounds used in place of the specific oxime compounds in the curable compositions of Comparative Examples (referred to as Comparative Compound 1 and Comparative Compound 2 in Table 5-2, “CINT-1” and “CINT-2”, respectively) The structure is shown below.
Figure JPOXMLDOC01-appb-C000043
Figure JPOXMLDOC01-appb-C000043
〔着色剤の作製〕
 なお、硬化性組成物の調製に用いた各着色剤は、以下の方法により作製した。
(Preparation of colorant)
In addition, each coloring agent used for preparation of a curable composition was produced with the following method.
(チタン窒化物含有粒子(TiN-1))
 まず、Ti粒子(TC-200、トーホーテック社製)をArガス中においてプラズマ処理することにより、Tiナノ粒子化した。プラズマ処理後のTiナノ粒子を、Arガス雰囲気下でO濃度50ppm以下、30℃の条件で24時間静置した後、O濃度が100ppmとなるようにAr雰囲気にOガスを導入した状態において30℃、24時間静置した(Ti粒子の前処理)。
 その後、得られたTiナノ粒子をホソカワミクロン製TTSPセパレータを用いて収率10%となる条件で分級を行い、Ti粒子の粉末を得た。得られた粉末の一次粒子径は、TEM観察によって100個の粒子の平均粒子径を算術平均により求めたところ、120nmであった。
 チタン窒化物含有粒子TiN-1は、国際公開第2010/147098の図1に記載の黒色複合微粒子製造装置に準ずる装置を用いて製造した。
 具体的には、黒色複合微粒子製造装置において、プラズマトーチの高周波発振用コイルには、約4MHz及び約80kVAの高周波電圧を印加し、プラズマガス供給源からはプラズマガスとしてアルゴンガス50L/min及び窒素50L/minの混合ガスを供給し、プラズマトーチ内にアルゴン-窒素熱プラズマ炎を発生させた。また、材料供給装置の噴霧ガス供給源からは10L/minのキャリアガスを供給した。
 そして、上記のようにして得られたTi粒子に対して、Fe粉(JIP270M、JFEスチール社製)、及びSi粉(Silicon powder SI006031)を、それぞれの質量比がTi/Fe/Si=残分/0.05/0.05となるよう混合し、キャリアガスであるアルゴンガスと共に、プラズマトーチ内の熱プラズマ炎中に供給し、熱プラズマ炎中で蒸発させ、気相状態で高度に分散させた。
 また、気体供給装置によって、チャンバ内に供給される気体としては、窒素を使用した。このときのチャンバ内の流速は5m/secとして、供給量は1000L/minとした。また、サイクロン内の圧力は50kPaとし、また、チャンバからサイクロンへの各原料の供給速度は、10m/s(平均値)とした。
 このようにして、チタン窒化物含有粒子TiN-1を得た。
(Titanium nitride-containing particles (TiN-1))
First, Ti nanoparticles (TC-200, manufactured by Toho Tech Co., Ltd.) were formed into Ti nanoparticles by plasma treatment in Ar gas. The Ti nanoparticles after the plasma treatment were allowed to stand for 24 hours under an Ar gas atmosphere at an O 2 concentration of 50 ppm or less and 30 ° C., and then O 2 gas was introduced into the Ar atmosphere so that the O 2 concentration was 100 ppm. In the state, it was left to stand at 30 ° C. for 24 hours (pretreatment of Ti particles).
Thereafter, the obtained Ti nanoparticles were classified using a TTSP separator manufactured by Hosokawa Micron under the condition of a yield of 10% to obtain a powder of Ti particles. The primary particle diameter of the obtained powder was 120 nm when the average particle diameter of 100 particles was determined by arithmetic average by TEM observation.
The titanium nitride-containing particles TiN-1 were produced using an apparatus according to the black composite fine particle production apparatus described in FIG. 1 of International Publication No. 2010/147098.
Specifically, in the black composite fine particle manufacturing apparatus, a high frequency voltage of about 4 MHz and about 80 kVA is applied to the high frequency oscillation coil of the plasma torch, and argon gas 50 L / min and nitrogen as plasma gas are supplied from the plasma gas supply source. A mixed gas of 50 L / min was supplied to generate an argon-nitrogen thermal plasma flame in the plasma torch. Moreover, 10 L / min carrier gas was supplied from the spray gas supply source of the material supply apparatus.
Then, with respect to the Ti particles obtained as described above, Fe powder (JIP270M, manufactured by JFE Steel) and Si powder (Silicon powder SI006031) have a mass ratio of Ti / Fe / Si = residue. /0.05/0.05 is mixed and supplied to the thermal plasma flame in the plasma torch together with the argon gas as the carrier gas, evaporated in the thermal plasma flame, and highly dispersed in the gas phase state. It was.
Further, nitrogen was used as a gas supplied into the chamber by the gas supply device. The flow rate in the chamber at this time was 5 m / sec, and the supply amount was 1000 L / min. The pressure in the cyclone was 50 kPa, and the supply rate of each raw material from the chamber to the cyclone was 10 m / s (average value).
In this way, titanium nitride-containing particles TiN-1 were obtained.
 得られたチタン窒化物含有粒子TiN-1について、ICP(Inductively Coupled Plasma)発光分光分析法によって、チタン(Ti)原子、鉄(Fe)原子及びケイ素(Si)原子の含有量を測定した。なお、ICP発光分光分析法には、セイコーインスツルメンツ社製のICP発光分光分析装置「SPS3000」(商品名)を用いた。
 また、窒素原子の含有量については、堀場製作所製の酸素・窒素分析装置「EMGA-620W/C」(商品名)を用いて測定し、不活性ガス融解-熱伝導度法により算出した。上記の結果、チタン窒化物含有粒子TiNに含まれる各原子の質量比は、Ti/N/Fe/Si=57/34/0.0030/0.0020であった。
The obtained titanium nitride-containing particles TiN-1 were measured for the content of titanium (Ti) atoms, iron (Fe) atoms, and silicon (Si) atoms by ICP (Inductively Coupled Plasma) emission spectroscopy. For the ICP emission spectroscopic analysis, an ICP emission spectroscopic analyzer “SPS3000” (trade name) manufactured by Seiko Instruments Inc. was used.
The nitrogen atom content was measured using an oxygen / nitrogen analyzer “EMGA-620W / C” (trade name) manufactured by Horiba, Ltd., and calculated by an inert gas melting-thermal conductivity method. As a result, the mass ratio of each atom contained in the titanium nitride-containing particle TiN was Ti / N / Fe / Si = 57/34 / 0.0030 / 0.0020.
 チタン窒化物含有粒子TiN-1のX線回折は、粉末試料をアルミ製標準試料ホルダーに詰め、広角X線回折法(理学電機社製、商品名「RU-200R」)により測定した。測定条件としては、X線源はCuKα線とし、出力は50kV/200mA、スリット系は1°-1°-0.15mm-0.45mm、測定ステップ(2θ)は0.02°、スキャン速度は2°/分とした。
 そして、回折角2θ(42.6°)付近に観察されるTiN(200)面に由来するピークの回折角を測定した。更に、この(200)面に由来するピークの半値幅より、シェラーの式を用いて、粒子を構成する結晶子サイズを求めた。その結果、ピークの回折角は42.62°、結晶子サイズは10nmだった。なお、TiOに起因するX線回折ピークは全く見られなかった。
X-ray diffraction of titanium nitride-containing particles TiN-1 was measured by a wide-angle X-ray diffraction method (trade name “RU-200R” manufactured by Rigaku Corporation) with a powder sample placed in an aluminum standard sample holder. As measurement conditions, the X-ray source is CuKα ray, the output is 50 kV / 200 mA, the slit system is 1 ° -1 ° -0.15 mm-0.45 mm, the measurement step (2θ) is 0.02 °, and the scan speed is It was 2 ° / min.
And the diffraction angle of the peak derived from the TiN (200) plane observed in the vicinity of the diffraction angle 2θ (42.6 °) was measured. Furthermore, from the half width of the peak derived from the (200) plane, the crystallite size constituting the particle was determined using Scherrer's equation. As a result, the peak diffraction angle was 42.62 ° and the crystallite size was 10 nm. Note that no X-ray diffraction peak due to TiO 2 was observed.
(チタン窒化物含有粒子TiN-2)
 Ti粒子として、トーホーテック社製「TC-200」に代えて、シグマアルドリッチ社製「578347」を使用し、Fe粉、及びSi粉を、それぞれの質量比がTi/Fe/Si=残分/0.5/1となるよう混合した以外はTiN-1と同様にして、チタン窒化物含有粒子TiN-2を得た。
 なお、X線回折により測定したピークの回折角は42.81°、結晶子サイズは12nmだった。
(Titanium nitride-containing particles TiN-2)
Instead of “TC-200” manufactured by Toho Tech Co., as “Ti-particles”, “578347” manufactured by Sigma-Aldrich Co. is used, and the Fe and Si powders have a mass ratio of Ti / Fe / Si = residue / Titanium nitride-containing particles TiN-2 were obtained in the same manner as TiN-1, except that the mixture was mixed to 0.5 / 1.
The peak diffraction angle measured by X-ray diffraction was 42.81 °, and the crystallite size was 12 nm.
(チタン窒化物含有粒子TiN-3)
 Fe粉、及びSi粉を、それぞれの質量比がTi/Fe/Si=残分/1/2となるよう混合した以外はTiN-1と同様にして、チタン窒化物含有粒子TiN-3を得た。
 なお、X線回折により測定したピークの回折角は43.1°、結晶子サイズは12nmだった。
(Titanium nitride-containing particles TiN-3)
Titanium nitride-containing particles TiN-3 are obtained in the same manner as TiN-1, except that Fe powder and Si powder are mixed so that the respective mass ratios are Ti / Fe / Si = residue / 1/2. It was.
The peak diffraction angle measured by X-ray diffraction was 43.1 °, and the crystallite size was 12 nm.
(Fe原子を含有する窒化ニオブ含有粒子(NbN)の作製)
 以下の方法によりFe原子を含有する窒化ニオブ含有粒子を作製した。
 まず、三津和化学薬品製ニオブ(粉末)<100-325mesh>を原料(以下、「金属原料粉末」ともいう。)として準備した。
 次に、上記金属原料粉末を、Arガス中においてプラズマ処理(処理条件は、下記のプラズマ処理(1)による)することにより、Nbナノ粒子化した。
(Preparation of niobium nitride-containing particles containing Fe atoms (NbN))
Niobium nitride-containing particles containing Fe atoms were produced by the following method.
First, niobium (powder) <100-325 mesh> manufactured by Mitsuwa Chemicals was prepared as a raw material (hereinafter also referred to as “metal raw material powder”).
Next, the metal raw material powder was formed into Nb nanoparticles by plasma treatment in Ar gas (the treatment conditions were the following plasma treatment (1)).
・プラズマ処理(1)
 プラズマ処理(1)は以下の方法により行った。上記の黒色複合微粒子製造装置に準ずる装置を用い、以下の条件によりプラズマ処理(1)を行った。
・高周波発振用コイルに印加した高周波電圧:周波数、約4MHz、電圧、約80kVA
・プラズマガス:アルゴンガス(供給量 100L/min)
・キャリアガス:アルゴンガス(供給量 10L/min)
・チャンバ内雰囲気:アルゴンガス(供給量 1000L/min、チャンバ内流速 5m/sec)
・サイクロン内雰囲気:アルゴンガス、内圧:50kPa
・チャンバからサイクロンへの材料供給速度:10m/s(平均値)
・ Plasma treatment (1)
Plasma treatment (1) was performed by the following method. Plasma treatment (1) was performed under the following conditions using an apparatus according to the above black composite fine particle production apparatus.
・ High frequency voltage applied to the coil for high frequency oscillation: frequency, about 4 MHz, voltage, about 80 kVA
・ Plasma gas: Argon gas (Supply rate: 100 L / min)
Carrier gas: Argon gas (Supply amount: 10 L / min)
-Chamber atmosphere: Argon gas (Supply rate 1000L / min, Chamber flow rate 5m / sec)
・ Cyclone atmosphere: Argon gas, Internal pressure: 50 kPa
・ Material supply speed from chamber to cyclone: 10 m / s (average value)
 次に、Fe粉(JIP270M、JFEスチール社製)を準備し、上記プラズマ処理(1)の条件によりプラズマ処理を行い、Feナノ粒子化した。 Next, Fe powder (JIP270M, manufactured by JFE Steel Co., Ltd.) was prepared, and plasma treatment was performed under the conditions of the plasma treatment (1) to form Fe nanoparticles.
 次に、上記により得られたNbナノ粒子、及びFeナノ粒子を混合し、原料金属粉末を得た。この原料金属粉末について、窒素ガス中においてプラズマ処理(処理条件は、下記のプラズマ処理(2)による)することにより、窒化ニオブ含有粒子を得た。 Next, the Nb nanoparticles and Fe nanoparticles obtained as described above were mixed to obtain a raw metal powder. The raw material metal powder was subjected to plasma treatment in nitrogen gas (treatment conditions were as described in the following plasma treatment (2)) to obtain niobium nitride-containing particles.
・プラズマ処理(2)
 プラズマ処理(2)は以下の方法により行った。なお、用いた装置はプラズマ処理(1)と同様である。
・高周波発振用コイルに印加した高周波電圧:周波数、約4MHz、電圧、約80kVA
・プラズマガス:アルゴンガス及び窒素ガス(供給量 それぞれ50L/min)
・キャリアガス:窒素ガス(供給量 10L/min)
・チャンバ内雰囲気:窒素ガス(供給量 1000L/min、チャンバ内流速 5m/sec)
・サイクロン内雰囲気:窒素ガス、内圧 50kPa
・チャンバからサイクロンへの材料供給速度:10m/s(平均値)
・ Plasma treatment (2)
Plasma treatment (2) was performed by the following method. The apparatus used is the same as in the plasma treatment (1).
・ High frequency voltage applied to the coil for high frequency oscillation: frequency, about 4 MHz, voltage, about 80 kVA
・ Plasma gas: Argon gas and nitrogen gas (Supply amount 50L / min each)
・ Carrier gas: Nitrogen gas (Supply amount: 10L / min)
・ Atmosphere in the chamber: Nitrogen gas (amount supplied: 1000 L / min, flow velocity in the chamber: 5 m / sec)
・ Cyclone atmosphere: Nitrogen gas, internal pressure 50kPa
・ Material supply speed from chamber to cyclone: 10 m / s (average value)
 プラズマ処理(2)終了後の粒子を、Arガスを用いて日本シンテック社製分流型湿度供給装置SRHにより大気中であれば相対湿度95%となる条件で20℃の窒素ガスを導入し、24時間静置した。その後、得られた粒子について、ホソカワミクロン製TTSPセパレータを用いて収率10%となる条件で分級を行い、窒化ニオブ含有粒子(NbN)を得た。なお、セパレータへは窒素ガスを供給した。
 得られた窒化ニオブ含有粒子について、ICP発光分光分析法によって、鉄(Fe)原子の含有量を測定したところ、50質量ppmだった。
After completion of the plasma treatment (2), nitrogen gas at 20 ° C. is introduced under the condition that the relative humidity is 95% in the atmosphere by using a shunt type humidity supply device SRH manufactured by Nippon Shintec Co., Ltd. using Ar gas. Let stand for hours. Thereafter, the obtained particles were classified using a TTSP separator manufactured by Hosokawa Micron under the condition of a yield of 10% to obtain niobium nitride-containing particles (NbN). Nitrogen gas was supplied to the separator.
About the obtained niobium nitride containing particle | grains, when content of an iron (Fe) atom was measured by ICP emission spectroscopy analysis, it was 50 mass ppm.
(Fe原子を含有する窒化バナジウム含有粒子(VN)の作製)
 Fe原子を含有する窒化ニオブ含有粒子の作製において、三津和化学薬品製ニオブ(粉末)<100-325mesh>に代えて太陽鉱工製金属バナジウム粉末VHOを用いたこと以外は同様にして、Fe原子を含有する窒化バナジウム含有粒子(VN)を作製した。得られた窒化バナジウム含有粒子について、ICP発光分光分析法によって、鉄(Fe)原子の含有量を測定したところ、50質量ppmだった。
(Production of vanadium nitride-containing particles (VN) containing Fe atoms)
In the production of niobium nitride-containing particles containing Fe atoms, Fe atoms were used in the same manner except that Niobium Metal Vanadium Powder VHO was used instead of Mitsuwa Chemical Niobium (Powder) <100-325 mesh>. Vanadium nitride-containing particles (VN) containing About the obtained vanadium nitride containing particle | grains, when content of an iron (Fe) atom was measured by ICP emission spectroscopy analysis, it was 50 mass ppm.
 なお、表5中における上記以外の着色剤は、以下の表4に記載の着色剤、又は、着色剤の混合物である。
Figure JPOXMLDOC01-appb-T000044
In Table 5, the colorants other than those described above are the colorants described in Table 4 below, or a mixture of colorants.
Figure JPOXMLDOC01-appb-T000044
 なお、表4中における化合物SQ-23、及び、化合物A-52の構造を以下に示す。
・化合物SQ-23
Figure JPOXMLDOC01-appb-C000045
The structures of Compound SQ-23 and Compound A-52 in Table 4 are shown below.
Compound SQ-23
Figure JPOXMLDOC01-appb-C000045
・化合物A-52(式中、Phは、フェニル基を表す。)
Figure JPOXMLDOC01-appb-C000046
Compound A-52 (wherein Ph represents a phenyl group)
Figure JPOXMLDOC01-appb-C000046
〔分散剤〕
 分散剤として、以下の構造の分散剤Aを用いた。各構造単位に記載の数値は、全構造単位に対する、各構造単位の質量%を意図する。
Figure JPOXMLDOC01-appb-C000047
[Dispersant]
Dispersant A having the following structure was used as the dispersant. The numerical value described in each structural unit intends mass% of each structural unit with respect to the total structural unit.
Figure JPOXMLDOC01-appb-C000047
〔バインダー樹脂〕
 バインダー樹脂として、以下の構造の樹脂Aを用いた。なお、樹脂Aの式中、各略号は以下を表す。各構造単位に記載の数値は、全構造単位に対する、各構造単位の質量%を意図する。なお、樹脂Aはアルカリ可溶性樹脂に該当する。
・BzMA:メタクリル酸ベンジル
・MMA:メタクリル酸メチル
Figure JPOXMLDOC01-appb-C000048
[Binder resin]
As the binder resin, a resin A having the following structure was used. In the formula of resin A, each abbreviation represents the following. The numerical value described in each structural unit intends mass% of each structural unit with respect to the total structural unit. Resin A corresponds to an alkali-soluble resin.
-BzMA: benzyl methacrylate-MMA: methyl methacrylate
Figure JPOXMLDOC01-appb-C000048
〔重合性化合物〕
 重合性化合物として、重合性化合物M1、及び、重合性化合物M2を用いた。
・重合性化合物M1(ジペンタエリスリトールヘキサアクリレート)の構造は以下の式のとおりである(日本化薬社製、商品名「KAYARAD」)。
Figure JPOXMLDOC01-appb-C000049

・重合性化合物M2:PET-30(ペンタエリスリトールトリアクリレート、日本化薬社製)
(Polymerizable compound)
As the polymerizable compound, a polymerizable compound M1 and a polymerizable compound M2 were used.
The structure of the polymerizable compound M1 (dipentaerythritol hexaacrylate) is as follows (product name “KAYARAD”, manufactured by Nippon Kayaku Co., Ltd.).
Figure JPOXMLDOC01-appb-C000049

Polymerizable compound M2: PET-30 (pentaerythritol triacrylate, manufactured by Nippon Kayaku Co., Ltd.)
〔界面活性剤〕
 ・F-1:下記式で表される化合物(重量平均分子量(Mw)=15311)
 ただし、下記式において、式中(A)及び(B)で表される構造単位はそれぞれ62モル%、38モル%である。式(B)で表される構造単位中、aは、b、cは、それぞれ、a+c=14、b=17の関係を満たす。
Figure JPOXMLDOC01-appb-C000050
[Surfactant]
F-1: Compound represented by the following formula (weight average molecular weight (Mw) = 15311)
However, in the following formula, the structural units represented by the formulas (A) and (B) are 62 mol% and 38 mol%, respectively. In the structural unit represented by the formula (B), a, b, and c satisfy the relationships of a + c = 14 and b = 17, respectively.
Figure JPOXMLDOC01-appb-C000050
[硬化性組成物の評価]
〔パターン形状〕
 各硬化性組成物を容量100mLのブルーム瓶に密閉し、60℃の恒温槽で7日間保管(加熱強制経時)した。次に、加熱強制経時後の各硬化性組成物を用いて、表面をSiO処理したSi基板(支持体に該当する。)上に、乾燥後の膜厚が1.5μmとなるように回転数を調整して、スピンコートにより塗膜(硬化性組成物層)を形成した。次に、形成した塗膜付き基板を、ホットプレート上に載置して100℃、2分間の熱処理(プリベーク)により乾燥させた。次に、プリベーク後の塗膜(硬化性組成物層)付き基板に対してi線ステッパー(キヤノン製FPA3000i5+)を用い、長さ200μm×幅20μmラインパターンが形成されたフォトマスクを通して、上記塗膜を露光(ネガ)した。次に、露光後の塗膜を、東京エレクトロン製コーターデベロッパーACT8を用いて、現像液として水酸化テトラメチルアンモニウムを用いて、30秒間パドル現像をし、その後、純水を用いて20秒間シャワーリンスしてパターン状の硬化膜を得た。
 次に、パターン状の硬化膜をポストベーク(温度:220℃、時間:300秒)した。ポストベーク後の硬化膜のパターン形状を測長SEM(Scanning Electron Microscope)により測定した。具体的には、ラインパターン端部の膜厚と中央部の膜厚を測定し、比(パターン端部の膜厚/中央部の膜厚)を計算し、以下の基準により評価した。なお、評価「2」以上が実用範囲である。結果は表5に示した。
・7:比が0.98超1.00以下であり、SEMによる観察でパターン中央部と端部の膜厚に差は見られない。
・6:比が0.96超0.98以下であり、パターン中央部と端部の膜厚にわずかに差がみられる。
・5:比が0.94超0.96以下であり、パターン中央部と端部の膜厚に差がみられる。
・4:比が0.92超0.94以下であり、端部の膜厚が薄く、わずかに歪んでいるが実用上問題ないレベル。
・3:比が0.90超0.92以下であり、端部の膜厚が薄く、歪んでいるが実用上問題ないレベル。
・2:比が0.80超0.90以下であり、端部の膜厚が薄いが、実用は可能なレベル。
・1:比が0.80以下であり、端部の膜厚が薄く、許容外。
[Evaluation of curable composition]
[Pattern shape]
Each curable composition was hermetically sealed in a 100 mL capacity Bloom bottle and stored for 7 days in a constant temperature bath at 60 ° C. (heating forced aging). Next, using each of the curable compositions after forced heating, the surface was rotated on a Si substrate (corresponding to a support) whose SiO 2 was treated so that the film thickness after drying was 1.5 μm. The number was adjusted and a coating film (curable composition layer) was formed by spin coating. Next, the formed coated substrate was placed on a hot plate and dried by heat treatment (prebaking) at 100 ° C. for 2 minutes. Next, using the i-line stepper (Canon FPA3000i5 +) on the substrate with the pre-baked coating film (curable composition layer), the coating film is passed through a photomask in which a line pattern of length 200 μm × width 20 μm is formed. Was exposed (negative). Next, the coated film after exposure is subjected to paddle development for 30 seconds using tetramethylammonium hydroxide as a developer using a coater developer ACT8 manufactured by Tokyo Electron, and then shower rinse for 20 seconds using pure water. Thus, a patterned cured film was obtained.
Next, the patterned cured film was post-baked (temperature: 220 ° C., time: 300 seconds). The pattern shape of the cured film after post-baking was measured by a length measuring SEM (Scanning Electron Microscope). Specifically, the film thickness at the end of the line pattern and the film thickness at the center were measured, and the ratio (film thickness at the pattern end / film thickness at the center) was calculated and evaluated according to the following criteria. In addition, evaluation "2" or more is a practical range. The results are shown in Table 5.
-7: The ratio is more than 0.98 and less than 1.00, and no difference is observed in the film thickness between the central part and the end part of the pattern by observation with SEM.
6: The ratio is more than 0.96 and not more than 0.98, and there is a slight difference in the film thickness between the central portion and the end portion of the pattern.
5: The ratio is more than 0.94 and not more than 0.96, and there is a difference in the film thickness between the center and end of the pattern.
-4: The ratio is more than 0.92 and less than 0.94, the film thickness at the end is thin, and it is slightly distorted, but there is no practical problem.
-3: The ratio is more than 0.90 and not more than 0.92, and the film thickness at the end is thin and distorted, but there is no practical problem.
-2: The ratio is more than 0.80 and 0.90 or less, and the film thickness at the end is thin, but the practical level is possible.
-1: The ratio is 0.80 or less, the film thickness at the end is thin, and is not acceptable.
〔現像残渣抑制性能〕
 上記と同様の方法で、各構成組成物を用いて塗膜付き基板を作製した。その後、上記と同様の方法で現像して、Si基板上における現像残渣の数を計測した。具体的には、塗膜を露光した際、光が照射されなかった領域(未露光部)の残渣の数をSEM(倍率:20000倍)にて観察し、現像残渣抑制性能を評価した。評価基準は以下の通りである。結果は表5に示した。
A:未露光部には、残渣が全く観察されない。
B:未露光部1.0μm四方に残渣が1個以上、3個以下観察された。
C:未露光部1.0μm四方に残渣が4個以上、7個以下観察された。
D:未露光部1.0μm四方に残渣が8個以上、10個以下観察された。
E:未露光部1.0μm四方に残渣が11個以上観察された。
 実用上「D」以上が好ましく、「A」及び「B」は特に優れた性能を有すると評価する。
[Development residue suppression performance]
By the same method as described above, a substrate with a coating film was produced using each constituent composition. Thereafter, development was performed in the same manner as described above, and the number of development residues on the Si substrate was measured. Specifically, when the coating film was exposed, the number of residues in the region not irradiated with light (unexposed portion) was observed with SEM (magnification: 20000 times) to evaluate the development residue suppression performance. The evaluation criteria are as follows. The results are shown in Table 5.
A: No residue is observed at all in the unexposed area.
B: One or more residues were observed in an unexposed area of 1.0 μm square.
C: 4 or more and 7 or less residues were observed in an unexposed area of 1.0 μm square.
D: 8 or more and 10 or less residues were observed in an unexposed area of 1.0 μm square.
E: 11 or more residues were observed in an unexposed area of 1.0 μm square.
“D” or more is preferable for practical use, and “A” and “B” are evaluated to have particularly excellent performance.
・表5中、特定オキシム化合物(A)及び多官能チオール化合物(B)の「含有量」とは、硬化性組成物の全固形分を100質量%としたときの特定オキシム化合物(A)及び多官能チオール化合物(B)のそれぞれの含有量(質量%)である。
・表5中、「A/B」とは、硬化性組成物中における多官能チオール化合物(B)の含有量に対する、特定オキシム化合物(A)の含有量の含有質量比を表す。
・表5中、着色剤の種類として、CP-1~CP-8とあるのは、表4中における有彩色顔料1~8をそれぞれ表す。
Figure JPOXMLDOC01-appb-T000051
In Table 5, “content” of the specific oxime compound (A) and the polyfunctional thiol compound (B) is the specific oxime compound (A) when the total solid content of the curable composition is 100% by mass and It is content (mass%) of each of polyfunctional thiol compound (B).
-In Table 5, "A / B" represents content mass ratio of content of a specific oxime compound (A) with respect to content of the polyfunctional thiol compound (B) in a curable composition.
In Table 5, the types of colorants CP-1 to CP-8 represent chromatic pigments 1 to 8 in Table 4, respectively.
Figure JPOXMLDOC01-appb-T000051
Figure JPOXMLDOC01-appb-T000052
Figure JPOXMLDOC01-appb-T000052
 表5に示した結果から、各実施例に係る硬化性組成物は本発明の効果を有していた。一方、比較例に係る硬化性組成物は本発明の効果を有していなかった。
 式(1)のRの炭素数が13以上である特定オキシム化合物を含有する実施例1の硬化性組成物は、実施例8の硬化性組成物と比較して、得られる硬化膜のパターン形状がより優れていた。
 式(2)のR24が水素原子以外である多官能チオール化合物(2級チオール化合物)を含有する実施例3の硬化性組成物は、実施例4の硬化性組成物(R24、及び、R25の両方が水素原子である、1級チオール化合物)と比較して、より優れた現像残渣抑制性能を有していた。また、R24、及び、R25の両方が水素原子以外である多官能チオール化合物(3級チオール化合物)を含有する実施例35の硬化性組成物は、更に優れた現像残渣抑制性能を有していた。
 また、式(2)のnが3~10である、実施例43及び47の硬化性組成物は、実施例46の硬化性組成物(nが2である)と比較して、得られる硬化膜のパターン形状がより優れていた。
 多官能チオール化合物の含有量に対するオキシム化合物の含有量の含有質量比が4~10である実施例12の硬化性組成物は、実施例10、及び、実施例13の硬化性組成物と比較して、得られる硬化膜のパターン形状がより優れていた。
 式(1)のRが炭素数13以上の直鎖状アルキル基、又は、*-L11-R11で表される基である実施例15~19、及び、実施例21~22の硬化性組成物は、実施例20の硬化性組成物と比較して、得られる硬化膜がより優れたパターン形状を有していた。
From the result shown in Table 5, the curable composition which concerns on each Example had the effect of this invention. On the other hand, the curable composition which concerns on a comparative example did not have the effect of this invention.
Compared with the curable composition of Example 8, the curable composition of Example 1 which contains the specific oxime compound whose carbon number of R < 1 > of Formula (1) is 13 or more is a pattern of the cured film obtained. The shape was better.
The curable composition of Example 3 containing a polyfunctional thiol compound (secondary thiol compound) in which R 24 in Formula (2) is other than a hydrogen atom is the curable composition of Example 4 (R 24 and Compared with a primary thiol compound in which both R 25 are hydrogen atoms, the development residue suppression performance was superior. Moreover, the curable composition of Example 35 containing a polyfunctional thiol compound (tertiary thiol compound) in which both R 24 and R 25 are other than a hydrogen atom has a further excellent development residue suppressing performance. It was.
In addition, the curable compositions of Examples 43 and 47 in which n in the formula (2) is 3 to 10 are obtained in comparison with the curable composition of Example 46 (n is 2). The film pattern shape was more excellent.
The curable composition of Example 12 in which the content ratio of the oxime compound content to the polyfunctional thiol compound content was 4 to 10 was compared with the curable compositions of Example 10 and Example 13. Thus, the pattern shape of the obtained cured film was more excellent.
Curing of Examples 15 to 19 and Examples 21 to 22 in which R 1 in the formula (1) is a linear alkyl group having 13 or more carbon atoms or a group represented by * -L 11 -R 11 Compared with the curable composition of Example 20, the cured film obtained had a more excellent pattern shape.
[実施例71]
 TiN-1に代えて、TiN-1とカーボンブラック(商品名「カラーブラック S170」、デグサ社製、平均一次粒子径17nm、BET比表面積200m/g、ガスブラック方式により製造されたカーボンブラック)を用い、その固形分質量比が7:3になるようにした以外は、実施例43と同様にして、評価したところ、実施例43と同様の効果が得られた。
[Example 71]
In place of TiN-1, TiN-1 and carbon black (trade name “Color Black S170”, manufactured by Degussa, average primary particle diameter 17 nm, BET specific surface area 200 m 2 / g, carbon black manufactured by gas black method) When the evaluation was performed in the same manner as in Example 43 except that the solid content mass ratio was 7: 3, the same effect as in Example 43 was obtained.
[実施例72]
 界面活性剤を用いなかったことを除いては実施例43と同様にして、硬化性組成物を作製し、評価を行ったところ、実施例43と同様の結果が得られた。
[Example 72]
A curable composition was prepared and evaluated in the same manner as in Example 43 except that the surfactant was not used. As a result, the same result as in Example 43 was obtained.
[実施例73]
 重合禁止剤を用いなかったことを除いては実施例43と同様にして、硬化性組成物を作製し、評価を行ったところ、実施例43と同様の結果が得られた。
[Example 73]
A curable composition was prepared and evaluated in the same manner as in Example 43 except that the polymerization inhibitor was not used. As a result, the same result as in Example 43 was obtained.
101・・・支持体
102、401・・・硬化性組成物層
103・・・フォトマスク
201、501・・・硬化膜
301、601・・・ポストベーク後の硬化膜
700・・・固体撮像装置
701・・・固体撮像素子
702・・・撮像部
703・・・カバーガラス
704・・・スペーサー
705・・・積層基板
706・・・チップ基板
707・・・回路基板
708・・・電極パッド
709・・・外部接続端子
710・・・貫通電極
711・・・レンズ層
712・・・レンズ材
713・・・支持体
714、715・・・硬化膜
801・・・受光素子
802・・・カラーフィルタ
803・・・マイクロレンズ
804・・・基板
805b・・・青色画素
805r・・・赤色画素
805g・・・緑色画素
805bm・・・ブラックマトリクス
806・・・pウェル層
807・・・読み出しゲート部
808・・・垂直転送路
809・・・素子分離領域
810・・・ゲート絶縁膜
811・・・垂直転送電極
812・・・硬化膜
813、814・・・絶縁膜
815・・・平坦化膜
900・・・赤外線センサ
910・・・固体撮像素子
911・・・赤外線吸収フィルタ
912・・・カラーフィルタ
913・・・赤外線透過フィルタ
914・・・樹脂膜
915・・・マイクロレンズ
916・・・平坦化膜
 
DESCRIPTION OF SYMBOLS 101 ... Support body 102, 401 ... Curable composition layer 103 ... Photomask 201, 501 ... Cured film 301, 601 ... Post-baked cured film 700 ... Solid-state imaging device 701: Solid-state imaging device 702 ... Imaging unit 703 ... Cover glass 704 ... Spacer 705 ... Multilayer substrate 706 ... Chip substrate 707 ... Circuit board 708 ... Electrode pad 709 ..External connection terminal 710... Through electrode 711... Lens layer 712. Lens material 713... Support 714, 715... Cured film 801. ... Microlens 804 ... Substrate 805b ... Blue pixel 805r ... Red pixel 805g ... Green pixel 805bm ... Black matrix 806 ... p well layer 807... read gate portion 808. vertical transfer path 809... element isolation region 810... gate insulating film 811. vertical transfer electrode 812. Insulating film 815 ... Planarizing film 900 ... Infrared sensor 910 ... Solid-state imaging device 911 ... Infrared absorption filter 912 ... Color filter 913 ... Infrared transmission filter 914 ... Resin film 915 ..Microlens 916 ... Planarizing film

Claims (16)

  1.  光重合開始剤と、多官能チオール化合物と、重合性化合物と、着色剤とを含有する硬化性組成物であって、
     前記光重合開始剤が、以下の式(1)で表されるオキシム化合物である、硬化性組成物。
    Figure JPOXMLDOC01-appb-C000001

    式(1)中、Rは、ヘテロ原子を含有してもよい炭素数8以上の炭化水素基を表し、Rはアルキル基、又は、アリール基を表し、Xは単結合、又は、2価の連結基を表し、Rはアリール基を表し、Xは単結合、又は、カルボニル基を表す。
    A curable composition containing a photopolymerization initiator, a polyfunctional thiol compound, a polymerizable compound, and a colorant,
    The curable composition whose said photoinitiator is an oxime compound represented by the following formula | equation (1).
    Figure JPOXMLDOC01-appb-C000001

    In Formula (1), R 1 represents a hydrocarbon group having 8 or more carbon atoms that may contain a hetero atom, R 2 represents an alkyl group or an aryl group, and X 2 represents a single bond, or Represents a divalent linking group, R 3 represents an aryl group, and X 3 represents a single bond or a carbonyl group.
  2.  前記式(1)中におけるRの炭素数が13以上である、請求項1に記載の硬化性組成物。 The curable composition of Claim 1 whose carbon number of R1 in the said Formula (1) is 13 or more.
  3.  前記硬化性組成物中における前記多官能チオール化合物の含有量に対する、前記オキシム化合物の含有量の含有質量比が1~10である、請求項1又は2に記載の硬化性組成物。 The curable composition according to claim 1 or 2, wherein the content ratio of the content of the oxime compound to the content of the polyfunctional thiol compound in the curable composition is 1 to 10.
  4.  前記硬化性組成物中における前記多官能チオール化合物の含有量に対する、前記オキシム化合物の含有量の含有質量比が4~10である、請求項1~3のいずれか一項に記載の硬化性組成物。 The curable composition according to any one of claims 1 to 3, wherein the content ratio of the content of the oxime compound to the content of the polyfunctional thiol compound in the curable composition is 4 to 10. object.
  5.  前記多官能チオール化合物が以下の式(2)で表される化合物である、請求項1~4のいずれか一項に記載の硬化性組成物。
    Figure JPOXMLDOC01-appb-C000002

    式(2)中、R24、及び、R25はそれぞれ独立に水素原子、アルキル基、アリール基、-C(=O)-R23、-C(=O)-O-R23、又は、-C(=O)-NH-R23を表し、L21はn価の有機連結基を表し、nは2~10の整数を表し、M21は単結合、又は、-O-、-S-、-N(R23)-、-C(=O)-O-、-O-C(=O)-O-、-C(=O)-NH-、-C(=O)-、アルキレン基、若しくは、これらを2種以上組み合わせた基を表し、R23はアルキル基、又は、アリール基を表し、複数あるR24、R25、及び、M21はそれぞれ同一でも異なってもよく、R23が複数ある場合、それぞれ同一でも異なってもよい。
    The curable composition according to any one of claims 1 to 4, wherein the polyfunctional thiol compound is a compound represented by the following formula (2).
    Figure JPOXMLDOC01-appb-C000002

    In the formula (2), R 24 and R 25 each independently represent a hydrogen atom, an alkyl group, an aryl group, —C (═O) —R 23 , —C (═O) —O—R 23 , or —C (═O) —NH—R 23 , L 21 represents an n-valent organic linking group, n represents an integer of 2 to 10, and M 21 represents a single bond, —O—, —S —, —N (R 23 ) —, —C (═O) —O—, —O—C (═O) —O—, —C (═O) —NH—, —C (═O) —, Represents an alkylene group or a group in which two or more of these are combined, R 23 represents an alkyl group or an aryl group, and a plurality of R 24 , R 25 and M 21 may be the same or different, When there are a plurality of R 23 s , they may be the same or different.
  6.  前記式(2)中、R24、及び、R25がそれぞれ独立にアルキル基、又は、-C(=O)-O-R23であり、M21が-C(=O)-O-であり、nが3~10の整数である、請求項5に記載の硬化性組成物。 In the formula (2), R 24 and R 25 are each independently an alkyl group or —C (═O) —O—R 23 , and M 21 is —C (═O) —O—. The curable composition according to claim 5, wherein n is an integer of 3 to 10.
  7.  前記着色剤が有機顔料からなる請求項1~6のいずれか一項に記載の硬化性組成物。 The curable composition according to any one of claims 1 to 6, wherein the colorant comprises an organic pigment.
  8.  前記着色剤が無機顔料からなる請求項1~6のいずれか一項に記載の硬化性組成物。 The curable composition according to any one of claims 1 to 6, wherein the colorant comprises an inorganic pigment.
  9.  請求項1~8のいずれか一項に記載の硬化性組成物を硬化して得られる、硬化膜。 A cured film obtained by curing the curable composition according to any one of claims 1 to 8.
  10.  請求項9に記載の硬化膜を含有する、カラーフィルタ。 A color filter containing the cured film according to claim 9.
  11.  請求項9に記載の硬化膜を含有する、遮光膜。 A light-shielding film containing the cured film according to claim 9.
  12.  請求項9に記載の硬化膜を含有する、固体撮像素子。 A solid-state imaging device containing the cured film according to claim 9.
  13.  請求項9に記載の硬化膜を含有する、画像表示装置。 An image display device comprising the cured film according to claim 9.
  14.  請求項1~8のいずれか一項に記載の硬化性組成物を用いて支持体上に硬化性組成物層を形成する、硬化性組成物層形成工程と、
     前記硬化性組成物層を露光する、露光工程と、を含有する硬化膜の製造方法。
    A curable composition layer forming step of forming a curable composition layer on a support using the curable composition according to any one of claims 1 to 8,
    The manufacturing method of the cured film containing the exposure process which exposes the said curable composition layer.
  15.  前記硬化性組成物層形成工程が、前記支持体上に前記硬化性組成物を塗布して、前記支持体上に前記硬化性組成物層を形成する工程である、請求項14に記載の硬化膜の製造方法。 The curing according to claim 14, wherein the curable composition layer forming step is a step of applying the curable composition on the support to form the curable composition layer on the support. A method for producing a membrane.
  16.  更に、露光された前記硬化性組成物層を現像する、現像工程を含有する、請求項14又は15に記載の硬化膜の製造方法。
     
    Furthermore, the manufacturing method of the cured film of Claim 14 or 15 containing the image development process which develops the exposed said curable composition layer.
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