WO2018135156A1 - Pompe à soufflet - Google Patents

Pompe à soufflet Download PDF

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Publication number
WO2018135156A1
WO2018135156A1 PCT/JP2017/043411 JP2017043411W WO2018135156A1 WO 2018135156 A1 WO2018135156 A1 WO 2018135156A1 JP 2017043411 W JP2017043411 W JP 2017043411W WO 2018135156 A1 WO2018135156 A1 WO 2018135156A1
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WO
WIPO (PCT)
Prior art keywords
wall
bellows
thickness
straight
angled
Prior art date
Application number
PCT/JP2017/043411
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English (en)
Japanese (ja)
Inventor
一清 手嶋
篤 中野
宮本　正樹
藤井　達也
清敬 大前
愛 友利
Original Assignee
日本ピラー工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本ピラー工業株式会社 filed Critical 日本ピラー工業株式会社
Priority to JP2018539172A priority Critical patent/JP6896747B2/ja
Publication of WO2018135156A1 publication Critical patent/WO2018135156A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members

Definitions

  • the present invention relates to a bellows pump used to feed and circulate a liquid such as a chemical liquid or a slurry liquid in a manufacturing process of, for example, a semiconductor, a liquid crystal, or an organic EL.
  • a liquid such as a chemical liquid or a slurry liquid in a manufacturing process of, for example, a semiconductor, a liquid crystal, or an organic EL.
  • each linear wall and one of the adjacent linear walls are connected by a mountain wall, and the other of the adjacent linear walls is connected.
  • Containing a bellows-shaped peripheral wall that is connected by a valley wall, and using a bellows that can be expanded and contracted in the axial direction, is configured to exhibit a liquid feeding function (hereinafter referred to as "conventional bellows pump") Is well known.
  • the wall thickness of the straight wall, the chevron wall, and the valley wall constituting the peripheral wall of the bellows is uniform and the same.
  • the liquid feeding function is performed by alternately performing the suction process of sucking the liquid into the bellows by extending the bellows and the discharge process of discharging the liquid in the bellows by contracting the bellows. Is demonstrated.
  • the conventional bellows pump has a problem in the durability of the bellows because a part of the peripheral wall of the bellows may be cracked and damaged when it is used for a long time.
  • the present invention has been made in view of such a point, and an object of the present invention is to provide a bellows pump that can improve the durability of the bellows.
  • the present invention includes a plurality of linear walls arranged in parallel in the axial direction, a mountain wall connecting between the outer peripheral ends of each linear wall and one of the adjacent linear walls, each linear wall, and A bellows-shaped peripheral wall composed of a valley-shaped wall that connects between the inner peripheral ends of the other adjacent linear walls, and is configured to suck and discharge liquid by a bellows that can expand and contract in the axial direction.
  • the first angle wall part which is the part of the angled wall on the extension direction side of the angled wall is the part of the angled wall on the contraction direction side of the bellows.
  • a bellows pump characterized by having a reinforcing portion having a thickness larger than the thickness of the second chevron wall portion is proposed. *
  • the reinforcing portion includes all the portions except the boundary portion with the straight wall and the boundary portion with the second angle wall portion in the first angle wall portion.
  • the thickness of the straight wall continuous to the first angled wall portion is set to be larger than the thickness of the straight wall connected to the second angled wall portion, or connected to the second angled wall portion. It can be either the same as or substantially the same as the wall thickness of the straight wall.
  • the first angled wall part that is easily damaged due to stress concentration has a reinforcing part having a thickness larger than the thickness of the second angled wall part, and the first angled wall part is reinforced. As a result, it is possible to prevent the first angled wall portion from being damaged as much as possible, and to greatly improve the durability of the bellows.
  • FIG. 1 is a sectional view showing an example of a bellows pump according to the present invention.
  • FIG. 2 is a cross-sectional view corresponding to FIG.
  • FIG. 3 is an enlarged cross-sectional view showing a main part of FIG.
  • FIG. 4 is an enlarged cross-sectional view showing a main part of FIG.
  • FIG. 5 is an enlarged cross-sectional view showing a main part of FIG.
  • FIG. 6 is an enlarged cross-sectional view showing the main part of FIG. 3, and shows a different form from FIG.
  • FIG. 7 is a cross-sectional view of a main part corresponding to FIG. 3 showing a modification of the bellows pump according to the present invention.
  • FIG. 8 is a cross-sectional view of the main part corresponding to FIG.
  • FIG. 9 is a cross-sectional view corresponding to FIG. 8 showing still another modification of the bellows pump according to the present invention.
  • FIG. 10 is a cross-sectional view corresponding to FIG. 8 showing still another modification of the bellows pump according to the present invention.
  • FIG. 11 is a cross-sectional view of the main part corresponding to FIG. 3 showing still another modification of the bellows pump according to the present invention.
  • FIG. 12 is an enlarged cross-sectional view showing a main part of FIG.
  • FIG. 13 is a cross-sectional view of the main part corresponding to FIG. 12 showing still another modification of the bellows pump according to the present invention.
  • FIG. 14 is a cross-sectional view corresponding to FIG. 13 showing still another modification of the bellows pump according to the present invention.
  • FIG. 15 is a schematic sectional view of an essential part showing still another modification of the bellows pump according to the present invention.
  • FIG. 1 is a cross-sectional view showing an example of a bellows pump according to the present invention
  • FIG. 2 is a cross-sectional view corresponding to FIG. 1 showing a state different from FIG. 1
  • FIG. 3 is an enlarged view of the main part of FIG. 4 is a cross-sectional view showing the most contracted state of the bellows
  • FIG. 4 is an enlarged cross-sectional view showing the main part of FIG. 2, and shows the most extended state of the bellows
  • FIG. 5 and FIG. FIG. 3 is an enlarged cross-sectional view showing the main part of FIG. 3, showing different bellows shapes.
  • left and right refer to the left and right in FIGS.
  • an axis means the centerline of the bellows mentioned later
  • an axial direction means the direction parallel to the said axis.
  • the bellows pump shown in FIGS. 1 and 2 is a double-acting horizontal bellows pump for sending a liquid F such as a chemical liquid or a slurry liquid, and includes a pump head 3 having a discharge passage 1 and a suction passage 2, and a pump.
  • a liquid F such as a chemical liquid or a slurry liquid
  • Liquid F Discharge process for feeding liquid from one pump chamber 6 to the discharge passage 1 via the discharge side check valve 7 and suction for supplying liquid from the suction passage 2 to the other pump chamber 6 via the suction side check valve 8 It is comprised so that a process may be performed simultaneously.
  • the cylinder cases 4 and 4, the bellows 5 and 5, the pump chambers 6 and 6, the discharge side check valves 7 and 7 and the suction side check valves 8 and 8 constituting the bellows pump are respectively Except for the symmetrical structure, it has the same structure.
  • the pump head 3 has a disk shape in which a discharge passage 1 connected to a liquid supply line and a suction passage 2 connected to a liquid supply line are formed. As shown in FIGS. Each of the upstream ends of the discharge passages 1 and the downstream ends of the suction passages 2 is branched and opened in each pump chamber 6.
  • each cylinder case 4 has a bottomed cylindrical shape attached to the pump head 3 and constitutes a pump casing in which an opening is closed by the pump head 3.
  • each bellows 5 includes a cylindrical peripheral wall 5a that can be expanded and contracted in the axial direction (left-right direction), a bottom wall 5b that closes one end of the peripheral wall 5a, and the other end of the peripheral wall 5a. It is a bottomed cylindrical body which consists of the flange wall 5c connected with the opening part which is.
  • Each bellows 5 is attached to the pump head 3 such that the flange wall 5c is fixed to the pump head 3 so as to be expandable and contractable in the axial direction, and by expanding and contracting, the peripheral wall 5a and the bottom wall 5b of the pump head 3 and the bellows 5.
  • the volume of the pump chamber 6 formed by surroundings is changed (expanded and contracted).
  • each bellows 5 is a cylindrical body configured to be expandable and contractable in the axial direction, and is an annular linear wall that is a plurality of circular flat plates arranged in parallel in the axial direction. 51 and an annular body that connects between the outer peripheral ends of each linear wall 51 and one of the adjacent linear walls 51, 51, and is V-shaped or U-shaped in the outer peripheral direction of the peripheral wall 5a.
  • a circular ring-shaped body 52 that is bent between the inner peripheral ends of each of the linear walls 51 and one of the linear walls 51 and 51 adjacent thereto, It has an accordion-like cross-sectional shape including an annular valley wall 53 bent in a V shape or a U shape in the circumferential direction.
  • the inner peripheral surface 52a of the mountain wall 52 has a semicircular shape
  • the outer peripheral surface 53a of the valley wall 53 has a semicircular shape.
  • Both bellows 5 and 5 are configured to extend and contract in the opposite direction synchronously by connecting disk-shaped movable plates 9 and 9 fixed to the bottom walls 5b and 5b with a connecting rod 10. That is, as shown in FIGS. 1 and 2, the connecting rod 10 interlocks the bellows 5 and 5 so that when the one bellows 5 is in the most contracted state, the other bellows 5 is in the most extended state. When one bellows 5 contracts, the other bellows 5 is extended in conjunction with this.
  • the operation means for expanding and contracting the bellows 5 is generally constituted by a piston / cylinder mechanism, a crank mechanism, an air cylinder mechanism, or the like.
  • the operation means is constituted by an air cylinder mechanism. That is, in the bellows pump shown in FIGS. 1 and 2, the operating means is provided between the bellows 5 and the movable plate 9 and the cylinder case 4 from the air supply / exhaust port 4 a formed in the end wall of each cylinder case 4.
  • Each bellows 5 is configured to expand and contract in the axial direction by supplying and discharging pressurized air 4b to and from the formed space.
  • the supply / exhaust from both the supply / exhaust ports 4a, 4a is performed alternately and synchronously.
  • both bellows 5, 5 The expansion and contraction operations, that is, the expansion and contraction operations of the pump chambers 6 and 6 are performed in the reverse direction. That is, the suction process (or the discharge process) in one pump chamber 6 and the discharge process (or the suction process) in the other pump chamber 6 are performed in synchronization, and the discharge process (liquid F in both pump chambers 6 and 6).
  • the liquid is fed from the pump chamber 6 to the discharge passage 1 via the discharge check valve 7 and the suction step (liquid F is supplied from the suction passage 2 to the pump chamber 6 via the suction check valve 8).
  • FIG. 1 shows the end state of the suction process in the left pump chamber 6 and the discharge process in the right pump chamber 6
  • FIG. 2 shows the discharge process in the left pump chamber 6 and the suction process in the right pump chamber 6.
  • the start state is shown.
  • 3 shows the right bellows 5 in FIG. 1
  • FIG. 4 shows the left bellows 5 in FIG.
  • each discharge-side check valve 7 is formed in a valve case 71 attached to the pump head 3 in a state where the inside communicates with the discharge passage 1, and is formed in the valve case 71 to form a pump chamber.
  • a valve inlet passage 72 that opens to the opening 6
  • a valve seat opening 73 formed at the opening end of the valve inlet passage 72
  • a valve body 74 that is built in the valve case 71 and opens and closes the valve seat opening 73
  • valve body 74 increases the pressure in the pump chamber 6 Ri is configured to be threaded through the discharge passage 1 and the pump chamber 6 communicated with in a valve-opening position for opening the valve seat port 73 against the biasing force of the spring 74.
  • each suction-side check valve 8 is formed in a valve case 81 attached to the pump head 3 in a state where the inside communicates with the suction passage 2, and is formed in the valve case 81 to form a pump chamber.
  • a valve outlet port 82 formed at the opening end of the valve outlet passage 82 on the suction passage 2 side
  • a valve body 84 that is built in the valve case 81 and opens and closes the valve seat port 83.
  • the valve body 84 is provided with a spring 85 that urges the valve body 84 to a valve closing position where the valve seat 83 is closed. In the discharge process, the valve body 84 is back pressure (pressure of the pump chamber 6) and the spring 85.
  • valve body 84 is held in the closed position by the urging force, and the suction passage 2 and the pump chamber 6 are disconnected from each other. In the suction process, the valve body 84 resists the urging force of the spring 85 by the pressure drop in the pump chamber 6. Inhaled by being displaced to the valve opening position that opens the seat 83 It is configured to be threaded through the road 2 and the pump chamber 6 are communicated.
  • liquid contact member is made of a fluororesin such as polytetrafluoroethylene having excellent corrosion resistance and chemical resistance.
  • fluororesin such as polytetrafluoroethylene having excellent corrosion resistance and chemical resistance.
  • These liquid contact members can be made of a plastic material or a metal material other than the fluororesin depending on pump conditions.
  • each bellows 5 in the peripheral wall 5a of each bellows 5, as shown in FIG. 3 to FIG. 5 or FIGS. 3, 4 and 6, the extending direction of the bellows 5 on the mountain wall 52 (right direction in FIG. 3, left in FIG. 4)
  • the first chevron wall portion 52 ⁇ / b> A that is a portion on the (direction) side has a thickness T ⁇ b> 1 that is a portion on the shrinkage direction (left direction in FIG. 3, right direction in FIG. 4) side of the bellows 5 in the chevron wall 52.
  • the reinforcing portion 52C is larger than the wall thickness T2 of the wall portion 52B.
  • the first chevron wall portion 52 ⁇ / b> A has an extension direction of the bellows 5 from the center of curvature C of the inner peripheral surface 52 a of the chevron wall 52 in the cross section of the chevron wall 52 (FIGS. 5 and 6).
  • 6 (right direction in FIG. 6) (a straight line extending in the extending direction of the bellows 5 parallel to the axis of the bellows 5 from the center of curvature C and hereinafter referred to as “reference line”) L1 is 0 ° to 90 °.
  • the second chevron wall portion 52B is a portion of the chevron wall 52 located in a region that forms an angle of 90 ° to 180 ° with respect to the reference line L1. That is, the first chevron wall portion 52A passes through the center of curvature C, and the chevron wall 52 is located in a region on the extension direction side of the bellows 5 from a straight line L2 (hereinafter referred to as “boundary line”) L2 orthogonal to the axis of the bellows 5.
  • the second chevron wall part 52B is a part of the chevron wall 52 located in a region on the contraction direction side of the bellows 5 with respect to the boundary line L2.
  • the wall thicknesses T1 and T2 of the angle wall portions 52A and 52B are the thicknesses of the angle wall portions 52A and 52B on a straight line passing through the center of curvature C in the cross section of the angle wall 52.
  • the reinforcing portion 52C includes a boundary portion between the first angle wall portion 52A and a straight wall 51 (hereinafter referred to as “first straight wall 51A”) and the first angle wall portion.
  • first straight wall 51A a straight wall
  • 52A and all or part of the first chevron wall portion 52 excluding the boundary portion between the second chevron wall portion 52B hereinafter, the region of the first chevron wall portion 52A excluding the boundary portion is referred to as “first chevron shape”. This is referred to as a region capable of forming a reinforcing portion of the wall portion 52A).
  • FIG. 5 shows the bellows 5 in which all the portions in the reinforced portion formable region of the first angled wall portion 52A are reinforced portions 52C
  • FIG. 6 shows a part of the reinforced portion formable region of the first angled wall portion 52A.
  • the bellows 5 is shown as the reinforcing portion 52C.
  • the thickness T1 of the reinforcing portion 52C is larger than the thickness T2 of the second angled wall portion 52B at all positions that are symmetric with respect to the boundary line L2.
  • the outer peripheral surface in the cross section of the first chevron wall portion 52A 52b protrudes outward from the symmetrical outer peripheral surface 52c of the second chevron wall portion 52B in all portions of the reinforcing portion 52C.
  • the shape of the outer peripheral surface 52b in the cross section of the first chevron wall portion 52A is smooth on the outer peripheral surface of the second chevron wall portion 52B and the outer peripheral surface of the first straight wall 51A. It has a continuous arc shape. Further, the shape of the inner peripheral surface 53b in the cross section of the valley wall 53 is a linear shape parallel to the axis as shown in FIG.
  • the wall thicknesses T3 and T4 of the first and second linear walls 51A and 51B are uniform, but in this example, the wall thickness T3 of the first linear wall 51A is set as shown in FIGS. As shown in FIGS. 3, 4, and 6, the thickness T4 of the second straight wall 51B is set to be greater than the thickness T4, and the thickness T1 of all the reinforcing portions 52C is the thickness of the second straight wall 51B. It is larger than T4.
  • the wall thickness of a straight wall in a general bellows pump such as a conventional bellows pump is the minimum dimension (hereinafter referred to as “general”) within a range that does not deform (expand outward) due to liquid pressure in the bellows.
  • the wall thickness T4 of the second straight wall 51B is set to be the same or substantially the same as the general wall thickness t.
  • the present inventor conducted various experiments and studies to investigate the cause of cracks and breakage in the peripheral wall 5a of the bellows 5, (1) Cavitation occurs in the peripheral wall 5a during the discharging process, that is, during the contraction operation of the bellows 5.
  • the first angled wall part 52A which is the peripheral wall part on the extending direction side of the bellows 5 and the first straight line connected thereto.
  • a pressing force or impact force acts on the shaped wall 51A by the cavitation, and stress concentrates locally on the first angled wall portion 52A.
  • the wall portion 52A lacks the strength against the stress concentration, and a crack occurs in the stress concentration portion of the first angled wall portion 52A, and the bellows breaks from the crack portion;
  • the stress concentration location, that is, the crack or breakage location in the first angled wall portion 52A is the material of the bellows 5, the properties of the liquid F to be fed (whether foaming is present, temperature, pressure, etc.) and the expansion and contraction of the bellows 5.
  • the stress concentration location (crack or breakage occurrence location in the first angled wall portion 52A in advance) ) To a certain degree of accuracy, There was found.
  • a stress concentration location is assumed in advance by the experiment of (5) above, and the assumed stress concentration location (hereinafter referred to as “assumed stress concentration location”) 52d.
  • the thickness T0 is set to be the maximum of the thickness T1 of the reinforcing portion 52C.
  • the thickness T1 of the reinforcing portion 52C of the first chevron wall portion 52A is set to the thickness T2 of the second chevron wall portion 52A (and the thickness of the second straight wall 52B).
  • the thickness of the reinforcing portion 52C is increased to be greater than the thickness T4), and the thickness T1 of the reinforcing portion 52C is set to the maximum thickness T0 at the assumed stress concentration location 52d.
  • the reinforcing portion 52C is a portion other than the assumed stress concentration portion 52d.
  • the thickness T1 does not change (decrease) to be greater than the thickness (maximum thickness) T0 of the location 52d, and the strength is not extremely inferior to that of the assumed stress concentration location 52d. Therefore, even when the actual stress concentration location is slightly deviated from the assumed stress concentration location 52d, the occurrence of cracks and breakage at the stress concentration location is effectively prevented.
  • the first linear wall 51A may be deformed more than necessary, and may be fatigued or damaged during long-term use. Even in such a case, the thickness T3 of the first straight wall 51A is made larger than the thickness T4 of the second straight wall 51B as shown in FIG. 5 or FIG. By increasing the height, the deformation, fatigue, and breakage of the first straight wall 51A can be reliably prevented, and the durability of the bellows 5 can be further improved.
  • the present invention can be similarly applied to a single-acting bellows pump that exhibits a pump function by one bellows in addition to the double-acting bellows pump described above.
  • the shape of the bellows 5 is not limited to the above embodiment, and can be configured as shown in FIGS. 7 to 15, for example.
  • the mountain wall 52 and the straight walls 51A and 51B have the same shape as the bellows 5 shown in FIGS. 1 to 4, but the shape of the inner peripheral surface 53b in the cross section of the valley wall 53 is shown. Is an arc shape smoothly connected to the straight walls 51A and 51B.
  • the bellows 5 shown in FIG. 8 has the cross-sectional shape of the first chevron wall portion 52A as a substantially square shape, and all the portions of the first chevron wall portion 52A in the reinforcing portion formable region are formed in the same manner as the bellows 5 shown in FIG. It is formed in the reinforcing portion 52C, and a straight portion passing through the corner portion of the first angled wall 52A from the center of curvature C is assumed as the assumed stress concentration portion 52d and has a maximum thickness T0.
  • the bellows 5 shown in FIG. 9 is the bellows 5 shown in FIG. 8 in which the corners of the first angled wall 52A have an arc shape.
  • the wall thickness T4 of the second linear wall 51B is the same as or substantially the same as the general wall thickness t, as in the bellows 5 shown in FIG. 5 or FIG.
  • the wall thickness T3 of the first straight wall 51A is larger than the wall thickness T4 of the second straight wall 51B, and the wall thickness T1 of all the portions in the reinforcing portion 52C is the same as the wall thickness T1 of the second angle wall portion 52B. It is larger than the thickness T2 of the portion and the thickness T4 of the second straight wall portion 51B.
  • the thickness T3 of the first linear wall 51A is the same as or substantially the same as the thickness T4 of the second linear wall 51B.
  • the bellows 5 shown in FIGS. 11 and 12 has a cross-sectional shape of the first chevron wall portion 52A substantially the same as that of the bellows 5 shown in FIG. 9, and all the portions of the first chevron wall portion 52A in which the reinforcing portion can be formed. Is the reinforcing portion 52C.
  • the thickness T1 of all the portions in the reinforcing portion 52c is made larger than the thickness T2 of all the portions in the second chevron wall portion 52A and the thicknesses T3 and T4 of the straight walls 51A and 51B. is there. Further, the bellows 5 shown in FIG.
  • the bellows 5 shown in FIG. 14 has an outer peripheral surface 52b in the cross section of the first chevron wall portion 52A having an arc shape, and a part of the reinforcing portion formable region of the first chevron wall portion 52A is used as a reinforcement portion 52C. is there.
  • FIGS. 8 to 10 and FIGS. 12 to 14 as in FIGS. 5 and 6, the symmetrical shape with respect to the boundary line L2 of the second chevron wall portion 52B is superimposed on the first chevron wall portion 52A.
  • the symmetrical outer peripheral surface 52c is indicated by a chain line.
  • the wall thickness T4 of the second straight wall 51B is the same or substantially the same as the general wall thickness t.
  • T3 + T4 see FIG. 3
  • the thickness T4 of the second straight wall 51B that does not occur can be made smaller than the general thickness t.
  • the number of the first straight walls 51A and the second straight walls 51B in the bellows 5 and the connection form of the straight walls 51A and 51B with the bottom wall 5b and the flange wall 5c are also arbitrary.
  • FIG. ) To (C) That is, in the bellows 5 shown in FIG. 16A, the peripheral wall 5a is formed by alternately arranging a plurality of first straight walls 51A and a second straight wall 51B, which is one less than the first straight walls 51A, in the axial direction.
  • the bottom wall 5b is connected to the inner peripheral end of the first linear wall 51A located at one end of the group of shaped walls 51A and 51B, and the first linear wall 51A located at the other end of the group of the linear walls 51A and 51B.
  • the flange wall 5c is connected to the outer peripheral end of the.
  • the peripheral wall 5a is formed by alternately arranging a plurality of first straight walls 51A and one second straight wall 51B, which is one more, in the axial direction.
  • the bottom wall 5b is connected to the outer peripheral end of the second linear wall 51B positioned at one end of the group of shaped walls 51A and 51B, and the second linear wall 51B positioned at the other end of the group of the linear walls 51A and 51B.
  • a flange wall 5c is connected to the inner peripheral end.
  • the peripheral wall 5a is formed by alternately arranging a plurality of first straight walls 51A and the same number of second straight walls 51B in the axial direction.
  • the bottom wall 5b is connected to the outer peripheral end of the second linear wall 51B positioned at one end of the group 51B, and the outer peripheral end of the first linear wall 51A positioned at the other end of the linear wall 51A, 51B group.
  • the flange wall 5c is connected to the above.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

L'invention concerne une pompe à soufflet pourvue d'un soufflet (5) pouvant être étendu et contracté au plan axial. La paroi périphérique (5a) du soufflet (5) est formée en reliant alternativement une pluralité de parois rectilignes disposées côte à côte (51A, 51B) par des parois en forme de montagne (52) et des parois en forme de creux (53). Une partie (première partie de paroi en forme de montagne (51A)) d'une paroi en forme de montagne (52), la partie étant située sur le côté faisant face à la direction dans laquelle s'étend le soufflet (5), a une partie de renfort (52C) ayant une épaisseur de paroi (T1) supérieure à l'épaisseur de paroi (T2) d'une partie (seconde partie de paroi en forme de montagne (52B)) de la paroi en forme de montagne (52), la partie étant située sur le côté faisant face à la direction dans laquelle le soufflet (5) se contracte. La partie de renfort (52C) est la totalité de la partie à l'exclusion de la limite entre la première partie de paroi en forme de montagne (52A) et la seconde partie en forme de montagne (52B) et à l'exclusion également de la limite entre la première partie de paroi en forme de montagne (52A) et la paroi rectiligne (51A).
PCT/JP2017/043411 2017-01-20 2017-12-04 Pompe à soufflet WO2018135156A1 (fr)

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Application Number Priority Date Filing Date Title
JP2018539172A JP6896747B2 (ja) 2017-01-20 2017-12-04 ベローズポンプ

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JP2017-008654 2017-01-20
JP2017008654 2017-01-20

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Publication Number Publication Date
WO2018135156A1 true WO2018135156A1 (fr) 2018-07-26

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PCT/JP2017/043411 WO2018135156A1 (fr) 2017-01-20 2017-12-04 Pompe à soufflet

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001020868A (ja) * 1999-07-05 2001-01-23 Iwaki Co Ltd ベローズポンプ
JP2003239865A (ja) * 2002-12-20 2003-08-27 Nippon Pillar Packing Co Ltd 流体機器
US8950634B2 (en) * 2010-12-21 2015-02-10 Meadwestvaco Calmar, Inc. Bellows pump system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001020868A (ja) * 1999-07-05 2001-01-23 Iwaki Co Ltd ベローズポンプ
JP2003239865A (ja) * 2002-12-20 2003-08-27 Nippon Pillar Packing Co Ltd 流体機器
US8950634B2 (en) * 2010-12-21 2015-02-10 Meadwestvaco Calmar, Inc. Bellows pump system

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JP6896747B2 (ja) 2021-06-30
JPWO2018135156A1 (ja) 2019-11-07

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