WO2018135130A1 - Dryness measurement device and method for measuring dryness - Google Patents

Dryness measurement device and method for measuring dryness Download PDF

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Publication number
WO2018135130A1
WO2018135130A1 PCT/JP2017/042054 JP2017042054W WO2018135130A1 WO 2018135130 A1 WO2018135130 A1 WO 2018135130A1 JP 2017042054 W JP2017042054 W JP 2017042054W WO 2018135130 A1 WO2018135130 A1 WO 2018135130A1
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WIPO (PCT)
Prior art keywords
light
absorbance
inspection
wet steam
dryness
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PCT/JP2017/042054
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French (fr)
Japanese (ja)
Inventor
泰明 松儀
康博 五所尾
志功 田邉
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アズビル株式会社
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Publication of WO2018135130A1 publication Critical patent/WO2018135130A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3554Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for determining moisture content
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/56Investigating or analyzing materials by the use of thermal means by investigating moisture content
    • G01N25/58Investigating or analyzing materials by the use of thermal means by investigating moisture content by measuring changes of properties of the material due to heat, cold or expansion
    • G01N25/60Investigating or analyzing materials by the use of thermal means by investigating moisture content by measuring changes of properties of the material due to heat, cold or expansion for determining the wetness of steam

Definitions

  • the present invention relates to a measurement technique, and relates to a dryness measuring apparatus and a dryness measuring method.
  • dryness is also defined as the ratio of the difference between the specific enthalpy of wet steam and the specific enthalpy of saturated liquid to the specific enthalpy of latent heat.
  • the dryness is 0.5.
  • the dryness is 1.0.
  • the wet steam dryness is controlled. It is desired to be in a state close to 1.0. Therefore, various methods for measuring the dryness have been proposed.
  • Patent Document 1 uses a saturated steam table based on the wet steam flow rate and pressure before and after the pressure control valve, using the fact that there is no change in the total enthalpy before and after the pressure control valve provided in the pipe.
  • a technique for calculating dryness by obtaining saturated water enthalpy and saturated steam enthalpy is disclosed.
  • Patent Document 1 needs to change the wet vapor of the measurement object from the two-phase state to the gas phase state and further stabilize the measurement object in the gas phase state, measurement of dryness There is a problem that it takes time.
  • Patent Document 2 discloses a technique for optically measuring the dryness.
  • Patent Document 3 discloses a technique for measuring dryness using two lights having different wavelengths.
  • JP-A-8-312908 Japanese Unexamined Patent Publication No. 2016-57203 Japanese Unexamined Patent Publication No. 2016-85059
  • an object of the present invention is to provide a dryness measuring apparatus and a dryness measuring method capable of accurately measuring the dryness.
  • the inspection light emitting unit that emits inspection light having at least a wavelength that is absorbed by the saturated liquid, and the first and second reference lights that are less likely to be absorbed by the saturated liquid than the inspection light are emitted.
  • a reference light emitting unit an inspection tube for flowing wet steam therein, an inspection tube through which the inspection light and the first and second reference light pass, an inspection light that has passed through the inside of the inspection tube, and the first and second Based on the light receiving unit that receives the reference light, the inspection light received by the light receiving unit, and the first and second reference light, the absorbance of the wet steam by each of the inspection light and the first and second reference light is calculated.
  • a dryness specifying section for specifying the dryness of the Measuring device is provided.
  • the inspection tube may include a window through which the inspection light and the first and second reference lights pass.
  • the correction value of the absorbance of the wet steam by the inspection light is determined so that the inspection light and the second reference light have a wavelength difference between the first reference light and the second reference light from the absorbance of the wet steam by the inspection light.
  • a value obtained by multiplying the first coefficient which is the ratio of the wavelength difference of the reference light by the absorbance of the wet steam by the first reference light, and a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1 It may correspond to a value obtained by subtracting the value obtained by multiplying the absorbance of the wet steam by the reference light of 2.
  • the equivalent includes the same thing.
  • the calculation order is not limited.
  • the dryness measuring apparatus may further include a data storage device that stores a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1.
  • the correction value of the absorbance of the wet steam by the inspection light includes saturated water flowing through the inside of the inspection tube by the first reference light and the second reference light from the absorbance of the wet steam by the inspection light.
  • the first coefficient which is the ratio of the difference in absorbance of the gas that does not contain saturated water flowing through the inside of the test tube due to the test light and the second reference light, to the difference in absorbance of the gas that is not present, is the wet steam by the first reference light. Even if it corresponds to a value obtained by subtracting the value obtained by multiplying the absorbance by the second coefficient corresponding to the value obtained by subtracting the first coefficient from 1 and the value obtained by multiplying the absorbance of the wet vapor by the second reference light. Good.
  • the equivalent includes the same thing.
  • the calculation order is not limited.
  • the dryness measuring device described above is configured so that the inside of the inspection tube by the inspection light and the second reference light with respect to the difference in absorbance of the gas not containing saturated water flowing through the inside of the inspection tube by the first reference light and the second reference light You may further provide the data storage device which preserve
  • the dryness measuring apparatus may further include a data storage device that stores a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1.
  • the inspection light having at least a wavelength that is absorbed by the saturated liquid is emitted to the wet steam, and the first and second reference lights that are less likely to be absorbed by the saturated liquid than the inspection light.
  • a method of measuring dryness is provided, including identifying the dryness of the wet steam based on a correction value of the absorbance of the wet steam by light.
  • wet steam may flow inside the inspection tube, and the inspection tube may include a window through which the inspection light and the first and second reference lights pass.
  • the correction value of the absorbance of the wet vapor by the inspection light is determined so that the inspection light and the first reference light with respect to the wavelength difference between the first reference light and the second reference light are determined from the absorbance of the wet vapor by the inspection light.
  • a value obtained by multiplying the first coefficient which is the ratio of the wavelength difference of the two reference lights by the absorbance of the wet steam by the first reference light, and a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1 It may correspond to a value obtained by subtracting the value obtained by multiplying the absorbance of the wet steam by the second reference light.
  • the equivalent includes the same thing.
  • the calculation order is not limited.
  • the correction value of the wet steam absorbance due to the inspection light is the saturated water flowing in the test tube due to the first reference light and the second reference light based on the wet steam absorbance due to the inspection light.
  • the first coefficient which is the ratio of the difference in absorbance of the gas not containing saturated water flowing through the inside of the test tube by the test light and the second reference light to the difference in absorbance of the gas not containing the wet steam by the first reference light
  • the equivalent includes the same thing.
  • the calculation order is not limited.
  • the dryness measuring apparatus absorbs the inspection light emitting unit 11 that emits inspection light having at least a wavelength absorbed by the saturated liquid, and the saturated liquid as compared with the inspection light.
  • a reference light emitting unit 113 that emits first and second reference light that is difficult to be generated, and a test tube 21 that allows wet steam to flow therein, and a test tube 21 through which the test light and the first and second reference light pass.
  • a light receiving unit 12 that receives the inspection light passing through the inside of the inspection tube 21 and the first and second reference lights.
  • the dryness measuring device further calculates the absorbance of the wet vapor by each of the inspection light and the first and second reference lights based on the inspection light and the first and second reference lights received by the light receiving unit 12. Based on the absorbance calculation unit 301, the correction unit 302 that corrects the absorbance of the wet vapor by the first and second reference lights with the absorbance of the wet vapor by the inspection light, and the correction value of the absorbance of the wet vapor by the inspection light A dryness specifying unit 303 for specifying the dryness of the steam.
  • the absorbance calculation unit 301, the correction unit 302, and the dryness specification unit 303 are included in, for example, a central processing unit (CPU) 300.
  • the test tube 21 can pass wet steam in which saturated steam and saturated liquid are combined.
  • saturated steam under standard atmospheric pressure, water reaches a boiling point (100 ° C.), and then water as droplets and steam are mixed to form wet steam in a coexisting state.
  • the pressure is constant, since the latent heat of wet steam changes due to heating and cooling, the saturation temperature is constant.
  • dryness the mass ratio of saturated steam to the total amount of wet steam. Therefore, the dryness of the saturated steam is 1, and the dryness of the saturated liquid is 0.
  • z m vapor / (m vapor + m water ) (1) z represents the degree of dryness, m vapor represents the mass of saturated vapor, and m water represents the mass of saturated liquid.
  • the mass of the saturated vapor is proportional to the absorbance of the saturated vapor.
  • the mass of the saturated liquid is proportional to the absorbance of the saturated liquid. Therefore, the following equation (2) is derived from the above equation (1).
  • a vapor represents the absorbance of the saturated vapor
  • a water represents the absorbance of the saturated liquid
  • k represents the molar extinction coefficient ratio given by the following equation (3).
  • k e vapor / e water (3)
  • e vapor represents the extinction coefficient of saturated vapor
  • e water represents the extinction coefficient of saturated liquid.
  • the absorption spectra of the saturated vapor and the saturated liquid are different.
  • the absorption spectrum of the saturated liquid changes. For example, as the dryness changes from 0 to 1, the content of the saturated liquid in the wet steam decreases, so the absorbance As of the wet steam at the peak wavelength of the absorption spectrum of the saturated liquid also decreases as shown in FIG. To do.
  • the wavelength at the peak of the absorption spectrum of the saturated liquid is around 1880 nm.
  • the absorbance of saturated steam can be regarded as constant if the pressure is constant.
  • the dryness of the wet steam is also given by the following equation (6) derived from the above equations (2), (4), and (5).
  • z 1 / (1-k + (k / a vapor ) ⁇ A S ) (6)
  • the molar extinction coefficient ratio k is a constant.
  • the absorbance a Vapor saturated steam can be considered a constant under constant pressure
  • the absorbance a Vapor saturated steam can be derived from the pressure of the wet steam. Therefore, by measuring the absorbance A S of wet steam, it is possible to calculate the dryness fraction z of wet steam from (6).
  • the inspection light emitting unit 11 shown in FIG. 1 emits inspection light including a wavelength band that is absorbed by the saturated liquid.
  • the inspection light is, for example, near infrared light having a wavelength region of 800 nm to 2500 nm.
  • the wavelength band of the inspection light and the wavelength bands of the first and second reference lights may partially overlap.
  • the inspection light may have the peak wavelength of the absorption spectrum of the saturated liquid as the center wavelength. In the wavelength region, the absorption spectra of the saturated vapor and the saturated liquid overlap.
  • a light emitting diode or the like can be used for the inspection light emitting unit 11 shown in FIG.
  • the first and second reference lights emitted from the reference light emitting unit 113 have different wavelengths.
  • the wavelength of the second reference light is longer than the wavelength of the first reference light.
  • the wavelength of the inspection light may be between the first and second reference lights.
  • the wavelengths of the first and second reference lights may be longer than the wavelength of the inspection light.
  • the wavelengths of the first and second reference lights may be shorter than the wavelength of the inspection light.
  • each of the first and second reference lights has a wavelength that is difficult to be absorbed by wet steam in the entire range of dryness.
  • the wavelength band that is difficult to be absorbed by the wet steam is, for example, less than 1300 nm and near 1600 nm to 1800 nm.
  • the reference light emitting unit 113 illustrated in FIG. 1 may include a first reference light emitting unit 111 that emits first reference light and a second reference light emitting unit 112 that emits second reference light. Good.
  • a light emitting diode or the like can be used for the first reference light emitting unit 111 and the second reference light emitting unit 112, a light emitting diode or the like can be used.
  • the inspection optical waveguide 30 for propagating the inspection light is arranged facing the inspection light emitting unit 11.
  • a first reference optical waveguide 130 that propagates the first reference light is disposed facing the first reference light emitting unit 111.
  • a second reference optical waveguide 230 that propagates the second reference light is disposed facing the second reference light emitting unit 112.
  • the multiplexer 14 is connected to the inspection optical waveguide 30, the first reference optical waveguide 130, and the second reference optical waveguide 230.
  • a multiplexer optical waveguide 31 for propagating the inspection light combined with the multiplexer 14 and the first and second reference lights into the inspection tube 21 is connected to the multiplexer 14.
  • light-transmitting windows 121A and 121B are provided on the side wall of the test tube 21.
  • the window 121A provided in the inspection tube 21 and the window 121B are opposed to each other.
  • the windows 121A and 121B are made of heat resistant glass such as quartz glass or sapphire glass.
  • the heat resistant test tube 21 provided with the windows 121A and 121B is, for example, a sight glass.
  • the multiplexed optical waveguide 31 is connected to the outer surface of a window 121A provided in the test tube 21, for example.
  • a collimator lens may be disposed between the end of the multiplexed optical waveguide 31 and the outer surface of the window 121A.
  • the inspection light emitted from the end of the combined optical waveguide 31 is absorbed by the saturated liquid contained in the wet steam inside the inspection tube 21.
  • the saturated liquid contained in the wet steam decreases as the dryness approaches from 0 to 1. Therefore, as the dryness of the wet steam in the test tube 21 approaches 0 to 1, the absorbance of the wet steam with respect to the test light tends to decrease.
  • the inspection light emitted from the end portion of the combined optical waveguide 31 and a part of the first and second reference lights are reflected, scattered, and refracted by the laminar flow or wave flow of the saturated liquid inside the inspection tube 21. Can be equal. Therefore, the inspection light and the first and second reference lights can be attenuated by reflection, scattering, refraction, and the like.
  • the windows 121A and 121B may be deteriorated or dirty.
  • Examples of deterioration of the windows 121A and 121B include white discoloration, blue discoloration, and latent scratches.
  • contamination adhering to window 121A, 121B the rust which scattered inside the test tube 21 is mentioned. Deterioration and contamination of the windows 121A and 121B may worsen over time.
  • the inspection light emitted from the end portion of the multiplexed optical waveguide 31 and the first and second reference lights can be attenuated due to deterioration or contamination of the windows 121A and 121B.
  • the light attenuation due to deterioration and dirt of the windows 121A and 121B depends on the wavelength of light, and the light attenuation due to deterioration and dirt of the windows 121A and 121B and the light.
  • the wavelength of is generally in a linear relationship.
  • the wavelength of the second reference light is longer than the wavelength of the first reference light, for example, the attenuation of the first reference light due to deterioration or contamination of the windows 121A and 121B is the first attenuation due to deterioration or contamination of the windows 121A and 121B. 2 is greater than the attenuation of the reference light.
  • the light receiving waveguide 51 into which the inspection light passing through the inside of the inspection tube 21 and the first and second reference lights enter is connected to the outer surface of the window 121B of the inspection tube 21.
  • the end of the light receiving waveguide 51 is opposed to the end of the combined optical waveguide 31.
  • a lens that allows the inspection light and the first and second reference lights to enter the light receiving waveguide 51 may be disposed between the outer surface of the window 121B and the end of the light receiving waveguide 51.
  • the light receiving waveguide 51 guides the inspection light transmitted through the inside of the inspection tube 21 and the first and second reference lights to the light receiving unit 12.
  • a light intensity detection element such as a photodiode can be used for the light receiving unit 12.
  • the inspection optical waveguide 30, the first reference optical waveguide 130, the second reference optical waveguide 230, the combined optical waveguide 31, and the light receiving waveguide 51 include polymethyl methacrylate resin (PMMA: Poly (methymethacrylate)).
  • PMMA Poly (methymethacrylate)
  • a single core optical fiber made of plastic such as glass and a single core optical fiber made of glass such as quartz glass can be used. However, if the inspection light and the first and second reference lights can be propagated, these can be used. It is not limited to.
  • the dryness measuring apparatus may further include a pressure sensor 16 that measures the pressure of the wet steam in the test tube 21.
  • the pressure information may be obtained from upstream or downstream of the inspection tube 21.
  • the light receiving unit 12 and the pressure sensor 16 are connected to the CPU 300.
  • a data storage device 400 is connected to the CPU 300.
  • the data storage device 400 stores a relational expression between the absorbance of the wet steam and the dryness of the wet steam as in the above formula (6).
  • the absorbance calculation unit 301 included in the CPU 300 receives from the light receiving unit 12 the measurement values of the inspection light transmitted through the wet steam inside the inspection tube 21 and the light intensity of the first and second reference lights.
  • the absorbance calculation unit 301 specifies the absorbance A Lx of the wet vapor in the test tube 21 by the test light based on the light intensity of the test light received by the light receiving unit 12.
  • the light intensity of the inspection light before passing through the wet steam or when there is no wet steam in the inspection tube 21 may be a value measured in advance as a constant.
  • the absorbance calculation unit 301 specifies the absorbance A L1 of the wet steam in the test tube 21 by the first reference light based on the light intensity of the first reference light received by the light receiving unit 12. Further, the absorbance calculation unit 301 specifies the absorbance A L2 of the wet steam in the test tube 21 by the second reference light based on the light intensity of the second reference light received by the light receiving unit 12.
  • the measurement value of the wet steam absorbance A Lx by the inspection light is affected by the deterioration At tx of the inspection light due to the deterioration of the windows 121A and 121B and dirt. Therefore, the corrected absorbance AbLx of the wet vapor due to the inspection light, excluding the influence of the attenuation degree AtLx of the inspection light due to the deterioration or dirt of the windows 121A and 121B, is given by the following equation (7).
  • a bLx A Lx -A tLx (7)
  • the measured value of the wet steam absorbance A L1 by the first reference light is substantially the attenuation of the first reference light due to deterioration or contamination of the windows 121A and 121B, as shown in the following equation (8). It can be regarded as the degree A tL1 .
  • a L1 A tL1 (8)
  • the second reference light also has a wavelength that is difficult to be absorbed by water. Therefore, the measured value of the wet steam absorbance A L2 by the second reference light is substantially the attenuation of the second reference light due to deterioration or contamination of the windows 121A and 121B, as shown in the following equation (9). It can be regarded as the degree AtL2 .
  • a L2 A tL2 (9)
  • the inspection light attenuation At Lx due to the deterioration and dirt of the windows 121A and 121B Is expressed using a predetermined coefficient m k and the first and second reference light attenuations A tL1 and A tL2 due to deterioration and contamination of the windows 121A and 121B, as shown in the following equation (10). be able to.
  • a tLx m k A tL1 + (1-m k ) A tL2 (10) From the above equations (7) to (10), the corrected absorbance AbLx of the wet steam by the inspection light is given by the following equation (11).
  • a bLx A Lx - [m k A L1 + (1-m k) A L2] (11)
  • the correction unit 302 illustrated in FIG. 1 calculates the corrected absorbance AbLx of the wet steam by the inspection light using, for example, the above equation (11).
  • the corrected absorbance A bLx of the wet vapor by the inspection light is an inspection with respect to the wavelength difference (L1 ⁇ L2) between the first reference light and the second reference light from the measured value A Lx of the wet vapor absorbance by the inspection light.
  • a value m k A L1 obtained by multiplying the measurement value A L1 of the absorbance of the wet vapor by the first reference light by the first coefficient m k which is the ratio of the wavelength difference (Lx ⁇ L2) between the light and the second reference light.
  • a value obtained by multiplying the measured value A L2 of the wet steam absorbance by the second reference light by a second coefficient (1-m k ) corresponding to a value obtained by subtracting the first coefficient m k from 1 (1-m k ) corresponds to a value obtained by subtracting A L2 .
  • the coefficient m k may be a constant calculated in advance. At least one of the first coefficient m k and the second coefficient (1 ⁇ m k ) may be stored in the data storage device 400.
  • the dryness specifying unit 303 receives the corrected absorbance AbLx of wet steam from the correcting unit 302. Further, the dryness specifying unit 303 receives the measured value of the pressure of the wet steam in the test tube 21 from the pressure sensor 16.
  • the dryness specifying unit 303 calculates the absorbance a vapor of saturated vapor depending on the pressure. Furthermore, the dryness of the identifying unit 303, for example, the (6) assigns the value of absorbance A BLX of the corrected wet steam in the expression of the variable A s, the value of absorbance a Vapor saturated steam calculated in the variable a Vapor By substituting, the dryness z of the wet steam in the inspection tube 21 is calculated.
  • the pressure is constant, the absorbance a vapor of the saturated vapor can be regarded as constant. Therefore, if the pressure in the test tube 21 is constant, a constant may be used for the absorbance a vapor of the saturated vapor. In this case, the dryness measuring apparatus according to the first embodiment may not include the pressure sensor 16.
  • an input device 321, an output device 322, a program storage device 323, and a temporary storage device 324 are connected to the CPU 300.
  • a switch, a keyboard, and the like can be used.
  • the relational expression stored in the data storage device 400 is input using the input device 321, for example.
  • an optical indicator, a digital indicator, a liquid crystal display device, or the like can be used.
  • the output device 322 outputs, for example, the dryness value of the wet steam inside the test tube 21 specified by the dryness specifying unit 303.
  • the program storage device 323 stores a program for causing the CPU 300 to execute data transmission / reception between devices connected to the CPU 300.
  • the temporary storage device 324 temporarily stores data in the calculation process of the CPU 300.
  • the dryness measuring apparatus it is possible to accurately measure the dryness of the wet steam even if the light is attenuated by factors other than the light absorption by the wet steam.
  • the measured value of the gas absorbance A Lx-0 by the inspection light is substantially as shown in the following equation (13). It can be regarded as the attenuation degree AtLx of the inspection light due to deterioration or dirt of the windows 121A and 121B.
  • the gas which does not contain saturated water is air
  • a Lx-0 A tLx (13)
  • the measured value of the gas absorbance A L1-0 by the first reference light is substantially the deterioration or dirt of the windows 121A and 121B. Can be regarded as the attenuation degree A tL1 of the first reference light.
  • the measured value of the gas absorbance A L2-0 by the second reference light can be substantially regarded as the second reference light attenuation At L2 due to deterioration or contamination of the windows 121A and 121B. It is.
  • the relationship between the measured values A Lx-0 , A L1-0 , A L2-0 of the absorbance and the wavelengths Lx, L1, L2 is as shown in FIG.
  • the coefficient m k given by is also given by the following equation (14).
  • m k (A LX-0 -A L2-0 ) / (A L1-0 -A L2-0 ) (14) Therefore, the correction unit 302 shown in FIG. 1 uses measured values A Lx-0 , A L1-0 , A L2-0 obtained in advance by flowing a gas not containing saturated water into the test tube 21.
  • the corrected absorbance AbLx of the wet steam by the inspection light may be calculated by the above equation (11) using the coefficient m k calculated in the above. At least one of the first coefficient m k and the second coefficient (1 ⁇ m k ) may be stored in the data storage device 400.
  • the corrected absorbance AbLx of the wet steam by the inspection light is obtained by calculating the saturated water by the first reference light and the second reference light from the measured value A Lx of the wet steam absorbance by the inspection light.
  • a L1 obtained by multiplying the measured value A L1 of the wet steam absorbance by the first reference light by the first coefficient m k , which is the ratio of 1, and a value obtained by subtracting the first coefficient m k from 1
  • This value is equivalent to a value obtained by subtracting (1 ⁇ m k ) A L2 obtained by multiplying the second coefficient (1 ⁇ m k ) by the measured value A L2 of the wet steam absorbance by the second reference light.
  • the wavelengths of the inspection light and the first and second reference lights are not single and may have a predetermined bandwidth.
  • it is based on the absorbance of the gas not containing saturated water.
  • Example 1 In the case where there are no white burns in the windows 121A and 121B of the inspection tube 21 shown in FIG. 1, the air was passed through the inspection tube 21, and the received light intensity of the inspection light and the first and second reference light was measured. Next, in each of a state in which wet steam is passed through the inspection tube 21 to strongly cool the inspection tube 21, a state in which the inspection tube 21 is lightly cooled, a state in which the inspection tube 21 is at room temperature, and a state in which the inspection tube 21 is heated. The received light intensity of the inspection light and the first and second reference lights was measured.
  • the atmosphere was passed through the inspection tube 21, and the received light intensity of the inspection light and the first and second reference light was measured.
  • a state in which wet steam is passed through the inspection tube 21 to strongly cool the inspection tube 21 a state in which the inspection tube 21 is lightly cooled, a state in which the inspection tube 21 is at room temperature, and a state in which the inspection tube 21 is heated.
  • the received light intensity of the inspection light and the first and second reference lights was measured.
  • FIG. 8 is a graph plotting the received light intensity of the inspection light and the first and second reference lights.
  • Example 2 Using the dryness measuring apparatus including the correction unit described in the second embodiment, the dryness is measured when there are no white burns and when there are white burns in the windows 121A and 121B of the test tube 21 shown in FIG. did. As a result, as shown in FIG. 9, even when the windows 121A and 121B had white discoloration, the dryness was almost the same as when there was no white discoloration.
  • a value obtained by subtracting the absorbance of the wet vapor due to the first reference light from the absorbance of the wet vapor due to the inspection light is used as a correction value for the absorbance of the wet vapor due to the inspection light.
  • the dryness which concerns on a comparative example was measured. As a result, as shown in FIG. 9, it was confirmed that when the window 121 ⁇ / b> A, 121 ⁇ / b> B has white discoloration, an error occurs when the dryness increases.
  • the reflecting plate 131 is disposed on the side wall inside the test tube 21 facing the end of the combined optical waveguide 31 and the end of the light receiving waveguide 51.
  • the inspection light and the first and second reference light emitted from the end of the combined optical waveguide 31 travel through the inspection tube 21, are reflected by the reflection plate 131, and enter the light receiving waveguide 51.
  • angles of the inspection light and the first and second reference light emitted from the end portion of the combined optical waveguide 31 are determined by the light transmitting window 121 provided in the inspection tube 21 and the first and first light beams. 2 below the critical angle at which the reference light is totally reflected, and below the critical angle at which the inspection light and the first and second reference light are totally reflected at the surface of the laminar flow or the wavy flow of the saturated liquid inside the inspection tube 21
  • the critical angle at which the reference light is totally reflected below the critical angle at which the inspection light is totally reflected, and below the critical angle at which the inspection light and the first and second reference light are totally reflected at the surface of the laminar flow or the wavy flow of the saturated liquid inside the inspection tube 21
  • the dryness measuring device is a visualization of the latent heat increase effect by the pressure reducing valve, dryness measurement to obtain the optimum boiler efficiency, wet loss measurement of the steam turbine, optimal dryness control of the heat exchanger, It can be used for the control of food production processes such as a noodle-making process and the control of chemical processes.

Abstract

A dryness measurement device is provided with: an inspection light emission unit 11 for emitting inspection light having a wavelength that is absorbed by a saturated liquid; a reference light emission unit 113 for emitting first and second reference lights not readily absorbed by the saturated liquid in comparison with the inspection light; an inspection tube 21 for circulating wet steam through the inside thereof, the inspection light and the first and second reference lights passing through the inspection tube 21; a light-receiving unit 12 for receiving the inspection light and the first and second reference lights passed through the inspection tube 21; an absorbance calculation unit 301 for calculating the absorbance of the wet steam with respect to the inspection light and the first and second reference lights on the basis of the inspection light and the first and second reference lights received by the light-receiving unit 12; a correction unit 302 for correcting the absorbance of the wet steam with respect to the inspection light using the absorbance of the wet steam with respect to the first and second reference lights; and a dryness specifying unit 303 for specifying the dryness of the wet steam on the basis of the corrected value of the absorbance of the wet steam with respect to the inspection light.

Description

乾き度測定装置及び乾き度の測定方法Dryness measuring device and dryness measuring method
 本発明は測定技術に係り、乾き度測定装置及び乾き度の測定方法に関する。 The present invention relates to a measurement technique, and relates to a dryness measuring apparatus and a dryness measuring method.
 水は沸点に達した後、水蒸気ガス(気相部分)と、水滴(液相部分)と、が混合した湿り蒸気となる。ここで、湿り蒸気に対する水蒸気ガスの質量比を、「乾き度」という。あるいは、乾き度は、潜熱の比エンタルピに対する、湿り蒸気の比エンタルピと飽和液の比エンタルピとの差の比、としても定義される。 After the water reaches the boiling point, it becomes wet steam in which water vapor gas (gas phase portion) and water droplets (liquid phase portion) are mixed. Here, the mass ratio of the water vapor gas to the wet steam is referred to as “dryness”. Alternatively, dryness is also defined as the ratio of the difference between the specific enthalpy of wet steam and the specific enthalpy of saturated liquid to the specific enthalpy of latent heat.
 例えば、水蒸気ガスと、水滴と、が半分ずつ存在すれば、乾き度は0.5となる。また、水滴が存在せず、水蒸気ガスのみが存在する場合は、乾き度は1.0となる。熱交換器等において、湿り蒸気が保有する顕熱と、潜熱と、を有効に利用することや、水蒸気タービンにおいて、タービン翼の腐食を防止すること、等の観点から、湿り蒸気の乾き度を1.0に近い状態にすることが望まれている。そのため、乾き度を測定する様々な方法が提案されている。 For example, if water vapor gas and water droplets are present in half, the dryness is 0.5. Moreover, when there is no water droplet and only water vapor gas is present, the dryness is 1.0. From the viewpoints of effectively utilizing the sensible heat and latent heat possessed by wet steam in heat exchangers, etc., and preventing corrosion of turbine blades in steam turbines, the wet steam dryness is controlled. It is desired to be in a state close to 1.0. Therefore, various methods for measuring the dryness have been proposed.
 例えば、特許文献1は、配管に設けられた圧力調節弁の前後で全エンタルピに変化がないことを利用して、圧力調節弁の前後の湿り蒸気流量及び圧力に基づき、飽和蒸気表を用いて飽和水エンタルピと、飽和蒸気エンタルピと、を求めて、乾き度を算出する技術を開示している。しかし、特許文献1に開示された技術は、測定対象の湿り蒸気を二相状態から気相状態に状態変化させ、さらに測定対象を気相状態で安定化させる必要があるため、乾き度の測定に時間がかかるという問題がある。これに対し、特許文献2は、光学的に乾き度を測定する技術を開示している。また、特許文献3は、波長が異なる2つの光を用いて、乾き度を測定する技術を開示している。 For example, Patent Document 1 uses a saturated steam table based on the wet steam flow rate and pressure before and after the pressure control valve, using the fact that there is no change in the total enthalpy before and after the pressure control valve provided in the pipe. A technique for calculating dryness by obtaining saturated water enthalpy and saturated steam enthalpy is disclosed. However, since the technique disclosed in Patent Document 1 needs to change the wet vapor of the measurement object from the two-phase state to the gas phase state and further stabilize the measurement object in the gas phase state, measurement of dryness There is a problem that it takes time. On the other hand, Patent Document 2 discloses a technique for optically measuring the dryness. Patent Document 3 discloses a technique for measuring dryness using two lights having different wavelengths.
特開平8-312908号公報JP-A-8-312908 特開2016-57203号公報Japanese Unexamined Patent Publication No. 2016-57203 特開2016-85059号公報Japanese Unexamined Patent Publication No. 2016-85059
 従来の乾き度測定装置のさらなる改良が望まれている。そこで、本発明は、乾き度を正確に測定可能な乾き度測定装置及び乾き度の測定方法を提供することを目的の一つとする。 Further improvement of the conventional dryness measuring device is desired. Accordingly, an object of the present invention is to provide a dryness measuring apparatus and a dryness measuring method capable of accurately measuring the dryness.
 本発明の態様によれば、飽和液で吸収される波長を少なくとも有する検査光を発する検査光発光部と、検査光と比較して飽和液で吸収されにくい第1及び第2の参照光を発する参照光発光部と、内部に湿り蒸気を流す検査管であって、検査光、第1及び第2の参照光が通過する検査管と、検査管内部を通過した検査光、第1及び第2の参照光を受光する受光部と、受光部で受光された検査光、第1及び第2の参照光に基づき、検査光、第1及び第2の参照光のそれぞれによる湿り蒸気の吸光度を算出する吸光度算出部と、検査光による湿り蒸気の吸光度を、第1及び第2の参照光による湿り蒸気の吸光度で補正する補正部と、検査光による湿り蒸気の吸光度の補正値に基づき、湿り蒸気の乾き度を特定する乾き度特定部と、を備える、乾き度測定装置が提供される。 According to the aspect of the present invention, the inspection light emitting unit that emits inspection light having at least a wavelength that is absorbed by the saturated liquid, and the first and second reference lights that are less likely to be absorbed by the saturated liquid than the inspection light are emitted. A reference light emitting unit, an inspection tube for flowing wet steam therein, an inspection tube through which the inspection light and the first and second reference light pass, an inspection light that has passed through the inside of the inspection tube, and the first and second Based on the light receiving unit that receives the reference light, the inspection light received by the light receiving unit, and the first and second reference light, the absorbance of the wet steam by each of the inspection light and the first and second reference light is calculated. Based on a correction value for correcting the absorbance of the wet steam by the first and second reference lights, and a correction value for the absorbance of the wet steam by the test light. A dryness specifying section for specifying the dryness of the Measuring device is provided.
 上記の乾き度測定装置において、検査管が、検査光、第1及び第2の参照光が通過する窓を備えていてもよい。 In the dryness measuring apparatus, the inspection tube may include a window through which the inspection light and the first and second reference lights pass.
 上記の乾き度測定装置において、検査光による湿り蒸気の吸光度の補正値が、検査光による湿り蒸気の吸光度から、第1の参照光及び第2の参照光の波長差に対する、検査光及び第2の参照光の波長差の比である第1の係数を第1の参照光による湿り蒸気の吸光度に乗じた値と、1から第1の係数を引いた値に相当する第2の係数を第2の参照光による湿り蒸気の吸光度に乗じた値と、を引いた値に相当してもよい。ここで、相当するとは、同じであることを含む。また、算出順序等は限定されない。 In the dryness measuring apparatus, the correction value of the absorbance of the wet steam by the inspection light is determined so that the inspection light and the second reference light have a wavelength difference between the first reference light and the second reference light from the absorbance of the wet steam by the inspection light. A value obtained by multiplying the first coefficient which is the ratio of the wavelength difference of the reference light by the absorbance of the wet steam by the first reference light, and a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1 It may correspond to a value obtained by subtracting the value obtained by multiplying the absorbance of the wet steam by the reference light of 2. Here, the equivalent includes the same thing. The calculation order is not limited.
 上記の乾き度測定装置が、第1の参照光及び第2の参照光の波長差に対する、検査光及び第2の参照光の波長差の比である第1の係数を保存するデータ記憶装置をさらに備えていてもよい。 A data storage device in which the dryness measuring device stores a first coefficient that is a ratio of a wavelength difference between the inspection light and the second reference light to a wavelength difference between the first reference light and the second reference light. Furthermore, you may provide.
 上記の乾き度測定装置が、1から第1の係数を引いた値に相当する第2の係数を保存するデータ記憶装置をさらに備えていてもよい。 The dryness measuring apparatus may further include a data storage device that stores a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1.
 上記の乾き度測定装置において、検査光による湿り蒸気の吸光度の補正値が、検査光による湿り蒸気の吸光度から、第1の参照光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差に対する、検査光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差の比である第1の係数を第1の参照光による湿り蒸気の吸光度に乗じた値と、1から第1の係数を引いた値に相当する第2の係数を第2の参照光による湿り蒸気の吸光度に乗じた値と、を引いた値に相当してもよい。ここで、相当するとは、同じであることを含む。また、算出順序等は限定されない。 In the dryness measuring apparatus, the correction value of the absorbance of the wet steam by the inspection light includes saturated water flowing through the inside of the inspection tube by the first reference light and the second reference light from the absorbance of the wet steam by the inspection light. The first coefficient, which is the ratio of the difference in absorbance of the gas that does not contain saturated water flowing through the inside of the test tube due to the test light and the second reference light, to the difference in absorbance of the gas that is not present, is the wet steam by the first reference light. Even if it corresponds to a value obtained by subtracting the value obtained by multiplying the absorbance by the second coefficient corresponding to the value obtained by subtracting the first coefficient from 1 and the value obtained by multiplying the absorbance of the wet vapor by the second reference light. Good. Here, the equivalent includes the same thing. The calculation order is not limited.
 上記の乾き度測定装置が、第1の参照光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差に対する、検査光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差の比である第1の係数を保存するデータ記憶装置をさらに備えていてもよい。 The dryness measuring device described above is configured so that the inside of the inspection tube by the inspection light and the second reference light with respect to the difference in absorbance of the gas not containing saturated water flowing through the inside of the inspection tube by the first reference light and the second reference light You may further provide the data storage device which preserve | saves the 1st coefficient which is a ratio of the difference of the light absorbency of the gas which does not contain the flowing saturated water.
 上記の乾き度測定装置が、1から第1の係数を引いた値に相当する第2の係数を保存するデータ記憶装置をさらに備えていてもよい。 The dryness measuring apparatus may further include a data storage device that stores a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1.
 また、本発明の態様によれば、飽和液で吸収される波長を少なくとも有する検査光を湿り蒸気に発することと、検査光と比較して飽和液で吸収されにくい第1及び第2の参照光を湿り蒸気に発することと、湿り蒸気を通過した検査光、第1及び第2の参照光を受光することと、受光された検査光、第1及び第2の参照光に基づき、検査光、第1及び第2の参照光のそれぞれによる湿り蒸気の吸光度を算出することと、検査光による湿り蒸気の吸光度を、第1及び第2の参照光による湿り蒸気の吸光度で補正することと、検査光による湿り蒸気の吸光度の補正値に基づき、湿り蒸気の乾き度を特定することと、を含む、乾き度の測定方法が提供される。 Further, according to the aspect of the present invention, the inspection light having at least a wavelength that is absorbed by the saturated liquid is emitted to the wet steam, and the first and second reference lights that are less likely to be absorbed by the saturated liquid than the inspection light. , The inspection light passing through the wet steam, receiving the first and second reference lights, the received inspection light, the inspection light based on the first and second reference lights, Calculating the absorbance of the wet steam by each of the first and second reference lights, correcting the absorbance of the wet steam by the test light with the absorbance of the wet steam by the first and second reference lights, A method of measuring dryness is provided, including identifying the dryness of the wet steam based on a correction value of the absorbance of the wet steam by light.
 上記の乾き度の測定方法において、湿り蒸気が検査管の内部を流れ、検査管が、検査光、第1及び第2の参照光が通過する窓を備えていてもよい。 In the dryness measurement method described above, wet steam may flow inside the inspection tube, and the inspection tube may include a window through which the inspection light and the first and second reference lights pass.
 上記の乾き度の測定方法において、検査光による湿り蒸気の吸光度の補正値が、検査光による湿り蒸気の吸光度から、第1の参照光及び第2の参照光の波長差に対する、検査光及び第2の参照光の波長差の比である第1の係数を第1の参照光による湿り蒸気の吸光度に乗じた値と、1から第1の係数を引いた値に相当する第2の係数を第2の参照光による湿り蒸気の吸光度に乗じた値と、を引いた値に相当してもよい。ここで、相当するとは、同じであることを含む。また、算出順序等は限定されない。 In the dryness measurement method, the correction value of the absorbance of the wet vapor by the inspection light is determined so that the inspection light and the first reference light with respect to the wavelength difference between the first reference light and the second reference light are determined from the absorbance of the wet vapor by the inspection light. A value obtained by multiplying the first coefficient which is the ratio of the wavelength difference of the two reference lights by the absorbance of the wet steam by the first reference light, and a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1 It may correspond to a value obtained by subtracting the value obtained by multiplying the absorbance of the wet steam by the second reference light. Here, the equivalent includes the same thing. The calculation order is not limited.
 上記の乾き度の測定方法において、検査光による湿り蒸気の吸光度の補正値が、検査光による湿り蒸気の吸光度から、第1の参照光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差に対する、検査光及び第2の参照光による検査管内部を流れる飽和水を含まない気体の吸光度の差の比である第1の係数を第1の参照光による湿り蒸気の吸光度に乗じた値と、1から第1の係数を引いた値に相当する第2の係数を第2の参照光による湿り蒸気の吸光度に乗じた値と、を引いた値に相当してもよい。ここで、相当するとは、同じであることを含む。また、算出順序等は限定されない。 In the dryness measurement method described above, the correction value of the wet steam absorbance due to the inspection light is the saturated water flowing in the test tube due to the first reference light and the second reference light based on the wet steam absorbance due to the inspection light. The first coefficient which is the ratio of the difference in absorbance of the gas not containing saturated water flowing through the inside of the test tube by the test light and the second reference light to the difference in absorbance of the gas not containing the wet steam by the first reference light Corresponding to the value obtained by subtracting the value obtained by multiplying the absorbance of the second reference light by the second coefficient corresponding to the value obtained by subtracting the first coefficient from 1 and the value obtained by multiplying the absorbance of the wet vapor by the second reference light. Also good. Here, the equivalent includes the same thing. The calculation order is not limited.
 本発明によれば、乾き度を正確に測定可能な乾き度測定装置及び乾き度の測定方法を提供可能である。 According to the present invention, it is possible to provide a dryness measuring device and a dryness measuring method capable of accurately measuring the dryness.
第1実施形態に係る乾き度測定装置の模式図である。It is a schematic diagram of the dryness measuring apparatus which concerns on 1st Embodiment. 第1実施形態に係る標準大気圧における水の状態変化を示すグラフである。It is a graph which shows the state change of the water in the standard atmospheric pressure which concerns on 1st Embodiment. 第1実施形態に係る飽和蒸気と飽和液の吸光スペクトルを示すグラフである。It is a graph which shows the absorption spectrum of the saturated vapor | steam and saturated liquid which concern on 1st Embodiment. 第1実施形態に係る飽和蒸気と飽和液の吸光スペクトルと、乾き度の関係と、を示すグラフである。It is a graph which shows the absorption spectrum of the saturated vapor | steam and saturated liquid which concern on 1st Embodiment, and the relationship of a dryness. 第1実施形態に係る飽和蒸気と飽和液の吸光スペクトルと、乾き度の関係と、を示すグラフである。It is a graph which shows the absorption spectrum of the saturated vapor | steam and saturated liquid which concern on 1st Embodiment, and the relationship of a dryness. 第1実施形態に係る検査管に湿り蒸気を流した場合の光の波長と吸光度との関係を示す模式的なグラフである。It is a typical graph which shows the relationship between the wavelength of light at the time of flowing wet steam through the test | inspection tube which concerns on 1st Embodiment, and a light absorbency. 第2実施形態に係る検査管に飽和水を含まない気体を流した場合の光の波長と吸光度との関係を示す模式的なグラフである。It is a typical graph which shows the relationship between the wavelength of light and the light absorbency at the time of flowing the gas which does not contain saturated water to the test tube which concerns on 2nd Embodiment. 実施例1に係る検査管の温度と受光強度との関係を示すグラフである。It is a graph which shows the relationship between the temperature of the test tube which concerns on Example 1, and received light intensity. 実施例2に係る検査管の温度と計測される乾き度との関係を示すグラフである。It is a graph which shows the relationship between the temperature of the test tube which concerns on Example 2, and the measured dryness. 他の実施形態に係る乾き度測定装置の模式図である。It is a schematic diagram of the dryness measuring apparatus which concerns on other embodiment.
 以下に本発明の実施の形態を説明する。以下の図面の記載において、同一又は類似の部分には同一又は類似の符号で表している。ただし、図面は模式的なものである。したがって、具体的な寸法等は以下の説明を照らし合わせて判断するべきものである。また、図面相互間においても互いの寸法の関係や比率が異なる部分が含まれていることは勿論である。 Embodiments of the present invention will be described below. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic. Therefore, specific dimensions and the like should be determined in light of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.
 (第1実施形態)
 第1実施形態に係る乾き度測定装置は、図1に示すように、飽和液で吸収される波長を少なくとも有する検査光を発する検査光発光部11と、検査光と比較して飽和液で吸収されにくい第1及び第2の参照光を発する参照光発光部113と、内部に湿り蒸気を流す検査管21であって、検査光、第1及び第2の参照光が通過する検査管21と、検査管21内部を通過した検査光、第1及び第2の参照光を受光する受光部12と、を備える。
(First embodiment)
As shown in FIG. 1, the dryness measuring apparatus according to the first embodiment absorbs the inspection light emitting unit 11 that emits inspection light having at least a wavelength absorbed by the saturated liquid, and the saturated liquid as compared with the inspection light. A reference light emitting unit 113 that emits first and second reference light that is difficult to be generated, and a test tube 21 that allows wet steam to flow therein, and a test tube 21 through which the test light and the first and second reference light pass. And a light receiving unit 12 that receives the inspection light passing through the inside of the inspection tube 21 and the first and second reference lights.
 乾き度測定装置は、さらに、受光部12で受光された検査光、第1及び第2の参照光に基づき、検査光、第1及び第2の参照光のそれぞれによる湿り蒸気の吸光度を算出する吸光度算出部301と、検査光による湿り蒸気の吸光度を、第1及び第2の参照光による湿り蒸気の吸光度で補正する補正部302と、検査光による湿り蒸気の吸光度の補正値に基づき、湿り蒸気の乾き度を特定する乾き度特定部303と、を備える。吸光度算出部301、補正部302及び乾き度特定部303は、例えば、中央演算処理装置(CPU)300に含まれている。 The dryness measuring device further calculates the absorbance of the wet vapor by each of the inspection light and the first and second reference lights based on the inspection light and the first and second reference lights received by the light receiving unit 12. Based on the absorbance calculation unit 301, the correction unit 302 that corrects the absorbance of the wet vapor by the first and second reference lights with the absorbance of the wet vapor by the inspection light, and the correction value of the absorbance of the wet vapor by the inspection light A dryness specifying unit 303 for specifying the dryness of the steam. The absorbance calculation unit 301, the correction unit 302, and the dryness specification unit 303 are included in, for example, a central processing unit (CPU) 300.
 検査管21には、飽和蒸気と、飽和液と、が合わさった湿り蒸気が通過しうる。図2に示すように、標準大気圧下においては、水は沸点(100℃)に達した後、液滴としての水と、蒸気と、が混合し、共存態にある湿り蒸気となる。圧力が一定の場合、湿り蒸気は加熱及び冷却により潜熱が変化するため、飽和温度は一定となる。ここで、下記(1)式で与えられるように、湿り蒸気全量に対する、飽和蒸気の質量比を、「乾き度」という。
したがって、飽和蒸気の乾き度は1となり、飽和液の乾き度は0となる。
   z=mvapor/(mvapor+mwater)   (1)
 zは乾き度、mvaporは飽和蒸気の質量、mwaterは飽和液の質量を表す。
The test tube 21 can pass wet steam in which saturated steam and saturated liquid are combined. As shown in FIG. 2, under standard atmospheric pressure, water reaches a boiling point (100 ° C.), and then water as droplets and steam are mixed to form wet steam in a coexisting state. When the pressure is constant, since the latent heat of wet steam changes due to heating and cooling, the saturation temperature is constant. Here, as given by the following equation (1), the mass ratio of saturated steam to the total amount of wet steam is referred to as “dryness”.
Therefore, the dryness of the saturated steam is 1, and the dryness of the saturated liquid is 0.
z = m vapor / (m vapor + m water ) (1)
z represents the degree of dryness, m vapor represents the mass of saturated vapor, and m water represents the mass of saturated liquid.
 ここで、飽和蒸気の質量は、飽和蒸気の吸光度に比例する。また、飽和液の質量は、飽和液の吸光度に比例する。そのため、上記(1)式から下記(2)式が導かれる。
   z=mvapor/(mvapor+mwater)
    =avapor/(avapor+k×awater)   (2)
 avaporは飽和蒸気の吸光度、awaterは飽和液の吸光度、kは下記(3)式で与えられるモル吸光係数比を表す。
   k=evapor/ewater   (3)
 evaporは飽和蒸気の吸光係数、ewaterは飽和液の吸光係数を表す。
Here, the mass of the saturated vapor is proportional to the absorbance of the saturated vapor. Further, the mass of the saturated liquid is proportional to the absorbance of the saturated liquid. Therefore, the following equation (2) is derived from the above equation (1).
z = m vapor / (m vapor + m water )
= a vapor / (a vapor + k × a water ) (2)
a vapor represents the absorbance of the saturated vapor, a water represents the absorbance of the saturated liquid, and k represents the molar extinction coefficient ratio given by the following equation (3).
k = e vapor / e water (3)
e vapor represents the extinction coefficient of saturated vapor, and e water represents the extinction coefficient of saturated liquid.
 湿り蒸気の吸光度Asは、下記(4)式で与えられるように、飽和蒸気の吸光度と、飽和液の吸光度と、の和で与えられる。
   As=avapor+awater   (4)
 また、湿り蒸気の吸光度は、下記(5)式で与えられるように、湿り蒸気を透過する前の光の光強度に対する、湿り蒸気を透過した後の光の光強度の比の対数で与えられる。
   As=-ln(Isteam1/Isteam0)   (5)
 Isteam0は湿り蒸気を透過する前、あるいは湿り蒸気が存在しない場合の光の光強度、Isteam1は湿り蒸気を透過した後の光の光強度を表す。
The absorbance As of the wet steam is given by the sum of the absorbance of the saturated steam and the absorbance of the saturated liquid, as given by the following equation (4).
As = a vapor + a water (4)
Further, the absorbance of the wet vapor is given by the logarithm of the ratio of the light intensity of the light after passing through the wet steam to the light intensity of the light before passing through the wet steam as given by the following equation (5). .
As = -ln (I steam1 / I steam0 ) (5)
I steam0 represents the light intensity of light before the wet steam is transmitted or when there is no wet steam, and I steam1 represents the light intensity of the light after transmitted through the wet steam.
 図3に示すように、飽和蒸気と飽和液の吸収スペクトルは異なり、乾き度が変化すると、飽和液の吸収スペクトルが変化する。例えば、乾き度が0から1に向かって変化するにつれて湿り蒸気における飽和液の含有量は減少するので、図4に示すように、飽和液の吸収スペクトルのピーク波長における湿り蒸気の吸光度Asも減少する。飽和液の吸収スペクトルのピークにおける波長は、1880nm付近である。なお、湿り蒸気においては、飽和蒸気の体積が飽和液の体積より非常に大きいため、圧力が一定であれば、飽和蒸気の吸光度は一定とみなすことができる。 As shown in FIG. 3, the absorption spectra of the saturated vapor and the saturated liquid are different. When the dryness changes, the absorption spectrum of the saturated liquid changes. For example, as the dryness changes from 0 to 1, the content of the saturated liquid in the wet steam decreases, so the absorbance As of the wet steam at the peak wavelength of the absorption spectrum of the saturated liquid also decreases as shown in FIG. To do. The wavelength at the peak of the absorption spectrum of the saturated liquid is around 1880 nm. In wet steam, since the volume of saturated steam is much larger than the volume of saturated liquid, the absorbance of saturated steam can be regarded as constant if the pressure is constant.
 湿り蒸気の乾き度は、上記(2)式、(4)式及び(5)式から導かれる下記(6)式でも与えられる。
   z=1/(1-k+(k/avapor)×AS)   (6)
 モル吸光係数比kは定数である。上述したように、飽和蒸気の吸光度avaporは一定圧力下では一定とみなせるため、飽和蒸気の吸光度avaporは湿り蒸気の圧力から導くことができる。そのため、湿り蒸気の吸光度ASを測定することにより、(6)式から湿り蒸気の乾き度zを算出することが可能である。
The dryness of the wet steam is also given by the following equation (6) derived from the above equations (2), (4), and (5).
z = 1 / (1-k + (k / a vapor ) × A S ) (6)
The molar extinction coefficient ratio k is a constant. As described above, the absorbance a Vapor saturated steam can be considered a constant under constant pressure, the absorbance a Vapor saturated steam can be derived from the pressure of the wet steam. Therefore, by measuring the absorbance A S of wet steam, it is possible to calculate the dryness fraction z of wet steam from (6).
 図1に示す検査光発光部11は、飽和液によって吸収される波長帯域を含む検査光を発する。検査光は、例えば、波長領域800nmから2500nmの近赤外光である。検査光の波長帯域と、第1及び第2の参照光の波長帯域と、は、部分的に重なっていてもよい。図5に示すように、検査光は、飽和液の吸収スペクトルのピーク波長を中心波長としてもよい。当該波長領域において、飽和蒸気と飽和液の吸収スペクトルは重なりあっている。図1に示す検査光発光部11には、発光ダイオード等が使用可能である。 The inspection light emitting unit 11 shown in FIG. 1 emits inspection light including a wavelength band that is absorbed by the saturated liquid. The inspection light is, for example, near infrared light having a wavelength region of 800 nm to 2500 nm. The wavelength band of the inspection light and the wavelength bands of the first and second reference lights may partially overlap. As shown in FIG. 5, the inspection light may have the peak wavelength of the absorption spectrum of the saturated liquid as the center wavelength. In the wavelength region, the absorption spectra of the saturated vapor and the saturated liquid overlap. A light emitting diode or the like can be used for the inspection light emitting unit 11 shown in FIG.
 参照光発光部113が発する第1及び第2の参照光は、それぞれ異なる波長を有する。第2の参照光の波長は、第1の参照光の波長よりも長い。例えば、検査光の波長は、第1及び第2の参照光の間にあってもよい。あるいは、第1及び第2の参照光の波長が、検査光の波長よりも長くてもよい。またあるいは、第1及び第2の参照光の波長が、検査光の波長よりも短くてもよい。図5に示すように、第1及び第2の参照光は、それぞれ、乾き度の全範囲において、湿り蒸気に吸収されにくい波長を有する。湿り蒸気に吸収されにくい波長帯域とは、例えば1300nm未満、及び1600nm以上1800nm以下付近である。 The first and second reference lights emitted from the reference light emitting unit 113 have different wavelengths. The wavelength of the second reference light is longer than the wavelength of the first reference light. For example, the wavelength of the inspection light may be between the first and second reference lights. Alternatively, the wavelengths of the first and second reference lights may be longer than the wavelength of the inspection light. Alternatively, the wavelengths of the first and second reference lights may be shorter than the wavelength of the inspection light. As shown in FIG. 5, each of the first and second reference lights has a wavelength that is difficult to be absorbed by wet steam in the entire range of dryness. The wavelength band that is difficult to be absorbed by the wet steam is, for example, less than 1300 nm and near 1600 nm to 1800 nm.
 図1に示す参照光発光部113は、第1の参照光を発する第1の参照光発光部111と、第2の参照光を発する第2の参照光発光部112と、を備えていてもよい。第1の参照光発光部111及び第2の参照光発光部112には、発光ダイオード等が使用可能である。 The reference light emitting unit 113 illustrated in FIG. 1 may include a first reference light emitting unit 111 that emits first reference light and a second reference light emitting unit 112 that emits second reference light. Good. For the first reference light emitting unit 111 and the second reference light emitting unit 112, a light emitting diode or the like can be used.
 検査光発光部11に対向して、検査光を伝搬する検査光導波路30が配置されている。第1の参照光発光部111に対向して、第1の参照光を伝搬する第1の参照光導波路130が配置されている。また、第2の参照光発光部112に対向して、第2の参照光を伝搬する第2の参照光導波路230が配置されている。検査光導波路30、第1の参照光導波路130及び第2の参照光導波路230には、合波器14が接続されている。合波器14には、合波器14で合波された検査光と第1及び第2の参照光を、検査管21の内部に伝搬するための合波光導波路31が接続されている。 The inspection optical waveguide 30 for propagating the inspection light is arranged facing the inspection light emitting unit 11. A first reference optical waveguide 130 that propagates the first reference light is disposed facing the first reference light emitting unit 111. In addition, a second reference optical waveguide 230 that propagates the second reference light is disposed facing the second reference light emitting unit 112. The multiplexer 14 is connected to the inspection optical waveguide 30, the first reference optical waveguide 130, and the second reference optical waveguide 230. A multiplexer optical waveguide 31 for propagating the inspection light combined with the multiplexer 14 and the first and second reference lights into the inspection tube 21 is connected to the multiplexer 14.
 例えば、検査管21の側壁には、光透過性の窓121A、121Bが設けられている。検査管21に設けられた窓121Aと、窓121Bと、は、対向している。窓121A、121Bは、例えば石英ガラスやサファイアガラス等の耐熱ガラスからなる。窓121A、121Bが設けられた耐熱性の検査管21は、例えば、サイトグラスである。合波光導波路31は、例えば、検査管21に設けられた窓121Aの外面に接続されている。合波光導波路31の端部と、窓121Aの外面の間に、コリメータレンズを配置してもよい。 For example, light-transmitting windows 121A and 121B are provided on the side wall of the test tube 21. The window 121A provided in the inspection tube 21 and the window 121B are opposed to each other. The windows 121A and 121B are made of heat resistant glass such as quartz glass or sapphire glass. The heat resistant test tube 21 provided with the windows 121A and 121B is, for example, a sight glass. The multiplexed optical waveguide 31 is connected to the outer surface of a window 121A provided in the test tube 21, for example. A collimator lens may be disposed between the end of the multiplexed optical waveguide 31 and the outer surface of the window 121A.
 合波光導波路31の端部から発せられた検査光は、検査管21の内部において、湿り蒸気に含まれる飽和液によって吸収される。上述したように、湿り蒸気に含まれる飽和液は、乾き度が0から1に近づくにつれて減少する。したがって、検査管21内部の湿り蒸気の乾き度が0から1に近づくにつれて、検査光に対する湿り蒸気の吸光度は低下する傾向にある。 The inspection light emitted from the end of the combined optical waveguide 31 is absorbed by the saturated liquid contained in the wet steam inside the inspection tube 21. As described above, the saturated liquid contained in the wet steam decreases as the dryness approaches from 0 to 1. Therefore, as the dryness of the wet steam in the test tube 21 approaches 0 to 1, the absorbance of the wet steam with respect to the test light tends to decrease.
 合波光導波路31の端部から発せられた検査光、並びに第1及び第2の参照光の一部は、検査管21内部の飽和液の層状流又は波状流によって、反射、散乱、及び屈折等され得る。そのため、検査光、並びに第1及び第2の参照光は、反射、散乱、及び屈折等により減衰され得る。 The inspection light emitted from the end portion of the combined optical waveguide 31 and a part of the first and second reference lights are reflected, scattered, and refracted by the laminar flow or wave flow of the saturated liquid inside the inspection tube 21. Can be equal. Therefore, the inspection light and the first and second reference lights can be attenuated by reflection, scattering, refraction, and the like.
 また、窓121A、121Bは、劣化したり汚れが付着したりする場合がある。窓121A、121Bの劣化の例としては、白ヤケ、青ヤケ及び潜傷が挙げられる。窓121A、121Bに付着する汚れの例としては、検査管21内部を飛散してきた錆が挙げられる。窓121A、121Bの劣化や汚れは、時間の経過とともに、悪化する場合がある。合波光導波路31の端部から発せられた検査光、並びに第1及び第2の参照光は、窓121A、121Bの劣化や汚れにより、減衰され得る。 In addition, the windows 121A and 121B may be deteriorated or dirty. Examples of deterioration of the windows 121A and 121B include white discoloration, blue discoloration, and latent scratches. As an example of the stain | pollution | contamination adhering to window 121A, 121B, the rust which scattered inside the test tube 21 is mentioned. Deterioration and contamination of the windows 121A and 121B may worsen over time. The inspection light emitted from the end portion of the multiplexed optical waveguide 31 and the first and second reference lights can be attenuated due to deterioration or contamination of the windows 121A and 121B.
 本発明者らが見出した知見によれば、窓121A、121Bの劣化や汚れによる光の減衰度は、光の波長に依存し、窓121A、121Bの劣化や汚れによる光の減衰度と、光の波長と、は、概ね線形関係にある。第1の参照光の波長より第2の参照光の波長が長い場合、例えば、窓121A、121Bの劣化や汚れによる第1の参照光の減衰度は、窓121A、121Bの劣化や汚れによる第2の参照光の減衰度より大きくなる。 According to the knowledge found by the present inventors, the light attenuation due to deterioration and dirt of the windows 121A and 121B depends on the wavelength of light, and the light attenuation due to deterioration and dirt of the windows 121A and 121B and the light. The wavelength of is generally in a linear relationship. When the wavelength of the second reference light is longer than the wavelength of the first reference light, for example, the attenuation of the first reference light due to deterioration or contamination of the windows 121A and 121B is the first attenuation due to deterioration or contamination of the windows 121A and 121B. 2 is greater than the attenuation of the reference light.
 検査管21の窓121Bの外面には、検査管21の内部を通過した検査光、並びに第1及び第2の参照光が進入する受光用導波路51が接続されている。受光用導波路51の端部は、合波光導波路31の端部と対向している。窓121Bの外面と、受光用導波路51の端部と、の間に、受光用導波路51に検査光、並びに第1及び第2の参照光を入射させるレンズを配置してもよい。受光用導波路51は、検査管21の内部を透過した検査光、並びに第1及び第2の参照光を、受光部12に導く。受光部12には、フォトダイオード等の光強度検出素子が使用可能である。 The light receiving waveguide 51 into which the inspection light passing through the inside of the inspection tube 21 and the first and second reference lights enter is connected to the outer surface of the window 121B of the inspection tube 21. The end of the light receiving waveguide 51 is opposed to the end of the combined optical waveguide 31. Between the outer surface of the window 121B and the end of the light receiving waveguide 51, a lens that allows the inspection light and the first and second reference lights to enter the light receiving waveguide 51 may be disposed. The light receiving waveguide 51 guides the inspection light transmitted through the inside of the inspection tube 21 and the first and second reference lights to the light receiving unit 12. A light intensity detection element such as a photodiode can be used for the light receiving unit 12.
 検査光導波路30、第1の参照光導波路130、第2の参照光導波路230、合波光導波路31、及び受光用導波路51には、ポリメタクリル酸メチル樹脂(PMMA:Poly(methyl methacrylate))等のプラスチックからなるシングルコア光ファイバ、及び石英ガラス等のガラスからなるシングルコア光ファイバ等が使用可能であるが、検査光、並びに第1及び第2の参照光を伝搬可能であれば、これらに限定されない。 The inspection optical waveguide 30, the first reference optical waveguide 130, the second reference optical waveguide 230, the combined optical waveguide 31, and the light receiving waveguide 51 include polymethyl methacrylate resin (PMMA: Poly (methymethacrylate)). A single core optical fiber made of plastic such as glass and a single core optical fiber made of glass such as quartz glass can be used. However, if the inspection light and the first and second reference lights can be propagated, these can be used. It is not limited to.
 第1実施形態に係る乾き度測定装置は、検査管21内の湿り蒸気の圧力を測定する圧力センサ16をさらに備えていてもよい。ただし、圧力の情報は、検査管21の上流や下流から得てもよい。 The dryness measuring apparatus according to the first embodiment may further include a pressure sensor 16 that measures the pressure of the wet steam in the test tube 21. However, the pressure information may be obtained from upstream or downstream of the inspection tube 21.
 受光部12及び圧力センサ16は、CPU300に接続されている。CPU300には、データ記憶装置400が接続されている。データ記憶装置400は、例えば、上記(6)式のような、湿り蒸気の吸光度と、湿り蒸気の乾き度と、の関係式を保存する。 The light receiving unit 12 and the pressure sensor 16 are connected to the CPU 300. A data storage device 400 is connected to the CPU 300. For example, the data storage device 400 stores a relational expression between the absorbance of the wet steam and the dryness of the wet steam as in the above formula (6).
 CPU300に含まれる吸光度算出部301は、受光部12から、検査管21の内部の湿り蒸気を透過した検査光並びに第1及び第2の参照光の光強度の測定値を受信する。吸光度算出部301は、受光部12が受光した検査光の光強度に基づき、検査光による検査管21内の湿り蒸気の吸光度ALxを特定する。なお、湿り蒸気を透過する前、あるいは検査管21内に湿り蒸気が存在しない場合の検査光の光強度は、予め測定した値を定数として用いてもよい。 The absorbance calculation unit 301 included in the CPU 300 receives from the light receiving unit 12 the measurement values of the inspection light transmitted through the wet steam inside the inspection tube 21 and the light intensity of the first and second reference lights. The absorbance calculation unit 301 specifies the absorbance A Lx of the wet vapor in the test tube 21 by the test light based on the light intensity of the test light received by the light receiving unit 12. The light intensity of the inspection light before passing through the wet steam or when there is no wet steam in the inspection tube 21 may be a value measured in advance as a constant.
 また、吸光度算出部301は、受光部12が受光した第1の参照光の光強度に基づき、第1の参照光による検査管21内の湿り蒸気の吸光度AL1を特定する。さらに、吸光度算出部301は、受光部12が受光した第2の参照光の光強度に基づき、第2の参照光による検査管21内の湿り蒸気の吸光度AL2を特定する。 In addition, the absorbance calculation unit 301 specifies the absorbance A L1 of the wet steam in the test tube 21 by the first reference light based on the light intensity of the first reference light received by the light receiving unit 12. Further, the absorbance calculation unit 301 specifies the absorbance A L2 of the wet steam in the test tube 21 by the second reference light based on the light intensity of the second reference light received by the light receiving unit 12.
 図6に示すように、検査光による湿り蒸気の吸光度ALxの計測値は、窓121A、121Bの劣化や汚れによる検査光の減衰度AtLxの影響を受けている。したがって、窓121A、121Bの劣化や汚れによる検査光の減衰度AtLxの影響を排除した、検査光による湿り蒸気の補正された吸光度AbLxは、下記(7)式で与えられる。
   AbLx=ALx-AtLx   (7)
As shown in FIG. 6, the measurement value of the wet steam absorbance A Lx by the inspection light is affected by the deterioration At tx of the inspection light due to the deterioration of the windows 121A and 121B and dirt. Therefore, the corrected absorbance AbLx of the wet vapor due to the inspection light, excluding the influence of the attenuation degree AtLx of the inspection light due to the deterioration or dirt of the windows 121A and 121B, is given by the following equation (7).
A bLx = A Lx -A tLx (7)
 上述したように、第1の参照光は、水に吸収されにくい波長を有する。そのため、第1の参照光による湿り蒸気の吸光度AL1の計測値は、下記(8)式に示すように、実質的には、窓121A、121Bの劣化や汚れによる第1の参照光の減衰度AtL1とみなすことが可能である。
   AL1=AtL1   (8)
As described above, the first reference light has a wavelength that is difficult to be absorbed by water. Therefore, the measured value of the wet steam absorbance A L1 by the first reference light is substantially the attenuation of the first reference light due to deterioration or contamination of the windows 121A and 121B, as shown in the following equation (8). It can be regarded as the degree A tL1 .
A L1 = A tL1 (8)
 第2の参照光も、水に吸収されにくい波長を有する。そのため、第2の参照光による湿り蒸気の吸光度AL2の計測値は、下記(9)式に示すように、実質的には、窓121A、121Bの劣化や汚れによる第2の参照光の減衰度AtL2とみなすことが可能である。
   AL2=AtL2   (9)
The second reference light also has a wavelength that is difficult to be absorbed by water. Therefore, the measured value of the wet steam absorbance A L2 by the second reference light is substantially the attenuation of the second reference light due to deterioration or contamination of the windows 121A and 121B, as shown in the following equation (9). It can be regarded as the degree AtL2 .
A L2 = A tL2 (9)
 上述したように、光の波長と、窓121A、121Bの劣化や汚れによる光の減衰度と、は、線形関係にあることから、窓121A、121Bの劣化や汚れによる検査光の減衰度AtLxは、下記(10)式に示すように、所定の係数mkと、窓121A、121Bの劣化や汚れによる第1及び第2の参照光の減衰度AtL1、AtL2と、を用いて表すことができる。
   AtLx=mkAtL1+(1-mk)AtL2   (10)
 上記(7)から(10)式から、検査光による湿り蒸気の補正された吸光度AbLxは、下記(11)式で与えられる。
   AbLx=ALx-[mkAL1+(1-mk)AL2]   (11)
As described above, since the light wavelength and the light attenuation due to the deterioration and dirt of the windows 121A and 121B are in a linear relationship, the inspection light attenuation At Lx due to the deterioration and dirt of the windows 121A and 121B. Is expressed using a predetermined coefficient m k and the first and second reference light attenuations A tL1 and A tL2 due to deterioration and contamination of the windows 121A and 121B, as shown in the following equation (10). be able to.
A tLx = m k A tL1 + (1-m k ) A tL2 (10)
From the above equations (7) to (10), the corrected absorbance AbLx of the wet steam by the inspection light is given by the following equation (11).
A bLx = A Lx - [m k A L1 + (1-m k) A L2] (11)
 検査光の波長をLx、第1の参照光の波長をL1、第2の参照光の波長をL2とすると、係数mkは、下記(12)式で与えられる。
   mk=(Lx-L2)/(L1-L2)   (12)
When the wavelength of the inspection light is Lx, the wavelength of the first reference light is L1, and the wavelength of the second reference light is L2, the coefficient m k is given by the following equation (12).
m k = (Lx-L2) / (L1-L2) (12)
 図1に示す補正部302は、例えば上記(11)式を用いて、検査光による湿り蒸気の補正された吸光度AbLxを算出する。検査光による湿り蒸気の補正された吸光度AbLxは、検査光による湿り蒸気の吸光度の計測値ALxから、第1の参照光及び第2の参照光の波長差(L1-L2)に対する、検査光及び第2の参照光の波長差(Lx-L2)の比である第1の係数mkを第1の参照光による湿り蒸気の吸光度の計測値AL1に乗じた値mkL1と、1から第1の係数mkを引いた値に相当する第2の係数(1-mk)を第2の参照光による湿り蒸気の吸光度の計測値AL2に乗じた値(1-mk)AL2と、を引いた値に相当する。なお、係数mkは、予め算出した定数であってもよい。第1の係数mk及び第2の係数(1-mk)の少なくとも一方が、データ記憶装置400に保存されていてもよい。 The correction unit 302 illustrated in FIG. 1 calculates the corrected absorbance AbLx of the wet steam by the inspection light using, for example, the above equation (11). The corrected absorbance A bLx of the wet vapor by the inspection light is an inspection with respect to the wavelength difference (L1−L2) between the first reference light and the second reference light from the measured value A Lx of the wet vapor absorbance by the inspection light. A value m k A L1 obtained by multiplying the measurement value A L1 of the absorbance of the wet vapor by the first reference light by the first coefficient m k which is the ratio of the wavelength difference (Lx−L2) between the light and the second reference light. A value obtained by multiplying the measured value A L2 of the wet steam absorbance by the second reference light by a second coefficient (1-m k ) corresponding to a value obtained by subtracting the first coefficient m k from 1 (1-m k ) corresponds to a value obtained by subtracting A L2 . Note that the coefficient m k may be a constant calculated in advance. At least one of the first coefficient m k and the second coefficient (1−m k ) may be stored in the data storage device 400.
 乾き度特定部303は、補正部302から補正された湿り蒸気の吸光度AbLxを受信する。また、乾き度特定部303は、圧力センサ16から、検査管21内の湿り蒸気の圧力の測定値を受信する。 The dryness specifying unit 303 receives the corrected absorbance AbLx of wet steam from the correcting unit 302. Further, the dryness specifying unit 303 receives the measured value of the pressure of the wet steam in the test tube 21 from the pressure sensor 16.
 乾き度特定部303は、圧力センサ16から受信した検査管21内の湿り蒸気の圧力の測定値に基づき、圧力に依存する飽和蒸気の吸光度avaporを算出する。さらに、乾き度特定部303は、例えば上記(6)式の変数Asに補正された湿り蒸気の吸光度AbLxの値を代入し、変数avaporに算出した飽和蒸気の吸光度avaporの値を代入して、検査管21内の湿り蒸気の乾き度zを算出する。ただし、圧力が一定であれば、飽和蒸気の吸光度avaporは一定であるとみなせるため、検査管21内の圧力が一定であれば、飽和蒸気の吸光度avaporに定数を用いてもよい。この場合、第1実施形態に係る乾き度測定装置は、圧力センサ16を備えていなくてもよい。 Based on the measured value of the pressure of the wet steam in the test tube 21 received from the pressure sensor 16, the dryness specifying unit 303 calculates the absorbance a vapor of saturated vapor depending on the pressure. Furthermore, the dryness of the identifying unit 303, for example, the (6) assigns the value of absorbance A BLX of the corrected wet steam in the expression of the variable A s, the value of absorbance a Vapor saturated steam calculated in the variable a Vapor By substituting, the dryness z of the wet steam in the inspection tube 21 is calculated. However, if the pressure is constant, the absorbance a vapor of the saturated vapor can be regarded as constant. Therefore, if the pressure in the test tube 21 is constant, a constant may be used for the absorbance a vapor of the saturated vapor. In this case, the dryness measuring apparatus according to the first embodiment may not include the pressure sensor 16.
 CPU300には、さらに入力装置321、出力装置322、プログラム記憶装置323、及び一時記憶装置324が接続される。入力装置321としては、スイッチ及びキーボード等が使用可能である。データ記憶装置400に保存される関係式は、例えば、入力装置321を用いて入力される。出力装置322としては、光インジケータ、デジタルインジケータ、及び液晶表示装置等が使用可能である。 Further, an input device 321, an output device 322, a program storage device 323, and a temporary storage device 324 are connected to the CPU 300. As the input device 321, a switch, a keyboard, and the like can be used. The relational expression stored in the data storage device 400 is input using the input device 321, for example. As the output device 322, an optical indicator, a digital indicator, a liquid crystal display device, or the like can be used.
 出力装置322は、例えば、乾き度特定部303が特定した検査管21内部の湿り蒸気の乾き度の値を出力する。プログラム記憶装置323は、CPU300に接続された装置間のデータ送受信等をCPU300に実行させるためのプログラムを保存している。一時記憶装置324は、CPU300の演算過程でのデータを一時的に保存する。 The output device 322 outputs, for example, the dryness value of the wet steam inside the test tube 21 specified by the dryness specifying unit 303. The program storage device 323 stores a program for causing the CPU 300 to execute data transmission / reception between devices connected to the CPU 300. The temporary storage device 324 temporarily stores data in the calculation process of the CPU 300.
 以上説明した第1実施形態に係る乾き度測定装置によれば、湿り蒸気による吸光以外の要因によって光が減衰しても、湿り蒸気の乾き度を正確に測定することが可能である。また、第1実施形態に係る乾き度測定装置によれば、湿り蒸気による吸光以外の要因による光の減衰が時間と共に変化しても、湿り蒸気の乾き度を正確に測定することが可能である。 According to the dryness measuring apparatus according to the first embodiment described above, it is possible to accurately measure the dryness of the wet steam even if the light is attenuated by factors other than the light absorption by the wet steam. In addition, according to the dryness measuring apparatus according to the first embodiment, it is possible to accurately measure the dryness of the wet steam even if the light attenuation due to factors other than the light absorption by the wet steam changes with time. .
 (第2実施形態)
 図1に示す検査管21内に、飽和水を含まない気体を流した場合、検査光による気体の吸光度ALx-0の計測値は、下記(13)式に示すように、実質的には、窓121A、121Bの劣化や汚れによる検査光の減衰度AtLxとみなすことが可能である。なお、飽和水を含まない気体とは、例えば大気である。
   ALx-0=AtLx   (13)
(Second Embodiment)
When a gas that does not contain saturated water flows in the inspection tube 21 shown in FIG. 1, the measured value of the gas absorbance A Lx-0 by the inspection light is substantially as shown in the following equation (13). It can be regarded as the attenuation degree AtLx of the inspection light due to deterioration or dirt of the windows 121A and 121B. In addition, the gas which does not contain saturated water is air | atmosphere, for example.
A Lx-0 = A tLx (13)
 また、検査管21内に、飽和水を含まない気体を流した場合、第1の参照光による気体の吸光度AL1-0の計測値は、実質的には、窓121A、121Bの劣化や汚れによる第1の参照光の減衰度AtL1とみなすことが可能である。同様に、第2の参照光による気体の吸光度AL2-0の計測値は、実質的には、窓121A、121Bの劣化や汚れによる第2の参照光の減衰度AtL2とみなすことが可能である。 In addition, when a gas not containing saturated water is caused to flow through the test tube 21, the measured value of the gas absorbance A L1-0 by the first reference light is substantially the deterioration or dirt of the windows 121A and 121B. Can be regarded as the attenuation degree A tL1 of the first reference light. Similarly, the measured value of the gas absorbance A L2-0 by the second reference light can be substantially regarded as the second reference light attenuation At L2 due to deterioration or contamination of the windows 121A and 121B. It is.
 この場合、吸光度の計測値ALx-0、AL1-0、AL2-0と、波長Lx、L1、L2と、の関係は、図7に示すようになることから、上記(12)式で与えられた係数mkは、下記(14)式でも与えられる。
   mk=(ALX-0-AL2-0)/(AL1-0-AL2-0)   (14)
 したがって、図1に示す補正部302は、予め検査管21内に、飽和水を含まない気体を流して得られた吸光度の計測値ALx-0、AL1-0、AL2-0を用いて算出された係数mkを用いて、上記(11)式により、検査光による湿り蒸気の補正された吸光度AbLxを算出してもよい。第1の係数mk及び第2の係数(1-mk)の少なくとも一方は、データ記憶装置400に保存されていてもよい。
In this case, the relationship between the measured values A Lx-0 , A L1-0 , A L2-0 of the absorbance and the wavelengths Lx, L1, L2 is as shown in FIG. The coefficient m k given by is also given by the following equation (14).
m k = (A LX-0 -A L2-0 ) / (A L1-0 -A L2-0 ) (14)
Therefore, the correction unit 302 shown in FIG. 1 uses measured values A Lx-0 , A L1-0 , A L2-0 obtained in advance by flowing a gas not containing saturated water into the test tube 21. The corrected absorbance AbLx of the wet steam by the inspection light may be calculated by the above equation (11) using the coefficient m k calculated in the above. At least one of the first coefficient m k and the second coefficient (1−m k ) may be stored in the data storage device 400.
 第2実施形態においては、検査光による湿り蒸気の補正された吸光度AbLxは、検査光による湿り蒸気の吸光度の計測値ALxから、第1の参照光及び第2の参照光による飽和水を含まない気体の吸光度の差(AL1-0-AL2-0)に対する、検査光及び第2の参照光による飽和水を含まない気体の吸光度の差(ALx-0-AL2-0)の比である第1の係数mkを第1の参照光による湿り蒸気の吸光度の計測値AL1に乗じた値mkL1と、1から第1の係数mkを引いた値に相当する第2の係数(1-mk)を第2の参照光による湿り蒸気の吸光度の計測値AL2に乗じた値(1-mk)AL2と、を引いた値に相当する。 In the second embodiment, the corrected absorbance AbLx of the wet steam by the inspection light is obtained by calculating the saturated water by the first reference light and the second reference light from the measured value A Lx of the wet steam absorbance by the inspection light. Difference in absorbance (A Lx-0 -A L2-0 ) of the gas not containing saturated water due to the inspection light and the second reference light to the difference in absorbance (A L1-0 -A L2-0 ) of the gas not containing A value m k A L1 obtained by multiplying the measured value A L1 of the wet steam absorbance by the first reference light by the first coefficient m k , which is the ratio of 1, and a value obtained by subtracting the first coefficient m k from 1 This value is equivalent to a value obtained by subtracting (1−m k ) A L2 obtained by multiplying the second coefficient (1−m k ) by the measured value A L2 of the wet steam absorbance by the second reference light.
 検査光、第1及び第2の参照光のそれぞれの波長は、単一ではなく、所定の帯域幅を有する場合がある。この場合、上記(12)式に示したように、波長に基づいて算出された係数mkを用いるよりも、上記(14)式に示したように、飽和水を含まない気体の吸光度に基づいて算出された係数mkを用いたほうが、検査光による湿り蒸気の吸光度を正確に補正することが可能である。 The wavelengths of the inspection light and the first and second reference lights are not single and may have a predetermined bandwidth. In this case, as shown in the above equation (12), rather than using the coefficient m k calculated based on the wavelength, as shown in the above equation (14), it is based on the absorbance of the gas not containing saturated water. By using the coefficient m k calculated in this way, it is possible to accurately correct the absorbance of the wet vapor due to the inspection light.
 (実施例1)
 図1に示す検査管21の窓121A、121Bに白ヤケがない場合において、検査管21に大気を流し、検査光、第1及び第2の参照光の受光強度を測定した。次に、検査管21に湿り蒸気を流し、検査管21を強冷した状態、検査管21を弱冷した状態、検査管21を常温にした状態、及び検査管21を加熱した状態のそれぞれにおいて、検査光、第1及び第2の参照光の受光強度を測定した。
Example 1
In the case where there are no white burns in the windows 121A and 121B of the inspection tube 21 shown in FIG. 1, the air was passed through the inspection tube 21, and the received light intensity of the inspection light and the first and second reference light was measured. Next, in each of a state in which wet steam is passed through the inspection tube 21 to strongly cool the inspection tube 21, a state in which the inspection tube 21 is lightly cooled, a state in which the inspection tube 21 is at room temperature, and a state in which the inspection tube 21 is heated. The received light intensity of the inspection light and the first and second reference lights was measured.
 また、検査管21の窓121A、121Bに白ヤケがある場合において、検査管21に大気を流し、検査光、第1及び第2の参照光の受光強度を測定した。次に、検査管21に湿り蒸気を流し、検査管21を強冷した状態、検査管21を弱冷した状態、検査管21を常温にした状態、及び検査管21を加熱した状態のそれぞれにおいて、検査光、第1及び第2の参照光の受光強度を測定した。 In addition, when there were white discoloration in the windows 121A and 121B of the inspection tube 21, the atmosphere was passed through the inspection tube 21, and the received light intensity of the inspection light and the first and second reference light was measured. Next, in each of a state in which wet steam is passed through the inspection tube 21 to strongly cool the inspection tube 21, a state in which the inspection tube 21 is lightly cooled, a state in which the inspection tube 21 is at room temperature, and a state in which the inspection tube 21 is heated. The received light intensity of the inspection light and the first and second reference lights was measured.
 検査管21の温度が低いほうが乾き度が低く、検査管21の温度が高いほうが、乾き度が高くなる。検査管21の窓121A、121Bに白ヤケがない場合に検査管21に大気を流した場合の検査光、第1及び第2の参照光の受光強度のそれぞれを100%に規格化した場合の、検査光、第1及び第2の参照光の受光強度をプロットしたグラフを図8に示す。 The lower the temperature of the test tube 21, the lower the dryness, and the higher the temperature of the test tube 21, the higher the dryness. When the inspection light and the first and second reference light received intensities are normalized to 100% when the atmosphere flows through the inspection tube 21 when the windows 121A and 121B of the inspection tube 21 do not have white discoloration. FIG. 8 is a graph plotting the received light intensity of the inspection light and the first and second reference lights.
 図1に示す検査管21の窓121A、121Bに白ヤケがあると、特に検査管21に大気又は乾き度が高い湿り蒸気が流れている場合に、検査光、第1及び第2の参照光の受光強度が低下することが確認された。 If there are white discoloration in the windows 121A and 121B of the test tube 21 shown in FIG. 1, particularly when the atmosphere or wet steam having a high dryness flows through the test tube 21, the test light and the first and second reference lights. It was confirmed that the received light intensity decreased.
 (実施例2)
 第2実施形態で説明した補正部を備える乾き度測定装置を用いて、図1に示す検査管21の窓121A、121Bに白ヤケがない場合と、白ヤケがある場合において、乾き度を測定した。その結果、図9に示すように、窓121A、121Bに白ヤケがある場合でも、白ヤケがない場合とほぼ同様の乾き度が測定された。
(Example 2)
Using the dryness measuring apparatus including the correction unit described in the second embodiment, the dryness is measured when there are no white burns and when there are white burns in the windows 121A and 121B of the test tube 21 shown in FIG. did. As a result, as shown in FIG. 9, even when the windows 121A and 121B had white discoloration, the dryness was almost the same as when there was no white discoloration.
 次に、第2の参照光を用いず、検査光による湿り蒸気の吸光度から第1の参照光による湿り蒸気の吸光度を引いた値を、検査光による湿り蒸気の吸光度の補正値として用いて、比較例に係る乾き度を測定した。その結果、図9に示すように、窓121A、121Bに白ヤケがある場合、乾き度が高くなると誤差が生じることが確認された。 Next, without using the second reference light, a value obtained by subtracting the absorbance of the wet vapor due to the first reference light from the absorbance of the wet vapor due to the inspection light is used as a correction value for the absorbance of the wet vapor due to the inspection light. The dryness which concerns on a comparative example was measured. As a result, as shown in FIG. 9, it was confirmed that when the window 121 </ b> A, 121 </ b> B has white discoloration, an error occurs when the dryness increases.
 (他の実施形態)
 上記のように本発明を実施の形態によって記載したが、この開示の一部をなす記述及び図面はこの発明を限定するものであると理解するべきではない。この開示から当業者には様々な代替実施の形態、実施例及び運用技術が明らかになるはずである。
(Other embodiments)
Although the present invention has been described by the embodiments as described above, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques should be apparent to those skilled in the art.
 例えば、図10に示すように、乾き度測定装置において、合波光導波路31の端部と、受光用導波路51の端部の両方が、検査管21の一方の側壁に設けられた窓121に対して並列に配置されていてもよい。この場合、合波光導波路31の端部及び受光用導波路51の端部と対向する検査管21内部の側壁に、反射板131が配置される。合波光導波路31の端部から発せられた検査光、第1及び第2の参照光は、検査管21内部を進行し、反射板131で反射され、受光用導波路51に入射する。ここで、合波光導波路31の端部から発せられる検査光、第1及び第2の参照光の角度は、検査管21に設けられた光透過性の窓121で検査光、第1及び第2の参照光が全反射する臨界角以下、及び検査管21内部の飽和液の層状流又は波状流表面で検査光、第1及び第2の参照光が全反射する臨界角以下であれば、特に限定されない。 For example, as shown in FIG. 10, in the dryness measuring apparatus, a window 121 in which both the end of the combined optical waveguide 31 and the end of the light receiving waveguide 51 are provided on one side wall of the test tube 21. May be arranged in parallel. In this case, the reflecting plate 131 is disposed on the side wall inside the test tube 21 facing the end of the combined optical waveguide 31 and the end of the light receiving waveguide 51. The inspection light and the first and second reference light emitted from the end of the combined optical waveguide 31 travel through the inspection tube 21, are reflected by the reflection plate 131, and enter the light receiving waveguide 51. Here, the angles of the inspection light and the first and second reference light emitted from the end portion of the combined optical waveguide 31 are determined by the light transmitting window 121 provided in the inspection tube 21 and the first and first light beams. 2 below the critical angle at which the reference light is totally reflected, and below the critical angle at which the inspection light and the first and second reference light are totally reflected at the surface of the laminar flow or the wavy flow of the saturated liquid inside the inspection tube 21 There is no particular limitation.
 このように、本発明は様々な実施の形態等を包含するということを理解すべきである。 Thus, it should be understood that the present invention includes various embodiments and the like.
 本発明の実施の形態に係る乾き度測定装置は、減圧弁による潜熱増加効果の可視化、最適ボイラ効率を得るための乾き度計測、水蒸気タービンの湿り損失計測、熱交換器の最適乾き度制御、製麺蒸し工程等の食品製造工程の制御、及び化学工程の制御等に利用可能である。 The dryness measuring device according to the embodiment of the present invention is a visualization of the latent heat increase effect by the pressure reducing valve, dryness measurement to obtain the optimum boiler efficiency, wet loss measurement of the steam turbine, optimal dryness control of the heat exchanger, It can be used for the control of food production processes such as a noodle-making process and the control of chemical processes.
 11・・・検査光発光部、12・・・受光部、14・・・合波器、16・・・圧力センサ、21・・・検査管、30・・・検査光導波路、31・・・合波光導波路、51・・・受光用導波路、111・・・第1の参照光発光部、112・・・第2の参照光発光部、113・・・参照光発光部、121、121A、121B・・・窓、130・・・第1の参照光導波路、131・・・反射板、230・・・第2の参照光導波路、300・・・中央演算処理装置、301・・・吸光度算出部、302・・・補正部、303・・・乾き度特定部、321・・・入力装置、322・・・出力装置、323・・・プログラム記憶装置、324・・・一時記憶装置、400・・・データ記憶装置
 
DESCRIPTION OF SYMBOLS 11 ... Inspection light emission part, 12 ... Light-receiving part, 14 ... Multiplexer, 16 ... Pressure sensor, 21 ... Inspection tube, 30 ... Inspection optical waveguide, 31 ... Combined optical waveguide, 51... Light receiving waveguide, 111... First reference light emitting unit, 112... Second reference light emitting unit, 113. , 121B ... window, 130 ... first reference optical waveguide, 131 ... reflector, 230 ... second reference optical waveguide, 300 ... central processing unit, 301 ... absorbance Calculation unit 302... Correction unit 303. Dryness specifying unit 321... Input device 322... Output device 323... Program storage device 324. ... Data storage devices

Claims (10)

  1.  飽和液で吸収される波長を少なくとも有する検査光を発する検査光発光部と、
     前記検査光と比較して前記飽和液で吸収されにくい第1及び第2の参照光を発する参照光発光部と、
     内部に湿り蒸気を流す検査管であって、前記検査光、前記第1及び第2の参照光が通過する検査管と、
     前記検査管内部を通過した前記検査光、前記第1及び第2の参照光を受光する受光部と、
     前記受光部で受光された前記検査光、前記第1及び第2の参照光に基づき、前記検査光、前記第1及び第2の参照光のそれぞれによる前記湿り蒸気の吸光度を算出する吸光度算出部と、
     前記検査光による前記湿り蒸気の吸光度を、前記第1及び第2の参照光による前記湿り蒸気の吸光度で補正する補正部と、
     前記検査光による湿り蒸気の吸光度の補正値に基づき、前記湿り蒸気の乾き度を特定する乾き度特定部と、
     を備える、乾き度測定装置。
    An inspection light emitter that emits inspection light having at least a wavelength absorbed by the saturated liquid;
    A reference light emitter that emits first and second reference light that is less likely to be absorbed by the saturated liquid as compared to the inspection light;
    An inspection tube for flowing wet steam therein, through which the inspection light and the first and second reference light pass;
    A light receiving unit that receives the inspection light that has passed through the inspection tube, the first and second reference lights, and
    Based on the inspection light and the first and second reference lights received by the light receiving unit, an absorbance calculation unit that calculates the absorbance of the wet steam by each of the inspection light and the first and second reference lights. When,
    A correction unit that corrects the absorbance of the wet steam by the inspection light with the absorbance of the wet steam by the first and second reference lights;
    Based on the correction value of the absorbance of the wet steam by the inspection light, a dryness specifying unit for specifying the dryness of the wet steam,
    A dryness measuring device.
  2.  前記検査管が、前記検査光、前記第1及び第2の参照光が通過する窓を備える、請求項1に記載の乾き度測定装置。 The dryness measuring apparatus according to claim 1, wherein the inspection tube includes a window through which the inspection light and the first and second reference lights pass.
  3.  前記検査光による前記湿り蒸気の吸光度の補正値が、
     前記検査光による前記湿り蒸気の吸光度から、
     前記第1の参照光及び前記第2の参照光の波長差に対する、前記検査光及び前記第2の参照光の波長差の比である第1の係数を前記第1の参照光による前記湿り蒸気の吸光度に乗じた値と、
     1から前記第1の係数を引いた値に相当する第2の係数を前記第2の参照光による前記湿り蒸気の吸光度に乗じた値と、
     を引いた値に相当する、
     請求項1又は2に記載の乾き度測定装置。
    The correction value of the absorbance of the wet steam by the inspection light is
    From the absorbance of the wet vapor by the inspection light,
    A first coefficient that is a ratio of a wavelength difference between the inspection light and the second reference light with respect to a wavelength difference between the first reference light and the second reference light is the wet steam by the first reference light. The value multiplied by the absorbance of
    A value obtained by multiplying the absorbance of the wet steam by the second reference light by a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1;
    Equivalent to the value minus
    The dryness measuring apparatus according to claim 1 or 2.
  4.  前記第1の係数を保存するデータ記憶装置をさらに備える、請求項3に記載の乾き度測定装置。 The dryness measuring apparatus according to claim 3, further comprising a data storage device for storing the first coefficient.
  5.  前記第2の係数を保存するデータ記憶装置をさらに備える、請求項3又は4に記載の乾き度測定装置。 The dryness measuring apparatus according to claim 3 or 4, further comprising a data storage device for storing the second coefficient.
  6.  前記検査光による前記湿り蒸気の吸光度の補正値が、
     前記検査光による前記湿り蒸気の吸光度から、
     前記第1の参照光及び前記第2の参照光による前記検査管内部を流れる飽和水を含まない気体の吸光度の差に対する、前記検査光及び前記第2の参照光による前記検査管内部を流れる飽和水を含まない気体の吸光度の差の比である第1の係数を前記第1の参照光による前記湿り蒸気の吸光度に乗じた値と、
     1から前記第1の係数を引いた値に相当する第2の係数を前記第2の参照光による前記湿り蒸気の吸光度に乗じた値と、
     を引いた値に相当する、
     請求項1又は2に記載の乾き度測定装置。
    The correction value of the absorbance of the wet steam by the inspection light is
    From the absorbance of the wet vapor by the inspection light,
    Saturation flowing through the inspection tube by the inspection light and the second reference light with respect to a difference in absorbance of a gas not containing saturated water flowing through the inspection tube by the first reference light and the second reference light. A value obtained by multiplying the absorbance of the wet vapor by the first reference light by a first coefficient which is a ratio of the difference in absorbance of a gas not containing water;
    A value obtained by multiplying the absorbance of the wet steam by the second reference light by a second coefficient corresponding to a value obtained by subtracting the first coefficient from 1;
    Equivalent to the value minus
    The dryness measuring apparatus according to claim 1 or 2.
  7.  前記第1の係数を保存するデータ記憶装置をさらに備える、請求項6に記載の乾き度測定装置。 The dryness measuring apparatus according to claim 6, further comprising a data storage device for storing the first coefficient.
  8.  前記第2の係数を保存するデータ記憶装置をさらに備える、請求項6又は7に記載の乾き度測定装置。 The dryness measuring apparatus according to claim 6 or 7, further comprising a data storage device for storing the second coefficient.
  9.  飽和液で吸収される波長を少なくとも有する検査光を湿り蒸気に発することと、
     前記検査光と比較して前記飽和液で吸収されにくい第1及び第2の参照光を前記湿り蒸気に発することと、
     前記湿り蒸気を通過した前記検査光、前記第1及び第2の参照光を受光することと、
     前記受光された前記検査光、前記第1及び第2の参照光に基づき、前記検査光、前記第1及び第2の参照光のそれぞれによる前記湿り蒸気の吸光度を算出することと、
     前記検査光による前記湿り蒸気の吸光度を、前記第1及び第2の参照光による前記湿り蒸気の吸光度で補正することと、
     前記検査光による前記湿り蒸気の吸光度の補正値に基づき、前記湿り蒸気の乾き度を特定することと、
     を含む、乾き度の測定方法。
    Emitting test light having at least a wavelength absorbed by the saturated liquid to wet steam;
    Emitting first and second reference light to the wet steam that is less likely to be absorbed by the saturated liquid compared to the inspection light;
    Receiving the inspection light that has passed through the wet steam, the first and second reference lights;
    Calculating the absorbance of the wet steam by each of the inspection light and the first and second reference lights based on the received inspection light and the first and second reference lights;
    Correcting the absorbance of the wet vapor by the inspection light with the absorbance of the wet vapor by the first and second reference lights;
    Identifying the wet steam dryness based on the correction value of the absorbance of the wet steam by the inspection light; and
    Method for measuring dryness, including
  10.  前記湿り蒸気が検査管の内部を流れ、
     前記検査管が、前記検査光、前記第1及び第2の参照光が通過する窓を備える、
     請求項9に記載の乾き度の測定方法。
     
    The wet steam flows inside the test tube,
    The inspection tube includes a window through which the inspection light and the first and second reference lights pass.
    The dryness measuring method according to claim 9.
PCT/JP2017/042054 2017-01-23 2017-11-22 Dryness measurement device and method for measuring dryness WO2018135130A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56110037A (en) * 1980-01-23 1981-09-01 Commissariat Energie Atomique Measuring device for luminous intensity
JP2004279339A (en) * 2003-03-18 2004-10-07 Kurabo Ind Ltd Concentration measuring instrument
US7034302B2 (en) * 2002-09-19 2006-04-25 Battelle Energy Alliance, Llc Optical steam quality measurement system and method
JP2016151572A (en) * 2015-02-19 2016-08-22 アズビル株式会社 Dryness measurement device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56110037A (en) * 1980-01-23 1981-09-01 Commissariat Energie Atomique Measuring device for luminous intensity
US7034302B2 (en) * 2002-09-19 2006-04-25 Battelle Energy Alliance, Llc Optical steam quality measurement system and method
JP2004279339A (en) * 2003-03-18 2004-10-07 Kurabo Ind Ltd Concentration measuring instrument
JP2016151572A (en) * 2015-02-19 2016-08-22 アズビル株式会社 Dryness measurement device

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