WO2018130448A1

WO2018130448A1 - Device and method for working glass elements or glass-ceramic elements by means of a laser

Info

Publication number: WO2018130448A1
Application number: PCT/EP2018/050145
Authority: WO
Inventors: Fabian Wagner; Dr. Albrecht SEIDL; Andreas Ortner; Simon Schmitt; Dr. Frank-Thomas LENTES; Dr. Volker PLAPPER; Dr. Jens Ulrich THOMAS; Laura BRUECKBAUER
Original assignee: Schott Ag
Priority date: 2017-01-16
Filing date: 2018-01-03
Publication date: 2018-07-19
Also published as: DE102017100755A1

Abstract

The problem addressed by the invention is that of providing a device and a method with which break initation lines can be scribed into an element to be worked, as rapidly and true to specifications as possible, by means of a laser. To this end, a device (1) for laser-working a glass element or glass-ceramic element (2) is provided, comprising: - an ultrashort pulse laser (10), - a focussing optical system (3) to concentrate the laser beam (7) of the ultrashort pulse laser (10) to an elongated focus, the pulse power of the ultrashort pulse laser (10) being sufficient to produce filamentous damaged regions (6) inside the glass or glass-ceramic by means of the laser pulses focussed in the glass or glass-ceramic, the focussing optical system (3) comprising a lens (4) arranged in the beam path of the ultrashort pulse laser (10). A lens movement device (9) is provided, by means of which the lens (4) can be moved transversely to the beam direction (70) so that the position of the optical axis (40) of the lens (4) can be changed relative to the position of the laser beam (7). A change in position relative to the laser beam (7) shifts the incident point (71) of the laser beam on the glass element or glass-ceramic element (2) so that the incident point (71) of the laser beam (7) can be guided along a predefined path forming a break initiation line (12) by moving the lens (4).

Description

Apparatus and method for processing glass or glass ceramic elements by means of a laser

description

The invention generally relates to the processing of glass or glass ceramic parts.

In particular, the invention relates to a method and apparatus for separating glass or glass ceramic elements to separate parts from the elements.

In principle, the filamentation is known, while a damage is introduced into the glass, the particular is that this is not punctiform, such. with stealth dicing but through special optics line along the cutting edge. Now set several

Damage to each other results in a dividing line where the glass can be separated by introducing tension.

From the prior art, various devices for producing dividing lines by intensive laser beams are known. In this case, a plasma is generated in the glass along the laser beam by ultrashort high-intensity laser pulses, which causes a filament-shaped damage in the material. The laser beam is moved along an intended track, so that adjacent damage tracks are inserted. The glass part can then be separated on this track.

Processes for producing filamentous damage for release preparation are known, for example, from WO 2012/006736 A2 and DE 10 2012 110 971 A1.

EP 2 781 296 A1 further describes a method for producing

Inner contours, wherein in a contour definition step by means of a guided over the substrate laser beam along a contour of the contour to be generated in the

Substrate material a plurality of individual zones of internal damage is generated. Substrate material is then removed or removed by plastic deformation or material removal in a material removal or deformation step carried out after the contour definition step.

In many cases special optics are used to form a linear focus for producing the elongate zones of damage. In particular, an axicon or optics with a targeted spherical aberration is suitable for shaping focal lines or a linear focus. The special optics are currently only as fixed optics available. For processing, the substrate to be processed is moved under the optics. At high speeds in the range of up to 2m / s, however, problems can arise in the case of geometries with the smallest radii, since the axes can not move the high mass of the substrate with high speeds and the necessary accelerations in a geometrically reliable manner. This is especially the case for radii smaller than 10mm, especially for radii smaller than 1 mm.

A further development, especially for substrates with high masses, are here

Portal systems, not the substrate under the optics but the optics is moved over the substrate. As a result of the lower mass, even smaller radii 4-1 Omm can be manufactured with higher speeds and with the correct geometry. However, here is the mass to be accelerated relatively high and this is not enough to produce smallest radii <1 mm geometrically true. Disadvantage here is that the beam path is not rigid, which can easily lead to misalignment. Furthermore, the length of the beam path changes, which affects beam diameter and delays.

From JP 2016/105178 a laser processing apparatus is known in which a

Pair of wedge prisms is provided to deflect the laser beam. By means of the prisms, the beam is deflected so that the angle of incidence can be varied while the focus is fixed. Thus, this is a so-called Trepanieroptik, in which the laser beam can be precessed by a tumbling point. By means of this optics can then by adjusting the angle of the beam to the workpiece normal, the inclination of the generated by the laser

Cut surface can be adjusted. In order to guide the focus along an intended dividing line, however, the workpiece is again moved, with the above-mentioned disadvantage of the high mass to be moved.

The invention is therefore based on the object to provide a device and a method with which dividing lines can be written by means of a laser into an element to be processed quickly and as accurately as possible.

This object is solved by the subject matter of the independent claims.

Advantageous developments of the invention are specified in the respective dependent claims.

The invention is based on the recognition that in the filamentation depending on

Beam diameter and lens used a deflection of the laser beam by positioning the lens is possible without significantly affecting the quality of the filaments produced. Accordingly, the invention provides a device for laser processing of a glass or

Glass ceramic element comprising:

an ultrashort pulse laser,

- Focusing optics to focus the laser beam of the ultrashort pulse laser to a long focus, and by the focused in glass or glass ceramic laser pulses filamentous damage within the glass or the

To produce glass ceramic, wherein the focusing optics

a lens arranged in the beam path of the ultrashort pulse laser. With a lens movement device, the lens is movable transversely to the beam direction, so that the position of the optical axis of the lens relative to the position of the laser beam is variable. The lens is shaped so that a movement of the lens relative to the laser beam deflects the laser beam and thus shifts the point of impact of the laser beam on the glass or glass ceramic element, so that the impact point of the laser beam along a line forming a parting line can be guided by movement of the lens ,

To allow insertion of filamentous damage, a

Ultra short pulse laser with correspondingly high pulse power selected.

Particularly preferably, the lens, with which the laser beam is deflected, has a positive focal length, that is, a converging lens, so that this lens without further

Focusing lens can focus the laser beam in one focus.

An executable with the device inventive method for

Laser processing of a glass or glass ceramic element is based on that

- Focused with the focusing optics of the laser beam of the ultrashort pulse laser to a long focus in the glass or glass ceramic element, wherein

- A pulse power of the ultrashort pulse laser is set, which is sufficient to filament-shaped or elongated by the focused in glass or glass ceramic laser pulses

To produce damage within the glass or the glass-ceramic, wherein the

Focusing optics comprises a lens arranged in the beam path of the ultrashort pulse laser.

With the invention, the point of impact of the laser beam can be easily adjusted by changing the position of the lens relative to the beam position. For example, with a beam diameter of 12 mm and a biconvex lens with a diameter of 16 mm, a beam deflection of + -1 mm is possible without having to accept a significant deterioration of the beam geometry or the maximum intensity. By means of the lens movement device, the lens is moved transversely to the beam direction during the operation of the ultrashort pulse laser, that is, while it emits a laser beam, so that the position of the optical axis of the lens is changed relative to the position of the laser beam. The lens is shaped so that the movement of the lens relative to the laser beam deflects the laser beam and thus the point of impact of the laser beam on the glass or

Glass ceramic element shifts, wherein the impact point is guided with movement of the lens along the predetermined path forming the parting line.

There are several ways in which the movement of the laser beam across the surface is controlled. According to one embodiment, a computing device is provided which is adapted to deliver successive control signals to the lens movement device, so that guided by the lens movement means movement of the lens transversely to the beam direction of the impact point of the laser beam along a predetermined path forming a parting line becomes. Thus, the movement of the laser beam over the glass or glass ceramic element is particularly preferably controlled by a computer.

To enable larger movements, the glass or glass ceramic element can be moved relative to the ultrashort pulse laser during the irradiation of the laser beam with a movement device, so that the point of impact of the laser beam is guided along a predetermined path forming the separation line, which by the superimposition of the means of the adjusting device and the moving means set positions is formed. Also, an intermittent operation can be provided in which by means of the movement means certain positions are approached on the glass or glass ceramic element, at which then the separation line is traversed by means of the lens movement according to the invention.

The invention will be explained in more detail below with reference to the accompanying figures. Show it:

1 shows a first embodiment of a device for laser processing,

2 a lens movement device,

3 shows a further embodiment of a lens movement device,

4 shows a raytracing simulation of the laser beam with a centrically arranged lens,

5 and FIG. 6 raytracing simulation of the laser beam with an eccentrically arranged lens, FIG. 7 and 8 are light microscope photographs of the cross section of a glass element with inserted filamentous damage,

9 shows a parting line on a glass or glass ceramic element with a deviation from the intended course,

10 is a glass or glass ceramic element with a plurality of dividing lines,

11 shows speed-time diagrams of the lens movement device,

Fig. 12 is a glass or glass ceramic element with machined outer contour.

FIG. 1 shows in side view a device 1 for laser processing of a glass or glass ceramic element 2, with which filament-shaped damages 6 adjacent to one another are produced in the volume of the element 2 along a parting line. The glass or glass ceramic element 2 can then be easily split along this parting line by the inserted damage. The device 1 comprises an ultrashort pulse laser 10 and a focusing optics 3 with which the laser beam 7 of the ultrashort pulse laser 10 is concentrated 41 into a long focus. For this purpose, at least one lens 4 is provided as part of the focusing optics 3. In the case of an optical structure consisting of a plurality of beam-forming elements, this lens is preferably the material facing the front lens of the imaging optics. In addition to the lens 3, the focusing optics 3 can also have one or more further optical elements 30, for example in order to widen the laser beam and / or to collimate it. In general, without limitation to the illustrated example, according to an embodiment of the invention, the diameter of the laser beam 7 striking the lens 4 is kept smaller than the aperture of the lens. Thus, the lens 4 can be moved relative to the laser beam in a certain range, without the laser beam is shaded. The ratio of the beam diameter of the laser beam 7 to the diameter of the aperture of the lens is, however, preferably at least 0.25, more preferably at least 0.5, most preferably at least 2/3, but the ratio should remain less than 1 due to the unfavorable shading ,

As ultrashort pulse laser, for example, a Nd: YAG laser with a

Wavelength of 1064nm. With such a laser can be achieved with a pulse duration of 10ps, pulse energies of 200-250μϋ. In particular, the laser can also be operated in burst mode, in which the pulse energy is emitted in the form of pulse packets (also referred to as bursts). In a burst of 1-8 single pulses, the total energy is a burst according to an embodiment 400-800 μϋ, the burst frequency, ie the distance between the pulses of a burst 50MHz, the distance between two filaments 4 - δμιη each generated with a burst, the repetition frequency of the bursts is between 5-200kHz.

In general, the following parameters of the ultrashort pulse laser are particularly suitable for the invention:

The power of the ultrashort pulse laser is preferably in a range of 20 to 300

Watt.

The pulse energy of a burst is preferably more than 400 microjoules, more preferably more than 500 microjoules.

When operating the ultrashort pulse laser in burst mode, the repetition rate is

Repetition rate of burst delivery. The pulse duration is essentially independent of whether a laser is operated in single-pulse mode or in burst mode. The pulses within a burst typically have a similar pulse length as a pulse in single pulse mode. The burst frequency may be in the range of 15 MHz to 90 MHz, preferably in the range of 20 MHz to 85 MHz.

The number of pulses in the burst is preferably between 1 and 10 pulses, e.g. 6 or 8 pulses are.

The laser beam 7 of the ultrashort pulse laser 10 is subdivided into laser pulses 8 emitted in succession. The pulse power of the pulse transported with the pulses is

Ultrashort pulse laser 10 sufficient to produce filament-shaped damage 6 within the glass or the glass-ceramic by means of the laser pulses 8 focussed in glass or glass-ceramic. These filamentous damages 6 are formed along the

elongated, preferably linear focus 41.

The lens 4 is now not only used to compensate for the elongated linear focus 41 in the volume of the glass due to the large spherical aberration

To produce glass ceramic element 2. Rather, the lens 4 is also shaped so that a change in position of the lens 4 relative to the laser beam 7 deflects the laser beam 7 and 7 shifts the impact point 71 of the laser beam 7 on the glass or glass ceramic element 2 by the thus caused change in direction of the exiting laser beam. This is used to guide the laser beam 7 and thus run the desired path along the intended dividing line. In general, without limitation to the illustrated embodiments, a lens 4 is provided for this purpose, which has a spherical aberration which is sufficient to at a lateral displacement of the laser beam on the lens to shift the focus of the laser beam laterally.

In order that the point of incidence 71 of the laser beam 7 can be moved along the predetermined path forming the dividing line, a lens movement device 9 is provided

provided by means of which the lens 4 can be moved transversely to the beam direction. Such a position change transversely to the beam direction, in particular perpendicular to the beam direction leads to a change in the distance of the optical axis of the lens 4 to the Strahlmittte the laser beam 7. In other words, the lens 4 can be positioned by means of the lens moving device 9 so that the laser beam, the lens optional crossed eccentrically.

The lens 4 itself has only a comparatively low mass and can therefore be moved very quickly. The invention thus makes it possible, even in the highest geometries with smallest radii, as they are required for products in electronics and microfluidics

Speeds to produce geometrically true.

Thus, without limitation to the specific construction of the example illustrated in FIG. 1, impact point 71 may move across the lens at a speed of greater than 0.05 meters per second, preferably at a speed of 0.1 meters per second, over the lens - or glass ceramic element to be moved. At the same time, even the narrowest curvatures of the parting line can be realized independently of the speed with which the intended dividing line is traversed. For this purpose, it is provided according to an embodiment of the method according to the invention that by the movement of the lens 4 a

Dividing line is traversed, which has a radius of curvature in the range of 0.05 mm to 1 mm.

According to a preferred embodiment of the invention, a computing device 15 is provided, which successively outputs control signals to the lens movement device 9, so that the position of the lens 4 can be controllably adjusted and changed with the computing device 15. In this way, by virtue of the movement of the lens 4 by the lens movement device 9 in a computer-controlled manner, the intended path on the glass or glass ceramic element 2 can be guided transversely to the beam direction of the impact point 71 of the laser beam 7. Accordingly, in the example of FIG. 1, a computing device 15 is connected to the lens movement device 9. In general, for example, piezo actuators or electromagnetic actuators are suitable as part of the lens movement device 9. If necessary, several actuator types can be combined with each other.

The lens movement means 9 may comprise two motors for moving the lens in two mutually independent directions transverse to the beam direction and thus flexibly imaging any geometry. According to one embodiment, the

Lens movement device 9 thus two adjusting devices for movement along two non-parallel directions transverse to the beam direction 70 of the laser beam 7. Fig. 2 shows this in plan view, ie viewed along the beam direction of the laser beam, an example of such

Lens movement device 9 with a lens 4 connected thereto. The lens movement device 9 comprises two adjustment devices 91, 92, which can respectively displace and position the lens 4 along a direction indicated by a double arrow. The two directions are in a plane preferably perpendicular to the beam direction and preferably still perpendicular to each other. As shown, both adjusting devices 91, 92 can be controlled separately by the computing device 15. For the two directions different movement parameters can be set in this way. In general, acceleration sections or accelerated movements can also be provided.

According to yet another embodiment of the invention, movement of the lens transversely to the beam direction and relative to the beam center is effected by rotating the lens eccentrically. In this way, the optical axis of the lens 4 moves on a circular path about the axis of rotation. Accordingly, according to this embodiment, a means for eccentric rotation of the lens is provided as part of the lens movement device 9. According to a development of the invention, a static and / or dynamic balancing may be provided in this case in order to avoid that the rotating lens generates vibrations and transmits them to the optical system.

FIG. 3 shows an example of such a lens movement device 9. This comprises a lens holder 33, which is rotatably mounted by means of a motor 92. The optical axis 40 of the lens 4 is spaced from the axis of rotation 43 of the holder 33. Therefore, performs the optical axis 40 during rotation of the lens holder 33, a circular path 44 about the rotation axis 41. In this way, the point of incidence 71 of the laser beam 7 is guided in a circular path , their Radius is generally smaller than the radius of the circular path 44 of the optical axis 40 about the axis of rotation 43rd

This embodiment can also be combined with the movement in two independent directions by means of two actuators as shown in the embodiment of FIG. Furthermore, the driving of the lens movement device 9 by means of

Computing device 15 by successive delivery of control signals to the

Embodiment of Fig. 3 are applied, so that the lens 4 of the focusing optics 3 is moved transversely to the beam direction 70 and the position of the optical axis 40 of the lens 4 relative to the position of the laser beam 7 changes, whereby the point of incidence 71 of the laser beam 7 on the Glass or glass ceramic element 2 is moved.

Although the movement of the lens 4 now allows a very fast and accurate guidance of the laser beam 7. On the other hand, the deflection of the beam but also limited by the maximum possible, determined by the lens edge displacement of the lens relative to the laser beam. In a preferred embodiment of the invention it is therefore provided that the beam guide means of the lens 4 with another

Movement mechanism is combined. Accordingly, in a development of the invention, a movement device 17 is provided with which the glass or glass ceramic element 2 is movable relative to the ultrashort pulse laser 10 during the irradiation of the laser beam 7, so that the point of incidence 71 of the laser beam 7 can be guided along a predetermined path forming the parting line, which is formed by the superimposition of the positions set by means of the lens movement device 9 and the movement device 17. Of course, the movement device 17 and the lens movement device 9 can also be operated intermittently.

In the embodiment shown in Fig. 1, the moving means 17 comprises an xy table. Here, therefore, the deposited on the table glass or glass ceramic element 2 is moved relative to the laser source. Also possible is an embodiment as a portal system, in which the optics for traversing the parting line with a suitable movement means 17 is moved over the glass or glass ceramic element 2. Furthermore, it is also possible to provide both a movement device 17 for moving the glass or glass ceramic element 2 and a further movement device 17 for moving the optics. Regardless of the specific embodiment of the movement device 17, this is according to a preferred Embodiment also as the lens movement device 9 by a

Computer 15 controlled.

Hereinafter, the mechanism of the beam guidance by displacement of the lens 4 will be explained in more detail by way of examples. For this purpose, FIG. 4 shows a simulation of the focused laser beam 7 in the case of a lens arranged centrically, in which case the beam axis or the beam center 73 of the laser beam 7 coincides with the optical axis 4 of the biconvex lens 4. In the example shown in Fig. 5, the lens 4 is displaced by 0.4 millimeters from the beam center. In the simulation shown in FIG. 6, the parallel offset between the beam center 73 and the optical axis 40 is 1.0 millimeter. The resulting from the displacement of the lens 4 transverse to the laser beam 7 beam deflection and thus the displacement of the point of impingement 71 of the laser beam 7 on the glass or glass ceramic element is smaller and not highlighted in the illustrations of Fig. 5 and Fig. 6. In the beam offset of 0.4 millimeters shown in FIG. 5, the impact point 71 shifts by 0.388 millimeters, in the beam offset of 1 millimeter shown in Fig. 6, the displacement of the impact point 71 0.979 millimeters. As can be seen from the simulations, the quality of the focus of the laser beam remains essentially substantially despite the offset, so that the process of filamentation or the plasma formation along the linear focus is unaffected. The maximum beam intensity of the deflected beam is in

Generally at least 85 percent, usually even at least 90 percent or even at least 95% of the maximum intensity of a centrally focused through the lens 4 beam.

In general, according to one embodiment of the invention, it is therefore provided that the impact point 71 on the glass or glass ceramic element 2 is deflected relative to a position with centered lens 4 by a distance which is smaller than the displacement of the lens 4. The reduction factor between the displacement The lens 4 and the displacement of the point of impact 71 is generally advantageous for inserting highly accurate small structures in a glass or glass ceramic element 2, in particular precise openings with a small diameter. The lens is preferably selected according to an embodiment of the invention such that the reduction factor is in the range of 0.25 to 0.95.

Fig. 7 and Fig. 8 show light micrographs of the cross section of a

Glass element with inserted filamentous damage. In the example shown in FIG. 7, the two filamentous damages 6 were produced by moving the lens 4 out of the center position at 400 micrometers. The distance between the two lens positions is thus 800 μιπ The distance between the filamentary damage is in contrast only 575.95 μιη, ie about 600 μιπ Consequently, the deflection of the point of impact by a factor% compared to

Deflection of the lens is lowered. In general, without limitation to the exemplary embodiments, it is provided in a further development of the invention that the impact point 71 is deflected on the glass or glass ceramic element with respect to a position with centered lens by a distance which is smaller than the displacement of the lens 4. As position centered lens is understood to mean a position in which, as shown in FIG. 4, the optical axis 40 of the lens 4 is collinear with the central axis 73 of the laser beam 7.

Fig. 8 shows a glass element 2, in which three filaments, respectively

filamentous damage 6 were inserted. The mean filamentous damage 6 was inserted with centered lens 4, the two outer filamentous damage 6 with different amounts of lens deflections. It can easily be seen from this image that the length of the filament-shaped damage 6 of approximately 2600 μm is essentially unaffected by the deflection. The measured distances are 243.01 μιη between the left and the middle filament, and 324.08 μιη between the right and the middle filament.

FIG. 9 shows in plan view a parting line 12 on a glass or glass ceramic element 2, as it is generated by the laser beam 7 by inserting filamentary damage 6 next to one another. The dividing line 12 has an abrupt change of direction. More generally, the course of the dividing line can be characterized as non-continuously differentiable. In order to ensure the later separability along such a non-continuously differentiable path, acceleration paths of the movement can also be provided, which lead to an increase in the local filament density in the vicinity of the non-differentiable points. In general, without limitation to the illustrated embodiment, therefore, the density of filamentous damage, or the number of these damages per

Length unit along the dividing line 12 can be varied. This variation can in particular, as in the present embodiment, be such that the density in the range of

Change of direction is increased. In particular, after the later separation at the dividing line, an edge with a right angle is to be generated. In a device without inventive lens movement 4, in which the dividing line 12 alone by relative movement of optics and glass or

Glass ceramic element 2 is traversed with a movement device 17, it can come in such abrupt changes of direction to vibrations, so that the dividing line 12 as shown deviates from the intended course 13. In particular, there is a damped oscillation of the parting line 12 around the intended course 13. As already explained, the glass or glass ceramic element 2 can now be moved relative to the movement device 17 with the movement device 17

Ultra short pulse laser 10 are moved during the irradiation of the laser beam 7, so that the point of incidence 71 of the laser beam 7 is guided along a predetermined path forming the parting line 12, which is formed by the superimposition of the set by means of the adjusting device 9 and the movement means 17 positions. This can be done here so that by means of the lens movement device 9, a beam deflection is imposed, which has an opposite oscillation, so that the actual parting line 12 coincides with the intended course 13. In general, without limitation to the specific example shown is provided according to an embodiment of the invention that with the movement of the lens 4 deviations of the impact point 71 of the predetermined separation line 12 by unwanted movement of the glass or glass ceramic element 2 against the ultrashort pulse laser 10, in particular by Vibrations or overshoots are compensated for a change of direction of the movement.

In the illustrated example, the dividing line 12 ends at the edge of the glass or glass ceramic element 2. However, it is also generally possible that a closed dividing line 12 with the point of impact 71 of the laser beam 7 is traversed. Then, in the glass or glass-ceramic element 2, an opening shaped according to the shape of the parting line 12 can be prepared by cutting.

Fig. 10 shows schematically an example of a typical application of the invention.

Provided is a disc-shaped glass or glass ceramic element 2, in which a plurality of dividing lines 12 are inserted in the form of closed curves. Becomes a

Movement mechanism used, as shown in Fig. 3, circular dividing lines 12 are particularly suitable. In three of the parting lines 12, the respective inner part has already been separated, so that openings 20 are obtained. In general, without being limited to the illustrated embodiment, a separation along the parting line 12 may be followed by etching include the inserted filamentous damage 6. Wet or dry chemical etching processes come into consideration. As a result of the damage, the etching process proceeds faster along the filaments than at the surface of the glass, so that widening channels are created in the course of the etching. Finally, the channels generated along the damage 6 connect, so that a gap running along the parting line 12 is created. In a closed dividing line 12, this gap is correspondingly annular and allows the detachment of the inner part.

With the invention smallest radii can be processed at very high speeds. In this case, only the lens is moved relative to the beam and substrate to smallest radii or entire geometries, e.g. Imagine holes of 0.7mm diameter. Larger movements can then proceed again with movement of the substrate. Since the invention enables a very rapid jet movement with very small moving masses, such glass or glass ceramic elements 2 with many small openings 20 can still be produced economically in a short time. According to a preferred embodiment of the invention that runs

Writing the dividing lines 12 generally by moving the glass or glass ceramic element 2 and the focusing optics 3 relative to one another by means of the movement device 17 to a processing position, stopped the movement and then by means of the Linsenbewegungs- device by deflecting the otherwise opposite the glass or glass ceramic element. 2 stationary laser beam 7 the separation line 12 is traversed. Subsequently, the next processing position is approached by means of the movement device 17 and there again a separation line 12 traversed. The steps are repeated until all the dividing lines 12 have been traversed and inserted. In this way, for example, a multiplicity of self-contained separating lines 12 can be produced for producing openings 20, as the example of FIG. 10 shows.

A glass or glass ceramic element 2, as shown in FIG. 10, can also do this with a

Embodiment of the method according to the invention are made, in which with a moving mechanism 17 during the writing of the closed dividing line 12 by deflecting the laser beam 7 with a movement of the lens 4, the glass or

Glass ceramic element 2 is moved relative to the ultrashort pulse laser 10. This is the

Lens movement superimposed on a component of motion, which the of the

Movement device 17 exerted relative movement between ultrashort pulse laser 10 and glass or glass ceramic element 2 compensated, which is therefore opposite to the relative movement. On In this way, it is possible to insert the filaments during movement of the glass or glass ceramic element 2 relative to the ultrashort pulse laser 10. For explanation, Fig. 11 shows an example in the form of velocity-time diagrams. The upper diagram represents the movement in the x-direction, the lower in the y-direction perpendicular to the x-direction.

Shown is only the movement of the point of impact which is caused by the lens movement.

Device 9 is effected. The moving means 17 moves the glass or

Glass ceramic element 2 additionally relative to the ultrashort pulse laser 10 at a constant speed vo in the x direction. At time ti, the registration of

filamentous damage 6 along a closed path and ends at time t5. The predetermined dividing line 12 in this example is different from that shown in Fig. 10, not circular, but square. In the time interval ti - 1.2, the laser beam performs a movement counter to the direction of movement of the glass or glass ceramic element 2. The point of impact thus moves counter to the direction that this is impressed by the movement device 17. In the interval this movement is compensated. The impact point 71 thus remains stationary in the x direction. At the same time, the lens movement device 9 moves the laser beam perpendicular to the direction of movement of the movement device 17. Subsequently, in the interval t.3 - 1 _4, a slower movement occurs colinearly to the movement direction of the movement device 17. At the conclusion of the writing, the point of impact is returned to the y direction, wherein in the x-direction again the movement of the moving means 17 is being compensated. At the end of this interval the enrolled path closes.

By compensating for the continuous movement of the glass or

Glass ceramic element 2 has also moved the lens movement device 9 ever further in the x direction. The lens movement device 9 is therefore finally moved again in the interval ts - 1.6 to its original position. Now, another dividing line

be enrolled. From this example, it has become clear that for a

Compensation of the movement of the movement device 17 and a simultaneous writing of a parting line is generally advantageous if the lens movement device 9 is set up to be able to move the impact point 71 of the laser beam 7 on the glass or glass ceramic element 2 faster than the relative speed of the glass. or glass ceramic element 2 with respect to the ultrashort pulse laser 10, so that the impact point 71 can be moved counter to the movement of the glass or glass ceramic element 2 exerted by the movement device 17. Both above-described embodiments, so on the one hand, the alternating approaching movement positions and traversing dividing lines and on the other hand, a movement of the movement mechanism 17 superimposed movement of the laser beam on the lens movement device is one thing in common: In the periods between the departure of the dividing lines 12, it is for the production of separate openings makes sense to irradiate no pulses or bursts. The operation of the ultrashort pulse laser can thus be general, without limitation to the two aforementioned examples

position-dependent. Alternatively or additionally, the laser emission may be based on the speed of the movement. According to one embodiment of the invention, it is therefore provided that the laser emission is synchronized with the position of the impact point 71 or its speed. The synchronization can be controlled by the appropriately configured computing device 15. Even with changes in direction, such as in curved paths or corners, as in the example of FIG. 9, a variable density of filaments along the contour is advantageous, as well as when approaching start and end points of a contour.

If the laser is switched off, strictly speaking there is no impact point 71 of the laser light. In this case, the imaginary impingement that would result when the laser is turned on, to understand. The synchronization of the laser emission with the movement or position of the impact point further includes not only turning on or off the laser emission. Rather, other laser parameters, such as the repetition rate of the bursts, their energy or the number of pulses of a burst can be synchronized. Another example is the insertion of short auxiliary cuts, in which the impact point is moved back to a point after the departure of the dividing line, from which the path is continued. Here the laser emission can be switched off when driving back.

The invention makes it possible to produce many small openings in disc-shaped glass or glass ceramic elements 2 quickly and economically. A correspondingly machined glass or glass ceramic element is suitable, inter alia, for applications in microfluidics or in microelectronics. Thus, with the invention, a so-called interposer made of glass can be produced. This is an insulating substrate through which

Through holes are passed. The conductors passed through can then be connected on the opposite side with contact surfaces. The interposer thus serves, for example, as a support and for the redistribution of contacts of a chip. It will be apparent to those skilled in the art that the invention is not limited to the specific ones

Embodiments is limited, but can be modified in many ways within the scope of the subject of the following claims. Also, the embodiments may be combined. Thus, a lens movement device 9 can be provided, which comprises both an arrangement according to FIG. 2, as well as according to FIG. 3. This can be offered, for example, to realize an embodiment similar to FIG. 11. Thus, a first, linear lens movement device 9 can be provided, which compensates for the movement of the glass or glass ceramic element 2. With the eccentric rotation according to the embodiment shown in Fig. 3 then a circular dividing line is traversed.

Of course, not only self-contained dividing lines 12 can be made. Auxiliary cuts for special geometries or outer contours are also possible, in which the simultaneous movement of the lens and the material makes it possible to produce filaments along a predetermined path. An example of this is shown in Fig. 12. The glass or

Glass ceramic element 2 has an outer contour 24 which is substantially circular. The outer contour 24 additionally has a fine structure in the form of teeth 25. Such a contour can be produced by traversing the outer contour by means of the movement device 17, while by means of the lens movement device 9 a deflection of the laser beam is superimposed, which imprints the fine structure on the parting line. In general, without being limited to the specific example, therefore, a dividing line can be produced by superimposing a deflection of the laser beam 7 generated by the lens movement on a relative movement between glass or glass ceramic element 2 and ultrashort pulse laser.

For the processing according to the invention a plurality of glasses are in principle suitable. Preference is given to lithium aluminosilicate glasses, lithium aluminosilicate glass ceramics, soda lime glasses, borosilicate glasses, aluminosilicate glasses and alkali metal aluminosilicate glasses.

For example, the substrate may be a lithium aluminosilicate glass having the following composition (in weight%):

Optionally, coloring oxides may be added, such as Nd 2Ü 3, Fe 2Ü 3, CoO, NiO, V ₂ O 5, MnO ₂ , TioO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2% by weight As ₂ O ₃ , Sb ₂ 0 ₃ , SnO ₂ , S0 ₃ , Cl, F and / or CeO2 may be added as refining agents, and 0-5% by weight of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the Total amount of the total composition is 100% by weight.

Specifically, a material of the above composition may have a thermal expansion coefficient between 3-10 ⁶ K ¹ and ^K-1 6-10- ⁶ or between 3.3-10- ⁶ K ¹ and K 5.7-10- ^6.

The lithium aluminosilicate glass preferably has the following composition (in% by weight):

Optionally, coloring oxides may be added, such as Nd 2Ü 3, Fe 2Ü 3, CoO, NiO, V2O5, MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2% by weight of As ₂ O ₃ , Sb ₂ 0 ₃ , Sn0 ₂ , S0 ₃ , Cl, F and / or CeO 2 may be added as refining agents, and 0-5% by weight of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the aforementioned composition has a thermal expansion coefficient between 4.5-10 ^"6 K- ¹ and 6-10 ⁶ K- ¹ or between ^{4J6-10" 6} K- ¹ and 5,7-10- ⁶ K- ¹ exhibit.

The lithium aluminosilicate glass more preferably has the following

Composition (in% by weight) on:

Optionally, coloring oxides may be added, such as Nd 2Ü 3, Fe 2Ü 3, CoO, NiO, V2O5, MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2% by weight of As ₂ O ₃ , Sb ₂ 0 ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO 2 may be added as refining agents and may be added as refining agents, and 0-5% by weight of rare earth oxides may also be added to impart magnetic, photonic or optical functions to the refining agents Glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the above composition may have a thermal expansion coefficient between 4-10 ⁶ K- ¹ and 8-10 ⁶ K- ^1, or between 5 ^■ ⁶ 10 ^K-1 and K 7-10- ⁶ ^'1. It can also be a corresponding glass ceramic may be provided which has a thermal expansion coefficient between -0.068-10- ⁶ K- ¹ and 1, 16-10 ⁶ K- ¹ .

In another example, the substrate may be a soda lime glass having the following composition (in weight percent):

Optionally, coloring oxides may be added, such as Nd 2Ü 3, Fe 2Ü 3, CoO, NiO, V2O5, MnO ₂ , TiO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2% by weight of As ₂ O ₃ , Sb ₂ 0 ₃ , Sn0 ₂ , S0 ₃ , Cl, F and / or CeO 2 may be added as refining agents, and 0-5% by weight of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight. Specifically, a material of the aforementioned composition may * 10 have a coefficient of thermal expansion between 5.25 to 10 ⁶ K ¹ and 10 ⁶ K- ¹ or between 5.53-10- ⁶ K ¹ and K 9.77-10- ^6.

The soda-lime glass preferably has the following composition (in% by weight):

Specifically, a material of the above composition may have a thermal expansion coefficient between 4.5-10- ⁶ K- ¹ and 11 -10 ⁶ ^K-1 or between 4.94 to 10 ⁶ K ¹ and K 10.25-10- ^6.

The soda lime glass more preferably has the following composition (in weight percent):

Composition (% by weight)

Li ₂ O + Na ₂ O + K ₂ O 5-25

MgO + CaO + SrO + BaO + ZnO 5-20

Ti0 ₂ + Ζ1Ό2 0-5

P2O5 0-2

Specifically, a material of the above composition may have a thermal expansion coefficient between 4.5-10- ⁶ K- ¹ and 11 -10 ⁶ ^K-1, or between 4.93-10- ⁶ K- ¹ and 10.25 -10- ⁶ K- ¹ ,

In another example, the substrate is a borosilicate glass having the following composition (in weight percent):

Optionally, coloring oxides may be added, such as Nd 2 O 3, Fe 2 O 3, CoO,

NiO, V2O5, Mn0 ₂ , T1O2, CuO, Ce0 ₂ , Cr ₂ 0 ₃ , 0-2 wt% As ₂ 0 ₃ , Sb ₂ 0 ₃ , Sn0 ₂ , S0 ₃ , Cl, F and / or CeO 2 may be added as refining agents, and 0-5% by weight of rare earth oxides may also be added to provide magnetic, photonic or optical functions to introduce the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the above composition may have a thermal expansion coefficient between 2,75-10- ⁶ K- ¹ and 10-10 ⁶ K ¹ or K ⁶ 3.0-10- between ¹ and 9.01 -10 ⁶ K.

The borosilicate glass more preferably has the following composition (in weight percent):

Optionally, coloring oxides may be added, such as Nd 2 O 3, Fe 2 O 3, CoO,

NiO, V2O5, Mn0 ₂ , T1O2, CuO, Ce0 ₂ , Cr ₂ 0 ₃ , 0-2 wt% As ₂ 0 ₃ , Sb ₂ 0 ₃ , Sn0 ₂ , S0 ₃ , Cl, F and / or CeO 2 may be added as a refining agent, and 0-5% by weight of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the above composition may have a thermal expansion coefficient between 2.5-10- ⁶ K- ¹ and 8-10 ⁶ K- ¹ or between 2.8-10- ⁶ K ¹ and K 7.5-10- ^6.

Composition (% by weight)

S1O2 63-83

In particular, a material of the aforementioned composition may have a coefficient of thermal expansion between 3.0-10 ^"6 K ¹ and 8-10 ⁶ K ¹ or between 3.18-10 ⁶ K ¹ and 7.5-10 ⁶ K ^-1 .

In another example, the substrate is an alkali metal aluminosilicate glass having the following composition (in weight percent):

Optionally, coloring oxides may be added, such as Nd 2 O 3, Fe 2 O 3, CoO,

NiO, V ₂ O 5, MnO ₂ , TIO ₂ , CuO, CeO ₂ , Cr ₂ O ₃ , 0-2 wt% As ₂ O ₃ , Sb ₂ O ₃ , SnO ₂ , SO ₃ , Cl, F and / or CeO 2 as refining agent, and 0 to 5% by weight of rare earth oxides may also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight.

Specifically, a material of the above composition may have a thermal expansion coefficient between 3.0-10- ⁶ K- ¹ and 11 -10 ⁶ ^K-1, or between 3.3-10- ⁶ K ¹ and K ⁶ 10-10.

The alkali metal aluminosilicate glass more preferably has the following

Composition (in% by weight) on:

Specifically, a material of the above composition may have a thermal expansion coefficient between 3J5-10- ⁶ K- ¹ and 11 -10 ⁶ ^K-1, or between 3.99-10 ^"6 K- ¹ and 10,22-10- ⁶ K- ¹ ,

The alkali aluminosilicate glass more preferably has the following composition

(in% by weight) on:

Specifically, a material of the above composition may have a thermal expansion coefficient between 4.0-10 ^"6 K- ¹ and 10-10 ⁶ K- ^1, or between ^{4.5-10" 6} K- ¹ and 9.08-10- ⁶ K- ,

In another example, the substrate is a low aluminosilicate glass

Alkali content with the following composition (in% by weight):

Optionally, coloring oxides may be added, such as Nd 2 O 3, Fe 2 O 3, CoO,

NiO, V2O5, Mn0 ₂ , T1O2, CuO, Ce0 ₂ , Cr ₂ 0 ₃ , 0-2 wt% As ₂ 0 ₃ , Sb ₂ 0 ₃ , Sn0 ₂ , S0 ₃ , Cl, F and / or CeO 2 can be added as a refining agent, and 0-5% by weight of rare earth oxides can also be added to introduce magnetic, photonic or optical functions into the glass sheet or plate, and the total amount of the total composition is 100% by weight. %.

Specifically, a material of the aforementioned composition has a thermal expansion coefficient between 2.5-10 ^"6 K- ¹ and 7-10 ⁶ K- ¹ or between 2.8 to ^{10" 6} K ¹ and K 6,5-10- ⁶ - ¹ have.

The low alkali aluminosilicate glass more preferably has the following composition (in weight percent):

Especially in connection with the small and smallest structures which can be produced by the invention, thin glass or glass ceramic elements are furthermore particularly suitable. Generally, it is provided according to an embodiment of the invention that the glass or

Glass ceramic element 2 a thickness of less than 3000 μιη, preferably of less than 2500 μιη, preferably of less than 1500 μιη, more preferably of less than 500 μιη and preferably of at least 3 μιη, preferably of at least 50 μιη, more preferably of at least 150 μπι. Preferred thicknesses are 5, 10, 15, 25, 30, 35, 50, 55, 70, 80, 100, 130, 145, 160, 190, 210 or 280 μιπ In particular, the glass or glass ceramic element 2 as thin glass ribbon or as Glass film to be formed. LIST OF REFERENCE NUMBERS

Device for laser processing 1

Glass or glass ceramic element 2

Focusing optics 3

Lens 4 filamentous damage 6

Laser beam 7

Laser pulse 8

Lens movement device 9

Ultrashort pulse laser 10

Dividing line 12

Intended course of 12 13

Computing device 15

Moving device 17

Opening in 2 20

Surface of 2 22

External contour of 2 24

Tooth 25 optical element 30

Lens holder 33

Optical axis of 4 40

Rotation axis of 33 43

Focus of 4 41

Beam direction 70

Impact point of the laser beam on 2 71

Beam center 73

Actuator 90, 91

Engine 92

Claims

claims

1. Device (1) for laser processing of a glass or glass ceramic element (2), comprising:

an ultrashort pulse laser (10),

- Focusing optics (3) to concentrate the laser beam (7) of the ultrashort pulse laser (10) to a long focus and filament-shaped damage (6) within the glass or the glass-ceramic to create by means of laser or glass-ceramic focused laser pulses within the glass or the glass ceramic the focusing optics (3) comprises a lens (4) arranged in the beam path of the ultrashort pulse laser (10), and wherein a lens movement device (9) is provided by means of which the lens (4) is movable transversely to the beam direction (70) the position of the optical axis (40) of the lens (4) relative to the position of the laser beam (7) is variable in order to deflect the laser beam (7) by means of a change in position of the lens (4) relative to the laser beam (7) and thus the point of impact (71) of the laser beam on the glass or glass ceramic element (2) to move, so that by movement of the lens (4) of the elongated focus of the laser beam (7) along a parting line (12) forming vorg level path is feasible.

2. Device (1) according to the preceding claim, wherein a computing device

(15) is provided, which is adapted to deliver successive control signals to the lens movement device (9), so that by the

Lens movement means (9) is guided movement of the lens (4) transversely to the beam direction of the point of impact (71) of the laser beam (7) along a predetermined line forming a parting line (12).

3. Device according to the preceding claim, characterized in that the computing means (15) is arranged. The laser emission synchronized with the position of the point of impingement (71) of the laser beam (7) on the glass or

To control glass ceramic element or the velocity of the impact point (71). Device (1) according to one of the preceding claims, characterized by a movement device (17), with which the glass or glass ceramic element (2) is movable relative to the ultrashort pulse laser (10) during the irradiation of the laser beam (7), so that the impact point ( 71) of the laser beam (7) along a parting line (12) forming the predetermined path is feasible, by the

Superposition of the means of the lens movement device (9) and the

Movement device (17) is set positions.

Device according to one of the preceding claims, characterized in that the lens movement device (9) has two adjusting devices (91, 92) for movement along two non-parallel directions transverse to the beam direction (70) of the laser beam (7) or a device (93) eccentric rotation of the lens (4).

Device according to one of the preceding claims, characterized in that the ratio of the beam diameter of the laser beam (7) to the diameter of the aperture of the lens

(4) at least 0.25, preferably at least 0,

5, more preferably at least 2/3 and preferably less than 2, preferably less than 1.

Method (1) for laser processing of a glass or glass ceramic element (2), in which

- With a focusing optics (3) of the laser beam (7) of an ultrashort pulse laser (10) is concentrated to a long focus in the glass or glass ceramic element (2), wherein

- A pulse power of the ultrashort pulse laser (10) is set, which is sufficient to filament-shaped damage by the focused in glass or glass ceramic laser pulses

(6) within the glass or the glass ceramic, wherein the focusing optics (3) comprises a lens (4) arranged in the beam path of the ultrashort pulse laser (10), and wherein

by means of a lens movement device (9) during operation of the

Ultracurzpulslasers (10) the lens (4) is moved transversely to the beam direction (70), so that the position of the optical axis (40) of the lens (4) relative to the position of the Laser beam (7) is changed, and the movement of the lens (4) relative to

Laser beam (7) the laser beam

(7) deflects and thus the impact point (71) of the laser beam on the glass or glass ceramic element (2) shifts, and wherein the point of impact (71) is guided with movement of the lens (4) along a predetermined line forming a parting line (12) ,

8. The method according to the preceding claim, wherein means of a

Computing means (15) the lens movement means (9) is driven by scuzessive delivery of control signals, wherein in response to the successively delivered control signals, the lens (4) of the focusing optics (3) is moved transversely to the beam direction (70), so that the Position of the optical axis (40) of the lens (4) relative to the position of the laser beam (7) changed, whereby the point of incidence (71) of the laser beam (7) on the glass or glass ceramic element (2) is moved.

9. The method according to the preceding claim, wherein with a

Movement device (17) the glass or glass ceramic element (2) relative to the ultrashort pulse laser (10) during the irradiation of the laser beam (7) is moved so that the point of incidence (71) of the laser beam (7) along a dividing line (12) forming predetermined Path is guided, which is formed by the superimposition of the adjusting means (9) and the movement means (17) positions.

10. The method according to the preceding claim, characterized in that with the movement of the lens (4) deviations of the impact point (71) of the predetermined separation line (12) by unwanted movement of the glass or glass ceramic element (2) relative to the ultrashort pulse laser (10) , Be compensated in particular by vibrations or overshoot in a change of direction of the movement.

11. The method according to one of the two preceding claims, characterized

in that the lens movement device (9) determines the impact point (71). of the laser beam (7) moves against the motion of the glass or glass ceramic element (2) exerted by the movement device (17).

12. The method according to one of the two preceding claims, characterized

in that the lens movement device (9) moves the point of impact (71) of the laser beam (7) on the glass or glass ceramic element (2) faster than the relative speed of the glass or glass ceramic element (2) relative to the ultrashort pulse laser (10 ).

13. The method according to any one of the preceding claims, characterized in that the impact point (71) at a speed of more than 0.5 meters per second, preferably at a speed of up to 1 meter per second over the glass or glass ceramic element is moved.

14. The method according to the preceding claim, characterized in that a part of the glass or glass ceramic element (2) is separated by severing along the parting line (12).

15. The method according to any one of the preceding claims, characterized in that a closed dividing line (12) with the impact point (71) of the laser beam (7) traversed and then in the glass or glass ceramic part (2) corresponding to the shape of the dividing line (12) shaped opening (20) is produced.

16. The method according to the preceding claim, characterized in that produced by the movement of the lens separating lines (12) and corresponding to the shape of the parting line (12) openings (20) having a diameter smaller than 1 millimeter in the glass or glass ceramic element (2) become.

17. The method according to any one of the preceding Anprüche, characterized in that the movement of the lens (4) a separating line (12) is traversed, which has a radius of curvature in the range of 0.05 mm to 1 mm.

18. The method according to any one of the preceding claims, characterized in that a separation on the parting line (12) comprises the etching along the inserted filamentary damage (6).

19. Method according to one of the preceding claims, characterized in that the impact point (71) on the glass or glass ceramic element (2) is deflected with respect to a position with centered lens (4) by a distance which is smaller than the displacement of the Lens (4).

20. The method according to any one of the preceding claims, characterized in that a glass or glass ceramic element (2) of lithium aluminosilicate glass, lithium aluminosilicate glass ceramic, soda lime glass, borosilicate glass,

Aluminosilicate glass or alkali metal aluminosilicate glass is processed.

21. Method according to one of the preceding claims, characterized in that the number of filament-shaped damages (6) per unit length is varied along the dividing line (12), in particular, wherein the number of filament-shaped damages (6) per unit length in the region of a change of direction Dividing line (12) is increased.

22. The method according to any one of the preceding claims, characterized in that the Uitrakurzpulslaser is operated with one or more of the following parameters:

(i) the power of the ultrashort pulse laser is preferably in a range of 20 to 300 watts;

(ii) the pulse energy of a burst is more than 400 microjoules,

(iii) the repetition rate of the bursts is in the range of 15 MHz to 90 MHz, preferably in the range of 20 MHz to 85 MHz,

(iv) the number of pulses in the burst is in the range of 1 to 10 pulses.

23. The method according to any one of the preceding claims, characterized by

following steps: (I) moving glass or glass ceramic element (2) and focusing optics (3) relative to one another by means of a movement device (17) to a

Processing position,

(ii) stopping the movement,

(iii) by means of the lens movement device (9) by deflection of the laser beam

(7) tracing a dividing line (12),

(iv) by means of the movement device (17) approaching a next

Approached processing position and there again departing a parting line (12).