WO2018111227A1

WO2018111227A1 - Systems, apparatuses, and methods for performing reticle inspections

Info

Publication number: WO2018111227A1
Application number: PCT/US2016/066237
Authority: WO
Inventors: Sujay A. PHADKE
Original assignee: Intel Corporation
Priority date: 2016-12-12
Filing date: 2016-12-12
Publication date: 2018-06-21

Abstract

Embodiments provide systems, methods, and computer-readable media for performing reticle inspections. An inspection apparatus may include a frame coupled with panels to form a diffuse light environment (DLE). Surfaces of the panels that face the DLE may comprise a diffusively reflective material to reflect light within the DLE in a diffuse manner. The inspection apparatus may include a light source and an image capture device in the DLE. The image capture device subassembly may capture images of a SMIF pod inside the DLE. A computer device may obtain captured images from the image capture device and control adjustment of the position and orientation of the SMIF pod and the image capture device. Other embodiments may be disclosed.

Description

SYSTEMS, APPARATUSES, AND METHODS FOR PERFORMING RETICLE INSPECTIONS

Field

Example embodiments generally relate to the field of semiconductors and more particularly relate to methods, systems and apparatuses for viewing reticles for reticle inspections.

Background

A reticle is a photomask with holes or transparencies that allow light to shine through in a defined pattern. During semiconductor manufacturing, the pattern may be transferred to a silicon wafer by exposing the wafer to light through the reticle. Thereafter, an integrated circuit may be fabricated on the patterned wafer. Because reticles are used in wafer processing, they usually require protection from contamination. In order to prevent contamination during semiconductor manufacturing processes, a reticle may be placed inside a Standard Mechanical Interface (SMIF) pod. Inspection of the reticle may be required when the SMIF pod is moved to a new processing station and/or between processing tools. Verification of reticle parameters usually needs to take place to ensure that the reticle has been loaded to the correct processing tool and/or that the reticle has been placed in a proper orientation for a particular process.

Currently, reticle inspection and verification processes are manual. Manual inspection requires a tool operator to visually inspect reticle parameters using, for example, a magnifying glass. This may also include manually handling the SMIF pod to re-orient the reticle, if necessary- In some cases, operators may have to open the SMIF pod to visually inspect the reticle parameters, which may expose the reticle and/or wafer to particulate contamination. Thus, manual reticle inspection may significantly impact reticle quality, which may impact manufacturing yield.

In addition, manual reticle inspection may be difficult to perform because SMIF pod windows are typically used for photolithographic purposes. In many cases, SMIF pod windows may only allow light with longer wavelengths to pass through and may be highly reflective of light with shorter wavelengths. Moreover, the reticles themselves may have highly reflective surfaces that may cause stray reflections to appear during manual reticle inspection. These stray reflections off the top of SMIF pod window and the reticle may prevent the operator from properly identifying the reticle parameters. Brief Description of the Drawings

FIG. 1 illustrates an outer view of an inspection apparatus, in accordance with various embodiments.

FIG. 2 illustrates an internal view of the inspection apparatus, in accordance with various embodiments.

FIG. 3 illustrates an arrangement in which an inspection apparatus may operate, in accordance with various embodiments.

FIGS. 4a-4b, 5a-5d, 6a-6b, 7, and 8 illustrate various example images used for reticle inspection, in accordance with various embodiments.

FIG. 9 illustrates a computer device used and/or built in accordance with various embodiments.

Detailed Description

Described herein are systems, methods, and computer-readable media for inspecting reticles while reducing the likelihood of reticle contamination during the inspection process. In various embodiments, an inspection apparatus may include a diffuse light environment (DLE) or a DLE optical cavity (DLEOC) that provides diffuse lighting in an area surrounding a Standard Mechanical Interface (SMIF) pod. The SMIF pod may contain a reticle. The diffuse lighting may negate stray reflections from the SMIF pod window and reticle surfaces. A light source inside the DLE/DLEOC may illuminate the SMIF pod placed inside the DLE/DLEOC. An image capture device inside the DLE/DLEOC may capture images of the reticle through a window of the SMIF pod. These images may be used to inspect various reticle quality and orientation parameters.

Previous efforts to improve reticle inspection have focused on ascertaining proper reticle orientation inside SMIF pods. For example, one reticle inspection technique includes opening a pod dome and using lasers to check an angle of inclination of a reticle in a seated position. Although this technique characterizes plate seating in a SMIF pod, this technique does not check for any reticle parameters, such as titles, serial numbers, identification marks, orientation marks, barcodes, bevel edges, glass edges, etc. to verify that the proper reticle is placed inside the SMIF pod and placed in a proper orientation. Furthermore, such techniques usually require the pod to be opened during inspection, which as discussed previously, can lead to particulate contamination. Other efforts to improve reticle inspection have focused on imaging reticles to check for the dimensions of various features on a reticle. The dimensions indicate the pattern of the reticle. However, none of these imaging processes check for reticle parameters required to ensure that the correct reticle is used during processing. Furthermore, these imaging processes typically require opening the SMIF pod, removing the reticle from the SMIF pod using a handling system, loading the reticle into an inspection tool, and then transferring the reticle back to SMIF pod post-inspection. Thus, as discussed previously, these processes may lead to reticle contamination during the inspection process.

The embodiments allow reticle inspection to take place while a reticle is inside a closed or sealed SMIF pod, which would otherwise be un-viewable using conventional reticle inspection techniques. In addition, the embodiments provide in-situ, in-process reticle and product inspection with significantly reduced inspection time. Furthermore, because the embodiments provide reticle inspection to take place while a reticle is inside a closed SMIF pod, the embodiments also provide ergonomic benefits to semiconductor tool operators.

In the following description, various aspects of the illustrative implementations will be described using terms commonly employed by those skilled in the art to convey the substance of their work to others skilled in the art. However, it will be apparent to those skilled in the art that the embodiments described herein may be practiced with only some of the described aspects. For purposes of explanation, specific numbers, materials and configurations are set forth in order to provide a thorough understanding of the illustrative implementations. However, it will be apparent to one skilled in the art that the described embodiments may be practiced without the specific details. In other instances, well-known features are omitted or simplified in order not to obscure the illustrative implementations.

Various operations will be described as multiple discrete operations, in turn, in a manner that is most helpful in understanding the embodiments described herein, however, the order of description should not be construed to imply that these operations are necessarily order dependent. In particular, these operations need not be performed in the order of presentation.

The terms "over," "under," "between," and "on" as used herein refer to a relative position of one material layer or component with respect to other layers or components. For example, one layer disposed over or under another layer may be directly in contact with the other layer or may have one or more intervening layers. Moreover, one layer disposed between two layers may be directly in contact with the two layers or may have one or more intervening layers. In contrast, a first layer "on" a second layer is in direct contact with that second layer. Similarly, unless explicitly stated otherwise, one feature disposed between two features may be in direct contact with the adjacent features or may have one or more intervening layers.

FIG. 1 illustrates an outer view of an inspection apparatus 100, in accordance with various embodiments. The inspection apparatus 100 may include frame 105 (also referred to as "chassis 105") and panels 110 (including panel 110 A, panel HOB, panel HOC, panel HOD, and panel HOE, which are collectively referred to as "panels 110"). Panels 110 A, HOB, HOC, and HOD may be referred to as "side panels 110" and panel HOE may be referred to as a "top panel 110." Although not shown by FIG. 1, the inspection apparatus may include additional side panels 110 and a bottom panel 110, each of which may extend into the page.

In embodiments, the frame 105 and/or panels 110 may be made of a metal material, for example, extruded aluminum material, an aluminum composite material, stainless steel, and the like. In embodiments, the frame 105 and/or panels 110 may be made of a polymer material, for example, polyethylene, carbon fiber, and the like. In embodiments, the frame 105 and/or panels 110 may be made of a metal-polymer composite material, for example, an aluminum-polyethylene material and the like. In such embodiments, the composite material may comprise a sheet of polyethylene that is sandwiched between sheets of aluminum, where the outer aluminum sheets may be anodized and/or coated with a material that provides diffuse reflectivity to the surface of panels 110 such that specular reflection is reduced inside the inspection apparatus 100. In some embodiments, the frame 105 and/or panels 110 may be made of a ceramic material, and/or any other suitable clean- room compatible material with diffusely reflective surfaces. In some embodiments, the frame 105 and/or panels 110 may be made of a glass material with facets or grain boundaries that scatter light in a diffuse manner.

As shown by FIG. 1, the panel HOB may include hinges 115 and handle 120. As shown, a first portion of each hinge 115 may be connected to the panel HOB and a second portion of each hinge 115 may be connected to the frame 105. The hinges 115 may allow panel HOB to act as a door to an interior of the inspection apparatus 100, for example, by swinging away from the interior of the inspection apparatus 100. The handle 120 may allow an operator to open the door (i.e., panel HOB) to gain access to the interior of the inspection apparatus 100.

The interior of the inspection apparatus 100 may be referred to as a Diffuse Light Environment (DLE) or a DLE Optical Cavity (DLEOC). In other embodiments, a sliding mechanism maybe used instead of hinges 115. In addition, panels HOD and 110E may include holes 125A and 125B (collectively referred to as "holes 125" or "slots 125"). The holes 125 may be cut out of the panels HOD and 110E to provide airflow to the DLE/DLEOC. Additionally, although not labeled in FIG. 1, the other panels 110 may also include one or more holes 125. The inspection apparatus 100 may also include emergency stop button 130, which is discussed in more detail with regard to FIGS. 2-3.

FIG. 2 illustrates an internal view of the inspection apparatus 100, in accordance with various embodiments. The interior of the inspection apparatus 100 may include a DLEOC 200, a SMIF pod 205 that may include a reticle (not shown), an image capture device subassembly (ICDS) 210, and electronics subassembly (ES) 225, and a light source subassembly (LSS) 250.

DLEOC 200 may be an enclosure or cavity formed by the panels 110 of the inspection apparatus 100 that holds the SMIF pod 205 as well as the other components of the inspection apparatus 100. In various embodiments, one or more diffusively reflective materials may be applied to the inner surfaces of panels 110 to provide the DLE of the DLEOC 200. The term "inner surfaces" may refer to a surface of the panels 110 that face the interior of the inspection apparatus 100. For example, in embodiments, the panels 110 may comprise a base material, such as a metal, and the inner surfaces of the base material may be covered with a polyethylene or polycrystalline material. In some embodiments, the material(s) applied to the inner surfaces of the panels 110 may be a paint, coating, film, laminate, glazing, etc. In such embodiments, the paint, coating, film, laminate, glazing, etc. may be granular or include granules that reflect light in a diffuse manner.

The DLEOC 200 may be formed by the uniform diffusively reflective inner surfaces of the panels 110, a lower surface of the light source platform 260 (discussed infra), and a top surface of the electronics subassembly housing (ESH) 228 (discussed infra). In embodiments, the physical dimensions of the DLEOC 200 may have a width of approximately 680 millimeters (mm) wide, a depth of approximately 680mm deep, and a height of 515mm. In other embodiments, the DLEOC 200 may be formed from enclosures with smaller or larger dimensions based on design choice and/or reticle inspection parameters. To create the DLEOC 200, the diffusively reflective inner surfaces of the panels 110 may reflect light in such a way that incident rays are reflected at many angles rather than at just one angle, as in the case of specular reflection. The DLEOC 200 created by the diffusively reflective surfaces of the various components of inspection apparatus 100 may allow the reticle to be inspected quickly through the closed SMIF pod 205. Due to the diffuse reflection of light in the DLEOC 200, reticle quality and orientation parameters may be determined in less time than conventional reticle inspection systems without the need to open the SMIF pod 205, which may cause particulate contamination of the reticle.

The SMIF pod 205 may be any device that is used to isolate a reticle and/or wafer from contamination by providing a mini-environment with controlled airflow. The SMIF pod 205 may include a transparent window 206 for reticle viewing. The transparent window 206 may be transmissive at wavelengths greater than or equal to 530 nanometers (nm) where the transmissivity is greater at longer wavelengths. Although the example embodiments discussed using a SMIF pod, the example embodiments may be applicable to other devices, such as Front Opening Unified Pods (FOUPs) and the like.

The ICDS 210 may include an image capture device 215 and a mount system 220 coupled to the image capture device 215. The image capture device 215 may be any device capable of capturing one or more images or videos, and communicating the one or more images to another device, such as a computer device or display device. In embodiments, image capture device 215 may be an optical camera including an optical lens and one or more digital image sensors, such as a charge-coupled device (CCD), a complementary metal- oxide-semiconductor (CMOS) sensor chip, active-pixel sensor (APS), and/or the like. In some embodiments, image capture device 215 may include a lens-less image capture mechanism, which may include an aperture assembly and a sensor. The aperture assembly may include a two dimensional array of aperture elements, and the sensor may be a single detection element, such as a single photoconductive cell. Each aperture element together with the sensor may define a cone of a bundle of rays, and the cones of the aperture assembly define the pixels of an image.

In embodiments, the image capture device 215 may also include one or more processors (e.g., processor 1204 shown and described with regard to FIG. 9) and one or more memory devices (e.g., on-die memory 1206, volatile memory 1210, non-volatile memory 1212, etc., shown and described with regard to FIG. 9). The processors may be configured to execute instructions stored in the one or more memory devices to enable various applications running on the image capture device 215. Such applications may allow the image capture device 215 to perform digital or mechanical zoom-in and zoom-out operations, capture images, record/store captured images, and/or process the captured images, for example, by encoding and/or compressing a source signal and/or captured video using any suitable compression algorithm. The image capture device 215 may capture various images of the reticle, or portions thereof, inside the SMIF pod 205. The captured images may depict one or more reticle parameters that are used for reticle inspection. The image capture device 215 may also include one or more communications modules (e.g., communication chip(s) 1208 shown and described with regard to FIG. 9), which may allow image capture device 215 to send the captured images to a remote computer device via a wired or wireless connection. Some of the one or more communications modules may operate in conjunction with corresponding network interface and/or a wireless transmitter/receiver and/or transceiver (not shown) that is configured to operate in accordance with one or more wired and/or wireless standards.

The mount system 220 may be capable of holding the image capture device 215 in a plurality of positions and/or orientations. Mount system 220 may include any suitable mechanisms, including mechanical and electrical, capable of holding the image capture device 215 in a plurality of positions and orientations. Such mechanisms may include a frame or support and a head mount connected with the frame/support. The frame/support may include one or more mechanisms that allow the position of image capture device 215 to be adjusted vertically and/or horizontally (e.g., sliders, a telescoping post, etc.). The head mount may be a mechanism that provides orientation control of the image capture device 215. The head mount may include a pan-and-tilt mount, a ball-and-socket mount, gyroscopic mount, geared mount, and/or the like. The frame/support and/or head mount may be made of the same or similar materials discussed with regard to frame 105 and/or panels 110.

In some embodiments, the ICDS 210 may also include one or more electromechanical devices (e.g., stepper motors and the like) and a motor controller (not shown). The mount motor controller may adjust the position (e.g., along the frame/support) and orientation (e.g., the pan and tilt) of the image capture device 215 by controlling the electromechanical devices(s). In embodiments, the mount motor controller may be communicatively coupled to a remote computer device, which may provide one or more commands to the mount motor controller to control the position and orientation of the image capture device 215.

The ES 225 may include a platform stepper motor 230, a platform motor controller 235, emergency stop button 130, and power supply 238. The power supply 238 may supply power and/or convert power (e.g., 110 volts (V) alternating current (AC) to 24V direct current (DC)) to the platform motor controller 235, as well as the other components of the inspection apparatus 100. The platform stepper motor 230 may include a stepper motor shaft (not shown) that is coupled with a first end of pin 240. A second end of the pin 240 (also referred to as "hub 240") may be coupled with a bottom portion of the SMIF pod platform 245. The hub 240 may be attached to the stepper motor shaft and the SMIF pod platform 245 using screws or some other suitable fastening or coupling mechanism. In some embodiments, the SMIF pod platform 245 may have a width that is equal or substantially similar to the width of SMIF pod 205. The SMIF pod platform 245 may act as mounting stage for the SMIF pod 205, and in various embodiments, may house a plurality of standoff pins (e.g., three or more) that hold the loaded SMIF pod 205 by contacting it at only corresponding points on the bottom surface of the SMIF pod 205. The SMIF pod platform 245 may also be referred to as a SMIF pod rotation stage (SPRS) since it can be rotated in a horizontal plane using the platform stepper motor 230. The ES 225 may be attached to the bottom panel 110F using standard rail mounts and screws, or some other suitable fastening/coupling mechanism. The platform stepper motor 235 may be attached to the bottom panel 110F using screws or some other suitable fastening or coupling mechanism. Alternatively, the platform stepper motor 230 may be attached to top panel of electronics subassembly housing (ESH) 228 using screws or some other suitable fastening or coupling mechanism. In such embodiments, the platform stepper motor 230 may be positioned at the center of the top panel of the ESH 228 and next to the platform motor controller 235 as shown by FIG. 2.

The platform stepper motor 230 may include a rotor and stator. During operation, the platform motor controller 235 may energize electromagnets of the stator to pull the teeth of the rotor in a circular step-wise fashion thereby adjusting the orientation of rotor. By adjusting the orientation of the rotor, platform stepper motor 230 may alter the orientation of the SMIF pod platform 245 via rotation of the pin 240. In this way, the SMIF pod platform 245 may be used to rotate the SMIF pod 205 in horizontal plane so that the image capture device 215 may capture images of different regions/areas of reticle inside the SMIF pod 205. In embodiments, the platform motor controller 235 may be communicatively coupled a remote computer device, which may provide one or more commands to the platform motor controller 235 to control the orientation of the platform stepper motor 230.

Furthermore, in some embodiments, the SMIF pod platform 245 may be positioned above the ESH 228. The ESH 228 may be coupled with and supported by beams 243 that are coupled with a bottom panel 110F. The ES 225 may be positioned below, or enclosed by the ESH 228 and between individual beams 243 supporting the ESH 228. In such embodiments, the pin 240 may extend through the ESH 228 via a hole in the ESH 228 to couple with the SMIF pod platform 245. The top portion of the ESH 228, which faces the underside of the SMIF pod 205, may have a diffusively reflective surface or may be coated with a material that reflects light in a diffuse manner. The SMIF pod platform 245 and the ESH 228 may be made of the same or similar materials as discussed previously with regard to the frame 105 and/or panels 110. In embodiments, the ES 225, ESH 228, and pin 240 may be collectively referred to as a SMIF pod subassembly.

The LSS 250 may include light source(s) 255, light source platform 260, and suspenders 265. The light sources 255 may be any device capable of emitting light in a spectrum that is transmissible through a transparent window 206 of the SMIF pod 205. The light sources 255 may be compact fluorescent lights (CFLs), any type of light emitting diode (LED), or some other suitable light emitting device. In various embodiments, the light emitted by the light source(s) 255 may be in the yellow-orange visible light spectrum, however, in other embodiments the light source(s) 255 may emit light in other spectrums.

The light source platform 260 may hold the light source(s) 255 and related components. In some embodiments, the related components may include light modulation circuitry 258, which may be used to control the brightness of the light source(s) 255. The light source platform 260 may be suspended from the top panel 110E by suspenders 265. The light source platform 260 may act as a light shield having a diffusively reflective surface. The light source platform 260 may help prevent light emitted by light source(s) 255 from directly hitting the reticle or SMIF pod 205 window. Direct light from the light source(s) 255 may obfuscate a view of the reticle through the SMIF pod 205 window, which may hamper reticle inspection using the image capture device 215. The light source platform 260 may have any suitable dimensions that allows light to pass through a spacing or gap between the suspenders 265. This gap may also provide airflow through the DLEOC 200. In embodiments, the light source platform 260 may have the same or similar dimensions as the ESH 228. In some embodiments, the dimensions of the light source platform 260 may be less than or equal to approximately 510 millimeters (mm) by 510mm. The light source platform 260 may be made of the same or similar materials as discussed previously with regard to the frame 105 and/or panels 110.

Although not shown by FIG. 2, the inspection apparatus may include less, more, or alternative components than those depicted by FIG. 2. For example, in some embodiments, the inspection apparatus 100 may include various robotic handling mechanisms, such as SMIF pod flipping tool, a wafer and/or reticle-handling tool to replace or re-orient the wafers/reticles inside the SMIF pod, and/or other like devices.

FIG. 3 illustrates an arrangement 300 in which the inspection device 100 may operate, in accordance with various embodiments. As shown, the arrangement 300 includes the inspection apparatus 100, computer device 305, and display device 310 communicatively coupled with one another via link 315.

The computer device 305 may be the same or similar to the computer device 1200 shown and described with regard to FIG. 9. Display device 310 may be any type of output device that is able to present information in a visual form based on received electrical signals, such as a light-emitting diode (LED) display device, an organic LED (OLED) display device, a liquid crystal display (LCD) device, a quantum dot display device, a projector device, a touchscreen interface, and/or any other like display device. The aforementioned display device technologies are generally well known, and a description of the functionality of the display device 310 is omitted for brevity. In some embodiments, the display device 310 may be coupled with the computer device 305 by way of a wired connection, such as RCA connectors, a video graphics array (VGA) connector, a digital visual interface (DVI) connector and/or mini-DVI connector, a high-definition multimedia interface (HDMI) connector, an S- Video connector, and/or the like. Furthermore, the display device 310 may be coupled with the computer device 305 or the computer device 1200 via a wireless communication protocol, or one or more remote display protocols, such as the wireless gigabit alliance (WiGiG) protocol, the remote desktop protocol (RDP), PC-over-IP (PColP) protocol, the high- definition experience (HDX) protocol, and/or other like remote display protocols. In alternate embodiments, the display device 310 may be embedded with the computer device 305.

Link 315 may represent a wired and/or wireless connection between the components of the inspection apparatus 100 (e.g., the various motor controllers discussed previously), the computer device 305, and/or the display device 310. The connection may be provided by a network comprising one or more network elements (not shown) capable of physically or logically connecting computers. The network may be the Internet, a Wide Area Network (WAN), a personal area network (PAN), local area network (LAN), campus area network (CAN), metropolitan area network (MAN), a virtual local area network (VLAN), a private/secure network, an enterprise network, and the like)or other like networks capable of physically or logically connecting computers.

The arrangement 300 may operate as follows.

An operator of the inspection apparatus 100 may use the handle 120 to open the inspection apparatus 100 and place the SMIF pod 205 inside the inspection apparatus 100. Light beams 301 emitted by the light source(s) 255 (represented by the various arrows inside the inspection apparatus 100) may diffusively reflect off of the panels 110, the light source platform 260, and the ESH 228. The light beams 301 may also enter the SMIF pod 205 via the transparent top window, and the light beams 305 may be diffusely and specularly reflected off the reticle inside the SMIF pod 205. The image capture device 215 may capture images of the reticle inside the SMIF pod 205 by absorbing the light beams 301 reflected off of the reticle.

The image capture device 215 may send the captured images to the computer device 305 over link 315, which may be displayed by display device 310. The operator of the inspection apparatus 100 may use computer device 305 to send various commands/instructions to the image capture device 215, light modulation circuitry 258, the mount motor controller, and/or the platform motor controller 235 to obtain various images of the reticle. For example, the computer device 305 may send commands/instructions to the image capture device 215 to perform zoom-in and/or zoom-out operations; send commands/instructions to the light modulation circuitry 258 to increase or decrease a brightness of the light source(s) 255; send commands/instructions to the mount motor controller to adjust a vertical or horizontal position and/or orientation (e.g., pan and/or tilt) of the image capture device 215; and send commands/instructions to the platform motor controller 235 to adjust the orientation of the SMIF pod 205.

After the image capture device 215 position/orientation, SMIF pod 205 orientation, and light source(s) 255 brightness are adjusted, the image capture device 215 may capture one or more additional images, which may be sent to the computer device 305 and/or display device 310 in the same or similar manner as discussed previously. During the reticle inspection, the operator may press the emergency stop button 130 to stop rotation of the platform stepper motor 230. The emergency stop button 130 may be coupled with the power supply 238 or the stepper motor 230, and when pressed, the emergency stop button 130 may cut off power to the stepper motor 230 or block power from leaving the power supply 238.

The operator of the inspection apparatus 100 may conduct reticle inspection by viewing the captured images, and use the captured images to verify various reticle parameters. The captured images may depict one or more reticle parameters that are used to verify that the reticle is a correct reticle for a current manufacturing process, that the reticle is in a proper orientation, and/or the like. In embodiments, the reticle parameters may include numbers and characters (e.g., a reticle title, serial number, etc.), a bar code, (e.g., a one-dimensional (ID) barcode, a two-dimensional (2D) barcode, etc.), identification marks, orientation marks, alignment marks, and/or orientation parameters such as beveled edges, glass edges, chrome side, glass side, and the like. Examples of captured images are shown and described with regard to FIGS. 4a-4b and 5a-5d.

FIGS. 4a-4b show images 400a and 400b, respectively, used for reticle inspection, in accordance with various embodiments. In embodiments, the images 400a and 400b may have been captured using the image capture device 215 and displayed by the display device 310. In particular, the images 400a and 400b of FIGS. 4a-4b depict reticle orientation parameters. In FIG. 4a, the image 400a depicts a reticle placed "chrome side up" inside the SMIF pod 205 plate chrome side edge 410. As shown, no beveled edges are present on the reticle corner 405 or reticle side edge 410 in the image 400a, confirming that the reticle has a chrome side up orientation. In FIG. 4b, image 400b depicts the same reticle depicted by image 400a placed chrome side down inside the same SMIF pod 205. The presence of beveled edges on the reticle glass side edge 415, the reticle corner 420, and the reticle sidewall 425 confirms that the reticle is placed in a "chrome side down" orientation inside the SMIF pod 205. The images 400a and 400b were captured without opening the SMIF pod 205. Instead, SMIF pod 205 re-orientation was performed using a robotic reticle-flipping tool.

FIGS.5a-5d illustrate example images 500a, 500b, 500c, and 500d, respectively, used for reticle inspection, in accordance with various embodiments. In embodiments, the images 500a, 500b, 500c, and 500d may have been captured using the image capture device 215 and displayed by the display device 310. Referring to FIG. 5a, image 500a depicts a zoomed- out view of the SMIF pod 205 while the SMIF pod 205 is placed in a first orientation within the DLEOC 200. The image 500a also depicts a reticle 505 through the transparent window 206 of the SMIF pod 205. As shown, the reticle 505 includes reticle parameters 510, which are surrounded by the dashed rectangle in FIG. 5a. Referring to FIG. 5b, image 500b depicts a zoomed-in view of the reticle 505 while the SMIF pod 205 is in the first orientation. As shown, the reticle parameters 510 include device identifier 515A and layer identifier 515B, which are surrounded by corresponding dashed rectangles in FIG. 5b.

The orientation of reticle 505 can be determined in the horizontal plane by comparing the location of the reticle parameters 510 with the SMIF pod handle 207. Image 500a shows that the reticle has a "title on right" orientation inside the SMIF pod 205 and is placed chrome side up due to lack of beveled edges in the image 500a. In addition, the inverted reticle parameters 510 shown by image 500b may be used to confirm that the reticle 500 has chrome side up orientation

Referring to FIG. 5c, image 500c depicts a zoomed-out view of the SMIF pod 205 while the SMIF pod 205 is placed in a second orientation within the DLEOC 200. The second orientation may be a 180-degree rotation of the first orientation. The image 500c also depicts the reticle 505 through the transparent window 206 of the SMIF pod 205. Similar to FIG. 5a, the reticle 505 includes reticle parameters 510 that are surrounded by the dashed rectangle in FIG. 5c. Referring to FIG. 5d, image 500d depicts a zoomed-in view of the reticle 505 while the SMIF pod 205 is in the second orientation. Similar to FIG. 5b, the reticle parameters 510 include device identifier 515A and layer identifier 515B, which are surrounded by corresponding dashed rectangles in FIG. 5d.

Alternatively, the images 500c-d may be produced by flipping or rotating the images

500a-b using an image viewer rather than physically adjusting the orientation of the SMIF pod 205. This may be performed in cases where the SMIF pod 205 in the first orientation is determined to be a proper orientation for a particular processing step. By mirroring images 500a-b, the operator may properly read the reticle parameters 510 to help ensure that the reticle 505 will move through correct processing steps and it has correct orientation at the beginning of each step.

FIGS. 6a-6b show images 600a and 600b, respectively, used for reticle inspection in accordance with various embodiments. In embodiments, the images 600a and 600b may have been captured using the image capture device 215 and displayed by the display device 310.

Referring to FIG. 6a, image 600a depicts a zoomed-out view of the SMIF pod 205 while the SMIF pod 205 is placed in a first orientation within the DLEOC 200. The image 600a also depicts a reticle 605 through the transparent window 206 of the SMIF pod 205. As shown, the reticle 605 includes reticle parameter 610, which is surrounded by the dashed rectangle in FIG. 6a. The location of the product serial number 615 near the left hand SMIF pod handle 207 in lower part of image 600a indicates that the plate has been placed in a "title on right" and/or "serial number on left" orientation. In various embodiments, the reticle title (not shown by FIGS. 6a-6b) and product serial number 615 may be printed on opposite sides of the reticle 605.

Referring to FIG. 6b, image 600b depicts a zoomed-in view of the reticle 605 while the SMIF pod 205 is in the first orientation. As shown, the reticle parameters 610 include product serial number 615, which is surrounded by a dashed rectangles in FIG. 6b. In image 600b, the inverted letters and numbers of the product serial number 615 may indicate that the reticle 605 is placed in a chrome side up orientation inside the SMIF pod 205. The images 600a and 600b may be post processed and rotated in a similar manner as discussed previously to read the product serial number 615 printed on the reticle 605 on the display device 310.

FIG. 7 shows images 700a and 700b used for reticle inspection, in accordance with various embodiments. In embodiments, the images 700a and 700b may have been captured using the image capture device 215 and displayed by the display device 310. Image 700a depicts a zoomed-out view of the SMIF pod 205 while the SMIF pod 205 is placed in a first orientation within the DLEOC 200. The image 700a also depicts a reticle 705 through the transparent window 206 of the SMIF pod 205. As shown, the reticle 705 includes reticle parameter 710, which is surrounded by a rectangle in image 700a. Image 700a depicts the reticle parameter 710 as a ID barcode 715. Image 700b shows a magnified or zoomed-in view of the ID barcode 715. In various embodiments, the computer device 305 may implement an application that is capable of reading the ID barcode 715, while in other embodiments, the computer device 305 may implement a barcode scanner to read the ID barcode 715. In either embodiment, the computer device 305 may identify the reticle 705 or gather information relevant to the reticle 705 by reading the ID barcode 715.

FIG. 8 shows images 800a and 800b used for reticle inspection, in accordance with various embodiments. In embodiments, the images 800a and 800b may have been captured using the image capture device 215 and displayed by the display device 310. Image 800a depicts a zoomed-out view of the SMIF pod 205 while the SMIF pod 205 is placed in a first orientation within the DLEOC 200. The image 800a also depicts a reticle 805 through the transparent window 206 of the SMIF pod 205. As shown, the reticle 805 includes reticle parameter 810, which is surrounded by a rectangle in image 800a. Image 800a depicts the reticle parameter 810 as a 2D barcode 815. The 2D barcode 815 may be a quick response (QR) code. Image 800b shows a magnified or zoomed-in view of the 2D barcode 815. In various embodiments, the computer device 305 may implement an application that is capable of reading the 2D barcode 815, while in other embodiments, the computer device 305 may implement a barcode scanner to read the 2D barcode 815. In either embodiment, the computer device 305 may identify the reticle 705 or gather information relevant to the reticle 805 by reading the 2D barcode 815.

FIG. 9 illustrates a computer device 1200 in accordance with various embodiments. The computer device 1200 may be implemented in or by the image capture device 215, the mount motor controller, the platform motor controller 235, the light modulation circuitry 258, the computer device 305, and/or any other computer device discussed previously. In addition, one or more components of the computer device 1200 depicted by FIG. 9 may be formed utilizing the embodiments discussed herein.

The computer device 1200 may include a number of components. In one embodiment, these components are attached to one or more motherboards. In an alternate embodiment, some or all of these components are fabricated onto a single system-on-a-chip (SoC) die, such as an SoC used for mobile devices and/or machine-type communications (MTC) devices. The components in the computer device 1200 include, but are not limited to, an integrated circuit die 1202 and at least one communications chip(s) 1208. In some implementations, the communications chip(s) 1208 may be fabricated within the integrated circuit die 1202 while in other implementations the communications chip(s) 1208 may be fabricated in a separate integrated circuit chip that may be bonded to a substrate or motherboard that is shared with or electronically coupled to the integrated circuit die 1202. The integrated circuit die 1202 may include a CPU 1204 as well as on-die memory 1206, often used as cache memory_/ that can be provided by technologies such as embedded DRAM (eDRAM), SRAM, or spin-transfer torque memory (STT-MRAM).

Computer device 1200 may include other components that may or may not be physically and electrically coupled to the motherboard or fabricated within an SoC die. These other components include, but are not limited to, volatile memory 1210 (e.g., DRAM), non-volatile memory 1212 (e.g., ROM or flash memory), a graphics processing unit 1214 (GPU), a digital signal processor 1216, a crypto processor 1242 (e.g., a specialized processor that executes cryptographic algorithms within hardware), a chipset 1220, at least one antenna 1222 (in some implementations two or more antenna may be used), a display or a touchscreen display 1224, a touchscreen controller 1226, a battery 1228 or other power source, a power amplifier (not shown), a voltage regulator (not shown), a global positioning system (GPS) device 1228, a compass 1230, a motion coprocessor or sensors 1232 (that may include an accelerometer, a gyroscope, and a compass), a microphone (not shown), a speaker 1234, a camera 1236, user input devices 1238 (such as a keyboard, mouse, stylus, and touchpad), and a mass storage device 1240 (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth). The computer device 1200 may incorporate further transmission, telecommunication, or radio functionality not already described herein. In some implementations, the computer device 1200 includes a radio that is used to communicate over a distance by modulating and radiating electromagnetic waves in air or space. In further implementations, the computer device 1200 includes a transmitter and a receiver (or a transceiver) that is used to communicate over a distance by modulating and radiating electromagnetic waves in air or space.

The communications chip(s) 1208 enables wireless communications for the transfer of data to and from the computer device 1200. The term "wireless" and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communications chip(s) 1208 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Infrared (IR), Near Field Communication (NFC), Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computer device 1200 may include a plurality of communications chip(s) 1208. For instance, a first communications chip(s) 1208 may be dedicated to shorter range wireless communications such as Wi-Fi, NFC, and Bluetooth and a second communications chip(s) 1208 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.

Additionally, in some embodiments, one of the communications chip(s) 1208 may be a network interface (also referred to as a "network interface controller" or "network interface card") used to connect the computer device 1200 to a network via a wired connection. The network interface may operate in accordance with a wired communications protocol, such as Ethernet, token ring, Fiber Distributed Data Interface (FDDI), Point-to-Point protocol (PPP), Fibre Channel, Asyncrhonous Transfer Mode (ATM), and/or other like protocols. The network interface may also include one or more virtual network interfaces that operate with one or more applications.

The processor 1204 of the computer device 1200 may be any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory. The processor 1204 may include one or more devices, such as transistors or metal interconnects that are formed on a wafer that is patterned using a reticle (e.g., reticle 505) in accordance with embodiments.

In embodiments where the computer device 1200 is implemented as the computer device 305, the processor 1204 may execute instructions to control transmission of commands to the image capture device 215 to capture images, control receipt of one or more images of the reticle 505 within the SMIF pod 205 from the image capture device 215, and control transmission of commands to the image capture device 215 to perform zoom-in or zoom-out operations. The processor 1204 may execute instructions to control transmission of commands to the mount motor controller to control the position and orientation of the image capture device 215 as discussed previously. The processor 1204 may execute instructions to control transmission of commands to the platform motor controller 235 to control the orientation of the SMIF pod platform 245 as discussed previously. The processor 1204 may control transmission of commands to the light modulation circuitry 258 to adjust the brightness of light source(s) 255. Transmission and receipt of the various commands may be performed by the communications chip(s) 1208.

In embodiments where the computer device 1200 is implemented as the image capture device 215, the processor 1204 may execute instructions to control receipt of commands from a remote computer device (e.g., computer device 305), perform zoom- in/zoom-out operations, capture images, record/store captured images, and/or process the captured images based on the received commands. In embodiments where the computer device 1200 is implemented as the mount motor controller, the processor 1204 may execute to control receipt of commands from a remote computer device (e.g., computer device 305), and control the position and orientation of the image capture device 215 as discussed previously based on the received commands. In embodiments where the computer device 1200 is implemented as the platform motor controller 235, the processor 1204 may execute instructions to control receipt of commands from a remote computer device (e.g., computer device 305), and control the orientation of the SMIF pod platform 245 by activating various electromagnets within the platform stepper motor 230 as discussed previously based on the received commands. In embodiments where the computer device 1200 is implemented as the light modulation circuitry 258, the processor 1204 may execute instructions to control receipt of commands from a remote computer device (e.g., computer device 305), and adjust the brightness of the light source(s) 255 based on the received commands.

The communications chip(s) 1208 may also include one or more devices, such as transistors or metal interconnects that are formed on a wafer that is patterned using a reticle (e.g., reticle 505) in accordance with embodiments. In further embodiments, another component housed within the computer device 1200 may include one or more devices, such as transistors or metal interconnects that are formed on a wafer that is patterned using a reticle (e.g., reticle 505) in accordance with embodiments

In various embodiments, the computer device 1200 may be a laptop computer, a netbook computer, a notebook computer, an ultrabook computer, a smartphone, a dumbphone, a tablet, a tablet/laptop hybrid, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder. In further implementations, the computer device 1200 may be any other electronic device that processes data.

Some non-limiting examples are as follows:

Example 1 may include an apparatus comprising: a frame and panels coupled to the frame to form an enclosure, wherein each panel of the panels comprises a diffusively reflective surface such that a diffuse light environment (DLE) is provided within the enclosure; and an image capture device within the enclosure to be directed at a transparent window of a Standard Mechanical Interface (SMIF) pod within the enclosure, the image capture device to capture images of a reticle within the SMIF pod.

Example 2 may include the apparatus of example 1 and/or some other examples herein, further comprising: a light source in the enclosure, and wherein, to capture the images of the reticle, the image capture device is to capture light produced by the light source that is diffusively reflected off the panels and specularly reflected off of the reticle through the transparent panel.

Example 3 may include the apparatus of example 1 and/or some other examples herein, wherein the image capture device comprises an image sensor and communications circuitry, wherein the image sensor is to generate images of the reticle based on the captured light, and wherein the communications circuitry is to send the generated images to a remote computer device.

Example 4 may include the apparatus of example 1 and/or some other examples herein, further comprising: a SMIF pod platform to hold the SMIF pod; a pin coupled with the SMIF pod platform; and an electronics subassembly including a platform stepper motor and a platform motor controller, wherein the platform stepper motor is coupled with the pin, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to rotate the pin to alter the orientation of the SMIF pod platform.

Example 5 may include the apparatus of example 4 and/or some other examples herein, wherein: the SMIF pod platform above an electronics subassembly housing, wherein the electronics subassembly housing is coupled with a plurality of beams, the electronics subassembly is positioned below the electronics subassembly housing and between individual beams of the plurality of beams, and the pin extends through the electronics subassembly housing to the SMIF pod platform.

Example 6 may include the apparatus of example 4 and/or some other examples herein, further comprising: an emergency stop button coupled with the motor controller or a power supply, wherein the emergency stop button is to stop rotation of the stepper motor.

Example 7 may include the apparatus of example 4 and/or some other examples herein, further comprising: an image capture device subassembly including the image capture device, a mount to which the image capture device is coupled, a mount stepper motor, and a mount motor controller, wherein the mount is capable of holding the image capture device in a plurality of positions and orientations, and wherein upon activation of the mount stepper motor by the mount motor controller, the mount motor controller is to control the mount stepper motor to adjust a position and orientation of the mount to alter a corresponding position and orientation of the image capture device.

Example 8 may include the apparatus of examples 1-7 and/or some other examples herein, wherein the panels include a top panel, a bottom panel, and side panels, wherein the top panel and at least one of the side panels includes at least one hole to provide air flow through the enclosure formed by the panels.

Example 9 may include the apparatus of example 8 and/or some other examples herein, further comprising: a light source subassembly including, the light source, a light source platform with a diffusively reflective surface, wherein the light source platform holds the light source, and light source modulation circuitry, wherein the light source modulation circuitry is to adjust a brightness of the light source, and wherein the light source subassembly is positioned above the SMIF pod platform and the image capture device.

Example 10 may include the apparatus of example 9 and/or some other examples herein, wherein the light source subassembly further includes a plurality of suspenders that couple the light source platform to the top panel, and wherein individual suspenders of the plurality of suspenders are spaced from one another such that light emitted by the light source travels through spaces between the individual suspenders.

Example 11 may include the apparatus of example 8, wherein a side panel of the side panels is coupled with a first portion of a hinge mechanism and the frame is coupled with a second portion of the hinge mechanism such that the side panel is rotatably coupled with the frame via the hinge mechanism.

Example 12 may include the apparatus of example 11 and/or some other examples herein, wherein the side panel coupled with the first portion of the hinge mechanism comprises a handle.

Example 13 may include the apparatus of example 1, wherein each panel includes a diffusively reflective material adhered to a surface of a base material of each panel that faces the SMIF pod, and the diffusively reflective material is not adhered to a surface of the base material of each panel that faces away from the SMIF pod.

Example 14 may include the apparatus of example 13 and/or some other examples herein, wherein the diffusively reflective material is granular paint, a granular film, a granular coating, a granular glazing, or a granular laminate.

Example 15 may include the apparatus of example 13 or 14 and/or some other examples herein, wherein the base material of each panel is made of an aluminum composite material or an anodized aluminum material.

Example 16 may include one or more computer-readable media including instructions, which when executed by one or more processors of a computer device, causes the computer device to: obtain, from an image capture device, a first image of a reticle within a Standard Mechanical Interface (SMIF) pod, wherein the SMIF pod and the image capture device are within a diffuse light environment (DLE); send, to the image capture device, a first command to perform a zoom-in operation or a zoom-out operation; and obtain, from the image capture device, a second image of the reticle based on the zoom-in operation or the zoom-out operation. The one or more computer-readable media may be non-transitory computer readable media.

Example 17 may include the one or more computer-readable media of example 16 and/or some other examples herein, wherein the computer device, in response to execution of the instructions, is further to: send, to a platform motor controller within the DLE, a second command to adjust a position of a platform stepper motor, wherein a pin couples the platform stepper motor with a SMIF pod platform that holds the SMIF pod, and wherein the adjustment of the position of the platform stepper motor is to adjust an orientation of a SMIF pod platform; and obtain, from the image capture device, a third image of the reticle within the SMIF pod based on the adjusted orientation of the SMIF pod platform. Example 18 may include the one or more computer-readable media of example 17 and/or some other examples herein, wherein the computer device, in response to execution of the instructions, is further to: send, to mount motor controller within the DLE, a third command to adjust a position, pan, or tilt of a mount stepper motor, wherein the mount stepper motor is coupled with a mount that holds the image capture device, and wherein the adjustment of the position, pan, or tilt of a mount stepper motor is to adjust a position, pan, or tilt of the image capture device; and obtain, from the image capture device, a fourth image of the reticle within the SMIF pod based on the adjusted position, pan, or tilt of the image capture device.

Example 19 may include the one or more computer-readable media of example 16 and/or some other examples herein, wherein the computer device, in response to execution of the instructions, is further to: send, to light source modulation circuitry within the DLE, a fourth command to adjust a brightness of a light source within the DLE; and obtain, from the image capture device, a fifth image of the reticle within the SMIF pod based on the adjusted brightness of the light source.

Example 20 may include the one or more computer-readable media of examples 16- 19 and/or some other examples herein, wherein the computer device, in response to execution of the instructions, is further to: control display of the first image, the second image, the third image, the fourth image, or the fifth image, wherein at least one of the first image, the second image, the third image, the fourth image, and the fifth image comprise one or more identification marks of the reticle, one or more alignment marks of the reticle, one or more letters printed on the reticle, one or more numbers printed on the reticle, or orientation parameters of the reticle, wherein the orientation parameters comprise beveled edges, glass edges, and physical dimensions of the reticle.

Example 21 may include an apparatus comprising: an assembly including a frame coupled with a top panel, a bottom panel, and side panels to form a diffuse light environment optical cavity (DLEOC), wherein surfaces of the top panel, the bottom panel, and the side panels that face the DLEOC comprise a diffusively reflective material such that the surfaces reflect light within the DLEOC in a diffuse manner; a light source subassembly in the DLEOC, wherein the light source subassembly includes a light source and a light source platform to hold the light source; and an image capture device subassembly in the DLEOC, wherein the image capture device subassembly includes an image capture device and a mount coupled with the image capture device to hold the image capture device in a desired position and desired orientation.

Example 22 may include the apparatus of example 21 and/or some other examples herein, further comprising: a Standard Mechanical Interface (SMIF) pod subassembly in the DLEOC, wherein the SMIF pod subassembly includes, a SMIF pod platform to hold a SMIF pod, wherein the SMIF pod is to enclose a reticle, a pin coupled with the SMIF pod platform, and an electronics subassembly, wherein the electronics subassembly includes a platform stepper motor and a platform motor controller, and wherein the platform stepper motor is coupled with the pin, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to alter the orientation of the SMIF pod platform via rotation of the pin.

Example 23 may include the apparatus of example 22 and/or some other examples herein, wherein the light source subassembly further includes a plurality of suspenders to suspend the light source platform from the top panel, and wherein the SMIF pod subassembly further includes a plurality of beams coupled with the bottom panel to hold the SMIF pod platform off of the bottom panel and over the electronics subassembly.

Example 24 may include the apparatus of example 23 and/or some other examples herein, wherein the image captured device subassembly further includes a mount stepper motor and a mount motor controller, wherein the mount motor controller is to control the mount stepper motor to adjust a position and an orientation of the mount to alter the desired position and the desired orientation.

Example 25 may include the apparatus of example 24 and/or some other examples herein, further comprising: a computer device outside of the DLEOC and communicatively coupled with the platform motor controller, the mount motor controller, the image capture device, and a display device, and wherein the computer device is to: control the platform motor controller to activate the platform stepper motor for alteration of the orientation of the SMIF pod platform, control the mount motor controller to activate the mount stepper motor for alteration of the position and orientation of the image capture device, control the image capture device to capture one or more images of the reticle enclosed in the SMIF pod through a transparent window of the SMIF pod, and control the display device to display the one or more images. Example 26 may include an apparatus comprising: means for providing a diffuse light environment (DLE) is provided within an enclosure formed by a frame and panels coupled to the frame, wherein each panel of the panels comprises a diffusively reflective surface such that; and image capture means for capturing images of a reticle through a transparent window of a Standard Mechanical Interface (SMIF) pod within the DLE, and wherein the image capture means is within the DLE.

Example 27 may include the apparatus of example 26 and/or some other examples herein, further comprising: light emitting means for emitting light in the DLE, and wherein, to capture the images of the reticle, the image capture means is for capturing light produced by the light emitting means that is diffusively reflected off the panels and specularly reflected off of the reticle through the transparent panel.

Example 28 may include the apparatus of example 26 and/or some other examples herein, wherein the image capture means comprises an image sensing means and communications means, wherein the image sensing means is for generating images of the reticle based on the captured light, and wherein the communications means is for sending the generated images to a remote computer device.

Example 29 may include the apparatus of example 26 and/or some other examples herein, further comprising: SMIF pod holding means for holding the SMIF pod at a desired orientation; and SMIF pod orienting means for adjusting the orientation of the SMIF pod holding means.

Example 30 may include the apparatus of example 29 and/or some other examples herein, wherein: the SMIF pod holding means is above the SMIF pod orienting means, and the SMIF pod orienting means is for adjusting the orientation of the SMIF pod by rotating the SMIF pod holding means about an axis.

Example 31 may include the apparatus of example 29 and/or some other examples herein, further comprising: stopping means for stopping or preventing rotation of the SMIF pod holding means.

Example 32 may include the apparatus of example 29 and/or some other examples herein, further comprising: mounting means for holding the image capture means in a plurality of positions and orientations, and for adjusting a position and orientation of the image capture means. Example 33 may include the apparatus of examples 26-32 and/or some other examples herein, wherein the panels include a top panel, a bottom panel, and side panels, wherein the top panel and at least one of the side panels includes air flow providing means for providing air flow to the DLE.

Example 34 may include the apparatus of example 33 and/or some other examples herein, further comprising: a light source holding means to hold the light emitting means and for diffusively reflecting light emitted by the light emitting means, and wherein the light source holding means comprises light source modulation means for adjusting a brightness of the light emitted by the light emitting means, and wherein the light source holding means is positioned above the SMIF pod holding means and the image capture means.

Example 35 may include the apparatus of example 34 and/or some other examples herein, wherein the light source holding means further includes a plurality of coupling means for coupling the light emitting means to the top panel, and wherein the coupling means allow light emitted by the light emitting means to travels through spaces among the coupling means.

Example 36 may include the apparatus of example 33 and/or some other examples herein, further comprising: hinging means coupled with a side panel of the side panels, wherein the hinging means is for opening and closing of the side panel to which the hinging means is coupled.

Example 37 may include the apparatus of example 36 and/or some other examples herein, wherein the side panel coupled with the hinging means comprises a handle.

Example 38 may include the apparatus of example 26 and/or some other examples herein, wherein each panel includes a diffusively reflective material adhered to a surface of a base material of each panel that faces the SMIF pod, and the diffusively reflective material is not adhered to a surface of the base material of each panel that faces away from the SMIF pod.

Example 39 may include the apparatus of example 38 and/or some other examples herein, wherein the diffusively reflective material is granular paint, a granular film, a granular coating, a granular glazing, or a granular laminate.

Example 40 may include the apparatus of example 38 or 39 and/or some other examples herein, wherein the base material of each panel is made of an aluminum composite material or an anodized aluminum material. Example 41 may include a method for constructing a diffuse light environment (DLE), the method comprising: coupling a plurality of panels to a frame, wherein each panel of the panels comprises a diffusively reflective surface that reflects light in a diffuse manner; and placing an image capture device inside the DLE, the image capture device to capture images of a reticle through a transparent window of a Standard Mechanical Interface (SMIF) pod placed in the DLE.

Example 42 may include the method of example 41 and/or some other examples herein, further comprising: placing a light source in the DLE above the image capture device, wherein, to capture the images of the reticle, the image capture device is to capture light produced by the light source that is diffusively reflected off the panels and specularly reflected off of the reticle through the transparent panel.

Example 43 may include the method of example 41 and/or some other examples herein, wherein the image capture device comprises an image sensor and communications circuitry, wherein the image sensor is to generate images of the reticle based on the captured light, and wherein the communications circuitry is to send the generated images to a remote computer device.

Example 44 may include the method of example 41 and/or some other examples herein, further comprising: placing a SMIF pod platform in the DLE below the image capture device, the SMIF pod platform to hold the SMIF pod; coupling a first end of a pin to the SMIF pod platform; and coupling a second end of the pin to a platform stepper motor, wherein the platform stepper motor is coupled with a platform motor controller, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to rotate the pin to adjust the orientation of the SMIF pod platform.

Example 45 may include the method of example 44 and/or some other examples herein, further comprising: coupling a plurality of beams to a bottom panel of the panels; coupling an electronics housing on the plurality of beams; placing the SMIF pod platform on the electronics housing; and placing the platform stepper motor and the platform motor controller below the electronics housing and between individual beams of the plurality of beams, and wherein the pin extends through the electronics housing to the SMIF pod platform. Example 46 may include the method of example 44 and/or some other examples herein, wherein the motor controller or a power supply is coupled with an emergency stop button, wherein the emergency stop button is to stop rotation of the stepper motor.

Example 47 may include the method of example 44 and/or some other examples herein, further comprising: coupling the image capture device to a mount, wherein the mount is coupled with a mount stepper motor and a mount motor controller, wherein the mount is capable of holding the image capture device in a plurality of positions and orientations, and wherein upon activation of the mount stepper motor by the mount motor controller, the mount motor controller is to control the mount stepper motor to adjust a position and orientation of the mount to alter a corresponding position and orientation of the image capture device.

Example 48 may include the method of examples 41-47 and/or some other examples herein, wherein the panels include a top panel, a bottom panel, and side panels, wherein the top panel and at least one of the side panels includes at least one hole to provide air flow through the enclosure formed by the panels.

Example 49 may include the method of example 48 and/or some other examples herein, further comprising: placing the light source on a light source platform with a diffusively reflective surface, and wherein the light source comprises light source modulation circuitry, wherein the light source modulation circuitry is to adjust a brightness of the light source, and wherein the light source platform is positioned above the SMIF pod platform and the image capture device.

Example 50 may include the method of example 49 and/or some other examples herein, further comprising: coupling first ends of a plurality of suspenders to the top platform such that individual suspenders of the plurality of suspenders are spaced from one another; and coupling second ends of the plurality of suspenders to the light source platform.

Example 51 may include the method of example 48 and/or some other examples herein, further comprising: coupling a first portion of a hinge mechanism to a side panel of the side panels; and coupling a second portion of the hinge mechanism to the frame such that the side panel is rotatably coupled with the frame via the hinge mechanism. Example 52 may include the method of example 51 and/or some other examples herein, further comprising: coupling a handle to the side panel coupled with the first portion of the hinge mechanism.

Example 53 may include the method of example 41 and/or some other examples herein, further comprising: covering a surface of a base material of each panel that faces the SMIF pod with a diffusively reflective material.

Example 54 may include the method of example 53 and/or some other examples herein, wherein the diffusively reflective material is granular paint, a granular film, a granular coating, a granular glazing, or a granular laminate.

Example 55 may include the method of example 53 or 54, and/or some other examples herein wherein the base material of each panel is made of an aluminum composite material or an anodized aluminum material.

Example 56 may include an apparatus comprising: diffuse reflection means for providing a diffuse light environment optical cavity (DLEOC); light emitting means for emitting light in the DLEOC; image capture means for capturing images in the DLEOC; and mounting means for holding the image capture means in a desired position and desired orientation.

Example 57 may include the apparatus of example 56 and/or some other examples herein, further comprising: Standard Mechanical Interface (SMIF) pod holding means for holding a SMIF pod, wherein the SMIF pod is to enclose a reticle; and SMIF pod orientation means for adjusting an orientation of the SMIF pod holding means.

Example 58 may include the apparatus of example 57 and/or some other examples herein, further comprising: display means for displaying the captured images; and controller means for: controlling the image capture means to capture one or more images of a reticle enclosed in the SMIF pod through a transparent window of the SMIF pod; controlling the mounting means to adjust the position and orientation of the image capture device; controlling the SMIF pod orientation means to adjust the orientation of the SMIF pod platform, and controlling the display means to display the one or more images.

Example 59 may include a method for constructing a diffuse light environment optical cavity (DLEOC), the method comprising: providing an assembly including a frame coupled with a top panel, a bottom panel, and side panels to form a diffuse light environment optical cavity (DLEOC), wherein surfaces of the top panel, the bottom panel, and the side panels that face the DLEOC comprise a diffusively reflective material such that the surfaces reflect light within the DLEOC in a diffuse manner; providing a light source subassembly in the DLEOC, wherein the light source subassembly includes a light source and a light source platform to hold the light source; and providing an image capture device subassembly in the DLEOC, wherein the image capture device subassembly includes an image capture device and a mount coupled with the image capture device to hold the image capture device in a desired position and desired orientation.

Example 60 may include the method of example 59 and/or some other examples herein, further comprising: providing a Standard Mechanical Interface (SMIF) pod subassembly in the DLEOC, wherein the SMIF pod subassembly includes, a SMIF pod platform to hold a SMIF pod, wherein the SMIF pod is to enclose a reticle, a pin coupled with the SMIF pod platform, and an electronics subassembly, wherein the electronics subassembly includes a platform stepper motor and a platform motor controller, and wherein the platform stepper motor is coupled with the pin, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to alter the orientation of the SMIF pod platform via rotation of the pin.

Example 61 may include the method of example 60 and/or some other examples herein, wherein the light source subassembly further includes a plurality of suspenders to suspend the light source platform from the top panel, and wherein the SMIF pod subassembly further includes a plurality of beams coupled with the bottom panel to hold the SMIF pod platform off of the bottom panel and over the electronics subassembly.

Example 62 may include the method of example 61 and/or some other examples herein, wherein the image captured device subassembly further includes a mount stepper motor and a mount motor controller, wherein the mount motor controller is to control the mount stepper motor to adjust a position and an orientation of the mount to alter the desired position and the desired orientation.

Example 63 may include the method of example 62 and/or some other examples herein, further comprising: communicatively coupling a computer device with the platform motor controller, the mount motor controller, the image capture device, and a display device, and wherein the computer device is to: control the platform motor controller to activate the platform stepper motor for alteration of the orientation of the SMIF pod platform, control the mount motor controller to activate the mount stepper motor for alteration of the position and orientation of the image capture device, control the image capture device to capture one or more images of the reticle enclosed in the SMIF pod through a transparent window of the SMIF pod, and control the display device to display the one or more images.

Example 64 may include an apparatus comprising: communications circuitry to: obtain, from an image capture device, a first image of a reticle within a Standard Mechanical Interface (SMIF) pod, wherein the SMIF pod and the image capture device are within a diffuse light environment (DLE), send, to the image capture device, a first command to perform a zoom-in operation or a zoom-out operation, and obtain, from the image capture device, a second image of the reticle based on the zoom-in operation or the zoom-out operation; and processor circuitry to generate the first command, control communications between the image capture device and the communications circuitry, and to control display of the first image.

Example 65 may include the apparatus of example 64 and/or some other examples herein, wherein: the processor circuitry is to generate a second command to adjust a position of a platform stepper motor, wherein a pin couples the platform stepper motor with a SMIF pod platform that holds the SMIF pod, and wherein the adjustment of the position of the platform stepper motor is to adjust an orientation of a SMIF pod platform; and the communications circuitry is to send the second command to a platform motor controller within the DLE, and obtain, from the image capture device, a third image of the reticle within the SMIF pod based on the adjusted orientation of the SMIF pod platform.

Example 66 may include the apparatus of example 65 and/or some other examples herein, wherein: the processor circuitry is to generate a third command to adjust a position, pan, or tilt of a mount stepper motor, wherein the mount stepper motor is coupled with a mount that holds the image capture device, and wherein the adjustment of the position, pan, or tilt of a mount stepper motor is to adjust a position, pan, or tilt of the image capture device; and the communications circuitry is to send the third command to the mount motor controller within the DLE, and obtain, from the image capture device, a fourth image of the reticle within the SMIF pod based on the adjusted position, pan, or tilt of the image capture device. Example 67 may include the apparatus of example 64 and/or some other examples herein, wherein: the processor circuitry is to generate a fourth command to adjust a brightness of a light source within the DLE; and the communications circuitry is to send, to light source modulation circuitry within the DLE, and obtain, from the image capture device, a fifth image of the reticle within the SMIF pod based on the adjusted brightness of the light source.

Example 68 may include the apparatus of examples 64-67 and/or some other examples herein, wherein the apparatus is communicatively coupled with a display device, and wherein: the processor circuitry is to control display, on the display device, of the first image, the second image, the third image, the fourth image, or the fifth image, wherein at least one of the first image, the second image, the third image, the fourth image, and the fifth image comprise one or more identification marks of the reticle, one or more alignment marks of the reticle, one or more letters printed on the reticle, one or more numbers printed on the reticle, or orientation parameters of the reticle, wherein the orientation parameters comprise beveled edges, glass edges, and physical dimensions of the reticle.

Example 69 may include a method comprising: obtaining, from an image capture device, a first image of a reticle within a Standard Mechanical Interface (SMIF) pod, wherein the SMIF pod and the image capture device are within a diffuse light environment (DLE); sending, to the image capture device, a first command to perform a zoom-in operation or a zoom-out operation; and obtaining, from the image capture device, a second image of the reticle based on the zoom-in operation or the zoom-out operation.

Example 70 may include the method of example 69 and/or some other examples herein, further comprising: sending, to a platform motor controller within the DLE, a second command to adjust a position of a platform stepper motor, wherein a pin couples the platform stepper motor with a SMIF pod platform that holds the SMIF pod, and wherein the adjustment of the position of the platform stepper motor is to adjust an orientation of a SMIF pod platform; and obtaining, from the image capture device, a third image of the reticle within the SMIF pod based on the adjusted orientation of the SMIF pod platform.

Example 71 may include the method of example 70 and/or some other examples herein, further comprising: sending, to mount motor controller within the DLE, a third command to adjust a position, pan, or tilt of a mount stepper motor, wherein the mount stepper motor is coupled with a mount that holds the image capture device, and wherein the adjustment of the position, pan, or tilt of a mount stepper motor is to adjust a position, pan, or tilt of the image capture device; and obtaining, from the image capture device, a fourth image of the reticle within the SMIF pod based on the adjusted position, pan, or tilt of the image capture device.

Example 72 may include the method of example 69 and/or some other examples herein, further comprising: sending, to light source modulation circuitry within the DLE, a fourth command to adjust a brightness of a light source within the DLE; and obtaining, from the image capture device, a fifth image of the reticle within the SMIF pod based on the adjusted brightness of the light source.

Example 73 may include the method of examples 69-72 and/or some other examples herein, further comprising: displaying the first image, the second image, the third image, the fourth image, or the fifth image, wherein at least one of the first image, the second image, the third image, the fourth image, and the fifth image comprise one or more identification marks of the reticle, one or more alignment marks of the reticle, one or more letters printed on the reticle, one or more numbers printed on the reticle, or orientation parameters of the reticle, wherein the orientation parameters comprise beveled edges, glass edges, and physical dimensions of the reticle.

Example 74 may include one or more computer-readable media including instructions, which when executed by one or more processors of a computer device, causes the computer device to perform the method of any one of examples 69-73 and/or some other examples herein. In embodiments, the one or more computer-readable media may be non-transitory computer-readable media.

The above description of illustrated implementations of the described embodiments, including what is described in the Abstract, is not intended to be exhaustive or to limit the embodiments to the precise forms disclosed. While specific implementations of, and examples for, the embodiments are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the embodiments, as those skilled in the relevant art will recognize.

Claims

1. An apparatus comprising:

a frame and panels coupled to the frame to form an enclosure, wherein each panel of the panels comprises a diffusively reflective surface such that a diffuse light environment (DLE) is provided within the enclosure; and

an image capture device within the enclosure to be directed at a transparent window of a Standard Mechanical Interface (SMIF) pod within the enclosure, the image capture device to capture images of a reticle within the SMIF pod.

2. The apparatus of claim 1, further comprising:

a light source in the enclosure, and

wherein, to capture the images of the reticle, the image capture device is to capture light produced by the light source that is diffusively reflected off the panels and specularly reflected off of the reticle through the transparent panel.

3. The apparatus of claim 1, wherein the image capture device comprises an image sensor and communications circuitry, wherein the image sensor is to generate images of the reticle based on the captured light, and wherein the communications circuitry is to send the generated images to a remote computer device.

4. The apparatus of claim 1, further comprising:

a SMIF pod platform to hold the SMIF pod;

a pin coupled with the SMIF pod platform; and

an electronics subassembly including a platform stepper motor and a platform motor controller, wherein the platform stepper motor is coupled with the pin, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to rotate the pin to alter the orientation of the SMIF pod platform.

5. The apparatus of claim 4, wherein:

the SMIF pod platform is above an electronics subassembly housing, wherein the electronics subassembly housing is coupled with a plurality of beams,

the electronics subassembly is positioned below the electronics subassembly housing and between individual beams of the plurality of beams, and

the pin extends through the electronics subassembly housing to the SMIF pod platform.

6. The apparatus of claim 4, further comprising:

an emergency stop button coupled with the motor controller or the power supply, wherein the emergency stop button is to stop rotation of the stepper motor.

7. The apparatus of claim 4, further comprising:

an image capture device subassembly including the image capture device, a mount to which the image capture device is coupled, a mount stepper motor, and a mount motor controller,

wherein the mount is capable of holding the image capture device in a plurality of positions and orientations, and

wherein upon activation of the mount stepper motor by the mount motor controller, the mount motor controller is to control the mount stepper motor to adjust a position and orientation of the mount to alter a corresponding position and orientation of the image capture device.

8. The apparatus of any one of claims 1-7, wherein the panels include a top panel, a bottom panel, and side panels, wherein the top panel and at least one of the side panels includes at least one hole to provide air flow through the enclosure formed by the panels.

9. The apparatus of claim 8, further comprising:

a light source subassembly including,

the light source,

a light source platform with a diffusively reflective surface, wherein the light source platform holds the light source, and

light source modulation circuitry, wherein the light source modulation circuitry is to adjust a brightness of the light source, and

wherein the light source subassembly is positioned above the SMIF pod platform and the image capture device.

10. The apparatus of claim 9, wherein the light source subassembly further includes a plurality of suspenders that couple the light source platform to the top panel, and wherein individual suspenders of the plurality of suspenders are spaced from one another such that light emitted by the light source travels through spaces between the individual suspenders.

11. The apparatus of claim 8, wherein a side panel of the side panels is coupled with a first portion of a hinge mechanism and the frame is coupled with a second portion of the hinge mechanism such that the side panel is rotatably coupled with the frame via the hinge mechanism.

12. The apparatus of claim 11, wherein the side panel coupled with the first portion of the hinge mechanism comprises a handle.

13. The apparatus of claim 1, wherein each panel includes a diffusively reflective material adhered to a surface of a base material of each panel that faces the SMIF pod, and the diffusively reflective material is not adhered to a surface of the base material of each panel that faces away from the SMIF pod.

14. The apparatus of claim 13, wherein the diffusively reflective material is granular paint, a granular film, a granular coating, a granular glazing, or a granular laminate.

15. The apparatus of claim 13 or 14, wherein the base material of each panel is made of an aluminum composite material or an anodized aluminum material.

16. One or more computer-readable media including instructions, which when executed by one or more processors of a computer device, causes the computer device to:

obtain, from an image capture device, a first image of a reticle within a

Standard Mechanical Interface (SMIF) pod, wherein the SMIF pod and the image capture device are within a diffuse light environment (DLE);

send, to the image capture device, a first command to perform a zoom-in operation or a zoom-out operation; and

obtain, from the image capture device, a second image of the reticle based on the zoom-in operation or the zoom-out operation.

17. The one or more computer-readable media of claim 16, wherein the computer device, in response to execution of the instructions, is further to:

send, to a platform motor controller within the DLE, a second command to adjust a position of a platform stepper motor, wherein a pin couples the platform stepper motor with a SMIF pod platform that holds the SMIF pod, and wherein the adjustment of the position of the platform stepper motor is to adjust an orientation of a SMIF pod platform; and

obtain, from the image capture device, a third image of the reticle within the SMIF pod based on the adjusted orientation of the SMIF pod platform.

18. The one or more computer-readable media of claim 17, wherein the computer device, in response to execution of the instructions, is further to:

send, to mount motor controller within the DLE, a third command to adjust a position, pan, or tilt of a mount stepper motor, wherein the mount stepper motor is coupled with a mount that holds the image capture device, and wherein the adjustment of the position, pan, or tilt of a mount stepper motor is to adjust a position, pan, or tilt of the image capture device; and

obtain, from the image capture device, a fourth image of the reticle within the SMIF pod based on the adjusted position, pan, or tilt of the image capture device.

19. The one or more computer-readable media of claim 16, wherein the computer device, in response to execution of the instructions, is further to:

send, to light source modulation circuitry within the DLE, a fourth command to adjust a brightness of a light source within the DLE; and

obtain, from the image capture device, a fifth image of the reticle within the SMIF pod based on the adjusted brightness of the light source.

20. The one or more computer-readable media of any one of claims 16-19, wherein the computer device, in response to execution of the instructions, is further to:

control display of the first image, the second image, the third image, the fourth image, or the fifth image,

wherein at least one of the first image, the second image, the third image, the fourth image, and the fifth image comprise one or more identification marks of the reticle, one or more alignment marks of the reticle, one or more letters printed on the reticle, one or more numbers printed on the reticle, or orientation parameters of the reticle, wherein the orientation parameters comprise beveled edges, glass edges, and physical dimensions of the reticle.

21. An apparatus comprising:

an assembly including a frame coupled with a top panel, a bottom panel, and side panels to form a diffuse light environment optical cavity (DLEOC), wherein surfaces of the top panel, the bottom panel, and the side panels that face the DLEOC comprise a diffusively reflective material such that the surfaces reflect light within the DLEOC in a diffuse manner; a light source subassembly in the DLEOC, wherein the light source subassembly includes a light source and a light source platform to hold the light source; and an image capture device subassembly in the DLEOC, wherein the image capture device subassembly includes an image capture device and a mount coupled with the image capture device to hold the image capture device in a desired position and desired orientation.

22. The apparatus of claim 21, further comprising:

a Standard Mechanical Interface (SMIF) pod subassembly in the DLEOC, wherein the SMIF pod subassembly includes,

a SMIF pod platform to hold a SMIF pod, wherein the SMIF pod is to enclose a reticle, a pin coupled with the SMIF pod platform, and

an electronics subassembly, wherein the electronics subassembly includes a platform stepper motor and a platform motor controller, and

wherein the platform stepper motor is coupled with the pin, and upon activation of the platform stepper motor by the platform motor controller, the platform motor controller is to control the platform stepper motor to alter the orientation of the SMIF pod platform via rotation of the pin.

23. The apparatus of claim 22, wherein the light source subassembly further includes a plurality of suspenders to suspend the light source platform from the top panel, and wherein the SMIF pod subassembly further includes a plurality of beams coupled with the bottom panel to hold the SMIF pod platform off of the bottom panel and over the electronics subassembly.

24. The apparatus of claim 23, wherein the image captured device subassembly further includes a mount stepper motor and a mount motor controller, wherein the mount motor controller is to control the mount stepper motor to adjust a position and an orientation of the mount to alter the desired position and the desired orientation.

25. The apparatus of claim 24, further comprising:

a computer device outside of the DLEOC and communicatively coupled with the platform motor controller, the mount motor controller, the image capture device, and a display device, and wherein the computer device is to:

control the platform motor controller to activate the platform stepper motor for alteration of the orientation of the SMIF pod platform,

control the mount motor controller to activate the mount stepper motor for alteration of the position and orientation of the image capture device, control the image capture device to capture one or more images of the reticle enclosed in the SMIF pod through a transparent window of the SMIF pod, and

control the display device to display the one or more images.