WO2018086162A1 - Cryogenic radiometer blackbody cavity - Google Patents
Cryogenic radiometer blackbody cavity Download PDFInfo
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- WO2018086162A1 WO2018086162A1 PCT/CN2016/107244 CN2016107244W WO2018086162A1 WO 2018086162 A1 WO2018086162 A1 WO 2018086162A1 CN 2016107244 W CN2016107244 W CN 2016107244W WO 2018086162 A1 WO2018086162 A1 WO 2018086162A1
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 8
- 238000005520 cutting process Methods 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 abstract description 23
- 230000003287 optical effect Effects 0.000 abstract description 14
- 238000013461 design Methods 0.000 abstract description 5
- 230000004044 response Effects 0.000 abstract description 5
- 238000009826 distribution Methods 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 description 19
- 238000005259 measurement Methods 0.000 description 14
- 238000009529 body temperature measurement Methods 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
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- 238000011160 research Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
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- the invention relates to the field of optical radiation measurement, in particular to a black body cavity of a low temperature radiometer.
- the low-temperature radiometer is the most accurate measurement standard for optical radiation power measurement and the widest range of spectral detection. It uses low temperature, vacuum and superconducting technology to make optical radiation heating measurement completely equivalent to electric power measurement, and its measurement uncertainty is excellent. On the order of 10 -5 , it plays a fundamental role in remote sensing calibration, climate change, environmental monitoring, and optical radiation measurement.
- the black body cavity of the low-temperature radiometer is basically composed of an inclined bottom cylindrical cavity structure, and is mainly composed of a cylindrical side surface and a sloped bottom surface with an inclination angle of 30°.
- the measured optical radiation enters the black body cavity along the axis of the cavity, and after multiple reflections and absorption, the optical radiation is equivalent to an electrical parameter for measurement.
- Prokhorov et al. have studied the effective emissivity of this cavity structure in detail. When the diameter of the cylindrical cavity is constant, the spectral absorption rate close to 1 can be obtained by increasing the cavity length.
- the cavity length cannot be infinitely increased.
- the light radiation incident on the inside of the black body cavity is diffusely reflected on the inner surface of the cavity, and part of the reflected light will overflow outside the cavity, causing loss of light energy.
- the existing black body cavity inner wall coating material has a low primary absorption rate, and the light radiation is reflected on the cylindrical cavity wall, thereby increasing the influence of photoelectric inequality on the measurement uncertainty.
- Chinese Patent Publication No. CN102538958B discloses a high absorption rate radiation absorption cavity, but compared with the inclined bottom cylindrical cavity, the internal surface area of the inclined bottom cone cavity is compared under the same cavity length, the same radius and the same inclined bottom surface inclination angle. Large, in order to achieve accurate measurement of the temperature response of the inclined bottom cone cavity, more temperature measurement points need to be arranged at more locations, the system cost is high and the structure is more complicated.
- the present invention provides a black body cavity of a low temperature radiometer, including a side surface of a positive cone (6), a side surface of a cylinder (5), and a sloped bottom surface ( 4) connecting the formed cavity, the positive cone and the axis of the cylinder (3) coincide, the busbar of the positive cone forms an angle with the axis of the positive cone (1); the thin end of the positive cone is provided with the cavity entrance diameter ( 7), the plane of the cavity entrance aperture (7) is perpendicular to the axis (3) of the positive cone; the angle between the oblique bottom surface (4) and the axis (3) of the cylinder forms an angle (2).
- the angle of the included angle (1) is 45°.
- the angle of the included angle (2) is 30°.
- the radius of the cavity entrance aperture (7) is 1/2 of the radius of the cylinder.
- the cavity has a cavity wall thickness of 0.1 mm.
- the cavity wall material of the cavity is OFHC high conductance oxygen free copper.
- the inside of the cavity wall of the cavity is coated with a graphene coating which is treated with pure specular reflection.
- the method for manufacturing a black body cavity of the cryogenic radiometer of the present invention comprises the following steps:
- a cylindrical cavity having a cavity wall thickness of 0.1 mm is formed by a precision machining process, and is cut at one end of the cylindrical cavity to form a cutting surface with an angle of 30° with the cavity axis to obtain a cylindrical side surface (5);
- the conical light blocking design can be used as the aperture of the incident aperture to block the stray light outside the cavity; it can effectively increase the number of surface reflections or the direction of the beam.
- the light from the exit is reflected back into the cavity again, reducing the diffuse reflection inside the cavity and overflowing the cavity.
- the design can quickly reach the absorption equilibrium state of the black body cavity and shorten the cavity length as the cavity length increases.
- the inner wall surface is highly polished, which is convenient for making specular reflection graphene coating.
- the inner wall coating of the cavity adopts pure specular reflection graphene material, which can reduce the diffuse reflection of optical radiation in the cavity, so that the optical radiation is maximized in the oblique bottom surface area.
- the absorption of the limit; the graphene material has stable optical properties, good absorption characteristics, improves the single absorption rate of the optical radiation, reduces the number of reflections of the optical radiation in the cavity, makes the optical radiation absorption region relatively concentrated, and reduces the black body cavity photoelectric equivalent.
- graphene coating can improve the thermal conductivity of metal and improve the thermal response of the cavity;
- the oblique bottom-cylindrical-cone combination type absorption cavity of this patent has small surface area and relatively concentrated temperature distribution in the case of the same cavity length, the same radius and the same inclined bottom surface inclination angle. Only need to arrange several temperature measurement points on the surface of the cavity to achieve accurate temperature measurement and reduce the uncertainty of temperature measurement;
- the mass of the cavity of the invention is smaller than the mass of the oblique bottom-conical cavity, so that the cavity has a small time constant, the temperature response speed is fast, and the high precision of the low temperature radiometer is realized. measuring.
- Figure 1 is a schematic view of the overall structure of the present invention.
- the black body cavity of the cryogenic radiometer of the embodiment comprises a cavity composed of a front side of the front side of the cone 6, a side of the cylinder 5, and a side of the inclined surface 4, the axis of the positive cone and the cylinder 3 coincide, the cone of the cone
- the busbar forms an angle 1 with the axis of the positive cone of 45°; the thin end of the positive cone is provided with a cavity entrance aperture 7, and the plane of the cavity entrance aperture 7 is perpendicular to the axis 3 of the positive cone; the oblique bottom surface 4 and the cylindrical An angle 2 is formed between the axes 3 of 30°.
- the front side of the conical cone 6 forms a light blocking design, which can be used as the aperture of the cavity entrance aperture 7, blocking the stray light outside the cavity from entering, and reflecting the light directed to the exit back into the cavity; the inclined bottom surface 4 can effectively increase the number of surface reflections; The combination of the two can effectively reduce the diffuse reflection of light inside the cavity outside the cavity.
- the invention can quickly reach the state of absorption and balance of the black body cavity with the increase of the length of the cavity, and the diaphragm is formed by designing the side surface 6 of the positive cone, and the cavity can be effectively reduced under the same absorption rate of the light radiation.
- the length of the body is formed by designing the side surface 6 of the positive cone, and the cavity can be effectively reduced under the same absorption rate of the light radiation.
- the oblique bottom-cylindrical-conical combined absorption cavity of the patent has a small surface area and a relatively concentrated temperature distribution in the case of the same cavity length, the same radius and the same oblique bottom inclination angle, and only needs to be Accurate measurement of temperature can be achieved by arranging several temperature measurement points on the surface of the cavity, and the uncertainty of temperature measurement is low.
- the cavity wall thickness of the cavity is 0.1mm, and the cavity wall material is OFHC high conductance oxygen-free copper. Under low temperature conditions, OFHC high conductance oxygen-free copper has good thermal properties, the cavity wall thickness is 0.1mm, and the cavity wall In the case of the same thickness, the black body cavity of the embodiment is lighter in weight, and the heat conduction speed is faster than the existing products. High-precision calibration of cryogenic radiometers is possible.
- a graphene coating is applied to the inside of the cavity wall of the cavity, which is treated with pure specular reflection.
- the graphene coating in this embodiment adopts a nano-texture structure technology to produce an ultra-thin graphene sheet layer, which can absorb 99% of incident light, the graphene coating layer has a thickness of about 15 nm, and the spectral range covers a broad spectrum from ultraviolet to mid-infrared. range.
- the pure specularly reflected graphene coating can reduce the diffuse emission of light radiation in the cavity, so that the light radiation is absorbed to the maximum extent in the oblique bottom surface region, and the light radiation absorption rate is high; the graphene material has stable chemical properties and good absorption characteristics.
- the single absorption rate of light radiation reduces the number of reflections of light radiation in the cavity, so that the absorption area of the light radiation is relatively concentrated, and the influence of the photoelectric inequality characteristic of the black body cavity on the measurement uncertainty is reduced; meanwhile, the graphene coating It can improve the thermal conductivity of the cavity wall metal and improve the thermal response of the cavity.
- This embodiment is a manufacturing method of the black body cavity of the cryogenic radiometer of Embodiment 1, and includes the following steps:
- a cylindrical cavity having a cavity wall thickness of 0.1 mm is formed by a precision machining process, and is cut at one end of the cylindrical cavity to form a cutting surface having an angle of 30° with the cylinder axis, thereby obtaining a cylindrical side surface 5;
- S2 Make a positive conical side with a cavity wall thickness of 0.1 mm and a apex angle of 45°. Cut at the thick end of the positive cone to obtain the same cutting surface as the cylindrical cavity, and cut the cavity entrance diameter at the thin end of the conical cone. , to ensure that the cutting surface is perpendicular to the axis of the cone, to obtain the front side 6 of the cone;
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Abstract
A cryogenic radiometer blackbody cavity comprises a cavity body formed by connecting a side surface (6) of a normal cone, a side surface (5) of a cylinder and a slanted bottom surface (4). An axis (3) of the normal cone and an axis (3) of the cylinder coincide. A generatrix and the axis of the normal cone form an included angle (1). A cavity incident aperture (7) is arranged at the tapered end of the normal cone. A plane in which the cavity incident aperture is located is perpendicular to the axis (3) of the normal cone. The slanted bottom surface (4) and the axis (3) of the cylinder form an included angle (2). The invention adopts a cavity body structure combining a slanted bottom, a cylinder and a cone. The conical light-blocking design can block stray light outside the cavity body, and reduce spilling of reflected light out of the cavity body. An inner wall of the cavity body is coated with a purely specular graphene material, thereby reducing diffuse reflection of optical radiation inside the cavity, and enabling a relatively concentrated temperature distribution and a high temperature response speed.
Description
本发明涉及光辐射测量领域，具体涉及一种低温辐射计黑体腔。The invention relates to the field of optical radiation measurement, in particular to a black body cavity of a low temperature radiometer.
低温辐射计是目前光辐射功率测量方面精度最高和光谱探测范围最宽的计量标准，它利用低温、真空和超导技术，将光辐射加热测量完全等效为电功率测量，其测量不确定度优于10-5量级，在遥感校准、气候变化、环境监测、光辐射计量等领域发挥了基础性的关键作用。The low-temperature radiometer is the most accurate measurement standard for optical radiation power measurement and the widest range of spectral detection. It uses low temperature, vacuum and superconducting technology to make optical radiation heating measurement completely equivalent to electric power measurement, and its measurement uncertainty is excellent. On the order of 10 -5 , it plays a fundamental role in remote sensing calibration, climate change, environmental monitoring, and optical radiation measurement.
自上世纪90年代，英国NPL和美国NIST相继研制出低温辐射计，建立了光辐射功率测量基标准，开展了大量的实验研究和技术集成。其低温辐射计黑体腔基本都是采用斜底圆柱腔结构，主要由圆柱形侧面、倾角为30°的斜底面组成。被测光辐射沿腔体轴线方向进入黑体腔，经多次反射吸收后，将光辐射等效为电参数进行测量。美国Prokhorov等人曾对这种腔型结构的有效发射率进行过详细研究，当圆柱腔直径一定时，通过增加腔长可以获得接近1的光谱吸收率。但腔长不可能无限增长，入射到黑体腔内部的光辐射在腔体内表面发生漫反射，部分反射光将溢出腔外，造成光能损失。现有黑体腔内壁涂层材料的一次吸收率低，光辐射反射到圆柱腔壁上，增加光电不等效对测量不确定度的影响。Since the 1990s, the British NPL and the US NIST have successively developed low-temperature radiometers, established the basis of optical radiation power measurement, and carried out a large number of experimental research and technology integration. The black body cavity of the low-temperature radiometer is basically composed of an inclined bottom cylindrical cavity structure, and is mainly composed of a cylindrical side surface and a sloped bottom surface with an inclination angle of 30°. The measured optical radiation enters the black body cavity along the axis of the cavity, and after multiple reflections and absorption, the optical radiation is equivalent to an electrical parameter for measurement. Prokhorov et al. have studied the effective emissivity of this cavity structure in detail. When the diameter of the cylindrical cavity is constant, the spectral absorption rate close to 1 can be obtained by increasing the cavity length. However, the cavity length cannot be infinitely increased. The light radiation incident on the inside of the black body cavity is diffusely reflected on the inner surface of the cavity, and part of the reflected light will overflow outside the cavity, causing loss of light energy. The existing black body cavity inner wall coating material has a low primary absorption rate, and the light radiation is reflected on the cylindrical cavity wall, thereby increasing the influence of photoelectric inequality on the measurement uncertainty.
中国专利公告号CN102538958B公开了一种高吸收率辐射吸收腔，但与斜底圆柱腔相比，在相同腔长、相同半径及相同斜底面倾角的情况下，斜底圆锥腔体的内部表面积较大，为了实现斜底圆锥腔体温度响应的精确测量，需要在更多位置布置更多测温点，系统成本高且结构较复杂。
Chinese Patent Publication No. CN102538958B discloses a high absorption rate radiation absorption cavity, but compared with the inclined bottom cylindrical cavity, the internal surface area of the inclined bottom cone cavity is compared under the same cavity length, the same radius and the same inclined bottom surface inclination angle. Large, in order to achieve accurate measurement of the temperature response of the inclined bottom cone cavity, more temperature measurement points need to be arranged at more locations, the system cost is high and the structure is more complicated.
发明内容Summary of the invention
为了解决现有技术在腔长有限的条件下光谱吸收率较低的问题，本发明提供了一种低温辐射计黑体腔，包括由正圆锥侧面(6)、圆柱侧面(5)、斜底面(4)连接组成的腔体，所述正圆锥和圆柱的轴线(3)重合，正圆锥的母线与正圆锥的轴线形成夹角(1)；所述正圆锥的细端设有腔入射口径(7)，腔入射口径(7)所在平面与正圆锥的轴线(3)垂直；所述斜底面(4)与圆柱的轴线(3)之间形成夹角(2)。In order to solve the problem of low absorption rate of the prior art under the condition that the cavity length is limited, the present invention provides a black body cavity of a low temperature radiometer, including a side surface of a positive cone (6), a side surface of a cylinder (5), and a sloped bottom surface ( 4) connecting the formed cavity, the positive cone and the axis of the cylinder (3) coincide, the busbar of the positive cone forms an angle with the axis of the positive cone (1); the thin end of the positive cone is provided with the cavity entrance diameter ( 7), the plane of the cavity entrance aperture (7) is perpendicular to the axis (3) of the positive cone; the angle between the oblique bottom surface (4) and the axis (3) of the cylinder forms an angle (2).
作为优选，所述夹角(1)的角度为45°。Preferably, the angle of the included angle (1) is 45°.
作为优选，所述夹角(2)的角度为30°。Preferably, the angle of the included angle (2) is 30°.
作为优选，所述腔入射口径(7)的半径为所述圆柱的半径的1/2。Preferably, the radius of the cavity entrance aperture (7) is 1/2 of the radius of the cylinder.
作为优选，所述腔体的腔壁厚度为0.1mm。Preferably, the cavity has a cavity wall thickness of 0.1 mm.
作为优选，所述腔体的腔壁材料为OFHC高电导无氧铜。Preferably, the cavity wall material of the cavity is OFHC high conductance oxygen free copper.
作为优选，所述腔体的腔壁内侧涂抹石墨烯涂层，所述涂层采用纯镜面反射。Preferably, the inside of the cavity wall of the cavity is coated with a graphene coating which is treated with pure specular reflection.
本发明的低温辐射计黑体腔的制作方法，包括如下步骤：The method for manufacturing a black body cavity of the cryogenic radiometer of the present invention comprises the following steps:
S1:采用精密机械加工工艺制作腔体壁厚0.1mm的圆柱腔，在圆柱腔一端切割，形成与腔体轴线夹角为30°的切割面，得到圆柱侧面(5)；S1: a cylindrical cavity having a cavity wall thickness of 0.1 mm is formed by a precision machining process, and is cut at one end of the cylindrical cavity to form a cutting surface with an angle of 30° with the cavity axis to obtain a cylindrical side surface (5);
S2:制作腔体壁厚0.1mm、顶角为45°的正圆锥形侧面，在正圆锥的粗端切割，得到与圆柱腔口径相同的切割面，在正圆锥细端切割得到腔入射口径1，保证切割面与圆锥的轴线垂直，得到正圆锥侧面(6)；S2: making a positive conical side with a cavity wall thickness of 0.1 mm and a apex angle of 45°, cutting at the thick end of the positive cone, obtaining a cutting surface with the same diameter as that of the cylindrical cavity, and cutting the cavity entrance diameter 1 at the thin end of the conical cone , to ensure that the cutting surface is perpendicular to the axis of the cone, to obtain the front side of the cone (6);
S3:根据圆柱腔切割面的几何参数，制作与圆柱腔切割面相配合的的圆柱斜底面，得到斜底面(4)；S3: according to the geometric parameters of the cylindrical cavity cutting surface, the cylindrical inclined bottom surface matched with the cylindrical cavity cutting surface is obtained, and the inclined bottom surface is obtained (4);
S4:对步骤S1、S2、S3制作的圆柱侧面(5)、正圆锥侧面(6)、斜底面
(4)的内表面进行高度抛光处理，并喷涂纯镜面反射的石墨烯涂层；S4: cylindrical side (5), forward tapered side (6), oblique bottom surface made for steps S1, S2, and S3
(4) The inner surface is highly polished and sprayed with a pure specularly reflective graphene coating;
S5:把经过步骤S4处理的圆柱侧面(5)、正圆锥侧面(6)、斜底面(4)进行粘合。S5: Bonding the cylindrical side surface (5), the forward conical side surface (6), and the oblique bottom surface (4) processed in the step S4.
本发明的低温辐射计黑体腔，具有如下优点：The low temperature radiometer black body cavity of the invention has the following advantages:
(1)采用斜底-圆柱-圆锥组合型腔体结构，圆锥形挡光设计，即可作为入射孔径的光阑，阻挡腔体外部杂散光；又可以有效的增加表面反射次数或将射向出口的光线再次反射回腔内部，减少腔体内部漫反射光溢出腔外。该设计与无圆锥挡光设计情况下相比，随腔体长度增加可快速达到黑体腔吸收平衡状态，缩短腔体长度；(1) It adopts the inclined bottom-cylindrical-conical combined cavity structure, and the conical light blocking design can be used as the aperture of the incident aperture to block the stray light outside the cavity; it can effectively increase the number of surface reflections or the direction of the beam. The light from the exit is reflected back into the cavity again, reducing the diffuse reflection inside the cavity and overflowing the cavity. Compared with the case of no cone-shaped light blocking design, the design can quickly reach the absorption equilibrium state of the black body cavity and shorten the cavity length as the cavity length increases.
(2)内壁表面高度抛光，方便制作镜面反射石墨烯涂层，腔体内壁涂层采用纯镜面反射石墨烯材料，可减少光辐射在腔内的漫反射，使得光辐射在斜底面区域被最大限度的吸收；石墨烯材料光学性质稳定，吸收特性好，提高光辐射的单次吸收率，减少光辐射在腔内的反射次数，使得光辐射吸收区域相对集中，减小黑体腔光电不等效特性对测量不确定度的影响；石墨烯涂层可提升金属的热传导率，提高腔体热响应特性；(2) The inner wall surface is highly polished, which is convenient for making specular reflection graphene coating. The inner wall coating of the cavity adopts pure specular reflection graphene material, which can reduce the diffuse reflection of optical radiation in the cavity, so that the optical radiation is maximized in the oblique bottom surface area. The absorption of the limit; the graphene material has stable optical properties, good absorption characteristics, improves the single absorption rate of the optical radiation, reduces the number of reflections of the optical radiation in the cavity, makes the optical radiation absorption region relatively concentrated, and reduces the black body cavity photoelectric equivalent. The effect of characteristics on measurement uncertainty; graphene coating can improve the thermal conductivity of metal and improve the thermal response of the cavity;
(3)与斜底圆锥腔体结构相比，在相同腔长、相同半径以及相同的斜底面倾角的情况下，本专利的斜底-圆柱-圆锥组合型吸收腔表面积小，温度分布相对集中，仅需要在腔体表面布置几个测温点，即可实现温度的精确测量，减小温度测量的不确定度；(3) Compared with the inclined bottom conical cavity structure, the oblique bottom-cylindrical-cone combination type absorption cavity of this patent has small surface area and relatively concentrated temperature distribution in the case of the same cavity length, the same radius and the same inclined bottom surface inclination angle. Only need to arrange several temperature measurement points on the surface of the cavity to achieve accurate temperature measurement and reduce the uncertainty of temperature measurement;
(4)在腔体壁厚度相同的情况下，本发明腔体质量小于斜底-圆锥腔腔体质量，使得腔体具备较小的时间常数，温度响应速度快，实现低温辐射计的高精度测量。(4) When the thickness of the cavity wall is the same, the mass of the cavity of the invention is smaller than the mass of the oblique bottom-conical cavity, so that the cavity has a small time constant, the temperature response speed is fast, and the high precision of the low temperature radiometer is realized. measuring.
图1为本发明的整体结构示意图。Figure 1 is a schematic view of the overall structure of the present invention.
下面结合附图和实例对本发明作进一步说明：The present invention will be further described below in conjunction with the accompanying drawings and examples:
实施例1：Example 1:
如图1所示，本实施例的低温辐射计黑体腔，包括由正圆锥侧面6、圆柱侧面5、斜底面4连接组成的腔体，所述正圆锥和圆柱的轴线3重合，正圆锥的母线与正圆锥的轴线形成夹角1为45°；所述正圆锥的细端设有腔入射口径7，腔入射口径7所在平面与正圆锥的轴线3垂直；所述斜底面4与圆柱的轴线3之间形成夹角2为30°。As shown in FIG. 1, the black body cavity of the cryogenic radiometer of the embodiment comprises a cavity composed of a front side of the front side of the cone 6, a side of the cylinder 5, and a side of the inclined surface 4, the axis of the positive cone and the cylinder 3 coincide, the cone of the cone The busbar forms an angle 1 with the axis of the positive cone of 45°; the thin end of the positive cone is provided with a cavity entrance aperture 7, and the plane of the cavity entrance aperture 7 is perpendicular to the axis 3 of the positive cone; the oblique bottom surface 4 and the cylindrical An angle 2 is formed between the axes 3 of 30°.
正圆锥侧面6形成挡光设计，可作为腔入射口径7的光阑，阻挡腔体外部杂散光进入，并将射向出口的光线再次反射回腔内部；斜底面4可以有效增加表面反射次数；两者结合可以有效减少腔体内部漫反射光溢出腔外。与现有技术相比，本发明随腔体长度的增加可快速达到黑体腔吸收平衡的状态，通过设计正圆锥侧面6形成光阑，在相同光辐射吸收率的情况下，可以有效减小腔体的长度。The front side of the conical cone 6 forms a light blocking design, which can be used as the aperture of the cavity entrance aperture 7, blocking the stray light outside the cavity from entering, and reflecting the light directed to the exit back into the cavity; the inclined bottom surface 4 can effectively increase the number of surface reflections; The combination of the two can effectively reduce the diffuse reflection of light inside the cavity outside the cavity. Compared with the prior art, the invention can quickly reach the state of absorption and balance of the black body cavity with the increase of the length of the cavity, and the diaphragm is formed by designing the side surface 6 of the positive cone, and the cavity can be effectively reduced under the same absorption rate of the light radiation. The length of the body.
与斜底圆锥腔体结构相比，在相同腔长、相同半径以及相同的斜底面倾角的情况下，本专利的斜底-圆柱-圆锥组合型吸收腔表面积小，温度分布相对集中，仅需要在腔体表面布置几个测温点，即可实现温度的精确测量，温度测量的不确定度较低。Compared with the oblique bottom conical cavity structure, the oblique bottom-cylindrical-conical combined absorption cavity of the patent has a small surface area and a relatively concentrated temperature distribution in the case of the same cavity length, the same radius and the same oblique bottom inclination angle, and only needs to be Accurate measurement of temperature can be achieved by arranging several temperature measurement points on the surface of the cavity, and the uncertainty of temperature measurement is low.
本实施例中，腔入射口径7的半径Rc为圆柱的半径Ra的1/2，即Rc＝1/2Ra。In this embodiment, the radius R c of the cavity entrance aperture 7 is 1/2 of the radius R a of the cylinder, that is, R c = 1/2R a .
腔体的腔壁厚度为0.1mm，腔体的腔壁材料为OFHC高电导无氧铜，在低温条件下，OFHC高电导无氧铜的热学性质良好，腔壁厚度为0.1mm，在腔壁厚度相同的情况下，本实施例的黑体腔质量更轻，导热速度较现有产品更快，
可以实现低温辐射计的高精度校准。The cavity wall thickness of the cavity is 0.1mm, and the cavity wall material is OFHC high conductance oxygen-free copper. Under low temperature conditions, OFHC high conductance oxygen-free copper has good thermal properties, the cavity wall thickness is 0.1mm, and the cavity wall In the case of the same thickness, the black body cavity of the embodiment is lighter in weight, and the heat conduction speed is faster than the existing products.
High-precision calibration of cryogenic radiometers is possible.
腔体的腔壁内侧涂抹石墨烯涂层，所述涂层采用纯镜面反射。本实施例中的石墨烯涂层采用纳米纹理结构技术制造的超薄石墨烯片层，可吸收99％的入射光，石墨烯涂层厚度为15nm左右，光谱范围覆盖紫外到中红外的宽光谱范围。纯镜面反射的石墨烯涂层可减少光辐射在腔内的漫发射，使得光辐射在斜底面区域被最大限度的吸收，光辐射吸收率高；石墨烯材料化学性质稳定，吸收特性好，提高光辐射的单次吸收率，减少光辐射在腔内的反射次数，使得光辐射的吸收区域相对集中，减小黑体腔光电不等效特性对测量不确定度的影响；同时，石墨烯涂层可以提升腔壁金属的热传导率，提高腔体的热响应特性。A graphene coating is applied to the inside of the cavity wall of the cavity, which is treated with pure specular reflection. The graphene coating in this embodiment adopts a nano-texture structure technology to produce an ultra-thin graphene sheet layer, which can absorb 99% of incident light, the graphene coating layer has a thickness of about 15 nm, and the spectral range covers a broad spectrum from ultraviolet to mid-infrared. range. The pure specularly reflected graphene coating can reduce the diffuse emission of light radiation in the cavity, so that the light radiation is absorbed to the maximum extent in the oblique bottom surface region, and the light radiation absorption rate is high; the graphene material has stable chemical properties and good absorption characteristics. The single absorption rate of light radiation reduces the number of reflections of light radiation in the cavity, so that the absorption area of the light radiation is relatively concentrated, and the influence of the photoelectric inequality characteristic of the black body cavity on the measurement uncertainty is reduced; meanwhile, the graphene coating It can improve the thermal conductivity of the cavity wall metal and improve the thermal response of the cavity.
实施例2：Example 2:
本实施例为实施例1的低温辐射计黑体腔的制作方法，包括如下步骤：This embodiment is a manufacturing method of the black body cavity of the cryogenic radiometer of Embodiment 1, and includes the following steps:
S1:采用精密机械加工工艺制作腔体壁厚0.1mm的圆柱腔，在圆柱腔一端切割，形成与圆柱轴线夹角为30°的切割面，得到圆柱侧面5；S1: a cylindrical cavity having a cavity wall thickness of 0.1 mm is formed by a precision machining process, and is cut at one end of the cylindrical cavity to form a cutting surface having an angle of 30° with the cylinder axis, thereby obtaining a cylindrical side surface 5;
S2:制作腔体壁厚0.1mm、顶角为45°的正圆锥形侧面，在正圆锥的粗端切割，得到与圆柱腔口径相同的切割面，在正圆锥细端切割得到腔入射口径7，保证切割面与圆锥的轴线垂直，得到正圆锥侧面6；S2: Make a positive conical side with a cavity wall thickness of 0.1 mm and a apex angle of 45°. Cut at the thick end of the positive cone to obtain the same cutting surface as the cylindrical cavity, and cut the cavity entrance diameter at the thin end of the conical cone. , to ensure that the cutting surface is perpendicular to the axis of the cone, to obtain the front side 6 of the cone;
S3:根据圆柱腔切割面的几何参数，制作与圆柱腔切割面相配合的的圆柱斜底面，得到斜底面4；S3: according to the geometrical parameters of the cylindrical cavity cutting surface, the cylindrical inclined bottom surface matched with the cylindrical cavity cutting surface is obtained, and the inclined bottom surface 4 is obtained;
S4:对步骤S1、S2、S3制作的圆柱侧面5、正圆锥侧面6、斜底面4的内表面进行高度抛光处理，并喷涂纯镜面反射的石墨烯涂层；S4: performing high-polished treatment on the inner surfaces of the cylindrical side surface 5, the front-cone side surface 6, and the oblique bottom surface 4 prepared in steps S1, S2, and S3, and spraying a pure specularly-reflected graphene coating;
S5:把经过步骤S4处理的圆柱侧面5、正圆锥侧面6、斜底面4进行粘合，三者组合形成斜底-圆柱-圆锥组合型腔体结构。S5: The cylindrical side surface 5, the front conical side surface 6, and the oblique bottom surface 4 processed in the step S4 are bonded, and the three are combined to form an inclined bottom-cylindrical-conical combined cavity structure.
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本
发明，对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的。The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be apparent to those skilled in the art.
应当理解的是，本申请旨在涵盖本发明的任何变型、用途或者适应性变化，这些变型、用途或者适应性变化遵循本发明的一般性原理并包括本发明未公开的本技术领域中的公知常识或惯用技术手段。
It is to be understood that the invention is intended to cover any variations, uses, or adaptations of the invention, which are in accordance with the general principles of the invention and are known in the art to which the invention is not disclosed. Common sense or common technical means.
Claims (8)
- 一种低温辐射计黑体腔，其特征在于：包括由正圆锥侧面(6)、圆柱侧面(5)、斜底面(4)连接组成的腔体，所述正圆锥和圆柱的轴线(3)重合，正圆锥的母线与正圆锥的轴线形成夹角(1)；所述正圆锥的细端设有腔入射口径(7)，腔入射口径(7)所在平面与正圆锥的轴线(3)垂直；所述斜底面(4)与圆柱的轴线(3)之间形成夹角(2)。A low temperature radiometer black body cavity, comprising: a cavity composed of a front side of a right taper (6), a side of a cylinder (5), and a side of a slope (4), the axis of the regular cone and the cylinder (3) coincide The busbar of the positive cone forms an angle with the axis of the positive cone (1); the thin end of the positive cone is provided with a cavity entrance aperture (7), and the plane of the cavity entrance aperture (7) is perpendicular to the axis of the positive cone (3) An angle (2) is formed between the inclined bottom surface (4) and the axis (3) of the cylinder.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述夹角(1)的角度为45°。A cryo-radiometer black body cavity according to claim 1, wherein said angle (1) is at an angle of 45°.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述夹角(2)的角度为30°。A low temperature radiometer black body cavity according to claim 1, wherein the angle of the included angle (2) is 30°.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述腔入射口径(7)的半径为所述圆柱的半径的1/2。A cryo-radiometer black body cavity according to claim 1, wherein the radius of the cavity entrance aperture (7) is 1/2 of the radius of the cylinder.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述腔体的腔壁厚度为0.1mm。A cryo-radiometer black body cavity according to claim 1, wherein the cavity has a cavity wall thickness of 0.1 mm.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述腔体的腔壁材料为OFHC高电导无氧铜。A black body cavity of a cryogenic radiometer according to claim 1, wherein the cavity wall material of the cavity is OFHC high conductance oxygen free copper.
- 如权利要求1所述的一种低温辐射计黑体腔，其特征在于：所述腔体的腔壁内侧涂抹石墨烯涂层，所述涂层采用纯镜面反射。A cryo-radiometer black body cavity according to claim 1, wherein the inside of the cavity wall of the cavity is coated with a graphene coating, and the coating is pure specular reflection.
- 一种如权利要求1-7中任一项所述低温辐射计黑体腔的制作方法，其特征在于，包括如下步骤：A method for fabricating a black body cavity of a cryogenic radiometer according to any one of claims 1-7, comprising the steps of:S1:采用精密机械加工工艺制作腔体壁厚0.1mm的圆柱腔，在圆柱腔一端切割，形成与腔体轴线夹角为30°的切割面，得到圆柱侧面；S1: a cylindrical cavity having a cavity wall thickness of 0.1 mm is formed by a precision machining process, and is cut at one end of the cylindrical cavity to form a cutting surface with an angle of 30° with the cavity axis to obtain a cylindrical side surface;S2:制作腔体壁厚0.1mm、顶角为45°的正圆锥形侧面，在正圆锥的粗端切割，得到与圆柱腔口径相同的切割面，在正圆锥细端切割得到腔入射口径1，保 证切割面与圆锥的轴线垂直，得到正圆锥侧面；S2: making a positive conical side with a cavity wall thickness of 0.1 mm and a apex angle of 45°, cutting at the thick end of the positive cone, obtaining a cutting surface with the same diameter as that of the cylindrical cavity, and cutting the cavity entrance diameter 1 at the thin end of the conical cone Guarantee Verify that the cutting surface is perpendicular to the axis of the cone to obtain a positive conical side;S3:根据圆柱腔切割面的几何参数，制作与圆柱腔切割面相配合的的圆柱斜底面，得到斜底面；S3: according to the geometric parameters of the cutting surface of the cylindrical cavity, the cylindrical inclined bottom surface matched with the cutting surface of the cylindrical cavity is prepared, and the inclined bottom surface is obtained;S4:对步骤S1、S2、S3制作的圆柱侧面、正圆锥侧面、斜底面的内表面进行高度抛光处理，并喷涂纯镜面反射的石墨烯涂层；S4: performing high-polished treatment on the inner surfaces of the cylindrical side, the right-conical side, and the inclined bottom surface prepared in steps S1, S2, and S3, and spraying a pure specularly-reflected graphene coating;S5:把经过步骤S4处理的圆柱侧面、正圆锥侧面、斜底面进行粘合。 S5: Bonding the cylindrical side surface, the positive cone side surface, and the inclined bottom surface processed in the step S4.
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