WO2018084680A1

WO2018084680A1 - Sensor for detecting chemical liquid leakage

Info

Publication number: WO2018084680A1
Application number: PCT/KR2017/012518
Authority: WO
Inventors: 강문식
Original assignee: 주식회사 이너센서; 주식회사 씨티에이
Priority date: 2016-11-07
Filing date: 2017-11-07
Publication date: 2018-05-11
Also published as: KR101947239B1; KR20180050871A

Abstract

A sensor for detecting a chemical liquid leakage may comprise: a base substrate; a pair of main electrode lines arranged spaced apart from and in parallel to each other on the base substrate so as to form a resistor circuit; a sensing electrode line formed on the base substrate, arranged across the main electrode lines, electrically connected to the main electrode lines, and made of a material having selectivity to a chemical liquid when chemically reacted therewith in order to detect a leakage of the chemical liquid; and an insulation layer formed on the base substrate to cover the sensing electrode line and having a via hole through which the sensing electrode line is partially exposed so as to allow a leaked chemical liquid to come into contact with the sensing electrode line. Accordingly, the sensor for detecting a chemical liquid leakage includes a separate sensing electrode line for a chemical reaction with a leaked chemical liquid, so that the value of resistance changes significantly with a change in the thickness of the sensing electrode line and, as a result, a chemical liquid leakage can be accurately detected.

Description

Chemical Leak Detection Sensor

Embodiments of the present invention relate to a chemical liquid leak detection sensor, and more particularly, to a chemical liquid leak detection sensor for sensing the leakage of the chemical liquid from the chemical liquid tank in which the chemical liquid is stored.

The chemical leakage detection sensor is installed outside the chemical solution tank in which the chemical solution is stored, and detects and informs when the chemical liquid leaks from the chemical solution tank.

The conventional chemical leakage sensor may read the conductivity by using a probe electrode, and may recognize whether the chemical liquid leaks through a change in conductivity of the sensor.

However, when the chemical solution tank is installed outdoors, it is easy to mix the chemical liquid and rainwater leaked from the chemical liquid tank, and it is difficult to distinguish the chemical liquid and water. As a result, it is difficult to accurately recognize the change in conductivity due to chemical leakage, and as a result, the reliability of the chemical leakage detection sensor is degraded.

Embodiments of the present invention have an object of providing a chemical liquid leakage detection sensor that can accurately determine whether or not the chemical liquid leakage using a metal material having a high selectivity.

According to an aspect of the present invention for achieving the above object, a chemical liquid leak detection sensor for detecting whether the chemical liquid is leaked from the chemical liquid tank is stored, the base substrate and spaced apart from each other on the base substrate are arranged side by side A pair of main electrode lines for forming a resistance circuit, and disposed across the main electrode lines on the base substrate, electrically connected to the main electrode lines, and having a selectivity in a chemical reaction to detect leakage of the chemical liquid. an insulating layer having a sensing electrode line made of a material having a selectivity, and a via hole formed on the base substrate to cover the sensing electrode line and partially exposing the sensing electrode line so that the leaked chemical liquid contacts the sensing electrode line It may include.

According to embodiments of the present invention, the sensing electrode line may be made of a material that can be determined according to the reactivity to water or the chemical species corresponding to the chemical liquid.

In example embodiments, the via hole may be positioned in an area between the main electrode lines.

According to embodiments of the present invention, the sensing electrode line may be provided in plurality, and the plurality of sensing electrode lines are made of different materials to react to different chemical liquids and are spaced apart from each other along the length direction of the main electrode line. Can be arranged side by side.

According to embodiments of the present invention, the via hole may be provided in plurality, and the plurality of via holes may be provided corresponding to the plurality of sensing electrode lines.

In some embodiments of the present disclosure, the sensing electrode line may adjust the disconnection time of the sensing electrode line by the reaction with the chemical liquid according to the width and thickness of the sensing electrode line, and the sensing electrode line may be formed of the chemical liquid. It may have a thickness that can be adjusted according to the concentration.

In embodiments of the present invention, a width of the via hole may be greater than a wiring width of the sensing electrode line in a length direction of the main electrode line.

In example embodiments, the sensing electrode line may extend in a direction perpendicular to a length direction of the main electrode line.

According to the embodiments of the present invention as described above, the chemical leak detection sensor has a sensing electrode line for the chemical reaction with the leaked chemical liquid separately from the main electrode lines for forming a resistance circuit, thereby the thickness of the sensing electrode line The change width of the resistance value according to the change is large, and accordingly, leakage of the chemical liquid can be accurately detected.

In particular, the sensing electrode line may be made of various materials in consideration of the chemical species corresponding to the chemical liquid or the reactivity with water, so that the leakage of the chemical liquid can be detected quickly and accurately. It can be detected accurately.

In addition, since the sensing electrode line is configured separately from the main electrode lines, the wiring width and thickness of the sensing electrode line can be easily changed according to the concentration of the chemical liquid stored in the chemical tank, and the sensing electrode line for the reaction with the chemical liquid Wide selection of materials. As a result, the material of the sensing electrode line can be selected according to the chemical species of the chemical liquid and the environmental conditions in which the chemical liquid leakage sensor is installed. Therefore, the chemical liquid leakage sensor can be easily manufactured according to the characteristics of the chemical liquid, and the sensing accuracy can be improved. have.

In addition, the chemical liquid leak detection sensor may include a plurality of sensing electrode lines reacting with different chemical species, and thus, leakage of various types of chemical liquids may be detected using one chemical liquid leak detection sensor.

1 is a schematic plan view for explaining a chemical liquid leakage detection sensor according to an embodiment of the present invention.

2 is a cross-sectional view taken along the line II ′ of FIG. 1.

3 to 5 are schematic cross-sectional views illustrating a process in which the sensing electrode line illustrated in FIG. 2 reacts with the leaked chemical liquid.

6 is a schematic plan view for explaining a chemical liquid leakage detection sensor according to another embodiment of the present invention.

Embodiments of the present invention are described in detail below with reference to the accompanying drawings. However, the present invention should not be construed as limited to the embodiments described below and may be embodied in various other forms. The following examples are provided to fully convey the scope of the invention to those skilled in the art, rather than to allow the invention to be fully completed.

In the embodiments of the present invention, when an element is described as being disposed or connected on another element, the element may be disposed or connected directly on the other element, with other elements interposed therebetween. May be Alternatively, if one element is described as being directly disposed or connected on another element, there may be no other element between them. Terms such as first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or parts, but the items are not limited by these terms. Will not.

The terminology used in the embodiments of the present invention is merely used for the purpose of describing particular embodiments and is not intended to limit the present invention. Also, unless stated otherwise, all terms including technical and scientific terms have the same meaning as would be understood by one of ordinary skill in the art having ordinary skill in the art. Such terms, such as those defined in conventional dictionaries, will be construed as having meanings consistent with their meanings in the context of the related art and description of the invention, and ideally or excessively intuitional unless otherwise specified. It will not be interpreted.

Embodiments of the invention are described with reference to schematic illustrations of ideal embodiments of the invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected sufficiently. Accordingly, embodiments of the invention are not to be described as limited to the particular shapes of the areas described as the illustrations, but include variations in the shapes, and the elements described in the figures are entirely schematic and their shapes Is not intended to describe the precise shape of the elements nor is it intended to limit the scope of the invention.

FIG. 1 is a schematic plan view for describing a chemical leakage sensor according to an exemplary embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line II ′ of FIG. 1.

1 and 2, the chemical liquid leak detection sensor 101 according to an embodiment of the present invention may be installed outside the chemical tank (not shown) for storing the chemical, and whether or not the chemical liquid leak of the chemical tank Detect. In particular, the chemical leakage detection sensor 101 detects the leakage of the chemical liquid by using a metal material having a high selectivity to react by selecting a specific chemical species, can react by distinguishing water and the chemical liquid, and whether or not the leakage of the chemical liquid It can be detected accurately.

The chemical leak detection sensor 101 includes a base substrate 110, a pair of

main electrode lines

120A and 120B formed on the base substrate 110, and the

main electrode lines

120A and 120B. A sensing electrode line 130 formed on the base substrate 110 and configured to sense leakage of the chemical liquid of the chemical tank, and a sensing electrode line formed on the base substrate 110 on which the sensing electrode line 130 is formed. It may include an insulating layer 140 to protect (130).

Specifically, the base substrate 110 may be made of a chemical resistant insulating material such as polyethylene, polycarbonate, silicon oxide, polyimide, etc. as an insulating substrate.

As shown in FIG. 2, the

main electrode lines

120A and 120B for forming a resistance circuit may be disposed on the upper surface of the base substrate 110 to be spaced apart from each other, and the main electrode lines ( 120A and 120B may be made of a conductive metal material for conduction.

In an embodiment of the present invention, the

main electrode lines

120A and 120B may be made of a metal material including any one of aluminum, copper, chromium, cobalt, tungsten, gold, palladium, platinum, and the like.

The sensing electrode line 130 may be formed on the base substrate 110 on which the

main electrode lines

120A and 120B are formed. As shown in FIG. 1, the sensing electrode line 130 extends in a direction perpendicular to the length direction of the

main electrode lines

120A and 120B and is disposed to cross the

main electrode lines

120A and 120B. The lower surface partially contacts the upper surfaces of the

main electrode lines

120A and 120B. The sensing electrode line 130 may be made of a conductive metal material to be conductive with the

main electrode lines

120A and 120B.

In particular, the sensing electrode line 130 may be made of a material having a selectivity during a chemical reaction in order to detect whether the chemical liquid stored in the chemical tank is leaked. That is, the sensing electrode line 130 may be formed of a metal material having a high selectivity. In this case, the material of the sensing electrode line 130 may be determined according to a chemical species corresponding to reactivity with water or the chemical liquid.

For example, when the chemical liquid leak detection sensor 101 is a sensor for detecting the leakage of the chemical liquid by separating the chemical and water regardless of the chemical species of the chemical liquid stored in the chemical tank, the sensing electrode line ( 130 may be made of aluminum. Aluminum is soluble in both acidic and alkaline solutions but insoluble in water. Therefore, when the sensing electrode line 130 is made of aluminum, the sensing electrode line 130 does not react with water, such as rain water mixed from the outside, but reacts with an acidic or alkaline chemical liquid stored in the chemical tank. As a result, the chemical liquid detection sensor 101 can detect the leakage of the chemical liquid by distinguishing it from water. In addition, when the chemical liquid detection sensor 101 is a sensor for detecting the leakage of the chemical liquid according to the chemical species corresponding to the chemical liquid, the sensing electrode line 130 may be made of chromium. Chromium is soluble in water and alkaline solutions, but not in acidic solutions. Therefore, when the sensing electrode line 130 is made of aluminum, the sensing electrode line 130 reacts only with an acidic chemical liquid, and as a result, the chemical liquid leakage sensor 101 detects leakage of the acidic chemical liquid stored in the chemical liquid tank. Can be detected.

In one embodiment of the present invention, any one of aluminum, copper, chromium, cobalt, tungsten, gold, palladium, platinum, etc. may be used as the material of the sensing electrode line 130.

The insulating layer 140 is deposited on the base substrate 110 on which the sensing electrode line 130 is formed, and the insulating layer 140 covers the sensing electrode line 130. The insulating layer 140 includes a via hole 142 partially exposing the sensing electrode line 130 so that the chemical liquid leaked from the chemical tank contacts the sensing electrode line 130. It is located in the region between the

main electrode lines

120A and 120B.

In one embodiment of the present invention, the width of the

main electrode lines

120A and 120B in the longitudinal direction may be greater than the wiring width of the sensing electrode line 130.

The chemical liquid leaked from the chemical tank may contact the upper surface of the sensing electrode line 130 through the via hole 142, and the sensing electrode line 130 may be in contact with the leaked chemical liquid. Dissolves in response to the chemical solution. Due to this dissolution phenomenon, the sensing electrode line 130 may have a thickness smaller than an initial thickness of the contact portion of the leaked chemical liquid. As a result, the resistance value of the chemical leakage detection sensor 101 is higher than the initial resistance value, it is possible to recognize the leakage of the chemical liquid through such a change in the resistance value. At this time, the resistance value of the chemical liquid leak detection sensor 101 increases as the thickness of the sensing electrode line 130 in contact with the leaked chemical liquid becomes thinner.

Hereinafter, a change in the thickness and the resistance value of the sensing electrode line 130 caused by the leaked chemical will be described in detail.

3 to 5, when the chemical liquid leaks from the chemical tank and flows into the via hole 142, initially, the via hole 142 is removed from the sensing electrode line 130 as shown in FIG. 3. The exposed portion 132 is partially etched by the leaked chemical liquid 10. Then, as shown in FIG. 4, the portion 132 exposed through the via hole 142 is more and more etched by the leaked chemical liquid 10, and as shown in FIG. 5, the via hole 142 is removed. The exposed portion 132 may be completely opened to disconnect the sensing electrode line 130. When the sensing electrode line 130 is disconnected as described above, the resistance value of the chemical leakage sensor 101 may change rapidly, thereby detecting leakage of the chemical solution. That is, when the resistance value output from the chemical leakage sensor 101 is the same as the resistance value at the time of disconnection of the sensing electrode line 130, it may be recognized that the chemical liquid leaks from the chemical tank.

Here, the time required for the sensing electrode line 130 to be disconnected depends on the wiring width and thickness of the sensing electrode line 130, and the thickness of the sensing electrode line 130 depends on the concentration of the chemical liquid. Can be set.

As described above, the chemical liquid leak detecting sensor 101 is a separate sensing electrode line 130 for chemical reaction with the leaked chemical liquid 10 in addition to the

main electrode lines

120A and 120B for forming a resistance circuit. By providing a), the change width of the resistance value according to the thickness change of the sensing electrode line 130 is large, and accordingly, the leakage of the chemical liquid can be accurately detected.

In particular, the sensing electrode line 130 may be made of various materials in consideration of the chemical species corresponding to the chemical liquid or the reactivity with water, so that the leakage of the chemical liquid may be detected quickly and accurately, and the leaked chemical liquid 10 may be detected. Even if rainwater is mixed in, the leakage of chemicals can be detected accurately.

In addition, since the sensing electrode line 130 is configured separately from the

main electrode lines

120A and 120B, the wiring width and thickness of the sensing electrode line 130 can be easily changed according to the concentration of the chemical liquid stored in the chemical tank. It can be changed and manufactured so as to have a wide range of material selection of the sensing electrode line 130 for reaction with the chemical liquid. As a result, it is possible to select the material of the sensing electrode line 130 according to the chemical species of the chemical liquid and the environmental conditions in which the chemical liquid leakage sensor 101 is installed, so that the chemical liquid leakage sensor according to the characteristics of the chemical liquid ( 101) is easy to manufacture, and can improve the sensing accuracy.

Referring to FIG. 6, the chemical liquid leak detecting sensor 102 according to another embodiment of the present invention is the same as the chemical liquid leak detecting sensor 101 illustrated in FIG. 1 except for the

sensing electrode lines

130A, 130B, and 130C. Since it has a structure, the same structure as the chemical liquid leak detection sensor 101 shown in FIG. 1 is shown with reference numerals, and detailed description is abbreviate | omitted.

In detail, the chemical leakage sensor 102 may include a plurality of

sensing electrode lines

130A, 130B, and 130C, unlike the chemical leakage sensor 101 shown in FIG. 1. The

sensing electrode lines

130A, 130B, and 130C are formed on the base substrate 110 on which the

main electrode lines

120A and 120B are formed, respectively, and extend in the width direction of the

main electrode lines

120A and 120B. do. The

sensing electrode lines

130A, 130B, and 130C may be disposed side by side to be spaced apart from each other in the longitudinal direction of the

main electrode lines

120A and 120B, and cross the

main electrode lines

120A and 120B, respectively. Can be arranged to squeeze.

In particular, the

sensing electrode lines

130A, 130B, and 130C may be formed of different materials to react to different chemical liquids. Accordingly, since the leak of the chemical liquid of various chemical species can be detected by one chemical leakage sensor 102, it is not necessary to change to the corresponding chemical liquid leakage detection sensor according to the type of liquid chemical stored in the chemical tank and various kinds of chemical liquids. Can detect leaks. In addition, chemical liquid leakage of a plurality of chemical tanks in which chemical liquids of different chemical species are stored may be detected by the chemical liquid leakage detecting sensor 102.

An insulating layer 140 (see FIG. 2) may be formed on the base substrate 110 on which the

sensing electrode lines

130A, 130B, and 130C are formed, and the insulating layer 140 may include the sensing electrode lines 130A. , 130B, 130C may be provided with a plurality of via

holes

142A, 142B, 142C to partially expose. The via holes 142A, 142B, and 142C may be provided to correspond to the

sensing electrode lines

130A, 130B, and 130C, and may be located in an area between the

main electrode lines

120A and 120B.

The chemical liquid leakage sensor according to the present invention is installed outside the chemical liquid tank in which the chemical liquid is stored, and may detect leakage of the chemical liquid when the chemical liquid leaks from the chemical liquid tank. Therefore, the chemical liquid leak detection sensor can be applied throughout the industrial equipment having a chemical liquid tank. For example, the chemical leakage detection sensor may be applied to a wireless transmission / reception facility using a low power device.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

Claims

A base substrate;

A pair of main electrode lines spaced apart from each other on the base substrate to form a resistance circuit;

A sensing electrode disposed on the base substrate to cross the main electrode lines, electrically connected to the main electrode lines, and made of a material having selectivity during chemical reaction to detect leakage of the chemical liquid from the chemical tank; line; And

A chemical liquid leak detection sensor formed on the base substrate to cover the sensing electrode line and having a via hole for partially exposing the sensing electrode line so that the leaked chemical liquid contacts the sensing electrode line .
The method of claim 1,

The sensing electrode line is a chemical liquid detection sensor, characterized in that it comprises a material that can be determined according to the chemical species corresponding to the reactivity to water or the chemical liquid.
The method of claim 1,

The via hole is a chemical leakage detection sensor, characterized in that located in the region between the main electrode line.
The method of claim 1,

The sensing electrode line may be provided in plurality.

The plurality of sensing electrode lines are made of different materials to react to different chemical liquids, and the chemical liquid leak detection sensor, characterized in that arranged side by side spaced apart from each other along the longitudinal direction of the main electrode line.
The method of claim 4, wherein

The via hole may be provided in plurality.

And a plurality of via holes corresponding to the plurality of sensing electrode lines.
The method of claim 1,

The sensing electrode line adjusts the disconnection time of the sensing electrode line by the reaction with the chemical liquid according to the width and thickness of the sensing electrode line,

The sensing electrode line is a chemical liquid leakage sensor, characterized in that having a thickness that can be adjusted according to the concentration of the chemical liquid.
The method of claim 1,

In the longitudinal direction of the main electrode line, the width of the via hole is larger than the wiring width of the sensing electrode line, the chemical liquid leakage sensor.
The chemical liquid leakage sensor of claim 1, wherein the sensing electrode line extends in a direction perpendicular to a length direction of the main electrode line.