WO2018072542A1 - 用于坩埚的加料装置 - Google Patents

用于坩埚的加料装置 Download PDF

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Publication number
WO2018072542A1
WO2018072542A1 PCT/CN2017/096536 CN2017096536W WO2018072542A1 WO 2018072542 A1 WO2018072542 A1 WO 2018072542A1 CN 2017096536 W CN2017096536 W CN 2017096536W WO 2018072542 A1 WO2018072542 A1 WO 2018072542A1
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WIPO (PCT)
Prior art keywords
mechanical
arm
crucible
bottle
base
Prior art date
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Ceased
Application number
PCT/CN2017/096536
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English (en)
French (fr)
Inventor
罗昶
吴海东
郑克宁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to US15/750,464 priority Critical patent/US10676288B2/en
Publication of WO2018072542A1 publication Critical patent/WO2018072542A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G65/00—Loading or unloading
    • B65G65/23—Devices for tilting and emptying of containers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Definitions

  • the present disclosure relates to the field of display, and more particularly to a feeding device for a crucible.
  • organic materials in the display panel can be formed by evaporating the organic material onto the substrate using ruthenium.
  • the organic material to be evaporated is first added to the crucible, and then the crucible is heated to sublimate the organic material in the crucible and condense on the substrate above the crucible.
  • the organic material is usually in powder form and is contained in a narrow-mouth material bottle.
  • the operator manually picks up the material bottle, adding organic material from the end of the crucible to the crucible; and moving the material bottle along the axial direction of the crucible during the addition of the organic material to fill the entire crucible .
  • the present disclosure provides a feeding device for a crucible.
  • the feeding device comprises: a base, a mechanical arm and a bottle holder; the base is movably connected to one end of the mechanical arm, and one end of the mechanical arm can perform linear motion on the base, and the movement path of the mechanical arm Parallel to the length direction of the crucible; the bottle holder is disposed on the other end of the robot arm and the bottle holder is rotatable on the other end.
  • the base is provided with a translation rail whose longitudinal direction is parallel to the longitudinal direction of the crucible; one end of the mechanical arm is located in the translation rail and is slidable within the translation rail.
  • the mechanical arm includes a mechanical upper arm, a mechanical lower arm and a first rotating component; one end of the mechanical lower arm is movably connected to the base, and the other end passes through the first rotating component and the mechanical upper arm One end is spliced; the bottle holder is disposed on the other end of the mechanical upper arm.
  • the method further includes a sliding component and a second rotating component; the sliding component is movably connected to the base; and one end of the mechanical lower arm is spliced with the sliding component by the second rotating component.
  • the base is provided with a translating track whose longitudinal direction is parallel to the longitudinal direction of the crucible; the sliding member is located in the translating track and is slidable within the translating track.
  • the method further includes: a third rotating component, wherein the bottle clamp is disposed at the other end of the mechanical upper arm through the third rotating component.
  • the method further includes: a first vibration unit; the first vibration unit is fixed on the other end of the mechanical arm, and the bottle holder is disposed on the first vibration unit.
  • the first vibration unit is a vibrator.
  • the method further includes: a weighing component, the crucible being placed on the weighing component.
  • the weighing component is provided with a weight display.
  • the weighing component is an electronic scale.
  • the method further includes: a second vibration unit disposed in the weighing component and located below the crucible.
  • the weighing component is connected to the base.
  • the method further includes: a fixing mechanism disposed on the weighing component for fixing the cymbal on the weighing component.
  • the technical solution provided by the present disclosure has the beneficial effects that in the embodiment of the present disclosure, since the mechanical arm can perform linear motion parallel to the length direction of the crucible, the length of the material bottle along the bottle holder can be driven by the mechanical arm.
  • the direction of the linear motion, and the bottle holder is rotatable can drive the material bottle to rotate, to gradually pour the material in the material bottle into the crucible, thereby automatically adding material to the crucible, without the operator manually adding material, protecting The operator's body improves production efficiency.
  • the automatic addition of materials does not spill materials outside, avoiding waste and reducing production costs.
  • FIG. 1 is a schematic structural view of a feeding device for a crucible provided by an embodiment of the present disclosure
  • FIG. 2 is a schematic structural view of a sliding member of a charging device according to an embodiment of the present disclosure
  • FIG. 3 is a schematic structural view of a sliding member and a smooth track of a charging device according to an embodiment of the present disclosure
  • FIG. 4 is a schematic structural view of another feeding device for a crucible provided by an embodiment of the present disclosure.
  • FIG. 5 is a schematic structural diagram of another feeding device for a crucible according to an embodiment of the present disclosure.
  • FIG. 6 is a schematic structural view of a weighing component of a charging device according to an embodiment of the present disclosure.
  • an embodiment of the present invention provides a feeding device for a crucible, the feeding device comprising:
  • the base 1 is movably connected to one end of the robot arm 2, and one end of the robot arm 2 can perform linear motion on the base 1, and the movement trajectory of the robot arm 2 is parallel to the length direction of the cymbal 4;
  • the bottle holder 3 is disposed on the other end of the robot arm 2 and the bottle holder 3 is rotatable on the other end of the robot arm 2.
  • the bottle holder 3 is used for holding the material bottle 5, and the line source 4 is placed directly below the bottle holder 3, that is, directly under the material bottle 5 held by the bottle holder 3.
  • a line source that is, a crucible having a substantially linear shape.
  • the substantially linear shape means that the size of the crucible in the longitudinal direction is much larger than the dimension in the width direction.
  • ⁇ types of other shapes e.g., circular or elliptical ⁇ , etc.
  • the object and technical effects of the present application can be achieved as long as the mechanical arm drives the bottle holder to move linearly along the long axis direction or the diametrical direction of the circular or elliptical shape.
  • the bottle holder 3 holds the material bottle 5 and rotates The material bottle 5 is tilted and the mouth of the bottle is aligned with the source ⁇ 4 to pour the material into the line source ⁇ 4.
  • the robot arm 2 performs linear motion parallel to the length direction of the line source ⁇ 4 on the base, so that the material bottle 5 is linearly moved parallel to the length direction of the line source ⁇ 4 directly above the source ⁇ 4 to The material in the bottle 5 is evenly poured into the source source 4 .
  • the bottle holder 3 is rotated on the other end of the robot arm 2 to drive the bottle mouth of the material bottle 5 to rotate downward, so that the material in the material bottle 5 is continuously poured to Line source ⁇ 4.
  • the feeding device may further include a control module (not shown), and the control module may be disposed on the base 1, the robot arm 2 or the bottle holder 3 for performing linear motion of the robot arm 2 The rotation speed of the bottle holder 3 is controlled.
  • the angular velocity of the control module for controlling the rotation of the bottle holder 3 V ⁇ can be:
  • V g is the translational speed of the robot arm 2, and the arm 2 is moving at a constant speed
  • m is the mass of the required material
  • ⁇ is the density of the required material
  • L is the length of the line source ⁇ 4.
  • L may be the length of one line source ⁇ 4, or may be the length of a plurality of line sources ⁇ 4 in series
  • d ⁇ /dv2 is the relationship between the volume of the material poured out of the material bottle 5 and the inclination angle of the material bottle, It is a value measured in advance.
  • the base 1 is provided with a translation rail 11 , and the length direction of the translation rail 11 is parallel to the longitudinal direction of the line source 4; one end of the robot arm 2 is located in the translation rail 11 and can slide in the translation rail 11 .
  • the mechanical arm 2 includes a mechanical upper arm 21, a mechanical lower arm 22 and a first rotating member 23;
  • One end of the mechanical lower arm 22 is movably coupled to the base 1, and the other end is spliced to one end of the upper mechanical arm 21 by the first rotating member 23; the bottle holder 3 is disposed on the other end of the upper mechanical arm 21.
  • one end of the mechanical lower arm 22 may be located in the translation rail 11 disposed on the base 1, and one end of the mechanical lower arm 22 may be parallel to the line source 4 in the translation rail 11. Linear motion in the length direction.
  • the bottle holder 3 is rotatable on the other end of the upper mechanical arm 21.
  • the mechanical upper arm 21 can be rotated relative to the mechanical lower arm 22, so that the mechanical upper arm 21 is rotated by controlling the first rotating member 23 to make the bottle
  • the mouth of the material bottle 5 held by the clip 3 is located directly above the line source ⁇ 4.
  • the first rotating member 23 may be a rotating shaft.
  • the robot arm 2 further includes a sliding member 24 and a second rotating member 25;
  • the sliding member 24 is movably coupled to the base 1; and one end of the mechanical lower arm 22 is spliced to the sliding member 24 by the second rotating member 25.
  • the mechanical lower arm 22 since the mechanical lower arm 22 is spliced with the sliding member 24 by the second rotating member 25, the mechanical lower arm 22 can be rotated relative to the sliding member 24, so that the mechanical lower arm 22 is rotated by controlling the second rotating member 25, and by control
  • the first rotating member 23 rotates the upper mechanical arm 21, and the bottle opening of the material bottle 5 held by the bottle holder 3 can be more flexibly positioned directly above the line source 4 .
  • the angle of rotation can be controlled mechanically by the control module 22 of the lower arm of ⁇ 1 and the mechanical arm 21 of the rotation angle ⁇ 2, of the bottle holder 3 holding the bottle finish material source line 5 is located just above the crucible 4.
  • the rotation angle ⁇ 1 of the mechanical lower arm 22 is an angle between the mechanical lower arm 22 and the vertical direction
  • the rotation angle ⁇ 2 of the mechanical upper arm 21 is an angle between the mechanical upper arm 21 and the horizontal direction.
  • L 1 is the length of the mechanical lower arm 22
  • L 2 is the length of the mechanical upper arm 21.
  • C is the length of the bottle holder 3
  • h is the height of the material bottle 5
  • d is the distance from the holding position of the bottle holder 3 holding the material bottle 5 to the bottom of the material bottle 5
  • ⁇ is the material.
  • the control module needs to obtain the inclination angle ⁇ of the material bottle 5 in real time, and calculate the bottle mouth position (x 0 , y 0 ) of the material bottle 5 by the above formula (3) according to the inclination angle ⁇ of the material bottle 5; the rotation angle of the equation (2) to calculate the mechanical arm 22 under the ⁇ 1 and the mechanical arm 21 of the rotation angle ⁇ 2; ⁇ 2 in accordance with the rotation angle of the mechanical arm 22 is rotated an angle ⁇ 1 and the mechanical arm 21, the control of the first rotary member
  • the second rotating member 25 rotates the upper mechanical arm 21 and the lower mechanical arm 22 such that the position of the bottle opening of the material bottle 5 is always directly above the line source ⁇ 4.
  • an angle measuring module (not shown) may be disposed on the bottle holder 3, and the angle measuring module may measure the tilt angle ⁇ of the material bottle 5 in real time and send the tilt angle ⁇ to the control module.
  • the control module can calculate the inclination angle ⁇ of the material bottle 5 in real time based on the rotational speed V ⁇ of the bottle holder 3 and the time the robot arm 2 moves.
  • the angle measuring module can be a gravity sensor, an angular velocity sensor, or a gyroscope.
  • the sliding member 24 may be located in the translational track 11 provided on the base 1, and the sliding member 24 may perform linear motion in the translational track 11 parallel to the length direction of the line source.
  • the second rotating member 25 may be a rotating shaft.
  • the sliding member 24 may include a rack 241 and a connecting portion 242, the connecting portion 242 is fixed to one end of the rack 241, and the connecting portion 242 is spliced to the mechanical lower arm 22 by the second rotating member 25.
  • the connecting portion 242 and the rack 241 may be integrally formed or the connecting portion 242 may be welded to the rack 241.
  • the rack 241 is located in the translation rail 11 of the base 1; the first gear 12 and the second gear 13 may be disposed in the translation rail 11, the first gear 12 and the second The gears 13 are located on both sides of the rack 241 and mesh with the rack 241.
  • a first rotating shaft 14 and a second rotating shaft 15 may be fixed on a bottom surface of the translation rail 11.
  • the first gear 12 is mounted on the first rotating shaft 14 and rotates around the first rotating shaft 14, and the second gear 13 is mounted on the first rotating shaft 14
  • the two rotating shafts 15 rotate on the second rotating shaft 15.
  • the rack 241 can be driven to linearly move in the translation rail 11, thereby driving the robot arm 2 to perform linear motion in the translation rail 11.
  • the feeding device further comprises: a third rotating member 31, and the bottle holder 3 is disposed at the other end of the mechanical upper arm 21 through the third rotating member 31.
  • the control module can drive the bottle holder 3 to rotate on the other end of the mechanical upper arm 21 by controlling the third rotating member 31.
  • the feeding device further includes: a first vibration unit 6;
  • the first shock unit 6 is fixed to the other end of the robot arm 2, and the bottle holder 3 is disposed on the first shock unit 6.
  • the first shock unit 6 may be fixed to the other end of the mechanical upper arm 21.
  • the first shock unit 6 can vibrate and drive the material bottle 5 held by the bottle holder 3 to vibrate together, so that the particles in the material bottle 5 can be made.
  • the material or the viscous material can be uniformly poured into the line source ⁇ 4.
  • the first vibration unit 6 may be a vibrator or the like.
  • the feeding device may further comprise: a weighing component 7 on which the wire source ⁇ 4 is placed.
  • a weight display 71 is further disposed on the weighing component 7.
  • the weight of the material in the line source 4 can be measured in real time by the weighing member 7 and displayed on the weight display 71, so that the technician can see the weight of the material in the current line source 4 in real time.
  • the weighing component 7 can be an electronic scale.
  • the retrofitting device further comprises: a second vibration unit 8 disposed in the weighing component 7 and located below the line source 4 .
  • a mounting hole is provided on the weighing member 7 and below the line source 4, and the second shock unit 8 can be mounted in the mounting hole.
  • the second vibration unit 8 may be a vibrator or the like.
  • the vibration of the second vibration unit 8 can be controlled to drive the line source ⁇ 4 located above the second vibration unit 8 to vibrate, so that the material in the line source ⁇ 4 becomes uniform.
  • the weighing component 7 is connected to the base 1.
  • control module can be located in the base 1, and the weighing component 7 can be connected to the control module through a connecting line, and the control module can control the weighing component 7 to weigh the material in the line source ⁇ 4 to obtain the material weight, and will obtain The material weight is displayed on the weight display 71.
  • control module can also control the vibration of the second vibration unit 8 to make the material in the line source ⁇ 4 uniform.
  • the feeding device further comprises: a fixing mechanism 9 disposed on the weighing component 7 for fixing the wire source 4 to the weighing component 7.
  • the fixing mechanism 9 may include four fixing pieces by which the four corners of the line source 4 are fixed to the weighing member 7.
  • the line source ⁇ 4 may be one or more, and when there are multiple, the plurality of line sources ⁇ 4 may be connected in series.
  • control module controls the material bottle 5 to rotate to be completely vertical, it means that all the materials in the material bottle 5 are added to the line source 4, and the material bottle 5 is an empty bottle. At this time, if the material added to the line source ⁇ 4 is insufficient, the control module can alarm to replace the material bottle 5.
  • the mechanical bottle can be used to drive the material bottle clamped on the bottle holder to linearly move along the length direction of the line source, and the bottle holder It is rotatable and can drive the material bottle to rotate, so that the material in the material bottle can be gradually poured into the crucible, thereby automatically adding materials to the line source, without the operator manually adding materials, protecting the operator's body and improving Production efficiency, in addition, the automatic addition of materials is not easy to spill materials outside the source, avoiding waste and reducing production costs.
  • the object and technical effects of the present application can be achieved as long as the mechanical arm drives the bottle holder to move linearly along the long axis direction or the diametrical direction of the circular or elliptical shape.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Basic Packing Technique (AREA)

Abstract

一种用于坩埚的加料装置，属于显示领域。所述加料装置包括：底座（1）、机械臂（2）和瓶夹（3）；所述底座（1）与所述机械臂（2）的一端活动连接，所述机械臂的一端可在所述底座上做线性运动，所述机械臂的运动轨迹平行于所述坩埚（4）的长度方向；所述瓶夹（3）设置在所述机械臂的另一端上且所述瓶夹可在所述另一端上转动。本加料装置能够保护操作员的身体，提高生产效率以及降低生产成本。

Description

用于坩埚的加料装置 技术领域
本公开涉及显示领域，特别涉及一种用于坩埚的加料装置。
背景技术
在显示领域里，显示面板里的有机材料，比如基板上的有些有机材料，可以通过使用坩埚将有机材料蒸镀到基板上而形成。在蒸镀时先将需要蒸镀的有机材料添加到坩埚内，然后加热坩埚，使坩埚内的有机材料升华并凝结在坩埚上方的基板上。
有机材料通常是粉末状，装在窄口的材料瓶中。在向坩埚添加有机材料时，操作员手动拿起材料瓶，从坩埚的一端开始向坩埚内添加有机材料；且在添加有机材料的过程中沿坩埚的轴向移动材料瓶，以加满整个坩埚。
本公开的发明人发现，当前的有机材料的人工添加系统至少存在以下问题：
第一、现存部分有机材料是有毒的，操作员在向坩埚内添加有机材料的过程中，容易吸入有机材料，对操作员的身体造成极大的伤害。
第二、操作员手动添加有机材料的速度慢，导致生产效率低下。
第三、操作员手动添加有机材料，容易将有机材料洒在坩埚外，造成浪费，提高了生产成本。
本公开内容
为了保护操作员的身体，提高生产效率以及降低生产成本，本公开提供了一种用于坩埚的加料装置。所述加料装置包括：底座、机械臂和瓶夹；所述底座与所述机械臂的一端活动连接，所述机械臂的一端可在所述底座上做线性运动，所述机械臂的运动轨迹平行于所述坩埚的长度方向；所述瓶夹设置在所述机械臂的另一端上且所述瓶夹可在所述另一端上转动。
可选的，所述底座设有平移轨道，所述平移轨道的长度方向与所述坩埚的长度方向平行；所述机械臂的一端位于所述平移轨道内且可在所述平移轨道内滑动。
可选的，所述机械臂包括机械上臂，机械下臂和第一转动部件；所述机械下臂的一端与所述底座活动连接，另一端通过所述第一转动部件与所述机械上臂的一端绞接；所述瓶夹设置在所述机械上臂的另一端上。
可选的，还包括滑动部件和第二转动部件；所述滑动部件与所述底座活动连接；所述机械下臂的一端通过所述第二转动部件与所述滑动部件绞接。
可选的，所述底座设有平移轨道，所述平移轨道的长度方向与所述坩埚的长度方向平行；所述滑动部件位于所述平移轨道内且可在所述平移轨道内滑动。
可选的，还包括：第三转动部件，所述瓶夹通过所述第三转动部件设置在所述机械上臂的另一端。
可选的，还包括：第一震动单元；所述第一震动单元固定在所述机械臂的另一端上，所述瓶夹设置在所述第一震动单元上。
可选的，所述第一震动单元为震动器。
可选的，还包括：称重部件，所述坩埚放置在所述称重部件上。
可选的，所述称重部件上设有重量显示屏。
可选的，所述称重部件为电子称。
可选的，还包括：第二震动单元，所述第二震动单元设置在所述称量部件中且位于所述坩埚的下方。
可选的，所述称重部件与所述底座相连。
可选的，还包括：固定机构，所述固定机构设置在所述称重部件上，用于将所述坩埚固定在所述称重部件上。
本公开提供的技术方案的有益效果是：在本公开实施例中，由于机械臂可以做平行于坩埚长度方向的线性运动，这样可以通过机械臂带动夹在瓶夹上的材料瓶沿坩埚的长度方向做线性运动，且瓶夹是可转动的，可以带动材料瓶转动，以将材料瓶内的材料逐渐倒入坩埚内，从而实现向坩埚内自动添加材料，无需操作员手动添加材料，保护了操作员的身体，提高生产效率，另外，自动添加材料不会将材料洒在坩埚外，避免浪费，降低生产成本。
附图说明
图1是本公开实施例提供的一种用于坩埚的加料装置的结构示意图；
图2是本公开实施例提供的加料装置的滑动部件的结构示意图；
图3是本公开实施例提供的加料装置的滑动部件与平滑轨道的结构示意图；
图4是本公开实施例提供的另一种用于坩埚的加料装置的结构示意图；
图5是本公开实施例提供的另一种用于坩埚的加料装置的结构示意图；
图6是本公开实施例提供的加料装置的称重部件的结构示意图。
具体实施方式
为使本公开的目的、技术方案和优点更加清楚，下面将结合附图对本公开实施方式作进一步地详细描述。
实施例
参见图1，本发明实施例提供了一种用于坩埚的加料装置，该加料装置包括：
底座1、机械臂2和瓶夹3；
底座1与机械臂2的一端活动连接，机械臂2的一端可在底座1上做线性运动，机械臂2的运动轨迹平行于坩埚4的长度方向；
瓶夹3设置在机械臂2的另一端上且瓶夹3可在机械臂2的另一端上转动。
其中，参见图1，瓶夹3用于夹持材料瓶5，线源坩埚4被放置在瓶夹3的正下方，即位于瓶夹3夹持的材料瓶5的正下方。
需要说明的是，为了阐述方便起见，以下以线源坩埚，即形状大致呈线状的坩埚为例进行说明。大致呈线状意思为坩埚在长度方向的尺寸远大于其在宽度方向的尺寸。应当理解，对于其它形状的坩埚类型(例如圆形或椭圆形坩埚等)同样也适用。例如，对于圆形或椭圆形坩埚而言，只要机械臂带动瓶夹沿圆形或椭圆形坩埚的长轴方向或直径方向做线性运动，就同样可达到本申请的发明目的和技术效果。
当使用该加料装置给线源坩埚加料时，瓶夹3夹持材料瓶5，转动 使材料瓶5倾斜并使瓶口对准线源坩埚4，以向线源坩埚4内倾倒材料。同时机械臂2在底座上做平行于线源坩埚4的长度方向的线性运动，以使材料瓶5在线源坩埚4的正上方做平行于线源坩埚4的长度方向的线性运动，以将材料瓶5中的材料均匀地倾倒在线源坩埚4内。
其中，机械臂2在做线性运动的同时，瓶夹3会在机械臂2的另一端上转动，以带动材料瓶5的瓶口向下转动，使材料瓶5内的材料源源不断地倾倒到线源坩埚4内。
可选的，该加料装置还可以包括控制模块(图中未画出)，该控制模块可以设置在底座1、机械臂2或瓶夹3上，用于在机械臂2做线性运动的过程中控制瓶夹3转动的转速。
其中，在机械臂2做线性运动的过程中，控制模块控制瓶夹3转动的角速度大小Vθ可以为：
Vθ＝dθ/dt＝Vgm/ρL·dθ/dv2……(1)；
在上述公式(1)中，Vg为机械臂2的平移速度，且机械臂2均速移动，m为所需要材料的质量，ρ为所需要材料的密度，L为线源坩埚4的长度，其中L可以为一个线源坩埚4的长度，也可以是多个线源坩埚4串接后的长度，dθ/dv2为材料瓶5倒出的材料的体积和材料瓶的倾斜角的关系，其为事先测量得到的值。
可选的，参见图1，底座1设有平移轨道11，平移轨道11的长度方向与线源坩埚4的长度方向平行；机械臂2的一端位于平移轨道11内且可在平移轨道11内滑动。
由于平移轨道11的长度方向与线源坩埚4的长度方向平行，而机械臂2可在平移轨道11内滑动，这样保证了机械臂2可以做平行于线源坩埚4的长度方向的线性运动。
可选的，仍参见图1，机械臂2包括机械上臂21，机械下臂22和第一转动部件23；
机械下臂22的一端与底座1活动连接，另一端通过第一转动部件23与机械上臂21的一端绞接；瓶夹3设置在机械上臂21的另一端上。
可选的，机械下臂22的一端可以位于底座1上设置的平移轨道11内，机械下臂22的一端可以在平移轨道11内做平行于线源坩埚4的 长度方向的线性运动。瓶夹3可以在机械上臂21的另一端上转动。
其中，由于机械下臂22通过第一转动部件23与机械上臂21绞接，这样机械上臂21可以做相对于机械下臂22的转动，这样通过控制第一转动部件23转动机械上臂21，使瓶夹3夹持的材料瓶5的瓶口位于线源坩埚4的正上方。
可选的，第一转动部件23可以为转轴。
可选的，参见图1，机械臂2还包括滑动部件24和第二转动部件25；
滑动部件24与底座1活动连接；且机械下臂22的一端通过第二转动部件25与滑动部件24绞接。
其中，由于机械下臂22通过第二转动部件25与滑动部件24绞接，这样机械下臂22可以相对于滑动部件24转动，这样通过控制第二转动部件25转动机械下臂22，以及通过控制第一转动部件23转动机械上臂21，能够更加灵活地使瓶夹3夹持的材料瓶5的瓶口位于线源坩埚4的正上方。
可选的，可以通过控制模块控制机械下臂22的转动角度θ1和机械上臂21的转动角度θ2，使瓶夹3夹持的材料瓶5的瓶口位于线源坩埚4的正上方。机械下臂22的转动角度θ1为机械下臂22与竖直方向的夹角，机械上臂21的转动角度θ2为机械上臂21与水平方向的夹角。
其中，机械下臂22的转动角度θ1和机械上臂21的转动角度θ2与材料瓶5的瓶口位置(x0，y0)的位置关系满足如下公式(2)所示的关系式：
Figure PCTCN2017096536-appb-000001
在上述公式(2)中，L1为机械下臂22的长度，L2为机械上臂21的长度。
其中，对于材料瓶5的瓶口位置(x0，y0)满足如下公式(3)所示的关系式：
Figure PCTCN2017096536-appb-000002
在上述公式(3)中，C为瓶夹3的长度，h为材料瓶5的高度，d为瓶夹3夹持材料瓶5的夹持位置到材料瓶5的底部的距离，θ为材料瓶5的倾斜角度，即材料瓶5的纵轴线与竖直方向之间的夹角。
通过上述公式(2)和(3)可以看出，由于材料瓶5在加料的过程为不断的转动，使得材料瓶5的瓶口位置不断的变化。因此控制模块需要实时获取材料瓶5的倾斜角度θ，根据材料瓶5的倾斜角度θ，通过上述公式(3)计算出材料瓶5的瓶口位置(x0，y0)；然后再通过上述公式(2)计算出机械下臂22的转动角度θ1和机械上臂21的转动角度θ2；根据机械下臂22的转动角度θ1和机械上臂21的转动角度θ2，控制第一转动部件23和第二转动部件25转动机械上臂21和机械下臂22，以使材料瓶5的瓶口位置始终位于线源坩埚4的正上方。
可选的，可以在瓶夹3上设置一个角度测量模块(图中未画出)，该角度测量模块可以实时测量出材料瓶5的倾斜角度θ并将该倾斜角度θ发送给控制模块。或者，控制模块可以根据瓶夹3的转速Vθ和机械臂2移动的时间实时计算出材料瓶5的倾斜角度θ。
可选的，角度测量模块可以为重力传感器、角速度传感器或陀螺仪等。
可选的，滑动部件24可以位于底座1上设置的平移轨道11内，滑动部件24可以在平移轨道11内做平行于线源坩埚4的长度方向的线性运动。
可选的，第二转动部件25可以为转轴。
其中，滑动部件24的结构有多种，在本实施例举一具体实例，来对滑动部件24进行详细说明。
例如，参见图2，滑动部件24可以包括齿条241和连接部242，连接部242固定在齿条241的一端，且连接部242通过第二转动部件25与机械下臂22绞接。可选的，连接部242和齿条241可以一体成型或者连接部242可以焊接在齿条241上。
相应地，参见图3，齿条241位于底座1的平移轨道11内；平移轨道11内还可以设有第一齿轮12和第二齿轮13，第一齿轮12和第二 齿轮13位于齿条241的两侧并与齿条241啮合。
可选的，在平移轨道11的底面上可以固定有第一转轴14和第二转轴15，第一齿轮12安装在第一转轴14上并围绕第一转轴14转动，第二齿轮13安装在第二转轴15上并围绕第二转轴15转动。在第一齿轮12和第二齿轮13转动时可以带动齿条241在平移轨道11内做线性运动，进而带动机械臂2在平移轨道11内做线性运动。
可选的，参见图1，该加料装置还包括：第三转动部件31，瓶夹3通过第三转动部件31设置在机械上臂21的另一端。控制模块可以通过控制第三转动部件31，带动瓶夹3在机械上臂21的另一端上转动。
可选的，参见图4，该加料装置还包括：第一震动单元6；
第一震动单元6固定在机械臂2的另一端上，瓶夹3设置在第一震动单元6上。
可选的，第一震动单元6可以固定在机械上臂21的另一端。在机械臂2做平行于线源坩埚4的长度方向的线性运动时，第一震动单元6可以震动，并带动瓶夹3夹持的材料瓶5一起震动，这样可以使材料瓶5内的颗粒状的材料或具有粘性的材料能够均匀地倾倒到线源坩埚4内。
可选的，第一震动单元6可以为震动器等。
可选的，参见图5，该加料装置还可以包括：称重部件7，线源坩埚4放置在称重部件7上。
可选的，称重部件7上还设有重量显示屏71。通过称重部件7可以实时测量出线源坩埚4内当前的材料重量，并显示在重量显示屏71上，这样可以让技术人员能够实时看到当前线源坩埚4内的材料重量。
可选的，称重部件7可以为电子称。
可选的，参见图6，该加装装置还包括：第二震动单元8，第二震动单元8设置在称量部件7中且位于线源坩埚4的下方。
参见图6，在称重部件7上且位于线源坩埚4的下方设有安装孔，可以将第二震动单元8安装在该安装孔中。
可选的，第二震动单元8可以为震动器等。
其中，在停止向线源坩埚4内加材料时，可以控制第二震动单元8震动，以带动位于第二震动单元8上方的线源坩埚4震动，使线源坩埚4内的材料变的均匀。
可选的，称重部件7与底座1相连。
其中，控制模块可以位于底座1内，称重部件7可以通过连接线与控制模块相连，控制模块可以控制称重部件7对线源坩埚4内的材料进行称重，得到材料重量，并将得到的材料重量显示在重量显示屏71上。
在停止向线源坩埚4内加材料时，控制模块还可以控制第二震动单元8震动，以使线源坩埚4内的材料变的均匀。
可选的，参见图5，该加料装置还包括：固定机构9，固定机构9设置在称重部件7上，用于将线源坩埚4固定在称重部件7上。
可选的，固定机构9可以包括四个固定片，通过该四个固定片将线源坩埚4的四个角固定在称重部件7上。
可选的，在本实施例中，线源坩埚4可以为一个或多个，当为多个时该多个线源坩埚4可以串联在一起。
可选的，当控制模块控制材料瓶5转动到完全垂直时，表示材料瓶5内材料全部添加到线源坩埚4内，材料瓶5为空瓶。此时如果向线源坩埚4内添加的材料还不足，控制模块可以报警提示更换材料瓶5。
在本公开实施例中，由于机械臂可以做平行于线源坩埚长度方向的线性运动，这样可以通过机械臂带动夹在瓶夹上的材料瓶沿线源坩埚的长度方向做线性运动，且瓶夹是可转动的，可以带动材料瓶转动，以将材料瓶内的材料逐渐倒入坩埚内，从而实现向线源坩埚内自动添加材料，无需操作员手动添加材料，保护了操作员的身体，提高生产效率，另外，自动添加材料不容易将材料洒在线源坩埚外，避免浪费，降低生产成本。
以上所述仅为本公开的较佳实施例，并不用以限制本公开，凡在本公开的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本公开的保护范围之内。举例而言，本申请以线源坩埚为例对本申请的原理和结构进行了阐释，但是本申请的保护范围并不限于线源坩埚，对于其它形状的坩埚类型(例如圆形或椭圆形坩埚等)同样也适用。例如，对于圆形或椭圆形坩埚而言，只要机械臂带动瓶夹沿圆形或椭圆形坩埚的长轴方向或直径方向做线性运动，就同样可达到本申请的发明目的和技术效果。

Claims (15)

  1. 一种用于坩埚的加料装置，所述加料装置包括：底座、机械臂和瓶夹；
    所述底座与所述机械臂的一端活动连接，所述机械臂的一端可在所述底座上做线性运动，所述机械臂的运动轨迹平行于所述坩埚的长度方向；
    所述瓶夹设置在所述机械臂的另一端上且所述瓶夹可在所述另一端上转动。
  2. 如权利要求1所述的加料装置，其中，所述底座设有平移轨道，所述平移轨道的长度方向与所述坩埚的长度方向平行；
    所述机械臂的一端位于所述平移轨道内且可在所述平移轨道内滑动。
  3. 如权利要求1所述的加料装置，其中，所述机械臂包括机械上臂，机械下臂和第一转动部件；
    所述机械下臂的一端与所述底座活动连接，另一端通过所述第一转动部件与所述机械上臂的一端绞接；所述瓶夹设置在所述机械上臂的另一端上。
  4. 如权利要求3所述的加料装置，其中，还包括滑动部件和第二转动部件；
    所述滑动部件与所述底座活动连接；
    所述机械下臂的一端通过所述第二转动部件与所述滑动部件绞接。
  5. 如权利要求4所述的加料装置，其中，所述底座设有平移轨道，所述平移轨道的长度方向与所述坩埚的长度方向平行；
    所述滑动部件位于所述平移轨道内且可在所述平移轨道内滑动。
  6. 如权利要求3-5任一项权利要求所述的加料装置，其中，还包括：第三转动部件，所述瓶夹通过所述第三转动部件设置在所述机械上臂的另一端。
  7. 如权利要求1-5任一项权利要求所述的加料装置，其中，还包括：第一震动单元；
    所述第一震动单元固定在所述机械臂的另一端上，所述瓶夹设置在所述第一震动单元上。
  8. 如权利要求1-5中任一项所述的加料装置，其中，所述坩埚为线源坩埚。
  9. 如权利要求1所述的加料装置，其中，还包括：称重部件，所述坩埚放置在所述称重部件上。
  10. 如权利要求9所述的加料装置，其中，所述称重部件上设有重量显示屏。
  11. 如权利要求9或10所述的加料装置，其中，所述称重部件为电子称。
  12. 如权利要求9或10所述的加料装置，其中，还包括：第二震动单元，所述第二震动单元设置在所述称量部件中且位于所述坩埚的下方。
  13. 如权利要求9或10所述的加料装置，其中，所述称重部件与所述底座相连。
  14. 如权利要求13所述的加料装置，其中，还包括：固定机构，所述固定机构设置在所述称重部件上，用于将所述坩埚固定在所述称重部件上。
  15. 一种显示器基板的制造设备，其包括根据权利要求1-14中任一项所述的加料装置。
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