WO2018070324A1

WO2018070324A1 - Nanoparticle evaluation method and nanoparticle observation device

Info

Publication number: WO2018070324A1
Application number: PCT/JP2017/036174
Authority: WO
Inventors: 時崎　高志
Original assignee: 国立研究開発法人産業技術総合研究所
Priority date: 2016-10-13
Filing date: 2017-10-04
Publication date: 2018-04-19
Also published as: JPWO2018070324A1; JP6659062B2

Abstract

In the present invention, a part of a sample where nanoparticles are to be quantitatively observed with precision by an electron microscope (TEM, SEM), an atomic force microscope (AFM), etc., is selected by a simple method using an optical microscope, etc. A nanoparticle observation device 10 is provided with a stage 12, a white LED 14, a color digital camera 28, a computer 30, and an AFM 40. The white LED 14 is provided so as to irradiate nanoparticles in a sample S on the stage 12 with white light from an oblique direction. The color digital camera 28 stores, as digital data, the wavelength and intensity of scattered light which results from the light from the white LED 14 being scattered by the nanoparticles. The computer 30 calculates, on the basis of the digital data stored in the color digital camera 28, a blue light intensity which is the intensity of blue light and a total scattered light intensity which is the sum of the light intensities of three primary color lights. A part of the sample S where the total scattered light intensity, and the blue light intensity/the total scattered light intensity are high is observed with precision by the AFM 40.

Description

Nanoparticle evaluation method and nanoparticle observation apparatus

The present invention relates to a method for evaluating the dispersion state of nanoparticles and an apparatus for observing the shape of the nanoparticles.

】 To improve the performance of nanomaterials and to evaluate safety, it is necessary to refine the shape evaluation of nanoparticles. If an electron microscope (TEM, SEM) or an atomic force microscope (AFM) is used, individual particles of nanometer order can be observed. For this reason, the observation of the shape and the like of the nanoparticles is performed using TEM or the like. However, TEM and the like have a narrow field of view due to high spatial resolution. A sample having non-uniformly dispersed nanoparticles includes a part where the particles are aggregated and stacked, and a part where the particles are not present. Therefore, in a sample having nanoparticles dispersed unevenly, it is not easy to know which part should be observed with a TEM or the like. In the past, depending on the intuition of the observer, various parts of the sample were viewed, and the optimal observation part in which the nanoparticles were uniformly dispersed was selected.

On the other hand, since the optical microscope has a wide field of view, it is possible to specify a portion that is clearly unsuitable for observation, such as a portion where nanoparticles overlap. However, due to the diffraction limit of light, it is difficult to directly observe the dispersion state of particles having a diameter of 1 μm or less. It is desirable that a portion to be observed with a TEM or the like can be selected in a short time from a wide region of several hundred μm square of the sample by a single observation using an optical microscope. Since the field of precision measurement using TEM etc. is several μm square, the dispersion state of nanoparticles in the part of several μm square of the sample is measured using an optical microscope at the stage before precise measurement of nanoparticles using TEM etc. If it can be evaluated, accurate measurement of nanoparticles can be performed efficiently.

The present invention has been made in view of the above circumstances, and an object thereof is to select a portion of a sample for which a nanoparticle should be observed quantitatively and precisely with a TEM, an AFM, or the like by a simple technique using an optical microscope or the like. To do.

The nanoparticle evaluation method of the present invention includes an irradiation step of irradiating a nanoparticle of a sample containing dispersed nanoparticles with light containing three primary colors, and a measurement step of measuring the wavelength and intensity of light scattered by the nanoparticle. From the wavelength and intensity of the scattered light measured in the measuring process, the total scattered light intensity, which is the sum of the intensity of the three primary colors, the blue light intensity, which is the intensity of the blue light, and the blue light relative to the total scattered light intensity A calculation step of calculating a blue light ratio, which is a ratio of intensity, in a predetermined region of the sample, and an evaluation step of evaluating the dispersion state of the nanoparticles for each predetermined portion in the region using the blue light ratio as an index. Have.

The nanoparticle observation apparatus of the present invention includes a stage for placing a sample containing dispersed nanoparticles, and the three primary colors of the nanoparticles from an oblique direction with respect to the upper surface of the stage in a state where the sample is placed. A digital device that records the wavelength and intensity of scattered light in a predetermined region of the sample as digital data out of the light source provided to irradiate light including the light, and the light scattered by the nanoparticles of the light emitted from the light source And a digital processing device that calculates a blue light intensity that is the intensity of blue light and a total scattered light intensity that is a sum of the light intensity of the three primary colors based on digital data recorded by the digital device, and an upper surface of the stage And a scanning probe microscope including a stage control device that moves the stage in three dimensions.

Another nanoparticle observation apparatus according to the present invention includes a stage for placing a sample containing dispersed nanoparticles, and a nanoparticle from an oblique direction with respect to the upper surface of the stage in a state where the sample is placed. The light source provided to irradiate light including the three primary colors and the wavelength and intensity of the scattered light in a predetermined region of the sample among the light scattered by the nanoparticles of the light emitted from the light source are recorded as digital data A digital device, a digital processing device for calculating a blue light intensity that is an intensity of blue light and a total scattered light intensity that is a sum of the intensity of three primary colors based on digital data recorded by the digital device, and a stage An electron microscope provided with an electron gun provided so as to face the upper surface and a stage control device for moving the stage in three dimensions.

According to the present invention, it is possible to select a portion of a sample where the nanoparticles should be observed quantitatively and precisely with a TEM, an AFM, or the like by a simple method using an optical microscope or the like.

The schematic diagram of the nanoparticle observation apparatus which concerns on embodiment of this invention. The figure (b) for demonstrating the relationship of the theoretical calculation result (a) of a scattered light spectrum when white light is irradiated to various spherical particles, and incident light, particle | grains, scattered light, an incident angle, and a scattering angle. The graph which shows the particle diameter dependence of a blue light ratio. The image when the scattered light from the sample of an Example is image | photographed with the color digital camera. The optical microscope image of the sample of an Example, and the analysis image of a total scattered light intensity | strength and a blue light ratio. The SEM image of the sample A of an Example. The SEM image of the sample B of an Example.

Hereinafter, the nanoparticle observation apparatus and the nanoparticle evaluation method of the present invention will be described in detail based on embodiments and examples. The drawings schematically show the nanoparticle observation device, the constituent members of the nanoparticle observation device, and the peripheral members of the nanoparticle observation device. The dimensions and size ratios of these objects are the dimensions and dimensions on the drawings. It is not necessarily consistent with the ratio. A duplicate description will be omitted as appropriate. In the case where a numerical range is indicated by describing “˜” between two numerical values, the two numerical values are also included in the numerical range.

(Nanoparticle observation equipment)
FIG. 1 schematically shows a nanoparticle observation apparatus 10 according to an embodiment of the present invention. The nanoparticle observation apparatus 10 includes a stage 12, a white LED 14 as a light source,

condensing lenses

16 and 18, a multimode fiber 20, a polarizing filter 22, an eyepiece lens 24, a projection lens 26, and a digital device. A color digital camera 28, a computer 30 as a digital processing device, and an AFM 40 as a scanning probe microscope are provided.

The stage 12 is movable in three dimensions, and the sample S is placed on the upper surface thereof. The sample S includes a substrate P and nanoparticles N dispersed on the substrate. The stage 12 also serves as a sample mounting table that is a constituent member of the AFM 40. The white LED 14 is installed so that white light is irradiated to the nanoparticles from an oblique direction with respect to the upper surface of the stage 12, that is, the upper surface of the substrate P. The light source may not be the white LED 14 as long as light including the three primary colors, that is, blue, green, and red can be irradiated. Examples of light sources including the three primary colors include halogen lamps and fluorescent lamps. Moreover, the white LED 14 is installed so that the incident angle of the white light irradiated to the nanoparticles can be changed. For this reason, it can respond to observation of the nanoparticle N provided with various materials, sizes, shapes, dispersities, and the like.

The condenser lens 16 converges the white light emitted from the white LED 14. The multimode fiber 20 disperses and transmits the white light incident from the condenser lens 16 into many modes. The condenser lens 18 converges the white light incident from the multimode fiber 20. In the present embodiment, the polarization filter 22 can appropriately change the polarization of white light emitted from the white LED 14. For this reason, it can respond to observation of nanoparticles provided with various materials, sizes, shapes, dispersities, and the like. The white light that has passed through the polarizing filter 22 is irradiated onto the sample S from an oblique direction with respect to the upper surface of the substrate P.

The white light irradiated on the sample S is scattered by the nanoparticles N. Among these, scattered light having a predetermined scattering angle, for example, a scattering angle of 110 ° is collected by the objective lens 24. The scattered light that has passed through the objective lens 24 further passes through the projection lens 26 and forms an image on the focal plane of the color digital camera 28. In the present embodiment, the color digital camera 28 is provided so as to face the upper surface of the stage 12, that is, so as to capture a scattered light image from the sample S on the stage 12. It is preferable to install an optical microscope between the stage 12 and the color digital camera 28 and use the objective lens and projection lens of the optical microscope, respectively. In this case, the color digital camera 28 is attached to the real image focal position of the optical microscope, and the color digital camera 28 is focused on the upper surface of the substrate P. The spatial resolution of the optical microscope may be 1 μm or more.

The color digital camera 28 records, as digital data, the wavelength and intensity of the scattered light in a predetermined region of the sample S out of the scattered light from the white light nanoparticles N emitted from the white LED 14. Here, the predetermined area of the sample S is, for example, within a range of several hundred μm square of the sample S corresponding to the entire visual field of the color digital camera 28. Depending on the size of the sample S, the predetermined region may be the entire sample S. Note that an image by light scattering from the nanoparticles N is obtained by the color digital camera 28. However, due to the diffraction limit, the individual nanoparticles N cannot be decomposed and observed.

Depending on the particle size of the nanoparticles that scatter the light, the spectrum of the scattered light corresponds to the Rayleigh scattering or Mie scattering theory. That is, theoretically, for nanoparticles having a particle size of about 100 nm or less, the light scattering spectrum can be explained by the Rayleigh scattering theory. In this case, the shorter the wavelength component of the light scattering spectrum, the higher the intensity. On the other hand, in the case of nanoparticles having a larger particle size, the light scattering spectrum has a complicated shape according to the Mie scattering theory. However, in general, the intensity of the long wavelength component of the light scattering spectrum is greater than the Rayleigh scattering condition. Therefore, a sample in which isolated nanoparticles are dispersed has a higher blue light ratio than a sample having many large nanoparticles due to aggregation. Therefore, it is possible to evaluate the level of the isolated particles by comparing the light scattering spectra. On the other hand, since the intensity of scattered light increases as the number of nanoparticles increases, the particle density can be estimated to some extent from the intensity of scattered light.

Therefore, the ratio of the total scattered light intensity, which is the sum of the intensities of the three primary colors from the output of the color digital camera 28, the blue light intensity, which is the intensity of the blue light, and the ratio of the blue light intensity to the total scattered light intensity, that is, “blue The blue light ratio that is “light intensity / total scattered light intensity” is calculated, and the portion of the sample S that is optimal for precisely observing the nanoparticles N is obtained using the blue light intensity and the blue light ratio as indices. Conditions suitable for precise observation required by TEM, SEM, AFM, and the like are states in which isolated particles are dispersed as densely as possible. Therefore, a portion of the sample S having a high blue light ratio or a portion of the sample S having a high total scattered light intensity may be selected. It should be noted that a digital device other than the color digital camera 28 may be used as long as the wavelength and intensity of scattered light within a predetermined region of the sample S can be recorded as digital data.

The computer 30 performs image processing based on the digital data recorded by the color digital camera 28, that is, the image signal of the color digital camera 28, and sets the blue light intensity, the total scattered light intensity, and the blue light ratio in each pixel. calculate. Then, an average value of the total scattered light intensity and the blue light ratio is calculated for each predetermined portion in the predetermined region of the sample S (for example, about 10 μm square corresponding to the entire visual field of the AFM 40).

Thus, the blue light ratio and the total scattered light intensity can be found for each about 10 μm square portion over the entire visual field of the color digital camera 28. Thereafter, the portion of the sample S with a high blue light ratio or the portion of the sample S with a high blue light ratio and a high total scattered light intensity is precisely observed with the AFM 40. Although the AFM 40 is used in the present embodiment, a scanning probe microscope other than the AFM 40 such as a scanning tunnel microscope may be used instead of the AFM 40, or an electron microscope may be used.

The AFM 40 includes a stage 12, a stage control device 42, an AFM head 44, an AFM cantilever 46, and a probe 48. The stage 12 also serves as a sample mounting table when the color digital camera 28 captures scattered light. That is, the sample stage used when evaluating the dispersion state of the nanoparticles N of the sample S and the sample stage used when precisely observing the nanoparticles N with the AFM 40 are shared as the stage 12. Therefore, the sample S can be managed on the same coordinate axis for the scattered light photographing using the color digital camera 28 and the precise observation by the AFM 40.

The stage control device 42 moves the stage 12 in three dimensions. That is, the computer 30 calculates the position of the optimum observation portion of the sample S, and the stage controller 42 moves the optimum observation portion directly below the AFM cantilever 46 based on the coordinates of the position of the optimum observation portion. The position of the stage 12 is controlled. In this way, if the sample S for scattered light imaging using the color digital camera 28 is placed on the stage 12 of the AFM 40, the optimum portion for the precise measurement of the sample S is selected, and then this sample is directly under the AFM cantilever 46. You can move parts quickly.

Thereafter, an AFM image of the nanoparticles of the sample S is acquired using the AFM head 44 and the AFM cantilever 46. Based on this image, the shape and particle size of the nanoparticle N can be evaluated. Thus, according to the nanoparticle observation apparatus 10, time and labor for selecting the optimum observation portion of the sample S can be greatly saved. Therefore, precise observation of the nanomaterial can be performed efficiently, and the development of the nanomaterial is accelerated.

(Nanoparticle evaluation method)
The nanoparticle evaluation method according to the embodiment of the present invention includes an irradiation process, a measurement process, a calculation process, an evaluation process, and an observation process. The nanoparticle evaluation method of the present embodiment may be performed using the nanoparticle observation apparatus 10 or may be performed using another apparatus. In the irradiation step, light containing the three primary colors is irradiated to the nanoparticles of the sample containing the dispersed nanoparticles. In the measurement process, the wavelength and intensity of light scattered by the nanoparticles are measured. The measurement step preferably includes a process of recording the wavelength and intensity of scattered light recognized by the image sensor as digital data.

In the calculation step, the total scattered light intensity, the blue light intensity, and the blue light ratio are calculated within a predetermined region of the sample from the wavelength and intensity of the scattered light measured in the measurement process. In the evaluation step, the dispersion state of the nanoparticles is evaluated for each predetermined portion in the region using the blue light ratio as an index. In the evaluation step, the dispersion state of the nanoparticles may be evaluated for each predetermined portion in the region, using the total scattered light intensity as an index. The sample may include a substrate and nanoparticles dispersed on the substrate, and in the irradiation step, light may be irradiated obliquely with respect to the upper surface of the substrate.

FIG. 2 (a) shows the scattered light spectrum (scattering angle 110 °) as a result of theoretical calculation when nine types of SiO ₂ true spherical particles having a particle diameter of 50 to 1000 nm are irradiated with white light at an incident angle of 70 °. ing. FIG. 2B shows the relationship between incident light, particles, scattered light, incident angle, and scattering angle. The calculation of the scattered light spectrum was performed based on the Mie scattering theory. As shown in FIG. 2A, the scattered light spectrum monotonously decreases toward the long wavelength side in the particle having a particle diameter of 50 nm which is the Rayleigh scattering region. On the other hand, for particles having a particle diameter exceeding 100 nm, the center of the scattered light spectrum is shifted to the red side, and the scattered light spectrum is complicated.

FIG. 3 shows the particle size dependence of the blue light ratio that characterizes the scattered light spectrum from the spherical particles. From the calculation result of FIG. 2, the ratio of the blue light component (420 to 470 nm) to the visible range total scattered light intensity (total scattered light intensity) was calculated. FIG. 3A shows that the inflection point of the particle diameter can be changed by changing the incident angle. In FIG.3 (b), it turns out that the inflection point of a particle diameter changes by selecting the polarization | polarized-light of incident light. 3 (a) and 3 (b), it is possible to change the threshold value (evaluation reference particle size) of the particle size of the nanoparticles necessary for the evaluation by selecting the incident angle and the polarized light. Recognize.

In the observation step, the observation portion of the sample is selected based on the dispersion state of the nanoparticles for each predetermined portion of the sample evaluated in the evaluation step, and at least one of the electron microscope and the scanning probe microscope is observed. In selecting the observation portion of the sample, a portion where the blue light ratio of the sample is high or a portion where the blue light ratio of the sample is high and the total scattered light intensity is high is selected. The nanoparticle evaluation method of this embodiment is particularly effective when the average particle size of the nanoparticles is 50 to 100 nm.

A sample containing nanoparticles was observed using a nanoparticle observation apparatus in which an optical microscope was installed between the stage and the color digital camera. The optical microscope was equipped with a long working distance objective lens (magnification 9 times, numerical aperture 0.28, infinite focus correction) and a projection lens (focal length 200 mm). A color digital camera (2048 × 1536 pixels, pixel pitch 3.2 μm) was installed on the real image focal plane of the optical microscope. As a result, a range of 640 × 480 μm square could be taken with a spatial resolution of about 1 μm.

The sample used was obtained by dispersing silica particles having an average diameter of 100 nm on a flat Si substrate by three kinds of methods. Sample A was prepared by a freeze vacuum drying method with relatively little aggregation. Sample B was prepared by a freeze vacuum drying method in which large aggregates were easily formed. Sample C was produced by natural drying which is generally used. As the light source, a high-intensity white power LED (input power 3 W) was used. The light emitted from the white LED was condensed on a multimode fiber (core diameter 300 μm) by a condenser lens, and the emitted light from this fiber was condensed on the sample surface by a condenser lens.

∙ A polarizing filter is provided between the condenser lens on the exit light side of the multimode fiber and the sample so that the polarization of the exit light can be controlled. In addition, the incident angle to the sample can be changed by changing the position of the condenser lens on the emission light side of the multimode fiber. In this example, the dispersion state of the sample nanoparticles was evaluated using white light with no polarization and an incident angle of 45 to 50 °. The exposure time of the color digital camera was set to such an extent that the intensity did not exceed at each pixel, and the background at the same exposure time was also measured. After shooting, it was saved in a color digital camera as a TIFF file so that pixel information was not lost. FIG. 4 shows images obtained when the scattered light from Sample A, Sample B, and Sample C is photographed with a color digital camera.

After reading the TIFF file stored in the color digital camera with a computer, the background was subtracted, and the true scattered light intensity of each pixel of Sample A, Sample B, and Sample C was determined for the three primary colors. The wavelength of blue light was 420 to 470 nm, the wavelength of green light was 490 to 600 nm, and the wavelength of red light was 540 to 680 nm. Then, averaging was performed in units of 32 × 32 pixels (10 × 10 μm), and the entire region was evaluated using the total scattered light intensity of the three primary colors and the blue light ratio as indices.

FIG. 5 shows optical microscope images of Sample A, Sample B, and Sample C, an analysis image in which the magnitude of the total scattered light intensity is represented by color shading, and an analysis image in which the level of the blue light ratio is represented by color shading. It is. In FIG. 5, the lighter the color, the greater the total scattered light intensity or the higher the blue light ratio. In sample A, a portion having a high total scattered light intensity and a high blue light ratio was present in an island shape. FIG. 6 is an SEM image of Sample A to which glycerin has been added. In the order from FIG. 6A to FIG. 6C, the magnification is changed from low to high. FIG. 7 is an SEM image of Sample B. The magnification in FIG. 7 (a) is lower than the magnification in FIG. 7 (b). 5 and 6, the island-like portion of the sample A having a large total scattered light intensity and a high blue light ratio is composed of isolated particles and microaggregates, and there are no micrometer-class large aggregates. It was confirmed.

The total scattered light intensity increases as the number of nanoparticles increases. In order to measure as many nanoparticles as possible by one precise observation, it is advantageous to measure a portion where the total scattered light intensity of the sample is large. On the other hand, the blue light ratio indicates good dispersibility, and the influence of the aggregate can be reduced by measuring the portion of the sample where the blue light ratio is high. From FIG. 5 to FIG. 7, it was found that the portion with many isolated particles was widely distributed in the sample A compared with the sample B.

As shown in FIG. 5, the region on the left side of Sample C has a high particle density, but the blue light ratio is low, indicating that there are many aggregates. On the other hand, the area on the right side of the sample C has a low particle density. In general, it can be expected that the lower the particle density, the less likely it is to agglomerate. However, from the image of sample C in FIG. It was found that there are few parts (high blue light ratio).

As shown in FIG. 5, in Sample B, the total scattered light intensity and the blue light ratio were almost uniform, but there was no region where the blue light ratio exceeded 0.6. From FIG. 7, it was confirmed that the point-like region observed in the optical microscope image of Sample B is a large aggregate. This result is expected from the blue light ratio and the total scattered light intensity. Using the blue light ratio of the present invention or the blue light ratio and the total scattered light intensity as an index, the dispersion state of the nanoparticles is determined as a predetermined value of the sample. This shows that the evaluation method for each predetermined part in the region is effective.

On the other hand, as shown in FIG. 5, in the sample C, the total scattered light intensity and the blue light ratio vary greatly depending on the location. As a whole, the blue light ratio is small in the region where the total scattered light intensity is large. The region where the total scattered light intensity is high is considered to be a region where a large number of nanoparticles are aggregated. Further, even in a region where the total scattered light intensity is small, there are portions where the blue light ratio is low, and it has been found that the particles are not necessarily aggregated if the particle density is low. In a sample in which nanoparticles are dispersed non-uniformly, there is a tendency to select a portion having a low particle concentration as an observation portion in order to observe a portion having as few aggregates as possible. However, from the results of this example, it was found that the portion of the sample having a low density of nanoparticles is not necessarily suitable for observation, and that it is effective to select an optimal location according to the present invention.

10 Nanoparticle observation device 12 Stage 14 White LED
16, 18 Condensing lens 20 Multimode fiber 22 Polarizing filter 24 Objective lens 26 Projection lens 28 Color digital camera 30 Computer 40 AFM
42 Stage Controller 44 AFM Head 46 AFM Cantilever 48 Probe S Sample P Substrate N Nanoparticle

Claims

An irradiation step of irradiating the nanoparticles of the sample containing dispersed nanoparticles with light containing three primary colors;
A measurement step of measuring the wavelength and intensity of the scattered light of the light by the nanoparticles;
From the wavelength and intensity of the scattered light measured in the measurement step, the total scattered light intensity that is the sum of the intensity of the three primary colors, the blue light intensity that is the intensity of the blue light, and the blue light relative to the total scattered light intensity A calculation step of calculating a blue light ratio, which is a ratio of light intensity, within a predetermined region of the sample;
Using the blue light ratio as an index, an evaluation step for evaluating the dispersion state of the nanoparticles for each predetermined portion in the region;
Nanoparticle evaluation method having
In claim 1,
In the evaluation step, a nanoparticle evaluation method for evaluating the dispersion state of the nanoparticles for each predetermined portion in the region, using the total scattered light intensity as an index.
In claim 1 or 2,
The sample includes a substrate and nanoparticles dispersed on the substrate;
In the irradiation step, the nanoparticle evaluation method of irradiating the light in an oblique direction with respect to the upper surface of the substrate.
In any one of Claim 1 to 3,
The observation part of the sample is selected based on the dispersion state of the nanoparticles for each predetermined part of the sample evaluated in the evaluation step, and the observation part is observed with at least one of an electron microscope and a scanning probe microscope The nanoparticle evaluation method which further has an observation process.
In any one of Claim 1-4,
A method for evaluating nanoparticles, wherein the nanoparticles have an average particle size of 50 to 100 nm.
In any one of Claim 1 to 5,
In the measurement step, the nanoparticle evaluation method includes a step of recording the wavelength and intensity of the scattered light recognized by the image sensor as digital data.
A stage for placing a sample containing dispersed nanoparticles;
In a state where the sample is placed, a light source provided to irradiate light including three primary colors to the nanoparticles from an oblique direction with respect to the upper surface of the stage;
Of the light scattered from the nanoparticles of the light emitted from the light source, a digital device that records the wavelength and intensity of the scattered light in a predetermined region of the sample as digital data;
Based on digital data recorded by the digital device, a digital processing device that calculates a blue light intensity that is an intensity of blue light and a total scattered light intensity that is a sum of the intensity of three primary colors;
A scanning probe microscope comprising a probe provided to face the upper surface of the stage, and a stage control device for moving the stage in three dimensions;
Nanoparticle observation apparatus having
A stage for placing a sample containing dispersed nanoparticles;
In a state where the sample is placed, a light source provided to irradiate light including three primary colors to the nanoparticles from an oblique direction with respect to the upper surface of the stage;
Of the light scattered from the nanoparticles of the light emitted from the light source, a digital device that records the wavelength and intensity of the scattered light in a predetermined region of the sample as digital data;
Based on digital data recorded by the digital device, a digital processing device that calculates a blue light intensity that is an intensity of blue light and a total scattered light intensity that is a sum of the intensity of three primary colors;
An electron microscope comprising an electron gun provided to face the upper surface of the stage, and a stage control device for moving the stage in three dimensions;
Nanoparticle observation apparatus having
In claim 7 or 8,
A nanoparticle observation apparatus in which the digital device is a color digital camera.
In any of claims 7 to 9,
A nanoparticle observation apparatus further comprising an optical microscope between the stage and the digital device.
In any of claims 7 to 10,
The nanoparticle observation apparatus which further has a polarizing filter which can change the polarization | polarized-light of the light which the said light source inject | emitted between the said stage and the said light source.
In any of claims 7 to 11,
The nanoparticle observation apparatus which can change the incident angle of the said light with which the said light source irradiates the said nanoparticle.