JPWO2018070324A1 - Nanoparticle evaluation method and nanoparticle observation device - Google Patents

Abstract

The portion of the sample to be subjected to quantitative observation of nanoparticles quantitatively with an electron microscope (TEM, SEM), atomic force microscope (AFM) or the like is selected by a simple method using an optical microscope or the like. The nanoparticle observation device 10 includes a stage 12, a white LED 14, a color digital camera 28, a computer 30, and an AFM 40. The white LED 14 is provided to irradiate white light to the nanoparticles of the sample S on the stage 12 from an oblique direction. The color digital camera 28 records, as digital data, the wavelength and intensity of the scattered light by the nanoparticles of the light emitted from the white LED 14. The computer 30 calculates, based on the digital data recorded by the color digital camera 28, the blue light intensity which is the blue light intensity and the total scattered light intensity which is the sum of the light intensities of the three primary colors. Then, the portion of the sample S where the total scattered light intensity and the blue light intensity / the total scattered light intensity are large is precisely observed with the AFM 40.

Description

  The present invention relates to a method of evaluating the dispersion state of nanoparticles, and an apparatus for observing the shape and the like of nanoparticles.

  In order to improve the performance of nanomaterials and evaluate their safety, it is required to refine the shape evaluation of nanoparticles. When using an electron microscope (TEM, SEM) or an atomic force microscope (AFM), individual particles of nanometer order can be observed. For this reason, the observation of the shape and the like of the nanoparticles is performed using a TEM or the like. However, the field of view of the TEM or the like is narrow due to the high spatial resolution. In the sample having the non-uniformly dispersed nanoparticles, there are portions where particles are aggregated and stacked, and some portions where particles are not present. Therefore, in the sample having the non-uniformly dispersed nanoparticles, it is not easy to know which part to observe with a TEM or the like. Heretofore, various parts of the sample have been viewed by relying on the observer's intuition, and an optimum observation part in which the nanoparticles are uniformly dispersed has been selected.

  On the other hand, since the optical microscope has a wide field of view, it is possible to identify a portion which is obviously unsuitable for observation, such as a portion where the nanoparticles overlap. However, due to the diffraction limit of light, it is difficult to directly observe the dispersion state of particles having a diameter of 1 μm or less. It is desirable that a part to be observed by TEM or the like can be selected in a short time from a wide region of several hundred μm square of a sample by one observation using an optical microscope. Since the field of view of accurate measurement using TEM etc. is several μm square, the dispersion state of nanoparticles in the area of several μm square of sample is made using an optical microscope at the stage prior to precise measurement of nanoparticles using TEM etc. If it can be evaluated, accurate measurement of nanoparticles can be performed efficiently.

  The present invention has been made in view of the above circumstances, and it is an object of the present invention to select a portion of a sample on which nanoparticles should be precisely and quantitatively observed by TEM, AFM or the like by a simple method using an optical microscope or the like. Do.

  The nanoparticle evaluation method of the present invention comprises: irradiating the nanoparticles of the sample containing dispersed nanoparticles with light containing three primary colors; and measuring the wavelength and intensity of light scattered by the nanoparticles. And from the wavelength and intensity of the scattered light measured in the measurement step, the total scattered light intensity which is the sum of the light intensities of the three primary colors, the blue light intensity which is the blue light intensity, and the blue light for the total scattered light intensity A calculation step of calculating the blue light ratio, which is a ratio of intensity, in a predetermined region of the sample, and an evaluation step of evaluating the dispersion state of the nanoparticles for each predetermined portion in the region using the blue light ratio as an index Have.

  The nanoparticle observation device of the present invention is a stage for placing a sample containing dispersed nanoparticles, and in a state in which the sample is placed, three primary colors of nanoparticles are placed obliquely to the upper surface of the stage. And a digital device for recording, as digital data, the wavelength and intensity of scattered light within a predetermined region of a sample among light sources provided to emit light including light and scattered light by nanoparticles of light emitted from the light source A digital processing device that calculates blue light intensity that is blue light intensity and total scattered light intensity that is the sum of light intensities of three primary colors based on digital data recorded by a digital device; And a scanning probe microscope provided with a probe provided opposite to the stage, and a stage control device for moving the stage in three dimensions.

  Another nanoparticle observation device of the present invention is a stage for placing a sample containing dispersed nanoparticles, and a nanoparticle obliquely from the upper surface of the stage with the sample placed thereon. The wavelength and intensity of the scattered light in a predetermined area of the sample among the light source provided to emit light containing three primary colors and the scattered light by the nanoparticles of the light irradiated from the light source are recorded as digital data A digital processing apparatus that calculates a blue light intensity that is a blue light intensity and a total scattered light intensity that is a sum of light intensities of three primary colors based on digital devices and digital data recorded by the digital devices; And an electron microscope provided with an electron gun provided to face the upper surface of the stage, and a stage control device for moving the stage in three dimensions.

  According to the present invention, it is possible to select the portion of the sample on which the nanoparticles should be precisely and quantitatively observed by TEM, AFM or the like by a simple method using an optical microscope or the like.

The schematic diagram of the nanoparticle observation apparatus which concerns on embodiment of this invention. The theoretical calculation result (a) of a scattered light spectrum when white light is irradiated to various true sphere particle | grains, and the figure for demonstrating the relationship between incident light, particle | grains, scattered light, an incident angle, and a scattering angle. The graph which shows the particle diameter dependence of a blue light ratio. The image when the scattered light from the sample of an Example was image | photographed with the color digital camera. The optical microscope image of the sample of an Example, and the analysis image of a total scattered light intensity and a blue light ratio. The SEM image of the sample A of an Example. The SEM image of the sample B of an Example.

  Hereinafter, the nanoparticle observation apparatus and the nanoparticle evaluation method of the present invention will be described in detail based on embodiments and examples. The drawings schematically show the nanoparticle observation device, the constituent members of the nanoparticle observation device, and the peripheral members of the nanoparticle observation device, and the dimensions and dimensional ratio of these real items are the dimensions and dimensions on the drawing. It does not necessarily coincide with the ratio. Duplicate descriptions will be omitted as appropriate. In addition, when describing "-" between two numerical values and expressing a numerical range, these two numerical values shall also be included in a numerical range.

(Nanoparticle observation device)
FIG. 1 schematically shows a nanoparticle observation device 10 according to an embodiment of the present invention. The nanoparticle observation device 10 includes a stage 12, a white LED 14 as a light source, condensing lenses 16 and 18, a multimode fiber 20, a polarizing filter 22, an eyepiece lens 24, a projection lens 26, and digital devices. A color digital camera 28, a computer 30 which is a digital processing device, and an AFM 40 which is a scanning probe microscope are provided.

  The stage 12 is movable in three dimensions, and places the sample S on its upper surface. The sample S comprises a substrate P and nanoparticles N dispersed on the substrate. The stage 12 doubles as a sample mounting table which is a component of the AFM 40. The white LEDs 14 are disposed such that the nanoparticles are irradiated with white light from an oblique direction with respect to the upper surface of the stage 12, ie, the upper surface of the substrate P. The light source may not be the white LED 14 as long as it can emit light including three primary colors, that is, blue, green and red. A halogen lamp, a fluorescent lamp, etc. can be illustrated as a light source containing three primary colors. In addition, the white LED 14 is installed so that the incident angle of the white light irradiated to the nanoparticles can be changed. Therefore, it is possible to cope with the observation of the nanoparticles N provided with various materials, sizes, shapes, degrees of dispersion, and the like.

  The condenser lens 16 converges the white light emitted from the white LED 14. The multimode fiber 20 disperses the white light incident from the condenser lens 16 into many modes and transmits it. The condenser lens 18 converges the white light incident from the multimode fiber 20. In the present embodiment, the polarizing filter 22 can appropriately change the polarization of the white light emitted by the white LED 14. For this reason, it can respond to observation of nanoparticles provided with various materials, sizes, shapes, degrees of dispersion, and the like. The white light that has passed through the polarizing filter 22 is irradiated onto the sample S in a direction oblique to the upper surface of the substrate P.

  The white light irradiated to the sample S is scattered by the nanoparticles N. Among these, scattered light having a predetermined scattering angle, for example, a scattering angle of 110 ° is collected by the objective lens 24. The scattered light that has passed through the objective lens 24 further passes through the projection lens 26 and is imaged on the focal plane of the color digital camera 28. In the present embodiment, the color digital camera 28 is provided to face the upper surface of the stage 12, that is, to be able to capture a scattered light image from the sample S on the stage 12. Preferably, an optical microscope is placed between the stage 12 and the color digital camera 28 to utilize the objective lens and the projection lens of the optical microscope, respectively. In this case, the color digital camera 28 is attached to the real image focal position of the optical microscope, and the color digital camera 28 is focused on the upper surface of the substrate P. The spatial resolution of the optical microscope may be 1 μm or more.

  The color digital camera 28 records, as digital data, the wavelength and intensity of the scattered light in a predetermined region of the sample S among the scattered light of the white light nanoparticle N emitted from the white LED 14. Here, “within the predetermined region of the sample S” means, for example, within a range of several hundred μm square of the sample S corresponding to the entire field of view of the color digital camera 28. Depending on the size of the sample S, the predetermined area may be the entire sample S. The color digital camera 28 obtains an image by light scattering from the nanoparticles N. However, due to diffraction limitations, individual nanoparticles N can not be resolved and observed.

  Depending on the particle size of the light scattering nanoparticles, the spectrum of the scattered light corresponds to Rayleigh scattering or Mie scattering theory. That is, theoretically, in nanoparticles having a particle size of about 100 nm or less, the light scattering spectrum can be explained by the Rayleigh scattering theory. In this case, the shorter the wavelength component of the light scattering spectrum, the higher the intensity. On the other hand, with nanoparticles having a larger particle size, the light scattering spectrum has a complicated shape according to the Mie scattering theory. However, in general, the intensity of the long wavelength component of the light scattering spectrum is larger than the Rayleigh scattering condition. Therefore, in the sample in which isolated nanoparticles are dispersed, the blue light ratio is higher as compared with the sample in which large nanoparticles by aggregation are present. For this reason, it is possible to evaluate the high and low of the ratio of isolated particles by comparing the light scattering spectra. On the other hand, since the intensity of the scattered light increases as the number of nanoparticles increases, the particle density can be estimated to some extent from the intensity of the scattered light.

  Therefore, the ratio of the blue light intensity to the total scattered light intensity, that is, the ratio of the total scattered light intensity that is the sum of the intensities of the three primary colors from the output of the color digital camera 28, the blue light intensity that is the blue light intensity, The blue light ratio which is “light intensity / total scattered light intensity” is calculated, and the portion of the sample S most suitable for precise observation of the nanoparticles N is determined using the blue light intensity and the blue light ratio as an index. The conditions suitable for precision observation determined by TEM, SEM, AFM, etc. are states in which isolated particles are dispersed as densely as possible. Therefore, the portion of the sample S having a high blue light ratio or the portion of the sample S having a large total scattered light intensity may be selected. Note that digital equipment other than the color digital camera 28 may be used as long as the wavelength and intensity of the scattered light in the predetermined region of the sample S can be recorded as digital data.

  The computer 30 takes in the image signal of the color digital camera 28 based on the digital data recorded by the color digital camera 28 and processes the image, and the blue light intensity, the total scattered light intensity, and the blue light ratio for each pixel calculate. Then, the average value of the total scattered light intensity and the blue light ratio is calculated for each predetermined portion (for example, about 10 μm square corresponding to the entire field of view of the AFM 40) in the predetermined region of the sample S.

  Thus, the blue light ratio and the total scattered light intensity can be known for each portion of about 10 μm square over the entire field of view of the color digital camera 28. Thereafter, the portion of the sample S having a high blue light ratio or the portion of the sample S having a high blue light ratio and a high total scattered light intensity is precisely observed with the AFM 40. Although the AFM 40 is used in the present embodiment, a scanning probe microscope other than the AFM 40 such as a scanning tunneling microscope may be used instead of the AFM 40, or an electron microscope may be used.

  The AFM 40 includes a stage 12, a stage controller 42, an AFM head 44, an AFM cantilever 46, and a probe 48. The stage 12 doubles as a sample mounting table when photographing the scattered light with the color digital camera 28. That is, the sample mounting table used when evaluating the dispersion state of the nanoparticles N of the sample S and the sample mounting table used when precisely observing the nanoparticles N with the AFM 40 are shared as the stage 12. Therefore, the sample S can be managed on the same coordinate axis as the scattered light imaging using the color digital camera 28 and the precise observation by the AFM 40.

  The stage control unit 42 moves the stage 12 in three dimensions. That is, the position of the optimum observation portion of the sample S is calculated by the computer 30, and the stage control device 42 causes the optimum observation portion to move immediately below the AFM cantilever 46 based on the coordinates of the position of the optimum observation portion. The position of the stage 12 is controlled. As described above, when the sample S for scattered light imaging using the color digital camera 28 is placed on the stage 12 of the AFM 40, after selecting the part that is most suitable for the precise measurement of the sample S, this part under the AFM cantilever 46 is selected. You can move parts quickly.

  Thereafter, using the AFM head 44 and the AFM cantilever 46, an AFM image of the nanoparticles of the sample S is acquired. The shape, particle size, etc. of the nanoparticles N can be evaluated based on this image. Thus, according to the nanoparticle observation device 10, time and effort for selecting the optimum observation portion of the sample S can be largely saved. Therefore, precise observation of nanomaterials can be efficiently performed, and development of nanomaterials is accelerated.

(Nanoparticle evaluation method)
The nanoparticle evaluation method according to the embodiment of the present invention includes an irradiation step, a measurement step, a calculation step, an evaluation step, and an observation step. The nanoparticle evaluation method of the present embodiment may be performed using the nanoparticle observation device 10 or may be performed using another device. In the irradiation step, nanoparticles of a sample containing dispersed nanoparticles are irradiated with light containing three primary colors. In the measurement step, the wavelength and intensity of scattered light of light by the nanoparticles are measured. The measuring step preferably includes the step of recording the wavelength and intensity of the scattered light recognized by the imaging device as digital data.

  In the calculation step, the total scattered light intensity, the blue light intensity and the blue light ratio are calculated within a predetermined area of the sample from the wavelength and the intensity of the scattered light measured in the measurement step. In the evaluation step, the dispersion state of the nanoparticles is evaluated for each predetermined portion in the region using the blue light ratio as an index. In the evaluation step, the dispersion state of the nanoparticles may be further evaluated for each predetermined portion in the region using the total scattered light intensity as an index. The sample may include a substrate and nanoparticles dispersed on the substrate, and the irradiation step may irradiate light in an oblique direction with respect to the upper surface of the substrate.

FIG. 2 (a) shows the scattered light spectrum (scattering angle 110 °) when white light is irradiated at an incident angle of 70 ° to nine kinds of SiO ₂ spherical particles with a particle diameter of 50 to 1000 nm as theoretical calculation results. ing. FIG. 2 (b) shows the relationship between incident light, particles, scattered light, incident angle, and scattering angle. The calculation of the scattered light spectrum was performed based on the Mie scattering theory. As shown in FIG. 2A, in the particle having a particle diameter of 50 nm, which is a Rayleigh scattering region, the scattered light spectrum monotonously decreases toward the long wavelength side. On the other hand, in particles having a particle diameter of more than 100 nm, the center of gravity of the scattered light spectrum shifts to the red side, and the scattered light spectrum is complicated.

  FIG. 3 shows the particle size dependency of the ratio of blue light characterizing the scattered light spectrum from the spherical fine particles. From the calculation results of FIG. 2, the ratio of the blue light component (420 to 470 nm) to the total scattered light intensity in the visible region (total scattered light intensity) was calculated. According to FIG. 3A, it can be seen that the inflection point of the particle diameter can be changed by changing the incident angle. In FIG. 3B, it can be seen that the inflection point of the particle diameter changes by selecting the polarization of the incident light. According to FIGS. 3A and 3B, it is possible to change the threshold value of the particle size of the nanoparticles (evaluation standard particle size) necessary for the evaluation by selecting the incident angle and the polarization. Recognize.

  In the observation step, the observation portion of the sample is selected based on the dispersion state of the nanoparticles for each predetermined portion of the sample evaluated in the evaluation step, and the observation portion is observed with at least one of an electron microscope and a scanning probe microscope. In the selection of the observation portion of the sample, a portion where the blue light ratio of the sample is high or a portion where the blue light ratio of the sample is high and the total scattered light intensity is high is selected. The nanoparticle evaluation method of the present embodiment is particularly effective when the average particle diameter of the nanoparticles is 50 to 100 nm.

  The nanoparticle-containing sample was observed using a nanoparticle observation device in which an optical microscope was installed between the stage and the color digital camera. The optical microscope was equipped with a long working distance objective (9x magnification, 0.28 numerical aperture, infinity focus correction) and a projection lens (200 mm focal length). A color digital camera (2048 × 1536 pixels, pixel pitch 3.2 μm) was placed on the real image focal plane of the optical microscope. As a result, a 640 × 480 μm square area could be photographed with a spatial resolution of about 1 μm.

  The sample used was a flat Si substrate on which silica particles with an average diameter of 100 nm were dispersed by three methods. Sample A was prepared by freeze-drying with relatively little aggregation. The sample B was produced by the freeze vacuum drying method in which large aggregates are easily formed. Sample C was produced by natural drying generally used. As a light source, a high brightness white power LED (input power 3 W) was used. The light emitted from the white LED was collected on a multi-mode fiber (core diameter 300 μm) by a collecting lens, and the light emitted from this fiber was collected on the sample surface by a collecting lens.

  A polarization filter was provided between the focusing lens on the exit light side of the multimode fiber and the sample so that the polarization of the exit light could be controlled. In addition, the position of the condensing lens on the exit light side of the multimode fiber was changed to change the incident angle to the sample. In this example, the dispersion state of the nanoparticles of the sample was evaluated using non-polarized white light with an incident angle of 45 to 50 °. The exposure time of the color digital camera was set to such an extent that an intensity over at each pixel did not occur, and the background at the same exposure time was also measured. After shooting, it was saved as a TIFF format file on the color digital camera so that there was no loss of pixel information. The image when the scattered light from the sample A, the sample B, and the sample C was image | photographed with a color digital camera is shown in FIG.

  After the TIFF file stored in the color digital camera was read by a computer, the background was subtracted and the true scattered light intensities of each pixel of sample A, sample B and sample C were determined for the three primary colors. The wavelength of blue light is 420 to 470 nm, the wavelength of green light is 490 to 600 nm, and the wavelength of red light is 540 to 680 nm. Then, averaging was performed in units of 32 × 32 pixels (10 × 10 μm), and evaluation of the entire area was performed using the total scattered light intensity of the three primary colors and the blue light ratio as an index.

  FIG. 5 shows an image of an optical microscope of sample A, sample B, and sample C, an analysis image representing the magnitude of total scattered light intensity by color shading, and an analysis image representing high and low of the blue light ratio by color shading It is. In FIG. 5, the lighter the color, the higher the total scattered light intensity or the higher the blue light ratio. In sample A, the total scattered light intensity was high, and the portion with a high blue light ratio was present in an island shape. FIG. 6 is a SEM image of sample A to which glycerin has been added. From the low magnification to the high magnification in the order of FIG. 6 (a) to FIG. 6 (c). FIG. 7 is a SEM image of sample B. The magnification of FIG. 7 (a) is lower than that of FIG. 7 (b). From FIG. 5 and FIG. 6, the island-like portion with high total scattered light intensity and high blue light ratio of sample A is composed of isolated particles and micro aggregates, and large aggregates of micrometer class do not exist That was confirmed.

  The total scattered light intensity increases as the number of nanoparticles increases. In order to measure as many nanoparticles as possible in a single precision observation, it is advantageous to measure a portion where the total scattered light intensity of the sample is large. On the other hand, the blue light ratio indicates good dispersibility, and the influence of the aggregates can be reduced by measuring the portion where the blue light ratio of the sample is high. From FIGS. 5 to 7, it was found that in the sample A compared with the sample B, the portion with many isolated particles was widely distributed.

  As shown in FIG. 5, in the region on the left side of the sample C, although the particle density is high, the blue light ratio is low, which indicates that there are many aggregates. On the other hand, the region on the right side of sample C has low particle density. Generally, it can be expected that the lower the particle density, the harder the aggregation, but according to the image of sample C in FIG. 5, the particles are not necessarily difficult to aggregate if the particle density is low, the particle density is somewhat high, and the aggregation is It was found that there is a small portion (high blue light ratio).

  As shown in FIG. 5, in the sample B, although the total scattered light intensity and the blue light ratio were almost uniform, there was no region in which the blue light ratio exceeded 0.6. From FIG. 7, it was confirmed that the dot-like region observed in the optical microscope image of the sample B was a large aggregate. This result is predicted from the blue light ratio and the total scattered light intensity, and the dispersion state of the nanoparticles is designated as a predetermined value of the blue light ratio or the blue light ratio and the total scattered light intensity of the present invention. It shows that the method of evaluating each predetermined part in the area is effective.

  On the other hand, as shown in FIG. 5, in the sample C, the total scattered light intensity and the blue light ratio largely differ depending on the place. As a whole, the blue light ratio is small in the region where the total scattered light intensity is large. The region where the total scattered light intensity is large is considered to be a region in which a large number of nanoparticles are aggregated. Further, it was found that even in the region where the total scattered light intensity is low, there is a portion where the blue light ratio is low, and it is not necessarily the case that particles are difficult to aggregate if the particle density is low. In the sample in which the nanoparticles were dispersed nonuniformly, there was a tendency to select a portion with low particle concentration as an observation portion in order to observe a portion with as few aggregates as possible. However, from the results of this example, it was found that the low density part of the sample nanoparticles is not necessarily suitable for observation, and it is effective to select the optimum place according to the present invention.

10 Nanoparticle Observation Device 12 Stage 14 White LED
16, 18 condenser lens 20 multi-mode fiber 22 polarization filter 24 objective lens 26 projection lens 28 color digital camera 30 computer 40 AFM
42 stage controller 44 AFM head 46 AFM cantilever 48 probe S sample P substrate N nanoparticle

Claims (12)

Irradiating the nanoparticles of the sample containing dispersed nanoparticles with light containing three primary colors;
Measuring the wavelength and intensity of scattered light of the light by the nanoparticles;
From the wavelength and intensity of the scattered light measured in the measurement step, the total scattered light intensity which is the sum of the light intensities of the three primary colors, the blue light intensity which is the blue light intensity, and the blue for the total scattered light intensity Calculating a blue light ratio, which is a ratio of light intensity, within a predetermined area of the sample;
Evaluating the dispersion state of the nanoparticles for each predetermined portion in the region, using the blue light ratio as an index;
Nanoparticle evaluation method having. In claim 1,
In the said evaluation process, the nanoparticle evaluation method which evaluates the dispersion state of the said nanoparticle for every predetermined part in the said area | region further by making the said total scattered light intensity into a parameter | index. In claim 1 or 2,
The sample comprises a substrate and nanoparticles dispersed on the substrate,
In the said irradiation process, the nanoparticle evaluation method which irradiates the said light to the diagonal direction with respect to the upper surface of a board | substrate. In any one of claims 1 to 3,
The observation portion of the sample is selected based on the dispersion state of the nanoparticles for each predetermined portion of the sample evaluated in the evaluation step, and the observation portion is observed with at least one of an electron microscope and a scanning probe microscope The nanoparticle evaluation method which further has an observation process. In any one of claims 1 to 4,
The nanoparticle evaluation method whose average particle diameter of the said nanoparticle is 50-100 nm. In any one of claims 1 to 5,
The nanoparticle evaluation method comprising the step of recording the wavelength and intensity of the scattered light recognized by the imaging device as digital data in the measurement step. A stage for mounting a sample comprising dispersed nanoparticles;
A light source provided so as to irradiate light containing three primary colors to the nanoparticles from an oblique direction with respect to the upper surface of the stage with the sample mounted thereon;
A digital device for recording, as digital data, the wavelength and intensity of scattered light in a predetermined region of the sample among scattered light of the light emitted from the light source by the nanoparticles.
A digital processing device that calculates, based on digital data recorded by the digital device, blue light intensity that is blue light intensity and total scattered light intensity that is a sum of light intensities of three primary colors;
A scanning probe microscope provided with a probe provided to face the upper surface of the stage, and a stage control device for moving the stage in three dimensions;
Nanoparticle observation device having. A stage for mounting a sample comprising dispersed nanoparticles;
A light source provided so as to irradiate light containing three primary colors to the nanoparticles from an oblique direction with respect to the upper surface of the stage with the sample mounted thereon;
A digital device for recording, as digital data, the wavelength and intensity of scattered light in a predetermined region of the sample among scattered light of the light emitted from the light source by the nanoparticles.
A digital processing device that calculates, based on digital data recorded by the digital device, blue light intensity that is blue light intensity and total scattered light intensity that is a sum of light intensities of three primary colors;
An electron microscope comprising an electron gun provided to face the upper surface of the stage, and a stage control device for moving the stage in three dimensions;
Nanoparticle observation device having. In claim 7 or 8,
The nanoparticle observation device whose said digital device is a color digital camera. In any one of claims 7 to 9,
An apparatus for observing nanoparticles, further comprising an optical microscope between the stage and the digital device. In any one of claims 7 to 10,
An apparatus for observing nanoparticles, further comprising a polarizing filter between the stage and the light source, capable of changing the polarization of light emitted by the light source. In any one of claims 7 to 11,
The nanoparticle observation apparatus which can change the incident angle of the said light which the said light source irradiates to the said nanoparticle.

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