WO2018055771A1 - Measuring device - Google Patents

Measuring device Download PDF

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Publication number
WO2018055771A1
WO2018055771A1 PCT/JP2016/078289 JP2016078289W WO2018055771A1 WO 2018055771 A1 WO2018055771 A1 WO 2018055771A1 JP 2016078289 W JP2016078289 W JP 2016078289W WO 2018055771 A1 WO2018055771 A1 WO 2018055771A1
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WO
WIPO (PCT)
Prior art keywords
light
laser
laser light
measurement point
laser beam
Prior art date
Application number
PCT/JP2016/078289
Other languages
French (fr)
Japanese (ja)
Inventor
智夫 五明
尚也 藤本
廉士 澤田
大史 野上
伸友 森田
文弥 中島
Original Assignee
愛知時計電機株式会社
国立大学法人九州大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 愛知時計電機株式会社, 国立大学法人九州大学 filed Critical 愛知時計電機株式会社
Priority to PCT/JP2016/078289 priority Critical patent/WO2018055771A1/en
Priority to JP2018540599A priority patent/JP6908245B2/en
Publication of WO2018055771A1 publication Critical patent/WO2018055771A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave

Definitions

  • the technology disclosed in this specification relates to a measurement device.
  • the laser Doppler type measuring device includes a laser light irradiation device, a light receiving device, and a processing device.
  • the laser beam irradiation apparatus irradiates laser light toward a moving measurement object.
  • the laser light emitted from the laser light irradiation device is scattered when it hits a moving measurement object to generate scattered light.
  • the light receiving device receives the scattered light generated at that time.
  • the processing device calculates the velocity of the measurement object based on the frequency of the scattered light.
  • the processing device calculates the speed of the measurement object by a known calculation method based on a Doppler shift.
  • Patent Document 1 Japanese Patent Laid-Open No. 5-662266 discloses a measuring device including a laser light irradiation device that irradiates laser light from two different directions toward a moving measurement object.
  • the measuring device of Patent Document 1 includes a laser light irradiation device, a light receiving device, and a processing device.
  • the laser beam irradiation apparatus irradiates the first laser beam and the second laser beam toward the moving measurement object.
  • the first laser light and the second laser light are emitted from different directions toward the measurement object.
  • the first laser light and the second laser light irradiated from the laser light irradiation device are scattered when they hit the moving measurement object, and each scattered light is generated.
  • the light receiving device receives each scattered light generated at that time.
  • the light-receiving device is provided with a condensing lens, and various scattered light is condensed and received by this condensing lens.
  • the processing device calculates the velocity of the measurement object based on the frequency of each scattered light.
  • the processing device calculates the speed of the measurement object by a known calculation method based on a Doppler shift.
  • the speed of particles in a fluid flowing through a flow path may be measured. That is, the measurement object may be particles in the fluid. As the particles in the fluid, for example, red blood cells in blood can be considered.
  • the measuring device measures the velocity of red blood cells in the blood flowing through the flow path. Thereby, the blood flow rate can be known.
  • innumerable particles include, for example, particles that pass through the central portion of the flow channel and particles that pass through the peripheral portion of the flow channel. Also, the speed of countless particles in the fluid varies. Some particles are fast, others are slow.
  • the first laser light and the second laser light are directed from the laser light irradiation device toward an arbitrary measurement point in the flow path. Irradiate with laser light.
  • the first laser beam and the second laser beam are irradiated from different directions toward the measurement point in the flow path.
  • the first laser light and the second laser light irradiated from the laser light irradiation device are scattered when they hit the particles passing through the measurement point, and each scattered light is generated.
  • the light receiving device receives each scattered light generated at that time.
  • the light receiving device condenses and receives various scattered light by a condensing lens. Then, based on the frequency of each scattered light received by the light receiving device, the processing device calculates the velocity of the particles passing through the measurement point.
  • each laser beam is applied only to the measurement point when the first laser beam and the second laser beam are irradiated from the laser beam irradiation device toward the measurement point. Irradiation is sufficient. Then, only the scattered light generated when the first laser light and the second laser light hit only the particles passing through the measurement point and each laser light hits the particles can be taken out. Therefore, ideally, when the first laser beam and the second laser beam are irradiated, it is preferable to irradiate the first laser beam and the second laser beam so as to overlap only at the measurement point.
  • the first laser beam and the second laser beam are also distributed around the measurement point by light diffusion or the like.
  • Laser light will be irradiated. That is, the first laser beam and the second laser beam are irradiated so as to overlap each other around the measurement point due to light diffusion or the like. Then, when the first laser light and the second laser light irradiated from the laser light irradiation device hit the particles and scatter, the particles pass not only the particles passing through the measurement point but also passing around the measurement point. In addition, the first laser beam and the second laser beam hit and scatter.
  • the processing apparatus calculates the velocity of the particles based on various scattered light frequencies, and it becomes difficult to accurately measure the velocity of the particles in the fluid flowing through the flow path.
  • the processing device calculates the velocity of the particles based on the frequency of the various scattered light. It will be. As a result, it becomes difficult to accurately measure the velocity of the particles in the fluid flowing through the flow path.
  • the measuring apparatus of Patent Document 1 not only scattered light generated by particles passing through the measurement point but also excess scattered light is received, making it difficult to accurately measure the velocity of the particles. Become.
  • the measuring device of Patent Document 1 has no problem when the speed of the measurement object is uniform, but causes a problem when the speed is various, such as particles in a fluid. Therefore, the present specification provides a technique capable of suppressing the reception of excess scattered light.
  • the measuring device disclosed in this specification is a device for measuring the velocity of particles in a fluid flowing through a flow path.
  • This measuring device includes a laser beam irradiation device and a light receiving device.
  • the laser beam irradiation device includes a first laser beam that travels toward a measurement point in the flow path and a second laser beam that travels toward a measurement point in the flow path from a different direction from the first laser light. Irradiate.
  • the light receiving device receives scattered light respectively generated when the first laser light and the second laser light irradiated from the laser light irradiation device hit the particles passing through the measurement point.
  • the light receiving device includes a light receiving element and a hollow light passage hole formed between the light receiving element and the measurement point. The light passage hole extends in a direction from the measurement point toward the light receiving element, and scattered light generated by particles passing through the measurement point passes through the light passage hole and enters the light receiving element.
  • the first laser beam and the second laser beam are irradiated from the laser beam irradiation device, the first laser beam and the second laser beam are irradiated not only at the measurement point but also around the measurement point. May end up. Then, scattered light is generated not only by the particles passing through the measurement point but also by particles passing around the measurement point.
  • the light passage hole is provided, it can suppress that the scattered light produced by the particle
  • the scattered light generated by the particles passing through the measurement point is reflected in the light passage hole.
  • the scattered light generated by the particles passing around the measurement point is less likely to enter the light receiving element due to the presence of the light passage hole. Accordingly, it is possible to suppress receiving excessive scattered light. Therefore, the velocity of particles in the fluid flowing through the flow path can be accurately measured.
  • FIG. 1 It is a figure which shows schematic structure of the measuring device which concerns on an Example. It is an enlarged view of the principal part II of FIG. It is a figure which shows schematic structure of the light-receiving device based on an Example. It is a block diagram of a measuring device concerning an example. It is a figure which shows schematic structure of the measuring device which concerns on another Example. It is sectional drawing which shows an example of a light passage hole. It is sectional drawing which shows another example of a light passage hole. It is sectional drawing which shows another example of a light passage hole. It is a figure which shows schematic structure of the light-receiving device which concerns on another Example.
  • a laser beam irradiation apparatus includes a light emitting element that emits laser light, a laser beam emitted from the light emitting element, a first laser beam, and a second laser beam that travels in a direction different from the first laser beam. You may provide the diffraction grating divided into.
  • the laser beam irradiation device is a first transmission / reflection surface on which the first laser beam divided by the diffraction grating is incident, and a part of the incident first laser beam is transmitted and the other part is transmitted. May be provided, and the reflected first laser light may be provided with a first transmission / reflection surface that travels toward the measurement point.
  • the laser beam irradiation device is a second transmitting / reflecting surface on which the second laser beam divided by the diffraction grating is incident, transmits a part of the incident second laser beam, and the other part.
  • the second transmission / reflection surface may be provided in which the reflected second laser light travels toward the measurement point.
  • a part of the first laser light (component transmitted through the first transmission / reflection surface) can be removed, and the other part (component reflected by the first transmission / reflection surface). ) Only travels toward the measurement point, so that it is possible to narrow the spread of the strong light of the first laser beam traveling toward the measurement point.
  • a part of the second laser light (component transmitted by the second transmission / reflection surface) can be removed, and only the other part (component reflected by the second transmission / reflection surface) is measured. Therefore, it is possible to narrow the spread of the strong light of the second laser beam traveling toward the measurement point.
  • the first laser beam and the second laser beam spread around the measurement point when the first laser beam and the second laser beam are irradiated toward the measurement point. Can be suppressed. Therefore, it can suppress that scattered light arises with the particle
  • the incident angle of the optical axis of the first laser beam incident on the first transmission / reflection surface may be smaller than the critical angle of the first transmission / reflection surface.
  • the incident angle of the optical axis of the second laser light incident on the second transmission / reflection surface may be smaller than the critical angle of the second transmission / reflection surface.
  • the intensity of light can be reduced.
  • the measuring device may further include a moving device that changes the distance between the diffraction grating and the first transmission / reflection surface and the second transmission / reflection surface.
  • the positions where the first laser light and the second laser light separated by the diffraction grating are incident on the first transmission / reflection surface and the second transmission / reflection surface can be changed.
  • the position where the first laser light and the second laser light are irradiated can be changed, and the position of the measurement point in the flow path can be changed.
  • the diffraction grating may be a reflection type diffraction grating.
  • the light emitting element may be disposed between the diffraction grating, the first transmission / reflection surface, and the second transmission / reflection surface.
  • the laser beam emitted from the light emitting element may be divided into a first laser beam and a second laser beam by reflection by a diffraction grating.
  • the measuring device can be made compact. If the diffraction grating is a transmission type diffraction grating, the light emitting element must be disposed on the opposite side of the first transmission reflection surface and the second transmission reflection surface with respect to the diffraction grating, and the measuring device is large. It will become.
  • the measuring apparatus 1 As shown in FIG. 1, the measuring apparatus 1 according to the embodiment is used by being fixed to a tube 61 by a fixture 62. A flow path 60 is formed in the tube 61.
  • the measuring device 1 is a device that measures the velocity v of the particle R in the fluid F flowing through the flow path 60. Thereby, the flow rate of the fluid F can be known.
  • Innumerable particles R exist in the fluid F flowing through the flow path 60. Innumerable particles R are diffused in the fluid F. Therefore, among the countless particles R, for example, there are particles R that pass through the central portion of the flow channel 60 and particles R that pass through the peripheral portion of the flow channel 60. In addition, the speed of the countless particles R varies. Some particles R have a high speed and some particles R have a low speed. When measuring the velocity v of the particle R in the fluid F flowing through the flow channel 60, the velocity v of the particle R may be measured by focusing on a specific measurement point 10 in the flow channel 60. The position of the measurement point 10 in the flow channel 60 is not particularly limited.
  • the velocity v of the particle R passing through the central portion of the flow channel 60 is measured using the central portion of the flow channel 60 as the measurement point 10. can do.
  • the flow velocity of the fluid F flowing through the central portion of the flow channel 60 corresponds to twice the average flow velocity of the fluid F flowing through the entire flow channel 60.
  • Examples of the fluid F flowing through the flow path 60 include blood.
  • Examples of the particles R in the fluid F include red blood cells.
  • the measuring device 1 can measure the velocity of red blood cells in the blood. Thereby, the blood flow rate can be known.
  • extracorporeal circulation may be performed in which blood flowing through a patient's body is sent out of the body and the blood sent out of the body is sent back into the body again.
  • the extracorporeal circulation tube is connected to the patient's blood vessel, the blood flowing through the patient's blood vessel flows into the extracorporeal circulation tube, and the blood flowing through the extracorporeal circulation tube is returned to the patient's blood vessel again. It is.
  • the velocity v of red blood cells (particles R) in blood (fluid F) flowing through the extracorporeal circulation tube 61 can be measured by the measuring device 1 shown in FIG.
  • the measuring device 1 includes a laser light irradiation device 2, a light receiving device 3, and a processing device 9.
  • the laser light irradiation device 2 includes a light emitting element 21, a collimator lens 22, a diffraction grating 23, and a light guide 24.
  • the light emitting element 21 is, for example, a laser diode (LD).
  • the light emitting element 21 is disposed so as to face the collimator lens 22.
  • the light emitting element 21 emits laser light toward the collimator lens 22.
  • Laser light emitted from the light emitting element 21 enters the collimator lens 22.
  • the light emitting element 21 emits laser light on the side opposite to the light guide 24.
  • the light emitting element 21 is disposed between the diffraction grating 23 and the light guide 24.
  • the collimator lens 22 is disposed between the light emitting element 21 and the diffraction grating 23.
  • the collimator lens 22 emits the laser light L emitted from the light emitting element 21 as parallel light.
  • Laser light L (parallel light) emitted from the collimator lens 22 enters the diffraction grating 23.
  • the diffraction grating 23 is disposed so as to face the collimator lens 22.
  • the diffraction grating 23 is movable, and the diffraction grating 23 can be moved by the moving device 25.
  • the moving device 25 can change the distance between the diffraction grating 23 and the light guide 24.
  • the moving device 25 is, for example, a mechanical device, and can move the diffraction grating 23 up and down by turning a bolt. By changing the position of the diffraction grating 23, the position of the measurement point 10 in the flow path 60 can be changed.
  • the diffraction grating 23 divides the laser light L incident on the diffraction grating 23 into the first laser light L1 and the second laser light L2 using light diffraction.
  • the diffraction grating 23 is a reflection type diffraction grating.
  • the laser beam L incident on the diffraction grating 23 is reflected by the diffraction grating 23, it is divided into a first laser beam L1 and a second laser beam L2.
  • the laser beam L emitted from the light emitting element 21 is reflected by the diffraction grating 23 to be divided into a first laser beam L1 and a second laser beam L2.
  • the first laser beam L1 and the second laser beam L2 generated by the diffraction grating 23 travel in different directions. Both the first laser beam L1 and the second laser beam L2 travel toward the light guide 24, but travel so as to be line-symmetric with respect to the line connecting the light emitting element 21 and the collimator lens 22. In the example shown in FIG. 1, the first laser light L1 travels diagonally upward to the right, and the second laser light L2 travels diagonally upward to the left.
  • the wavelength of the first laser light L1 and the wavelength of the second laser light L2 are the same wavelength. Further, the frequency of the first laser light L1 and the frequency of the second laser light L2 are the same frequency.
  • the light guide 24 is disposed between the diffraction grating 23 and the tube 61.
  • the first laser beam L1 and the second laser beam L2 generated by the diffraction grating 23 enter the light guide 24.
  • the light guide 24 is formed of, for example, a rectangular parallelepiped transparent glass block.
  • the light guide 24 includes an entrance surface 41, an exit surface 42, a first side surface 43, and a second side surface 44.
  • the incident surface 41 is disposed so as to face the diffraction grating 23.
  • the first laser beam L1 and the second laser beam L2 are incident from the incident surface 41.
  • the first laser light L 1 incident from the incident surface 41 travels toward the first side surface 43.
  • the first laser beam L1 is incident on the first side surface 43.
  • the second laser light L 2 incident from the incident surface 41 travels toward the second side surface 44.
  • the second laser beam L2 is incident on the second side surface 44.
  • the first side surface 43 and the second side surface 44 are disposed between the incident surface 41 and the output surface 42.
  • the first side surface 43 is a transmission / reflection surface that transmits and reflects the first laser beam L1.
  • the first side surface may be referred to as a first transmission / reflection surface.
  • the first side surface may be referred to as a first half mirror.
  • the first laser light L1 reflected by the first transmission / reflection surface 43 travels toward the emission surface 42 and is emitted from the emission surface 42.
  • the second side surface 44 is a transmission reflection surface that transmits and reflects the second laser light L2.
  • the second side surface may be referred to as a second transmission / reflection surface.
  • the second side surface may be referred to as a second half mirror.
  • the second laser light L2 reflected by the second transmission / reflection surface 44 travels toward the emission surface 42 and is emitted from the emission surface 42.
  • the emission surface 42 is disposed so as to face the tube 61.
  • the first laser beam L1 and the second laser beam L2 are emitted from the emission surface 42.
  • the first laser light L1 and the second laser light L2 emitted from the emission surface 42 enter the tube 61.
  • the first laser light L1 and the second laser light L2 travel toward the measurement point 10 in the flow path 60.
  • the first laser beam L1 is preferably parallel light, but actually has a certain extent as shown in FIG. Therefore, the first laser light L1 incident on the first transmission / reflection surface 43 includes a component having a large incident angle to the first transmission / reflection surface 43 as indicated by ⁇ 1, and the first laser light L1 as indicated by ⁇ 1. There is also a component with a small incident angle to the transmission / reflection surface 43.
  • the optical axis X1 of the first laser light L1 is incident on the first transmission / reflection surface 43 at an incident angle ⁇ i.
  • the incident angle ⁇ i of the optical axis X1 of the first laser beam L1 is smaller than the critical angle ⁇ r in the first transmission / reflection surface 43.
  • the first laser light L 1 incident on the first transmission / reflection surface 43 a component having an incident angle smaller than the critical angle ⁇ r is transmitted through the first transmission / reflection surface 43.
  • a component having an incident angle larger than the critical angle ⁇ r is reflected by the first transmission / reflection surface 43.
  • the incident angle ⁇ i of the optical axis X1 of the first laser beam L1 is reduced, the component with the incident angle smaller than the critical angle ⁇ r increases, and the component transmitted through the first transmission / reflection surface 43 increases (the component to be reflected is smaller).
  • the incident angle ⁇ i of the optical axis X1 of the first laser light L1 is increased, the incident angle is larger than the critical angle ⁇ r, and the component reflected by the first transmitting / reflecting surface 43 is increased (the transmitted component is smaller). Less.
  • the second laser beam L2 is the same as the first laser beam L1.
  • the second laser light L2 is preferably parallel light, but actually has a certain extent as shown in FIG. Therefore, the second laser light L2 incident on the second transmission / reflection surface 44 includes a component having a large incident angle to the second transmission / reflection surface 44 as indicated by ⁇ 2, and the second laser light L2 as indicated by ⁇ 2. There is also a component with a small incident angle to the transmission / reflection surface 44.
  • the optical axis X2 of the second laser beam L2 is incident on the second transmission / reflection surface 44 at an incident angle ⁇ i.
  • the incident angle ⁇ i of the optical axis X2 of the second laser light L2 is smaller than the critical angle ⁇ r in the second transmission / reflection surface 44.
  • the incident angle ⁇ i of the optical axis X2 of the second laser light L2 is the same as the incident angle ⁇ i of the optical axis X1 of the first laser light L1.
  • the critical angle ⁇ r in the second transmission / reflection surface 44 is the same as the critical angle ⁇ r in the first transmission / reflection surface 43.
  • a component having an incident angle smaller than the critical angle ⁇ r transmits through the second transmission / reflection surface 44.
  • a component having an incident angle larger than the critical angle ⁇ r is reflected by the second transmission / reflection surface 44.
  • the incident angle ⁇ i of the optical axis X2 of the second laser beam L2 When the incident angle ⁇ i of the optical axis X2 of the second laser beam L2 is reduced, the component with the incident angle smaller than the critical angle ⁇ r increases, and the component transmitted through the second transmission / reflection surface 44 increases (the component to be reflected is smaller). Less.) When the incident angle ⁇ i of the optical axis X2 of the second laser beam L2 is increased, the incident angle is larger than the critical angle ⁇ r, and the component reflected by the second transmission / reflection surface 44 is increased (the transmitted component is smaller). Less.)
  • the first laser light L ⁇ b> 1 and the second laser light L ⁇ b> 2 emitted from the emission surface 42 of the light guide 24 travel toward the measurement point 10 in the flow path 60.
  • the first laser beam L1 and the second laser beam L2 travel toward the measurement point 10 from different directions. That is, the first laser beam L1 and the second laser beam L2 are irradiated from the laser beam irradiation device 2 toward the measurement point 10 in the channel 60 from different directions.
  • the first laser light L1 travels from the downstream side of the flow path 60 toward the measurement point 10.
  • the second laser light L2 travels from the upstream side of the flow path 60 toward the measurement point 10.
  • the first laser beam L1 and the second laser beam L2 are interfered and overlapped at the measurement point 10 in the flow path 60.
  • the fluid F flows through the flow path 60, and innumerable particles R (for example, red blood cells) exist in the fluid F.
  • innumerable particles R for example, red blood cells
  • the first laser light L1 and the second laser light L2 strike the particle R passing through the measurement point 10
  • the first laser light L1 and the second laser light L2 are scattered.
  • the first laser beam L1 and the second laser beam L2 strike the particle R from different directions.
  • the first laser light L1 hits the particle R from the downstream side of the flow path 60. That is, the first laser light L1 strikes the particle R from the traveling direction side of the particle R.
  • the second laser light L2 hits the particle R from the upstream side of the flow path 60.
  • the second laser light L2 strikes the particle R from the side opposite to the traveling direction of the particle R. Scattered light is generated when the first laser light L1 and the second laser light L2 strike the particle R and are scattered.
  • the first scattered light P1 is generated when the first laser light L1 strikes the particle R and is scattered.
  • the second scattered light P2 is generated when the second laser light L2 hits the particle R and is scattered.
  • the first scattered light P ⁇ b> 1 and the second scattered light P ⁇ b> 2 generated by scattering travel in various directions around the measurement point 10. Among these, there are first scattered light P1 and second scattered light P2 that travel from the measurement point 10 toward the light receiving device 3.
  • the light receiving device 3 receives the first scattered light P1 and the second scattered light P2.
  • the frequency f1 of the first scattered light P1 generated by the scattering of the first laser light L1 is a frequency different from the frequency of the first laser light L1.
  • the frequency f2 of the second scattered light P2 generated by the scattering of the second laser light L2 is a frequency different from the frequency of the second laser light L2.
  • the frequency f1 of the first scattered light P1 and the frequency f2 of the second scattered light P2 are different from each other.
  • the light receiving device 3 is disposed between the tube 61 and the laser beam irradiation device 2.
  • the light receiving device 3 is disposed so as to face the flow path 60.
  • the light receiving device 3 is fixed to the light guide 24 of the laser light irradiation device 2.
  • the light receiving device 3 includes a light receiving element 31 and a cylindrical body 32.
  • the cylindrical body 32 is disposed between the tube 61 and the light receiving element 31.
  • the cylindrical body 32 is fixed to the light receiving element 31.
  • the cylinder 32 is cylindrical.
  • the inside of the cylindrical body 32 is hollow.
  • a light passage hole 35 is formed in the cylindrical body 32.
  • the light passage hole 35 includes an entrance port 36 and an exit port 37.
  • the light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31.
  • the light passage hole 35 is formed between the measurement point 10 and the light receiving element 31.
  • the first scattered light P ⁇ b> 1 and the second scattered light P ⁇ b> 2 generated by the particles R passing through the measurement point 10 enter the light passage hole 35 from the incident port 36.
  • the first scattered light P1 and the second scattered light P2 traveling from the measurement point 10 toward the light receiving element 31 pass through the light passage hole 35.
  • the first scattered light P ⁇ b> 1 and the second scattered light P ⁇ b> 2 that have passed through the light passage hole 35 are emitted from the emission port 37 and enter the light receiving element 31.
  • the outer peripheral surface of the cylindrical body 32 is covered with a light-shielding cover 312. Light does not enter the light passage hole 35 from the outer peripheral surface of the cylindrical body 32.
  • Light P3 traveling in the direction intersecting the axial direction of the light passage hole 35 from the side of the cylindrical body 32 is blocked by the cover 312 and does not enter the light passage hole 35.
  • Scattered light P ⁇ b> 1 and P ⁇ b> 2 traveling in the axial direction of the light passage hole 35 enter the light passage hole 35.
  • the axial length of the light passage hole 35 is at least twice the diameter of the incident port 36.
  • the light receiving element 31 receives the first scattered light P1 and the second scattered light P2 that have passed through the light passage hole 35.
  • the light receiving element 31 is, for example, a photodiode (PD).
  • PD photodiode
  • the light receiving element 31 faces the emission port 37 of the light passage hole 35.
  • the other parts are covered with a cover 312. Scattered light P ⁇ b> 1 and P ⁇ b> 2 emitted from the emission port 37 enter the light receiving element 31.
  • Light P4 traveling from the side of the light receiving element 31 toward the light receiving element 31 is blocked by the cover 312 and does not enter the light receiving element 31.
  • the processing device 9 is electrically connected to the light emitting element 21 and the light receiving element 31. Based on the laser light L emitted from the light emitting element 21 and the first scattered light P1 and the second scattered light P2 received by the light receiving element 31, the processing device 9 uses the velocity v of the particle R passing through the measurement point 10. Is calculated. The processing device 9 calculates the velocity v of the particle R by a calculation method based on the Doppler shift. The velocity v of the particle R passing through the measurement point 10 can be calculated by the following equation (1).
  • F is a Doppler frequency of light received by the light receiving device 3 (light in which the first scattered light P1 and the second scattered light P2 interfere).
  • ⁇ is an angle between the first laser beam L1 traveling toward the measurement point 10 and the line connecting the measurement point 10 and the light receiving device 3 (or the second laser beam traveling toward the measurement point 10). L2 and an angle formed by a line connecting measurement point 10 and light receiving device 3). ⁇ is the wavelength of the laser light (first laser light L1 and second laser light L2). Since the method for calculating the velocity v of the particle R is known, a detailed description thereof will be omitted.
  • the measuring device 1 of the embodiment is a device that measures the velocity v of the particle R in the fluid F flowing through the flow path 60, and includes the first laser light L1 and the second laser.
  • a laser light irradiation device 2 that irradiates the light L2 and a light receiving device 3 that receives the first scattered light P1 and the second scattered light P2 are provided.
  • the first laser light L1 and the second laser light L2 travel from different directions toward the measurement point 10 in the flow path 60.
  • the first laser light L1 hits the particle R passing through the measurement point 10
  • the first scattered light P1 is generated.
  • the second laser beam L2 hits the particle R passing through the measurement point 10
  • the second scattered light P2 is generated.
  • the light receiving device 3 receives the first scattered light P1 and the second scattered light P2.
  • the light receiving device 3 includes a light receiving element 31 and a hollow light passage hole 35 formed between the light receiving element 31 and the measurement point 10.
  • the light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31.
  • the first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10 pass through the light passage hole 35 and enter the light receiving element 31.
  • the light receiving device 3 receives the first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10. Based on the frequency f1 of the first scattered light P1 and the frequency f2 of the second scattered light P2 received by the light receiving device 3, the velocity v of the particle R passing through the measurement point 10 can be calculated.
  • the first measurement point 10 when the first laser beam L 1 and the second laser beam L 2 are irradiated from the laser beam irradiation device 2, the first measurement point 10 only is measured. It is preferable to irradiate the laser beam L1 and the second laser beam L2.
  • the first laser is also applied to the periphery of the measurement point 10 due to light diffusion or the like.
  • the light L1 and the second laser light L2 are irradiated.
  • the first laser light L1 and the second laser light L2 irradiated from the laser light irradiation device 2 hit the particles R in the fluid F and scatter, they only hit the particles R passing through the measurement point 10 and scatter. In other words, the light hits the particle R passing around the measurement point 10 and is scattered.
  • the light passing hole 35 since the light passing hole 35 is provided, only scattered light generated by the particle R passing through the measurement point 10 can be received and generated by the particle R passing around the measurement point 10. Receiving scattered light can be suppressed. That is, according to the above configuration, the light passing hole 35 extends between the measurement point 10 and the light receiving element 31 in the direction from the measurement point 10 toward the light receiving element 31, and thus is generated by the particles R passing through the measurement point 10. The scattered light passes through the light passage hole 35 and enters the light receiving element 31. However, the scattered light generated by the particles R passing around the measurement point 10 enters the light receiving element 31 due to the presence of the light passage hole 35. It becomes difficult. Accordingly, it is possible to suppress receiving excessive scattered light.
  • the laser beam irradiation apparatus 2 is the light emitting element 21 which light-emits the laser beam L, and the laser beam L which the light emitting element 21 light-emitted is 1st laser beam L1 and 2nd laser beam L2.
  • a diffraction grating 23 is provided.
  • the first laser light L1 and the second laser light L2 separated by the diffraction grating 23 travel in different directions.
  • the laser light irradiation device 2 includes a first transmission / reflection surface 43 on which the first laser light L1 divided by the diffraction grating 23 is incident and a second transmission / reflection surface 44 on which the second laser light L2 is incident. It has.
  • the first transmission / reflection surface 43 On the first transmission / reflection surface 43, a part of the incident first laser light L1 is transmitted, the other part is reflected, and the reflected first laser light L1 travels toward the measurement point 10.
  • the second transmitting / reflecting surface 44 transmits part of the incident second laser light L2 and reflects the other part, and the reflected second laser light L2 travels toward the measurement point 10.
  • the first transmission / reflection surface 43 is constituted by the first side surface 43 of the light guide 24 and may be referred to as a first half mirror 43 that transmits and reflects the first laser light L1.
  • the second transmission / reflection surface 44 is constituted by the second side surface 44 of the light guide 24 and may be referred to as a second half mirror 44 that transmits and reflects the second laser light L2.
  • the intensity of the first laser beam L1 traveling toward the measurement point 10 can be reduced.
  • the transmitted component of the second laser light L2 incident on the second transmission / reflection surface 44 can be removed, and only the reflected component travels toward the measurement point 10.
  • the intensity of the second laser light L2 that travels toward can be reduced.
  • the incident angle ⁇ i of the optical axis X1 of the first laser light L1 incident on the first transmission / reflection surface 43 is smaller than the critical angle ⁇ r of the first transmission / reflection surface 43.
  • the incident angle ⁇ i of the optical axis X2 of the second laser light L2 incident on the second transmission / reflection surface 44 is smaller than the critical angle ⁇ r of the second transmission / reflection surface 44.
  • strength of the 1st laser beam L1 and the 2nd laser beam L2 which advance toward the measurement point 10 can be made weak. Therefore, when the first laser beam L1 and the second laser beam L2 are irradiated toward the measurement point 10, the first laser beam L1 and the second laser beam L2 spread around the measurement point 10. Can be suppressed.
  • the measuring device 1 includes a moving device 25 that changes the distance between the diffraction grating 23 and the first transmission / reflection surface 43 and the second transmission / reflection surface 44.
  • a moving device 25 that changes the distance between the diffraction grating 23 and the first transmission / reflection surface 43 and the second transmission / reflection surface 44.
  • the diffraction grating 23 is a reflective diffraction grating.
  • the light emitting element 21 is disposed between the diffraction grating 23, the first transmission / reflection surface 43, and the second transmission / reflection surface 44, and the laser light L emitted from the light emitting element 21 is reflected by the diffraction grating 23.
  • the laser beam is divided into a first laser beam L1 and a second laser beam L2. According to such a configuration, since the light emitting element 21 can be accommodated between the diffraction grating 23 and the light guide 24, the measuring device 1 can be made compact.
  • the first transmission / reflection surface 43 and the second transmission / reflection surface 44 are formed on the single light guide 24, but the present invention is not limited to this configuration.
  • the laser light irradiation device 2 may include a first light guide 241 and a second light guide 242 that are separated.
  • a first transmission / reflection surface 43 is formed on the first light guide 241
  • a second transmission / reflection surface 44 is formed on the second light guide 242.
  • the shape of the light passage hole 35 is not particularly limited.
  • the cross-sectional shape of the light passage hole 35 may be circular.
  • the cross-sectional shape of the light passage hole 35 may be a polygonal shape.
  • the several light passage hole 35 may be formed in slit shape.
  • the light receiving device 3 may include a light receiving element 31 and a light shielding box 38.
  • the light receiving element 31 is disposed in the box 38.
  • the box 38 includes a front wall 38a, a rear wall 38b, and a pair of side walls 38c and 38c.
  • the front wall 38 a is disposed between the tube 61 and the light receiving element 31.
  • the rear wall 38 b is disposed between the light receiving element 31 and the laser light irradiation device 2.
  • the pair of side walls 38c, 38c are disposed between the front wall 38a and the rear wall 38b.
  • the light receiving element 31 is fixed to the rear wall 38b of the box 38.
  • the front wall 38 a of the box 38 is disposed at a position away from the light receiving element 31.
  • a light passage hole 35 is formed in the front wall 38a.
  • the light passage hole 35 includes an entrance port 36 and an exit port 37.
  • the light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31.
  • the first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10 pass through the light passage hole 35 and enter the light receiving element 31.
  • Light P4 traveling from the side of the box 38 toward the light receiving element 31 is blocked by the box 38 and does not enter the light receiving element 31.
  • the light receiving element 31 can be prevented from receiving excess light.
  • Measurement device 2 Laser beam irradiation device 3: Light receiving device 9: Processing device 10: Measurement point 21: Light emitting element 22: Collimator lens 23: Diffraction grating 24: Light guide 25: Moving device 31: Light receiving device 32: Cylindrical body 35: Light passage hole 36: Entrance port 37: Outlet port 38: Box body 41: Entrance surface 42: Exit surface 43: First side surface (first transmission / reflection surface) 44: Second side surface (second transmission / reflection surface) 60: channel 61: tube 62: fixture 241: first light guide 242: second light guide 312: cover F: fluid L: laser light L1: first laser light L2: second laser Light P1: First scattered light P2: Second scattered light R: Particle X1: Optical axis X2 of the first laser light: Optical axis of the second laser light

Abstract

A measuring device 1 is provided with a laser light radiating device 2 and a light receiving device 3. The laser light radiating device 2 radiates first laser light L1 traveling toward a measuring point 10 inside a flow passage 60, and second laser light L2 traveling toward the measuring point 10 inside the flow passage 60 from a different direction to the first laser light L1. The light receiving device 3 receives first scattered light P1 and second scattered light P2 generated when the first laser light L1 and the second laser light L2 radiated from the laser light radiating device 2 strike a particle R passing through the measuring point 10. The light receiving device 3 is provided with a light receiving element 31 and a hollow light transmitting hole 35 formed between the light receiving element 31 and the measuring point 10. The light transmitting hole 35 extends in a direction from the measuring point 10 toward the light receiving element 31, and the first scattered light P1 and the second scattered light P2 generated by the particle R which is passing through the measuring point 10 pass through the light transmitting hole 35 and enter the light receiving element 31.

Description

計測装置Measuring device
　本明細書に開示する技術は、計測装置に関する。 The technology disclosed in this specification relates to a measurement device.
　従来から、計測対象物の速度を計測するレーザードップラー式の計測装置が知られている。レーザードップラー式の計測装置は、レーザー光照射装置と受光装置と処理装置を備えている。レーザー光照射装置は、移動する計測対象物に向かってレーザー光を照射する。レーザー光照射装置から照射されたレーザー光は、移動する計測対象物に当たったときに散乱して散乱光が生じる。そのときに生じた散乱光を受光装置が受光する。受光装置が散乱光を受光すると、処理装置がその散乱光の周波数に基づいて計測対象物の速度を演算する。処理装置は、公知のドップラーシフトに基づく演算方法によって計測対象物の速度を演算する。 Conventionally, a laser Doppler type measuring device for measuring the speed of an object to be measured is known. The laser Doppler type measuring device includes a laser light irradiation device, a light receiving device, and a processing device. The laser beam irradiation apparatus irradiates laser light toward a moving measurement object. The laser light emitted from the laser light irradiation device is scattered when it hits a moving measurement object to generate scattered light. The light receiving device receives the scattered light generated at that time. When the light receiving device receives the scattered light, the processing device calculates the velocity of the measurement object based on the frequency of the scattered light. The processing device calculates the speed of the measurement object by a known calculation method based on a Doppler shift.
　特許文献１（日本国特開平５－６６２２６号公報）には、移動する計測対象物に向かって異なる２方向からレーザー光を照射するレーザー光照射装置を備えている計測装置が開示されている。特許文献１の計測装置は、レーザー光照射装置と受光装置と処理装置を備えている。レーザー光照射装置は、移動する計測対象物に向かって第１のレーザー光と第２のレーザー光を照射する。第１のレーザー光と第２のレーザー光は、計測対象物に向かって互いに異なる方向から照射される。レーザー光照射装置から照射された第１のレーザー光と第２のレーザー光は、移動する計測対象物に当たったときに散乱し、それぞれの散乱光が生じる。そのときに生じたそれぞれの散乱光を受光装置が受光する。また、特許文献１の計測装置では、受光装置が集光レンズを備えており、この集光レンズによって様々な散乱光を集光して受光する。受光装置が第１のレーザー光と第２のレーザー光の散乱光を受光すると、処理装置がそれぞれの散乱光の周波数に基づいて計測対象物の速度を演算する。処理装置は、公知のドップラーシフトに基づく演算方法によって計測対象物の速度を演算する。 Patent Document 1 (Japanese Patent Laid-Open No. 5-66226) discloses a measuring device including a laser light irradiation device that irradiates laser light from two different directions toward a moving measurement object. The measuring device of Patent Document 1 includes a laser light irradiation device, a light receiving device, and a processing device. The laser beam irradiation apparatus irradiates the first laser beam and the second laser beam toward the moving measurement object. The first laser light and the second laser light are emitted from different directions toward the measurement object. The first laser light and the second laser light irradiated from the laser light irradiation device are scattered when they hit the moving measurement object, and each scattered light is generated. The light receiving device receives each scattered light generated at that time. Moreover, in the measuring apparatus of patent document 1, the light-receiving device is provided with a condensing lens, and various scattered light is condensed and received by this condensing lens. When the light receiving device receives the scattered light of the first laser light and the second laser light, the processing device calculates the velocity of the measurement object based on the frequency of each scattered light. The processing device calculates the speed of the measurement object by a known calculation method based on a Doppler shift.
　計測対象物の速度を計測する計測装置では、流路を流れる流体中の粒子の速度を計測することがある。つまり、計測対象物が流体中の粒子であることがある。流体中の粒子としては、例えば、血液中の赤血球等が考えられる。計測装置が流路を流れる血液中の赤血球の速度を計測することになる。これによって、血液の流速を知ることができる。 In a measuring device that measures the speed of a measurement object, the speed of particles in a fluid flowing through a flow path may be measured. That is, the measurement object may be particles in the fluid. As the particles in the fluid, for example, red blood cells in blood can be considered. The measuring device measures the velocity of red blood cells in the blood flowing through the flow path. Thereby, the blood flow rate can be known.
　一般的に流路を流れる流体中には無数の粒子が存在している。例えば、血液中には無数の赤血球が存在している。無数の粒子は流体中に拡散して存在している。そのため、無数の粒子の中には、例えば、流路の中心部を通過する粒子もあれば、流路の周縁部を通過する粒子もある。また、流体中の無数の粒子の速度は様々である。速度が速い粒子もあれば、速度が遅い粒子もある。 Generally, countless particles exist in the fluid flowing through the flow path. For example, there are countless red blood cells in the blood. Innumerable particles are diffused in the fluid. Therefore, innumerable particles include, for example, particles that pass through the central portion of the flow channel and particles that pass through the peripheral portion of the flow channel. Also, the speed of countless particles in the fluid varies. Some particles are fast, others are slow.
　特許文献１の計測装置を用いて流路を流れる流体中の粒子の速度を計測する場合は、レーザー光照射装置から流路内の任意の計測点に向かって第１のレーザー光と第２のレーザー光を照射する。第１のレーザー光と第２のレーザー光は、流路内の計測点に向かって互いに異なる方向から照射される。レーザー光照射装置から照射された第１のレーザー光と第２のレーザー光は、計測点を通過する粒子に当たったときに散乱し、それぞれの散乱光が生じる。そのときに生じたそれぞれの散乱光を受光装置が受光する。受光装置は、集光レンズによって様々な散乱光を集光して受光する。そして、受光装置が受光したそれぞれの散乱光の周波数に基づいて、処理装置が計測点を通過する粒子の速度を演算する。 When measuring the velocity of particles in the fluid flowing through the flow path using the measurement device of Patent Document 1, the first laser light and the second laser light are directed from the laser light irradiation device toward an arbitrary measurement point in the flow path. Irradiate with laser light. The first laser beam and the second laser beam are irradiated from different directions toward the measurement point in the flow path. The first laser light and the second laser light irradiated from the laser light irradiation device are scattered when they hit the particles passing through the measurement point, and each scattered light is generated. The light receiving device receives each scattered light generated at that time. The light receiving device condenses and receives various scattered light by a condensing lens. Then, based on the frequency of each scattered light received by the light receiving device, the processing device calculates the velocity of the particles passing through the measurement point.
　計測点を通過する粒子の速度を計測するためには、レーザー光照射装置から計測点に向かって第１のレーザー光と第２のレーザー光を照射する際に、各レーザー光を計測点のみに照射すればよい。そうすれば、計測点を通過する粒子のみに第１のレーザー光と第２のレーザー光が当たり、各レーザー光がその粒子に当たったときに生じる散乱光のみを取り出すことができる。したがって理想的には、第１のレーザー光と第２のレーザー光を照射する際に、第１のレーザー光と第２のレーザー光が計測点のみで重なり合うように照射することが好ましい。しかしながら現実的には、第１のレーザー光と第２のレーザー光を計測点のみに照射することは困難であり、光の拡散等によって計測点の周辺にも第１のレーザー光と第２のレーザー光が照射されてしまう。つまり、第１のレーザー光と第２のレーザー光が、光の拡散等によって計測点及びその周辺で重なり合うように照射されてしまう。そうすると、レーザー光照射装置から照射された第１のレーザー光と第２のレーザー光が粒子に当たって散乱するときに、計測点を通過する粒子に当たって散乱するだけでなく、計測点の周辺を通過する粒子にも第１のレーザー光と第２のレーザー光が当たって散乱してしまう。そのため、計測点を通過する粒子によって生じた散乱光だけでなく、計測点の周辺を通過する粒子によって生じた散乱光も取り出してしまうことになる。そうすると、流体中の無数の粒子の速度が様々であるので、様々な速度の粒子によって生じた様々な散乱光を受光装置が受光することになる。その結果、処理装置が様々な散乱光の周波数に基づいて粒子の速度を演算することになってしまい、流路を流れる流体中の粒子の速度を正確に計測することが困難になる。また、特許文献１の計測装置では、受光装置が集光レンズによって様々な散乱光を集光して受光しているので、処理装置が様々な散乱光の周波数に基づいて粒子の速度を演算することになる。その結果、流路を流れる流体中の粒子の速度を正確に計測することが困難になる。このように、特許文献１の計測装置では、計測点を通過する粒子によって生じた散乱光だけでなく、余分な散乱光も受光してしまうので、粒子の速度を正確に計測することが困難になる。特許文献１の計測装置は、計測対象物の速度が均一である場合は問題無いが、流体中の粒子のように速度が様々である場合は問題が生じてしまう。そこで本明細書は、余分な散乱光を受光することを抑制できる技術を提供する。 In order to measure the velocity of particles passing through the measurement point, each laser beam is applied only to the measurement point when the first laser beam and the second laser beam are irradiated from the laser beam irradiation device toward the measurement point. Irradiation is sufficient. Then, only the scattered light generated when the first laser light and the second laser light hit only the particles passing through the measurement point and each laser light hits the particles can be taken out. Therefore, ideally, when the first laser beam and the second laser beam are irradiated, it is preferable to irradiate the first laser beam and the second laser beam so as to overlap only at the measurement point. However, in reality, it is difficult to irradiate only the measurement point with the first laser beam and the second laser beam, and the first laser beam and the second laser beam are also distributed around the measurement point by light diffusion or the like. Laser light will be irradiated. That is, the first laser beam and the second laser beam are irradiated so as to overlap each other around the measurement point due to light diffusion or the like. Then, when the first laser light and the second laser light irradiated from the laser light irradiation device hit the particles and scatter, the particles pass not only the particles passing through the measurement point but also passing around the measurement point. In addition, the first laser beam and the second laser beam hit and scatter. Therefore, not only scattered light generated by particles passing through the measurement point but also scattered light generated by particles passing around the measurement point are extracted. Then, since the speed of countless particles in the fluid is various, the light receiving device receives various scattered lights generated by the particles having various speeds. As a result, the processing apparatus calculates the velocity of the particles based on various scattered light frequencies, and it becomes difficult to accurately measure the velocity of the particles in the fluid flowing through the flow path. Moreover, in the measuring apparatus of patent document 1, since the light receiving device collects and receives various scattered light by the condensing lens, the processing device calculates the velocity of the particles based on the frequency of the various scattered light. It will be. As a result, it becomes difficult to accurately measure the velocity of the particles in the fluid flowing through the flow path. As described above, in the measuring apparatus of Patent Document 1, not only scattered light generated by particles passing through the measurement point but also excess scattered light is received, making it difficult to accurately measure the velocity of the particles. Become. The measuring device of Patent Document 1 has no problem when the speed of the measurement object is uniform, but causes a problem when the speed is various, such as particles in a fluid. Therefore, the present specification provides a technique capable of suppressing the reception of excess scattered light.
　本明細書に開示する計測装置は、流路を流れる流体中の粒子の速度を計測するための装置である。この計測装置は、レーザー光照射装置と受光装置を備えている。レーザー光照射装置は、流路内の計測点に向かって進行する第１のレーザー光と、第１のレーザー光と異なる方向から流路内の計測点に向かって進行する第２のレーザー光を照射する。受光装置は、レーザー光照射装置から照射された第１のレーザー光と第２のレーザー光が計測点を通過する粒子に当たったときにそれぞれ生じる散乱光を受光する。受光装置は、受光素子と、受光素子と計測点の間に形成されている中空の光通過孔を備えている。光通過孔は、計測点から受光素子に向かう方向に延びており、計測点を通過する粒子によって生じた散乱光が光通過孔を通過して受光素子に入射する。 The measuring device disclosed in this specification is a device for measuring the velocity of particles in a fluid flowing through a flow path. This measuring device includes a laser beam irradiation device and a light receiving device. The laser beam irradiation device includes a first laser beam that travels toward a measurement point in the flow path and a second laser beam that travels toward a measurement point in the flow path from a different direction from the first laser light. Irradiate. The light receiving device receives scattered light respectively generated when the first laser light and the second laser light irradiated from the laser light irradiation device hit the particles passing through the measurement point. The light receiving device includes a light receiving element and a hollow light passage hole formed between the light receiving element and the measurement point. The light passage hole extends in a direction from the measurement point toward the light receiving element, and scattered light generated by particles passing through the measurement point passes through the light passage hole and enters the light receiving element.
　このような構成によれば、計測点を通過する粒子によって生じた散乱光のみが光通過孔を通過して受光素子に入射する。レーザー光照射装置から第１のレーザー光と第２のレーザー光が照射されたときに、計測点だけでなく、計測点の周辺にも第１のレーザー光と第２のレーザー光が照射されてしまうことがある。そうすると、計測点を通過する粒子だけでなく、計測点の周辺を通過する粒子によっても散乱光が生じてしまう。しかしながら、上記の構成によれば、光通過孔を備えているので、計測点の周辺を通過する粒子によって生じた散乱光が受光素子に入射することを抑制できる。すなわち、上記の構成によれば、計測点と受光素子の間で光通過孔が計測点から受光素子に向かう方向に延びているので、計測点を通過する粒子によって生じた散乱光は光通過孔を通過して受光素子に入射するが、計測点の周辺を通過する粒子によって生じた散乱光は、光通過孔の存在によって受光素子に入射しにくくなる。これによって、余分な散乱光を受光することを抑制できる。そのため、流路を流れる流体中の粒子の速度を正確に計測することができる。 According to such a configuration, only scattered light generated by particles passing through the measurement point passes through the light passage hole and enters the light receiving element. When the first laser beam and the second laser beam are irradiated from the laser beam irradiation device, the first laser beam and the second laser beam are irradiated not only at the measurement point but also around the measurement point. May end up. Then, scattered light is generated not only by the particles passing through the measurement point but also by particles passing around the measurement point. However, according to said structure, since the light passage hole is provided, it can suppress that the scattered light produced by the particle | grains which pass the circumference | surroundings of a measurement point injects into a light receiving element. That is, according to the above configuration, since the light passage hole extends in the direction from the measurement point to the light receiving element between the measurement point and the light receiving element, the scattered light generated by the particles passing through the measurement point is reflected in the light passage hole. However, the scattered light generated by the particles passing around the measurement point is less likely to enter the light receiving element due to the presence of the light passage hole. Accordingly, it is possible to suppress receiving excessive scattered light. Therefore, the velocity of particles in the fluid flowing through the flow path can be accurately measured.
実施例に係る計測装置の概略構成を示す図である。It is a figure which shows schematic structure of the measuring device which concerns on an Example. 図１の要部ＩＩの拡大図である。It is an enlarged view of the principal part II of FIG. 実施例に係る受光装置の概略構成を示す図である。It is a figure which shows schematic structure of the light-receiving device based on an Example. 実施例に係る計測装置のブロック図である。It is a block diagram of a measuring device concerning an example. 他の実施例に係る計測装置の概略構成を示す図である。It is a figure which shows schematic structure of the measuring device which concerns on another Example. 光通過孔の一例を示す断面図である。It is sectional drawing which shows an example of a light passage hole. 光通過孔の他の一例を示す断面図である。It is sectional drawing which shows another example of a light passage hole. 光通過孔の更に他の一例を示す断面図である。It is sectional drawing which shows another example of a light passage hole. 他の実施例に係る受光装置の概略構成を示す図である。It is a figure which shows schematic structure of the light-receiving device which concerns on another Example.
　以下に説明する実施例の主要な特徴を列記する。なお、以下に記載する技術要素は、それぞれ独立した技術要素であって、単独であるいは各種の組合せによって技術的有用性を発揮するものである。 The main features of the embodiment described below are listed. Note that the technical elements described below are independent technical elements, and exhibit technical usefulness alone or in various combinations.
　（特徴１）レーザー光照射装置は、レーザー光を発光する発光素子と、発光素子が発光したレーザー光を第１のレーザー光と、第１のレーザー光と異なる方向に進行する第２のレーザー光に分ける回折格子を備えていてもよい。また、レーザー光照射装置は、回折格子によって分けられた第１のレーザー光が入射する第１の透過反射面であって、入射した第１のレーザー光の一部が透過し、他の一部が反射し、反射した第１のレーザー光が計測点に向かって進行する第１の透過反射面を備えていてもよい。また、レーザー光照射装置は、回折格子によって分けられた第２のレーザー光が入射する第２の透過反射面であって、入射した第２のレーザー光の一部を透過し、他の一部を反射し、反射された第２のレーザー光が計測点に向かって進行する第２の透過反射面を備えていてもよい。 (Characteristic 1) A laser beam irradiation apparatus includes a light emitting element that emits laser light, a laser beam emitted from the light emitting element, a first laser beam, and a second laser beam that travels in a direction different from the first laser beam. You may provide the diffraction grating divided into. The laser beam irradiation device is a first transmission / reflection surface on which the first laser beam divided by the diffraction grating is incident, and a part of the incident first laser beam is transmitted and the other part is transmitted. May be provided, and the reflected first laser light may be provided with a first transmission / reflection surface that travels toward the measurement point. The laser beam irradiation device is a second transmitting / reflecting surface on which the second laser beam divided by the diffraction grating is incident, transmits a part of the incident second laser beam, and the other part. The second transmission / reflection surface may be provided in which the reflected second laser light travels toward the measurement point.
　このような構成によれば、第１のレーザー光の一部（第１の透過反射面で透過する成分）を除去することができ、他の一部（第１の透過反射面で反射する成分）のみが計測点に向かって進行するので、計測点に向かって進行する第１のレーザー光の強度の強い光の広がりを絞ることができる。同様に、第２のレーザー光の一部（第２の透過反射面で透過する成分）を除去することができ、他の一部（第２の透過反射面で反射する成分）のみが計測点に向かって進行するので、計測点に向かって進行する第２のレーザー光の強度の強い光の広がりを絞ることができる。強度を弱くすることによって、計測点に向かって第１のレーザー光と第２のレーザー光が照射されたときに、第１のレーザー光と第２のレーザー光が計測点の周辺に広がることを抑制することができる。そのため、計測点の周辺を通過する粒子によって散乱光が生じることを抑制することができる。したがって、余分な散乱光を受光することを抑制できる。 According to such a configuration, a part of the first laser light (component transmitted through the first transmission / reflection surface) can be removed, and the other part (component reflected by the first transmission / reflection surface). ) Only travels toward the measurement point, so that it is possible to narrow the spread of the strong light of the first laser beam traveling toward the measurement point. Similarly, a part of the second laser light (component transmitted by the second transmission / reflection surface) can be removed, and only the other part (component reflected by the second transmission / reflection surface) is measured. Therefore, it is possible to narrow the spread of the strong light of the second laser beam traveling toward the measurement point. By reducing the intensity, the first laser beam and the second laser beam spread around the measurement point when the first laser beam and the second laser beam are irradiated toward the measurement point. Can be suppressed. Therefore, it can suppress that scattered light arises with the particle | grains which pass the circumference | surroundings of a measurement point. Therefore, it is possible to suppress receiving excessive scattered light.
　（特徴２）第１の透過反射面に入射する第１のレーザー光の光軸の入射角が、第１の透過反射面における臨界角より小さくてもよい。第２の透過反射面に入射する第２のレーザー光の光軸の入射角が、第２の透過反射面における臨界角より小さくてもよい。 (Feature 2) The incident angle of the optical axis of the first laser beam incident on the first transmission / reflection surface may be smaller than the critical angle of the first transmission / reflection surface. The incident angle of the optical axis of the second laser light incident on the second transmission / reflection surface may be smaller than the critical angle of the second transmission / reflection surface.
　このような構成によれば、第１の透過反射面に入射する第１のレーザー光のうち、透過する成分を多くすることができる（反射する成分を少なくすることができる）。同様に、第２の透過反射面に入射する第２のレーザー光のうち、透過する成分を多くすることができる（反射する成分を少なくすることができる）。これによって、第１の透過反射面で反射して計測点に向かって進行する第１のレーザー光の強度と、第２の透過反射面で反射して計測点に向かって進行する第２のレーザー光の強度を弱くすることができる。強度を弱くすることによって、計測点に向かって第１のレーザー光と第２のレーザー光が照射されたときに、第１のレーザー光と第２のレーザー光が計測点の周辺に広がることを抑制することができる。 According to such a configuration, it is possible to increase the amount of the transmitted component in the first laser light incident on the first transmission / reflection surface (the number of the reflected component can be decreased). Similarly, in the second laser light incident on the second transmitting / reflecting surface, it is possible to increase the transmitted component (reducing the reflected component). As a result, the intensity of the first laser beam that is reflected by the first transmission / reflection surface and travels toward the measurement point, and the second laser that is reflected by the second transmission / reflection surface and travels toward the measurement point The intensity of light can be reduced. By reducing the intensity, the first laser beam and the second laser beam spread around the measurement point when the first laser beam and the second laser beam are irradiated toward the measurement point. Can be suppressed.
　（特徴３）計測装置は、回折格子と第１の透過反射面及び第２の透過反射面の間の距離を変える移動装置を更に備えていてもよい。 (Feature 3) The measuring device may further include a moving device that changes the distance between the diffraction grating and the first transmission / reflection surface and the second transmission / reflection surface.
　このような構成によれば、回折格子によって分けられた第１のレーザー光と第２のレーザー光が第１の透過反射面と第２の透過反射面に入射する位置を変えることができる。これによって、第１のレーザー光と第２のレーザー光が照射される位置を変えることができ、流路内の計測点の位置を変えることができる。 According to such a configuration, the positions where the first laser light and the second laser light separated by the diffraction grating are incident on the first transmission / reflection surface and the second transmission / reflection surface can be changed. Thereby, the position where the first laser light and the second laser light are irradiated can be changed, and the position of the measurement point in the flow path can be changed.
　（特徴４）回折格子が、反射型の回折格子であってもよい。発光素子が、回折格子と第１の透過反射面と第２の透過反射面の間に配置されていてもよい。発光素子が発光したレーザー光が回折格子で反射することによって第１のレーザー光と第２のレーザー光に分かれる構成であってもよい。 (Feature 4) The diffraction grating may be a reflection type diffraction grating. The light emitting element may be disposed between the diffraction grating, the first transmission / reflection surface, and the second transmission / reflection surface. The laser beam emitted from the light emitting element may be divided into a first laser beam and a second laser beam by reflection by a diffraction grating.
　このような構成によれば、計測装置をコンパクトにすることができる。なお、回折格子が透過型の回折格子であると、発光素子を回折格子に対して第１の透過反射面と第２の透過反射面の反対側に配置しなければならず、計測装置が大型化してしまう。 According to such a configuration, the measuring device can be made compact. If the diffraction grating is a transmission type diffraction grating, the light emitting element must be disposed on the opposite side of the first transmission reflection surface and the second transmission reflection surface with respect to the diffraction grating, and the measuring device is large. It will become.
　以下に実施例について添付図面を参照して説明する。図１に示すように、実施例に係る計測装置１は、固定具６２によって管６１に固定されて使用される。管６１内に流路６０が形成されている。計測装置１は、流路６０を流れる流体Ｆ中の粒子Ｒの速度ｖを計測する装置である。これによって、流体Ｆの流速を知ることができる。 Embodiments will be described below with reference to the accompanying drawings. As shown in FIG. 1, the measuring apparatus 1 according to the embodiment is used by being fixed to a tube 61 by a fixture 62. A flow path 60 is formed in the tube 61. The measuring device 1 is a device that measures the velocity v of the particle R in the fluid F flowing through the flow path 60. Thereby, the flow rate of the fluid F can be known.
　流路６０を流れる流体Ｆ中には無数の粒子Ｒが存在している。無数の粒子Ｒは流体Ｆ中に拡散して存在している。したがって、無数の粒子Ｒの中には、例えば、流路６０の中心部を通過する粒子Ｒもあれば、流路６０の周縁部を通過する粒子Ｒもある。また、無数の粒子Ｒの速度は様々である。速度が速い粒子Ｒもあれば、速度が遅い粒子Ｒもある。流路６０を流れる流体Ｆ中の粒子Ｒの速度ｖを計測する際に、流路６０内の特定の計測点１０に絞って粒子Ｒの速度ｖを計測することがある。流路６０内の計測点１０の位置は特に限定されるものではないが、例えば、流路６０の中心部を計測点１０として、流路６０の中心部を通過する粒子Ｒの速度ｖを計測することができる。一般的に、流路６０の中心部を流れる流体Ｆの流速は、流路６０の全体を流れる流体Ｆの平均流速の２倍に相当することが知られている。 Innumerable particles R exist in the fluid F flowing through the flow path 60. Innumerable particles R are diffused in the fluid F. Therefore, among the countless particles R, for example, there are particles R that pass through the central portion of the flow channel 60 and particles R that pass through the peripheral portion of the flow channel 60. In addition, the speed of the countless particles R varies. Some particles R have a high speed and some particles R have a low speed. When measuring the velocity v of the particle R in the fluid F flowing through the flow channel 60, the velocity v of the particle R may be measured by focusing on a specific measurement point 10 in the flow channel 60. The position of the measurement point 10 in the flow channel 60 is not particularly limited. For example, the velocity v of the particle R passing through the central portion of the flow channel 60 is measured using the central portion of the flow channel 60 as the measurement point 10. can do. In general, it is known that the flow velocity of the fluid F flowing through the central portion of the flow channel 60 corresponds to twice the average flow velocity of the fluid F flowing through the entire flow channel 60.
　流路６０を流れる流体Ｆとしては、例えば血液が挙げられる。流体Ｆ中の粒子Ｒとしては、例えば赤血球が挙げられる。計測装置１によって血液中の赤血球の速度を計測することができる。これによって、血液の流速を知ることができる。医療現場では、患者の体内を流れる血液を体外に送り出し、体外に送り出した血液を再び体内に送り戻す体外循環が行われることがある。この体外循環では、体外循環用の管が患者の血管に接続され、患者の血管を流れる血液が体外循環用の管に流入し、体外循環用の管を流れた血液が再び患者の血管に戻される。図１に示す計測装置１によって体外循環用の管６１を流れる血液（流体Ｆ）中の赤血球（粒子Ｒ）の速度ｖを計測することができる。 Examples of the fluid F flowing through the flow path 60 include blood. Examples of the particles R in the fluid F include red blood cells. The measuring device 1 can measure the velocity of red blood cells in the blood. Thereby, the blood flow rate can be known. In a medical field, extracorporeal circulation may be performed in which blood flowing through a patient's body is sent out of the body and the blood sent out of the body is sent back into the body again. In this extracorporeal circulation, the extracorporeal circulation tube is connected to the patient's blood vessel, the blood flowing through the patient's blood vessel flows into the extracorporeal circulation tube, and the blood flowing through the extracorporeal circulation tube is returned to the patient's blood vessel again. It is. The velocity v of red blood cells (particles R) in blood (fluid F) flowing through the extracorporeal circulation tube 61 can be measured by the measuring device 1 shown in FIG.
　図１に示すように、計測装置１は、レーザー光照射装置２と、受光装置３と、処理装置９を備えている。レーザー光照射装置２は、発光素子２１と、コリメーターレンズ２２と、回折格子２３と、導光体２４を備えている。発光素子２１は、例えばレーザーダイオード（ＬＤ）である。発光素子２１は、コリメーターレンズ２２と対向するように配置されている。発光素子２１は、コリメーターレンズ２２に向けてレーザー光を発光する。発光素子２１が発光したレーザー光がコリメーターレンズ２２に入射する。発光素子２１は、導光体２４とは反対側にレーザー光を発光する。発光素子２１は、回折格子２３と導光体２４の間に配置されている。 As shown in FIG. 1, the measuring device 1 includes a laser light irradiation device 2, a light receiving device 3, and a processing device 9. The laser light irradiation device 2 includes a light emitting element 21, a collimator lens 22, a diffraction grating 23, and a light guide 24. The light emitting element 21 is, for example, a laser diode (LD). The light emitting element 21 is disposed so as to face the collimator lens 22. The light emitting element 21 emits laser light toward the collimator lens 22. Laser light emitted from the light emitting element 21 enters the collimator lens 22. The light emitting element 21 emits laser light on the side opposite to the light guide 24. The light emitting element 21 is disposed between the diffraction grating 23 and the light guide 24.
　コリメーターレンズ２２は、発光素子２１と回折格子２３の間に配置されている。コリメーターレンズ２２は、発光素子２１が発光したレーザー光Ｌを平行光にして出射する。コリメーターレンズ２２から出射したレーザー光Ｌ（平行光）は、回折格子２３に入射する。 The collimator lens 22 is disposed between the light emitting element 21 and the diffraction grating 23. The collimator lens 22 emits the laser light L emitted from the light emitting element 21 as parallel light. Laser light L (parallel light) emitted from the collimator lens 22 enters the diffraction grating 23.
　回折格子２３は、コリメーターレンズ２２と対向するように配置されている。回折格子２３は、可動式になっており、移動装置２５によって回折格子２３を移動させることができる。移動装置２５は、回折格子２３と導光体２４の間の距離を変えることができる。移動装置２５は、例えば機械式の装置であり、ボルトを回すことによって回折格子２３を上下動させることができる。回折格子２３の位置を変えることによって、流路６０内の計測点１０の位置を変えることができる。回折格子２３は、光の回折を利用して回折格子２３に入射したレーザー光Ｌを第１のレーザー光Ｌ１と第２のレーザー光Ｌ２に分ける。回折格子２３は、反射型の回折格子である。回折格子２３に入射したレーザー光Ｌが回折格子２３で反射するときに第１のレーザー光Ｌ１と第２のレーザー光Ｌ２に分かれる。発光素子２１が発光したレーザー光Ｌが回折格子２３で反射することによって第１のレーザー光Ｌ１と第２のレーザー光Ｌ２に分かれる。 The diffraction grating 23 is disposed so as to face the collimator lens 22. The diffraction grating 23 is movable, and the diffraction grating 23 can be moved by the moving device 25. The moving device 25 can change the distance between the diffraction grating 23 and the light guide 24. The moving device 25 is, for example, a mechanical device, and can move the diffraction grating 23 up and down by turning a bolt. By changing the position of the diffraction grating 23, the position of the measurement point 10 in the flow path 60 can be changed. The diffraction grating 23 divides the laser light L incident on the diffraction grating 23 into the first laser light L1 and the second laser light L2 using light diffraction. The diffraction grating 23 is a reflection type diffraction grating. When the laser beam L incident on the diffraction grating 23 is reflected by the diffraction grating 23, it is divided into a first laser beam L1 and a second laser beam L2. The laser beam L emitted from the light emitting element 21 is reflected by the diffraction grating 23 to be divided into a first laser beam L1 and a second laser beam L2.
　回折格子２３によって生じた第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、異なる方向に進行する。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、共に導光体２４に向かって進行するが、発光素子２１とコリメーターレンズ２２を結ぶ線に関して線対称になるように進行する。図１に示す例では、第１のレーザー光Ｌ１が右斜め上方に向かって進行し、第２のレーザー光Ｌ２が左斜め上方に向かって進行する。第１のレーザー光Ｌ１の波長と第２のレーザー光Ｌ２の波長は同じ波長である。また、第１のレーザー光Ｌ１の周波数と第２のレーザー光Ｌ２の周波数は同じ周波数である。 The first laser beam L1 and the second laser beam L2 generated by the diffraction grating 23 travel in different directions. Both the first laser beam L1 and the second laser beam L2 travel toward the light guide 24, but travel so as to be line-symmetric with respect to the line connecting the light emitting element 21 and the collimator lens 22. In the example shown in FIG. 1, the first laser light L1 travels diagonally upward to the right, and the second laser light L2 travels diagonally upward to the left. The wavelength of the first laser light L1 and the wavelength of the second laser light L2 are the same wavelength. Further, the frequency of the first laser light L1 and the frequency of the second laser light L2 are the same frequency.
　導光体２４は、回折格子２３と管６１の間に配置されている。回折格子２３によって生じた第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が導光体２４に入射する。導光体２４は、例えば直方体形状の透明なガラスブロックによって形成されている。導光体２４は、入射面４１、出射面４２、第１の側面４３および第２の側面４４を備えている。入射面４１は、回折格子２３と対向するように配置されている。入射面４１から第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が入射する。入射面４１から入射した第１のレーザー光Ｌ１は、第１の側面４３に向かって進行する。第１の側面４３に第１のレーザー光Ｌ１が入射する。また、入射面４１から入射した第２のレーザー光Ｌ２は、第２の側面４４に向かって進行する。第２の側面４４に第２のレーザー光Ｌ２が入射する。 The light guide 24 is disposed between the diffraction grating 23 and the tube 61. The first laser beam L1 and the second laser beam L2 generated by the diffraction grating 23 enter the light guide 24. The light guide 24 is formed of, for example, a rectangular parallelepiped transparent glass block. The light guide 24 includes an entrance surface 41, an exit surface 42, a first side surface 43, and a second side surface 44. The incident surface 41 is disposed so as to face the diffraction grating 23. The first laser beam L1 and the second laser beam L2 are incident from the incident surface 41. The first laser light L 1 incident from the incident surface 41 travels toward the first side surface 43. The first laser beam L1 is incident on the first side surface 43. In addition, the second laser light L 2 incident from the incident surface 41 travels toward the second side surface 44. The second laser beam L2 is incident on the second side surface 44.
　第１の側面４３と第２の側面４４は、入射面４１と出射面４２の間に配置されている。第１の側面４３では、入射した第１のレーザー光Ｌ１の一部が透過し、他の一部が反射する。すなわち、第１の側面４３は、第１のレーザー光Ｌ１を透過及び反射する透過反射面になっている。以下では、第１の側面を第１の透過反射面と呼ぶ場合がある。あるいは、第１の側面を第１のハーフミラーと呼ぶ場合もある。第１の透過反射面４３（第１の側面４３あるいは第１のハーフミラー４３）で反射した第１のレーザー光Ｌ１は、出射面４２に向かって進行して出射面４２から出射する。同様に、第２の側面４４では、入射した第２のレーザー光Ｌ２の一部が透過し、他の一部が反射する。すなわち、第２の側面４４は、第２のレーザー光Ｌ２を透過及び反射する透過反射面になっている。以下では、第２の側面を第２の透過反射面と呼ぶ場合がある。あるいは、第２の側面を第２のハーフミラーと呼ぶ場合もある。第２の透過反射面４４（第２の側面４４あるいは第２のハーフミラー４４）で反射した第２のレーザー光Ｌ２は、出射面４２に向かって進行して出射面４２から出射する。 The first side surface 43 and the second side surface 44 are disposed between the incident surface 41 and the output surface 42. In the first side face 43, a part of the incident first laser light L1 is transmitted and the other part is reflected. That is, the first side surface 43 is a transmission / reflection surface that transmits and reflects the first laser beam L1. Hereinafter, the first side surface may be referred to as a first transmission / reflection surface. Alternatively, the first side surface may be referred to as a first half mirror. The first laser light L1 reflected by the first transmission / reflection surface 43 (the first side surface 43 or the first half mirror 43) travels toward the emission surface 42 and is emitted from the emission surface 42. Similarly, on the second side surface 44, a part of the incident second laser light L2 is transmitted and the other part is reflected. That is, the second side surface 44 is a transmission reflection surface that transmits and reflects the second laser light L2. Hereinafter, the second side surface may be referred to as a second transmission / reflection surface. Alternatively, the second side surface may be referred to as a second half mirror. The second laser light L2 reflected by the second transmission / reflection surface 44 (the second side surface 44 or the second half mirror 44) travels toward the emission surface 42 and is emitted from the emission surface 42.
　出射面４２は、管６１と対向するように配置されている。出射面４２から第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が出射する。出射面４２から出射した第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、管６１内に入射する。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、流路６０内の計測点１０に向かって進行する。 The emission surface 42 is disposed so as to face the tube 61. The first laser beam L1 and the second laser beam L2 are emitted from the emission surface 42. The first laser light L1 and the second laser light L2 emitted from the emission surface 42 enter the tube 61. The first laser light L1 and the second laser light L2 travel toward the measurement point 10 in the flow path 60.
　第１のレーザー光Ｌ１は、平行光であることが好ましいが、現実的には図２に示すようにある程度の広がりを有している。そのため、第１の透過反射面４３に入射する第１のレーザー光Ｌ１では、α１で示すように第１の透過反射面４３への入射角が大きい成分もあれば、β１で示すように第１の透過反射面４３への入射角が小さい成分もある。第１のレーザー光Ｌ１の光軸Ｘ１は、第１の透過反射面４３に入射角θｉで入射する。第１のレーザー光Ｌ１の光軸Ｘ１の入射角θｉは、第１の透過反射面４３における臨界角θｒより小さい。第１の透過反射面４３に入射する第１のレーザー光Ｌ１のうち、入射角が臨界角θｒより小さい成分が第１の透過反射面４３を透過する。一方、第１の透過反射面４３に入射する第１のレーザー光Ｌ１のうち、入射角が臨界角θｒより大きい成分が第１の透過反射面４３で反射する。第１のレーザー光Ｌ１の光軸Ｘ１の入射角θｉを小さくすると、入射角が臨界角θｒより小さい成分が多くなり、第１の透過反射面４３を透過する成分が多くなる（反射する成分が少なくなる。）。第１のレーザー光Ｌ１の光軸Ｘ１の入射角θｉを大きくすると、入射角が臨界角θｒより大きい成分が多くなり、第１の透過反射面４３で反射する成分が多くなる（透過する成分が少なくなる。）。 The first laser beam L1 is preferably parallel light, but actually has a certain extent as shown in FIG. Therefore, the first laser light L1 incident on the first transmission / reflection surface 43 includes a component having a large incident angle to the first transmission / reflection surface 43 as indicated by α1, and the first laser light L1 as indicated by β1. There is also a component with a small incident angle to the transmission / reflection surface 43. The optical axis X1 of the first laser light L1 is incident on the first transmission / reflection surface 43 at an incident angle θi. The incident angle θi of the optical axis X1 of the first laser beam L1 is smaller than the critical angle θr in the first transmission / reflection surface 43. Of the first laser light L 1 incident on the first transmission / reflection surface 43, a component having an incident angle smaller than the critical angle θr is transmitted through the first transmission / reflection surface 43. On the other hand, of the first laser light L 1 incident on the first transmission / reflection surface 43, a component having an incident angle larger than the critical angle θr is reflected by the first transmission / reflection surface 43. When the incident angle θi of the optical axis X1 of the first laser beam L1 is reduced, the component with the incident angle smaller than the critical angle θr increases, and the component transmitted through the first transmission / reflection surface 43 increases (the component to be reflected is smaller). Less.) When the incident angle θi of the optical axis X1 of the first laser light L1 is increased, the incident angle is larger than the critical angle θr, and the component reflected by the first transmitting / reflecting surface 43 is increased (the transmitted component is smaller). Less.)
　第２のレーザー光Ｌ２についても第１のレーザー光Ｌ１と同様である。第２のレーザー光Ｌ２は、平行光であることが好ましいが、現実的には図２に示すようにある程度の広がりを有している。そのため、第２の透過反射面４４に入射する第２のレーザー光Ｌ２では、α２で示すように第２の透過反射面４４への入射角が大きい成分もあれば、β２で示すように第２の透過反射面４４への入射角が小さい成分もある。第２のレーザー光Ｌ２の光軸Ｘ２は、第２の透過反射面４４に入射角θｉで入射する。第２のレーザー光Ｌ２の光軸Ｘ２の入射角θｉは、第２の透過反射面４４における臨界角θｒより小さい。本実施例では、第２のレーザー光Ｌ２の光軸Ｘ２の入射角θｉは、第１のレーザー光Ｌ１の光軸Ｘ１の入射角θｉと同じ入射角である。また、第２の透過反射面４４における臨界角θｒは、第１の透過反射面４３における臨界角θｒと同じ臨界角である。第２の透過反射面４４に入射する第２のレーザー光Ｌ２のうち、入射角が臨界角θｒより小さい成分が第２の透過反射面４４を透過する。一方、第２の透過反射面４４に入射する第２のレーザー光Ｌ２のうち、入射角が臨界角θｒより大きい成分が第２の透過反射面４４で反射する。第２のレーザー光Ｌ２の光軸Ｘ２の入射角θｉを小さくすると、入射角が臨界角θｒより小さい成分が多くなり、第２の透過反射面４４を透過する成分が多くなる（反射する成分が少なくなる。）。第２のレーザー光Ｌ２の光軸Ｘ２の入射角θｉを大きくすると、入射角が臨界角θｒより大きい成分が多くなり、第２の透過反射面４４で反射する成分が多くなる（透過する成分が少なくなる。）。 The second laser beam L2 is the same as the first laser beam L1. The second laser light L2 is preferably parallel light, but actually has a certain extent as shown in FIG. Therefore, the second laser light L2 incident on the second transmission / reflection surface 44 includes a component having a large incident angle to the second transmission / reflection surface 44 as indicated by α2, and the second laser light L2 as indicated by β2. There is also a component with a small incident angle to the transmission / reflection surface 44. The optical axis X2 of the second laser beam L2 is incident on the second transmission / reflection surface 44 at an incident angle θi. The incident angle θi of the optical axis X2 of the second laser light L2 is smaller than the critical angle θr in the second transmission / reflection surface 44. In the present embodiment, the incident angle θi of the optical axis X2 of the second laser light L2 is the same as the incident angle θi of the optical axis X1 of the first laser light L1. The critical angle θr in the second transmission / reflection surface 44 is the same as the critical angle θr in the first transmission / reflection surface 43. Of the second laser light L 2 incident on the second transmission / reflection surface 44, a component having an incident angle smaller than the critical angle θr transmits through the second transmission / reflection surface 44. On the other hand, of the second laser light L 2 incident on the second transmission / reflection surface 44, a component having an incident angle larger than the critical angle θr is reflected by the second transmission / reflection surface 44. When the incident angle θi of the optical axis X2 of the second laser beam L2 is reduced, the component with the incident angle smaller than the critical angle θr increases, and the component transmitted through the second transmission / reflection surface 44 increases (the component to be reflected is smaller). Less.) When the incident angle θi of the optical axis X2 of the second laser beam L2 is increased, the incident angle is larger than the critical angle θr, and the component reflected by the second transmission / reflection surface 44 is increased (the transmitted component is smaller). Less.)
　図１に示すように、導光体２４の出射面４２から出射した第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、流路６０内の計測点１０に向かって進行する。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、互いに異なる方向から計測点１０に向かって進行する。すなわち、レーザー光照射装置２から流路６０内の計測点１０に向かって第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が互いに異なる方向から照射される。第１のレーザー光Ｌ１は、流路６０の下流側から計測点１０に向かって進行する。第２のレーザー光Ｌ２は、流路６０の上流側から計測点１０に向かって進行する。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、流路６０内の計測点１０で干渉して重なり合う。 As shown in FIG. 1, the first laser light L <b> 1 and the second laser light L <b> 2 emitted from the emission surface 42 of the light guide 24 travel toward the measurement point 10 in the flow path 60. The first laser beam L1 and the second laser beam L2 travel toward the measurement point 10 from different directions. That is, the first laser beam L1 and the second laser beam L2 are irradiated from the laser beam irradiation device 2 toward the measurement point 10 in the channel 60 from different directions. The first laser light L1 travels from the downstream side of the flow path 60 toward the measurement point 10. The second laser light L2 travels from the upstream side of the flow path 60 toward the measurement point 10. The first laser beam L1 and the second laser beam L2 are interfered and overlapped at the measurement point 10 in the flow path 60.
　流路６０には流体Ｆ（例えば血液）が流れており、流体Ｆ中には無数の粒子Ｒ（例えば赤血球）が存在している。無数の粒子Ｒのうち、流路６０内の計測点１０を通過する粒子Ｒが存在する。計測点１０を通過する粒子Ｒに第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が当たると、第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が散乱する。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、異なる方向から粒子Ｒに当たる。第１のレーザー光Ｌ１は、流路６０の下流側から粒子Ｒに当たる。すなわち、第１のレーザー光Ｌ１は、粒子Ｒの進行方向側から粒子Ｒに当たる。一方、第２のレーザー光Ｌ２は、流路６０の上流側から粒子Ｒに当たる。すなわち、第２のレーザー光Ｌ２は、粒子Ｒの進行方向と反対側から粒子Ｒに当たる。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が粒子Ｒに当たって散乱したときに散乱光が生じる。第１のレーザー光Ｌ１が粒子Ｒに当たって散乱することによって第１の散乱光Ｐ１が生じる。また、第２のレーザー光Ｌ２が粒子Ｒに当たって散乱することによって第２の散乱光Ｐ２が生じる。散乱によって生じた第１の散乱光Ｐ１と第２の散乱光Ｐ２は計測点１０の周囲の様々な方向に向かって進行する。そのうち、計測点１０から受光装置３に向かって進行する第１の散乱光Ｐ１と第２の散乱光Ｐ２が存在する。受光装置３が第１の散乱光Ｐ１と第２の散乱光Ｐ２を受光する。 The fluid F (for example, blood) flows through the flow path 60, and innumerable particles R (for example, red blood cells) exist in the fluid F. Among the countless particles R, there are particles R that pass through the measurement point 10 in the flow path 60. When the first laser light L1 and the second laser light L2 strike the particle R passing through the measurement point 10, the first laser light L1 and the second laser light L2 are scattered. The first laser beam L1 and the second laser beam L2 strike the particle R from different directions. The first laser light L1 hits the particle R from the downstream side of the flow path 60. That is, the first laser light L1 strikes the particle R from the traveling direction side of the particle R. On the other hand, the second laser light L2 hits the particle R from the upstream side of the flow path 60. That is, the second laser light L2 strikes the particle R from the side opposite to the traveling direction of the particle R. Scattered light is generated when the first laser light L1 and the second laser light L2 strike the particle R and are scattered. The first scattered light P1 is generated when the first laser light L1 strikes the particle R and is scattered. Further, the second scattered light P2 is generated when the second laser light L2 hits the particle R and is scattered. The first scattered light P <b> 1 and the second scattered light P <b> 2 generated by scattering travel in various directions around the measurement point 10. Among these, there are first scattered light P1 and second scattered light P2 that travel from the measurement point 10 toward the light receiving device 3. The light receiving device 3 receives the first scattered light P1 and the second scattered light P2.
　第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が粒子Ｒに当たって散乱するときにそれぞれの周波数が変化する。ドップラーシフトによって周波数が変化する。第１のレーザー光Ｌ１の散乱によって生じた第１の散乱光Ｐ１の周波数ｆ１は、第１のレーザー光Ｌ１の周波数と異なる周波数である。また、第２のレーザー光Ｌ２の散乱によって生じた第２の散乱光Ｐ２の周波数ｆ２は、第２のレーザー光Ｌ２の周波数と異なる周波数である。また、第１の散乱光Ｐ１の周波数ｆ１と第２の散乱光Ｐ２の周波数ｆ２は、互いに異なる周波数である。 When the first laser beam L1 and the second laser beam L2 strike the particle R and scatter, the respective frequencies change. The frequency changes due to the Doppler shift. The frequency f1 of the first scattered light P1 generated by the scattering of the first laser light L1 is a frequency different from the frequency of the first laser light L1. Further, the frequency f2 of the second scattered light P2 generated by the scattering of the second laser light L2 is a frequency different from the frequency of the second laser light L2. The frequency f1 of the first scattered light P1 and the frequency f2 of the second scattered light P2 are different from each other.
　受光装置３は、管６１とレーザー光照射装置２の間に配置されている。受光装置３は、流路６０と対向するように配置されている。受光装置３は、レーザー光照射装置２の導光体２４に固定されている。受光装置３は、受光素子３１と筒体３２を備えている。 The light receiving device 3 is disposed between the tube 61 and the laser beam irradiation device 2. The light receiving device 3 is disposed so as to face the flow path 60. The light receiving device 3 is fixed to the light guide 24 of the laser light irradiation device 2. The light receiving device 3 includes a light receiving element 31 and a cylindrical body 32.
　筒体３２は、管６１と受光素子３１の間に配置されている。筒体３２は、受光素子３１に固定されている。筒体３２は、円筒状である。図３に示すように、筒体３２内は中空である。筒体３２内には光通過孔３５が形成されている。光通過孔３５は、入射口３６と出射口３７を備えている。光通過孔３５は、計測点１０から受光素子３１に向かう方向に延びている。光通過孔３５は、計測点１０と受光素子３１の間に形成されている。計測点１０を通過する粒子Ｒによって生じた第１の散乱光Ｐ１と第２の散乱光Ｐ２が入射口３６から光通過孔３５に入射する。計測点１０から受光素子３１に向かって進行する第１の散乱光Ｐ１と第２の散乱光Ｐ２が光通過孔３５を通過する。光通過孔３５を通過した第１の散乱光Ｐ１と第２の散乱光Ｐ２が出射口３７から出射して受光素子３１に入射する。筒体３２の外周面は、遮光性のカバー３１２に覆われている。筒体３２の外周面から光通過孔３５には光が入射しない。筒体３２の側方から光通過孔３５の軸方向と交差する方向に進行する光Ｐ３は、カバー３１２によって遮断されて光通過孔３５に入射しない。光通過孔３５の軸方向に進行する散乱光Ｐ１、Ｐ２が光通過孔３５に入射する。光通過孔３５の軸方向の長さは、入射口３６の直径の２倍以上である。 The cylindrical body 32 is disposed between the tube 61 and the light receiving element 31. The cylindrical body 32 is fixed to the light receiving element 31. The cylinder 32 is cylindrical. As shown in FIG. 3, the inside of the cylindrical body 32 is hollow. A light passage hole 35 is formed in the cylindrical body 32. The light passage hole 35 includes an entrance port 36 and an exit port 37. The light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31. The light passage hole 35 is formed between the measurement point 10 and the light receiving element 31. The first scattered light P <b> 1 and the second scattered light P <b> 2 generated by the particles R passing through the measurement point 10 enter the light passage hole 35 from the incident port 36. The first scattered light P1 and the second scattered light P2 traveling from the measurement point 10 toward the light receiving element 31 pass through the light passage hole 35. The first scattered light P <b> 1 and the second scattered light P <b> 2 that have passed through the light passage hole 35 are emitted from the emission port 37 and enter the light receiving element 31. The outer peripheral surface of the cylindrical body 32 is covered with a light-shielding cover 312. Light does not enter the light passage hole 35 from the outer peripheral surface of the cylindrical body 32. Light P3 traveling in the direction intersecting the axial direction of the light passage hole 35 from the side of the cylindrical body 32 is blocked by the cover 312 and does not enter the light passage hole 35. Scattered light P <b> 1 and P <b> 2 traveling in the axial direction of the light passage hole 35 enter the light passage hole 35. The axial length of the light passage hole 35 is at least twice the diameter of the incident port 36.
　受光素子３１は、光通過孔３５を通過した第１の散乱光Ｐ１と第２の散乱光Ｐ２を受光する。受光素子３１は、例えばフォトダイオード（ＰＤ）である。受光素子３１は、光通過孔３５の出射口３７と対向している。それ以外の部分は、カバー３１２に覆われている。出射口３７から出射した散乱光Ｐ１、Ｐ２が受光素子３１に入射する。受光素子３１の側方から受光素子３１に向かって進行する光Ｐ４は、カバー３１２によって遮断されて受光素子３１に入射しない。 The light receiving element 31 receives the first scattered light P1 and the second scattered light P2 that have passed through the light passage hole 35. The light receiving element 31 is, for example, a photodiode (PD). The light receiving element 31 faces the emission port 37 of the light passage hole 35. The other parts are covered with a cover 312. Scattered light P <b> 1 and P <b> 2 emitted from the emission port 37 enter the light receiving element 31. Light P4 traveling from the side of the light receiving element 31 toward the light receiving element 31 is blocked by the cover 312 and does not enter the light receiving element 31.
　図４に示すように、処理装置９は、発光素子２１と受光素子３１に電気的に接続されている。処理装置９は、発光素子２１が発光するレーザー光Ｌと、受光素子３１が受光する第１の散乱光Ｐ１と第２の散乱光Ｐ２に基づいて、計測点１０を通過する粒子Ｒの速度ｖを演算する。処理装置９は、ドップラーシフトに基づく演算方法によって粒子Ｒの速度ｖを演算する。計測点１０を通過する粒子Ｒの速度ｖは、下記の式（１）によって演算することができる。式（１）において、Ｆは、受光装置３が受光する光（第１の散乱光Ｐ１と第２の散乱光Ｐ２が干渉した光）のドップラー周波数である。θは、計測点１０に向かって進行する第１のレーザー光Ｌ１と、計測点１０と受光装置３を結んだ線とのなす角度（あるいは、計測点１０に向かって進行する第２のレーザー光Ｌ２と、計測点１０と受光装置３を結んだ線とのなす角度）である。λは、レーザー光（第１のレーザー光Ｌ１と第２のレーザー光Ｌ２）の波長である。粒子Ｒの速度ｖを演算する方法については公知であるので詳細な説明を省略する。
Figure JPOXMLDOC01-appb-M000001
 As shown in FIG. 4, the processing device 9 is electrically connected to the light emitting element 21 and the light receiving element 31. Based on the laser light L emitted from the light emitting element 21 and the first scattered light P1 and the second scattered light P2 received by the light receiving element 31, the processing device 9 uses the velocity v of the particle R passing through the measurement point 10. Is calculated. The processing device 9 calculates the velocity v of the particle R by a calculation method based on the Doppler shift. The velocity v of the particle R passing through the measurement point 10 can be calculated by the following equation (1). In the formula (1), F is a Doppler frequency of light received by the light receiving device 3 (light in which the first scattered light P1 and the second scattered light P2 interfere). θ is an angle between the first laser beam L1 traveling toward the measurement point 10 and the line connecting the measurement point 10 and the light receiving device 3 (or the second laser beam traveling toward the measurement point 10). L2 and an angle formed by a line connecting measurement point 10 and light receiving device 3). λ is the wavelength of the laser light (first laser light L1 and second laser light L2). Since the method for calculating the velocity v of the particle R is known, a detailed description thereof will be omitted.
Figure JPOXMLDOC01-appb-M000001
　以上の説明から明らかなように、実施例の計測装置１は、流路６０を流れる流体Ｆ中の粒子Ｒの速度ｖを計測する装置であって、第１のレーザー光Ｌ１と第２のレーザー光Ｌ２を照射するレーザー光照射装置２と、第１の散乱光Ｐ１と第２の散乱光Ｐ２を受光する受光装置３を備えている。第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、互いに異なる方向から流路６０内の計測点１０に向かって進行する。第１のレーザー光Ｌ１が計測点１０を通過する粒子Ｒに当たったときに第１の散乱光Ｐ１が生じる。第２のレーザー光Ｌ２が計測点１０を通過する粒子Ｒに当たったときに第２の散乱光Ｐ２が生じる。第１の散乱光Ｐ１と第２の散乱光Ｐ２を受光装置３が受光する。受光装置３は、受光素子３１と、受光素子３１と計測点１０の間に形成されている中空の光通過孔３５を備えている。光通過孔３５は、計測点１０から受光素子３１に向かう方向に延びている。計測点１０を通過する粒子Ｒによって生じた第１の散乱光Ｐ１と第２の散乱光Ｐ２が光通過孔３５を通過して受光素子３１に入射する。 As is clear from the above description, the measuring device 1 of the embodiment is a device that measures the velocity v of the particle R in the fluid F flowing through the flow path 60, and includes the first laser light L1 and the second laser. A laser light irradiation device 2 that irradiates the light L2 and a light receiving device 3 that receives the first scattered light P1 and the second scattered light P2 are provided. The first laser light L1 and the second laser light L2 travel from different directions toward the measurement point 10 in the flow path 60. When the first laser light L1 hits the particle R passing through the measurement point 10, the first scattered light P1 is generated. When the second laser beam L2 hits the particle R passing through the measurement point 10, the second scattered light P2 is generated. The light receiving device 3 receives the first scattered light P1 and the second scattered light P2. The light receiving device 3 includes a light receiving element 31 and a hollow light passage hole 35 formed between the light receiving element 31 and the measurement point 10. The light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31. The first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10 pass through the light passage hole 35 and enter the light receiving element 31.
　上記の構成によれば、計測点１０を通過する粒子Ｒによって生じた第１の散乱光Ｐ１と第２の散乱光Ｐ２を受光装置３が受光する。受光装置３が受光した第１の散乱光Ｐ１の周波数ｆ１と第２の散乱光Ｐ２の周波数ｆ２に基づいて、計測点１０を通過する粒子Ｒの速度ｖを演算することができる。計測点１０を通過する粒子Ｒの速度ｖを計測するためには、レーザー光照射装置２から第１のレーザー光Ｌ１と第２のレーザー光Ｌ２を照射する際に、計測点１０のみに第１のレーザー光Ｌ１と第２のレーザー光Ｌ２を照射することが好ましい。しかしながら現実的には、計測点１０のみに第１のレーザー光Ｌ１と第２のレーザー光Ｌ２を照射することは困難であり、光の拡散等によって、計測点１０の周辺にも第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が照射されてしまう。そうすると、レーザー光照射装置２から照射された第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が流体Ｆ中の粒子Ｒに当たって散乱するときに、計測点１０を通過する粒子Ｒに当たって散乱するだけでなく、計測点１０の周辺を通過する粒子Ｒにも当たって散乱してしまう。その結果、計測点１０を通過する粒子Ｒによって散乱光が生じるだけでなく、計測点１０の周辺を通過する粒子Ｒによっても散乱光が生じてしまう。しかしながら上記の構成では、光通過孔３５を備えているので、計測点１０を通過する粒子Ｒによって生じた散乱光のみを受光することができ、計測点１０の周辺を通過する粒子Ｒによって生じた散乱光を受光することを抑制できる。すなわち、上記の構成によれば、計測点１０と受光素子３１の間で光通過孔３５が計測点１０から受光素子３１に向かう方向に延びているので、計測点１０を通過する粒子Ｒによって生じた散乱光は光通過孔３５を通過して受光素子３１に入射するが、計測点１０の周辺を通過する粒子Ｒによって生じた散乱光は、光通過孔３５の存在によって受光素子３１に入射しにくくなる。これによって、余分な散乱光を受光することを抑制できる。 According to the above configuration, the light receiving device 3 receives the first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10. Based on the frequency f1 of the first scattered light P1 and the frequency f2 of the second scattered light P2 received by the light receiving device 3, the velocity v of the particle R passing through the measurement point 10 can be calculated. In order to measure the velocity v of the particle R passing through the measurement point 10, when the first laser beam L 1 and the second laser beam L 2 are irradiated from the laser beam irradiation device 2, the first measurement point 10 only is measured. It is preferable to irradiate the laser beam L1 and the second laser beam L2. However, in reality, it is difficult to irradiate only the measurement point 10 with the first laser light L1 and the second laser light L2, and the first laser is also applied to the periphery of the measurement point 10 due to light diffusion or the like. The light L1 and the second laser light L2 are irradiated. Then, when the first laser light L1 and the second laser light L2 irradiated from the laser light irradiation device 2 hit the particles R in the fluid F and scatter, they only hit the particles R passing through the measurement point 10 and scatter. In other words, the light hits the particle R passing around the measurement point 10 and is scattered. As a result, not only scattered light is generated by the particles R passing through the measurement point 10 but also scattered light is generated by the particles R passing around the measurement point 10. However, in the above configuration, since the light passing hole 35 is provided, only scattered light generated by the particle R passing through the measurement point 10 can be received and generated by the particle R passing around the measurement point 10. Receiving scattered light can be suppressed. That is, according to the above configuration, the light passing hole 35 extends between the measurement point 10 and the light receiving element 31 in the direction from the measurement point 10 toward the light receiving element 31, and thus is generated by the particles R passing through the measurement point 10. The scattered light passes through the light passage hole 35 and enters the light receiving element 31. However, the scattered light generated by the particles R passing around the measurement point 10 enters the light receiving element 31 due to the presence of the light passage hole 35. It becomes difficult. Accordingly, it is possible to suppress receiving excessive scattered light.
　流路６０を流れる流体Ｆ中には無数の粒子Ｒが存在しており、無数の粒子Ｒの速度は様々である。そのため、様々な速度の粒子Ｒによって生じた散乱光を受光装置３が受光すると、処理装置９が粒子Ｒの速度を正確に演算することができなくなる。しかしながら、上記の構成によれば、余分な散乱光を受光することを抑制できるので、粒子Ｒの速度を正確に演算することができる。 An infinite number of particles R exist in the fluid F flowing through the flow path 60, and the speed of the infinite number of particles R varies. For this reason, when the light receiving device 3 receives scattered light generated by the particles R having various speeds, the processing device 9 cannot accurately calculate the speed of the particles R. However, according to the above configuration, it is possible to suppress the reception of excess scattered light, so that the speed of the particle R can be accurately calculated.
　また、上記の計測装置１では、レーザー光照射装置２が、レーザー光Ｌを発光する発光素子２１と、発光素子２１が発光したレーザー光Ｌを第１のレーザー光Ｌ１と第２のレーザー光Ｌ２に分ける回折格子２３を備えている。回折格子２３によって分けられた第１のレーザー光Ｌ１と第２のレーザー光Ｌ２は、異なる方向に進行する。また、レーザー光照射装置２は、回折格子２３によって分けられた第１のレーザー光Ｌ１が入射する第１の透過反射面４３と、第２のレーザー光Ｌ２が入射する第２の透過反射面４４を備えている。第１の透過反射面４３では、入射した第１のレーザー光Ｌ１の一部が透過し、他の一部が反射し、反射した第１のレーザー光Ｌ１が計測点１０に向かって進行する。第２の透過反射面４４では、入射した第２のレーザー光Ｌ２の一部を透過し、他の一部を反射し、反射された第２のレーザー光Ｌ２が計測点１０に向かって進行する。第１の透過反射面４３は、導光体２４の第１の側面４３によって構成されており、第１のレーザー光Ｌ１を透過および反射する第１のハーフミラー４３と呼ぶ場合もある。また、第２の透過反射面４４は、導光体２４の第２の側面４４によって構成されており、第２のレーザー光Ｌ２を透過および反射する第２のハーフミラー４４と呼ぶ場合もある。 Moreover, in said measuring apparatus 1, the laser beam irradiation apparatus 2 is the light emitting element 21 which light-emits the laser beam L, and the laser beam L which the light emitting element 21 light-emitted is 1st laser beam L1 and 2nd laser beam L2. A diffraction grating 23 is provided. The first laser light L1 and the second laser light L2 separated by the diffraction grating 23 travel in different directions. Further, the laser light irradiation device 2 includes a first transmission / reflection surface 43 on which the first laser light L1 divided by the diffraction grating 23 is incident and a second transmission / reflection surface 44 on which the second laser light L2 is incident. It has. On the first transmission / reflection surface 43, a part of the incident first laser light L1 is transmitted, the other part is reflected, and the reflected first laser light L1 travels toward the measurement point 10. The second transmitting / reflecting surface 44 transmits part of the incident second laser light L2 and reflects the other part, and the reflected second laser light L2 travels toward the measurement point 10. . The first transmission / reflection surface 43 is constituted by the first side surface 43 of the light guide 24 and may be referred to as a first half mirror 43 that transmits and reflects the first laser light L1. Further, the second transmission / reflection surface 44 is constituted by the second side surface 44 of the light guide 24 and may be referred to as a second half mirror 44 that transmits and reflects the second laser light L2.
　このような構成によれば、第１の透過反射面４３に入射する第１のレーザー光Ｌ１のうち、透過する成分を除去することができ、反射する成分のみが計測点１０に向かって進行するので、計測点１０に向かって進行する第１のレーザー光Ｌ１の強度を弱くすることができる。同様に、第２の透過反射面４４に入射する第２のレーザー光Ｌ２のうち、透過する成分を除去することができ、反射する成分のみが計測点１０に向かって進行するので、計測点１０に向かって進行する第２のレーザー光Ｌ２の強度を弱くすることができる。強度を弱くすることによって、計測点１０に向かって第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が照射されたときに、第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が計測点１０の周辺に広がることを抑制することができる。そのため、計測点１０の周辺を通過する粒子によって散乱光が生じることを抑制することができる。したがって、余分な散乱光を受光することを抑制できる。なお、特許文献１に開示されている計測装置では、導光体の側面に入射するレーザー光が全反射するので、透過する成分が存在しない。そのため、レーザー光の強度を弱くすることができない。 According to such a configuration, it is possible to remove the transmitted component of the first laser light L1 incident on the first transmission / reflection surface 43, and only the reflected component travels toward the measurement point 10. Therefore, the intensity of the first laser beam L1 traveling toward the measurement point 10 can be reduced. Similarly, the transmitted component of the second laser light L2 incident on the second transmission / reflection surface 44 can be removed, and only the reflected component travels toward the measurement point 10. The intensity of the second laser light L2 that travels toward can be reduced. By reducing the intensity, when the first laser beam L1 and the second laser beam L2 are irradiated toward the measurement point 10, the first laser beam L1 and the second laser beam L2 are measured at the measurement point 10. It is possible to suppress spreading around the area. Therefore, it is possible to suppress scattered light from being generated by particles passing around the measurement point 10. Therefore, it is possible to suppress receiving excessive scattered light. In the measuring device disclosed in Patent Document 1, since the laser light incident on the side surface of the light guide body is totally reflected, there is no component to be transmitted. For this reason, the intensity of the laser beam cannot be reduced.
　また、上記の計測装置１では、第１の透過反射面４３に入射する第１のレーザー光Ｌ１の光軸Ｘ１の入射角θｉが、第１の透過反射面４３における臨界角θｒより小さい。また、第２の透過反射面４４に入射する第２のレーザー光Ｌ２の光軸Ｘ２の入射角θｉが、第２の透過反射面４４における臨界角θｒより小さい。このような構成によれば、第１の透過反射面４３に入射する第１のレーザー光Ｌ１のうち、透過する成分を多くすることができる（反射する成分を少なくすることができる）。同様に、第２の透過反射面４４に入射する第２のレーザー光Ｌ２のうち、透過する成分を多くすることができる（反射する成分を少なくすることができる）。これによって、計測点１０に向かって進行する第１のレーザー光Ｌ１と第２のレーザー光Ｌ２の強度を弱くすることができる。そのため、計測点１０に向かって第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が照射されたときに、第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が計測点１０の周辺に広がることを抑制することができる。 In the measuring apparatus 1 described above, the incident angle θi of the optical axis X1 of the first laser light L1 incident on the first transmission / reflection surface 43 is smaller than the critical angle θr of the first transmission / reflection surface 43. Further, the incident angle θi of the optical axis X2 of the second laser light L2 incident on the second transmission / reflection surface 44 is smaller than the critical angle θr of the second transmission / reflection surface 44. According to such a configuration, it is possible to increase the transmitted component of the first laser light L1 incident on the first transmitting / reflecting surface 43 (reducing the reflected component). Similarly, in the second laser light L2 incident on the second transmitting / reflecting surface 44, the transmitted component can be increased (the reflected component can be decreased). Thereby, the intensity | strength of the 1st laser beam L1 and the 2nd laser beam L2 which advance toward the measurement point 10 can be made weak. Therefore, when the first laser beam L1 and the second laser beam L2 are irradiated toward the measurement point 10, the first laser beam L1 and the second laser beam L2 spread around the measurement point 10. Can be suppressed.
　また、上記の計測装置１は、回折格子２３と第１の透過反射面４３及び第２の透過反射面４４の間の距離を変える移動装置２５を備えている。このような構成によれば、回折格子２３によって分けられた第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が第１の透過反射面４３と第２の透過反射面４４に入射する位置を変えることができる。これによって、第１のレーザー光Ｌ１と第２のレーザー光Ｌ２が照射される位置を変えることができ、流路６０内の計測点１０の位置を変えることができる。 The measuring device 1 includes a moving device 25 that changes the distance between the diffraction grating 23 and the first transmission / reflection surface 43 and the second transmission / reflection surface 44. According to such a configuration, the positions at which the first laser light L1 and the second laser light L2 separated by the diffraction grating 23 are incident on the first transmission / reflection surface 43 and the second transmission / reflection surface 44 are changed. be able to. Thereby, the position irradiated with the first laser light L1 and the second laser light L2 can be changed, and the position of the measurement point 10 in the flow path 60 can be changed.
　また、上記の計測装置１では、回折格子２３が、反射型の回折格子である。また、発光素子２１が、回折格子２３と第１の透過反射面４３と第２の透過反射面４４の間に配置されており、発光素子２１が発光したレーザー光Ｌが回折格子２３で反射することによって第１のレーザー光Ｌ１と第２のレーザー光Ｌ２に分かれる。このような構成によれば、発光素子２１を回折格子２３と導光体２４の間に収めることができるので、計測装置１をコンパクトにすることができる。 Further, in the measurement apparatus 1 described above, the diffraction grating 23 is a reflective diffraction grating. The light emitting element 21 is disposed between the diffraction grating 23, the first transmission / reflection surface 43, and the second transmission / reflection surface 44, and the laser light L emitted from the light emitting element 21 is reflected by the diffraction grating 23. As a result, the laser beam is divided into a first laser beam L1 and a second laser beam L2. According to such a configuration, since the light emitting element 21 can be accommodated between the diffraction grating 23 and the light guide 24, the measuring device 1 can be made compact.
　以上、一実施例について説明したが、具体的な態様は上記実施例に限定されるものではない。以下の説明において、上述の説明における構成と同様の構成については同一の符号を付して説明を省略する。 As mentioned above, although one Example was described, a specific aspect is not limited to the said Example. In the following description, the same components as those described above are denoted by the same reference numerals, and the description thereof is omitted.
　上記の実施例では、単一の導光体２４に第１の透過反射面４３と第２の透過反射面４４が形成されていたが、この構成に限定されるものでない。他の実施例では、図５に示すように、レーザー光照射装置２が、分離されている第１の導光体２４１と第２の導光体２４２を備えていてもよい。第１の導光体２４１に第１の透過反射面４３が形成されており、第２の導光体２４２に第２の透過反射面４４が形成されている。このような構成でも、第１の透過反射面４３に入射した第１のレーザー光Ｌ１の一部が透過し、他の一部が反射する。また、第２の透過反射面４４に入射した第２のレーザー光Ｌ２の一部が透過し、他の一部が反射する。 In the above embodiment, the first transmission / reflection surface 43 and the second transmission / reflection surface 44 are formed on the single light guide 24, but the present invention is not limited to this configuration. In another embodiment, as shown in FIG. 5, the laser light irradiation device 2 may include a first light guide 241 and a second light guide 242 that are separated. A first transmission / reflection surface 43 is formed on the first light guide 241, and a second transmission / reflection surface 44 is formed on the second light guide 242. Even in such a configuration, a part of the first laser light L1 incident on the first transmitting / reflecting surface 43 is transmitted and the other part is reflected. In addition, a part of the second laser light L2 incident on the second transmitting / reflecting surface 44 is transmitted and the other part is reflected.
　また、光通過孔３５の形状は特に限定されるものではない。例えば、図６に示すように、光通過孔３５の断面形状が円形状であってもよい。または、図７に示すように、光通過孔３５の断面形状が多角形状であってもよい。また、図８に示すように、複数の光通過孔３５がスリット状に形成されていてもよい。 Further, the shape of the light passage hole 35 is not particularly limited. For example, as shown in FIG. 6, the cross-sectional shape of the light passage hole 35 may be circular. Or as shown in FIG. 7, the cross-sectional shape of the light passage hole 35 may be a polygonal shape. Moreover, as shown in FIG. 8, the several light passage hole 35 may be formed in slit shape.
　また、受光装置３の構成は上記の実施例に限定されるものではない。他の実施例では、図９に示すように、受光装置３が、受光素子３１と、遮光性の箱体３８を備えていてもよい。箱体３８内に受光素子３１が配置されている。箱体３８は、前壁３８ａと、後壁３８ｂと、一対の側壁３８ｃ、３８ｃを備えている。前壁３８ａは、管６１と受光素子３１の間に配置されている。後壁３８ｂは、受光素子３１とレーザー光照射装置２の間に配置されている。一対の側壁３８ｃ、３８ｃは、前壁３８ａと後壁３８ｂの間に配置されている。箱体３８の後壁３８ｂに受光素子３１が固定されている。箱体３８の前壁３８ａは受光素子３１から離れた位置に配置されている。前壁３８ａには光通過孔３５が形成されている。光通過孔３５は、入射口３６と出射口３７を備えている。光通過孔３５は、計測点１０から受光素子３１に向かう方向に延びている。計測点１０を通過する粒子Ｒによって生じた第１の散乱光Ｐ１と第２の散乱光Ｐ２が光通過孔３５を通過して受光素子３１に入射する。箱体３８の側方から受光素子３１に向かって進行する光Ｐ４は、箱体３８によって遮断されて受光素子３１に入射しない。また、光通過孔３５に向かって光通過孔３５の軸方向と交差する方向に進行する光Ｐ５は、光通過孔３５を通過して箱体３８内に入射したとしても、箱体３８の側壁３８ｃに向かって進行するので、受光素子３１に入射しにくい。そのため、受光素子３１が余分な光を受光することを抑制できる。 Further, the configuration of the light receiving device 3 is not limited to the above embodiment. In another embodiment, as shown in FIG. 9, the light receiving device 3 may include a light receiving element 31 and a light shielding box 38. The light receiving element 31 is disposed in the box 38. The box 38 includes a front wall 38a, a rear wall 38b, and a pair of side walls 38c and 38c. The front wall 38 a is disposed between the tube 61 and the light receiving element 31. The rear wall 38 b is disposed between the light receiving element 31 and the laser light irradiation device 2. The pair of side walls 38c, 38c are disposed between the front wall 38a and the rear wall 38b. The light receiving element 31 is fixed to the rear wall 38b of the box 38. The front wall 38 a of the box 38 is disposed at a position away from the light receiving element 31. A light passage hole 35 is formed in the front wall 38a. The light passage hole 35 includes an entrance port 36 and an exit port 37. The light passage hole 35 extends in a direction from the measurement point 10 toward the light receiving element 31. The first scattered light P1 and the second scattered light P2 generated by the particles R passing through the measurement point 10 pass through the light passage hole 35 and enter the light receiving element 31. Light P4 traveling from the side of the box 38 toward the light receiving element 31 is blocked by the box 38 and does not enter the light receiving element 31. Even if the light P5 traveling in the direction crossing the axial direction of the light passage hole 35 toward the light passage hole 35 passes through the light passage hole 35 and enters the box body 38, the side wall of the box body 38 Since it advances toward 38c, it is difficult to enter the light receiving element 31. Therefore, the light receiving element 31 can be prevented from receiving excess light.
　以上、本発明の具体例を詳細に説明したが、これらは例示に過ぎず、特許請求の範囲を限定するものではない。特許請求の範囲に記載の技術には、以上に例示した具体例を様々に変形、変更したものが含まれる。本明細書または図面に説明した技術要素は、単独であるいは各種の組合せによって技術的有用性を発揮するものであり、出願時請求項記載の組合せに限定されるものではない。また、本明細書または図面に例示した技術は複数目的を同時に達成し得るものであり、そのうちの一つの目的を達成すること自体で技術的有用性を持つものである。 Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.
１　　　：計測装置
２　　　：レーザー光照射装置
３　　　：受光装置
９　　　：処理装置
１０　　：計測点
２１　　：発光素子
２２　　：コリメーターレンズ
２３　　：回折格子
２４　　：導光体
２５　　：移動装置
３１　　：受光素子
３２　　：筒体
３５　　：光通過孔
３６　　：入射口
３７　　：出射口
３８　　：箱体
４１　　：入射面
４２　　：出射面
４３　　：第１の側面（第１の透過反射面）
４４　　：第２の側面（第２の透過反射面）
６０　　：流路
６１　　：管
６２　　：固定具
２４１　：第１の導光体
２４２　：第２の導光体
３１２　：カバー
Ｆ　　　：流体
Ｌ　　　：レーザー光
Ｌ１　　：第１のレーザー光
Ｌ２　　：第２のレーザー光
Ｐ１　　：第１の散乱光
Ｐ２　　：第２の散乱光
Ｒ　　　：粒子
Ｘ１　　：第１のレーザー光の光軸
Ｘ２　　：第２のレーザー光の光軸 1: Measurement device 2: Laser beam irradiation device 3: Light receiving device 9: Processing device 10: Measurement point 21: Light emitting element 22: Collimator lens 23: Diffraction grating 24: Light guide 25: Moving device 31: Light receiving device 32: Cylindrical body 35: Light passage hole 36: Entrance port 37: Outlet port 38: Box body 41: Entrance surface 42: Exit surface 43: First side surface (first transmission / reflection surface)
44: Second side surface (second transmission / reflection surface)
60: channel 61: tube 62: fixture 241: first light guide 242: second light guide 312: cover F: fluid L: laser light L1: first laser light L2: second laser Light P1: First scattered light P2: Second scattered light R: Particle X1: Optical axis X2 of the first laser light: Optical axis of the second laser light

Claims (5)

  1. 　流路を流れる流体中の粒子の速度を計測するための計測装置であって、
    　前記流路内の計測点に向かって進行する第１のレーザー光と、第１のレーザー光と異なる方向から前記流路内の前記計測点に向かって進行する第２のレーザー光を照射するレーザー光照射装置と、
    　前記レーザー光照射装置から照射された第１のレーザー光と第２のレーザー光が前記計測点を通過する粒子に当たったときにそれぞれ生じる散乱光を受光する受光装置を備えており、
    　前記受光装置が、受光素子と、前記受光素子と前記計測点の間に形成されている中空の光通過孔を備えており、
    　前記光通過孔が、前記計測点から前記受光素子に向かう方向に延びており、前記計測点を通過する粒子によって生じた散乱光が前記光通過孔を通過して前記受光素子に入射する、計測装置。     A measuring device for measuring the velocity of particles in a fluid flowing through a flow path,
    A laser that irradiates a first laser beam traveling toward the measurement point in the flow path and a second laser beam traveling toward the measurement point in the flow path from a direction different from the first laser light. A light irradiation device;
    A light receiving device that receives scattered light generated when the first laser light and the second laser light irradiated from the laser light irradiation device hit the particles passing through the measurement point, respectively;
    The light receiving device includes a light receiving element and a hollow light passage hole formed between the light receiving element and the measurement point;
    The light passage hole extends in a direction from the measurement point toward the light receiving element, and the scattered light generated by particles passing through the measurement point passes through the light passage hole and enters the light receiving element. apparatus.
  2. 　前記レーザー光照射装置は、
    　レーザー光を発光する発光素子と、
    　前記発光素子が発光したレーザー光を第１のレーザー光と、第１のレーザー光と異なる方向に進行する第２のレーザー光に分ける回折格子と、
    　前記回折格子によって分けられた第１のレーザー光が入射する第１の透過反射面であって、入射した第１のレーザー光の一部が透過し、他の一部が反射し、反射した第１のレーザー光が前記計測点に向かって進行する前記第１の透過反射面と、
    　前記回折格子によって分けられた第２のレーザー光が入射する第２の透過反射面であって、入射した第２のレーザー光の一部を透過し、他の一部を反射し、反射された第２のレーザー光が前記計測点に向かって進行する前記第２の透過反射面を備えている、請求項１に記載の計測装置。     The laser beam irradiation device is
    A light emitting element that emits laser light;
    A diffraction grating that divides the laser light emitted from the light emitting element into a first laser light and a second laser light that travels in a different direction from the first laser light;
    A first transmitting / reflecting surface on which the first laser light divided by the diffraction grating is incident, wherein a part of the incident first laser light is transmitted and the other part is reflected and reflected; The first transmission / reflection surface in which one laser beam travels toward the measurement point;
    A second transmitting / reflecting surface on which the second laser light divided by the diffraction grating is incident, which transmits a part of the incident second laser light and reflects and reflects the other part The measurement apparatus according to claim 1, comprising the second transmission / reflection surface in which a second laser beam travels toward the measurement point.
  3. 　前記第１の透過反射面に入射する第１のレーザー光の光軸の入射角が、前記第１の透過反射面における臨界角より小さく、
    　前記第２の透過反射面に入射する第２のレーザー光の光軸の入射角が、前記第２の透過反射面における臨界角より小さい、請求項２に記載の計測装置。     The incident angle of the optical axis of the first laser light incident on the first transmission / reflection surface is smaller than the critical angle of the first transmission / reflection surface;
    The measuring apparatus according to claim 2, wherein an incident angle of an optical axis of the second laser light incident on the second transmission / reflection surface is smaller than a critical angle of the second transmission / reflection surface.
  4. 　前記回折格子と前記第１の透過反射面及び前記第２の透過反射面との間の距離を変える移動装置を更に備えている、請求項２から３のいずれか一項に記載の計測装置。 4. The measuring apparatus according to claim 2, further comprising a moving device that changes a distance between the diffraction grating and the first transmission / reflection surface and the second transmission / reflection surface.
  5. 　前記回折格子が、反射型の回折格子であり、
    　前記発光素子が、前記回折格子と第１の透過反射面及び第２の透過反射面との間に配置されており、前記発光素子が発光したレーザー光が前記回折格子で反射することによって第１のレーザー光と第２のレーザー光に分かれる、請求項２から４のいずれか一項に記載の計測装置。     The diffraction grating is a reflective diffraction grating,
    The light emitting element is disposed between the diffraction grating and the first transmission / reflection surface and the second transmission / reflection surface, and the laser light emitted from the light emitting element is reflected by the diffraction grating to be the first. The measuring device according to claim 2, wherein the measuring device is divided into a laser beam and a second laser beam.
PCT/JP2016/078289 2016-09-26 2016-09-26 Measuring device WO2018055771A1 (en)

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JPH04230886A (en) * 1990-05-21 1992-08-19 Canon Inc Speedometer
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WO2009139029A1 (en) * 2008-05-12 2009-11-19 パイオニア株式会社 Self-luminous sensor device and method for manufacturing the same

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JP2020188916A (en) * 2019-05-21 2020-11-26 愛知時計電機株式会社 Measurement apparatus
JP7244351B2 (en) 2019-05-21 2023-03-22 愛知時計電機株式会社 measuring device

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