WO2018049431A1 - Substrats pour composants électroniques étirables et procédé de fabrication - Google Patents

Substrats pour composants électroniques étirables et procédé de fabrication Download PDF

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Publication number
WO2018049431A1
WO2018049431A1 PCT/US2017/058586 US2017058586W WO2018049431A1 WO 2018049431 A1 WO2018049431 A1 WO 2018049431A1 US 2017058586 W US2017058586 W US 2017058586W WO 2018049431 A1 WO2018049431 A1 WO 2018049431A1
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Prior art keywords
bulk substrate
modulus
bulk
substrate
young
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PCT/US2017/058586
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English (en)
Inventor
Radu REIT
David ARREAGA-SALAS
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Ares Materials Inc.
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Publication of WO2018049431A1 publication Critical patent/WO2018049431A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0277—Bendability or stretchability details
    • H05K1/0283—Stretchable printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0104—Properties and characteristics in general
    • H05K2201/0133—Elastomeric or compliant polymer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0014—Shaping of the substrate, e.g. by moulding

Definitions

  • the present disclosure relates to the use of substrates for stretchable electronics, and, more particularly, to the use of manufactured substrates having a soft-elastic region comprising a strain capacity of greater than 25% and a first Young' s modulus below 10% of a maximum local modulus of the bulk substrate; and a stiff-elastic region comprising a strain capacity of less than 5% and a second Young's modulus greater than 10% of the maximum local modulus of the bulk substrate.
  • Stretchable electronics are a class of electronic materials, components, and devices that allow for the straining of an electronics stack such that the entirety of the device (substrate, backplane, interconnects, etc.) can be stretched without significant degradation of the behavior of electronic components. Typically, this involves the fabrication of electronic components atop an elastomeric substrate.
  • multilayer structures such as metal-insulator-metal (MEVI) capacitors, diodes, transistors and others, currently require a rigid form factor. While geometric solutions can address the flexibility of such structures (e.g., thin-film variations of such structures can accommodate smaller bending radii), the stretchability of such a device is still limited. Current methods address this limitation through the lamination of stiff 'islands' atop the stretchable elastomer base, requiring only interconnects to be strain tolerant. However, this lamination leads to interfacial issues that can manifest at intermediate and high strains of the elastomeric substrate onto which the stiff substrate materials are laminated.
  • MEVI metal-insulator-metal
  • a method for the fabrication of a bulk substrate with soft regions and stiff regions patterned directly into a material.
  • Soft regions and stiff regions patterned directly into the material may reduce the presence of multi -material interfacing (e.g., adhesives, surface lamination, etc.) to achieve a similar multi-modulus substrate that may enable stretchable electronic stack fabrication.
  • the method involves the use of a bulk material that can exhibit multi-modulus behavior that is spatially-controlled either during the synthesis of the bulk material, or as a function of the post-polymerization modification of the bulk material.
  • FIG. 1 is a top-down schematic view of a multi-modulus substrate with regions of variable modulus in accordance with the embodiments disclosed herein;
  • FIG. 2 is a cross-sectional schematic view of the multi-modulus substrate of FIG. 1 with rigid elastic regions aligned through an entire depth of the multi-modulus substrate in accordance with the embodiments disclosed herein;
  • FIG. 3 is a cross-sectional schematic view of the multi-modulus substrate of FIG. 1 with rigid elastic regions inserted in a continuous soft elastic region in accordance with the embodiments disclosed herein;
  • FIG. 4 is a schematic view of a roll-to-roll setup for manufacturing thin film substrates of anisotropically-patterned liquid crystal substrates in accordance with the embodiments disclosed herein;
  • FIG. 5 is a flow-chart of a manufacturing process for thin film substrates of spatially- patterned ion-exchanged ionomers or oxidized thiol-click polymer in accordance with the embodiments disclosed herein.
  • a method for the manufacture of bulk substrates for stretchable electronics is described via the manufacturing of a material without adhered interfaces between soft elastic regions (those exhibiting a strain capacity above 25%) and stiff elastic regions (those exhibiting a strain capacity below 5%).
  • the material without the adhered interfaces between the soft elastic regions and the stiff elastic regions may be defined as a continuous, multiphase material.
  • dissimilar material properties may be used to enable substrates for stretchable electronics via the introduction of local versus global strain.
  • this phenomenon allows a macroscopic device (e.g., a sensor array or a display) to strain above the strain capacity of the most brittle material used in the electronic device stack.
  • a macroscopic device e.g., a sensor array or a display
  • any strain applied to the entire material may be preferentially applied to the soft elastic region at a rate [E st iff/E SO ft] times more than the strain in the rigid elastic region.
  • a material has two dissimilar modulus regions, including a soft elastic region having a Young's modulus of 10 MPa and a stiff elastic region having a Young's modulus of 2 GPa. Given a 90% volume fraction of the soft elastic region and a 10% volume fraction for the stiff elastic region, the overall modulus may be approximated by the following equation:
  • This example may yield a combined modulus of 1 1.1 MPa for the entirety of the material, allowing calculation of total strain via the Hookean formula:
  • the total strain ( ⁇ ) is calculated as 0.45 m/m, or 45% elongation if the stress is applied in tension.
  • the stresses are equally distributed through all layers in a material, as shown in the following equation:
  • the rigid section has a modulus that is more than 2 orders of magnitude greater than the soft section, the majority of the strain is directed through the soft region of the material.
  • this may allow for the microfabrication of components on the stiff region that are typically not strain tolerant or are required to have critically accurate electrical properties (e.g., capacitors, diodes, transistors, bias resistors, etc.).
  • components with form factors that have already been demonstrated to accommodate higher strains e.g. interconnects, etc.
  • components whose variance of properties with strain is accepted e.g., non- critical -valued passives, etc.
  • adhered interfaces are primarily referenced to highlight dissimilar materials (modulus, thermal expansion, etc.) that were joined via lamination (e.g., with or without an adhesive), codeposition (e.g., patterned precipitation of solutes out of solvents), mechanically bonded (e.g. friction welded, melted into each other), or any other mechanism that requires two or more different starting materials (e.g., films, solutions, etc.) to yield the variable stiffness regions described herein.
  • all materials use material processing techniques to introduce regions of variable stiffness in a single material which may otherwise prefer to display isotropic mechanical properties.
  • the prealignment of the directorate via imprinting a pre- patterned command surface may enable liquid-crystalline materials to exhibit variable mechanical properties while loaded along the nematic director versus a load perpendicular to the nematic director.
  • amorphous materials may be spatially patterned post-polymerization of the film via multiple methodologies.
  • the ions that physically crosslink the polymer may be exchanged to form materials that have transition temperatures that are more than 100 °C higher by exchanging the cation.
  • Exchange of the ionomer's physical crosslink may be achieved in wet conditions via an ionic solution or in dry conditions via an ambient ionic environment.
  • Ionic solutions include, but are not limited to, strong acids (e.g., HC1, H2SO4, etc.), strong bases (e.g., NaOH, KOH, etc.), and salt solutions (e.g., NaCl, KC1, etc.).
  • Ionic environments include, but are not limited to, ionic plasmas and sputtering.
  • Another methodology to increase the transition of materials may be seen by varying the valency of sulfur in a thioether linkage from 2 [poly (arylene thioether imide)] to 6 [poly (arylene sulfone imide)] via the post-polymerization oxidation of the thioether linkage.
  • a glass transition (T g ) increase of up to 120° C may be observed, depending on the concentration of sulfur in the polymer backbone. Oxidation of the thioether linkage may be achieved in wet conditions via an oxidant solution or in dry conditions via an ambient oxidizing environment.
  • Oxidizing solutions of aqueous mixtures include, but are not limited to, hydrogen peroxide (H2O2) and other peroxides, nitric acid (HNO3) and nitrate compounds, sulfuric acid (H2SO4), peroxydisulfuric acid (H2S2O8), peroxymonosulfuric acid (H2SO5), hypochlorite and other hypohalite compounds such as household bleach (NaCIO), permanganate compounds such as potassium permanganate ( ⁇ 0 4 ), sodium perborate (NaB0 3 nH 2 0), nitrous oxide (N 2 0), potassium nitrate (KNO3), and combinations thereof.
  • Oxidizing atmospheres include, but are not limited to, oxygen plasmas and ozone plasmas.
  • the disclosed materials may be manufactured by traditional polymer film fabrication techniques, including, but not limited to, slot-die coating, blade coating, spin coating, solvent casting, extrusion, coextrusion, injection molding and reactive injection molding.
  • the liquid crystalline polymers may be deposited through slot-die coating of a liquid crystal monomer solution atop a carrier web that has been pre-patterned to contain the command layer that drives the liquid crystal orientation.
  • this monomer solution may be ejected from the slot-die coater directly atop a carrier web that has been pre-patterned with the command structure for directing anisotropic liquid crystal alignment.
  • the monomer solution may be ejected between two carrier webs, spaced at a fixed distance, which dictates the ultimate thickness of the substrate material.
  • the alignment web may or may not have a pre-patterned command structure.
  • the ionomeric and thiol- click networks may be similarly deposited via the polymer film fabrication techniques described above, without the alignment of the bulk film using a command structure.
  • selective areas atop the material may be modified via the methods described above to increase the transition temperature of the substrate material. This modification may be achieved through multiple spatially-defining techniques including, but not limited to photolithography, shadow masking, nanoimprint lithography, and transfer printing.
  • the bulk material with spatially-defined anisotropic regions is a liquid crystalline elastomer, where spatial anisotropy is introduced via the variable alignment of the directorate within the bulk network.
  • the directorate may be spatially-aligned such that small regions of the bulk material have a directorate orientation perpendicular to the bulk orientation of the film.
  • stress applied in the direction of the bulk material may result in a majority of strain being localized at the spatially-defined anisotropic regions with a directorate alignment 90° to the bulk orientation.
  • the spatially-defined anisotropic regions may behave as soft-elastic regions.
  • the bulk thickness of a bulk material may be spatially-patterned to have a twisted nematic orientation (wherein the directorate orientation can change up to 90° through the thickness within any given voxel of the material), such that a stress applied in any orientation will result in the patterned regions behaving as stiff-elastic regions.
  • the bulk material with spatially-defined anisotropic regions is an ion-exchanged ionomer, where spatial anisotropy is introduced via the selective patterning of the substrate with ionic solutions containing anions or cations.
  • a poly(acrylic acid) ionomer can be spatially-patterned via the introduction of l .OM NaOH atop the masked film, and a mask of the masked film may be a shadowmask, a patterned photoresist mask, or a patterned hardmask.
  • NaOH may be substituted with any strong basic media where the cation of the base is of increasing atomic size (e.g., H ⁇ Li ⁇ Na ⁇ K, etc.) or increasing electronegativity (e.g., Na ⁇ Mg and K ⁇ Ca) to lead to an increased transition.
  • regions exposed to the concentrated alkaline solution will exchange a proton from the acrylic acid groups for the labile sodium in solution, allowing for a local increase in a glass transition temperature (T g ) from 106 °C (poly(acrylic acid)) to a T g of 220 °C (poly(sodium acrylate)). This allows for stresses applied above 106 °C but below 220 °C to preferentially strain the soft-elastic regions of poly(acrylic acid) and minimize strain on the stiff-elastic regions of poly(sodium acrylate).
  • T g glass transition temperature
  • the bulk material with spatially-defined anisotropic regions may be an oxidized thiol-click polymer, where spatial anisotropy is introduced via the selective patterning of the substrate with a strong oxidant.
  • a thiol-ene copolymer is synthesized with an unoxidized T g of 0 °C, and a spatial pattern is introduced atop the material via a shadowmask, a patterned photoresist mask or a patterned hardmask.
  • the thiol-ene copolymer, or another initially synthesized material may begin with properties of a soft-elastic material.
  • the properties of the soft-elastic material may be greater than 25% elastic strain capacity and a modulus of less than 50 MPa.
  • a solution of 30% H2O2 is flowed atop the material and allowed to oxidize the exposed surface of the material for 60 minutes.
  • This patterning step defines anisotropic regions of a higher modulus in the initially synthesized material, but the anisotropic regions of the higher modulus are defined isotropically.
  • the oxidation of the thioether is diffusion-limited, which results in a formation of a hemispherical cross-section, as shown in FIG. 3.
  • the oxidation results in a formation that extends through an entire thickness of the initially synthesized material.
  • the extension of the oxidation through the entire thickness of the initially synthesized material is a result of having minimum feature sizes that are larger than a thickness of the initially synthesize material.
  • the solution of 30% H2O2 may be substituted with other concentrations of hydrogen peroxide, other inorganic peroxides, nitric acid and nitrate compounds, sulfuric acid, peroxydisulfuric acid, peroxymonosulfuric acid, hypochlorite and other hypohalite compounds including household bleach, permanganate compounds such as potassium permanganate, sodium perborate, nitrous oxide, and potassium nitrate, among other compounds.
  • the solution is then flushed with deionized water, the remaining mask is removed, and the bulk material is baked at 85° C for 12 hours.
  • Flushing the solution with deionized water may occur for approximately 10 seconds, and the flushing step may generally influence the formation of the two spatially-defined anisotropic regions described herein. Further, baking the bulk material may also occur in a temperature range from 80 0 C to 150 0 C at baking times between 10 minutes and 12 hours. In an embodiment, multi-stage curing processes may be performed. For example, a first curing step occurs between 80 0 C and 120 0 C and a second curing step occurs between 120 0 C and 150 0 C.
  • regions exposed to the oxidant will increase the oxidization of the thioether linkage of the thiol-ene copolymer to either a sulfoxide or sulfone, increasing the T g to 100 0 C.
  • This allows for stresses applied above 0° C but below 100° C to preferentially strain the soft-elastic regions of unoxidized thiol-ene copolymer and minimize strain on the stiff-elastic regions of oxidized thiol-ene copolymer.
  • a bulk material was used as a substrate material with anisotropic mechanical properties. No adhered interfaces exist between the stiff-elastic and soft-elastic regions, and covalent linkages between such regions exist in all cases.
  • the thiol-click polymer may be prepared by curing a monomer mixture.
  • the monomer mixture may comprise from about 25 wt% to about 65 wt% of one or more multifunctional thiol monomers and from about 25 wt% to about 65 wt% of one or more multifunctional co- monomers.
  • the flexible electronics stack may further comprise an interfacial adhesion layer and a rigid electronic component.
  • the monomer mixture may further comprise from about 0.001 wt% to about 10 wt% of small molecule additive.
  • the small molecule additive may comprise an acetophenone; a benzyl compound; a benzoin compound; a benzophenone; a quinone; a thioxanthone; azobisisobutyronitnle; benzoyl peroxide; hydrogen peroxide; or a combination thereof.
  • the multifunctional thiol monomers may comprise trimethylolpropane tris(3- mercaptopropionate); trimethylolpropane tris(2- mercaptoacetate); pentaerythritol tetrakis(2- mercaptoacetate); pentaerythritol tetrakis(3-mercaptopropionate); 2,2'- (ethylenedioxy)diethanethiol; 1,3-Propanedithiol; 1,2-ethanedithiol; 1,4-butanedithiol; tris[2-(3- mercaptopropionyloxy) ethyl] isocyanurate; 3,4-ethylenedioxythiophene; 1, 10-decanedithiol; tricyclo[5.2.1.02,6]decanedithiol; Benzene-l,2-dithiol; and trithiocyanuric acid; dipentaerythritol hexakis(
  • the multifunctional co-monomers may comprise 1,3,5-triallyl- l,3,5-triazine-2,4,6 (1H,3H,5H)- trione; tricyclo[5.2.1.02,6] decanedimethanol diacrylate; divinyl benzene; diallyl bisphenol A (diacetate ether); diallyl terephthalate; diallyl phthalate; diallyl maleate; trimethylolpropane diallyl ether; ethylene glycol dicyclopentenyl ether acrylate; diallyl carbonate; diallyl urea; 1,6- hexanediol diacrylate; cinnamyl cinnamate; vinyl cinnamate; allyl cinnamate; allyl acrylate; crotyl acrylate; cinnamyl methacrylate; trivinylcyclohexane; 1,4-cyclohexanedimethanol divinyl ether; poly(ethylene
  • FIG. 1 demonstrates a top-down schematic view of a substrate 100 for stretchable electronics with a soft-elastic region 110 exhibiting soft-elastic properties and stiff-elastic regions 120 exhibiting stiff-elastic properties.
  • electronic stacks which favor minimal strain for continued function (e.g., thin-film transistors) may be selectively fabricated atop the stiff-elastic regions 120.
  • interconnects between each of these structures may be selected from a group of stretchable conductors that are capable of accommodating the strain observed by any material deposited along the soft-elastic region 110.
  • the substrate 100 encompasses a continuous material (e.g., no laminated or adhered interfaces) with the soft-elastic region 110, which includes an elastic strain capacity greater than 25%, and the stiff-elastic regions 120, which include an elastic strain capacity less than 5%.
  • the elastic strain capacity of the soft-elastic regions 110 may be in the range of 10% to 100%
  • the elastic strain capacity of the hard-elastic regions 120 may be in the range of 0.1%> to 25%).
  • a modulus of the hard-elastic regions 120 may generally be less than 0.1 times a modulus of the soft-elastic regions 110.
  • FIG. 2 is a cross-sectional schematic of a substrate 200 with the architecture provided in FIG. 1.
  • a soft-elastic region 210 is segregated through the bulk of the substrate 200 from the stiff-elastic regions 220.
  • the method of preparing spatially- anisotropic properties was performed in such a fashion as to enable the stiff-elastic regions 220 to extend throughout the thickness of the substrate 200.
  • the deformation of the substrate 200 along the major axes i.e., length and width
  • FIG. 3 is a cross-sectional schematic view of a substrate 300 of an additional embodiment of the architecture provided in FIG. 1.
  • a soft-elastic region 310 is patterned such that the anisotropic properties of stiff-elastic regions 320 diffuse spherically within the soft-elastic regions 310.
  • the stiff-elastic regions 320 do not extend through the thickness of the soft-elastic region 310.
  • the deformation of the substrate material along the major axes (length and width) would result in anisotropic stress on the interface between the soft-elastic region 310 and stiff-elastic regions 320 with stresses greatest at the surface of the stiff- elastic regions 320.
  • devices built on materials with a cross-sectional morphology similar to FIG. 3 may have more strain capacity than devices built on materials with a cross-sectional morphology similar to FIG. 2.
  • the morphology of FIG. 3 may generally be the only morphology available for some industrial processes that may allow for an isotropic material to be transformed into a mechanically-anisotropic material, as shown in FIG. 3. That is, some processes may be depth limited in nature, and those devices may never reach a full depth of a substrate film. This may hold especially true in an embodiment involving a relatively thick substrate.
  • FIG. 4 is a schematic view of a roll-to-roll setup 400 for manufacturing thin film substrates of anisotropically-patterned liquid crystal substrates.
  • Two rolling assemblies 410 with pre- patterned command surfaces 420 are offset by a distance that enable a coating mechanism (e.g., slot-die, blade, etc.) 430 to dispense a liquid crystal monomer solution film 440 onto a first command surface 420.
  • This solution then enters the second command surface at the second rolling assembly 410, where it can be cured via the introduction of thermal or electromagnetic energy 450.
  • a coating mechanism e.g., slot-die, blade, etc.
  • FIG. 5 is a flow-chart of a manufacturing process 500 for thin film substrates of spatially- patterned ion-exchanged ionomers or oxidized thiol -click polymer.
  • the monomer solution is mixed, and, at block 502, the monomer solution is cast as a thin-film, then further cured onto a carrier substrate.
  • spatially-discrete regions atop the substrate are photolithograpically-defined as sites for mechanical property modification.
  • the substrate and carrier are submerged within an oxidizing/ionic solution or environment, after which, at block 505, the photomask is removed from substrate.
  • device processing may begin atop the substrate, focusing the fabrication of strain-intolerant materials on oxidized/ion exchanged regions and strain-tolerant materials on the native substrate.
  • the manufacturing process 500 is described above with a polymer beginning as a soft substrate, and unmasked portions of the polymer are exposed to the oxidizing/ionic solution or environment to transform the unmasked portions of the polymer to a stiff substrate.
  • the polymer may begin as a stiff substrate, and unmasked portions of the polymer are exposed to an environment that transforms the unmasked portions of the polymer to a soft substrate. In such an embodiment, only the hard elastic regions 120 are masked during the manufacturing process 500.
  • the method to generate through-thickness stiff regions is dependent on the duration of the exposure to the oxidizing/ionic solution or environment described at block 504.
  • a sufficiently-long exposure that accounts for both the diffusion constant of the oxidizing/ionic solution or gas, as well as the thickness of the polymer film, a morphology similar to FIG. 2 may be present through the thickness of the film.
  • the depth that the stiff elastic region penetrates into the sample can be reduced (e.g., as shown in FIG. 3) as a function of the fraction of exposure time compared to the total time used to reach the morphology in FIG. 2.
  • EXAMPLE 1 To a fluid reservoir was added the difunctional acrylate-terminated nematic liquid crystal RM 82 (Synthon) and an almost stoichiometric ratio of «-butylamine. To this solution, 1.5 wt% of the initiator 2,2-Dimethoxy-2-phenylacetophenone was added and the container was sealed, placed into the rotary mixer and mixed at 2350 rpm for 5 minutes. The monomer solution mixture was mounted to a slot-die coating tool and processed into a thin-film atop a carrier substrate with a prepatterned photoaligned dye layer via the slot-die coating technique.
  • a secondary prepatterened photoaligned dye layer was used to cover the deposited material and allow directorate orientation across the thickness of the material. After 120 minutes, the secondary layer was removed and the material atop the carrier substrate was introduced to an ultraviolet (UV) curing oven and exposed to 10mJ/cm A 2 of 365nm light to initiate the polymerization, giving the final polymer film. No further spatial patterning is required for the bulk polymer film to introduce spatial anisotropy of mechanical properties.
  • the polymer network is now a spatially-anisotropic substrate for flexible electronics fabrication, wherein electronic elements that cannot accommodate significant strains can be processed directly atop the regions with a directorate orientation parallel (0°) to the expected direction of stretching and stretchable interconnects can be utilized to connect such elements.
  • the container was again sealed, placed into the rotary mixer and mixed at 2350 rpm for an additional 5 minutes. Finally, the container was again removed from the mixer, opened, and the organic solvent tetrahydrofuran was added until the final solution was a 92.5% (v/v) solid- fraction monomer solution.
  • the monomer solution mixture was mounted to a slot-die coating tool and processed into a thin-film atop a carrier substrate via the slot-die coating technique.
  • the cast monomer solution was introduced to a curing oven at 65 °C to initiate the polymerization, as well as evaporate the excess tetrahydrofuran, and baked for at least 1 hour, giving the final polymer film.
  • the polymer film (either on the carrier substrate or separated therefrom) was spatially-patterned using standard semiconductor lithographic processing. Atop the patterned film, an excess of 30% H2O2 was added and allowed to soak for 60 minutes at 80 °C. The solution is then flushed with deionized water, the remaining mask is removed and the bulk substrate is baked at 85° C for 12 hours.
  • the polymer network is now a spatially-anisotropic substrate for flexible electronics fabrication, wherein electronic elements that cannot accommodate significant strains can be processed directly atop the oxidized regions and stretchable interconnects can be utilized to connect such elements.
  • a stock solution of poly(ethylene-co-acrylic acid) in xylene (5 v/v%) was mounted to a slot-die coating tool and processed into a thin-film atop a carrier substrate via the slot-die coating technique. Samples were the baked at 80° C in an oven with dry nitrogen flow for 12 hours. The final film was spatially-patterned using standard semiconductor lithographic processing. Atop the patterned film, an excess of a 1.0 M NaOH solution was introduced and soaked for 60 minutes at room temperature. The solution is then flushed with deionized water and the remaining mask is removed. The polymer network is now a spatially-anisotropic substrate for flexible electronics fabrication, wherein electronic elements that cannot accommodate significant strains can be processed directly atop the sodium-salt regions and stretchable interconnects can be utilized to connect such elements.
  • a polymer network may include either a covalently or physically linked material consisting of small organic molecules (i.e., monomers) that are connected to all other organic molecules (i.e., monomers) in the material via a multitude of pathways.
  • covalently linked networks the individual monomers are covalently linked to form linear polymers (i.e., a macromolecule), which are additionally covalently linked to other linear polymers in the material.
  • physically linked networks the individual monomers may still be covalently linked to form linear polymers (i.e., a macromolecule), however chains are only physically linked through processes such as, but not limited to, interpenetration, crystal formation, and secondary interactions (e.g., hydrogen bonding, Pi-Pi stacking).

Abstract

L'invention concerne un substrat en vrac pour composants électroniques étirables. Le substrat en vrac est fabriqué avec un procédé qui forme une région souple-élastique du substrat en vrac. La région élastique souple comprend une capacité de déformation supérieure ou égale à 25 % et un premier module de Young inférieur à 10 % d'un module local maximum du substrat en vrac. Le procédé forme également une région rigide-élastique du substrat en vrac. La région rigide-élastique comprend une capacité de déformation inférieure ou égale à 5 % et un second module de Young supérieur à 10 % du module local maximum du substrat en vrac.
PCT/US2017/058586 2016-09-07 2017-10-26 Substrats pour composants électroniques étirables et procédé de fabrication WO2018049431A1 (fr)

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Citations (6)

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US5618898A (en) * 1992-02-10 1997-04-08 Toagosei Chemical Industry Co., Ltd. Weather-resistant solvent-based coating obtained by polymerization with thioether bond converted to sulfone bond
US5718947A (en) * 1995-03-14 1998-02-17 The Dow Chemicalcompany Processes for forming thin, durable coatings of cation-containing polymers on selected substrates
US20110049768A1 (en) * 2008-01-21 2011-03-03 Jinlian Hu Liquid crystal elastomers with two-way shape ;memory effect
US20110183027A1 (en) * 2010-01-26 2011-07-28 Molecular Imprints, Inc. Micro-Conformal Templates for Nanoimprint Lithography
US20140240932A1 (en) * 2012-06-11 2014-08-28 Mc10, Inc. Strain isolation structures for stretchable electronics
US20140323647A1 (en) * 2013-04-24 2014-10-30 The Board Of Regents Of The University Of Texas System Softening materials based on thiol-ene copolymers

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5618898A (en) * 1992-02-10 1997-04-08 Toagosei Chemical Industry Co., Ltd. Weather-resistant solvent-based coating obtained by polymerization with thioether bond converted to sulfone bond
US5718947A (en) * 1995-03-14 1998-02-17 The Dow Chemicalcompany Processes for forming thin, durable coatings of cation-containing polymers on selected substrates
US20110049768A1 (en) * 2008-01-21 2011-03-03 Jinlian Hu Liquid crystal elastomers with two-way shape ;memory effect
US20110183027A1 (en) * 2010-01-26 2011-07-28 Molecular Imprints, Inc. Micro-Conformal Templates for Nanoimprint Lithography
US20140240932A1 (en) * 2012-06-11 2014-08-28 Mc10, Inc. Strain isolation structures for stretchable electronics
US20140323647A1 (en) * 2013-04-24 2014-10-30 The Board Of Regents Of The University Of Texas System Softening materials based on thiol-ene copolymers

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