WO2018024543A1 - Interféromètre et mode de fonctionnement - Google Patents

Interféromètre et mode de fonctionnement Download PDF

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Publication number
WO2018024543A1
WO2018024543A1 PCT/EP2017/068769 EP2017068769W WO2018024543A1 WO 2018024543 A1 WO2018024543 A1 WO 2018024543A1 EP 2017068769 W EP2017068769 W EP 2017068769W WO 2018024543 A1 WO2018024543 A1 WO 2018024543A1
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WO
WIPO (PCT)
Prior art keywords
interferometer
mirror element
mirror
gap
spring
Prior art date
Application number
PCT/EP2017/068769
Other languages
German (de)
English (en)
Inventor
Andreas Merz
Martin HUSNIK
Marc Schmid
Benedikt Stein
Christoph Schelling
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to EP17745315.6A priority Critical patent/EP3494432A1/fr
Priority to CN201780049013.XA priority patent/CN109564344A/zh
Publication of WO2018024543A1 publication Critical patent/WO2018024543A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Definitions

  • the invention is based on a device or a method according to the preamble of the independent claims.
  • the subject of the present invention is also a computer program.
  • Microelectromechanical drives have a small adjustment range.
  • the adjustment range may be smaller than a desired adjustment range of a resonator gap of an interferometer.
  • US2013279005A1 an FPI spectrometer is described in which two electrostatic independently controllable
  • Actuating mechanisms act in the same direction and on the same spring, d. h., the tunable area remains limited because of the snap-in risk.
  • a large adjustment range can be achieved by a combined use of at least two drives.
  • a gap height is adjusted by an addition of adjustment paths of at least two drives. As a result, the gap height can be adjusted over a wide range with high accuracy.
  • the interferometer comprising the following features: a first drive means, which is adapted to set a gap height of the resonator gap, wherein the first drive means has a first adjustment range; and a second drive device is configured to set the gap height, wherein the second drive device has a second adjustment range that supplements and / or widens the first adjustment range.
  • An interferometer may be understood to mean a Fabry-Perot interferometer which is designed to filter out and pass a wavelength range of electromagnetic waves, which is dependent on a gap height of the gap, in a gap formed as a resonator between two opposing mirror elements. In this case, subsequent to the interferometer, a radiation intensity of the
  • Wavelength range are detected. By changing the gap height different wavelength ranges can be filtered and so the
  • Wavelength spectrum can be recorded by a plurality of detected radiation intensities. Under the gap height, a distance of the two mirror elements from each other can be understood.
  • a drive device may be designed to move at least one of the mirror elements in response to an electrical actuating signal and / or to hold it in a position predetermined by the actuating signal.
  • the first adjustment range can have at least one discrete end position. A discrete end position can be determined for example by a rest position of at least one of the mirror elements. In the rest position, the
  • the rest position can be defined by at least one spring system.
  • the end position can be determined by a stop device.
  • Stop means may be coupled to the first drive means.
  • the stop device may, for example, comprise columns and / or walls, which are aligned substantially transversely to a main extension plane of a mirror element.
  • a first spring device can be arranged between the stop device and a substrate of the interferometer.
  • a spring device may be referred to as a spring system.
  • Stop device are deflected by the drive device against a restoring force until the stopper strikes. If the
  • a second spring device can be arranged between the stop device and the first mirror element.
  • the mirror element can be deflected against a restoring force from the end position of the stop means and moved to the deflection by the restoring force back into the end position.
  • the first drive device may be coupled to the first mirror element.
  • the first mirror element can be coupled to a substrate of the interferometer via a first spring device.
  • the mirror element can be connected directly to the substrate via the spring device.
  • Drive means can drive the first mirror element.
  • the second drive device may be coupled to the second mirror element.
  • the second drive device can drive the second mirror element.
  • the second mirror element may also be coupled to the substrate via a spring device.
  • the second drive device can furthermore be coupled to the first mirror element.
  • the second drive device can act on both mirror elements and move them toward or away from each other.
  • a method for operating an interferometer wherein in a step of adjusting a gap width of a resonator gap of the interferometer between a first mirror element of the interferometer and a second mirror element of the interferometer using a first drive means and / or a second drive means is set.
  • a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • FIG. 1 is a representation of a control scheme for an interferometer according to an embodiment
  • Fig. 2 is a block diagram of an interferometer according to a
  • 3 is a schematic representation of an interferometer according to an embodiment
  • 4 shows a schematic representation of an interferometer according to an exemplary embodiment
  • FIG. 5 is a schematic representation of an interferometer according to an embodiment
  • FIG. 6 is a schematic representation of an interferometer according to an embodiment
  • Fig. 7 is a schematic representation of drive means according to a
  • FIG. 8 shows a schematic representation of an interferometer according to an embodiment
  • FIG. 9 shows a schematic representation of an interferometer according to an embodiment
  • FIG. 10 is a schematic representation of an interferometer according to an embodiment.
  • 11 is a flowchart of a method for operating a
  • the control scheme can be used for an interferometer with two independently controllable drive devices 100, 102 for setting a gap height 104 of a resonator gap.
  • the first drive device 100 used to switch between a first gap height area 106 and a second gap height area 108.
  • the second drive device 102 is used to adjust the gap height 104 within the gap height regions 106, 108.
  • the gap height regions 106, 108 overlap in an overlap region 110.
  • gap heights 104 within the overlap region 110 can be set from both gap height regions 106, 108.
  • the first drive device 100 here has two defined end positions and changes the gap height 104 without intermediate positions between the end positions.
  • the second drive device 102 is designed here continuously and changes the gap height 104 in proportion to a control signal 112.
  • FIG. 1 an overlap 110 of the measuring regions 106, 108 is shown.
  • the roughing takes place to two rest positions 106, 108 to this
  • Fig. 2 shows a block diagram of an interferometer 200 according to a
  • the interferometer 200 has a first mirror element 202, through an adjustable resonator gap 204 of the first
  • the interferometer 200 may be implemented using the one shown in FIG.
  • Control schemes are controlled.
  • the first mirror element 202 is here driven by two drive devices 100, 102, wherein the drive devices 100, 102 are connected in series.
  • the second mirror element 206 is fixed here.
  • Drive means 100 is adapted to a gap height 104 of the
  • the first drive device 100 has a first adjustment region 208.
  • the second drive device 102 is likewise designed to set the gap height 104.
  • the second Drive device 102 has a second adjustment region 210 that supplements first adjustment region 208.
  • a Fabry-Perot Interferometer (FPI) 200 device with multi-stage actuation is presented. It is shown a schematic representation of the drive assembly. In the sketch, the positions 106 and 108 are two positions of the first mirror element 202 which can be taken by a digital switching of the coarse control 100. However, coarse actuation 100 and / or fine-tuning 102 could just as well be applied to the second
  • Mirror element 206 act.
  • the mirror elements 200, 206 can be actuated in the same direction or in opposite directions.
  • the actuation can be unilateral or bilateral.
  • FPI micromechanical Fabry-Perot interferometer
  • the approach presented here creates a micromechanical Fabry-Perot interferometer 200 with an extended, non-pull-in limited spectral measurement range 104 and a fine resolution even at shorter wavelengths.
  • the maximum transmission resonant condition is satisfied at a gap spacing 104 equal to an integer multiple of half the wavelength.
  • the gap distance 104 should also behave as linearly as possible over the measuring range. In particular, it would be desirable for optimal spectral scanning because of the lower half-width of the resonances at shorter ones Wavelengths, ie small gap distances, the voltage increments lead to smaller gap spacing changes than at larger gap distances.
  • a simple capacitive control in which the mirror elements 202, 206 are moved towards one another, runs counter to this. The smaller the gap 104, the greater the increase in force and thus the gap change in the same Steuernapssinkrement. If a force threshold is exceeded, it can come to a snap and the electrodes touch each other.
  • mirrors of the Fabry-Perot interferometer 200 should be as plane-parallel as possible to each other for maximum resolution over the entire tuning range, and this should also remain at the time of actuation.
  • mirror layers 202, 206 may already have a mechanical tensile stress, for example, even in the zero position.
  • An advantageous driving method is a coarse control of the first actuation mechanism 100 by means of which one or both mirror elements 202, 206 is brought into one of at least two or more defined positions 106, 108 or measuring positions.
  • Coarse positions 106, 108 can either be defined via mechanical stops or be realized via discrete control signals whose height can be selected depending on the measurement task. Via the continuous or quasi-continuous fine control of a second actuation mechanism 102, the size of the optical gap 104 is then tuned.
  • the coarse-control stop positions can be selected such that the measurement ranges resulting from the fine-control overlap, so that a continuous spectrum can be composed.
  • FIG. 3 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • the interferometer 200 essentially corresponds to the interferometer in FIG. 2.
  • the first drive device 100 here acts on the first mirror element 202, while the second
  • Drive device 102 acts on the second mirror element 206.
  • both mirror elements 202, 206 are driven and movable here.
  • the interferometer 200 is designed as a layered structure on a substrate 300.
  • the two mirror elements 202, 206 are subregions of mirror layers 302 arranged parallel to the substrate 300
  • Mirror elements 202, 206 are arranged above a cavity 304 of the substrate 300. Laterally of the mirror elements 202, 206, the mirror layers 302 are perforated by spring perforations 306 to spring systems 308, 310th
  • the spring systems 308, 310 allow the mobility of the mirror elements 202, 206 for adjusting the gap height 104 of the
  • Resonatorspalts 204 Outside the mirror elements 202, 206 and
  • Spring systems 308, 310 are the mirror layers 302 by spacer layers 312 of the substrate 300 and spaced from each other.
  • the first drive device 100 is arranged in the region of the first spring system 308.
  • the first drive device 100 is designed as a capacitive actuator 100.
  • First electrodes of the capacitive actuator 100 are arranged on the substrate 300, while second electrodes of the capacitive actuator 100 are arranged on spring elements of the first spring system 308. When an electric voltage is applied to the electrodes, a result
  • first mirror element 202 Force of attraction between the electrodes and the first mirror element 202 is pulled by the spring elements of the first spring system 308 from a rest position in the direction of the substrate 300. In this case, the first mirror element 202 is moved until stop elements 314 of the first mirror element 202 strike against the substrate 300 and define a deflected position of the first mirror element 202. In other words, the first mirror element 202 is reciprocated by the first drive device 100 between the rest position and the deflected position to the gap height 104 between the first
  • the second drive device 102 is arranged in the region of the second spring system 310.
  • the second drive device 102 is designed as a piezoelectric actuator 102.
  • At least one piezoelectric layer of the piezoelectric actuator 102 is arranged on spring elements of the second spring system 310.
  • a length of the layer changes.
  • the spring elements are bent and the second mirror element 206 is moved depending on a voltage value and a voltage direction by the spring elements from a rest position. In the direction of the first mirror element 202, the second mirror element 206 can in this case be moved until anti-adhesive knobs 316 or anti-friction bumps 316 touch the first mirror element 202.
  • Anti-adhesive knobs 316 prevent adhesion of the smooth reflecting surfaces of the mirror elements 202, 206.
  • the second drive device 102 is designed to steplessly move the second mirror element 206 within the second gap height range.
  • the micromechanical interferometer component 200 presented here consists of at least one substrate 300, at least two mirror elements 202, 206, flexible hangers 308, 310 spaced apart from each other by a gap 204, via which at least one of the
  • Mirror elements 202, 206 is suspended on the substrate 300, at least two independently controllable actuation mechanisms 100, 102 for tuning the gap size 104, wherein for each actuation mechanism 100, 102, an independently controllable spring system 308, 310 in one of the mirror elements 202, 206 exists.
  • the spring systems 308, 310 can be embodied either as membranes, annular membranes or as discretely structured spring elements.
  • Actuating mechanisms 100, 102 may either all be based on one of
  • the actuation mechanisms 100, 102 may move either one or more mirror elements 202, 206 relative to the substrate 300, or relative to one another. At least one of the
  • Mirror elements 202, 206 and / or the substrate 300 has stops 314 in FIG Direction of one of the other mirror elements 202, 206 and / or the substrate 300, wherein the stops 314 may be formed as one-dimensional columns or as two-dimensional walls.
  • the actuation mechanisms 100, 102 may be embodied capacitively or electrostatically and / or piezoelectrically and / or thermally.
  • the approach presented here requires smaller electrical voltages for tuning than for a fully analog tunable Fabry-Perot interferometer. This results in a more linear control. Furthermore, lower mechanical layer stresses in the mirror layers 302 result when tuning.
  • the interferometer 200 presented here has two defined optical resonance lengths, which can optionally be used to calibrate the Fabry-Perot interferometer 200, since the distance is very defined. Likewise, there is a Doublekalibrationsberichtkeit by the two independent control circuits with a capacitive or piezoelectric
  • the self-calibration can for
  • Temperature compensation and / or drift compensation can be used.
  • the interferometer 200 presented here can be produced inexpensively, since possibly only one cavity 304 is required, in comparison, for example, to a component having two electrostatic gaps.
  • FIG. 4 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • the interferometer 200 essentially corresponds to the interferometers in FIGS. 2 and 3.
  • the second mirror layer 302 of the second mirror element 206 is arranged directly on the substrate 300 and the second mirror element 206 is immovable.
  • the first mirror layer 302 of the first mirror element 202 is spaced from the second mirror layer 302 by a high layer thickness spacer layer 312.
  • the spring systems 308, 310 the first mirror layer 302 outside the first mirror element 202 is thinned out in sections 400.
  • the first spring system 308 and the second spring system 310 are included
  • the drive devices 100, 102 are arranged in the region of the spring systems 308, 310. Both drive devices 100, 102 are designed here as capacitive actuators. The first electrodes are thereby in the thinned portions of the first mirror layer 302
  • the second electrodes are disposed on the second mirror layer 302. Between the spring systems 308, 310, the first mirror layer is formed into a stop region for the stop elements 314.
  • the first drive device 100 moves the stopper area, the second spring system 310 and the first mirror element 202 between the rest position and the deflected position defined by the stop element 314.
  • the second drive device 102 moves the first mirror element 202 out of the rest position or the deflected position independently of the first drive device 100.
  • FIG. 4 shows a cross section through a Fabry-Perot interferometer 200, in the thinned membrane regions 400 as
  • FIG. 5 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • the interferometer 200 essentially corresponds to the interferometer shown in FIG. 4.
  • the spring systems 308, 310 are formed by spring perforations 306 as in FIG.
  • the interferometer 200 shown here has a third spring system 500.
  • the third spring system 500 is formed by spring perforations 306 through the second mirror layer 302.
  • the second mirror element 206 is also movable.
  • the third spring system 500 is disposed opposite to the second spring system 310, and the second electrodes of the second drive device 102 are disposed on the spring elements of the third spring system 500.
  • the third spring system 500 is thereby connected in parallel with the second spring system 310.
  • the second drive device 102 can thus move the first mirror element 202 and the second mirror element 206 towards each other.
  • a lower attractive force between the electrodes of the second drive means is required because the attractive force acts equally on the second spring system 310 and the third spring system 500.
  • the interferometer 200 is shown in a rest position without force effect by the drive devices 100, 102.
  • the interferometer 200 to a fourth spring system, which is arranged parallel to the first spring system 308 analogous to the third spring system 500.
  • FIG. 5 a Fabry-Perot interferometer 200 is shown in FIG.
  • FIG. 6 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • the interferometer 200 corresponds to the interferometer 200 in FIG. 5.
  • the interferometer 200 is approximately at maximum
  • the first spring system 108 is deflected so far by the first drive device 100 that the stop device 314 rests against the second mirror layer 302 in the deflected position.
  • the second spring system 310 and the third spring system 500 are through the second
  • Mirror element 206 is prevented by the anti-stick nubs 316.
  • FIG. 7 shows a plan view of drive devices 100, 102 according to one exemplary embodiment.
  • the drive devices 100, 102 essentially correspond to the drive devices in FIGS. 1 to 6.
  • the drive devices 100, 102 are arranged in series one behind the other.
  • the first drive device 100 is arranged on spring elements 700 of the first spring system 308.
  • the second drive device is arranged on spring elements 702 of the second spring system 310.
  • the first mirror element 202 is round.
  • the second spring system 310 encloses the first mirror element 202.
  • the stop area encloses the second spring system in an annular manner.
  • the spring elements 702 are bent in an S-shape and connect the mirror element 202 to the stop area. in the Stop area, the stops 314 are arranged.
  • the first spring system 308 encloses the stop area in an annular manner.
  • the spring elements 700 are bent in an S-shape opposite to the spring elements 702 and connect the abutment region with the surrounding mirror layer 3
  • FIG. 8 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • the interferometer 200 essentially corresponds to the previous representations.
  • the interferometer has a ridge 800 which connects the first mirror element 202 to the substrate 300.
  • the bridge 800 is flexible and brings about a deformation
  • the bridge 800 represents the first spring system 308.
  • the bridge 800 has electrical lines 802 for supplying the drive devices 100, 102.
  • annular electrode 804 which circulates around the first mirror element 202 in a circular manner.
  • the electrode 804 is annularly enclosed by the second spring system 310.
  • Spring system 310 bridges a gap 806 or a cavern between the first drive device 100 and the second drive device 102.
  • the first drive device 100 likewise has an annular electrode 808 which surrounds the second spring system 310 in a circular manner.
  • first mirror element 202 the unit of first mirror element 202, electrode 804, second spring system 310, and electrode 808 is scalloped.
  • FIG. 8 shows a detailed plan view of the suspension 800 of a Fabry-Perot interferometer 200 according to one embodiment.
  • one of the mirror elements 202 may be formed like a kelly. It has no restoring force and can be switched back and forth between two positions. This is particularly advantageous in the case of electrostatic actuation because smaller areas are sufficient.
  • this structure has the advantage that caused by external influences mechanical tensile stresses in the
  • Drift stability of the device 200 increases.
  • FIG. 9 shows a cross-sectional view of an interferometer 200 according to an exemplary embodiment.
  • two mirror layers 302 are through Distance layers 312 from the substrate 300 and spaced from each other.
  • the first mirror layer 302 is arranged between the second mirror layer 302 and the substrate 300.
  • the first mirror element 202 is suspended on a flexible web 800 in the form of a kelly and can be used as a
  • the 100 here has three electrodes.
  • An electrode is disposed on the substrate 300.
  • the other electrode is disposed on the second mirror layer 302.
  • the middle electrode 808 is disposed between the other two electrodes.
  • the middle electrode 808 may be in the direction of the second
  • the central electrode 808 is rigidly connected to the stopper 314.
  • the stop device 314 has a stop in the direction of the substrate 300 and a stop in the direction of the second
  • Stop device 3144 the first mirror element 202 on two defined deflected positions.
  • the first mirror element 202 is shown deflected in the direction of the second mirror layer 302.
  • the gap height 104 is low.
  • the second drive device 102 has two opposing electrodes. One of the electrodes is here coupled directly to the first mirror element 202 and disposed within the second spring system 310. The other electrode is disposed in the plane of the second mirror layer 302.
  • the interferometer 200 has a third spring system 500 integrated into the second mirror layer 302.
  • the third spring system 500 decouples the second mirror element 206 from the plane of the second mirror layer 302.
  • FIG. 10 shows a representation of an interferometer 200 according to a
  • the interferometer corresponds to the interferometer shown in FIG.
  • the first mirror element 202 is shown in the second deflected, defined position.
  • the gap height 104 is maximum.
  • FIGS. 3 to 10 primarily show exemplary embodiments with dual-capacitive or electrostatic actuators 100, 102.
  • the deflection of at least one of the mirror elements 202, 206 can be effected via the actuators 100, 102 both in the same direction, in the opposite direction or in both the same and the opposite direction. In this way, nonlinearities in the drive can be compensated.
  • the mirror elements 202, 206 can both be moved toward one another as well as moved away from one another. For example, this creates an overall larger tunable measuring range for capacitive driving by increasing the first electrostatic gap by 30% and additionally the second electrostatic gap by a further 30%.
  • this creates an overall larger tunable measuring range for capacitive driving by increasing the first electrostatic gap by 30% and additionally the second electrostatic gap by a further 30%.
  • Actuating mechanisms 100, 102 may be useful for the following reasons:
  • each actuation mechanism 100, 102 there is a corresponding spring system 308, 310 in at least one of the mirror elements 202, 206, so that the suspension, for example, with respect to a restoring force suitable for Aktuleitersmechanismus 100, 102 can be interpreted.
  • FIG. 11 shows a flow diagram of a method 1100 for operating an interferometer according to one exemplary embodiment.
  • the method 1100 includes a step 1102 of setting in which a gap width of a
  • Resonators palts the interferometer between a first mirror element of the Interferometer and a second mirror element of the interferometer using a first drive means and / or a second
  • FIG. 11 shows a flowchart of a method for
  • a first digital adjustment system is used to bring a first element or mirror element by discrete actuation in one of two or more defined positions
  • a second analogue adjustment system is used to change the distance between the mirror elements quasi-continuously
  • Spacers are used to define the discrete positions of the first mirror element.
  • the actuation mechanism may be piezoelectric, capacitive or thermal.
  • an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

L'invention concerne un interféromètre (200) comprenant un premier élément miroir (202) et un deuxième élément miroir (206) qui est distant du premier élément miroir (202) par une fente formant résonateur (204) réglable, l'interféromètre (200) présentant un premier dispositif d'entraînement (100) et un deuxième dispositif d'entraînement (102), le premier dispositif d'entraînement (100) étant conçu pour le réglage de la hauteur (104) de la fente formant résonateur (204), le premier dispositif d'entraînement (100) présentant une première zone de réglage (208), le deuxième dispositif d'entraînement (102) étant conçu également pour le réglage de la hauteur (104) de la fente, le deuxième dispositif d'entraînement (102) présentant une deuxième zone de réglage (210) en complément de la première zone de réglage (208).
PCT/EP2017/068769 2016-08-05 2017-07-25 Interféromètre et mode de fonctionnement WO2018024543A1 (fr)

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EP17745315.6A EP3494432A1 (fr) 2016-08-05 2017-07-25 Interféromètre et mode de fonctionnement
CN201780049013.XA CN109564344A (zh) 2016-08-05 2017-07-25 干涉仪和用于运行干涉仪的方法

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DE102016214565.7A DE102016214565A1 (de) 2016-08-05 2016-08-05 Interferometer und Verfahren zum Betreiben desselben
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WO2019201694A1 (fr) * 2018-04-17 2019-10-24 Robert Bosch Gmbh Interféromètre et procédé pour la fabrication d'un interféromètre
CN112534222A (zh) * 2018-07-31 2021-03-19 罗伯特·博世有限公司 光谱仪装置以及用于制造光谱仪装置的方法
US20220003534A1 (en) * 2018-11-26 2022-01-06 Robert Bosch Gmbh Interferometer Device and Method for Producing an Interferometer Device

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DE102018220451A1 (de) * 2018-11-28 2020-05-28 Robert Bosch Gmbh Optische Filtereinrichtung und Verfahren zum Herstellen einer optischen Filtereinrichtung
DE102019203932A1 (de) * 2019-03-22 2020-09-24 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019210707A1 (de) * 2019-07-19 2021-01-21 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung
DE102019212597A1 (de) * 2019-08-22 2021-02-25 Robert Bosch Gmbh Mikromechanische Interferometereinrichtung und Verfahren zum Herstellen einer mikromechanischen Interferometereinrichtung
DE102019215893A1 (de) * 2019-10-16 2021-04-22 Robert Bosch Gmbh Mikromechanisches Bauteil für eine optische Vorrichtung

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