WO2018007558A3 - Radiation dectector and production thereof - Google Patents
Radiation dectector and production thereof Download PDFInfo
- Publication number
- WO2018007558A3 WO2018007558A3 PCT/EP2017/067023 EP2017067023W WO2018007558A3 WO 2018007558 A3 WO2018007558 A3 WO 2018007558A3 EP 2017067023 W EP2017067023 W EP 2017067023W WO 2018007558 A3 WO2018007558 A3 WO 2018007558A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- substrate
- spacer
- distance
- portions
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title abstract 4
- 239000012528 membrane Substances 0.000 abstract 13
- 239000000758 substrate Substances 0.000 abstract 11
- 125000006850 spacer group Chemical group 0.000 abstract 9
- 241000237503 Pectinidae Species 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000007788 roughening Methods 0.000 abstract 1
- 235000020637 scallop Nutrition 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/0235—Spacers, e.g. for avoidance of stiction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Abstract
A radiation detector 1 comprises a substrate 2 and a membrane 3, and at least one spacer 4, for holding the membrane 3 at a distance from the substrate 2, for electrically contacting the membrane 3, and for thermally insulating the membrane 3 relative to the substrate 2. The at least one spacer 4 is subdivided into a first portion 4a and a second portion 4b in a direction between the substrate 2 and the membrane 3, the length of each of which bridges less than a distance between the substrate 2 and the membrane 3, wherein the first and second portions 4a, 4b are laterally offset relative to each other and interconnected by a lateral element 5, such that the first and second portions 4a, 4b are electrically connected in series by the lateral element 5, and wherein the lateral element 5 contributes to a thermal resistance of the at least one spacer 4 less than, or to the same extent as, a sum of the thermal resistances of the first and second portions 4a, 4b. Alternatively, the at least one spacer 14 can have an electrically and thermally conductive layer 8, which in a sectional area perpendicular to the substrate 2 extends in a loop through the at least one spacer 14, such that an electrical path through the at least one spacer 14, by way of which the membrane 3 is contacted, is longer than a distance between the substrate 2 and the membrane 3. Another possible alternative is for the radiation detector 1 to comprise a substrate 2 with a cavity and a membrane 3, wherein the cavity extends in the substrate 2 in a direction away from the membrane 3, wherein at least one spacer 4, 14 is designed for holding the membrane 3 at a distance from the substrate 2, for electrically contacting the membrane 3, and for thermally insulating the membrane 3 relative to the substrate 2, said at least one spacer 4, 14 extending into the cavity. Alternatively or additionally, the spacer 4, 14, 14n has a side wall roughening obtained by scallops, in order to reduce phonon transport by surface scattering effects and by the resulting path extension. The invention further relates to methods for producing radiation detectors 1 of this type.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016212423.4A DE102016212423B4 (en) | 2016-07-07 | 2016-07-07 | Radiation detector and manufacture |
| DE102016212423.4 | 2016-07-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2018007558A2 WO2018007558A2 (en) | 2018-01-11 |
| WO2018007558A3 true WO2018007558A3 (en) | 2018-05-11 |
Family
ID=59366406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2017/067023 WO2018007558A2 (en) | 2016-07-07 | 2017-07-06 | Radiation dectector and production thereof |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102016212423B4 (en) |
| WO (1) | WO2018007558A2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3087260B1 (en) * | 2018-10-12 | 2020-09-25 | Commissariat Energie Atomique | METHOD OF MANUFACTURING AN ELECTROMAGNETIC RADIATION DETECTION DEVICE CONTAINING A SUSPENDED DETECTION ELEMENT |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020179837A1 (en) * | 2001-06-01 | 2002-12-05 | Michael Ray | Advanced high speed, multi-level uncooled bolometer and method for fabricating same |
| FR2827707A1 (en) * | 2001-07-20 | 2003-01-24 | Fr De Detecteurs Infrarouges S | Bolometric detector production comprises use of sacrificial auxiliary layer to connect reading circuit to bolometric substrate of polycrystalline silicon to detect infrared radiation |
| CN2703328Y (en) * | 2003-12-31 | 2005-06-01 | 中国科学技术大学 | Optical-mechanical micro-beam array thermal infrared image sensor |
| US20090050808A1 (en) * | 2006-05-10 | 2009-02-26 | Murata Manufacturing Co., Ltd. | Infrared sensor and method for producing same |
| US20110198720A1 (en) * | 2008-10-23 | 2011-08-18 | Shigeru Tohyama | Thermal-type infrared solid-state imaging element |
| WO2016005505A2 (en) * | 2014-07-09 | 2016-01-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Radiation detector and method for manufacturing a radiation detector |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2877492B1 (en) | 2004-10-28 | 2006-12-08 | Commissariat Energie Atomique | BOLOMETRIC DETECTOR WITH THERMAL INSULATION BY CONSTRICTION AND INFRARED DETECTION DEVICE USING SUCH A BOLOMETRIC DETECTOR |
| US8900906B2 (en) | 2012-03-08 | 2014-12-02 | Robert Bosch Gmbh | Atomic layer deposition strengthening members and method of manufacture |
| US20130320481A1 (en) | 2012-06-01 | 2013-12-05 | Bridge Semiconductor Corporation | High Density Pyroelectric Thin Film Infrared Sensor Array and Method of Manufacture Thereof |
| US9257587B2 (en) | 2012-12-21 | 2016-02-09 | Robert Bosch Gmbh | Suspension and absorber structure for bolometer |
| DE102014213390A1 (en) * | 2014-07-09 | 2016-01-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device and method for producing a device with microstructures or nanostructures |
-
2016
- 2016-07-07 DE DE102016212423.4A patent/DE102016212423B4/en active Active
-
2017
- 2017-07-06 WO PCT/EP2017/067023 patent/WO2018007558A2/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020179837A1 (en) * | 2001-06-01 | 2002-12-05 | Michael Ray | Advanced high speed, multi-level uncooled bolometer and method for fabricating same |
| FR2827707A1 (en) * | 2001-07-20 | 2003-01-24 | Fr De Detecteurs Infrarouges S | Bolometric detector production comprises use of sacrificial auxiliary layer to connect reading circuit to bolometric substrate of polycrystalline silicon to detect infrared radiation |
| CN2703328Y (en) * | 2003-12-31 | 2005-06-01 | 中国科学技术大学 | Optical-mechanical micro-beam array thermal infrared image sensor |
| US20090050808A1 (en) * | 2006-05-10 | 2009-02-26 | Murata Manufacturing Co., Ltd. | Infrared sensor and method for producing same |
| US20110198720A1 (en) * | 2008-10-23 | 2011-08-18 | Shigeru Tohyama | Thermal-type infrared solid-state imaging element |
| WO2016005505A2 (en) * | 2014-07-09 | 2016-01-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Radiation detector and method for manufacturing a radiation detector |
Non-Patent Citations (1)
| Title |
|---|
| CHIENLIU CHANG ET AL: "Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures; Etching submicrometer trenches by using the Bosch process", JOURNAL OF MICROMECHANICS & MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 15, no. 3, 1 March 2005 (2005-03-01), pages 580 - 585, XP020091504, ISSN: 0960-1317, DOI: 10.1088/0960-1317/15/3/020 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102016212423A1 (en) | 2018-01-11 |
| DE102016212423B4 (en) | 2019-03-28 |
| WO2018007558A2 (en) | 2018-01-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| MX2015010760A (en) | Pane having a coating that reflects thermal radiation. | |
| WO2015039043A3 (en) | Microelectronic element with bond elements and compliant material layer | |
| GB2567363A (en) | Air gap spacer formation for nano-scale semiconductor devices | |
| MX2015006369A (en) | Disk comprising electric connecting element and connecting bridge. | |
| WO2010142880A3 (en) | Microstructure for a seebeck effect thermoelectric generator, and method for making such a microstructure | |
| WO2012050876A3 (en) | Nanowires for electrophysiological applications | |
| JP2015185741A5 (en) | ||
| WO2013007343A3 (en) | Measuring resistor having a protective frame | |
| MY177667A (en) | Pane with at least two electrical connection elements and a connecting conductor | |
| RU2015108744A (en) | DOOR WINDOW FOR VEHICLE, IN PARTICULAR FOR RAIL VEHICLE | |
| WO2014139666A8 (en) | Electronic sub-assembly, method for the production thereof and printed circuit board having an electronic sub-assembly | |
| WO2014053350A3 (en) | Pressure sensor comprising a cover layer | |
| TW201615066A (en) | Electronic package and method of manufacture | |
| PH12017501997A1 (en) | Lead carrier with print formed package components and conductive path redistribution structures | |
| JP2017506433A5 (en) | ||
| WO2018007558A3 (en) | Radiation dectector and production thereof | |
| MX2017013923A (en) | Wafer having an electric connection element and connecting element fitted thereto. | |
| WO2014165247A3 (en) | Capacitors comprising pores in an aluminium substrate | |
| WO2014162148A3 (en) | Sensor for detecting an analyte and process for producing same | |
| SE1751625A1 (en) | Assembling of molecules on a 2D material and an electronic device | |
| WO2018126256A3 (en) | Conductive structure | |
| AR107024A1 (en) | INSULATION EQUIPPED WITH AN ELECTRICITY DRIVING DEVICE THAT HAS AN IMPROVED RESISTANCE TO TEMPERATURE CYCLE ANALYSIS | |
| WO2011095286A3 (en) | Sensor arrangement | |
| WO2014029557A3 (en) | Sensor and method for determining a temperature | |
| ES2487590B1 (en) | Thermoelectric micro-generator based on through electrical contacts |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 17740685 Country of ref document: EP Kind code of ref document: A2 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 17740685 Country of ref document: EP Kind code of ref document: A2 |